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Summary of Significant Accounting Policies (Goodwill) (Details) (USD $)
In Thousands, unless otherwise specified
 12 Months Ended
Sep. 30, 2013
Goodwill [Roll Forward]  
Goodwill, gross, beginning of year $ 13,090
Goodwill, gross, end of year 13,291
Goodwill, accumulated impairment loss, beginning of year (4,735)
Goodwill, accumulated impairment loss, end of year (4,810)
Goodwill, net, beginning of year 8,355
Goodwill, net, end of year 8,481
Exchange differences, net 126
Solar And Semiconductor Equipment
  
Goodwill [Roll Forward]  
Goodwill, gross, beginning of year 12,362
Goodwill, gross, end of year 12,563
Goodwill, accumulated impairment loss, beginning of year (4,735)
Goodwill, accumulated impairment loss, end of year (4,810)
Goodwill, net, beginning of year 7,627
Goodwill, net, end of year 7,753
Exchange differences, net 126
Polishing Supplies And Equipment
  
Goodwill [Roll Forward]  
Goodwill, gross, beginning of year 728
Goodwill, gross, end of year 728
Goodwill, accumulated impairment loss, beginning of year 0
Goodwill, accumulated impairment loss, end of year 0
Goodwill, net, beginning of year 728
Goodwill, net, end of year 728
Exchange differences, net $ 0