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Acquisition - Purchase Price Allocation (Details) - USD ($)
$ in Millions
Jun. 30, 2019
Jun. 24, 2018
Mar. 06, 2018
Business Combination, Recognized Identifiable Assets Acquired, Goodwill, and Liabilities Assumed, Less Noncontrolling Interest [Abstract]      
Goodwill $ 530.0 $ 530.0  
RF Power      
Business Combination, Recognized Identifiable Assets Acquired, Goodwill, and Liabilities Assumed, Less Noncontrolling Interest [Abstract]      
Inventories     $ 22.5
Property and equipment     11.7
Other receivables     0.4
Intangible assets     149.0
Goodwill     249.0
Accrued expenses and liabilities     (3.4)
Net assets acquired     $ 429.2