# Filing Detail

Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0000720500-15-000025
Filing Date
2015-05-07
Accepted
2015-05-07 16:03:05
Documents
11
Period of Report
2015-03-31

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | 10-Q | asys33115-10q.htm | 10-Q | 932464
2 | EXHIBIT 31.1 | asys33115-ex311.htm | EX-31.1 | 14151
3 | EXHIBIT 31.2 | asys33115-ex312.htm | EX-31.2 | 14191
4 | EXHIBIT 32.1 | asys33115-ex321.htm | EX-32.1 | 7120
5 | EXHIBIT 32.2 | asys33115-ex322.htm | EX-32.2 | 7157
| Complete submission text file | 0000720500-15-000025.txt |  | 7880408

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
6 | XBRL INSTANCE DOCUMENT | asys-20150331.xml | EX-101.INS | 1306883
7 | XBRL TAXONOMY EXTENSION SCHEMA DOCUMENT | asys-20150331.xsd | EX-101.SCH | 35075
8 | XBRL TAXONOMY EXTENSION CALCULATION LINKBASE DOCUMENT | asys-20150331_cal.xml | EX-101.CAL | 72128
9 | XBRL TAXONOMY EXTENSION DEFINITION LINKBASE DOCUMENT | asys-20150331_def.xml | EX-101.DEF | 192149
10 | XBRL TAXONOMY EXTENSION LABEL LINKBASE DOCUMENT | asys-20150331_lab.xml | EX-101.LAB | 546536
11 | XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE DOCUMENT | asys-20150331_pre.xml | EX-101.PRE | 324485

Mailing Address 131 SOUTH CLARK DRIVE TEMPE AZ 85281
Business Address 131 S CLARK DR TEMPE AZ 85281 6029675146
AMTECH SYSTEMS INC (Filer) CIK: 0000720500 (see all company filings)

EIN.: 860411215 | State of Incorp.: AZ | Fiscal Year End: 0930
Type: 10-Q | Act: 34 | File No.: 000-11412 | Film No.: 15841655
SIC: 3559 Special Industry Machinery, NEC