<SEC-DOCUMENT>9999999997-15-006726-index.html : 20150324
<SEC-HEADER>9999999997-15-006726.hdr.sgml : 20150324
<ACCEPTANCE-DATETIME>20150324122537
<PAPER>
ACCESSION NUMBER:		9999999997-15-006726
CONFORMED SUBMISSION TYPE:	ARS
PUBLIC DOCUMENT COUNT:		1
CONFORMED PERIOD OF REPORT:	20140930
FILED AS OF DATE:		20150312
DATE AS OF CHANGE:		20150324
EFFECTIVENESS DATE:		20150312

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			AMTECH SYSTEMS INC
		CENTRAL INDEX KEY:			0000720500
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				860411215
		STATE OF INCORPORATION:			AZ
		FISCAL YEAR END:			0930

	FILING VALUES:
		FORM TYPE:		ARS
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-11412
		FILM NUMBER:		15005828

	BUSINESS ADDRESS:	
		STREET 1:		131 S CLARK DR
		CITY:			TEMPE
		STATE:			AZ
		ZIP:			85281
		BUSINESS PHONE:		6029675146

	MAIL ADDRESS:	
		STREET 1:		131 SOUTH CLARK DRIVE
		CITY:			TEMPE
		STATE:			AZ
		ZIP:			85281

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	QUARTZ ENGINEERING & MATERIALS INC
		DATE OF NAME CHANGE:	19870715
</SEC-HEADER>
<DOCUMENT>
<TYPE>ARS
<SEQUENCE>1
<FILENAME>9999999997-15-006726.paper
<DESCRIPTION>AUTO-GENERATED PAPER DOCUMENT
<TEXT>
Document 1 - file: 9999999997-15-006726.paper

</DOCUMENT>
</SEC-DOCUMENT>