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Other Accrued Liabilities (Details) (USD $) In Thousands, unless otherwise specified | Mar. 31, 2015 | Sep. 30, 2014
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Other Liabilities Disclosure [Abstract] |  |
Unearned research and development grants | $ 2,878 asys_UnearnedResearchandDevelopmentGrantsCurrent | $ 3,989 asys_UnearnedResearchandDevelopmentGrantsCurrent
Other | 4,548 asys_OtherAccruedLiabilitiesOtherCurrent | 1,357 asys_OtherAccruedLiabilitiesOtherCurrent
Other accrued liabilities | $ 7,426 us-gaap_AccruedLiabilitiesCurrent | $ 5,346 us-gaap_AccruedLiabilitiesCurrent

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- Definition Other Accrued Liabilities, Other, Current + References No definition available. + Details
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Balance Type: | credit
Period Type: | instant

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- Definition Unearned Research and Development Grants, Current + References No definition available. + Details
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Namespace Prefix: | asys_
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- Definition Carrying value as of the balance sheet date of obligations incurred and payable, pertaining to costs that are statutory in nature, are incurred on contractual obligations, or accumulate over time and for which invoices have not yet been received or will not be rendered. Examples include taxes, interest, rent and utilities. Used to reflect the current portion of the liabilities (due within one year or within the normal operating cycle if longer). + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher SEC -Name Regulation S-X (SX) -Number 210 -Section 02 -Paragraph 20 -Article 5 Reference 2: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 210 -SubTopic 10 -Section S99 -Paragraph 1 -Subparagraph (SX 210.5-02.20) -URI http://asc.fasb.org/extlink&oid=6877327&loc=d3e13212-122682 + Details
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- Details
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