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Inventories (Details) - USD ($) | Sep. 30, 2022 | Dec. 31, 2021
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Inventories |  |
Raw materials | $ 44,145,000 | $ 29,658,000
Work in process | 40,491,000 | 32,605,000
Finished goods | 3,860,000 | 3,649,000
Inventories, Total | 88,496,000 | 65,912,000
Inventory reserve | 23,000,000.0 | 19,600,000
Excess and obsolete inventory | $ 42,000 | $ 66,000

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