# Filing Detail

Form 10-K - Annual report [Section 13 and 15(d), not S-K Item 405]:
SEC Accession No. 0000720500-12-000031
Filing Date
2012-12-07
Accepted
2012-12-06 20:12:39
Documents
15
Period of Report
2012-09-30

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | 10-K | asys-9302012x10k.htm | 10-K | 1727559
2 | SUBSIDIARIES OF THE REGISTRANT | asys-ex211x9302012.htm | EX-21.1 | 28829
3 | CONSENT OF INDEPENDENT REGISTERED ACCOUNTANTS | asys-ex231x9302012.htm | EX-23.1 | 4687
4 | POWER OF ATTORNEY | asys-ex241x9302012.htm | EX-24.1 | 36846
5 | CERTIFICATION | asys-ex311x9302012.htm | EX-31.1 | 16381
6 | CERTIFICATION | asys-ex312x9302012.htm | EX-31.2 | 16202
7 | CERTIFICATION | asys-ex321x9302012.htm | EX-32.1 | 7843
8 | CERTIFICATION | asys-ex322x9302012.htm | EX-32.2 | 8431
15 | STOCK CHART | stockchart.jpg | GRAPHIC | 61407
| Complete submission text file | 0000720500-12-000031.txt |  | 11259957

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
9 | XBRL INSTANCE DOCUMENT | asys-20120930.xml | EX-101.INS | 1858987
10 | XBRL TAXONOMY EXTENSION SCHEMA DOCUMENT | asys-20120930.xsd | EX-101.SCH | 54834
11 | XBRL TAXONOMY EXTENSION CALCULATION LINKBASE DOCUMENT | asys-20120930_cal.xml | EX-101.CAL | 89769
12 | XBRL TAXONOMY EXTENSION DEFINITION LINKBASE DOCUMENT | asys-20120930_def.xml | EX-101.DEF | 230377
13 | XBRL TAXONOMY EXTENSION LABEL LINKBASE DOCUMENT | asys-20120930_lab.xml | EX-101.LAB | 771644
14 | XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE DOCUMENT | asys-20120930_pre.xml | EX-101.PRE | 453511

Mailing Address 131 SOUTH CLARK DRIVE TEMPE AZ 85281
Business Address 131 S CLARK DR TEMPE AZ 85281 6029675146
AMTECH SYSTEMS INC (Filer) CIK: 0000720500 (see all company filings)

EIN.: 860411215 | State of Incorp.: AZ | Fiscal Year End: 0930
Type: 10-K | Act: 34 | File No.: 000-11412 | Film No.: 121247904
SIC: 3559 Special Industry Machinery, NEC