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Earnings Per Share (Tables) | 6 Months Ended
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Mar. 31, 2013
Earnings Per Share [Abstract] |
Schedule of Earnings Per Share, Basic and Diluted |
| Three Months Ended March 31, |  | Six Months Ended March 31,
| 2013 |  | 2012 |  | 2013 |  | 2012
| (in thousands, except per share amounts) |  | (in thousands, except per share amounts)
Basic Loss Per Share Computation |  |  |  |  |  |  |
Net loss attributable to Amtech Systems, Inc. | $ | (2,092 | ) |  | $ | (5,079 | ) |  | $ | (6,285 | ) |  | $ | (5,955 | )
Weighted Average Shares Outstanding: |  |  |  |  |  |  |
Common stock | 9,539 |  |  | 9,479 |  |  | 9,516 |  |  | 9,462 |
Basic loss per share attributable to Amtech shareholders | $ | (0.22 | ) |  | $ | (0.54 | ) |  | $ | (0.66 | ) |  | $ | (0.63 | )
Diluted Loss Per Share Computation |  |  |  |  |  |  |
Net loss attributable to Amtech Systems, Inc. | $ | (2,092 | ) |  | $ | (5,079 | ) |  | $ | (6,285 | ) |  | $ | (5,955 | )
Weighted Average Shares Outstanding: |  |  |  |  |  |  |
Common stock | 9,539 |  |  | 9,479 |  |  | 9,516 |  |  | 9,462 |
Common stock equivalents (1) | — |  |  | — |  |  | — |  |  | — |
Diluted shares | 9,539 |  |  | 9,479 |  |  | 9,516 |  |  | 9,462 |
Diluted loss per share attributable to Amtech shareholders | $ | (0.22 | ) |  | $ | (0.54 | ) |  | $ | (0.66 | ) |  | $ | (0.63 | )
(1) | The number of common stock equivalents is calculated using the treasury stock method and the average market price during the period.

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- Definition Tabular disclosure of an entity's basic and diluted earnings per share calculations. + References No definition available. + Details
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