# Filing Detail

Form 10-K - Annual report [Section 13 and 15(d), not S-K Item 405]:
SEC Accession No. 0000720500-11-000030
Filing Date
2011-11-17
Accepted
2011-11-17 16:31:38
Documents
16
Period of Report
2011-09-30

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | ANNUAL REPORT | asys-9302011x10k.htm | 10-K | 1772522
2 | SPA AMENDMENT | asy-ex1016x9302011.htm | EX-10.16 | 45851
3 | SUBSIDIARIES OF THE REGISTRANT | asys-ex211x9302011.htm | EX-21.1 | 27313
4 | CONSENT OF INDEPENDENT REGISTERED ACCOUNTANTS | asys-ex231x9302011.htm | EX-23.1 | 4697
5 | POWER OF ATTORNEY | asys-ex241x9302011.htm | EX-24.1 | 35964
6 | CERTIFICATION | asys-ex311x9302011.htm | EX-31.1 | 16509
7 | CERTIFICATION | asys-ex312x9302011.htm | EX-31.2 | 16333
8 | CERTIFICATION | asys-ex321x9302011.htm | EX-32.1 | 7863
9 | CERTIFICATION | asys-ex322x9302011.htm | EX-32.2 | 8454
16 |  | stockperformancejpeg.jpg | GRAPHIC | 52848
| Complete submission text file | 0000720500-11-000030.txt |  | 5768333

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
10 | XBRL INSTANCE DOCUMENT | asys-20110930.xml | EX-101.INS | 870190
11 | XBRL TAXONOMY EXTENSION SCHEMA DOCUMENT | asys-20110930.xsd | EX-101.SCH | 13831
12 | XBRL TAXONOMY EXTENSION CALCULATION LINKBASE DOCUMENT | asys-20110930_cal.xml | EX-101.CAL | 49160
13 | XBRL TAXONOMY EXTENSION DEFINITION LINKBASE DOCUMENT | asys-20110930_def.xml | EX-101.DEF | 99186
14 | XBRL TAXONOMY EXTENSION LABEL LINKBASE DOCUMENT | asys-20110930_lab.xml | EX-101.LAB | 230519
15 | XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE DOCUMENT | asys-20110930_pre.xml | EX-101.PRE | 123260

Mailing Address 131 SOUTH CLARK DRIVE TEMPE AZ 85281
Business Address 131 S CLARK DR TEMPE AZ 85281 6029675146
AMTECH SYSTEMS INC (Filer) CIK: 0000720500 (see all company filings)

EIN.: 860411215 | State of Incorp.: AZ | Fiscal Year End: 0930
Type: 10-K | Act: 34 | File No.: 000-11412 | Film No.: 111213343
SIC: 3559 Special Industry Machinery, NEC