# Filing Detail

Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0000720500-14-000008
Filing Date
2014-02-06
Accepted
2014-02-06 16:00:24
Documents
11
Period of Report
2013-12-31

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | 10-Q | asys123113-10q.htm | 10-Q | 663440
2 | EXHIBIT | asys123113-ex311.htm | EX-31.1 | 14191
3 | EXHIBIT | asys123113-ex312.htm | EX-31.2 | 14231
4 | EXHIBIT | asys123113-ex321.htm | EX-32.1 | 7163
5 | EXHIBIT | asys123113-ex322.htm | EX-32.2 | 7200
| Complete submission text file | 0000720500-14-000008.txt |  | 5597147

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
6 | XBRL INSTANCE DOCUMENT | asys-20131231.xml | EX-101.INS | 882144
7 | XBRL TAXONOMY EXTENSION SCHEMA DOCUMENT | asys-20131231.xsd | EX-101.SCH | 28364
8 | XBRL TAXONOMY EXTENSION CALCULATION LINKBASE DOCUMENT | asys-20131231_cal.xml | EX-101.CAL | 63232
9 | XBRL TAXONOMY EXTENSION DEFINITION LINKBASE DOCUMENT | asys-20131231_def.xml | EX-101.DEF | 124974
10 | XBRL TAXONOMY EXTENSION LABEL LINKBASE DOCUMENT | asys-20131231_lab.xml | EX-101.LAB | 446191
11 | XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE DOCUMENT | asys-20131231_pre.xml | EX-101.PRE | 248470

Mailing Address 131 SOUTH CLARK DRIVE TEMPE AZ 85281
Business Address 131 S CLARK DR TEMPE AZ 85281 6029675146
AMTECH SYSTEMS INC (Filer) CIK: 0000720500 (see all company filings)

EIN.: 860411215 | State of Incorp.: AZ | Fiscal Year End: 0930
Type: 10-Q | Act: 34 | File No.: 000-11412 | Film No.: 14580080
SIC: 3559 Special Industry Machinery, NEC