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Business Segment Information (Details) (USD $) In Thousands, unless otherwise specified | 3 Months Ended | 6 Months Ended |  |
--- | --- | --- | --- | ---
Mar. 31, 2015 | Mar. 31, 2014 | Mar. 31, 2015 segment | Mar. 31, 2014 | Sep. 30, 2014 | Dec. 24, 2014
Segment Reporting Information [Line Items] |  |  |  |  |  |
Number of business segments |  |  | 3 us-gaap_NumberOfOperatingSegments |  |  |
Net Revenues | $ 24,273 us-gaap_SalesRevenueNet | $ 12,717 us-gaap_SalesRevenueNet | $ 36,669 us-gaap_SalesRevenueNet | $ 27,488 us-gaap_SalesRevenueNet |  |
Operating Income (Loss) | (1,936)us-gaap_OperatingIncomeLoss | (4,534)us-gaap_OperatingIncomeLoss | (6,728)us-gaap_OperatingIncomeLoss | (5,013)us-gaap_OperatingIncomeLoss |  |
Identifiable Assets | 145,782 us-gaap_Assets |  | 145,782 us-gaap_Assets |  | 89,904 us-gaap_Assets |
Solar |  |  |  |  |  |
Segment Reporting Information [Line Items] |  |  |  |  |  |
Net Revenues | 9,463 us-gaap_SalesRevenueNet / us-gaap_StatementBusinessSegmentsAxis = asys_SolarEquipmentMember | 8,017 us-gaap_SalesRevenueNet / us-gaap_StatementBusinessSegmentsAxis = asys_SolarEquipmentMember | 17,749 us-gaap_SalesRevenueNet / us-gaap_StatementBusinessSegmentsAxis = asys_SolarEquipmentMember | 16,505 us-gaap_SalesRevenueNet / us-gaap_StatementBusinessSegmentsAxis = asys_SolarEquipmentMember |  |
Operating Income (Loss) | (724)us-gaap_OperatingIncomeLoss / us-gaap_StatementBusinessSegmentsAxis = asys_SolarEquipmentMember | (4,133)us-gaap_OperatingIncomeLoss / us-gaap_StatementBusinessSegmentsAxis = asys_SolarEquipmentMember | (3,219)us-gaap_OperatingIncomeLoss / us-gaap_StatementBusinessSegmentsAxis = asys_SolarEquipmentMember | (4,326)us-gaap_OperatingIncomeLoss / us-gaap_StatementBusinessSegmentsAxis = asys_SolarEquipmentMember |  |
Identifiable Assets | 67,669 us-gaap_Assets / us-gaap_StatementBusinessSegmentsAxis = asys_SolarEquipmentMember |  | 67,669 us-gaap_Assets / us-gaap_StatementBusinessSegmentsAxis = asys_SolarEquipmentMember |  | 56,858 us-gaap_Assets / us-gaap_StatementBusinessSegmentsAxis = asys_SolarEquipmentMember |
Semiconductor |  |  |  |  |  |
Segment Reporting Information [Line Items] |  |  |  |  |  |
Net Revenues | 12,088 us-gaap_SalesRevenueNet / us-gaap_StatementBusinessSegmentsAxis = asys_SemiconductorEquipmentMember | 2,271 us-gaap_SalesRevenueNet / us-gaap_StatementBusinessSegmentsAxis = asys_SemiconductorEquipmentMember | 12,820 us-gaap_SalesRevenueNet / us-gaap_StatementBusinessSegmentsAxis = asys_SemiconductorEquipmentMember | 6,346 us-gaap_SalesRevenueNet / us-gaap_StatementBusinessSegmentsAxis = asys_SemiconductorEquipmentMember |  |
Operating Income (Loss) | 730 us-gaap_OperatingIncomeLoss / us-gaap_StatementBusinessSegmentsAxis = asys_SemiconductorEquipmentMember | 207 us-gaap_OperatingIncomeLoss / us-gaap_StatementBusinessSegmentsAxis = asys_SemiconductorEquipmentMember | 630 us-gaap_OperatingIncomeLoss / us-gaap_StatementBusinessSegmentsAxis = asys_SemiconductorEquipmentMember | 748 us-gaap_OperatingIncomeLoss / us-gaap_StatementBusinessSegmentsAxis = asys_SemiconductorEquipmentMember |  |
Identifiable Assets | 58,292 us-gaap_Assets / us-gaap_StatementBusinessSegmentsAxis = asys_SemiconductorEquipmentMember |  | 58,292 us-gaap_Assets / us-gaap_StatementBusinessSegmentsAxis = asys_SemiconductorEquipmentMember |  | 5,593 us-gaap_Assets / us-gaap_StatementBusinessSegmentsAxis = asys_SemiconductorEquipmentMember |
Polishing |  |  |  |  |  |
Segment Reporting Information [Line Items] |  |  |  |  |  |
Net Revenues | 2,722 us-gaap_SalesRevenueNet / us-gaap_StatementBusinessSegmentsAxis = asys_PolishingSuppliesAndEquipmentMember | 2,429 us-gaap_SalesRevenueNet / us-gaap_StatementBusinessSegmentsAxis = asys_PolishingSuppliesAndEquipmentMember | 6,100 us-gaap_SalesRevenueNet / us-gaap_StatementBusinessSegmentsAxis = asys_PolishingSuppliesAndEquipmentMember | 4,637 us-gaap_SalesRevenueNet / us-gaap_StatementBusinessSegmentsAxis = asys_PolishingSuppliesAndEquipmentMember |  |
Operating Income (Loss) | 601 us-gaap_OperatingIncomeLoss / us-gaap_StatementBusinessSegmentsAxis = asys_PolishingSuppliesAndEquipmentMember | 550 us-gaap_OperatingIncomeLoss / us-gaap_StatementBusinessSegmentsAxis = asys_PolishingSuppliesAndEquipmentMember | 1,343 us-gaap_OperatingIncomeLoss / us-gaap_StatementBusinessSegmentsAxis = asys_PolishingSuppliesAndEquipmentMember | 968 us-gaap_OperatingIncomeLoss / us-gaap_StatementBusinessSegmentsAxis = asys_PolishingSuppliesAndEquipmentMember |  |
Identifiable Assets | 5,887 us-gaap_Assets / us-gaap_StatementBusinessSegmentsAxis = asys_PolishingSuppliesAndEquipmentMember |  | 5,887 us-gaap_Assets / us-gaap_StatementBusinessSegmentsAxis = asys_PolishingSuppliesAndEquipmentMember |  | 6,253 us-gaap_Assets / us-gaap_StatementBusinessSegmentsAxis = asys_PolishingSuppliesAndEquipmentMember |
Non-segment related |  |  |  |  |  |
Segment Reporting Information [Line Items] |  |  |  |  |  |
Operating Income (Loss) | (2,543)us-gaap_OperatingIncomeLoss / us-gaap_StatementBusinessSegmentsAxis = us-gaap_MaterialReconcilingItemsMember | (1,158)us-gaap_OperatingIncomeLoss / us-gaap_StatementBusinessSegmentsAxis = us-gaap_MaterialReconcilingItemsMember | (5,482)us-gaap_OperatingIncomeLoss / us-gaap_StatementBusinessSegmentsAxis = us-gaap_MaterialReconcilingItemsMember | (2,403)us-gaap_OperatingIncomeLoss / us-gaap_StatementBusinessSegmentsAxis = us-gaap_MaterialReconcilingItemsMember |  |
Identifiable Assets | $ 13,934 us-gaap_Assets / us-gaap_StatementBusinessSegmentsAxis = us-gaap_MaterialReconcilingItemsMember |  | $ 13,934 us-gaap_Assets / us-gaap_StatementBusinessSegmentsAxis = us-gaap_MaterialReconcilingItemsMember |  | $ 21,200 us-gaap_Assets / us-gaap_StatementBusinessSegmentsAxis = us-gaap_MaterialReconcilingItemsMember |
SoLayTec, B.V. |  |  |  |  |  |
Segment Reporting Information [Line Items] |  |  |  |  |  |
Percentage of voting interests acquired |  |  |  |  |  | 51.00%us-gaap_BusinessAcquisitionPercentageOfVotingInterestsAcquired / us-gaap_BusinessAcquisitionAxis = asys_SoLayTecB.V.Member
Product Concentration Risk | Sales Revenue, Product Line | Semiconductor |  |  |  |  |  |
Segment Reporting Information [Line Items] |  |  |  |  |  |
Concentration risk, percentage (less than 25%) |  |  | 25.00%us-gaap_ConcentrationRiskPercentage1 / us-gaap_ConcentrationRiskByBenchmarkAxis = us-gaap_SalesRevenueProductLineMember / us-gaap_ConcentrationRiskByTypeAxis = us-gaap_ProductConcentrationRiskMember / us-gaap_StatementBusinessSegmentsAxis = asys_SemiconductorEquipmentMember |  |  |

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