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Originator-Name: webmaster@www.sec.gov
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<SEC-DOCUMENT>0000950147-97-000802.txt : 19971117
<SEC-HEADER>0000950147-97-000802.hdr.sgml : 19971117
ACCESSION NUMBER:		0000950147-97-000802
CONFORMED SUBMISSION TYPE:	5
PUBLIC DOCUMENT COUNT:		1
CONFORMED PERIOD OF REPORT:	19971113
FILED AS OF DATE:		19971114
SROS:			NASD

SUBJECT COMPANY:	

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			AMTECH SYSTEMS INC
		CENTRAL INDEX KEY:			0000720500
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				860411215
		STATE OF INCORPORATION:			AZ
		FISCAL YEAR END:			0930

	FILING VALUES:
		FORM TYPE:		5
		SEC ACT:		
		SEC FILE NUMBER:	000-11412
		FILM NUMBER:		97719286

	BUSINESS ADDRESS:	
		STREET 1:		131 S CLARK DR
		CITY:			TEMPE
		STATE:			AZ
		ZIP:			85281
		BUSINESS PHONE:		602-967-51

	MAIL ADDRESS:	
		STREET 1:		131 SOUTH CLARK DRIVE
		CITY:			TEMPE
		STATE:			AZ
		ZIP:			85281

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	QUARTZ ENGINEERING & MATERIALS INC
		DATE OF NAME CHANGE:	19870715
<REPORTING-OWNER>

COMPANY DATA:	
	COMPANY CONFORMED NAME:			KATZ ALVIN L
	CENTRAL INDEX KEY:			0001049774
	STANDARD INDUSTRIAL CLASSIFICATION:	 []
<RELATIONSHIP>DIRECTOR

FILING VALUES:
	FORM TYPE:		5

BUSINESS ADDRESS:	
	STREET 1:		131 S CLARK DR
	CITY:			TEMPE
	STATE:			AZ
	ZIP:			85281

MAIL ADDRESS:	
	STREET 1:		131 S CLARK DR
	CITY:			TEMPE
	STATE:			AZ
	ZIP:			85281
</REPORTING-OWNER>
</SEC-HEADER>
<DOCUMENT>
<TYPE>5
<SEQUENCE>1
<DESCRIPTION>FORM 5
<TEXT>

                                                  ------------------------------
                                                           OMB APPROVAL
                                                  ------------------------------
                                                  OMB Number           3235-0362
                                                  Expires:        April 30, 1997
                                                  Estimated average burden
                                                  hours per response ....... 1.0
                                                  ------------------------------

                     U.S. SECURITIES AND EXCHANGE COMMISSION
                             Washington, D.C. 20549

                                     FORM 5

               ANNUAL STATEMENT OF CHANGES IN BENEFICIAL OWNERSHIP

    Filed pursuant to Section 16(a) of the Securities Exchange Act of 1934,
       Section 17(a) of the Public Utility Holding Company Act of 1935 or
               Section 30(f) of the Investment Company Act of 1940

[  ] Check this box if no longer subject of Section 16. Form 4 or Form 5
     obligations may continue. See Instruction 1(b).

[  ] Form 3 Holdings Reported

[XX] Form 4 Transactions Reported

================================================================================
1. Name and Address of Reporting Person

    KATZ,                ALVIN                    L.
- --------------------------------------------------------------------------------
   (Last)               (First)                 (Middle)

                            301 North Birch Road, #9N
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                                    (Street)

  Ft. Lauderdale,      Florida                   33304
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   (City)               (State)                 (Zip)



================================================================================
2. Issuer Name and Ticker or Trading Symbol

                          Amtech Systems, Inc., (ASYS)

================================================================================
3. IRS or Social Security Number of Reporting Person (Voluntary)


================================================================================
4. Statement for Month/Year

                                 November, 1997
================================================================================
5. If Amendment, Date of Original (Month/Year)


================================================================================
6. Relationship of Reporting Person to Issuer
   (Check all applicable)

   [ X ]   Director                             [   ]   10% Owner
   [   ]   Officer (give title below)           [   ]   Other (specify below)



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================================================================================
           Table I -- Non-Derivative Securities Acquired, Disposed of,
                             or Beneficially Owned
================================================================================
<TABLE>
<CAPTION>
                                                                                                 5.             6.
                                                                 4.                              Amount of      Owner-
                                                                 Security Acquired (A) or        Securities     ship      
                                                                 Disposed of (D)                 Beneficially   Form:     7.        
                                                                 (Instr. 3, 4 and 5)             Owned at End   Direct    Nature of 
                                      2.            3.           -----------------------------   of Issuer's    (D) or    Indirect  
1.                                    Transaction   Transaction                  (A)             Fiscal Year    Indirect  Beneficial
Title of Security                     Date          Code             Amount      or     Price    (Instr. 3      (I)       Ownership 
(Instr. 3)                            (mm/dd/yy)    (Instr. 8)                   (D)             & 4)           (Instr.4) (Instr. 4)
- ------------------------------------------------------------------------------------------------------------------------------------
<S>                                   <C>            <C>             <C>         <C>    <C>      <C>            <C>       <C>


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</TABLE>
Reminder: Report on a separate line for each class of securities beneficially
owned directly or indirectly


<PAGE>


FORM 5 (continued)

Table II -- Derivative Securities Acquired, Disposed of, or Beneficially Owned
         (e.g., puts, calls, warrants, options, convertible securities)

================================================================================
<TABLE>
<CAPTION>
                                                                                                          9.        10.    
                                                                                                          Number    Owner- 
                                                                                                          of        ship   
                    2.                                                                                    Deriv-    of     
                    Conver-                    5.                              7.                         ative     Deriv-   11.    
                    sion                       Number of                       Title and Amount           Secur-    ative    Nature 
                    or                         Derivative    6.                of Underlying     8.       ities     Secur-   of     
                    Exer-                      Securities    Date              Securities        Price    Bene-     ity:     In-    
                    cise     3.                Acquired (A)  Exercisable and   (Instr. 3 and 4)  of       ficially  Direct   direct 
                    Price    Trans-   4.       or Disposed   Expiration Date   ----------------  Deriv-   Owned     (D) or   Bene-  
1.                  of       action   Trans-   of (D)        (Month/Day/Year)            Amount  ative    at End    In-      ficial 
Title of            Deriv-   Date     action   (Instr. 3,    ----------------            or      Secur-   of        direct   Owner- 
Derivative          ative    (Month/  Code     4 and 5)      Date     Expira-            Number  ity      Year      (I)      ship   
Security            Secur-   Day/     (Instr.  ------------  Exer-    tion               of      (Instr.  (Instr.   (Instr.  (Instr.
(Instr. 3)          ity      Year)    8)        (A)   (D)    cisable  Date     Title     Shares  5)       4)        4)       4)
- ------------------------------------------------------------------------------------------------------------------------------------
<S>                 <C>      <C>      <C>       <C>   <C>    <C>      <C>      <C>       <C>     <C>      <C>       <C>      <C>
Stock Option        $2.24    5-1-95   A(1)      10,000       5-1-95   5-1-00   Common    10,000           10,000     D       N/A
                                                                               Stock 
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====================================================================================================================================
</TABLE>
Explanation of Responses:

(1)  Reflects  option grant to  reporting  person  exercisable  for up to 10,000
     shares of Common  Stock.  The option  vests at the rate of 2,000 shares per
     year.


/s/ Alvin L. Katz                                         November 13, 1997
- ---------------------------------------------            -----------------------
      **Signature of Reporting Person                             Date

**   Intentional misstatements or omissions of facts constitute Federal Criminal
     Violations.

     See 18 U.S.C. 1001 and 15 U.S.C. 78ff(a).

Note:  File three copies of this Form, one of which must be manually signed.
       If space provided is insufficient, see Instruction 6 for procedure.
</TEXT>
</DOCUMENT>
</SEC-DOCUMENT>
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