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Inventories (Details) - USD ($)
$ in Thousands
Mar. 31, 2022
Dec. 31, 2021
Inventories    
Raw materials $ 32,949 $ 29,658
Work in process 32,411 32,605
Finished goods 3,461 3,649
Inventories, Total 68,821 65,912
Inventory reserve 20,600 19,600
Excess and obsolete inventory $ 70,000 $ 66,000