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Proc-Type: 2001,MIC-CLEAR
Originator-Name: webmaster@www.sec.gov
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 TWSM7vrzLADbmYQaionwg5sDW3P6oaM5D3tdezXMm7z1T+B+twIDAQAB
MIC-Info: RSA-MD5,RSA,
 GWI3gqwyn1v6iWImyM5xuE9dZ1r8G9e+7U0Nv4oJ7UcwKazci52czRzOTRkuF9ic
 ENPArml6selqeuySHGXumA==

<SEC-DOCUMENT>0001206774-06-000131.txt : 20060130
<SEC-HEADER>0001206774-06-000131.hdr.sgml : 20060130
<ACCEPTANCE-DATETIME>20060130173813
ACCESSION NUMBER:		0001206774-06-000131
CONFORMED SUBMISSION TYPE:	3/A
PUBLIC DOCUMENT COUNT:		1
CONFORMED PERIOD OF REPORT:	20050708
FILED AS OF DATE:		20060130
DATE AS OF CHANGE:		20060130

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			Averick Robert M
		CENTRAL INDEX KEY:			0001343599

	FILING VALUES:
		FORM TYPE:		3/A
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-11412
		FILM NUMBER:		06563269

	BUSINESS ADDRESS:	
		BUSINESS PHONE:		203-602-2290 X 102

	MAIL ADDRESS:	
		STREET 1:		RICHARD L. SCOTT INVESTMENTS, LLC
		STREET 2:		100 FIRST STAMFORD PLACE
		CITY:			STAMFORD
		STATE:			CT
		ZIP:			06902

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			AMTECH SYSTEMS INC
		CENTRAL INDEX KEY:			0000720500
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				860411215
		STATE OF INCORPORATION:			AZ
		FISCAL YEAR END:			0930

	BUSINESS ADDRESS:	
		STREET 1:		131 S CLARK DR
		CITY:			TEMPE
		STATE:			AZ
		ZIP:			85281
		BUSINESS PHONE:		6029675146

	MAIL ADDRESS:	
		STREET 1:		131 SOUTH CLARK DRIVE
		CITY:			TEMPE
		STATE:			AZ
		ZIP:			85281

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	QUARTZ ENGINEERING & MATERIALS INC
		DATE OF NAME CHANGE:	19870715
</SEC-HEADER>
<DOCUMENT>
<TYPE>3/A
<SEQUENCE>1
<FILENAME>as120481_ex.xml
<TEXT>
<XML>
<?xml version="1.0"?>
<ownershipDocument>

    <schemaVersion>X0202</schemaVersion>

    <documentType>3/A</documentType>

    <periodOfReport>2005-07-08</periodOfReport>

    <dateOfOriginalSubmission>2005-11-07</dateOfOriginalSubmission>

    <noSecuritiesOwned>0</noSecuritiesOwned>

    <issuer>
        <issuerCik>0000720500</issuerCik>
        <issuerName>AMTECH SYSTEMS INC</issuerName>
        <issuerTradingSymbol>ASYS</issuerTradingSymbol>
    </issuer>

    <reportingOwner>
        <reportingOwnerId>
            <rptOwnerCik>0001343599</rptOwnerCik>
            <rptOwnerName>Averick Robert M</rptOwnerName>
        </reportingOwnerId>
        <reportingOwnerAddress>
            <rptOwnerStreet1>RICHARD L. SCOTT INVESTMENTS, LLC</rptOwnerStreet1>
            <rptOwnerStreet2>100 FIRST STAMFORD PLACE</rptOwnerStreet2>
            <rptOwnerCity>STAMFORD</rptOwnerCity>
            <rptOwnerState>CT</rptOwnerState>
            <rptOwnerZipCode>06902</rptOwnerZipCode>
            <rptOwnerStateDescription></rptOwnerStateDescription>
        </reportingOwnerAddress>
        <reportingOwnerRelationship>
            <isDirector>1</isDirector>
            <isOfficer>0</isOfficer>
            <isTenPercentOwner>0</isTenPercentOwner>
            <isOther>0</isOther>
        </reportingOwnerRelationship>
    </reportingOwner>

    <derivativeTable>
        <derivativeHolding>
            <securityTitle>
                <value>Series A Convertible Preferred Stock</value>
            </securityTitle>
            <conversionOrExercisePrice>
                <footnoteId id="F2"/>
            </conversionOrExercisePrice>
            <exerciseDate>
                <value>2005-04-22</value>
            </exerciseDate>
            <expirationDate>
                <footnoteId id="F1"/>
            </expirationDate>
            <underlyingSecurity>
                <underlyingSecurityTitle>
                    <value>Common Stock, par value $.01 per share</value>
                </underlyingSecurityTitle>
                <underlyingSecurityShares>
                    <value>10000</value>
                </underlyingSecurityShares>
            </underlyingSecurity>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>I</value>
                </directOrIndirectOwnership>
                <natureOfOwnership>
                    <value>By Amtech Investments LLC</value>
                </natureOfOwnership>
            </ownershipNature>
        </derivativeHolding>
    </derivativeTable>

    <footnotes>
        <footnote id="F1">None</footnote>
        <footnote id="F2">The reporting person owns a 3.2% interest in Amtech Investments, LLC, which owns 312,500 shares of Series A Convertible
Preferred Stock that is convertible into 312,500 shares of common stock, par value $.01 per share, of Amtech Systems, Inc.</footnote>
    </footnotes>

    <ownerSignature>
        <signatureName>/s/ Robert T. Hass on behalf of Robert M. Averick</signatureName>
        <signatureDate>2006-01-27</signatureDate>
    </ownerSignature>
</ownershipDocument>
</XML>
</TEXT>
</DOCUMENT>
</SEC-DOCUMENT>
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