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Selected Quarterly Data (Unaudited) (Details) - USD ($) $ / shares in Units, shares in Thousands, $ in Thousands | 3 Months Ended | 12 Months Ended
--- | --- | ---
Sep. 30, 2015 | Jun. 30, 2015 | Mar. 31, 2015 | Dec. 31, 2014 | Sep. 30, 2014 | Jun. 30, 2014 | Mar. 31, 2014 | Dec. 31, 2013 | Sep. 30, 2015 | Sep. 30, 2014 | Sep. 30, 2013
Selected Quarterly Data (Unaudited) [Abstract] |  |  |  |  |  |  |  |  |  |  |
Revenue | $ 28,198 | $ 40,016 | $ 24,273 | $ 12,396 | $ 19,822 | $ 9,190 | $ 12,717 | $ 14,772 | $ 104,883 | $ 56,501 | $ 34,798
Gross margin | 6,563 | 10,128 | 6,889 | 3,428 | 2,562 | 1,631 | 2,898 | 4,535 | 27,008 | 11,626 | 4,313
Provision for (benefit of) for income taxes | 1,270 | 290 | 170 | 180 | (645) | 1,325 | 0 | 560 | 1,910 | 1,240 | 1,860
Net income (loss) attributable to Amtech Systems, Inc. | 1,349 | (1,604) | (2,321) | (5,195) | (3,245) | (5,257) | (3,751) | (794) | (7,771) | (13,047) | (20,069)
Comprehensive income (loss) attributable to Amtech Systems, Inc. | $ 1,414 | $ (1,344) | $ (4,470) | $ (6,247) | $ (4,892) | $ (5,568) | $ (3,756) | $ (66) | $ (9,727) | $ (15,491) | $ (19,482)
Basic (dollars per share) | $ 0.10 | $ (0.12) | $ (0.19) | $ (0.53) | $ (0.33) | $ (0.53) | $ (0.39) | $ (0.08) | $ (0.65) | $ (1.34) | $ (2.11)
Shares used in calculation | 13,150 | 13,103 | 11,997 | 9,854 | 9,846 | 9,843 | 9,679 | 9,560 | 12,022 | 9,732 | 9,529
Diluted (dollars per share) | $ 0.10 | $ (0.12) | $ (0.19) | $ (0.53) | $ (0.33) | $ (0.53) | $ (0.39) | $ (0.08) | $ (0.65) | $ (1.34) | $ (2.11)
Shares used in calculation | 13,259 | 13,103 | 11,997 | 9,854 | 9,846 | 9,843 | 9,679 | 9,560 | 12,022 | 9,732 | 9,529

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