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Cash, Cash Equivalents and Investments - Investment Category and Length (Details)
 12 Months Ended
Dec. 31, 2021
USD ($)
company
Dec. 31, 2020
USD ($)
company
Dec. 31, 2019
USD ($)
subsidiary
Summary of fair value and gross unrealized losses related to available-for-sale securities [Abstract]      
Fair value, in loss position less than twelve months $ 12,151,000 $ 2,048,000  
Gross unrealized (loss), in loss position less than twelve months (61,000) (2,000)  
Fair value, in loss position greater than twelve months 2,013,000    
Gross unrealized (loss), in loss position greater than twelve months (4,000)    
Fair value, total in loss position 14,164,000 2,048,000  
Gross unrealized (loss), total in loss position (65,000) (2,000)  
Minority Investments      
Investments, equity method $ 10,166,000 $ 6,376,000  
Number of equity method investments | company 5 5  
Impairment charge $ 0 $ 0  
Number of consolidated subsidiaries | subsidiary     1
One Gallium Company      
Minority Investments      
Impairment charge     $ 1,100,000
Certificates of Deposit [Member]      
Summary of fair value and gross unrealized losses related to available-for-sale securities [Abstract]      
Fair value, in loss position less than twelve months 6,181,000    
Gross unrealized (loss), in loss position less than twelve months (19,000)    
Fair value, total in loss position 6,181,000    
Gross unrealized (loss), total in loss position (19,000)    
Corporate Bonds [Member]      
Summary of fair value and gross unrealized losses related to available-for-sale securities [Abstract]      
Fair value, in loss position less than twelve months 5,970,000 2,048,000  
Gross unrealized (loss), in loss position less than twelve months (42,000) (2,000)  
Fair value, in loss position greater than twelve months 2,013,000    
Gross unrealized (loss), in loss position greater than twelve months (4,000)    
Fair value, total in loss position 7,983,000 2,048,000  
Gross unrealized (loss), total in loss position (46,000) (2,000)  
Other Assets [Member]      
Minority Investments      
Investments, equity method $ 10,200,000 $ 6,400,000