<DOCUMENT>
<TYPE>EX-24
<SEQUENCE>2
<FILENAME>firestone-power_ofattorney.txt
<DESCRIPTION>POWER OF ATTORNEY
<TEXT>
                            POWER OF ATTORNEY

Know all by these presents, that the undersigned hereby constitutes and
appoints Robert T. Hass, the undersigned's true and lawful attorney-in-
fact, with full power and authority as hereinafter described on behalf of
and in the name, place and stead of the undersigned to:

 1. execute for and on behalf of the undersigned, in the undersigned's
capacity as an officer and/or director of Amtech Systems, Inc., an Arizona
corporation (the "Company"), Forms 3, 4, and 5 in accordance with Section
16(a) of the Securities Exchange Act of 1934 and the rules thereunder;

 2. do and perform any and all acts for and on behalf of the undersigned
that may be necessary or desirable to complete and execute any such Form 3,
4, or 5, complete and execute any amendment or amendments thereto, and
timely file such form with the United States Securities and Exchange
Commission and any stock exchange or similar authority; and

 3. take any other action of any type whatsoever in connection with the
foregoing which, in the opinion of such attorney-in-fact, may be of benefit
to, in the best interest of, or legally required by, the undersigned, it
being understood that the documents executed by such attorney-in-fact on
behalf of the undersigned pursuant to this Power of Attorney shall be in
such form and shall contain such terms and conditions as such attorney-in-
fact may approve in such attorney-in-fact's discretion.

The undersigned hereby grants to attorney-in-fact full power and authority
to do and perform any and every act and thing whatsoever requisite,
necessary, or proper to be done in the exercise of any of the rights and
powers herein granted, as fully to all intents and purposes as the
undersigned might or could do if personally present, with full power of
substitution or revocation, hereby ratifying and confirming all that such
attorney-in-fact, or such attorney-in-fact's substitute or substitutes,
shall lawfully do or cause to be done by virtue of this power of attorney
and the rights and powers herein granted. The undersigned acknowledges that
the foregoing attorney-in-fact, in serving in such capacity at the request
of the undersigned, is not assuming, nor is the Company assuming, any of
the undersigned's responsibilities to comply with Section 16 of the
Securities Exchange Act of 1934.

This Power of Attorney shall remain in full force and effect until the
undersigned is no longer required to file Forms 3, 4, and 5 with respect to
the undersigned's holdings of and transactions in securities issued by the
Company, unless earlier revoked by the undersigned in a signed writing
delivered to the foregoing attorney-in-fact.

IN WITNESS WHEREOF, the undersigned has caused this Power of Attorney to be
executed as of this 2rd day of November, 2005.

Signature: /s/ Larry D. Firestone


STATE OF COLORADO        )
                         )  SS.
COUNTY OF BOULDER        )

On November 2, 2005, before me, /s/ Kristy L. Hawkins, a Notary Public,
personally appeared Larry D. Firestone, personally known to me (or proved
to me on the basis of satisfactory evidence) to be the person whose name is
subscribed to the within instrument and acknowledged to me that he/she
executed the same in his/her authorized capacity, and that by his/her
signature on the instrument the person, or the entity upon behalf of which
the person acted, executed the instrument.

WITNESS my hand and official seal.
/s/ Kristy L. Hawkins
Notary Public

NOTORARY SEAL


</TEXT>
</DOCUMENT>
