    <SEC-DOCUMENT>0001193125-14-379154-index.html : 20141023
    <SEC-HEADER>0001193125-14-379154.hdr.sgml : 20141023
    <ACCEPTANCE-DATETIME>20141022212340
    ACCESSION NUMBER:		0001193125-14-379154
    CONFORMED SUBMISSION TYPE:	8-K
    PUBLIC DOCUMENT COUNT:		20
    CONFORMED PERIOD OF REPORT:	20141021
    ITEM INFORMATION:		Entry into a Material Definitive Agreement
    ITEM INFORMATION:		Regulation FD Disclosure
    ITEM INFORMATION:		Other Events
    ITEM INFORMATION:		Financial Statements and Exhibits
    FILED AS OF DATE:		20141023
    DATE AS OF CHANGE:		20141022

    FILER:

    	COMPANY DATA:
    		COMPANY CONFORMED NAME:			AMTECH SYSTEMS INC
    		CENTRAL INDEX KEY:			0000720500
    		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
    		IRS NUMBER:				860411215
    		STATE OF INCORPORATION:			AZ
    		FISCAL YEAR END:			0930

    	FILING VALUES:
    		FORM TYPE:		8-K
    		SEC ACT:		1934 Act
    		SEC FILE NUMBER:	000-11412
    		FILM NUMBER:		141168617

    	BUSINESS ADDRESS:
    		STREET 1:		131 S CLARK DR
    		CITY:			TEMPE
    		STATE:			AZ
    		ZIP:			85281
    		BUSINESS PHONE:		6029675146

    	MAIL ADDRESS:
    		STREET 1:		131 SOUTH CLARK DRIVE
    		CITY:			TEMPE
    		STATE:			AZ
    		ZIP:			85281

    	FORMER COMPANY:
    		FORMER CONFORMED NAME:	QUARTZ ENGINEERING & MATERIALS INC
    		DATE OF NAME CHANGE:	19870715
    </SEC-HEADER>
    <DOCUMENT>
    <TYPE>8-K
    <SEQUENCE>1
    <FILENAME>d809426d8k.htm
    <DESCRIPTION>FORM 8-K
    <TEXT>
    Document 1 - file: d809426d8k.htm

    </DOCUMENT>
    <DOCUMENT>
    <TYPE>EX-2.1
    <SEQUENCE>2
    <FILENAME>d809426dex21.htm
    <DESCRIPTION>EX-2.1
    <TEXT>
    Document 2 - file: d809426dex21.htm

    </DOCUMENT>
    <DOCUMENT>
    <TYPE>EX-99.1
    <SEQUENCE>3
    <FILENAME>d809426dex991.htm
    <DESCRIPTION>EX-99.1
    <TEXT>
    Document 3 - file: d809426dex991.htm

    </DOCUMENT>
    <DOCUMENT>
    <TYPE>EX-99.2
    <SEQUENCE>4
    <FILENAME>d809426dex992.htm
    <DESCRIPTION>EX-99.2
    <TEXT>
    Document 4 - file: d809426dex992.htm

    </DOCUMENT>
    <DOCUMENT>
    <TYPE>EX-99.3
    <SEQUENCE>5
    <FILENAME>d809426dex993.htm
    <DESCRIPTION>EX-99.3
    <TEXT>
    Document 5 - file: d809426dex993.htm

    </DOCUMENT>
    <DOCUMENT>
    <TYPE>EX-99.4
    <SEQUENCE>6
    <FILENAME>d809426dex994.htm
    <DESCRIPTION>EX-99.4
    <TEXT>
    Document 6 - file: d809426dex994.htm

    </DOCUMENT>
    <DOCUMENT>
    <TYPE>EX-99.5
    <SEQUENCE>7
    <FILENAME>d809426dex995.htm
    <DESCRIPTION>EX-99.5
    <TEXT>
    Document 7 - file: d809426dex995.htm

    </DOCUMENT>
    <DOCUMENT>
    <TYPE>EX-99.6
    <SEQUENCE>8
    <FILENAME>d809426dex996.htm
    <DESCRIPTION>EX-99.6
    <TEXT>
    Document 8 - file: d809426dex996.htm

    </DOCUMENT>
    <DOCUMENT>
    <TYPE>GRAPHIC
    <SEQUENCE>9
    <FILENAME>g809390alts2.jpg
    <DESCRIPTION>GRAPHIC
    <TEXT>
    Document 9 - file: g809390alts2.jpg

    </DOCUMENT>
    <DOCUMENT>
    <TYPE>GRAPHIC
    <SEQUENCE>10
    <FILENAME>g809390im1.jpg
    <DESCRIPTION>GRAPHIC
    <TEXT>
    Document 10 - file: g809390im1.jpg

    </DOCUMENT>
    <DOCUMENT>
    <TYPE>GRAPHIC
    <SEQUENCE>11
    <FILENAME>g809390im2.jpg
    <DESCRIPTION>GRAPHIC
    <TEXT>
    Document 11 - file: g809390im2.jpg

    </DOCUMENT>
    <DOCUMENT>
    <TYPE>GRAPHIC
    <SEQUENCE>12
    <FILENAME>g809390n1.jpg
    <DESCRIPTION>GRAPHIC
    <TEXT>
    Document 12 - file: g809390n1.jpg

    </DOCUMENT>
    <DOCUMENT>
    <TYPE>GRAPHIC
    <SEQUENCE>13
    <FILENAME>g809390n10.jpg
    <DESCRIPTION>GRAPHIC
    <TEXT>
    Document 13 - file: g809390n10.jpg

    </DOCUMENT>
    <DOCUMENT>
    <TYPE>GRAPHIC
    <SEQUENCE>14
    <FILENAME>g809390n3.jpg
    <DESCRIPTION>GRAPHIC
    <TEXT>
    Document 14 - file: g809390n3.jpg

    </DOCUMENT>
    <DOCUMENT>
    <TYPE>GRAPHIC
    <SEQUENCE>15
    <FILENAME>g809390n4.jpg
    <DESCRIPTION>GRAPHIC
    <TEXT>
    Document 15 - file: g809390n4.jpg

    </DOCUMENT>
    <DOCUMENT>
    <TYPE>GRAPHIC
    <SEQUENCE>16
    <FILENAME>g809390n5.jpg
    <DESCRIPTION>GRAPHIC
    <TEXT>
    Document 16 - file: g809390n5.jpg

    </DOCUMENT>
    <DOCUMENT>
    <TYPE>GRAPHIC
    <SEQUENCE>17
    <FILENAME>g809390n6.jpg
    <DESCRIPTION>GRAPHIC
    <TEXT>
    Document 17 - file: g809390n6.jpg

    </DOCUMENT>
    <DOCUMENT>
    <TYPE>GRAPHIC
    <SEQUENCE>18
    <FILENAME>g809390n7.jpg
    <DESCRIPTION>GRAPHIC
    <TEXT>
    Document 18 - file: g809390n7.jpg

    </DOCUMENT>
    <DOCUMENT>
    <TYPE>GRAPHIC
    <SEQUENCE>19
    <FILENAME>g809390n8.jpg
    <DESCRIPTION>GRAPHIC
    <TEXT>
    Document 19 - file: g809390n8.jpg

    </DOCUMENT>
    <DOCUMENT>
    <TYPE>GRAPHIC
    <SEQUENCE>20
    <FILENAME>g809390n9.jpg
    <DESCRIPTION>GRAPHIC
    <TEXT>
    Document 20 - file: g809390n9.jpg

    </DOCUMENT>
    </SEC-DOCUMENT>