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Acquisitions - Pro Forma (Details) - BTU International, Inc (BTU) Merger - USD ($) $ / shares in Units, $ in Thousands | 3 Months Ended | 12 Months Ended
--- | --- | ---
Sep. 30, 2015 | Sep. 30, 2014 | Sep. 30, 2013
Business Acquisition, Pro Forma Information [Abstract] |  |  |
Revenue, net | $ 121,186 | $ 111,531 | $ 84,641
Net loss | $ (9,223) | $ (15,586) | $ (40,108)
Earnings per share available to Amtech stockholders: |  |  |
Basic (in dollars per share) | $ (0.70) | $ (1.21) | $ (3.03)
Diluted (in dollars per share) | $ (0.70) | $ (1.21) | $ (3.03)

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