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Subsequent Event (Details) - USD ($) $ in Thousands | 1 Months Ended | 3 Months Ended
--- | --- | ---
Apr. 30, 2022 | Jan. 31, 2022 | Mar. 31, 2022 | Mar. 31, 2021
Subsequent Event |  |  |  |
Investment in subsidiary with noncontrolling interest |  |  | $ 206 | $ 576
Loan from related party | Beijing Tongmei Xtal Technology | ChaoYang XinMei High Purity Semiconductor Materials Co., Ltd |  |  |  |
Subsequent Event |  |  |  |
Increase in noncontrolling interest |  | $ 2,200 |  |
Increase in redeemable noncontrolling interests |  | $ 200 |  |
Percentage of ownership, equity method |  | 58.50% |  |
Subsequent Event | Loan from related party | ChaoYang XinMei High Purity Semiconductor Materials Co., Ltd |  |  |  |
Subsequent Event |  |  |  |
Investment in subsidiary with noncontrolling interest | $ 4,500 |  |  |
Increase in redeemable noncontrolling interests | 100 |  |  |
Subsequent Event | Loan from related party | Beijing Tongmei Xtal Technology | ChaoYang XinMei High Purity Semiconductor Materials Co., Ltd |  |  |  |
Subsequent Event |  |  |  |
Amount paid to subsidiary | 1,100 |  |  |
Investment in subsidiary with noncontrolling interest | 2,600 |  |  |
Increase in noncontrolling interest | $ 800 |  |  |
Percentage of ownership, equity method | 58.50% |  |  |
Subsequent Event | Loan from related party | ChaoYang Xinshuo | ChaoYang XinMei High Purity Semiconductor Materials Co., Ltd |  |  |  |
Subsequent Event |  |  |  |
Amount paid to subsidiary | $ 700 |  |  |
Investment in subsidiary with noncontrolling interest | $ 1,900 |  |  |

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