-----BEGIN PRIVACY-ENHANCED MESSAGE-----
Proc-Type: 2001,MIC-CLEAR
Originator-Name: webmaster@www.sec.gov
Originator-Key-Asymmetric:
 MFgwCgYEVQgBAQICAf8DSgAwRwJAW2sNKK9AVtBzYZmr6aGjlWyK3XmZv3dTINen
 TWSM7vrzLADbmYQaionwg5sDW3P6oaM5D3tdezXMm7z1T+B+twIDAQAB
MIC-Info: RSA-MD5,RSA,
 JcqZ19FEhRJohZBuFrudM6FfcrzP/Ow+rtVpPP9o8QsVUZ64yqFX0xaComi1jjYL
 i+v6Rd1QdjoFU1iuAhGm/A==

<SEC-DOCUMENT>0001266457-10-000001.txt : 20100316
<SEC-HEADER>0001266457-10-000001.hdr.sgml : 20100316
<ACCEPTANCE-DATETIME>20100316195132
ACCESSION NUMBER:		0001266457-10-000001
CONFORMED SUBMISSION TYPE:	3
PUBLIC DOCUMENT COUNT:		1
CONFORMED PERIOD OF REPORT:	20100311
FILED AS OF DATE:		20100316
DATE AS OF CHANGE:		20100316

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			Pentinga Fokko
		CENTRAL INDEX KEY:			0001487044

	FILING VALUES:
		FORM TYPE:		3
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-11412
		FILM NUMBER:		10687162

	MAIL ADDRESS:	
		STREET 1:		TEMPRESS SYSTEMS, B.V.
		STREET 2:		RADEWEG 31
		CITY:			VAASSEN
		STATE:			P7
		ZIP:			8171 MD

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			AMTECH SYSTEMS INC
		CENTRAL INDEX KEY:			0000720500
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				860411215
		STATE OF INCORPORATION:			AZ
		FISCAL YEAR END:			0930

	BUSINESS ADDRESS:	
		STREET 1:		131 S CLARK DR
		CITY:			TEMPE
		STATE:			AZ
		ZIP:			85281
		BUSINESS PHONE:		6029675146

	MAIL ADDRESS:	
		STREET 1:		131 SOUTH CLARK DRIVE
		CITY:			TEMPE
		STATE:			AZ
		ZIP:			85281

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	QUARTZ ENGINEERING & MATERIALS INC
		DATE OF NAME CHANGE:	19870715
</SEC-HEADER>
<DOCUMENT>
<TYPE>3
<SEQUENCE>1
<FILENAME>primary_doc.xml
<DESCRIPTION>PRIMARY DOCUMENT
<TEXT>
<XML>
<?xml version="1.0"?>
<ownershipDocument>

    <schemaVersion>X0203</schemaVersion>

    <documentType>3</documentType>

    <periodOfReport>2010-03-11</periodOfReport>

    <noSecuritiesOwned>0</noSecuritiesOwned>

    <issuer>
        <issuerCik>0000720500</issuerCik>
        <issuerName>AMTECH SYSTEMS INC</issuerName>
        <issuerTradingSymbol>ASYS</issuerTradingSymbol>
    </issuer>

    <reportingOwner>
        <reportingOwnerId>
            <rptOwnerCik>0001487044</rptOwnerCik>
            <rptOwnerName>Pentinga Fokko</rptOwnerName>
        </reportingOwnerId>
        <reportingOwnerAddress>
            <rptOwnerStreet1>TEMPRESS SYSTEMS, B.V.</rptOwnerStreet1>
            <rptOwnerStreet2>RADEWEG 31</rptOwnerStreet2>
            <rptOwnerCity>VAASSEN</rptOwnerCity>
            <rptOwnerState>P7</rptOwnerState>
            <rptOwnerZipCode>8171 MD</rptOwnerZipCode>
            <rptOwnerStateDescription>NETHERLANDS</rptOwnerStateDescription>
        </reportingOwnerAddress>
        <reportingOwnerRelationship>
            <isDirector>0</isDirector>
            <isOfficer>1</isOfficer>
            <isTenPercentOwner>0</isTenPercentOwner>
            <isOther>0</isOther>
            <officerTitle>President</officerTitle>
        </reportingOwnerRelationship>
    </reportingOwner>

    <nonDerivativeTable>
        <nonDerivativeHolding>
            <securityTitle>
                <value>Amtech Systems, Inc. $.01 par value common stock</value>
            </securityTitle>
            <postTransactionAmounts>
                <sharesOwnedFollowingTransaction>
                    <value>16500</value>
                    <footnoteId id="F1"/>
                </sharesOwnedFollowingTransaction>
            </postTransactionAmounts>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>D</value>
                </directOrIndirectOwnership>
            </ownershipNature>
        </nonDerivativeHolding>
    </nonDerivativeTable>

    <derivativeTable>
        <derivativeHolding>
            <securityTitle>
                <value>Amtech Systems, Inc. Employee Stock Option</value>
            </securityTitle>
            <conversionOrExercisePrice>
                <value>6.9</value>
            </conversionOrExercisePrice>
            <exerciseDate>
                <value>2007-12-08</value>
                <footnoteId id="F2"/>
            </exerciseDate>
            <expirationDate>
                <value>2016-12-08</value>
            </expirationDate>
            <underlyingSecurity>
                <underlyingSecurityTitle>
                    <value>Amtech Systems, Inc. $.01 par value common stock</value>
                </underlyingSecurityTitle>
                <underlyingSecurityShares>
                    <value>7500</value>
                </underlyingSecurityShares>
            </underlyingSecurity>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>D</value>
                </directOrIndirectOwnership>
            </ownershipNature>
        </derivativeHolding>
        <derivativeHolding>
            <securityTitle>
                <value>Amtech Systems, Inc. Employee Stock Option</value>
            </securityTitle>
            <conversionOrExercisePrice>
                <value>7</value>
            </conversionOrExercisePrice>
            <exerciseDate>
                <value>2008-01-30</value>
            </exerciseDate>
            <expirationDate>
                <value>2017-01-30</value>
            </expirationDate>
            <underlyingSecurity>
                <underlyingSecurityTitle>
                    <value>Amtech Systems, Inc. $.01 par value common stock</value>
                </underlyingSecurityTitle>
                <underlyingSecurityShares>
                    <value>250</value>
                </underlyingSecurityShares>
            </underlyingSecurity>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>D</value>
                </directOrIndirectOwnership>
            </ownershipNature>
        </derivativeHolding>
        <derivativeHolding>
            <securityTitle>
                <value>Amtech Systems, Inc. Employee Stock Option</value>
            </securityTitle>
            <conversionOrExercisePrice>
                <value>14.79</value>
            </conversionOrExercisePrice>
            <exerciseDate>
                <value>2008-12-06</value>
                <footnoteId id="F2"/>
            </exerciseDate>
            <expirationDate>
                <value>2017-12-06</value>
            </expirationDate>
            <underlyingSecurity>
                <underlyingSecurityTitle>
                    <value>Amtech Systems, Inc. $.01 par value common stock</value>
                </underlyingSecurityTitle>
                <underlyingSecurityShares>
                    <value>12500</value>
                </underlyingSecurityShares>
            </underlyingSecurity>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>D</value>
                </directOrIndirectOwnership>
            </ownershipNature>
        </derivativeHolding>
        <derivativeHolding>
            <securityTitle>
                <value>Amtech Systems, Inc. Employee Stock Option</value>
            </securityTitle>
            <conversionOrExercisePrice>
                <value>3.8</value>
            </conversionOrExercisePrice>
            <exerciseDate>
                <value>2009-12-09</value>
                <footnoteId id="F2"/>
            </exerciseDate>
            <expirationDate>
                <value>2018-12-09</value>
            </expirationDate>
            <underlyingSecurity>
                <underlyingSecurityTitle>
                    <value>Amtech Systems, Inc. $.01 par value common stock</value>
                </underlyingSecurityTitle>
                <underlyingSecurityShares>
                    <value>25000</value>
                </underlyingSecurityShares>
            </underlyingSecurity>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>D</value>
                </directOrIndirectOwnership>
            </ownershipNature>
        </derivativeHolding>
        <derivativeHolding>
            <securityTitle>
                <value>Amtech Systems, Inc. Employee Stock Option</value>
            </securityTitle>
            <conversionOrExercisePrice>
                <value>5.2</value>
            </conversionOrExercisePrice>
            <exerciseDate>
                <value>2009-12-04</value>
            </exerciseDate>
            <expirationDate>
                <value>2019-12-15</value>
            </expirationDate>
            <underlyingSecurity>
                <underlyingSecurityTitle>
                    <value>Amtech Systems, Inc. $.01 par value common stock</value>
                </underlyingSecurityTitle>
                <underlyingSecurityShares>
                    <value>15000</value>
                </underlyingSecurityShares>
            </underlyingSecurity>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>D</value>
                </directOrIndirectOwnership>
            </ownershipNature>
        </derivativeHolding>
        <derivativeHolding>
            <securityTitle>
                <value>Amtech Systems, Inc. Employee Stock Option</value>
            </securityTitle>
            <conversionOrExercisePrice>
                <value>6.15</value>
            </conversionOrExercisePrice>
            <exerciseDate>
                <value>2010-11-20</value>
                <footnoteId id="F2"/>
            </exerciseDate>
            <expirationDate>
                <value>2019-11-20</value>
            </expirationDate>
            <underlyingSecurity>
                <underlyingSecurityTitle>
                    <value>Amtech Systems, Inc. $.01 par value common stock</value>
                </underlyingSecurityTitle>
                <underlyingSecurityShares>
                    <value>10000</value>
                </underlyingSecurityShares>
            </underlyingSecurity>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>D</value>
                </directOrIndirectOwnership>
            </ownershipNature>
        </derivativeHolding>
    </derivativeTable>

    <footnotes>
        <footnote id="F1">Includes 11,875 shares unvested restricted stock that will vest in varying amounts and various dates through November 20, 2013.</footnote>
        <footnote id="F2">The first date on which any of the options become exercisable.  One-fourth of the stock option granted vest on the first date options become exercisable and on each of next three anniversaries thereof.</footnote>
    </footnotes>

    <ownerSignature>
        <signatureName>/s/ Robert T. Hass on behalf of Fokko Pentinga</signatureName>
        <signatureDate>2010-03-16</signatureDate>
    </ownerSignature>
</ownershipDocument>
</XML>
</TEXT>
</DOCUMENT>
</SEC-DOCUMENT>
-----END PRIVACY-ENHANCED MESSAGE-----
