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Acquisition - Pro Forma (Details) (BTU International, Inc (BTU) Merger, USD $) In Thousands, except Per Share data, unless otherwise specified | 3 Months Ended | 6 Months Ended
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Mar. 31, 2015 | Mar. 31, 2014 | Mar. 31, 2015 | Mar. 31, 2014
BTU International, Inc (BTU) Merger |  |  |  |
Business Acquisition [Line Items] |  |  |  |
Revenue, net | $ 26,061 us-gaap_BusinessAcquisitionsProFormaRevenue / us-gaap_BusinessAcquisitionAxis = asys_BTUInternationalIncBTUMergerMember | $ 24,402 us-gaap_BusinessAcquisitionsProFormaRevenue / us-gaap_BusinessAcquisitionAxis = asys_BTUInternationalIncBTUMergerMember | $ 52,972 us-gaap_BusinessAcquisitionsProFormaRevenue / us-gaap_BusinessAcquisitionAxis = asys_BTUInternationalIncBTUMergerMember | $ 50,166 us-gaap_BusinessAcquisitionsProFormaRevenue / us-gaap_BusinessAcquisitionAxis = asys_BTUInternationalIncBTUMergerMember
Net loss | $ (4,252)us-gaap_BusinessAcquisitionsProFormaNetIncomeLoss / us-gaap_BusinessAcquisitionAxis = asys_BTUInternationalIncBTUMergerMember | $ (5,301)us-gaap_BusinessAcquisitionsProFormaNetIncomeLoss / us-gaap_BusinessAcquisitionAxis = asys_BTUInternationalIncBTUMergerMember | $ (9,369)us-gaap_BusinessAcquisitionsProFormaNetIncomeLoss / us-gaap_BusinessAcquisitionAxis = asys_BTUInternationalIncBTUMergerMember | $ (15,222)us-gaap_BusinessAcquisitionsProFormaNetIncomeLoss / us-gaap_BusinessAcquisitionAxis = asys_BTUInternationalIncBTUMergerMember
Basic (in dollars per share) | $ (0.33)us-gaap_BusinessAcquisitionProFormaEarningsPerShareBasic / us-gaap_BusinessAcquisitionAxis = asys_BTUInternationalIncBTUMergerMember | $ (0.41)us-gaap_BusinessAcquisitionProFormaEarningsPerShareBasic / us-gaap_BusinessAcquisitionAxis = asys_BTUInternationalIncBTUMergerMember | $ (0.72)us-gaap_BusinessAcquisitionProFormaEarningsPerShareBasic / us-gaap_BusinessAcquisitionAxis = asys_BTUInternationalIncBTUMergerMember | $ (1.19)us-gaap_BusinessAcquisitionProFormaEarningsPerShareBasic / us-gaap_BusinessAcquisitionAxis = asys_BTUInternationalIncBTUMergerMember
Diluted (in dollars per share) | $ (0.33)us-gaap_BusinessAcquisitionProFormaEarningsPerShareDiluted / us-gaap_BusinessAcquisitionAxis = asys_BTUInternationalIncBTUMergerMember | $ (0.41)us-gaap_BusinessAcquisitionProFormaEarningsPerShareDiluted / us-gaap_BusinessAcquisitionAxis = asys_BTUInternationalIncBTUMergerMember | $ (0.72)us-gaap_BusinessAcquisitionProFormaEarningsPerShareDiluted / us-gaap_BusinessAcquisitionAxis = asys_BTUInternationalIncBTUMergerMember | $ (1.19)us-gaap_BusinessAcquisitionProFormaEarningsPerShareDiluted / us-gaap_BusinessAcquisitionAxis = asys_BTUInternationalIncBTUMergerMember

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