# Filing Detail

Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0000720500-14-000013
Filing Date
2014-05-07
Accepted
2014-05-07 16:00:08
Documents
11
Period of Report
2014-03-31

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | 10-Q | asys33114-10q.htm | 10-Q | 855442
2 | EXHIBIT | asys33114-ex311.htm | EX-31.1 | 14184
3 | EXHIBIT | asys33114-ex312.htm | EX-31.2 | 14224
4 | EXHIBIT | asys33114-ex321.htm | EX-32.1 | 7153
5 | EXHIBIT | asys33114-ex322.htm | EX-32.2 | 7190
| Complete submission text file | 0000720500-14-000013.txt |  | 6291863

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
6 | XBRL INSTANCE DOCUMENT | asys-20140331.xml | EX-101.INS | 1064368
7 | XBRL TAXONOMY EXTENSION SCHEMA DOCUMENT | asys-20140331.xsd | EX-101.SCH | 29102
8 | XBRL TAXONOMY EXTENSION CALCULATION LINKBASE DOCUMENT | asys-20140331_cal.xml | EX-101.CAL | 63887
9 | XBRL TAXONOMY EXTENSION DEFINITION LINKBASE DOCUMENT | asys-20140331_def.xml | EX-101.DEF | 131207
10 | XBRL TAXONOMY EXTENSION LABEL LINKBASE DOCUMENT | asys-20140331_lab.xml | EX-101.LAB | 462790
11 | XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE DOCUMENT | asys-20140331_pre.xml | EX-101.PRE | 255909

Mailing Address 131 SOUTH CLARK DRIVE TEMPE AZ 85281
Business Address 131 S CLARK DR TEMPE AZ 85281 6029675146
AMTECH SYSTEMS INC (Filer) CIK: 0000720500 (see all company filings)

EIN.: 860411215 | State of Incorp.: AZ | Fiscal Year End: 0930
Type: 10-Q | Act: 34 | File No.: 000-11412 | Film No.: 14820858
SIC: 3559 Special Industry Machinery, NEC