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Selected Quarterly Data (unaudited) (Details) (USD $) In Thousands, except Per Share data, unless otherwise specified | 3 Months Ended | 12 Months Ended
--- | --- | ---
Sep. 30, 2013 | Jun. 30, 2013 | Mar. 31, 2013 | Dec. 31, 2012 | Sep. 30, 2012 | Jun. 30, 2012 | Mar. 31, 2012 | Dec. 31, 2011 | Sep. 30, 2013 | Sep. 30, 2012 | Sep. 30, 2011
Selected Quarterly Data (Unaudited) [Abstract] |  |  |  |  |  |  |  |  |  |  |
Revenue | $ 6,925 | $ 10,398 | $ 8,118 | $ 9,357 | $ 10,945 | $ 24,300 | $ 21,566 | $ 24,728 | $ 34,798 | $ 81,539 | $ 246,705
Gross margin | 3,159 | (2,677) | 2,453 | 1,378 | (6,860) | 4,804 | 4,048 | 7,201 | 4,313 | 9,193 | 90,657
Provision for income taxes | 580 | 2,560 | (800) | (480) | (3,670) | (1,110) | (220) | (320) | 1,860 | (5,320) | 16,190
Net loss attributable to Amtech Systems, Inc. | (1,682) | (12,101) | (2,092) | (4,194) | (14,111) | (2,965) | (5,079) | (876) | (20,069) | (23,031) | 22,882
Comprehensive loss attributable to Amtech Systems, Inc. | $ (75) | $ (11,387) | $ (3,555) | $ (2,791) | $ (13,470) | $ (6,816) | $ (2,877) | $ (4,607) | $ (19,482) | $ (32,451) | $ 20,983
Basic (dollars per share) | $ (0.18) | $ (1.27) | $ (0.22) | $ (0.44) | $ (1.49) | $ (0.31) | $ (0.54) | $ (0.09) | $ (2.11) | $ (2.43) | $ 2.41
Shares used in calculation | 9,543 | 9,539 | 9,539 | 9,494 | 9,482 | 9,479 | 9,479 | 9,446 | 9,529 | 9,471 | 9,480
Diluted (dollars per share) | $ (0.18) | $ (1.27) | $ (0.22) | $ (0.44) | $ (1.49) | $ (0.31) | $ (0.54) | $ (0.09) | $ (2.11) | $ (2.43) | $ 2.34
Shares used in calculation | 9,543 | 9,539 | 9,539 | 9,494 | 9,482 | 9,479 | 9,479 | 9,446 | 9,529 | 9,471 | 9,764

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