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Business Segment Information (Details) (USD $) In Thousands, unless otherwise specified | 3 Months Ended | 6 Months Ended |  |
--- | --- | --- | --- | ---
Mar. 31, 2013 | Mar. 31, 2012 | Mar. 31, 2013 | Mar. 31, 2012 | Sep. 30, 2012 | Sep. 30, 2011
Segment Reporting Information [Line Items] |  |  |  |  |  |
Net Revenues: | $ 8,118 | $ 21,566 | $ 17,475 | $ 46,294 |  |
Operating Income (Loss): | (3,461) | (5,985) | (8,212) | (7,829) |  |
Identifiable Assets | 114,818 |  | 114,818 |  | 129,022 |
Goodwill | 8,348 | 13,236 | 8,348 | 13,236 | 8,355 | 13,313
Solar and semiconductor equipment [Member] |  |  |  |  |  |
Segment Reporting Information [Line Items] |  |  |  |  |  |
Net Revenues: | 6,187 | 19,682 | 13,222 | 42,559 |  |
Operating Income (Loss): | (3,604) | (6,052) | (8,276) | (8,042) |  |
Identifiable Assets | 110,451 |  | 110,451 |  | 123,923 |
Goodwill | 7,620 |  | 7,620 |  | 7,627 |
Polishing supplies and equipment [Member] |  |  |  |  |  |
Segment Reporting Information [Line Items] |  |  |  |  |  |
Net Revenues: | 1,931 | 1,884 | 4,253 | 3,735 |  |
Operating Income (Loss): | 143 | 67 | 64 | 213 |  |
Identifiable Assets | 4,367 |  | 4,367 |  | 5,099 |
Goodwill | $ 728 |  | $ 728 |  | $ 728 |

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