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Inventories (Details) - USD ($)
Dec. 31, 2021
Dec. 31, 2020
Inventories    
Raw materials $ 29,658,000 $ 24,738,000
Work in process 32,605,000 24,215,000
Finished goods 3,649,000 2,562,000
Inventories, Total 65,912,000 51,515,000
Inventory reserve 19,600,000 17,700,000
Excess and obsolete inventory $ 66,000 $ 162,000