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Commitments and Contingencies (Details) (USD $) | 6 Months Ended |  |
--- | --- | --- | ---
Mar. 31, 2015 | Mar. 31, 2014 | Sep. 30, 2014 | Jan. 30, 2015
Schedule of Equity Method Investments [Line Items] |  |  |  |
Purchase obligation | $ 29,800,000 us-gaap_PurchaseObligation |  | $ 7,900,000 us-gaap_PurchaseObligation |
Price of an ion implanter | 125,000 us-gaap_PaymentsToAcquirePropertyPlantAndEquipment | 214,000 us-gaap_PaymentsToAcquirePropertyPlantAndEquipment |  |
Revenue from Grants | 4,100,000 us-gaap_RevenueFromGrants |  |  |
Grant revenue commitment to the project, by July 2014 | 6,100,000 asys_GrantRevenueCommitmenttoProject |  |  |
Kingstone Holding Company [Member] |  |  |  |
Schedule of Equity Method Investments [Line Items] |  |  |  |
Equity method investment, ownership percentage | 55.00%us-gaap_EquityMethodInvestmentOwnershipPercentage / us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis = asys_KingstoneHoldingCompanyMember |  |  |
Kingstone Semiconductor Company Ltd [Member] |  |  |  |
Schedule of Equity Method Investments [Line Items] |  |  |  |
Percentage of voting interest of acquiree owned subsidiary | 100.00%asys_PercentageofVotingInterestofAcquireeOwnedSubsidiary / us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis = asys_KingstoneSemiconductorCompanyLtdMember |  |  |
Tempress Systems and Energy Research Centre Agreement [Member] |  |  |  |
Schedule of Equity Method Investments [Line Items] |  |  |  |
Price of an ion implanter | 1,400,000 us-gaap_PaymentsToAcquirePropertyPlantAndEquipment / us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis = asys_TempressSystemsandEnergyResearchCentreAgreementMember |  |  |
Ownership rights to results of projects developed separately by individual parties | 100.00%asys_OwnershipRightsResultsofProjectsDevelopedSeparatelyByIndividualParties / us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis = asys_TempressSystemsandEnergyResearchCentreAgreementMember |  |  |
R&D Agreement term | 4 years |  |  |
Required contribution in form of labor and assets | 1,400,000 asys_ResearchandDevelopmentRequiredContributionLaborandAssets / us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis = asys_TempressSystemsandEnergyResearchCentreAgreementMember |  |  |
Number of years from agreement start for contribution for project support | 2 years |  |  |
Environmental Clean-up | BTU International, Inc (BTU) Merger |  |  |  |
Schedule of Equity Method Investments [Line Items] |  |  |  |
Loss contingency accrual | 100,000 us-gaap_LossContingencyAccrualAtCarryingValue / us-gaap_BusinessAcquisitionAxis = asys_BTUInternationalIncBTUMergerMember / us-gaap_LossContingenciesByNatureOfContingencyAxis = us-gaap_LossFromCatastrophesMember |  |  | 200,000 us-gaap_LossContingencyAccrualAtCarryingValue / us-gaap_BusinessAcquisitionAxis = asys_BTUInternationalIncBTUMergerMember / us-gaap_LossContingenciesByNatureOfContingencyAxis = us-gaap_LossFromCatastrophesMember
Letter of credit | $ 200,000 us-gaap_LettersOfCreditOutstandingAmount / us-gaap_BusinessAcquisitionAxis = asys_BTUInternationalIncBTUMergerMember / us-gaap_LossContingenciesByNatureOfContingencyAxis = us-gaap_LossFromCatastrophesMember |  |  |

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