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Acquisitions - Consideration Transferred (Details) - BTU International, Inc (BTU) Merger $ / shares in Units, shares in Thousands, $ in Thousands | Jan. 30, 2015 USD ($) $ / shares shares
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Business Acquisition [Line Items] |
Exchange ratio | 0.3291
Amtech common stock issued for consideration | 3,186
Amtech common stock per share price on January 30, 2015 | $ / shares | $ 8.20
Consideration for BTU common shares and restricted stock units | $ | $ 26,125
Total fair value of consideration transferred | $ | $ 26,625
Common And Restricted Shares |
Business Acquisition [Line Items] |
BTU common shares and restricted stock units exchanged | 9,681
Vested BTU stock options exchanged for Amtech stock options | 9,681
Stock Options |
Business Acquisition [Line Items] |
BTU common shares and restricted stock units exchanged | 500
Vested BTU stock options exchanged for Amtech stock options | 500

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