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Proc-Type: 2001,MIC-CLEAR
Originator-Name: webmaster@www.sec.gov
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<SEC-DOCUMENT>0000919574-01-000144.txt : 20010214
<SEC-HEADER>0000919574-01-000144.hdr.sgml : 20010214
ACCESSION NUMBER:		0000919574-01-000144
CONFORMED SUBMISSION TYPE:	SC 13G
PUBLIC DOCUMENT COUNT:		1
FILED AS OF DATE:		20010213

SUBJECT COMPANY:	

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			AMTECH SYSTEMS INC
		CENTRAL INDEX KEY:			0000720500
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				860411215
		STATE OF INCORPORATION:			AZ
		FISCAL YEAR END:			0930

	FILING VALUES:
		FORM TYPE:		SC 13G
		SEC ACT:		
		SEC FILE NUMBER:	005-39482
		FILM NUMBER:		1535426

	BUSINESS ADDRESS:	
		STREET 1:		131 S CLARK DR
		CITY:			TEMPE
		STATE:			AZ
		ZIP:			85281
		BUSINESS PHONE:		6029675146

	MAIL ADDRESS:	
		STREET 1:		131 SOUTH CLARK DRIVE
		CITY:			TEMPE
		STATE:			AZ
		ZIP:			85281

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	QUARTZ ENGINEERING & MATERIALS INC
		DATE OF NAME CHANGE:	19870715

FILED BY:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			SUSSMAN ROBERT MARK
		CENTRAL INDEX KEY:			0000923685
		STANDARD INDUSTRIAL CLASSIFICATION:	 []

	FILING VALUES:
		FORM TYPE:		SC 13G

	BUSINESS ADDRESS:	
		STREET 1:		BENTLEY CAPITAL MANAGEMENT
		STREET 2:		520 MADISON AVE 41ST FLOOR
		CITY:			NEW YORK
		STATE:			NY
		ZIP:			10004
		BUSINESS PHONE:		2125838888

	MAIL ADDRESS:	
		STREET 1:		BENTLEY CAPITAL MANAGEMENT
		STREET 2:		245 PARK AVENUE
		CITY:			NEW YORK
		STATE:			NY
		ZIP:			10167
</SEC-HEADER>
<DOCUMENT>
<TYPE>SC 13G
<SEQUENCE>1
<FILENAME>0001.txt
<TEXT>









UNITED STATES
SECURITIES AND EXCHANGE COMMISSION
Washington, D.C.  20549

SCHEDULE 13G
Under the Securities Exchange Act of 1934

Amendment No.:  *

Name of Issuer:  Amtech Systems, Inc.

Title of Class of Securities:  Common Stock

CUSIP Number:  032332504

  (Date of Event Which Requires Filing of this Statement)

                     December 31, 2000

Check the appropriate box to designate the rule pursuant to
which this Schedule is filed:

/ / Rule 13d-1(b)
/X/ Rule 13d-1(c)
/ / Rule 13d-1(d)

*The remainder of this cover page shall be filled out for a
reporting person's initial filing on this form with respect
to the subject class of securities, and for any subsequent
amendment containing information which would alter the
disclosures provided in a prior cover page.

The information required in the remainder of this cover page
shall not be deemed to be "filed" for the purpose of
Section 18 of the Securities Exchange Act of 1934 ("Act") or
otherwise subject to the liabilities of that section of the
Act but shall be subject to all other provisions of the Act
(however, see the Notes).





<PAGE>


CUSIP Number:  032332504

1.  Name of Reporting Person
    I.R.S. Identification No. of Above Person

         Robert Sussman

2.  Check the Appropriate Box if a Member of a Group
         a.
         b.

3.  SEC Use Only


4.  Citizenship or Place of Organization

         United States

Number of Shares Beneficially Owned by Each Reporting Person
With:

5.  Sole Voting Power:

         200,000

6.  Shared Voting Power:

         2,500

7.  Sole Dispositive Power:

         200,000

8.  Shared Dispositive Power:

         2,500

9.  Aggregate Amount Beneficially Owned by Each Reporting
Person

         202,500

10. Check Box if the Aggregate Amount in Row (9) Excludes
    Certain Shares







                            -2-





<PAGE>


11. Percent of Class Represented by Amount in Row (9)

          8.27%

12. Type of Reporting Person

          IN












































                            -3-





<PAGE>


Item 1(a) Name of Issuer:  Amtech Systems, Inc.

      (b) Address of Issuer's Principal Executive Offices:

          131 South Clark
          Tempe, Arizona 85281

Item 2(a) - (c).  Name, Principal Business Address, and
Citizenship of Persons Filing:

          Robert M. Sussman
          520 Madison Avenue
          41st Floor
          New York, New York  10022

          Robert M. Sussman - United States citizen

    (d)   Title of Class of Securities:  Common Stock (the
          "Common Stock")

    (e)   CUSIP Number:  032332504


Item 3.  If this statement is filed pursuant to Rule
13d-1(b)(1) or 13d-2(b) or (c) check whether the person
filing is:

    (a)  / / Broker or dealer registered under Section 15 of
             the Act,

    (b)  / / Bank as defined in Section 3(a)(6) of the Act,

    (c)  / / Insurance Company as defined in
             Section 3(a)(19) of the Act,

    (d)  / / Investment Company registered under Section 8
             of the Investment Company Act,

    (e)  / / Investment Adviser registered under Section 203
             of the Investment Advisers Act of 1940,

    (f)  / / Employee Benefit Plan, Pension Fund which is
             subject to the provisions of the Employee
             Retirement Income Security Act of 1974 or
             Endowment Fund,

    (g)  / / Parent Holding Company, in accordance with Rule
             13d-1(b)(ii)(G),



                            -4-





<PAGE>



    (h)  / / Savings association as defined in Section 3(b)
             of the Federal Deposit Insurance Act,

    (i)  / / Church plan excluded from the definition of an
             investment company under Section 3(c)(14) of
             the Investment Company Act,

    (j)  / / Group, in accordance with Rule 13d-
             1(b)(1)(ii)(H).

If this statement is filed pursuant to Rule 13d-1(c), check
this box.  /X/

 Item 4. Ownership.

             (a)   Amount Beneficially Owned: 202,500 shares

             (b)   Percent of Class:  8.27%

             (c)   200,000 shares with sole power to vote or
                   to direct the vote; 2,500 shares with
                   shared power to vote or to direct the
                   vote; 200,000 shares with sole power to
                   dispose of or to direct the disposition
                   of; 2,500 shares with shared power to
                   dispose of or to direct the disposition
                   of.

Item 5.  Ownership of Five Percent or Less of a Class.

         N/A

Item 6.  Ownership of More than Five Percent on Behalf of
Another Person.

         N/A

Item 7.  Identification and Classification of the Subsidiary
Which Acquired the Security Being Reported by the Parent
Holding Company.

         N/A

Item 8.  Identification and Classification of Members of the
Group.

         N/A



                            -5-





<PAGE>



Item 9.  Notice of Dissolution of the Group.

         N/A

Item 10.

    Certification for Rule 13d-1(c): By signing below I
certify that, to the best of my knowledge and belief, the
securities referred to above were not acquired and are not
held for the purpose of or with the effect of changing or
influencing the control of the issuer of the securities and
were not acquired and are not held in connection with or as
a participant in any transaction having that purpose or
effect.

         After reasonable inquiry and to the best of my
knowledge and belief, I certify that the information set
forth in this statement is true, complete and correct.





                             /s/ Robert M. Sussman
                             -----------------------
                             ROBERT M. SUSSMAN
January 17, 2001


___________________
Date



















                               -6-
00679001.AO4

</TEXT>
</DOCUMENT>
</SEC-DOCUMENT>
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