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Earnings Per Share (Tables) | 12 Months Ended
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Sep. 30, 2013
Earnings Per Share [Abstract] |
Schedule of Earnings Per Share, Basic and Diluted |
| 2013 |  | 2012 |  | 2011
| (dollars in thousands, except per share amounts)
Basic Earnings Per Share Computation |  |
Net income (loss) attributable to Amtech Systems, Inc. | $ | (20,069 | ) |  | $ | (23,031 | ) |  | $ | 22,882 |
Weighted Average Shares Outstanding: |  |  |  |  |
Common stock | 9,529 |  |  | 9,471 |  |  | 9,480 |
Basic earnings (loss) per share attributable to Amtech shareholders | $ | (2.11 | ) |  | $ | (2.43 | ) |  | $ | 2.41 |
Diluted Earnings Per Share Computation |  |  |  |  |
Net income (loss) attributable to Amtech Systems, Inc. | $ | (20,069 | ) |  | $ | (23,031 | ) |  | $ | 22,882 |
Weighted Average Shares Outstanding: |  |  |  |  |
Common stock | 9,529 |  |  | 9,471 |  |  | 9,480 |
Common stock equivalents (1) | — |  |  | — |  |  | 284 |
Diluted shares | 9,529 |  |  | 9,471 |  |  | 9,764 |
Diluted earnings (loss) per share attributable to Amtech shareholders | $ | (2.11 | ) |  | $ | (2.43 | ) |  | $ | 2.34 |
(1) The number of common stock equivalents is calculated using the treasury stock method and the average market price during the period.

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- Definition Tabular disclosure of an entity's basic and diluted earnings per share calculations. + References No definition available. + Details
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