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Subsequent Events (Details) - USD ($) $ in Thousands	1 Months Ended		12 Months Ended
	Jan. 31, 2022	Jan. 31, 2021	Dec. 31, 2021	Dec. 31, 2020	Nov. 30, 2021	Oct. 31, 2021	Sep. 30, 2021	Jun. 30, 2021	Sep. 30, 2020	Feb. 05, 2020	Aug. 09, 2019	Nov. 06, 2018
Subsequent Event
Increase in redeemable noncontrolling interests due to issuance of Tongmei's common stock			$ 1,514	$ 48,102
Wells Fargo Bank | Secured Debt
Subsequent Event
Maximum borrowing capacity										$ 7,000		$ 10,000
Beijing Tongmei Xtal Technology | Bank of Communications | Secured Debt
Subsequent Event
Maximum borrowing capacity					$ 1,600		$ 3,100
Interest rate							4.00%
Beijing Tongmei Xtal Technology | Bank Of China | Secured Debt
Subsequent Event
Maximum borrowing capacity									$ 3,100		$ 5,800
Interest rate							3.85%	4.70%
Subsequent Event [Member] | ChaoYang XinMei High Purity Semiconductor Materials Co., Ltd
Subsequent Event
Noncontrolling interest increased	$ 2,200
Increase in redeemable noncontrolling interests due to issuance of Tongmei's common stock	$ 200
Percentage of ownership, equity method	58.50%
Subsequent Event [Member] | Beijing Tongmei Xtal Technology | Bank of Communications | Secured Debt
Subsequent Event
Maximum borrowing capacity	$ 3,100
Interest rate	3.30%
Subsequent Event [Member] | Beijing Tongmei Xtal Technology | Bank Of China | Secured Debt
Subsequent Event
Maximum borrowing capacity	$ 4,400
Interest rate	4.55%
Beijing Tongmei Xtal Technology
Subsequent Event
Increase in redeemable noncontrolling interests due to issuance of Tongmei's common stock		$ 1,500		$ 48,100
Beijing Tongmei Xtal Technology | ChaoYang XinMei High Purity Semiconductor Materials Co., Ltd
Subsequent Event
Loan amount			$ 1,400
Beijing Tongmei Xtal Technology | ChaoYang XinMei High Purity Semiconductor Materials Co., Ltd | Subsequent Event [Member]
Subsequent Event
Loan amount	$ 1,400
Loan from related party | ChaoYang Xinshuo | ChaoYang XinMei High Purity Semiconductor Materials Co., Ltd
Subsequent Event
Loan amount						$ 1,000	$ 900

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