<DOCUMENT>
<TYPE>EX-23.1
<SEQUENCE>5
<FILENAME>ex23-1.txt
<DESCRIPTION>CONSENT OF KPMG LLP
<TEXT>
                                                                    EXHIBIT 23.1

                                 FORM OF CONSENT

AUDITOR'S CONSENT

The Board of Directors Amtech Systems:

We consent to the  incorporation by reference in the registration  statements on
Form S-8 of Amtech  Systems,  Inc. of our report dated  November 27, 2002,  with
respect  to the  consolidated  balance  sheet  of  Amtech  Systems,  Inc.  as of
September  30, 2002,  and the related  consolidated  statements  of  operations,
stockholders'  equity,  and cash flows for the year then ended,  and the related
financial  statement  schedule,  which report appears in the September 30, 2002,
annual report on Form 10-K of Amtech Systems, Inc.

                                        /s/ KPMG LLP

Phoenix, Arizona
February 7, 2003

</TEXT>
</DOCUMENT>
