# Filing Detail

Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0000720500-13-000015
Filing Date
2013-05-09
Accepted
2013-05-09 16:04:41
Documents
11
Period of Report
2013-03-31

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | 10-Q | asys33113-10q.htm | 10-Q | 752236
2 | CERTIFICATION | asys33113-ex311.htm | EX-31.1 | 14190
3 | CERTIFICATION | asys33113-ex312.htm | EX-31.2 | 14230
4 | CERTIFICATION | asys33113-ex321.htm | EX-32.1 | 7159
5 | CERTIFICATION | asys33113-ex322.htm | EX-32.2 | 7196
| Complete submission text file | 0000720500-13-000015.txt |  | 5774623

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
6 | XBRL INSTANCE DOCUMENT | asys-20130331.xml | EX-101.INS | 969134
7 | XBRL TAXONOMY EXTENSION SCHEMA DOCUMENT | asys-20130331.xsd | EX-101.SCH | 29189
8 | XBRL TAXONOMY EXTENSION CALCULATION LINKBASE DOCUMENT | asys-20130331_cal.xml | EX-101.CAL | 63149
9 | XBRL TAXONOMY EXTENSION DEFINITION LINKBASE DOCUMENT | asys-20130331_def.xml | EX-101.DEF | 119133
10 | XBRL TAXONOMY EXTENSION LABEL LINKBASE DOCUMENT | asys-20130331_lab.xml | EX-101.LAB | 447096
11 | XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE DOCUMENT | asys-20130331_pre.xml | EX-101.PRE | 246979

Mailing Address 131 SOUTH CLARK DRIVE TEMPE AZ 85281
Business Address 131 S CLARK DR TEMPE AZ 85281 6029675146
AMTECH SYSTEMS INC (Filer) CIK: 0000720500 (see all company filings)

EIN.: 860411215 | State of Incorp.: AZ | Fiscal Year End: 0930
Type: 10-Q | Act: 34 | File No.: 000-11412 | Film No.: 13828645
SIC: 3559 Special Industry Machinery, NEC