<SEC-DOCUMENT>0000720500-14-000025-index.html : 20140626
<SEC-HEADER>0000720500-14-000025.hdr.sgml : 20140626
<ACCEPTANCE-DATETIME>20140620160907
ACCESSION NUMBER:		0000720500-14-000025
CONFORMED SUBMISSION TYPE:	S-8
PUBLIC DOCUMENT COUNT:		4
FILED AS OF DATE:		20140620
DATE AS OF CHANGE:		20140620
EFFECTIVENESS DATE:		20140620

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			AMTECH SYSTEMS INC
		CENTRAL INDEX KEY:			0000720500
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				860411215
		STATE OF INCORPORATION:			AZ
		FISCAL YEAR END:			0930

	FILING VALUES:
		FORM TYPE:		S-8
		SEC ACT:		1933 Act
		SEC FILE NUMBER:	333-196937
		FILM NUMBER:		14932874

	BUSINESS ADDRESS:	
		STREET 1:		131 S CLARK DR
		CITY:			TEMPE
		STATE:			AZ
		ZIP:			85281
		BUSINESS PHONE:		6029675146

	MAIL ADDRESS:	
		STREET 1:		131 SOUTH CLARK DRIVE
		CITY:			TEMPE
		STATE:			AZ
		ZIP:			85281

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	QUARTZ ENGINEERING & MATERIALS INC
		DATE OF NAME CHANGE:	19870715
</SEC-HEADER>
<DOCUMENT>
<TYPE>S-8
<SEQUENCE>1
<FILENAME>s-8employeeplan.htm
<DESCRIPTION>S-8
<TEXT>
Document 1 - file: s-8employeeplan.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-5.1
<SEQUENCE>2
<FILENAME>asys-eelegalex51.htm
<DESCRIPTION>EXHIBIT
<TEXT>
Document 2 - file: asys-eelegalex51.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-23.2
<SEQUENCE>3
<FILENAME>asys-eeconsentex232.htm
<DESCRIPTION>EXHIBIT
<TEXT>
Document 3 - file: asys-eeconsentex232.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-24
<SEQUENCE>4
<FILENAME>asys-ex24.htm
<DESCRIPTION>EXHIBIT
<TEXT>
Document 4 - file: asys-ex24.htm

</DOCUMENT>
</SEC-DOCUMENT>