<SEC-DOCUMENT>0000720500-15-000037.txt : 20150806
<SEC-HEADER>0000720500-15-000037.hdr.sgml : 20150806
<ACCEPTANCE-DATETIME>20150806160524
ACCESSION NUMBER:		0000720500-15-000037
CONFORMED SUBMISSION TYPE:	10-Q
PUBLIC DOCUMENT COUNT:		12
CONFORMED PERIOD OF REPORT:	20150630
FILED AS OF DATE:		20150806
DATE AS OF CHANGE:		20150806

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			AMTECH SYSTEMS INC
		CENTRAL INDEX KEY:			0000720500
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				860411215
		STATE OF INCORPORATION:			AZ
		FISCAL YEAR END:			0930

	FILING VALUES:
		FORM TYPE:		10-Q
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-11412
		FILM NUMBER:		151033104

	BUSINESS ADDRESS:	
		STREET 1:		131 S CLARK DR
		CITY:			TEMPE
		STATE:			AZ
		ZIP:			85281
		BUSINESS PHONE:		6029675146

	MAIL ADDRESS:	
		STREET 1:		131 SOUTH CLARK DRIVE
		CITY:			TEMPE
		STATE:			AZ
		ZIP:			85281

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	QUARTZ ENGINEERING & MATERIALS INC
		DATE OF NAME CHANGE:	19870715
</SEC-HEADER>
<DOCUMENT>
<TYPE>10-Q
<SEQUENCE>1
<FILENAME>asys63015-10q.htm
<DESCRIPTION>10-Q
<TEXT>
<!DOCTYPE html PUBLIC "-//W3C//DTD HTML 4.01 Transitional//EN" "http://www.w3.org/TR/html4/loose.dtd">
<html>
	<head>
		<!-- Document created using Wdesk 1 -->
		<!-- Copyright 2015 Workiva -->
		<title>ASYS 6.30.15-10Q</title>
	</head>
	<body style="font-family:Times New Roman;font-size:10pt;">
<a name="s4B8CCF146B3F53B6A8C925D5A251AC8E"></a><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s240028F91D625D1D809F7FF44963CEEE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><br><div style="line-height:120%;text-align:center;font-size:14pt;"><font style="font-family:inherit;font-size:14pt;font-weight:bold;">UNITED STATES</font></div><div style="line-height:120%;text-align:center;font-size:14pt;"><font style="font-family:inherit;font-size:14pt;font-weight:bold;">SECURITIES AND EXCHANGE COMMISSION</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Washington, D.C. 20549</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">____________________</font></div><div style="line-height:120%;padding-top:12px;text-align:center;font-size:18pt;"><font style="font-family:inherit;font-size:18pt;font-weight:bold;">FORM 10-Q</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font><font style="font-family:inherit;font-size:10pt;font-weight:bold;">(Mark One)</font></div><div style="line-height:120%;text-align:left;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="2"></td></tr><tr><td width="12%"></td><td width="88%"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">[X]</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934</font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;For the quarterly period ended: </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">June&#160;30, 2015</font><font style="font-family:inherit;font-size:10pt;">&#32;</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">OR</font></div><div style="line-height:120%;text-align:left;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="2"></td></tr><tr><td width="12%"></td><td width="88%"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">[&#160;&#160;]</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934</font></div></td></tr></table></div></div><div style="line-height:120%;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">For the transition period from ________________ to ________________</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Commission File Number: </font><font style="font-family:inherit;font-size:10pt;text-decoration:underline;">0-11412</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:18pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="1"></td></tr><tr><td width="100%"></td></tr><tr><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:18pt;"><font style="font-family:inherit;font-size:18pt;font-weight:bold;">AMTECH SYSTEMS, INC.</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(Exact name of registrant as specified in its charter)</font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="2"></td></tr><tr><td width="63%"></td><td width="37%"></td></tr><tr><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Arizona</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">86-0411215</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(State or other jurisdiction of</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(I.R.S. Employer</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">incorporation or organization)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Identification No.)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">131 South Clark Drive, Tempe, Arizona</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">85281</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(Address of principal executive offices)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(Zip Code)</font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Registrant&#8217;s telephone number, including area code: </font><font style="font-family:inherit;font-size:10pt;text-decoration:underline;">480-967-5146</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Indicate by a check mark whether the registrant (1) has filed all reports required to be filed by Section 13 or 15(d) of the Securities Exchange Act of 1934 during the preceding 12 months (or for such shorter period that the registrant was required to file such reports), and (2) has been subject to such filing requirements for the past 90 days. [X] Yes [&#160;&#160; ] No</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Indicate by check mark whether the registrant has submitted electronically and posted on its corporate Web site, if any, every Interactive Data File required to be submitted and posted pursuant to Rule 405 of Regulation S-T (&#167;232.405 of this chapter) during the preceding 12 months (or for such shorter period that the registrant was required to submit and post such files). [&#160;X&#160; ] Yes [&#160; &#160;] No</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Indicate by check mark whether the registrant is a large accelerated filer, an accelerated filer, a non-accelerated filer, or a smaller reporting company. See the definitions of &#8220;large accelerated filer,&#8221; &#8220;accelerated filer&#8221; and &#8220;smaller reporting company&#8221; in Rule 12b-2 of the Exchange Act. (Check one):</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="2"></td></tr><tr><td width="59%"></td><td width="41%"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Large accelerated filer [&#160;&#160; ]</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Accelerated filer [X]</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Non-accelerated filer [  ] (Do not check if a smaller reporting company)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Smaller Reporting Company [&#160;&#160; ]</font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Indicate by check mark whether the registrant is a shell company (as defined in Rule 12b-2 of the Exchange Act). Yes [&#160;&#160; ] No [X]</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Shares of Common Stock outstanding as of </font><font style="font-family:inherit;font-size:10pt;">August&#160;1, 2015</font><font style="font-family:inherit;font-size:10pt;">: </font><font style="font-family:inherit;font-size:10pt;">13,150,469</font></div><br><hr style="page-break-after:always"><a name="s240028F91D625D1D809F7FF44963CEEE"></a><br><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">AMTECH SYSTEMS, INC. AND SUBSIDIARIES</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">TABLE OF CONTENTS</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="2"></td></tr><tr><td width="90%"></td><td width="10%"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Page</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;font-weight:bold;" href="#sA9946D9EC49A54B0A87F2640503082A1"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">PART I. FINANCIAL INFORMATION</font></a></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;font-weight:bold;" href="#s697F672F7782510181F7F3632D75DE49"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Item 1. Condensed Consolidated Financial Statements</font></a></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:36px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#sDEC4CDECB9E359BFB56202D88C9030FD"><font style="font-family:inherit;font-size:10pt;">Condensed Consolidated Balance Sheets <br>June 30, 2015 (Unaudited) and September 30, 2014</font></a></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:right;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#sDEC4CDECB9E359BFB56202D88C9030FD">3</a></div></td></tr><tr><td style="vertical-align:bottom;padding-left:36px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;text-decoration:underline;" href="#s9D5D306F1FD25624A708B3199C98C150"><font style="font-family:inherit;font-size:10pt;text-decoration:underline;">Condensed Consolidated Statements of Operations (Unaudited) <br>Three and Nine Months Ended June 30, 2015 and 2014</font></a></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:right;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s9D5D306F1FD25624A708B3199C98C150">5</a></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:36px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s7AEFE375EFDA58FEADC830ACDD021152"><font style="font-family:inherit;font-size:10pt;">Condensed Consolidated Statements of Comprehensive Income (Loss) (Unaudited) <br>Three and Nine Months Ended June 30, 2015 and 2014</font></a></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:right;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#sDDACA4E12C3153B1A0BECFE569D3530A">6</a></div></td></tr><tr><td style="vertical-align:bottom;padding-left:36px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s7AEFE375EFDA58FEADC830ACDD021152"><font style="font-family:inherit;font-size:10pt;">Condensed Consolidated Statements of Cash Flows (Unaudited) Nine Months Ended June 30, 2015 and 2014</font></a></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:right;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s7AEFE375EFDA58FEADC830ACDD021152">7</a></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:36px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#sCF229693289D5B3E8AFBAAB758B1F2F4"><font style="font-family:inherit;font-size:10pt;">Notes to Condensed Consolidated Financial Statements (Unaudited)</font></a></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:right;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#sCF229693289D5B3E8AFBAAB758B1F2F4">8</a></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;font-weight:bold;" href="#sD4B181AA640E5DB1A1ADC6DFABB98E61"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Item 2. Management&#8217;s Discussion and Analysis of Financial Condition and Results of Operations</font></a></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:36px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#sD33BBCDA7E115222A3E3BB3A3760B246"><font style="font-family:inherit;font-size:10pt;">Cautionary Statement Regarding Forward-Looking Statements</font></a></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:right;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#sD33BBCDA7E115222A3E3BB3A3760B246">26</a></div></td></tr><tr><td style="vertical-align:bottom;padding-left:36px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s13789F99B2AD53F387E33853B44831EF"><font style="font-family:inherit;font-size:10pt;">Overview</font></a></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:right;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s13789F99B2AD53F387E33853B44831EF">27</a></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:36px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s06B4F19B97AB590DBA6A75658755EFB6"><font style="font-family:inherit;font-size:10pt;">Results of Operations</font></a></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:right;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s06B4F19B97AB590DBA6A75658755EFB6">27</a></div></td></tr><tr><td style="vertical-align:bottom;padding-left:36px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s158C31D8E9675B7989BBF469079198A3"><font style="font-family:inherit;font-size:10pt;">Liquidity and Capital Resources</font></a></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:right;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s158C31D8E9675B7989BBF469079198A3">32</a></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:36px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s713EEA3E5D7151CFA74E3E1632AC309B"><font style="font-family:inherit;font-size:10pt;">Off-Balance Sheet Arrangements</font></a></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:right;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s713EEA3E5D7151CFA74E3E1632AC309B">33</a></div></td></tr><tr><td style="vertical-align:bottom;padding-left:36px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#sCE709D5632EA5ED1A3A26296FB006F31"><font style="font-family:inherit;font-size:10pt;">Contractual Obligations</font></a></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:right;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#sCE709D5632EA5ED1A3A26296FB006F31">33</a></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:36px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#sB3F6B72D34F75DF0B21C56EDCE436F47"><font style="font-family:inherit;font-size:10pt;">Critical Accounting Policies</font></a></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:right;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#sB3F6B72D34F75DF0B21C56EDCE436F47">33</a></div></td></tr><tr><td style="vertical-align:bottom;padding-left:36px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s6877E21E669D5FEB92F9A8AF089F992A"><font style="font-family:inherit;font-size:10pt;">Impact of Recently Issued Accounting Pronouncements</font></a></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:right;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s6877E21E669D5FEB92F9A8AF089F992A">33</a></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;font-weight:bold;" href="#sB38A54B0E7D05C77802E4B5050D33668"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Item 3. Quantitative and Qualitative Disclosures About Market Risk</font></a></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:right;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#sB38A54B0E7D05C77802E4B5050D33668">34</a></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;font-weight:bold;" href="#s7DBC9874169954789489FDDC3BEB2A2E"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Item 4. Controls and Procedures</font></a></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:right;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s7DBC9874169954789489FDDC3BEB2A2E">35</a></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;font-weight:bold;" href="#s9B3879166BDA581BB93F1DB3ED2C8832"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">PART II. OTHER INFORMATION</font></a></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#sF1000F63902F56B8BAF8ABEB9473580B"><font style="font-family:inherit;font-size:10pt;">Item 1. Legal Proceedings</font></a></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:right;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#sF1000F63902F56B8BAF8ABEB9473580B">36</a></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s1A513F97553D516B891C26652128C789"><font style="font-family:inherit;font-size:10pt;">Item 1A. Risk Factors</font></a></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:right;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s1A513F97553D516B891C26652128C789">36</a></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s2E03751E504655A3927A6DD035BE1F29"><font style="font-family:inherit;font-size:10pt;">Item 2. Unregistered Sales of Equity Securities and Use of Proceeds</font></a></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:right;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s2E03751E504655A3927A6DD035BE1F29">36</a></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#sD90F8673ECB758CB9697C726F08A2E04"><font style="font-family:inherit;font-size:10pt;">Item 3. Defaults Upon Senior Securities</font></a></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:right;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#sD90F8673ECB758CB9697C726F08A2E04">36</a></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s185746D2FDEA5EE9B2F02D9A1E8101E3"><font style="font-family:inherit;font-size:10pt;">Item 4. Mine Safety Disclosures</font></a></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:right;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s185746D2FDEA5EE9B2F02D9A1E8101E3">36</a></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s4B87564E21225518946FEE927B2ED855"><font style="font-family:inherit;font-size:10pt;">Item 5. Other Information</font></a></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:right;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s4B87564E21225518946FEE927B2ED855">36</a></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s66E207D42AE65FFB81BE771866FD17D5"><font style="font-family:inherit;font-size:10pt;">Item 6. Exhibits</font></a></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:right;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s66E207D42AE65FFB81BE771866FD17D5">37</a></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;font-weight:bold;" href="#s5ECE04604A1555C885345F6C2EBC0611"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">SIGNATURES</font></a></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:right;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s5ECE04604A1555C885345F6C2EBC0611">38</a></div></td></tr></table></div></div><br><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2</font></div></div><hr style="page-break-after:always"><a name="sA9946D9EC49A54B0A87F2640503082A1"></a><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s240028F91D625D1D809F7FF44963CEEE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><br><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">PART I. FINANCIAL INFORMATION</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><a name="s697F672F7782510181F7F3632D75DE49"></a><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:72px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:0px;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Item  1.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Condensed Consolidated Financial Statements</font></div></td></tr></table><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><a name="sDEC4CDECB9E359BFB56202D88C9030FD"></a><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">AMTECH SYSTEMS, INC. AND SUBSIDIARIES</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Condensed Consolidated Balance Sheets</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">(in thousands except share data)</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="9"></td></tr><tr><td width="70%"></td><td width="1%"></td><td width="1%"></td><td width="12%"></td><td width="1%"></td><td width="1%"></td><td width="1%"></td><td width="12%"></td><td width="1%"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">June&#160;30, <br>2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">September&#160;30, <br>2014</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(Unaudited)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Assets</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Current Assets</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Cash and cash equivalents</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">23,715</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">27,367</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Restricted cash</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,574</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,380</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Accounts receivable</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:36px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Trade (less allowance for doubtful accounts of $3,440 and $2,846 at June 30, 2015, and September 30, 2014, respectively)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">19,559</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8,896</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:36px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Unbilled and other</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">10,162</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">6,880</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Inventories</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">29,436</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">16,760</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Deferred income taxes</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,650</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,060</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Refundable income taxes</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">300</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Other</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">3,967</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,082</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:top;background-color:#cceeff;padding-left:36px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Total current assets</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:top;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">90,363</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:top;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">65,425</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Property, Plant and Equipment - Net</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">20,042</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9,752</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Deferred Income Taxes - Long Term</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">120</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,300</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Intangible Assets - Net</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5,187</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,678</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Goodwill</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">15,043</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8,323</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Other Assets - Long Term</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">3,300</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,426</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Total Assets</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">134,055</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">89,904</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The accompanying notes are an integral part of these condensed consolidated financial statements.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><br><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">3</font></div></div><hr style="page-break-after:always"><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s240028F91D625D1D809F7FF44963CEEE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><br><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">AMTECH SYSTEMS, INC. AND SUBSIDIARIES</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Condensed Consolidated Balance Sheets</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">(in thousands except share data)</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="9"></td></tr><tr><td width="70%"></td><td width="1%"></td><td width="1%"></td><td width="12%"></td><td width="1%"></td><td width="1%"></td><td width="1%"></td><td width="12%"></td><td width="1%"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">June&#160;30, <br>2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">September&#160;30, <br>2014</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(Unaudited)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Liabilities and Stockholders' Equity</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Current Liabilities</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Accounts payable</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">19,853</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">6,003</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Current maturities of long-term debt</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">692</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Accrued compensation and related taxes</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">6,361</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4,269</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Accrued warranty expense</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,023</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">628</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Deferred profit</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5,120</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">6,908</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Customer deposits</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">10,192</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4,992</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Other accrued liabilities</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5,465</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5,346</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Income taxes payable</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4,990</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:top;padding-left:36px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Total current liabilities</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">48,706</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">33,136</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Long-term Debt</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8,619</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Income Taxes Payable - Long Term</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4,890</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">3,180</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Deferred Income Taxes - Long Term</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">250</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:36px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Total liabilities</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">62,465</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">36,316</font></div></td><td style="vertical-align:bottom;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Commitments and Contingencies</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Stockholders' Equity</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Preferred stock; 100,000,000 shares authorized; none issued</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Common stock; $0.01 par value; 100,000,000 shares authorized; <br>shares issued and outstanding: 13,150,222 and 9,848,253 at June 30, 2015, and September 30, 2014, respectively</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">132</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">98</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Additional paid-in capital</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">109,891</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">81,884</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Accumulated other comprehensive loss</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(8,733</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(5,790</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Retained deficit</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(30,170</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(21,051</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:52px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Total stockholders' equity</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">71,120</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">55,141</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Noncontrolling interest</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">470</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,553</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:52px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Total equity</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">71,590</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">53,588</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Total Liabilities and Stockholders' Equity</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">134,055</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">89,904</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The accompanying notes are an integral part of these condensed consolidated financial statements.</font></div><br><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4</font></div></div><hr style="page-break-after:always"><a name="s9D5D306F1FD25624A708B3199C98C150"></a><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s240028F91D625D1D809F7FF44963CEEE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><br><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">AMTECH SYSTEMS, INC. AND SUBSIDIARIES</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Condensed Consolidated Statements of Operations</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">(Unaudited)</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">(in thousands, except per share data)</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:93.359375%;border-collapse:collapse;text-align:left;"><tr><td colspan="16"></td></tr><tr><td width="51%"></td><td width="1%"></td><td width="10%"></td><td width="1%"></td><td width="1%"></td><td width="1%"></td><td width="10%"></td><td width="1%"></td><td width="1%"></td><td width="1%"></td><td width="10%"></td><td width="1%"></td><td width="1%"></td><td width="1%"></td><td width="8%"></td><td width="1%"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Three Months Ended June 30,</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Nine Months Ended June 30,</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2014</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2014</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Revenues, net of returns and allowances</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">40,016</font></div></td><td style="vertical-align:bottom;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9,190</font></div></td><td style="vertical-align:bottom;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">76,685</font></div></td><td style="vertical-align:bottom;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">36,678</font></div></td><td style="vertical-align:bottom;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Cost of sales</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">29,888</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">7,559</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">56,240</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">27,615</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Gross profit </font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">10,128</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,631</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">20,445</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9,063</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Selling, general and administrative</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">10,054</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4,103</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">24,513</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">13,504</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Research, development and engineering</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,308</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,399</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">3,894</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4,443</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Operating loss</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,234</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(3,871</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(7,962</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(8,884</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Interest expense and other income, net</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(15</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">43</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(135</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">130</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Loss before income taxes</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,249</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(3,828</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(8,097</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(8,754</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Income tax provision</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">290</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,325</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">640</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,885</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Net loss</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,539</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(5,153</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(8,737</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(10,639</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Add: net loss (income) attributable to noncontrolling interest</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(65</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(104</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(382</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">837</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Net loss attributable to Amtech Systems, Inc.</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,604</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(5,257</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(9,119</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(9,802</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Loss Per Share:</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Basic loss per share attributable to Amtech shareholders</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(0.12</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(0.53</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(0.78</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1.01</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Weighted average shares outstanding</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">13,103</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9,843</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">11,644</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9,694</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Diluted loss per share attributable to Amtech shareholders</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(0.12</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(0.53</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(0.78</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1.01</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Weighted average shares outstanding</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">13,103</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9,843</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">11,644</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9,694</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The accompanying notes are an integral part of these condensed consolidated financial statements.</font></div><br><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5</font></div></div><hr style="page-break-after:always"><a name="sDDACA4E12C3153B1A0BECFE569D3530A"></a><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s240028F91D625D1D809F7FF44963CEEE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><br><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">AMTECH SYSTEMS, INC. AND SUBSIDIARIES</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Condensed Consolidated Statements of Comprehensive Income (Loss)</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">(Unaudited)</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">(in thousands)</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:98.6328125%;border-collapse:collapse;text-align:left;"><tr><td colspan="16"></td></tr><tr><td width="38%"></td><td width="1%"></td><td width="13%"></td><td width="1%"></td><td width="1%"></td><td width="1%"></td><td width="12%"></td><td width="1%"></td><td width="1%"></td><td width="1%"></td><td width="13%"></td><td width="1%"></td><td width="1%"></td><td width="1%"></td><td width="13%"></td><td width="1%"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Three Months Ended June 30,</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Nine Months Ended June 30,</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2014</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2014</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Net loss</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,539</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(5,153</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(8,737</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(10,639</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Foreign currency translation adjustment</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">213</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(335</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(3,168</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">406</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Comprehensive loss</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,326</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(5,488</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(11,905</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(10,233</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Comprehensive (income) loss attributable to noncontrolling interest</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(18</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(80</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(157</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">844</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Comprehensive loss attributable to Amtech Systems, Inc.</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,344</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(5,568</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(12,062</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(9,389</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The accompanying notes are an integral part of these condensed consolidated financial statements.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><br><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">6</font></div></div><hr style="page-break-after:always"><a name="s7AEFE375EFDA58FEADC830ACDD021152"></a><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s240028F91D625D1D809F7FF44963CEEE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><br><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">AMTECH SYSTEMS, INC. AND SUBSIDIARIES</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Condensed Consolidated Statements of Cash Flows</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">(Unaudited)</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">(in thousands)</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:99.8046875%;border-collapse:collapse;text-align:left;"><tr><td colspan="8"></td></tr><tr><td width="69%"></td><td width="1%"></td><td width="13%"></td><td width="1%"></td><td width="1%"></td><td width="1%"></td><td width="13%"></td><td width="1%"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Nine Months Ended June 30,</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2014</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Operating Activities</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Net loss</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(8,737</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(10,639</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Adjustments to reconcile net loss to net </font></div><div style="text-align:left;padding-left:48px;text-indent:-24px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">cash provided by (used in) operating activities:</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:52px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Depreciation and amortization</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,488</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,796</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:52px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Write-down of inventory</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">31</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">199</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:52px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Deferred income taxes</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">914</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">705</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:52px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Non-cash share based compensation expense</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">864</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">603</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:52px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Provision for (reversal of) allowance for doubtful accounts</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(300</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,309</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Changes in operating assets and liabilities:</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:52px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Restricted cash</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">888</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,078</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:52px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Accounts receivable</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(4,193</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(10,798</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:52px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Inventories</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(3,460</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">3,700</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:52px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Income taxes refundable and payable, net</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(5,561</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">7,648</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:52px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Prepaid expenses and other assets</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">639</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">958</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:52px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Accounts payable</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4,514</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,524</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:52px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Accrued liabilities and customer deposits</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">695</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(12,007</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:52px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Deferred profit</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,156</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">6,168</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Net cash used in operating activities</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(12,374</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(6,756</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Investing Activities</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Purchases of property, plant and equipment</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(511</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(214</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Acquisitions, net of cash acquired</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8,595</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Net cash provided by (used in) investing activities</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8,084</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(214</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Financing Activities</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Proceeds from the exercise of stock options</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">521</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,136</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Payments on long-term debt</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(311</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Borrowings on long-term debt</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">557</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Excess tax benefit of stock options</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">30</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">100</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Net cash provided by financing activities</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">797</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,236</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Effect of Exchange Rate Changes on Cash</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(159</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">175</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Net Decrease in Cash and Cash Equivalents</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(3,652</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(5,559</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Cash and Cash Equivalents, Beginning of Period</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">27,367</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">37,197</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Cash and Cash Equivalents, End of Period</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">23,715</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">31,638</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:24px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:24px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:24px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:24px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Supplemental Cash Flow Information:</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Income tax refunds</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">6,779</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Income tax payments</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4,775</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">178</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Issuance of common stock for acquisitions</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">26,625</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The accompanying notes are an integral part of these condensed consolidated financial statements.</font></div><br><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">7</font></div></div><hr style="page-break-after:always"><a name="sCF229693289D5B3E8AFBAAB758B1F2F4"></a><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s240028F91D625D1D809F7FF44963CEEE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><br><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">AMTECH SYSTEMS, INC. AND SUBSIDIARIES</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">NOTES TO CONDENSED CONSOLIDATED FINANCIAL STATEMENTS</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">THREE AND NINE MONTHS ENDED June 30, 2015 AND 2014</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">(UNAUDITED)</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><a name="s22A09AB991D4546EAAE28BDAED3D6C60"></a><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:24px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:0px;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">1.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Basis of Presentation</font></div></td></tr></table><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Nature of Operations and Basis of Presentation </font><font style="font-family:inherit;font-size:10pt;">-&#160;The Company serves niche markets in industries that are experiencing rapid technological advances and which historically have been very cyclical. Therefore, future profitability and growth depend on the Company&#8217;s ability to develop or acquire and market profitable new products and on its ability to adapt to cyclical trends.&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The accompanying unaudited condensed consolidated financial statements have been prepared pursuant to the rules and regulations of the Securities and Exchange Commission (the &#8220;SEC&#8221;), and consequently do not include all disclosures normally required by accounting principles generally accepted in the United States of America. In the opinion of management, the accompanying unaudited interim condensed consolidated financial statements contain all adjustments necessary, all of which are of a normal and recurring nature, to present fairly our financial position, results of operations and cash flows. Certain information and note disclosures normally included in financial statements have been condensed or omitted pursuant to the rules and regulations of the SEC. These condensed consolidated financial statements should be read in conjunction with the audited consolidated financial statements and notes thereto included in our Annual Report on Form 10-K for the fiscal year ended September&#160;30, 2014.</font></div><div style="line-height:120%;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The consolidated results of operations for the three and nine months ended June&#160;30, 2015, are not necessarily indicative of the results to be expected for the full fiscal year.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Principles of Consolidation &#8211;</font><font style="font-family:inherit;font-size:10pt;">&#32;The consolidated financial statements include the accounts of the Company and its wholly-owned subsidiaries and subsidiaries in which it has a controlling interest. The Company reports noncontrolling interests in consolidated entities as a component of equity separate from the Company&#8217;s equity. All material intercompany accounts and transactions have been eliminated in consolidation.&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Use of Estimates</font><font style="font-family:inherit;font-size:10pt;">&#32;- The preparation of consolidated financial statements in conformity with accounting principles generally accepted in the United States of America requires management to make estimates and assumptions that affect the reported amounts of assets and liabilities and disclosure of contingent assets and liabilities at the date of the consolidated financial statements and the reported amounts of revenue and expenses during the reporting period. Actual results could differ from those estimates.<br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Revenue Recognition</font><font style="font-family:inherit;font-size:10pt;">&#32;- We review product and service sales contracts with multiple deliverables to determine if separate units of accounting are present. Where separate units of accounting exist, revenue allocated to delivered items is the lower of the relative selling price of the delivered items in the sales arrangement or the portion of the selling price that is not contingent upon performance of the service. </font></div><div style="line-height:120%;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">We recognize revenue when persuasive evidence of an arrangement exists; the product has been delivered and title has transferred, or services have been rendered; and the seller&#8217;s price to the buyer is fixed or determinable and collectability is reasonably assured. For us, this policy generally results in revenue recognition at the following points:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">1.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">For our equipment business, transactions where legal title passes to the customer upon shipment, we recognize revenue upon shipment for those products where the customer&#8217;s defined specifications have been met with at least two similarly configured systems and processes for a comparably situated customer. Our selling prices may include both equipment and services, i.e., installation and start-up services performed by our service technicians. The equipment and services are multiple deliverables. Certain equipment that has a positive track record of successful installation and customer acceptance are considered to be routine systems.  Our recognition of revenue upon delivery of such equipment that has been routinely installed and accepted is equal to the total selling price minus the relative selling price of the undelivered services.  </font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Where the installation and acceptance of more than two similarly configured equipment has not become routine, recognition of revenue upon delivery of equipment is limited to the lesser of (i) the total selling price minus the relative selling price of the undelivered services or (ii) the non-contingent amount. Since we defer only those costs directly related to installation, or other unit of accounting not yet delivered, and the portion of the contract price is often considerably greater than the relative selling price of those items, our policy at times will result in deferral of profit that is disproportionate in relation to the deferred revenue. When this is the case, the gross margin recognized in one period will be lower and the gross margin reported in a subsequent period will improve.</font></div><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><br><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8</font></div></div><hr style="page-break-after:always"><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s240028F91D625D1D809F7FF44963CEEE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><br><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">2.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">For products where the customer&#8217;s defined specifications have not been met with at least two similarly configured systems and processes, the revenue and directly related costs are deferred at the time of shipment and later recognized at the time of customer acceptance or when this criterion has been met. We have, on occasion, experienced longer than expected delays in receiving cash from certain customers pending final installation or system acceptance. If some of our customers refuse to pay the final payment, or otherwise delay final acceptance or installation, the deferred revenue would not be recognized, adversely affecting our future cash flows and operating results.</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">3.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Sales of certain equipment, spare parts and consumables are recognized upon shipment, as there are no post shipment obligations other than standard warranties.</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">4.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Service revenue is recognized upon performance of the services requested by the customer. Revenue related to service contracts is recognized ratably over the period of the contract or in accordance with the terms of the contract, which generally coincides with the performance of the services requested by the customer.</font></div></td></tr></table><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Deferred Profit</font><font style="font-family:inherit;font-size:10pt;">&#32;&#8211; Revenue deferred pursuant to the Company&#8217;s revenue recognition policy, net of the related deferred costs, if any, is recorded as deferred profit in current liabilities. The components of deferred profit are as follows:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="8"></td></tr><tr><td width="71%"></td><td width="1%"></td><td width="12%"></td><td width="1%"></td><td width="1%"></td><td width="1%"></td><td width="12%"></td><td width="1%"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">June&#160;30, <br>2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">September&#160;30, <br>2014</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Deferred revenues</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">7,536</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8,118</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Deferred costs</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,416</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,210</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Deferred profit</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5,120</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">6,908</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Concentrations of Credit Risk &#8211;</font><font style="font-family:inherit;font-size:10pt;">&#32;Financial instruments that potentially subject the Company to significant concentrations of credit risk consist principally of trade accounts receivable and cash. The Company&#8217;s customers, located throughout the world, consist of manufacturers of solar cells, semiconductors, semiconductor wafers, light-emitting diodes (LEDs) and micro-electro-mechanical systems (MEMS). Credit risk is managed by performing ongoing credit evaluations of the customers&#8217; financial condition, by requiring significant deposits where appropriate, and by actively monitoring collections. Letters of credit are required of certain customers depending on the size of the order, type of customer or its creditworthiness, and its country of domicile. Reserves for potentially uncollectible receivables are maintained based on an assessment of collectability.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The Company maintains its cash, cash equivalents and restricted cash in multiple financial institutions. Balances in the United States (approximately </font><font style="font-family:inherit;font-size:10pt;">60%</font><font style="font-family:inherit;font-size:10pt;">&#32;of total cash balances) are primarily invested in U.S. Treasuries or are in financial institutions insured by the Federal Deposit Insurance Corporation (FDIC). The remainder of the Company&#8217;s cash is maintained in banks in The Netherlands, France, China, and other foreign jurisdictions that are uninsured.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">As of </font><font style="font-family:inherit;font-size:10pt;">June&#160;30, 2015</font><font style="font-family:inherit;font-size:10pt;">, </font><font style="font-family:inherit;font-size:10pt;">one</font><font style="font-family:inherit;font-size:10pt;">&#32;customer accounted for </font><font style="font-family:inherit;font-size:10pt;">12%</font><font style="font-family:inherit;font-size:10pt;">&#32;of accounts receivable.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Restricted Cash</font><font style="font-family:inherit;font-size:10pt;">&#32;&#8211; Restricted cash is </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">$1.6 million</font><font style="font-family:inherit;font-size:10pt;">&#32;and </font><font style="font-family:Times New Roman;font-size:10pt;color:#000000;font-style:normal;font-weight:normal;text-decoration:none;">$2.4 million</font><font style="font-family:inherit;font-size:10pt;">&#32;as of </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">June&#160;30, 2015</font><font style="font-family:inherit;font-size:10pt;">, and </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">September&#160;30, 2014</font><font style="font-family:inherit;font-size:10pt;">, respectively. The balance includes collateral for bank guarantees required by certain customers from whom deposits have been received in advance of shipment and cash received from research and development grants related to our ion implant technology to be used for research and development projects.  </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Accounts Receivable - Unbilled and Other</font><font style="font-family:inherit;font-size:10pt;">&#32;&#8211; Unbilled and other accounts receivable consist mainly of the contingent portion of the sales price that is not collectible until successful installation of the product. These amounts are generally billed upon final customer acceptance. For the majority of these amounts, a liability has been accrued in deferred profit. </font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><br><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9</font></div></div><hr style="page-break-after:always"><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s240028F91D625D1D809F7FF44963CEEE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><br><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Inventories</font><font style="font-family:inherit;font-size:10pt;">&#32;&#8211; Inventories are stated at the lower of cost or net realizable value. Approximately </font><font style="font-family:inherit;font-size:10pt;">50%</font><font style="font-family:inherit;font-size:10pt;">&#32;and </font><font style="font-family:inherit;font-size:10pt;">70%</font><font style="font-family:inherit;font-size:10pt;">&#32;of inventory is valued on an average cost basis with the remainder determined on a first-in, first-out (FIFO) basis at June 30, 2015, and September 30, 2014, respectively. The components of inventories are as follows:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="8"></td></tr><tr><td width="71%"></td><td width="1%"></td><td width="12%"></td><td width="1%"></td><td width="1%"></td><td width="1%"></td><td width="12%"></td><td width="1%"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">June&#160;30, <br>2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">September&#160;30, <br>2014</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Purchased parts and raw materials</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">13,129</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8,797</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Work-in-process</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">6,248</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4,809</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Finished goods</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">10,059</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">3,154</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">29,436</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">16,760</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Property, Plant and Equipment</font><font style="font-family:inherit;font-size:10pt;">&#32;&#8211; Property, plant and equipment are recorded at cost. Maintenance and repairs are charged to expense as incurred. The cost of property retired or sold and the related accumulated depreciation are removed from the applicable accounts when disposition occurs and any gain or loss is recognized. Depreciation is computed using the straight-line method. Useful lives for equipment, machinery and leasehold improvements range from three to seven years; for furniture and fixtures from five to ten years; and for buildings </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">20-25</font><font style="font-family:inherit;font-size:10pt;">&#32;years.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The following is a summary of property, plant and equipment:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="8"></td></tr><tr><td width="71%"></td><td width="1%"></td><td width="12%"></td><td width="1%"></td><td width="1%"></td><td width="1%"></td><td width="12%"></td><td width="1%"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">June&#160;30, <br>2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">September&#160;30, <br>2014</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Land, building and leasehold improvements</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">18,137</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">10,414</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Equipment and machinery</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">11,704</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8,189</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Furniture and fixtures</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5,418</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5,453</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">35,259</font></div></td><td style="vertical-align:bottom;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">24,056</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Accumulated depreciation</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(15,217</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(14,304</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">20,042</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9,752</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><br><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">10</font></div></div><hr style="page-break-after:always"><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s240028F91D625D1D809F7FF44963CEEE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><br><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Goodwill -</font><font style="font-family:inherit;font-size:10pt;">&#32;Goodwill is not subject to amortization and is reviewed for impairment on an annual basis, typically at the end of the fiscal year, or more frequently if circumstances dictate.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The following is a summary of activity in goodwill:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:87.109375%;border-collapse:collapse;text-align:left;"><tr><td colspan="16"></td></tr><tr><td width="44%"></td><td width="1%"></td><td width="11%"></td><td width="1%"></td><td width="1%"></td><td width="1%"></td><td width="11%"></td><td width="1%"></td><td width="1%"></td><td width="1%"></td><td width="11%"></td><td width="1%"></td><td width="1%"></td><td width="1%"></td><td width="12%"></td><td width="1%"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Solar</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Semiconductor</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Polishing</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Total</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="15" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;padding-left:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;&#160;&#160;Goodwill</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">12,315</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">728</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">13,043</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;padding-left:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;&#160;&#160;Accumulated impairment losses</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(4,720</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(4,720</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Carrying value at September 30, 2014</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">7,595</font></div></td><td style="vertical-align:bottom;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">728</font></div></td><td style="vertical-align:bottom;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8,323</font></div></td><td style="vertical-align:bottom;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Goodwill recognized due to acquisitions</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,324</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4,697</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">7,021</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Net exchange differences</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(301</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(301</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Carrying value at June 30, 2015</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9,618</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4,697</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">728</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">15,043</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;padding-left:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;&#160;&#160;Goodwill</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">14,155</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4,697</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">728</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">19,580</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;&#160;&#160;Accumulated impairment losses</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(4,537</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(4,537</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Carrying value at June 30, 2015</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9,618</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4,697</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">728</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">15,043</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Intangibles</font><font style="font-family:inherit;font-size:10pt;">&#32;&#8211; Intangible assets are capitalized and amortized over their useful life if the life is determinable. If the life is not determinable, amortization is not recorded.  On December 24, 2014, the Company acquired a </font><font style="font-family:inherit;font-size:10pt;">51%</font><font style="font-family:inherit;font-size:10pt;">&#32;controlling interest in SoLayTec,</font><font style="font-family:inherit;font-size:10pt;">&#32;</font><font style="font-family:inherit;font-size:10pt;">B.V. (&#8220;SoLayTec&#8221;). The intangible assets of SoLayTec total </font><font style="font-family:inherit;font-size:10pt;">$2.2</font><font style="font-family:inherit;font-size:10pt;">&#32;million and are included in "Other" in the table below. The fair value of the intangible assets, the allocation and the amortization period are still being evaluated by the Company.  On January 30, 2015, the Company completed the merger with BTU International, Inc. ("BTU"). The intangible assets of BTU total </font><font style="font-family:inherit;font-size:10pt;">$1.3</font><font style="font-family:inherit;font-size:10pt;">&#32;million, and are included in "Trade Names" in the table below.  See Note 10, &#8220;Acquisitions,&#8221; for more information regarding the acquisition of SoLayTec and the merger with BTU.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The following is a summary of intangibles:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:98.4375%;border-collapse:collapse;text-align:left;"><tr><td colspan="22"></td></tr><tr><td width="20%"></td><td width="13%"></td><td width="1%"></td><td width="1%"></td><td width="8%"></td><td width="1%"></td><td width="1%"></td><td width="9%"></td><td width="1%"></td><td width="1%"></td><td width="8%"></td><td width="1%"></td><td width="4%"></td><td width="1%"></td><td width="8%"></td><td width="1%"></td><td width="1%"></td><td width="9%"></td><td width="1%"></td><td width="1%"></td><td width="8%"></td><td width="1%"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">Useful Life</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Gross Carrying Amount</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Accumulated Amortization</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Net Carrying Amount</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Gross Carrying Amount</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Accumulated Amortization</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Net Carrying Amount</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="9" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">June 30, 2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="9" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">September 30, 2014</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="19" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Non-compete agreements</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4-8 years</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,035</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,035</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,055</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(955</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">100</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Customer lists</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">10 years</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">714</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(595</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">119</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">817</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(592</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">225</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Technology</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5-10 years</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,116</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,805</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">311</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,319</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,682</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">637</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In-process research and development</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5 years</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,600</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(267</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,333</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,600</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(27</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,573</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Trade names</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">15 years</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,330</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(37</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,293</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Other</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2-12 years</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,484</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(353</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,131</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">321</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(178</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">143</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9,279</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(4,092</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5,187</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">6,112</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(3,434</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,678</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Long-lived assets -  </font><font style="font-family:inherit;font-size:10pt;">Long-lived assets are reviewed for impairment when events or changes in circumstances indicate that the carrying amount of an asset may not be recoverable.    </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><br><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">11</font></div></div><hr style="page-break-after:always"><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s240028F91D625D1D809F7FF44963CEEE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><br><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Warranty &#8211;</font><font style="font-family:inherit;font-size:10pt;">&#32;A limited warranty is provided free of charge, generally for periods of </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">12</font><font style="font-family:inherit;font-size:10pt;">&#32;to </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">24</font><font style="font-family:inherit;font-size:10pt;">&#32;months, for all purchases of the Company&#8217;s new products and systems. Accruals are recorded for estimated warranty costs at the time revenue is recognized. </font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The following is a summary of activity in accrued warranty expense:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="8"></td></tr><tr><td width="67%"></td><td width="1%"></td><td width="14%"></td><td width="1%"></td><td width="1%"></td><td width="1%"></td><td width="14%"></td><td width="1%"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Nine Months Ended June 30,</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2014</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Beginning balance</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">628</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,454</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Warranty expenditures</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(530</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(663</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Warranty provisions/(adjustment)</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">925</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(25</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Ending balance</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,023</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">766</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Stock-Based Compensation -</font><font style="font-family:inherit;font-size:10pt;">&#32;The Company measures compensation costs relating to share-based payment transactions based upon the grant date fair value of the award. Those costs are recognized as expense over the requisite service period, which is generally the vesting period. The benefits of tax deductions in excess of recognized compensation cost are credited to additional paid-in capital and reported as cash flow from financing activities rather than as cash flow from operating activities. </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Stock-based compensation expense reduced the Company&#8217;s results of operations by the following amounts:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="16"></td></tr><tr><td width="59%"></td><td width="1%"></td><td width="8%"></td><td width="1%"></td><td width="1%"></td><td width="1%"></td><td width="8%"></td><td width="1%"></td><td width="1%"></td><td width="1%"></td><td width="7%"></td><td width="1%"></td><td width="1%"></td><td width="1%"></td><td width="7%"></td><td width="1%"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Three Months Ended June 30,</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Nine Months Ended June 30,</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2014</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2014</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="15" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Effect on income before income taxes (1)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(296</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(230</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(864</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(603</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Effect on income taxes</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">40</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">36</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">134</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">196</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Effect on net income</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(256</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(194</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(730</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(407</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:8pt;padding-left:24px;"><font style="font-family:inherit;font-size:8pt;">(1)</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">Stock-based compensation expense is included in selling, general and administrative expenses.</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Stock options issued under the terms of the plans have, or will have, an exercise price equal to the fair market value of the common stock at the close of trading on the Nasdaq the day prior to the date of the option grant and expire no later than </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">10 years</font><font style="font-family:inherit;font-size:10pt;">&#32;from the date of grant, with the most recent grant expiring in 2025. Options issued by the Company vest over </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">2</font><font style="font-family:inherit;font-size:10pt;">&#32;to </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">4</font><font style="font-family:inherit;font-size:10pt;">&#32;years.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Stock option transactions and the options outstanding are summarized as follows:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><br><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">12</font></div></div><hr style="page-break-after:always"><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s240028F91D625D1D809F7FF44963CEEE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><br><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="16"></td></tr><tr><td width="49%"></td><td width="1%"></td><td width="10%"></td><td width="1%"></td><td width="1%"></td><td width="1%"></td><td width="10%"></td><td width="1%"></td><td width="1%"></td><td width="1%"></td><td width="10%"></td><td width="1%"></td><td width="1%"></td><td width="1%"></td><td width="10%"></td><td width="1%"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="15" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Nine Months Ended June 30,</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2014</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Options</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Weighted</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Average</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Exercise</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Price</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Options</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Weighted</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Average</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Exercise</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Price</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Outstanding at beginning of period</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,063,324</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">7.37</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,059,417</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">6.71</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Granted</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">327,500</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9.74</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">272,906</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">7.01</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Assumed - merger</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">367,229</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">14.19</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Exercised</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(94,454</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5.51</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(263,358</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4.31</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Forfeited</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(26,571</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">29.48</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(4,546</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8.71</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Outstanding at end of period</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,637,028</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9.12</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,064,419</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">7.37</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Exercisable at end of period</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,005,690</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9.75</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">663,220</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8.14</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Weighted average fair value of options </font></div><div style="font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">granted during the period</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5.91</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4.38</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The fair value of options was estimated at the grant date using the Black-Scholes option pricing model with the following assumptions:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="4"></td></tr><tr><td width="67%"></td><td width="16%"></td><td width="1%"></td><td width="16%"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Nine Months Ended June 30,</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2014</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Risk free interest rate</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Expected life</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">6 years</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">6 years</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Dividend rate</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">0%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">0%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Volatility</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">67%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">69%</font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">To estimate expected lives for this valuation, it was assumed that options will be exercised at varying schedules after becoming fully vested. Forfeitures have been estimated at the time of grant and will be revised, if necessary, in subsequent periods if actual forfeitures differ from those estimates. Forfeitures were estimated based upon historical experience. Fair value computations are highly sensitive to the volatility factor assumed; the greater the volatility, the higher the computed fair value of the options granted. The Company uses historical stock prices to determine the volatility factor.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The Company awards restricted shares under the existing share-based compensation plans. The Company's restricted share awards vest in equal annual installments over a two- to four-year period. The total value of these awards is expensed on a ratable basis over the service period of the employees receiving the grants. The &#8220;service period&#8221; is the time during which the employees receiving grants must remain employees for the shares granted to fully vest.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Restricted stock transactions and awards outstanding are summarized as follows:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="14"></td></tr><tr><td width="49%"></td><td width="11%"></td><td width="1%"></td><td width="1%"></td><td width="1%"></td><td width="10%"></td><td width="1%"></td><td width="1%"></td><td width="11%"></td><td width="1%"></td><td width="1%"></td><td width="1%"></td><td width="10%"></td><td width="1%"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="13" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Nine Months Ended June 30,</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="6" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="6" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2014</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Awards</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Weighted</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Average</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Grant Date</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Fair Value</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Awards</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Weighted</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Average</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Grant Date</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Fair Value</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Beginning Outstanding</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">35,203</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">10.13</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">69,154</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">10.13</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Released</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(21,663</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">11.47</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(30,828</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">10.08</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Ending Outstanding</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">13,540</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">7.98</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">38,326</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">10.17</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><br><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">13</font></div></div><hr style="page-break-after:always"><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s240028F91D625D1D809F7FF44963CEEE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><br><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Fair Value of Financial Instruments </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;padding-top:6px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In accordance with the requirements of the Fair Value Measurements and Disclosures Topic of the Financial Accounting Standards Board ("FASB") Accounting Standards Codification ("ASC"), the Company groups its financial assets and liabilities measured at fair value on a recurring basis in three levels, based on the markets in which the assets and liabilities are traded and the reliability of the assumptions used to determine fair value. These levels are: </font></div><div style="line-height:120%;padding-top:6px;text-align:justify;text-indent:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Level 1 - Valuation is based upon quoted market price for identical instruments traded in active markets.</font></div><div style="line-height:120%;padding-top:6px;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Level 2 - Valuation is based on quoted market prices for similar instruments in active markets, quoted prices for identical or similar instruments in markets that are not active, and model-based valuation techniques for which all significant assumptions are observable in the market.</font></div><div style="line-height:120%;padding-top:6px;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Level 3 - Valuation is generated from model-based techniques that use significant assumptions not observable in the market. Valuation techniques include use of discounted cash flow models and similar techniques.</font></div><div style="line-height:120%;text-align:justify;font-size:4pt;"><font style="font-family:inherit;font-size:4pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In accordance with the requirements of the Fair Value Measurements and Disclosures Topic of the FASB ASC, it is the Company's policy to use observable inputs whenever reasonably practicable in order to minimize the use of unobservable inputs when developing fair value measurements. When available, the Company uses quoted market prices to measure fair value. If market prices are not available, the fair value measurement is based on models that use primarily market based parameters including interest rate yield curves, option volatilities and currency rates. In certain cases, where market rate assumptions are not available, the Company is required to make judgments about assumptions market participants would use to estimate the fair value of a financial instrument. Changes in the underlying assumptions used, including discount rates and estimates of future cash flows, could significantly affect the results of current or future values. </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;">Cash, Cash Equivalents and Restricted Cash -</font><font style="font-family:inherit;font-size:10pt;">&#32;Included in Cash and Cash Equivalents in the Condensed Consolidated Balance Sheets is </font><font style="font-family:inherit;font-size:10pt;">$9.6 million</font><font style="font-family:inherit;font-size:10pt;">&#32;and </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">$17.0 million</font><font style="font-family:inherit;font-size:10pt;">&#32;as of </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">June&#160;30, 2015</font><font style="font-family:inherit;font-size:10pt;">&#32;and </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">September&#160;30, 2014</font><font style="font-family:inherit;font-size:10pt;">, respectively, of money market funds invested in treasury bills, notes and other direct obligations of the U.S. Treasury.  The fair value of this cash equivalent is based on Level 1 inputs in the fair value hierarchy.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;">Receivables and Payables - </font><font style="font-family:inherit;font-size:10pt;">The recorded amounts of these financial instruments, including accounts receivable and accounts payable, approximate their fair value because of the short maturities of these instruments.  If measured at fair value in the financial statements, these financial instruments would be classified as Level 3 in the fair value hierarchy.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;">Debt - </font><font style="font-family:inherit;font-size:10pt;">The recorded amounts of these financial instruments, including long-term debt and current maturities of long-term debt, approximate fair value and are considered Level 2 in the fair value hierarchy.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Pensions </font><font style="font-family:inherit;font-size:10pt;">- The Company has retirement plans covering substantially all employees. The principal plans are the multiemployer defined benefit pension plans of the Company&#8217;s operations in The Netherlands and France and the plan for hourly union employees in Pennsylvania. The multiemployer plans in the United States and France are insignificant to the Company's results of operations and financial condition.  The Company's defined contribution plans cover substantially all of the employees in the United States. The Company matches employee funds on a discretionary basis.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Shipping expense</font><font style="font-family:inherit;font-size:10pt;">&#32;&#8211; Shipping expenses of </font><font style="font-family:inherit;font-size:10pt;">$1.2 million</font><font style="font-family:inherit;font-size:10pt;">&#32;and </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">$0.2 million</font><font style="font-family:inherit;font-size:10pt;">&#32;for the three months ended </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">June&#160;30, 2015</font><font style="font-family:inherit;font-size:10pt;">&#32;and </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">2014</font><font style="font-family:inherit;font-size:10pt;">, respectively, are included in selling, general and administrative expenses.  Shipping expenses of </font><font style="font-family:inherit;font-size:10pt;">$1.9</font><font style="font-family:inherit;font-size:10pt;">&#32;million and </font><font style="font-family:inherit;font-size:10pt;">$0.7</font><font style="font-family:inherit;font-size:10pt;">&#32;million for the nine months ended </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">June&#160;30, 2015</font><font style="font-family:inherit;font-size:10pt;">&#32;and </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">2014</font><font style="font-family:inherit;font-size:10pt;">, respectively, are included in selling, general and administrative expenses.    </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Research, development and engineering expense</font><font style="font-family:inherit;font-size:10pt;">&#32;&#8211; Research, development and engineering expenses consist of the cost of employees, consultants and contractors who design, engineer and develop new products and processes; materials and supplies used in those activities; and product prototyping. The Company receives reimbursements through governmental research and development grants which are netted against these expenses when certain conditions have been met. The table below shows gross research and development expenses and grants earned:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><br><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">14</font></div></div><hr style="page-break-after:always"><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s240028F91D625D1D809F7FF44963CEEE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><br><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:99.0234375%;border-collapse:collapse;text-align:left;"><tr><td colspan="16"></td></tr><tr><td width="41%"></td><td width="1%"></td><td width="12%"></td><td width="1%"></td><td width="1%"></td><td width="1%"></td><td width="12%"></td><td width="1%"></td><td width="1%"></td><td width="1%"></td><td width="12%"></td><td width="1%"></td><td width="1%"></td><td width="1%"></td><td width="12%"></td><td width="1%"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Three Months Ended</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Nine Months Ended</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">June&#160;30, <br>2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">June&#160;30, <br>2014</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">June&#160;30, <br>2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">June&#160;30, <br>2014</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">(dollars in thousands)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Research, development and engineering</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">3,650</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">3,054</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9,763</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8,442</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Grants earned</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(2,342</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,655</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(5,869</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(3,999</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Net research, development and engineering</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,308</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,399</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">3,894</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4,443</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Segments -</font><font style="font-family:inherit;font-size:10pt;">&#32;Effective for the second quarter of fiscal 2015, following the Company's merger with BTU, the Company changed the way it reports its segment information.  Previously reported information has been recast to reflect the current reportable segments. The Company now reports its financial results in three segments:  solar, semiconductor and polishing. See Note 5: "Business Segment Information" for additional information on the Company's reportable segments. See also Note 10: "Acquisitions" for additional information with respect to the Company's recent acquisitions.  </font></div><br><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">15</font></div></div><hr style="page-break-after:always"><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s240028F91D625D1D809F7FF44963CEEE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><br><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Impact of Recently Issued Accounting Pronouncements&#160;</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In July 2015, the FASB issued Accounting Standards Update ("ASU") No.&#160;2015-11, Simplifying the Measurement of Inventory. This ASU simplifies the measurement of inventory by requiring certain inventory to be measured at the lower of cost or net realizable value. The amendments in this ASU are effective for fiscal years beginning after December 15, 2016 and for interim periods therein. We do not expect adoption of this ASU to have a material impact on our consolidated financial position and results of operations.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In June 2015, the FASB issued ASU 2015-10, Technical Corrections&#160;and Improvements&#160;, which clarifies various topics in the FASB Accounting Standards Codification. ASU 2015-10 is effective for the interim and annual periods ending after December 15, 2015. Early adoption is permitted. We are currently assessing the impact of this ASU, but do not expect it to have a material impact on our consolidated financial position and results of operations.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In May&#160;2015, the FASB issued ASU 2015-08,&#160;Business Combinations (Topic 805):&#160;Pushdown&#160;Accounting - Amendments to SEC Paragraphs Pursuant to Staff Accounting Bulletin No.&#160;115, or ASU 2015-08.  The amendments in ASU 2015-08 amend various SEC paragraphs included in the FASB&#8217;s Accounting Standards Codification to reflect the issuance of Staff Accounting Bulletin No.&#160;115, or SAB 115. SAB 115 rescinds portions of the interpretive guidance included in the SEC&#8217;s Staff Accounting Bulletins series and brings existing guidance into conformity with ASU No.&#160;2014-17,&#160;Business Combinations (Topic 805):&#160;Pushdown&#160;Accounting, which provides an acquired entity with an option to apply&#160;pushdown&#160;accounting in its separate financial statements upon occurrence of an event in which an acquirer obtains control of the acquired entity. We have adopted the amendments in ASU 2015-08, effective May&#160;8, 2015, as the amendments in the update are effective upon issuance. The adoption did not have a material impact on our consolidated financial position and results of operation.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In April 2015, the FASB issued ASU No.&#160;&#160;2015-05,&#160;Intangibles-Goodwill and Other-Internal-Use Software (Subtopic 350-40). This ASU provides guidance that will help entities evaluate the accounting for fees paid by a customer in a cloud computing arrangement, including whether a cloud computing arrangement includes a software license. If a cloud computing arrangement includes a software license, then this ASU requires the customer to account for the software license consistent with the acquisition of other software licenses; otherwise, the customer should account for the arrangement as a service contract. The ASU is effective for fiscal years, and interim periods within those fiscal years, beginning after December&#160;15, 2015. Entities can elect to adopt the amendments either prospectively to all arrangements entered into after the effective date or retrospectively to all prior periods. We are currently assessing the impact of this ASU.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In April 2015, the FASB issued ASU No. 2015-3, Interest-Imputation of Interest (Subtopic 835-30).  This ASU requires debt issuance costs related to a recognized debt liability be presented in the balance sheet as a direct deduction from the carrying amount of the related debt liability instead of being presented as an asset.&#160;The ASU requires retrospective application and represents a change in accounting principle. The ASU is effective for fiscal years beginning after December&#160;15, 2015. Early adoption is permitted for financial statements that have not been previously issued. We are currently assessing the impact of this ASU.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In January 2015, the FASB issued ASU No. 2015-1, Income Statement - Extraordinary and Unusual Items (Subtopic 225-20).  The FASB is issuing this ASU as part of its initiative to reduce costs and complexity in accounting standards, known as its Simplification Initiative.  This ASU eliminates from generally accepted accounting principles in the United States (" GAAP") the concept of extraordinary items in an effort to save time and reduce costs, while alleviating uncertainty and maintaining accurate and fulsome disclosure.  The amendments in this ASU are effective for fiscal years, and interim periods within those fiscal years, beginning after December 15, 2015.  We are currently assessing the impact of this ASU but do not expect it to have a material impact on our consolidated financial position and results of operations.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In June 2014, the FASB issued ASU No. 2014-12 which provides guidance on how to account for share-based payment awards where the terms of the award provide that a performance target that affects vesting could be achieved after the requisite service period. This ASU requires that a performance target that affects vesting and that could be achieved after the requisite service period be treated as a performance condition. ASU 2014-12 is effective for annual periods, and interim periods within those annual periods, beginning after December 15, 2015, and early adoption is permitted. We are currently assessing the impact of this ASU but do not expect it to have a material impact on our consolidated financial position and results of operations.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In May 2014, the FASB issued ASU No. 2014-09, Revenue from Contracts with Customers, which supersedes most of the current revenue recognition requirements. The core principle of the new guidance is that an entity should recognize revenue to depict the transfer of promised goods or services to customers in an amount that reflects the consideration to which the entity expects to be entitled in exchange for these goods or services. New disclosures about the nature, amount, timing and uncertainty of revenue and </font></div><br><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">16</font></div></div><hr style="page-break-after:always"><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s240028F91D625D1D809F7FF44963CEEE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><br><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">cash flows arising from contracts with customers are also required. This guidance is effective for the Company in the first quarter of fiscal year 2018 and early application is not permitted. Entities must adopt the new guidance using one of two retrospective application methods. The Company is currently evaluating the standard and the impact on our financial position and results of operations.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In April 2014, the FASB issued ASU No. 2014-08 Presentation of Financial Statements (Topic 205) and Property, Plant and Equipment (Topic 360).  The amendments in this ASU change the requirements for reporting discontinued operations in Subtopic 205-20. A discontinued operation may include a component of an entity or a group of components of an entity, or a business or nonprofit activity.  Under current U.S. GAAP, many disposals, some of which may be routine in nature and not a change in an entity's strategy, are reported in discontinued operations.  The amendments in this ASU improve the definition of discontinued operations by limiting discontinued operations reporting to disposals of components of an entity that represent strategic shifts that have (or will have) a major effect on an entity's operations and financial results. The amendments in this ASU require expanded disclosures for discontinued operations. The FASB concluded that those disclosures should provide users of financial statements with more information about the assets, liabilities, revenues, and expenses of discontinued operations.  The amendments in this ASU also require an entity to disclose the pretax profit or loss of an individually significant component of an entity that does not qualify for discontinued operations reporting.   The amendments in this ASU are effective for fiscal years, and interim periods within those years, beginning after December 15, 2014. The Company will evaluate the impact of this ASU as future transactions occur.</font></div><br><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">17</font></div></div><hr style="page-break-after:always"><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s240028F91D625D1D809F7FF44963CEEE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><br><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><a name="sE81E355F813551238C8EC2578BFAEEF7"></a><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:24px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:0px;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Income Taxes</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:24px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:11pt;"><font style="font-family:inherit;font-size:11pt;">T</font><font style="font-family:inherit;font-size:10pt;">he quarterly income tax provision is calculated using an estimated annual effective tax rate, based upon expected annual income, permanent items, statutory rates and planned tax strategies in the various jurisdictions in which the Company operates. However, losses in certain jurisdictions and discrete items are treated separately.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Deferred tax assets and liabilities reflect the tax effects of temporary differences between the carrying value of assets and liabilities for financial reporting purposes and the amounts used for income tax purposes. The Company records a valuation allowance if, based on the weight of available evidence, it is more likely than not that some portion or all of a deferred tax asset will not be realized. Our expectations regarding realization of our deferred tax assets is based upon the weight of all available evidence, including such factors as our recent earnings history, expected future taxable income and available tax planning strategies. As a result of the merger with BTU, the Company determined that is more likely than not that some of our U.S. federal deferred tax assets would not be realized, and recorded a partial valuation allowance in the U.S.  The Company maintains a valuation allowance with respect to certain state, federal and foreign deferred tax assets that may not be recovered. Each quarter, the valuation allowance is re-evaluated. During the nine months ended June 30, 2015 the valuation allowance increased by </font><font style="font-family:inherit;font-size:10pt;">$1.8 million</font><font style="font-family:inherit;font-size:10pt;">&#32;due to net operating losses in The Netherlands and France, partially offset by utilization of net operating losses in China.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The Company classifies all of our uncertain tax positions as non-current income taxes payable.  At </font><font style="font-family:inherit;font-size:10pt;">June&#160;30, 2015</font><font style="font-family:inherit;font-size:10pt;">&#32;and </font><font style="font-family:inherit;font-size:10pt;">September&#160;30, 2014</font><font style="font-family:inherit;font-size:10pt;">, the total amount of unrecognized tax benefits was approximately </font><font style="font-family:inherit;font-size:10pt;">$3.2</font><font style="font-family:inherit;font-size:10pt;">&#32;million. If recognized, these amounts would favorably impact the effective tax rate.  </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The Company classifies interest and penalties related to unrecognized tax benefits as income tax expense. As of </font><font style="font-family:inherit;font-size:10pt;">June&#160;30, 2015</font><font style="font-family:inherit;font-size:10pt;">&#32;and </font><font style="font-family:inherit;font-size:10pt;">September&#160;30, 2014</font><font style="font-family:inherit;font-size:10pt;">, the Company had an accrual for potential interest and penalties of approximately </font><font style="font-family:inherit;font-size:10pt;">$1.8 million</font><font style="font-family:inherit;font-size:10pt;">&#32;and </font><font style="font-family:inherit;font-size:10pt;">$1.6 million</font><font style="font-family:inherit;font-size:10pt;">, respectively.   </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The Company and one or more of its subsidiaries file income tax returns in The Netherlands, Germany, France, Singapore, Malaysia, China and Hong Kong, as well as the U.S. and various states in the U.S. The Company and its subsidiaries have a number of open tax years dictated by statute in each of their respective taxing jurisdictions, but generally is from </font><font style="font-family:inherit;font-size:10pt;">3</font><font style="font-family:inherit;font-size:10pt;">&#32;to </font><font style="font-family:inherit;font-size:10pt;">5</font><font style="font-family:inherit;font-size:10pt;">&#32;years. </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><br><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">18</font></div></div><hr style="page-break-after:always"><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s240028F91D625D1D809F7FF44963CEEE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><br><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><a name="sAB1AB1A6D30C5C948ECA8EE4FDF627C5"></a><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:24px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:0px;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">3.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Earnings Per Share</font></div></td></tr></table><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Basic earnings per share ("EPS") is computed by dividing net income (loss) by the weighted average number of common shares outstanding for the period. Diluted EPS is computed similarly to basic EPS except that the denominator is increased to include the number of additional common shares that would have been outstanding if potentially dilutive common shares had been issued. In the case of a net loss, diluted earnings per share is calculated in the same manner as basic EPS.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">For the three and nine months ended </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">June&#160;30, 2015</font><font style="font-family:inherit;font-size:10pt;">, options for </font><font style="font-family:inherit;font-size:10pt;">1,640,000</font><font style="font-family:inherit;font-size:10pt;">&#32;shares and </font><font style="font-family:inherit;font-size:10pt;">14,000</font><font style="font-family:inherit;font-size:10pt;">&#32;restricted stock awards are excluded from the diluted EPS calculations because they are anti-dilutive. For the three and nine months ended </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">June&#160;30, 2014</font><font style="font-family:inherit;font-size:10pt;">, options for </font><font style="font-family:inherit;font-size:10pt;">1,016,000</font><font style="font-family:inherit;font-size:10pt;">&#32;shares and </font><font style="font-family:inherit;font-size:10pt;">38,000</font><font style="font-family:inherit;font-size:10pt;">&#32;restricted stock awards were excluded from the diluted EPS calculations because they were anti-dilutive.  </font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The following table outlines basic and diluted EPS:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="16"></td></tr><tr><td width="45%"></td><td width="1%"></td><td width="11%"></td><td width="1%"></td><td width="1%"></td><td width="1%"></td><td width="11%"></td><td width="1%"></td><td width="1%"></td><td width="1%"></td><td width="11%"></td><td width="1%"></td><td width="1%"></td><td width="1%"></td><td width="11%"></td><td width="1%"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Three Months Ended June 30,</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Nine Months Ended June 30,</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">2014</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">2014</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">(in thousands, except per share amounts)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">(in thousands, except per share amounts)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Basic Loss Per Share Computation</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Net loss attributable to Amtech Systems, Inc.</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,604</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(5,257</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(9,119</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(9,802</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Weighted Average Shares Outstanding:</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Common stock</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">13,103</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9,843</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">11,644</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9,694</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Basic loss per share attributable to Amtech shareholders</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(0.12</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(0.53</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(0.78</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1.01</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Diluted Loss Per Share Computation</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Net loss attributable to Amtech Systems, Inc.</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,604</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(5,257</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(9,119</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(9,802</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Weighted Average Shares Outstanding:</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Common stock</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">13,103</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9,843</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">11,644</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9,694</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Common stock equivalents (1)</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Diluted shares</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">13,103</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:3px double #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9,843</font></div></td><td style="vertical-align:bottom;border-top:1px solid #000000;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">11,644</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:3px double #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9,694</font></div></td><td style="vertical-align:bottom;border-top:1px solid #000000;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Diluted loss per share attributable to Amtech shareholders</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:3px double #000000;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(0.12</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:3px double #000000;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(0.53</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:3px double #000000;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(0.78</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:3px double #000000;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1.01</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:8pt;padding-left:24px;"><font style="font-family:inherit;font-size:8pt;">(1)</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">The number of common stock equivalents is calculated using the treasury stock method and the average market price during the period.</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;"><br></font></div><a name="sc88da7c0f6fc4a67ad69e04d85568120"></a><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">4.  Stockholders' Equity</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;padding-bottom:10px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Shareholder Rights Plan</font><font style="font-family:inherit;font-size:10pt;">&#160;- On December 15, 2008, the Company and Computershare Trust Company, N.A., as Rights Agent (the &#8220;Rights Agent&#8221;), entered into an Amended and Restated Rights Agreement (the &#8220;Restated Rights Agreement&#8221;) which amended and restated the terms governing the previously authorized shareholder rights (each a &#8220;Right&#8221;) to purchase fractional shares of the Company&#8217;s Series A Participating Preferred Stock (&#8220;Series A Preferred&#8221;) currently attached to each of the Company&#8217;s outstanding Common Shares, par value </font><font style="font-family:inherit;font-size:10pt;">$0.01</font><font style="font-family:inherit;font-size:10pt;">&#32;per share (&#8220;Common Shares&#8221;). As amended, each Right entitles the registered holder to purchase from the Company one one-thousandth of a share of Series A Preferred at an exercise price of </font><font style="font-family:inherit;font-size:10pt;">$51.60</font><font style="font-family:inherit;font-size:10pt;">&#32;(the &#8220;Exercise Price&#8221;), subject to adjustment. The rights will expire </font><font style="font-family:inherit;font-size:10pt;">10</font><font style="font-family:inherit;font-size:10pt;">&#32;years after issuance and will be exercisable if (a) a person or group becomes the beneficial owner of </font><font style="font-family:inherit;font-size:10pt;">15%</font><font style="font-family:inherit;font-size:10pt;">&#32;or more of the Company&#8217;s common stock or (b) a person or group commences a tender or exchange offer that would result in the offeror beneficially owning 15% or more of the Company&#8217;s common stock.&#160; The Final Expiration Date (as defined in the Restated Rights Agreement) is December 14, 2018.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><a name="s98CBB014FEF9543DB647EB392A94BB93"></a><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:24px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:0px;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">5.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Business Segment Information</font></div></td></tr></table><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Following the Company's acquisition of BTU, an evaluation was conducted of the Company's organizational structure.  Beginning with the second quarter of fiscal 2015, the Company made changes to its reportable segments. Prior period amounts have been revised to conform to the current period segment reporting structure. The Company&#8217;s </font><font style="font-family:inherit;font-size:10pt;">three</font><font style="font-family:inherit;font-size:10pt;">&#32;reportable segments are as follows:</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><br><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">19</font></div></div><hr style="page-break-after:always"><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s240028F91D625D1D809F7FF44963CEEE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><br><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;font-weight:bold;">Solar - </font><font style="font-family:inherit;font-size:10pt;">In the Company&#8217;s Solar segment, we are a leading supplier of thermal processing systems, including related automation, parts and services, to the solar/photovoltaic industry and also offer PECVD (plasma-enhanced chemical vapor deposition) equipment to the global solar market.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;font-weight:bold;">Semiconductor - </font><font style="font-family:inherit;font-size:10pt;">In the Company&#8217;s Semiconductor segment, we design, manufacture, sell and service thermal processing equipment and related controls for use by leading semiconductor manufacturers, and in electronics, automotive and other industries.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;font-weight:bold;">Polishing - </font><font style="font-family:inherit;font-size:10pt;">In the Company's Polishing segment, the Company produces consumables and machinery for lapping (fine abrading) and polishing of materials, such as sapphire substrates, optical components, silicon wafers, numerous types of crystal materials, ceramics and metal components.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">On December 24, 2014, the Company acquired a </font><font style="font-family:inherit;font-size:10pt;">51%</font><font style="font-family:inherit;font-size:10pt;">&#32;controlling interest in SoLayTec, and on January 30, 2015, the Company completed its acquisition of BTU. Beginning in the second quarter of 2015, SoLayTec&#8217;s business is included in the results for the solar segment, and BTU&#8217;s business is included in the results for the semiconductor segment.  See Note 10, &#8220;Acquisitions&#8221;, for additional information with respect to the Company&#8217;s recent acquisitions.</font></div><br><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">20</font></div></div><hr style="page-break-after:always"><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s240028F91D625D1D809F7FF44963CEEE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><br><div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Information concerning our business segments is as follows:</font></div><div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:center;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:99.4140625%;border-collapse:collapse;text-align:left;"><tr><td colspan="16"></td></tr><tr><td width="55%"></td><td width="1%"></td><td width="8%"></td><td width="1%"></td><td width="1%"></td><td width="1%"></td><td width="8%"></td><td width="1%"></td><td width="1%"></td><td width="1%"></td><td width="9%"></td><td width="1%"></td><td width="1%"></td><td width="1%"></td><td width="9%"></td><td width="1%"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Three Months Ended</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Nine Months Ended</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">June 30, 2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">June&#160;30, 2014</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">June 30, 2015</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">June 30, 2014</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="15" style="vertical-align:middle;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Net Revenues:</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Solar *</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">24,392</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4,632</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">42,141</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">21,137</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Semiconductor</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">12,945</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,132</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">25,765</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8,478</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Polishing</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,679</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,426</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8,779</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">7,063</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">40,016</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9,190</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">76,685</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">36,678</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Operating income (loss):</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Solar *</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,232</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(3,425</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,987</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(7,751</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Semiconductor</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,113</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">179</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(483</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">927</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Polishing</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">574</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">654</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,917</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,622</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Non-segment related </font></div></td><td colspan="2" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,927</font></div></td><td style="vertical-align:middle;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,279</font></div></td><td style="vertical-align:middle;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(7,409</font></div></td><td style="vertical-align:middle;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(3,682</font></div></td><td style="vertical-align:middle;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,234</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(3,871</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(7,962</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(8,884</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr></table></div></div><div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:justify;text-indent:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">* The financial statement of business units included in the Solar segment include some sales of equipment and parts to the semiconductor, silicon wafer and MEMS industries, comprising less than </font><font style="font-family:inherit;font-size:10pt;">25%</font><font style="font-family:inherit;font-size:10pt;">&#32;of the Solar segment revenue.</font></div><div style="line-height:120%;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="8"></td></tr><tr><td width="73%"></td><td width="1%"></td><td width="11%"></td><td width="1%"></td><td width="1%"></td><td width="1%"></td><td width="11%"></td><td width="1%"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">June&#160;30, <br>2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">September&#160;30, <br>2014</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:middle;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Identifiable Assets:</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Solar</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">65,212</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">56,858</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Semiconductor</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">54,559</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5,593</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Polishing</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">6,078</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">6,253</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Non-segment related</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8,206</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">21,200</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">134,055</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">89,904</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><br><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">21</font></div></div><hr style="page-break-after:always"><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s240028F91D625D1D809F7FF44963CEEE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><br><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><a name="sCE5942531CD85647B610FE65423CC59F"></a><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">6.  Major Customers and Foreign Sales</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">During the nine months ended </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">June&#160;30, 2015</font><font style="font-family:inherit;font-size:10pt;">, </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">two</font><font style="font-family:inherit;font-size:10pt;">&#32;customers individually represented </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">18%</font><font style="font-family:inherit;font-size:10pt;">&#32;and </font><font style="font-family:inherit;font-size:10pt;">12%</font><font style="font-family:inherit;font-size:10pt;">&#32;of net revenues.  During the nine months ended </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">June&#160;30, 2014</font><font style="font-family:inherit;font-size:10pt;">, </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">two</font><font style="font-family:inherit;font-size:10pt;">&#32;customers individually represented </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">15%</font><font style="font-family:inherit;font-size:10pt;">&#32;and </font><font style="font-family:inherit;font-size:10pt;">13%</font><font style="font-family:inherit;font-size:10pt;">&#32;of net revenues. </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Our net revenues were to customers in the following geographic regions:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:98.6328125%;border-collapse:collapse;text-align:left;"><tr><td colspan="6"></td></tr><tr><td width="66%"></td><td width="15%"></td><td width="1%"></td><td width="2%"></td><td width="15%"></td><td width="1%"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="5" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Nine Months Ended June 30,</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2014</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;text-indent:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">United States</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">25</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">27</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;text-indent:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Other</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Total North America</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">27</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">27</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">%</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:12px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:12px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:12px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:12px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;text-indent:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">China</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">26</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">14</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;text-indent:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Taiwan</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">15</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">18</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;text-indent:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Other</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">18</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">14</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;padding-left:18px;text-indent:0px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Total Asia</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">59</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">46</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;text-indent:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Germany</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">5</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;text-indent:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Other</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">19</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;padding-left:18px;text-indent:0px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Total Europe</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">14</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">27</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">%</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">100</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:3px double #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">100</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">%</font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><a name="sA400BBD6A5525C86A3BE4A1DF81C39D7"></a><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">7.  Other Accrued Liabilities</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Other accrued liabilities consist of the following:</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:602px;border-collapse:collapse;text-align:left;"><tr><td colspan="8"></td></tr><tr><td width="458px"></td><td width="9px"></td><td width="50px"></td><td width="4px"></td><td width="5px"></td><td width="9px"></td><td width="62px"></td><td width="4px"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">June 30, 2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">September 30, 2014</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Unearned research and development grants</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">859</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">3,989</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Other</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4,606</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,357</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5,465</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5,346</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><a name="s115094FAB2265E23AFF392D52F1A8D3D"></a><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">8.  Long-term Debt</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In January 2015, the Company acquired </font><font style="font-family:inherit;font-size:10pt;">$7.2</font><font style="font-family:inherit;font-size:10pt;">&#32;million of long-term debt as part of the BTU merger.  The debt acquired is a mortgage note secured by its real property in Billerica, Massachusetts, and is stated at fair market value of </font><font style="font-family:inherit;font-size:10pt;">$7.0</font><font style="font-family:inherit;font-size:10pt;">&#32;million as of June 30, 2015. The debt acquired has an interest rate of </font><font style="font-family:inherit;font-size:10pt;">4.4%</font><font style="font-family:inherit;font-size:10pt;">&#32;through September 26, 2018, at which time the interest rate will be adjusted to a per annum fixed rate equal to the aggregate of the Federal Home Loan Board Five Year Classic Advance Rate plus two hundred forty basis points.  The maturity date of the debt acquired is September 26, 2023.  All outstanding principal and accrued and unpaid interest will be due and payable on the maturity date.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In December 2014, the Company acquired long-term debt of </font><font style="font-family:inherit;font-size:10pt;">$2.0</font><font style="font-family:inherit;font-size:10pt;">&#32;million as part of the SoLayTec acquisition.  The debt is stated at fair market value of </font><font style="font-family:inherit;font-size:10pt;">$2.3</font><font style="font-family:inherit;font-size:10pt;">&#32;million as of June 30, 2015.  The debt acquired has interest rates ranging from </font><font style="font-family:inherit;font-size:10pt;">5.95%</font><font style="font-family:inherit;font-size:10pt;">&#32;to </font><font style="font-family:inherit;font-size:10pt;">10%</font><font style="font-family:inherit;font-size:10pt;">&#32;and maturity dates ranging from fiscal 2017 to fiscal 2021.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><a name="sB6B8CCE9A0FD5A9B8A041A116F8222E2"></a><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">9.  Commitments and Contingencies</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Purchase Obligations</font><font style="font-family:inherit;font-size:10pt;">&#32;&#8211; As of </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">June&#160;30, 2015</font><font style="font-family:inherit;font-size:10pt;">&#32;the Company had purchase obligations in the amount of </font><font style="font-family:inherit;font-size:10pt;">$14.1 million</font><font style="font-family:inherit;font-size:10pt;">&#32;compared to </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">$7.9 million</font><font style="font-family:inherit;font-size:10pt;">&#32;as of </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">September&#160;30, 2014</font><font style="font-family:inherit;font-size:10pt;">. These purchase obligations consist of outstanding purchase orders for goods and services. </font></div><br><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">22</font></div></div><hr style="page-break-after:always"><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s240028F91D625D1D809F7FF44963CEEE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><br><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">While the amount represents purchase agreements, the actual amounts to be paid may be less if any agreements are renegotiated, canceled or terminated.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Development projects</font><font style="font-family:inherit;font-size:10pt;">&#32;&#8211;  In fiscal 2014, Tempress Systems, Inc. ("Tempress") entered into an agreement with the Energy Research Centre of the Netherlands ("ECN"), a Netherlands government sponsored research institute, for a joint research and development project.  Under the terms of the agreement, Tempress sold an ion implanter ("Equipment") to ECN for </font><font style="font-family:inherit;font-size:10pt;">$1.4</font><font style="font-family:inherit;font-size:10pt;">&#32;million.  Both Tempress and ECN are performing research and development projects utilizing the Equipment at the ECN facilities. Each party to the agreement will have </font><font style="font-family:inherit;font-size:10pt;">100%</font><font style="font-family:inherit;font-size:10pt;">&#32;rights to the results of the projects developed separately by the individual parties.  Any results co-developed will be jointly owned.  Over the </font><font style="font-family:inherit;font-size:10pt;">four</font><font style="font-family:inherit;font-size:10pt;">-year period of the agreement, Tempress is required to contribute </font><font style="font-family:inherit;font-size:10pt;">$1.4 million</font><font style="font-family:inherit;font-size:10pt;">&#32;to the project in the form of  installation of the Equipment, acceptance testing, project meeting attendance, training, parts, and service, including keeping the equipment in good condition and repair for the first </font><font style="font-family:inherit;font-size:10pt;">two</font><font style="font-family:inherit;font-size:10pt;">&#32;years of the agreement.    </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In 2013, Shanghai Kingstone Semiconductor Company Ltd. ("Kingstone") entered into an agreement with certain government agencies in Shanghai, China for the purpose of developing ion implant technology for non-solar applications. Kingstone has substantially completed the first phase of this development project and received </font><font style="font-family:inherit;font-size:10pt;">$4.1 million</font><font style="font-family:inherit;font-size:10pt;">&#32;of grant funds for the project.  Kingstone is investigating options for securing </font><font style="font-family:inherit;font-size:10pt;">$6.1 million</font><font style="font-family:inherit;font-size:10pt;">&#32;of its commitment to the project.  Amtech owns </font><font style="font-family:inherit;font-size:10pt;">55%</font><font style="font-family:inherit;font-size:10pt;">&#32;of Kingstone Technology Hong Kong Limited, which owns </font><font style="font-family:inherit;font-size:10pt;">100%</font><font style="font-family:inherit;font-size:10pt;">&#32;of Kingstone.  Amtech has no obligation or plan to fund Kingstone's commitments under this agreement.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">EPA Accrual</font><font style="font-family:inherit;font-size:10pt;">&#32;- As a result of the merger with BTU, the Company assumed BTU&#8217;s proportional responsibility for clean-up costs at a Superfund site.  As an equipment manufacturer, BTU generated and disposed of small quantities of solid waste that were considered hazardous under Environment Protection Agency (&#8220;EPA&#8221;) regulations. Because BTU historically used a waste disposal firm that disposed of the solid waste at a site that the EPA designated as a Superfund site, BTU was named by the EPA as one of the entities responsible for a portion of the expected clean-up costs. Based on the Company's proportional responsibility, as negotiated with and agreed to by the EPA, the Company's liability related to this matter is </font><font style="font-family:inherit;font-size:10pt;">$0.2</font><font style="font-family:inherit;font-size:10pt;">&#32;million.  As of June 30, 2015, the remaining liability is </font><font style="font-family:inherit;font-size:10pt;">$0.1</font><font style="font-family:inherit;font-size:10pt;">&#32;million, which is included in Other Accrued Liabilities on the Condensed Consolidated Balance Sheet as of June 30, 2015.  In 2009, in accordance with the agreement, the Company established a letter of credit for </font><font style="font-family:inherit;font-size:10pt;">$0.2</font><font style="font-family:inherit;font-size:10pt;">&#32;million to the benefit of the EPA for potential cash payments as settlements for the Company&#8217;s proportional liability.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Litigation</font><font style="font-family:inherit;font-size:10pt;">&#32;&#8211; The Company and its subsidiaries are defendants from time to time in actions for matters arising out of their business operations. On October 21, 2014, the Company entered into an Agreement and Plan of Merger (the "Merger Agreement") by and among the Company,  BTU Merger Sub, Inc., a Delaware corporation (the "Merger Sub"), and BTU.   Shortly after the Company entered into the Merger Agreement with BTU, two separate putative stockholder class action complaints were filed in the Court of Chancery of the State of Delaware (together, the "Stockholder Actions"). The first was filed on November 4, 2014 and the second on November 17, 2014, purportedly on behalf of BTU&#8217;s public stockholders, against BTU, the members of the BTU Board, Amtech and Merger Sub.  The Stockholder Actions were consolidated into one action on December 4, 2014.  The complaints generally alleged that, in connection with entering into the Merger Agreement, the BTU board of directors breached certain fiduciary duties owed to BTU's stockholders.  The complaints sought various forms of declaratory and injunctive relief, as well as compensatory damages. </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;padding-bottom:10px;text-align:justify;font-size:11pt;"><font style="font-family:inherit;font-size:10pt;">On January&#160;16, 2015, the Company and BTU, along with the other defendants named therein, entered into a memorandum of understanding (the &#8220;MOU&#8221;) to settle the Stockholder Actions. Pursuant to the MOU, the parties to the Stockholder Actions agreed to resolve the claims alleged and the Company and BTU agreed to make certain additional disclosures regarding the Merger.</font><font style="font-family:inherit;font-size:11pt;">&#32;&#32;On June 22, 2015, the Company and BTU, along with the other defendants named therein, filed a Stipulation and Agreement of Compromise and Settlement (the &#8220;Stipulation of Settlement&#8221;) with the Court of Chancery in the State of Delaware to memorialize the MOU. The Stipulation of Settlement provides for a release of all claims against the Company and BTU, along with the other defendants named therein, subject to an exception for certain securities law claims. In addition, the Stipulation of Settlement provides that BTU will be responsible for the payment of certain amounts in plaintiffs&#8217; attorney fees and expenses in connection with the settlement. The Stipulation of Settlement is subject to court approval. The Company and BTU entered into the Stipulation of Settlement solely to avoid the costs, risks and uncertainties inherent in litigation and without admitting any liability or wrongdoing. There can be no assurance that the court will approve the Stipulation of Settlement. In such event, the proposed settlement as contemplated by the Stipulation of Settlement may be terminated.</font></div><div style="line-height:120%;padding-bottom:10px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><br><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">23</font></div></div><hr style="page-break-after:always"><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s240028F91D625D1D809F7FF44963CEEE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><br><div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The merger was consummated on January 30, 2015.  The plaintiffs&#8217; attorney fees and expenses were reflected as a liability on the opening balance sheet of BTU on the date of the merger.  See Note 10, "Acquisitions," for more information on the Merger Agreement.  </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><a name="s1334DB5C237E593F978D2940963F41C2"></a><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">10.  Acquisitions</font></div><div style="line-height:120%;text-align:left;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><div style="line-height:120%;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;font-weight:bold;">Merger with BTU International</font></div><div style="line-height:120%;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">On </font><font style="font-family:inherit;font-size:10pt;">January&#160;30, 2015</font><font style="font-family:inherit;font-size:10pt;">, the Company completed its acquisition of BTU (the "Merger").  In connection with the Merger, each share of BTU common stock outstanding immediately prior to the effective time of the Merger, including BTU restricted stock units that vested immediately prior to the effective time of the Merger, was converted to </font><font style="font-family:inherit;font-size:10pt;">0.3291</font><font style="font-family:inherit;font-size:10pt;">&#32;shares of common stock of the Company.  The Company issued </font><font style="font-family:inherit;font-size:10pt;">3,185,852</font><font style="font-family:inherit;font-size:10pt;">&#32;shares of Company common stock on the Merger date.  Pursuant to the terms of the Merger Agreement, options to purchase BTU common stock held by BTU employees were assumed by the Company and converted into options to purchase shares of Company common stock on substantially the same terms and conditions as were applicable to such BTU stock options, with appropriate adjustments based upon the exchange ratio of </font><font style="font-family:inherit;font-size:10pt;">0.3291</font><font style="font-family:inherit;font-size:10pt;">&#32;to the exercise price and the number of shares of Company common stock subject to such stock option. As a result of the Merger, the company owns 100% of the outstanding stock of BTU.</font></div><div style="line-height:120%;padding-top:13px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The following unaudited pro forma data has been prepared by adjusting the Company&#8217;s historical data to give effect to the Merger as if it had occurred on October&#160;1, 2013 and includes adjustments for depreciation expense, amortization of intangibles, and the effect of other purchase accounting adjustments:</font></div><div style="line-height:120%;padding-top:13px;text-align:center;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:99.0234375%;border-collapse:collapse;text-align:left;"><tr><td colspan="16"></td></tr><tr><td width="44%"></td><td width="1%"></td><td width="11%"></td><td width="1%"></td><td width="1%"></td><td width="1%"></td><td width="11%"></td><td width="1%"></td><td width="2%"></td><td width="1%"></td><td width="11%"></td><td width="1%"></td><td width="1%"></td><td width="1%"></td><td width="11%"></td><td width="1%"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Quarter Ended</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Nine Months Ended</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">June 30, 2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">June 30, 2014</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">June 30, 2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">June 30, 2014</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="15" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;font-weight:bold;">(dollars in thousands, except per share data)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Revenue, net</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">40,016</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">25,625</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">92,988</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">75,791</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Net loss</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,669</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(4,507</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(11,028</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(19,641</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Earnings per share available to Amtech stockholders:</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Basic</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(0.13</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(0.35</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(0.84</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1.52</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Diluted</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(0.13</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(0.35</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(0.84</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1.52</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr></table></div></div><div style="line-height:120%;padding-top:13px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The unaudited pro forma financial data was prepared in accordance with the acquisition method of accounting under existing standards and is not necessarily indicative of the results of operations that would have occurred if the Merger had been completed on the date indicated, nor is it indicative of the future operating results of the Company.</font></div><div style="line-height:120%;padding-top:13px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The unaudited pro forma results do not reflect certain future events that either have occurred or may occur after the Merger, including, but not limited to, the anticipated realization of ongoing cost reductions from other operating synergies in subsequent periods. They also do not give effect to certain charges that the Company expects to incur in connection with the Merger, including, but not limited to, additional professional fees and other restructuring costs.</font></div><div style="line-height:120%;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;The Merger was an all-stock transaction. The following table summarizes the consideration transferred:</font></div><div style="line-height:120%;padding-top:13px;text-align:center;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:81.640625%;border-collapse:collapse;text-align:left;"><tr><td colspan="4"></td></tr><tr><td width="76%"></td><td width="1%"></td><td width="22%"></td><td width="1%"></td></tr><tr><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;">(In thousands, except per share amounts)</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#ccecff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">BTU common shares and restricted stock units exchanged</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#ccecff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9,681</font></div></td><td style="vertical-align:bottom;background-color:#ccecff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Exchange ratio</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">0.3291</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#ccecff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Amtech common stock issued for consideration</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#ccecff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">3,186</font></div></td><td style="vertical-align:bottom;background-color:#ccecff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Amtech common stock per share price on January 30, 2015</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8.20</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#ccecff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Consideration for BTU common shares and restricted stock units</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">26,125</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Vested BTU stock options exchanged for Amtech stock options</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">500</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#ccecff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Total fair value of consideration transferred</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">26,625</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr></table></div></div><div style="line-height:120%;padding-top:13px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><br><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">24</font></div></div><hr style="page-break-after:always"><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s240028F91D625D1D809F7FF44963CEEE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><br><div style="line-height:120%;padding-top:13px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The following table summarizes the allocation of the consideration for the assets acquired and liabilities assumed on </font><font style="font-family:inherit;font-size:10pt;">January&#160;30, 2015</font><font style="font-family:inherit;font-size:10pt;">:</font></div><div style="line-height:120%;padding-top:13px;text-align:center;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:81.640625%;border-collapse:collapse;text-align:left;"><tr><td colspan="4"></td></tr><tr><td width="77%"></td><td width="1%"></td><td width="21%"></td><td width="1%"></td></tr><tr><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;">(In thousands)</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Fair value of net tangible assets acquired</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">20,598</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Goodwill</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4,697</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Identifiable intangible assets</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,330</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Total consideration allocated</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">26,625</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr></table></div></div><div style="line-height:120%;padding-top:13px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The primary acquired intangible asset is the trade name "BTU", which has a </font><font style="font-family:inherit;font-size:10pt;">15</font><font style="font-family:inherit;font-size:10pt;">&#32;year useful life. Goodwill of </font><font style="font-family:inherit;font-size:10pt;">$4.7</font><font style="font-family:inherit;font-size:10pt;">&#32;million was assigned to the semiconductor segment. Goodwill will not be amortized but instead tested for impairment at least annually (more frequently if certain indicators are present). Goodwill as of June 30, 2015, is not expected to be deductible for tax purposes.  As of&#160;June 30, 2015, the accounting for the BTU acquisition has not been finalized due to pending items on the valuation of acquired assets and liabilities. </font></div><div style="line-height:120%;padding-top:13px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Under the guidance on accounting for business combinations, merger and integration costs are not included as components of consideration transferred but are accounted for as expenses in the period in which the costs are incurred. Transaction-related expenses were not material for the three months ended June 30, 2015 and 2014.  Transaction-related expenses of </font><font style="font-family:inherit;font-size:10pt;">&#32;</font><font style="font-family:inherit;font-size:10pt;">$1.8</font><font style="font-family:inherit;font-size:10pt;">&#32;million and </font><font style="font-family:inherit;font-size:10pt;">$0.2</font><font style="font-family:inherit;font-size:10pt;">&#32;million for the nine months ended June 30, 2015 and 2014, respectively, are included in the Selling, General and Administrative line in the Condensed Consolidated Statements of Operations. </font></div><div style="line-height:120%;text-align:left;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><div style="line-height:120%;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;font-weight:bold;">Acquisition of SoLayTec B.V.</font></div><div style="line-height:120%;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">On December 24, 2014, the Company expanded our participation in the solar market by acquiring a </font><font style="font-family:inherit;font-size:10pt;">51%</font><font style="font-family:inherit;font-size:10pt;">&#32;controlling interest in SoLayTec, which provides ALD systems used in high efficiency solar cells, for a total purchase price consideration of </font><font style="font-family:inherit;font-size:10pt;">$1.9 million</font><font style="font-family:inherit;font-size:10pt;">.&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;</font></div><div style="line-height:120%;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The Company consolidated the results of operations for SoLayTec beginning on December 24, 2014, the effective date of the acquisition, which were not material to our consolidated statement of operations for the three and nine months ended June 30, 2015.  Additionally, the Company's historical results would not have been materially affected by the acquisition of SoLayTec and, accordingly, has not presented pro forma information as if the acquisition had been completed at the beginning of each period presented in our consolidated statements of operations.  As of&#160;June 30, 2015, the accounting for the SoLayTec acquisition has not been finalized due to pending items on the valuation of acquired assets and liabilities. </font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><br><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">25</font></div></div><hr style="page-break-after:always"><a name="sf1a636099a5744c69e313274731d1ab0"></a><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s240028F91D625D1D809F7FF44963CEEE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><br><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">11.  Subsequent Event</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In July 2015, subsequent to the third fiscal quarter, the Company's Board of Directors authorized a restructuring of the Company&#8217;s investment in Kingstone Technology Hong Kong Limited (&#8220;Kingstone Hong Kong&#8221;), a subsidiary of the Company in which the Company currently owns </font><font style="font-family:inherit;font-size:10pt;">55%</font><font style="font-family:inherit;font-size:10pt;">&#32;of the capital stock. As part of the restructuring, the Kingstone Hong Kong and Suzhou Zhuo Jing Investment Center (LP) (&#8220;Suzhou&#8221;) entered into an Investment Agreement (the &#8220;Agreement&#8221;), pursuant to which the parties agreed upon a series of transactions which will result in Suzhou owning </font><font style="font-family:inherit;font-size:10pt;">31.25%</font><font style="font-family:inherit;font-size:10pt;">&#32;of the capital stock of Shanghai Kingstone Semiconductor Company, Ltd. (&#8220;Shanghai Kingstone&#8221;), Kingstone Hong Kong&#8217;s wholly owned subsidiary. Closing of the transactions is expected to occur on or before August 31, 2015.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Following completion of the transactions, Kingstone Hong Kong will own </font><font style="font-family:inherit;font-size:10pt;">68.75%</font><font style="font-family:inherit;font-size:10pt;">&#32;of the capital stock of Shanghai Kingstone and Suzhou will own </font><font style="font-family:inherit;font-size:10pt;">31.25%</font><font style="font-family:inherit;font-size:10pt;">. Upon closing of the transactions, the Company will receive approximately US</font><font style="font-family:inherit;font-size:10pt;">$4,000,000</font><font style="font-family:inherit;font-size:10pt;">&#32;for a portion of its equity ownership in Kingstone Hong Kong, which will be decreased from </font><font style="font-family:inherit;font-size:10pt;">55%</font><font style="font-family:inherit;font-size:10pt;">&#32;to </font><font style="font-family:inherit;font-size:10pt;">15%</font><font style="font-family:inherit;font-size:10pt;">. In addition, upon closing of the transactions, the Company will be repaid the outstanding principal amount of US</font><font style="font-family:inherit;font-size:10pt;">$4,000,000</font><font style="font-family:inherit;font-size:10pt;">&#32;under the Solar Tool Loan Agreement dated December 9, 2011. Closing of the transactions is also subject to Shanghai Kingstone and Kingstone Hong Kong executing a Sales and Service Agreement that (i) reaffirms the Company&#8217;s exclusive right to sell and service the products of Shanghai Kingstone (subject to Shanghai Kingstone&#8217;s right to sell and service products of Shanghai Kingstone in China), (ii) provides that Shanghai Kingstone and/or Kingstone Hong Kong will purchase from the Company such exclusive right for US</font><font style="font-family:inherit;font-size:10pt;">$5,600,000</font><font style="font-family:inherit;font-size:10pt;">&#32;by the earlier of (a) March 31, 2016 or (b) the commencement of any public offering process of Shanghai Kingstone, and (iii) confirms the Company&#8217;s non-exclusive sales and service right in connection with the products of Shanghai Kingstone after the purchase in item (ii) has been consummated. If any of the closing conditions set forth in the Agreement are not fulfilled or waived before August 31, 2015 (or any other date as agreed by the parties), then any party may terminate this Agreement without any further obligation to the other party. The transaction is subject to customary closing conditions and regulatory approvals in both Shanghai and Hong Kong.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><a name="sD4B181AA640E5DB1A1ADC6DFABB98E61"></a><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:72px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:0px;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Item  2.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">MANAGEMENT&#8217;S DISCUSSION AND ANALYSIS OF FINANCIAL CONDITION AND RESULTS OF OPERATIONS</font></div></td></tr></table><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The following discussion and analysis of our financial condition and results of operations should be read in conjunction with our condensed consolidated financial statements and the related notes included in Item 1, &#8220;Condensed Consolidated Financial Statements&#8221; in this quarterly report on Form 10-Q and our consolidated financial statements and related notes included in Item 8, &#8220;Financial Statements and Supplementary Data&#8221; in our Annual Report on Form 10-K for the fiscal year ended September 30, 2014.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><a name="sD33BBCDA7E115222A3E3BB3A3760B246"></a><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Cautionary Statement Regarding Forward-Looking Statements</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;padding-bottom:13px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Certain information contained or incorporated by reference in this Quarterly Report on Form 10-Q is forward-looking in nature. All statements included or incorporated by reference in this Quarterly Report on Form 10-Q, or made by management of Amtech Systems, Inc. and its subsidiaries (&#8220;the Company&#8221; or &#8220;Amtech&#8221;), other than statements of historical fact, are hereby identified as &#8220;forward-looking statements&#8221; (as such term is defined in Section 27A of the Securities Act of 1933, as amended, and Section 21E of the Securities Exchange Act of 1934, as amended). In some cases, forward-looking statements can be identified by terminology such as &#8220;may,&#8221; &#8220;will,&#8221; &#8220;should,&#8221; &#8220;would,&#8221; &#8220;expects,&#8221; &#8220;plans,&#8221; &#8220;anticipates,&#8221; &#8220;intends,&#8221; &#8220;believes,&#8221; &#8220;estimates,&#8221; &#8220;predicts,&#8221; &#8220;potential,&#8221; &#8220;continue,&#8221; or the negative of these terms or other comparable terminology.  Examples of forward-looking statements include statements regarding Amtech's future financial results, operating results, business strategies, projected costs, products under development, competitive positions and plans and objectives of the Company and its management for future operations. </font></div><div style="line-height:120%;padding-bottom:13px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">We cannot guarantee that any forward-looking statement will be realized, although we believe that the expectations reflected in the forward-looking statements are reasonable. Achievement of future results is subject to risks, uncertainties and potentially inaccurate assumptions. The Form 10-K that we filed with the Securities and Exchange Commission for the year-ended September 30, 2014 listed various important factors that could affect Amtech's future operating results and financial condition and could cause actual results to differ materially from historical results and expectations based on forward-looking statements made in this document or elsewhere by Amtech or on its behalf.  These factors can be found under the heading &#8220;Risk Factors&#8221; in the Form 10-K and investors should refer to them.  Because it is not possible to predict or identify all such factors, any such list cannot be considered a complete set of all potential risks or uncertainties.  Except as required by law, we undertake no obligation to publicly update forward-looking statements, whether as a result of new information, future events, or otherwise.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Introduction</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><br><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">26</font></div></div><hr style="page-break-after:always"><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s240028F91D625D1D809F7FF44963CEEE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><br><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Management&#8217;s Discussion and Analysis (&#8220;MD&amp;A&#8221;) is intended to facilitate an understanding of our business and results of operations. MD&amp;A consists of the following sections:</font></div><table cellpadding="0" cellspacing="0" style="padding-top:8px;font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">&#8226;</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Overview&#160;</font></div></td></tr></table><table cellpadding="0" cellspacing="0" style="padding-top:8px;font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">&#8226;</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Results of Operations</font></div></td></tr></table><table cellpadding="0" cellspacing="0" style="padding-top:8px;font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">&#8226;</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Liquidity and Capital Resources</font></div></td></tr></table><table cellpadding="0" cellspacing="0" style="padding-top:8px;font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">&#8226;</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Off &#8211; Balance Sheet Arrangements&#160;</font></div></td></tr></table><table cellpadding="0" cellspacing="0" style="padding-top:8px;font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">&#8226;</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Contractual Obligations&#160;</font></div></td></tr></table><table cellpadding="0" cellspacing="0" style="padding-top:8px;font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">&#8226;</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Critical Accounting Policies&#160;</font></div></td></tr></table><table cellpadding="0" cellspacing="0" style="padding-top:8px;font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">&#8226;</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Impact of Recently Issued Accounting Pronouncements</font></div></td></tr></table><div style="line-height:120%;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><a name="s13789F99B2AD53F387E33853B44831EF"></a><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Overview</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">We are a global supplier of advanced thermal processing equipment to the solar, semiconductor, electronics and LED manufacturing markets. Our equipment includes diffusion, ALD and PECVD systems, ion implanters and solder reflow systems.  We also supply wafer handling automation and polishing equipment and related consumable products.  Our wafer handling, thermal processing and consumable products currently address the diffusion, oxidation, deposition and solder reflow steps used in the fabrication of solar cells, LEDs, semiconductors, MEMS, printed circuit boards, semiconductor packaging and the polishing of newly sliced sapphire and silicon wafers.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Beginning with the second quarter of 2015, the Company made changes to its reportable segments. The Company now reports its financial results in three segments:  solar, semiconductor and polishing.  Previously, the Company&#8217;s two reporting segments were solar and semiconductor equipment and polishing supplies. Prior period amounts have been revised to conform to the current period segment reporting structure. </font></div><div style="line-height:120%;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Our customers are primarily manufacturers of solar cells and integrated circuits.  The solar cell and semiconductor industries are cyclical and historically have experienced significant fluctuations.  Our revenue is impacted by these broad industry trends.  Since 2012, the solar cell industry is experiencing a structural imbalance between supply and demand.  This imbalance has negatively impacted our results of operations.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Our strategy has been, and continues to be, to grow the Company through strategic product development and acquisitions.  In addition to internal product development, we have acquired companies with complementary products or products that serve adjacent process steps.&#160; On January 30, 2015, we completed the acquisition of BTU, which provides complementary thermal processing technologies in the semiconductor, electronics and solar sectors, and strengthens our footprint in China and other key geographic markets. On December 24, 2014, we expanded our participation in the solar market by acquiring a 51% controlling interest in SoLayTec, which provides atomic layer deposition systems used in high efficiency solar cells. In February 2011, we acquired a 55% ownership interest in Kingstone.&#160;In October 2007, we acquired R2D Automation SAS, which allowed us to provide our diffusion furnaces with integrated automation that is also sold as a stand-alone product.  </font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><a name="s06B4F19B97AB590DBA6A75658755EFB6"></a><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Results of Operations</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The following table sets forth certain operational data as a percentage of net revenue for the periods indicated:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><br><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">27</font></div></div><hr style="page-break-after:always"><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s240028F91D625D1D809F7FF44963CEEE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><br><div style="line-height:120%;text-align:justify;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="12"></td></tr><tr><td width="53%"></td><td width="10%"></td><td width="1%"></td><td width="1%"></td><td width="10%"></td><td width="1%"></td><td width="1%"></td><td width="10%"></td><td width="1%"></td><td width="1%"></td><td width="10%"></td><td width="1%"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="5" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Three Months Ended</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="5" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Nine Months Ended</font></div></td></tr><tr><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">June&#160;30, <br>2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">June&#160;30, <br>2014</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">June&#160;30, <br>2015</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">June&#160;30, <br>2014</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Net revenue</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">100</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">100</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">100</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">100</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Cost of sales</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">75</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">82</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">73</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">75</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;%</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Gross margin</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">25</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">18</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">27</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">25</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Operating expenses:</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Selling, general and administrative</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">25</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">45</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">32</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">37</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Research, development and engineering</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">3</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">15</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">12</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;%</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Total operating expenses</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">28</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">60</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">37</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">49</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Operating loss</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(3</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(42</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(10</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(24</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)%</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Interest expense and other income, net</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">0</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">0</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">0</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">0</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Loss before income taxes</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(3</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(42</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(10</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(24</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)%</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Income taxes provision</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">14</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Net loss</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(4</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(56</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)%</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(11</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(29</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)%</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Add: net loss (income) attributable to noncontrolling interest</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">0</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">0</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Net loss attributable to Amtech Systems, Inc.</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(4</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)%</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(57</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(11</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)%</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(27</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)%</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr></table></div></div><br><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">28</font></div></div><hr style="page-break-after:always"><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s240028F91D625D1D809F7FF44963CEEE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><br><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;font-weight:bold;">Net Revenue</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Net revenue consists of revenue recognized upon shipment or installation of equipment, with the exception of products using new technology, for which revenue is recognized upon customer acceptance. Spare parts sales are recognized upon shipment and service revenue is recognized upon completion of the service activity or ratably over the term of the service contract. Since the majority of our revenue is generated from large system sales, revenue and operating income can be significantly impacted by the timing of system shipments, and recognition of revenue based on customer acceptances.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:96.2890625%;border-collapse:collapse;text-align:left;"><tr><td colspan="30"></td></tr><tr><td width="29%"></td><td width="1%"></td><td width="6%"></td><td width="1%"></td><td width="1%"></td><td width="1%"></td><td width="6%"></td><td width="1%"></td><td width="1%"></td><td width="1%"></td><td width="6%"></td><td width="1%"></td><td width="1%"></td><td width="6%"></td><td width="1%"></td><td width="1%"></td><td width="1%"></td><td width="6%"></td><td width="1%"></td><td width="1%"></td><td width="1%"></td><td width="6%"></td><td width="1%"></td><td width="1%"></td><td width="1%"></td><td width="6%"></td><td width="1%"></td><td width="1%"></td><td width="8%"></td><td width="1%"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Three Months Ended June 30,</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Nine months ended June 30,</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Segment</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">2014</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Incr (Decr)</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">% Change</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">2014</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Incr (Decr)</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">% Change</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="29" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">Solar</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">24,392</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">4,632</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">19,760</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">427</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">42,141</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">21,137</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">21,004</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">99</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">Semiconductor</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">12,945</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">2,132</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">10,813</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">507</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">25,765</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">8,478</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">17,287</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">204</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">%</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">Polishing</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">2,679</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">2,426</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">253</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">10</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">8,779</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">7,063</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">1,716</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">24</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">Total net revenue</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">40,016</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">9,190</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">30,826</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">335</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">76,685</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">36,678</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">40,007</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">109</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">%</font></div></td></tr></table></div></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Net revenue for the quarters ended June 30, 2015 and 2014 was </font><font style="font-family:inherit;font-size:10pt;">$40.0 million</font><font style="font-family:inherit;font-size:10pt;">&#32;and </font><font style="font-family:inherit;font-size:10pt;">$9.2 million</font><font style="font-family:inherit;font-size:10pt;">, respectively, an increase of </font><font style="font-family:inherit;font-size:10pt;">$30.8 million</font><font style="font-family:inherit;font-size:10pt;">&#32;or </font><font style="font-family:inherit;font-size:10pt;">335%</font><font style="font-family:inherit;font-size:10pt;">. Revenue from the solar segment increased </font><font style="font-family:inherit;font-size:10pt;">427%</font><font style="font-family:inherit;font-size:10pt;">&#32;due primarily to increased sales of our expanded portfolio of solar products, including our plasma-enhanced chemical vapor deposition equipment, as well as our solar diffusion systems.  Revenue from the semiconductor segment increased </font><font style="font-family:inherit;font-size:10pt;">507%</font><font style="font-family:inherit;font-size:10pt;">&#32;due primarily to the acquisition of BTU in January 2015.  Revenue from the polishing segment increased 10% in our third fiscal quarter due primarily to the sale of polishing equipment to a customer serving the optical components industry.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Net revenue for the nine months ended June 30, 2015 and 2014 was $76.7 million and $36.7 million, respectively, an increase of $40.0 million or 109%. Net revenue from the solar segment increased </font><font style="font-family:inherit;font-size:10pt;">99%</font><font style="font-family:inherit;font-size:10pt;">, due primarily to higher deferrals in fiscal 2014 as well as increased sales of our expanded solar product portfolio.  Revenue from the semiconductor segment increased </font><font style="font-family:inherit;font-size:10pt;">204%</font><font style="font-family:inherit;font-size:10pt;">&#32;due primarily to the acquisition of BTU in January of 2015.  Revenue from the polishing segment increased 24% due primarily to the continued increase in demand for our templates which are used in single-sided polishing processes for sapphire substrates in LED lighting and mobile communication devices.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;font-weight:bold;">Backlog and Orders</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Our order backlog as of June 30, 2015 and 2014 was $46.9 million and $39.4 million, respectively, an increase of $7.5 million. Our backlog as of June 30, 2015 includes approximately $32.4 million of orders and deferred revenue from our solar industry customers, compared to $30.6 million at June 30, 2014.  New orders booked in the quarter ended June 30, 2015 were $30.2 million versus $17.9 million of customer orders in the quarter ended June 30, 2014.  As of June 30, 2015, three customers individually accounted for 22%, 15% and 11% of our backlog.  The orders included in our backlog are generally credit approved customer purchase orders expected to ship within the next twelve months. Because our orders are typically subject to cancellation or delay by the customer, our backlog at any particular point in time is not necessarily representative of actual sales for succeeding periods, nor is backlog any assurance that we will realize profit from completing these orders. Our backlog also includes revenue deferred pursuant to our revenue recognition policy, derived from orders that have already been shipped, but which have not met the criteria for revenue recognition.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><br><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">29</font></div></div><hr style="page-break-after:always"><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s240028F91D625D1D809F7FF44963CEEE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><br><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;font-weight:bold;">Gross Profit and Gross Margin</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Gross profit is the difference between net revenue and cost of goods sold. Cost of goods sold consists of purchased material, labor and overhead to manufacture equipment and spare parts and the cost of service and support to customers for installation, warranty and paid service calls. Gross margin is gross profit as a percent of net revenue.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="30"></td></tr><tr><td width="35%"></td><td width="1%"></td><td width="5%"></td><td width="1%"></td><td width="1%"></td><td width="1%"></td><td width="5%"></td><td width="1%"></td><td width="1%"></td><td width="1%"></td><td width="6%"></td><td width="1%"></td><td width="1%"></td><td width="6%"></td><td width="1%"></td><td width="1%"></td><td width="1%"></td><td width="5%"></td><td width="1%"></td><td width="1%"></td><td width="1%"></td><td width="5%"></td><td width="1%"></td><td width="1%"></td><td width="1%"></td><td width="6%"></td><td width="1%"></td><td width="1%"></td><td width="6%"></td><td width="1%"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Three Months Ended June 30,</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Nine months ended June 30,</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Segment</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">2014</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Incr (Decr)</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">% Change</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">2014</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Incr (Decr)</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">% Change</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="29" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">Solar</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">5,638</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">151</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">5,487</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">3,634</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">&#160;%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">9,398</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">4,455</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">4,943</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">111</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">Semiconductor</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">3,504</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">418</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">3,086</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">738</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">&#160;%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">7,835</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">1,807</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">6,028</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">334</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">%</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">Polishing</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">986</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">1,062</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">(76</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">)</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">(7</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">)%</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">3,212</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">2,801</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">411</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">15</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">Total gross profit</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">10,128</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">1,631</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">8,497</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">521</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">&#160;%</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">20,445</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">9,063</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">11,382</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">126</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">%</font></div></td></tr></table></div></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Gross profit for the three months ended June 30, 2015 and 2014 was </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">$10.1 million</font><font style="font-family:inherit;font-size:10pt;">&#32;and </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">$1.6 million</font><font style="font-family:inherit;font-size:10pt;">, respectively, an increase of </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">$8.5 million</font><font style="font-family:inherit;font-size:10pt;">. Gross margin on products from our solar segment in the quarter ended June 30, 2015 increased significantly compared to the margins in the quarter ended June 30, 2014 due primarily to higher shipments.  Higher gross profit and higher gross margins in the semiconductor segment resulted from the acquisition of BTU.  Gross margins on products from our polishing segment decreased slightly due primarily to product mix. For the three months ended June 30, 2015, we recognized previously deferred profit of $0.5 million, while, for the three months ended June 30, 2014, we deferred profit of $1.9 million.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Gross profit for the nine months ended June 30, 2015 and 2014 was $20.4 million and $9.1 million, respectively, an increase of $11.4 million. Gross margin on products from our solar segment increased slightly when comparing the first nine months of fiscal 2015 to the first nine months of fiscal 2014, due primarily to higher sales volumes. In the semiconductor segment, gross profit increased primarily due to the BTU acquisition.  Gross margins on products from our polishing segment decreased slightly due primarily to product mix.  For the nine months ended June 30, 2015, we recognized previously deferred profit of $1.0 million, while, for the nine months ended June 30, 2014, we deferred profit of $6.2 million.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;font-weight:bold;">Selling, General and Administrative</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Selling, general and administrative expenses ("SG&amp;A") consist of the cost of employees, consultants and contractors, facility costs, sales commissions, shipping costs, promotional marketing expenses, legal, accounting expenses and bad debt expense.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">SG&amp;A expenses for the three months ended June 30, 2015 and 2014 were </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">$10.1 million</font><font style="font-family:inherit;font-size:10pt;">&#32;and  </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">$4.1 million</font><font style="font-family:inherit;font-size:10pt;">, respectively. SG&amp;A increased due, in part, to the acquisition of BTU. In addition to SG&amp;A expenses incurred by BTU, commissions and shipping expense increased due to higher revenues.  SG&amp;A expense includes $0.3 million and $0.2 million of stock-based compensation expense for the three months ended June 30, 2015 and 2014, respectively.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">SG&amp;A expenses for the nine month periods ended June 30, 2015 and 2014 were $24.5 million and $13.5 million, respectively.   SG&amp;A increased due, in part, to the acquisition of BTU. In addition to SG&amp;A expenses incurred by BTU, expenses were higher due to activity leading up to our acquisition of BTU as well as increases from higher commission expenses resulting from higher commission rates on certain sales in fiscal 2015.   SG&amp;A expense includes $0.9 million and $0.6 million of stock-based compensation expense for the nine months ended June 30, 2015 and 2014, respectively.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;font-weight:bold;">Research, Development and Engineering</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Research, development and engineering ("RD&amp;E") expenses consist of the cost of employees, consultants and contractors who design, engineer and develop new products and processes as well as materials and supplies used in producing prototypes. We receive reimbursements through governmental research and development grants which are netted against these expenses when certain conditions have been met. </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><br><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">30</font></div></div><hr style="page-break-after:always"><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s240028F91D625D1D809F7FF44963CEEE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><br><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="30"></td></tr><tr><td width="24%"></td><td width="1%"></td><td width="7%"></td><td width="1%"></td><td width="1%"></td><td width="1%"></td><td width="7%"></td><td width="1%"></td><td width="1%"></td><td width="1%"></td><td width="8%"></td><td width="1%"></td><td width="1%"></td><td width="5%"></td><td width="1%"></td><td width="1%"></td><td width="1%"></td><td width="7%"></td><td width="1%"></td><td width="1%"></td><td width="1%"></td><td width="7%"></td><td width="1%"></td><td width="1%"></td><td width="1%"></td><td width="6%"></td><td width="1%"></td><td width="2%"></td><td width="7%"></td><td width="1%"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">&#160;</font></div></td><td colspan="14" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;font-weight:bold;">Three Months Ended June 30,</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="14" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;font-weight:bold;">Nine Months Ended June 30,</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;font-weight:bold;">2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;font-weight:bold;">2014</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;font-weight:bold;">Incr.</font></div><div style="text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;font-weight:bold;">(Decr.)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;font-weight:bold;">% change</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;font-weight:bold;">2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;font-weight:bold;">2014</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;font-weight:bold;text-align:center;">Incr.</font></div><div style="text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;font-weight:bold;text-align:center;">(Decr.)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;font-weight:bold;">% change</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;font-weight:bold;">(dollars in thousands)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;font-weight:bold;">(dollars in thousands)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">Research, development and engineering</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">3,650</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">3,054</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">596</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">20</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">&#160;%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">9,763</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">8,442</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">1,321</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">16</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">&#160;%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">Grants earned</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">(2,342</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">(1,655</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">(687</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">41</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">&#160;%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">(5,869</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">(3,999</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">(1,870</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">47</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">&#160;%</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">Net research, development and engineering</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">1,308</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">1,399</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">(91</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">(7</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">)%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">3,894</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">4,443</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">(549</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">(12</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">)%</font></div></td></tr></table></div></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">RD&amp;E expense, net of grants earned, for the three months ended June 30, 2015 decreased </font><font style="font-family:inherit;font-size:10pt;">$0.1 million</font><font style="font-family:inherit;font-size:10pt;">&#32;compared to the three months ended June 30, 2014.  For the nine months ended June 30, 2015, RD&amp;E expense, net of grants, decreased $0.5 million compared to the nine months ended June 30, 2014. The decrease in net RD&amp;E expense is due to  increases in the recognition of government grant funding, partially offset by increased spending resulting primarily from the acquisition of BTU and SoLayTec.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">As described in our Annual report on Form 10-K for the fiscal year ended September 30, 2014, our Kingstone subsidiary has entered into an agreement for the development of ion implant technology in China for markets other than solar.  Depending on its progress, as well as the timing of grant recognition, this development project has resulted, and may result in the future, in significant quarter-to-quarter fluctuations in RD&amp;E expenses.  Based upon its progress in this development, approximately $2.1 million and $4.1 million of the government funding related to this agreement were recognized as grants earned in the three and nine months ended June 30, 2015.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;font-weight:bold;">Income Taxes</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">For the three and nine months ended June 30, 2015 we recorded income tax expense of </font><font style="font-family:inherit;font-size:10pt;">$0.3</font><font style="font-family:inherit;font-size:10pt;">&#32;million and </font><font style="font-family:inherit;font-size:10pt;">$0.6</font><font style="font-family:inherit;font-size:10pt;">&#32;million, respectively.  For the three and nine month periods ended June 30, 2014 we recorded income tax expense of </font><font style="font-family:inherit;font-size:10pt;">$1.3</font><font style="font-family:inherit;font-size:10pt;">&#32;million and </font><font style="font-family:inherit;font-size:10pt;">$1.9</font><font style="font-family:inherit;font-size:10pt;">&#32;million, respectively.&#160;The income tax provisions are based upon estimates of annual income, annual permanent differences and statutory tax rates in the various jurisdictions in which we operate, except that certain loss jurisdictions and discrete items are treated separately.  During the nine months ended June 30, 2015, the valuation allowance on deferred tax assets increased due to net operating losses in The Netherlands and France, partially offset by utilization of net operating losses in China.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#32;&#32;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160; &#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The Company establishes a valuation allowance when it is &#8220;more likely than not&#8221; that all or a portion of deferred tax assets will not be realized. A review of all available positive and negative evidence is considered, including a company&#8217;s performance, the market environment in which the company operates and the length of carryback and carryforward periods. According to the accounting standards, it is difficult to conclude that a valuation allowance is not needed when the negative evidence includes cumulative losses in recent years. Therefore, cumulative losses weigh heavily in the overall assessment.  As a result of the merger with BTU, we determined that it is more likely than not that some of our U.S. federal deferred tax assets would not be realized, and recorded a partial valuation allowance in the U.S.  In making this determination, we considered the cumulative losses in the U.S., including BTU, expected future taxable income and available tax planning strategies.  The Company continues to have a full valuation allowance on the deferred tax assets related to The Netherlands and China and a partial valuation allowance on the deferred tax assets in France.  A full valuation allowance has also been recorded for the United Kingdom as a result of the Merger.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Our future effective income tax rate depends on various factors, such as the amount of income (loss) in each tax jurisdiction, tax regulations governing each region, non-tax deductible expenses incurred as a percent of pre-tax income and the effectiveness of our tax planning strategies. At the end of 2011, we restructured our European operations to lower the tax rate on The Netherlands operations from 35% to a marginal rate of 25%, as we intend to permanently reinvest future Dutch earnings in our foreign operations. The effect of the restructure on our tax rate depends on the amount of income or loss earned in The Netherlands, as well as the portion of such income that can be demonstrated to have been derived from qualified new technologies, as well as the factors mentioned above.</font></div><br><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">31</font></div></div><hr style="page-break-after:always"><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s240028F91D625D1D809F7FF44963CEEE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><br><div style="line-height:120%;padding-bottom:13px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><a name="s158C31D8E9675B7989BBF469079198A3"></a><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Liquidity and Capital Resources</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">At June 30, 2015, and September 30, 2014, cash and cash equivalents were </font><font style="font-family:inherit;font-size:10pt;">$23.7 million</font><font style="font-family:inherit;font-size:10pt;">&#32;and </font><font style="font-family:inherit;font-size:10pt;">$27.4 million</font><font style="font-family:inherit;font-size:10pt;">, respectively. At June 30, 2015, and September 30, 2014, restricted cash was </font><font style="font-family:inherit;font-size:10pt;">$1.6 million</font><font style="font-family:inherit;font-size:10pt;">&#32;and </font><font style="font-family:inherit;font-size:10pt;">$2.4 million</font><font style="font-family:inherit;font-size:10pt;">, respectively. Our working capital was </font><font style="font-family:inherit;font-size:10pt;">$41.7</font><font style="font-family:inherit;font-size:10pt;">&#32;million as of June 30, 2015 and </font><font style="font-family:inherit;font-size:10pt;">$32.3 million</font><font style="font-family:inherit;font-size:10pt;">&#32;as of September 30, 2014.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The decrease in cash for the first nine months of fiscal 2015 of $3.7 million was primarily due to cash used by operating activities of </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">$12.4 million</font><font style="font-family:inherit;font-size:10pt;">, including tax payments of $4.8 million, capital expenditures of $0.5 million and cash provided by financing activities of $0.8 million, partially offset by $8.6 million of net cash acquired in the acquisition of BTU and SoLaytec. We maintain a portion of our cash and cash equivalents in Euros at our Dutch and French operations; therefore, changes in the exchange rate have an impact on our cash balances. Our ratio of current assets to current liabilities was </font><font style="font-family:inherit;font-size:10pt;">1.9</font><font style="font-family:inherit;font-size:10pt;">:1 and 2.0:1 as of June 30, 2015, and September 30, 2014, respectively.  We have never paid dividends on our Common Stock.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In December 2014, we acquired $2.0 million of long-term debt as part of the SoLayTec acquisition. As of June 30, 2015, total SoLayTec debt was $2.3 million. The SoLayTec debt has interest rates ranging from </font><font style="font-family:inherit;font-size:10pt;">5.95%</font><font style="font-family:inherit;font-size:10pt;">&#32;to </font><font style="font-family:inherit;font-size:10pt;">10%</font><font style="font-family:inherit;font-size:10pt;">&#32;and maturity dates ranging from fiscal 2017 to fiscal 2021. Additionally, in January 2015, the Company acquired $7.2 million of long-term debt as part of the BTU acquisition. The debt acquired from BTU has an interest rate of 4.4% through September, 2018, at which time the interest rate will be adjusted and indexed to the Federal Home Loan Board Five Year Classic Advance Rate.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The success of our growth strategy is dependent upon the availability of additional capital resources on terms satisfactory to management. Our sources of capital in the past have included the sale of equity securities, which include common and preferred stock sold in private transactions and public offerings, capital leases and long-term debt.  We believe that our principal sources of liquidity discussed above are sufficient to support operations for at least the next twelve months.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;font-weight:bold;">Cash Flows from Operating Activities</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Cash used in our operating activities was </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">$12.4 million</font><font style="font-family:inherit;font-size:10pt;">&#32;for the nine months ended June 30, 2015, compared to </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">$6.8 million</font><font style="font-family:inherit;font-size:10pt;">&#32;used in such activities for the nine months ended June 30, 2014.  During the nine months ended June 30, 2015, $4.7 million was used in losses on operations, net of non-cash charges.  Cash was also used to make tax payments of $4.8 million and through increases in inventory and other working capital.  Partially offsetting these uses of cash were increases in accounts payable and customer deposits.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;&#160;</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font><font style="font-family:inherit;font-size:10pt;font-style:italic;font-weight:bold;">Cash Flows from Investing Activities</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Our investing activities for each of the nine month periods ended June 30, 2015 and 2014 consisted of purchases of property, plant and equipment of approximately $0.5 million and $0.2 million, respectively.  In December 2014, we acquired a 51% interest SoLayTec, for an investment of $0.3 million net of the cash of the acquired company.  Cash of $8.8 million was acquired in the acquisition of BTU in January, 2015.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;font-weight:bold;">Cash Flows from Financing Activities</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">For the nine months ended June 30, 2015 and June 30, 2014, respectively, the primary source of $0.8 million and $1.2 million, respectively, of cash provided by financing activities was proceeds from the exercise of stock options.</font></div><br><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">32</font></div></div><hr style="page-break-after:always"><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s240028F91D625D1D809F7FF44963CEEE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><br><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><a name="s713EEA3E5D7151CFA74E3E1632AC309B"></a><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Off-Balance Sheet Arrangements</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">As of June 30, 2015, Amtech had no off-balance sheet arrangements as defined in Item 303(a)(4) of Regulation S-K promulgated by the Securities and Exchange Commission.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><a name="sCE709D5632EA5ED1A3A26296FB006F31"></a><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Contractual Obligations</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Purchase obligations were $14.1 million as of June 30, 2015, compared to $7.9 million as of September 30, 2014, an increase of $6.2 million.  In December 2014, the Company acquired long-term debt as part of the SoLayTec acquistion.  The debt acquired is stated at fair market value of </font><font style="font-family:inherit;font-size:10pt;font-weight:normal;">$2.3</font><font style="font-family:inherit;font-size:10pt;">&#32;million as of June 30, 2015.  The debt acquired has interest rates ranging from </font><font style="font-family:inherit;font-size:10pt;">5.95%</font><font style="font-family:inherit;font-size:10pt;">&#32;to </font><font style="font-family:inherit;font-size:10pt;">10%</font><font style="font-family:inherit;font-size:10pt;">&#32;and maturity dates ranging from fiscal 2017 to fiscal 2021. Additionally, in January 2015, the Company acquired  a mortgage, which is included in long-term debt as part of the merger with BTU. The mortgage acquired is stated at fair market value of $7.0 million as of June 30, 2015. The mortgage acquired from BTU has an interest rate of 4.4% through September 26, 2018, at which time the interest rate will be adjusted to a per annum fixed rate equal to the aggregate of the Federal Home Loan Board Five Year Classic Advance Rate plus two hundred forty basis points. All outstanding principal and accrued and unpaid interest will be due and payable on the maturity date. Refer to Amtech&#8217;s annual report on Form 10-K for the year ended September 30, 2014, for information on the Company&#8217;s other contractual obligations.&#160;</font></div><a name="sB3F6B72D34F75DF0B21C56EDCE436F47"></a><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Critical Accounting Policies</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8220;Management&#8217;s Discussion and Analysis of Financial Condition and Results of Operations&#8221; discusses our condensed consolidated financial statements that have been prepared in accordance with accounting principles generally accepted in the United States of America. The preparation of these condensed consolidated financial statements requires us to make estimates and assumptions that affect the reported amount of assets and liabilities at the date of the condensed consolidated financial statements, the disclosure of contingent assets and liabilities at the date of the condensed consolidated financial statements and the reported amounts of revenue and expenses during the reporting period.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">On an ongoing basis, we evaluate our estimates and judgments, including those related to revenue recognition, inventory valuation, accounts and notes receivable collectability, warranty and impairment of long-lived assets. We base our estimates and judgments on historical experience and on various other factors that we believe to be reasonable under the circumstances. The results of these estimates and judgments form the basis for making conclusions about the carrying value of assets and liabilities that are not readily apparent from other sources. Actual results may differ from these estimates under different assumptions or conditions.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">A critical accounting policy is one that is both important to the presentation of our financial position and results of operations, and requires management&#8217;s most difficult, subjective or complex judgments, often as a result of the need to make estimates about the effect of matters that are inherently uncertain. These uncertainties are discussed in Part I, Item 1A of our Annual Report on Form 10-K for the year ended September 30, 2014. We believe our critical accounting policies relate to the more significant judgments and estimates used in the preparation of our consolidated financial statements.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">We believe the critical accounting policies discussed in the section entitled &#8220;Item 7: Management&#8217;s Discussion and Analysis of Financial Condition and Results of Operations &#8211; Critical Accounting Policies&#8221; in our Annual Report on Form 10-K for the fiscal year ended September 30, 2014 represent the most significant judgments and estimates used in the preparation of our consolidated financial statements. There have been no significant changes in our critical accounting policies during the nine months ended June 30, 2015.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><a name="s6877E21E669D5FEB92F9A8AF089F992A"></a><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Impact of Recently Issued Accounting Pronouncements&#160;</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">For discussion of the impact of recently issued accounting pronouncements, see &#8220;Item 1: Financial Information&#8221; under &#8220;Impact of Recently Issued Accounting Pronouncements&#8221;.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><br><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">33</font></div></div><hr style="page-break-after:always"><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s240028F91D625D1D809F7FF44963CEEE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><br><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><a name="sB38A54B0E7D05C77802E4B5050D33668"></a><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:72px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:0px;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Item  3.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">QUANTITATIVE AND QUALITATIVE DISCLOSURES ABOUT MARKET RISK</font></div></td></tr></table><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">We are exposed to foreign currency exchange rates to the extent sales contracts, purchase contracts, assets or liabilities of our operations are denominated in currencies other than their functional currency. Our operations in the United States are generally conducted in their functional currency, the U.S. dollar.  Our operations in Europe, China and other countries conduct business primarily in their functional currencies and occasionally enter into transactions in non-functional currencies. It is highly uncertain how currency exchange rates will fluctuate in the future. Actual changes in foreign exchange rates could adversely affect our operating results or financial condition.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">During fiscal 2014 and in the first nine months of fiscal 2015, we did not hold any stand-alone or separate derivative instruments. We incurred net foreign currency transaction gains or losses of approximately $0.1 million during the nine months ended June 30, 2015 and 2014. </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">We incurred foreign currency translation losses of $3.2 million and gains of $0.4 million, during the nine months ended June 30, 2015 and 2014, respectively, a type of other comprehensive income (loss), which is a direct adjustment to stockholders&#8217; equity. Our net investment in and advances to our foreign operations totaled $21.1 million as of June 30, 2015. A 10% change in the value of the foreign currencies relative to the U.S. dollar would cause approximately $2.1 million of other comprehensive income (loss). </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">As of June 30, 2015 sales commitments denominated in a currency other than the functional currency of our transacting operation totaled approximately $1.2 million. Our lead-times to fulfill these commitments generally range between 13 and 26 weeks.  A 10% change in the relevant exchange rates between the time the order was taken and the time of shipment would not cause our gross profit on such orders to be significantly greater or less than expected on the date the order was taken.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#32;As of June 30, 2015, purchase commitments denominated in a currency other than the functional currency of our transacting operation totaled $1.0 million. A 10% change in the relevant exchange rates between the time the purchase order was placed and the time the order is received would not cause our cost of such items to be significantly greater or less than expected on the date the purchase order was placed. </font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><br><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">34</font></div></div><hr style="page-break-after:always"><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s240028F91D625D1D809F7FF44963CEEE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><br><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><a name="s7DBC9874169954789489FDDC3BEB2A2E"></a><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:72px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:0px;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Item  4.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">CONTROLS AND PROCEDURES</font></div></td></tr></table><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;font-weight:bold;">Disclosure Controls and Procedures</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Our management, including the Chief Executive Officer (&#8220;CEO&#8221;) and the Chief Financial Officer (&#8220;CFO&#8221;), has carried out an evaluation of the effectiveness of our disclosure controls and procedures as of June 30, 2015, pursuant to Exchange Act Rules 13a-15(e) and 15(d)-15(e).  Disclosure controls and procedures means controls and other procedures that are designed to ensure that information required to be disclosed by the Company in the reports it files or submits under the Exchange Act is recorded, processed, summarized and reported within the time periods specified in the Securities and Exchange Commission's rules and forms. Disclosure controls and procedures include, without limitation, controls and procedures designed to ensure that information required to be disclosed by the Company in the reports that it files or submits under the Exchange Act is accumulated and communicated to management, including the principal executive and principal financial officer, as appropriate to allow timely decisions regarding required disclosure.  Based upon that evaluation, our CEO and CFO have concluded that as of such date, our disclosure controls and procedures in place were effective. </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;font-weight:bold;">Changes in Internal Control Over Financial Reporting</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">During the quarter ended March 31, 2015, the Company acquired BTU.  Other than the addition of BTU's internal control over financial reporting and any related changes in control to integrate BTU into the Company, there was no change in Amtech's internal control over financial reporting during the nine months ended June 30, 2015 that has materially affected, or is reasonably likely to materially affect, its internal control over financial reporting. </font></div><div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><br><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">35</font></div></div><hr style="page-break-after:always"><a name="s9B3879166BDA581BB93F1DB3ED2C8832"></a><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s240028F91D625D1D809F7FF44963CEEE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><br><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">PART II. OTHER INFORMATION</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><a name="sF1000F63902F56B8BAF8ABEB9473580B"></a><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:72px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:0px;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Item 1.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Legal Proceedings</font></div></td></tr></table><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The Company and its subsidiaries are defendants from time to time in actions for matters arising out of their business operations. As previously disclosed, shortly after the Company entered into the Merger Agreement with BTU, two separate putative stockholder class action complaints were filed in the Court of Chancery of the State of Delaware (together, the "Stockholder Actions"). The first was filed on November 4, 2014 and the second on November 17, 2014, purportedly on behalf of BTU&#8217;s public stockholders, against BTU, members of the BTU Board, Amtech and Merger Sub.  The Stockholder Actions were consolidated on December 4, 2014.  The complaints generally alleged that, in connection with entering into the Merger Agreement, the BTU board of directors breached certain fiduciary duties owed to BTU's stockholders.  The complaints sought various forms of declaratory and injunctive relief, as well as compensatory damages. </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;padding-bottom:10px;text-align:justify;font-size:11pt;"><font style="font-family:inherit;font-size:10pt;">On January&#160;16, 2015, the Company and BTU, along with the other defendants named therein, entered into a memorandum of understanding (the &#8220;MOU&#8221;) to settle the Stockholder Actions. Pursuant to the MOU, the parties to the Stockholder Actions agreed to resolve the claims alleged and the Company and BTU agreed to make certain additional disclosures regarding the Merger.  </font><font style="font-family:inherit;font-size:11pt;">On June 22, 2015, the Company and BTU, along with the other defendants named therein, filed a Stipulation and Agreement of Compromise and Settlement (the &#8220;Stipulation of Settlement&#8221;) with the Court of Chancery in the State of Delaware to memorialize the MOU. The Stipulation of Settlement provides for a release of all claims against the Company and BTU, along with the other defendants named therein, subject to an exception for certain securities law claims. In addition, Stipulation of Settlement provides that BTU will be responsible for the payment of certain amounts in plaintiffs&#8217; attorney fees and expenses in connection with the settlement. The Stipulation of Settlement is subject to court approval. The Company and BTU entered into the Stipulation of Settlement solely to avoid the costs, risks and uncertainties inherent in litigation and without admitting any liability or wrongdoing. There can be no assurance that the court will approve the Stipulation of Settlement. In such event, the proposed settlement as contemplated by the Stipulation of Settlement may be terminated.</font></div><div style="line-height:120%;padding-bottom:10px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><a name="s1A513F97553D516B891C26652128C789"></a><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:72px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:0px;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Item  1A.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Risk Factors</font></div></td></tr></table><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The most significant risk factors applicable to Amtech are described in Part I, Item 1A (Risk Factors) of Amtech&#8217;s Annual Report on Form 10-K for the fiscal year ended September 30, 2014 (our &#8220;2014 Form 10-K&#8221;). There have been no material changes to the risk factors previously disclosed in our fiscal 2014 Form 10-K.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><a name="s2E03751E504655A3927A6DD035BE1F29"></a><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:72px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:0px;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Item 2.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Unregistered Sales of Equity Securities and Use of Proceeds</font></div></td></tr></table><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">None.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><a name="sD90F8673ECB758CB9697C726F08A2E04"></a><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:72px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:0px;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Item 3.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Defaults Upon Senior Securities</font></div></td></tr></table><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">None.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><a name="s185746D2FDEA5EE9B2F02D9A1E8101E3"></a><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:72px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:0px;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Item 4.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Mine Safety Disclosures</font></div></td></tr></table><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Not applicable. </font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><a name="s4B87564E21225518946FEE927B2ED855"></a><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:72px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:0px;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Item 5.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Other Information</font></div></td></tr></table><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">None.</font></div><br><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">36</font></div></div><hr style="page-break-after:always"><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s240028F91D625D1D809F7FF44963CEEE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><br><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><a name="s66E207D42AE65FFB81BE771866FD17D5"></a><div style="line-height:120%;padding-left:72px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:72px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:0px;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Item  6.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Exhibits </font></div></td></tr></table><div style="line-height:120%;padding-left:72px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:94.140625%;border-collapse:collapse;text-align:left;"><tr><td colspan="3"></td></tr><tr><td width="9%"></td><td width="76%"></td><td width="15%"></td></tr><tr><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">10.1</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Amendment No. 4 to the Employment Agreement between Amtech Systems, Inc. and Jong S. Whang, dated April 9, 2015 (incorporated herein by reference to Exhibit 10.1 to the Company&#8217;s Current Report on Form 8-K filed with the SEC on April 10, 2015)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">10.2</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Amendment No. 4 to the Employment Agreement between Amtech Systems, Inc. and Fokko Pentinga, dated April 9, 2015 (incorporated herein by reference to Exhibit 10.2 to the Company&#8217;s Current Report on Form 8-K filed with the SEC on April 10, 2015)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">10.3</font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Employment Agreement between Amtech Systems, Inc. and Bradley C. Anderson, dated April 9, 2015 (incorporated herein by reference to Exhibit 10.3 to the Company&#8217;s Current Report on Form 8-K filed with the SEC on April 10, 2015)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">10.4</font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2007 Employee Stock Incentive Plan of Amtech Systems, Inc. As Amended Effective April 9, 2015 (incorporated herein by reference to Exhibit 10.4 to the Company&#8217;s Current Report on Form 8-K filed with the SEC on April 10, 2015)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">10.5</font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Investment Agreement regarding Shanghai Kingstone Semiconductor Company, Ltd., dated July 17, 2015, by and between Kingstone Technology Hong Kong Limited and Suzhou Zhou Jing Investment Center (LP)</font></div><div style="font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">* +</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">31.1</font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Certification of Chief Executive Officer Pursuant to Rule 13a-14(a)/15d-14(a) of the Securities Exchange Act of 1934, as Amended</font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">*</font></div></td></tr><tr><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">31.2</font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Certification of Chief Financial Officer Pursuant to Rule 13a-14(a)/15d-14(a) of the Securities Exchange Act of 1934, as Amended</font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">*</font></div></td></tr><tr><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">32.1</font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Certification of Chief Executive Officer Pursuant to 18 U.S.C. Section 1350, as Adopted Pursuant to Section 906 of the Sarbanes-Oxley Act of 2002</font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">*</font></div></td></tr><tr><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">32.2</font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Certification of Chief Financial Officer Pursuant to 18 U.S.C. Section 1350, as Adopted Pursuant to Section 906 of the Sarbanes-Oxley Act of 2002</font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">*</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:14px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:14px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:14px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">101.INS&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">XBRL Instance Document</font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">*</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:12px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:12px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:12px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">101.SCH&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">XBRL Taxonomy Extension Schema Document</font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">*</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:13px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:13px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:13px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">101.PRE&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Taxonomy Presentation Linkbase Document</font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">*</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:13px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:13px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:13px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">101.CAL&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">XBRL Taxonomy Calculation Linkbase Document</font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">*</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:13px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:13px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:13px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">101.LAB&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">XBRL Taxonomy Label Linkbase Document</font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">*</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:13px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:13px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:13px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">101.DEF&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">XBRL Taxonomy Extension Definition Linkbase Document</font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">*</font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">____________________</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:0px;"><font style="font-family:inherit;font-size:10pt;">*</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Filed herewith.</font></div></td></tr></table><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:0px;"><font style="font-family:inherit;font-size:10pt;">+</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">This agreement is written in both the English and Chinese languages, and both versions are equally binding pursuant to the agreement. The Chinese language version is available from the Company upon request.</font></div></td></tr></table><div style="line-height:120%;padding-left:48px;text-indent:-48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;padding-left:48px;text-indent:-48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;padding-left:48px;text-indent:-48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;padding-left:48px;text-indent:-48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><br><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">37</font></div></div><hr style="page-break-after:always"><a name="s5ECE04604A1555C885345F6C2EBC0611"></a><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s240028F91D625D1D809F7FF44963CEEE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><br><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">SIGNATURES&#160;</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;text-indent:16px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#32;Pursuant to the requirements of the Securities Exchange Act of 1934, the registrant has duly caused this report to be signed on its behalf by the undersigned thereunto duly authorized.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">&#160;&#160;&#160;&#160;</font><font style="font-family:inherit;font-size:10pt;">&#32;AMTECH SYSTEMS, INC.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="5"></td></tr><tr><td width="7%"></td><td width="43%"></td><td width="1%"></td><td width="6%"></td><td width="43%"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">By</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">/s/ Bradley C. Anderson</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Dated:&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;text-decoration:underline;">August&#160;6, 2015</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Bradley C. Anderson</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Executive Vice President - Finance/Chief Financial Officer</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(Principal Accounting Officer)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><br><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">38</font></div></div>	</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-10.5
<SEQUENCE>2
<FILENAME>asys63015-ex105.htm
<DESCRIPTION>EXHIBIT 10.5
<TEXT>
<!DOCTYPE html PUBLIC "-//W3C//DTD HTML 4.01 Transitional//EN" "http://www.w3.org/TR/html4/loose.dtd">
<html>
	<head>
		<!-- Document created using Wdesk 1 -->
		<!-- Copyright 2015 Workiva -->
		<title>ASYS 6.30.15-EX10.5</title>
	</head>
	<body style="font-family:Times New Roman;font-size:10pt;">
<a name="s413B52798DC0CBA77AB5D6FA5EC5990B"></a><div><div style="line-height:120%;text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;"><br></font></div><div style="line-height:120%;text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;"><br></font></div><div style="line-height:120%;text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">EXECUTION COPY</font></div><div style="line-height:120%;"><hr></div></div><br><div style="line-height:120%;text-align:center;font-size:16pt;"><font style="font-family:inherit;font-size:16pt;"><br></font></div><div style="line-height:120%;text-align:center;font-size:16pt;"><font style="font-family:inherit;font-size:16pt;font-weight:bold;">Kingstone Technology Hong Kong Limited</font></div><div style="line-height:120%;text-align:center;font-size:16pt;"><font style="font-family:inherit;font-size:16pt;font-weight:bold;">&#32;(&#8220;Existing Shareholder&#8221;)</font></div><div style="line-height:120%;text-align:justify;font-size:16pt;"><font style="font-family:inherit;font-size:16pt;"><br></font></div><div style="line-height:120%;text-align:center;font-size:15pt;"><font style="font-family:inherit;font-size:15pt;font-weight:bold;">vs</font></div><div style="line-height:120%;text-align:center;font-size:15pt;"><font style="font-family:inherit;font-size:15pt;"><br></font></div><div style="line-height:120%;text-align:center;font-size:16pt;"><font style="font-family:inherit;font-size:16pt;font-weight:bold;">Suzhou Zhuo Jing Investment Center (LP)</font></div><div style="line-height:120%;text-align:center;font-size:15pt;"><font style="font-family:inherit;font-size:15pt;font-weight:bold;">&#32;(&#8220;New Shareholder&#8221;)</font></div><div style="line-height:120%;text-align:center;font-size:16pt;"><font style="font-family:inherit;font-size:16pt;"><br></font></div><div style="line-height:120%;text-align:center;font-size:16pt;"><font style="font-family:inherit;font-size:16pt;"><br></font></div><div style="line-height:120%;text-align:center;font-size:14pt;"><font style="font-family:inherit;font-size:14pt;font-weight:bold;">regarding</font></div><div style="line-height:120%;text-align:center;font-size:15pt;"><font style="font-family:inherit;font-size:15pt;"><br></font></div><div style="line-height:120%;text-align:center;font-size:15pt;"><font style="font-family:inherit;font-size:15pt;font-weight:bold;">Shanghai Kingstone Semiconductor Company, Ltd.</font></div><div style="line-height:120%;text-align:center;font-size:26pt;"><font style="font-family:inherit;font-size:26pt;"><br></font></div><div style="line-height:120%;text-align:center;font-size:26pt;"><font style="font-family:inherit;font-size:26pt;font-weight:bold;">Investment Agreement</font></div><div style="line-height:120%;text-align:center;padding-left:170px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><div style="line-height:120%;text-align:center;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><div style="line-height:120%;text-align:center;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><div style="line-height:120%;text-align:center;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><div style="line-height:120%;text-align:center;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><div style="line-height:120%;text-align:center;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><div style="line-height:120%;text-align:center;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><div style="line-height:120%;text-align:center;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><div style="line-height:120%;text-align:center;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><div style="line-height:120%;text-align:center;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><div style="line-height:120%;text-align:center;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><div style="line-height:120%;text-align:center;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><div style="line-height:120%;text-align:center;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><div style="line-height:120%;text-align:center;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><div style="line-height:120%;text-align:center;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><div style="line-height:120%;text-align:center;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><div style="line-height:120%;text-align:center;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><div style="line-height:120%;text-align:center;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><div style="line-height:120%;text-align:center;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><div style="line-height:120%;text-align:center;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><div style="line-height:120%;text-align:center;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><div style="line-height:120%;text-align:center;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><div style="line-height:120%;text-align:center;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><div style="line-height:120%;"><hr></div><div style="line-height:120%;text-align:left;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;font-style:italic;font-weight:bold;">**This executed agreement is written in both English and Chinese. Both versions are equally binding. The Chinese language version of this agreement is available upon request from Amtech Systems, Inc.</font></div><div style="line-height:120%;"><hr></div><br><div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></div><hr style="page-break-after:always"><a name="s413B52798DC0CBA77AB5D6FA5EC5990B"></a><div><div style="line-height:120%;text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;"><br></font></div></div><br><div style="line-height:120%;text-align:center;font-size:15pt;"><font style="font-family:inherit;font-size:15pt;font-weight:bold;">&#32;Investment Agreement</font></div><div style="line-height:120%;text-align:center;font-size:15pt;"><font style="font-family:inherit;font-size:15pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">This </font><font style="font-family:inherit;font-size:12pt;font-weight:bold;">&#8220;Investment Agreement&#8221;</font><font style="font-family:inherit;font-size:12pt;">&#32;(hereinafter referred to that the </font><font style="font-family:inherit;font-size:12pt;font-weight:bold;">&#8220;Agreement&#8221;</font><font style="font-family:inherit;font-size:12pt;">) is signed by the following parties on July 17, 2015 in Pudong New District, Shanghai, People&#8217;s Republic of China (hereinafter referred to as &#8220;China&#8221;):</font></div><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:24px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:0px;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">1.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">Kingstone Technology Hong Kong Limited</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:24px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">Registered Address:</font></div><div style="line-height:120%;text-align:justify;padding-left:24px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">Room 1501, SPA Centre, 53-55 Lockhart Road, Wanchai, Hong Kong</font></div><div style="line-height:120%;text-align:justify;padding-left:24px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">Company Number: 1498928</font></div><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:24px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:0px;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">2.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">Suzhou Zhuo Jing Investment Center (LP)</font></div></td></tr></table><div style="line-height:120%;text-align:justify;text-indent:24px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">Address: 558 Fenhu Avenue&#3852;Lili Town&#3852;Wujiang&#3852;Suzhou City</font></div><div style="line-height:120%;text-align:justify;padding-left:24px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">Registration Number: 320500000090854</font></div><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><div style="line-height:120%;text-align:justify;padding-left:28px;font-size:11pt;"><font style="font-family:inherit;font-size:11pt;">Collectively the &#8220;</font><font style="font-family:inherit;font-size:11pt;font-weight:bold;">Parties</font><font style="font-family:inherit;font-size:11pt;">&#8221; and each a &#8220;</font><font style="font-family:inherit;font-size:11pt;font-weight:bold;">Party</font><font style="font-family:inherit;font-size:11pt;">&#8221;.</font></div><div style="line-height:120%;text-align:justify;padding-left:28px;font-size:11pt;"><font style="font-family:inherit;font-size:11pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">Recitals:</font></div><div style="line-height:120%;text-align:justify;padding-left:28px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:28px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:0px;"><font style="font-family:inherit;font-size:12pt;">1&#65294;</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">Shanghai Kingstone Semiconductor Company Ltd. (hereinafter referred to as the &#8220;Company&#8221;) was established under Chinese law and validly exists at 200 Niudun Road, Building 7, Unit 1, Pudong New District, Shanghai with registration number 310115400252348. As of the signing date of the Agreement, the Company has a registered capital of RMB 40 million yuan.</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:28px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:28px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:0px;"><font style="font-family:inherit;font-size:12pt;">2&#65294;</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">The Parties have entered into an Investment Agreement dated June 12, 2015 (&#8220;Original Investment Agreement&#8221;) agreeing on the overall terms and conditions of the contemplated investment by the New Shareholder to the Company, whereby the Parties agreed to further negotiate and agree on the detailed deal structure and enter into definitive agreements. Now that the Parties have reached an agreement on the deal structure and wish to enter into this Agreement to amend and replace the Original Investment Agreement.  </font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:28px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:28px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:0px;"><font style="font-family:inherit;font-size:12pt;">3&#65294;</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">The Existing Shareholder agrees for the New Shareholder to become a shareholder of the Company through capital increase and equity transfer in accordance with the terms and conditions of this Agreement. In the meantime, the Existing Shareholder agrees to waive its right of capital increase.</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:28px;font-size:11pt;"><font style="font-family:inherit;font-size:11pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:28px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:0px;"><font style="font-family:inherit;font-size:12pt;">4&#65294;</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">In accordance with the valuation of the Company reached by the Parties, the New Shareholder agrees to subscribe the Company&#8217;s new registered capital and purchase certain equity interest from the Existing Shareholder pursuant to the terms of this Agreement.</font></div></td></tr></table><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><div style="line-height:120%;text-align:justify;padding-left:28px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">Therefore, the Parties agree as follows:</font></div><div style="line-height:156%;text-align:justify;padding-left:36px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><div style="line-height:156%;text-align:justify;padding-left:36px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><div style="line-height:156%;text-align:justify;padding-left:36px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><br><div><div style="line-height:120%;text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">2</font></div><div style="line-height:120%;text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;"><br></font></div></div><hr style="page-break-after:always"><a name="s413B52798DC0CBA77AB5D6FA5EC5990B"></a><div><div style="line-height:120%;text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;"><br></font></div></div><br><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:37px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:0px;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">1.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">Definitions</font></div></td></tr></table><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:37px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:0px;"><font style="font-family:inherit;font-size:12pt;">1.1.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">Unless otherwise provided in this Agreement, the following terms should have the following meanings:</font></div></td></tr></table><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><div style="line-height:120%;font-size:12pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="2"></td></tr><tr><td width="30%"></td><td width="70%"></td></tr><tr><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;color:#222222;">&#8220;</font><font style="font-family:inherit;font-size:12pt;font-weight:bold;">Amtech</font><font style="font-family:inherit;font-size:12pt;font-weight:bold;color:#222222;">&#8221;</font><font style="font-family:inherit;font-size:12pt;font-weight:bold;">&#160;</font></div><div style="text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">AMTECH SYSTEMS, INC., an Arizona corporation which is a shareholder of the Existing Shareholder.</font></div><div style="text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div></td></tr><tr><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">&#8220;</font><font style="font-family:inherit;font-size:12pt;font-weight:bold;color:#222222;">Agreement</font><font style="font-family:inherit;font-size:12pt;font-weight:bold;">&#8221;</font></div><div style="text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;color:#222222;">this investment agreement and its </font><font style="font-family:inherit;font-size:12pt;">appendices</font><font style="font-family:inherit;font-size:12pt;color:#222222;">, including their modification, alteration and supplement made from time to time.</font></div></td></tr><tr><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">&#8220;Capital Amount&#8221;</font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">shall have the meaning described in Article 2.2</font></div><div style="text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div></td></tr><tr><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">&#8220;Capital Increase&#8221;</font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">shall have the meaning described in Article 2.2</font></div><div style="text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div></td></tr><tr><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="font-size:12pt;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">&#8220;China Escrow Account&#8221;</font></div><div style="text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">shall have the meaning described in Article 5.1</font></div></td></tr><tr><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">China Escrow Agent&#8221;</font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">shall have the meaning described in Article 5.1</font></div><div style="text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div></td></tr><tr><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="font-size:12pt;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">&#8220;China Escrow Agreement&#8221;</font></div><div style="text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">shall have the meaning described in Article 5.1</font></div></td></tr><tr><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">&#8220;</font><font style="font-family:inherit;font-size:12pt;font-weight:bold;color:#222222;">Company</font><font style="font-family:inherit;font-size:12pt;font-weight:bold;">&#8221;   </font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;color:#222222;">Shanghai Kingstone Semiconductor Company, Ltd.</font></div><div style="text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div></td></tr><tr><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">&#8220;Effective Date&#8221;</font></div><div style="text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">means the date on which the Parties sign this Agreement.</font></div></td></tr><tr><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="font-size:12pt;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">&#8220;Equity Purchase Price&#8221;</font></div><div style="text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">shall have the meaning described in Article 2.4</font></div></td></tr><tr><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">&#8220;Equity Transfer&#8221;</font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">shall have the meaning described in Article 2.4</font></div><div style="text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div></td></tr><tr><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;color:#222222;">&#8220;</font><font style="font-family:inherit;font-size:12pt;font-weight:bold;">Existing Shareholder</font><font style="font-family:inherit;font-size:12pt;font-weight:bold;color:#222222;">&#8221;</font></div><div style="text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">Kingstone Technology Hong Kong Limited.</font></div><div style="text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div></td></tr><tr><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">&#8220;Force Majeure&#8221;</font></div><div style="text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">an event that cannot be controlled by a Party, or is not foreseeable or even if foreseeable, cannot be prevented or avoided by a Party, which results in the Party unable to perform its obligations under this Agreement, such as fire, flood, earthquake, storm, tsunami or other natural disasters, strike or social instability.</font></div><div style="text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div></td></tr><tr><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">&#8220;New AOA&#8221;</font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">shall have the meaning described in Article 6.1(1)</font></div><div style="text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div></td></tr><tr><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;color:#222222;">&#8220;New Shareholder&#8221;</font></div><div style="text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;color:#222222;">Suzhou Zhuo Jing Investment Center (LP).</font></div><div style="text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div></td></tr><tr><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="font-size:12pt;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">&#8220;Original Investment Agreement&#8221;</font></div><div style="text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">means the Investment Agreement entered into by and between the Parties on June 12, 2015.</font></div></td></tr><tr><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">&#8220;Registration Authority&#8221; </font></div><div style="text-align:left;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;color:#222222;">People's Republic of China Ministry of Commerce and State Administration for Industry and Commerce or their authorized local counterparts.</font></div><div style="text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div></td></tr><tr><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">&#8220;SAFE&#8221;</font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">means the State Administration of Foreign Exchange and its authorized local counterparts.</font></div><div style="text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div></td></tr></table></div></div><br><div><div style="line-height:120%;text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">3</font></div><div style="line-height:120%;text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;"><br></font></div></div><hr style="page-break-after:always"><a name="s413B52798DC0CBA77AB5D6FA5EC5990B"></a><div><div style="line-height:120%;text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;"><br></font></div></div><br><div style="line-height:120%;font-size:12pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="2"></td></tr><tr><td width="30%"></td><td width="70%"></td></tr><tr><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="font-size:12pt;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">&#8220;Sales and Service Agreement&#8221;</font></div><div style="text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">shall have the meaning described in Article 6.2(3)</font></div></td></tr><tr><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">&#8220;SJ&#8221;</font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">SILICON JADE LIMITED, a company incorporated under the laws of Hong Kong with registration number 1498937, which is a shareholder of the Existing Shareholder.</font></div><div style="text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div></td></tr><tr><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">&#8220;Transactions&#8221;</font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">Means collectively the Equity Transfer and the Capital Increase</font></div></td></tr></table></div></div><div style="line-height:120%;text-align:justify;padding-left:125px;text-indent:-126px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:18px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:0px;"><font style="font-family:inherit;font-size:12pt;">1.2.</font></div></td><td style="vertical-align:top;padding-left:18.666666666666668px;"><div style="line-height:120%;text-align:justify;font-size:12pt;text-indent:-18.666666666666668px;"><font style="font-family:inherit;font-size:12pt;">The usage of the words &#8220;Term&#8221;, &#8220;Schedule&#8221; and &#8220;Attachment&#8221; shall refer to the &#8220;Term&#8221;, &#8220;Schedule&#8221; and &#8220;Attachment&#8221; of this Agreement.</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:110px;text-indent:-111px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:18px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:0px;"><font style="font-family:inherit;font-size:12pt;">1.3.</font></div></td><td style="vertical-align:top;padding-left:18.666666666666668px;"><div style="line-height:120%;text-align:justify;font-size:12pt;text-indent:-18.666666666666668px;"><font style="font-family:inherit;font-size:12pt;">The heading of an article and index to this Agreement are for convenience purposes only, and should not affect the interpretation of this Agreement.</font></div></td></tr></table><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:37px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:0px;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">2.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">Valuation, Capital Increase and Equity Transfer</font></div></td></tr></table><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:37px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:0px;"><font style="font-family:inherit;font-size:12pt;">2.1.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;color:#222222;">The Parties acknowledge that the Company&#8217;s current registered capital before the Capital Increase is RMB 40 million and the shareholding structure before the Capital Increase is as follows. The Parties agree that for purpose of the Transactions, before the Capital Increase, the valuation of the Company is RMB </font><font style="font-family:inherit;font-size:12pt;">164,500,000</font><font style="font-family:inherit;font-size:12pt;color:#222222;">.</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:24px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><div style="line-height:120%;padding-left:45px;font-size:12pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:91.80722891566265%;border-collapse:collapse;text-align:left;"><tr><td colspan="4"></td></tr><tr><td width="9%"></td><td width="34%"></td><td width="31%"></td><td width="26%"></td></tr><tr><td style="vertical-align:bottom;border-bottom:1px solid #00000a;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-left:1px solid #00000a;border-right:1px solid #00000a;border-top:1px solid #00000a;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:middle;border-bottom:1px solid #00000a;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-left:1px solid #00000a;border-right:1px solid #00000a;border-top:1px solid #00000a;"><div style="text-align:center;font-size:11pt;"><font style="font-family:inherit;font-size:11pt;">Shareholder</font></div></td><td style="vertical-align:middle;border-bottom:1px solid #00000a;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-left:1px solid #00000a;border-right:1px solid #00000a;border-top:1px solid #00000a;"><div style="text-align:center;font-size:11pt;"><font style="font-family:inherit;font-size:11pt;">Contribution <br>( RMB)</font></div></td><td style="vertical-align:middle;border-bottom:1px solid #00000a;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-left:1px solid #00000a;border-right:1px solid #00000a;border-top:1px solid #00000a;"><div style="text-align:center;font-size:11pt;"><font style="font-family:inherit;font-size:10pt;">&#160;<br></font><font style="font-family:inherit;font-size:11pt;">Registered Capital %</font></div></td></tr><tr><td style="vertical-align:middle;border-bottom:1px solid #00000a;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-left:1px solid #00000a;border-right:1px solid #00000a;border-top:1px solid #00000a;"><div style="text-align:center;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">1</font></div></td><td style="vertical-align:middle;border-bottom:1px solid #00000a;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-left:1px solid #00000a;border-right:1px solid #00000a;border-top:1px solid #00000a;"><div style="text-align:center;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">Kingstone Technology Hong Kong Ltd</font></div></td><td style="vertical-align:middle;border-bottom:1px solid #00000a;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-left:1px solid #00000a;border-right:1px solid #00000a;border-top:1px solid #00000a;"><div style="text-align:center;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">40,000,000</font></div></td><td style="vertical-align:middle;border-bottom:1px solid #00000a;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-left:1px solid #00000a;border-right:1px solid #00000a;border-top:1px solid #00000a;"><div style="text-align:center;text-indent:32px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">100%</font></div></td></tr></table></div></div><div style="line-height:120%;text-align:justify;text-indent:40px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:37px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:0px;"><font style="font-family:inherit;font-size:12pt;">2.2.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">The New Shareholder shall invest RMB 35,500,000 in cash (the &#8220;</font><font style="font-family:inherit;font-size:12pt;font-weight:bold;">Capital Amount</font><font style="font-family:inherit;font-size:12pt;">&#8221;) in the Company, among which RMB 8,632,219 shall become registered capital of the Company and RMB 26,867,781 shall be booked as the capital reserve of the Company (the &#8220;</font><font style="font-family:inherit;font-size:12pt;font-weight:bold;">Capital Increase</font><font style="font-family:inherit;font-size:12pt;">&#8221;). The Existing Shareholder hereby waives its right to subscribe the Capital Increase. </font></div></td></tr></table><div style="line-height:120%;text-align:left;padding-left:24px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:37px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:0px;"><font style="font-family:inherit;font-size:12pt;">2.3.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">Immediately after completion of the Capital Increase, the registered capital of the Company shall be increased to RMB 48,632,219 and the shareholding of the Company shall be as follows, and Parties agree that the valuation of the Company shall become RMB 200 million immediately after the Transactions.</font></div></td></tr></table><div style="line-height:120%;text-align:left;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><div style="line-height:120%;font-size:12pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="4"></td></tr><tr><td width="8%"></td><td width="38%"></td><td width="28%"></td><td width="26%"></td></tr><tr><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-left:1px solid #000000;border-right:1px solid #000000;border-top:1px solid #000000;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-left:1px solid #000000;border-right:1px solid #000000;border-top:1px solid #000000;"><div style="text-align:left;text-indent:56px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">Shareholder</font></div></td><td style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-left:1px solid #000000;border-right:1px solid #000000;border-top:1px solid #000000;"><div style="text-align:center;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">Contribution (RMB)</font></div></td><td style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-left:1px solid #000000;border-right:1px solid #000000;border-top:1px solid #000000;"><div style="text-align:center;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">Registered Capital/Equity Percentage</font></div></td></tr><tr><td style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-left:1px solid #000000;border-right:1px solid #000000;border-top:1px solid #000000;"><div style="text-align:left;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">1</font></div></td><td style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-left:1px solid #000000;border-right:1px solid #000000;border-top:1px solid #000000;"><div style="text-align:left;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">Kingstone Technology Hong Kong Ltd</font></div></td><td style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-left:1px solid #000000;border-right:1px solid #000000;border-top:1px solid #000000;"><div style="text-align:center;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">40,000,000</font></div></td><td style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-left:1px solid #000000;border-right:1px solid #000000;border-top:1px solid #000000;"><div style="text-align:center;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">82.25%</font></div></td></tr><tr><td style="vertical-align:middle;border-bottom:1px solid #00000a;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-left:1px solid #00000a;border-right:1px solid #00000a;border-top:1px solid #00000a;"><div style="text-align:left;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">2</font></div></td><td style="vertical-align:middle;border-bottom:1px solid #00000a;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-left:1px solid #00000a;border-right:1px solid #00000a;border-top:1px solid #00000a;"><div style="text-align:left;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">Suzhou Zhuo Jing Investment Center (LP)</font></div></td><td style="vertical-align:middle;border-bottom:1px solid #00000a;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-left:1px solid #00000a;border-right:1px solid #00000a;border-top:1px solid #00000a;"><div style="text-align:center;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">8,632,219</font></div></td><td style="vertical-align:middle;border-bottom:1px solid #00000a;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-left:1px solid #00000a;border-right:1px solid #00000a;border-top:1px solid #00000a;"><div style="text-align:center;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">17.75%</font></div></td></tr><tr><td style="vertical-align:bottom;border-bottom:1px solid #00000a;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-left:1px solid #00000a;border-right:1px solid #00000a;border-top:1px solid #00000a;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:middle;border-bottom:1px solid #00000a;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-left:1px solid #00000a;border-right:1px solid #00000a;border-top:1px solid #00000a;"><div style="text-align:left;font-size:11pt;"><font style="font-family:inherit;font-size:11pt;font-weight:bold;text-decoration:underline;">Total</font></div></td><td style="vertical-align:middle;border-bottom:1px solid #00000a;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-left:1px solid #00000a;border-right:1px solid #00000a;border-top:1px solid #00000a;"><div style="text-align:center;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">48,632,219</font></div></td><td style="vertical-align:middle;border-bottom:1px solid #00000a;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-left:1px solid #00000a;border-right:1px solid #00000a;border-top:1px solid #00000a;"><div style="text-align:center;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">100%</font></div></td></tr></table></div></div><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:37px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:0px;"><font style="font-family:inherit;font-size:12pt;">2.4.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">Concurrently with the Capital Increase, the New Shareholder shall purchase from the Existing Shareholder, and the Existing Shareholder shall sell to the New </font></div></td></tr></table><br><div><div style="line-height:120%;text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">4</font></div><div style="line-height:120%;text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;"><br></font></div></div><hr style="page-break-after:always"><a name="s413B52798DC0CBA77AB5D6FA5EC5990B"></a><div><div style="line-height:120%;text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;"><br></font></div></div><br><div style="line-height:120%;padding-left:37px;text-align:justify;"><font style="font-family:inherit;font-size:12pt;">Shareholder, 13.5% of the equity interest of the Company (&#8220;</font><font style="font-family:inherit;font-size:12pt;font-weight:bold;">Equity Transfer</font><font style="font-family:inherit;font-size:12pt;">&#8221;) for a price of RMB 27,000,000 (&#8220;</font><font style="font-family:inherit;font-size:12pt;font-weight:bold;">Equity Purchase Price</font><font style="font-family:inherit;font-size:12pt;">&#8221;). </font></div><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:37px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:0px;"><font style="font-family:inherit;font-size:12pt;">2.5.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">The Capital Increase and the Equity Transfer shall be collectively referred to as the &#8220;</font><font style="font-family:inherit;font-size:12pt;font-weight:bold;">Transactions</font><font style="font-family:inherit;font-size:12pt;">&#8221; and following completion of the Transactions, the shareholding of the Company shall be as follows and the Company will be converted from a wholly foreign-owned enterprise into a Sino-foreign joint venture enterprise. </font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:37px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><div style="line-height:120%;font-size:12pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="4"></td></tr><tr><td width="8%"></td><td width="38%"></td><td width="27%"></td><td width="27%"></td></tr><tr><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-left:1px solid #000000;border-right:1px solid #000000;border-top:1px solid #000000;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-left:1px solid #000000;border-right:1px solid #000000;border-top:1px solid #000000;"><div style="text-align:left;text-indent:56px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">Shareholder</font></div></td><td style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-left:1px solid #000000;border-right:1px solid #000000;border-top:1px solid #000000;"><div style="text-align:center;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">Equity Percentage</font></div></td><td style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-left:1px solid #000000;border-right:1px solid #000000;border-top:1px solid #000000;"><div style="text-align:center;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">Corresponding Registered Capital Contribution</font></div></td></tr><tr><td style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-left:1px solid #000000;border-right:1px solid #000000;border-top:1px solid #000000;"><div style="text-align:left;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">1</font></div></td><td style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-left:1px solid #000000;border-right:1px solid #000000;border-top:1px solid #000000;"><div style="text-align:left;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">Kingstone Technology Hong Kong Ltd</font></div></td><td style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-left:1px solid #000000;border-right:1px solid #000000;border-top:1px solid #000000;"><div style="text-align:center;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">68.75%</font></div></td><td style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-left:1px solid #000000;border-right:1px solid #000000;border-top:1px solid #000000;"><div style="text-align:center;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">33,434,651</font></div></td></tr><tr><td style="vertical-align:middle;border-bottom:1px solid #00000a;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-left:1px solid #00000a;border-right:1px solid #00000a;border-top:1px solid #00000a;"><div style="text-align:left;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">2</font></div></td><td style="vertical-align:middle;border-bottom:1px solid #00000a;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-left:1px solid #00000a;border-right:1px solid #00000a;border-top:1px solid #00000a;"><div style="text-align:left;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">Suzhou Zhuo Jing Investment Center (LP)</font></div></td><td style="vertical-align:middle;border-bottom:1px solid #00000a;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-left:1px solid #00000a;border-right:1px solid #00000a;border-top:1px solid #00000a;"><div style="text-align:center;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">31.25%</font></div></td><td style="vertical-align:middle;border-bottom:1px solid #00000a;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-left:1px solid #00000a;border-right:1px solid #00000a;border-top:1px solid #00000a;"><div style="text-align:center;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">15,197,568</font></div></td></tr><tr><td style="vertical-align:bottom;border-bottom:1px solid #00000a;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-left:1px solid #00000a;border-right:1px solid #00000a;border-top:1px solid #00000a;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:middle;border-bottom:1px solid #00000a;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-left:1px solid #00000a;border-right:1px solid #00000a;border-top:1px solid #00000a;"><div style="text-align:left;font-size:11pt;"><font style="font-family:inherit;font-size:11pt;font-weight:bold;text-decoration:underline;">Total</font></div></td><td style="vertical-align:middle;border-bottom:1px solid #00000a;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-left:1px solid #00000a;border-right:1px solid #00000a;border-top:1px solid #00000a;"><div style="text-align:center;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">100%</font></div></td><td style="vertical-align:middle;border-bottom:1px solid #00000a;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-left:1px solid #00000a;border-right:1px solid #00000a;border-top:1px solid #00000a;"><div style="text-align:center;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">48,632,219</font></div></td></tr></table></div></div><div style="line-height:120%;text-align:justify;padding-left:37px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:37px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:0px;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">3.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">Representations and Warranties</font></div></td></tr></table><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:37px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:0px;"><font style="font-family:inherit;font-size:12pt;">3.1.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">Each Party makes the following representations and warranties to the other: </font></div></td></tr></table><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:72px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:24px;"><font style="font-family:inherit;font-size:12pt;">&#65288;1&#65289;</font></div></td><td style="vertical-align:top;padding-left:40px;"><div style="line-height:120%;text-align:justify;font-size:12pt;text-indent:-40px;"><font style="font-family:inherit;font-size:12pt;">It is a corporate legal entity duly established according to the applicable law and validly exists.</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:72px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:72px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:24px;"><font style="font-family:inherit;font-size:12pt;">&#65288;2&#65289;</font></div></td><td style="vertical-align:top;padding-left:40px;"><div style="line-height:120%;text-align:justify;font-size:12pt;text-indent:-40px;"><font style="font-family:inherit;font-size:12pt;">In case of the New Shareholder, the sources of the funds used for the Capital Increase and the Equity Transfer are legitimate and subject to no liens or restrictions.</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:72px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:72px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:24px;"><font style="font-family:inherit;font-size:12pt;">&#65288;3&#65289;</font></div></td><td style="vertical-align:top;padding-left:40px;"><div style="line-height:120%;text-align:justify;font-size:12pt;text-indent:-40px;"><font style="font-family:inherit;font-size:12pt;">The execution and performance of this Agreement by it does not violate any applicable laws, regulations, or its corporate organizational document or any agreements with any third party.</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:72px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:72px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:24px;"><font style="font-family:inherit;font-size:12pt;">&#65288;4&#65289;</font></div></td><td style="vertical-align:top;padding-left:40px;"><div style="line-height:120%;text-align:justify;font-size:12pt;text-indent:-40px;"><font style="font-family:inherit;font-size:12pt;">It has obtained all corporate authorizations, and all consents and approvals in accordance with applicable laws and regulations that are necessary for it to enter into and perform this Agreement. </font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:72px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:72px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:24px;"><font style="font-family:inherit;font-size:12pt;">&#65288;5&#65289;</font></div></td><td style="vertical-align:top;padding-left:40px;"><div style="line-height:120%;text-align:justify;font-size:12pt;text-indent:-40px;"><font style="font-family:inherit;font-size:12pt;">As of the Effective Date, the Company has the legitimate rights to own or use the Company name, brands, trademarks, patents, trade names and brand, website name, domain name, proprietary technology, all operational permits and other related intellectual property rights, licensing rights it currently uses for its business operation.</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:72px;font-size:11pt;"><font style="font-family:inherit;font-size:11pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:37px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:0px;"><font style="font-family:inherit;font-size:12pt;">3.2.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">The New Shareholder, as a professional investor, has performed a detailed due diligence of the Company and is fully aware of the status, conditions, assets and liabilities of the Company. It is expressly understood and agreed that the Transactions are subject to the Company being &#8220;as is, where is&#8221; and that the Existing </font></div></td></tr></table><br><div><div style="line-height:120%;text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">5</font></div><div style="line-height:120%;text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;"><br></font></div></div><hr style="page-break-after:always"><a name="s413B52798DC0CBA77AB5D6FA5EC5990B"></a><div><div style="line-height:120%;text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;"><br></font></div></div><br><div style="line-height:120%;padding-left:37px;text-align:justify;"><font style="font-family:inherit;font-size:12pt;">Shareholder does not make and hereby disclaims any representations and warranties regarding the conditions of the Company.</font></div><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:37px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:0px;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">4.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">Covenants of the Parties</font></div></td></tr></table><div style="line-height:120%;text-align:justify;font-size:10.5pt;"><font style="font-family:inherit;font-size:10.5pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:37px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:0px;"><font style="font-family:inherit;font-size:12pt;">4.1.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">As of the Effective Date and during the duration of the Company, the Existing Shareholder warrants that the Company is the only entity owned by the Existing Shareholder that owns ion implantation equipment, and engages in processing services business and related activities. Without the mutual agreement of the Existing Shareholder and the New Shareholder, the Existing Shareholder may not establish, or engage in any other form (including but not limited to acting as shareholders, partners, directors, supervisors, employees, agents, etc.) the establishment of, any entity that engage in in the same kind of business or products or any entity relating to the Company&#8217;s businesses. Unless approved by all shareholders of the Company, the Existing Shareholder shall not directly or indirectly engage in any business that is the same as or similar to the business of the Company to avoid any direct or indirect competition or potential competition with the business of the Company. In the future, any business opportunities that may compete with the Company's business shall be made available to the Company.</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:36px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:37px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:0px;"><font style="font-family:inherit;font-size:12pt;">4.2.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">After completion of the Transactions, save for any transactions that exist as of, and continue to be valid after, the completion of the Transaction, without a proper decision making process as provided in the New AOA, the Company shall not engage in any related party transactions which may adversely affect the Company's interests or create a significant impact on the business of the Company. If any related party transactions are necessary to carry on, or beneficial to, the business of the Company, such transactions shall be subject to due process as provided under the New AOA and arm-length pricing.</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:72px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:37px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:0px;"><font style="font-family:inherit;font-size:12pt;">4.3.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">Subject to the New AOA, unless unanimously approved by all the shareholders of the Company, the Company shall not provide any guarantees to any third party. Each shareholder promises not to conduct any transaction that may impair the interest of the Company.</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:72px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:37px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:0px;"><font style="font-family:inherit;font-size:10.5pt;">4.4.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">The Company should ensure that the shareholders of the Company have the right to stay informed about Company&#8217;s management, Company&#8217;s business development.</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:36px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:37px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:0px;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">5.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">Transaction Process</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:37px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:37px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:0px;"><font style="font-family:inherit;font-size:12pt;">5.1.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">Within 15 working days after the Effective Date, (i) the New Shareholder shall contribute the Capital Amount to the bank accounts of the Company, among which RMB 24,500,000 shall be wired to a bank account of the Company that is controlled by Amtech and RMB 11,000,000 shall be wired to an account designated by the Company; and (ii) the Parties and HSBC China (the &#8220;</font><font style="font-family:inherit;font-size:12pt;font-weight:bold;">China Escrow Agent</font><font style="font-family:inherit;font-size:12pt;">&#8221;) shall execute an escrow agreement in the form as agreed by the parties thereto for the China Escrow Agent to receive and manage the payment of the Equity Purchase Price (&#8220;</font><font style="font-family:inherit;font-size:12pt;font-weight:bold;">China Escrow Agreement</font><font style="font-family:inherit;font-size:12pt;">&#8221;) and open an escrow account pursuant to the </font></div></td></tr></table><br><div><div style="line-height:120%;text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">6</font></div><div style="line-height:120%;text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;"><br></font></div></div><hr style="page-break-after:always"><a name="s413B52798DC0CBA77AB5D6FA5EC5990B"></a><div><div style="line-height:120%;text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;"><br></font></div></div><br><div style="line-height:120%;padding-left:37px;text-align:justify;"><font style="font-family:inherit;font-size:12pt;">China Escrow Agreement (the &#8220;</font><font style="font-family:inherit;font-size:12pt;font-weight:bold;">China Escrow Account</font><font style="font-family:inherit;font-size:12pt;">&#8221;). Immediately upon the China Escrow Account is opened, the New Shareholder shall deposit the full Equity Purchase Price to the China Escrow Account.  </font></div><div style="line-height:120%;text-align:justify;padding-left:36px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:37px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:0px;"><font style="font-family:inherit;font-size:12pt;">5.2.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">Within 15 working days after all the closing conditions set forth in Article 6 have been satisfied or waived, the Parties shall, and shall cause the Company to (i) proceed to change the company registration of the Company with Registration Authority to register the Capital Increase and the Equity Transfer, the new AOA and New Shareholder as a shareholder of the Company, and (ii) obtain the new business license of the Company. </font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:37px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:37px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:0px;"><font style="font-family:inherit;font-size:12pt;">5.3.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">Within 5 working days after the new business license of the Company is issued, (i) the New Shareholder and the Existing Shareholder shall cause and ensure the Company to repay all the principal (USD 3.7 million) under the Loan Agreement dated December 9, 2011; and (ii) the New Shareholder shall complete all the approvals, registrations and clearances necessary for payment of the Equity Purchase Price to the Existing Shareholder, including without limitation the registration of the Equity Transfer with SAFE.</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:37px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:37px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:0px;"><font style="font-family:inherit;font-size:12pt;">5.4.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">If the New Shareholder is required under the PRC laws to make a filing to any PRC tax authority in connection with the Equity Transfer or to withhold any taxes from the Equity Purchase Price on behalf of the Existing Shareholder, prior to making such filing or any payment to the tax authority, the New Shareholder shall obtain a prior written approval from the Existing Shareholder to (i) all the documents to be filed to the tax authority and (ii) the taxable amount and the amount of tax to be paid. Any withholding taxes as determined by the tax authority and confirmed by the Existing Shareholder may be deducted from the Equity Purchase Price. The Existing Shareholder shall instruct the China Escrow Agent according to the China Escrow Agreement to release the withholding tax amount to the competent tax authority directly.  </font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:24px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:37px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:0px;"><font style="font-family:inherit;font-size:12pt;">5.5.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">Within 3 working days after completion all the actions under Article 5.3(ii), the Existing Shareholder shall instruct the China Escrow Agent to release the full amount of the Equity Purchase Price, all accrued interest (save for any withholding tax paid to the tax authority pursuant to Article 5.4 if any) to a bank account designated by the Existing Shareholder. </font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:37px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:37px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:0px;"><font style="font-family:inherit;font-size:12pt;">5.6.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">The Transactions shall be deemed to have completed and the New Shareholder shall have title and any legitimate rights to the equity interest of the Company only upon (i) the full contribution of the Capital Amount, (ii) Amtech has received the repayment of loan pursuant to Article 5.3 and (iii) the release of the Equity Purchase Price according to this Agreement. After completion of the Transactions, the Parties shall cause the Company to record the New Shareholder in its shareholder registry and issue a capital contribution certificate to the New Shareholder. </font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:37px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:37px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:0px;"><font style="font-family:inherit;font-size:12pt;">5.7.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">Upon execution of this Agreement, the Parties shall use their best efforts to fulfill all the closing conditions under Article 6. If any of the closing conditions set forth in Article 6 is not fulfilled or waived before August 30, 2015 or any other date as </font></div></td></tr></table><br><div><div style="line-height:120%;text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">7</font></div><div style="line-height:120%;text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;"><br></font></div></div><hr style="page-break-after:always"><a name="s413B52798DC0CBA77AB5D6FA5EC5990B"></a><div><div style="line-height:120%;text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;"><br></font></div></div><br><div style="line-height:120%;padding-left:37px;text-align:justify;"><font style="font-family:inherit;font-size:12pt;">agreed by the Parties, any Party may terminate this Agreement without any further obligation to the other Party. After all the closing conditions set forth in Article 6 have been fulfilled or waived, neither Party may terminate this Agreement for any reason. The Parties shall cooperate and use its best efforts to complete the company registration procedure under Articles 5.2 and 5.3 and as required by the Registration Authority and SAFE, including without limitation signing additional documents or modifying relevant documents as requested by the Registration Authority and/or SAFE.</font></div><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:37px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:0px;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">6.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">Closing Conditions</font></div></td></tr></table><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:37px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:0px;"><font style="font-family:inherit;font-size:12pt;">6.1.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">The obligation of the New Shareholder to contribute the Capital Amount or pay any Equity Purchase Price under this Agreement are subject to the fulfillment to the reasonable satisfaction of the New Shareholder (or waiver by New Shareholder in writing) of each of the following conditions:</font></div></td></tr></table><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:76px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:29px;"><font style="font-family:inherit;font-size:12pt;">&#65288;1&#65289;</font></div></td><td style="vertical-align:top;padding-left:40px;"><div style="line-height:120%;text-align:justify;font-size:12pt;text-indent:-40px;"><font style="font-family:inherit;font-size:12pt;">The Parties have duly executed the new Articles of Association of the Company in the form attached hereto as Appendix 1 or mutually agreed by the Parties (the &#8220;</font><font style="font-family:inherit;font-size:12pt;font-weight:bold;">New</font><font style="font-family:inherit;font-size:12pt;">&#32;</font><font style="font-family:inherit;font-size:12pt;font-weight:bold;">AOA</font><font style="font-family:inherit;font-size:12pt;">&#8221;), whereby, among other things, the Board of Directors of the Company shall consist of five members, including one member appointed by Amtech, three members appointed by SJ and one member appointed by the New Shareholders. </font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:76px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:76px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:29px;"><font style="font-family:inherit;font-size:12pt;">&#65288;2&#65289;</font></div></td><td style="vertical-align:top;padding-left:40px;"><div style="line-height:120%;text-align:justify;font-size:12pt;text-indent:-40px;"><font style="font-family:inherit;font-size:12pt;">The Parties and the China Escrow Agent shall have duly executed the Chinese Escrow Agreement and the China Escrow Account has been opened. </font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:76px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:37px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:0px;"><font style="font-family:inherit;font-size:12pt;">6.2.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">The obligations of the Existing Shareholder to complete the Transactions under this Agreement are subject to the fulfillment to the reasonable satisfaction of the Existing Shareholder (or waiver by the Existing Shareholder in writing) of each of the following conditions:</font></div></td></tr></table><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:84px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:37px;"><font style="font-family:inherit;font-size:12pt;">&#65288;1&#65289;</font></div></td><td style="vertical-align:top;padding-left:48px;"><div style="line-height:120%;text-align:justify;font-size:12pt;text-indent:-48px;"><font style="font-family:inherit;font-size:12pt;">The Parties have duly executed the New AOA. </font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:84px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:84px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:37px;"><font style="font-family:inherit;font-size:12pt;">&#65288;2&#65289;</font></div></td><td style="vertical-align:top;padding-left:48px;"><div style="line-height:120%;text-align:justify;font-size:12pt;text-indent:-48px;"><font style="font-family:inherit;font-size:12pt;">The Parties and the China Escrow Agent shall have duly executed the China Escrow Agreement and the New Shareholder has deposited the full amount of the Capital Amount and the Equity Purchase Price according to Article 5.1. </font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:84px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:84px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:37px;"><font style="font-family:inherit;font-size:10.5pt;">&#65288;3&#65289;</font></div></td><td style="vertical-align:top;padding-left:48px;"><div style="line-height:120%;text-align:justify;font-size:12pt;text-indent:-48px;"><font style="font-family:inherit;font-size:12pt;">The Company and the Existing Shareholder have signed an Exclusive Sales and Service Agreement with Amtech in a form agreed by the parties thereto (&#8220;</font><font style="font-family:inherit;font-size:12pt;font-weight:bold;">Sales and Service Agreement</font><font style="font-family:inherit;font-size:12pt;">&#8221;) to (i) reaffirm Amtech&#8217;s exclusive right to sell and serve the products of the Company,  (ii) provide that the Company and/or the Existing Shareholder will purchase from Amtech such exclusive right for US$5.6 million no later than the earlier of (a) March 31, 2016 and (b) the commencement of any public offering process of the Company,</font><font style="font-family:inherit;font-size:10.5pt;">&#32;</font><font style="font-family:inherit;font-size:12pt;">and to reaffirm the Company&#8217;s right to sell in China prior to the deadline of such purchase, and (iii) Amtech&#8217;s non-exclusive sales and service right in </font></div></td></tr></table><br><div><div style="line-height:120%;text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">8</font></div><div style="line-height:120%;text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;"><br></font></div></div><hr style="page-break-after:always"><a name="s413B52798DC0CBA77AB5D6FA5EC5990B"></a><div><div style="line-height:120%;text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;"><br></font></div></div><br><div style="line-height:120%;padding-left:84px;text-align:justify;"><font style="font-family:inherit;font-size:12pt;">connections with the products of the Company after the purchase in item (ii).  </font></div><div style="line-height:120%;text-align:justify;padding-left:84px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:37px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:0px;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">7.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">Violations and Remedies</font></div></td></tr></table><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:37px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:0px;"><font style="font-family:inherit;font-size:12pt;">7.1.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">This Agreement shall be binding on the Parties and enforceable. If any Party fails to fulfill its obligations under this Agreement or any of its representations and warranties under this Agreement is untrue or omitted enormously, that Party shall be considered in default. The defaulting Party shall correct such breach within 15 working days after receiving a notice from the other Party. If the defaulting Party fails to remedy such default within the 15 working days and the non-compliance remains unchanged, unless otherwise provided under Article 5.7, the other Party may terminate this Agreement. If any Party in the course of the Transactions causes other to suffer any loss due to its breach, the breaching Party shall make reasonable and complete compensation to the other Party. </font></div></td></tr></table><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:37px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:0px;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">8.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">Confidentiality</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:24px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:37px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:0px;"><font style="font-family:inherit;font-size:12pt;">8.1.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">Unless as required by law, the government or the court or the consent of the parties to this Agreement, the parties to this Agreement shall not disclose, reveal to any individuals, enterprises, institutions, government agencies any of the contents of this agreement, information relating to this agreement, and any documents, materials, and information each received from other party, any documents, materials, information, technical secrets or commercial secrets from the Company.</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:36px;text-indent:-36px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:37px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:0px;"><font style="font-family:inherit;font-size:12pt;">8.2.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">This obligation of confidentiality provisions in this agreement shall nevertheless be binding on the parties after this Agreement is canceled or terminated.</font></div></td></tr></table><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:37px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:0px;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">9.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">Force Majeure</font></div></td></tr></table><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:37px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:0px;"><font style="font-family:inherit;font-size:12pt;">9.1.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">If a Party is unable to perform its obligation under this Agreement due to a Force Majeure event, this Party shall immediately notify the other Party in writing, and within 15 working days, shall provide evidential documents to the other Party. In case such Force Majeure event lasts more than 90 days, unless otherwise provided under Article 5.7, either Party may terminate this Agreement. </font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:32px;text-indent:-32px;font-size:14pt;"><font style="font-family:inherit;font-size:14pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:37px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:0px;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">10.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">Severability</font></div></td></tr></table><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:37px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:0px;"><font style="font-family:inherit;font-size:10.5pt;">10.1.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">If any one or more provisions of this Agreement is to any applicable law in any way be regarded as invalid, illegal or unenforceable, the parties to this Agreement have the obligation to proceed with consultation and to re-enter into the alternative terms. However, the validity, legality and enforceability of the remaining provisions of this Agreement will not have any impact from the above matters or its effectiveness will not be impaired. </font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:28px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><div style="line-height:120%;text-align:justify;padding-left:28px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><div style="line-height:120%;text-align:justify;padding-left:28px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><div style="line-height:120%;text-align:justify;padding-left:28px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><br><div><div style="line-height:120%;text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">9</font></div><div style="line-height:120%;text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;"><br></font></div></div><hr style="page-break-after:always"><a name="s413B52798DC0CBA77AB5D6FA5EC5990B"></a><div><div style="line-height:120%;text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;"><br></font></div></div><br><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:37px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:0px;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">11.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">Effectivity, Change, and Termination</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:37px;text-indent:-38px;font-size:10.5pt;"><font style="font-family:inherit;font-size:10.5pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:37px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:0px;"><font style="font-family:inherit;font-size:12pt;">11.1.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">This Agreement shall become effective on the Effective Date. This Agreement shall replace and supersede any agreements between the Parties prior to the Effective Date, including the Original Investment Agreement, any MOU and oral agreements. </font></div></td></tr></table><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:37px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:0px;"><font style="font-family:inherit;font-size:12pt;">11.2.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">Any change or termination of this Agreement shall take effect only after a written agreement is signed by the parties to this Agreement.</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:28px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:37px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:0px;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">12.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">Notification and Delivery</font></div></td></tr></table><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:37px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:0px;"><font style="font-family:inherit;font-size:12pt;">12.1.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;color:#222222;">Any notice or other communication in connection with this Agreement and sent between the parties shall be in writing and shall be delivered to the address noticed by the receiving party in writing.</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:72px;text-indent:-40px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:37px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:0px;"><font style="font-family:inherit;font-size:12pt;">12.2.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;color:#222222;">Except as otherwise</font><font style="font-family:inherit;font-size:12pt;">&#32;</font><font style="font-family:inherit;font-size:12pt;color:#222222;">provided in this Agreement</font><font style="font-family:inherit;font-size:12pt;">, </font><font style="font-family:inherit;font-size:12pt;color:#222222;">any</font><font style="font-family:inherit;font-size:12pt;">&#32;written </font><font style="font-family:inherit;font-size:12pt;color:#222222;">notice delivered in person or</font><font style="font-family:inherit;font-size:12pt;">&#32;</font><font style="font-family:inherit;font-size:12pt;color:#222222;">other communication</font><font style="font-family:inherit;font-size:12pt;">&#32;</font><font style="font-family:inherit;font-size:12pt;color:#222222;">exchanges</font><font style="font-family:inherit;font-size:12pt;">&#32;shall be deemed to have received when delivered and a receipt is signed; </font><font style="font-family:inherit;font-size:12pt;color:#222222;">any notice</font><font style="font-family:inherit;font-size:12pt;">&#32;</font><font style="font-family:inherit;font-size:12pt;color:#222222;">sent</font><font style="font-family:inherit;font-size:12pt;">&#32;</font><font style="font-family:inherit;font-size:12pt;color:#222222;">by courier</font><font style="font-family:inherit;font-size:12pt;">&#32;</font><font style="font-family:inherit;font-size:12pt;color:#222222;">way</font><font style="font-family:inherit;font-size:12pt;">&#32;</font><font style="font-family:inherit;font-size:12pt;color:#222222;">or</font><font style="font-family:inherit;font-size:12pt;">&#32;</font><font style="font-family:inherit;font-size:12pt;color:#222222;">other</font><font style="font-family:inherit;font-size:12pt;">&#32;</font><font style="font-family:inherit;font-size:12pt;color:#222222;">communication</font><font style="font-family:inherit;font-size:12pt;">&#32;</font><font style="font-family:inherit;font-size:12pt;color:#222222;">exchanges</font><font style="font-family:inherit;font-size:12pt;">&#32;</font><font style="font-family:inherit;font-size:12pt;color:#222222;">through postal</font><font style="font-family:inherit;font-size:12pt;">&#32;office after </font><font style="font-family:inherit;font-size:12pt;color:#222222;">forty-eight hours</font><font style="font-family:inherit;font-size:12pt;">&#32;</font><font style="font-family:inherit;font-size:12pt;color:#222222;">(legal </font><font style="font-family:inherit;font-size:12pt;">holidays excluded</font><font style="font-family:inherit;font-size:12pt;color:#222222;">)</font><font style="font-family:inherit;font-size:12pt;">&#32;</font><font style="font-family:inherit;font-size:12pt;color:#222222;">deems</font><font style="font-family:inherit;font-size:12pt;">&#32;</font><font style="font-family:inherit;font-size:12pt;color:#222222;">served; any notice</font><font style="font-family:inherit;font-size:12pt;">&#32;sent </font><font style="font-family:inherit;font-size:12pt;color:#222222;">by telex</font><font style="font-family:inherit;font-size:12pt;">&#32;</font><font style="font-family:inherit;font-size:12pt;color:#222222;">or</font><font style="font-family:inherit;font-size:12pt;">&#32;</font><font style="font-family:inherit;font-size:12pt;color:#222222;">fax</font><font style="font-family:inherit;font-size:12pt;">&#32;</font><font style="font-family:inherit;font-size:12pt;color:#222222;">sent</font><font style="font-family:inherit;font-size:12pt;">&#32;</font><font style="font-family:inherit;font-size:12pt;color:#222222;">or</font><font style="font-family:inherit;font-size:12pt;">&#32;</font><font style="font-family:inherit;font-size:12pt;color:#222222;">other</font><font style="font-family:inherit;font-size:12pt;">&#32;</font><font style="font-family:inherit;font-size:12pt;color:#222222;">communication</font><font style="font-family:inherit;font-size:12pt;">&#32;exchanges </font><font style="font-family:inherit;font-size:12pt;color:#222222;">sent successfully</font><font style="font-family:inherit;font-size:12pt;">&#32;</font><font style="font-family:inherit;font-size:12pt;color:#222222;">deems</font><font style="font-family:inherit;font-size:12pt;">&#32;</font><font style="font-family:inherit;font-size:12pt;color:#222222;">served;</font><font style="font-family:inherit;font-size:12pt;">&#32;</font><font style="font-family:inherit;font-size:12pt;color:#222222;">any notice</font><font style="font-family:inherit;font-size:12pt;">&#32;</font><font style="font-family:inherit;font-size:12pt;color:#222222;">sent</font><font style="font-family:inherit;font-size:12pt;">&#32;</font><font style="font-family:inherit;font-size:12pt;color:#222222;">by telegram</font><font style="font-family:inherit;font-size:12pt;">&#32;</font><font style="font-family:inherit;font-size:12pt;color:#222222;">or</font><font style="font-family:inherit;font-size:12pt;">&#32;</font><font style="font-family:inherit;font-size:12pt;color:#222222;">other</font><font style="font-family:inherit;font-size:12pt;">&#32;</font><font style="font-family:inherit;font-size:12pt;color:#222222;">communication</font><font style="font-family:inherit;font-size:12pt;">&#32;exchanged </font><font style="font-family:inherit;font-size:12pt;color:#222222;">in twenty</font><font style="font-family:inherit;font-size:12pt;">&#32;</font><font style="font-family:inherit;font-size:12pt;color:#222222;">four hours (legal holidays excluded)</font><font style="font-family:inherit;font-size:12pt;">&#32;</font><font style="font-family:inherit;font-size:12pt;color:#222222;">deems</font><font style="font-family:inherit;font-size:12pt;">&#32;</font><font style="font-family:inherit;font-size:12pt;color:#222222;">served.</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:36px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:37px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:0px;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">13.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">Governing Law and Dispute Resolution</font></div></td></tr></table><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:37px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:0px;"><font style="font-family:inherit;font-size:12pt;">13.1.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;color:#222222;">The</font><font style="font-family:inherit;font-size:12pt;">&#32;</font><font style="font-family:inherit;font-size:12pt;color:#222222;">signing</font><font style="font-family:inherit;font-size:12pt;">, </font><font style="font-family:inherit;font-size:12pt;color:#222222;">validity, interpretation,</font><font style="font-family:inherit;font-size:12pt;">&#32;</font><font style="font-family:inherit;font-size:12pt;color:#222222;">implementation and dispute</font><font style="font-family:inherit;font-size:12pt;">&#32;</font><font style="font-family:inherit;font-size:12pt;color:#222222;">settlement of this Agreement are</font><font style="font-family:inherit;font-size:12pt;">&#32;</font><font style="font-family:inherit;font-size:12pt;color:#222222;">governed by Chinese</font><font style="font-family:inherit;font-size:12pt;">&#32;</font><font style="font-family:inherit;font-size:12pt;color:#222222;">law.</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:4px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:37px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:0px;"><font style="font-family:inherit;font-size:12pt;">13.2.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;color:#222222;">Any</font><font style="font-family:inherit;font-size:12pt;">&#32;</font><font style="font-family:inherit;font-size:12pt;color:#222222;">disputes</font><font style="font-family:inherit;font-size:12pt;">&#32;occurred under and </font><font style="font-family:inherit;font-size:12pt;color:#222222;">relating to this Agreement</font><font style="font-family:inherit;font-size:12pt;">&#32;</font><font style="font-family:inherit;font-size:12pt;color:#222222;">shall be</font><font style="font-family:inherit;font-size:12pt;">&#32;resolved by the </font><font style="font-family:inherit;font-size:12pt;color:#222222;">Parties through mutual consultation.</font><font style="font-family:inherit;font-size:12pt;">&#32;If the Parties cannot reach a consensus within 30 days of the occurrence of the dispute the P</font><font style="font-family:inherit;font-size:12pt;color:#222222;">arties</font><font style="font-family:inherit;font-size:12pt;">&#32;</font><font style="font-family:inherit;font-size:12pt;color:#222222;">agree that this</font><font style="font-family:inherit;font-size:12pt;">&#32;</font><font style="font-family:inherit;font-size:12pt;color:#222222;">dispute shall be submitted</font><font style="font-family:inherit;font-size:12pt;">&#32;</font><font style="font-family:inherit;font-size:12pt;color:#222222;">to</font><font style="font-family:inherit;font-size:12pt;">&#32;</font><font style="font-family:inherit;font-size:12pt;color:#222222;">the People&#8217;s Court where this Agreement was signed.</font><font style="font-family:inherit;font-size:12pt;">&#32;</font><font style="font-family:inherit;font-size:12pt;color:#222222;">All</font><font style="font-family:inherit;font-size:12pt;">&#32;</font><font style="font-family:inherit;font-size:12pt;color:#222222;">costs incurred in</font><font style="font-family:inherit;font-size:12pt;">&#32;</font><font style="font-family:inherit;font-size:12pt;color:#222222;">litigation</font><font style="font-family:inherit;font-size:12pt;">, </font><font style="font-family:inherit;font-size:12pt;color:#222222;">including but not limited</font><font style="font-family:inherit;font-size:12pt;">&#32;</font><font style="font-family:inherit;font-size:12pt;color:#222222;">to</font><font style="font-family:inherit;font-size:12pt;">&#32;</font><font style="font-family:inherit;font-size:12pt;color:#222222;">legal fees</font><font style="font-family:inherit;font-size:12pt;">, security </font><font style="font-family:inherit;font-size:12pt;color:#222222;">fees,</font><font style="font-family:inherit;font-size:12pt;">&#32;</font><font style="font-family:inherit;font-size:12pt;color:#222222;">notary fees</font><font style="font-family:inherit;font-size:12pt;">, travel expenses, and attorney</font><font style="font-family:inherit;font-size:12pt;color:#222222;">&#32;fees</font><font style="font-family:inherit;font-size:12pt;">, should be paid by </font><font style="font-family:inherit;font-size:12pt;color:#222222;">the losing party.</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:36px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:37px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:0px;"><font style="font-family:inherit;font-size:12pt;">13.3.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;color:#222222;">This Article refers to the dispute between the parties pertaining to all disputes arisen from the agreement validity, interpretation of the agreement, fulfillment of the agreement, responsibility of breach of contract, as well as changes to the agreement, rescission, and termination of the agreement.</font></div></td></tr></table><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:37px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:0px;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">14.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">Other</font></div></td></tr></table><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:37px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:0px;"><font style="font-family:inherit;font-size:12pt;">14.1.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">This Agreement and its annexes constitute an indivisible integration, and each part in this integration has the same effect. This Agreement is written in English and Chinese and both versions shall be equally binding. </font></div></td></tr></table><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><br><div><div style="line-height:120%;text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">10</font></div><div style="line-height:120%;text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;"><br></font></div></div><hr style="page-break-after:always"><a name="s413B52798DC0CBA77AB5D6FA5EC5990B"></a><div><div style="line-height:120%;text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;"><br></font></div></div><br><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:37px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:12pt;padding-left:0px;"><font style="font-family:inherit;font-size:12pt;">14.2.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">The original of this Agreement has four (4) copies. Each Party holds one (1) copy and one (1) copy is submitted to the administrative department for industry and commerce registration. Any remaining copy is for spare purpose and is maintained by the Company</font><font style="font-family:inherit;font-size:12pt;color:#222222;">.</font><font style="font-family:inherit;font-size:12pt;">&#32;This Agreement is binding on the parties after signed by the parties, and each copy has the same effect.</font></div></td></tr></table><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><div style="line-height:120%;text-align:justify;padding-left:28px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">[Purposefully left blank below for the signature page of Kingstone Investment Agreement]</font></div><br><div><div style="line-height:120%;text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">11</font></div><div style="line-height:120%;text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;"><br></font></div></div><hr style="page-break-after:always"><a name="s413B52798DC0CBA77AB5D6FA5EC5990B"></a><div><div style="line-height:120%;text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;"><br></font></div></div><br><div style="line-height:120%;text-align:justify;padding-left:28px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">[This page intentionally left blank for Kingstone Investment Agreement Signature Page]</font></div><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:11pt;"><font style="font-family:inherit;font-size:11pt;color:#222222;">Hereby as evidence, the Parties to this Agreement (or authorized representative) at the date and place first set forth in this Agreement, signed this Agreement.</font></div><div style="line-height:120%;text-align:justify;font-size:10.5pt;"><font style="font-family:inherit;font-size:10.5pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">Existing Shareholder </font></div><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">Kingstone Technology Hong Kong Limited</font></div><div style="line-height:120%;text-align:justify;padding-left:122px;font-size:10.5pt;"><font style="font-family:inherit;font-size:10.5pt;font-weight:bold;">(Seal)</font></div><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">Signature: ___________________</font></div><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">Name: Bradley C. Anderson </font></div><div style="line-height:120%;text-align:left;padding-left:96px;text-indent:-96px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">Title: Legal Representative</font></div><div style="line-height:120%;text-align:left;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">New Shareholder</font></div><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">Suzhou Zhuo Jing Investment Center (LP)</font></div><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">&#32;&#32;&#32;&#32;&#32;&#32;&#32;&#32;&#32;&#32;&#32;&#32;&#32;&#32;(Seal)</font></div><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><div style="line-height:120%;text-align:justify;padding-left:48px;text-indent:-48px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><div style="line-height:120%;text-align:justify;padding-left:48px;text-indent:-48px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><div style="line-height:120%;text-align:left;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">Signature: ___________________</font></div><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">Name: </font></div><div style="line-height:120%;text-align:left;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">Title: Authorized Representative</font></div><br><div><div style="line-height:120%;text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">12</font></div><div style="line-height:120%;text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;"><br></font></div></div><hr style="page-break-after:always"><a name="s413B52798DC0CBA77AB5D6FA5EC5990B"></a><div><div style="line-height:120%;text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;"><br></font></div></div><br><div style="line-height:120%;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;padding-left:48px;text-indent:-48px;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;font-weight:bold;">Appendix 1: The Form of the new Articles of Association of the Company</font></div><div style="line-height:120%;text-align:justify;font-size:10.5pt;"><font style="font-family:inherit;font-size:10.5pt;"><br></font></div><br><div><div style="line-height:120%;text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">13</font></div><div style="line-height:120%;text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;"><br></font></div></div>	</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-31.1
<SEQUENCE>3
<FILENAME>asys63015-ex311.htm
<DESCRIPTION>EXHIBIT 31.1
<TEXT>
<!DOCTYPE html PUBLIC "-//W3C//DTD HTML 4.01 Transitional//EN" "http://www.w3.org/TR/html4/loose.dtd">
<html>
	<head>
		<!-- Document created using Wdesk 1 -->
		<!-- Copyright 2015 Workiva -->
		<title>ASYS 6.30.15-EX31.1</title>
	</head>
	<body style="font-family:Times New Roman;font-size:10pt;">
<a name="s2C48C7609FC559E682E1C36527BB7509"></a><div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></div><br><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Exhibit 31.1&#160;</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">AMTECH SYSTEMS, INC. AND ITS SUBSIDIARIES</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">CERTIFICATION PURSUANT TO RULE 13a-14(a)/15d-14(a)</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">OF THE SECURITIES EXCHANGE ACT OF 1934, AS AMENDED</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">I, Fokko Pentinga, certify that:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:24px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:0px;"><font style="font-family:inherit;font-size:10pt;">1.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">I have reviewed this Quarterly Report on Form 10-Q of Amtech Systems, Inc. (the &#8220;registrant&#8221;),</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:24px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:24px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:0px;"><font style="font-family:inherit;font-size:10pt;">2.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Based on my knowledge, this quarterly report does not contain any untrue statement of a material fact or omit to state a material fact necessary to make the statements made, in light of the circumstances under which such statements were made, not misleading with respect to the period covered by this quarterly report;</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:24px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:24px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:0px;"><font style="font-family:inherit;font-size:10pt;">3.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Based on my knowledge, the financial statements, and other financial information included in this report, fairly present in all material respects the financial condition, results of operations and cash flows of the registrant as of, and for, the periods presented in this quarterly report;</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:24px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:24px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:0px;"><font style="font-family:inherit;font-size:10pt;">4.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The registrant&#8217;s other certifying officer and I are responsible for establishing and maintaining disclosure controls and procedures (as defined in Exchange Act Rules 13a-15(e) and 15d-15(e)) and internal control over financial reporting (as defined in Exchange Act Rules 13a-15(f) and 15d-15(f)) for the registrant and have:</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:24px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">(a)</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Designed such disclosure controls and procedures, or caused such disclosure controls and procedures to be designed under our supervision, to ensure that material information relating to the registrant, including its consolidated subsidiaries, is made known to us by others within those entities, particularly during the period in which this report is being prepared;</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">(b)</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Designed such internal control over financial reporting, or caused such internal control over financial reporting to be designed under our supervision, to provide reasonable assurance regarding the reliability of financial reporting and the preparation of financial statements for external purposes in accordance with generally accepted accounting principles;</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">(c)</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Evaluated the effectiveness of the registrant&#8217;s disclosure controls and procedures and presented in this report our conclusions about the effectiveness of the disclosure controls and procedures, as of the end of the period covered by this report based on such evaluation; and</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">(d)</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Disclosed in this report any change in the registrant&#8217;s internal control over financial reporting that occurred during the registrant&#8217;s most recent fiscal quarter that has materially affected, or is reasonably likely to materially affect, the registrant&#8217;s internal control over financial reporting; and</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:24px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:0px;"><font style="font-family:inherit;font-size:10pt;">5.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The registrant&#8217;s other certifying officer and I have disclosed, based on our most recent evaluation of internal control over financial reporting, to the registrant&#8217;s auditors and the audit committee of the registrant&#8217;s board of directors (or persons performing the equivalent functions):</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:24px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">(a)</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">All significant deficiencies and material weaknesses in the design or operation of internal control over financial reporting which are reasonably likely to adversely affect the registrant&#8217;s ability to record, process, summarize and report financial information; and</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">(b)</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Any fraud, whether or not material, that involves management or other employees who have a significant role in the registrant&#8217;s internal control over financial reporting.</font></div></td></tr></table><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:682px;border-collapse:collapse;text-align:left;"><tr><td colspan="2"></td></tr><tr><td width="37px"></td><td width="645px"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">By&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;text-decoration:underline;">/s/ Fokko Pentinga</font></div></td></tr><tr><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Fokko Pentinga</font></div></td></tr><tr><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">President and Chief Executive Officer</font></div></td></tr><tr><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Amtech Systems, Inc.</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Date:</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">August&#160;6, 2015</font></div></td></tr></table></div></div><br><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></div>	</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-31.2
<SEQUENCE>4
<FILENAME>asys63015-ex312.htm
<DESCRIPTION>EXHIBIT 31.2
<TEXT>
<!DOCTYPE html PUBLIC "-//W3C//DTD HTML 4.01 Transitional//EN" "http://www.w3.org/TR/html4/loose.dtd">
<html>
	<head>
		<!-- Document created using Wdesk 1 -->
		<!-- Copyright 2015 Workiva -->
		<title>ASYS 6.30.15-EX31.2</title>
	</head>
	<body style="font-family:Times New Roman;font-size:10pt;">
<a name="s7BB66FBBE149557F8FB46CE68D17E16F"></a><div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></div><br><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Exhibit 31.2</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">AMTECH SYSTEMS, INC. AND ITS SUBSIDIARIES</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">CERTIFICATION PURSUANT TO RULE 13a-14(a)/15d-14(a)</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">OF THE SECURITIES EXCHANGE ACT OF 1934, AS AMENDED</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">I, Bradley C. Anderson, certify that:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:24px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:0px;"><font style="font-family:inherit;font-size:10pt;">1.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">I have reviewed this Quarterly Report on Form 10-Q of Amtech Systems, Inc. (the &#8220;registrant&#8221;),</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:24px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:24px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:0px;"><font style="font-family:inherit;font-size:10pt;">2.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Based on my knowledge, this quarterly report does not contain any untrue statement of a material fact or omit to state a material fact necessary to make the statements made, in light of the circumstances under which such statements were made, not misleading with respect to the period covered by this quarterly report;</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:24px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:24px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:0px;"><font style="font-family:inherit;font-size:10pt;">3.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Based on my knowledge, the financial statements, and other financial information included in this report, fairly present in all material respects the financial condition, results of operations and cash flows of the registrant as of, and for, the periods presented in this quarterly report;</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:24px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:24px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:0px;"><font style="font-family:inherit;font-size:10pt;">4.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The registrant&#8217;s other certifying officer and I are responsible for establishing and maintaining disclosure controls and procedures (as defined in Exchange Act Rules 13a-15(e) and 15d-15(e)) and internal control over financial reporting (as defined in Exchange Act Rules 13a-15(f) and 15d-15(f)) for the registrant and have:</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:24px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">(a)</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Designed such disclosure controls and procedures, or caused such disclosure controls and procedures to be designed under our supervision, to ensure that material information relating to the registrant, including its consolidated subsidiaries, is made known to us by others within those entities, particularly during the period in which this report is being prepared;</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">(b)</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Designed such internal control over financial reporting, or caused such internal control over financial reporting to be designed under our supervision, to provide reasonable assurance regarding the reliability of financial reporting and the preparation of financial statements for external purposes in accordance with generally accepted accounting principles;</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">(c)</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Evaluated the effectiveness of the registrant&#8217;s disclosure controls and procedures and presented in this report our conclusions about the effectiveness of the disclosure controls and procedures, as of the end of the period covered by this report based on such evaluation; and</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">(d)</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Disclosed in this report any change in the registrant&#8217;s internal control over financial reporting that occurred during the registrant&#8217;s most recent fiscal quarter that has materially affected, or is reasonably likely to materially affect, the registrant&#8217;s internal control over financial reporting; and</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:24px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:0px;"><font style="font-family:inherit;font-size:10pt;">5.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The registrant&#8217;s other certifying officer and I have disclosed, based on our most recent evaluation of internal control over financial reporting, to the registrant&#8217;s auditors and the audit committee of the registrant&#8217;s board of directors (or persons performing the equivalent functions):</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:24px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">(a)</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">All significant deficiencies and material weaknesses in the design or operation of internal control over financial reporting which are reasonably likely to adversely affect the registrant&#8217;s ability to record, process, summarize and report financial information; and</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">(b)</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Any fraud, whether or not material, that involves management or other employees who have a significant role in the registrant&#8217;s internal control over financial reporting.</font></div></td></tr></table><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:682px;border-collapse:collapse;text-align:left;"><tr><td colspan="2"></td></tr><tr><td width="37px"></td><td width="645px"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">By&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;text-decoration:underline;">/s/ Bradley C. Anderson</font></div></td></tr><tr><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Bradley C. Anderson</font></div></td></tr><tr><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Executive Vice President &#8211; Finance and Chief Financial Officer</font></div></td></tr><tr><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Amtech Systems, Inc.</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Date:</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">August&#160;6, 2015</font></div></td></tr></table></div></div><br><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></div>	</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-32.1
<SEQUENCE>5
<FILENAME>asys63015-ex321.htm
<DESCRIPTION>EXHIBIT 32.1
<TEXT>
<!DOCTYPE html PUBLIC "-//W3C//DTD HTML 4.01 Transitional//EN" "http://www.w3.org/TR/html4/loose.dtd">
<html>
	<head>
		<!-- Document created using Wdesk 1 -->
		<!-- Copyright 2015 Workiva -->
		<title>ASYS 6.30.15-EX32.1</title>
	</head>
	<body style="font-family:Times New Roman;font-size:10pt;">
<a name="sE4D5FF13ECAE5162942A7C98F4E3AB16"></a><div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></div><br><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Exhibit 32.1</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">AMTECH SYSTEMS, INC. AND ITS SUBSIDIARIES</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">CERTIFICATION PURSUANT TO</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">18 U.S.C. SECTION 1350,</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">AS ADOPTED PURSUANT TO</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">SECTION 906 OF THE SARBANES-OXLEY ACT OF 2002</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;text-indent:24px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In connection with the Quarterly Report of Amtech Systems, Inc. (the &#8220;Company&#8221;) on Form 10-Q for the period ended </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">June&#160;30, 2015</font><font style="font-family:inherit;font-size:10pt;">, as filed with the Securities and Exchange Commission on the date hereof (the &#8220;Report&#8221;), I, Fokko Pentinga, President and Chief Executive Officer of the Company, certify, pursuant to 18 U.S.C. section 1350, as adopted pursuant to section 906 of the Sarbanes-Oxley Act of 2002, that, to the best of my knowledge:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">(1)</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The Report fully complies with the requirements of Section 13(a) or 15(d) of the Securities Exchange Act of 1934; and</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">(2)</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The information contained in the Report fairly presents, in all material respects, the financial condition and results of operations of the Company.</font></div></td></tr></table><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:682px;border-collapse:collapse;text-align:left;"><tr><td colspan="2"></td></tr><tr><td width="37px"></td><td width="645px"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">By&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;text-decoration:underline;">/s/ Fokko Pentinga</font></div></td></tr><tr><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Fokko Pentinga</font></div></td></tr><tr><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">President and Chief Executive Officer</font></div></td></tr><tr><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Amtech Systems, Inc.</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Date:</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">August&#160;6, 2015</font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The foregoing certification is being furnished pursuant to 18 U.S.C. Section 1350. It is not being filed for purposes of Section 18 of the Securities Exchange Act of 1934, as amended, and it is not to be incorporated by reference into any filing of the Company, regardless of any general incorporation language in such filing.</font></div><br><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></div>	</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-32.2
<SEQUENCE>6
<FILENAME>asys63015-ex322.htm
<DESCRIPTION>EXHIBIT 32.2
<TEXT>
<!DOCTYPE html PUBLIC "-//W3C//DTD HTML 4.01 Transitional//EN" "http://www.w3.org/TR/html4/loose.dtd">
<html>
	<head>
		<!-- Document created using Wdesk 1 -->
		<!-- Copyright 2015 Workiva -->
		<title>ASYS 6.30.15-EX32.2</title>
	</head>
	<body style="font-family:Times New Roman;font-size:10pt;">
<a name="s05CD20B813725111964128A37F4F3064"></a><div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></div><br><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Exhibit 32.2</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">AMTECH SYSTEMS, INC. AND ITS SUBSIDIARIES</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">CERTIFICATION PURSUANT TO</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">18 U.S.C. SECTION 1350,</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">AS ADOPTED PURSUANT TO</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">SECTION 906 OF THE SARBANES-OXLEY ACT OF 2002</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;text-indent:16px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#32;In connection with the Quarterly Report of Amtech Systems, Inc. (the &#8220;Company&#8221;) on Form 10-Q for the period ended </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">June&#160;30, 2015</font><font style="font-family:inherit;font-size:10pt;">, as filed with the Securities and Exchange Commission on the date hereof (the &#8220;Report&#8221;), I, Bradley C. Anderson, Chief Financial Officer of the Company, certify, pursuant to 18 U.S.C. sections 1350, as adopted pursuant to sections 906 of the Sarbanes-Oxley Act of 2002, that, to the best of my knowledge:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">(1)</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;The Report fully complies with the requirements of Section 13(a) or 15(d) of the Securities Exchange Act of 1934; and</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">(2)</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The information contained in the Report fairly presents, in all material respects, the financial condition and results of operations of the Company.</font></div></td></tr></table><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:682px;border-collapse:collapse;text-align:left;"><tr><td colspan="2"></td></tr><tr><td width="37px"></td><td width="645px"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">By&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;text-decoration:underline;">/s/ Bradley C. Anderson</font></div></td></tr><tr><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Bradley C. Anderson</font></div></td></tr><tr><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Executive Vice President-Finance and Chief Financial Officer</font></div></td></tr><tr><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Amtech Systems, Inc.</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Date:</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">August&#160;6, 2015</font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The foregoing certification is being furnished pursuant to 18 U.S.C. Section 1350. It is not being filed for purposes of Section 18 of the Securities Exchange Act of 1934, as amended, and it is not to be incorporated by reference into any filing of the Company, regardless of any general incorporation language in such filing.</font></div><br><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></div>	</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.INS
<SEQUENCE>7
<FILENAME>asys-20150630.xml
<DESCRIPTION>XBRL INSTANCE DOCUMENT
<TEXT>
<XBRL>
<?xml version="1.0" encoding="US-ASCII"?>
<!--XBRL Document Created with Wdesk from Workiva-->
<!--p:fd1512d49aa1457384805a6d894ebb86,x:05f240e04bab45038c9a6fae4f79a157-->
<xbrli:xbrl xmlns:asys="http://www.amtechsystems.com/20150630" xmlns:country="http://xbrl.sec.gov/country/2013-01-31" xmlns:currency="http://xbrl.sec.gov/currency/2014-01-31" xmlns:dei="http://xbrl.sec.gov/dei/2014-01-31" xmlns:exch="http://xbrl.sec.gov/exch/2015-01-31" xmlns:invest="http://xbrl.sec.gov/invest/2013-01-31" xmlns:iso4217="http://www.xbrl.org/2003/iso4217" xmlns:link="http://www.xbrl.org/2003/linkbase" xmlns:naics="http://xbrl.sec.gov/naics/2011-01-31" xmlns:nonnum="http://www.xbrl.org/dtr/type/non-numeric" xmlns:num="http://www.xbrl.org/dtr/type/numeric" xmlns:ref="http://www.xbrl.org/2006/ref" xmlns:sic="http://xbrl.sec.gov/sic/2011-01-31" xmlns:stpr="http://xbrl.sec.gov/stpr/2011-01-31" xmlns:us-gaap="http://fasb.org/us-gaap/2015-01-31" xmlns:us-roles="http://fasb.org/us-roles/2015-01-31" xmlns:us-types="http://fasb.org/us-types/2015-01-31" xmlns:utreg="http://www.xbrl.org/2009/utr" xmlns:xbrldi="http://xbrl.org/2006/xbrldi" xmlns:xbrldt="http://xbrl.org/2005/xbrldt" xmlns:xbrli="http://www.xbrl.org/2003/instance" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsd="http://www.w3.org/2001/XMLSchema" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance">
	<link:schemaRef xlink:href="asys-20150630.xsd" xlink:type="simple" />
	<xbrli:context id="FD2015Q3YTD">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-10-01</xbrli:startDate>
			<xbrli:endDate>2015-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="I2015Q4Aug1">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2015-08-01</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2014Q4">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2014-09-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2015Q3">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2015-06-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2014Q3YTD">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2013-10-01</xbrli:startDate>
			<xbrli:endDate>2014-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2015Q3QTD">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2015-04-01</xbrli:startDate>
			<xbrli:endDate>2015-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2014Q3QTD">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-04-01</xbrli:startDate>
			<xbrli:endDate>2014-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2014Q3">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2014-06-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2013Q4">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2013-09-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2015Q3YTD_us-gaap_RangeAxis_us-gaap_MinimumMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:RangeAxis">us-gaap:MinimumMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-10-01</xbrli:startDate>
			<xbrli:endDate>2015-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2015Q3YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:AccountsReceivableMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-10-01</xbrli:startDate>
			<xbrli:endDate>2015-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="I2015Q1Dec24_us-gaap_BusinessAcquisitionAxis_asys_SoLayTecB.V.Member">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:BusinessAcquisitionAxis">asys:SoLayTecB.V.Member</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2014-12-24</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="I2015Q2Jan30_us-gaap_BusinessAcquisitionAxis_asys_BTUInternationalIncBTUMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:BusinessAcquisitionAxis">asys:BTUInternationalIncBTUMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2015-01-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2015Q3YTD_us-gaap_RangeAxis_us-gaap_MaximumMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:RangeAxis">us-gaap:MaximumMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-10-01</xbrli:startDate>
			<xbrli:endDate>2015-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2015Q3YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_asys_CustomerOneMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:AccountsReceivableMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">asys:CustomerOneMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-10-01</xbrli:startDate>
			<xbrli:endDate>2015-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2015Q3YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember_us-gaap_RangeAxis_us-gaap_MaximumMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:EmployeeStockOptionMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:RangeAxis">us-gaap:MaximumMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-10-01</xbrli:startDate>
			<xbrli:endDate>2015-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2015Q3YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember_us-gaap_RangeAxis_us-gaap_MinimumMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:EmployeeStockOptionMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:RangeAxis">us-gaap:MinimumMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-10-01</xbrli:startDate>
			<xbrli:endDate>2015-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2015Q3YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_asys_CashAndCashEquivalentsAndRestrictedCashMember_us-gaap_StatementGeographicalAxis_country_US">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">asys:CashAndCashEquivalentsAndRestrictedCashMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:StatementGeographicalAxis">country:US</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-10-01</xbrli:startDate>
			<xbrli:endDate>2015-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2015Q3_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:RestrictedStockMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2015-06-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2014Q3YTD_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:RestrictedStockMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2013-10-01</xbrli:startDate>
			<xbrli:endDate>2014-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2015Q3YTD_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:RestrictedStockMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-10-01</xbrli:startDate>
			<xbrli:endDate>2015-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2014Q3_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:RestrictedStockMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2014-06-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2014Q4_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:RestrictedStockMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2014-09-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2013Q4_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:RestrictedStockMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2013-09-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2014Q4_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_OtherIntangibleAssetsMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:FiniteLivedIntangibleAssetsByMajorClassAxis">us-gaap:OtherIntangibleAssetsMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2014-09-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2015Q3_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_PatentedTechnologyMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:FiniteLivedIntangibleAssetsByMajorClassAxis">us-gaap:PatentedTechnologyMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2015-06-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2014Q4_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_CustomerListsMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:FiniteLivedIntangibleAssetsByMajorClassAxis">us-gaap:CustomerListsMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2014-09-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2014Q4_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_InProcessResearchAndDevelopmentMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:FiniteLivedIntangibleAssetsByMajorClassAxis">us-gaap:InProcessResearchAndDevelopmentMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2014-09-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2015Q3_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_InProcessResearchAndDevelopmentMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:FiniteLivedIntangibleAssetsByMajorClassAxis">us-gaap:InProcessResearchAndDevelopmentMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2015-06-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2014Q4_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_PatentedTechnologyMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:FiniteLivedIntangibleAssetsByMajorClassAxis">us-gaap:PatentedTechnologyMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2014-09-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2015Q3_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_CustomerListsMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:FiniteLivedIntangibleAssetsByMajorClassAxis">us-gaap:CustomerListsMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2015-06-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2015Q3_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_NoncompeteAgreementsMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:FiniteLivedIntangibleAssetsByMajorClassAxis">us-gaap:NoncompeteAgreementsMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2015-06-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2014Q4_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TradeNamesMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:FiniteLivedIntangibleAssetsByMajorClassAxis">us-gaap:TradeNamesMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2014-09-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2014Q4_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_NoncompeteAgreementsMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:FiniteLivedIntangibleAssetsByMajorClassAxis">us-gaap:NoncompeteAgreementsMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2014-09-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2015Q3_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TradeNamesMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:FiniteLivedIntangibleAssetsByMajorClassAxis">us-gaap:TradeNamesMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2015-06-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2015Q3_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_OtherIntangibleAssetsMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:FiniteLivedIntangibleAssetsByMajorClassAxis">us-gaap:OtherIntangibleAssetsMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2015-06-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2014Q3YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:EmployeeStockOptionMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2013-10-01</xbrli:startDate>
			<xbrli:endDate>2014-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2015Q3YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:EmployeeStockOptionMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-10-01</xbrli:startDate>
			<xbrli:endDate>2015-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2014Q4_us-gaap_StatementBusinessSegmentsAxis_asys_SolarEquipmentMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:StatementBusinessSegmentsAxis">asys:SolarEquipmentMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2014-09-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2015Q3_us-gaap_StatementBusinessSegmentsAxis_asys_SolarEquipmentMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:StatementBusinessSegmentsAxis">asys:SolarEquipmentMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2015-06-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2015Q3YTD_us-gaap_StatementBusinessSegmentsAxis_asys_PolishingSuppliesAndEquipmentMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:StatementBusinessSegmentsAxis">asys:PolishingSuppliesAndEquipmentMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-10-01</xbrli:startDate>
			<xbrli:endDate>2015-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2015Q3_us-gaap_StatementBusinessSegmentsAxis_asys_PolishingSuppliesAndEquipmentMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:StatementBusinessSegmentsAxis">asys:PolishingSuppliesAndEquipmentMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2015-06-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2015Q3_us-gaap_StatementBusinessSegmentsAxis_asys_SemiconductorEquipmentMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:StatementBusinessSegmentsAxis">asys:SemiconductorEquipmentMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2015-06-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2014Q4_us-gaap_StatementBusinessSegmentsAxis_asys_PolishingSuppliesAndEquipmentMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:StatementBusinessSegmentsAxis">asys:PolishingSuppliesAndEquipmentMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2014-09-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2014Q4_us-gaap_StatementBusinessSegmentsAxis_asys_SemiconductorEquipmentMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:StatementBusinessSegmentsAxis">asys:SemiconductorEquipmentMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2014-09-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2015Q3YTD_us-gaap_StatementBusinessSegmentsAxis_asys_SolarEquipmentMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:StatementBusinessSegmentsAxis">asys:SolarEquipmentMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-10-01</xbrli:startDate>
			<xbrli:endDate>2015-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2015Q3YTD_us-gaap_StatementBusinessSegmentsAxis_asys_SemiconductorEquipmentMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:StatementBusinessSegmentsAxis">asys:SemiconductorEquipmentMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-10-01</xbrli:startDate>
			<xbrli:endDate>2015-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2015Q3_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:EmployeeStockOptionMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2015-06-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2014Q3_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:EmployeeStockOptionMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2014-06-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2014Q4_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:EmployeeStockOptionMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2014-09-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2013Q4_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:EmployeeStockOptionMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2013-09-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2015Q3_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LandBuildingsAndImprovementsMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:LandBuildingsAndImprovementsMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2015-06-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2014Q4_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_FurnitureAndFixturesMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:FurnitureAndFixturesMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2014-09-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2015Q3_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_FurnitureAndFixturesMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:FurnitureAndFixturesMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2015-06-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2014Q4_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LandBuildingsAndImprovementsMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:LandBuildingsAndImprovementsMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2014-09-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2014Q4_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_MachineryAndEquipmentMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:MachineryAndEquipmentMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2014-09-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2015Q3_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_MachineryAndEquipmentMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:MachineryAndEquipmentMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2015-06-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2015Q3YTD_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_FurnitureAndFixturesMember_us-gaap_RangeAxis_us-gaap_MinimumMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:FurnitureAndFixturesMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:RangeAxis">us-gaap:MinimumMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-10-01</xbrli:startDate>
			<xbrli:endDate>2015-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2015Q3YTD_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_BuildingAndBuildingImprovementsMember_us-gaap_RangeAxis_us-gaap_MaximumMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:BuildingAndBuildingImprovementsMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:RangeAxis">us-gaap:MaximumMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-10-01</xbrli:startDate>
			<xbrli:endDate>2015-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2015Q3YTD_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LeaseholdImprovementsMember_us-gaap_RangeAxis_us-gaap_MinimumMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:LeaseholdImprovementsMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:RangeAxis">us-gaap:MinimumMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-10-01</xbrli:startDate>
			<xbrli:endDate>2015-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2015Q3YTD_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LeaseholdImprovementsMember_us-gaap_RangeAxis_us-gaap_MaximumMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:LeaseholdImprovementsMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:RangeAxis">us-gaap:MaximumMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-10-01</xbrli:startDate>
			<xbrli:endDate>2015-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2015Q3YTD_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_MachineryAndEquipmentMember_us-gaap_RangeAxis_us-gaap_MinimumMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:MachineryAndEquipmentMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:RangeAxis">us-gaap:MinimumMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-10-01</xbrli:startDate>
			<xbrli:endDate>2015-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2015Q3YTD_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_FurnitureAndFixturesMember_us-gaap_RangeAxis_us-gaap_MaximumMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:FurnitureAndFixturesMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:RangeAxis">us-gaap:MaximumMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-10-01</xbrli:startDate>
			<xbrli:endDate>2015-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2015Q3YTD_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_MachineryAndEquipmentMember_us-gaap_RangeAxis_us-gaap_MaximumMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:MachineryAndEquipmentMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:RangeAxis">us-gaap:MaximumMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-10-01</xbrli:startDate>
			<xbrli:endDate>2015-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2015Q3YTD_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_BuildingAndBuildingImprovementsMember_us-gaap_RangeAxis_us-gaap_MinimumMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:BuildingAndBuildingImprovementsMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:RangeAxis">us-gaap:MinimumMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-10-01</xbrli:startDate>
			<xbrli:endDate>2015-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2015Q3YTD_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_NoncompeteAgreementsMember_us-gaap_RangeAxis_us-gaap_MinimumMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:FiniteLivedIntangibleAssetsByMajorClassAxis">us-gaap:NoncompeteAgreementsMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:RangeAxis">us-gaap:MinimumMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-10-01</xbrli:startDate>
			<xbrli:endDate>2015-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2015Q3YTD_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_PatentedTechnologyMember_us-gaap_RangeAxis_us-gaap_MaximumMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:FiniteLivedIntangibleAssetsByMajorClassAxis">us-gaap:PatentedTechnologyMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:RangeAxis">us-gaap:MaximumMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-10-01</xbrli:startDate>
			<xbrli:endDate>2015-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2015Q3YTD_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_OtherIntangibleAssetsMember_us-gaap_RangeAxis_us-gaap_MaximumMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:FiniteLivedIntangibleAssetsByMajorClassAxis">us-gaap:OtherIntangibleAssetsMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:RangeAxis">us-gaap:MaximumMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-10-01</xbrli:startDate>
			<xbrli:endDate>2015-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2015Q3YTD_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_InProcessResearchAndDevelopmentMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:FiniteLivedIntangibleAssetsByMajorClassAxis">us-gaap:InProcessResearchAndDevelopmentMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-10-01</xbrli:startDate>
			<xbrli:endDate>2015-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2015Q3YTD_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_PatentedTechnologyMember_us-gaap_RangeAxis_us-gaap_MinimumMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:FiniteLivedIntangibleAssetsByMajorClassAxis">us-gaap:PatentedTechnologyMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:RangeAxis">us-gaap:MinimumMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-10-01</xbrli:startDate>
			<xbrli:endDate>2015-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2015Q3YTD_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_OtherIntangibleAssetsMember_us-gaap_RangeAxis_us-gaap_MinimumMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:FiniteLivedIntangibleAssetsByMajorClassAxis">us-gaap:OtherIntangibleAssetsMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:RangeAxis">us-gaap:MinimumMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-10-01</xbrli:startDate>
			<xbrli:endDate>2015-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2015Q3YTD_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_NoncompeteAgreementsMember_us-gaap_RangeAxis_us-gaap_MaximumMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:FiniteLivedIntangibleAssetsByMajorClassAxis">us-gaap:NoncompeteAgreementsMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:RangeAxis">us-gaap:MaximumMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-10-01</xbrli:startDate>
			<xbrli:endDate>2015-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2015Q3YTD_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_CustomerListsMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:FiniteLivedIntangibleAssetsByMajorClassAxis">us-gaap:CustomerListsMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-10-01</xbrli:startDate>
			<xbrli:endDate>2015-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2015Q3YTD_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TradeNamesMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:FiniteLivedIntangibleAssetsByMajorClassAxis">us-gaap:TradeNamesMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-10-01</xbrli:startDate>
			<xbrli:endDate>2015-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2015Q3YTD_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember_us-gaap_RangeAxis_us-gaap_MinimumMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:RestrictedStockMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:RangeAxis">us-gaap:MinimumMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-10-01</xbrli:startDate>
			<xbrli:endDate>2015-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2015Q3YTD_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember_us-gaap_RangeAxis_us-gaap_MaximumMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:RestrictedStockMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:RangeAxis">us-gaap:MaximumMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-10-01</xbrli:startDate>
			<xbrli:endDate>2015-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2014Q3YTD_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_us-gaap_RestrictedStockMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis">us-gaap:RestrictedStockMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2013-10-01</xbrli:startDate>
			<xbrli:endDate>2014-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2015Q3YTD_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_us-gaap_RestrictedStockMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis">us-gaap:RestrictedStockMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-10-01</xbrli:startDate>
			<xbrli:endDate>2015-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2014Q3YTD_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_us-gaap_EmployeeStockOptionMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis">us-gaap:EmployeeStockOptionMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2013-10-01</xbrli:startDate>
			<xbrli:endDate>2014-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2015Q3YTD_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_us-gaap_EmployeeStockOptionMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis">us-gaap:EmployeeStockOptionMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-10-01</xbrli:startDate>
			<xbrli:endDate>2015-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="I2008Q1ShareholdersRights_us-gaap_StatementClassOfStockAxis_us-gaap_SeriesAPreferredStockMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:StatementClassOfStockAxis">us-gaap:SeriesAPreferredStockMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2008-12-15</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="D2009Q1Dec15_us-gaap_StatementClassOfStockAxis_us-gaap_SeriesAPreferredStockMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:StatementClassOfStockAxis">us-gaap:SeriesAPreferredStockMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2008-12-15</xbrli:startDate>
			<xbrli:endDate>2008-12-15</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2014Q4_us-gaap_StatementClassOfStockAxis_us-gaap_SeriesAPreferredStockMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:StatementClassOfStockAxis">us-gaap:SeriesAPreferredStockMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2014-09-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2015Q3_us-gaap_StatementBusinessSegmentsAxis_us-gaap_MaterialReconcilingItemsMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:StatementBusinessSegmentsAxis">us-gaap:MaterialReconcilingItemsMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2015-06-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2014Q4_us-gaap_StatementBusinessSegmentsAxis_us-gaap_MaterialReconcilingItemsMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:StatementBusinessSegmentsAxis">us-gaap:MaterialReconcilingItemsMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2014-09-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2014Q3QTD_us-gaap_StatementBusinessSegmentsAxis_asys_PolishingSuppliesAndEquipmentMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:StatementBusinessSegmentsAxis">asys:PolishingSuppliesAndEquipmentMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-04-01</xbrli:startDate>
			<xbrli:endDate>2014-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2014Q3YTD_us-gaap_StatementBusinessSegmentsAxis_asys_SolarEquipmentMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:StatementBusinessSegmentsAxis">asys:SolarEquipmentMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2013-10-01</xbrli:startDate>
			<xbrli:endDate>2014-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2014Q3YTD_us-gaap_StatementBusinessSegmentsAxis_asys_PolishingSuppliesAndEquipmentMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:StatementBusinessSegmentsAxis">asys:PolishingSuppliesAndEquipmentMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2013-10-01</xbrli:startDate>
			<xbrli:endDate>2014-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2014Q3QTD_us-gaap_StatementBusinessSegmentsAxis_asys_SolarEquipmentMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:StatementBusinessSegmentsAxis">asys:SolarEquipmentMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-04-01</xbrli:startDate>
			<xbrli:endDate>2014-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2015Q3QTD_us-gaap_StatementBusinessSegmentsAxis_asys_SemiconductorEquipmentMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:StatementBusinessSegmentsAxis">asys:SemiconductorEquipmentMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2015-04-01</xbrli:startDate>
			<xbrli:endDate>2015-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2015Q3QTD_us-gaap_StatementBusinessSegmentsAxis_asys_SolarEquipmentMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:StatementBusinessSegmentsAxis">asys:SolarEquipmentMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2015-04-01</xbrli:startDate>
			<xbrli:endDate>2015-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2014Q3QTD_us-gaap_StatementBusinessSegmentsAxis_asys_SemiconductorEquipmentMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:StatementBusinessSegmentsAxis">asys:SemiconductorEquipmentMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-04-01</xbrli:startDate>
			<xbrli:endDate>2014-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2014Q3YTD_us-gaap_StatementBusinessSegmentsAxis_us-gaap_MaterialReconcilingItemsMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:StatementBusinessSegmentsAxis">us-gaap:MaterialReconcilingItemsMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2013-10-01</xbrli:startDate>
			<xbrli:endDate>2014-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2014Q3YTD_us-gaap_StatementBusinessSegmentsAxis_asys_SemiconductorEquipmentMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:StatementBusinessSegmentsAxis">asys:SemiconductorEquipmentMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2013-10-01</xbrli:startDate>
			<xbrli:endDate>2014-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2015Q3QTD_us-gaap_StatementBusinessSegmentsAxis_asys_PolishingSuppliesAndEquipmentMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:StatementBusinessSegmentsAxis">asys:PolishingSuppliesAndEquipmentMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2015-04-01</xbrli:startDate>
			<xbrli:endDate>2015-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2015Q3QTD_us-gaap_StatementBusinessSegmentsAxis_us-gaap_MaterialReconcilingItemsMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:StatementBusinessSegmentsAxis">us-gaap:MaterialReconcilingItemsMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2015-04-01</xbrli:startDate>
			<xbrli:endDate>2015-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2014Q3QTD_us-gaap_StatementBusinessSegmentsAxis_us-gaap_MaterialReconcilingItemsMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:StatementBusinessSegmentsAxis">us-gaap:MaterialReconcilingItemsMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-04-01</xbrli:startDate>
			<xbrli:endDate>2014-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2015Q3YTD_us-gaap_StatementBusinessSegmentsAxis_us-gaap_MaterialReconcilingItemsMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:StatementBusinessSegmentsAxis">us-gaap:MaterialReconcilingItemsMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-10-01</xbrli:startDate>
			<xbrli:endDate>2015-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2015Q3YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueProductLineMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_ProductConcentrationRiskMember_us-gaap_StatementBusinessSegmentsAxis_asys_SemiconductorEquipmentMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueProductLineMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:ProductConcentrationRiskMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:StatementBusinessSegmentsAxis">asys:SemiconductorEquipmentMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-10-01</xbrli:startDate>
			<xbrli:endDate>2015-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2015Q3YTD_us-gaap_StatementGeographicalAxis_country_TW">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:StatementGeographicalAxis">country:TW</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-10-01</xbrli:startDate>
			<xbrli:endDate>2015-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2015Q3YTD_us-gaap_StatementGeographicalAxis_asys_OtherNorthAmericaMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:StatementGeographicalAxis">asys:OtherNorthAmericaMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-10-01</xbrli:startDate>
			<xbrli:endDate>2015-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2015Q3YTD_us-gaap_StatementGeographicalAxis_us-gaap_EuropeMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:StatementGeographicalAxis">us-gaap:EuropeMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-10-01</xbrli:startDate>
			<xbrli:endDate>2015-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2014Q3YTD_us-gaap_StatementGeographicalAxis_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupTwoMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:StatementGeographicalAxis">asys:SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupTwoMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2013-10-01</xbrli:startDate>
			<xbrli:endDate>2014-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2014Q3YTD_us-gaap_StatementGeographicalAxis_us-gaap_EuropeMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:StatementGeographicalAxis">us-gaap:EuropeMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2013-10-01</xbrli:startDate>
			<xbrli:endDate>2014-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2014Q3YTD_us-gaap_StatementGeographicalAxis_country_CN">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:StatementGeographicalAxis">country:CN</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2013-10-01</xbrli:startDate>
			<xbrli:endDate>2014-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2015Q3YTD_us-gaap_StatementGeographicalAxis_us-gaap_NorthAmericaMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:StatementGeographicalAxis">us-gaap:NorthAmericaMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-10-01</xbrli:startDate>
			<xbrli:endDate>2015-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2015Q3YTD_us-gaap_StatementGeographicalAxis_country_CN">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:StatementGeographicalAxis">country:CN</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-10-01</xbrli:startDate>
			<xbrli:endDate>2015-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2015Q3YTD_us-gaap_StatementGeographicalAxis_country_US">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:StatementGeographicalAxis">country:US</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-10-01</xbrli:startDate>
			<xbrli:endDate>2015-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2015Q3YTD_us-gaap_StatementGeographicalAxis_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupTwoMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:StatementGeographicalAxis">asys:SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupTwoMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-10-01</xbrli:startDate>
			<xbrli:endDate>2015-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2014Q3YTD_us-gaap_StatementGeographicalAxis_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupOneMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:StatementGeographicalAxis">asys:SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupOneMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2013-10-01</xbrli:startDate>
			<xbrli:endDate>2014-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2014Q3YTD_us-gaap_StatementGeographicalAxis_country_DE">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:StatementGeographicalAxis">country:DE</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2013-10-01</xbrli:startDate>
			<xbrli:endDate>2014-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2014Q3YTD_us-gaap_StatementGeographicalAxis_us-gaap_AsiaMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:StatementGeographicalAxis">us-gaap:AsiaMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2013-10-01</xbrli:startDate>
			<xbrli:endDate>2014-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2014Q3YTD_us-gaap_StatementGeographicalAxis_country_US">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:StatementGeographicalAxis">country:US</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2013-10-01</xbrli:startDate>
			<xbrli:endDate>2014-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2014Q3YTD_us-gaap_StatementGeographicalAxis_us-gaap_NorthAmericaMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:StatementGeographicalAxis">us-gaap:NorthAmericaMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2013-10-01</xbrli:startDate>
			<xbrli:endDate>2014-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2014Q3YTD_us-gaap_StatementGeographicalAxis_country_TW">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:StatementGeographicalAxis">country:TW</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2013-10-01</xbrli:startDate>
			<xbrli:endDate>2014-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2014Q3YTD_us-gaap_StatementGeographicalAxis_asys_OtherNorthAmericaMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:StatementGeographicalAxis">asys:OtherNorthAmericaMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2013-10-01</xbrli:startDate>
			<xbrli:endDate>2014-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2015Q3YTD_us-gaap_StatementGeographicalAxis_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupOneMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:StatementGeographicalAxis">asys:SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupOneMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-10-01</xbrli:startDate>
			<xbrli:endDate>2015-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2015Q3YTD_us-gaap_StatementGeographicalAxis_us-gaap_AsiaMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:StatementGeographicalAxis">us-gaap:AsiaMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-10-01</xbrli:startDate>
			<xbrli:endDate>2015-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2015Q3YTD_us-gaap_StatementGeographicalAxis_country_DE">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:StatementGeographicalAxis">country:DE</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-10-01</xbrli:startDate>
			<xbrli:endDate>2015-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2014Q3YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_us-gaap_MajorCustomersAxis_asys_CustomerNumberOneMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:MajorCustomersAxis">asys:CustomerNumberOneMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2013-10-01</xbrli:startDate>
			<xbrli:endDate>2014-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2015Q3YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_us-gaap_MajorCustomersAxis_asys_CustomerNumberOneMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:MajorCustomersAxis">asys:CustomerNumberOneMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-10-01</xbrli:startDate>
			<xbrli:endDate>2015-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2014Q3YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_us-gaap_MajorCustomersAxis_asys_CustomerNumberTwoMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:MajorCustomersAxis">asys:CustomerNumberTwoMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2013-10-01</xbrli:startDate>
			<xbrli:endDate>2014-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2015Q3YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_us-gaap_MajorCustomersAxis_asys_CustomerNumberTwoMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:MajorCustomersAxis">asys:CustomerNumberTwoMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-10-01</xbrli:startDate>
			<xbrli:endDate>2015-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2015Q1_us-gaap_BusinessAcquisitionAxis_asys_SoLayTecB.V.Member">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:BusinessAcquisitionAxis">asys:SoLayTecB.V.Member</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2014-12-31</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="I2015Q2Jan30_us-gaap_BusinessAcquisitionAxis_asys_BTUInternationalIncBTUMergerMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:BusinessAcquisitionAxis">asys:BTUInternationalIncBTUMergerMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2015-01-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2015Q3_us-gaap_BusinessAcquisitionAxis_asys_BTUInternationalIncBTUMergerMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:BusinessAcquisitionAxis">asys:BTUInternationalIncBTUMergerMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2015-06-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2015Q3_us-gaap_BusinessAcquisitionAxis_asys_SoLayTecB.V.Member_us-gaap_RangeAxis_us-gaap_MaximumMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:BusinessAcquisitionAxis">asys:SoLayTecB.V.Member</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:RangeAxis">us-gaap:MaximumMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2015-06-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2015Q3_us-gaap_BusinessAcquisitionAxis_asys_SoLayTecB.V.Member">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:BusinessAcquisitionAxis">asys:SoLayTecB.V.Member</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2015-06-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2015Q3_us-gaap_BusinessAcquisitionAxis_asys_SoLayTecB.V.Member_us-gaap_RangeAxis_us-gaap_MinimumMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:BusinessAcquisitionAxis">asys:SoLayTecB.V.Member</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:RangeAxis">us-gaap:MinimumMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2015-06-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2015Q3YTD_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis_asys_TempressSystemsandEnergyResearchCentreAgreementMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis">asys:TempressSystemsandEnergyResearchCentreAgreementMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-10-01</xbrli:startDate>
			<xbrli:endDate>2015-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2015Q3_us-gaap_BusinessAcquisitionAxis_asys_BTUInternationalIncBTUMergerMember_us-gaap_LossContingenciesByNatureOfContingencyAxis_us-gaap_LossFromCatastrophesMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:BusinessAcquisitionAxis">asys:BTUInternationalIncBTUMergerMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:LossContingenciesByNatureOfContingencyAxis">us-gaap:LossFromCatastrophesMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2015-06-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2015Q3_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_asys_KingstoneHoldingCompanyMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis">asys:KingstoneHoldingCompanyMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2015-06-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2015Q3_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_asys_KingstoneSemiconductorCompanyLtdMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis">asys:KingstoneSemiconductorCompanyLtdMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2015-06-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="I2015Q2Jan30_us-gaap_BusinessAcquisitionAxis_asys_BTUInternationalIncBTUMergerMember_us-gaap_LossContingenciesByNatureOfContingencyAxis_us-gaap_LossFromCatastrophesMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:BusinessAcquisitionAxis">asys:BTUInternationalIncBTUMergerMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:LossContingenciesByNatureOfContingencyAxis">us-gaap:LossFromCatastrophesMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2015-01-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2015Q3_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis_asys_TempressSystemsandEnergyResearchCentreAgreementMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis">asys:TempressSystemsandEnergyResearchCentreAgreementMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2015-06-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="D2015Q2Jan30_us-gaap_BusinessAcquisitionAxis_asys_BTUInternationalIncBTUMergerMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:BusinessAcquisitionAxis">asys:BTUInternationalIncBTUMergerMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2015-01-30</xbrli:startDate>
			<xbrli:endDate>2015-01-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="D2015Q2Jan30_us-gaap_BusinessAcquisitionAxis_asys_BTUInternationalIncBTUMergerMember_us-gaap_StatementClassOfStockAxis_asys_CommonAndRestrictedSharesMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:BusinessAcquisitionAxis">asys:BTUInternationalIncBTUMergerMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:StatementClassOfStockAxis">asys:CommonAndRestrictedSharesMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2015-01-30</xbrli:startDate>
			<xbrli:endDate>2015-01-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="D2015Q2Jan30_us-gaap_BusinessAcquisitionAxis_asys_BTUInternationalIncBTUMergerMember_us-gaap_StatementClassOfStockAxis_us-gaap_EmployeeStockOptionMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:BusinessAcquisitionAxis">asys:BTUInternationalIncBTUMergerMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:StatementClassOfStockAxis">us-gaap:EmployeeStockOptionMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2015-01-30</xbrli:startDate>
			<xbrli:endDate>2015-01-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2015Q3YTD_us-gaap_BusinessAcquisitionAxis_asys_BTUInternationalIncBTUMergerMember_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TradeNamesMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:BusinessAcquisitionAxis">asys:BTUInternationalIncBTUMergerMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:FiniteLivedIntangibleAssetsByMajorClassAxis">us-gaap:TradeNamesMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-10-01</xbrli:startDate>
			<xbrli:endDate>2015-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="D2015Q2Jan30_dei_LegalEntityAxis_us-gaap_ParentCompanyMember_us-gaap_RelatedPartyTransactionAxis_asys_MergerAgreementMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="dei:LegalEntityAxis">us-gaap:ParentCompanyMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:RelatedPartyTransactionAxis">asys:MergerAgreementMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2015-01-30</xbrli:startDate>
			<xbrli:endDate>2015-01-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2014Q3YTD_us-gaap_BusinessAcquisitionAxis_asys_BTUInternationalIncBTUMergerMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:BusinessAcquisitionAxis">asys:BTUInternationalIncBTUMergerMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2013-10-01</xbrli:startDate>
			<xbrli:endDate>2014-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="D2015Q2Jan30_dei_LegalEntityAxis_asys_BTUInternationalIncBTUMergerMember_us-gaap_RelatedPartyTransactionAxis_asys_MergerAgreementMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="dei:LegalEntityAxis">asys:BTUInternationalIncBTUMergerMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:RelatedPartyTransactionAxis">asys:MergerAgreementMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2015-01-30</xbrli:startDate>
			<xbrli:endDate>2015-01-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2015Q3QTD_us-gaap_BusinessAcquisitionAxis_asys_BTUInternationalIncBTUMergerMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:BusinessAcquisitionAxis">asys:BTUInternationalIncBTUMergerMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2015-04-01</xbrli:startDate>
			<xbrli:endDate>2015-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2015Q3YTD_us-gaap_BusinessAcquisitionAxis_asys_BTUInternationalIncBTUMergerMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:BusinessAcquisitionAxis">asys:BTUInternationalIncBTUMergerMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-10-01</xbrli:startDate>
			<xbrli:endDate>2015-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2015Q3YTD_us-gaap_BusinessAcquisitionAxis_asys_BTUInternationalIncBTUMergerMember_us-gaap_StatementBusinessSegmentsAxis_asys_SemiconductorEquipmentMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:BusinessAcquisitionAxis">asys:BTUInternationalIncBTUMergerMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:StatementBusinessSegmentsAxis">asys:SemiconductorEquipmentMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-10-01</xbrli:startDate>
			<xbrli:endDate>2015-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="D2015Q1Dec24_us-gaap_BusinessAcquisitionAxis_asys_SoLayTecB.V.Member">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:BusinessAcquisitionAxis">asys:SoLayTecB.V.Member</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-12-24</xbrli:startDate>
			<xbrli:endDate>2014-12-24</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2014Q3QTD_us-gaap_BusinessAcquisitionAxis_asys_BTUInternationalIncBTUMergerMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:BusinessAcquisitionAxis">asys:BTUInternationalIncBTUMergerMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-04-01</xbrli:startDate>
			<xbrli:endDate>2014-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="I2015Q4Jul31_us-gaap_RestructuringPlanAxis_asys_RestructuringOfInvestmentInvestmentAgreementMember_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_asys_KingstoneSemiconductorCompanyLtdMember_us-gaap_SubsequentEventTypeAxis_us-gaap_SubsequentEventMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:RestructuringPlanAxis">asys:RestructuringOfInvestmentInvestmentAgreementMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis">asys:KingstoneSemiconductorCompanyLtdMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:SubsequentEventTypeAxis">us-gaap:SubsequentEventMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2015-07-31</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="I2015Q4Jul31_us-gaap_CounterpartyNameAxis_asys_SuzhouZhuoJingInvestmentCenterMember_us-gaap_RestructuringPlanAxis_asys_RestructuringOfInvestmentInvestmentAgreementMember_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_asys_KingstoneSemiconductorCompanyLtdMember_us-gaap_SubsequentEventTypeAxis_us-gaap_SubsequentEventMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:CounterpartyNameAxis">asys:SuzhouZhuoJingInvestmentCenterMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:RestructuringPlanAxis">asys:RestructuringOfInvestmentInvestmentAgreementMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis">asys:KingstoneSemiconductorCompanyLtdMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:SubsequentEventTypeAxis">us-gaap:SubsequentEventMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2015-07-31</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2015Q3_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_asys_KingstoneHongKongMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis">asys:KingstoneHongKongMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2015-06-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="I2015Q4Jul31_us-gaap_CounterpartyNameAxis_asys_KingstoneHongKongMember_us-gaap_RestructuringPlanAxis_asys_RestructuringOfInvestmentInvestmentAgreementMember_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_asys_KingstoneSemiconductorCompanyLtdMember_us-gaap_SubsequentEventTypeAxis_us-gaap_SubsequentEventMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:CounterpartyNameAxis">asys:KingstoneHongKongMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:RestructuringPlanAxis">asys:RestructuringOfInvestmentInvestmentAgreementMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis">asys:KingstoneSemiconductorCompanyLtdMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:SubsequentEventTypeAxis">us-gaap:SubsequentEventMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2015-07-31</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="D2015Q4Jul_us-gaap_DebtInstrumentAxis_asys_SolarToolLoanAgreementMember_us-gaap_RestructuringPlanAxis_asys_RestructuringOfInvestmentInvestmentAgreementMember_us-gaap_SubsequentEventTypeAxis_us-gaap_SubsequentEventMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">asys:SolarToolLoanAgreementMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:RestructuringPlanAxis">asys:RestructuringOfInvestmentInvestmentAgreementMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:SubsequentEventTypeAxis">us-gaap:SubsequentEventMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2015-07-01</xbrli:startDate>
			<xbrli:endDate>2015-07-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="D2015Q4Jul_us-gaap_RestructuringPlanAxis_asys_RestructuringOfInvestmentInvestmentAgreementMember_us-gaap_SubsequentEventTypeAxis_us-gaap_SubsequentEventMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:RestructuringPlanAxis">asys:RestructuringOfInvestmentInvestmentAgreementMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:SubsequentEventTypeAxis">us-gaap:SubsequentEventMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2015-07-01</xbrli:startDate>
			<xbrli:endDate>2015-07-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="I2015Q4Jul31_us-gaap_RestructuringPlanAxis_asys_RestructuringOfInvestmentInvestmentAgreementMember_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_asys_KingstoneHongKongMember_us-gaap_SubsequentEventTypeAxis_us-gaap_SubsequentEventMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:RestructuringPlanAxis">asys:RestructuringOfInvestmentInvestmentAgreementMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis">asys:KingstoneHongKongMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:SubsequentEventTypeAxis">us-gaap:SubsequentEventMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2015-07-31</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:unit id="shares">
		<xbrli:measure>xbrli:shares</xbrli:measure>
	</xbrli:unit>
	<xbrli:unit id="Number_Of_Customers">
		<xbrli:measure>asys:Customers</xbrli:measure>
	</xbrli:unit>
	<xbrli:unit id="Customer">
		<xbrli:measure>asys:Customer</xbrli:measure>
	</xbrli:unit>
	<xbrli:unit id="number">
		<xbrli:measure>xbrli:pure</xbrli:measure>
	</xbrli:unit>
	<xbrli:unit id="usd">
		<xbrli:measure>iso4217:USD</xbrli:measure>
	</xbrli:unit>
	<xbrli:unit id="usdPerShare">
		<xbrli:divide>
			<xbrli:unitNumerator>
				<xbrli:measure>iso4217:USD</xbrli:measure>
			</xbrli:unitNumerator>
			<xbrli:unitDenominator>
				<xbrli:measure>xbrli:shares</xbrli:measure>
			</xbrli:unitDenominator>
		</xbrli:divide>
	</xbrli:unit>
	<xbrli:unit id="segment">
		<xbrli:measure>asys:segment</xbrli:measure>
	</xbrli:unit>
	<asys:BusinessCombinationConsiderationTransferredForCommonAndRestrictedStockUnits contextRef="D2015Q2Jan30_us-gaap_BusinessAcquisitionAxis_asys_BTUInternationalIncBTUMergerMember" decimals="-3" id="Fact-CA8C6A64F4E2F112C3A9F541C112848C" unitRef="usd">26125000</asys:BusinessCombinationConsiderationTransferredForCommonAndRestrictedStockUnits>
	<asys:ClassOfWarrantOrRightExpirationPeriod contextRef="D2009Q1Dec15_us-gaap_StatementClassOfStockAxis_us-gaap_SeriesAPreferredStockMember" id="Fact-B38911922BA16408D841F57F6BF59B58">P10Y</asys:ClassOfWarrantOrRightExpirationPeriod>
	<asys:CommonStockMinimumPercentOwnershipForExerciseOfRights contextRef="FD2015Q3YTD" decimals="INF" id="Fact-D67EEAC64B978084C7E5F5899C299CDD" unitRef="number">0.15</asys:CommonStockMinimumPercentOwnershipForExerciseOfRights>
	<asys:ConversionOfStockConversionRatioSharesOfStockExchangedPerEachShareOfSubsidiaryStock contextRef="D2015Q2Jan30_dei_LegalEntityAxis_us-gaap_ParentCompanyMember_us-gaap_RelatedPartyTransactionAxis_asys_MergerAgreementMember" decimals="4" id="Fact-75CE8A1C210E48B5E986F541C1157873" unitRef="number">0.3291</asys:ConversionOfStockConversionRatioSharesOfStockExchangedPerEachShareOfSubsidiaryStock>
	<asys:ConversionOfStockConversionRatioSharesOfStockExchangedPerEachShareOfSubsidiaryStock contextRef="D2015Q2Jan30_us-gaap_BusinessAcquisitionAxis_asys_BTUInternationalIncBTUMergerMember" decimals="4" id="Fact-4C6735C954293049E882F541C111E0D3" unitRef="number">0.3291</asys:ConversionOfStockConversionRatioSharesOfStockExchangedPerEachShareOfSubsidiaryStock>
	<asys:EntityWideRevenueMajorCustomerNumber contextRef="FD2014Q3YTD" decimals="INF" id="Fact-7D6751A30884517E0C4DF541C10FBC27" unitRef="Customer">2</asys:EntityWideRevenueMajorCustomerNumber>
	<asys:EntityWideRevenueMajorCustomerNumber contextRef="FD2015Q3YTD" decimals="INF" id="Fact-5E234D36916BDEABAE26F541C11292A6" unitRef="Customer">2</asys:EntityWideRevenueMajorCustomerNumber>
	<asys:GrantRevenueCommitmenttoProject contextRef="FI2015Q3" decimals="-5" id="Fact-D5A52934EEB454AA1F50F541C1134A16" unitRef="usd">6100000</asys:GrantRevenueCommitmenttoProject>
	<asys:IncomeTaxExaminationNumberofYearsGenerallyOpenForTaxExaminations contextRef="FD2015Q3YTD_us-gaap_RangeAxis_us-gaap_MaximumMember" id="Fact-1F20DA45DE13F86EE521F541C1179632">P5Y</asys:IncomeTaxExaminationNumberofYearsGenerallyOpenForTaxExaminations>
	<asys:IncomeTaxExaminationNumberofYearsGenerallyOpenForTaxExaminations contextRef="FD2015Q3YTD_us-gaap_RangeAxis_us-gaap_MinimumMember" id="Fact-469BA1FA2A95C670C8BAF541C116DB5B">P3Y</asys:IncomeTaxExaminationNumberofYearsGenerallyOpenForTaxExaminations>
	<asys:IncreaseDecreaseInAccruedLiabilitiesAndCustomerDeposits contextRef="FD2014Q3YTD" decimals="-3" id="Fact-5E0B22071479EEF3E0B4F541C1120E76" unitRef="usd">-12007000</asys:IncreaseDecreaseInAccruedLiabilitiesAndCustomerDeposits>
	<asys:IncreaseDecreaseInAccruedLiabilitiesAndCustomerDeposits contextRef="FD2015Q3YTD" decimals="-3" id="Fact-165810C68327EBBB4F40F541C1152025" unitRef="usd">695000</asys:IncreaseDecreaseInAccruedLiabilitiesAndCustomerDeposits>
	<asys:IncreaseDecreaseInDeferredProfit contextRef="FD2014Q3YTD" decimals="-3" id="Fact-F408B2CD2D308BCAD254F541C1118F28" unitRef="usd">6168000</asys:IncreaseDecreaseInDeferredProfit>
	<asys:IncreaseDecreaseInDeferredProfit contextRef="FD2015Q3YTD" decimals="-3" id="Fact-F175E932B2F3B769895DF541C1179B9F" unitRef="usd">-1156000</asys:IncreaseDecreaseInDeferredProfit>
	<asys:NumberOfCustomers contextRef="FD2015Q3YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember" decimals="INF" id="Fact-E7FF0152B28760C2DD0FF541C11345FF" unitRef="Number_Of_Customers">1</asys:NumberOfCustomers>
	<asys:OtherAccruedLiabilitiesOtherCurrent contextRef="FI2014Q4" decimals="-3" id="Fact-B19F231D9FC8A2672879F541C110C6D5" unitRef="usd">1357000</asys:OtherAccruedLiabilitiesOtherCurrent>
	<asys:OtherAccruedLiabilitiesOtherCurrent contextRef="FI2015Q3" decimals="-3" id="Fact-5B13DAF1E4F971AD9F5EF541C1121BDC" unitRef="usd">4606000</asys:OtherAccruedLiabilitiesOtherCurrent>
	<asys:OwnershipRightsResultsofProjectsDevelopedSeparatelyByIndividualParties contextRef="FD2015Q3YTD_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis_asys_TempressSystemsandEnergyResearchCentreAgreementMember" decimals="INF" id="Fact-89E712694595F84376F6F541C114EEA0" unitRef="number">1</asys:OwnershipRightsResultsofProjectsDevelopedSeparatelyByIndividualParties>
	<asys:PercentageofVotingInterestofAcquireeOwnedSubsidiary contextRef="FI2015Q3_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_asys_KingstoneSemiconductorCompanyLtdMember" decimals="INF" id="Fact-EAAE66427A6D7B4B3983F541C111759E" unitRef="number">1</asys:PercentageofVotingInterestofAcquireeOwnedSubsidiary>
	<asys:ProceedsFromSaleOfExclusiveRightToSellAndServiceProducts contextRef="D2015Q4Jul_us-gaap_RestructuringPlanAxis_asys_RestructuringOfInvestmentInvestmentAgreementMember_us-gaap_SubsequentEventTypeAxis_us-gaap_SubsequentEventMember" decimals="-5" id="Fact-89CB00BA319C53287821F5C9365799DD" unitRef="usd">5600000</asys:ProceedsFromSaleOfExclusiveRightToSellAndServiceProducts>
	<asys:ResearchAndDevelopmentNetOfGrantsEarned contextRef="FD2014Q3QTD" decimals="-3" id="Fact-18EAA605250AAF007059F541C117D60F" unitRef="usd">1399000</asys:ResearchAndDevelopmentNetOfGrantsEarned>
	<asys:ResearchAndDevelopmentNetOfGrantsEarned contextRef="FD2014Q3YTD" decimals="-3" id="Fact-81D05A6B2E375BE11553F541C114A3C3" unitRef="usd">4443000</asys:ResearchAndDevelopmentNetOfGrantsEarned>
	<asys:ResearchAndDevelopmentNetOfGrantsEarned contextRef="FD2015Q3QTD" decimals="-3" id="Fact-C016B76ABE9CF284704EF541C1147160" unitRef="usd">1308000</asys:ResearchAndDevelopmentNetOfGrantsEarned>
	<asys:ResearchAndDevelopmentNetOfGrantsEarned contextRef="FD2015Q3YTD" decimals="-3" id="Fact-982AD79544B745787DE1F541C10F266E" unitRef="usd">3894000</asys:ResearchAndDevelopmentNetOfGrantsEarned>
	<asys:ResearchandDevelopmentAgreementTerm contextRef="FD2015Q3YTD_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis_asys_TempressSystemsandEnergyResearchCentreAgreementMember" id="Fact-9A5106765B68B19F1471F541C114968E">P4Y</asys:ResearchandDevelopmentAgreementTerm>
	<asys:ResearchandDevelopmentPeriodRequiredforEquipmentRepairsandMaintenance contextRef="FD2015Q3YTD_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis_asys_TempressSystemsandEnergyResearchCentreAgreementMember" id="Fact-4C4429954B2586EE31E9F541C11483C4">P2Y</asys:ResearchandDevelopmentPeriodRequiredforEquipmentRepairsandMaintenance>
	<asys:ResearchandDevelopmentRequiredContributionLaborandAssets contextRef="FI2015Q3_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis_asys_TempressSystemsandEnergyResearchCentreAgreementMember" decimals="-5" id="Fact-E84DB14D363879FE9CCEF541C11262C4" unitRef="usd">1400000</asys:ResearchandDevelopmentRequiredContributionLaborandAssets>
	<asys:RevenuesPercentage contextRef="FD2014Q3YTD" decimals="2" id="Fact-264BF007039CEB55ACD0F541C1148178" unitRef="number">1.00</asys:RevenuesPercentage>
	<asys:RevenuesPercentage contextRef="FD2014Q3YTD_us-gaap_StatementGeographicalAxis_asys_OtherNorthAmericaMember" decimals="2" id="Fact-F4BCA2543B28293945E1F541C11231CC" unitRef="number">0.00</asys:RevenuesPercentage>
	<asys:RevenuesPercentage contextRef="FD2014Q3YTD_us-gaap_StatementGeographicalAxis_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupOneMember" decimals="2" id="Fact-99F2C0105AE7CCB5AC3FF541C113AA79" unitRef="number">0.14</asys:RevenuesPercentage>
	<asys:RevenuesPercentage contextRef="FD2014Q3YTD_us-gaap_StatementGeographicalAxis_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupTwoMember" decimals="2" id="Fact-CCD2DFE98BC58B574EDCF541C10F7BE5" unitRef="number">0.19</asys:RevenuesPercentage>
	<asys:RevenuesPercentage contextRef="FD2014Q3YTD_us-gaap_StatementGeographicalAxis_country_CN" decimals="2" id="Fact-302E0F8AA60DCC0C4467F541C11241B1" unitRef="number">0.14</asys:RevenuesPercentage>
	<asys:RevenuesPercentage contextRef="FD2014Q3YTD_us-gaap_StatementGeographicalAxis_country_DE" decimals="2" id="Fact-EF5F30204B3BA8B55F2DF541C112B151" unitRef="number">0.08</asys:RevenuesPercentage>
	<asys:RevenuesPercentage contextRef="FD2014Q3YTD_us-gaap_StatementGeographicalAxis_country_TW" decimals="2" id="Fact-799699E6628162E33A25F541C1104FA4" unitRef="number">0.18</asys:RevenuesPercentage>
	<asys:RevenuesPercentage contextRef="FD2014Q3YTD_us-gaap_StatementGeographicalAxis_country_US" decimals="2" id="Fact-90992774A1F5DD601E09F541C11279D0" unitRef="number">0.27</asys:RevenuesPercentage>
	<asys:RevenuesPercentage contextRef="FD2014Q3YTD_us-gaap_StatementGeographicalAxis_us-gaap_AsiaMember" decimals="2" id="Fact-8B8957396D287160CBACF541C111C8BA" unitRef="number">0.46</asys:RevenuesPercentage>
	<asys:RevenuesPercentage contextRef="FD2014Q3YTD_us-gaap_StatementGeographicalAxis_us-gaap_EuropeMember" decimals="2" id="Fact-B59DC69D2A481B921957F541C111924F" unitRef="number">0.27</asys:RevenuesPercentage>
	<asys:RevenuesPercentage contextRef="FD2014Q3YTD_us-gaap_StatementGeographicalAxis_us-gaap_NorthAmericaMember" decimals="2" id="Fact-6AEECEE702CF5636C065F541C11258C5" unitRef="number">0.27</asys:RevenuesPercentage>
	<asys:RevenuesPercentage contextRef="FD2015Q3YTD" decimals="2" id="Fact-C8CBA0AEE6F66B07F366F541C1124DE0" unitRef="number">1.00</asys:RevenuesPercentage>
	<asys:RevenuesPercentage contextRef="FD2015Q3YTD_us-gaap_StatementGeographicalAxis_asys_OtherNorthAmericaMember" decimals="2" id="Fact-A2BCD640FEFD4F093347F541C11184CB" unitRef="number">0.02</asys:RevenuesPercentage>
	<asys:RevenuesPercentage contextRef="FD2015Q3YTD_us-gaap_StatementGeographicalAxis_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupOneMember" decimals="2" id="Fact-884CCFFAFBF2FBB26FE2F541C10FD287" unitRef="number">0.18</asys:RevenuesPercentage>
	<asys:RevenuesPercentage contextRef="FD2015Q3YTD_us-gaap_StatementGeographicalAxis_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupTwoMember" decimals="2" id="Fact-AA939E04C8BDD10F397FF541C1116C45" unitRef="number">0.09</asys:RevenuesPercentage>
	<asys:RevenuesPercentage contextRef="FD2015Q3YTD_us-gaap_StatementGeographicalAxis_country_CN" decimals="2" id="Fact-EB5650C58CEC6DB6297AF541C1149171" unitRef="number">0.26</asys:RevenuesPercentage>
	<asys:RevenuesPercentage contextRef="FD2015Q3YTD_us-gaap_StatementGeographicalAxis_country_DE" decimals="2" id="Fact-BF056D77184EA8757197F541C116F4DB" unitRef="number">0.05</asys:RevenuesPercentage>
	<asys:RevenuesPercentage contextRef="FD2015Q3YTD_us-gaap_StatementGeographicalAxis_country_TW" decimals="2" id="Fact-D81B775C5BA686EE1162F541C1135204" unitRef="number">0.15</asys:RevenuesPercentage>
	<asys:RevenuesPercentage contextRef="FD2015Q3YTD_us-gaap_StatementGeographicalAxis_country_US" decimals="2" id="Fact-2FE9AA05E2A692BA5B40F541C1109C95" unitRef="number">0.25</asys:RevenuesPercentage>
	<asys:RevenuesPercentage contextRef="FD2015Q3YTD_us-gaap_StatementGeographicalAxis_us-gaap_AsiaMember" decimals="2" id="Fact-AA89FCDC7DE2607C29E9F541C110A175" unitRef="number">0.59</asys:RevenuesPercentage>
	<asys:RevenuesPercentage contextRef="FD2015Q3YTD_us-gaap_StatementGeographicalAxis_us-gaap_EuropeMember" decimals="2" id="Fact-691FC5C0ACC355D2E1F2F541C112F163" unitRef="number">0.14</asys:RevenuesPercentage>
	<asys:RevenuesPercentage contextRef="FD2015Q3YTD_us-gaap_StatementGeographicalAxis_us-gaap_NorthAmericaMember" decimals="2" id="Fact-87C8605B0DE5035D5AE6F541C113725C" unitRef="number">0.27</asys:RevenuesPercentage>
	<asys:SharebasedCompensationArrangementbySharebasedPaymentAwardOptionsAssumedInMerger contextRef="FD2014Q3YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" id="Fact-BEBF4570BCA35041529CF541C1168F7E" unitRef="shares" xsi:nil="true" />
	<asys:SharebasedCompensationArrangementbySharebasedPaymentAwardOptionsAssumedInMerger contextRef="FD2015Q3YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="INF" id="Fact-A8258F663F2F0440DF8FF541C11729EA" unitRef="shares">367229</asys:SharebasedCompensationArrangementbySharebasedPaymentAwardOptionsAssumedInMerger>
	<asys:SharebasedCompensationArrangementsbySharebasedPaymentAwardOptionsAssumedWeightedAverageExercisePrice contextRef="FD2014Q3YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" id="Fact-9CCBA9C25376F66DA080F541C117E250" unitRef="usdPerShare" xsi:nil="true" />
	<asys:SharebasedCompensationArrangementsbySharebasedPaymentAwardOptionsAssumedWeightedAverageExercisePrice contextRef="FD2015Q3YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="2" id="Fact-9724E6C173A600A8892DF541C1180685" unitRef="usdPerShare">14.19</asys:SharebasedCompensationArrangementsbySharebasedPaymentAwardOptionsAssumedWeightedAverageExercisePrice>
	<asys:StandardProductWarrantyPeriod contextRef="FD2015Q3YTD_us-gaap_RangeAxis_us-gaap_MaximumMember" id="Fact-A89688524863A422D3B8F541C1154B77">P24M</asys:StandardProductWarrantyPeriod>
	<asys:StandardProductWarrantyPeriod contextRef="FD2015Q3YTD_us-gaap_RangeAxis_us-gaap_MinimumMember" id="Fact-CCBB0DD7E91117D0CFAAF541C11329DF">P12M</asys:StandardProductWarrantyPeriod>
	<asys:UnbilledAndOther contextRef="FI2014Q4" decimals="-3" id="Fact-A403A25057C30F1DE026F541C10F5767" unitRef="usd">6880000</asys:UnbilledAndOther>
	<asys:UnbilledAndOther contextRef="FI2015Q3" decimals="-3" id="Fact-288404A52177D027C161F541C1138425" unitRef="usd">10162000</asys:UnbilledAndOther>
	<asys:UnearnedResearchandDevelopmentGrantsCurrent contextRef="FI2014Q4" decimals="-3" id="Fact-4F6FC9520C2254758B0FF541C114463F" unitRef="usd">3989000</asys:UnearnedResearchandDevelopmentGrantsCurrent>
	<asys:UnearnedResearchandDevelopmentGrantsCurrent contextRef="FI2015Q3" decimals="-3" id="Fact-829D13F9B135C3D92FF2F541C113502E" unitRef="usd">859000</asys:UnearnedResearchandDevelopmentGrantsCurrent>
	<dei:AmendmentFlag contextRef="FD2015Q3YTD" id="Fact-0BBC22F8213E0F3CFDB4F541C117E7A9">false</dei:AmendmentFlag>
	<dei:CurrentFiscalYearEndDate contextRef="FD2015Q3YTD" id="Fact-F8EE3108C72CC7E04B9DF541C117F922">--09-30</dei:CurrentFiscalYearEndDate>
	<dei:DocumentFiscalPeriodFocus contextRef="FD2015Q3YTD" id="Fact-69DE108557908A416437F541C117FBF8">Q3</dei:DocumentFiscalPeriodFocus>
	<dei:DocumentFiscalYearFocus contextRef="FD2015Q3YTD" id="Fact-E52F2106925CE835152EF541C117A36C">2015</dei:DocumentFiscalYearFocus>
	<dei:DocumentPeriodEndDate contextRef="FD2015Q3YTD" id="Fact-9C06321A2DDCD5D9A73EF541C1174E80">2015-06-30</dei:DocumentPeriodEndDate>
	<dei:DocumentType contextRef="FD2015Q3YTD" id="Fact-E844AC30FCA7454A5672F541C1166CDC">10-Q</dei:DocumentType>
	<dei:EntityCentralIndexKey contextRef="FD2015Q3YTD" id="Fact-09878979D86C554D6989F541C1175073">0000720500</dei:EntityCentralIndexKey>
	<dei:EntityCommonStockSharesOutstanding contextRef="I2015Q4Aug1" decimals="INF" id="Fact-0FE50FDF219920A1C468F541C117A1FF" unitRef="shares">13150469</dei:EntityCommonStockSharesOutstanding>
	<dei:EntityFilerCategory contextRef="FD2015Q3YTD" id="Fact-9D16331B79F81A39CA1AF541C11882AF">Accelerated Filer</dei:EntityFilerCategory>
	<dei:EntityRegistrantName contextRef="FD2015Q3YTD" id="Fact-EEC3E1011C7C7123DB6DF541C117E36B">AMTECH SYSTEMS INC</dei:EntityRegistrantName>
	<us-gaap:AccountsPayableCurrent contextRef="FI2014Q4" decimals="-3" id="Fact-64FDD7E9AD9FE71364E4F541C10EF487" unitRef="usd">6003000</us-gaap:AccountsPayableCurrent>
	<us-gaap:AccountsPayableCurrent contextRef="FI2015Q3" decimals="-3" id="Fact-B626BBB87201382B04A1F541C10E05E6" unitRef="usd">19853000</us-gaap:AccountsPayableCurrent>
	<us-gaap:AccountsReceivableNetCurrent contextRef="FI2014Q4" decimals="-3" id="Fact-FABFBCCE98DEADD9C2CBF541C1152D13" unitRef="usd">8896000</us-gaap:AccountsReceivableNetCurrent>
	<us-gaap:AccountsReceivableNetCurrent contextRef="FI2015Q3" decimals="-3" id="Fact-F779CD49737C22C218E7F541C11415A4" unitRef="usd">19559000</us-gaap:AccountsReceivableNetCurrent>
	<us-gaap:AccruedIncomeTaxesCurrent contextRef="FI2014Q4" decimals="-3" id="Fact-DC80650B0161B7C60AF9F541C10F4BF6" unitRef="usd">4990000</us-gaap:AccruedIncomeTaxesCurrent>
	<us-gaap:AccruedIncomeTaxesCurrent contextRef="FI2015Q3" decimals="-3" id="Fact-5D1263C84B05BDE4A2FBF541C10ECDF3" unitRef="usd">0</us-gaap:AccruedIncomeTaxesCurrent>
	<us-gaap:AccruedLiabilitiesCurrent contextRef="FI2014Q4" decimals="-3" id="Fact-96C3C40BC657DB3A252CF541C115A1BB" unitRef="usd">5346000</us-gaap:AccruedLiabilitiesCurrent>
	<us-gaap:AccruedLiabilitiesCurrent contextRef="FI2015Q3" decimals="-3" id="Fact-BEE04FF64755C3C91F27F541C110F86B" unitRef="usd">5465000</us-gaap:AccruedLiabilitiesCurrent>
	<us-gaap:AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment contextRef="FI2014Q4" decimals="-3" id="Fact-035B7E4883B9E629CBC6F541C1137E73" unitRef="usd">14304000</us-gaap:AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment>
	<us-gaap:AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment contextRef="FI2015Q3" decimals="-3" id="Fact-846DE16CB6BA37532E7FF541C1136F8A" unitRef="usd">15217000</us-gaap:AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment>
	<us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax contextRef="FI2014Q4" decimals="-3" id="Fact-FB3D2153954DBF26BC57F541C10F72D5" unitRef="usd">-5790000</us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax>
	<us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax contextRef="FI2015Q3" decimals="-3" id="Fact-32C18F1ED6EBEE7E26CEF541C1130A6E" unitRef="usd">-8733000</us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax>
	<us-gaap:AdditionalPaidInCapital contextRef="FI2014Q4" decimals="-3" id="Fact-8EC23244FF6D9966F1DFF541C1149FDE" unitRef="usd">81884000</us-gaap:AdditionalPaidInCapital>
	<us-gaap:AdditionalPaidInCapital contextRef="FI2015Q3" decimals="-3" id="Fact-35436A1C831AD188E75FF541C1184CB8" unitRef="usd">109891000</us-gaap:AdditionalPaidInCapital>
	<us-gaap:AllocatedShareBasedCompensationExpense contextRef="FD2014Q3QTD" decimals="-3" id="Fact-E5E828EFE5C4C4B76074F541C11621F0" unitRef="usd">230000</us-gaap:AllocatedShareBasedCompensationExpense>
	<us-gaap:AllocatedShareBasedCompensationExpense contextRef="FD2014Q3YTD" decimals="-3" id="Fact-F792D03EC2FD495BE219F541C117278B" unitRef="usd">603000</us-gaap:AllocatedShareBasedCompensationExpense>
	<us-gaap:AllocatedShareBasedCompensationExpense contextRef="FD2015Q3QTD" decimals="-3" id="Fact-7CE3E70437F1B2513886F541C1171C77" unitRef="usd">296000</us-gaap:AllocatedShareBasedCompensationExpense>
	<us-gaap:AllocatedShareBasedCompensationExpense contextRef="FD2015Q3YTD" decimals="-3" id="Fact-822600863AFBB129A946F541C11703E2" unitRef="usd">864000</us-gaap:AllocatedShareBasedCompensationExpense>
	<us-gaap:AllocatedShareBasedCompensationExpenseNetOfTax contextRef="FD2014Q3QTD" decimals="-3" id="Fact-2DA71B99A4E5003E5779F541C116CBB6" unitRef="usd">194000</us-gaap:AllocatedShareBasedCompensationExpenseNetOfTax>
	<us-gaap:AllocatedShareBasedCompensationExpenseNetOfTax contextRef="FD2014Q3YTD" decimals="-3" id="Fact-83AE8C69D52478B25F6AF541C117FB1E" unitRef="usd">407000</us-gaap:AllocatedShareBasedCompensationExpenseNetOfTax>
	<us-gaap:AllocatedShareBasedCompensationExpenseNetOfTax contextRef="FD2015Q3QTD" decimals="-3" id="Fact-A0E5BFB1FBA620D635F0F541C117B9E1" unitRef="usd">256000</us-gaap:AllocatedShareBasedCompensationExpenseNetOfTax>
	<us-gaap:AllocatedShareBasedCompensationExpenseNetOfTax contextRef="FD2015Q3YTD" decimals="-3" id="Fact-5080C2B09008E650D63AF541C117B047" unitRef="usd">730000</us-gaap:AllocatedShareBasedCompensationExpenseNetOfTax>
	<us-gaap:AllowanceForDoubtfulAccountsReceivableCurrent contextRef="FI2014Q4" decimals="-3" id="Fact-F7C4B3F8651D98072F2AF541C1158736" unitRef="usd">2846000</us-gaap:AllowanceForDoubtfulAccountsReceivableCurrent>
	<us-gaap:AllowanceForDoubtfulAccountsReceivableCurrent contextRef="FI2015Q3" decimals="-3" id="Fact-D04C64498824DD8B29BFF541C11431B5" unitRef="usd">3440000</us-gaap:AllowanceForDoubtfulAccountsReceivableCurrent>
	<us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount contextRef="FD2014Q3YTD_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_us-gaap_EmployeeStockOptionMember" decimals="INF" id="Fact-F7DD567E21E461B37FADF541C11047E8" unitRef="shares">1016000</us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount>
	<us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount contextRef="FD2014Q3YTD_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_us-gaap_RestrictedStockMember" decimals="INF" id="Fact-89E39FF46B8DE9B0E246F541C1105F5A" unitRef="shares">38000</us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount>
	<us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount contextRef="FD2015Q3YTD_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_us-gaap_EmployeeStockOptionMember" decimals="INF" id="Fact-3FDAF0076FCA42E6784DF541C1108DE3" unitRef="shares">1640000</us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount>
	<us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount contextRef="FD2015Q3YTD_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_us-gaap_RestrictedStockMember" decimals="INF" id="Fact-DBF443A6FE2D354C1576F541C111E032" unitRef="shares">14000</us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount>
	<us-gaap:Assets contextRef="FI2014Q4" decimals="-3" id="Fact-231A29D135F2D52A6C63F541C1189252" unitRef="usd">89904000</us-gaap:Assets>
	<us-gaap:Assets contextRef="FI2014Q4_us-gaap_StatementBusinessSegmentsAxis_asys_PolishingSuppliesAndEquipmentMember" decimals="-3" id="Fact-3858788CC9060DAB4858F541C10FE970" unitRef="usd">6253000</us-gaap:Assets>
	<us-gaap:Assets contextRef="FI2014Q4_us-gaap_StatementBusinessSegmentsAxis_asys_SemiconductorEquipmentMember" decimals="-3" id="Fact-74EF9B2CFE65EFAC7762F541C10F2594" unitRef="usd">5593000</us-gaap:Assets>
	<us-gaap:Assets contextRef="FI2014Q4_us-gaap_StatementBusinessSegmentsAxis_asys_SolarEquipmentMember" decimals="-3" id="Fact-CDA4E92F9C4394B2DCBEF541C10FCDF9" unitRef="usd">56858000</us-gaap:Assets>
	<us-gaap:Assets contextRef="FI2014Q4_us-gaap_StatementBusinessSegmentsAxis_us-gaap_MaterialReconcilingItemsMember" decimals="-3" id="Fact-5D23361E264C00F5B0D3F541C110B9A0" unitRef="usd">21200000</us-gaap:Assets>
	<us-gaap:Assets contextRef="FI2015Q3" decimals="-3" id="Fact-D5323ABA678DBD6B3E2AF541C110C0A6" unitRef="usd">134055000</us-gaap:Assets>
	<us-gaap:Assets contextRef="FI2015Q3_us-gaap_StatementBusinessSegmentsAxis_asys_PolishingSuppliesAndEquipmentMember" decimals="-3" id="Fact-36DFF13CC75FDEBD73FEF541C1107FB4" unitRef="usd">6078000</us-gaap:Assets>
	<us-gaap:Assets contextRef="FI2015Q3_us-gaap_StatementBusinessSegmentsAxis_asys_SemiconductorEquipmentMember" decimals="-3" id="Fact-C7C5065CB301EB372855F541C10F3AC1" unitRef="usd">54559000</us-gaap:Assets>
	<us-gaap:Assets contextRef="FI2015Q3_us-gaap_StatementBusinessSegmentsAxis_asys_SolarEquipmentMember" decimals="-3" id="Fact-2D6DF456F5965261A416F541C110E44C" unitRef="usd">65212000</us-gaap:Assets>
	<us-gaap:Assets contextRef="FI2015Q3_us-gaap_StatementBusinessSegmentsAxis_us-gaap_MaterialReconcilingItemsMember" decimals="-3" id="Fact-3AC291B4F8D0467353A3F541C1111554" unitRef="usd">8206000</us-gaap:Assets>
	<us-gaap:AssetsCurrent contextRef="FI2014Q4" decimals="-3" id="Fact-62BB934CE771A0B7590EF541C11401E5" unitRef="usd">65425000</us-gaap:AssetsCurrent>
	<us-gaap:AssetsCurrent contextRef="FI2015Q3" decimals="-3" id="Fact-FB21CC2012212D3E8CA9F541C111A6FA" unitRef="usd">90363000</us-gaap:AssetsCurrent>
	<us-gaap:BusinessAcquisitionPercentageOfVotingInterestsAcquired contextRef="I2015Q1Dec24_us-gaap_BusinessAcquisitionAxis_asys_SoLayTecB.V.Member" decimals="INF" id="Fact-C1FCCF69A55E9206153DF541C110A664" unitRef="number">0.51</us-gaap:BusinessAcquisitionPercentageOfVotingInterestsAcquired>
	<us-gaap:BusinessAcquisitionProFormaEarningsPerShareBasic contextRef="FD2014Q3QTD_us-gaap_BusinessAcquisitionAxis_asys_BTUInternationalIncBTUMergerMember" decimals="2" id="Fact-E95AFC8FAF8AE036DD9EF541C110E188" unitRef="usdPerShare">-0.35</us-gaap:BusinessAcquisitionProFormaEarningsPerShareBasic>
	<us-gaap:BusinessAcquisitionProFormaEarningsPerShareBasic contextRef="FD2014Q3YTD_us-gaap_BusinessAcquisitionAxis_asys_BTUInternationalIncBTUMergerMember" decimals="2" id="Fact-C1401F8E00DC6745E57EF541C11026A7" unitRef="usdPerShare">-1.52</us-gaap:BusinessAcquisitionProFormaEarningsPerShareBasic>
	<us-gaap:BusinessAcquisitionProFormaEarningsPerShareBasic contextRef="FD2015Q3QTD_us-gaap_BusinessAcquisitionAxis_asys_BTUInternationalIncBTUMergerMember" decimals="2" id="Fact-662510A79418173CDF8BF541C110D0AD" unitRef="usdPerShare">-0.13</us-gaap:BusinessAcquisitionProFormaEarningsPerShareBasic>
	<us-gaap:BusinessAcquisitionProFormaEarningsPerShareBasic contextRef="FD2015Q3YTD_us-gaap_BusinessAcquisitionAxis_asys_BTUInternationalIncBTUMergerMember" decimals="2" id="Fact-FAAA2F1C8A3261040E73F541C10F2853" unitRef="usdPerShare">-0.84</us-gaap:BusinessAcquisitionProFormaEarningsPerShareBasic>
	<us-gaap:BusinessAcquisitionProFormaEarningsPerShareDiluted contextRef="FD2014Q3QTD_us-gaap_BusinessAcquisitionAxis_asys_BTUInternationalIncBTUMergerMember" decimals="2" id="Fact-3C5262328039A06B600EF541C110CB2D" unitRef="usdPerShare">-0.35</us-gaap:BusinessAcquisitionProFormaEarningsPerShareDiluted>
	<us-gaap:BusinessAcquisitionProFormaEarningsPerShareDiluted contextRef="FD2014Q3YTD_us-gaap_BusinessAcquisitionAxis_asys_BTUInternationalIncBTUMergerMember" decimals="2" id="Fact-8E36D495E04B4BB26DBAF541C110BCDB" unitRef="usdPerShare">-1.52</us-gaap:BusinessAcquisitionProFormaEarningsPerShareDiluted>
	<us-gaap:BusinessAcquisitionProFormaEarningsPerShareDiluted contextRef="FD2015Q3QTD_us-gaap_BusinessAcquisitionAxis_asys_BTUInternationalIncBTUMergerMember" decimals="2" id="Fact-26322A4943822555E3C3F541C11238B3" unitRef="usdPerShare">-0.13</us-gaap:BusinessAcquisitionProFormaEarningsPerShareDiluted>
	<us-gaap:BusinessAcquisitionProFormaEarningsPerShareDiluted contextRef="FD2015Q3YTD_us-gaap_BusinessAcquisitionAxis_asys_BTUInternationalIncBTUMergerMember" decimals="2" id="Fact-9C351107CFBA978AC7C7F541C111B9B9" unitRef="usdPerShare">-0.84</us-gaap:BusinessAcquisitionProFormaEarningsPerShareDiluted>
	<us-gaap:BusinessAcquisitionsProFormaNetIncomeLoss contextRef="FD2014Q3QTD_us-gaap_BusinessAcquisitionAxis_asys_BTUInternationalIncBTUMergerMember" decimals="-3" id="Fact-8AE2B6E08562F9FA7ED9F541C110909E" unitRef="usd">-4507000</us-gaap:BusinessAcquisitionsProFormaNetIncomeLoss>
	<us-gaap:BusinessAcquisitionsProFormaNetIncomeLoss contextRef="FD2014Q3YTD_us-gaap_BusinessAcquisitionAxis_asys_BTUInternationalIncBTUMergerMember" decimals="-3" id="Fact-010858DCA14A12A9953CF541C10F41B0" unitRef="usd">-19641000</us-gaap:BusinessAcquisitionsProFormaNetIncomeLoss>
	<us-gaap:BusinessAcquisitionsProFormaNetIncomeLoss contextRef="FD2015Q3QTD_us-gaap_BusinessAcquisitionAxis_asys_BTUInternationalIncBTUMergerMember" decimals="-3" id="Fact-2DB4BCD49246DEF4E0E0F541C11036D6" unitRef="usd">-1669000</us-gaap:BusinessAcquisitionsProFormaNetIncomeLoss>
	<us-gaap:BusinessAcquisitionsProFormaNetIncomeLoss contextRef="FD2015Q3YTD_us-gaap_BusinessAcquisitionAxis_asys_BTUInternationalIncBTUMergerMember" decimals="-3" id="Fact-FC261C3967C1E3CC42D9F541C110A7D0" unitRef="usd">-11028000</us-gaap:BusinessAcquisitionsProFormaNetIncomeLoss>
	<us-gaap:BusinessAcquisitionsProFormaRevenue contextRef="FD2014Q3QTD_us-gaap_BusinessAcquisitionAxis_asys_BTUInternationalIncBTUMergerMember" decimals="-3" id="Fact-EDB6836AEAAEE2D62B24F541C110E99F" unitRef="usd">25625000</us-gaap:BusinessAcquisitionsProFormaRevenue>
	<us-gaap:BusinessAcquisitionsProFormaRevenue contextRef="FD2014Q3YTD_us-gaap_BusinessAcquisitionAxis_asys_BTUInternationalIncBTUMergerMember" decimals="-3" id="Fact-323811D6CDB9A7A081C2F541C10F7CD8" unitRef="usd">75791000</us-gaap:BusinessAcquisitionsProFormaRevenue>
	<us-gaap:BusinessAcquisitionsProFormaRevenue contextRef="FD2015Q3QTD_us-gaap_BusinessAcquisitionAxis_asys_BTUInternationalIncBTUMergerMember" decimals="-3" id="Fact-80EBCE642BE1434D54F8F541C10F028A" unitRef="usd">40016000</us-gaap:BusinessAcquisitionsProFormaRevenue>
	<us-gaap:BusinessAcquisitionsProFormaRevenue contextRef="FD2015Q3YTD_us-gaap_BusinessAcquisitionAxis_asys_BTUInternationalIncBTUMergerMember" decimals="-3" id="Fact-73450935583AA377B54DF541C1115824" unitRef="usd">92988000</us-gaap:BusinessAcquisitionsProFormaRevenue>
	<us-gaap:BusinessCombinationAcquisitionRelatedCosts contextRef="FD2014Q3YTD_us-gaap_BusinessAcquisitionAxis_asys_BTUInternationalIncBTUMergerMember" decimals="-5" id="Fact-B889667E7FF11541937AF5717B9A1B43" unitRef="usd">200000</us-gaap:BusinessCombinationAcquisitionRelatedCosts>
	<us-gaap:BusinessCombinationAcquisitionRelatedCosts contextRef="FD2015Q3QTD_us-gaap_BusinessAcquisitionAxis_asys_BTUInternationalIncBTUMergerMember" id="Fact-20D693E1723FA6EB2A45F541C1157B11" unitRef="usd" xsi:nil="true" />
	<us-gaap:BusinessCombinationAcquisitionRelatedCosts contextRef="FD2015Q3YTD_us-gaap_BusinessAcquisitionAxis_asys_BTUInternationalIncBTUMergerMember" decimals="-5" id="Fact-A6070D7E4181F5A82B94F541C1137157" unitRef="usd">1800000</us-gaap:BusinessCombinationAcquisitionRelatedCosts>
	<us-gaap:BusinessCombinationConsiderationTransferred1 contextRef="D2015Q2Jan30_us-gaap_BusinessAcquisitionAxis_asys_BTUInternationalIncBTUMergerMember" decimals="-3" id="Fact-9B8C5F8DD646A6C28869F541C1113405" unitRef="usd">26625000</us-gaap:BusinessCombinationConsiderationTransferred1>
	<us-gaap:BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibleAssetsOtherThanGoodwill contextRef="I2015Q2Jan30_us-gaap_BusinessAcquisitionAxis_asys_BTUInternationalIncBTUMergerMember" decimals="-3" id="Fact-371ADAB47A59AC891162F541C116A463" unitRef="usd">1330000</us-gaap:BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibleAssetsOtherThanGoodwill>
	<us-gaap:BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibles contextRef="I2015Q1Dec24_us-gaap_BusinessAcquisitionAxis_asys_SoLayTecB.V.Member" decimals="-5" id="Fact-E17F5B604826D9FD7661F541C1149CF2" unitRef="usd">2200000</us-gaap:BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibles>
	<us-gaap:BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibles contextRef="I2015Q2Jan30_us-gaap_BusinessAcquisitionAxis_asys_BTUInternationalIncBTUMember" decimals="-5" id="Fact-8F74D85937CAAC31CC4EF541C1177FBF" unitRef="usd">0</us-gaap:BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibles>
	<us-gaap:BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNet contextRef="I2015Q2Jan30_us-gaap_BusinessAcquisitionAxis_asys_BTUInternationalIncBTUMergerMember" decimals="-3" id="Fact-90F3163E1C17DA39E8CAF541C115C060" unitRef="usd">20598000</us-gaap:BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNet>
	<us-gaap:BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNoncurrentLiabilitiesLongTermDebt contextRef="FI2015Q1_us-gaap_BusinessAcquisitionAxis_asys_SoLayTecB.V.Member" decimals="-5" id="Fact-7F0D7AEF7D6C38E9C8BEF541C115E9AB" unitRef="usd">2000000</us-gaap:BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNoncurrentLiabilitiesLongTermDebt>
	<us-gaap:BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNoncurrentLiabilitiesLongTermDebt contextRef="I2015Q2Jan30_us-gaap_BusinessAcquisitionAxis_asys_BTUInternationalIncBTUMergerMember" decimals="-5" id="Fact-C53A82572EF49CB3C483F541C114208A" unitRef="usd">7200000</us-gaap:BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNoncurrentLiabilitiesLongTermDebt>
	<us-gaap:BusinessCombinationRecognizedIdentifiableAssetsAcquiredGoodwillAndLiabilitiesAssumedNet contextRef="I2015Q2Jan30_us-gaap_BusinessAcquisitionAxis_asys_BTUInternationalIncBTUMergerMember" decimals="-3" id="Fact-67A1A45A78B1004B9E6AF541C1159F3C" unitRef="usd">26625000</us-gaap:BusinessCombinationRecognizedIdentifiableAssetsAcquiredGoodwillAndLiabilitiesAssumedNet>
	<us-gaap:CashAcquiredInExcessOfPaymentsToAcquireBusiness contextRef="FD2014Q3YTD" decimals="-3" id="Fact-A29471E233B3B8A42B99F541C10F50E4" unitRef="usd">0</us-gaap:CashAcquiredInExcessOfPaymentsToAcquireBusiness>
	<us-gaap:CashAcquiredInExcessOfPaymentsToAcquireBusiness contextRef="FD2015Q3YTD" decimals="-3" id="Fact-A3202BCBE70D8519CEA5F541C1185C1B" unitRef="usd">8595000</us-gaap:CashAcquiredInExcessOfPaymentsToAcquireBusiness>
	<us-gaap:CashAndCashEquivalentsAtCarryingValue contextRef="FI2013Q4" decimals="-3" id="Fact-C8AB82E432633F52663BF541C1158FDB" unitRef="usd">37197000</us-gaap:CashAndCashEquivalentsAtCarryingValue>
	<us-gaap:CashAndCashEquivalentsAtCarryingValue contextRef="FI2014Q3" decimals="-3" id="Fact-68C54600015598C8F8F9F541C114C0F5" unitRef="usd">31638000</us-gaap:CashAndCashEquivalentsAtCarryingValue>
	<us-gaap:CashAndCashEquivalentsAtCarryingValue contextRef="FI2014Q4" decimals="-3" id="Fact-04AD460AB7D5357CDD7CF541C10FC238" unitRef="usd">27367000</us-gaap:CashAndCashEquivalentsAtCarryingValue>
	<us-gaap:CashAndCashEquivalentsAtCarryingValue contextRef="FI2015Q3" decimals="-3" id="Fact-B2BFB49FE91A2318A78CF541C1126FBB" unitRef="usd">23715000</us-gaap:CashAndCashEquivalentsAtCarryingValue>
	<us-gaap:CashAndCashEquivalentsPeriodIncreaseDecrease contextRef="FD2014Q3YTD" decimals="-3" id="Fact-439BEB71876D845C90DBF541C114F757" unitRef="usd">-5559000</us-gaap:CashAndCashEquivalentsPeriodIncreaseDecrease>
	<us-gaap:CashAndCashEquivalentsPeriodIncreaseDecrease contextRef="FD2015Q3YTD" decimals="-3" id="Fact-CB30E07E3D1D075E9575F541C115F108" unitRef="usd">-3652000</us-gaap:CashAndCashEquivalentsPeriodIncreaseDecrease>
	<us-gaap:ClassOfWarrantOrRightExercisePriceOfWarrantsOrRights1 contextRef="I2008Q1ShareholdersRights_us-gaap_StatementClassOfStockAxis_us-gaap_SeriesAPreferredStockMember" decimals="INF" id="Fact-03D2C538FB1B01072E0CF541C1109CC0" unitRef="usdPerShare">51.60</us-gaap:ClassOfWarrantOrRightExercisePriceOfWarrantsOrRights1>
	<us-gaap:ClassOfWarrantOrRightNumberOfSecuritiesCalledByWarrantsOrRights contextRef="FI2014Q4_us-gaap_StatementClassOfStockAxis_us-gaap_SeriesAPreferredStockMember" decimals="INF" id="Fact-6B52BE8F2A33756F37EFF541C1108FA4" unitRef="shares">0.001</us-gaap:ClassOfWarrantOrRightNumberOfSecuritiesCalledByWarrantsOrRights>
	<us-gaap:CommitmentsAndContingencies contextRef="FI2014Q4" id="Fact-81CB20EBAADD8AD95B04F541C118B766" unitRef="usd" xsi:nil="true" />
	<us-gaap:CommitmentsAndContingencies contextRef="FI2015Q3" id="Fact-CDE38ECA0F1DE118CCBBF541C1181C0A" unitRef="usd" xsi:nil="true" />
	<us-gaap:CommonStockParOrStatedValuePerShare contextRef="FI2014Q4" decimals="INF" id="Fact-68075D5E2401A05EF244F541C11510E7" unitRef="usdPerShare">0.01</us-gaap:CommonStockParOrStatedValuePerShare>
	<us-gaap:CommonStockParOrStatedValuePerShare contextRef="FI2015Q3" decimals="INF" id="Fact-CADA298C8AE555F76B0DF541C1141FEA" unitRef="usdPerShare">0.01</us-gaap:CommonStockParOrStatedValuePerShare>
	<us-gaap:CommonStockParOrStatedValuePerShare contextRef="I2008Q1ShareholdersRights_us-gaap_StatementClassOfStockAxis_us-gaap_SeriesAPreferredStockMember" decimals="2" id="Fact-540B61B17F279178E854F541C10E84DC" unitRef="usdPerShare">0.01</us-gaap:CommonStockParOrStatedValuePerShare>
	<us-gaap:CommonStockSharesAuthorized contextRef="FI2014Q4" decimals="INF" id="Fact-3D99B098A3E8402CFC42F541C115156E" unitRef="shares">100000000</us-gaap:CommonStockSharesAuthorized>
	<us-gaap:CommonStockSharesAuthorized contextRef="FI2015Q3" decimals="INF" id="Fact-4E102F55FF9285988629F541C115A143" unitRef="shares">100000000</us-gaap:CommonStockSharesAuthorized>
	<us-gaap:CommonStockSharesIssued contextRef="FI2014Q4" decimals="INF" id="Fact-E50519D3A86E95209404F541C114D789" unitRef="shares">9848253</us-gaap:CommonStockSharesIssued>
	<us-gaap:CommonStockSharesIssued contextRef="FI2015Q3" decimals="INF" id="Fact-DB951FC9213EFCA66236F541C115ABAD" unitRef="shares">13150222</us-gaap:CommonStockSharesIssued>
	<us-gaap:CommonStockSharesOutstanding contextRef="FI2014Q4" decimals="INF" id="Fact-CD9CB45B8E514BBD2346F541C11568C7" unitRef="shares">9848253</us-gaap:CommonStockSharesOutstanding>
	<us-gaap:CommonStockSharesOutstanding contextRef="FI2015Q3" decimals="INF" id="Fact-FB411DEF3B097FBDBD82F541C115A8DF" unitRef="shares">13150222</us-gaap:CommonStockSharesOutstanding>
	<us-gaap:CommonStockValue contextRef="FI2014Q4" decimals="-3" id="Fact-7670EAABA8C0F017D190F541C117E6A1" unitRef="usd">98000</us-gaap:CommonStockValue>
	<us-gaap:CommonStockValue contextRef="FI2015Q3" decimals="-3" id="Fact-BF643093A8D0FF49C3C4F541C112FEB5" unitRef="usd">132000</us-gaap:CommonStockValue>
	<us-gaap:ComprehensiveIncomeNetOfTax contextRef="FD2014Q3QTD" decimals="-3" id="Fact-7FA327891A41B6A9DCC0F541C11816B3" unitRef="usd">-5568000</us-gaap:ComprehensiveIncomeNetOfTax>
	<us-gaap:ComprehensiveIncomeNetOfTax contextRef="FD2014Q3YTD" decimals="-3" id="Fact-BB52FEAA9C4BACE47C59F541C10FD3AF" unitRef="usd">-9389000</us-gaap:ComprehensiveIncomeNetOfTax>
	<us-gaap:ComprehensiveIncomeNetOfTax contextRef="FD2015Q3QTD" decimals="-3" id="Fact-48990E0B18C417D2D2B3F541C10F468B" unitRef="usd">-1344000</us-gaap:ComprehensiveIncomeNetOfTax>
	<us-gaap:ComprehensiveIncomeNetOfTax contextRef="FD2015Q3YTD" decimals="-3" id="Fact-98507B5839672F2820C6F541C1171D7C" unitRef="usd">-12062000</us-gaap:ComprehensiveIncomeNetOfTax>
	<us-gaap:ComprehensiveIncomeNetOfTaxAttributableToNoncontrollingInterest contextRef="FD2014Q3QTD" decimals="-3" id="Fact-25ED4C173497D47B1CF9F541C10F05B4" unitRef="usd">80000</us-gaap:ComprehensiveIncomeNetOfTaxAttributableToNoncontrollingInterest>
	<us-gaap:ComprehensiveIncomeNetOfTaxAttributableToNoncontrollingInterest contextRef="FD2014Q3YTD" decimals="-3" id="Fact-7D337682397C1DAB99B4F541C117D7C5" unitRef="usd">-844000</us-gaap:ComprehensiveIncomeNetOfTaxAttributableToNoncontrollingInterest>
	<us-gaap:ComprehensiveIncomeNetOfTaxAttributableToNoncontrollingInterest contextRef="FD2015Q3QTD" decimals="-3" id="Fact-73444650751425F319BEF541C1198FCF" unitRef="usd">18000</us-gaap:ComprehensiveIncomeNetOfTaxAttributableToNoncontrollingInterest>
	<us-gaap:ComprehensiveIncomeNetOfTaxAttributableToNoncontrollingInterest contextRef="FD2015Q3YTD" decimals="-3" id="Fact-6A62DCF5BAC8C9A2D1EAF541C110C873" unitRef="usd">157000</us-gaap:ComprehensiveIncomeNetOfTaxAttributableToNoncontrollingInterest>
	<us-gaap:ComprehensiveIncomeNetOfTaxIncludingPortionAttributableToNoncontrollingInterest contextRef="FD2014Q3QTD" decimals="-3" id="Fact-19A316D03E78C093644FF541C1120CAB" unitRef="usd">-5488000</us-gaap:ComprehensiveIncomeNetOfTaxIncludingPortionAttributableToNoncontrollingInterest>
	<us-gaap:ComprehensiveIncomeNetOfTaxIncludingPortionAttributableToNoncontrollingInterest contextRef="FD2014Q3YTD" decimals="-3" id="Fact-ED05847A7DEF5A1B830AF541C1122753" unitRef="usd">-10233000</us-gaap:ComprehensiveIncomeNetOfTaxIncludingPortionAttributableToNoncontrollingInterest>
	<us-gaap:ComprehensiveIncomeNetOfTaxIncludingPortionAttributableToNoncontrollingInterest contextRef="FD2015Q3QTD" decimals="-3" id="Fact-ADB2988D035050E21807F541C118B0D2" unitRef="usd">-1326000</us-gaap:ComprehensiveIncomeNetOfTaxIncludingPortionAttributableToNoncontrollingInterest>
	<us-gaap:ComprehensiveIncomeNetOfTaxIncludingPortionAttributableToNoncontrollingInterest contextRef="FD2015Q3YTD" decimals="-3" id="Fact-63737F017380497CD28CF541C10F7478" unitRef="usd">-11905000</us-gaap:ComprehensiveIncomeNetOfTaxIncludingPortionAttributableToNoncontrollingInterest>
	<us-gaap:ConcentrationRiskPercentage1 contextRef="FD2014Q3YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_us-gaap_MajorCustomersAxis_asys_CustomerNumberOneMember" decimals="2" id="Fact-59025EDEAA3AAB988329F541C111108D" unitRef="number">0.15</us-gaap:ConcentrationRiskPercentage1>
	<us-gaap:ConcentrationRiskPercentage1 contextRef="FD2014Q3YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_us-gaap_MajorCustomersAxis_asys_CustomerNumberTwoMember" decimals="2" id="Fact-981B6F09C05F691F6FF2F541C111C1A4" unitRef="number">0.13</us-gaap:ConcentrationRiskPercentage1>
	<us-gaap:ConcentrationRiskPercentage1 contextRef="FD2015Q3YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_asys_CashAndCashEquivalentsAndRestrictedCashMember_us-gaap_StatementGeographicalAxis_country_US" decimals="2" id="Fact-1F783F5FFBA2D53282ACF541C114BFB2" unitRef="number">0.60</us-gaap:ConcentrationRiskPercentage1>
	<us-gaap:ConcentrationRiskPercentage1 contextRef="FD2015Q3YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_asys_CustomerOneMember" decimals="2" id="Fact-766E26F79EE6D0BDB87BF541C1164B3A" unitRef="number">0.12</us-gaap:ConcentrationRiskPercentage1>
	<us-gaap:ConcentrationRiskPercentage1 contextRef="FD2015Q3YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_us-gaap_MajorCustomersAxis_asys_CustomerNumberOneMember" decimals="2" id="Fact-2FB1E1DD8E4DE7669F88F541C11101EA" unitRef="number">0.18</us-gaap:ConcentrationRiskPercentage1>
	<us-gaap:ConcentrationRiskPercentage1 contextRef="FD2015Q3YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_us-gaap_MajorCustomersAxis_asys_CustomerNumberTwoMember" decimals="2" id="Fact-2F72481C2A446B5D39FCF55FA770FD90" unitRef="number">0.12</us-gaap:ConcentrationRiskPercentage1>
	<us-gaap:ConcentrationRiskPercentage1 contextRef="FD2015Q3YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueProductLineMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_ProductConcentrationRiskMember_us-gaap_StatementBusinessSegmentsAxis_asys_SemiconductorEquipmentMember" decimals="INF" id="Fact-3BD07C938FF6987C00A0F541C10F53A3" unitRef="number">0.25</us-gaap:ConcentrationRiskPercentage1>
	<us-gaap:ConversionOfStockSharesConverted1 contextRef="D2015Q2Jan30_us-gaap_BusinessAcquisitionAxis_asys_BTUInternationalIncBTUMergerMember_us-gaap_StatementClassOfStockAxis_asys_CommonAndRestrictedSharesMember" decimals="-3" id="Fact-80D3B53F206BBBB02997F541C1117947" unitRef="shares">9681000</us-gaap:ConversionOfStockSharesConverted1>
	<us-gaap:ConversionOfStockSharesConverted1 contextRef="D2015Q2Jan30_us-gaap_BusinessAcquisitionAxis_asys_BTUInternationalIncBTUMergerMember_us-gaap_StatementClassOfStockAxis_us-gaap_EmployeeStockOptionMember" decimals="-3" id="Fact-DB7614A3B9F87C391927F541C116DD2C" unitRef="shares">500000</us-gaap:ConversionOfStockSharesConverted1>
	<us-gaap:ConversionOfStockSharesIssued1 contextRef="D2015Q2Jan30_dei_LegalEntityAxis_asys_BTUInternationalIncBTUMergerMember_us-gaap_RelatedPartyTransactionAxis_asys_MergerAgreementMember" decimals="INF" id="Fact-4144E958B4508B0112B2F541C11640BC" unitRef="shares">3185852</us-gaap:ConversionOfStockSharesIssued1>
	<us-gaap:CostOfGoodsAndServicesSold contextRef="FD2014Q3QTD" decimals="-3" id="Fact-CAE1E9B7AF5F2241C754F541C117A4F8" unitRef="usd">7559000</us-gaap:CostOfGoodsAndServicesSold>
	<us-gaap:CostOfGoodsAndServicesSold contextRef="FD2014Q3YTD" decimals="-3" id="Fact-E178CB9501419810045BF541C116977A" unitRef="usd">27615000</us-gaap:CostOfGoodsAndServicesSold>
	<us-gaap:CostOfGoodsAndServicesSold contextRef="FD2015Q3QTD" decimals="-3" id="Fact-7C34402D65DC379613FCF541C10F1727" unitRef="usd">29888000</us-gaap:CostOfGoodsAndServicesSold>
	<us-gaap:CostOfGoodsAndServicesSold contextRef="FD2015Q3YTD" decimals="-3" id="Fact-8DEAD9D9D95C5F41B922F541C117AE26" unitRef="usd">56240000</us-gaap:CostOfGoodsAndServicesSold>
	<us-gaap:CustomerAdvancesCurrent contextRef="FI2014Q4" decimals="-3" id="Fact-29F8D1193532318DD066F541C1180C78" unitRef="usd">4992000</us-gaap:CustomerAdvancesCurrent>
	<us-gaap:CustomerAdvancesCurrent contextRef="FI2015Q3" decimals="-3" id="Fact-0C4E2D3EEEC483F353D3F541C113B2C5" unitRef="usd">10192000</us-gaap:CustomerAdvancesCurrent>
	<us-gaap:DebtInstrumentInterestRateStatedPercentage contextRef="FI2015Q3_us-gaap_BusinessAcquisitionAxis_asys_SoLayTecB.V.Member_us-gaap_RangeAxis_us-gaap_MaximumMember" decimals="INF" id="Fact-E391F1B339084FA71A4DF541C114D9B1" unitRef="number">0.1</us-gaap:DebtInstrumentInterestRateStatedPercentage>
	<us-gaap:DebtInstrumentInterestRateStatedPercentage contextRef="FI2015Q3_us-gaap_BusinessAcquisitionAxis_asys_SoLayTecB.V.Member_us-gaap_RangeAxis_us-gaap_MinimumMember" decimals="INF" id="Fact-3AC129F7C441554E36BCF541C11367C8" unitRef="number">0.0595</us-gaap:DebtInstrumentInterestRateStatedPercentage>
	<us-gaap:DebtInstrumentInterestRateStatedPercentage contextRef="I2015Q2Jan30_us-gaap_BusinessAcquisitionAxis_asys_BTUInternationalIncBTUMergerMember" decimals="INF" id="Fact-6D14E3D0A00435AAE5F6F541C11577CD" unitRef="number">0.044</us-gaap:DebtInstrumentInterestRateStatedPercentage>
	<us-gaap:DeferredCostsCurrent contextRef="FI2014Q4" decimals="-3" id="Fact-6D06E9E473E68F981EB4F541C111B8B3" unitRef="usd">1210000</us-gaap:DeferredCostsCurrent>
	<us-gaap:DeferredCostsCurrent contextRef="FI2015Q3" decimals="-3" id="Fact-D754586CEC925AA47890F541C1128116" unitRef="usd">2416000</us-gaap:DeferredCostsCurrent>
	<us-gaap:DeferredRevenue contextRef="FI2014Q4" decimals="-3" id="Fact-6044631BADD6AFC2F27BF541C11214A9" unitRef="usd">8118000</us-gaap:DeferredRevenue>
	<us-gaap:DeferredRevenue contextRef="FI2015Q3" decimals="-3" id="Fact-78317454209845C71906F541C11293EB" unitRef="usd">7536000</us-gaap:DeferredRevenue>
	<us-gaap:DeferredTaxAssetsNetCurrent contextRef="FI2014Q4" decimals="-3" id="Fact-63DF14AB77CAE1F93F0EF541C1182C89" unitRef="usd">1060000</us-gaap:DeferredTaxAssetsNetCurrent>
	<us-gaap:DeferredTaxAssetsNetCurrent contextRef="FI2015Q3" decimals="-3" id="Fact-FDC64D9A5E7C8AF8A7BAF541C1182EDC" unitRef="usd">1650000</us-gaap:DeferredTaxAssetsNetCurrent>
	<us-gaap:DeferredTaxAssetsNetNoncurrent contextRef="FI2014Q4" decimals="-3" id="Fact-8D183BBF529C2B5D18D2F541C113D8DE" unitRef="usd">1300000</us-gaap:DeferredTaxAssetsNetNoncurrent>
	<us-gaap:DeferredTaxAssetsNetNoncurrent contextRef="FI2015Q3" decimals="-3" id="Fact-90ADA56E078893FB4BD5F541C1181691" unitRef="usd">120000</us-gaap:DeferredTaxAssetsNetNoncurrent>
	<us-gaap:DeferredTaxLiabilitiesNoncurrent contextRef="FI2014Q4" decimals="-3" id="Fact-6371E07A157F480606AEF541C116A2B6" unitRef="usd">0</us-gaap:DeferredTaxLiabilitiesNoncurrent>
	<us-gaap:DeferredTaxLiabilitiesNoncurrent contextRef="FI2015Q3" decimals="-3" id="Fact-F4637F90A079D6575BEDF541C1187396" unitRef="usd">250000</us-gaap:DeferredTaxLiabilitiesNoncurrent>
	<us-gaap:DepreciationDepletionAndAmortization contextRef="FD2014Q3YTD" decimals="-3" id="Fact-C2B2143684F9044F3CAAF541C11314ED" unitRef="usd">1796000</us-gaap:DepreciationDepletionAndAmortization>
	<us-gaap:DepreciationDepletionAndAmortization contextRef="FD2015Q3YTD" decimals="-3" id="Fact-B21A367B9EEAF4EAC2F6F541C118B5F0" unitRef="usd">2488000</us-gaap:DepreciationDepletionAndAmortization>
	<us-gaap:EarningsPerShareBasic contextRef="FD2014Q3QTD" decimals="2" id="Fact-D58869C3A179F75FD5EDF541C1119FBB" unitRef="usdPerShare">-0.53</us-gaap:EarningsPerShareBasic>
	<us-gaap:EarningsPerShareBasic contextRef="FD2014Q3YTD" decimals="2" id="Fact-66B6F8B19FD193F4F1AFF541C1121D15" unitRef="usdPerShare">-1.01</us-gaap:EarningsPerShareBasic>
	<us-gaap:EarningsPerShareBasic contextRef="FD2015Q3QTD" decimals="2" id="Fact-97F40845C8AC38BAE929F541C115D060" unitRef="usdPerShare">-0.12</us-gaap:EarningsPerShareBasic>
	<us-gaap:EarningsPerShareBasic contextRef="FD2015Q3YTD" decimals="2" id="Fact-0135871C02ACECC36AD7F541C114E0C1" unitRef="usdPerShare">-0.78</us-gaap:EarningsPerShareBasic>
	<us-gaap:EarningsPerShareDiluted contextRef="FD2014Q3QTD" decimals="2" id="Fact-54CBE7356CB9C592ACB8F541C10FCB20" unitRef="usdPerShare">-0.53</us-gaap:EarningsPerShareDiluted>
	<us-gaap:EarningsPerShareDiluted contextRef="FD2014Q3YTD" decimals="2" id="Fact-51422785169B6DEC0B91F541C1173071" unitRef="usdPerShare">-1.01</us-gaap:EarningsPerShareDiluted>
	<us-gaap:EarningsPerShareDiluted contextRef="FD2015Q3QTD" decimals="2" id="Fact-E50EBB93EAAB17A9B938F541C1137D87" unitRef="usdPerShare">-0.12</us-gaap:EarningsPerShareDiluted>
	<us-gaap:EarningsPerShareDiluted contextRef="FD2015Q3YTD" decimals="2" id="Fact-23A72A865540672D45D4F541C1113F2D" unitRef="usdPerShare">-0.78</us-gaap:EarningsPerShareDiluted>
	<us-gaap:EffectOfExchangeRateOnCashAndCashEquivalents contextRef="FD2014Q3YTD" decimals="-3" id="Fact-A24A0EB56A0C7423440FF541C11319A1" unitRef="usd">175000</us-gaap:EffectOfExchangeRateOnCashAndCashEquivalents>
	<us-gaap:EffectOfExchangeRateOnCashAndCashEquivalents contextRef="FD2015Q3YTD" decimals="-3" id="Fact-F197BDD68E679EA38F72F541C113E8B3" unitRef="usd">-159000</us-gaap:EffectOfExchangeRateOnCashAndCashEquivalents>
	<us-gaap:EmployeeRelatedLiabilitiesCurrent contextRef="FI2014Q4" decimals="-3" id="Fact-4E3D27551BD61961674BF541C112E119" unitRef="usd">4269000</us-gaap:EmployeeRelatedLiabilitiesCurrent>
	<us-gaap:EmployeeRelatedLiabilitiesCurrent contextRef="FI2015Q3" decimals="-3" id="Fact-A3D7A33B40F8902A413AF541C11826CF" unitRef="usd">6361000</us-gaap:EmployeeRelatedLiabilitiesCurrent>
	<us-gaap:EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense contextRef="FD2014Q3QTD" decimals="-3" id="Fact-3CB0487BA10425B36FF3F541C117D6F1" unitRef="usd">36000</us-gaap:EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense>
	<us-gaap:EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense contextRef="FD2014Q3YTD" decimals="-3" id="Fact-3FDD6118540A7A1B6405F541C117E132" unitRef="usd">196000</us-gaap:EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense>
	<us-gaap:EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense contextRef="FD2015Q3QTD" decimals="-3" id="Fact-67290FDB88C1D5A2DEF3F541C1172694" unitRef="usd">40000</us-gaap:EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense>
	<us-gaap:EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense contextRef="FD2015Q3YTD" decimals="-3" id="Fact-E81A3F619CEACC21F000F541C11634AB" unitRef="usd">134000</us-gaap:EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense>
	<us-gaap:EquityMethodInvestmentOwnershipPercentage contextRef="FI2015Q3_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_asys_KingstoneHoldingCompanyMember" decimals="INF" id="Fact-4595B561FD94585F970BF541C1121A55" unitRef="number">0.55</us-gaap:EquityMethodInvestmentOwnershipPercentage>
	<us-gaap:EquityMethodInvestmentOwnershipPercentage contextRef="FI2015Q3_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_asys_KingstoneHongKongMember" decimals="INF" id="Fact-F1427FA68BA5A33CD7A8F541C11617BD" unitRef="number">0.55</us-gaap:EquityMethodInvestmentOwnershipPercentage>
	<us-gaap:EquityMethodInvestmentOwnershipPercentage contextRef="I2015Q4Jul31_us-gaap_CounterpartyNameAxis_asys_KingstoneHongKongMember_us-gaap_RestructuringPlanAxis_asys_RestructuringOfInvestmentInvestmentAgreementMember_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_asys_KingstoneSemiconductorCompanyLtdMember_us-gaap_SubsequentEventTypeAxis_us-gaap_SubsequentEventMember" decimals="INF" id="Fact-A147267B85B095164183F5B27EEAB782" unitRef="number">0.6875</us-gaap:EquityMethodInvestmentOwnershipPercentage>
	<us-gaap:EquityMethodInvestmentOwnershipPercentage contextRef="I2015Q4Jul31_us-gaap_CounterpartyNameAxis_asys_SuzhouZhuoJingInvestmentCenterMember_us-gaap_RestructuringPlanAxis_asys_RestructuringOfInvestmentInvestmentAgreementMember_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_asys_KingstoneSemiconductorCompanyLtdMember_us-gaap_SubsequentEventTypeAxis_us-gaap_SubsequentEventMember" decimals="INF" id="Fact-72D62C9F5DBCE7F83D97F5B26734C3A3" unitRef="number">0.3125</us-gaap:EquityMethodInvestmentOwnershipPercentage>
	<us-gaap:EquityMethodInvestmentOwnershipPercentage contextRef="I2015Q4Jul31_us-gaap_RestructuringPlanAxis_asys_RestructuringOfInvestmentInvestmentAgreementMember_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_asys_KingstoneHongKongMember_us-gaap_SubsequentEventTypeAxis_us-gaap_SubsequentEventMember" decimals="INF" id="Fact-79B4A93523B750CEF520F59FAC66263F" unitRef="number">0.15</us-gaap:EquityMethodInvestmentOwnershipPercentage>
	<us-gaap:EquityMethodInvestmentOwnershipPercentage contextRef="I2015Q4Jul31_us-gaap_RestructuringPlanAxis_asys_RestructuringOfInvestmentInvestmentAgreementMember_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_asys_KingstoneSemiconductorCompanyLtdMember_us-gaap_SubsequentEventTypeAxis_us-gaap_SubsequentEventMember" decimals="INF" id="Fact-94CD0FA453133DDF011AF5ADEAEDEE6F" unitRef="number">0.3125</us-gaap:EquityMethodInvestmentOwnershipPercentage>
	<us-gaap:EquityMethodInvestmentSoldCarryingAmount contextRef="D2015Q4Jul_us-gaap_RestructuringPlanAxis_asys_RestructuringOfInvestmentInvestmentAgreementMember_us-gaap_SubsequentEventTypeAxis_us-gaap_SubsequentEventMember" decimals="-6" id="Fact-8776D5CB1871A53897E9F5B7ADB319FD" unitRef="usd">4000000</us-gaap:EquityMethodInvestmentSoldCarryingAmount>
	<us-gaap:ExcessTaxBenefitFromShareBasedCompensationFinancingActivities contextRef="FD2014Q3YTD" decimals="-3" id="Fact-1E263AC749A9C2C26838F541C114E9CF" unitRef="usd">100000</us-gaap:ExcessTaxBenefitFromShareBasedCompensationFinancingActivities>
	<us-gaap:ExcessTaxBenefitFromShareBasedCompensationFinancingActivities contextRef="FD2015Q3YTD" decimals="-3" id="Fact-3FE144D8D4455CFC10BBF541C1189FD5" unitRef="usd">30000</us-gaap:ExcessTaxBenefitFromShareBasedCompensationFinancingActivities>
	<us-gaap:FiniteLivedIntangibleAssetUsefulLife contextRef="FD2015Q3YTD_us-gaap_BusinessAcquisitionAxis_asys_BTUInternationalIncBTUMergerMember_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TradeNamesMember" id="Fact-209F37FE1EA4205DFF36F541C1161A49">P15Y</us-gaap:FiniteLivedIntangibleAssetUsefulLife>
	<us-gaap:FiniteLivedIntangibleAssetUsefulLife contextRef="FD2015Q3YTD_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_CustomerListsMember" id="Fact-D431EB37E99AB8ED800EF541C10F01BD">P10Y</us-gaap:FiniteLivedIntangibleAssetUsefulLife>
	<us-gaap:FiniteLivedIntangibleAssetUsefulLife contextRef="FD2015Q3YTD_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_InProcessResearchAndDevelopmentMember" id="Fact-286FECA1F1D768FC1AEFF541C10E8A0F">P5Y</us-gaap:FiniteLivedIntangibleAssetUsefulLife>
	<us-gaap:FiniteLivedIntangibleAssetUsefulLife contextRef="FD2015Q3YTD_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_NoncompeteAgreementsMember_us-gaap_RangeAxis_us-gaap_MaximumMember" id="Fact-DC52CD216516BAB5276BF541C10F6A9B">P8Y</us-gaap:FiniteLivedIntangibleAssetUsefulLife>
	<us-gaap:FiniteLivedIntangibleAssetUsefulLife contextRef="FD2015Q3YTD_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_NoncompeteAgreementsMember_us-gaap_RangeAxis_us-gaap_MinimumMember" id="Fact-15C34804CE27FA82C8ECF541C10FE4D5">P4Y</us-gaap:FiniteLivedIntangibleAssetUsefulLife>
	<us-gaap:FiniteLivedIntangibleAssetUsefulLife contextRef="FD2015Q3YTD_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_OtherIntangibleAssetsMember_us-gaap_RangeAxis_us-gaap_MaximumMember" id="Fact-57272BFAD675A244A92BF541C10F0B0D">P12Y</us-gaap:FiniteLivedIntangibleAssetUsefulLife>
	<us-gaap:FiniteLivedIntangibleAssetUsefulLife contextRef="FD2015Q3YTD_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_OtherIntangibleAssetsMember_us-gaap_RangeAxis_us-gaap_MinimumMember" id="Fact-F68C3F5FA9FD9E798D52F541C10F8162">P2Y</us-gaap:FiniteLivedIntangibleAssetUsefulLife>
	<us-gaap:FiniteLivedIntangibleAssetUsefulLife contextRef="FD2015Q3YTD_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_PatentedTechnologyMember_us-gaap_RangeAxis_us-gaap_MaximumMember" id="Fact-41A584DD5B31573D06FDF541C119CB65">P10Y</us-gaap:FiniteLivedIntangibleAssetUsefulLife>
	<us-gaap:FiniteLivedIntangibleAssetUsefulLife contextRef="FD2015Q3YTD_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_PatentedTechnologyMember_us-gaap_RangeAxis_us-gaap_MinimumMember" id="Fact-5D3AFDBBB25942F4C572F541C10E99F7">P5Y</us-gaap:FiniteLivedIntangibleAssetUsefulLife>
	<us-gaap:FiniteLivedIntangibleAssetUsefulLife contextRef="FD2015Q3YTD_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TradeNamesMember" id="Fact-E65261F60CBFAFF69AA3F541C10FD4F2">P15Y</us-gaap:FiniteLivedIntangibleAssetUsefulLife>
	<us-gaap:FiniteLivedIntangibleAssetsAccumulatedAmortization contextRef="FI2014Q4" decimals="-3" id="Fact-65EA57DB521C87111E3BF541C114D565" unitRef="usd">3434000</us-gaap:FiniteLivedIntangibleAssetsAccumulatedAmortization>
	<us-gaap:FiniteLivedIntangibleAssetsAccumulatedAmortization contextRef="FI2014Q4_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_CustomerListsMember" decimals="-3" id="Fact-AE09319D11BC82B7451EF541C116B7A0" unitRef="usd">592000</us-gaap:FiniteLivedIntangibleAssetsAccumulatedAmortization>
	<us-gaap:FiniteLivedIntangibleAssetsAccumulatedAmortization contextRef="FI2014Q4_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_InProcessResearchAndDevelopmentMember" decimals="-3" id="Fact-0FA8DCE23C0CAD1C3A0AF541C1162326" unitRef="usd">27000</us-gaap:FiniteLivedIntangibleAssetsAccumulatedAmortization>
	<us-gaap:FiniteLivedIntangibleAssetsAccumulatedAmortization contextRef="FI2014Q4_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_NoncompeteAgreementsMember" decimals="-3" id="Fact-E203A1686FC5D62E2EFAF541C1166E89" unitRef="usd">955000</us-gaap:FiniteLivedIntangibleAssetsAccumulatedAmortization>
	<us-gaap:FiniteLivedIntangibleAssetsAccumulatedAmortization contextRef="FI2014Q4_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_OtherIntangibleAssetsMember" decimals="-3" id="Fact-93ECD8A6CD1E8E9C0CA6F541C1140920" unitRef="usd">178000</us-gaap:FiniteLivedIntangibleAssetsAccumulatedAmortization>
	<us-gaap:FiniteLivedIntangibleAssetsAccumulatedAmortization contextRef="FI2014Q4_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_PatentedTechnologyMember" decimals="-3" id="Fact-AA581840B7027C8BC1D0F541C1143ECD" unitRef="usd">1682000</us-gaap:FiniteLivedIntangibleAssetsAccumulatedAmortization>
	<us-gaap:FiniteLivedIntangibleAssetsAccumulatedAmortization contextRef="FI2014Q4_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TradeNamesMember" decimals="-3" id="Fact-4A5D57EC439962E42DC2F541C115E334" unitRef="usd">0</us-gaap:FiniteLivedIntangibleAssetsAccumulatedAmortization>
	<us-gaap:FiniteLivedIntangibleAssetsAccumulatedAmortization contextRef="FI2015Q3" decimals="-3" id="Fact-1CB97F941D7B306BA4F8F541C11593D0" unitRef="usd">4092000</us-gaap:FiniteLivedIntangibleAssetsAccumulatedAmortization>
	<us-gaap:FiniteLivedIntangibleAssetsAccumulatedAmortization contextRef="FI2015Q3_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_CustomerListsMember" decimals="-3" id="Fact-4DB8509C4132368200F2F541C115792B" unitRef="usd">595000</us-gaap:FiniteLivedIntangibleAssetsAccumulatedAmortization>
	<us-gaap:FiniteLivedIntangibleAssetsAccumulatedAmortization contextRef="FI2015Q3_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_InProcessResearchAndDevelopmentMember" decimals="-3" id="Fact-FB8AF0A902F861185553F541C114FAB5" unitRef="usd">267000</us-gaap:FiniteLivedIntangibleAssetsAccumulatedAmortization>
	<us-gaap:FiniteLivedIntangibleAssetsAccumulatedAmortization contextRef="FI2015Q3_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_NoncompeteAgreementsMember" decimals="-3" id="Fact-3BC98407F2C27A0EA70FF541C115939C" unitRef="usd">1035000</us-gaap:FiniteLivedIntangibleAssetsAccumulatedAmortization>
	<us-gaap:FiniteLivedIntangibleAssetsAccumulatedAmortization contextRef="FI2015Q3_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_OtherIntangibleAssetsMember" decimals="-3" id="Fact-2FB6EB72957158021C09F541C11636E5" unitRef="usd">353000</us-gaap:FiniteLivedIntangibleAssetsAccumulatedAmortization>
	<us-gaap:FiniteLivedIntangibleAssetsAccumulatedAmortization contextRef="FI2015Q3_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_PatentedTechnologyMember" decimals="-3" id="Fact-D5009AE784154BC81FF6F541C1146416" unitRef="usd">1805000</us-gaap:FiniteLivedIntangibleAssetsAccumulatedAmortization>
	<us-gaap:FiniteLivedIntangibleAssetsAccumulatedAmortization contextRef="FI2015Q3_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TradeNamesMember" decimals="-3" id="Fact-146ADAD38B9A9C39D20EF541C116831B" unitRef="usd">37000</us-gaap:FiniteLivedIntangibleAssetsAccumulatedAmortization>
	<us-gaap:FiniteLivedIntangibleAssetsGross contextRef="FI2014Q4" decimals="-3" id="Fact-C529C96A0F240EC71A92F541C1164F57" unitRef="usd">6112000</us-gaap:FiniteLivedIntangibleAssetsGross>
	<us-gaap:FiniteLivedIntangibleAssetsGross contextRef="FI2014Q4_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_CustomerListsMember" decimals="-3" id="Fact-C2D946D4E51C211E8B5AF541C114D413" unitRef="usd">817000</us-gaap:FiniteLivedIntangibleAssetsGross>
	<us-gaap:FiniteLivedIntangibleAssetsGross contextRef="FI2014Q4_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_InProcessResearchAndDevelopmentMember" decimals="-3" id="Fact-9D0C8744710DE2E691D6F541C114B937" unitRef="usd">1600000</us-gaap:FiniteLivedIntangibleAssetsGross>
	<us-gaap:FiniteLivedIntangibleAssetsGross contextRef="FI2014Q4_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_NoncompeteAgreementsMember" decimals="-3" id="Fact-3A338E6330C4495592CDF541C11628F4" unitRef="usd">1055000</us-gaap:FiniteLivedIntangibleAssetsGross>
	<us-gaap:FiniteLivedIntangibleAssetsGross contextRef="FI2014Q4_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_OtherIntangibleAssetsMember" decimals="-3" id="Fact-13C3DFEC33F390032B20F541C115D5D7" unitRef="usd">321000</us-gaap:FiniteLivedIntangibleAssetsGross>
	<us-gaap:FiniteLivedIntangibleAssetsGross contextRef="FI2014Q4_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_PatentedTechnologyMember" decimals="-3" id="Fact-E6CA684AC93420AD10C1F541C116DF48" unitRef="usd">2319000</us-gaap:FiniteLivedIntangibleAssetsGross>
	<us-gaap:FiniteLivedIntangibleAssetsGross contextRef="FI2014Q4_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TradeNamesMember" decimals="-3" id="Fact-098801C5A09D3A5ED480F541C115AFA8" unitRef="usd">0</us-gaap:FiniteLivedIntangibleAssetsGross>
	<us-gaap:FiniteLivedIntangibleAssetsGross contextRef="FI2015Q3" decimals="-3" id="Fact-9C4C078F86D65551B598F541C115178E" unitRef="usd">9279000</us-gaap:FiniteLivedIntangibleAssetsGross>
	<us-gaap:FiniteLivedIntangibleAssetsGross contextRef="FI2015Q3_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_CustomerListsMember" decimals="-3" id="Fact-6D3E910D8797B780F9C2F541C1161C39" unitRef="usd">714000</us-gaap:FiniteLivedIntangibleAssetsGross>
	<us-gaap:FiniteLivedIntangibleAssetsGross contextRef="FI2015Q3_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_InProcessResearchAndDevelopmentMember" decimals="-3" id="Fact-A186757D7D5B56ACE252F541C115362D" unitRef="usd">1600000</us-gaap:FiniteLivedIntangibleAssetsGross>
	<us-gaap:FiniteLivedIntangibleAssetsGross contextRef="FI2015Q3_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_NoncompeteAgreementsMember" decimals="-3" id="Fact-680EE8DBED77E24949BDF541C1169FCF" unitRef="usd">1035000</us-gaap:FiniteLivedIntangibleAssetsGross>
	<us-gaap:FiniteLivedIntangibleAssetsGross contextRef="FI2015Q3_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_OtherIntangibleAssetsMember" decimals="-3" id="Fact-22ECFFBEAE07229ECE99F541C116EAEE" unitRef="usd">2484000</us-gaap:FiniteLivedIntangibleAssetsGross>
	<us-gaap:FiniteLivedIntangibleAssetsGross contextRef="FI2015Q3_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_PatentedTechnologyMember" decimals="-3" id="Fact-61045D548A10FB0FAD81F541C115E3AA" unitRef="usd">2116000</us-gaap:FiniteLivedIntangibleAssetsGross>
	<us-gaap:FiniteLivedIntangibleAssetsGross contextRef="FI2015Q3_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TradeNamesMember" decimals="-3" id="Fact-13B2958A60EA68D800AFF541C1160557" unitRef="usd">1330000</us-gaap:FiniteLivedIntangibleAssetsGross>
	<us-gaap:FiniteLivedIntangibleAssetsNet contextRef="FI2014Q4" decimals="-3" id="Fact-EF8B759144EF05CD04C7F541C116B0C3" unitRef="usd">2678000</us-gaap:FiniteLivedIntangibleAssetsNet>
	<us-gaap:FiniteLivedIntangibleAssetsNet contextRef="FI2014Q4_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_CustomerListsMember" decimals="-3" id="Fact-264FDD1C58CCA8054B28F541C116E839" unitRef="usd">225000</us-gaap:FiniteLivedIntangibleAssetsNet>
	<us-gaap:FiniteLivedIntangibleAssetsNet contextRef="FI2014Q4_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_InProcessResearchAndDevelopmentMember" decimals="-3" id="Fact-BD8160EEEE7EFFBD0894F541C11405E7" unitRef="usd">1573000</us-gaap:FiniteLivedIntangibleAssetsNet>
	<us-gaap:FiniteLivedIntangibleAssetsNet contextRef="FI2014Q4_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_NoncompeteAgreementsMember" decimals="-3" id="Fact-68DE95B11F4BDAE81096F541C115372A" unitRef="usd">100000</us-gaap:FiniteLivedIntangibleAssetsNet>
	<us-gaap:FiniteLivedIntangibleAssetsNet contextRef="FI2014Q4_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_OtherIntangibleAssetsMember" decimals="-3" id="Fact-FAE67A6571EC1E86EA12F541C1147EC3" unitRef="usd">143000</us-gaap:FiniteLivedIntangibleAssetsNet>
	<us-gaap:FiniteLivedIntangibleAssetsNet contextRef="FI2014Q4_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_PatentedTechnologyMember" decimals="-3" id="Fact-B2EDA319017D06D2FA75F541C1162E83" unitRef="usd">637000</us-gaap:FiniteLivedIntangibleAssetsNet>
	<us-gaap:FiniteLivedIntangibleAssetsNet contextRef="FI2014Q4_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TradeNamesMember" decimals="-3" id="Fact-47A9BE1E511E522A418AF541C116CF98" unitRef="usd">0</us-gaap:FiniteLivedIntangibleAssetsNet>
	<us-gaap:FiniteLivedIntangibleAssetsNet contextRef="FI2015Q3" decimals="-3" id="Fact-E16D4740EC135EE4B7C5F541C115CC8F" unitRef="usd">5187000</us-gaap:FiniteLivedIntangibleAssetsNet>
	<us-gaap:FiniteLivedIntangibleAssetsNet contextRef="FI2015Q3_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_CustomerListsMember" decimals="-3" id="Fact-0ED0141A9ED525D9A8B4F541C1151DF1" unitRef="usd">119000</us-gaap:FiniteLivedIntangibleAssetsNet>
	<us-gaap:FiniteLivedIntangibleAssetsNet contextRef="FI2015Q3_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_InProcessResearchAndDevelopmentMember" decimals="-3" id="Fact-AF5759875894658ABA26F541C11562CD" unitRef="usd">1333000</us-gaap:FiniteLivedIntangibleAssetsNet>
	<us-gaap:FiniteLivedIntangibleAssetsNet contextRef="FI2015Q3_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_NoncompeteAgreementsMember" decimals="-3" id="Fact-8608123B2523E58C084FF541C11504B0" unitRef="usd">0</us-gaap:FiniteLivedIntangibleAssetsNet>
	<us-gaap:FiniteLivedIntangibleAssetsNet contextRef="FI2015Q3_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_OtherIntangibleAssetsMember" decimals="-3" id="Fact-DB2B7DB49243FBA4E29EF541C11665E1" unitRef="usd">2131000</us-gaap:FiniteLivedIntangibleAssetsNet>
	<us-gaap:FiniteLivedIntangibleAssetsNet contextRef="FI2015Q3_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_PatentedTechnologyMember" decimals="-3" id="Fact-C6C8B0E2130429B08E96F541C1146F7D" unitRef="usd">311000</us-gaap:FiniteLivedIntangibleAssetsNet>
	<us-gaap:FiniteLivedIntangibleAssetsNet contextRef="FI2015Q3_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TradeNamesMember" decimals="-3" id="Fact-5F0BE69F3BA1695E392FF541C1154043" unitRef="usd">1293000</us-gaap:FiniteLivedIntangibleAssetsNet>
	<us-gaap:Goodwill contextRef="FI2014Q4" decimals="-3" id="Fact-2531C24A6773BA93F642F541C1143DF1" unitRef="usd">8323000</us-gaap:Goodwill>
	<us-gaap:Goodwill contextRef="FI2014Q4_us-gaap_StatementBusinessSegmentsAxis_asys_PolishingSuppliesAndEquipmentMember" decimals="-3" id="Fact-187DBB32F55A80B32BCBF541C112FF56" unitRef="usd">728000</us-gaap:Goodwill>
	<us-gaap:Goodwill contextRef="FI2014Q4_us-gaap_StatementBusinessSegmentsAxis_asys_SemiconductorEquipmentMember" decimals="-3" id="Fact-629DA8E4E795A8AE42DDF541C112A39C" unitRef="usd">0</us-gaap:Goodwill>
	<us-gaap:Goodwill contextRef="FI2014Q4_us-gaap_StatementBusinessSegmentsAxis_asys_SolarEquipmentMember" decimals="-3" id="Fact-706B876E4F4ECA5C15D7F541C1120FE1" unitRef="usd">7595000</us-gaap:Goodwill>
	<us-gaap:Goodwill contextRef="FI2015Q3" decimals="-3" id="Fact-8A8C42B113E7F37D7642F541C113CD43" unitRef="usd">15043000</us-gaap:Goodwill>
	<us-gaap:Goodwill contextRef="FI2015Q3_us-gaap_StatementBusinessSegmentsAxis_asys_PolishingSuppliesAndEquipmentMember" decimals="-3" id="Fact-E3FC952A3B209CC683ACF541C1122EE8" unitRef="usd">728000</us-gaap:Goodwill>
	<us-gaap:Goodwill contextRef="FI2015Q3_us-gaap_StatementBusinessSegmentsAxis_asys_SemiconductorEquipmentMember" decimals="-3" id="Fact-478CEE66E48AC77E8628F541C1136A47" unitRef="usd">4697000</us-gaap:Goodwill>
	<us-gaap:Goodwill contextRef="FI2015Q3_us-gaap_StatementBusinessSegmentsAxis_asys_SolarEquipmentMember" decimals="-3" id="Fact-B3B4EEA5DDCCA61E8C87F541C113A81E" unitRef="usd">9618000</us-gaap:Goodwill>
	<us-gaap:Goodwill contextRef="I2015Q2Jan30_us-gaap_BusinessAcquisitionAxis_asys_BTUInternationalIncBTUMergerMember" decimals="-3" id="Fact-BDF2C7BDE4253E0A313FF541C115980D" unitRef="usd">4697000</us-gaap:Goodwill>
	<us-gaap:GoodwillAcquiredDuringPeriod contextRef="FD2015Q3YTD" decimals="-3" id="Fact-190BD38639522E5BE0FFF541C112BE15" unitRef="usd">7021000</us-gaap:GoodwillAcquiredDuringPeriod>
	<us-gaap:GoodwillAcquiredDuringPeriod contextRef="FD2015Q3YTD_us-gaap_BusinessAcquisitionAxis_asys_BTUInternationalIncBTUMergerMember_us-gaap_StatementBusinessSegmentsAxis_asys_SemiconductorEquipmentMember" decimals="-3" id="Fact-2098633C6F3C1084C86DF541C1162C9F" unitRef="usd">4700000</us-gaap:GoodwillAcquiredDuringPeriod>
	<us-gaap:GoodwillAcquiredDuringPeriod contextRef="FD2015Q3YTD_us-gaap_StatementBusinessSegmentsAxis_asys_PolishingSuppliesAndEquipmentMember" decimals="-3" id="Fact-ED6AEA06EB72C8D116A8F541C1149FBD" unitRef="usd">0</us-gaap:GoodwillAcquiredDuringPeriod>
	<us-gaap:GoodwillAcquiredDuringPeriod contextRef="FD2015Q3YTD_us-gaap_StatementBusinessSegmentsAxis_asys_SemiconductorEquipmentMember" decimals="-3" id="Fact-6E26023E78ACC9438239F541C1133571" unitRef="usd">4697000</us-gaap:GoodwillAcquiredDuringPeriod>
	<us-gaap:GoodwillAcquiredDuringPeriod contextRef="FD2015Q3YTD_us-gaap_StatementBusinessSegmentsAxis_asys_SolarEquipmentMember" decimals="-3" id="Fact-4D845A38C2AF8E933E55F541C112CE4E" unitRef="usd">2324000</us-gaap:GoodwillAcquiredDuringPeriod>
	<us-gaap:GoodwillGross contextRef="FI2014Q4" decimals="-3" id="Fact-2F14C11540C4AC53AA0EF541C114CF59" unitRef="usd">13043000</us-gaap:GoodwillGross>
	<us-gaap:GoodwillGross contextRef="FI2014Q4_us-gaap_StatementBusinessSegmentsAxis_asys_PolishingSuppliesAndEquipmentMember" decimals="-3" id="Fact-E9D3E4DB5929439DF5B3F541C1124C26" unitRef="usd">728000</us-gaap:GoodwillGross>
	<us-gaap:GoodwillGross contextRef="FI2014Q4_us-gaap_StatementBusinessSegmentsAxis_asys_SemiconductorEquipmentMember" decimals="-3" id="Fact-68763325F1F62DB60DE8F541C11260B6" unitRef="usd">0</us-gaap:GoodwillGross>
	<us-gaap:GoodwillGross contextRef="FI2014Q4_us-gaap_StatementBusinessSegmentsAxis_asys_SolarEquipmentMember" decimals="-3" id="Fact-F1701915D5C61A5F8888F541C113AEFC" unitRef="usd">12315000</us-gaap:GoodwillGross>
	<us-gaap:GoodwillGross contextRef="FI2015Q3" decimals="-3" id="Fact-E671F47864A8EB3F6D89F541C1135BB7" unitRef="usd">19580000</us-gaap:GoodwillGross>
	<us-gaap:GoodwillGross contextRef="FI2015Q3_us-gaap_StatementBusinessSegmentsAxis_asys_PolishingSuppliesAndEquipmentMember" decimals="-3" id="Fact-19460538178FD6887B44F541C1129042" unitRef="usd">728000</us-gaap:GoodwillGross>
	<us-gaap:GoodwillGross contextRef="FI2015Q3_us-gaap_StatementBusinessSegmentsAxis_asys_SemiconductorEquipmentMember" decimals="-3" id="Fact-46F1D8903BE44A5C8030F541C112D145" unitRef="usd">4697000</us-gaap:GoodwillGross>
	<us-gaap:GoodwillGross contextRef="FI2015Q3_us-gaap_StatementBusinessSegmentsAxis_asys_SolarEquipmentMember" decimals="-3" id="Fact-498CC7C7FDF6B0E00EE2F541C113423B" unitRef="usd">14155000</us-gaap:GoodwillGross>
	<us-gaap:GoodwillImpairedAccumulatedImpairmentLoss contextRef="FI2014Q4" decimals="-3" id="Fact-C88D1901947B3681E850F541C11377DC" unitRef="usd">4720000</us-gaap:GoodwillImpairedAccumulatedImpairmentLoss>
	<us-gaap:GoodwillImpairedAccumulatedImpairmentLoss contextRef="FI2014Q4_us-gaap_StatementBusinessSegmentsAxis_asys_PolishingSuppliesAndEquipmentMember" decimals="-3" id="Fact-BC8443931AE2735D9EDDF541C1126F15" unitRef="usd">0</us-gaap:GoodwillImpairedAccumulatedImpairmentLoss>
	<us-gaap:GoodwillImpairedAccumulatedImpairmentLoss contextRef="FI2014Q4_us-gaap_StatementBusinessSegmentsAxis_asys_SemiconductorEquipmentMember" decimals="-3" id="Fact-248E1FD85226DDD61B67F541C11395CA" unitRef="usd">0</us-gaap:GoodwillImpairedAccumulatedImpairmentLoss>
	<us-gaap:GoodwillImpairedAccumulatedImpairmentLoss contextRef="FI2014Q4_us-gaap_StatementBusinessSegmentsAxis_asys_SolarEquipmentMember" decimals="-3" id="Fact-71E57116BA858A4E6B8BF541C112A625" unitRef="usd">4720000</us-gaap:GoodwillImpairedAccumulatedImpairmentLoss>
	<us-gaap:GoodwillImpairedAccumulatedImpairmentLoss contextRef="FI2015Q3" decimals="-3" id="Fact-9BD3A9A910066BDC6441F541C1126EBF" unitRef="usd">4537000</us-gaap:GoodwillImpairedAccumulatedImpairmentLoss>
	<us-gaap:GoodwillImpairedAccumulatedImpairmentLoss contextRef="FI2015Q3_us-gaap_StatementBusinessSegmentsAxis_asys_PolishingSuppliesAndEquipmentMember" decimals="-3" id="Fact-5CF564B59DFCD1280935F541C114D86C" unitRef="usd">0</us-gaap:GoodwillImpairedAccumulatedImpairmentLoss>
	<us-gaap:GoodwillImpairedAccumulatedImpairmentLoss contextRef="FI2015Q3_us-gaap_StatementBusinessSegmentsAxis_asys_SemiconductorEquipmentMember" decimals="-3" id="Fact-2C2AEABF6FEA8FD21A4AF541C113013D" unitRef="usd">0</us-gaap:GoodwillImpairedAccumulatedImpairmentLoss>
	<us-gaap:GoodwillImpairedAccumulatedImpairmentLoss contextRef="FI2015Q3_us-gaap_StatementBusinessSegmentsAxis_asys_SolarEquipmentMember" decimals="-3" id="Fact-D5DBE1C8C470419DB225F541C1137ABD" unitRef="usd">4537000</us-gaap:GoodwillImpairedAccumulatedImpairmentLoss>
	<us-gaap:GoodwillTranslationAdjustments contextRef="FD2015Q3YTD" decimals="-3" id="Fact-21F3BA27ED0BFEAAD5EDF541C113DB5A" unitRef="usd">-301000</us-gaap:GoodwillTranslationAdjustments>
	<us-gaap:GoodwillTranslationAdjustments contextRef="FD2015Q3YTD_us-gaap_StatementBusinessSegmentsAxis_asys_PolishingSuppliesAndEquipmentMember" decimals="-3" id="Fact-38BA17D0A8C4F0F9136AF541C1121630" unitRef="usd">0</us-gaap:GoodwillTranslationAdjustments>
	<us-gaap:GoodwillTranslationAdjustments contextRef="FD2015Q3YTD_us-gaap_StatementBusinessSegmentsAxis_asys_SemiconductorEquipmentMember" decimals="-3" id="Fact-71997D143713C21F9197F541C1130F69" unitRef="usd">0</us-gaap:GoodwillTranslationAdjustments>
	<us-gaap:GoodwillTranslationAdjustments contextRef="FD2015Q3YTD_us-gaap_StatementBusinessSegmentsAxis_asys_SolarEquipmentMember" decimals="-3" id="Fact-36C3D6175D1E4BDFED56F541C112A83A" unitRef="usd">-301000</us-gaap:GoodwillTranslationAdjustments>
	<us-gaap:GrossProfit contextRef="FD2014Q3QTD" decimals="-3" id="Fact-CA73B28A705EA3837917F541C11501CC" unitRef="usd">1631000</us-gaap:GrossProfit>
	<us-gaap:GrossProfit contextRef="FD2014Q3YTD" decimals="-3" id="Fact-4DD206D52DB34E1A7E36F541C117BCE8" unitRef="usd">9063000</us-gaap:GrossProfit>
	<us-gaap:GrossProfit contextRef="FD2015Q3QTD" decimals="-3" id="Fact-588DFFE66C3EB9DD810CF541C1184DE5" unitRef="usd">10128000</us-gaap:GrossProfit>
	<us-gaap:GrossProfit contextRef="FD2015Q3YTD" decimals="-3" id="Fact-E6153650BB0081584BD2F541C114B784" unitRef="usd">20445000</us-gaap:GrossProfit>
	<us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments contextRef="FD2014Q3QTD" decimals="-3" id="Fact-7DF4ABDAFE9082E7FB83F541C1163787" unitRef="usd">-3828000</us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments>
	<us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments contextRef="FD2014Q3YTD" decimals="-3" id="Fact-D072610CF04ACB1D1CE4F541C115AAAE" unitRef="usd">-8754000</us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments>
	<us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments contextRef="FD2015Q3QTD" decimals="-3" id="Fact-91F4C73885C12F4ED124F541C1166FF2" unitRef="usd">-1249000</us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments>
	<us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments contextRef="FD2015Q3YTD" decimals="-3" id="Fact-F40A63986816DCA40642F541C116C27D" unitRef="usd">-8097000</us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments>
	<us-gaap:IncomeTaxExpenseBenefit contextRef="FD2014Q3QTD" decimals="-3" id="Fact-4633B55E09EDEF2CB99CF541C10FD4EF" unitRef="usd">1325000</us-gaap:IncomeTaxExpenseBenefit>
	<us-gaap:IncomeTaxExpenseBenefit contextRef="FD2014Q3YTD" decimals="-3" id="Fact-2B16EBB4FA001CCC4A79F541C110E6C7" unitRef="usd">1885000</us-gaap:IncomeTaxExpenseBenefit>
	<us-gaap:IncomeTaxExpenseBenefit contextRef="FD2015Q3QTD" decimals="-3" id="Fact-7B5BEA7D555FD0C102C9F541C114675E" unitRef="usd">290000</us-gaap:IncomeTaxExpenseBenefit>
	<us-gaap:IncomeTaxExpenseBenefit contextRef="FD2015Q3YTD" decimals="-3" id="Fact-1AD202D4FA4F904A8F7BF541C110A135" unitRef="usd">640000</us-gaap:IncomeTaxExpenseBenefit>
	<us-gaap:IncomeTaxesPaid contextRef="FD2014Q3YTD" decimals="-3" id="Fact-54120921E12B1453A29CF541C116DF6B" unitRef="usd">0</us-gaap:IncomeTaxesPaid>
	<us-gaap:IncomeTaxesPaid contextRef="FD2015Q3YTD" decimals="-3" id="Fact-1571DE47335455368611F541C115E3D6" unitRef="usd">4775000</us-gaap:IncomeTaxesPaid>
	<us-gaap:IncomeTaxesReceivable contextRef="FI2014Q4" decimals="-3" id="Fact-315C0C242A57C2BBF04EF541C113A8E2" unitRef="usd">0</us-gaap:IncomeTaxesReceivable>
	<us-gaap:IncomeTaxesReceivable contextRef="FI2015Q3" decimals="-3" id="Fact-6E6AAC2C61FC63921A62F541C114DB70" unitRef="usd">300000</us-gaap:IncomeTaxesReceivable>
	<us-gaap:IncreaseDecreaseInAccountsPayable contextRef="FD2014Q3YTD" decimals="-3" id="Fact-25A487EAE8225C6C3563F541C1135E8A" unitRef="usd">1524000</us-gaap:IncreaseDecreaseInAccountsPayable>
	<us-gaap:IncreaseDecreaseInAccountsPayable contextRef="FD2015Q3YTD" decimals="-3" id="Fact-393253CD8823F7100472F541C11377EB" unitRef="usd">4514000</us-gaap:IncreaseDecreaseInAccountsPayable>
	<us-gaap:IncreaseDecreaseInAccountsReceivable contextRef="FD2014Q3YTD" decimals="-3" id="Fact-B462C8296D835F0E248FF541C1167886" unitRef="usd">10798000</us-gaap:IncreaseDecreaseInAccountsReceivable>
	<us-gaap:IncreaseDecreaseInAccountsReceivable contextRef="FD2015Q3YTD" decimals="-3" id="Fact-9126D21EB8BC5DEF5CB4F541C1197EF2" unitRef="usd">4193000</us-gaap:IncreaseDecreaseInAccountsReceivable>
	<us-gaap:IncreaseDecreaseInAccruedIncomeTaxesPayable contextRef="FD2014Q3YTD" decimals="-3" id="Fact-D6083C8EAACC93F4C419F541C118BED6" unitRef="usd">7648000</us-gaap:IncreaseDecreaseInAccruedIncomeTaxesPayable>
	<us-gaap:IncreaseDecreaseInAccruedIncomeTaxesPayable contextRef="FD2015Q3YTD" decimals="-3" id="Fact-28E54BBB3645550DF7A5F541C116FCB1" unitRef="usd">-5561000</us-gaap:IncreaseDecreaseInAccruedIncomeTaxesPayable>
	<us-gaap:IncreaseDecreaseInDeferredIncomeTaxes contextRef="FD2014Q3YTD" decimals="-3" id="Fact-62729F3662E9E6979EE8F541C1126347" unitRef="usd">-705000</us-gaap:IncreaseDecreaseInDeferredIncomeTaxes>
	<us-gaap:IncreaseDecreaseInDeferredIncomeTaxes contextRef="FD2015Q3YTD" decimals="-3" id="Fact-846CB3F0E0C693266D81F541C111D473" unitRef="usd">-914000</us-gaap:IncreaseDecreaseInDeferredIncomeTaxes>
	<us-gaap:IncreaseDecreaseInInventories contextRef="FD2014Q3YTD" decimals="-3" id="Fact-9BF02D19EDE8DEACF583F541C1152705" unitRef="usd">-3700000</us-gaap:IncreaseDecreaseInInventories>
	<us-gaap:IncreaseDecreaseInInventories contextRef="FD2015Q3YTD" decimals="-3" id="Fact-53D9C7A826EFC991D592F541C1135830" unitRef="usd">3460000</us-gaap:IncreaseDecreaseInInventories>
	<us-gaap:IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets contextRef="FD2014Q3YTD" decimals="-3" id="Fact-852008E16C4CEF30703CF541C10F573E" unitRef="usd">-958000</us-gaap:IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets>
	<us-gaap:IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets contextRef="FD2015Q3YTD" decimals="-3" id="Fact-6D5761007AD77609BFACF541C1132244" unitRef="usd">-639000</us-gaap:IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets>
	<us-gaap:IncreaseDecreaseInRestrictedCashForOperatingActivities contextRef="FD2014Q3YTD" decimals="-3" id="Fact-294152A23EA95660245FF541C10F9E7F" unitRef="usd">-2078000</us-gaap:IncreaseDecreaseInRestrictedCashForOperatingActivities>
	<us-gaap:IncreaseDecreaseInRestrictedCashForOperatingActivities contextRef="FD2015Q3YTD" decimals="-3" id="Fact-E9CF996DAF682AD840F0F541C11614E7" unitRef="usd">-888000</us-gaap:IncreaseDecreaseInRestrictedCashForOperatingActivities>
	<us-gaap:IntangibleAssetsNetExcludingGoodwill contextRef="FI2014Q4" decimals="-3" id="Fact-2069910325E7632C43DEF541C1163AA1" unitRef="usd">2678000</us-gaap:IntangibleAssetsNetExcludingGoodwill>
	<us-gaap:IntangibleAssetsNetExcludingGoodwill contextRef="FI2015Q3" decimals="-3" id="Fact-87F7E6ABDFDCA02C671CF541C117A8F4" unitRef="usd">5187000</us-gaap:IntangibleAssetsNetExcludingGoodwill>
	<us-gaap:InventoryFinishedGoodsNetOfReserves contextRef="FI2014Q4" decimals="-3" id="Fact-C180A799F2630BD42789F541C1186313" unitRef="usd">3154000</us-gaap:InventoryFinishedGoodsNetOfReserves>
	<us-gaap:InventoryFinishedGoodsNetOfReserves contextRef="FI2015Q3" decimals="-3" id="Fact-4F926B8C2ABF27F4E0A1F541C1187BC1" unitRef="usd">10059000</us-gaap:InventoryFinishedGoodsNetOfReserves>
	<us-gaap:InventoryNet contextRef="FI2014Q4" decimals="-3" id="Fact-2DB44C35EBC696C91631F541C114BB66" unitRef="usd">16760000</us-gaap:InventoryNet>
	<us-gaap:InventoryNet contextRef="FI2015Q3" decimals="-3" id="Fact-146F079B6ADE56AA23DAF541C1108872" unitRef="usd">29436000</us-gaap:InventoryNet>
	<us-gaap:InventoryRawMaterialsAndSuppliesNetOfReserves contextRef="FI2014Q4" decimals="-3" id="Fact-D3427FAE16A0AFEBE27CF541C1185D8E" unitRef="usd">8797000</us-gaap:InventoryRawMaterialsAndSuppliesNetOfReserves>
	<us-gaap:InventoryRawMaterialsAndSuppliesNetOfReserves contextRef="FI2015Q3" decimals="-3" id="Fact-D7F520DE31696FB1D076F541C118B2B5" unitRef="usd">13129000</us-gaap:InventoryRawMaterialsAndSuppliesNetOfReserves>
	<us-gaap:InventoryWorkInProcessNetOfReserves contextRef="FI2014Q4" decimals="-3" id="Fact-4D267C645575FB5242A5F541C11887A9" unitRef="usd">4809000</us-gaap:InventoryWorkInProcessNetOfReserves>
	<us-gaap:InventoryWorkInProcessNetOfReserves contextRef="FI2015Q3" decimals="-3" id="Fact-4C31C5DA61BB9AD619F9F541C118B6E7" unitRef="usd">6248000</us-gaap:InventoryWorkInProcessNetOfReserves>
	<us-gaap:InventoryWriteDown contextRef="FD2014Q3YTD" decimals="-3" id="Fact-36FB46C0E4C6601021A8F541C1164AD0" unitRef="usd">199000</us-gaap:InventoryWriteDown>
	<us-gaap:InventoryWriteDown contextRef="FD2015Q3YTD" decimals="-3" id="Fact-9658ECB4DA2474BEC8E6F541C112EF29" unitRef="usd">31000</us-gaap:InventoryWriteDown>
	<us-gaap:LettersOfCreditOutstandingAmount contextRef="FI2015Q3_us-gaap_BusinessAcquisitionAxis_asys_BTUInternationalIncBTUMergerMember_us-gaap_LossContingenciesByNatureOfContingencyAxis_us-gaap_LossFromCatastrophesMember" decimals="-5" id="Fact-801F74EED2993711D4C3F541C111011E" unitRef="usd">200000</us-gaap:LettersOfCreditOutstandingAmount>
	<us-gaap:Liabilities contextRef="FI2014Q4" decimals="-3" id="Fact-3ECF43F61A13FCE412F5F541C11227E7" unitRef="usd">36316000</us-gaap:Liabilities>
	<us-gaap:Liabilities contextRef="FI2015Q3" decimals="-3" id="Fact-A64E856BAC62279685D2F541C1169ACD" unitRef="usd">62465000</us-gaap:Liabilities>
	<us-gaap:LiabilitiesAndStockholdersEquity contextRef="FI2014Q4" decimals="-3" id="Fact-67E69A89DEC28A1664A9F541C1169537" unitRef="usd">89904000</us-gaap:LiabilitiesAndStockholdersEquity>
	<us-gaap:LiabilitiesAndStockholdersEquity contextRef="FI2015Q3" decimals="-3" id="Fact-C15527F20705FF76AC4CF541C1172831" unitRef="usd">134055000</us-gaap:LiabilitiesAndStockholdersEquity>
	<us-gaap:LiabilitiesCurrent contextRef="FI2014Q4" decimals="-3" id="Fact-418DDFE6C4A0AA636BD9F541C11511B5" unitRef="usd">33136000</us-gaap:LiabilitiesCurrent>
	<us-gaap:LiabilitiesCurrent contextRef="FI2015Q3" decimals="-3" id="Fact-82068D2DE343FF591AB1F541C1184FCC" unitRef="usd">48706000</us-gaap:LiabilitiesCurrent>
	<us-gaap:LiabilityForUncertainTaxPositionsNoncurrent contextRef="FI2014Q4" decimals="-3" id="Fact-936C74FEA28593BDA258F541C116E870" unitRef="usd">3180000</us-gaap:LiabilityForUncertainTaxPositionsNoncurrent>
	<us-gaap:LiabilityForUncertainTaxPositionsNoncurrent contextRef="FI2015Q3" decimals="-3" id="Fact-F9EC7B86FE52D361E08EF541C1178B7D" unitRef="usd">4890000</us-gaap:LiabilityForUncertainTaxPositionsNoncurrent>
	<us-gaap:LongTermDebt contextRef="FI2015Q3_us-gaap_BusinessAcquisitionAxis_asys_BTUInternationalIncBTUMergerMember" decimals="-5" id="Fact-1C9234214E79165022B7F541C115BB6E" unitRef="usd">7000000</us-gaap:LongTermDebt>
	<us-gaap:LongTermDebt contextRef="FI2015Q3_us-gaap_BusinessAcquisitionAxis_asys_SoLayTecB.V.Member" decimals="-5" id="Fact-3F706C40F70AE7CFEBB8F541C111D2E4" unitRef="usd">2300000</us-gaap:LongTermDebt>
	<us-gaap:LongTermDebtCurrent contextRef="FI2014Q4" decimals="-3" id="Fact-1CECE2E1FD1E07032A6DF541C11889D7" unitRef="usd">0</us-gaap:LongTermDebtCurrent>
	<us-gaap:LongTermDebtCurrent contextRef="FI2015Q3" decimals="-3" id="Fact-1ED4713CFEE8E22130E8F541C1182B2E" unitRef="usd">692000</us-gaap:LongTermDebtCurrent>
	<us-gaap:LongTermDebtNoncurrent contextRef="FI2014Q4" decimals="-3" id="Fact-4A4A490699A6AB3F4EFCF541C1183BAE" unitRef="usd">0</us-gaap:LongTermDebtNoncurrent>
	<us-gaap:LongTermDebtNoncurrent contextRef="FI2015Q3" decimals="-3" id="Fact-6F07D9E98872FA222B53F541C1170F48" unitRef="usd">8619000</us-gaap:LongTermDebtNoncurrent>
	<us-gaap:LossContingencyAccrualAtCarryingValue contextRef="FI2015Q3_us-gaap_BusinessAcquisitionAxis_asys_BTUInternationalIncBTUMergerMember_us-gaap_LossContingenciesByNatureOfContingencyAxis_us-gaap_LossFromCatastrophesMember" decimals="-5" id="Fact-66AF9EFBC3BA3B6A2696F541C1115E1A" unitRef="usd">100000</us-gaap:LossContingencyAccrualAtCarryingValue>
	<us-gaap:LossContingencyAccrualAtCarryingValue contextRef="I2015Q2Jan30_us-gaap_BusinessAcquisitionAxis_asys_BTUInternationalIncBTUMergerMember_us-gaap_LossContingenciesByNatureOfContingencyAxis_us-gaap_LossFromCatastrophesMember" decimals="-5" id="Fact-E54157E2BCFCBF6D53F1F541C113F83C" unitRef="usd">200000</us-gaap:LossContingencyAccrualAtCarryingValue>
	<us-gaap:MinorityInterest contextRef="FI2014Q4" decimals="-3" id="Fact-D5F9058987DBB78A1E91F541C113F9E6" unitRef="usd">-1553000</us-gaap:MinorityInterest>
	<us-gaap:MinorityInterest contextRef="FI2015Q3" decimals="-3" id="Fact-4466125D1C574D96D68AF541C11189DD" unitRef="usd">470000</us-gaap:MinorityInterest>
	<us-gaap:MoneyMarketFundsAtCarryingValue contextRef="FI2014Q4" decimals="-5" id="Fact-6035CD4E19DCD37F1FB2F541C113FDBC" unitRef="usd">17000000</us-gaap:MoneyMarketFundsAtCarryingValue>
	<us-gaap:MoneyMarketFundsAtCarryingValue contextRef="FI2015Q3" decimals="-5" id="Fact-B28BF75596C96A7ECF8EF541C11600B6" unitRef="usd">9600000</us-gaap:MoneyMarketFundsAtCarryingValue>
	<us-gaap:NetCashProvidedByUsedInFinancingActivities contextRef="FD2014Q3YTD" decimals="-3" id="Fact-1BA89C74026886FF42CEF541C111EDBC" unitRef="usd">1236000</us-gaap:NetCashProvidedByUsedInFinancingActivities>
	<us-gaap:NetCashProvidedByUsedInFinancingActivities contextRef="FD2015Q3YTD" decimals="-3" id="Fact-25E07C4BB5B8ED6F5323F541C1108888" unitRef="usd">797000</us-gaap:NetCashProvidedByUsedInFinancingActivities>
	<us-gaap:NetCashProvidedByUsedInInvestingActivities contextRef="FD2014Q3YTD" decimals="-3" id="Fact-8F371FA85E0166290EFFF541C11826D6" unitRef="usd">-214000</us-gaap:NetCashProvidedByUsedInInvestingActivities>
	<us-gaap:NetCashProvidedByUsedInInvestingActivities contextRef="FD2015Q3YTD" decimals="-3" id="Fact-90E02954D3B1D5CCC1C4F541C1142FF6" unitRef="usd">8084000</us-gaap:NetCashProvidedByUsedInInvestingActivities>
	<us-gaap:NetCashProvidedByUsedInOperatingActivities contextRef="FD2014Q3YTD" decimals="-3" id="Fact-57D02B4F27665E94C0AEF541C11775E2" unitRef="usd">-6756000</us-gaap:NetCashProvidedByUsedInOperatingActivities>
	<us-gaap:NetCashProvidedByUsedInOperatingActivities contextRef="FD2015Q3YTD" decimals="-3" id="Fact-571801B269A8DA24D55BF541C1139811" unitRef="usd">-12374000</us-gaap:NetCashProvidedByUsedInOperatingActivities>
	<us-gaap:NetIncomeLoss contextRef="FD2014Q3QTD" decimals="-3" id="Fact-665121BF4B3865AAD398F541C11289C4" unitRef="usd">-5257000</us-gaap:NetIncomeLoss>
	<us-gaap:NetIncomeLoss contextRef="FD2014Q3YTD" decimals="-3" id="Fact-B9AB4CFA444CA3EF8C7DF541C113C0D7" unitRef="usd">-9802000</us-gaap:NetIncomeLoss>
	<us-gaap:NetIncomeLoss contextRef="FD2015Q3QTD" decimals="-3" id="Fact-EFB175DE9816E7CE31BEF541C1195425" unitRef="usd">-1604000</us-gaap:NetIncomeLoss>
	<us-gaap:NetIncomeLoss contextRef="FD2015Q3YTD" decimals="-3" id="Fact-B2CE5FE22C62635C5E05F541C1132909" unitRef="usd">-9119000</us-gaap:NetIncomeLoss>
	<us-gaap:NetIncomeLossAttributableToNoncontrollingInterest contextRef="FD2014Q3QTD" decimals="-3" id="Fact-0526148D39C99B91E904F541C11512BA" unitRef="usd">104000</us-gaap:NetIncomeLossAttributableToNoncontrollingInterest>
	<us-gaap:NetIncomeLossAttributableToNoncontrollingInterest contextRef="FD2014Q3YTD" decimals="-3" id="Fact-13E54B7D17875DF7A4FDF541C116F62F" unitRef="usd">-837000</us-gaap:NetIncomeLossAttributableToNoncontrollingInterest>
	<us-gaap:NetIncomeLossAttributableToNoncontrollingInterest contextRef="FD2015Q3QTD" decimals="-3" id="Fact-8F5FDA3D233B186678B7F541C118B396" unitRef="usd">65000</us-gaap:NetIncomeLossAttributableToNoncontrollingInterest>
	<us-gaap:NetIncomeLossAttributableToNoncontrollingInterest contextRef="FD2015Q3YTD" decimals="-3" id="Fact-6F4554FA2BB793423DB8F541C119CC03" unitRef="usd">382000</us-gaap:NetIncomeLossAttributableToNoncontrollingInterest>
	<us-gaap:NoncashOrPartNoncashAcquisitionNoncashFinancialOrEquityInstrumentConsiderationSharesIssued1 contextRef="D2015Q2Jan30_us-gaap_BusinessAcquisitionAxis_asys_BTUInternationalIncBTUMergerMember" decimals="-3" id="Fact-66679C25D9941FFA8254F541C1110B31" unitRef="shares">3186000</us-gaap:NoncashOrPartNoncashAcquisitionNoncashFinancialOrEquityInstrumentConsiderationSharesIssued1>
	<us-gaap:NumberOfOperatingSegments contextRef="FD2015Q3YTD" decimals="INF" id="Fact-41130B91562C6712D898F541C110A519" unitRef="segment">3</us-gaap:NumberOfOperatingSegments>
	<us-gaap:OperatingIncomeLoss contextRef="FD2014Q3QTD" decimals="-3" id="Fact-9DC4326177A6149795FCF541C110991B" unitRef="usd">-3871000</us-gaap:OperatingIncomeLoss>
	<us-gaap:OperatingIncomeLoss contextRef="FD2014Q3QTD_us-gaap_StatementBusinessSegmentsAxis_asys_PolishingSuppliesAndEquipmentMember" decimals="-3" id="Fact-6489F437692070BC378EF541C110DD89" unitRef="usd">654000</us-gaap:OperatingIncomeLoss>
	<us-gaap:OperatingIncomeLoss contextRef="FD2014Q3QTD_us-gaap_StatementBusinessSegmentsAxis_asys_SemiconductorEquipmentMember" decimals="-3" id="Fact-C2AB1CC74F5EBDB2C885F541C1111721" unitRef="usd">179000</us-gaap:OperatingIncomeLoss>
	<us-gaap:OperatingIncomeLoss contextRef="FD2014Q3QTD_us-gaap_StatementBusinessSegmentsAxis_asys_SolarEquipmentMember" decimals="-3" id="Fact-545739D8B61DF637236BF541C111E51D" unitRef="usd">-3425000</us-gaap:OperatingIncomeLoss>
	<us-gaap:OperatingIncomeLoss contextRef="FD2014Q3QTD_us-gaap_StatementBusinessSegmentsAxis_us-gaap_MaterialReconcilingItemsMember" decimals="-3" id="Fact-A5D4200AC38A671D66EAF541C110B467" unitRef="usd">-1279000</us-gaap:OperatingIncomeLoss>
	<us-gaap:OperatingIncomeLoss contextRef="FD2014Q3YTD" decimals="-3" id="Fact-46A36354D6AE9E9E414FF541C10F6E78" unitRef="usd">-8884000</us-gaap:OperatingIncomeLoss>
	<us-gaap:OperatingIncomeLoss contextRef="FD2014Q3YTD_us-gaap_StatementBusinessSegmentsAxis_asys_PolishingSuppliesAndEquipmentMember" decimals="-3" id="Fact-A7E3617C7EA4C3F93C89F541C111D0F4" unitRef="usd">1622000</us-gaap:OperatingIncomeLoss>
	<us-gaap:OperatingIncomeLoss contextRef="FD2014Q3YTD_us-gaap_StatementBusinessSegmentsAxis_asys_SemiconductorEquipmentMember" decimals="-3" id="Fact-CB3BB1F25425078B66E6F541C111923E" unitRef="usd">927000</us-gaap:OperatingIncomeLoss>
	<us-gaap:OperatingIncomeLoss contextRef="FD2014Q3YTD_us-gaap_StatementBusinessSegmentsAxis_asys_SolarEquipmentMember" decimals="-3" id="Fact-40A8876D7BD3DF15C714F541C1119E9E" unitRef="usd">-7751000</us-gaap:OperatingIncomeLoss>
	<us-gaap:OperatingIncomeLoss contextRef="FD2014Q3YTD_us-gaap_StatementBusinessSegmentsAxis_us-gaap_MaterialReconcilingItemsMember" decimals="-3" id="Fact-005E217F2CBE5EC7717EF541C111C433" unitRef="usd">-3682000</us-gaap:OperatingIncomeLoss>
	<us-gaap:OperatingIncomeLoss contextRef="FD2015Q3QTD" decimals="-3" id="Fact-648BDB8D8AAF74DFC2B8F541C1167FBE" unitRef="usd">-1234000</us-gaap:OperatingIncomeLoss>
	<us-gaap:OperatingIncomeLoss contextRef="FD2015Q3QTD_us-gaap_StatementBusinessSegmentsAxis_asys_PolishingSuppliesAndEquipmentMember" decimals="-3" id="Fact-E64B83CA181A73B1CA77F541C1103EEF" unitRef="usd">574000</us-gaap:OperatingIncomeLoss>
	<us-gaap:OperatingIncomeLoss contextRef="FD2015Q3QTD_us-gaap_StatementBusinessSegmentsAxis_asys_SemiconductorEquipmentMember" decimals="-3" id="Fact-320B40C6607D7A63A8C6F541C111C145" unitRef="usd">-1113000</us-gaap:OperatingIncomeLoss>
	<us-gaap:OperatingIncomeLoss contextRef="FD2015Q3QTD_us-gaap_StatementBusinessSegmentsAxis_asys_SolarEquipmentMember" decimals="-3" id="Fact-77B9E1BE36171CFD9177F541C110D130" unitRef="usd">1232000</us-gaap:OperatingIncomeLoss>
	<us-gaap:OperatingIncomeLoss contextRef="FD2015Q3QTD_us-gaap_StatementBusinessSegmentsAxis_us-gaap_MaterialReconcilingItemsMember" decimals="-3" id="Fact-1BDA7AD8A6D452CDB6A0F541C110132B" unitRef="usd">-1927000</us-gaap:OperatingIncomeLoss>
	<us-gaap:OperatingIncomeLoss contextRef="FD2015Q3YTD" decimals="-3" id="Fact-2EFB23B2C3763460DC83F541C115085B" unitRef="usd">-7962000</us-gaap:OperatingIncomeLoss>
	<us-gaap:OperatingIncomeLoss contextRef="FD2015Q3YTD_us-gaap_StatementBusinessSegmentsAxis_asys_PolishingSuppliesAndEquipmentMember" decimals="-3" id="Fact-48B260B97ECC0ACCD59BF541C111CD32" unitRef="usd">1917000</us-gaap:OperatingIncomeLoss>
	<us-gaap:OperatingIncomeLoss contextRef="FD2015Q3YTD_us-gaap_StatementBusinessSegmentsAxis_asys_SemiconductorEquipmentMember" decimals="-3" id="Fact-FD42733A790A7F26AE67F541C1108FB4" unitRef="usd">-483000</us-gaap:OperatingIncomeLoss>
	<us-gaap:OperatingIncomeLoss contextRef="FD2015Q3YTD_us-gaap_StatementBusinessSegmentsAxis_asys_SolarEquipmentMember" decimals="-3" id="Fact-C813D1D78DE0B6741414F541C1109432" unitRef="usd">-1987000</us-gaap:OperatingIncomeLoss>
	<us-gaap:OperatingIncomeLoss contextRef="FD2015Q3YTD_us-gaap_StatementBusinessSegmentsAxis_us-gaap_MaterialReconcilingItemsMember" decimals="-3" id="Fact-97001327BCA8FE31FA8AF541C10F3D3F" unitRef="usd">-7409000</us-gaap:OperatingIncomeLoss>
	<us-gaap:OtherAssetsCurrent contextRef="FI2014Q4" decimals="-3" id="Fact-C1DC461652D63F19330FF541C115C29D" unitRef="usd">2082000</us-gaap:OtherAssetsCurrent>
	<us-gaap:OtherAssetsCurrent contextRef="FI2015Q3" decimals="-3" id="Fact-BFEA3D58E032F85D6CA5F541C112F751" unitRef="usd">3967000</us-gaap:OtherAssetsCurrent>
	<us-gaap:OtherAssetsNoncurrent contextRef="FI2014Q4" decimals="-3" id="Fact-915B224E48DAB2FAF1C6F541C113F05C" unitRef="usd">2426000</us-gaap:OtherAssetsNoncurrent>
	<us-gaap:OtherAssetsNoncurrent contextRef="FI2015Q3" decimals="-3" id="Fact-8BF2A9F7A1C36A31238EF541C1105237" unitRef="usd">3300000</us-gaap:OtherAssetsNoncurrent>
	<us-gaap:OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax contextRef="FD2014Q3QTD" decimals="-3" id="Fact-87F94D02E9B90E8430F7F541C1181B7D" unitRef="usd">-335000</us-gaap:OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax>
	<us-gaap:OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax contextRef="FD2014Q3YTD" decimals="-3" id="Fact-B05506387EE1AA75B615F541C10F9146" unitRef="usd">406000</us-gaap:OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax>
	<us-gaap:OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax contextRef="FD2015Q3QTD" decimals="-3" id="Fact-6ECBCBAFB4D87A312BB5F541C1157C13" unitRef="usd">213000</us-gaap:OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax>
	<us-gaap:OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax contextRef="FD2015Q3YTD" decimals="-3" id="Fact-C29CC5BFF436F0092670F541C1155B08" unitRef="usd">-3168000</us-gaap:OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax>
	<us-gaap:OtherDeferredCreditsCurrent contextRef="FI2014Q4" decimals="-3" id="Fact-5F948CEFE2CE1A48E86AF541C1121624" unitRef="usd">6908000</us-gaap:OtherDeferredCreditsCurrent>
	<us-gaap:OtherDeferredCreditsCurrent contextRef="FI2015Q3" decimals="-3" id="Fact-938E13416AFD6980A384F541C1157485" unitRef="usd">5120000</us-gaap:OtherDeferredCreditsCurrent>
	<us-gaap:OtherNonoperatingIncomeExpense contextRef="FD2014Q3QTD" decimals="-3" id="Fact-21A33DEBF65EA9C14580F541C11596B1" unitRef="usd">43000</us-gaap:OtherNonoperatingIncomeExpense>
	<us-gaap:OtherNonoperatingIncomeExpense contextRef="FD2014Q3YTD" decimals="-3" id="Fact-D065173B66151FAC9F81F541C10E39CB" unitRef="usd">130000</us-gaap:OtherNonoperatingIncomeExpense>
	<us-gaap:OtherNonoperatingIncomeExpense contextRef="FD2015Q3QTD" decimals="-3" id="Fact-4B73F4FDDFEDB6FF4709F541C1102075" unitRef="usd">-15000</us-gaap:OtherNonoperatingIncomeExpense>
	<us-gaap:OtherNonoperatingIncomeExpense contextRef="FD2015Q3YTD" decimals="-3" id="Fact-FEF75DFE18A25F49C446F541C115D61A" unitRef="usd">-135000</us-gaap:OtherNonoperatingIncomeExpense>
	<us-gaap:PaymentsToAcquireBusinessesGross contextRef="D2015Q1Dec24_us-gaap_BusinessAcquisitionAxis_asys_SoLayTecB.V.Member" decimals="-5" id="Fact-3F487735A27F598656ADF541C114F085" unitRef="usd">1900000</us-gaap:PaymentsToAcquireBusinessesGross>
	<us-gaap:PaymentsToAcquirePropertyPlantAndEquipment contextRef="FD2014Q3YTD" decimals="-3" id="Fact-DA3CD59E88EF20E16D71F541C11550CC" unitRef="usd">214000</us-gaap:PaymentsToAcquirePropertyPlantAndEquipment>
	<us-gaap:PaymentsToAcquirePropertyPlantAndEquipment contextRef="FD2015Q3YTD" decimals="-3" id="Fact-EBD799430150987C9EAFF541C10F60C2" unitRef="usd">511000</us-gaap:PaymentsToAcquirePropertyPlantAndEquipment>
	<us-gaap:PaymentsToAcquirePropertyPlantAndEquipment contextRef="FD2015Q3YTD_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis_asys_TempressSystemsandEnergyResearchCentreAgreementMember" decimals="-5" id="Fact-AD93BF4EE4A4D9C0C13BF541C112E2D1" unitRef="usd">1400000</us-gaap:PaymentsToAcquirePropertyPlantAndEquipment>
	<us-gaap:PercentageOfWeightedAverageCostInventory contextRef="FI2014Q4" decimals="2" id="Fact-429C50D3627B95367C33F541C114EA96" unitRef="number">0.70</us-gaap:PercentageOfWeightedAverageCostInventory>
	<us-gaap:PercentageOfWeightedAverageCostInventory contextRef="FI2015Q3" decimals="2" id="Fact-1C966D036EACA157C3BDF541C118D04D" unitRef="number">0.50</us-gaap:PercentageOfWeightedAverageCostInventory>
	<us-gaap:PreferredStockSharesAuthorized contextRef="FI2014Q4" decimals="INF" id="Fact-F5ECD33BD38D83A64701F541C114A908" unitRef="shares">100000000</us-gaap:PreferredStockSharesAuthorized>
	<us-gaap:PreferredStockSharesAuthorized contextRef="FI2015Q3" decimals="INF" id="Fact-8E07D57F7CA80C18AFF5F541C1142537" unitRef="shares">100000000</us-gaap:PreferredStockSharesAuthorized>
	<us-gaap:PreferredStockSharesIssued contextRef="FI2014Q4" decimals="INF" id="Fact-328CC50786E1530F97ABF541C1143C5C" unitRef="shares">0</us-gaap:PreferredStockSharesIssued>
	<us-gaap:PreferredStockSharesIssued contextRef="FI2015Q3" decimals="INF" id="Fact-52770031DD2F349750F3F541C1158C42" unitRef="shares">0</us-gaap:PreferredStockSharesIssued>
	<us-gaap:PreferredStockValue contextRef="FI2014Q4" decimals="-3" id="Fact-547F7BD9DC3CD8779AE0F541C11030FC" unitRef="usd">0</us-gaap:PreferredStockValue>
	<us-gaap:PreferredStockValue contextRef="FI2015Q3" decimals="-3" id="Fact-72385B3CFA5CBA5DCF11F541C112D2FE" unitRef="usd">0</us-gaap:PreferredStockValue>
	<us-gaap:ProceedsFromCollectionOfNotesReceivable contextRef="D2015Q4Jul_us-gaap_DebtInstrumentAxis_asys_SolarToolLoanAgreementMember_us-gaap_RestructuringPlanAxis_asys_RestructuringOfInvestmentInvestmentAgreementMember_us-gaap_SubsequentEventTypeAxis_us-gaap_SubsequentEventMember" decimals="-6" id="Fact-FCBCD22026EACF37F889F5BE19ACE8B4" unitRef="usd">4000000</us-gaap:ProceedsFromCollectionOfNotesReceivable>
	<us-gaap:ProceedsFromIncomeTaxRefunds contextRef="FD2014Q3YTD" decimals="-3" id="Fact-7F53D6E20D7FC8C31A7EF541C114AB92" unitRef="usd">6779000</us-gaap:ProceedsFromIncomeTaxRefunds>
	<us-gaap:ProceedsFromIncomeTaxRefunds contextRef="FD2015Q3YTD" decimals="-3" id="Fact-B42077D918146BC900EEF541C10F7134" unitRef="usd">0</us-gaap:ProceedsFromIncomeTaxRefunds>
	<us-gaap:ProceedsFromIssuanceOfCommonStock contextRef="FD2014Q3YTD" decimals="-3" id="Fact-CFC1806FC8702FB89351F541C1163F1F" unitRef="usd">1136000</us-gaap:ProceedsFromIssuanceOfCommonStock>
	<us-gaap:ProceedsFromIssuanceOfCommonStock contextRef="FD2015Q3YTD" decimals="-3" id="Fact-3F5407D80F325C5B71ADF541C113EF1B" unitRef="usd">521000</us-gaap:ProceedsFromIssuanceOfCommonStock>
	<us-gaap:ProceedsFromIssuanceOfLongTermDebt contextRef="FD2014Q3YTD" decimals="-3" id="Fact-43963598F09AE5426183F541C1133387" unitRef="usd">0</us-gaap:ProceedsFromIssuanceOfLongTermDebt>
	<us-gaap:ProceedsFromIssuanceOfLongTermDebt contextRef="FD2015Q3YTD" decimals="-3" id="Fact-589A07ED2C0F3DB9989DF541C113D469" unitRef="usd">557000</us-gaap:ProceedsFromIssuanceOfLongTermDebt>
	<us-gaap:ProductWarrantyAccrualClassifiedCurrent contextRef="FI2013Q4" decimals="-3" id="Fact-F607F01D62A85DCFCC5DF541C1198020" unitRef="usd">1454000</us-gaap:ProductWarrantyAccrualClassifiedCurrent>
	<us-gaap:ProductWarrantyAccrualClassifiedCurrent contextRef="FI2014Q3" decimals="-3" id="Fact-913DBBC7690BC9489EF1F541C118896C" unitRef="usd">766000</us-gaap:ProductWarrantyAccrualClassifiedCurrent>
	<us-gaap:ProductWarrantyAccrualClassifiedCurrent contextRef="FI2014Q4" decimals="-3" id="Fact-CB5B89FC6690DD73817CF541C1180664" unitRef="usd">628000</us-gaap:ProductWarrantyAccrualClassifiedCurrent>
	<us-gaap:ProductWarrantyAccrualClassifiedCurrent contextRef="FI2015Q3" decimals="-3" id="Fact-F5339E87CA5E442CF6C2F541C118EA7E" unitRef="usd">1023000</us-gaap:ProductWarrantyAccrualClassifiedCurrent>
	<us-gaap:ProfitLoss contextRef="FD2014Q3QTD" decimals="-3" id="Fact-5A7EA3CA1EFED42AE030F541C111AB0F" unitRef="usd">-5153000</us-gaap:ProfitLoss>
	<us-gaap:ProfitLoss contextRef="FD2014Q3YTD" decimals="-3" id="Fact-571207C0D8C73266C3BEF541C1163731" unitRef="usd">-10639000</us-gaap:ProfitLoss>
	<us-gaap:ProfitLoss contextRef="FD2015Q3QTD" decimals="-3" id="Fact-661132AAFB75D333A616F541C1183BEB" unitRef="usd">-1539000</us-gaap:ProfitLoss>
	<us-gaap:ProfitLoss contextRef="FD2015Q3YTD" decimals="-3" id="Fact-1835C6696E49F5F6954AF541C1107787" unitRef="usd">-8737000</us-gaap:ProfitLoss>
	<us-gaap:PropertyPlantAndEquipmentGross contextRef="FI2014Q4" decimals="-3" id="Fact-6DC9D2997DD627D2D3FBF541C11368B8" unitRef="usd">24056000</us-gaap:PropertyPlantAndEquipmentGross>
	<us-gaap:PropertyPlantAndEquipmentGross contextRef="FI2014Q4_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_FurnitureAndFixturesMember" decimals="-3" id="Fact-920F36C4E6BB2708B68CF541C1139A16" unitRef="usd">5453000</us-gaap:PropertyPlantAndEquipmentGross>
	<us-gaap:PropertyPlantAndEquipmentGross contextRef="FI2014Q4_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LandBuildingsAndImprovementsMember" decimals="-3" id="Fact-9F5FFDFB0D76F61D6B28F541C1139857" unitRef="usd">10414000</us-gaap:PropertyPlantAndEquipmentGross>
	<us-gaap:PropertyPlantAndEquipmentGross contextRef="FI2014Q4_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_MachineryAndEquipmentMember" decimals="-3" id="Fact-DAFCD226DCD173B76000F541C113F84A" unitRef="usd">8189000</us-gaap:PropertyPlantAndEquipmentGross>
	<us-gaap:PropertyPlantAndEquipmentGross contextRef="FI2015Q3" decimals="-3" id="Fact-C7099654C016652754E1F541C1134A10" unitRef="usd">35259000</us-gaap:PropertyPlantAndEquipmentGross>
	<us-gaap:PropertyPlantAndEquipmentGross contextRef="FI2015Q3_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_FurnitureAndFixturesMember" decimals="-3" id="Fact-A8EEEFDD6A1144D76758F541C1133102" unitRef="usd">5418000</us-gaap:PropertyPlantAndEquipmentGross>
	<us-gaap:PropertyPlantAndEquipmentGross contextRef="FI2015Q3_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LandBuildingsAndImprovementsMember" decimals="-3" id="Fact-8B42EC6BACD3A891CED3F541C113DBC7" unitRef="usd">18137000</us-gaap:PropertyPlantAndEquipmentGross>
	<us-gaap:PropertyPlantAndEquipmentGross contextRef="FI2015Q3_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_MachineryAndEquipmentMember" decimals="-3" id="Fact-9CE0331277E0C7E0DD3DF541C114EA0C" unitRef="usd">11704000</us-gaap:PropertyPlantAndEquipmentGross>
	<us-gaap:PropertyPlantAndEquipmentNet contextRef="FI2014Q4" decimals="-3" id="Fact-E46B565BB143A36385E0F541C118E7C9" unitRef="usd">9752000</us-gaap:PropertyPlantAndEquipmentNet>
	<us-gaap:PropertyPlantAndEquipmentNet contextRef="FI2015Q3" decimals="-3" id="Fact-8674181E400A629F1C76F541C1176768" unitRef="usd">20042000</us-gaap:PropertyPlantAndEquipmentNet>
	<us-gaap:PropertyPlantAndEquipmentUsefulLife contextRef="FD2015Q3YTD_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_BuildingAndBuildingImprovementsMember_us-gaap_RangeAxis_us-gaap_MaximumMember" id="Fact-8A71158394C02EA40ADAF541C115F205">P25Y</us-gaap:PropertyPlantAndEquipmentUsefulLife>
	<us-gaap:PropertyPlantAndEquipmentUsefulLife contextRef="FD2015Q3YTD_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_BuildingAndBuildingImprovementsMember_us-gaap_RangeAxis_us-gaap_MinimumMember" id="Fact-69ADBB2094FD0D7182F5F541C11310DD">P20Y</us-gaap:PropertyPlantAndEquipmentUsefulLife>
	<us-gaap:PropertyPlantAndEquipmentUsefulLife contextRef="FD2015Q3YTD_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_FurnitureAndFixturesMember_us-gaap_RangeAxis_us-gaap_MaximumMember" id="Fact-05DF0CA018E8E9B96374F541C1132E52">P10Y</us-gaap:PropertyPlantAndEquipmentUsefulLife>
	<us-gaap:PropertyPlantAndEquipmentUsefulLife contextRef="FD2015Q3YTD_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_FurnitureAndFixturesMember_us-gaap_RangeAxis_us-gaap_MinimumMember" id="Fact-4B317D9CD88ADC04CD85F541C1150451">P5Y</us-gaap:PropertyPlantAndEquipmentUsefulLife>
	<us-gaap:PropertyPlantAndEquipmentUsefulLife contextRef="FD2015Q3YTD_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LeaseholdImprovementsMember_us-gaap_RangeAxis_us-gaap_MaximumMember" id="Fact-BD8202B61C96690680BEF541C1150A4C">P7Y</us-gaap:PropertyPlantAndEquipmentUsefulLife>
	<us-gaap:PropertyPlantAndEquipmentUsefulLife contextRef="FD2015Q3YTD_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LeaseholdImprovementsMember_us-gaap_RangeAxis_us-gaap_MinimumMember" id="Fact-EC6BFAAA9612FC09C211F541C112E52F">P3Y</us-gaap:PropertyPlantAndEquipmentUsefulLife>
	<us-gaap:PropertyPlantAndEquipmentUsefulLife contextRef="FD2015Q3YTD_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_MachineryAndEquipmentMember_us-gaap_RangeAxis_us-gaap_MaximumMember" id="Fact-080366EF39E29217CFC9F541C11465EF">P7Y</us-gaap:PropertyPlantAndEquipmentUsefulLife>
	<us-gaap:PropertyPlantAndEquipmentUsefulLife contextRef="FD2015Q3YTD_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_MachineryAndEquipmentMember_us-gaap_RangeAxis_us-gaap_MinimumMember" id="Fact-2E912A013CF0B7505436F541C112FB25">P3Y</us-gaap:PropertyPlantAndEquipmentUsefulLife>
	<us-gaap:ProvisionForDoubtfulAccounts contextRef="FD2014Q3YTD" decimals="-3" id="Fact-A00EE51F502948A313D2F541C10F582A" unitRef="usd">1309000</us-gaap:ProvisionForDoubtfulAccounts>
	<us-gaap:ProvisionForDoubtfulAccounts contextRef="FD2015Q3YTD" decimals="-3" id="Fact-895C54141BD653463DE4F541C114A926" unitRef="usd">-300000</us-gaap:ProvisionForDoubtfulAccounts>
	<us-gaap:PurchaseObligation contextRef="FI2014Q4" decimals="-5" id="Fact-7EDD37F0A03D058896F3F541C113377F" unitRef="usd">7900000</us-gaap:PurchaseObligation>
	<us-gaap:PurchaseObligation contextRef="FI2015Q3" decimals="-5" id="Fact-9B9C16D0D6B1892C6068F541C1135060" unitRef="usd">14100000</us-gaap:PurchaseObligation>
	<us-gaap:RepaymentsOfLongTermDebt contextRef="FD2014Q3YTD" decimals="-3" id="Fact-B7ADBE1B0A03BF10549AF541C113E01E" unitRef="usd">0</us-gaap:RepaymentsOfLongTermDebt>
	<us-gaap:RepaymentsOfLongTermDebt contextRef="FD2015Q3YTD" decimals="-3" id="Fact-A5E15EDD137DA72FE757F541C11835C4" unitRef="usd">311000</us-gaap:RepaymentsOfLongTermDebt>
	<us-gaap:ResearchAndDevelopmentArrangementWithFederalGovernmentCustomerFundingToOffsetCostsIncurred contextRef="FD2014Q3QTD" decimals="-3" id="Fact-7F95FCB942F0601A3DB1F541C11578D0" unitRef="usd">1655000</us-gaap:ResearchAndDevelopmentArrangementWithFederalGovernmentCustomerFundingToOffsetCostsIncurred>
	<us-gaap:ResearchAndDevelopmentArrangementWithFederalGovernmentCustomerFundingToOffsetCostsIncurred contextRef="FD2014Q3YTD" decimals="-3" id="Fact-286B12EC957609EE9FD8F541C115DD6C" unitRef="usd">3999000</us-gaap:ResearchAndDevelopmentArrangementWithFederalGovernmentCustomerFundingToOffsetCostsIncurred>
	<us-gaap:ResearchAndDevelopmentArrangementWithFederalGovernmentCustomerFundingToOffsetCostsIncurred contextRef="FD2015Q3QTD" decimals="-3" id="Fact-042FE787FAA162B2C2B3F541C115D6CA" unitRef="usd">2342000</us-gaap:ResearchAndDevelopmentArrangementWithFederalGovernmentCustomerFundingToOffsetCostsIncurred>
	<us-gaap:ResearchAndDevelopmentArrangementWithFederalGovernmentCustomerFundingToOffsetCostsIncurred contextRef="FD2015Q3YTD" decimals="-3" id="Fact-A3181AF9BF891B9E04BBF541C115AC48" unitRef="usd">5869000</us-gaap:ResearchAndDevelopmentArrangementWithFederalGovernmentCustomerFundingToOffsetCostsIncurred>
	<us-gaap:ResearchAndDevelopmentExpense contextRef="FD2014Q3QTD" decimals="-3" id="Fact-2DCDCADFA090B134206DF541C1155DA4" unitRef="usd">3054000</us-gaap:ResearchAndDevelopmentExpense>
	<us-gaap:ResearchAndDevelopmentExpense contextRef="FD2014Q3YTD" decimals="-3" id="Fact-80D8B0FAD0CE923E7E5CF541C1177198" unitRef="usd">8442000</us-gaap:ResearchAndDevelopmentExpense>
	<us-gaap:ResearchAndDevelopmentExpense contextRef="FD2015Q3QTD" decimals="-3" id="Fact-ABE8E0E0DBE7E7C32449F541C1150712" unitRef="usd">3650000</us-gaap:ResearchAndDevelopmentExpense>
	<us-gaap:ResearchAndDevelopmentExpense contextRef="FD2015Q3YTD" decimals="-3" id="Fact-BD16F5F69F67413F0ABFF541C117D5BC" unitRef="usd">9763000</us-gaap:ResearchAndDevelopmentExpense>
	<us-gaap:RestrictedCashAndCashEquivalentsAtCarryingValue contextRef="FI2014Q4" decimals="-3" id="Fact-1FE751218F7C819649CFF541C11679DE" unitRef="usd">2380000</us-gaap:RestrictedCashAndCashEquivalentsAtCarryingValue>
	<us-gaap:RestrictedCashAndCashEquivalentsAtCarryingValue contextRef="FI2015Q3" decimals="-3" id="Fact-2D313A514F5E474408DDF541C10E157A" unitRef="usd">1574000</us-gaap:RestrictedCashAndCashEquivalentsAtCarryingValue>
	<us-gaap:RetainedEarningsAccumulatedDeficit contextRef="FI2014Q4" decimals="-3" id="Fact-8B79F25FD40ADF9ABD11F541C11230B1" unitRef="usd">-21051000</us-gaap:RetainedEarningsAccumulatedDeficit>
	<us-gaap:RetainedEarningsAccumulatedDeficit contextRef="FI2015Q3" decimals="-3" id="Fact-8B5FCBCDCBB7ECDB5289F541C11773DB" unitRef="usd">-30170000</us-gaap:RetainedEarningsAccumulatedDeficit>
	<us-gaap:RevenueFromGrants contextRef="FD2015Q3YTD" decimals="-5" id="Fact-DBBB0A8D0D04AE632B55F541C1123646" unitRef="usd">4100000</us-gaap:RevenueFromGrants>
	<us-gaap:SalesRevenueNet contextRef="FD2014Q3QTD" decimals="-3" id="Fact-CC32389FDA73C518F0DDF541C1120F37" unitRef="usd">9190000</us-gaap:SalesRevenueNet>
	<us-gaap:SalesRevenueNet contextRef="FD2014Q3QTD_us-gaap_StatementBusinessSegmentsAxis_asys_PolishingSuppliesAndEquipmentMember" decimals="-3" id="Fact-6586C86A3AA385D32CFAF541C11041FD" unitRef="usd">2426000</us-gaap:SalesRevenueNet>
	<us-gaap:SalesRevenueNet contextRef="FD2014Q3QTD_us-gaap_StatementBusinessSegmentsAxis_asys_SemiconductorEquipmentMember" decimals="-3" id="Fact-F1A343456B1A9A8EE73BF541C10FC1E8" unitRef="usd">2132000</us-gaap:SalesRevenueNet>
	<us-gaap:SalesRevenueNet contextRef="FD2014Q3QTD_us-gaap_StatementBusinessSegmentsAxis_asys_SolarEquipmentMember" decimals="-3" id="Fact-D46B33E855719CAB80A4F541C1101A66" unitRef="usd">4632000</us-gaap:SalesRevenueNet>
	<us-gaap:SalesRevenueNet contextRef="FD2014Q3YTD" decimals="-3" id="Fact-13764CB3651B1F57798FF541C118ED31" unitRef="usd">36678000</us-gaap:SalesRevenueNet>
	<us-gaap:SalesRevenueNet contextRef="FD2014Q3YTD_us-gaap_StatementBusinessSegmentsAxis_asys_PolishingSuppliesAndEquipmentMember" decimals="-3" id="Fact-46A1DEE593A22E1EE289F541C111D6B3" unitRef="usd">7063000</us-gaap:SalesRevenueNet>
	<us-gaap:SalesRevenueNet contextRef="FD2014Q3YTD_us-gaap_StatementBusinessSegmentsAxis_asys_SemiconductorEquipmentMember" decimals="-3" id="Fact-753541F9782091AEF090F541C10F4CA8" unitRef="usd">8478000</us-gaap:SalesRevenueNet>
	<us-gaap:SalesRevenueNet contextRef="FD2014Q3YTD_us-gaap_StatementBusinessSegmentsAxis_asys_SolarEquipmentMember" decimals="-3" id="Fact-9F6BB08DEB79E8B00687F541C1109F9B" unitRef="usd">21137000</us-gaap:SalesRevenueNet>
	<us-gaap:SalesRevenueNet contextRef="FD2015Q3QTD" decimals="-3" id="Fact-22CD75FCB915905E9DDAF541C11229BE" unitRef="usd">40016000</us-gaap:SalesRevenueNet>
	<us-gaap:SalesRevenueNet contextRef="FD2015Q3QTD_us-gaap_StatementBusinessSegmentsAxis_asys_PolishingSuppliesAndEquipmentMember" decimals="-3" id="Fact-0531E7696C7F2A036C9FF541C111834D" unitRef="usd">2679000</us-gaap:SalesRevenueNet>
	<us-gaap:SalesRevenueNet contextRef="FD2015Q3QTD_us-gaap_StatementBusinessSegmentsAxis_asys_SemiconductorEquipmentMember" decimals="-3" id="Fact-0EB1C23C60658CB371E2F541C1103520" unitRef="usd">12945000</us-gaap:SalesRevenueNet>
	<us-gaap:SalesRevenueNet contextRef="FD2015Q3QTD_us-gaap_StatementBusinessSegmentsAxis_asys_SolarEquipmentMember" decimals="-3" id="Fact-D1DC55BE603A12B686CBF541C1105845" unitRef="usd">24392000</us-gaap:SalesRevenueNet>
	<us-gaap:SalesRevenueNet contextRef="FD2015Q3YTD" decimals="-3" id="Fact-7A4124B8A097236A26FAF541C118A1A1" unitRef="usd">76685000</us-gaap:SalesRevenueNet>
	<us-gaap:SalesRevenueNet contextRef="FD2015Q3YTD_us-gaap_StatementBusinessSegmentsAxis_asys_PolishingSuppliesAndEquipmentMember" decimals="-3" id="Fact-E9819949B96EDEF1A34CF541C11026A9" unitRef="usd">8779000</us-gaap:SalesRevenueNet>
	<us-gaap:SalesRevenueNet contextRef="FD2015Q3YTD_us-gaap_StatementBusinessSegmentsAxis_asys_SemiconductorEquipmentMember" decimals="-3" id="Fact-FD6B1869BA46B403BEEBF541C1125AEE" unitRef="usd">25765000</us-gaap:SalesRevenueNet>
	<us-gaap:SalesRevenueNet contextRef="FD2015Q3YTD_us-gaap_StatementBusinessSegmentsAxis_asys_SolarEquipmentMember" decimals="-3" id="Fact-D532D780C4A654AB0C11F541C112DDA8" unitRef="usd">42141000</us-gaap:SalesRevenueNet>
	<us-gaap:SellingGeneralAndAdministrativeExpense contextRef="FD2014Q3QTD" decimals="-3" id="Fact-208E7D366A85A677C362F541C10F0FA2" unitRef="usd">4103000</us-gaap:SellingGeneralAndAdministrativeExpense>
	<us-gaap:SellingGeneralAndAdministrativeExpense contextRef="FD2014Q3YTD" decimals="-3" id="Fact-621C67E968FD96D57938F541C113D866" unitRef="usd">13504000</us-gaap:SellingGeneralAndAdministrativeExpense>
	<us-gaap:SellingGeneralAndAdministrativeExpense contextRef="FD2015Q3QTD" decimals="-3" id="Fact-55397AD4D4202C0301FEF541C1167F8B" unitRef="usd">10054000</us-gaap:SellingGeneralAndAdministrativeExpense>
	<us-gaap:SellingGeneralAndAdministrativeExpense contextRef="FD2015Q3YTD" decimals="-3" id="Fact-4F11A4648FD7284CA105F541C118BDC7" unitRef="usd">24513000</us-gaap:SellingGeneralAndAdministrativeExpense>
	<us-gaap:ShareBasedCompensation contextRef="FD2014Q3YTD" decimals="-3" id="Fact-DE516C1B93D8CD7C0B01F541C1136D3B" unitRef="usd">603000</us-gaap:ShareBasedCompensation>
	<us-gaap:ShareBasedCompensation contextRef="FD2015Q3YTD" decimals="-3" id="Fact-DCA3D494D01A9CCB9789F541C117ACAB" unitRef="usd">864000</us-gaap:ShareBasedCompensation>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1 contextRef="FD2015Q3YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember_us-gaap_RangeAxis_us-gaap_MaximumMember" id="Fact-647EE07075155FD7B66AF541C110AFC2">P4Y</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1 contextRef="FD2015Q3YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember_us-gaap_RangeAxis_us-gaap_MinimumMember" id="Fact-59E2F8417626638CA002F541C10F808C">P2Y</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1 contextRef="FD2015Q3YTD_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember_us-gaap_RangeAxis_us-gaap_MaximumMember" id="Fact-C4B428A7017A09EFC995F541C1146DCE">P4Y</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1 contextRef="FD2015Q3YTD_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember_us-gaap_RangeAxis_us-gaap_MinimumMember" id="Fact-0E13310C402D32C195C4F541C1147DA7">P2Y</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber contextRef="FI2013Q4_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember" decimals="INF" id="Fact-8ED6EEA68D54A81A43E2F541C110D991" unitRef="shares">69154</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber contextRef="FI2014Q3_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember" decimals="INF" id="Fact-95088D3C18C43EE63BA3F541C1104933" unitRef="shares">38326</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber contextRef="FI2014Q4_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember" decimals="INF" id="Fact-3011A59314340A759B9DF541C110BFF6" unitRef="shares">35203</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber contextRef="FI2015Q3_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember" decimals="INF" id="Fact-6157DD8B6B0AFDFE450EF541C110EB71" unitRef="shares">13540</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue contextRef="FI2013Q4_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember" decimals="2" id="Fact-DCA9E9D602D444EF9B96F541C111E7C4" unitRef="usdPerShare">10.13</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue contextRef="FI2014Q3_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember" decimals="2" id="Fact-430F1E037F0F41F6AA42F541C110602E" unitRef="usdPerShare">10.17</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue contextRef="FI2014Q4_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember" decimals="2" id="Fact-6227B8DB34FCB37580AAF541C110B754" unitRef="usdPerShare">10.13</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue contextRef="FI2015Q3_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember" decimals="2" id="Fact-16B262CAD7082396647AF541C110623A" unitRef="usdPerShare">7.98</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod contextRef="FD2014Q3YTD_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember" decimals="INF" id="Fact-5D6D5404C16CA0FE6D7DF541C1105855" unitRef="shares">30828</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod contextRef="FD2015Q3YTD_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember" decimals="INF" id="Fact-DCB39857BFE7E68CC279F541C110C4EB" unitRef="shares">21663</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue contextRef="FD2014Q3YTD_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember" decimals="2" id="Fact-CEF56A4F0DE423EA80D0F541C1107105" unitRef="usdPerShare">10.08</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue contextRef="FD2015Q3YTD_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember" decimals="2" id="Fact-51B0F35CC7A6E4D7D2ECF541C1103A85" unitRef="usdPerShare">11.47</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate contextRef="FD2014Q3YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="INF" id="Fact-7395E29D3C5B4290F4CAF541C1146A37" unitRef="number">0</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate contextRef="FD2015Q3YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="INF" id="Fact-0493BD2B335AC5804D03F541C112CC70" unitRef="number">0</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate contextRef="FD2014Q3YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="2" id="Fact-3891465A8D724801808DF541C1123910" unitRef="number">0.69</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate contextRef="FD2015Q3YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="2" id="Fact-AACED504594B8A3C9701F541C11215F4" unitRef="number">0.67</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate contextRef="FD2014Q3YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="2" id="Fact-21F645934FDD9654D8EAF541C11299DF" unitRef="number">0.02</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate contextRef="FD2015Q3YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="2" id="Fact-00299DF7FD9C31109D4EF541C112B29A" unitRef="number">0.02</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber contextRef="FI2014Q3_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="INF" id="Fact-808A31090BD911885BC9F541C11724FB" unitRef="shares">663220</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber contextRef="FI2015Q3_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="INF" id="Fact-68B08FDA8ED4AA885301F541C117953C" unitRef="shares">1005690</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice contextRef="FI2014Q3_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="2" id="Fact-A909643BEA85FEFA731EF541C117F936" unitRef="usdPerShare">8.14</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice contextRef="FI2015Q3_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="2" id="Fact-B1BAACD40C496BA392A9F541C119045C" unitRef="usdPerShare">9.75</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresInPeriod contextRef="FD2014Q3YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="INF" id="Fact-6016D844A3D80C348629F541C117CB6E" unitRef="shares">4546</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresInPeriod>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresInPeriod contextRef="FD2015Q3YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="INF" id="Fact-194CCAFC8E9C9479FCC3F541C1181A74" unitRef="shares">26571</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresInPeriod>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross contextRef="FD2014Q3YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="INF" id="Fact-B2B7219AC8865C6B4CE3F541C117CEE8" unitRef="shares">272906</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross contextRef="FD2015Q3YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="INF" id="Fact-6D266437710F5DF733B0F541C1173FCB" unitRef="shares">327500</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageGrantDateFairValue contextRef="FD2014Q3YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="2" id="Fact-9FF9FDCDEC65C2E594FBF541C117891C" unitRef="usdPerShare">4.38</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageGrantDateFairValue>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageGrantDateFairValue contextRef="FD2015Q3YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="2" id="Fact-386317F30C9C5D03980EF541C117FF28" unitRef="usdPerShare">5.91</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageGrantDateFairValue>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber contextRef="FI2013Q4_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="INF" id="Fact-45D9FE2F99DF71FF51E4F541C117FD6F" unitRef="shares">1059417</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber contextRef="FI2014Q3_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="INF" id="Fact-89AB1F16540D9A2EB453F541C117A0C8" unitRef="shares">1064419</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber contextRef="FI2014Q4_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="INF" id="Fact-3E4F8F060384B77E1A71F541C118FA70" unitRef="shares">1063324</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber contextRef="FI2015Q3_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="INF" id="Fact-C512E850CED8CBA37BD7F541C118DA86" unitRef="shares">1637028</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice contextRef="FI2013Q4_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="2" id="Fact-C8B8E47C1CA12416B418F541C10E3BE1" unitRef="usdPerShare">6.71</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice contextRef="FI2014Q3_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="2" id="Fact-CE12E0F05966AD1AFFC5F541C117FA18" unitRef="usdPerShare">7.37</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice contextRef="FI2014Q4_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="2" id="Fact-18427F316B09844145E9F541C1163A59" unitRef="usdPerShare">7.37</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice contextRef="FI2015Q3_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="2" id="Fact-067D5297646C41B8D362F541C118F308" unitRef="usdPerShare">9.12</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice>
	<us-gaap:ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice contextRef="FD2014Q3YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="2" id="Fact-D09FA6B3D0F0D8CBB031F541C1196F27" unitRef="usdPerShare">4.31</us-gaap:ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice>
	<us-gaap:ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice contextRef="FD2015Q3YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="2" id="Fact-83FD79B2A6015097F6A6F541C1188B61" unitRef="usdPerShare">5.51</us-gaap:ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice>
	<us-gaap:ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsForfeituresInPeriodWeightedAverageExercisePrice contextRef="FD2014Q3YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="2" id="Fact-229431655C9D6F093A1DF541C1171B80" unitRef="usdPerShare">8.71</us-gaap:ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsForfeituresInPeriodWeightedAverageExercisePrice>
	<us-gaap:ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsForfeituresInPeriodWeightedAverageExercisePrice contextRef="FD2015Q3YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="2" id="Fact-64B3F39997B622BF60D9F541C1170F00" unitRef="usdPerShare">29.48</us-gaap:ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsForfeituresInPeriodWeightedAverageExercisePrice>
	<us-gaap:ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageExercisePrice contextRef="FD2014Q3YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="2" id="Fact-4968F9C7956A8C36533AF541C119B575" unitRef="usdPerShare">7.01</us-gaap:ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageExercisePrice>
	<us-gaap:ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageExercisePrice contextRef="FD2015Q3YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="2" id="Fact-23AC5EC4ABD05FA4063DF541C11706B5" unitRef="usdPerShare">9.74</us-gaap:ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageExercisePrice>
	<us-gaap:SharePrice contextRef="I2015Q2Jan30_us-gaap_BusinessAcquisitionAxis_asys_BTUInternationalIncBTUMergerMember" decimals="2" id="Fact-B1C404FA859CA3F4A650F541C1117003" unitRef="usdPerShare">8.20</us-gaap:SharePrice>
	<us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod contextRef="FD2015Q3YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember_us-gaap_RangeAxis_us-gaap_MaximumMember" id="Fact-D516CA0D037F341566A8F541C1141078">P10Y</us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod>
	<us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1 contextRef="FD2014Q3YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" id="Fact-DB1CF8433208C034CD7CF541C1132C71">P6Y</us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1>
	<us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1 contextRef="FD2015Q3YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" id="Fact-CA6F0411D6659D77CFC1F541C112A02F">P6Y</us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1>
	<us-gaap:ShippingHandlingAndTransportationCosts contextRef="FD2014Q3QTD" decimals="-5" id="Fact-E15CDF82045B799C2B8BF541C1165D49" unitRef="usd">200000</us-gaap:ShippingHandlingAndTransportationCosts>
	<us-gaap:ShippingHandlingAndTransportationCosts contextRef="FD2014Q3YTD" decimals="1" id="Fact-7469558F9B6DA30BE146F541C118F55A" unitRef="usd">0.7</us-gaap:ShippingHandlingAndTransportationCosts>
	<us-gaap:ShippingHandlingAndTransportationCosts contextRef="FD2015Q3QTD" decimals="-5" id="Fact-0D2205C95DFABF84228BF541C11426D1" unitRef="usd">1200000</us-gaap:ShippingHandlingAndTransportationCosts>
	<us-gaap:ShippingHandlingAndTransportationCosts contextRef="FD2015Q3YTD" decimals="1" id="Fact-DAB09CAD07DC99F17D23F541C116CAEF" unitRef="usd">1.9</us-gaap:ShippingHandlingAndTransportationCosts>
	<us-gaap:StandardProductWarrantyAccrualPayments contextRef="FD2014Q3YTD" decimals="-3" id="Fact-34756E60E866E2F24407F541C10E7429" unitRef="usd">663000</us-gaap:StandardProductWarrantyAccrualPayments>
	<us-gaap:StandardProductWarrantyAccrualPayments contextRef="FD2015Q3YTD" decimals="-3" id="Fact-9F70181857EC9038BBEAF541C1181C24" unitRef="usd">530000</us-gaap:StandardProductWarrantyAccrualPayments>
	<us-gaap:StandardProductWarrantyAccrualPreexistingIncreaseDecrease contextRef="FD2014Q3YTD" decimals="-3" id="Fact-8CEA8005D9536A9AFBE2F541C118A85C" unitRef="usd">-25000</us-gaap:StandardProductWarrantyAccrualPreexistingIncreaseDecrease>
	<us-gaap:StandardProductWarrantyAccrualPreexistingIncreaseDecrease contextRef="FD2015Q3YTD" decimals="-3" id="Fact-195DC678F5602CED1FADF541C117FD43" unitRef="usd">925000</us-gaap:StandardProductWarrantyAccrualPreexistingIncreaseDecrease>
	<us-gaap:StockIssued1 contextRef="FD2014Q3YTD" decimals="-3" id="Fact-F336F0CC5C8F70789526F541C1144500" unitRef="usd">0</us-gaap:StockIssued1>
	<us-gaap:StockIssued1 contextRef="FD2015Q3YTD" decimals="-3" id="Fact-3F49482631F5B46757CDF541C110884D" unitRef="usd">26625000</us-gaap:StockIssued1>
	<us-gaap:StockIssuedDuringPeriodSharesStockOptionsExercised contextRef="FD2014Q3YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="INF" id="Fact-289CF5920CEB07188DB7F541C1174E7E" unitRef="shares">263358</us-gaap:StockIssuedDuringPeriodSharesStockOptionsExercised>
	<us-gaap:StockIssuedDuringPeriodSharesStockOptionsExercised contextRef="FD2015Q3YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="INF" id="Fact-2A4A02BC7410CDB2B618F541C117AF71" unitRef="shares">94454</us-gaap:StockIssuedDuringPeriodSharesStockOptionsExercised>
	<us-gaap:StockholdersEquity contextRef="FI2014Q4" decimals="-3" id="Fact-9FFADD210C30B55F178AF541C113F58D" unitRef="usd">55141000</us-gaap:StockholdersEquity>
	<us-gaap:StockholdersEquity contextRef="FI2015Q3" decimals="-3" id="Fact-B56E60676D1CE7DC5544F541C114DDDC" unitRef="usd">71120000</us-gaap:StockholdersEquity>
	<us-gaap:StockholdersEquityIncludingPortionAttributableToNoncontrollingInterest contextRef="FI2014Q4" decimals="-3" id="Fact-46137969DE6624B90954F541C1181298" unitRef="usd">53588000</us-gaap:StockholdersEquityIncludingPortionAttributableToNoncontrollingInterest>
	<us-gaap:StockholdersEquityIncludingPortionAttributableToNoncontrollingInterest contextRef="FI2015Q3" decimals="-3" id="Fact-F23C8B1C2AA9B1AC1CADF541C11209FD" unitRef="usd">71590000</us-gaap:StockholdersEquityIncludingPortionAttributableToNoncontrollingInterest>
	<us-gaap:UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued contextRef="FI2014Q4" decimals="-5" id="Fact-6A4F543950C716D11772F541C118E697" unitRef="usd">1600000</us-gaap:UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued>
	<us-gaap:UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued contextRef="FI2015Q3" decimals="-5" id="Fact-95185B8EFDAB26CC58B8F541C11665D5" unitRef="usd">1800000</us-gaap:UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued>
	<us-gaap:UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate contextRef="FI2014Q4" decimals="-5" id="Fact-64A0E91F623234FCDB75F541C10F6953" unitRef="usd">3200000</us-gaap:UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate>
	<us-gaap:UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate contextRef="FI2015Q3" decimals="-5" id="Fact-A0C0F1B53CF4B982EBD4F541C1166821" unitRef="usd">3200000</us-gaap:UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate>
	<us-gaap:ValuationAllowanceDeferredTaxAssetChangeInAmount contextRef="FD2014Q3YTD" decimals="-5" id="Fact-112FBA01C66E784F688CF541C1166A39" unitRef="usd">1800000</us-gaap:ValuationAllowanceDeferredTaxAssetChangeInAmount>
	<us-gaap:WeightedAverageNumberDilutedSharesOutstandingAdjustment contextRef="FD2014Q3QTD" decimals="-3" id="Fact-7A572BDDCDF0D87D6B50F541C10F104D" unitRef="shares">0</us-gaap:WeightedAverageNumberDilutedSharesOutstandingAdjustment>
	<us-gaap:WeightedAverageNumberDilutedSharesOutstandingAdjustment contextRef="FD2014Q3YTD" decimals="-3" id="Fact-06B00876178C625DCF18F541C10E4E45" unitRef="shares">0</us-gaap:WeightedAverageNumberDilutedSharesOutstandingAdjustment>
	<us-gaap:WeightedAverageNumberDilutedSharesOutstandingAdjustment contextRef="FD2015Q3QTD" decimals="-3" id="Fact-7E43CBE32412EEF19504F541C110BDE6" unitRef="shares">0</us-gaap:WeightedAverageNumberDilutedSharesOutstandingAdjustment>
	<us-gaap:WeightedAverageNumberDilutedSharesOutstandingAdjustment contextRef="FD2015Q3YTD" decimals="-3" id="Fact-C31154FAF828B0264324F541C11094E3" unitRef="shares">0</us-gaap:WeightedAverageNumberDilutedSharesOutstandingAdjustment>
	<us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding contextRef="FD2014Q3QTD" decimals="-3" id="Fact-AC700B47D0D6770F3492F541C117A150" unitRef="shares">9843000</us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding>
	<us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding contextRef="FD2014Q3YTD" decimals="-3" id="Fact-51D6A3722CCE0633D637F541C1120E5C" unitRef="shares">9694000</us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding>
	<us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding contextRef="FD2015Q3QTD" decimals="-3" id="Fact-0BB2921D168D447D13D7F541C1145060" unitRef="shares">13103000</us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding>
	<us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding contextRef="FD2015Q3YTD" decimals="-3" id="Fact-14261F228EE9968BB7C3F541C11826C0" unitRef="shares">11644000</us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding>
	<us-gaap:WeightedAverageNumberOfSharesOutstandingBasic contextRef="FD2014Q3QTD" decimals="-3" id="Fact-55EE83611187A7CBDB95F541C114DB97" unitRef="shares">9843000</us-gaap:WeightedAverageNumberOfSharesOutstandingBasic>
	<us-gaap:WeightedAverageNumberOfSharesOutstandingBasic contextRef="FD2014Q3YTD" decimals="-3" id="Fact-B80A49B6F9C3048A5C56F541C11883E7" unitRef="shares">9694000</us-gaap:WeightedAverageNumberOfSharesOutstandingBasic>
	<us-gaap:WeightedAverageNumberOfSharesOutstandingBasic contextRef="FD2015Q3QTD" decimals="-3" id="Fact-73E89C4B029B31031C39F541C1111FBF" unitRef="shares">13103000</us-gaap:WeightedAverageNumberOfSharesOutstandingBasic>
	<us-gaap:WeightedAverageNumberOfSharesOutstandingBasic contextRef="FD2015Q3YTD" decimals="-3" id="Fact-FDBE9D2353E2B9E63038F541C10F5087" unitRef="shares">11644000</us-gaap:WeightedAverageNumberOfSharesOutstandingBasic>
	<asys:BusinessCombinationScheduleOfConsiderationTransferredTableTextBlock contextRef="FD2015Q3YTD" id="Fact-AC0A47EC6BBF0696E84DF541C115A82B">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;The Merger was an all-stock transaction. The following table summarizes the consideration transferred:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;padding-top:13px;text-align:center;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:81.640625%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="4" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td width="76%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="22%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-style:italic;"&gt;(In thousands, except per share amounts)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#ccecff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;BTU common shares and restricted stock units exchanged&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#ccecff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;9,681&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#ccecff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Exchange ratio&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;0.3291&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#ccecff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Amtech common stock issued for consideration&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#ccecff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;3,186&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#ccecff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Amtech common stock per share price on January 30, 2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;8.20&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#ccecff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Consideration for BTU common shares and restricted stock units&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;26,125&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Vested BTU stock options exchanged for Amtech stock options&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;500&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#ccecff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Total fair value of consideration transferred&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;26,625&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;/div&gt;&lt;/div&gt;</asys:BusinessCombinationScheduleOfConsiderationTransferredTableTextBlock>
	<asys:ResearchAndDevelopmentExpenseTableTextBlock contextRef="FD2015Q3YTD" id="Fact-A867954CBC4785209DF5F541C1176BA0">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The table below shows gross research and development expenses and grants earned:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:99.0234375%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="16" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td width="41%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="12%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="12%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="12%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="12%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Three Months Ended&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Nine Months Ended&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;June&amp;#160;30, &lt;br clear="none"/&gt;2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;June&amp;#160;30, &lt;br clear="none"/&gt;2014&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;June&amp;#160;30, &lt;br clear="none"/&gt;2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;June&amp;#160;30, &lt;br clear="none"/&gt;2014&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;(dollars in thousands)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;(dollars in thousands)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Research, development and engineering&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;3,650&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;3,054&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;9,763&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;8,442&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Grants earned&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(2,342&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(1,655&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(5,869&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(3,999&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Net research, development and engineering&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,308&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,399&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;3,894&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;4,443&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;/div&gt;&lt;/div&gt;</asys:ResearchAndDevelopmentExpenseTableTextBlock>
	<us-gaap:BasisOfAccountingPolicyPolicyTextBlock contextRef="FD2015Q3YTD" id="Fact-9856ED08FBFE8AFD97A4F541C119A621">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Nature of Operations and Basis of Presentation &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;-&amp;#160;The Company serves niche markets in industries that are experiencing rapid technological advances and which historically have been very cyclical. Therefore, future profitability and growth depend on the Company&amp;#8217;s ability to develop or acquire and market profitable new products and on its ability to adapt to cyclical trends.&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The accompanying unaudited condensed consolidated financial statements have been prepared pursuant to the rules and regulations of the Securities and Exchange Commission (the &amp;#8220;SEC&amp;#8221;), and consequently do not include all disclosures normally required by accounting principles generally accepted in the United States of America. In the opinion of management, the accompanying unaudited interim condensed consolidated financial statements contain all adjustments necessary, all of which are of a normal and recurring nature, to present fairly our financial position, results of operations and cash flows. Certain information and note disclosures normally included in financial statements have been condensed or omitted pursuant to the rules and regulations of the SEC. These condensed consolidated financial statements should be read in conjunction with the audited consolidated financial statements and notes thereto included in our Annual Report on Form 10-K for the fiscal year ended September&amp;#160;30, 2014.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The consolidated results of operations for the three and nine months ended June&amp;#160;30, 2015, are not necessarily indicative of the results to be expected for the full fiscal year.&lt;/font&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:BasisOfAccountingPolicyPolicyTextBlock>
	<us-gaap:BusinessAcquisitionProFormaInformationTextBlock contextRef="FD2015Q3YTD" id="Fact-4C4E9D1076CD63DB7324F541C113031E">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;padding-top:13px;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The following unaudited pro forma data has been prepared by adjusting the Company&amp;#8217;s historical data to give effect to the Merger as if it had occurred on October&amp;#160;1, 2013 and includes adjustments for depreciation expense, amortization of intangibles, and the effect of other purchase accounting adjustments:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;padding-top:13px;text-align:center;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:99.0234375%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="16" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td width="44%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="11%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="11%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="2%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="11%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="11%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Quarter Ended&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Nine Months Ended&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;June 30, 2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;June 30, 2014&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;June 30, 2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;June 30, 2014&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="15" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:9pt;"&gt;&lt;font style="font-family:inherit;font-size:9pt;font-weight:bold;"&gt;(dollars in thousands, except per share data)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Revenue, net&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;40,016&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;25,625&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;92,988&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;75,791&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Net loss&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(1,669&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(4,507&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(11,028&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(19,641&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Earnings per share available to Amtech stockholders:&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Basic&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(0.13&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(0.35&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(0.84&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(1.52&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Diluted&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(0.13&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(0.35&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(0.84&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(1.52&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:BusinessAcquisitionProFormaInformationTextBlock>
	<us-gaap:BusinessCombinationDisclosureTextBlock contextRef="FD2015Q3YTD" id="Fact-A8969BE5D2A6C7BA8111F541C115F5D8">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Acquisitions&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:left;font-size:12pt;"&gt;&lt;font style="font-family:inherit;font-size:12pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-style:italic;font-weight:bold;"&gt;Merger with BTU International&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;On &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;January&amp;#160;30, 2015&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;, the Company completed its acquisition of BTU (the "Merger").  In connection with the Merger, each share of BTU common stock outstanding immediately prior to the effective time of the Merger, including BTU restricted stock units that vested immediately prior to the effective time of the Merger, was converted to &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;0.3291&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; shares of common stock of the Company.  The Company issued &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;3,185,852&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; shares of Company common stock on the Merger date.  Pursuant to the terms of the Merger Agreement, options to purchase BTU common stock held by BTU employees were assumed by the Company and converted into options to purchase shares of Company common stock on substantially the same terms and conditions as were applicable to such BTU stock options, with appropriate adjustments based upon the exchange ratio of &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;0.3291&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; to the exercise price and the number of shares of Company common stock subject to such stock option. As a result of the Merger, the company owns 100% of the outstanding stock of BTU.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;padding-top:13px;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The following unaudited pro forma data has been prepared by adjusting the Company&amp;#8217;s historical data to give effect to the Merger as if it had occurred on October&amp;#160;1, 2013 and includes adjustments for depreciation expense, amortization of intangibles, and the effect of other purchase accounting adjustments:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;padding-top:13px;text-align:center;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:99.0234375%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="16" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td width="44%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="11%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="11%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="2%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="11%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="11%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Quarter Ended&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Nine Months Ended&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;June 30, 2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;June 30, 2014&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;June 30, 2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;June 30, 2014&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="15" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:9pt;"&gt;&lt;font style="font-family:inherit;font-size:9pt;font-weight:bold;"&gt;(dollars in thousands, except per share data)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Revenue, net&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;40,016&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;25,625&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;92,988&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;75,791&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Net loss&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(1,669&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(4,507&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(11,028&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(19,641&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Earnings per share available to Amtech stockholders:&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Basic&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(0.13&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(0.35&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(0.84&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(1.52&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Diluted&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(0.13&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(0.35&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(0.84&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(1.52&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;padding-top:13px;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The unaudited pro forma financial data was prepared in accordance with the acquisition method of accounting under existing standards and is not necessarily indicative of the results of operations that would have occurred if the Merger had been completed on the date indicated, nor is it indicative of the future operating results of the Company.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;padding-top:13px;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The unaudited pro forma results do not reflect certain future events that either have occurred or may occur after the Merger, including, but not limited to, the anticipated realization of ongoing cost reductions from other operating synergies in subsequent periods. They also do not give effect to certain charges that the Company expects to incur in connection with the Merger, including, but not limited to, additional professional fees and other restructuring costs.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;The Merger was an all-stock transaction. The following table summarizes the consideration transferred:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;padding-top:13px;text-align:center;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:81.640625%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="4" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td width="76%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="22%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-style:italic;"&gt;(In thousands, except per share amounts)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#ccecff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;BTU common shares and restricted stock units exchanged&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#ccecff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;9,681&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#ccecff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Exchange ratio&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;0.3291&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#ccecff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Amtech common stock issued for consideration&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#ccecff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;3,186&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#ccecff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Amtech common stock per share price on January 30, 2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;8.20&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#ccecff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Consideration for BTU common shares and restricted stock units&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;26,125&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Vested BTU stock options exchanged for Amtech stock options&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;500&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#ccecff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Total fair value of consideration transferred&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;26,625&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;padding-top:13px;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;padding-top:13px;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The following table summarizes the allocation of the consideration for the assets acquired and liabilities assumed on &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;January&amp;#160;30, 2015&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;padding-top:13px;text-align:center;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:81.640625%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="4" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td width="77%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="21%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-style:italic;"&gt;(In thousands)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Fair value of net tangible assets acquired&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;20,598&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Goodwill&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;4,697&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Identifiable intangible assets&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,330&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Total consideration allocated&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;26,625&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;padding-top:13px;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The primary acquired intangible asset is the trade name "BTU", which has a &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;15&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; year useful life. Goodwill of &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$4.7&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; million was assigned to the semiconductor segment. Goodwill will not be amortized but instead tested for impairment at least annually (more frequently if certain indicators are present). Goodwill as of June 30, 2015, is not expected to be deductible for tax purposes.  As of&amp;#160;June 30, 2015, the accounting for the BTU acquisition has not been finalized due to pending items on the valuation of acquired assets and liabilities. &lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;padding-top:13px;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Under the guidance on accounting for business combinations, merger and integration costs are not included as components of consideration transferred but are accounted for as expenses in the period in which the costs are incurred. Transaction-related expenses were not material for the three months ended June 30, 2015 and 2014.  Transaction-related expenses of &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$1.8&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; million and &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$0.2&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; million for the nine months ended June 30, 2015 and 2014, respectively, are included in the Selling, General and Administrative line in the Condensed Consolidated Statements of Operations. &lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:left;font-size:12pt;"&gt;&lt;font style="font-family:inherit;font-size:12pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-style:italic;font-weight:bold;"&gt;Acquisition of SoLayTec B.V.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;On December 24, 2014, the Company expanded our participation in the solar market by acquiring a &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;51%&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; controlling interest in SoLayTec, which provides ALD systems used in high efficiency solar cells, for a total purchase price consideration of &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$1.9 million&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;.&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The Company consolidated the results of operations for SoLayTec beginning on December 24, 2014, the effective date of the acquisition, which were not material to our consolidated statement of operations for the three and nine months ended June 30, 2015.  Additionally, the Company's historical results would not have been materially affected by the acquisition of SoLayTec and, accordingly, has not presented pro forma information as if the acquisition had been completed at the beginning of each period presented in our consolidated statements of operations.  As of&amp;#160;June 30, 2015, the accounting for the SoLayTec acquisition has not been finalized due to pending items on the valuation of acquired assets and liabilities.&lt;/font&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:BusinessCombinationDisclosureTextBlock>
	<us-gaap:CashAndCashEquivalentsRestrictedCashAndCashEquivalentsPolicy contextRef="FD2015Q3YTD" id="Fact-06D82ACDCE44FE5CF000F541C1169783">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Restricted Cash&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; &amp;#8211; Restricted cash is &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;"&gt;$1.6 million&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; and &lt;/font&gt;&lt;font style="font-family:Times New Roman;font-size:10pt;color:#000000;font-style:normal;font-weight:normal;text-decoration:none;"&gt;$2.4 million&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; as of &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;"&gt;June&amp;#160;30, 2015&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;, and &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;"&gt;September&amp;#160;30, 2014&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;, respectively. The balance includes collateral for bank guarantees required by certain customers from whom deposits have been received in advance of shipment and cash received from research and development grants related to our ion implant technology to be used for research and development projects.&lt;/font&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:CashAndCashEquivalentsRestrictedCashAndCashEquivalentsPolicy>
	<us-gaap:CommitmentsAndContingenciesDisclosureTextBlock contextRef="FD2015Q3YTD" id="Fact-8C5747FD177B4D5CFDE5F541C113E4AB">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Commitments and Contingencies&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Purchase Obligations&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; &amp;#8211; As of &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;"&gt;June&amp;#160;30, 2015&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; the Company had purchase obligations in the amount of &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$14.1 million&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; compared to &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;"&gt;$7.9 million&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; as of &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;"&gt;September&amp;#160;30, 2014&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;. These purchase obligations consist of outstanding purchase orders for goods and services. While the amount represents purchase agreements, the actual amounts to be paid may be less if any agreements are renegotiated, canceled or terminated.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Development projects&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; &amp;#8211;  In fiscal 2014, Tempress Systems, Inc. ("Tempress") entered into an agreement with the Energy Research Centre of the Netherlands ("ECN"), a Netherlands government sponsored research institute, for a joint research and development project.  Under the terms of the agreement, Tempress sold an ion implanter ("Equipment") to ECN for &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$1.4&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; million.  Both Tempress and ECN are performing research and development projects utilizing the Equipment at the ECN facilities. Each party to the agreement will have &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;100%&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; rights to the results of the projects developed separately by the individual parties.  Any results co-developed will be jointly owned.  Over the &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;four&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;-year period of the agreement, Tempress is required to contribute &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$1.4 million&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; to the project in the form of  installation of the Equipment, acceptance testing, project meeting attendance, training, parts, and service, including keeping the equipment in good condition and repair for the first &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;two&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; years of the agreement.    &lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In 2013, Shanghai Kingstone Semiconductor Company Ltd. ("Kingstone") entered into an agreement with certain government agencies in Shanghai, China for the purpose of developing ion implant technology for non-solar applications. Kingstone has substantially completed the first phase of this development project and received &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$4.1 million&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; of grant funds for the project.  Kingstone is investigating options for securing &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$6.1 million&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; of its commitment to the project.  Amtech owns &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;55%&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; of Kingstone Technology Hong Kong Limited, which owns &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;100%&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; of Kingstone.  Amtech has no obligation or plan to fund Kingstone's commitments under this agreement.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;EPA Accrual&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; - As a result of the merger with BTU, the Company assumed BTU&amp;#8217;s proportional responsibility for clean-up costs at a Superfund site.  As an equipment manufacturer, BTU generated and disposed of small quantities of solid waste that were considered hazardous under Environment Protection Agency (&amp;#8220;EPA&amp;#8221;) regulations. Because BTU historically used a waste disposal firm that disposed of the solid waste at a site that the EPA designated as a Superfund site, BTU was named by the EPA as one of the entities responsible for a portion of the expected clean-up costs. Based on the Company's proportional responsibility, as negotiated with and agreed to by the EPA, the Company's liability related to this matter is &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$0.2&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; million.  As of June 30, 2015, the remaining liability is &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$0.1&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; million, which is included in Other Accrued Liabilities on the Condensed Consolidated Balance Sheet as of June 30, 2015.  In 2009, in accordance with the agreement, the Company established a letter of credit for &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$0.2&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; million to the benefit of the EPA for potential cash payments as settlements for the Company&amp;#8217;s proportional liability.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Litigation&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; &amp;#8211; The Company and its subsidiaries are defendants from time to time in actions for matters arising out of their business operations. On October 21, 2014, the Company entered into an Agreement and Plan of Merger (the "Merger Agreement") by and among the Company,  BTU Merger Sub, Inc., a Delaware corporation (the "Merger Sub"), and BTU.   Shortly after the Company entered into the Merger Agreement with BTU, two separate putative stockholder class action complaints were filed in the Court of Chancery of the State of Delaware (together, the "Stockholder Actions"). The first was filed on November 4, 2014 and the second on November 17, 2014, purportedly on behalf of BTU&amp;#8217;s public stockholders, against BTU, the members of the BTU Board, Amtech and Merger Sub.  The Stockholder Actions were consolidated into one action on December 4, 2014.  The complaints generally alleged that, in connection with entering into the Merger Agreement, the BTU board of directors breached certain fiduciary duties owed to BTU's stockholders.  The complaints sought various forms of declaratory and injunctive relief, as well as compensatory damages. &lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;padding-bottom:10px;text-align:justify;font-size:11pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;On January&amp;#160;16, 2015, the Company and BTU, along with the other defendants named therein, entered into a memorandum of understanding (the &amp;#8220;MOU&amp;#8221;) to settle the Stockholder Actions. Pursuant to the MOU, the parties to the Stockholder Actions agreed to resolve the claims alleged and the Company and BTU agreed to make certain additional disclosures regarding the Merger.&lt;/font&gt;&lt;font style="font-family:inherit;font-size:11pt;"&gt;  On June 22, 2015, the Company and BTU, along with the other defendants named therein, filed a Stipulation and Agreement of Compromise and Settlement (the &amp;#8220;Stipulation of Settlement&amp;#8221;) with the Court of Chancery in the State of Delaware to memorialize the MOU. The Stipulation of Settlement provides for a release of all claims against the Company and BTU, along with the other defendants named therein, subject to an exception for certain securities law claims. In addition, the Stipulation of Settlement provides that BTU will be responsible for the payment of certain amounts in plaintiffs&amp;#8217; attorney fees and expenses in connection with the settlement. The Stipulation of Settlement is subject to court approval. The Company and BTU entered into the Stipulation of Settlement solely to avoid the costs, risks and uncertainties inherent in litigation and without admitting any liability or wrongdoing. There can be no assurance that the court will approve the Stipulation of Settlement. In such event, the proposed settlement as contemplated by the Stipulation of Settlement may be terminated.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;padding-bottom:10px;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The merger was consummated on January 30, 2015.  The plaintiffs&amp;#8217; attorney fees and expenses were reflected as a liability on the opening balance sheet of BTU on the date of the merger.  See Note 10, "Acquisitions," for more information on the Merger Agreement.&lt;/font&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:CommitmentsAndContingenciesDisclosureTextBlock>
	<us-gaap:ConcentrationRiskCreditRisk contextRef="FD2015Q3YTD" id="Fact-225A6B4A16A44926BCD1F541C11739DC">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Concentrations of Credit Risk &amp;#8211;&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; Financial instruments that potentially subject the Company to significant concentrations of credit risk consist principally of trade accounts receivable and cash. The Company&amp;#8217;s customers, located throughout the world, consist of manufacturers of solar cells, semiconductors, semiconductor wafers, light-emitting diodes (LEDs) and micro-electro-mechanical systems (MEMS). Credit risk is managed by performing ongoing credit evaluations of the customers&amp;#8217; financial condition, by requiring significant deposits where appropriate, and by actively monitoring collections. Letters of credit are required of certain customers depending on the size of the order, type of customer or its creditworthiness, and its country of domicile. Reserves for potentially uncollectible receivables are maintained based on an assessment of collectability.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The Company maintains its cash, cash equivalents and restricted cash in multiple financial institutions. Balances in the United States (approximately &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;60%&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; of total cash balances) are primarily invested in U.S. Treasuries or are in financial institutions insured by the Federal Deposit Insurance Corporation (FDIC). The remainder of the Company&amp;#8217;s cash is maintained in banks in The Netherlands, France, China, and other foreign jurisdictions that are uninsured.&lt;/font&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:ConcentrationRiskCreditRisk>
	<us-gaap:ConcentrationRiskDisclosureTextBlock contextRef="FD2015Q3YTD" id="Fact-1E053A91D6C3055886F7F541C10FF9A8">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Major Customers and Foreign Sales&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;During the nine months ended &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;"&gt;June&amp;#160;30, 2015&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;, &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;"&gt;two&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; customers individually represented &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;"&gt;18%&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; and &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;12%&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; of net revenues.  During the nine months ended &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;"&gt;June&amp;#160;30, 2014&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;, &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;"&gt;two&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; customers individually represented &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;"&gt;15%&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; and &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;13%&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; of net revenues. &lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Our net revenues were to customers in the following geographic regions:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:98.6328125%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="6" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td width="66%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="15%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="2%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="15%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Nine Months Ended June 30,&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2014&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;text-indent:18px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;United States&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;25&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;27&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;text-indent:18px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Other&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Total North America&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;27&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;27&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;height:12px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;height:12px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;height:12px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;height:12px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;text-indent:18px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;China&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;26&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;14&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;text-indent:18px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Taiwan&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;15&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;18&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;text-indent:18px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Other&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;18&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;14&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;padding-left:18px;text-indent:0px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Total Asia&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;59&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;46&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;text-indent:18px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Germany&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:9pt;"&gt;&lt;font style="font-family:inherit;font-size:9pt;"&gt;5&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:9pt;"&gt;&lt;font style="font-family:inherit;font-size:9pt;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;8&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;text-indent:18px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Other&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;9&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;19&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;padding-left:18px;text-indent:0px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Total Europe&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;14&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;27&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;100&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;100&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:ConcentrationRiskDisclosureTextBlock>
	<us-gaap:ConsolidationPolicyTextBlock contextRef="FD2015Q3YTD" id="Fact-20CFCE2883CFE51E70A0F541C10E8F2A">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Principles of Consolidation &amp;#8211;&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; The consolidated financial statements include the accounts of the Company and its wholly-owned subsidiaries and subsidiaries in which it has a controlling interest. The Company reports noncontrolling interests in consolidated entities as a component of equity separate from the Company&amp;#8217;s equity. All material intercompany accounts and transactions have been eliminated in consolidation.&lt;/font&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:ConsolidationPolicyTextBlock>
	<us-gaap:DeferredRevenueByArrangementDisclosureTextBlock contextRef="FD2015Q3YTD" id="Fact-356E2D9C0BB0E0CA6D90F541C1174505">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The components of deferred profit are as follows:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="8" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td width="71%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="12%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="12%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;June&amp;#160;30, &lt;br clear="none"/&gt;2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;September&amp;#160;30, &lt;br clear="none"/&gt;2014&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;(dollars in thousands)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Deferred revenues&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;7,536&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;8,118&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Deferred costs&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2,416&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,210&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Deferred profit&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;5,120&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;6,908&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:DeferredRevenueByArrangementDisclosureTextBlock>
	<us-gaap:EarningsPerShareTextBlock contextRef="FD2015Q3YTD" id="Fact-9179D5922ED2924EBEF1F541C1142DE7">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Earnings Per Share&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Basic earnings per share ("EPS") is computed by dividing net income (loss) by the weighted average number of common shares outstanding for the period. Diluted EPS is computed similarly to basic EPS except that the denominator is increased to include the number of additional common shares that would have been outstanding if potentially dilutive common shares had been issued. In the case of a net loss, diluted earnings per share is calculated in the same manner as basic EPS.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;For the three and nine months ended &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;"&gt;June&amp;#160;30, 2015&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;, options for &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,640,000&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; shares and &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;14,000&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; restricted stock awards are excluded from the diluted EPS calculations because they are anti-dilutive. For the three and nine months ended &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;"&gt;June&amp;#160;30, 2014&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;, options for &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,016,000&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; shares and &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;38,000&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; restricted stock awards were excluded from the diluted EPS calculations because they were anti-dilutive.  &lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The following table outlines basic and diluted EPS:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="16" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td width="45%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="11%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="11%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="11%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="11%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;Three Months Ended June 30,&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;Nine Months Ended June 30,&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;2014&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;2014&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;(in thousands, except per share amounts)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;(in thousands, except per share amounts)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Basic Loss Per Share Computation&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Net loss attributable to Amtech Systems, Inc.&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(1,604&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(5,257&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(9,119&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(9,802&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Weighted Average Shares Outstanding:&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Common stock&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;13,103&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;9,843&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;11,644&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;9,694&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Basic loss per share attributable to Amtech shareholders&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(0.12&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(0.53&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(0.78&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(1.01&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Diluted Loss Per Share Computation&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Net loss attributable to Amtech Systems, Inc.&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(1,604&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(5,257&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(9,119&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(9,802&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Weighted Average Shares Outstanding:&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Common stock&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;13,103&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;9,843&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;11,644&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;9,694&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Common stock equivalents (1)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Diluted shares&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;13,103&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:3px double #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;9,843&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-top:1px solid #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;11,644&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:3px double #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;9,694&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-top:1px solid #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Diluted loss per share attributable to Amtech shareholders&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(0.12&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(0.53&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(0.78&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(1.01&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"&gt;&lt;tr&gt;&lt;td style="width:48px;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:top" rowspan="1" colspan="1"&gt;&lt;div style="line-height:120%;font-size:8pt;padding-left:24px;"&gt;&lt;font style="font-family:inherit;font-size:8pt;"&gt;(1)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:top;" rowspan="1" colspan="1"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;"&gt;The number of common stock equivalents is calculated using the treasury stock method and the average market price during the period.&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;</us-gaap:EarningsPerShareTextBlock>
	<us-gaap:FairValueOfFinancialInstrumentsPolicy contextRef="FD2015Q3YTD" id="Fact-518CB120DE7AE6BD592DF541C116FFAF">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Fair Value of Financial Instruments &lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;padding-top:6px;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In accordance with the requirements of the Fair Value Measurements and Disclosures Topic of the Financial Accounting Standards Board ("FASB") Accounting Standards Codification ("ASC"), the Company groups its financial assets and liabilities measured at fair value on a recurring basis in three levels, based on the markets in which the assets and liabilities are traded and the reliability of the assumptions used to determine fair value. These levels are: &lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;padding-top:6px;text-align:justify;text-indent:48px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Level 1 - Valuation is based upon quoted market price for identical instruments traded in active markets.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;padding-top:6px;text-align:justify;padding-left:48px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Level 2 - Valuation is based on quoted market prices for similar instruments in active markets, quoted prices for identical or similar instruments in markets that are not active, and model-based valuation techniques for which all significant assumptions are observable in the market.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;padding-top:6px;text-align:justify;padding-left:48px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Level 3 - Valuation is generated from model-based techniques that use significant assumptions not observable in the market. Valuation techniques include use of discounted cash flow models and similar techniques.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:4pt;"&gt;&lt;font style="font-family:inherit;font-size:4pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In accordance with the requirements of the Fair Value Measurements and Disclosures Topic of the FASB ASC, it is the Company's policy to use observable inputs whenever reasonably practicable in order to minimize the use of unobservable inputs when developing fair value measurements. When available, the Company uses quoted market prices to measure fair value. If market prices are not available, the fair value measurement is based on models that use primarily market based parameters including interest rate yield curves, option volatilities and currency rates. In certain cases, where market rate assumptions are not available, the Company is required to make judgments about assumptions market participants would use to estimate the fair value of a financial instrument. Changes in the underlying assumptions used, including discount rates and estimates of future cash flows, could significantly affect the results of current or future values. &lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-style:italic;"&gt;Cash, Cash Equivalents and Restricted Cash -&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; Included in Cash and Cash Equivalents in the Condensed Consolidated Balance Sheets is &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$9.6 million&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; and &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;"&gt;$17.0 million&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; as of &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;"&gt;June&amp;#160;30, 2015&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; and &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;"&gt;September&amp;#160;30, 2014&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;, respectively, of money market funds invested in treasury bills, notes and other direct obligations of the U.S. Treasury.  The fair value of this cash equivalent is based on Level 1 inputs in the fair value hierarchy.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-style:italic;"&gt;Receivables and Payables - &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The recorded amounts of these financial instruments, including accounts receivable and accounts payable, approximate their fair value because of the short maturities of these instruments.  If measured at fair value in the financial statements, these financial instruments would be classified as Level 3 in the fair value hierarchy.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-style:italic;"&gt;Debt - &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The recorded amounts of these financial instruments, including long-term debt and current maturities of long-term debt, approximate fair value and are considered Level 2 in the fair value hierarchy.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:FairValueOfFinancialInstrumentsPolicy>
	<us-gaap:GoodwillAndIntangibleAssetsGoodwillPolicy contextRef="FD2015Q3YTD" id="Fact-0DAB4DF49C7C286EF9A5F541C118EC01">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Goodwill -&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; Goodwill is not subject to amortization and is reviewed for impairment on an annual basis, typically at the end of the fiscal year, or more frequently if circumstances dictate.&lt;/font&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:GoodwillAndIntangibleAssetsGoodwillPolicy>
	<us-gaap:GoodwillAndIntangibleAssetsIntangibleAssetsPolicy contextRef="FD2015Q3YTD" id="Fact-4EA2FABFACFE403C2484F541C119C765">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Intangibles&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; &amp;#8211; Intangible assets are capitalized and amortized over their useful life if the life is determinable. If the life is not determinable, amortization is not recorded.&lt;/font&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:GoodwillAndIntangibleAssetsIntangibleAssetsPolicy>
	<us-gaap:ImpairmentOrDisposalOfLongLivedAssetsIncludingIntangibleAssetsPolicyPolicyTextBlock contextRef="FD2015Q3YTD" id="Fact-8ED2E7D5980CC8D05648F541C1181B6D">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Long-lived assets -  &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Long-lived assets are reviewed for impairment when events or changes in circumstances indicate that the carrying amount of an asset may not be recoverable.  &lt;/font&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:ImpairmentOrDisposalOfLongLivedAssetsIncludingIntangibleAssetsPolicyPolicyTextBlock>
	<us-gaap:IncomeTaxDisclosureTextBlock contextRef="FD2015Q3YTD" id="Fact-BD80A3FFA36A47C5EE52F541C118D982">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Income Taxes&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;padding-left:24px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:11pt;"&gt;&lt;font style="font-family:inherit;font-size:11pt;"&gt;T&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;he quarterly income tax provision is calculated using an estimated annual effective tax rate, based upon expected annual income, permanent items, statutory rates and planned tax strategies in the various jurisdictions in which the Company operates. However, losses in certain jurisdictions and discrete items are treated separately.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Deferred tax assets and liabilities reflect the tax effects of temporary differences between the carrying value of assets and liabilities for financial reporting purposes and the amounts used for income tax purposes. The Company records a valuation allowance if, based on the weight of available evidence, it is more likely than not that some portion or all of a deferred tax asset will not be realized. Our expectations regarding realization of our deferred tax assets is based upon the weight of all available evidence, including such factors as our recent earnings history, expected future taxable income and available tax planning strategies. As a result of the merger with BTU, the Company determined that is more likely than not that some of our U.S. federal deferred tax assets would not be realized, and recorded a partial valuation allowance in the U.S.  The Company maintains a valuation allowance with respect to certain state, federal and foreign deferred tax assets that may not be recovered. Each quarter, the valuation allowance is re-evaluated. During the nine months ended June 30, 2015 the valuation allowance increased by &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$1.8 million&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; due to net operating losses in The Netherlands and France, partially offset by utilization of net operating losses in China.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The Company classifies all of our uncertain tax positions as non-current income taxes payable.  At &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;June&amp;#160;30, 2015&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; and &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;September&amp;#160;30, 2014&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;, the total amount of unrecognized tax benefits was approximately &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$3.2&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; million. If recognized, these amounts would favorably impact the effective tax rate.  &lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The Company classifies interest and penalties related to unrecognized tax benefits as income tax expense. As of &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;June&amp;#160;30, 2015&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; and &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;September&amp;#160;30, 2014&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;, the Company had an accrual for potential interest and penalties of approximately &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$1.8 million&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; and &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$1.6 million&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;, respectively.   &lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The Company and one or more of its subsidiaries file income tax returns in The Netherlands, Germany, France, Singapore, Malaysia, China and Hong Kong, as well as the U.S. and various states in the U.S. The Company and its subsidiaries have a number of open tax years dictated by statute in each of their respective taxing jurisdictions, but generally is from &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;3&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; to &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;5&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; years.&lt;/font&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:IncomeTaxDisclosureTextBlock>
	<us-gaap:InventoryPolicyTextBlock contextRef="FD2015Q3YTD" id="Fact-B5784869C5DAB98D2F3CF541C1195537">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Inventories&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; &amp;#8211; Inventories are stated at the lower of cost or net realizable value. Approximately &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;50%&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; and &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;70%&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; of inventory is valued on an average cost basis with the remainder determined on a first-in, first-out (FIFO) basis at June 30, 2015, and September 30, 2014, respectively. &lt;/font&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:InventoryPolicyTextBlock>
	<us-gaap:LongTermDebtTextBlock contextRef="FD2015Q3YTD" id="Fact-B0EA176DF9CFCE14D85CF541C11181C1">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Long-term Debt&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In January 2015, the Company acquired &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$7.2&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; million of long-term debt as part of the BTU merger.  The debt acquired is a mortgage note secured by its real property in Billerica, Massachusetts, and is stated at fair market value of &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$7.0&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; million as of June 30, 2015. The debt acquired has an interest rate of &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;4.4%&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; through September 26, 2018, at which time the interest rate will be adjusted to a per annum fixed rate equal to the aggregate of the Federal Home Loan Board Five Year Classic Advance Rate plus two hundred forty basis points.  The maturity date of the debt acquired is September 26, 2023.  All outstanding principal and accrued and unpaid interest will be due and payable on the maturity date.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In December 2014, the Company acquired long-term debt of &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$2.0&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; million as part of the SoLayTec acquisition.  The debt is stated at fair market value of &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$2.3&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; million as of June 30, 2015.  The debt acquired has interest rates ranging from &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;5.95%&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; to &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;10%&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; and maturity dates ranging from fiscal 2017 to fiscal 2021.&lt;/font&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:LongTermDebtTextBlock>
	<us-gaap:NewAccountingPronouncementsPolicyPolicyTextBlock contextRef="FD2015Q3YTD" id="Fact-C608B58403C3D3A943F7F541C119BD8C">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Impact of Recently Issued Accounting Pronouncements&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In July 2015, the FASB issued Accounting Standards Update ("ASU") No.&amp;#160;2015-11, Simplifying the Measurement of Inventory. This ASU simplifies the measurement of inventory by requiring certain inventory to be measured at the lower of cost or net realizable value. The amendments in this ASU are effective for fiscal years beginning after December 15, 2016 and for interim periods therein. We do not expect adoption of this ASU to have a material impact on our consolidated financial position and results of operations.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In June 2015, the FASB issued ASU 2015-10, Technical Corrections&amp;#160;and Improvements&amp;#160;, which clarifies various topics in the FASB Accounting Standards Codification. ASU 2015-10 is effective for the interim and annual periods ending after December 15, 2015. Early adoption is permitted. We are currently assessing the impact of this ASU, but do not expect it to have a material impact on our consolidated financial position and results of operations.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In May&amp;#160;2015, the FASB issued ASU 2015-08,&amp;#160;Business Combinations (Topic 805):&amp;#160;Pushdown&amp;#160;Accounting - Amendments to SEC Paragraphs Pursuant to Staff Accounting Bulletin No.&amp;#160;115, or ASU 2015-08.  The amendments in ASU 2015-08 amend various SEC paragraphs included in the FASB&amp;#8217;s Accounting Standards Codification to reflect the issuance of Staff Accounting Bulletin No.&amp;#160;115, or SAB 115. SAB 115 rescinds portions of the interpretive guidance included in the SEC&amp;#8217;s Staff Accounting Bulletins series and brings existing guidance into conformity with ASU No.&amp;#160;2014-17,&amp;#160;Business Combinations (Topic 805):&amp;#160;Pushdown&amp;#160;Accounting, which provides an acquired entity with an option to apply&amp;#160;pushdown&amp;#160;accounting in its separate financial statements upon occurrence of an event in which an acquirer obtains control of the acquired entity. We have adopted the amendments in ASU 2015-08, effective May&amp;#160;8, 2015, as the amendments in the update are effective upon issuance. The adoption did not have a material impact on our consolidated financial position and results of operation.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In April 2015, the FASB issued ASU No.&amp;#160;&amp;#160;2015-05,&amp;#160;Intangibles-Goodwill and Other-Internal-Use Software (Subtopic 350-40). This ASU provides guidance that will help entities evaluate the accounting for fees paid by a customer in a cloud computing arrangement, including whether a cloud computing arrangement includes a software license. If a cloud computing arrangement includes a software license, then this ASU requires the customer to account for the software license consistent with the acquisition of other software licenses; otherwise, the customer should account for the arrangement as a service contract. The ASU is effective for fiscal years, and interim periods within those fiscal years, beginning after December&amp;#160;15, 2015. Entities can elect to adopt the amendments either prospectively to all arrangements entered into after the effective date or retrospectively to all prior periods. We are currently assessing the impact of this ASU.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In April 2015, the FASB issued ASU No. 2015-3, Interest-Imputation of Interest (Subtopic 835-30).  This ASU requires debt issuance costs related to a recognized debt liability be presented in the balance sheet as a direct deduction from the carrying amount of the related debt liability instead of being presented as an asset.&amp;#160;The ASU requires retrospective application and represents a change in accounting principle. The ASU is effective for fiscal years beginning after December&amp;#160;15, 2015. Early adoption is permitted for financial statements that have not been previously issued. We are currently assessing the impact of this ASU.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In January 2015, the FASB issued ASU No. 2015-1, Income Statement - Extraordinary and Unusual Items (Subtopic 225-20).  The FASB is issuing this ASU as part of its initiative to reduce costs and complexity in accounting standards, known as its Simplification Initiative.  This ASU eliminates from generally accepted accounting principles in the United States (" GAAP") the concept of extraordinary items in an effort to save time and reduce costs, while alleviating uncertainty and maintaining accurate and fulsome disclosure.  The amendments in this ASU are effective for fiscal years, and interim periods within those fiscal years, beginning after December 15, 2015.  We are currently assessing the impact of this ASU but do not expect it to have a material impact on our consolidated financial position and results of operations.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In June 2014, the FASB issued ASU No. 2014-12 which provides guidance on how to account for share-based payment awards where the terms of the award provide that a performance target that affects vesting could be achieved after the requisite service period. This ASU requires that a performance target that affects vesting and that could be achieved after the requisite service period be treated as a performance condition. ASU 2014-12 is effective for annual periods, and interim periods within those annual periods, beginning after December 15, 2015, and early adoption is permitted. We are currently assessing the impact of this ASU but do not expect it to have a material impact on our consolidated financial position and results of operations.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In May 2014, the FASB issued ASU No. 2014-09, Revenue from Contracts with Customers, which supersedes most of the current revenue recognition requirements. The core principle of the new guidance is that an entity should recognize revenue to depict the transfer of promised goods or services to customers in an amount that reflects the consideration to which the entity expects to be entitled in exchange for these goods or services. New disclosures about the nature, amount, timing and uncertainty of revenue and cash flows arising from contracts with customers are also required. This guidance is effective for the Company in the first quarter of fiscal year 2018 and early application is not permitted. Entities must adopt the new guidance using one of two retrospective application methods. The Company is currently evaluating the standard and the impact on our financial position and results of operations.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In April 2014, the FASB issued ASU No. 2014-08 Presentation of Financial Statements (Topic 205) and Property, Plant and Equipment (Topic 360).  The amendments in this ASU change the requirements for reporting discontinued operations in Subtopic 205-20. A discontinued operation may include a component of an entity or a group of components of an entity, or a business or nonprofit activity.  Under current U.S. GAAP, many disposals, some of which may be routine in nature and not a change in an entity's strategy, are reported in discontinued operations.  The amendments in this ASU improve the definition of discontinued operations by limiting discontinued operations reporting to disposals of components of an entity that represent strategic shifts that have (or will have) a major effect on an entity's operations and financial results. The amendments in this ASU require expanded disclosures for discontinued operations. The FASB concluded that those disclosures should provide users of financial statements with more information about the assets, liabilities, revenues, and expenses of discontinued operations.  The amendments in this ASU also require an entity to disclose the pretax profit or loss of an individually significant component of an entity that does not qualify for discontinued operations reporting.   The amendments in this ASU are effective for fiscal years, and interim periods within those years, beginning after December 15, 2014. The Company will evaluate the impact of this ASU as future transactions occur.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:NewAccountingPronouncementsPolicyPolicyTextBlock>
	<us-gaap:OrganizationConsolidationBasisOfPresentationBusinessDescriptionAndAccountingPoliciesTextBlock contextRef="FD2015Q3YTD" id="Fact-6D8D2655927F9DF04786F541C118988A">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Basis of Presentation&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Nature of Operations and Basis of Presentation &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;-&amp;#160;The Company serves niche markets in industries that are experiencing rapid technological advances and which historically have been very cyclical. Therefore, future profitability and growth depend on the Company&amp;#8217;s ability to develop or acquire and market profitable new products and on its ability to adapt to cyclical trends.&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The accompanying unaudited condensed consolidated financial statements have been prepared pursuant to the rules and regulations of the Securities and Exchange Commission (the &amp;#8220;SEC&amp;#8221;), and consequently do not include all disclosures normally required by accounting principles generally accepted in the United States of America. In the opinion of management, the accompanying unaudited interim condensed consolidated financial statements contain all adjustments necessary, all of which are of a normal and recurring nature, to present fairly our financial position, results of operations and cash flows. Certain information and note disclosures normally included in financial statements have been condensed or omitted pursuant to the rules and regulations of the SEC. These condensed consolidated financial statements should be read in conjunction with the audited consolidated financial statements and notes thereto included in our Annual Report on Form 10-K for the fiscal year ended September&amp;#160;30, 2014.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The consolidated results of operations for the three and nine months ended June&amp;#160;30, 2015, are not necessarily indicative of the results to be expected for the full fiscal year.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Principles of Consolidation &amp;#8211;&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; The consolidated financial statements include the accounts of the Company and its wholly-owned subsidiaries and subsidiaries in which it has a controlling interest. The Company reports noncontrolling interests in consolidated entities as a component of equity separate from the Company&amp;#8217;s equity. All material intercompany accounts and transactions have been eliminated in consolidation.&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Use of Estimates&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; - The preparation of consolidated financial statements in conformity with accounting principles generally accepted in the United States of America requires management to make estimates and assumptions that affect the reported amounts of assets and liabilities and disclosure of contingent assets and liabilities at the date of the consolidated financial statements and the reported amounts of revenue and expenses during the reporting period. Actual results could differ from those estimates.&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Revenue Recognition&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; - We review product and service sales contracts with multiple deliverables to determine if separate units of accounting are present. Where separate units of accounting exist, revenue allocated to delivered items is the lower of the relative selling price of the delivered items in the sales arrangement or the portion of the selling price that is not contingent upon performance of the service. &lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;We recognize revenue when persuasive evidence of an arrangement exists; the product has been delivered and title has transferred, or services have been rendered; and the seller&amp;#8217;s price to the buyer is fixed or determinable and collectability is reasonably assured. For us, this policy generally results in revenue recognition at the following points:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"&gt;&lt;tr&gt;&lt;td style="width:48px;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:top" rowspan="1" colspan="1"&gt;&lt;div style="line-height:120%;font-size:10pt;padding-left:24px;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1.&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:top;" rowspan="1" colspan="1"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;For our equipment business, transactions where legal title passes to the customer upon shipment, we recognize revenue upon shipment for those products where the customer&amp;#8217;s defined specifications have been met with at least two similarly configured systems and processes for a comparably situated customer. Our selling prices may include both equipment and services, i.e., installation and start-up services performed by our service technicians. The equipment and services are multiple deliverables. Certain equipment that has a positive track record of successful installation and customer acceptance are considered to be routine systems.  Our recognition of revenue upon delivery of such equipment that has been routinely installed and accepted is equal to the total selling price minus the relative selling price of the undelivered services.  &lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Where the installation and acceptance of more than two similarly configured equipment has not become routine, recognition of revenue upon delivery of equipment is limited to the lesser of (i) the total selling price minus the relative selling price of the undelivered services or (ii) the non-contingent amount. Since we defer only those costs directly related to installation, or other unit of accounting not yet delivered, and the portion of the contract price is often considerably greater than the relative selling price of those items, our policy at times will result in deferral of profit that is disproportionate in relation to the deferred revenue. When this is the case, the gross margin recognized in one period will be lower and the gross margin reported in a subsequent period will improve.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"&gt;&lt;tr&gt;&lt;td style="width:48px;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:top" rowspan="1" colspan="1"&gt;&lt;div style="line-height:120%;font-size:10pt;padding-left:24px;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2.&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:top;" rowspan="1" colspan="1"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;For products where the customer&amp;#8217;s defined specifications have not been met with at least two similarly configured systems and processes, the revenue and directly related costs are deferred at the time of shipment and later recognized at the time of customer acceptance or when this criterion has been met. We have, on occasion, experienced longer than expected delays in receiving cash from certain customers pending final installation or system acceptance. If some of our customers refuse to pay the final payment, or otherwise delay final acceptance or installation, the deferred revenue would not be recognized, adversely affecting our future cash flows and operating results.&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"&gt;&lt;tr&gt;&lt;td style="width:48px;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:top" rowspan="1" colspan="1"&gt;&lt;div style="line-height:120%;font-size:10pt;padding-left:24px;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;3.&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:top;" rowspan="1" colspan="1"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Sales of certain equipment, spare parts and consumables are recognized upon shipment, as there are no post shipment obligations other than standard warranties.&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"&gt;&lt;tr&gt;&lt;td style="width:48px;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:top" rowspan="1" colspan="1"&gt;&lt;div style="line-height:120%;font-size:10pt;padding-left:24px;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;4.&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:top;" rowspan="1" colspan="1"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Service revenue is recognized upon performance of the services requested by the customer. Revenue related to service contracts is recognized ratably over the period of the contract or in accordance with the terms of the contract, which generally coincides with the performance of the services requested by the customer.&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Deferred Profit&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; &amp;#8211; Revenue deferred pursuant to the Company&amp;#8217;s revenue recognition policy, net of the related deferred costs, if any, is recorded as deferred profit in current liabilities. The components of deferred profit are as follows:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="8" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td width="71%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="12%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="12%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;June&amp;#160;30, &lt;br clear="none"/&gt;2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;September&amp;#160;30, &lt;br clear="none"/&gt;2014&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;(dollars in thousands)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Deferred revenues&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;7,536&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;8,118&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Deferred costs&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2,416&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,210&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Deferred profit&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;5,120&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;6,908&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Concentrations of Credit Risk &amp;#8211;&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; Financial instruments that potentially subject the Company to significant concentrations of credit risk consist principally of trade accounts receivable and cash. The Company&amp;#8217;s customers, located throughout the world, consist of manufacturers of solar cells, semiconductors, semiconductor wafers, light-emitting diodes (LEDs) and micro-electro-mechanical systems (MEMS). Credit risk is managed by performing ongoing credit evaluations of the customers&amp;#8217; financial condition, by requiring significant deposits where appropriate, and by actively monitoring collections. Letters of credit are required of certain customers depending on the size of the order, type of customer or its creditworthiness, and its country of domicile. Reserves for potentially uncollectible receivables are maintained based on an assessment of collectability.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The Company maintains its cash, cash equivalents and restricted cash in multiple financial institutions. Balances in the United States (approximately &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;60%&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; of total cash balances) are primarily invested in U.S. Treasuries or are in financial institutions insured by the Federal Deposit Insurance Corporation (FDIC). The remainder of the Company&amp;#8217;s cash is maintained in banks in The Netherlands, France, China, and other foreign jurisdictions that are uninsured.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;As of &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;June&amp;#160;30, 2015&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;, &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;one&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; customer accounted for &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;12%&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; of accounts receivable.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Restricted Cash&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; &amp;#8211; Restricted cash is &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;"&gt;$1.6 million&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; and &lt;/font&gt;&lt;font style="font-family:Times New Roman;font-size:10pt;color:#000000;font-style:normal;font-weight:normal;text-decoration:none;"&gt;$2.4 million&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; as of &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;"&gt;June&amp;#160;30, 2015&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;, and &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;"&gt;September&amp;#160;30, 2014&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;, respectively. The balance includes collateral for bank guarantees required by certain customers from whom deposits have been received in advance of shipment and cash received from research and development grants related to our ion implant technology to be used for research and development projects.  &lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; &lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Accounts Receivable - Unbilled and Other&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; &amp;#8211; Unbilled and other accounts receivable consist mainly of the contingent portion of the sales price that is not collectible until successful installation of the product. These amounts are generally billed upon final customer acceptance. For the majority of these amounts, a liability has been accrued in deferred profit. &lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Inventories&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; &amp;#8211; Inventories are stated at the lower of cost or net realizable value. Approximately &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;50%&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; and &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;70%&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; of inventory is valued on an average cost basis with the remainder determined on a first-in, first-out (FIFO) basis at June 30, 2015, and September 30, 2014, respectively. The components of inventories are as follows:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="8" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td width="71%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="12%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="12%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;June&amp;#160;30, &lt;br clear="none"/&gt;2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;September&amp;#160;30, &lt;br clear="none"/&gt;2014&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;(dollars in thousands)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Purchased parts and raw materials&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;13,129&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;8,797&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Work-in-process&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;6,248&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;4,809&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Finished goods&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;10,059&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;3,154&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;29,436&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;16,760&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Property, Plant and Equipment&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; &amp;#8211; Property, plant and equipment are recorded at cost. Maintenance and repairs are charged to expense as incurred. The cost of property retired or sold and the related accumulated depreciation are removed from the applicable accounts when disposition occurs and any gain or loss is recognized. Depreciation is computed using the straight-line method. Useful lives for equipment, machinery and leasehold improvements range from three to seven years; for furniture and fixtures from five to ten years; and for buildings &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;"&gt;20-25&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; years.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The following is a summary of property, plant and equipment:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="8" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td width="71%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="12%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="12%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;June&amp;#160;30, &lt;br clear="none"/&gt;2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;September&amp;#160;30, &lt;br clear="none"/&gt;2014&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;(dollars in thousands)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Land, building and leasehold improvements&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;18,137&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;10,414&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Equipment and machinery&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;11,704&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;8,189&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Furniture and fixtures&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;5,418&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;5,453&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;35,259&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;24,056&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Accumulated depreciation&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(15,217&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(14,304&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;20,042&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;9,752&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Goodwill -&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; Goodwill is not subject to amortization and is reviewed for impairment on an annual basis, typically at the end of the fiscal year, or more frequently if circumstances dictate.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The following is a summary of activity in goodwill:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:center;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:87.109375%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="16" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td width="44%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="11%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="11%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="11%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="12%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;Solar&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;Semiconductor&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;Polishing&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;Total&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="15" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;(dollars in thousands)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;padding-left:18px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&amp;#160;&amp;#160;Goodwill&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;12,315&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;728&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;13,043&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;padding-left:18px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&amp;#160;&amp;#160;Accumulated impairment losses&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(4,720&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(4,720&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Carrying value at September 30, 2014&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;7,595&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;728&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;8,323&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Goodwill recognized due to acquisitions&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2,324&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;4,697&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;7,021&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Net exchange differences&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(301&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(301&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Carrying value at June 30, 2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;9,618&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;4,697&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;728&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;15,043&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;padding-left:18px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&amp;#160;&amp;#160;Goodwill&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;14,155&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;4,697&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;728&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;19,580&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&amp;#160;&amp;#160;Accumulated impairment losses&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(4,537&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(4,537&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Carrying value at June 30, 2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;9,618&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;4,697&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;728&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;15,043&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Intangibles&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; &amp;#8211; Intangible assets are capitalized and amortized over their useful life if the life is determinable. If the life is not determinable, amortization is not recorded.  On December 24, 2014, the Company acquired a &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;51%&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; controlling interest in SoLayTec,&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;B.V. (&amp;#8220;SoLayTec&amp;#8221;). The intangible assets of SoLayTec total &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$2.2&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; million and are included in "Other" in the table below. The fair value of the intangible assets, the allocation and the amortization period are still being evaluated by the Company.  On January 30, 2015, the Company completed the merger with BTU International, Inc. ("BTU"). The intangible assets of BTU total &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$1.3&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; million, and are included in "Trade Names" in the table below.  See Note 10, &amp;#8220;Acquisitions,&amp;#8221; for more information regarding the acquisition of SoLayTec and the merger with BTU.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The following is a summary of intangibles:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:center;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:98.4375%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="22" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td width="20%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="13%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="8%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="9%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="8%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="4%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="8%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="9%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="8%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;"&gt;Useful Life&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;Gross Carrying Amount&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;Accumulated Amortization&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;Net Carrying Amount&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;Gross Carrying Amount&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;Accumulated Amortization&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;Net Carrying Amount&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="9" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;June 30, 2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="9" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;September 30, 2014&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="19" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;(dollars in thousands)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Non-compete agreements&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;4-8 years&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,035&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(1,035&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,055&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(955&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;100&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Customer lists&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;10 years&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;714&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(595&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;119&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;817&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(592&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;225&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Technology&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;5-10 years&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2,116&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(1,805&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;311&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2,319&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(1,682&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;637&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In-process research and development&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;5 years&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,600&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(267&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,333&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,600&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(27&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,573&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Trade names&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;15 years&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,330&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(37&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,293&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Other&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2-12 years&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2,484&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(353&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2,131&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;321&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(178&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;143&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;9,279&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(4,092&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;5,187&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;6,112&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(3,434&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2,678&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Long-lived assets -  &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Long-lived assets are reviewed for impairment when events or changes in circumstances indicate that the carrying amount of an asset may not be recoverable.    &lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Warranty &amp;#8211;&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; A limited warranty is provided free of charge, generally for periods of &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;"&gt;12&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; to &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;"&gt;24&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; months, for all purchases of the Company&amp;#8217;s new products and systems. Accruals are recorded for estimated warranty costs at the time revenue is recognized. &lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The following is a summary of activity in accrued warranty expense:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="8" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td width="67%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="14%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="14%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Nine Months Ended June 30,&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2014&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;(dollars in thousands)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Beginning balance&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;628&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,454&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Warranty expenditures&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(530&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(663&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Warranty provisions/(adjustment)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;925&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(25&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Ending balance&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,023&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;766&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Stock-Based Compensation -&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; The Company measures compensation costs relating to share-based payment transactions based upon the grant date fair value of the award. Those costs are recognized as expense over the requisite service period, which is generally the vesting period. The benefits of tax deductions in excess of recognized compensation cost are credited to additional paid-in capital and reported as cash flow from financing activities rather than as cash flow from operating activities. &lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Stock-based compensation expense reduced the Company&amp;#8217;s results of operations by the following amounts:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="16" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td width="59%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="8%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="8%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="7%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="7%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Three Months Ended June 30,&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Nine Months Ended June 30,&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2014&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2014&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="15" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;(dollars in thousands)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Effect on income before income taxes (1)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(296&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(230&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(864&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(603&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Effect on income taxes&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;40&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;36&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;134&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;196&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Effect on net income&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(256&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(194&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(730&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(407&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"&gt;&lt;tr&gt;&lt;td style="width:48px;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:top" rowspan="1" colspan="1"&gt;&lt;div style="line-height:120%;font-size:8pt;padding-left:24px;"&gt;&lt;font style="font-family:inherit;font-size:8pt;"&gt;(1)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:top;" rowspan="1" colspan="1"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;"&gt;Stock-based compensation expense is included in selling, general and administrative expenses.&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;div style="line-height:120%;text-align:justify;padding-left:48px;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Stock options issued under the terms of the plans have, or will have, an exercise price equal to the fair market value of the common stock at the close of trading on the Nasdaq the day prior to the date of the option grant and expire no later than &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;"&gt;10 years&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; from the date of grant, with the most recent grant expiring in 2025. Options issued by the Company vest over &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;"&gt;2&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; to &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;"&gt;4&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; years.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Stock option transactions and the options outstanding are summarized as follows:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="16" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td width="49%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="10%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="10%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="10%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="10%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="15" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Nine Months Ended June 30,&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2014&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Options&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Weighted&lt;/font&gt;&lt;/div&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Average&lt;/font&gt;&lt;/div&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Exercise&lt;/font&gt;&lt;/div&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Price&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Options&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Weighted&lt;/font&gt;&lt;/div&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Average&lt;/font&gt;&lt;/div&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Exercise&lt;/font&gt;&lt;/div&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Price&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Outstanding at beginning of period&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,063,324&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;7.37&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,059,417&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;6.71&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Granted&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;327,500&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;9.74&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;272,906&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;7.01&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Assumed - merger&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;367,229&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;14.19&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Exercised&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(94,454&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;5.51&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(263,358&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;4.31&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Forfeited&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(26,571&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;29.48&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(4,546&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;8.71&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Outstanding at end of period&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,637,028&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;9.12&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,064,419&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;7.37&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Exercisable at end of period&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,005,690&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;9.75&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;663,220&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;8.14&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Weighted average fair value of options &lt;/font&gt;&lt;/div&gt;&lt;div style="font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;granted during the period&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;5.91&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;4.38&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The fair value of options was estimated at the grant date using the Black-Scholes option pricing model with the following assumptions:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="4" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td width="67%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="16%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="16%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Nine Months Ended June 30,&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2014&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Risk free interest rate&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Expected life&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;6 years&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;6 years&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Dividend rate&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;0%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;0%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Volatility&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;67%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;69%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;To estimate expected lives for this valuation, it was assumed that options will be exercised at varying schedules after becoming fully vested. Forfeitures have been estimated at the time of grant and will be revised, if necessary, in subsequent periods if actual forfeitures differ from those estimates. Forfeitures were estimated based upon historical experience. Fair value computations are highly sensitive to the volatility factor assumed; the greater the volatility, the higher the computed fair value of the options granted. The Company uses historical stock prices to determine the volatility factor.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The Company awards restricted shares under the existing share-based compensation plans. The Company's restricted share awards vest in equal annual installments over a two- to four-year period. The total value of these awards is expensed on a ratable basis over the service period of the employees receiving the grants. The &amp;#8220;service period&amp;#8221; is the time during which the employees receiving grants must remain employees for the shares granted to fully vest.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Restricted stock transactions and awards outstanding are summarized as follows:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="14" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td width="49%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="11%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="10%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="11%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="10%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="13" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Nine Months Ended June 30,&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="6" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="6" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2014&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Awards&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Weighted&lt;/font&gt;&lt;/div&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Average&lt;/font&gt;&lt;/div&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Grant Date&lt;/font&gt;&lt;/div&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Fair Value&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Awards&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Weighted&lt;/font&gt;&lt;/div&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Average&lt;/font&gt;&lt;/div&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Grant Date&lt;/font&gt;&lt;/div&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Fair Value&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Beginning Outstanding&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;35,203&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;10.13&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;69,154&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;10.13&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Released&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(21,663&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;11.47&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(30,828&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;10.08&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Ending Outstanding&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;13,540&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;7.98&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;38,326&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;10.17&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Fair Value of Financial Instruments &lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;padding-top:6px;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In accordance with the requirements of the Fair Value Measurements and Disclosures Topic of the Financial Accounting Standards Board ("FASB") Accounting Standards Codification ("ASC"), the Company groups its financial assets and liabilities measured at fair value on a recurring basis in three levels, based on the markets in which the assets and liabilities are traded and the reliability of the assumptions used to determine fair value. These levels are: &lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;padding-top:6px;text-align:justify;text-indent:48px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Level 1 - Valuation is based upon quoted market price for identical instruments traded in active markets.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;padding-top:6px;text-align:justify;padding-left:48px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Level 2 - Valuation is based on quoted market prices for similar instruments in active markets, quoted prices for identical or similar instruments in markets that are not active, and model-based valuation techniques for which all significant assumptions are observable in the market.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;padding-top:6px;text-align:justify;padding-left:48px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Level 3 - Valuation is generated from model-based techniques that use significant assumptions not observable in the market. Valuation techniques include use of discounted cash flow models and similar techniques.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:4pt;"&gt;&lt;font style="font-family:inherit;font-size:4pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In accordance with the requirements of the Fair Value Measurements and Disclosures Topic of the FASB ASC, it is the Company's policy to use observable inputs whenever reasonably practicable in order to minimize the use of unobservable inputs when developing fair value measurements. When available, the Company uses quoted market prices to measure fair value. If market prices are not available, the fair value measurement is based on models that use primarily market based parameters including interest rate yield curves, option volatilities and currency rates. In certain cases, where market rate assumptions are not available, the Company is required to make judgments about assumptions market participants would use to estimate the fair value of a financial instrument. Changes in the underlying assumptions used, including discount rates and estimates of future cash flows, could significantly affect the results of current or future values. &lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-style:italic;"&gt;Cash, Cash Equivalents and Restricted Cash -&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; Included in Cash and Cash Equivalents in the Condensed Consolidated Balance Sheets is &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$9.6 million&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; and &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;"&gt;$17.0 million&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; as of &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;"&gt;June&amp;#160;30, 2015&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; and &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;"&gt;September&amp;#160;30, 2014&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;, respectively, of money market funds invested in treasury bills, notes and other direct obligations of the U.S. Treasury.  The fair value of this cash equivalent is based on Level 1 inputs in the fair value hierarchy.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-style:italic;"&gt;Receivables and Payables - &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The recorded amounts of these financial instruments, including accounts receivable and accounts payable, approximate their fair value because of the short maturities of these instruments.  If measured at fair value in the financial statements, these financial instruments would be classified as Level 3 in the fair value hierarchy.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-style:italic;"&gt;Debt - &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The recorded amounts of these financial instruments, including long-term debt and current maturities of long-term debt, approximate fair value and are considered Level 2 in the fair value hierarchy.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Pensions &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;- The Company has retirement plans covering substantially all employees. The principal plans are the multiemployer defined benefit pension plans of the Company&amp;#8217;s operations in The Netherlands and France and the plan for hourly union employees in Pennsylvania. The multiemployer plans in the United States and France are insignificant to the Company's results of operations and financial condition.  The Company's defined contribution plans cover substantially all of the employees in the United States. The Company matches employee funds on a discretionary basis.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Shipping expense&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; &amp;#8211; Shipping expenses of &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$1.2 million&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; and &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;"&gt;$0.2 million&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; for the three months ended &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;"&gt;June&amp;#160;30, 2015&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; and &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;"&gt;2014&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;, respectively, are included in selling, general and administrative expenses.  Shipping expenses of &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$1.9&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; million and &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$0.7&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; million for the nine months ended &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;"&gt;June&amp;#160;30, 2015&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; and &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;"&gt;2014&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;, respectively, are included in selling, general and administrative expenses.    &lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Research, development and engineering expense&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; &amp;#8211; Research, development and engineering expenses consist of the cost of employees, consultants and contractors who design, engineer and develop new products and processes; materials and supplies used in those activities; and product prototyping. The Company receives reimbursements through governmental research and development grants which are netted against these expenses when certain conditions have been met. The table below shows gross research and development expenses and grants earned:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:99.0234375%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="16" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td width="41%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="12%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="12%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="12%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="12%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Three Months Ended&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Nine Months Ended&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;June&amp;#160;30, &lt;br clear="none"/&gt;2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;June&amp;#160;30, &lt;br clear="none"/&gt;2014&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;June&amp;#160;30, &lt;br clear="none"/&gt;2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;June&amp;#160;30, &lt;br clear="none"/&gt;2014&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;(dollars in thousands)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;(dollars in thousands)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Research, development and engineering&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;3,650&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;3,054&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;9,763&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;8,442&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Grants earned&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(2,342&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(1,655&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(5,869&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(3,999&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Net research, development and engineering&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,308&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,399&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;3,894&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;4,443&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Segments -&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; Effective for the second quarter of fiscal 2015, following the Company's merger with BTU, the Company changed the way it reports its segment information.  Previously reported information has been recast to reflect the current reportable segments. The Company now reports its financial results in three segments:  solar, semiconductor and polishing. See Note 5: "Business Segment Information" for additional information on the Company's reportable segments. See also Note 10: "Acquisitions" for additional information with respect to the Company's recent acquisitions.  &lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Impact of Recently Issued Accounting Pronouncements&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In July 2015, the FASB issued Accounting Standards Update ("ASU") No.&amp;#160;2015-11, Simplifying the Measurement of Inventory. This ASU simplifies the measurement of inventory by requiring certain inventory to be measured at the lower of cost or net realizable value. The amendments in this ASU are effective for fiscal years beginning after December 15, 2016 and for interim periods therein. We do not expect adoption of this ASU to have a material impact on our consolidated financial position and results of operations.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In June 2015, the FASB issued ASU 2015-10, Technical Corrections&amp;#160;and Improvements&amp;#160;, which clarifies various topics in the FASB Accounting Standards Codification. ASU 2015-10 is effective for the interim and annual periods ending after December 15, 2015. Early adoption is permitted. We are currently assessing the impact of this ASU, but do not expect it to have a material impact on our consolidated financial position and results of operations.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In May&amp;#160;2015, the FASB issued ASU 2015-08,&amp;#160;Business Combinations (Topic 805):&amp;#160;Pushdown&amp;#160;Accounting - Amendments to SEC Paragraphs Pursuant to Staff Accounting Bulletin No.&amp;#160;115, or ASU 2015-08.  The amendments in ASU 2015-08 amend various SEC paragraphs included in the FASB&amp;#8217;s Accounting Standards Codification to reflect the issuance of Staff Accounting Bulletin No.&amp;#160;115, or SAB 115. SAB 115 rescinds portions of the interpretive guidance included in the SEC&amp;#8217;s Staff Accounting Bulletins series and brings existing guidance into conformity with ASU No.&amp;#160;2014-17,&amp;#160;Business Combinations (Topic 805):&amp;#160;Pushdown&amp;#160;Accounting, which provides an acquired entity with an option to apply&amp;#160;pushdown&amp;#160;accounting in its separate financial statements upon occurrence of an event in which an acquirer obtains control of the acquired entity. We have adopted the amendments in ASU 2015-08, effective May&amp;#160;8, 2015, as the amendments in the update are effective upon issuance. The adoption did not have a material impact on our consolidated financial position and results of operation.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In April 2015, the FASB issued ASU No.&amp;#160;&amp;#160;2015-05,&amp;#160;Intangibles-Goodwill and Other-Internal-Use Software (Subtopic 350-40). This ASU provides guidance that will help entities evaluate the accounting for fees paid by a customer in a cloud computing arrangement, including whether a cloud computing arrangement includes a software license. If a cloud computing arrangement includes a software license, then this ASU requires the customer to account for the software license consistent with the acquisition of other software licenses; otherwise, the customer should account for the arrangement as a service contract. The ASU is effective for fiscal years, and interim periods within those fiscal years, beginning after December&amp;#160;15, 2015. Entities can elect to adopt the amendments either prospectively to all arrangements entered into after the effective date or retrospectively to all prior periods. We are currently assessing the impact of this ASU.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In April 2015, the FASB issued ASU No. 2015-3, Interest-Imputation of Interest (Subtopic 835-30).  This ASU requires debt issuance costs related to a recognized debt liability be presented in the balance sheet as a direct deduction from the carrying amount of the related debt liability instead of being presented as an asset.&amp;#160;The ASU requires retrospective application and represents a change in accounting principle. The ASU is effective for fiscal years beginning after December&amp;#160;15, 2015. Early adoption is permitted for financial statements that have not been previously issued. We are currently assessing the impact of this ASU.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In January 2015, the FASB issued ASU No. 2015-1, Income Statement - Extraordinary and Unusual Items (Subtopic 225-20).  The FASB is issuing this ASU as part of its initiative to reduce costs and complexity in accounting standards, known as its Simplification Initiative.  This ASU eliminates from generally accepted accounting principles in the United States (" GAAP") the concept of extraordinary items in an effort to save time and reduce costs, while alleviating uncertainty and maintaining accurate and fulsome disclosure.  The amendments in this ASU are effective for fiscal years, and interim periods within those fiscal years, beginning after December 15, 2015.  We are currently assessing the impact of this ASU but do not expect it to have a material impact on our consolidated financial position and results of operations.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In June 2014, the FASB issued ASU No. 2014-12 which provides guidance on how to account for share-based payment awards where the terms of the award provide that a performance target that affects vesting could be achieved after the requisite service period. This ASU requires that a performance target that affects vesting and that could be achieved after the requisite service period be treated as a performance condition. ASU 2014-12 is effective for annual periods, and interim periods within those annual periods, beginning after December 15, 2015, and early adoption is permitted. We are currently assessing the impact of this ASU but do not expect it to have a material impact on our consolidated financial position and results of operations.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In May 2014, the FASB issued ASU No. 2014-09, Revenue from Contracts with Customers, which supersedes most of the current revenue recognition requirements. The core principle of the new guidance is that an entity should recognize revenue to depict the transfer of promised goods or services to customers in an amount that reflects the consideration to which the entity expects to be entitled in exchange for these goods or services. New disclosures about the nature, amount, timing and uncertainty of revenue and cash flows arising from contracts with customers are also required. This guidance is effective for the Company in the first quarter of fiscal year 2018 and early application is not permitted. Entities must adopt the new guidance using one of two retrospective application methods. The Company is currently evaluating the standard and the impact on our financial position and results of operations.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In April 2014, the FASB issued ASU No. 2014-08 Presentation of Financial Statements (Topic 205) and Property, Plant and Equipment (Topic 360).  The amendments in this ASU change the requirements for reporting discontinued operations in Subtopic 205-20. A discontinued operation may include a component of an entity or a group of components of an entity, or a business or nonprofit activity.  Under current U.S. GAAP, many disposals, some of which may be routine in nature and not a change in an entity's strategy, are reported in discontinued operations.  The amendments in this ASU improve the definition of discontinued operations by limiting discontinued operations reporting to disposals of components of an entity that represent strategic shifts that have (or will have) a major effect on an entity's operations and financial results. The amendments in this ASU require expanded disclosures for discontinued operations. The FASB concluded that those disclosures should provide users of financial statements with more information about the assets, liabilities, revenues, and expenses of discontinued operations.  The amendments in this ASU also require an entity to disclose the pretax profit or loss of an individually significant component of an entity that does not qualify for discontinued operations reporting.   The amendments in this ASU are effective for fiscal years, and interim periods within those years, beginning after December 15, 2014. The Company will evaluate the impact of this ASU as future transactions occur.&lt;/font&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:OrganizationConsolidationBasisOfPresentationBusinessDescriptionAndAccountingPoliciesTextBlock>
	<us-gaap:OtherLiabilitiesDisclosureTextBlock contextRef="FD2015Q3YTD" id="Fact-1B21809C5ED06261523BF541C1126940">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Other Accrued Liabilities&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Other accrued liabilities consist of the following:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:center;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:602px;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="8" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td width="458px" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="9px" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="50px" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="4px" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="5px" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="9px" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="62px" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="4px" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;June 30, 2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;September 30, 2014&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;"&gt;(dollars in thousands)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Unearned research and development grants&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;859&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;3,989&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Other&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;4,606&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,357&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;5,465&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;5,346&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:OtherLiabilitiesDisclosureTextBlock>
	<us-gaap:OtherLiabilitiesTableTextBlock contextRef="FD2015Q3YTD" id="Fact-77A8235F05030A1A01B2F541C113F425">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Other accrued liabilities consist of the following:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:center;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:602px;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="8" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td width="458px" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="9px" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="50px" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="4px" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="5px" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="9px" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="62px" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="4px" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;June 30, 2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;September 30, 2014&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;"&gt;(dollars in thousands)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Unearned research and development grants&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;859&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;3,989&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Other&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;4,606&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,357&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;5,465&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;5,346&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:OtherLiabilitiesTableTextBlock>
	<us-gaap:PensionAndOtherPostretirementPlansPensionsPolicy contextRef="FD2015Q3YTD" id="Fact-B9FB57FEF4CEAB611073F541C119EF68">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Pensions &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;- The Company has retirement plans covering substantially all employees. The principal plans are the multiemployer defined benefit pension plans of the Company&amp;#8217;s operations in The Netherlands and France and the plan for hourly union employees in Pennsylvania. The multiemployer plans in the United States and France are insignificant to the Company's results of operations and financial condition.  The Company's defined contribution plans cover substantially all of the employees in the United States. The Company matches employee funds on a discretionary basis.&lt;/font&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:PensionAndOtherPostretirementPlansPensionsPolicy>
	<us-gaap:PropertyPlantAndEquipmentPolicyTextBlock contextRef="FD2015Q3YTD" id="Fact-957D0BDFB49CFB8B5626F541C10E36D7">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Property, Plant and Equipment&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; &amp;#8211; Property, plant and equipment are recorded at cost. Maintenance and repairs are charged to expense as incurred. The cost of property retired or sold and the related accumulated depreciation are removed from the applicable accounts when disposition occurs and any gain or loss is recognized. Depreciation is computed using the straight-line method. Useful lives for equipment, machinery and leasehold improvements range from three to seven years; for furniture and fixtures from five to ten years; and for buildings &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;"&gt;20-25&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; years.&lt;/font&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:PropertyPlantAndEquipmentPolicyTextBlock>
	<us-gaap:PropertyPlantAndEquipmentTextBlock contextRef="FD2015Q3YTD" id="Fact-1EEF70F9CCE3C185DB5EF541C11706F2">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The following is a summary of property, plant and equipment:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="8" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td width="71%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="12%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="12%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;June&amp;#160;30, &lt;br clear="none"/&gt;2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;September&amp;#160;30, &lt;br clear="none"/&gt;2014&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;(dollars in thousands)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Land, building and leasehold improvements&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;18,137&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;10,414&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Equipment and machinery&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;11,704&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;8,189&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Furniture and fixtures&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;5,418&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;5,453&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;35,259&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;24,056&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Accumulated depreciation&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(15,217&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(14,304&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;20,042&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;9,752&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:PropertyPlantAndEquipmentTextBlock>
	<us-gaap:ReceivablesPolicyTextBlock contextRef="FD2015Q3YTD" id="Fact-AD8BDCFEB8E4F1D61525F541C1194328">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Accounts Receivable - Unbilled and Other&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; &amp;#8211; Unbilled and other accounts receivable consist mainly of the contingent portion of the sales price that is not collectible until successful installation of the product. These amounts are generally billed upon final customer acceptance. For the majority of these amounts, a liability has been accrued in deferred profit. &lt;/font&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:ReceivablesPolicyTextBlock>
	<us-gaap:ResearchAndDevelopmentExpensePolicy contextRef="FD2015Q3YTD" id="Fact-D0481914A7A9EF3494E9F541C1168203">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Research, development and engineering expense&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; &amp;#8211; Research, development and engineering expenses consist of the cost of employees, consultants and contractors who design, engineer and develop new products and processes; materials and supplies used in those activities; and product prototyping. The Company receives reimbursements through governmental research and development grants which are netted against these expenses when certain conditions have been met. &lt;/font&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:ResearchAndDevelopmentExpensePolicy>
	<us-gaap:RevenueRecognitionDeferredRevenue contextRef="FD2015Q3YTD" id="Fact-4CBBDF671E5BB68CADCDF541C11776B9">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Deferred Profit&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; &amp;#8211; Revenue deferred pursuant to the Company&amp;#8217;s revenue recognition policy, net of the related deferred costs, if any, is recorded as deferred profit in current liabilities. &lt;/font&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:RevenueRecognitionDeferredRevenue>
	<us-gaap:RevenueRecognitionPolicyTextBlock contextRef="FD2015Q3YTD" id="Fact-C6523EEDF9B0551B9EBEF541C118A102">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Revenue Recognition&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; - We review product and service sales contracts with multiple deliverables to determine if separate units of accounting are present. Where separate units of accounting exist, revenue allocated to delivered items is the lower of the relative selling price of the delivered items in the sales arrangement or the portion of the selling price that is not contingent upon performance of the service. &lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;We recognize revenue when persuasive evidence of an arrangement exists; the product has been delivered and title has transferred, or services have been rendered; and the seller&amp;#8217;s price to the buyer is fixed or determinable and collectability is reasonably assured. For us, this policy generally results in revenue recognition at the following points:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"&gt;&lt;tr&gt;&lt;td style="width:48px;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:top" rowspan="1" colspan="1"&gt;&lt;div style="line-height:120%;font-size:10pt;padding-left:24px;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1.&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:top;" rowspan="1" colspan="1"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;For our equipment business, transactions where legal title passes to the customer upon shipment, we recognize revenue upon shipment for those products where the customer&amp;#8217;s defined specifications have been met with at least two similarly configured systems and processes for a comparably situated customer. Our selling prices may include both equipment and services, i.e., installation and start-up services performed by our service technicians. The equipment and services are multiple deliverables. Certain equipment that has a positive track record of successful installation and customer acceptance are considered to be routine systems.  Our recognition of revenue upon delivery of such equipment that has been routinely installed and accepted is equal to the total selling price minus the relative selling price of the undelivered services.  &lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Where the installation and acceptance of more than two similarly configured equipment has not become routine, recognition of revenue upon delivery of equipment is limited to the lesser of (i) the total selling price minus the relative selling price of the undelivered services or (ii) the non-contingent amount. Since we defer only those costs directly related to installation, or other unit of accounting not yet delivered, and the portion of the contract price is often considerably greater than the relative selling price of those items, our policy at times will result in deferral of profit that is disproportionate in relation to the deferred revenue. When this is the case, the gross margin recognized in one period will be lower and the gross margin reported in a subsequent period will improve.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"&gt;&lt;tr&gt;&lt;td style="width:48px;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:top" rowspan="1" colspan="1"&gt;&lt;div style="line-height:120%;font-size:10pt;padding-left:24px;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2.&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:top;" rowspan="1" colspan="1"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;For products where the customer&amp;#8217;s defined specifications have not been met with at least two similarly configured systems and processes, the revenue and directly related costs are deferred at the time of shipment and later recognized at the time of customer acceptance or when this criterion has been met. We have, on occasion, experienced longer than expected delays in receiving cash from certain customers pending final installation or system acceptance. If some of our customers refuse to pay the final payment, or otherwise delay final acceptance or installation, the deferred revenue would not be recognized, adversely affecting our future cash flows and operating results.&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"&gt;&lt;tr&gt;&lt;td style="width:48px;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:top" rowspan="1" colspan="1"&gt;&lt;div style="line-height:120%;font-size:10pt;padding-left:24px;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;3.&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:top;" rowspan="1" colspan="1"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Sales of certain equipment, spare parts and consumables are recognized upon shipment, as there are no post shipment obligations other than standard warranties.&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"&gt;&lt;tr&gt;&lt;td style="width:48px;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:top" rowspan="1" colspan="1"&gt;&lt;div style="line-height:120%;font-size:10pt;padding-left:24px;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;4.&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:top;" rowspan="1" colspan="1"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Service revenue is recognized upon performance of the services requested by the customer. Revenue related to service contracts is recognized ratably over the period of the contract or in accordance with the terms of the contract, which generally coincides with the performance of the services requested by the customer.&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:RevenueRecognitionPolicyTextBlock>
	<us-gaap:ScheduleOfCompensationCostForShareBasedPaymentArrangementsAllocationOfShareBasedCompensationCostsByPlanTableTextBlock contextRef="FD2015Q3YTD" id="Fact-71A4FA06D7DDFE1A7424F541C116C496">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Stock-based compensation expense reduced the Company&amp;#8217;s results of operations by the following amounts:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="16" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td width="59%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="8%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="8%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="7%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="7%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Three Months Ended June 30,&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Nine Months Ended June 30,&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2014&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2014&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="15" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;(dollars in thousands)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Effect on income before income taxes (1)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(296&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(230&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(864&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(603&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Effect on income taxes&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;40&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;36&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;134&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;196&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Effect on net income&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(256&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(194&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(730&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(407&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"&gt;&lt;tr&gt;&lt;td style="width:48px;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:top" rowspan="1" colspan="1"&gt;&lt;div style="line-height:120%;font-size:8pt;padding-left:24px;"&gt;&lt;font style="font-family:inherit;font-size:8pt;"&gt;(1)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:top;" rowspan="1" colspan="1"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;"&gt;Stock-based compensation expense is included in selling, general and administrative expenses.&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;</us-gaap:ScheduleOfCompensationCostForShareBasedPaymentArrangementsAllocationOfShareBasedCompensationCostsByPlanTableTextBlock>
	<us-gaap:ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock contextRef="FD2015Q3YTD" id="Fact-4755BBF4EDEC5EEFF120F541C1149DED">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The following table outlines basic and diluted EPS:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="16" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td width="45%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="11%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="11%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="11%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="11%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;Three Months Ended June 30,&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;Nine Months Ended June 30,&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;2014&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;2014&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;(in thousands, except per share amounts)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;(in thousands, except per share amounts)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Basic Loss Per Share Computation&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Net loss attributable to Amtech Systems, Inc.&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(1,604&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(5,257&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(9,119&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(9,802&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Weighted Average Shares Outstanding:&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Common stock&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;13,103&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;9,843&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;11,644&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;9,694&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Basic loss per share attributable to Amtech shareholders&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(0.12&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(0.53&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(0.78&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(1.01&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Diluted Loss Per Share Computation&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Net loss attributable to Amtech Systems, Inc.&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(1,604&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(5,257&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(9,119&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(9,802&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Weighted Average Shares Outstanding:&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Common stock&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;13,103&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;9,843&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;11,644&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;9,694&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Common stock equivalents (1)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Diluted shares&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;13,103&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:3px double #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;9,843&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-top:1px solid #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;11,644&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:3px double #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;9,694&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-top:1px solid #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Diluted loss per share attributable to Amtech shareholders&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(0.12&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(0.53&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(0.78&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(1.01&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"&gt;&lt;tr&gt;&lt;td style="width:48px;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:top" rowspan="1" colspan="1"&gt;&lt;div style="line-height:120%;font-size:8pt;padding-left:24px;"&gt;&lt;font style="font-family:inherit;font-size:8pt;"&gt;(1)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:top;" rowspan="1" colspan="1"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;"&gt;The number of common stock equivalents is calculated using the treasury stock method and the average market price during the period.&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;</us-gaap:ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock>
	<us-gaap:ScheduleOfFiniteLivedIntangibleAssetsTableTextBlock contextRef="FD2015Q3YTD" id="Fact-4F591D91D6C79FB64A60F541C116DEFE">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The following is a summary of intangibles:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:center;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:98.4375%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="22" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td width="20%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="13%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="8%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="9%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="8%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="4%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="8%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="9%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="8%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;"&gt;Useful Life&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;Gross Carrying Amount&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;Accumulated Amortization&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;Net Carrying Amount&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;Gross Carrying Amount&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;Accumulated Amortization&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;Net Carrying Amount&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="9" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;June 30, 2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="9" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;September 30, 2014&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="19" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;(dollars in thousands)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Non-compete agreements&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;4-8 years&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,035&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(1,035&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,055&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(955&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;100&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Customer lists&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;10 years&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;714&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(595&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;119&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;817&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(592&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;225&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Technology&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;5-10 years&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2,116&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(1,805&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;311&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2,319&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(1,682&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;637&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In-process research and development&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;5 years&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,600&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(267&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,333&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,600&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(27&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,573&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Trade names&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;15 years&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,330&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(37&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,293&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Other&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2-12 years&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2,484&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(353&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2,131&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;321&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(178&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;143&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;9,279&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(4,092&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;5,187&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;6,112&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(3,434&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2,678&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:ScheduleOfFiniteLivedIntangibleAssetsTableTextBlock>
	<us-gaap:ScheduleOfGoodwillTextBlock contextRef="FD2015Q3YTD" id="Fact-2B5BAE207FB8E1F738EAF541C116C144">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The following is a summary of activity in goodwill:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:center;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:87.109375%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="16" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td width="44%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="11%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="11%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="11%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="12%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;Solar&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;Semiconductor&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;Polishing&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;Total&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="15" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;(dollars in thousands)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;padding-left:18px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&amp;#160;&amp;#160;Goodwill&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;12,315&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;728&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;13,043&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;padding-left:18px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&amp;#160;&amp;#160;Accumulated impairment losses&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(4,720&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(4,720&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Carrying value at September 30, 2014&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;7,595&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;728&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;8,323&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Goodwill recognized due to acquisitions&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2,324&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;4,697&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;7,021&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Net exchange differences&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(301&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(301&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Carrying value at June 30, 2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;9,618&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;4,697&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;728&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;15,043&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;padding-left:18px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&amp;#160;&amp;#160;Goodwill&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;14,155&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;4,697&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;728&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;19,580&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&amp;#160;&amp;#160;Accumulated impairment losses&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(4,537&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(4,537&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Carrying value at June 30, 2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;9,618&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;4,697&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;728&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;15,043&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:ScheduleOfGoodwillTextBlock>
	<us-gaap:ScheduleOfInventoryCurrentTableTextBlock contextRef="FD2015Q3YTD" id="Fact-9A11519446E665C2D11DF541C1164F0C">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The components of inventories are as follows:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="8" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td width="71%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="12%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="12%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;June&amp;#160;30, &lt;br clear="none"/&gt;2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;September&amp;#160;30, &lt;br clear="none"/&gt;2014&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;(dollars in thousands)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Purchased parts and raw materials&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;13,129&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;8,797&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Work-in-process&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;6,248&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;4,809&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Finished goods&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;10,059&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;3,154&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;29,436&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;16,760&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:ScheduleOfInventoryCurrentTableTextBlock>
	<us-gaap:ScheduleOfProductWarrantyLiabilityTableTextBlock contextRef="FD2015Q3YTD" id="Fact-785CED89259C9EE4673BF541C117D0D4">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The following is a summary of activity in accrued warranty expense:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="8" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td width="67%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="14%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="14%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Nine Months Ended June 30,&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2014&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;(dollars in thousands)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Beginning balance&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;628&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,454&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Warranty expenditures&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(530&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(663&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Warranty provisions/(adjustment)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;925&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(25&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Ending balance&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,023&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;766&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:ScheduleOfProductWarrantyLiabilityTableTextBlock>
	<us-gaap:ScheduleOfRecognizedIdentifiedAssetsAcquiredAndLiabilitiesAssumedTableTextBlock contextRef="FD2015Q3YTD" id="Fact-3A7E108121D50B76F2B4F541C11564EC">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;padding-top:13px;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The following table summarizes the allocation of the consideration for the assets acquired and liabilities assumed on &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;January&amp;#160;30, 2015&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;padding-top:13px;text-align:center;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:81.640625%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="4" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td width="77%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="21%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-style:italic;"&gt;(In thousands)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Fair value of net tangible assets acquired&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;20,598&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Goodwill&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;4,697&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Identifiable intangible assets&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,330&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Total consideration allocated&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;26,625&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:ScheduleOfRecognizedIdentifiedAssetsAcquiredAndLiabilitiesAssumedTableTextBlock>
	<us-gaap:ScheduleOfRevenueFromExternalCustomersAttributedToForeignCountriesByGeographicAreaTextBlock contextRef="FD2015Q3YTD" id="Fact-856D2F67723238AE8A1BF541C1147566">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Our net revenues were to customers in the following geographic regions:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:98.6328125%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="6" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td width="66%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="15%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="2%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="15%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Nine Months Ended June 30,&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2014&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;text-indent:18px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;United States&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;25&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;27&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;text-indent:18px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Other&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Total North America&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;27&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;27&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;height:12px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;height:12px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;height:12px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;height:12px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;text-indent:18px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;China&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;26&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;14&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;text-indent:18px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Taiwan&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;15&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;18&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;text-indent:18px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Other&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;18&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;14&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;padding-left:18px;text-indent:0px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Total Asia&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;59&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;46&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;text-indent:18px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Germany&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:9pt;"&gt;&lt;font style="font-family:inherit;font-size:9pt;"&gt;5&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:9pt;"&gt;&lt;font style="font-family:inherit;font-size:9pt;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;8&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;text-indent:18px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Other&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;9&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;19&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;padding-left:18px;text-indent:0px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Total Europe&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;14&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;27&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;100&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;100&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:ScheduleOfRevenueFromExternalCustomersAttributedToForeignCountriesByGeographicAreaTextBlock>
	<us-gaap:ScheduleOfSegmentReportingInformationBySegmentTextBlock contextRef="FD2015Q3YTD" id="Fact-C8001A7670A1317A32E1F541C1107701">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Information concerning our business segments is as follows:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:center;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:99.4140625%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="16" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td width="55%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="8%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="8%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="9%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="9%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Three Months Ended&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Nine Months Ended&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;June 30, 2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;June&amp;#160;30, 2014&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;June 30, 2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;June 30, 2014&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="15" style="vertical-align:middle;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:9pt;"&gt;&lt;font style="font-family:inherit;font-size:9pt;font-weight:bold;"&gt;(dollars in thousands)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Net Revenues:&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Solar *&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;24,392&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;4,632&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;42,141&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;21,137&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Semiconductor&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;12,945&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2,132&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;25,765&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;8,478&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Polishing&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2,679&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2,426&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;8,779&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;7,063&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;40,016&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;9,190&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;76,685&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;36,678&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Operating income (loss):&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Solar *&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,232&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(3,425&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(1,987&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(7,751&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Semiconductor&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(1,113&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;179&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(483&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;927&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Polishing&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;574&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;654&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,917&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,622&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Non-segment related &lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(1,927&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(1,279&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(7,409&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(3,682&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(1,234&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(3,871&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(7,962&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(8,884&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;/div&gt;&lt;div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:justify;text-indent:48px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;* The financial statement of business units included in the Solar segment include some sales of equipment and parts to the semiconductor, silicon wafer and MEMS industries, comprising less than &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;25%&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; of the Solar segment revenue.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:center;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:100%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="8" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td width="73%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="11%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="11%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;June&amp;#160;30, &lt;br clear="none"/&gt;2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;September&amp;#160;30, &lt;br clear="none"/&gt;2014&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:middle;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:9pt;"&gt;&lt;font style="font-family:inherit;font-size:9pt;font-weight:bold;"&gt;(dollars in thousands)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Identifiable Assets:&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Solar&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;65,212&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;56,858&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Semiconductor&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;54,559&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;5,593&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Polishing&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;6,078&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;6,253&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Non-segment related&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;8,206&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;21,200&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;134,055&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;89,904&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:ScheduleOfSegmentReportingInformationBySegmentTextBlock>
	<us-gaap:ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock contextRef="FD2015Q3YTD" id="Fact-DA03DBAD02F97DA97BF3F541C116C9B1">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Stock option transactions and the options outstanding are summarized as follows:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="16" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td width="49%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="10%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="10%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="10%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="10%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="15" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Nine Months Ended June 30,&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2014&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Options&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Weighted&lt;/font&gt;&lt;/div&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Average&lt;/font&gt;&lt;/div&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Exercise&lt;/font&gt;&lt;/div&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Price&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Options&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Weighted&lt;/font&gt;&lt;/div&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Average&lt;/font&gt;&lt;/div&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Exercise&lt;/font&gt;&lt;/div&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Price&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Outstanding at beginning of period&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,063,324&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;7.37&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,059,417&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;6.71&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Granted&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;327,500&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;9.74&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;272,906&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;7.01&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Assumed - merger&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;367,229&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;14.19&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Exercised&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(94,454&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;5.51&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(263,358&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;4.31&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Forfeited&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(26,571&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;29.48&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(4,546&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;8.71&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Outstanding at end of period&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,637,028&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;9.12&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,064,419&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;7.37&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Exercisable at end of period&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,005,690&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;9.75&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;663,220&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;8.14&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Weighted average fair value of options &lt;/font&gt;&lt;/div&gt;&lt;div style="font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;granted during the period&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;5.91&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;4.38&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock>
	<us-gaap:ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock contextRef="FD2015Q3YTD" id="Fact-72B1ABECDBBAA405AC02F541C117B1CB">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The fair value of options was estimated at the grant date using the Black-Scholes option pricing model with the following assumptions:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="4" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td width="67%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="16%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="16%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Nine Months Ended June 30,&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2014&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Risk free interest rate&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Expected life&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;6 years&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;6 years&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Dividend rate&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;0%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;0%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Volatility&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;67%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;69%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock>
	<us-gaap:ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock contextRef="FD2015Q3YTD" id="Fact-7AEE36372501B6BCD793F541C11531EE">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Restricted stock transactions and awards outstanding are summarized as follows:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="14" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td width="49%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="11%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="10%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="11%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="10%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="13" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Nine Months Ended June 30,&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="6" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="6" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2014&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Awards&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Weighted&lt;/font&gt;&lt;/div&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Average&lt;/font&gt;&lt;/div&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Grant Date&lt;/font&gt;&lt;/div&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Fair Value&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Awards&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Weighted&lt;/font&gt;&lt;/div&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Average&lt;/font&gt;&lt;/div&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Grant Date&lt;/font&gt;&lt;/div&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Fair Value&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Beginning Outstanding&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;35,203&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;10.13&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;69,154&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;10.13&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Released&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(21,663&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;11.47&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(30,828&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;10.08&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Ending Outstanding&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;13,540&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;7.98&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;38,326&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;10.17&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock>
	<us-gaap:SegmentReportingDisclosureTextBlock contextRef="FD2015Q3YTD" id="Fact-DBDB80D585E50D6E9CCBF541C10FCE0C">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Business Segment Information&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Following the Company's acquisition of BTU, an evaluation was conducted of the Company's organizational structure.  Beginning with the second quarter of fiscal 2015, the Company made changes to its reportable segments. Prior period amounts have been revised to conform to the current period segment reporting structure. The Company&amp;#8217;s &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;three&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; reportable segments are as follows:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-style:italic;font-weight:bold;"&gt;Solar - &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In the Company&amp;#8217;s Solar segment, we are a leading supplier of thermal processing systems, including related automation, parts and services, to the solar/photovoltaic industry and also offer PECVD (plasma-enhanced chemical vapor deposition) equipment to the global solar market.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-style:italic;font-weight:bold;"&gt;Semiconductor - &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In the Company&amp;#8217;s Semiconductor segment, we design, manufacture, sell and service thermal processing equipment and related controls for use by leading semiconductor manufacturers, and in electronics, automotive and other industries.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-style:italic;font-weight:bold;"&gt;Polishing - &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In the Company's Polishing segment, the Company produces consumables and machinery for lapping (fine abrading) and polishing of materials, such as sapphire substrates, optical components, silicon wafers, numerous types of crystal materials, ceramics and metal components.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;On December 24, 2014, the Company acquired a &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;51%&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; controlling interest in SoLayTec, and on January 30, 2015, the Company completed its acquisition of BTU. Beginning in the second quarter of 2015, SoLayTec&amp;#8217;s business is included in the results for the solar segment, and BTU&amp;#8217;s business is included in the results for the semiconductor segment.  See Note 10, &amp;#8220;Acquisitions&amp;#8221;, for additional information with respect to the Company&amp;#8217;s recent acquisitions.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Information concerning our business segments is as follows:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:center;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:99.4140625%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="16" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td width="55%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="8%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="8%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="9%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="9%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Three Months Ended&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Nine Months Ended&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;June 30, 2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;June&amp;#160;30, 2014&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;June 30, 2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;June 30, 2014&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="15" style="vertical-align:middle;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:9pt;"&gt;&lt;font style="font-family:inherit;font-size:9pt;font-weight:bold;"&gt;(dollars in thousands)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Net Revenues:&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Solar *&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;24,392&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;4,632&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;42,141&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;21,137&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Semiconductor&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;12,945&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2,132&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;25,765&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;8,478&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Polishing&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2,679&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2,426&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;8,779&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;7,063&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;40,016&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;9,190&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;76,685&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;36,678&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Operating income (loss):&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Solar *&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,232&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(3,425&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(1,987&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(7,751&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Semiconductor&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(1,113&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;179&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(483&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;927&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Polishing&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;574&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;654&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,917&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,622&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Non-segment related &lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(1,927&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(1,279&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(7,409&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(3,682&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(1,234&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(3,871&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(7,962&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(8,884&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;/div&gt;&lt;div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:justify;text-indent:48px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;* The financial statement of business units included in the Solar segment include some sales of equipment and parts to the semiconductor, silicon wafer and MEMS industries, comprising less than &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;25%&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; of the Solar segment revenue.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:center;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:100%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="8" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td width="73%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="11%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="11%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;June&amp;#160;30, &lt;br clear="none"/&gt;2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;September&amp;#160;30, &lt;br clear="none"/&gt;2014&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:middle;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:9pt;"&gt;&lt;font style="font-family:inherit;font-size:9pt;font-weight:bold;"&gt;(dollars in thousands)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Identifiable Assets:&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Solar&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;65,212&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;56,858&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Semiconductor&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;54,559&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;5,593&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Polishing&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;6,078&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;6,253&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Non-segment related&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;8,206&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;21,200&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;134,055&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;89,904&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:SegmentReportingDisclosureTextBlock>
	<us-gaap:ShareBasedCompensationOptionAndIncentivePlansPolicy contextRef="FD2015Q3YTD" id="Fact-3B45F6B87CA49419D953F541C11550BE">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Stock-Based Compensation -&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; The Company measures compensation costs relating to share-based payment transactions based upon the grant date fair value of the award. Those costs are recognized as expense over the requisite service period, which is generally the vesting period. The benefits of tax deductions in excess of recognized compensation cost are credited to additional paid-in capital and reported as cash flow from financing activities rather than as cash flow from operating activities. &lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Stock-based compensation expense reduced the Company&amp;#8217;s results of operations by the following amounts:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="16" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td width="59%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="8%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="8%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="7%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="7%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Three Months Ended June 30,&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Nine Months Ended June 30,&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2014&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2014&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="15" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;(dollars in thousands)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Effect on income before income taxes (1)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(296&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(230&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(864&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(603&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Effect on income taxes&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;40&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;36&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;134&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;196&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Effect on net income&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(256&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(194&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(730&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(407&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"&gt;&lt;tr&gt;&lt;td style="width:48px;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:top" rowspan="1" colspan="1"&gt;&lt;div style="line-height:120%;font-size:8pt;padding-left:24px;"&gt;&lt;font style="font-family:inherit;font-size:8pt;"&gt;(1)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:top;" rowspan="1" colspan="1"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;"&gt;Stock-based compensation expense is included in selling, general and administrative expenses.&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;div style="line-height:120%;text-align:justify;padding-left:48px;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Stock options issued under the terms of the plans have, or will have, an exercise price equal to the fair market value of the common stock at the close of trading on the Nasdaq the day prior to the date of the option grant and expire no later than &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;"&gt;10 years&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; from the date of grant, with the most recent grant expiring in 2025. Options issued by the Company vest over &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;"&gt;2&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; to &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;"&gt;4&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; years.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Stock option transactions and the options outstanding are summarized as follows:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="16" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td width="49%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="10%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="10%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="10%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="10%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="15" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Nine Months Ended June 30,&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2014&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Options&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Weighted&lt;/font&gt;&lt;/div&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Average&lt;/font&gt;&lt;/div&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Exercise&lt;/font&gt;&lt;/div&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Price&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Options&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Weighted&lt;/font&gt;&lt;/div&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Average&lt;/font&gt;&lt;/div&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Exercise&lt;/font&gt;&lt;/div&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Price&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Outstanding at beginning of period&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,063,324&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;7.37&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,059,417&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;6.71&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Granted&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;327,500&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;9.74&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;272,906&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;7.01&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Assumed - merger&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;367,229&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;14.19&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Exercised&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(94,454&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;5.51&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(263,358&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;4.31&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Forfeited&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(26,571&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;29.48&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(4,546&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;8.71&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Outstanding at end of period&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,637,028&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;9.12&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,064,419&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;7.37&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Exercisable at end of period&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,005,690&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;9.75&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;663,220&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;8.14&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Weighted average fair value of options &lt;/font&gt;&lt;/div&gt;&lt;div style="font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;granted during the period&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;5.91&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;4.38&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The fair value of options was estimated at the grant date using the Black-Scholes option pricing model with the following assumptions:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="4" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td width="67%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="16%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="1%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td width="16%" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Nine Months Ended June 30,&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2014&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Risk free interest rate&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Expected life&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;6 years&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;6 years&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Dividend rate&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;0%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;0%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Volatility&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;67%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;69%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;To estimate expected lives for this valuation, it was assumed that options will be exercised at varying schedules after becoming fully vested. Forfeitures have been estimated at the time of grant and will be revised, if necessary, in subsequent periods if actual forfeitures differ from those estimates. Forfeitures were estimated based upon historical experience. Fair value computations are highly sensitive to the volatility factor assumed; the greater the volatility, the higher the computed fair value of the options granted. The Company uses historical stock prices to determine the volatility factor.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The Company awards restricted shares under the existing share-based compensation plans. The Company's restricted share awards vest in equal annual installments over a two- to four-year period. The total value of these awards is expensed on a ratable basis over the service period of the employees receiving the grants. The &amp;#8220;service period&amp;#8221; is the time during which the employees receiving grants must remain employees for the shares granted to fully vest.&lt;/font&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:ShareBasedCompensationOptionAndIncentivePlansPolicy>
	<us-gaap:ShippingAndHandlingCostPolicyTextBlock contextRef="FD2015Q3YTD" id="Fact-F8962EC8ED80F727C83AF541C1161606">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Shipping expense&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; &amp;#8211; Shipping expenses of &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$1.2 million&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; and &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;"&gt;$0.2 million&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; for the three months ended &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;"&gt;June&amp;#160;30, 2015&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; and &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;"&gt;2014&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;, respectively, are included in selling, general and administrative expenses.  &lt;/font&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:ShippingAndHandlingCostPolicyTextBlock>
	<us-gaap:StandardProductWarrantyPolicy contextRef="FD2015Q3YTD" id="Fact-C2B724F36C2B66EF7227F541C11667D5">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Warranty &amp;#8211;&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; A limited warranty is provided free of charge, generally for periods of &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;"&gt;12&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; to &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;"&gt;24&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; months, for all purchases of the Company&amp;#8217;s new products and systems. Accruals are recorded for estimated warranty costs at the time revenue is recognized.&lt;/font&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:StandardProductWarrantyPolicy>
	<us-gaap:StockholdersEquityNoteDisclosureTextBlock contextRef="FD2015Q3YTD" id="Fact-8EAFEF02BBEAFA32199DF541C10F4ADE">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Stockholders' Equity&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;padding-bottom:10px;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Shareholder Rights Plan&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;- On December 15, 2008, the Company and Computershare Trust Company, N.A., as Rights Agent (the &amp;#8220;Rights Agent&amp;#8221;), entered into an Amended and Restated Rights Agreement (the &amp;#8220;Restated Rights Agreement&amp;#8221;) which amended and restated the terms governing the previously authorized shareholder rights (each a &amp;#8220;Right&amp;#8221;) to purchase fractional shares of the Company&amp;#8217;s Series A Participating Preferred Stock (&amp;#8220;Series A Preferred&amp;#8221;) currently attached to each of the Company&amp;#8217;s outstanding Common Shares, par value &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$0.01&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; per share (&amp;#8220;Common Shares&amp;#8221;). As amended, each Right entitles the registered holder to purchase from the Company one one-thousandth of a share of Series A Preferred at an exercise price of &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$51.60&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; (the &amp;#8220;Exercise Price&amp;#8221;), subject to adjustment. The rights will expire &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;10&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; years after issuance and will be exercisable if (a) a person or group becomes the beneficial owner of &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;15%&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; or more of the Company&amp;#8217;s common stock or (b) a person or group commences a tender or exchange offer that would result in the offeror beneficially owning 15% or more of the Company&amp;#8217;s common stock.&amp;#160; The Final Expiration Date (as defined in the Restated Rights Agreement) is December 14, 2018.&lt;/font&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:StockholdersEquityNoteDisclosureTextBlock>
	<us-gaap:SubsequentEventsTextBlock contextRef="FD2015Q3YTD" id="Fact-F3AF341E96B7730488B5F541C115AEE6">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Subsequent Event&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In July 2015, subsequent to the third fiscal quarter, the Company's Board of Directors authorized a restructuring of the Company&amp;#8217;s investment in Kingstone Technology Hong Kong Limited (&amp;#8220;Kingstone Hong Kong&amp;#8221;), a subsidiary of the Company in which the Company currently owns &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;55%&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; of the capital stock. As part of the restructuring, the Kingstone Hong Kong and Suzhou Zhuo Jing Investment Center (LP) (&amp;#8220;Suzhou&amp;#8221;) entered into an Investment Agreement (the &amp;#8220;Agreement&amp;#8221;), pursuant to which the parties agreed upon a series of transactions which will result in Suzhou owning &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;31.25%&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; of the capital stock of Shanghai Kingstone Semiconductor Company, Ltd. (&amp;#8220;Shanghai Kingstone&amp;#8221;), Kingstone Hong Kong&amp;#8217;s wholly owned subsidiary. Closing of the transactions is expected to occur on or before August 31, 2015.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Following completion of the transactions, Kingstone Hong Kong will own &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;68.75%&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; of the capital stock of Shanghai Kingstone and Suzhou will own &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;31.25%&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;. Upon closing of the transactions, the Company will receive approximately US&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$4,000,000&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; for a portion of its equity ownership in Kingstone Hong Kong, which will be decreased from &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;55%&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; to &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;15%&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;. In addition, upon closing of the transactions, the Company will be repaid the outstanding principal amount of US&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$4,000,000&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; under the Solar Tool Loan Agreement dated December 9, 2011. Closing of the transactions is also subject to Shanghai Kingstone and Kingstone Hong Kong executing a Sales and Service Agreement that (i) reaffirms the Company&amp;#8217;s exclusive right to sell and service the products of Shanghai Kingstone (subject to Shanghai Kingstone&amp;#8217;s right to sell and service products of Shanghai Kingstone in China), (ii) provides that Shanghai Kingstone and/or Kingstone Hong Kong will purchase from the Company such exclusive right for US&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$5,600,000&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; by the earlier of (a) March 31, 2016 or (b) the commencement of any public offering process of Shanghai Kingstone, and (iii) confirms the Company&amp;#8217;s non-exclusive sales and service right in connection with the products of Shanghai Kingstone after the purchase in item (ii) has been consummated. If any of the closing conditions set forth in the Agreement are not fulfilled or waived before August 31, 2015 (or any other date as agreed by the parties), then any party may terminate this Agreement without any further obligation to the other party. The transaction is subject to customary closing conditions and regulatory approvals in both Shanghai and Hong Kong.&lt;/font&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:SubsequentEventsTextBlock>
	<us-gaap:UseOfEstimates contextRef="FD2015Q3YTD" id="Fact-A10F5144C0AFEBA1F1F3F541C118231B">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Use of Estimates&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; - The preparation of consolidated financial statements in conformity with accounting principles generally accepted in the United States of America requires management to make estimates and assumptions that affect the reported amounts of assets and liabilities and disclosure of contingent assets and liabilities at the date of the consolidated financial statements and the reported amounts of revenue and expenses during the reporting period. Actual results could differ from those estimates.&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;&lt;/font&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:UseOfEstimates>
	<link:footnoteLink xlink:role="http://www.xbrl.org/2003/role/link" xlink:type="extended">
		<link:loc xlink:href="#Fact-06B00876178C625DCF18F541C10E4E45" xlink:label="Fact-06B00876178C625DCF18F541C10E4E45_lbl" xlink:type="locator" />
		<link:loc xlink:href="#Fact-7A572BDDCDF0D87D6B50F541C10F104D" xlink:label="Fact-7A572BDDCDF0D87D6B50F541C10F104D_lbl" xlink:type="locator" />
		<link:loc xlink:href="#Fact-7E43CBE32412EEF19504F541C110BDE6" xlink:label="Fact-7E43CBE32412EEF19504F541C110BDE6_lbl" xlink:type="locator" />
		<link:loc xlink:href="#Fact-C31154FAF828B0264324F541C11094E3" xlink:label="Fact-C31154FAF828B0264324F541C11094E3_lbl" xlink:type="locator" />
		<link:footnoteArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/fact-footnote" xlink:from="Fact-06B00876178C625DCF18F541C10E4E45_lbl" xlink:to="Footnote-DE1D05B391A68754EDF8F541C11CE75D_lbl" xlink:type="arc" />
		<link:footnoteArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/fact-footnote" xlink:from="Fact-7A572BDDCDF0D87D6B50F541C10F104D_lbl" xlink:to="Footnote-DE1D05B391A68754EDF8F541C11CE75D_lbl" xlink:type="arc" />
		<link:footnoteArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/fact-footnote" xlink:from="Fact-7E43CBE32412EEF19504F541C110BDE6_lbl" xlink:to="Footnote-DE1D05B391A68754EDF8F541C11CE75D_lbl" xlink:type="arc" />
		<link:footnoteArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/fact-footnote" xlink:from="Fact-C31154FAF828B0264324F541C11094E3_lbl" xlink:to="Footnote-DE1D05B391A68754EDF8F541C11CE75D_lbl" xlink:type="arc" />
		<link:footnote xlink:label="Footnote-DE1D05B391A68754EDF8F541C11CE75D_lbl" xlink:role="http://www.xbrl.org/2003/role/footnote" xlink:type="resource" xml:lang="en-US">The number of common stock equivalents is calculated using the treasury stock method and the average market price during the period.</link:footnote>
	</link:footnoteLink>
</xbrli:xbrl>
</XBRL>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.SCH
<SEQUENCE>8
<FILENAME>asys-20150630.xsd
<DESCRIPTION>XBRL TAXONOMY EXTENSION SCHEMA DOCUMENT
<TEXT>
<XBRL>
<?xml version="1.0" encoding="US-ASCII"?>
<!--XBRL Document Created with Wdesk from Workiva-->
<!-- -->
<xsd:schema attributeFormDefault="unqualified" elementFormDefault="qualified" targetNamespace="http://www.amtechsystems.com/20150630" xmlns:asys="http://www.amtechsystems.com/20150630" xmlns:link="http://www.xbrl.org/2003/linkbase" xmlns:nonnum="http://www.xbrl.org/dtr/type/non-numeric" xmlns:num="http://www.xbrl.org/dtr/type/numeric" xmlns:xbrldt="http://xbrl.org/2005/xbrldt" xmlns:xbrli="http://www.xbrl.org/2003/instance" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
  <xsd:import namespace="http://fasb.org/us-gaap/2015-01-31" schemaLocation="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd" />
  <xsd:import namespace="http://fasb.org/us-roles/2015-01-31" schemaLocation="http://xbrl.fasb.org/us-gaap/2015/elts/us-roles-2015-01-31.xsd" />
  <xsd:import namespace="http://fasb.org/us-types/2015-01-31" schemaLocation="http://xbrl.fasb.org/us-gaap/2015/elts/us-types-2015-01-31.xsd" />
  <xsd:import namespace="http://www.xbrl.org/2003/instance" schemaLocation="http://www.xbrl.org/2003/xbrl-instance-2003-12-31.xsd" />
  <xsd:import namespace="http://www.xbrl.org/2003/linkbase" schemaLocation="http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd" />
  <xsd:import namespace="http://www.xbrl.org/2009/arcrole/fact-explanatoryFact" schemaLocation="http://www.xbrl.org/lrr/arcrole/factExplanatory-2009-12-16.xsd" />
  <xsd:import namespace="http://www.xbrl.org/2009/role/negated" schemaLocation="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd" />
  <xsd:import namespace="http://www.xbrl.org/2009/role/net" schemaLocation="http://www.xbrl.org/lrr/role/net-2009-12-16.xsd" />
  <xsd:import namespace="http://www.xbrl.org/dtr/type/non-numeric" schemaLocation="http://www.xbrl.org/dtr/type/nonNumeric-2009-12-16.xsd" />
  <xsd:import namespace="http://www.xbrl.org/dtr/type/numeric" schemaLocation="http://www.xbrl.org/dtr/type/numeric-2009-12-16.xsd" />
  <xsd:import namespace="http://xbrl.org/2005/xbrldt" schemaLocation="http://www.xbrl.org/2005/xbrldt-2005.xsd" />
  <xsd:import namespace="http://xbrl.sec.gov/country/2013-01-31" schemaLocation="http://xbrl.sec.gov/country/2013/country-2013-01-31.xsd" />
  <xsd:import namespace="http://xbrl.sec.gov/currency/2014-01-31" schemaLocation="http://xbrl.sec.gov/currency/2014/currency-2014-01-31.xsd" />
  <xsd:import namespace="http://xbrl.sec.gov/dei/2014-01-31" schemaLocation="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd" />
  <xsd:import namespace="http://xbrl.sec.gov/exch/2015-01-31" schemaLocation="http://xbrl.sec.gov/exch/2015/exch-2015-01-31.xsd" />
  <xsd:import namespace="http://xbrl.sec.gov/invest/2013-01-31" schemaLocation="http://xbrl.sec.gov/invest/2013/invest-2013-01-31.xsd" />
  <xsd:import namespace="http://xbrl.sec.gov/naics/2011-01-31" schemaLocation="http://xbrl.sec.gov/naics/2011/naics-2011-01-31.xsd" />
  <xsd:import namespace="http://xbrl.sec.gov/sic/2011-01-31" schemaLocation="http://xbrl.sec.gov/sic/2011/sic-2011-01-31.xsd" />
  <xsd:import namespace="http://xbrl.sec.gov/stpr/2011-01-31" schemaLocation="http://xbrl.sec.gov/stpr/2011/stpr-2011-01-31.xsd" />
  <xsd:annotation>
    <xsd:appinfo>
      <link:linkbaseRef xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" xlink:href="asys-20150630_cal.xml" xlink:role="http://www.xbrl.org/2003/role/calculationLinkbaseRef" xlink:type="simple" />
      <link:linkbaseRef xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" xlink:href="asys-20150630_def.xml" xlink:role="http://www.xbrl.org/2003/role/definitionLinkbaseRef" xlink:type="simple" />
      <link:linkbaseRef xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" xlink:href="asys-20150630_lab.xml" xlink:role="http://www.xbrl.org/2003/role/labelLinkbaseRef" xlink:type="simple" />
      <link:linkbaseRef xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" xlink:href="asys-20150630_pre.xml" xlink:role="http://www.xbrl.org/2003/role/presentationLinkbaseRef" xlink:type="simple" />
      <link:roleType id="Acquisition" roleURI="http://www.amtechsystems.com/role/Acquisition">
        <link:definition>2113100 - Disclosure - Acquisition</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="AcquisitionAcquisitionTables" roleURI="http://www.amtechsystems.com/role/AcquisitionAcquisitionTables">
        <link:definition>2313301 - Disclosure - Acquisition Acquisition (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="AcquisitionAssetsAcquiredAndLiabilitiesAssumedDetails" roleURI="http://www.amtechsystems.com/role/AcquisitionAssetsAcquiredAndLiabilitiesAssumedDetails">
        <link:definition>2413405 - Disclosure - Acquisition - Assets Acquired and Liabilities Assumed (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="AcquisitionConsiderationTransferredDetails" roleURI="http://www.amtechsystems.com/role/AcquisitionConsiderationTransferredDetails">
        <link:definition>2413404 - Disclosure - Acquisition - Consideration Transferred (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="AcquisitionDetails" roleURI="http://www.amtechsystems.com/role/AcquisitionDetails">
        <link:definition>2413402 - Disclosure - Acquisition (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="AcquisitionProFormaDetails" roleURI="http://www.amtechsystems.com/role/AcquisitionProFormaDetails">
        <link:definition>2413403 - Disclosure - Acquisition - Pro Forma (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="BasisOfPresentation" roleURI="http://www.amtechsystems.com/role/BasisOfPresentation">
        <link:definition>2101100 - Disclosure - Basis of Presentation</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="BasisOfPresentationCashEquivalentsDetails" roleURI="http://www.amtechsystems.com/role/BasisOfPresentationCashEquivalentsDetails">
        <link:definition>2401412 - Disclosure - Basis of Presentation - Cash Equivalents (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="BasisOfPresentationConcentrationsOfCreditRiskDetails" roleURI="http://www.amtechsystems.com/role/BasisOfPresentationConcentrationsOfCreditRiskDetails">
        <link:definition>2401404 - Disclosure - Basis of Presentation - Concentrations of Credit Risk (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="BasisOfPresentationDeferredProfitDetails" roleURI="http://www.amtechsystems.com/role/BasisOfPresentationDeferredProfitDetails">
        <link:definition>2401403 - Disclosure - Basis of Presentation - Deferred Profit (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="BasisOfPresentationGoodwillDetails" roleURI="http://www.amtechsystems.com/role/BasisOfPresentationGoodwillDetails">
        <link:definition>2401408 - Disclosure - Basis of Presentation - Goodwill (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="BasisOfPresentationIntangiblesDetails" roleURI="http://www.amtechsystems.com/role/BasisOfPresentationIntangiblesDetails">
        <link:definition>2401409 - Disclosure - Basis of Presentation - Intangibles (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="BasisOfPresentationInventoriesDetails" roleURI="http://www.amtechsystems.com/role/BasisOfPresentationInventoriesDetails">
        <link:definition>2401406 - Disclosure - Basis of Presentation - Inventories (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="BasisOfPresentationPolicies" roleURI="http://www.amtechsystems.com/role/BasisOfPresentationPolicies">
        <link:definition>2201201 - Disclosure - Basis of Presentation (Policies)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="BasisOfPresentationPropertyPlantAndEquipmentDetails" roleURI="http://www.amtechsystems.com/role/BasisOfPresentationPropertyPlantAndEquipmentDetails">
        <link:definition>2401407 - Disclosure - Basis of Presentation - Property, Plant and Equipment (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="BasisOfPresentationResearchAndDevelopmentExpenseDetails" roleURI="http://www.amtechsystems.com/role/BasisOfPresentationResearchAndDevelopmentExpenseDetails">
        <link:definition>2401414 - Disclosure - Basis of Presentation - Research and Development Expense (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="BasisOfPresentationRestrictedCashDetails" roleURI="http://www.amtechsystems.com/role/BasisOfPresentationRestrictedCashDetails">
        <link:definition>2401405 - Disclosure - Basis of Presentation - Restricted Cash (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="BasisOfPresentationShippingExpenseDetails" roleURI="http://www.amtechsystems.com/role/BasisOfPresentationShippingExpenseDetails">
        <link:definition>2401413 - Disclosure - Basis of Presentation - Shipping Expense (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="BasisOfPresentationStockBasedCompensationDetails" roleURI="http://www.amtechsystems.com/role/BasisOfPresentationStockBasedCompensationDetails">
        <link:definition>2401411 - Disclosure - Basis of Presentation - Stock-Based Compensation (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="BasisOfPresentationTables" roleURI="http://www.amtechsystems.com/role/BasisOfPresentationTables">
        <link:definition>2301302 - Disclosure - Basis of Presentation (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="BasisOfPresentationWarrantyDetails" roleURI="http://www.amtechsystems.com/role/BasisOfPresentationWarrantyDetails">
        <link:definition>2401410 - Disclosure - Basis of Presentation - Warranty (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="BusinessSegmentInformation" roleURI="http://www.amtechsystems.com/role/BusinessSegmentInformation">
        <link:definition>2107100 - Disclosure - Business Segment Information</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="BusinessSegmentInformationDetails" roleURI="http://www.amtechsystems.com/role/BusinessSegmentInformationDetails">
        <link:definition>2407402 - Disclosure - Business Segment Information (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="BusinessSegmentInformationTables" roleURI="http://www.amtechsystems.com/role/BusinessSegmentInformationTables">
        <link:definition>2307301 - Disclosure - Business Segment Information (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="CommitmentsAndContingencies" roleURI="http://www.amtechsystems.com/role/CommitmentsAndContingencies">
        <link:definition>2112100 - Disclosure - Commitments and Contingencies</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="CommitmentsAndContingenciesDetails" roleURI="http://www.amtechsystems.com/role/CommitmentsAndContingenciesDetails">
        <link:definition>2412401 - Disclosure - Commitments and Contingencies (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="CondensedConsolidatedBalanceSheets" roleURI="http://www.amtechsystems.com/role/CondensedConsolidatedBalanceSheets">
        <link:definition>1001000 - Statement - Condensed Consolidated Balance Sheets</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="CondensedConsolidatedBalanceSheetsParenthetical" roleURI="http://www.amtechsystems.com/role/CondensedConsolidatedBalanceSheetsParenthetical">
        <link:definition>1001501 - Statement - Condensed Consolidated Balance Sheets (Parenthetical)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="CondensedConsolidatedStatementsOfCashFlowsUnaudited" roleURI="http://www.amtechsystems.com/role/CondensedConsolidatedStatementsOfCashFlowsUnaudited">
        <link:definition>1004000 - Statement - Condensed Consolidated Statements Of Cash Flows (Unaudited)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="CondensedConsolidatedStatementsOfComprehensiveIncomeLossUnaudited" roleURI="http://www.amtechsystems.com/role/CondensedConsolidatedStatementsOfComprehensiveIncomeLossUnaudited">
        <link:definition>1003000 - Statement - Condensed Consolidated Statements Of Comprehensive Income (Loss) (Unaudited)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="CondensedConsolidatedStatementsOfOperationsUnaudited" roleURI="http://www.amtechsystems.com/role/CondensedConsolidatedStatementsOfOperationsUnaudited">
        <link:definition>1002000 - Statement - Condensed Consolidated Statements of Operations (Unaudited)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="DocumentAndEntityInformation" roleURI="http://www.amtechsystems.com/role/DocumentAndEntityInformation">
        <link:definition>0001000 - Document - Document and Entity Information</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="EarningsPerShare" roleURI="http://www.amtechsystems.com/role/EarningsPerShare">
        <link:definition>2103100 - Disclosure - Earnings Per Share</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="EarningsPerShareDetails" roleURI="http://www.amtechsystems.com/role/EarningsPerShareDetails">
        <link:definition>2403402 - Disclosure - Earnings Per Share (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="EarningsPerShareTables" roleURI="http://www.amtechsystems.com/role/EarningsPerShareTables">
        <link:definition>2303301 - Disclosure - Earnings Per Share (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="IncomeTaxes" roleURI="http://www.amtechsystems.com/role/IncomeTaxes">
        <link:definition>2102100 - Disclosure - Income Taxes</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="IncomeTaxesDetails" roleURI="http://www.amtechsystems.com/role/IncomeTaxesDetails">
        <link:definition>2402401 - Disclosure - Income Taxes (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="LongTermDebt" roleURI="http://www.amtechsystems.com/role/LongTermDebt">
        <link:definition>2111100 - Disclosure - Long-term Debt</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="LongTermDebtDetails" roleURI="http://www.amtechsystems.com/role/LongTermDebtDetails">
        <link:definition>2411401 - Disclosure - Long-term Debt (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="MajorCustomersAndForeignSales" roleURI="http://www.amtechsystems.com/role/MajorCustomersAndForeignSales">
        <link:definition>2108100 - Disclosure - Major Customers and Foreign Sales</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="MajorCustomersAndForeignSalesDetails" roleURI="http://www.amtechsystems.com/role/MajorCustomersAndForeignSalesDetails">
        <link:definition>2408402 - Disclosure - Major Customers and Foreign Sales (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="MajorCustomersAndForeignSalesTables" roleURI="http://www.amtechsystems.com/role/MajorCustomersAndForeignSalesTables">
        <link:definition>2308301 - Disclosure - Major Customers and Foreign Sales (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="OtherAccruedLiabilities" roleURI="http://www.amtechsystems.com/role/OtherAccruedLiabilities">
        <link:definition>2110100 - Disclosure - Other Accrued Liabilities</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="OtherAccruedLiabilitiesDetails" roleURI="http://www.amtechsystems.com/role/OtherAccruedLiabilitiesDetails">
        <link:definition>2410402 - Disclosure - Other Accrued Liabilities (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="OtherAccruedLiabilitiesTables" roleURI="http://www.amtechsystems.com/role/OtherAccruedLiabilitiesTables">
        <link:definition>2310301 - Disclosure - Other Accrued Liabilities (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="StockholdersEquity" roleURI="http://www.amtechsystems.com/role/StockholdersEquity">
        <link:definition>2105100 - Disclosure - Stockholders' Equity</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="StockholdersEquityDetails" roleURI="http://www.amtechsystems.com/role/StockholdersEquityDetails">
        <link:definition>2405401 - Disclosure - Stockholders' Equity (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="SubsequentEventDetails" roleURI="http://www.amtechsystems.com/role/SubsequentEventDetails">
        <link:definition>2414401 - Disclosure - Subsequent Event (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="SubsequentEventNotes" roleURI="http://www.amtechsystems.com/role/SubsequentEventNotes">
        <link:definition>2114100 - Disclosure - Subsequent Event (Notes)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
    </xsd:appinfo>
  </xsd:annotation>
  <xsd:element abstract="true" id="asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems" name="AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="asys_BTUInternationalIncBTUMember" name="BTUInternationalIncBTUMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="asys_BTUInternationalIncBTUMergerMember" name="BTUInternationalIncBTUMergerMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element id="asys_BusinessCombinationConsiderationTransferredForCommonAndRestrictedStockUnits" name="BusinessCombinationConsiderationTransferredForCommonAndRestrictedStockUnits" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="duration" />
  <xsd:element id="asys_BusinessCombinationScheduleOfConsiderationTransferredTableTextBlock" name="BusinessCombinationScheduleOfConsiderationTransferredTableTextBlock" nillable="true" substitutionGroup="xbrli:item" type="nonnum:textBlockItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="asys_CashAndCashEquivalentsAndRestrictedCashMember" name="CashAndCashEquivalentsAndRestrictedCashMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element id="asys_ClassOfWarrantOrRightExpirationPeriod" name="ClassOfWarrantOrRightExpirationPeriod" nillable="true" substitutionGroup="xbrli:item" type="xbrli:durationItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="asys_CommonAndRestrictedSharesMember" name="CommonAndRestrictedSharesMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element id="asys_CommonStockMinimumPercentOwnershipForExerciseOfRights" name="CommonStockMinimumPercentOwnershipForExerciseOfRights" nillable="true" substitutionGroup="xbrli:item" type="num:percentItemType" xbrli:periodType="duration" />
  <xsd:element id="asys_ConversionOfStockConversionRatioSharesOfStockExchangedPerEachShareOfSubsidiaryStock" name="ConversionOfStockConversionRatioSharesOfStockExchangedPerEachShareOfSubsidiaryStock" nillable="true" substitutionGroup="xbrli:item" type="xbrli:pureItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="asys_CustomerNumberOneMember" name="CustomerNumberOneMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="asys_CustomerNumberTwoMember" name="CustomerNumberTwoMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="asys_CustomerOneMember" name="CustomerOneMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="asys_DocumentAndEntityInformationAbstract" name="DocumentAndEntityInformationAbstract" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration" />
  <xsd:element id="asys_EntityWideRevenueMajorCustomerNumber" name="EntityWideRevenueMajorCustomerNumber" nillable="true" substitutionGroup="xbrli:item" type="xbrli:integerItemType" xbrli:periodType="duration" />
  <xsd:element id="asys_GrantRevenueCommitmenttoProject" name="GrantRevenueCommitmenttoProject" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="instant" />
  <xsd:element id="asys_IncomeTaxExaminationNumberofYearsGenerallyOpenForTaxExaminations" name="IncomeTaxExaminationNumberofYearsGenerallyOpenForTaxExaminations" nillable="true" substitutionGroup="xbrli:item" type="xbrli:durationItemType" xbrli:periodType="duration" />
  <xsd:element id="asys_IncreaseDecreaseInAccruedLiabilitiesAndCustomerDeposits" name="IncreaseDecreaseInAccruedLiabilitiesAndCustomerDeposits" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="duration" />
  <xsd:element id="asys_IncreaseDecreaseInDeferredProfit" name="IncreaseDecreaseInDeferredProfit" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="asys_KingstoneHoldingCompanyMember" name="KingstoneHoldingCompanyMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="asys_KingstoneHongKongMember" name="KingstoneHongKongMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="asys_KingstoneSemiconductorCompanyLtdMember" name="KingstoneSemiconductorCompanyLtdMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="asys_MajorCustomersAndForeignSalesAbstract" name="MajorCustomersAndForeignSalesAbstract" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="asys_MergerAgreementMember" name="MergerAgreementMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element id="asys_NumberOfCustomers" name="NumberOfCustomers" nillable="true" substitutionGroup="xbrli:item" type="xbrli:integerItemType" xbrli:periodType="duration" />
  <xsd:element id="asys_OtherAccruedLiabilitiesOtherCurrent" name="OtherAccruedLiabilitiesOtherCurrent" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="instant" />
  <xsd:element abstract="true" id="asys_OtherNorthAmericaMember" name="OtherNorthAmericaMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element id="asys_OwnershipRightsResultsofProjectsDevelopedSeparatelyByIndividualParties" name="OwnershipRightsResultsofProjectsDevelopedSeparatelyByIndividualParties" nillable="true" substitutionGroup="xbrli:item" type="num:percentItemType" xbrli:periodType="duration" />
  <xsd:element id="asys_PercentageofVotingInterestofAcquireeOwnedSubsidiary" name="PercentageofVotingInterestofAcquireeOwnedSubsidiary" nillable="true" substitutionGroup="xbrli:item" type="num:percentItemType" xbrli:periodType="instant" />
  <xsd:element abstract="true" id="asys_PolishingSuppliesAndEquipmentMember" name="PolishingSuppliesAndEquipmentMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element id="asys_ProceedsFromSaleOfExclusiveRightToSellAndServiceProducts" name="ProceedsFromSaleOfExclusiveRightToSellAndServiceProducts" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="duration" />
  <xsd:element id="asys_ResearchAndDevelopmentExpenseTableTextBlock" name="ResearchAndDevelopmentExpenseTableTextBlock" nillable="true" substitutionGroup="xbrli:item" type="nonnum:textBlockItemType" xbrli:periodType="duration" />
  <xsd:element id="asys_ResearchAndDevelopmentNetOfGrantsEarned" name="ResearchAndDevelopmentNetOfGrantsEarned" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="duration" />
  <xsd:element id="asys_ResearchandDevelopmentAgreementTerm" name="ResearchandDevelopmentAgreementTerm" nillable="true" substitutionGroup="xbrli:item" type="xbrli:durationItemType" xbrli:periodType="duration" />
  <xsd:element id="asys_ResearchandDevelopmentPeriodRequiredforEquipmentRepairsandMaintenance" name="ResearchandDevelopmentPeriodRequiredforEquipmentRepairsandMaintenance" nillable="true" substitutionGroup="xbrli:item" type="xbrli:durationItemType" xbrli:periodType="duration" />
  <xsd:element id="asys_ResearchandDevelopmentRequiredContributionLaborandAssets" name="ResearchandDevelopmentRequiredContributionLaborandAssets" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="instant" />
  <xsd:element abstract="true" id="asys_RestructuringOfInvestmentInvestmentAgreementMember" name="RestructuringOfInvestmentInvestmentAgreementMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element id="asys_RevenuesPercentage" name="RevenuesPercentage" nillable="true" substitutionGroup="xbrli:item" type="num:percentItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="asys_ScheduleOfAcquiredFiniteAndIndefiniteLivedIntangibleAssetByMajorClassTable" name="ScheduleOfAcquiredFiniteAndIndefiniteLivedIntangibleAssetByMajorClassTable" nillable="true" substitutionGroup="xbrldt:hypercubeItem" type="xbrli:stringItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="asys_ScheduleOfProductWarrantyLineItems" name="ScheduleOfProductWarrantyLineItems" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="asys_ScheduleOfWarrantiesTable" name="ScheduleOfWarrantiesTable" nillable="true" substitutionGroup="xbrldt:hypercubeItem" type="xbrli:stringItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupOneMember" name="SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupOneMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupTwoMember" name="SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupTwoMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="asys_SemiconductorEquipmentMember" name="SemiconductorEquipmentMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element id="asys_SharebasedCompensationArrangementbySharebasedPaymentAwardOptionsAssumedInMerger" name="SharebasedCompensationArrangementbySharebasedPaymentAwardOptionsAssumedInMerger" nillable="true" substitutionGroup="xbrli:item" type="xbrli:sharesItemType" xbrli:periodType="duration" />
  <xsd:element id="asys_SharebasedCompensationArrangementsbySharebasedPaymentAwardOptionsAssumedWeightedAverageExercisePrice" name="SharebasedCompensationArrangementsbySharebasedPaymentAwardOptionsAssumedWeightedAverageExercisePrice" nillable="true" substitutionGroup="xbrli:item" type="num:perShareItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="asys_SoLayTecB.V.Member" name="SoLayTecB.V.Member" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="asys_SolarEquipmentMember" name="SolarEquipmentMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="asys_SolarToolLoanAgreementMember" name="SolarToolLoanAgreementMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element id="asys_StandardProductWarrantyPeriod" name="StandardProductWarrantyPeriod" nillable="true" substitutionGroup="xbrli:item" type="xbrli:durationItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="asys_SuzhouZhuoJingInvestmentCenterMember" name="SuzhouZhuoJingInvestmentCenterMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="asys_TempressSystemsandEnergyResearchCentreAgreementMember" name="TempressSystemsandEnergyResearchCentreAgreementMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element id="asys_UnbilledAndOther" name="UnbilledAndOther" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="instant" />
  <xsd:element id="asys_UnearnedResearchandDevelopmentGrantsCurrent" name="UnearnedResearchandDevelopmentGrantsCurrent" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="instant" />
</xsd:schema>
</XBRL>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.CAL
<SEQUENCE>9
<FILENAME>asys-20150630_cal.xml
<DESCRIPTION>XBRL TAXONOMY EXTENSION CALCULATION LINKBASE DOCUMENT
<TEXT>
<XBRL>
<?xml version="1.0" encoding="US-ASCII"?>
<!--XBRL Document Created with Wdesk from Workiva-->
<!-- -->
<linkbase xsi:schemaLocation="http://www.xbrl.org/2003/linkbase http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd" xmlns="http://www.xbrl.org/2003/linkbase" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance">
  <roleRef roleURI="http://www.amtechsystems.com/role/Acquisition" xlink:href="asys-20150630.xsd#Acquisition" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/AcquisitionAcquisitionTables" xlink:href="asys-20150630.xsd#AcquisitionAcquisitionTables" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/AcquisitionAssetsAcquiredAndLiabilitiesAssumedDetails" xlink:href="asys-20150630.xsd#AcquisitionAssetsAcquiredAndLiabilitiesAssumedDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/AcquisitionConsiderationTransferredDetails" xlink:href="asys-20150630.xsd#AcquisitionConsiderationTransferredDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/AcquisitionDetails" xlink:href="asys-20150630.xsd#AcquisitionDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/AcquisitionProFormaDetails" xlink:href="asys-20150630.xsd#AcquisitionProFormaDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/BasisOfPresentation" xlink:href="asys-20150630.xsd#BasisOfPresentation" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/BasisOfPresentationCashEquivalentsDetails" xlink:href="asys-20150630.xsd#BasisOfPresentationCashEquivalentsDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/BasisOfPresentationConcentrationsOfCreditRiskDetails" xlink:href="asys-20150630.xsd#BasisOfPresentationConcentrationsOfCreditRiskDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/BasisOfPresentationDeferredProfitDetails" xlink:href="asys-20150630.xsd#BasisOfPresentationDeferredProfitDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/BasisOfPresentationGoodwillDetails" xlink:href="asys-20150630.xsd#BasisOfPresentationGoodwillDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/BasisOfPresentationIntangiblesDetails" xlink:href="asys-20150630.xsd#BasisOfPresentationIntangiblesDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/BasisOfPresentationInventoriesDetails" xlink:href="asys-20150630.xsd#BasisOfPresentationInventoriesDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/BasisOfPresentationPolicies" xlink:href="asys-20150630.xsd#BasisOfPresentationPolicies" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/BasisOfPresentationPropertyPlantAndEquipmentDetails" xlink:href="asys-20150630.xsd#BasisOfPresentationPropertyPlantAndEquipmentDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/BasisOfPresentationResearchAndDevelopmentExpenseDetails" xlink:href="asys-20150630.xsd#BasisOfPresentationResearchAndDevelopmentExpenseDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/BasisOfPresentationRestrictedCashDetails" xlink:href="asys-20150630.xsd#BasisOfPresentationRestrictedCashDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/BasisOfPresentationShippingExpenseDetails" xlink:href="asys-20150630.xsd#BasisOfPresentationShippingExpenseDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/BasisOfPresentationStockBasedCompensationDetails" xlink:href="asys-20150630.xsd#BasisOfPresentationStockBasedCompensationDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/BasisOfPresentationTables" xlink:href="asys-20150630.xsd#BasisOfPresentationTables" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/BasisOfPresentationWarrantyDetails" xlink:href="asys-20150630.xsd#BasisOfPresentationWarrantyDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/BusinessSegmentInformation" xlink:href="asys-20150630.xsd#BusinessSegmentInformation" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/BusinessSegmentInformationDetails" xlink:href="asys-20150630.xsd#BusinessSegmentInformationDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/BusinessSegmentInformationTables" xlink:href="asys-20150630.xsd#BusinessSegmentInformationTables" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/CommitmentsAndContingencies" xlink:href="asys-20150630.xsd#CommitmentsAndContingencies" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/CommitmentsAndContingenciesDetails" xlink:href="asys-20150630.xsd#CommitmentsAndContingenciesDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/CondensedConsolidatedBalanceSheets" xlink:href="asys-20150630.xsd#CondensedConsolidatedBalanceSheets" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/CondensedConsolidatedBalanceSheetsParenthetical" xlink:href="asys-20150630.xsd#CondensedConsolidatedBalanceSheetsParenthetical" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/CondensedConsolidatedStatementsOfCashFlowsUnaudited" xlink:href="asys-20150630.xsd#CondensedConsolidatedStatementsOfCashFlowsUnaudited" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/CondensedConsolidatedStatementsOfComprehensiveIncomeLossUnaudited" xlink:href="asys-20150630.xsd#CondensedConsolidatedStatementsOfComprehensiveIncomeLossUnaudited" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/CondensedConsolidatedStatementsOfOperationsUnaudited" xlink:href="asys-20150630.xsd#CondensedConsolidatedStatementsOfOperationsUnaudited" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/DocumentAndEntityInformation" xlink:href="asys-20150630.xsd#DocumentAndEntityInformation" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/EarningsPerShare" xlink:href="asys-20150630.xsd#EarningsPerShare" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/EarningsPerShareDetails" xlink:href="asys-20150630.xsd#EarningsPerShareDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/EarningsPerShareTables" xlink:href="asys-20150630.xsd#EarningsPerShareTables" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/IncomeTaxes" xlink:href="asys-20150630.xsd#IncomeTaxes" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/IncomeTaxesDetails" xlink:href="asys-20150630.xsd#IncomeTaxesDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/LongTermDebt" xlink:href="asys-20150630.xsd#LongTermDebt" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/LongTermDebtDetails" xlink:href="asys-20150630.xsd#LongTermDebtDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/MajorCustomersAndForeignSales" xlink:href="asys-20150630.xsd#MajorCustomersAndForeignSales" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/MajorCustomersAndForeignSalesDetails" xlink:href="asys-20150630.xsd#MajorCustomersAndForeignSalesDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/MajorCustomersAndForeignSalesTables" xlink:href="asys-20150630.xsd#MajorCustomersAndForeignSalesTables" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/OtherAccruedLiabilities" xlink:href="asys-20150630.xsd#OtherAccruedLiabilities" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/OtherAccruedLiabilitiesDetails" xlink:href="asys-20150630.xsd#OtherAccruedLiabilitiesDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/OtherAccruedLiabilitiesTables" xlink:href="asys-20150630.xsd#OtherAccruedLiabilitiesTables" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/StockholdersEquity" xlink:href="asys-20150630.xsd#StockholdersEquity" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/StockholdersEquityDetails" xlink:href="asys-20150630.xsd#StockholdersEquityDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/SubsequentEventDetails" xlink:href="asys-20150630.xsd#SubsequentEventDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/SubsequentEventNotes" xlink:href="asys-20150630.xsd#SubsequentEventNotes" xlink:type="simple" />
  <calculationLink xlink:role="http://www.amtechsystems.com/role/Acquisition" xlink:type="extended" />
  <calculationLink xlink:role="http://www.amtechsystems.com/role/AcquisitionAcquisitionTables" xlink:type="extended" />
  <calculationLink xlink:role="http://www.amtechsystems.com/role/AcquisitionAssetsAcquiredAndLiabilitiesAssumedDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredGoodwillAndLiabilitiesAssumedNet" xlink:label="loc_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredGoodwillAndLiabilitiesAssumedNet_603f073e-ba37-8b22-802f-84d073637bea" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNet" xlink:label="loc_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNet_8e82af62-5d0c-8a44-003d-d4557b49ee76" xlink:type="locator" />
    <calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredGoodwillAndLiabilitiesAssumedNet_603f073e-ba37-8b22-802f-84d073637bea" xlink:to="loc_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNet_8e82af62-5d0c-8a44-003d-d4557b49ee76" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_Goodwill" xlink:label="loc_us-gaap_Goodwill_b108d604-1348-4e65-3817-2944b734c65a" xlink:type="locator" />
    <calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredGoodwillAndLiabilitiesAssumedNet_603f073e-ba37-8b22-802f-84d073637bea" xlink:to="loc_us-gaap_Goodwill_b108d604-1348-4e65-3817-2944b734c65a" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibleAssetsOtherThanGoodwill" xlink:label="loc_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibleAssetsOtherThanGoodwill_bcb36c16-bb23-6f85-9116-c0904e7dcadf" xlink:type="locator" />
    <calculationArc order="3" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredGoodwillAndLiabilitiesAssumedNet_603f073e-ba37-8b22-802f-84d073637bea" xlink:to="loc_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibleAssetsOtherThanGoodwill_bcb36c16-bb23-6f85-9116-c0904e7dcadf" xlink:type="arc" />
  </calculationLink>
  <calculationLink xlink:role="http://www.amtechsystems.com/role/AcquisitionConsiderationTransferredDetails" xlink:type="extended" />
  <calculationLink xlink:role="http://www.amtechsystems.com/role/AcquisitionDetails" xlink:type="extended" />
  <calculationLink xlink:role="http://www.amtechsystems.com/role/AcquisitionProFormaDetails" xlink:type="extended" />
  <calculationLink xlink:role="http://www.amtechsystems.com/role/BasisOfPresentation" xlink:type="extended" />
  <calculationLink xlink:role="http://www.amtechsystems.com/role/BasisOfPresentationCashEquivalentsDetails" xlink:type="extended" />
  <calculationLink xlink:role="http://www.amtechsystems.com/role/BasisOfPresentationConcentrationsOfCreditRiskDetails" xlink:type="extended" />
  <calculationLink xlink:role="http://www.amtechsystems.com/role/BasisOfPresentationDeferredProfitDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherDeferredCreditsCurrent" xlink:label="loc_us-gaap_OtherDeferredCreditsCurrent_dfa5d6f8-93e9-51a9-8412-1958594d696d" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DeferredRevenue" xlink:label="loc_us-gaap_DeferredRevenue_43932d18-c762-b83d-ffef-46041f3e53dc" xlink:type="locator" />
    <calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_OtherDeferredCreditsCurrent_dfa5d6f8-93e9-51a9-8412-1958594d696d" xlink:to="loc_us-gaap_DeferredRevenue_43932d18-c762-b83d-ffef-46041f3e53dc" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DeferredCostsCurrent" xlink:label="loc_us-gaap_DeferredCostsCurrent_90b96690-629b-dc2a-d355-28a2a2b5c772" xlink:type="locator" />
    <calculationArc order="2" weight="-1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_OtherDeferredCreditsCurrent_dfa5d6f8-93e9-51a9-8412-1958594d696d" xlink:to="loc_us-gaap_DeferredCostsCurrent_90b96690-629b-dc2a-d355-28a2a2b5c772" xlink:type="arc" />
  </calculationLink>
  <calculationLink xlink:role="http://www.amtechsystems.com/role/BasisOfPresentationGoodwillDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_Goodwill" xlink:label="loc_us-gaap_Goodwill_b108d604-1348-4e65-3817-2944b734c65a" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GoodwillGross" xlink:label="loc_us-gaap_GoodwillGross_05009a8c-cb46-f259-46aa-63ca17f041e9" xlink:type="locator" />
    <calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_Goodwill_b108d604-1348-4e65-3817-2944b734c65a" xlink:to="loc_us-gaap_GoodwillGross_05009a8c-cb46-f259-46aa-63ca17f041e9" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GoodwillImpairedAccumulatedImpairmentLoss" xlink:label="loc_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss_e577d935-b558-81ce-afc0-2216628a2c00" xlink:type="locator" />
    <calculationArc order="2" weight="-1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_Goodwill_b108d604-1348-4e65-3817-2944b734c65a" xlink:to="loc_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss_e577d935-b558-81ce-afc0-2216628a2c00" xlink:type="arc" />
  </calculationLink>
  <calculationLink xlink:role="http://www.amtechsystems.com/role/BasisOfPresentationIntangiblesDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsNet" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsNet_d1f67248-e9b5-f4cc-7b0f-6057f1a3d17a" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsGross" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsGross_0b66a991-68b5-43d2-3cb3-4ea68bba2b7e" xlink:type="locator" />
    <calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_FiniteLivedIntangibleAssetsNet_d1f67248-e9b5-f4cc-7b0f-6057f1a3d17a" xlink:to="loc_us-gaap_FiniteLivedIntangibleAssetsGross_0b66a991-68b5-43d2-3cb3-4ea68bba2b7e" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization_5fad788a-33b8-6ace-c3c4-7d91cd9f63e4" xlink:type="locator" />
    <calculationArc order="2" weight="-1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_FiniteLivedIntangibleAssetsNet_d1f67248-e9b5-f4cc-7b0f-6057f1a3d17a" xlink:to="loc_us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization_5fad788a-33b8-6ace-c3c4-7d91cd9f63e4" xlink:type="arc" />
  </calculationLink>
  <calculationLink xlink:role="http://www.amtechsystems.com/role/BasisOfPresentationInventoriesDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_InventoryNet" xlink:label="loc_us-gaap_InventoryNet_eae794c2-73ec-cd91-efb3-99a2ff1f24cf" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_InventoryRawMaterialsAndSuppliesNetOfReserves" xlink:label="loc_us-gaap_InventoryRawMaterialsAndSuppliesNetOfReserves_37c1df56-8d3f-20f2-9679-e36e8dd7ed1a" xlink:type="locator" />
    <calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_InventoryNet_eae794c2-73ec-cd91-efb3-99a2ff1f24cf" xlink:to="loc_us-gaap_InventoryRawMaterialsAndSuppliesNetOfReserves_37c1df56-8d3f-20f2-9679-e36e8dd7ed1a" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_InventoryWorkInProcessNetOfReserves" xlink:label="loc_us-gaap_InventoryWorkInProcessNetOfReserves_8162f0c6-3901-3410-efb8-4a460fb9898c" xlink:type="locator" />
    <calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_InventoryNet_eae794c2-73ec-cd91-efb3-99a2ff1f24cf" xlink:to="loc_us-gaap_InventoryWorkInProcessNetOfReserves_8162f0c6-3901-3410-efb8-4a460fb9898c" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_InventoryFinishedGoodsNetOfReserves" xlink:label="loc_us-gaap_InventoryFinishedGoodsNetOfReserves_52e0aebe-a03f-09bd-b0a5-024dc9cc6bc5" xlink:type="locator" />
    <calculationArc order="3" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_InventoryNet_eae794c2-73ec-cd91-efb3-99a2ff1f24cf" xlink:to="loc_us-gaap_InventoryFinishedGoodsNetOfReserves_52e0aebe-a03f-09bd-b0a5-024dc9cc6bc5" xlink:type="arc" />
  </calculationLink>
  <calculationLink xlink:role="http://www.amtechsystems.com/role/BasisOfPresentationPolicies" xlink:type="extended" />
  <calculationLink xlink:role="http://www.amtechsystems.com/role/BasisOfPresentationPropertyPlantAndEquipmentDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PropertyPlantAndEquipmentNet" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentNet_7ce178a4-245f-fa78-36a1-552609a67554" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PropertyPlantAndEquipmentGross" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentGross_6591f040-08b3-69a1-a560-c70736475ada" xlink:type="locator" />
    <calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentNet_7ce178a4-245f-fa78-36a1-552609a67554" xlink:to="loc_us-gaap_PropertyPlantAndEquipmentGross_6591f040-08b3-69a1-a560-c70736475ada" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment" xlink:label="loc_us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment_b84a1570-30ad-4e3a-2391-9767a64e15fd" xlink:type="locator" />
    <calculationArc order="2" weight="-1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentNet_7ce178a4-245f-fa78-36a1-552609a67554" xlink:to="loc_us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment_b84a1570-30ad-4e3a-2391-9767a64e15fd" xlink:type="arc" />
  </calculationLink>
  <calculationLink xlink:role="http://www.amtechsystems.com/role/BasisOfPresentationResearchAndDevelopmentExpenseDetails" xlink:type="extended">
    <loc xlink:href="asys-20150630.xsd#asys_ResearchAndDevelopmentNetOfGrantsEarned" xlink:label="loc_asys_ResearchAndDevelopmentNetOfGrantsEarned_acbddf02-7fff-a3fe-55ae-f541cfe8d9d6" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ResearchAndDevelopmentExpense" xlink:label="loc_us-gaap_ResearchAndDevelopmentExpense_6a3cb05a-f9c0-32f6-d20f-a948f53d0ee5" xlink:type="locator" />
    <calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_asys_ResearchAndDevelopmentNetOfGrantsEarned_acbddf02-7fff-a3fe-55ae-f541cfe8d9d6" xlink:to="loc_us-gaap_ResearchAndDevelopmentExpense_6a3cb05a-f9c0-32f6-d20f-a948f53d0ee5" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ResearchAndDevelopmentArrangementWithFederalGovernmentCustomerFundingToOffsetCostsIncurred" xlink:label="loc_us-gaap_ResearchAndDevelopmentArrangementWithFederalGovernmentCustomerFundingToOffsetCostsIncurred_342320df-9194-bd4e-54f9-238e52047b2b" xlink:type="locator" />
    <calculationArc order="2" weight="-1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_asys_ResearchAndDevelopmentNetOfGrantsEarned_acbddf02-7fff-a3fe-55ae-f541cfe8d9d6" xlink:to="loc_us-gaap_ResearchAndDevelopmentArrangementWithFederalGovernmentCustomerFundingToOffsetCostsIncurred_342320df-9194-bd4e-54f9-238e52047b2b" xlink:type="arc" />
  </calculationLink>
  <calculationLink xlink:role="http://www.amtechsystems.com/role/BasisOfPresentationRestrictedCashDetails" xlink:type="extended" />
  <calculationLink xlink:role="http://www.amtechsystems.com/role/BasisOfPresentationShippingExpenseDetails" xlink:type="extended" />
  <calculationLink xlink:role="http://www.amtechsystems.com/role/BasisOfPresentationStockBasedCompensationDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax" xlink:label="loc_us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax_ed55a377-3e01-611f-cd7f-0fbe24ab1ea8" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AllocatedShareBasedCompensationExpense" xlink:label="loc_us-gaap_AllocatedShareBasedCompensationExpense_3d8b2111-7dfd-aac1-d600-3c06aa98a76d" xlink:type="locator" />
    <calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax_ed55a377-3e01-611f-cd7f-0fbe24ab1ea8" xlink:to="loc_us-gaap_AllocatedShareBasedCompensationExpense_3d8b2111-7dfd-aac1-d600-3c06aa98a76d" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense" xlink:label="loc_us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense_1cd67c75-2b70-2503-15d7-39868db2360d" xlink:type="locator" />
    <calculationArc order="2" weight="-1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax_ed55a377-3e01-611f-cd7f-0fbe24ab1ea8" xlink:to="loc_us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense_1cd67c75-2b70-2503-15d7-39868db2360d" xlink:type="arc" />
  </calculationLink>
  <calculationLink xlink:role="http://www.amtechsystems.com/role/BasisOfPresentationTables" xlink:type="extended" />
  <calculationLink xlink:role="http://www.amtechsystems.com/role/BasisOfPresentationWarrantyDetails" xlink:type="extended" />
  <calculationLink xlink:role="http://www.amtechsystems.com/role/BusinessSegmentInformation" xlink:type="extended" />
  <calculationLink xlink:role="http://www.amtechsystems.com/role/BusinessSegmentInformationDetails" xlink:type="extended" />
  <calculationLink xlink:role="http://www.amtechsystems.com/role/BusinessSegmentInformationTables" xlink:type="extended" />
  <calculationLink xlink:role="http://www.amtechsystems.com/role/CommitmentsAndContingencies" xlink:type="extended" />
  <calculationLink xlink:role="http://www.amtechsystems.com/role/CommitmentsAndContingenciesDetails" xlink:type="extended" />
  <calculationLink xlink:role="http://www.amtechsystems.com/role/CondensedConsolidatedBalanceSheets" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LiabilitiesAndStockholdersEquity" xlink:label="loc_us-gaap_LiabilitiesAndStockholdersEquity_4a314f0d-c6fa-5cf2-0be1-add747465af3" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterest" xlink:label="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterest_9a5c5aff-ee63-a4f2-571a-3515b5d26a3b" xlink:type="locator" />
    <calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_LiabilitiesAndStockholdersEquity_4a314f0d-c6fa-5cf2-0be1-add747465af3" xlink:to="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterest_9a5c5aff-ee63-a4f2-571a-3515b5d26a3b" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StockholdersEquity" xlink:label="loc_us-gaap_StockholdersEquity_d0f349aa-18e3-6323-86ad-665f8773c064" xlink:type="locator" />
    <calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterest_9a5c5aff-ee63-a4f2-571a-3515b5d26a3b" xlink:to="loc_us-gaap_StockholdersEquity_d0f349aa-18e3-6323-86ad-665f8773c064" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PreferredStockValue" xlink:label="loc_us-gaap_PreferredStockValue_359b0ac4-80ce-a291-f73b-cff103b81eae" xlink:type="locator" />
    <calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_StockholdersEquity_d0f349aa-18e3-6323-86ad-665f8773c064" xlink:to="loc_us-gaap_PreferredStockValue_359b0ac4-80ce-a291-f73b-cff103b81eae" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CommonStockValue" xlink:label="loc_us-gaap_CommonStockValue_ce40a301-9b6b-9fc3-bfb6-dfbb8fcdf29b" xlink:type="locator" />
    <calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_StockholdersEquity_d0f349aa-18e3-6323-86ad-665f8773c064" xlink:to="loc_us-gaap_CommonStockValue_ce40a301-9b6b-9fc3-bfb6-dfbb8fcdf29b" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AdditionalPaidInCapital" xlink:label="loc_us-gaap_AdditionalPaidInCapital_9158c8ad-1189-2464-9c41-553e6a22df6c" xlink:type="locator" />
    <calculationArc order="3" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_StockholdersEquity_d0f349aa-18e3-6323-86ad-665f8773c064" xlink:to="loc_us-gaap_AdditionalPaidInCapital_9158c8ad-1189-2464-9c41-553e6a22df6c" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax" xlink:label="loc_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_dd6b7206-c19f-4dd5-339b-1369c57cfe0f" xlink:type="locator" />
    <calculationArc order="4" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_StockholdersEquity_d0f349aa-18e3-6323-86ad-665f8773c064" xlink:to="loc_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_dd6b7206-c19f-4dd5-339b-1369c57cfe0f" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RetainedEarningsAccumulatedDeficit" xlink:label="loc_us-gaap_RetainedEarningsAccumulatedDeficit_1d565cd0-d7bf-de89-4dbe-a484007b1fe8" xlink:type="locator" />
    <calculationArc order="5" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_StockholdersEquity_d0f349aa-18e3-6323-86ad-665f8773c064" xlink:to="loc_us-gaap_RetainedEarningsAccumulatedDeficit_1d565cd0-d7bf-de89-4dbe-a484007b1fe8" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MinorityInterest" xlink:label="loc_us-gaap_MinorityInterest_be52b263-dda5-21e0-250c-b71c8efa5893" xlink:type="locator" />
    <calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterest_9a5c5aff-ee63-a4f2-571a-3515b5d26a3b" xlink:to="loc_us-gaap_MinorityInterest_be52b263-dda5-21e0-250c-b71c8efa5893" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_Liabilities" xlink:label="loc_us-gaap_Liabilities_4e70462c-e5f6-e2d9-0cf5-7f1332ddbc05" xlink:type="locator" />
    <calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_LiabilitiesAndStockholdersEquity_4a314f0d-c6fa-5cf2-0be1-add747465af3" xlink:to="loc_us-gaap_Liabilities_4e70462c-e5f6-e2d9-0cf5-7f1332ddbc05" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LiabilitiesCurrent" xlink:label="loc_us-gaap_LiabilitiesCurrent_1de50dbc-01a9-6657-f83f-d1e74edfdf18" xlink:type="locator" />
    <calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_Liabilities_4e70462c-e5f6-e2d9-0cf5-7f1332ddbc05" xlink:to="loc_us-gaap_LiabilitiesCurrent_1de50dbc-01a9-6657-f83f-d1e74edfdf18" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AccountsPayableCurrent" xlink:label="loc_us-gaap_AccountsPayableCurrent_22caddf9-3843-6329-6e39-dc458323b572" xlink:type="locator" />
    <calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_LiabilitiesCurrent_1de50dbc-01a9-6657-f83f-d1e74edfdf18" xlink:to="loc_us-gaap_AccountsPayableCurrent_22caddf9-3843-6329-6e39-dc458323b572" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EmployeeRelatedLiabilitiesCurrent" xlink:label="loc_us-gaap_EmployeeRelatedLiabilitiesCurrent_edc340b7-5c57-03d7-7d1e-ad6feb822363" xlink:type="locator" />
    <calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_LiabilitiesCurrent_1de50dbc-01a9-6657-f83f-d1e74edfdf18" xlink:to="loc_us-gaap_EmployeeRelatedLiabilitiesCurrent_edc340b7-5c57-03d7-7d1e-ad6feb822363" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProductWarrantyAccrualClassifiedCurrent" xlink:label="loc_us-gaap_ProductWarrantyAccrualClassifiedCurrent_dc2d2699-bb05-9712-118d-7b99e8fe65c9" xlink:type="locator" />
    <calculationArc order="3" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_LiabilitiesCurrent_1de50dbc-01a9-6657-f83f-d1e74edfdf18" xlink:to="loc_us-gaap_ProductWarrantyAccrualClassifiedCurrent_dc2d2699-bb05-9712-118d-7b99e8fe65c9" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherDeferredCreditsCurrent" xlink:label="loc_us-gaap_OtherDeferredCreditsCurrent_dfa5d6f8-93e9-51a9-8412-1958594d696d" xlink:type="locator" />
    <calculationArc order="4" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_LiabilitiesCurrent_1de50dbc-01a9-6657-f83f-d1e74edfdf18" xlink:to="loc_us-gaap_OtherDeferredCreditsCurrent_dfa5d6f8-93e9-51a9-8412-1958594d696d" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CustomerAdvancesCurrent" xlink:label="loc_us-gaap_CustomerAdvancesCurrent_c7b5b1ce-c262-73ad-c0e3-19cce4719ca6" xlink:type="locator" />
    <calculationArc order="5" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_LiabilitiesCurrent_1de50dbc-01a9-6657-f83f-d1e74edfdf18" xlink:to="loc_us-gaap_CustomerAdvancesCurrent_c7b5b1ce-c262-73ad-c0e3-19cce4719ca6" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AccruedLiabilitiesCurrent" xlink:label="loc_us-gaap_AccruedLiabilitiesCurrent_eaf92fb1-642d-2c65-5ba7-1a63a3697f47" xlink:type="locator" />
    <calculationArc order="6" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_LiabilitiesCurrent_1de50dbc-01a9-6657-f83f-d1e74edfdf18" xlink:to="loc_us-gaap_AccruedLiabilitiesCurrent_eaf92fb1-642d-2c65-5ba7-1a63a3697f47" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AccruedIncomeTaxesCurrent" xlink:label="loc_us-gaap_AccruedIncomeTaxesCurrent_d02cabf3-c4d9-166f-23df-bbec715cbe7f" xlink:type="locator" />
    <calculationArc order="7" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_LiabilitiesCurrent_1de50dbc-01a9-6657-f83f-d1e74edfdf18" xlink:to="loc_us-gaap_AccruedIncomeTaxesCurrent_d02cabf3-c4d9-166f-23df-bbec715cbe7f" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LongTermDebtCurrent" xlink:label="loc_us-gaap_LongTermDebtCurrent_cb391e84-b205-7d47-a257-0dea5fb19043" xlink:type="locator" />
    <calculationArc order="8" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_LiabilitiesCurrent_1de50dbc-01a9-6657-f83f-d1e74edfdf18" xlink:to="loc_us-gaap_LongTermDebtCurrent_cb391e84-b205-7d47-a257-0dea5fb19043" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LiabilityForUncertainTaxPositionsNoncurrent" xlink:label="loc_us-gaap_LiabilityForUncertainTaxPositionsNoncurrent_962ef027-557f-2e9c-093e-fcc6950ee443" xlink:type="locator" />
    <calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_Liabilities_4e70462c-e5f6-e2d9-0cf5-7f1332ddbc05" xlink:to="loc_us-gaap_LiabilityForUncertainTaxPositionsNoncurrent_962ef027-557f-2e9c-093e-fcc6950ee443" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LongTermDebtNoncurrent" xlink:label="loc_us-gaap_LongTermDebtNoncurrent_fe891e5b-d2af-f798-198f-f728ce0375a1" xlink:type="locator" />
    <calculationArc order="3" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_Liabilities_4e70462c-e5f6-e2d9-0cf5-7f1332ddbc05" xlink:to="loc_us-gaap_LongTermDebtNoncurrent_fe891e5b-d2af-f798-198f-f728ce0375a1" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DeferredTaxLiabilitiesNoncurrent" xlink:label="loc_us-gaap_DeferredTaxLiabilitiesNoncurrent_d3900b70-6aae-8c94-5a39-4a06f81c5d62" xlink:type="locator" />
    <calculationArc order="4" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_Liabilities_4e70462c-e5f6-e2d9-0cf5-7f1332ddbc05" xlink:to="loc_us-gaap_DeferredTaxLiabilitiesNoncurrent_d3900b70-6aae-8c94-5a39-4a06f81c5d62" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CommitmentsAndContingencies" xlink:label="loc_us-gaap_CommitmentsAndContingencies_53d4115f-c3d1-6e9c-3f23-fd144b27061e" xlink:type="locator" />
    <calculationArc order="3" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_LiabilitiesAndStockholdersEquity_4a314f0d-c6fa-5cf2-0be1-add747465af3" xlink:to="loc_us-gaap_CommitmentsAndContingencies_53d4115f-c3d1-6e9c-3f23-fd144b27061e" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_Assets" xlink:label="loc_us-gaap_Assets_effc14df-fd72-eec8-ede9-64e0071b91bc" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AssetsCurrent" xlink:label="loc_us-gaap_AssetsCurrent_39eaeb62-7ee3-5503-48f5-08c2dff05e50" xlink:type="locator" />
    <calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_Assets_effc14df-fd72-eec8-ede9-64e0071b91bc" xlink:to="loc_us-gaap_AssetsCurrent_39eaeb62-7ee3-5503-48f5-08c2dff05e50" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CashAndCashEquivalentsAtCarryingValue" xlink:label="loc_us-gaap_CashAndCashEquivalentsAtCarryingValue_cd34decb-53b6-e0a9-28d5-0a9741c4b0f8" xlink:type="locator" />
    <calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_AssetsCurrent_39eaeb62-7ee3-5503-48f5-08c2dff05e50" xlink:to="loc_us-gaap_CashAndCashEquivalentsAtCarryingValue_cd34decb-53b6-e0a9-28d5-0a9741c4b0f8" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue" xlink:label="loc_us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue_05676487-dc23-faad-ff63-cd1ae2cdcbac" xlink:type="locator" />
    <calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_AssetsCurrent_39eaeb62-7ee3-5503-48f5-08c2dff05e50" xlink:to="loc_us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue_05676487-dc23-faad-ff63-cd1ae2cdcbac" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AccountsReceivableNetCurrent" xlink:label="loc_us-gaap_AccountsReceivableNetCurrent_4d24e56f-a5cb-07ba-0508-f5f1533ae24e" xlink:type="locator" />
    <calculationArc order="3" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_AssetsCurrent_39eaeb62-7ee3-5503-48f5-08c2dff05e50" xlink:to="loc_us-gaap_AccountsReceivableNetCurrent_4d24e56f-a5cb-07ba-0508-f5f1533ae24e" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_UnbilledAndOther" xlink:label="loc_asys_UnbilledAndOther_a276dc84-4ea1-907a-ba18-f541cfd6e9c2" xlink:type="locator" />
    <calculationArc order="4" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_AssetsCurrent_39eaeb62-7ee3-5503-48f5-08c2dff05e50" xlink:to="loc_asys_UnbilledAndOther_a276dc84-4ea1-907a-ba18-f541cfd6e9c2" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_InventoryNet" xlink:label="loc_us-gaap_InventoryNet_eae794c2-73ec-cd91-efb3-99a2ff1f24cf" xlink:type="locator" />
    <calculationArc order="5" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_AssetsCurrent_39eaeb62-7ee3-5503-48f5-08c2dff05e50" xlink:to="loc_us-gaap_InventoryNet_eae794c2-73ec-cd91-efb3-99a2ff1f24cf" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DeferredTaxAssetsNetCurrent" xlink:label="loc_us-gaap_DeferredTaxAssetsNetCurrent_dabadfa8-724e-a2d5-b648-d64b8eabce5a" xlink:type="locator" />
    <calculationArc order="6" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_AssetsCurrent_39eaeb62-7ee3-5503-48f5-08c2dff05e50" xlink:to="loc_us-gaap_DeferredTaxAssetsNetCurrent_dabadfa8-724e-a2d5-b648-d64b8eabce5a" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncomeTaxesReceivable" xlink:label="loc_us-gaap_IncomeTaxesReceivable_7a61c15e-09d6-6a5c-81c0-2dfb596b27a3" xlink:type="locator" />
    <calculationArc order="7" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_AssetsCurrent_39eaeb62-7ee3-5503-48f5-08c2dff05e50" xlink:to="loc_us-gaap_IncomeTaxesReceivable_7a61c15e-09d6-6a5c-81c0-2dfb596b27a3" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherAssetsCurrent" xlink:label="loc_us-gaap_OtherAssetsCurrent_33278e4f-d71c-924a-f185-bd5aaa288d0b" xlink:type="locator" />
    <calculationArc order="8" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_AssetsCurrent_39eaeb62-7ee3-5503-48f5-08c2dff05e50" xlink:to="loc_us-gaap_OtherAssetsCurrent_33278e4f-d71c-924a-f185-bd5aaa288d0b" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PropertyPlantAndEquipmentNet" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentNet_7ce178a4-245f-fa78-36a1-552609a67554" xlink:type="locator" />
    <calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_Assets_effc14df-fd72-eec8-ede9-64e0071b91bc" xlink:to="loc_us-gaap_PropertyPlantAndEquipmentNet_7ce178a4-245f-fa78-36a1-552609a67554" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IntangibleAssetsNetExcludingGoodwill" xlink:label="loc_us-gaap_IntangibleAssetsNetExcludingGoodwill_894a128f-2068-d267-1e3e-64c93d0ed5ca" xlink:type="locator" />
    <calculationArc order="3" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_Assets_effc14df-fd72-eec8-ede9-64e0071b91bc" xlink:to="loc_us-gaap_IntangibleAssetsNetExcludingGoodwill_894a128f-2068-d267-1e3e-64c93d0ed5ca" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_Goodwill" xlink:label="loc_us-gaap_Goodwill_b108d604-1348-4e65-3817-2944b734c65a" xlink:type="locator" />
    <calculationArc order="4" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_Assets_effc14df-fd72-eec8-ede9-64e0071b91bc" xlink:to="loc_us-gaap_Goodwill_b108d604-1348-4e65-3817-2944b734c65a" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherAssetsNoncurrent" xlink:label="loc_us-gaap_OtherAssetsNoncurrent_9b98e689-e6db-3e5b-e5c3-3324fffb4edf" xlink:type="locator" />
    <calculationArc order="5" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_Assets_effc14df-fd72-eec8-ede9-64e0071b91bc" xlink:to="loc_us-gaap_OtherAssetsNoncurrent_9b98e689-e6db-3e5b-e5c3-3324fffb4edf" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DeferredTaxAssetsNetNoncurrent" xlink:label="loc_us-gaap_DeferredTaxAssetsNetNoncurrent_41359e4c-71d8-9161-b054-7e575267275a" xlink:type="locator" />
    <calculationArc order="6" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_Assets_effc14df-fd72-eec8-ede9-64e0071b91bc" xlink:to="loc_us-gaap_DeferredTaxAssetsNetNoncurrent_41359e4c-71d8-9161-b054-7e575267275a" xlink:type="arc" />
  </calculationLink>
  <calculationLink xlink:role="http://www.amtechsystems.com/role/CondensedConsolidatedBalanceSheetsParenthetical" xlink:type="extended" />
  <calculationLink xlink:role="http://www.amtechsystems.com/role/CondensedConsolidatedStatementsOfCashFlowsUnaudited" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CashAndCashEquivalentsPeriodIncreaseDecrease" xlink:label="loc_us-gaap_CashAndCashEquivalentsPeriodIncreaseDecrease_ff5db18e-7b91-5a5d-e914-0527b02a8012" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:label="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_916e1eb7-21fa-e5f0-a15f-0b05ed633776" xlink:type="locator" />
    <calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_CashAndCashEquivalentsPeriodIncreaseDecrease_ff5db18e-7b91-5a5d-e914-0527b02a8012" xlink:to="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_916e1eb7-21fa-e5f0-a15f-0b05ed633776" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProfitLoss" xlink:label="loc_us-gaap_ProfitLoss_5f8983ec-dfa4-10d0-f53d-c0676300a16f" xlink:type="locator" />
    <calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_916e1eb7-21fa-e5f0-a15f-0b05ed633776" xlink:to="loc_us-gaap_ProfitLoss_5f8983ec-dfa4-10d0-f53d-c0676300a16f" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DepreciationDepletionAndAmortization" xlink:label="loc_us-gaap_DepreciationDepletionAndAmortization_783b94c5-664a-4bc7-f813-8c258cc934b7" xlink:type="locator" />
    <calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_916e1eb7-21fa-e5f0-a15f-0b05ed633776" xlink:to="loc_us-gaap_DepreciationDepletionAndAmortization_783b94c5-664a-4bc7-f813-8c258cc934b7" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_InventoryWriteDown" xlink:label="loc_us-gaap_InventoryWriteDown_3fd14fb0-3183-5236-c919-0e1ba96c1bb3" xlink:type="locator" />
    <calculationArc order="3" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_916e1eb7-21fa-e5f0-a15f-0b05ed633776" xlink:to="loc_us-gaap_InventoryWriteDown_3fd14fb0-3183-5236-c919-0e1ba96c1bb3" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncreaseDecreaseInDeferredIncomeTaxes" xlink:label="loc_us-gaap_IncreaseDecreaseInDeferredIncomeTaxes_05b30b26-9089-bc8b-603d-049bbd5be545" xlink:type="locator" />
    <calculationArc order="4" weight="-1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_916e1eb7-21fa-e5f0-a15f-0b05ed633776" xlink:to="loc_us-gaap_IncreaseDecreaseInDeferredIncomeTaxes_05b30b26-9089-bc8b-603d-049bbd5be545" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensation" xlink:label="loc_us-gaap_ShareBasedCompensation_d4c99b59-c44a-c4ac-309f-0bddfdb944a5" xlink:type="locator" />
    <calculationArc order="5" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_916e1eb7-21fa-e5f0-a15f-0b05ed633776" xlink:to="loc_us-gaap_ShareBasedCompensation_d4c99b59-c44a-c4ac-309f-0bddfdb944a5" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProvisionForDoubtfulAccounts" xlink:label="loc_us-gaap_ProvisionForDoubtfulAccounts_030f5c40-af7e-2a00-2417-01509e80b7e6" xlink:type="locator" />
    <calculationArc order="6" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_916e1eb7-21fa-e5f0-a15f-0b05ed633776" xlink:to="loc_us-gaap_ProvisionForDoubtfulAccounts_030f5c40-af7e-2a00-2417-01509e80b7e6" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncreaseDecreaseInRestrictedCashForOperatingActivities" xlink:label="loc_us-gaap_IncreaseDecreaseInRestrictedCashForOperatingActivities_d93d5f02-d089-fb60-608e-73232ee32133" xlink:type="locator" />
    <calculationArc order="7" weight="-1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_916e1eb7-21fa-e5f0-a15f-0b05ed633776" xlink:to="loc_us-gaap_IncreaseDecreaseInRestrictedCashForOperatingActivities_d93d5f02-d089-fb60-608e-73232ee32133" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncreaseDecreaseInAccountsReceivable" xlink:label="loc_us-gaap_IncreaseDecreaseInAccountsReceivable_91d80b53-6368-7466-a11d-02030d33de5c" xlink:type="locator" />
    <calculationArc order="8" weight="-1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_916e1eb7-21fa-e5f0-a15f-0b05ed633776" xlink:to="loc_us-gaap_IncreaseDecreaseInAccountsReceivable_91d80b53-6368-7466-a11d-02030d33de5c" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncreaseDecreaseInInventories" xlink:label="loc_us-gaap_IncreaseDecreaseInInventories_59947135-2495-391e-9e35-ed6effebb894" xlink:type="locator" />
    <calculationArc order="9" weight="-1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_916e1eb7-21fa-e5f0-a15f-0b05ed633776" xlink:to="loc_us-gaap_IncreaseDecreaseInInventories_59947135-2495-391e-9e35-ed6effebb894" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable" xlink:label="loc_us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable_3eb22aca-47ee-3290-8d2e-e73a1c67010e" xlink:type="locator" />
    <calculationArc order="10" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_916e1eb7-21fa-e5f0-a15f-0b05ed633776" xlink:to="loc_us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable_3eb22aca-47ee-3290-8d2e-e73a1c67010e" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets" xlink:label="loc_us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets_709900d0-f7b0-b950-eae5-eeb8fc36b367" xlink:type="locator" />
    <calculationArc order="11" weight="-1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_916e1eb7-21fa-e5f0-a15f-0b05ed633776" xlink:to="loc_us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets_709900d0-f7b0-b950-eae5-eeb8fc36b367" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncreaseDecreaseInAccountsPayable" xlink:label="loc_us-gaap_IncreaseDecreaseInAccountsPayable_a167e25c-e8b1-aeb8-f355-3727e3f06f3e" xlink:type="locator" />
    <calculationArc order="12" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_916e1eb7-21fa-e5f0-a15f-0b05ed633776" xlink:to="loc_us-gaap_IncreaseDecreaseInAccountsPayable_a167e25c-e8b1-aeb8-f355-3727e3f06f3e" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_IncreaseDecreaseInAccruedLiabilitiesAndCustomerDeposits" xlink:label="loc_asys_IncreaseDecreaseInAccruedLiabilitiesAndCustomerDeposits_86bcf3a0-1964-20b3-3c74-f541cff4ff95" xlink:type="locator" />
    <calculationArc order="13" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_916e1eb7-21fa-e5f0-a15f-0b05ed633776" xlink:to="loc_asys_IncreaseDecreaseInAccruedLiabilitiesAndCustomerDeposits_86bcf3a0-1964-20b3-3c74-f541cff4ff95" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_IncreaseDecreaseInDeferredProfit" xlink:label="loc_asys_IncreaseDecreaseInDeferredProfit_e579765b-4d0c-4d98-db86-f541cfcacb27" xlink:type="locator" />
    <calculationArc order="14" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_916e1eb7-21fa-e5f0-a15f-0b05ed633776" xlink:to="loc_asys_IncreaseDecreaseInDeferredProfit_e579765b-4d0c-4d98-db86-f541cfcacb27" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NetCashProvidedByUsedInInvestingActivities" xlink:label="loc_us-gaap_NetCashProvidedByUsedInInvestingActivities_58a5bd26-e5f4-de8f-6118-f713733148b8" xlink:type="locator" />
    <calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_CashAndCashEquivalentsPeriodIncreaseDecrease_ff5db18e-7b91-5a5d-e914-0527b02a8012" xlink:to="loc_us-gaap_NetCashProvidedByUsedInInvestingActivities_58a5bd26-e5f4-de8f-6118-f713733148b8" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PaymentsToAcquirePropertyPlantAndEquipment" xlink:label="loc_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_386292ff-155c-0309-455a-2b91b395b3da" xlink:type="locator" />
    <calculationArc order="1" weight="-1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInInvestingActivities_58a5bd26-e5f4-de8f-6118-f713733148b8" xlink:to="loc_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_386292ff-155c-0309-455a-2b91b395b3da" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CashAcquiredInExcessOfPaymentsToAcquireBusiness" xlink:label="loc_us-gaap_CashAcquiredInExcessOfPaymentsToAcquireBusiness_681307a1-82f5-d854-47f5-98aa3df35e8e" xlink:type="locator" />
    <calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInInvestingActivities_58a5bd26-e5f4-de8f-6118-f713733148b8" xlink:to="loc_us-gaap_CashAcquiredInExcessOfPaymentsToAcquireBusiness_681307a1-82f5-d854-47f5-98aa3df35e8e" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NetCashProvidedByUsedInFinancingActivities" xlink:label="loc_us-gaap_NetCashProvidedByUsedInFinancingActivities_a678c20d-a481-ef6a-800a-4bd566075d81" xlink:type="locator" />
    <calculationArc order="3" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_CashAndCashEquivalentsPeriodIncreaseDecrease_ff5db18e-7b91-5a5d-e914-0527b02a8012" xlink:to="loc_us-gaap_NetCashProvidedByUsedInFinancingActivities_a678c20d-a481-ef6a-800a-4bd566075d81" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProceedsFromIssuanceOfCommonStock" xlink:label="loc_us-gaap_ProceedsFromIssuanceOfCommonStock_8c608436-f07c-e907-aa0d-bfd819a80a12" xlink:type="locator" />
    <calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInFinancingActivities_a678c20d-a481-ef6a-800a-4bd566075d81" xlink:to="loc_us-gaap_ProceedsFromIssuanceOfCommonStock_8c608436-f07c-e907-aa0d-bfd819a80a12" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RepaymentsOfLongTermDebt" xlink:label="loc_us-gaap_RepaymentsOfLongTermDebt_bb66d22b-00d8-8213-df94-91578f68ce48" xlink:type="locator" />
    <calculationArc order="2" weight="-1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInFinancingActivities_a678c20d-a481-ef6a-800a-4bd566075d81" xlink:to="loc_us-gaap_RepaymentsOfLongTermDebt_bb66d22b-00d8-8213-df94-91578f68ce48" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ExcessTaxBenefitFromShareBasedCompensationFinancingActivities" xlink:label="loc_us-gaap_ExcessTaxBenefitFromShareBasedCompensationFinancingActivities_9dbeb004-67a9-1b19-c357-8b5cbf0013ee" xlink:type="locator" />
    <calculationArc order="3" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInFinancingActivities_a678c20d-a481-ef6a-800a-4bd566075d81" xlink:to="loc_us-gaap_ExcessTaxBenefitFromShareBasedCompensationFinancingActivities_9dbeb004-67a9-1b19-c357-8b5cbf0013ee" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProceedsFromIssuanceOfLongTermDebt" xlink:label="loc_us-gaap_ProceedsFromIssuanceOfLongTermDebt_dbe54487-f43f-8212-69b5-2b562fa61c57" xlink:type="locator" />
    <calculationArc order="4" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInFinancingActivities_a678c20d-a481-ef6a-800a-4bd566075d81" xlink:to="loc_us-gaap_ProceedsFromIssuanceOfLongTermDebt_dbe54487-f43f-8212-69b5-2b562fa61c57" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EffectOfExchangeRateOnCashAndCashEquivalents" xlink:label="loc_us-gaap_EffectOfExchangeRateOnCashAndCashEquivalents_438c1b09-9f50-5f5e-b6af-87ca1807a1a2" xlink:type="locator" />
    <calculationArc order="4" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_CashAndCashEquivalentsPeriodIncreaseDecrease_ff5db18e-7b91-5a5d-e914-0527b02a8012" xlink:to="loc_us-gaap_EffectOfExchangeRateOnCashAndCashEquivalents_438c1b09-9f50-5f5e-b6af-87ca1807a1a2" xlink:type="arc" />
  </calculationLink>
  <calculationLink xlink:role="http://www.amtechsystems.com/role/CondensedConsolidatedStatementsOfComprehensiveIncomeLossUnaudited" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ComprehensiveIncomeNetOfTax" xlink:label="loc_us-gaap_ComprehensiveIncomeNetOfTax_640557c9-9806-6bef-9084-9cc792948f77" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ComprehensiveIncomeNetOfTaxAttributableToNoncontrollingInterest" xlink:label="loc_us-gaap_ComprehensiveIncomeNetOfTaxAttributableToNoncontrollingInterest_560dfcb1-0fb6-5ffa-6e3b-8257ed923a94" xlink:type="locator" />
    <calculationArc order="1" weight="-1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_ComprehensiveIncomeNetOfTax_640557c9-9806-6bef-9084-9cc792948f77" xlink:to="loc_us-gaap_ComprehensiveIncomeNetOfTaxAttributableToNoncontrollingInterest_560dfcb1-0fb6-5ffa-6e3b-8257ed923a94" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ComprehensiveIncomeNetOfTaxIncludingPortionAttributableToNoncontrollingInterest" xlink:label="loc_us-gaap_ComprehensiveIncomeNetOfTaxIncludingPortionAttributableToNoncontrollingInterest_038f4602-9abc-1f60-05a2-6f69306a77ae" xlink:type="locator" />
    <calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_ComprehensiveIncomeNetOfTax_640557c9-9806-6bef-9084-9cc792948f77" xlink:to="loc_us-gaap_ComprehensiveIncomeNetOfTaxIncludingPortionAttributableToNoncontrollingInterest_038f4602-9abc-1f60-05a2-6f69306a77ae" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProfitLoss" xlink:label="loc_us-gaap_ProfitLoss_5f8983ec-dfa4-10d0-f53d-c0676300a16f" xlink:type="locator" />
    <calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_ComprehensiveIncomeNetOfTaxIncludingPortionAttributableToNoncontrollingInterest_038f4602-9abc-1f60-05a2-6f69306a77ae" xlink:to="loc_us-gaap_ProfitLoss_5f8983ec-dfa4-10d0-f53d-c0676300a16f" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax" xlink:label="loc_us-gaap_OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax_fbd5cad0-09ca-a68e-f9d5-77ff2ba61ae4" xlink:type="locator" />
    <calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_ComprehensiveIncomeNetOfTaxIncludingPortionAttributableToNoncontrollingInterest_038f4602-9abc-1f60-05a2-6f69306a77ae" xlink:to="loc_us-gaap_OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax_fbd5cad0-09ca-a68e-f9d5-77ff2ba61ae4" xlink:type="arc" />
  </calculationLink>
  <calculationLink xlink:role="http://www.amtechsystems.com/role/CondensedConsolidatedStatementsOfOperationsUnaudited" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NetIncomeLoss" xlink:label="loc_us-gaap_NetIncomeLoss_e62ce8b8-4401-2622-8598-3e644745e95e" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NetIncomeLossAttributableToNoncontrollingInterest" xlink:label="loc_us-gaap_NetIncomeLossAttributableToNoncontrollingInterest_6e1329dd-9911-a537-956e-8ca9c6805be6" xlink:type="locator" />
    <calculationArc order="1" weight="-1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetIncomeLoss_e62ce8b8-4401-2622-8598-3e644745e95e" xlink:to="loc_us-gaap_NetIncomeLossAttributableToNoncontrollingInterest_6e1329dd-9911-a537-956e-8ca9c6805be6" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProfitLoss" xlink:label="loc_us-gaap_ProfitLoss_5f8983ec-dfa4-10d0-f53d-c0676300a16f" xlink:type="locator" />
    <calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetIncomeLoss_e62ce8b8-4401-2622-8598-3e644745e95e" xlink:to="loc_us-gaap_ProfitLoss_5f8983ec-dfa4-10d0-f53d-c0676300a16f" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments" xlink:label="loc_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments_f0ea1b66-a9f7-f42c-6882-4cca5faefea1" xlink:type="locator" />
    <calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_ProfitLoss_5f8983ec-dfa4-10d0-f53d-c0676300a16f" xlink:to="loc_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments_f0ea1b66-a9f7-f42c-6882-4cca5faefea1" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OperatingIncomeLoss" xlink:label="loc_us-gaap_OperatingIncomeLoss_0ea1551e-1643-5e21-4c6e-6431fd87aa68" xlink:type="locator" />
    <calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments_f0ea1b66-a9f7-f42c-6882-4cca5faefea1" xlink:to="loc_us-gaap_OperatingIncomeLoss_0ea1551e-1643-5e21-4c6e-6431fd87aa68" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GrossProfit" xlink:label="loc_us-gaap_GrossProfit_ae720951-4a78-255d-8bd1-88ff26a27caf" xlink:type="locator" />
    <calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_OperatingIncomeLoss_0ea1551e-1643-5e21-4c6e-6431fd87aa68" xlink:to="loc_us-gaap_GrossProfit_ae720951-4a78-255d-8bd1-88ff26a27caf" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SalesRevenueNet" xlink:label="loc_us-gaap_SalesRevenueNet_533a4e74-899a-26d7-f9ea-a738a9e615c4" xlink:type="locator" />
    <calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_GrossProfit_ae720951-4a78-255d-8bd1-88ff26a27caf" xlink:to="loc_us-gaap_SalesRevenueNet_533a4e74-899a-26d7-f9ea-a738a9e615c4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CostOfGoodsAndServicesSold" xlink:label="loc_us-gaap_CostOfGoodsAndServicesSold_a64684b5-99de-91bb-54dd-5702d4624c68" xlink:type="locator" />
    <calculationArc order="2" weight="-1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_GrossProfit_ae720951-4a78-255d-8bd1-88ff26a27caf" xlink:to="loc_us-gaap_CostOfGoodsAndServicesSold_a64684b5-99de-91bb-54dd-5702d4624c68" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SellingGeneralAndAdministrativeExpense" xlink:label="loc_us-gaap_SellingGeneralAndAdministrativeExpense_37d23128-e0be-7b8b-d6c6-f3d1ac14cac9" xlink:type="locator" />
    <calculationArc order="2" weight="-1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_OperatingIncomeLoss_0ea1551e-1643-5e21-4c6e-6431fd87aa68" xlink:to="loc_us-gaap_SellingGeneralAndAdministrativeExpense_37d23128-e0be-7b8b-d6c6-f3d1ac14cac9" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_ResearchAndDevelopmentNetOfGrantsEarned" xlink:label="loc_asys_ResearchAndDevelopmentNetOfGrantsEarned_acbddf02-7fff-a3fe-55ae-f541cfe8d9d6" xlink:type="locator" />
    <calculationArc order="3" weight="-1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_OperatingIncomeLoss_0ea1551e-1643-5e21-4c6e-6431fd87aa68" xlink:to="loc_asys_ResearchAndDevelopmentNetOfGrantsEarned_acbddf02-7fff-a3fe-55ae-f541cfe8d9d6" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherNonoperatingIncomeExpense" xlink:label="loc_us-gaap_OtherNonoperatingIncomeExpense_51486ac3-3cfb-dff4-43ca-0d3980775a1d" xlink:type="locator" />
    <calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments_f0ea1b66-a9f7-f42c-6882-4cca5faefea1" xlink:to="loc_us-gaap_OtherNonoperatingIncomeExpense_51486ac3-3cfb-dff4-43ca-0d3980775a1d" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncomeTaxExpenseBenefit" xlink:label="loc_us-gaap_IncomeTaxExpenseBenefit_b8dcf191-083d-828d-7b9f-e2d2969b89f4" xlink:type="locator" />
    <calculationArc order="2" weight="-1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_ProfitLoss_5f8983ec-dfa4-10d0-f53d-c0676300a16f" xlink:to="loc_us-gaap_IncomeTaxExpenseBenefit_b8dcf191-083d-828d-7b9f-e2d2969b89f4" xlink:type="arc" />
  </calculationLink>
  <calculationLink xlink:role="http://www.amtechsystems.com/role/DocumentAndEntityInformation" xlink:type="extended" />
  <calculationLink xlink:role="http://www.amtechsystems.com/role/EarningsPerShare" xlink:type="extended" />
  <calculationLink xlink:role="http://www.amtechsystems.com/role/EarningsPerShareDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding" xlink:label="loc_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_ca9bebe4-4073-b721-7b75-1a0086593d58" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_WeightedAverageNumberOfSharesOutstandingBasic" xlink:label="loc_us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_8afbf9ec-40f2-ac04-dde9-64f96fdfbf74" xlink:type="locator" />
    <calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_ca9bebe4-4073-b721-7b75-1a0086593d58" xlink:to="loc_us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_8afbf9ec-40f2-ac04-dde9-64f96fdfbf74" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_WeightedAverageNumberDilutedSharesOutstandingAdjustment" xlink:label="loc_us-gaap_WeightedAverageNumberDilutedSharesOutstandingAdjustment_58a1745d-db2b-3ff9-104d-4b3f9664d3ce" xlink:type="locator" />
    <calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_ca9bebe4-4073-b721-7b75-1a0086593d58" xlink:to="loc_us-gaap_WeightedAverageNumberDilutedSharesOutstandingAdjustment_58a1745d-db2b-3ff9-104d-4b3f9664d3ce" xlink:type="arc" />
  </calculationLink>
  <calculationLink xlink:role="http://www.amtechsystems.com/role/EarningsPerShareTables" xlink:type="extended" />
  <calculationLink xlink:role="http://www.amtechsystems.com/role/IncomeTaxes" xlink:type="extended" />
  <calculationLink xlink:role="http://www.amtechsystems.com/role/IncomeTaxesDetails" xlink:type="extended" />
  <calculationLink xlink:role="http://www.amtechsystems.com/role/LongTermDebt" xlink:type="extended" />
  <calculationLink xlink:role="http://www.amtechsystems.com/role/LongTermDebtDetails" xlink:type="extended" />
  <calculationLink xlink:role="http://www.amtechsystems.com/role/MajorCustomersAndForeignSales" xlink:type="extended" />
  <calculationLink xlink:role="http://www.amtechsystems.com/role/MajorCustomersAndForeignSalesDetails" xlink:type="extended" />
  <calculationLink xlink:role="http://www.amtechsystems.com/role/MajorCustomersAndForeignSalesTables" xlink:type="extended" />
  <calculationLink xlink:role="http://www.amtechsystems.com/role/OtherAccruedLiabilities" xlink:type="extended" />
  <calculationLink xlink:role="http://www.amtechsystems.com/role/OtherAccruedLiabilitiesDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AccruedLiabilitiesCurrent" xlink:label="loc_us-gaap_AccruedLiabilitiesCurrent_eaf92fb1-642d-2c65-5ba7-1a63a3697f47" xlink:type="locator" />
    <loc xlink:href="asys-20150630.xsd#asys_UnearnedResearchandDevelopmentGrantsCurrent" xlink:label="loc_asys_UnearnedResearchandDevelopmentGrantsCurrent_d2526224-b871-b1e7-6b12-f541cfc4285e" xlink:type="locator" />
    <calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_AccruedLiabilitiesCurrent_eaf92fb1-642d-2c65-5ba7-1a63a3697f47" xlink:to="loc_asys_UnearnedResearchandDevelopmentGrantsCurrent_d2526224-b871-b1e7-6b12-f541cfc4285e" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_OtherAccruedLiabilitiesOtherCurrent" xlink:label="loc_asys_OtherAccruedLiabilitiesOtherCurrent_d746629c-65e2-d471-5b22-f541cfd4653d" xlink:type="locator" />
    <calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_AccruedLiabilitiesCurrent_eaf92fb1-642d-2c65-5ba7-1a63a3697f47" xlink:to="loc_asys_OtherAccruedLiabilitiesOtherCurrent_d746629c-65e2-d471-5b22-f541cfd4653d" xlink:type="arc" />
  </calculationLink>
  <calculationLink xlink:role="http://www.amtechsystems.com/role/OtherAccruedLiabilitiesTables" xlink:type="extended" />
  <calculationLink xlink:role="http://www.amtechsystems.com/role/StockholdersEquity" xlink:type="extended" />
  <calculationLink xlink:role="http://www.amtechsystems.com/role/StockholdersEquityDetails" xlink:type="extended" />
  <calculationLink xlink:role="http://www.amtechsystems.com/role/SubsequentEventDetails" xlink:type="extended" />
  <calculationLink xlink:role="http://www.amtechsystems.com/role/SubsequentEventNotes" xlink:type="extended" />
</linkbase>
</XBRL>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.DEF
<SEQUENCE>10
<FILENAME>asys-20150630_def.xml
<DESCRIPTION>XBRL TAXONOMY EXTENSION DEFINITION LINKBASE DOCUMENT
<TEXT>
<XBRL>
<?xml version="1.0" encoding="US-ASCII"?>
<!--XBRL Document Created with Wdesk from Workiva-->
<!-- -->
<linkbase xsi:schemaLocation="http://www.xbrl.org/2003/linkbase http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd" xmlns="http://www.xbrl.org/2003/linkbase" xmlns:xbrldt="http://xbrl.org/2005/xbrldt" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance">
  <roleRef roleURI="http://www.amtechsystems.com/role/Acquisition" xlink:href="asys-20150630.xsd#Acquisition" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/AcquisitionAcquisitionTables" xlink:href="asys-20150630.xsd#AcquisitionAcquisitionTables" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/AcquisitionAssetsAcquiredAndLiabilitiesAssumedDetails" xlink:href="asys-20150630.xsd#AcquisitionAssetsAcquiredAndLiabilitiesAssumedDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/AcquisitionConsiderationTransferredDetails" xlink:href="asys-20150630.xsd#AcquisitionConsiderationTransferredDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/AcquisitionDetails" xlink:href="asys-20150630.xsd#AcquisitionDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/AcquisitionProFormaDetails" xlink:href="asys-20150630.xsd#AcquisitionProFormaDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/BasisOfPresentation" xlink:href="asys-20150630.xsd#BasisOfPresentation" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/BasisOfPresentationCashEquivalentsDetails" xlink:href="asys-20150630.xsd#BasisOfPresentationCashEquivalentsDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/BasisOfPresentationConcentrationsOfCreditRiskDetails" xlink:href="asys-20150630.xsd#BasisOfPresentationConcentrationsOfCreditRiskDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/BasisOfPresentationDeferredProfitDetails" xlink:href="asys-20150630.xsd#BasisOfPresentationDeferredProfitDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/BasisOfPresentationGoodwillDetails" xlink:href="asys-20150630.xsd#BasisOfPresentationGoodwillDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/BasisOfPresentationIntangiblesDetails" xlink:href="asys-20150630.xsd#BasisOfPresentationIntangiblesDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/BasisOfPresentationInventoriesDetails" xlink:href="asys-20150630.xsd#BasisOfPresentationInventoriesDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/BasisOfPresentationPolicies" xlink:href="asys-20150630.xsd#BasisOfPresentationPolicies" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/BasisOfPresentationPropertyPlantAndEquipmentDetails" xlink:href="asys-20150630.xsd#BasisOfPresentationPropertyPlantAndEquipmentDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/BasisOfPresentationResearchAndDevelopmentExpenseDetails" xlink:href="asys-20150630.xsd#BasisOfPresentationResearchAndDevelopmentExpenseDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/BasisOfPresentationRestrictedCashDetails" xlink:href="asys-20150630.xsd#BasisOfPresentationRestrictedCashDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/BasisOfPresentationShippingExpenseDetails" xlink:href="asys-20150630.xsd#BasisOfPresentationShippingExpenseDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/BasisOfPresentationStockBasedCompensationDetails" xlink:href="asys-20150630.xsd#BasisOfPresentationStockBasedCompensationDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/BasisOfPresentationTables" xlink:href="asys-20150630.xsd#BasisOfPresentationTables" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/BasisOfPresentationWarrantyDetails" xlink:href="asys-20150630.xsd#BasisOfPresentationWarrantyDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/BusinessSegmentInformation" xlink:href="asys-20150630.xsd#BusinessSegmentInformation" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/BusinessSegmentInformationDetails" xlink:href="asys-20150630.xsd#BusinessSegmentInformationDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/BusinessSegmentInformationTables" xlink:href="asys-20150630.xsd#BusinessSegmentInformationTables" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/CommitmentsAndContingencies" xlink:href="asys-20150630.xsd#CommitmentsAndContingencies" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/CommitmentsAndContingenciesDetails" xlink:href="asys-20150630.xsd#CommitmentsAndContingenciesDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/CondensedConsolidatedBalanceSheets" xlink:href="asys-20150630.xsd#CondensedConsolidatedBalanceSheets" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/CondensedConsolidatedBalanceSheetsParenthetical" xlink:href="asys-20150630.xsd#CondensedConsolidatedBalanceSheetsParenthetical" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/CondensedConsolidatedStatementsOfCashFlowsUnaudited" xlink:href="asys-20150630.xsd#CondensedConsolidatedStatementsOfCashFlowsUnaudited" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/CondensedConsolidatedStatementsOfComprehensiveIncomeLossUnaudited" xlink:href="asys-20150630.xsd#CondensedConsolidatedStatementsOfComprehensiveIncomeLossUnaudited" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/CondensedConsolidatedStatementsOfOperationsUnaudited" xlink:href="asys-20150630.xsd#CondensedConsolidatedStatementsOfOperationsUnaudited" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/DocumentAndEntityInformation" xlink:href="asys-20150630.xsd#DocumentAndEntityInformation" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/EarningsPerShare" xlink:href="asys-20150630.xsd#EarningsPerShare" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/EarningsPerShareDetails" xlink:href="asys-20150630.xsd#EarningsPerShareDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/EarningsPerShareTables" xlink:href="asys-20150630.xsd#EarningsPerShareTables" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/IncomeTaxes" xlink:href="asys-20150630.xsd#IncomeTaxes" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/IncomeTaxesDetails" xlink:href="asys-20150630.xsd#IncomeTaxesDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/LongTermDebt" xlink:href="asys-20150630.xsd#LongTermDebt" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/LongTermDebtDetails" xlink:href="asys-20150630.xsd#LongTermDebtDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/MajorCustomersAndForeignSales" xlink:href="asys-20150630.xsd#MajorCustomersAndForeignSales" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/MajorCustomersAndForeignSalesDetails" xlink:href="asys-20150630.xsd#MajorCustomersAndForeignSalesDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/MajorCustomersAndForeignSalesTables" xlink:href="asys-20150630.xsd#MajorCustomersAndForeignSalesTables" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/OtherAccruedLiabilities" xlink:href="asys-20150630.xsd#OtherAccruedLiabilities" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/OtherAccruedLiabilitiesDetails" xlink:href="asys-20150630.xsd#OtherAccruedLiabilitiesDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/OtherAccruedLiabilitiesTables" xlink:href="asys-20150630.xsd#OtherAccruedLiabilitiesTables" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/StockholdersEquity" xlink:href="asys-20150630.xsd#StockholdersEquity" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/StockholdersEquityDetails" xlink:href="asys-20150630.xsd#StockholdersEquityDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/SubsequentEventDetails" xlink:href="asys-20150630.xsd#SubsequentEventDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/SubsequentEventNotes" xlink:href="asys-20150630.xsd#SubsequentEventNotes" xlink:type="simple" />
  <arcroleRef arcroleURI="http://xbrl.org/int/dim/arcrole/all" xlink:href="http://www.xbrl.org/2005/xbrldt-2005.xsd#all" xlink:type="simple" />
  <arcroleRef arcroleURI="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:href="http://www.xbrl.org/2005/xbrldt-2005.xsd#dimension-default" xlink:type="simple" />
  <arcroleRef arcroleURI="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:href="http://www.xbrl.org/2005/xbrldt-2005.xsd#dimension-domain" xlink:type="simple" />
  <arcroleRef arcroleURI="http://xbrl.org/int/dim/arcrole/domain-member" xlink:href="http://www.xbrl.org/2005/xbrldt-2005.xsd#domain-member" xlink:type="simple" />
  <arcroleRef arcroleURI="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:href="http://www.xbrl.org/2005/xbrldt-2005.xsd#hypercube-dimension" xlink:type="simple" />
  <definitionLink xlink:role="http://www.amtechsystems.com/role/Acquisition" xlink:type="extended" />
  <definitionLink xlink:role="http://www.amtechsystems.com/role/AcquisitionAcquisitionTables" xlink:type="extended" />
  <definitionLink xlink:role="http://www.amtechsystems.com/role/AcquisitionAssetsAcquiredAndLiabilitiesAssumedDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionLineItems" xlink:label="loc_us-gaap_BusinessAcquisitionLineItems_01F4862F98BD845CE083F54BDE33AAF0" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfBusinessAcquisitionsByAcquisitionTable" xlink:label="loc_us-gaap_ScheduleOfBusinessAcquisitionsByAcquisitionTable_1E1D7C589270804FD9AFF54BDE31A6F6" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="loc_us-gaap_BusinessAcquisitionLineItems_01F4862F98BD845CE083F54BDE33AAF0" xlink:to="loc_us-gaap_ScheduleOfBusinessAcquisitionsByAcquisitionTable_1E1D7C589270804FD9AFF54BDE31A6F6" xlink:type="arc" xbrldt:closed="true" xbrldt:contextElement="segment" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_7C96A80113826DBF6A7CF54BDE32B1CB" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ScheduleOfBusinessAcquisitionsByAcquisitionTable_1E1D7C589270804FD9AFF54BDE31A6F6" xlink:to="loc_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_7C96A80113826DBF6A7CF54BDE32B1CB" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_CC5ED128D761CC75AB7CF54BDE325088_default" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_7C96A80113826DBF6A7CF54BDE32B1CB" xlink:to="loc_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_CC5ED128D761CC75AB7CF54BDE325088_default" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_CC5ED128D761CC75AB7CF54BDE325088" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_7C96A80113826DBF6A7CF54BDE32B1CB" xlink:to="loc_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_CC5ED128D761CC75AB7CF54BDE325088" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_TradeNamesMember" xlink:label="loc_us-gaap_TradeNamesMember_7130C288EA9581A0FD33F54BDE3290C8" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_CC5ED128D761CC75AB7CF54BDE325088" xlink:to="loc_us-gaap_TradeNamesMember_7130C288EA9581A0FD33F54BDE3290C8" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StatementBusinessSegmentsAxis" xlink:label="loc_us-gaap_StatementBusinessSegmentsAxis_5E62123B58C98BE6ECDCF54BDE32206F" xlink:type="locator" />
    <definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ScheduleOfBusinessAcquisitionsByAcquisitionTable_1E1D7C589270804FD9AFF54BDE31A6F6" xlink:to="loc_us-gaap_StatementBusinessSegmentsAxis_5E62123B58C98BE6ECDCF54BDE32206F" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SegmentDomain" xlink:label="loc_us-gaap_SegmentDomain_C9ECDE00DDBB166C6EE1F54BDE329C87_default" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_StatementBusinessSegmentsAxis_5E62123B58C98BE6ECDCF54BDE32206F" xlink:to="loc_us-gaap_SegmentDomain_C9ECDE00DDBB166C6EE1F54BDE329C87_default" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SegmentDomain" xlink:label="loc_us-gaap_SegmentDomain_C9ECDE00DDBB166C6EE1F54BDE329C87" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_StatementBusinessSegmentsAxis_5E62123B58C98BE6ECDCF54BDE32206F" xlink:to="loc_us-gaap_SegmentDomain_C9ECDE00DDBB166C6EE1F54BDE329C87" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_SemiconductorEquipmentMember" xlink:label="loc_asys_SemiconductorEquipmentMember_03CE439B3070B71924AEF54BDE32516B" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_SegmentDomain_C9ECDE00DDBB166C6EE1F54BDE329C87" xlink:to="loc_asys_SemiconductorEquipmentMember_03CE439B3070B71924AEF54BDE32516B" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionAxis" xlink:label="loc_us-gaap_BusinessAcquisitionAxis_3CE8AB051C1929697B74F54BDE32625A" xlink:type="locator" />
    <definitionArc order="3" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ScheduleOfBusinessAcquisitionsByAcquisitionTable_1E1D7C589270804FD9AFF54BDE31A6F6" xlink:to="loc_us-gaap_BusinessAcquisitionAxis_3CE8AB051C1929697B74F54BDE32625A" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionAcquireeDomain" xlink:label="loc_us-gaap_BusinessAcquisitionAcquireeDomain_A66183E8042F95F6374EF54BDE32C155_default" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_BusinessAcquisitionAxis_3CE8AB051C1929697B74F54BDE32625A" xlink:to="loc_us-gaap_BusinessAcquisitionAcquireeDomain_A66183E8042F95F6374EF54BDE32C155_default" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionAcquireeDomain" xlink:label="loc_us-gaap_BusinessAcquisitionAcquireeDomain_A66183E8042F95F6374EF54BDE32C155" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_BusinessAcquisitionAxis_3CE8AB051C1929697B74F54BDE32625A" xlink:to="loc_us-gaap_BusinessAcquisitionAcquireeDomain_A66183E8042F95F6374EF54BDE32C155" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_BTUInternationalIncBTUMergerMember" xlink:label="loc_asys_BTUInternationalIncBTUMergerMember_7CB00AB89B4974563C88F54BDE33162A" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_BusinessAcquisitionAcquireeDomain_A66183E8042F95F6374EF54BDE32C155" xlink:to="loc_asys_BTUInternationalIncBTUMergerMember_7CB00AB89B4974563C88F54BDE33162A" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNet" xlink:label="loc_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNet_041AB2CF8DF5503E878DF54BDE3385D1" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_BusinessAcquisitionLineItems_01F4862F98BD845CE083F54BDE33AAF0" xlink:to="loc_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNet_041AB2CF8DF5503E878DF54BDE3385D1" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_Goodwill" xlink:label="loc_us-gaap_Goodwill_967A6BE0B34FA03BFB53F54BDE3343DF" xlink:type="locator" />
    <definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_BusinessAcquisitionLineItems_01F4862F98BD845CE083F54BDE33AAF0" xlink:to="loc_us-gaap_Goodwill_967A6BE0B34FA03BFB53F54BDE3343DF" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibleAssetsOtherThanGoodwill" xlink:label="loc_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibleAssetsOtherThanGoodwill_713264EE8D103495BC1DF54BDE33DA55" xlink:type="locator" />
    <definitionArc order="3" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_BusinessAcquisitionLineItems_01F4862F98BD845CE083F54BDE33AAF0" xlink:to="loc_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibleAssetsOtherThanGoodwill_713264EE8D103495BC1DF54BDE33DA55" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredGoodwillAndLiabilitiesAssumedNet" xlink:label="loc_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredGoodwillAndLiabilitiesAssumedNet_D13ABFA0684FCC1D29E3F54BDE338B96" xlink:type="locator" />
    <definitionArc order="4" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_BusinessAcquisitionLineItems_01F4862F98BD845CE083F54BDE33AAF0" xlink:to="loc_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredGoodwillAndLiabilitiesAssumedNet_D13ABFA0684FCC1D29E3F54BDE338B96" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetUsefulLife" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetUsefulLife_61819B34772EFFF93D0AF54BDE33014E" xlink:type="locator" />
    <definitionArc order="5" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_BusinessAcquisitionLineItems_01F4862F98BD845CE083F54BDE33AAF0" xlink:to="loc_us-gaap_FiniteLivedIntangibleAssetUsefulLife_61819B34772EFFF93D0AF54BDE33014E" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GoodwillAcquiredDuringPeriod" xlink:label="loc_us-gaap_GoodwillAcquiredDuringPeriod_2D5335C2789FA272E7E8F54BDE333453" xlink:type="locator" />
    <definitionArc order="6" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_BusinessAcquisitionLineItems_01F4862F98BD845CE083F54BDE33AAF0" xlink:to="loc_us-gaap_GoodwillAcquiredDuringPeriod_2D5335C2789FA272E7E8F54BDE333453" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessCombinationAcquisitionRelatedCosts" xlink:label="loc_us-gaap_BusinessCombinationAcquisitionRelatedCosts_06DFF24705CA34CE117EF54BDE33C049" xlink:type="locator" />
    <definitionArc order="7" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_BusinessAcquisitionLineItems_01F4862F98BD845CE083F54BDE33AAF0" xlink:to="loc_us-gaap_BusinessCombinationAcquisitionRelatedCosts_06DFF24705CA34CE117EF54BDE33C049" xlink:type="arc" />
  </definitionLink>
  <definitionLink xlink:role="http://www.amtechsystems.com/role/AcquisitionConsiderationTransferredDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionLineItems" xlink:label="loc_us-gaap_BusinessAcquisitionLineItems_983586B32D69B87A5D72F541EED2BE9E" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfBusinessAcquisitionsByAcquisitionTable" xlink:label="loc_us-gaap_ScheduleOfBusinessAcquisitionsByAcquisitionTable_277B384D8CD2FC186B51F541EED15908" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="loc_us-gaap_BusinessAcquisitionLineItems_983586B32D69B87A5D72F541EED2BE9E" xlink:to="loc_us-gaap_ScheduleOfBusinessAcquisitionsByAcquisitionTable_277B384D8CD2FC186B51F541EED15908" xlink:type="arc" xbrldt:closed="true" xbrldt:contextElement="segment" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionAxis" xlink:label="loc_us-gaap_BusinessAcquisitionAxis_19005C95A4F550074A42F541EED15779" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ScheduleOfBusinessAcquisitionsByAcquisitionTable_277B384D8CD2FC186B51F541EED15908" xlink:to="loc_us-gaap_BusinessAcquisitionAxis_19005C95A4F550074A42F541EED15779" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionAcquireeDomain" xlink:label="loc_us-gaap_BusinessAcquisitionAcquireeDomain_AF4AEDC73B31FB84908FF541EED1A9C6_default" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_BusinessAcquisitionAxis_19005C95A4F550074A42F541EED15779" xlink:to="loc_us-gaap_BusinessAcquisitionAcquireeDomain_AF4AEDC73B31FB84908FF541EED1A9C6_default" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionAcquireeDomain" xlink:label="loc_us-gaap_BusinessAcquisitionAcquireeDomain_AF4AEDC73B31FB84908FF541EED1A9C6" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_BusinessAcquisitionAxis_19005C95A4F550074A42F541EED15779" xlink:to="loc_us-gaap_BusinessAcquisitionAcquireeDomain_AF4AEDC73B31FB84908FF541EED1A9C6" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_BTUInternationalIncBTUMergerMember" xlink:label="loc_asys_BTUInternationalIncBTUMergerMember_BB532829930E0DB81CE1F541EED1D0DD" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_BusinessAcquisitionAcquireeDomain_AF4AEDC73B31FB84908FF541EED1A9C6" xlink:to="loc_asys_BTUInternationalIncBTUMergerMember_BB532829930E0DB81CE1F541EED1D0DD" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StatementClassOfStockAxis" xlink:label="loc_us-gaap_StatementClassOfStockAxis_226CA62B60D56478F1F2F541EED2C636" xlink:type="locator" />
    <definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ScheduleOfBusinessAcquisitionsByAcquisitionTable_277B384D8CD2FC186B51F541EED15908" xlink:to="loc_us-gaap_StatementClassOfStockAxis_226CA62B60D56478F1F2F541EED2C636" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ClassOfStockDomain" xlink:label="loc_us-gaap_ClassOfStockDomain_C23D11B756B4ED29CD90F541EED25335_default" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_StatementClassOfStockAxis_226CA62B60D56478F1F2F541EED2C636" xlink:to="loc_us-gaap_ClassOfStockDomain_C23D11B756B4ED29CD90F541EED25335_default" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ClassOfStockDomain" xlink:label="loc_us-gaap_ClassOfStockDomain_C23D11B756B4ED29CD90F541EED25335" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_StatementClassOfStockAxis_226CA62B60D56478F1F2F541EED2C636" xlink:to="loc_us-gaap_ClassOfStockDomain_C23D11B756B4ED29CD90F541EED25335" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_CommonAndRestrictedSharesMember" xlink:label="loc_asys_CommonAndRestrictedSharesMember_382DA5F3F97F468B1C08F541EED23267" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ClassOfStockDomain_C23D11B756B4ED29CD90F541EED25335" xlink:to="loc_asys_CommonAndRestrictedSharesMember_382DA5F3F97F468B1C08F541EED23267" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EmployeeStockOptionMember" xlink:label="loc_us-gaap_EmployeeStockOptionMember_C8C47F866CA4E700048AF541EED20030" xlink:type="locator" />
    <definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ClassOfStockDomain_C23D11B756B4ED29CD90F541EED25335" xlink:to="loc_us-gaap_EmployeeStockOptionMember_C8C47F866CA4E700048AF541EED20030" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConversionOfStockSharesConverted1" xlink:label="loc_us-gaap_ConversionOfStockSharesConverted1_E1CC3638CCA60920E944F541EED2B8CA" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_BusinessAcquisitionLineItems_983586B32D69B87A5D72F541EED2BE9E" xlink:to="loc_us-gaap_ConversionOfStockSharesConverted1_E1CC3638CCA60920E944F541EED2B8CA" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_ConversionOfStockConversionRatioSharesOfStockExchangedPerEachShareOfSubsidiaryStock" xlink:label="loc_asys_ConversionOfStockConversionRatioSharesOfStockExchangedPerEachShareOfSubsidiaryStock_8120351568A86EC3A474F541EED228FE" xlink:type="locator" />
    <definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_BusinessAcquisitionLineItems_983586B32D69B87A5D72F541EED2BE9E" xlink:to="loc_asys_ConversionOfStockConversionRatioSharesOfStockExchangedPerEachShareOfSubsidiaryStock_8120351568A86EC3A474F541EED228FE" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NoncashOrPartNoncashAcquisitionNoncashFinancialOrEquityInstrumentConsiderationSharesIssued1" xlink:label="loc_us-gaap_NoncashOrPartNoncashAcquisitionNoncashFinancialOrEquityInstrumentConsiderationSharesIssued1_D47702AA8C4E68E67909F541EED2B7F4" xlink:type="locator" />
    <definitionArc order="3" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_BusinessAcquisitionLineItems_983586B32D69B87A5D72F541EED2BE9E" xlink:to="loc_us-gaap_NoncashOrPartNoncashAcquisitionNoncashFinancialOrEquityInstrumentConsiderationSharesIssued1_D47702AA8C4E68E67909F541EED2B7F4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SharePrice" xlink:label="loc_us-gaap_SharePrice_3FD576F53A93FE35F949F541EED209F3" xlink:type="locator" />
    <definitionArc order="4" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_BusinessAcquisitionLineItems_983586B32D69B87A5D72F541EED2BE9E" xlink:to="loc_us-gaap_SharePrice_3FD576F53A93FE35F949F541EED209F3" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_BusinessCombinationConsiderationTransferredForCommonAndRestrictedStockUnits" xlink:label="loc_asys_BusinessCombinationConsiderationTransferredForCommonAndRestrictedStockUnits_F84BA34FA2DBF5AD1244F541EED39497" xlink:type="locator" />
    <definitionArc order="5" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_BusinessAcquisitionLineItems_983586B32D69B87A5D72F541EED2BE9E" xlink:to="loc_asys_BusinessCombinationConsiderationTransferredForCommonAndRestrictedStockUnits_F84BA34FA2DBF5AD1244F541EED39497" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessCombinationConsiderationTransferred1" xlink:label="loc_us-gaap_BusinessCombinationConsiderationTransferred1_F1577D6C1627CDF90445F541EED8BD26" xlink:type="locator" />
    <definitionArc order="6" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_BusinessAcquisitionLineItems_983586B32D69B87A5D72F541EED2BE9E" xlink:to="loc_us-gaap_BusinessCombinationConsiderationTransferred1_F1577D6C1627CDF90445F541EED8BD26" xlink:type="arc" />
  </definitionLink>
  <definitionLink xlink:role="http://www.amtechsystems.com/role/AcquisitionDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionLineItems" xlink:label="loc_us-gaap_BusinessAcquisitionLineItems_00A5C03701AC06A15762F541ED8338D2" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfBusinessAcquisitionsByAcquisitionTable" xlink:label="loc_us-gaap_ScheduleOfBusinessAcquisitionsByAcquisitionTable_1BDC21959B82C08BF482F541ED8218AF" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="loc_us-gaap_BusinessAcquisitionLineItems_00A5C03701AC06A15762F541ED8338D2" xlink:to="loc_us-gaap_ScheduleOfBusinessAcquisitionsByAcquisitionTable_1BDC21959B82C08BF482F541ED8218AF" xlink:type="arc" xbrldt:closed="true" xbrldt:contextElement="segment" />
    <loc xlink:href="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd#dei_LegalEntityAxis" xlink:label="loc_dei_LegalEntityAxis_48415A109ACAC6CDA197F541ED823555" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ScheduleOfBusinessAcquisitionsByAcquisitionTable_1BDC21959B82C08BF482F541ED8218AF" xlink:to="loc_dei_LegalEntityAxis_48415A109ACAC6CDA197F541ED823555" xlink:type="arc" />
    <loc xlink:href="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd#dei_EntityDomain" xlink:label="loc_dei_EntityDomain_357A5F16BE1133AAAE0AF541ED8243E2_default" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_dei_LegalEntityAxis_48415A109ACAC6CDA197F541ED823555" xlink:to="loc_dei_EntityDomain_357A5F16BE1133AAAE0AF541ED8243E2_default" xlink:type="arc" />
    <loc xlink:href="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd#dei_EntityDomain" xlink:label="loc_dei_EntityDomain_357A5F16BE1133AAAE0AF541ED8243E2" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_dei_LegalEntityAxis_48415A109ACAC6CDA197F541ED823555" xlink:to="loc_dei_EntityDomain_357A5F16BE1133AAAE0AF541ED8243E2" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_BTUInternationalIncBTUMergerMember" xlink:label="loc_asys_BTUInternationalIncBTUMergerMember_A8E3D22EF2D4ECC5D2F7F541ED82F6ED" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_dei_EntityDomain_357A5F16BE1133AAAE0AF541ED8243E2" xlink:to="loc_asys_BTUInternationalIncBTUMergerMember_A8E3D22EF2D4ECC5D2F7F541ED82F6ED" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ParentCompanyMember" xlink:label="loc_us-gaap_ParentCompanyMember_4274ABDFEDB55B61756BF541ED8232F7" xlink:type="locator" />
    <definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_dei_EntityDomain_357A5F16BE1133AAAE0AF541ED8243E2" xlink:to="loc_us-gaap_ParentCompanyMember_4274ABDFEDB55B61756BF541ED8232F7" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RelatedPartyTransactionAxis" xlink:label="loc_us-gaap_RelatedPartyTransactionAxis_03D0132D2FEBC17676B7F541ED833DC6" xlink:type="locator" />
    <definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ScheduleOfBusinessAcquisitionsByAcquisitionTable_1BDC21959B82C08BF482F541ED8218AF" xlink:to="loc_us-gaap_RelatedPartyTransactionAxis_03D0132D2FEBC17676B7F541ED833DC6" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RelatedPartyTransactionDomain" xlink:label="loc_us-gaap_RelatedPartyTransactionDomain_424AC8637604BBAC9B0DF541ED831679_default" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_RelatedPartyTransactionAxis_03D0132D2FEBC17676B7F541ED833DC6" xlink:to="loc_us-gaap_RelatedPartyTransactionDomain_424AC8637604BBAC9B0DF541ED831679_default" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RelatedPartyTransactionDomain" xlink:label="loc_us-gaap_RelatedPartyTransactionDomain_424AC8637604BBAC9B0DF541ED831679" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_RelatedPartyTransactionAxis_03D0132D2FEBC17676B7F541ED833DC6" xlink:to="loc_us-gaap_RelatedPartyTransactionDomain_424AC8637604BBAC9B0DF541ED831679" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_MergerAgreementMember" xlink:label="loc_asys_MergerAgreementMember_AD9AA88DD3C7FA638A53F541ED83656C" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_RelatedPartyTransactionDomain_424AC8637604BBAC9B0DF541ED831679" xlink:to="loc_asys_MergerAgreementMember_AD9AA88DD3C7FA638A53F541ED83656C" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionAxis" xlink:label="loc_us-gaap_BusinessAcquisitionAxis_584C858801A3F8DEAC7FF541ED83BDC4" xlink:type="locator" />
    <definitionArc order="3" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ScheduleOfBusinessAcquisitionsByAcquisitionTable_1BDC21959B82C08BF482F541ED8218AF" xlink:to="loc_us-gaap_BusinessAcquisitionAxis_584C858801A3F8DEAC7FF541ED83BDC4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionAcquireeDomain" xlink:label="loc_us-gaap_BusinessAcquisitionAcquireeDomain_6777228E21451B3EEF7FF541ED838DA0_default" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_BusinessAcquisitionAxis_584C858801A3F8DEAC7FF541ED83BDC4" xlink:to="loc_us-gaap_BusinessAcquisitionAcquireeDomain_6777228E21451B3EEF7FF541ED838DA0_default" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionAcquireeDomain" xlink:label="loc_us-gaap_BusinessAcquisitionAcquireeDomain_6777228E21451B3EEF7FF541ED838DA0" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_BusinessAcquisitionAxis_584C858801A3F8DEAC7FF541ED83BDC4" xlink:to="loc_us-gaap_BusinessAcquisitionAcquireeDomain_6777228E21451B3EEF7FF541ED838DA0" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_SoLayTecB.V.Member" xlink:label="loc_asys_SoLayTecB.V.Member_7597889C1E19B795F623F541ED838E98" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_BusinessAcquisitionAcquireeDomain_6777228E21451B3EEF7FF541ED838DA0" xlink:to="loc_asys_SoLayTecB.V.Member_7597889C1E19B795F623F541ED838E98" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConversionOfStockSharesIssued1" xlink:label="loc_us-gaap_ConversionOfStockSharesIssued1_D2B18A6F9C40B7A0E6B3F541ED83B5FB" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_BusinessAcquisitionLineItems_00A5C03701AC06A15762F541ED8338D2" xlink:to="loc_us-gaap_ConversionOfStockSharesIssued1_D2B18A6F9C40B7A0E6B3F541ED83B5FB" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_ConversionOfStockConversionRatioSharesOfStockExchangedPerEachShareOfSubsidiaryStock" xlink:label="loc_asys_ConversionOfStockConversionRatioSharesOfStockExchangedPerEachShareOfSubsidiaryStock_3B3C7CD7D03A6A830AE6F541ED838715" xlink:type="locator" />
    <definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_BusinessAcquisitionLineItems_00A5C03701AC06A15762F541ED8338D2" xlink:to="loc_asys_ConversionOfStockConversionRatioSharesOfStockExchangedPerEachShareOfSubsidiaryStock_3B3C7CD7D03A6A830AE6F541ED838715" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionPercentageOfVotingInterestsAcquired" xlink:label="loc_us-gaap_BusinessAcquisitionPercentageOfVotingInterestsAcquired_25F9301B7EB5A57B6738F541ED839DAB" xlink:type="locator" />
    <definitionArc order="3" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_BusinessAcquisitionLineItems_00A5C03701AC06A15762F541ED8338D2" xlink:to="loc_us-gaap_BusinessAcquisitionPercentageOfVotingInterestsAcquired_25F9301B7EB5A57B6738F541ED839DAB" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PaymentsToAcquireBusinessesGross" xlink:label="loc_us-gaap_PaymentsToAcquireBusinessesGross_5867924E1D60E151DEE5F541ED8349C1" xlink:type="locator" />
    <definitionArc order="4" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_BusinessAcquisitionLineItems_00A5C03701AC06A15762F541ED8338D2" xlink:to="loc_us-gaap_PaymentsToAcquireBusinessesGross_5867924E1D60E151DEE5F541ED8349C1" xlink:type="arc" />
  </definitionLink>
  <definitionLink xlink:role="http://www.amtechsystems.com/role/AcquisitionProFormaDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionLineItems" xlink:label="loc_us-gaap_BusinessAcquisitionLineItems_2725A8BBEE396AC67D31F541EE187F81" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfBusinessAcquisitionsByAcquisitionTable" xlink:label="loc_us-gaap_ScheduleOfBusinessAcquisitionsByAcquisitionTable_43FA899F87A97EEFCD1BF541EE1882D8" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="loc_us-gaap_BusinessAcquisitionLineItems_2725A8BBEE396AC67D31F541EE187F81" xlink:to="loc_us-gaap_ScheduleOfBusinessAcquisitionsByAcquisitionTable_43FA899F87A97EEFCD1BF541EE1882D8" xlink:type="arc" xbrldt:closed="true" xbrldt:contextElement="segment" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionAxis" xlink:label="loc_us-gaap_BusinessAcquisitionAxis_AD85A1A95C76A74B924CF541EE18C097" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ScheduleOfBusinessAcquisitionsByAcquisitionTable_43FA899F87A97EEFCD1BF541EE1882D8" xlink:to="loc_us-gaap_BusinessAcquisitionAxis_AD85A1A95C76A74B924CF541EE18C097" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionAcquireeDomain" xlink:label="loc_us-gaap_BusinessAcquisitionAcquireeDomain_B4254159FB1AEBCA1931F541EE18D466_default" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_BusinessAcquisitionAxis_AD85A1A95C76A74B924CF541EE18C097" xlink:to="loc_us-gaap_BusinessAcquisitionAcquireeDomain_B4254159FB1AEBCA1931F541EE18D466_default" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionAcquireeDomain" xlink:label="loc_us-gaap_BusinessAcquisitionAcquireeDomain_B4254159FB1AEBCA1931F541EE18D466" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_BusinessAcquisitionAxis_AD85A1A95C76A74B924CF541EE18C097" xlink:to="loc_us-gaap_BusinessAcquisitionAcquireeDomain_B4254159FB1AEBCA1931F541EE18D466" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_BTUInternationalIncBTUMergerMember" xlink:label="loc_asys_BTUInternationalIncBTUMergerMember_64FFE9FA75E6BE3F3C2DF541EE1841E2" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_BusinessAcquisitionAcquireeDomain_B4254159FB1AEBCA1931F541EE18D466" xlink:to="loc_asys_BTUInternationalIncBTUMergerMember_64FFE9FA75E6BE3F3C2DF541EE1841E2" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionsProFormaRevenue" xlink:label="loc_us-gaap_BusinessAcquisitionsProFormaRevenue_777D9D13DEE5D0A0A4F4F541EE187E07" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_BusinessAcquisitionLineItems_2725A8BBEE396AC67D31F541EE187F81" xlink:to="loc_us-gaap_BusinessAcquisitionsProFormaRevenue_777D9D13DEE5D0A0A4F4F541EE187E07" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionsProFormaNetIncomeLoss" xlink:label="loc_us-gaap_BusinessAcquisitionsProFormaNetIncomeLoss_57CE8F86850F0E399B72F541EE198C92" xlink:type="locator" />
    <definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_BusinessAcquisitionLineItems_2725A8BBEE396AC67D31F541EE187F81" xlink:to="loc_us-gaap_BusinessAcquisitionsProFormaNetIncomeLoss_57CE8F86850F0E399B72F541EE198C92" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionProFormaEarningsPerShareBasic" xlink:label="loc_us-gaap_BusinessAcquisitionProFormaEarningsPerShareBasic_5C4A1CBEA4308C557925F541EE1956CE" xlink:type="locator" />
    <definitionArc order="3" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_BusinessAcquisitionLineItems_2725A8BBEE396AC67D31F541EE187F81" xlink:to="loc_us-gaap_BusinessAcquisitionProFormaEarningsPerShareBasic_5C4A1CBEA4308C557925F541EE1956CE" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionProFormaEarningsPerShareDiluted" xlink:label="loc_us-gaap_BusinessAcquisitionProFormaEarningsPerShareDiluted_DDBE59F57DB11F2F0B5EF541EE191417" xlink:type="locator" />
    <definitionArc order="4" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_BusinessAcquisitionLineItems_2725A8BBEE396AC67D31F541EE187F81" xlink:to="loc_us-gaap_BusinessAcquisitionProFormaEarningsPerShareDiluted_DDBE59F57DB11F2F0B5EF541EE191417" xlink:type="arc" />
  </definitionLink>
  <definitionLink xlink:role="http://www.amtechsystems.com/role/BasisOfPresentation" xlink:type="extended" />
  <definitionLink xlink:role="http://www.amtechsystems.com/role/BasisOfPresentationCashEquivalentsDetails" xlink:type="extended" />
  <definitionLink xlink:role="http://www.amtechsystems.com/role/BasisOfPresentationConcentrationsOfCreditRiskDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskLineItems" xlink:label="loc_us-gaap_ConcentrationRiskLineItems_D137F9DBCCB8DD4E4A0EF541EE2C86B3" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskTable" xlink:label="loc_us-gaap_ConcentrationRiskTable_3FBE894DE5B6F84CF7E0F541EE2A12FD" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="loc_us-gaap_ConcentrationRiskLineItems_D137F9DBCCB8DD4E4A0EF541EE2C86B3" xlink:to="loc_us-gaap_ConcentrationRiskTable_3FBE894DE5B6F84CF7E0F541EE2A12FD" xlink:type="arc" xbrldt:closed="true" xbrldt:contextElement="segment" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StatementGeographicalAxis" xlink:label="loc_us-gaap_StatementGeographicalAxis_CEB3B8371A444CEB6D42F541EE2AF3F0" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ConcentrationRiskTable_3FBE894DE5B6F84CF7E0F541EE2A12FD" xlink:to="loc_us-gaap_StatementGeographicalAxis_CEB3B8371A444CEB6D42F541EE2AF3F0" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SegmentGeographicalDomain" xlink:label="loc_us-gaap_SegmentGeographicalDomain_356B648B03ED065917EEF541EE2A1E8F_default" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_StatementGeographicalAxis_CEB3B8371A444CEB6D42F541EE2AF3F0" xlink:to="loc_us-gaap_SegmentGeographicalDomain_356B648B03ED065917EEF541EE2A1E8F_default" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SegmentGeographicalDomain" xlink:label="loc_us-gaap_SegmentGeographicalDomain_356B648B03ED065917EEF541EE2A1E8F" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_StatementGeographicalAxis_CEB3B8371A444CEB6D42F541EE2AF3F0" xlink:to="loc_us-gaap_SegmentGeographicalDomain_356B648B03ED065917EEF541EE2A1E8F" xlink:type="arc" />
    <loc xlink:href="http://xbrl.sec.gov/country/2013/country-2013-01-31.xsd#country_US" xlink:label="loc_country_US_DC0F0A92BC79EB5CAF7FF541EE2B9C75" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_SegmentGeographicalDomain_356B648B03ED065917EEF541EE2A1E8F" xlink:to="loc_country_US_DC0F0A92BC79EB5CAF7FF541EE2B9C75" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskByBenchmarkAxis" xlink:label="loc_us-gaap_ConcentrationRiskByBenchmarkAxis_951C3AC4ADC5C6F815ABF541EE2B6BAB" xlink:type="locator" />
    <definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ConcentrationRiskTable_3FBE894DE5B6F84CF7E0F541EE2A12FD" xlink:to="loc_us-gaap_ConcentrationRiskByBenchmarkAxis_951C3AC4ADC5C6F815ABF541EE2B6BAB" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskBenchmarkDomain" xlink:label="loc_us-gaap_ConcentrationRiskBenchmarkDomain_2537EAA9309E7C480759F541EE2B8AED_default" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_ConcentrationRiskByBenchmarkAxis_951C3AC4ADC5C6F815ABF541EE2B6BAB" xlink:to="loc_us-gaap_ConcentrationRiskBenchmarkDomain_2537EAA9309E7C480759F541EE2B8AED_default" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskBenchmarkDomain" xlink:label="loc_us-gaap_ConcentrationRiskBenchmarkDomain_2537EAA9309E7C480759F541EE2B8AED" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_ConcentrationRiskByBenchmarkAxis_951C3AC4ADC5C6F815ABF541EE2B6BAB" xlink:to="loc_us-gaap_ConcentrationRiskBenchmarkDomain_2537EAA9309E7C480759F541EE2B8AED" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_CashAndCashEquivalentsAndRestrictedCashMember" xlink:label="loc_asys_CashAndCashEquivalentsAndRestrictedCashMember_06A517C55B4025B18D3BF541EE2BE5E4" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ConcentrationRiskBenchmarkDomain_2537EAA9309E7C480759F541EE2B8AED" xlink:to="loc_asys_CashAndCashEquivalentsAndRestrictedCashMember_06A517C55B4025B18D3BF541EE2BE5E4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AccountsReceivableMember" xlink:label="loc_us-gaap_AccountsReceivableMember_208C7E45F4348E43946EF541EE2BDFB3" xlink:type="locator" />
    <definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ConcentrationRiskBenchmarkDomain_2537EAA9309E7C480759F541EE2B8AED" xlink:to="loc_us-gaap_AccountsReceivableMember_208C7E45F4348E43946EF541EE2BDFB3" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskByTypeAxis" xlink:label="loc_us-gaap_ConcentrationRiskByTypeAxis_E95F5147E267B7B7B547F541EE2B85A9" xlink:type="locator" />
    <definitionArc order="3" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ConcentrationRiskTable_3FBE894DE5B6F84CF7E0F541EE2A12FD" xlink:to="loc_us-gaap_ConcentrationRiskByTypeAxis_E95F5147E267B7B7B547F541EE2B85A9" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskTypeDomain" xlink:label="loc_us-gaap_ConcentrationRiskTypeDomain_8C7E16088DDED601CA55F541EE2B108C_default" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_ConcentrationRiskByTypeAxis_E95F5147E267B7B7B547F541EE2B85A9" xlink:to="loc_us-gaap_ConcentrationRiskTypeDomain_8C7E16088DDED601CA55F541EE2B108C_default" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskTypeDomain" xlink:label="loc_us-gaap_ConcentrationRiskTypeDomain_8C7E16088DDED601CA55F541EE2B108C" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_ConcentrationRiskByTypeAxis_E95F5147E267B7B7B547F541EE2B85A9" xlink:to="loc_us-gaap_ConcentrationRiskTypeDomain_8C7E16088DDED601CA55F541EE2B108C" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_CustomerOneMember" xlink:label="loc_asys_CustomerOneMember_683C9B9307AB3EDA159FF541EE2C7D74" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ConcentrationRiskTypeDomain_8C7E16088DDED601CA55F541EE2B108C" xlink:to="loc_asys_CustomerOneMember_683C9B9307AB3EDA159FF541EE2C7D74" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskPercentage1" xlink:label="loc_us-gaap_ConcentrationRiskPercentage1_0422C94D66F14CA6A41FF541EE2CF1D3" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ConcentrationRiskLineItems_D137F9DBCCB8DD4E4A0EF541EE2C86B3" xlink:to="loc_us-gaap_ConcentrationRiskPercentage1_0422C94D66F14CA6A41FF541EE2CF1D3" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_NumberOfCustomers" xlink:label="loc_asys_NumberOfCustomers_A27C5E4838E87A440B38F541EE2CBB73" xlink:type="locator" />
    <definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ConcentrationRiskLineItems_D137F9DBCCB8DD4E4A0EF541EE2C86B3" xlink:to="loc_asys_NumberOfCustomers_A27C5E4838E87A440B38F541EE2CBB73" xlink:type="arc" />
  </definitionLink>
  <definitionLink xlink:role="http://www.amtechsystems.com/role/BasisOfPresentationDeferredProfitDetails" xlink:type="extended" />
  <definitionLink xlink:role="http://www.amtechsystems.com/role/BasisOfPresentationGoodwillDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GoodwillLineItems" xlink:label="loc_us-gaap_GoodwillLineItems_76247DCC0ADECEEC64E0007D9875BA97" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfGoodwillTable" xlink:label="loc_us-gaap_ScheduleOfGoodwillTable_98DBCC557D624A5CB38A007D98740AD5" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="loc_us-gaap_GoodwillLineItems_76247DCC0ADECEEC64E0007D9875BA97" xlink:to="loc_us-gaap_ScheduleOfGoodwillTable_98DBCC557D624A5CB38A007D98740AD5" xlink:type="arc" xbrldt:closed="true" xbrldt:contextElement="segment" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StatementBusinessSegmentsAxis" xlink:label="loc_us-gaap_StatementBusinessSegmentsAxis_A5AA0F22463CC17D0E4A007D987419BC" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ScheduleOfGoodwillTable_98DBCC557D624A5CB38A007D98740AD5" xlink:to="loc_us-gaap_StatementBusinessSegmentsAxis_A5AA0F22463CC17D0E4A007D987419BC" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SegmentDomain" xlink:label="loc_us-gaap_SegmentDomain_A37A92903AE6912C6994007D9874B9CE_default" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_StatementBusinessSegmentsAxis_A5AA0F22463CC17D0E4A007D987419BC" xlink:to="loc_us-gaap_SegmentDomain_A37A92903AE6912C6994007D9874B9CE_default" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SegmentDomain" xlink:label="loc_us-gaap_SegmentDomain_A37A92903AE6912C6994007D9874B9CE" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_StatementBusinessSegmentsAxis_A5AA0F22463CC17D0E4A007D987419BC" xlink:to="loc_us-gaap_SegmentDomain_A37A92903AE6912C6994007D9874B9CE" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_SolarEquipmentMember" xlink:label="loc_asys_SolarEquipmentMember_9B3C1CA037829A6990F1007D9874E71C" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_SegmentDomain_A37A92903AE6912C6994007D9874B9CE" xlink:to="loc_asys_SolarEquipmentMember_9B3C1CA037829A6990F1007D9874E71C" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_SemiconductorEquipmentMember" xlink:label="loc_asys_SemiconductorEquipmentMember_23041D6FAF48BE1900E0007D98743874" xlink:type="locator" />
    <definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_SegmentDomain_A37A92903AE6912C6994007D9874B9CE" xlink:to="loc_asys_SemiconductorEquipmentMember_23041D6FAF48BE1900E0007D98743874" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_PolishingSuppliesAndEquipmentMember" xlink:label="loc_asys_PolishingSuppliesAndEquipmentMember_CC8BAAE2B1553908AA8C007D9875E7AB" xlink:type="locator" />
    <definitionArc order="3" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_SegmentDomain_A37A92903AE6912C6994007D9874B9CE" xlink:to="loc_asys_PolishingSuppliesAndEquipmentMember_CC8BAAE2B1553908AA8C007D9875E7AB" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GoodwillRollForward" xlink:label="loc_us-gaap_GoodwillRollForward_94CDBF1774234AF16F93007D98757E35" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_GoodwillLineItems_76247DCC0ADECEEC64E0007D9875BA97" xlink:to="loc_us-gaap_GoodwillRollForward_94CDBF1774234AF16F93007D98757E35" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GoodwillGross" xlink:label="loc_us-gaap_GoodwillGross_BBCA05DC66F423343C6C007D98753156" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_GoodwillRollForward_94CDBF1774234AF16F93007D98757E35" xlink:to="loc_us-gaap_GoodwillGross_BBCA05DC66F423343C6C007D98753156" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GoodwillImpairedAccumulatedImpairmentLoss" xlink:label="loc_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss_F5966101AF55357A55AE007D98758EFA" xlink:type="locator" />
    <definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_GoodwillRollForward_94CDBF1774234AF16F93007D98757E35" xlink:to="loc_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss_F5966101AF55357A55AE007D98758EFA" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_Goodwill" xlink:label="loc_us-gaap_Goodwill_89ADB30BA031A07D319A007D9875F037" xlink:type="locator" />
    <definitionArc order="3" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_GoodwillRollForward_94CDBF1774234AF16F93007D98757E35" xlink:to="loc_us-gaap_Goodwill_89ADB30BA031A07D319A007D9875F037" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GoodwillAcquiredDuringPeriod" xlink:label="loc_us-gaap_GoodwillAcquiredDuringPeriod_D52F770AFC091A010D2C007D98752498" xlink:type="locator" />
    <definitionArc order="4" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_GoodwillRollForward_94CDBF1774234AF16F93007D98757E35" xlink:to="loc_us-gaap_GoodwillAcquiredDuringPeriod_D52F770AFC091A010D2C007D98752498" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GoodwillTranslationAdjustments" xlink:label="loc_us-gaap_GoodwillTranslationAdjustments_727A45583EB2EE52777A007D987558B7" xlink:type="locator" />
    <definitionArc order="5" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_GoodwillRollForward_94CDBF1774234AF16F93007D98757E35" xlink:to="loc_us-gaap_GoodwillTranslationAdjustments_727A45583EB2EE52777A007D987558B7" xlink:type="arc" />
  </definitionLink>
  <definitionLink xlink:role="http://www.amtechsystems.com/role/BasisOfPresentationIntangiblesDetails" xlink:type="extended">
    <loc xlink:href="asys-20150630.xsd#asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems" xlink:label="loc_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems_05D961EEF34725D95806F54BDEC450F3" xlink:type="locator" />
    <loc xlink:href="asys-20150630.xsd#asys_ScheduleOfAcquiredFiniteAndIndefiniteLivedIntangibleAssetByMajorClassTable" xlink:label="loc_asys_ScheduleOfAcquiredFiniteAndIndefiniteLivedIntangibleAssetByMajorClassTable_A445E375B8811DA73338F54BDEC2E013" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="loc_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems_05D961EEF34725D95806F54BDEC450F3" xlink:to="loc_asys_ScheduleOfAcquiredFiniteAndIndefiniteLivedIntangibleAssetByMajorClassTable_A445E375B8811DA73338F54BDEC2E013" xlink:type="arc" xbrldt:closed="true" xbrldt:contextElement="segment" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionAxis" xlink:label="loc_us-gaap_BusinessAcquisitionAxis_6C68AC094AA30620A942F54BDEC2BC88" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_asys_ScheduleOfAcquiredFiniteAndIndefiniteLivedIntangibleAssetByMajorClassTable_A445E375B8811DA73338F54BDEC2E013" xlink:to="loc_us-gaap_BusinessAcquisitionAxis_6C68AC094AA30620A942F54BDEC2BC88" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionAcquireeDomain" xlink:label="loc_us-gaap_BusinessAcquisitionAcquireeDomain_99E4EBFD70318A130F34F54BDEC26D2B_default" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_BusinessAcquisitionAxis_6C68AC094AA30620A942F54BDEC2BC88" xlink:to="loc_us-gaap_BusinessAcquisitionAcquireeDomain_99E4EBFD70318A130F34F54BDEC26D2B_default" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionAcquireeDomain" xlink:label="loc_us-gaap_BusinessAcquisitionAcquireeDomain_99E4EBFD70318A130F34F54BDEC26D2B" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_BusinessAcquisitionAxis_6C68AC094AA30620A942F54BDEC2BC88" xlink:to="loc_us-gaap_BusinessAcquisitionAcquireeDomain_99E4EBFD70318A130F34F54BDEC26D2B" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_SoLayTecB.V.Member" xlink:label="loc_asys_SoLayTecB.V.Member_2D4537CC3DEDE4E5A3A5F54BDEC2FF88" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_BusinessAcquisitionAcquireeDomain_99E4EBFD70318A130F34F54BDEC26D2B" xlink:to="loc_asys_SoLayTecB.V.Member_2D4537CC3DEDE4E5A3A5F54BDEC2FF88" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_BTUInternationalIncBTUMember" xlink:label="loc_asys_BTUInternationalIncBTUMember_9F290DC1209BB5B58238F54BDEC273B0" xlink:type="locator" />
    <definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_BusinessAcquisitionAcquireeDomain_99E4EBFD70318A130F34F54BDEC26D2B" xlink:to="loc_asys_BTUInternationalIncBTUMember_9F290DC1209BB5B58238F54BDEC273B0" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_F20E3CEA473598DAB969F54BDEC21B4D" xlink:type="locator" />
    <definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_asys_ScheduleOfAcquiredFiniteAndIndefiniteLivedIntangibleAssetByMajorClassTable_A445E375B8811DA73338F54BDEC2E013" xlink:to="loc_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_F20E3CEA473598DAB969F54BDEC21B4D" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_583633BA32AB606579C3F54BDEC203A7_default" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_F20E3CEA473598DAB969F54BDEC21B4D" xlink:to="loc_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_583633BA32AB606579C3F54BDEC203A7_default" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_583633BA32AB606579C3F54BDEC203A7" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_F20E3CEA473598DAB969F54BDEC21B4D" xlink:to="loc_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_583633BA32AB606579C3F54BDEC203A7" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NoncompeteAgreementsMember" xlink:label="loc_us-gaap_NoncompeteAgreementsMember_1AE693781B5332EEC0E5F54BDEC3671B" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_583633BA32AB606579C3F54BDEC203A7" xlink:to="loc_us-gaap_NoncompeteAgreementsMember_1AE693781B5332EEC0E5F54BDEC3671B" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CustomerListsMember" xlink:label="loc_us-gaap_CustomerListsMember_7D9C7F620AFDF2FD88A4F54BDEC39F47" xlink:type="locator" />
    <definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_583633BA32AB606579C3F54BDEC203A7" xlink:to="loc_us-gaap_CustomerListsMember_7D9C7F620AFDF2FD88A4F54BDEC39F47" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PatentedTechnologyMember" xlink:label="loc_us-gaap_PatentedTechnologyMember_9599A399DBCF48EBDB08F54BDEC3DB8E" xlink:type="locator" />
    <definitionArc order="3" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_583633BA32AB606579C3F54BDEC203A7" xlink:to="loc_us-gaap_PatentedTechnologyMember_9599A399DBCF48EBDB08F54BDEC3DB8E" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_InProcessResearchAndDevelopmentMember" xlink:label="loc_us-gaap_InProcessResearchAndDevelopmentMember_3E38FB136113E4CEBEA9F54BDEC32C04" xlink:type="locator" />
    <definitionArc order="4" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_583633BA32AB606579C3F54BDEC203A7" xlink:to="loc_us-gaap_InProcessResearchAndDevelopmentMember_3E38FB136113E4CEBEA9F54BDEC32C04" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_TradeNamesMember" xlink:label="loc_us-gaap_TradeNamesMember_05BBC80B36A632A59EA5F54BDEC3E4AB" xlink:type="locator" />
    <definitionArc order="5" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_583633BA32AB606579C3F54BDEC203A7" xlink:to="loc_us-gaap_TradeNamesMember_05BBC80B36A632A59EA5F54BDEC3E4AB" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherIntangibleAssetsMember" xlink:label="loc_us-gaap_OtherIntangibleAssetsMember_7A317E3A5211279CB05FF54BDEC3F6AF" xlink:type="locator" />
    <definitionArc order="6" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_583633BA32AB606579C3F54BDEC203A7" xlink:to="loc_us-gaap_OtherIntangibleAssetsMember_7A317E3A5211279CB05FF54BDEC3F6AF" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeAxis" xlink:label="loc_us-gaap_RangeAxis_94D07FD17C36706EC574F54BDEC345B4" xlink:type="locator" />
    <definitionArc order="3" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_asys_ScheduleOfAcquiredFiniteAndIndefiniteLivedIntangibleAssetByMajorClassTable_A445E375B8811DA73338F54BDEC2E013" xlink:to="loc_us-gaap_RangeAxis_94D07FD17C36706EC574F54BDEC345B4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeMember" xlink:label="loc_us-gaap_RangeMember_24CA7F49544978CD0CADF54BDEC3616E_default" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_RangeAxis_94D07FD17C36706EC574F54BDEC345B4" xlink:to="loc_us-gaap_RangeMember_24CA7F49544978CD0CADF54BDEC3616E_default" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeMember" xlink:label="loc_us-gaap_RangeMember_24CA7F49544978CD0CADF54BDEC3616E" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_RangeAxis_94D07FD17C36706EC574F54BDEC345B4" xlink:to="loc_us-gaap_RangeMember_24CA7F49544978CD0CADF54BDEC3616E" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MinimumMember" xlink:label="loc_us-gaap_MinimumMember_7A81C9F51F847BF444A5F54BDEC35646" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_RangeMember_24CA7F49544978CD0CADF54BDEC3616E" xlink:to="loc_us-gaap_MinimumMember_7A81C9F51F847BF444A5F54BDEC35646" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MaximumMember" xlink:label="loc_us-gaap_MaximumMember_7A2AB52D1B13498AE4DCF54BDEC336CD" xlink:type="locator" />
    <definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_RangeMember_24CA7F49544978CD0CADF54BDEC3616E" xlink:to="loc_us-gaap_MaximumMember_7A2AB52D1B13498AE4DCF54BDEC336CD" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionPercentageOfVotingInterestsAcquired" xlink:label="loc_us-gaap_BusinessAcquisitionPercentageOfVotingInterestsAcquired_846D51724CEB78096570F54BDEC46157" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems_05D961EEF34725D95806F54BDEC450F3" xlink:to="loc_us-gaap_BusinessAcquisitionPercentageOfVotingInterestsAcquired_846D51724CEB78096570F54BDEC46157" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibles" xlink:label="loc_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibles_350BAADC7473DBF1D40BF54BDEC4A21F" xlink:type="locator" />
    <definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems_05D961EEF34725D95806F54BDEC450F3" xlink:to="loc_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibles_350BAADC7473DBF1D40BF54BDEC4A21F" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsGross" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsGross_D5D3865CF157DE4F7777F54BDEC4D7CE" xlink:type="locator" />
    <definitionArc order="3" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems_05D961EEF34725D95806F54BDEC450F3" xlink:to="loc_us-gaap_FiniteLivedIntangibleAssetsGross_D5D3865CF157DE4F7777F54BDEC4D7CE" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization_BD21100143F9CCE582D1F54BDEC4C765" xlink:type="locator" />
    <definitionArc order="4" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems_05D961EEF34725D95806F54BDEC450F3" xlink:to="loc_us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization_BD21100143F9CCE582D1F54BDEC4C765" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsNet" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsNet_10BDA651F307890E502EF54BDEC4B989" xlink:type="locator" />
    <definitionArc order="5" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems_05D961EEF34725D95806F54BDEC450F3" xlink:to="loc_us-gaap_FiniteLivedIntangibleAssetsNet_10BDA651F307890E502EF54BDEC4B989" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetUsefulLife" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetUsefulLife_2D1D520FF8879BA6594CF54BDEC47BF4" xlink:type="locator" />
    <definitionArc order="6" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems_05D961EEF34725D95806F54BDEC450F3" xlink:to="loc_us-gaap_FiniteLivedIntangibleAssetUsefulLife_2D1D520FF8879BA6594CF54BDEC47BF4" xlink:type="arc" />
  </definitionLink>
  <definitionLink xlink:role="http://www.amtechsystems.com/role/BasisOfPresentationInventoriesDetails" xlink:type="extended" />
  <definitionLink xlink:role="http://www.amtechsystems.com/role/BasisOfPresentationPolicies" xlink:type="extended" />
  <definitionLink xlink:role="http://www.amtechsystems.com/role/BasisOfPresentationPropertyPlantAndEquipmentDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PropertyPlantAndEquipmentLineItems" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentLineItems_7D0ACD321F9C9D7B1F07F541ED5A9E44" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfPropertyPlantAndEquipmentTable" xlink:label="loc_us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_481BA4569555BF99F109F541ED58DAE0" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentLineItems_7D0ACD321F9C9D7B1F07F541ED5A9E44" xlink:to="loc_us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_481BA4569555BF99F109F541ED58DAE0" xlink:type="arc" xbrldt:closed="true" xbrldt:contextElement="segment" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PropertyPlantAndEquipmentByTypeAxis" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentByTypeAxis_7813AA948B763E7838A6F541ED59EF21" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_481BA4569555BF99F109F541ED58DAE0" xlink:to="loc_us-gaap_PropertyPlantAndEquipmentByTypeAxis_7813AA948B763E7838A6F541ED59EF21" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentTypeDomain_55E4EB5FC326F343CB57F541ED592FB3_default" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentByTypeAxis_7813AA948B763E7838A6F541ED59EF21" xlink:to="loc_us-gaap_PropertyPlantAndEquipmentTypeDomain_55E4EB5FC326F343CB57F541ED592FB3_default" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentTypeDomain_55E4EB5FC326F343CB57F541ED592FB3" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentByTypeAxis_7813AA948B763E7838A6F541ED59EF21" xlink:to="loc_us-gaap_PropertyPlantAndEquipmentTypeDomain_55E4EB5FC326F343CB57F541ED592FB3" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BuildingAndBuildingImprovementsMember" xlink:label="loc_us-gaap_BuildingAndBuildingImprovementsMember_68B1D22A20A45E72E868F541ED59FE42" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentTypeDomain_55E4EB5FC326F343CB57F541ED592FB3" xlink:to="loc_us-gaap_BuildingAndBuildingImprovementsMember_68B1D22A20A45E72E868F541ED59FE42" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LandBuildingsAndImprovementsMember" xlink:label="loc_us-gaap_LandBuildingsAndImprovementsMember_B4E99308C3A09B1DAEAEF541ED595859" xlink:type="locator" />
    <definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentTypeDomain_55E4EB5FC326F343CB57F541ED592FB3" xlink:to="loc_us-gaap_LandBuildingsAndImprovementsMember_B4E99308C3A09B1DAEAEF541ED595859" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MachineryAndEquipmentMember" xlink:label="loc_us-gaap_MachineryAndEquipmentMember_13EDAE7B2761704710D4F541ED5957CE" xlink:type="locator" />
    <definitionArc order="3" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentTypeDomain_55E4EB5FC326F343CB57F541ED592FB3" xlink:to="loc_us-gaap_MachineryAndEquipmentMember_13EDAE7B2761704710D4F541ED5957CE" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FurnitureAndFixturesMember" xlink:label="loc_us-gaap_FurnitureAndFixturesMember_6B506BEE6BAD79A43BC2F541ED5979BB" xlink:type="locator" />
    <definitionArc order="4" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentTypeDomain_55E4EB5FC326F343CB57F541ED592FB3" xlink:to="loc_us-gaap_FurnitureAndFixturesMember_6B506BEE6BAD79A43BC2F541ED5979BB" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LeaseholdImprovementsMember" xlink:label="loc_us-gaap_LeaseholdImprovementsMember_57B30100DFDFFCF6FEABF541ED5967CE" xlink:type="locator" />
    <definitionArc order="5" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentTypeDomain_55E4EB5FC326F343CB57F541ED592FB3" xlink:to="loc_us-gaap_LeaseholdImprovementsMember_57B30100DFDFFCF6FEABF541ED5967CE" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeAxis" xlink:label="loc_us-gaap_RangeAxis_4A84BAE60F7BB39D2679F541ED597EB6" xlink:type="locator" />
    <definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_481BA4569555BF99F109F541ED58DAE0" xlink:to="loc_us-gaap_RangeAxis_4A84BAE60F7BB39D2679F541ED597EB6" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeMember" xlink:label="loc_us-gaap_RangeMember_6CCF91C4DA09C3876C5DF541ED599F3C_default" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_RangeAxis_4A84BAE60F7BB39D2679F541ED597EB6" xlink:to="loc_us-gaap_RangeMember_6CCF91C4DA09C3876C5DF541ED599F3C_default" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeMember" xlink:label="loc_us-gaap_RangeMember_6CCF91C4DA09C3876C5DF541ED599F3C" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_RangeAxis_4A84BAE60F7BB39D2679F541ED597EB6" xlink:to="loc_us-gaap_RangeMember_6CCF91C4DA09C3876C5DF541ED599F3C" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MinimumMember" xlink:label="loc_us-gaap_MinimumMember_8F61D49EF8E492BAFE35F541ED5AB729" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_RangeMember_6CCF91C4DA09C3876C5DF541ED599F3C" xlink:to="loc_us-gaap_MinimumMember_8F61D49EF8E492BAFE35F541ED5AB729" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MaximumMember" xlink:label="loc_us-gaap_MaximumMember_97CC56F39FA7378D5F7AF541ED5A1871" xlink:type="locator" />
    <definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_RangeMember_6CCF91C4DA09C3876C5DF541ED599F3C" xlink:to="loc_us-gaap_MaximumMember_97CC56F39FA7378D5F7AF541ED5A1871" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PropertyPlantAndEquipmentUsefulLife" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentUsefulLife_78E010BB09650EEABD7EF541ED5A2258" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentLineItems_7D0ACD321F9C9D7B1F07F541ED5A9E44" xlink:to="loc_us-gaap_PropertyPlantAndEquipmentUsefulLife_78E010BB09650EEABD7EF541ED5A2258" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PropertyPlantAndEquipmentGross" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentGross_62B0F653E4892B1A518AF541ED5A4A5B" xlink:type="locator" />
    <definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentLineItems_7D0ACD321F9C9D7B1F07F541ED5A9E44" xlink:to="loc_us-gaap_PropertyPlantAndEquipmentGross_62B0F653E4892B1A518AF541ED5A4A5B" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment" xlink:label="loc_us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment_0DF21A1D9FD899A2BAEEF541ED5AA4E4" xlink:type="locator" />
    <definitionArc order="3" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentLineItems_7D0ACD321F9C9D7B1F07F541ED5A9E44" xlink:to="loc_us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment_0DF21A1D9FD899A2BAEEF541ED5AA4E4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PropertyPlantAndEquipmentNet" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentNet_BB3C58A55FEB02B01FA7F541ED5A67D5" xlink:type="locator" />
    <definitionArc order="4" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentLineItems_7D0ACD321F9C9D7B1F07F541ED5A9E44" xlink:to="loc_us-gaap_PropertyPlantAndEquipmentNet_BB3C58A55FEB02B01FA7F541ED5A67D5" xlink:type="arc" />
  </definitionLink>
  <definitionLink xlink:role="http://www.amtechsystems.com/role/BasisOfPresentationResearchAndDevelopmentExpenseDetails" xlink:type="extended" />
  <definitionLink xlink:role="http://www.amtechsystems.com/role/BasisOfPresentationRestrictedCashDetails" xlink:type="extended" />
  <definitionLink xlink:role="http://www.amtechsystems.com/role/BasisOfPresentationShippingExpenseDetails" xlink:type="extended" />
  <definitionLink xlink:role="http://www.amtechsystems.com/role/BasisOfPresentationStockBasedCompensationDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_1E9F3B5F8240B1EF5DD2F54BDEB22251" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:label="loc_us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_38E35B005F8B0334FF5CF54BDEB1D5EA" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_1E9F3B5F8240B1EF5DD2F54BDEB22251" xlink:to="loc_us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_38E35B005F8B0334FF5CF54BDEB1D5EA" xlink:type="arc" xbrldt:closed="true" xbrldt:contextElement="segment" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AwardTypeAxis" xlink:label="loc_us-gaap_AwardTypeAxis_368EB854FF72C2387EF1F54BDEB10459" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_38E35B005F8B0334FF5CF54BDEB1D5EA" xlink:to="loc_us-gaap_AwardTypeAxis_368EB854FF72C2387EF1F54BDEB10459" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_C88DD3D92D0A4013BCF3F54BDEB16775_default" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_AwardTypeAxis_368EB854FF72C2387EF1F54BDEB10459" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_C88DD3D92D0A4013BCF3F54BDEB16775_default" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_C88DD3D92D0A4013BCF3F54BDEB16775" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_AwardTypeAxis_368EB854FF72C2387EF1F54BDEB10459" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_C88DD3D92D0A4013BCF3F54BDEB16775" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RestrictedStockMember" xlink:label="loc_us-gaap_RestrictedStockMember_7B8B59D14CA79B08C3C3F54BDEB14798" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_C88DD3D92D0A4013BCF3F54BDEB16775" xlink:to="loc_us-gaap_RestrictedStockMember_7B8B59D14CA79B08C3C3F54BDEB14798" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EmployeeStockOptionMember" xlink:label="loc_us-gaap_EmployeeStockOptionMember_653745BF728821EB994FF54BDEB17D38" xlink:type="locator" />
    <definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_C88DD3D92D0A4013BCF3F54BDEB16775" xlink:to="loc_us-gaap_EmployeeStockOptionMember_653745BF728821EB994FF54BDEB17D38" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeAxis" xlink:label="loc_us-gaap_RangeAxis_0618CB767D1D0809C252F54BDEB1B1A0" xlink:type="locator" />
    <definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_38E35B005F8B0334FF5CF54BDEB1D5EA" xlink:to="loc_us-gaap_RangeAxis_0618CB767D1D0809C252F54BDEB1B1A0" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeMember" xlink:label="loc_us-gaap_RangeMember_1C43E21AC8D955CFA3DDF54BDEB136A4_default" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_RangeAxis_0618CB767D1D0809C252F54BDEB1B1A0" xlink:to="loc_us-gaap_RangeMember_1C43E21AC8D955CFA3DDF54BDEB136A4_default" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeMember" xlink:label="loc_us-gaap_RangeMember_1C43E21AC8D955CFA3DDF54BDEB136A4" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_RangeAxis_0618CB767D1D0809C252F54BDEB1B1A0" xlink:to="loc_us-gaap_RangeMember_1C43E21AC8D955CFA3DDF54BDEB136A4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MaximumMember" xlink:label="loc_us-gaap_MaximumMember_B6D86D89317735F17216F54BDEB20401" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_RangeMember_1C43E21AC8D955CFA3DDF54BDEB136A4" xlink:to="loc_us-gaap_MaximumMember_B6D86D89317735F17216F54BDEB20401" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MinimumMember" xlink:label="loc_us-gaap_MinimumMember_D3B9043343D5D76DDA3AF54BDEB2FB3A" xlink:type="locator" />
    <definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_RangeMember_1C43E21AC8D955CFA3DDF54BDEB136A4" xlink:to="loc_us-gaap_MinimumMember_D3B9043343D5D76DDA3AF54BDEB2FB3A" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AllocatedShareBasedCompensationExpense" xlink:label="loc_us-gaap_AllocatedShareBasedCompensationExpense_C25AA9D66C27546D0D51F54BDEB27116" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_1E9F3B5F8240B1EF5DD2F54BDEB22251" xlink:to="loc_us-gaap_AllocatedShareBasedCompensationExpense_C25AA9D66C27546D0D51F54BDEB27116" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense" xlink:label="loc_us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense_0AB2A7787DC800DDF078F54BDEB2DF77" xlink:type="locator" />
    <definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_1E9F3B5F8240B1EF5DD2F54BDEB22251" xlink:to="loc_us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense_0AB2A7787DC800DDF078F54BDEB2DF77" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax" xlink:label="loc_us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax_ED3FCCF1F246CDADEB5CF54BDEB2EDCE" xlink:type="locator" />
    <definitionArc order="3" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_1E9F3B5F8240B1EF5DD2F54BDEB22251" xlink:to="loc_us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax_ED3FCCF1F246CDADEB5CF54BDEB2EDCE" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod" xlink:label="loc_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod_ED628BF041FA40DE08BBF54BDEB2F7B5" xlink:type="locator" />
    <definitionArc order="4" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_1E9F3B5F8240B1EF5DD2F54BDEB22251" xlink:to="loc_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod_ED628BF041FA40DE08BBF54BDEB2F7B5" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1_CD10D1E266AC58AA2CAEF54BDEB21ACE" xlink:type="locator" />
    <definitionArc order="5" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_1E9F3B5F8240B1EF5DD2F54BDEB22251" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1_CD10D1E266AC58AA2CAEF54BDEB21ACE" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_92D2CA83CC3306BB8736F54BDEB272EE" xlink:type="locator" />
    <definitionArc order="6" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_1E9F3B5F8240B1EF5DD2F54BDEB22251" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_92D2CA83CC3306BB8736F54BDEB272EE" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_81A58146A00054236AF9F54BDEB2061B" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_92D2CA83CC3306BB8736F54BDEB272EE" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_81A58146A00054236AF9F54BDEB2061B" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross_09C448E1AEA559DB1629F54BDEB3CEAA" xlink:type="locator" />
    <definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_92D2CA83CC3306BB8736F54BDEB272EE" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross_09C448E1AEA559DB1629F54BDEB3CEAA" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_SharebasedCompensationArrangementbySharebasedPaymentAwardOptionsAssumedInMerger" xlink:label="loc_asys_SharebasedCompensationArrangementbySharebasedPaymentAwardOptionsAssumedInMerger_0CD6CFB5D1B02CBA7D81F54BDEB34861" xlink:type="locator" />
    <definitionArc order="3" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_92D2CA83CC3306BB8736F54BDEB272EE" xlink:to="loc_asys_SharebasedCompensationArrangementbySharebasedPaymentAwardOptionsAssumedInMerger_0CD6CFB5D1B02CBA7D81F54BDEB34861" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised" xlink:label="loc_us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised_BFFC0686E232A20F4C03F54BDEB315AD" xlink:type="locator" />
    <definitionArc order="4" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_92D2CA83CC3306BB8736F54BDEB272EE" xlink:to="loc_us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised_BFFC0686E232A20F4C03F54BDEB315AD" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresInPeriod" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresInPeriod_3C6A0BF4A35C8F4F7155F54BDEB37007" xlink:type="locator" />
    <definitionArc order="5" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_92D2CA83CC3306BB8736F54BDEB272EE" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresInPeriod_3C6A0BF4A35C8F4F7155F54BDEB37007" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber_403C3F1AF6530052D9BFF54BDEB34F7F" xlink:type="locator" />
    <definitionArc order="7" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_1E9F3B5F8240B1EF5DD2F54BDEB22251" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber_403C3F1AF6530052D9BFF54BDEB34F7F" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageGrantDateFairValue_A4FD78F74B881F375DC3F54BDEB34167" xlink:type="locator" />
    <definitionArc order="8" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_1E9F3B5F8240B1EF5DD2F54BDEB22251" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageGrantDateFairValue_A4FD78F74B881F375DC3F54BDEB34167" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward_BCF414D1BC20C71D8861F54BDEB3EFC8" xlink:type="locator" />
    <definitionArc order="9" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_1E9F3B5F8240B1EF5DD2F54BDEB22251" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward_BCF414D1BC20C71D8861F54BDEB3EFC8" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice_0DA7DC4BFC2C851621C9F54BDEB3DA27" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward_BCF414D1BC20C71D8861F54BDEB3EFC8" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice_0DA7DC4BFC2C851621C9F54BDEB3DA27" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageExercisePrice" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageExercisePrice_1C24B7C5EE2A3B39B04FF54BDEB49883" xlink:type="locator" />
    <definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward_BCF414D1BC20C71D8861F54BDEB3EFC8" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageExercisePrice_1C24B7C5EE2A3B39B04FF54BDEB49883" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_SharebasedCompensationArrangementsbySharebasedPaymentAwardOptionsAssumedWeightedAverageExercisePrice" xlink:label="loc_asys_SharebasedCompensationArrangementsbySharebasedPaymentAwardOptionsAssumedWeightedAverageExercisePrice_EED07C99997CAE50960EF54BDEB4C567" xlink:type="locator" />
    <definitionArc order="3" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward_BCF414D1BC20C71D8861F54BDEB3EFC8" xlink:to="loc_asys_SharebasedCompensationArrangementsbySharebasedPaymentAwardOptionsAssumedWeightedAverageExercisePrice_EED07C99997CAE50960EF54BDEB4C567" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice_9D88F15D1C809A9132A7F54BDEB40C0A" xlink:type="locator" />
    <definitionArc order="4" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward_BCF414D1BC20C71D8861F54BDEB3EFC8" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice_9D88F15D1C809A9132A7F54BDEB40C0A" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsForfeituresInPeriodWeightedAverageExercisePrice" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsForfeituresInPeriodWeightedAverageExercisePrice_6F82CC8C24874FD32486F54BDEB418CE" xlink:type="locator" />
    <definitionArc order="5" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward_BCF414D1BC20C71D8861F54BDEB3EFC8" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsForfeituresInPeriodWeightedAverageExercisePrice_6F82CC8C24874FD32486F54BDEB418CE" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice_1791B83CF7CFB0367C54F54BDEB404C6" xlink:type="locator" />
    <definitionArc order="10" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_1E9F3B5F8240B1EF5DD2F54BDEB22251" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice_1791B83CF7CFB0367C54F54BDEB404C6" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_6CCDC437872D96972D0CF54BDEB4AFD0" xlink:type="locator" />
    <definitionArc order="11" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_1E9F3B5F8240B1EF5DD2F54BDEB22251" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_6CCDC437872D96972D0CF54BDEB4AFD0" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate_708A4FBE1C4E9D6BD834F54BDEB497F4" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_6CCDC437872D96972D0CF54BDEB4AFD0" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate_708A4FBE1C4E9D6BD834F54BDEB497F4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1" xlink:label="loc_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1_2A7DC86B5A9FFF8A6ECBF54BDEB453C0" xlink:type="locator" />
    <definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_6CCDC437872D96972D0CF54BDEB4AFD0" xlink:to="loc_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1_2A7DC86B5A9FFF8A6ECBF54BDEB453C0" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate_AA0F4AB553D6A1591D72F54BDEB49A0A" xlink:type="locator" />
    <definitionArc order="3" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_6CCDC437872D96972D0CF54BDEB4AFD0" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate_AA0F4AB553D6A1591D72F54BDEB49A0A" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate_964D03FDCFB858401B58F54BDEB4048E" xlink:type="locator" />
    <definitionArc order="4" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_6CCDC437872D96972D0CF54BDEB4AFD0" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate_964D03FDCFB858401B58F54BDEB4048E" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_7FB336B8E6946CA4F3ADF54BDEB552CE" xlink:type="locator" />
    <definitionArc order="12" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_1E9F3B5F8240B1EF5DD2F54BDEB22251" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_7FB336B8E6946CA4F3ADF54BDEB552CE" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_688CAF6C235BED7873B3F54BDEB5D548" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_7FB336B8E6946CA4F3ADF54BDEB552CE" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_688CAF6C235BED7873B3F54BDEB5D548" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod_481ED5FD22F996BA4827F54BDEB5B57F" xlink:type="locator" />
    <definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_7FB336B8E6946CA4F3ADF54BDEB552CE" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod_481ED5FD22F996BA4827F54BDEB5B57F" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward_83A75244B95A2A0F984FF54BDEB51E2B" xlink:type="locator" />
    <definitionArc order="13" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_1E9F3B5F8240B1EF5DD2F54BDEB22251" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward_83A75244B95A2A0F984FF54BDEB51E2B" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_5872113694C4B05F23A8F54BDEB5D817" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward_83A75244B95A2A0F984FF54BDEB51E2B" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_5872113694C4B05F23A8F54BDEB5D817" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue_ED84B70499ADD5D8D94FF54BDEB50DA8" xlink:type="locator" />
    <definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward_83A75244B95A2A0F984FF54BDEB51E2B" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue_ED84B70499ADD5D8D94FF54BDEB50DA8" xlink:type="arc" />
  </definitionLink>
  <definitionLink xlink:role="http://www.amtechsystems.com/role/BasisOfPresentationTables" xlink:type="extended" />
  <definitionLink xlink:role="http://www.amtechsystems.com/role/BasisOfPresentationWarrantyDetails" xlink:type="extended">
    <loc xlink:href="asys-20150630.xsd#asys_ScheduleOfProductWarrantyLineItems" xlink:label="loc_asys_ScheduleOfProductWarrantyLineItems_7A711B110056969D3EA2F541EE09481E" xlink:type="locator" />
    <loc xlink:href="asys-20150630.xsd#asys_ScheduleOfWarrantiesTable" xlink:label="loc_asys_ScheduleOfWarrantiesTable_0B1C456289D2D9C012BAF541EE08DDC1" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="loc_asys_ScheduleOfProductWarrantyLineItems_7A711B110056969D3EA2F541EE09481E" xlink:to="loc_asys_ScheduleOfWarrantiesTable_0B1C456289D2D9C012BAF541EE08DDC1" xlink:type="arc" xbrldt:closed="true" xbrldt:contextElement="segment" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeAxis" xlink:label="loc_us-gaap_RangeAxis_DC9C6049E802EFCAB2F4F541EE084A5F" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_asys_ScheduleOfWarrantiesTable_0B1C456289D2D9C012BAF541EE08DDC1" xlink:to="loc_us-gaap_RangeAxis_DC9C6049E802EFCAB2F4F541EE084A5F" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeMember" xlink:label="loc_us-gaap_RangeMember_3F54886D6220B3F37CFEF541EE086FFE_default" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_RangeAxis_DC9C6049E802EFCAB2F4F541EE084A5F" xlink:to="loc_us-gaap_RangeMember_3F54886D6220B3F37CFEF541EE086FFE_default" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeMember" xlink:label="loc_us-gaap_RangeMember_3F54886D6220B3F37CFEF541EE086FFE" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_RangeAxis_DC9C6049E802EFCAB2F4F541EE084A5F" xlink:to="loc_us-gaap_RangeMember_3F54886D6220B3F37CFEF541EE086FFE" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MinimumMember" xlink:label="loc_us-gaap_MinimumMember_1E0583FBCCAB0200AE46F541EE081C30" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_RangeMember_3F54886D6220B3F37CFEF541EE086FFE" xlink:to="loc_us-gaap_MinimumMember_1E0583FBCCAB0200AE46F541EE081C30" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MaximumMember" xlink:label="loc_us-gaap_MaximumMember_E67B4DBC08040DCC5D58F541EE08EDE9" xlink:type="locator" />
    <definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_RangeMember_3F54886D6220B3F37CFEF541EE086FFE" xlink:to="loc_us-gaap_MaximumMember_E67B4DBC08040DCC5D58F541EE08EDE9" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_StandardProductWarrantyPeriod" xlink:label="loc_asys_StandardProductWarrantyPeriod_CCE33C1F535B0A7034CFF541EE098DCE" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_asys_ScheduleOfProductWarrantyLineItems_7A711B110056969D3EA2F541EE09481E" xlink:to="loc_asys_StandardProductWarrantyPeriod_CCE33C1F535B0A7034CFF541EE098DCE" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MovementInStandardProductWarrantyAccrualRollForward" xlink:label="loc_us-gaap_MovementInStandardProductWarrantyAccrualRollForward_5155179D946AE439CBEEF541EE09F9B8" xlink:type="locator" />
    <definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_asys_ScheduleOfProductWarrantyLineItems_7A711B110056969D3EA2F541EE09481E" xlink:to="loc_us-gaap_MovementInStandardProductWarrantyAccrualRollForward_5155179D946AE439CBEEF541EE09F9B8" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProductWarrantyAccrualClassifiedCurrent" xlink:label="loc_us-gaap_ProductWarrantyAccrualClassifiedCurrent_3EBDB12DCAF8958BAEE6F541EE096E05" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_MovementInStandardProductWarrantyAccrualRollForward_5155179D946AE439CBEEF541EE09F9B8" xlink:to="loc_us-gaap_ProductWarrantyAccrualClassifiedCurrent_3EBDB12DCAF8958BAEE6F541EE096E05" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StandardProductWarrantyAccrualPayments" xlink:label="loc_us-gaap_StandardProductWarrantyAccrualPayments_CAD6D645BDDFDD4BDE21F541EE0983AB" xlink:type="locator" />
    <definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_MovementInStandardProductWarrantyAccrualRollForward_5155179D946AE439CBEEF541EE09F9B8" xlink:to="loc_us-gaap_StandardProductWarrantyAccrualPayments_CAD6D645BDDFDD4BDE21F541EE0983AB" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StandardProductWarrantyAccrualPreexistingIncreaseDecrease" xlink:label="loc_us-gaap_StandardProductWarrantyAccrualPreexistingIncreaseDecrease_1B991A774558C66B3CFDF541EE09C47B" xlink:type="locator" />
    <definitionArc order="3" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_MovementInStandardProductWarrantyAccrualRollForward_5155179D946AE439CBEEF541EE09F9B8" xlink:to="loc_us-gaap_StandardProductWarrantyAccrualPreexistingIncreaseDecrease_1B991A774558C66B3CFDF541EE09C47B" xlink:type="arc" />
  </definitionLink>
  <definitionLink xlink:role="http://www.amtechsystems.com/role/BusinessSegmentInformation" xlink:type="extended" />
  <definitionLink xlink:role="http://www.amtechsystems.com/role/BusinessSegmentInformationDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SegmentReportingInformationLineItems" xlink:label="loc_us-gaap_SegmentReportingInformationLineItems_4F91E1AB4F05FEB403AC007D9828AF1C" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:label="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_7D4A761F2CE24C2A32C4007D98265E74" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="loc_us-gaap_SegmentReportingInformationLineItems_4F91E1AB4F05FEB403AC007D9828AF1C" xlink:to="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_7D4A761F2CE24C2A32C4007D98265E74" xlink:type="arc" xbrldt:closed="true" xbrldt:contextElement="segment" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskByTypeAxis" xlink:label="loc_us-gaap_ConcentrationRiskByTypeAxis_737E8990ADFB16D750BA007D9826ABB2" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_7D4A761F2CE24C2A32C4007D98265E74" xlink:to="loc_us-gaap_ConcentrationRiskByTypeAxis_737E8990ADFB16D750BA007D9826ABB2" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskTypeDomain" xlink:label="loc_us-gaap_ConcentrationRiskTypeDomain_0C61DE26CB250AD93F06007D98265E47_default" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_ConcentrationRiskByTypeAxis_737E8990ADFB16D750BA007D9826ABB2" xlink:to="loc_us-gaap_ConcentrationRiskTypeDomain_0C61DE26CB250AD93F06007D98265E47_default" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskTypeDomain" xlink:label="loc_us-gaap_ConcentrationRiskTypeDomain_0C61DE26CB250AD93F06007D98265E47" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_ConcentrationRiskByTypeAxis_737E8990ADFB16D750BA007D9826ABB2" xlink:to="loc_us-gaap_ConcentrationRiskTypeDomain_0C61DE26CB250AD93F06007D98265E47" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProductConcentrationRiskMember" xlink:label="loc_us-gaap_ProductConcentrationRiskMember_1F8F9DDF5E5FD4F22029007D9826745D" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ConcentrationRiskTypeDomain_0C61DE26CB250AD93F06007D98265E47" xlink:to="loc_us-gaap_ProductConcentrationRiskMember_1F8F9DDF5E5FD4F22029007D9826745D" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskByBenchmarkAxis" xlink:label="loc_us-gaap_ConcentrationRiskByBenchmarkAxis_08DEE780BA2A06821955007D98267FEC" xlink:type="locator" />
    <definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_7D4A761F2CE24C2A32C4007D98265E74" xlink:to="loc_us-gaap_ConcentrationRiskByBenchmarkAxis_08DEE780BA2A06821955007D98267FEC" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskBenchmarkDomain" xlink:label="loc_us-gaap_ConcentrationRiskBenchmarkDomain_12BB73F58CDCE6B19582007D9826F941_default" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_ConcentrationRiskByBenchmarkAxis_08DEE780BA2A06821955007D98267FEC" xlink:to="loc_us-gaap_ConcentrationRiskBenchmarkDomain_12BB73F58CDCE6B19582007D9826F941_default" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskBenchmarkDomain" xlink:label="loc_us-gaap_ConcentrationRiskBenchmarkDomain_12BB73F58CDCE6B19582007D9826F941" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_ConcentrationRiskByBenchmarkAxis_08DEE780BA2A06821955007D98267FEC" xlink:to="loc_us-gaap_ConcentrationRiskBenchmarkDomain_12BB73F58CDCE6B19582007D9826F941" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SalesRevenueProductLineMember" xlink:label="loc_us-gaap_SalesRevenueProductLineMember_8CB3E96B7B8299066D1E007D9826D17A" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ConcentrationRiskBenchmarkDomain_12BB73F58CDCE6B19582007D9826F941" xlink:to="loc_us-gaap_SalesRevenueProductLineMember_8CB3E96B7B8299066D1E007D9826D17A" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionAxis" xlink:label="loc_us-gaap_BusinessAcquisitionAxis_0AE2388095BBB154EB9F007D9827D8FF" xlink:type="locator" />
    <definitionArc order="3" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_7D4A761F2CE24C2A32C4007D98265E74" xlink:to="loc_us-gaap_BusinessAcquisitionAxis_0AE2388095BBB154EB9F007D9827D8FF" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionAcquireeDomain" xlink:label="loc_us-gaap_BusinessAcquisitionAcquireeDomain_C5587C1572D07F70A6DF007D9827E3B9_default" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_BusinessAcquisitionAxis_0AE2388095BBB154EB9F007D9827D8FF" xlink:to="loc_us-gaap_BusinessAcquisitionAcquireeDomain_C5587C1572D07F70A6DF007D9827E3B9_default" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionAcquireeDomain" xlink:label="loc_us-gaap_BusinessAcquisitionAcquireeDomain_C5587C1572D07F70A6DF007D9827E3B9" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_BusinessAcquisitionAxis_0AE2388095BBB154EB9F007D9827D8FF" xlink:to="loc_us-gaap_BusinessAcquisitionAcquireeDomain_C5587C1572D07F70A6DF007D9827E3B9" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_SoLayTecB.V.Member" xlink:label="loc_asys_SoLayTecB.V.Member_4F0F56105AF0073CF9EC007D9827493A" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_BusinessAcquisitionAcquireeDomain_C5587C1572D07F70A6DF007D9827E3B9" xlink:to="loc_asys_SoLayTecB.V.Member_4F0F56105AF0073CF9EC007D9827493A" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StatementBusinessSegmentsAxis" xlink:label="loc_us-gaap_StatementBusinessSegmentsAxis_640902BCE6288CF29125007D9827C1EA" xlink:type="locator" />
    <definitionArc order="4" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_7D4A761F2CE24C2A32C4007D98265E74" xlink:to="loc_us-gaap_StatementBusinessSegmentsAxis_640902BCE6288CF29125007D9827C1EA" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SegmentDomain" xlink:label="loc_us-gaap_SegmentDomain_044A5BF5243ED60379D3007D98276940_default" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_StatementBusinessSegmentsAxis_640902BCE6288CF29125007D9827C1EA" xlink:to="loc_us-gaap_SegmentDomain_044A5BF5243ED60379D3007D98276940_default" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SegmentDomain" xlink:label="loc_us-gaap_SegmentDomain_044A5BF5243ED60379D3007D98276940" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_StatementBusinessSegmentsAxis_640902BCE6288CF29125007D9827C1EA" xlink:to="loc_us-gaap_SegmentDomain_044A5BF5243ED60379D3007D98276940" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_SolarEquipmentMember" xlink:label="loc_asys_SolarEquipmentMember_E61910C95EC2B3974F68007D9827A753" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_SegmentDomain_044A5BF5243ED60379D3007D98276940" xlink:to="loc_asys_SolarEquipmentMember_E61910C95EC2B3974F68007D9827A753" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_SemiconductorEquipmentMember" xlink:label="loc_asys_SemiconductorEquipmentMember_63870DCBD7DE79D944C3007D98277B37" xlink:type="locator" />
    <definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_SegmentDomain_044A5BF5243ED60379D3007D98276940" xlink:to="loc_asys_SemiconductorEquipmentMember_63870DCBD7DE79D944C3007D98277B37" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_PolishingSuppliesAndEquipmentMember" xlink:label="loc_asys_PolishingSuppliesAndEquipmentMember_6FECD5B2C665BD6EC9F8007D9828FA96" xlink:type="locator" />
    <definitionArc order="3" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_SegmentDomain_044A5BF5243ED60379D3007D98276940" xlink:to="loc_asys_PolishingSuppliesAndEquipmentMember_6FECD5B2C665BD6EC9F8007D9828FA96" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MaterialReconcilingItemsMember" xlink:label="loc_us-gaap_MaterialReconcilingItemsMember_0928D56BB099C057E81B007D98287631" xlink:type="locator" />
    <definitionArc order="4" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_SegmentDomain_044A5BF5243ED60379D3007D98276940" xlink:to="loc_us-gaap_MaterialReconcilingItemsMember_0928D56BB099C057E81B007D98287631" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NumberOfOperatingSegments" xlink:label="loc_us-gaap_NumberOfOperatingSegments_6EE0E617A7677C0094FD007D9828AC6B" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_SegmentReportingInformationLineItems_4F91E1AB4F05FEB403AC007D9828AF1C" xlink:to="loc_us-gaap_NumberOfOperatingSegments_6EE0E617A7677C0094FD007D9828AC6B" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionPercentageOfVotingInterestsAcquired" xlink:label="loc_us-gaap_BusinessAcquisitionPercentageOfVotingInterestsAcquired_A6990D00F02848B514BF007D9828B50F" xlink:type="locator" />
    <definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_SegmentReportingInformationLineItems_4F91E1AB4F05FEB403AC007D9828AF1C" xlink:to="loc_us-gaap_BusinessAcquisitionPercentageOfVotingInterestsAcquired_A6990D00F02848B514BF007D9828B50F" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SalesRevenueNet" xlink:label="loc_us-gaap_SalesRevenueNet_7D9FB80D9596D563F308007D9828C32B" xlink:type="locator" />
    <definitionArc order="3" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_SegmentReportingInformationLineItems_4F91E1AB4F05FEB403AC007D9828AF1C" xlink:to="loc_us-gaap_SalesRevenueNet_7D9FB80D9596D563F308007D9828C32B" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OperatingIncomeLoss" xlink:label="loc_us-gaap_OperatingIncomeLoss_2B48235601231C0BEAFA007D98293942" xlink:type="locator" />
    <definitionArc order="4" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_SegmentReportingInformationLineItems_4F91E1AB4F05FEB403AC007D9828AF1C" xlink:to="loc_us-gaap_OperatingIncomeLoss_2B48235601231C0BEAFA007D98293942" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskPercentage1" xlink:label="loc_us-gaap_ConcentrationRiskPercentage1_FA6A71BD812622D4E61F007D9829B1AE" xlink:type="locator" />
    <definitionArc order="5" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_SegmentReportingInformationLineItems_4F91E1AB4F05FEB403AC007D9828AF1C" xlink:to="loc_us-gaap_ConcentrationRiskPercentage1_FA6A71BD812622D4E61F007D9829B1AE" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_Assets" xlink:label="loc_us-gaap_Assets_9987946FF07C6AAD6A61007D982915E6" xlink:type="locator" />
    <definitionArc order="6" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_SegmentReportingInformationLineItems_4F91E1AB4F05FEB403AC007D9828AF1C" xlink:to="loc_us-gaap_Assets_9987946FF07C6AAD6A61007D982915E6" xlink:type="arc" />
  </definitionLink>
  <definitionLink xlink:role="http://www.amtechsystems.com/role/BusinessSegmentInformationTables" xlink:type="extended" />
  <definitionLink xlink:role="http://www.amtechsystems.com/role/CommitmentsAndContingencies" xlink:type="extended" />
  <definitionLink xlink:role="http://www.amtechsystems.com/role/CommitmentsAndContingenciesDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfEquityMethodInvestmentsLineItems" xlink:label="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_5A3C07E9C1B9C0BBD6B7F54BDE594D9A" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfEquityMethodInvestmentsTable" xlink:label="loc_us-gaap_ScheduleOfEquityMethodInvestmentsTable_1CD146379F1956B088E2F54BDE582272" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_5A3C07E9C1B9C0BBD6B7F54BDE594D9A" xlink:to="loc_us-gaap_ScheduleOfEquityMethodInvestmentsTable_1CD146379F1956B088E2F54BDE582272" xlink:type="arc" xbrldt:closed="true" xbrldt:contextElement="segment" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LossContingenciesByNatureOfContingencyAxis" xlink:label="loc_us-gaap_LossContingenciesByNatureOfContingencyAxis_069EE4AE807BF36A4A3BF54BDE58AD51" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsTable_1CD146379F1956B088E2F54BDE582272" xlink:to="loc_us-gaap_LossContingenciesByNatureOfContingencyAxis_069EE4AE807BF36A4A3BF54BDE58AD51" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LossContingencyNatureDomain" xlink:label="loc_us-gaap_LossContingencyNatureDomain_4E7929F01E141D7E9F67F54BDE5839A2_default" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_LossContingenciesByNatureOfContingencyAxis_069EE4AE807BF36A4A3BF54BDE58AD51" xlink:to="loc_us-gaap_LossContingencyNatureDomain_4E7929F01E141D7E9F67F54BDE5839A2_default" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LossContingencyNatureDomain" xlink:label="loc_us-gaap_LossContingencyNatureDomain_4E7929F01E141D7E9F67F54BDE5839A2" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_LossContingenciesByNatureOfContingencyAxis_069EE4AE807BF36A4A3BF54BDE58AD51" xlink:to="loc_us-gaap_LossContingencyNatureDomain_4E7929F01E141D7E9F67F54BDE5839A2" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LossFromCatastrophesMember" xlink:label="loc_us-gaap_LossFromCatastrophesMember_3792D557782A4B8FB8FFF54BDE58DD72" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_LossContingencyNatureDomain_4E7929F01E141D7E9F67F54BDE5839A2" xlink:to="loc_us-gaap_LossFromCatastrophesMember_3792D557782A4B8FB8FFF54BDE58DD72" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionAxis" xlink:label="loc_us-gaap_BusinessAcquisitionAxis_C87D7F88AD1F7E611143F54BDE589075" xlink:type="locator" />
    <definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsTable_1CD146379F1956B088E2F54BDE582272" xlink:to="loc_us-gaap_BusinessAcquisitionAxis_C87D7F88AD1F7E611143F54BDE589075" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionAcquireeDomain" xlink:label="loc_us-gaap_BusinessAcquisitionAcquireeDomain_070858EBF37F344C1496F54BDE59F300_default" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_BusinessAcquisitionAxis_C87D7F88AD1F7E611143F54BDE589075" xlink:to="loc_us-gaap_BusinessAcquisitionAcquireeDomain_070858EBF37F344C1496F54BDE59F300_default" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionAcquireeDomain" xlink:label="loc_us-gaap_BusinessAcquisitionAcquireeDomain_070858EBF37F344C1496F54BDE59F300" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_BusinessAcquisitionAxis_C87D7F88AD1F7E611143F54BDE589075" xlink:to="loc_us-gaap_BusinessAcquisitionAcquireeDomain_070858EBF37F344C1496F54BDE59F300" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_BTUInternationalIncBTUMergerMember" xlink:label="loc_asys_BTUInternationalIncBTUMergerMember_44402E4AFCC5BF5167E9F54BDE595662" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_BusinessAcquisitionAcquireeDomain_070858EBF37F344C1496F54BDE59F300" xlink:to="loc_asys_BTUInternationalIncBTUMergerMember_44402E4AFCC5BF5167E9F54BDE595662" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis" xlink:label="loc_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis_4691D4434F9E72FFE514F54BDE59D2A2" xlink:type="locator" />
    <definitionArc order="3" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsTable_1CD146379F1956B088E2F54BDE582272" xlink:to="loc_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis_4691D4434F9E72FFE514F54BDE59D2A2" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersTypeDomain" xlink:label="loc_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersTypeDomain_E0458096E3B3DEB49505F54BDE59CAB5_default" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis_4691D4434F9E72FFE514F54BDE59D2A2" xlink:to="loc_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersTypeDomain_E0458096E3B3DEB49505F54BDE59CAB5_default" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersTypeDomain" xlink:label="loc_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersTypeDomain_E0458096E3B3DEB49505F54BDE59CAB5" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis_4691D4434F9E72FFE514F54BDE59D2A2" xlink:to="loc_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersTypeDomain_E0458096E3B3DEB49505F54BDE59CAB5" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_TempressSystemsandEnergyResearchCentreAgreementMember" xlink:label="loc_asys_TempressSystemsandEnergyResearchCentreAgreementMember_99AD34B231149657B214F54BDE599097" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersTypeDomain_E0458096E3B3DEB49505F54BDE59CAB5" xlink:to="loc_asys_TempressSystemsandEnergyResearchCentreAgreementMember_99AD34B231149657B214F54BDE599097" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis" xlink:label="loc_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_B62E1573481F960BB788F54BDE597505" xlink:type="locator" />
    <definitionArc order="4" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsTable_1CD146379F1956B088E2F54BDE582272" xlink:to="loc_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_B62E1573481F960BB788F54BDE597505" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EquityMethodInvesteeNameDomain" xlink:label="loc_us-gaap_EquityMethodInvesteeNameDomain_3D9C1F9A29FCD15B60D6F54BDE5946FC_default" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_B62E1573481F960BB788F54BDE597505" xlink:to="loc_us-gaap_EquityMethodInvesteeNameDomain_3D9C1F9A29FCD15B60D6F54BDE5946FC_default" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EquityMethodInvesteeNameDomain" xlink:label="loc_us-gaap_EquityMethodInvesteeNameDomain_3D9C1F9A29FCD15B60D6F54BDE5946FC" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_B62E1573481F960BB788F54BDE597505" xlink:to="loc_us-gaap_EquityMethodInvesteeNameDomain_3D9C1F9A29FCD15B60D6F54BDE5946FC" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_KingstoneHoldingCompanyMember" xlink:label="loc_asys_KingstoneHoldingCompanyMember_AAA943B4E3F0D80C5D79F54BDE59523B" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_EquityMethodInvesteeNameDomain_3D9C1F9A29FCD15B60D6F54BDE5946FC" xlink:to="loc_asys_KingstoneHoldingCompanyMember_AAA943B4E3F0D80C5D79F54BDE59523B" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_KingstoneSemiconductorCompanyLtdMember" xlink:label="loc_asys_KingstoneSemiconductorCompanyLtdMember_F74C1D7D6F4613E2A7C2F54BDE591208" xlink:type="locator" />
    <definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_EquityMethodInvesteeNameDomain_3D9C1F9A29FCD15B60D6F54BDE5946FC" xlink:to="loc_asys_KingstoneSemiconductorCompanyLtdMember_F74C1D7D6F4613E2A7C2F54BDE591208" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PurchaseObligation" xlink:label="loc_us-gaap_PurchaseObligation_09A04647E8C8A2D414DBF54BDE595979" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_5A3C07E9C1B9C0BBD6B7F54BDE594D9A" xlink:to="loc_us-gaap_PurchaseObligation_09A04647E8C8A2D414DBF54BDE595979" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PaymentsToAcquirePropertyPlantAndEquipment" xlink:label="loc_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_2017E76A1F83D7610831F54BDE5A2931" xlink:type="locator" />
    <definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_5A3C07E9C1B9C0BBD6B7F54BDE594D9A" xlink:to="loc_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_2017E76A1F83D7610831F54BDE5A2931" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_OwnershipRightsResultsofProjectsDevelopedSeparatelyByIndividualParties" xlink:label="loc_asys_OwnershipRightsResultsofProjectsDevelopedSeparatelyByIndividualParties_E70074D9A7A248D753B4F54BDE5A47E2" xlink:type="locator" />
    <definitionArc order="3" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_5A3C07E9C1B9C0BBD6B7F54BDE594D9A" xlink:to="loc_asys_OwnershipRightsResultsofProjectsDevelopedSeparatelyByIndividualParties_E70074D9A7A248D753B4F54BDE5A47E2" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_ResearchandDevelopmentAgreementTerm" xlink:label="loc_asys_ResearchandDevelopmentAgreementTerm_16B6697E9533893EC2DBF54BDE5A1083" xlink:type="locator" />
    <definitionArc order="4" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_5A3C07E9C1B9C0BBD6B7F54BDE594D9A" xlink:to="loc_asys_ResearchandDevelopmentAgreementTerm_16B6697E9533893EC2DBF54BDE5A1083" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_ResearchandDevelopmentRequiredContributionLaborandAssets" xlink:label="loc_asys_ResearchandDevelopmentRequiredContributionLaborandAssets_19D2D663EF74ABBFCB76F54BDE5AA5B3" xlink:type="locator" />
    <definitionArc order="5" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_5A3C07E9C1B9C0BBD6B7F54BDE594D9A" xlink:to="loc_asys_ResearchandDevelopmentRequiredContributionLaborandAssets_19D2D663EF74ABBFCB76F54BDE5AA5B3" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_ResearchandDevelopmentPeriodRequiredforEquipmentRepairsandMaintenance" xlink:label="loc_asys_ResearchandDevelopmentPeriodRequiredforEquipmentRepairsandMaintenance_BA0B6DA3526C4D27E571F54BDE5A1E43" xlink:type="locator" />
    <definitionArc order="6" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_5A3C07E9C1B9C0BBD6B7F54BDE594D9A" xlink:to="loc_asys_ResearchandDevelopmentPeriodRequiredforEquipmentRepairsandMaintenance_BA0B6DA3526C4D27E571F54BDE5A1E43" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RevenueFromGrants" xlink:label="loc_us-gaap_RevenueFromGrants_CC163DFEB8FBC15FBDC9F54BDE5A7CDA" xlink:type="locator" />
    <definitionArc order="7" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_5A3C07E9C1B9C0BBD6B7F54BDE594D9A" xlink:to="loc_us-gaap_RevenueFromGrants_CC163DFEB8FBC15FBDC9F54BDE5A7CDA" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_GrantRevenueCommitmenttoProject" xlink:label="loc_asys_GrantRevenueCommitmenttoProject_36B9D3056832A3B56A79F54BDE5A5E3A" xlink:type="locator" />
    <definitionArc order="8" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_5A3C07E9C1B9C0BBD6B7F54BDE594D9A" xlink:to="loc_asys_GrantRevenueCommitmenttoProject_36B9D3056832A3B56A79F54BDE5A5E3A" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EquityMethodInvestmentOwnershipPercentage" xlink:label="loc_us-gaap_EquityMethodInvestmentOwnershipPercentage_4D3DC957697117992F91F54BDE5A32DE" xlink:type="locator" />
    <definitionArc order="9" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_5A3C07E9C1B9C0BBD6B7F54BDE594D9A" xlink:to="loc_us-gaap_EquityMethodInvestmentOwnershipPercentage_4D3DC957697117992F91F54BDE5A32DE" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_PercentageofVotingInterestofAcquireeOwnedSubsidiary" xlink:label="loc_asys_PercentageofVotingInterestofAcquireeOwnedSubsidiary_A4EC31DD60D2C2B81009F54BDE5A3306" xlink:type="locator" />
    <definitionArc order="10" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_5A3C07E9C1B9C0BBD6B7F54BDE594D9A" xlink:to="loc_asys_PercentageofVotingInterestofAcquireeOwnedSubsidiary_A4EC31DD60D2C2B81009F54BDE5A3306" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LossContingencyAccrualAtCarryingValue" xlink:label="loc_us-gaap_LossContingencyAccrualAtCarryingValue_384AABB82F230797F9F4F54BDE5A7A8D" xlink:type="locator" />
    <definitionArc order="11" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_5A3C07E9C1B9C0BBD6B7F54BDE594D9A" xlink:to="loc_us-gaap_LossContingencyAccrualAtCarryingValue_384AABB82F230797F9F4F54BDE5A7A8D" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LettersOfCreditOutstandingAmount" xlink:label="loc_us-gaap_LettersOfCreditOutstandingAmount_260B67A92F4D79147715F54BDE5AC605" xlink:type="locator" />
    <definitionArc order="12" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_5A3C07E9C1B9C0BBD6B7F54BDE594D9A" xlink:to="loc_us-gaap_LettersOfCreditOutstandingAmount_260B67A92F4D79147715F54BDE5AC605" xlink:type="arc" />
  </definitionLink>
  <definitionLink xlink:role="http://www.amtechsystems.com/role/CondensedConsolidatedBalanceSheets" xlink:type="extended" />
  <definitionLink xlink:role="http://www.amtechsystems.com/role/CondensedConsolidatedBalanceSheetsParenthetical" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StatementLineItems" xlink:label="loc_us-gaap_StatementLineItems_60783097CD9F043C800CF541ED76827A" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StatementTable" xlink:label="loc_us-gaap_StatementTable_BF8D028C2AFBD014FA1BF541ED75229A" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="loc_us-gaap_StatementLineItems_60783097CD9F043C800CF541ED76827A" xlink:to="loc_us-gaap_StatementTable_BF8D028C2AFBD014FA1BF541ED75229A" xlink:type="arc" xbrldt:closed="true" xbrldt:contextElement="segment" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StatementScenarioAxis" xlink:label="loc_us-gaap_StatementScenarioAxis_EB020A4304967B4C103DF541ED76FB72" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_StatementTable_BF8D028C2AFBD014FA1BF541ED75229A" xlink:to="loc_us-gaap_StatementScenarioAxis_EB020A4304967B4C103DF541ED76FB72" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScenarioUnspecifiedDomain" xlink:label="loc_us-gaap_ScenarioUnspecifiedDomain_75AE1F36F069E776EE2FF541ED76C6A7_default" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_StatementScenarioAxis_EB020A4304967B4C103DF541ED76FB72" xlink:to="loc_us-gaap_ScenarioUnspecifiedDomain_75AE1F36F069E776EE2FF541ED76C6A7_default" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScenarioUnspecifiedDomain" xlink:label="loc_us-gaap_ScenarioUnspecifiedDomain_75AE1F36F069E776EE2FF541ED76C6A7" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_StatementScenarioAxis_EB020A4304967B4C103DF541ED76FB72" xlink:to="loc_us-gaap_ScenarioUnspecifiedDomain_75AE1F36F069E776EE2FF541ED76C6A7" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AssetsCurrentAbstract" xlink:label="loc_us-gaap_AssetsCurrentAbstract_D946321B257CB8E2F189F541ED76E67A" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_StatementLineItems_60783097CD9F043C800CF541ED76827A" xlink:to="loc_us-gaap_AssetsCurrentAbstract_D946321B257CB8E2F189F541ED76E67A" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent" xlink:label="loc_us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent_A648D73F223A569E959AF541ED76D470" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_AssetsCurrentAbstract_D946321B257CB8E2F189F541ED76E67A" xlink:to="loc_us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent_A648D73F223A569E959AF541ED76D470" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract" xlink:label="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_804CB866243C1E9EA749F541ED76C36D" xlink:type="locator" />
    <definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_StatementLineItems_60783097CD9F043C800CF541ED76827A" xlink:to="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_804CB866243C1E9EA749F541ED76C36D" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CommonStockParOrStatedValuePerShare" xlink:label="loc_us-gaap_CommonStockParOrStatedValuePerShare_8FB520BBA1DB9ADDFFD2F541ED763CAA" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_804CB866243C1E9EA749F541ED76C36D" xlink:to="loc_us-gaap_CommonStockParOrStatedValuePerShare_8FB520BBA1DB9ADDFFD2F541ED763CAA" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CommonStockSharesAuthorized" xlink:label="loc_us-gaap_CommonStockSharesAuthorized_0518041475723A0E7FE0F541ED76B421" xlink:type="locator" />
    <definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_804CB866243C1E9EA749F541ED76C36D" xlink:to="loc_us-gaap_CommonStockSharesAuthorized_0518041475723A0E7FE0F541ED76B421" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CommonStockSharesIssued" xlink:label="loc_us-gaap_CommonStockSharesIssued_8604DA240E76DA9C1D0DF541ED76062F" xlink:type="locator" />
    <definitionArc order="3" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_804CB866243C1E9EA749F541ED76C36D" xlink:to="loc_us-gaap_CommonStockSharesIssued_8604DA240E76DA9C1D0DF541ED76062F" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CommonStockSharesOutstanding" xlink:label="loc_us-gaap_CommonStockSharesOutstanding_A017E0773AA245594654F541ED7786C7" xlink:type="locator" />
    <definitionArc order="4" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_804CB866243C1E9EA749F541ED76C36D" xlink:to="loc_us-gaap_CommonStockSharesOutstanding_A017E0773AA245594654F541ED7786C7" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PreferredStockSharesAuthorized" xlink:label="loc_us-gaap_PreferredStockSharesAuthorized_637399D1010BDDAB86EEF541ED77C621" xlink:type="locator" />
    <definitionArc order="5" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_804CB866243C1E9EA749F541ED76C36D" xlink:to="loc_us-gaap_PreferredStockSharesAuthorized_637399D1010BDDAB86EEF541ED77C621" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PreferredStockSharesIssued" xlink:label="loc_us-gaap_PreferredStockSharesIssued_F5F58B34D18ABD7BFFF6F541ED779B86" xlink:type="locator" />
    <definitionArc order="6" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_804CB866243C1E9EA749F541ED76C36D" xlink:to="loc_us-gaap_PreferredStockSharesIssued_F5F58B34D18ABD7BFFF6F541ED779B86" xlink:type="arc" />
  </definitionLink>
  <definitionLink xlink:role="http://www.amtechsystems.com/role/CondensedConsolidatedStatementsOfCashFlowsUnaudited" xlink:type="extended" />
  <definitionLink xlink:role="http://www.amtechsystems.com/role/CondensedConsolidatedStatementsOfComprehensiveIncomeLossUnaudited" xlink:type="extended" />
  <definitionLink xlink:role="http://www.amtechsystems.com/role/CondensedConsolidatedStatementsOfOperationsUnaudited" xlink:type="extended" />
  <definitionLink xlink:role="http://www.amtechsystems.com/role/DocumentAndEntityInformation" xlink:type="extended" />
  <definitionLink xlink:role="http://www.amtechsystems.com/role/EarningsPerShare" xlink:type="extended" />
  <definitionLink xlink:role="http://www.amtechsystems.com/role/EarningsPerShareDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems" xlink:label="loc_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems_746D48DA5F74E40E4878F54BDE963954" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfAntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareTable" xlink:label="loc_us-gaap_ScheduleOfAntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareTable_E69AF24EE9E44D95E3EEF54BDE959CE5" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="loc_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems_746D48DA5F74E40E4878F54BDE963954" xlink:to="loc_us-gaap_ScheduleOfAntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareTable_E69AF24EE9E44D95E3EEF54BDE959CE5" xlink:type="arc" xbrldt:closed="true" xbrldt:contextElement="segment" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis" xlink:label="loc_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_BC005BD42388AAC654BFF54BDE952EA7" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ScheduleOfAntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareTable_E69AF24EE9E44D95E3EEF54BDE959CE5" xlink:to="loc_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_BC005BD42388AAC654BFF54BDE952EA7" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AntidilutiveSecuritiesNameDomain" xlink:label="loc_us-gaap_AntidilutiveSecuritiesNameDomain_E03ACF0A96E645270E41F54BDE963087_default" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_BC005BD42388AAC654BFF54BDE952EA7" xlink:to="loc_us-gaap_AntidilutiveSecuritiesNameDomain_E03ACF0A96E645270E41F54BDE963087_default" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AntidilutiveSecuritiesNameDomain" xlink:label="loc_us-gaap_AntidilutiveSecuritiesNameDomain_E03ACF0A96E645270E41F54BDE963087" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_BC005BD42388AAC654BFF54BDE952EA7" xlink:to="loc_us-gaap_AntidilutiveSecuritiesNameDomain_E03ACF0A96E645270E41F54BDE963087" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EmployeeStockOptionMember" xlink:label="loc_us-gaap_EmployeeStockOptionMember_6130A33AB67FFCA847E4F54BDE96B651" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_AntidilutiveSecuritiesNameDomain_E03ACF0A96E645270E41F54BDE963087" xlink:to="loc_us-gaap_EmployeeStockOptionMember_6130A33AB67FFCA847E4F54BDE96B651" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RestrictedStockMember" xlink:label="loc_us-gaap_RestrictedStockMember_0C77E7E4E3BC39E5B5EFF54BDE964AB5" xlink:type="locator" />
    <definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_AntidilutiveSecuritiesNameDomain_E03ACF0A96E645270E41F54BDE963087" xlink:to="loc_us-gaap_RestrictedStockMember_0C77E7E4E3BC39E5B5EFF54BDE964AB5" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount" xlink:label="loc_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount_C246AF85079AC82EDDD5F54BDE96660C" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems_746D48DA5F74E40E4878F54BDE963954" xlink:to="loc_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount_C246AF85079AC82EDDD5F54BDE96660C" xlink:type="arc" />
  </definitionLink>
  <definitionLink xlink:role="http://www.amtechsystems.com/role/EarningsPerShareTables" xlink:type="extended" />
  <definitionLink xlink:role="http://www.amtechsystems.com/role/IncomeTaxes" xlink:type="extended" />
  <definitionLink xlink:role="http://www.amtechsystems.com/role/IncomeTaxesDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncomeTaxContingencyLineItems" xlink:label="loc_us-gaap_IncomeTaxContingencyLineItems_CEC58CBF507EFED22C4EF54BDE9FB482" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncomeTaxContingencyTable" xlink:label="loc_us-gaap_IncomeTaxContingencyTable_00B66C876DABB0C89BDAF54BDE9E29FD" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="loc_us-gaap_IncomeTaxContingencyLineItems_CEC58CBF507EFED22C4EF54BDE9FB482" xlink:to="loc_us-gaap_IncomeTaxContingencyTable_00B66C876DABB0C89BDAF54BDE9E29FD" xlink:type="arc" xbrldt:closed="true" xbrldt:contextElement="segment" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeAxis" xlink:label="loc_us-gaap_RangeAxis_8630B0D638E75DA33261F54BDE9EE327" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_IncomeTaxContingencyTable_00B66C876DABB0C89BDAF54BDE9E29FD" xlink:to="loc_us-gaap_RangeAxis_8630B0D638E75DA33261F54BDE9EE327" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeMember" xlink:label="loc_us-gaap_RangeMember_09110E18C73AFFC51321F54BDE9F27C2_default" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_RangeAxis_8630B0D638E75DA33261F54BDE9EE327" xlink:to="loc_us-gaap_RangeMember_09110E18C73AFFC51321F54BDE9F27C2_default" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeMember" xlink:label="loc_us-gaap_RangeMember_09110E18C73AFFC51321F54BDE9F27C2" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_RangeAxis_8630B0D638E75DA33261F54BDE9EE327" xlink:to="loc_us-gaap_RangeMember_09110E18C73AFFC51321F54BDE9F27C2" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MinimumMember" xlink:label="loc_us-gaap_MinimumMember_7D7019A8F29238243FBBF54BDE9F023D" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_RangeMember_09110E18C73AFFC51321F54BDE9F27C2" xlink:to="loc_us-gaap_MinimumMember_7D7019A8F29238243FBBF54BDE9F023D" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MaximumMember" xlink:label="loc_us-gaap_MaximumMember_9266EF56940933EFF7AAF54BDE9F10DC" xlink:type="locator" />
    <definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_RangeMember_09110E18C73AFFC51321F54BDE9F27C2" xlink:to="loc_us-gaap_MaximumMember_9266EF56940933EFF7AAF54BDE9F10DC" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount" xlink:label="loc_us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount_7FBC949FFBCA836E7A00F55368563AB0" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_IncomeTaxContingencyLineItems_CEC58CBF507EFED22C4EF54BDE9FB482" xlink:to="loc_us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount_7FBC949FFBCA836E7A00F55368563AB0" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate" xlink:label="loc_us-gaap_UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate_2FD1905B71D0F1C413FDF54BDE9FAAFB" xlink:type="locator" />
    <definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_IncomeTaxContingencyLineItems_CEC58CBF507EFED22C4EF54BDE9FB482" xlink:to="loc_us-gaap_UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate_2FD1905B71D0F1C413FDF54BDE9FAAFB" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued" xlink:label="loc_us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued_EE359A8640896175930CF54BDE9FA8A8" xlink:type="locator" />
    <definitionArc order="3" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_IncomeTaxContingencyLineItems_CEC58CBF507EFED22C4EF54BDE9FB482" xlink:to="loc_us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued_EE359A8640896175930CF54BDE9FA8A8" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_IncomeTaxExaminationNumberofYearsGenerallyOpenForTaxExaminations" xlink:label="loc_asys_IncomeTaxExaminationNumberofYearsGenerallyOpenForTaxExaminations_4AE411B8BFBDFA4A9F4DF54BDE9FD0B4" xlink:type="locator" />
    <definitionArc order="4" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_IncomeTaxContingencyLineItems_CEC58CBF507EFED22C4EF54BDE9FB482" xlink:to="loc_asys_IncomeTaxExaminationNumberofYearsGenerallyOpenForTaxExaminations_4AE411B8BFBDFA4A9F4DF54BDE9FD0B4" xlink:type="arc" />
  </definitionLink>
  <definitionLink xlink:role="http://www.amtechsystems.com/role/LongTermDebt" xlink:type="extended" />
  <definitionLink xlink:role="http://www.amtechsystems.com/role/LongTermDebtDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DebtInstrumentLineItems" xlink:label="loc_us-gaap_DebtInstrumentLineItems_1F767833667823579DC4F541ED0B207C" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DebtInstrumentTable" xlink:label="loc_us-gaap_DebtInstrumentTable_E3EBFD2E3662D315CE86F541ED0A2CFB" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="loc_us-gaap_DebtInstrumentLineItems_1F767833667823579DC4F541ED0B207C" xlink:to="loc_us-gaap_DebtInstrumentTable_E3EBFD2E3662D315CE86F541ED0A2CFB" xlink:type="arc" xbrldt:closed="true" xbrldt:contextElement="segment" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionAxis" xlink:label="loc_us-gaap_BusinessAcquisitionAxis_92E240E4B4A726873E20F541ED0AF637" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_DebtInstrumentTable_E3EBFD2E3662D315CE86F541ED0A2CFB" xlink:to="loc_us-gaap_BusinessAcquisitionAxis_92E240E4B4A726873E20F541ED0AF637" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionAcquireeDomain" xlink:label="loc_us-gaap_BusinessAcquisitionAcquireeDomain_E77E018988D13E6BCC98F541ED0ABD60_default" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_BusinessAcquisitionAxis_92E240E4B4A726873E20F541ED0AF637" xlink:to="loc_us-gaap_BusinessAcquisitionAcquireeDomain_E77E018988D13E6BCC98F541ED0ABD60_default" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionAcquireeDomain" xlink:label="loc_us-gaap_BusinessAcquisitionAcquireeDomain_E77E018988D13E6BCC98F541ED0ABD60" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_BusinessAcquisitionAxis_92E240E4B4A726873E20F541ED0AF637" xlink:to="loc_us-gaap_BusinessAcquisitionAcquireeDomain_E77E018988D13E6BCC98F541ED0ABD60" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_BTUInternationalIncBTUMergerMember" xlink:label="loc_asys_BTUInternationalIncBTUMergerMember_AAA970A0F540DEDD182AF541ED0A0D06" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_BusinessAcquisitionAcquireeDomain_E77E018988D13E6BCC98F541ED0ABD60" xlink:to="loc_asys_BTUInternationalIncBTUMergerMember_AAA970A0F540DEDD182AF541ED0A0D06" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_SoLayTecB.V.Member" xlink:label="loc_asys_SoLayTecB.V.Member_F4E7A086F905D060C6D9F541ED0A823C" xlink:type="locator" />
    <definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_BusinessAcquisitionAcquireeDomain_E77E018988D13E6BCC98F541ED0ABD60" xlink:to="loc_asys_SoLayTecB.V.Member_F4E7A086F905D060C6D9F541ED0A823C" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeAxis" xlink:label="loc_us-gaap_RangeAxis_472919814F0BB3C9B284F541ED0A9FE9" xlink:type="locator" />
    <definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_DebtInstrumentTable_E3EBFD2E3662D315CE86F541ED0A2CFB" xlink:to="loc_us-gaap_RangeAxis_472919814F0BB3C9B284F541ED0A9FE9" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeMember" xlink:label="loc_us-gaap_RangeMember_ABEFD14260A64900A5D8F541ED0AC389_default" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_RangeAxis_472919814F0BB3C9B284F541ED0A9FE9" xlink:to="loc_us-gaap_RangeMember_ABEFD14260A64900A5D8F541ED0AC389_default" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeMember" xlink:label="loc_us-gaap_RangeMember_ABEFD14260A64900A5D8F541ED0AC389" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_RangeAxis_472919814F0BB3C9B284F541ED0A9FE9" xlink:to="loc_us-gaap_RangeMember_ABEFD14260A64900A5D8F541ED0AC389" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MinimumMember" xlink:label="loc_us-gaap_MinimumMember_F9FDC320046F03B5CFE6F541ED0B379F" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_RangeMember_ABEFD14260A64900A5D8F541ED0AC389" xlink:to="loc_us-gaap_MinimumMember_F9FDC320046F03B5CFE6F541ED0B379F" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MaximumMember" xlink:label="loc_us-gaap_MaximumMember_94FCA5BA6B6DB17B994DF541ED0BE81C" xlink:type="locator" />
    <definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_RangeMember_ABEFD14260A64900A5D8F541ED0AC389" xlink:to="loc_us-gaap_MaximumMember_94FCA5BA6B6DB17B994DF541ED0BE81C" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNoncurrentLiabilitiesLongTermDebt" xlink:label="loc_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNoncurrentLiabilitiesLongTermDebt_9192F33D69B37B2A68D7F541ED0B0592" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_DebtInstrumentLineItems_1F767833667823579DC4F541ED0B207C" xlink:to="loc_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNoncurrentLiabilitiesLongTermDebt_9192F33D69B37B2A68D7F541ED0B0592" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LongTermDebt" xlink:label="loc_us-gaap_LongTermDebt_471D4AC31E38710C2D0DF541ED0B229B" xlink:type="locator" />
    <definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_DebtInstrumentLineItems_1F767833667823579DC4F541ED0B207C" xlink:to="loc_us-gaap_LongTermDebt_471D4AC31E38710C2D0DF541ED0B229B" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DebtInstrumentInterestRateStatedPercentage" xlink:label="loc_us-gaap_DebtInstrumentInterestRateStatedPercentage_113E72FE1260AD2F3EC7F541ED0B0BAD" xlink:type="locator" />
    <definitionArc order="3" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_DebtInstrumentLineItems_1F767833667823579DC4F541ED0B207C" xlink:to="loc_us-gaap_DebtInstrumentInterestRateStatedPercentage_113E72FE1260AD2F3EC7F541ED0B0BAD" xlink:type="arc" />
  </definitionLink>
  <definitionLink xlink:role="http://www.amtechsystems.com/role/MajorCustomersAndForeignSales" xlink:type="extended" />
  <definitionLink xlink:role="http://www.amtechsystems.com/role/MajorCustomersAndForeignSalesDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EntityWideRevenueMajorCustomerLineItems" xlink:label="loc_us-gaap_EntityWideRevenueMajorCustomerLineItems_1AE2D7A7EA0083709F9CF54BDE71895B" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:label="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_14AB974B48CF22DB05CBF54BDE6FF513" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="loc_us-gaap_EntityWideRevenueMajorCustomerLineItems_1AE2D7A7EA0083709F9CF54BDE71895B" xlink:to="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_14AB974B48CF22DB05CBF54BDE6FF513" xlink:type="arc" xbrldt:closed="true" xbrldt:contextElement="segment" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskByBenchmarkAxis" xlink:label="loc_us-gaap_ConcentrationRiskByBenchmarkAxis_8F8B0BB50D5AB1309D23F561482BDECE" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_14AB974B48CF22DB05CBF54BDE6FF513" xlink:to="loc_us-gaap_ConcentrationRiskByBenchmarkAxis_8F8B0BB50D5AB1309D23F561482BDECE" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskBenchmarkDomain" xlink:label="loc_us-gaap_ConcentrationRiskBenchmarkDomain_598DBD50078A4710A5F1F56148374F1B_default" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_ConcentrationRiskByBenchmarkAxis_8F8B0BB50D5AB1309D23F561482BDECE" xlink:to="loc_us-gaap_ConcentrationRiskBenchmarkDomain_598DBD50078A4710A5F1F56148374F1B_default" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskBenchmarkDomain" xlink:label="loc_us-gaap_ConcentrationRiskBenchmarkDomain_598DBD50078A4710A5F1F56148374F1B" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_ConcentrationRiskByBenchmarkAxis_8F8B0BB50D5AB1309D23F561482BDECE" xlink:to="loc_us-gaap_ConcentrationRiskBenchmarkDomain_598DBD50078A4710A5F1F56148374F1B" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SalesRevenueNetMember" xlink:label="loc_us-gaap_SalesRevenueNetMember_A20CAFF824BA2BDEF7FEF561BB8B84BF" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ConcentrationRiskBenchmarkDomain_598DBD50078A4710A5F1F56148374F1B" xlink:to="loc_us-gaap_SalesRevenueNetMember_A20CAFF824BA2BDEF7FEF561BB8B84BF" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskByTypeAxis" xlink:label="loc_us-gaap_ConcentrationRiskByTypeAxis_3147E4CC1C9537F871D8F5612DA4567D" xlink:type="locator" />
    <definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_14AB974B48CF22DB05CBF54BDE6FF513" xlink:to="loc_us-gaap_ConcentrationRiskByTypeAxis_3147E4CC1C9537F871D8F5612DA4567D" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskTypeDomain" xlink:label="loc_us-gaap_ConcentrationRiskTypeDomain_88DBEE0381A6BE5B9CAAF5612DAA1432_default" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_ConcentrationRiskByTypeAxis_3147E4CC1C9537F871D8F5612DA4567D" xlink:to="loc_us-gaap_ConcentrationRiskTypeDomain_88DBEE0381A6BE5B9CAAF5612DAA1432_default" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskTypeDomain" xlink:label="loc_us-gaap_ConcentrationRiskTypeDomain_88DBEE0381A6BE5B9CAAF5612DAA1432" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_ConcentrationRiskByTypeAxis_3147E4CC1C9537F871D8F5612DA4567D" xlink:to="loc_us-gaap_ConcentrationRiskTypeDomain_88DBEE0381A6BE5B9CAAF5612DAA1432" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CustomerConcentrationRiskMember" xlink:label="loc_us-gaap_CustomerConcentrationRiskMember_0347FA9E66C56275314FF561689CA2B9" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ConcentrationRiskTypeDomain_88DBEE0381A6BE5B9CAAF5612DAA1432" xlink:to="loc_us-gaap_CustomerConcentrationRiskMember_0347FA9E66C56275314FF561689CA2B9" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MajorCustomersAxis" xlink:label="loc_us-gaap_MajorCustomersAxis_E9E7D1A6458A3517D081F54BDE6F0131" xlink:type="locator" />
    <definitionArc order="3" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_14AB974B48CF22DB05CBF54BDE6FF513" xlink:to="loc_us-gaap_MajorCustomersAxis_E9E7D1A6458A3517D081F54BDE6F0131" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NameOfMajorCustomerDomain" xlink:label="loc_us-gaap_NameOfMajorCustomerDomain_B625FC42F0B086E7D3EBF54BDE6F4245_default" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_MajorCustomersAxis_E9E7D1A6458A3517D081F54BDE6F0131" xlink:to="loc_us-gaap_NameOfMajorCustomerDomain_B625FC42F0B086E7D3EBF54BDE6F4245_default" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NameOfMajorCustomerDomain" xlink:label="loc_us-gaap_NameOfMajorCustomerDomain_B625FC42F0B086E7D3EBF54BDE6F4245" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_MajorCustomersAxis_E9E7D1A6458A3517D081F54BDE6F0131" xlink:to="loc_us-gaap_NameOfMajorCustomerDomain_B625FC42F0B086E7D3EBF54BDE6F4245" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_CustomerNumberOneMember" xlink:label="loc_asys_CustomerNumberOneMember_F77EF397B29ED4C799E3F54BDE701F1F" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_NameOfMajorCustomerDomain_B625FC42F0B086E7D3EBF54BDE6F4245" xlink:to="loc_asys_CustomerNumberOneMember_F77EF397B29ED4C799E3F54BDE701F1F" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_CustomerNumberTwoMember" xlink:label="loc_asys_CustomerNumberTwoMember_9C646F0D5D2607AA255EF54BDE70BE60" xlink:type="locator" />
    <definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_NameOfMajorCustomerDomain_B625FC42F0B086E7D3EBF54BDE6F4245" xlink:to="loc_asys_CustomerNumberTwoMember_9C646F0D5D2607AA255EF54BDE70BE60" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StatementGeographicalAxis" xlink:label="loc_us-gaap_StatementGeographicalAxis_1314F6AD74745543FC15F54BDE70A56C" xlink:type="locator" />
    <definitionArc order="4" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_14AB974B48CF22DB05CBF54BDE6FF513" xlink:to="loc_us-gaap_StatementGeographicalAxis_1314F6AD74745543FC15F54BDE70A56C" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SegmentGeographicalDomain" xlink:label="loc_us-gaap_SegmentGeographicalDomain_FC6346FA1A596CFAAF07F54BDE701D0F_default" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_StatementGeographicalAxis_1314F6AD74745543FC15F54BDE70A56C" xlink:to="loc_us-gaap_SegmentGeographicalDomain_FC6346FA1A596CFAAF07F54BDE701D0F_default" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SegmentGeographicalDomain" xlink:label="loc_us-gaap_SegmentGeographicalDomain_FC6346FA1A596CFAAF07F54BDE701D0F" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_StatementGeographicalAxis_1314F6AD74745543FC15F54BDE70A56C" xlink:to="loc_us-gaap_SegmentGeographicalDomain_FC6346FA1A596CFAAF07F54BDE701D0F" xlink:type="arc" />
    <loc xlink:href="http://xbrl.sec.gov/country/2013/country-2013-01-31.xsd#country_US" xlink:label="loc_country_US_6D18AF0EC26BBC375621F54BDE707FB1" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_SegmentGeographicalDomain_FC6346FA1A596CFAAF07F54BDE701D0F" xlink:to="loc_country_US_6D18AF0EC26BBC375621F54BDE707FB1" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_OtherNorthAmericaMember" xlink:label="loc_asys_OtherNorthAmericaMember_60C3EC1D4B5E24637C1DF54BDE70B057" xlink:type="locator" />
    <definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_SegmentGeographicalDomain_FC6346FA1A596CFAAF07F54BDE701D0F" xlink:to="loc_asys_OtherNorthAmericaMember_60C3EC1D4B5E24637C1DF54BDE70B057" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NorthAmericaMember" xlink:label="loc_us-gaap_NorthAmericaMember_3F4D34BC6078E47FC5C6F54BDE70ED3B" xlink:type="locator" />
    <definitionArc order="3" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_SegmentGeographicalDomain_FC6346FA1A596CFAAF07F54BDE701D0F" xlink:to="loc_us-gaap_NorthAmericaMember_3F4D34BC6078E47FC5C6F54BDE70ED3B" xlink:type="arc" />
    <loc xlink:href="http://xbrl.sec.gov/country/2013/country-2013-01-31.xsd#country_CN" xlink:label="loc_country_CN_BDDF17E67312EDD0271AF54BDE70E27E" xlink:type="locator" />
    <definitionArc order="4" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_SegmentGeographicalDomain_FC6346FA1A596CFAAF07F54BDE701D0F" xlink:to="loc_country_CN_BDDF17E67312EDD0271AF54BDE70E27E" xlink:type="arc" />
    <loc xlink:href="http://xbrl.sec.gov/country/2013/country-2013-01-31.xsd#country_TW" xlink:label="loc_country_TW_C87DCEBF5931C0566695F54BDE70332E" xlink:type="locator" />
    <definitionArc order="5" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_SegmentGeographicalDomain_FC6346FA1A596CFAAF07F54BDE701D0F" xlink:to="loc_country_TW_C87DCEBF5931C0566695F54BDE70332E" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupOneMember" xlink:label="loc_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupOneMember_BD1C54B7314B9D327A56F54BDE70F1CA" xlink:type="locator" />
    <definitionArc order="6" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_SegmentGeographicalDomain_FC6346FA1A596CFAAF07F54BDE701D0F" xlink:to="loc_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupOneMember_BD1C54B7314B9D327A56F54BDE70F1CA" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AsiaMember" xlink:label="loc_us-gaap_AsiaMember_D29A8E70B5B71BD784F3F54BDE718753" xlink:type="locator" />
    <definitionArc order="7" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_SegmentGeographicalDomain_FC6346FA1A596CFAAF07F54BDE701D0F" xlink:to="loc_us-gaap_AsiaMember_D29A8E70B5B71BD784F3F54BDE718753" xlink:type="arc" />
    <loc xlink:href="http://xbrl.sec.gov/country/2013/country-2013-01-31.xsd#country_DE" xlink:label="loc_country_DE_56A4DAA999E1CE80F99AF54BDE71A1AB" xlink:type="locator" />
    <definitionArc order="8" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_SegmentGeographicalDomain_FC6346FA1A596CFAAF07F54BDE701D0F" xlink:to="loc_country_DE_56A4DAA999E1CE80F99AF54BDE71A1AB" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupTwoMember" xlink:label="loc_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupTwoMember_40524EC35C478B936779F54BDE71E860" xlink:type="locator" />
    <definitionArc order="9" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_SegmentGeographicalDomain_FC6346FA1A596CFAAF07F54BDE701D0F" xlink:to="loc_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupTwoMember_40524EC35C478B936779F54BDE71E860" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EuropeMember" xlink:label="loc_us-gaap_EuropeMember_C1B76B4B564D86E8F213F54BDE711A58" xlink:type="locator" />
    <definitionArc order="10" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_SegmentGeographicalDomain_FC6346FA1A596CFAAF07F54BDE701D0F" xlink:to="loc_us-gaap_EuropeMember_C1B76B4B564D86E8F213F54BDE711A58" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_EntityWideRevenueMajorCustomerNumber" xlink:label="loc_asys_EntityWideRevenueMajorCustomerNumber_1EBF134C389A822CF77CF54BDE71A738" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_EntityWideRevenueMajorCustomerLineItems_1AE2D7A7EA0083709F9CF54BDE71895B" xlink:to="loc_asys_EntityWideRevenueMajorCustomerNumber_1EBF134C389A822CF77CF54BDE71A738" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskPercentage1" xlink:label="loc_us-gaap_ConcentrationRiskPercentage1_2962961123A72D64129FF54BDE713F92" xlink:type="locator" />
    <definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_EntityWideRevenueMajorCustomerLineItems_1AE2D7A7EA0083709F9CF54BDE71895B" xlink:to="loc_us-gaap_ConcentrationRiskPercentage1_2962961123A72D64129FF54BDE713F92" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_RevenuesPercentage" xlink:label="loc_asys_RevenuesPercentage_FC9F381876F11CC8326BF54BDE715E82" xlink:type="locator" />
    <definitionArc order="3" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_EntityWideRevenueMajorCustomerLineItems_1AE2D7A7EA0083709F9CF54BDE71895B" xlink:to="loc_asys_RevenuesPercentage_FC9F381876F11CC8326BF54BDE715E82" xlink:type="arc" />
  </definitionLink>
  <definitionLink xlink:role="http://www.amtechsystems.com/role/MajorCustomersAndForeignSalesTables" xlink:type="extended" />
  <definitionLink xlink:role="http://www.amtechsystems.com/role/OtherAccruedLiabilities" xlink:type="extended" />
  <definitionLink xlink:role="http://www.amtechsystems.com/role/OtherAccruedLiabilitiesDetails" xlink:type="extended" />
  <definitionLink xlink:role="http://www.amtechsystems.com/role/OtherAccruedLiabilitiesTables" xlink:type="extended" />
  <definitionLink xlink:role="http://www.amtechsystems.com/role/StockholdersEquity" xlink:type="extended" />
  <definitionLink xlink:role="http://www.amtechsystems.com/role/StockholdersEquityDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ClassOfStockLineItems" xlink:label="loc_us-gaap_ClassOfStockLineItems_90D84FBEE245BF6DC443F54BDE8B31D3" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfStockByClassTable" xlink:label="loc_us-gaap_ScheduleOfStockByClassTable_2D493512A55DCE4C3EA3F54BDE8BE676" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="loc_us-gaap_ClassOfStockLineItems_90D84FBEE245BF6DC443F54BDE8B31D3" xlink:to="loc_us-gaap_ScheduleOfStockByClassTable_2D493512A55DCE4C3EA3F54BDE8BE676" xlink:type="arc" xbrldt:closed="true" xbrldt:contextElement="segment" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StatementClassOfStockAxis" xlink:label="loc_us-gaap_StatementClassOfStockAxis_0D74F58895E7AE8534B3F54BDE8BB023" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ScheduleOfStockByClassTable_2D493512A55DCE4C3EA3F54BDE8BE676" xlink:to="loc_us-gaap_StatementClassOfStockAxis_0D74F58895E7AE8534B3F54BDE8BB023" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ClassOfStockDomain" xlink:label="loc_us-gaap_ClassOfStockDomain_DC1E48DCEAF7222853F1F54BDE8BBB9B_default" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_StatementClassOfStockAxis_0D74F58895E7AE8534B3F54BDE8BB023" xlink:to="loc_us-gaap_ClassOfStockDomain_DC1E48DCEAF7222853F1F54BDE8BBB9B_default" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ClassOfStockDomain" xlink:label="loc_us-gaap_ClassOfStockDomain_DC1E48DCEAF7222853F1F54BDE8BBB9B" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_StatementClassOfStockAxis_0D74F58895E7AE8534B3F54BDE8BB023" xlink:to="loc_us-gaap_ClassOfStockDomain_DC1E48DCEAF7222853F1F54BDE8BBB9B" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SeriesAPreferredStockMember" xlink:label="loc_us-gaap_SeriesAPreferredStockMember_36A352091381BACA27F1F54BDE8B0341" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ClassOfStockDomain_DC1E48DCEAF7222853F1F54BDE8BBB9B" xlink:to="loc_us-gaap_SeriesAPreferredStockMember_36A352091381BACA27F1F54BDE8B0341" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CommonStockParOrStatedValuePerShare" xlink:label="loc_us-gaap_CommonStockParOrStatedValuePerShare_6ECB30FFFC50558A7E23F54BDE8BE7D0" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ClassOfStockLineItems_90D84FBEE245BF6DC443F54BDE8B31D3" xlink:to="loc_us-gaap_CommonStockParOrStatedValuePerShare_6ECB30FFFC50558A7E23F54BDE8BE7D0" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ClassOfWarrantOrRightNumberOfSecuritiesCalledByWarrantsOrRights" xlink:label="loc_us-gaap_ClassOfWarrantOrRightNumberOfSecuritiesCalledByWarrantsOrRights_F3FBFBC49ECCD9CA35BDF54BDE8B446B" xlink:type="locator" />
    <definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ClassOfStockLineItems_90D84FBEE245BF6DC443F54BDE8B31D3" xlink:to="loc_us-gaap_ClassOfWarrantOrRightNumberOfSecuritiesCalledByWarrantsOrRights_F3FBFBC49ECCD9CA35BDF54BDE8B446B" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ClassOfWarrantOrRightExercisePriceOfWarrantsOrRights1" xlink:label="loc_us-gaap_ClassOfWarrantOrRightExercisePriceOfWarrantsOrRights1_897AB86ABE597958B496F54BDE8B50E5" xlink:type="locator" />
    <definitionArc order="3" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ClassOfStockLineItems_90D84FBEE245BF6DC443F54BDE8B31D3" xlink:to="loc_us-gaap_ClassOfWarrantOrRightExercisePriceOfWarrantsOrRights1_897AB86ABE597958B496F54BDE8B50E5" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_ClassOfWarrantOrRightExpirationPeriod" xlink:label="loc_asys_ClassOfWarrantOrRightExpirationPeriod_9CE538F6A93AEBAC2672F57F6BE70FD6" xlink:type="locator" />
    <definitionArc order="4" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ClassOfStockLineItems_90D84FBEE245BF6DC443F54BDE8B31D3" xlink:to="loc_asys_ClassOfWarrantOrRightExpirationPeriod_9CE538F6A93AEBAC2672F57F6BE70FD6" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_CommonStockMinimumPercentOwnershipForExerciseOfRights" xlink:label="loc_asys_CommonStockMinimumPercentOwnershipForExerciseOfRights_C57C7BD93B2698C2FB0CF5899C1CF37A" xlink:type="locator" />
    <definitionArc order="5" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ClassOfStockLineItems_90D84FBEE245BF6DC443F54BDE8B31D3" xlink:to="loc_asys_CommonStockMinimumPercentOwnershipForExerciseOfRights_C57C7BD93B2698C2FB0CF5899C1CF37A" xlink:type="arc" />
  </definitionLink>
  <definitionLink xlink:role="http://www.amtechsystems.com/role/SubsequentEventDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SubsequentEventLineItems" xlink:label="loc_us-gaap_SubsequentEventLineItems_C7AEFBAFFF041574041BF54BDE2840F5" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SubsequentEventTable" xlink:label="loc_us-gaap_SubsequentEventTable_EC09EAED3885908230C5F54BDE282018" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="loc_us-gaap_SubsequentEventLineItems_C7AEFBAFFF041574041BF54BDE2840F5" xlink:to="loc_us-gaap_SubsequentEventTable_EC09EAED3885908230C5F54BDE282018" xlink:type="arc" xbrldt:closed="true" xbrldt:contextElement="segment" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DebtInstrumentAxis" xlink:label="loc_us-gaap_DebtInstrumentAxis_7AC0165D94C0B9F06FFDF5C37E8A8219" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_SubsequentEventTable_EC09EAED3885908230C5F54BDE282018" xlink:to="loc_us-gaap_DebtInstrumentAxis_7AC0165D94C0B9F06FFDF5C37E8A8219" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DebtInstrumentNameDomain" xlink:label="loc_us-gaap_DebtInstrumentNameDomain_631645267C28B805C428F5C37E8BAF3F_default" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_DebtInstrumentAxis_7AC0165D94C0B9F06FFDF5C37E8A8219" xlink:to="loc_us-gaap_DebtInstrumentNameDomain_631645267C28B805C428F5C37E8BAF3F_default" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DebtInstrumentNameDomain" xlink:label="loc_us-gaap_DebtInstrumentNameDomain_631645267C28B805C428F5C37E8BAF3F" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_DebtInstrumentAxis_7AC0165D94C0B9F06FFDF5C37E8A8219" xlink:to="loc_us-gaap_DebtInstrumentNameDomain_631645267C28B805C428F5C37E8BAF3F" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_SolarToolLoanAgreementMember" xlink:label="loc_asys_SolarToolLoanAgreementMember_88A9345C908EBD1A7099F5C3F2809813" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_DebtInstrumentNameDomain_631645267C28B805C428F5C37E8BAF3F" xlink:to="loc_asys_SolarToolLoanAgreementMember_88A9345C908EBD1A7099F5C3F2809813" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CounterpartyNameAxis" xlink:label="loc_us-gaap_CounterpartyNameAxis_078909C27E780925D1A5F5B2D367422F" xlink:type="locator" />
    <definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_SubsequentEventTable_EC09EAED3885908230C5F54BDE282018" xlink:to="loc_us-gaap_CounterpartyNameAxis_078909C27E780925D1A5F5B2D367422F" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RepurchaseAgreementCounterpartyNameDomain" xlink:label="loc_us-gaap_RepurchaseAgreementCounterpartyNameDomain_7EC9523CB6F477A10CD5F5B2D369783A_default" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_CounterpartyNameAxis_078909C27E780925D1A5F5B2D367422F" xlink:to="loc_us-gaap_RepurchaseAgreementCounterpartyNameDomain_7EC9523CB6F477A10CD5F5B2D369783A_default" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RepurchaseAgreementCounterpartyNameDomain" xlink:label="loc_us-gaap_RepurchaseAgreementCounterpartyNameDomain_7EC9523CB6F477A10CD5F5B2D369783A" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_CounterpartyNameAxis_078909C27E780925D1A5F5B2D367422F" xlink:to="loc_us-gaap_RepurchaseAgreementCounterpartyNameDomain_7EC9523CB6F477A10CD5F5B2D369783A" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_KingstoneHongKongMember" xlink:label="loc_asys_KingstoneHongKongMember_560B4B871DB647EF21D3F5B3CE137A08" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_RepurchaseAgreementCounterpartyNameDomain_7EC9523CB6F477A10CD5F5B2D369783A" xlink:to="loc_asys_KingstoneHongKongMember_560B4B871DB647EF21D3F5B3CE137A08" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_SuzhouZhuoJingInvestmentCenterMember" xlink:label="loc_asys_SuzhouZhuoJingInvestmentCenterMember_BF527A12D0EB83ACE499F5B479E95FDA" xlink:type="locator" />
    <definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_RepurchaseAgreementCounterpartyNameDomain_7EC9523CB6F477A10CD5F5B2D369783A" xlink:to="loc_asys_SuzhouZhuoJingInvestmentCenterMember_BF527A12D0EB83ACE499F5B479E95FDA" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RestructuringPlanAxis" xlink:label="loc_us-gaap_RestructuringPlanAxis_C57C312E0469EC4782A0F5AFC3835484" xlink:type="locator" />
    <definitionArc order="3" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_SubsequentEventTable_EC09EAED3885908230C5F54BDE282018" xlink:to="loc_us-gaap_RestructuringPlanAxis_C57C312E0469EC4782A0F5AFC3835484" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RestructuringPlanDomain" xlink:label="loc_us-gaap_RestructuringPlanDomain_F07F7DFE71225514A357F5AFC39D5C50_default" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_RestructuringPlanAxis_C57C312E0469EC4782A0F5AFC3835484" xlink:to="loc_us-gaap_RestructuringPlanDomain_F07F7DFE71225514A357F5AFC39D5C50_default" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RestructuringPlanDomain" xlink:label="loc_us-gaap_RestructuringPlanDomain_F07F7DFE71225514A357F5AFC39D5C50" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_RestructuringPlanAxis_C57C312E0469EC4782A0F5AFC3835484" xlink:to="loc_us-gaap_RestructuringPlanDomain_F07F7DFE71225514A357F5AFC39D5C50" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_RestructuringOfInvestmentInvestmentAgreementMember" xlink:label="loc_asys_RestructuringOfInvestmentInvestmentAgreementMember_176051C0A9C1675CAE64F5B1B66D8690" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_RestructuringPlanDomain_F07F7DFE71225514A357F5AFC39D5C50" xlink:to="loc_asys_RestructuringOfInvestmentInvestmentAgreementMember_176051C0A9C1675CAE64F5B1B66D8690" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis" xlink:label="loc_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_BE319D16B42F8D3B44CCF54BDE288512" xlink:type="locator" />
    <definitionArc order="4" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_SubsequentEventTable_EC09EAED3885908230C5F54BDE282018" xlink:to="loc_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_BE319D16B42F8D3B44CCF54BDE288512" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EquityMethodInvesteeNameDomain" xlink:label="loc_us-gaap_EquityMethodInvesteeNameDomain_52200133321ECB288C74F54BDE28B447_default" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_BE319D16B42F8D3B44CCF54BDE288512" xlink:to="loc_us-gaap_EquityMethodInvesteeNameDomain_52200133321ECB288C74F54BDE28B447_default" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EquityMethodInvesteeNameDomain" xlink:label="loc_us-gaap_EquityMethodInvesteeNameDomain_52200133321ECB288C74F54BDE28B447" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_BE319D16B42F8D3B44CCF54BDE288512" xlink:to="loc_us-gaap_EquityMethodInvesteeNameDomain_52200133321ECB288C74F54BDE28B447" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_KingstoneHongKongMember" xlink:label="loc_asys_KingstoneHongKongMember_2C295180A89781C1D048F5B4E98127D9" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_EquityMethodInvesteeNameDomain_52200133321ECB288C74F54BDE28B447" xlink:to="loc_asys_KingstoneHongKongMember_2C295180A89781C1D048F5B4E98127D9" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_KingstoneSemiconductorCompanyLtdMember" xlink:label="loc_asys_KingstoneSemiconductorCompanyLtdMember_8E1CB4325A41939C0AB5F5AD221A584B" xlink:type="locator" />
    <definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_EquityMethodInvesteeNameDomain_52200133321ECB288C74F54BDE28B447" xlink:to="loc_asys_KingstoneSemiconductorCompanyLtdMember_8E1CB4325A41939C0AB5F5AD221A584B" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SubsequentEventTypeAxis" xlink:label="loc_us-gaap_SubsequentEventTypeAxis_D9C6EE546ABEA62ADADDF54BDE283CA9" xlink:type="locator" />
    <definitionArc order="5" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_SubsequentEventTable_EC09EAED3885908230C5F54BDE282018" xlink:to="loc_us-gaap_SubsequentEventTypeAxis_D9C6EE546ABEA62ADADDF54BDE283CA9" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SubsequentEventTypeDomain" xlink:label="loc_us-gaap_SubsequentEventTypeDomain_B9ECB92FA5BA6D72B497F54BDE28BF13_default" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_SubsequentEventTypeAxis_D9C6EE546ABEA62ADADDF54BDE283CA9" xlink:to="loc_us-gaap_SubsequentEventTypeDomain_B9ECB92FA5BA6D72B497F54BDE28BF13_default" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SubsequentEventTypeDomain" xlink:label="loc_us-gaap_SubsequentEventTypeDomain_B9ECB92FA5BA6D72B497F54BDE28BF13" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_SubsequentEventTypeAxis_D9C6EE546ABEA62ADADDF54BDE283CA9" xlink:to="loc_us-gaap_SubsequentEventTypeDomain_B9ECB92FA5BA6D72B497F54BDE28BF13" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SubsequentEventMember" xlink:label="loc_us-gaap_SubsequentEventMember_B354CC0EDF1CE8500AB3F59F361A6CBB" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_SubsequentEventTypeDomain_B9ECB92FA5BA6D72B497F54BDE28BF13" xlink:to="loc_us-gaap_SubsequentEventMember_B354CC0EDF1CE8500AB3F59F361A6CBB" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EquityMethodInvestmentOwnershipPercentage" xlink:label="loc_us-gaap_EquityMethodInvestmentOwnershipPercentage_330F66CFFDEEEBA1E96DF54BDE29482F" xlink:type="locator" />
    <definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_SubsequentEventLineItems_C7AEFBAFFF041574041BF54BDE2840F5" xlink:to="loc_us-gaap_EquityMethodInvestmentOwnershipPercentage_330F66CFFDEEEBA1E96DF54BDE29482F" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EquityMethodInvestmentSoldCarryingAmount" xlink:label="loc_us-gaap_EquityMethodInvestmentSoldCarryingAmount_3E14A9DBB297D7ED15FEF5B7AD9C2779" xlink:type="locator" />
    <definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_SubsequentEventLineItems_C7AEFBAFFF041574041BF54BDE2840F5" xlink:to="loc_us-gaap_EquityMethodInvestmentSoldCarryingAmount_3E14A9DBB297D7ED15FEF5B7AD9C2779" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProceedsFromCollectionOfNotesReceivable" xlink:label="loc_us-gaap_ProceedsFromCollectionOfNotesReceivable_7E1D6DA19B1DC46E4259F5C35899FE33" xlink:type="locator" />
    <definitionArc order="3" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_SubsequentEventLineItems_C7AEFBAFFF041574041BF54BDE2840F5" xlink:to="loc_us-gaap_ProceedsFromCollectionOfNotesReceivable_7E1D6DA19B1DC46E4259F5C35899FE33" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_ProceedsFromSaleOfExclusiveRightToSellAndServiceProducts" xlink:label="loc_asys_ProceedsFromSaleOfExclusiveRightToSellAndServiceProducts_2D59A833DA0967F5C46DF5C9364155C2" xlink:type="locator" />
    <definitionArc order="4" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_SubsequentEventLineItems_C7AEFBAFFF041574041BF54BDE2840F5" xlink:to="loc_asys_ProceedsFromSaleOfExclusiveRightToSellAndServiceProducts_2D59A833DA0967F5C46DF5C9364155C2" xlink:type="arc" />
  </definitionLink>
  <definitionLink xlink:role="http://www.amtechsystems.com/role/SubsequentEventNotes" xlink:type="extended" />
</linkbase>
</XBRL>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.LAB
<SEQUENCE>11
<FILENAME>asys-20150630_lab.xml
<DESCRIPTION>XBRL TAXONOMY EXTENSION LABEL LINKBASE DOCUMENT
<TEXT>
<XBRL>
<?xml version="1.0" encoding="US-ASCII"?>
<!--XBRL Document Created with Wdesk from Workiva-->
<!-- -->
<link:linkbase xsi:schemaLocation="http://www.xbrl.org/2003/linkbase http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd" xmlns:link="http://www.xbrl.org/2003/linkbase" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance">
  <link:roleRef roleURI="http://www.xbrl.org/2009/role/negatedPeriodStartLabel" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedPeriodStartLabel" xlink:type="simple" />
  <link:roleRef roleURI="http://www.xbrl.org/2009/role/netLabel" xlink:href="http://www.xbrl.org/lrr/role/net-2009-12-16.xsd#netLabel" xlink:type="simple" />
  <link:roleRef roleURI="http://www.xbrl.org/2009/role/negatedNetLabel" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedNetLabel" xlink:type="simple" />
  <link:roleRef roleURI="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedTerseLabel" xlink:type="simple" />
  <link:roleRef roleURI="http://www.xbrl.org/2009/role/negatedPeriodEndLabel" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedPeriodEndLabel" xlink:type="simple" />
  <link:roleRef roleURI="http://www.xbrl.org/2009/role/negatedLabel" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedLabel" xlink:type="simple" />
  <link:roleRef roleURI="http://www.xbrl.org/2009/role/negatedTotalLabel" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedTotalLabel" xlink:type="simple" />
  <link:labelLink xlink:role="http://www.xbrl.org/2003/role/link" xlink:type="extended">
    <link:label id="lab_us-gaap_EarningsPerShareAbstract_877A3450FEBF49F720CDF541EEC1640B_label_en-US" xlink:label="lab_us-gaap_EarningsPerShareAbstract_877A3450FEBF49F720CDF541EEC1640B" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Earnings Per Share [Abstract]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EarningsPerShareAbstract" xlink:label="loc_us-gaap_EarningsPerShareAbstract_877A3450FEBF49F720CDF541EEC1640B" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_EarningsPerShareAbstract_877A3450FEBF49F720CDF541EEC1640B" xlink:to="lab_us-gaap_EarningsPerShareAbstract_877A3450FEBF49F720CDF541EEC1640B" xlink:type="arc" />
    <link:label id="lab_us-gaap_EarningsPerShareTextBlock_FE1BACAB8D35C59F5918F541EEC16544_terseLabel_en-US" xlink:label="lab_us-gaap_EarningsPerShareTextBlock_FE1BACAB8D35C59F5918F541EEC16544" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Earnings Per Share</link:label>
    <link:label id="lab_us-gaap_EarningsPerShareTextBlock_FE1BACAB8D35C59F5918F541EEC16544_label_en-US" xlink:label="lab_us-gaap_EarningsPerShareTextBlock_FE1BACAB8D35C59F5918F541EEC16544" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Earnings Per Share [Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EarningsPerShareTextBlock" xlink:label="loc_us-gaap_EarningsPerShareTextBlock_FE1BACAB8D35C59F5918F541EEC16544" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_EarningsPerShareTextBlock_FE1BACAB8D35C59F5918F541EEC16544" xlink:to="lab_us-gaap_EarningsPerShareTextBlock_FE1BACAB8D35C59F5918F541EEC16544" xlink:type="arc" />
    <link:label id="lab_us-gaap_StatementOfFinancialPositionAbstract_B99C0B800619D97DA8B8F541ED753785_label_en-US" xlink:label="lab_us-gaap_StatementOfFinancialPositionAbstract_B99C0B800619D97DA8B8F541ED753785" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Statement of Financial Position [Abstract]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StatementOfFinancialPositionAbstract" xlink:label="loc_us-gaap_StatementOfFinancialPositionAbstract_B99C0B800619D97DA8B8F541ED753785" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_StatementOfFinancialPositionAbstract_B99C0B800619D97DA8B8F541ED753785" xlink:to="lab_us-gaap_StatementOfFinancialPositionAbstract_B99C0B800619D97DA8B8F541ED753785" xlink:type="arc" />
    <link:label id="lab_us-gaap_StatementTable_BF8D028C2AFBD014FA1BF541ED75229A_terseLabel_en-US" xlink:label="lab_us-gaap_StatementTable_BF8D028C2AFBD014FA1BF541ED75229A" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Statement [Table]</link:label>
    <link:label id="lab_us-gaap_StatementTable_BF8D028C2AFBD014FA1BF541ED75229A_label_en-US" xlink:label="lab_us-gaap_StatementTable_BF8D028C2AFBD014FA1BF541ED75229A" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Statement [Table]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StatementTable" xlink:label="loc_us-gaap_StatementTable_BF8D028C2AFBD014FA1BF541ED75229A" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_StatementTable_BF8D028C2AFBD014FA1BF541ED75229A" xlink:to="lab_us-gaap_StatementTable_BF8D028C2AFBD014FA1BF541ED75229A" xlink:type="arc" />
    <link:label id="lab_us-gaap_StatementScenarioAxis_EB020A4304967B4C103DF541ED76FB72_terseLabel_en-US" xlink:label="lab_us-gaap_StatementScenarioAxis_EB020A4304967B4C103DF541ED76FB72" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Statement, Scenario [Axis]</link:label>
    <link:label id="lab_us-gaap_StatementScenarioAxis_EB020A4304967B4C103DF541ED76FB72_label_en-US" xlink:label="lab_us-gaap_StatementScenarioAxis_EB020A4304967B4C103DF541ED76FB72" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Scenario [Axis]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StatementScenarioAxis" xlink:label="loc_us-gaap_StatementScenarioAxis_EB020A4304967B4C103DF541ED76FB72" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_StatementScenarioAxis_EB020A4304967B4C103DF541ED76FB72" xlink:to="lab_us-gaap_StatementScenarioAxis_EB020A4304967B4C103DF541ED76FB72" xlink:type="arc" />
    <link:label id="lab_us-gaap_ScenarioUnspecifiedDomain_75AE1F36F069E776EE2FF541ED76C6A7_terseLabel_en-US" xlink:label="lab_us-gaap_ScenarioUnspecifiedDomain_75AE1F36F069E776EE2FF541ED76C6A7" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Scenario, Unspecified [Domain]</link:label>
    <link:label id="lab_us-gaap_ScenarioUnspecifiedDomain_75AE1F36F069E776EE2FF541ED76C6A7_label_en-US" xlink:label="lab_us-gaap_ScenarioUnspecifiedDomain_75AE1F36F069E776EE2FF541ED76C6A7" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Scenario, Unspecified [Domain]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScenarioUnspecifiedDomain" xlink:label="loc_us-gaap_ScenarioUnspecifiedDomain_75AE1F36F069E776EE2FF541ED76C6A7" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ScenarioUnspecifiedDomain_75AE1F36F069E776EE2FF541ED76C6A7" xlink:to="lab_us-gaap_ScenarioUnspecifiedDomain_75AE1F36F069E776EE2FF541ED76C6A7" xlink:type="arc" />
    <link:label id="lab_us-gaap_StatementLineItems_60783097CD9F043C800CF541ED76827A_terseLabel_en-US" xlink:label="lab_us-gaap_StatementLineItems_60783097CD9F043C800CF541ED76827A" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Statement [Line Items]</link:label>
    <link:label id="lab_us-gaap_StatementLineItems_60783097CD9F043C800CF541ED76827A_label_en-US" xlink:label="lab_us-gaap_StatementLineItems_60783097CD9F043C800CF541ED76827A" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Statement [Line Items]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StatementLineItems" xlink:label="loc_us-gaap_StatementLineItems_60783097CD9F043C800CF541ED76827A" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_StatementLineItems_60783097CD9F043C800CF541ED76827A" xlink:to="lab_us-gaap_StatementLineItems_60783097CD9F043C800CF541ED76827A" xlink:type="arc" />
    <link:label id="lab_us-gaap_AssetsCurrentAbstract_D946321B257CB8E2F189F541ED76E67A_terseLabel_en-US" xlink:label="lab_us-gaap_AssetsCurrentAbstract_D946321B257CB8E2F189F541ED76E67A" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Current Assets</link:label>
    <link:label id="lab_us-gaap_AssetsCurrentAbstract_D946321B257CB8E2F189F541ED76E67A_label_en-US" xlink:label="lab_us-gaap_AssetsCurrentAbstract_D946321B257CB8E2F189F541ED76E67A" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Assets, Current [Abstract]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AssetsCurrentAbstract" xlink:label="loc_us-gaap_AssetsCurrentAbstract_D946321B257CB8E2F189F541ED76E67A" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_AssetsCurrentAbstract_D946321B257CB8E2F189F541ED76E67A" xlink:to="lab_us-gaap_AssetsCurrentAbstract_D946321B257CB8E2F189F541ED76E67A" xlink:type="arc" />
    <link:label id="lab_us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent_A648D73F223A569E959AF541ED76D470_terseLabel_en-US" xlink:label="lab_us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent_A648D73F223A569E959AF541ED76D470" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Allowance for doubtful accounts</link:label>
    <link:label id="lab_us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent_A648D73F223A569E959AF541ED76D470_label_en-US" xlink:label="lab_us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent_A648D73F223A569E959AF541ED76D470" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Allowance for Doubtful Accounts Receivable, Current</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent" xlink:label="loc_us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent_A648D73F223A569E959AF541ED76D470" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent_A648D73F223A569E959AF541ED76D470" xlink:to="lab_us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent_A648D73F223A569E959AF541ED76D470" xlink:type="arc" />
    <link:label id="lab_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_804CB866243C1E9EA749F541ED76C36D_terseLabel_en-US" xlink:label="lab_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_804CB866243C1E9EA749F541ED76C36D" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Stockholders' Equity</link:label>
    <link:label id="lab_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_804CB866243C1E9EA749F541ED76C36D_label_en-US" xlink:label="lab_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_804CB866243C1E9EA749F541ED76C36D" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Stockholders' Equity, Including Portion Attributable to Noncontrolling Interest [Abstract]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract" xlink:label="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_804CB866243C1E9EA749F541ED76C36D" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_804CB866243C1E9EA749F541ED76C36D" xlink:to="lab_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_804CB866243C1E9EA749F541ED76C36D" xlink:type="arc" />
    <link:label id="lab_us-gaap_CommonStockParOrStatedValuePerShare_8FB520BBA1DB9ADDFFD2F541ED763CAA_terseLabel_en-US" xlink:label="lab_us-gaap_CommonStockParOrStatedValuePerShare_8FB520BBA1DB9ADDFFD2F541ED763CAA" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Common stock, par value</link:label>
    <link:label id="lab_us-gaap_CommonStockParOrStatedValuePerShare_8FB520BBA1DB9ADDFFD2F541ED763CAA_label_en-US" xlink:label="lab_us-gaap_CommonStockParOrStatedValuePerShare_8FB520BBA1DB9ADDFFD2F541ED763CAA" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Common Stock, Par or Stated Value Per Share</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CommonStockParOrStatedValuePerShare" xlink:label="loc_us-gaap_CommonStockParOrStatedValuePerShare_8FB520BBA1DB9ADDFFD2F541ED763CAA" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_CommonStockParOrStatedValuePerShare_8FB520BBA1DB9ADDFFD2F541ED763CAA" xlink:to="lab_us-gaap_CommonStockParOrStatedValuePerShare_8FB520BBA1DB9ADDFFD2F541ED763CAA" xlink:type="arc" />
    <link:label id="lab_us-gaap_CommonStockSharesAuthorized_0518041475723A0E7FE0F541ED76B421_terseLabel_en-US" xlink:label="lab_us-gaap_CommonStockSharesAuthorized_0518041475723A0E7FE0F541ED76B421" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Common stock, shares authorized</link:label>
    <link:label id="lab_us-gaap_CommonStockSharesAuthorized_0518041475723A0E7FE0F541ED76B421_label_en-US" xlink:label="lab_us-gaap_CommonStockSharesAuthorized_0518041475723A0E7FE0F541ED76B421" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Common Stock, Shares Authorized</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CommonStockSharesAuthorized" xlink:label="loc_us-gaap_CommonStockSharesAuthorized_0518041475723A0E7FE0F541ED76B421" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_CommonStockSharesAuthorized_0518041475723A0E7FE0F541ED76B421" xlink:to="lab_us-gaap_CommonStockSharesAuthorized_0518041475723A0E7FE0F541ED76B421" xlink:type="arc" />
    <link:label id="lab_us-gaap_CommonStockSharesIssued_8604DA240E76DA9C1D0DF541ED76062F_terseLabel_en-US" xlink:label="lab_us-gaap_CommonStockSharesIssued_8604DA240E76DA9C1D0DF541ED76062F" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Common stock, shares issued</link:label>
    <link:label id="lab_us-gaap_CommonStockSharesIssued_8604DA240E76DA9C1D0DF541ED76062F_label_en-US" xlink:label="lab_us-gaap_CommonStockSharesIssued_8604DA240E76DA9C1D0DF541ED76062F" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Common Stock, Shares, Issued</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CommonStockSharesIssued" xlink:label="loc_us-gaap_CommonStockSharesIssued_8604DA240E76DA9C1D0DF541ED76062F" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_CommonStockSharesIssued_8604DA240E76DA9C1D0DF541ED76062F" xlink:to="lab_us-gaap_CommonStockSharesIssued_8604DA240E76DA9C1D0DF541ED76062F" xlink:type="arc" />
    <link:label id="lab_us-gaap_CommonStockSharesOutstanding_A017E0773AA245594654F541ED7786C7_terseLabel_en-US" xlink:label="lab_us-gaap_CommonStockSharesOutstanding_A017E0773AA245594654F541ED7786C7" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Common stock, shares outstanding</link:label>
    <link:label id="lab_us-gaap_CommonStockSharesOutstanding_A017E0773AA245594654F541ED7786C7_label_en-US" xlink:label="lab_us-gaap_CommonStockSharesOutstanding_A017E0773AA245594654F541ED7786C7" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Common Stock, Shares, Outstanding</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CommonStockSharesOutstanding" xlink:label="loc_us-gaap_CommonStockSharesOutstanding_A017E0773AA245594654F541ED7786C7" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_CommonStockSharesOutstanding_A017E0773AA245594654F541ED7786C7" xlink:to="lab_us-gaap_CommonStockSharesOutstanding_A017E0773AA245594654F541ED7786C7" xlink:type="arc" />
    <link:label id="lab_us-gaap_PreferredStockSharesAuthorized_637399D1010BDDAB86EEF541ED77C621_terseLabel_en-US" xlink:label="lab_us-gaap_PreferredStockSharesAuthorized_637399D1010BDDAB86EEF541ED77C621" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Preferred stock, shares authorized</link:label>
    <link:label id="lab_us-gaap_PreferredStockSharesAuthorized_637399D1010BDDAB86EEF541ED77C621_label_en-US" xlink:label="lab_us-gaap_PreferredStockSharesAuthorized_637399D1010BDDAB86EEF541ED77C621" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Preferred Stock, Shares Authorized</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PreferredStockSharesAuthorized" xlink:label="loc_us-gaap_PreferredStockSharesAuthorized_637399D1010BDDAB86EEF541ED77C621" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_PreferredStockSharesAuthorized_637399D1010BDDAB86EEF541ED77C621" xlink:to="lab_us-gaap_PreferredStockSharesAuthorized_637399D1010BDDAB86EEF541ED77C621" xlink:type="arc" />
    <link:label id="lab_us-gaap_PreferredStockSharesIssued_F5F58B34D18ABD7BFFF6F541ED779B86_terseLabel_en-US" xlink:label="lab_us-gaap_PreferredStockSharesIssued_F5F58B34D18ABD7BFFF6F541ED779B86" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Preferred stock, shares issued</link:label>
    <link:label id="lab_us-gaap_PreferredStockSharesIssued_F5F58B34D18ABD7BFFF6F541ED779B86_label_en-US" xlink:label="lab_us-gaap_PreferredStockSharesIssued_F5F58B34D18ABD7BFFF6F541ED779B86" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Preferred Stock, Shares Issued</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PreferredStockSharesIssued" xlink:label="loc_us-gaap_PreferredStockSharesIssued_F5F58B34D18ABD7BFFF6F541ED779B86" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_PreferredStockSharesIssued_F5F58B34D18ABD7BFFF6F541ED779B86" xlink:to="lab_us-gaap_PreferredStockSharesIssued_F5F58B34D18ABD7BFFF6F541ED779B86" xlink:type="arc" />
    <link:label id="lab_us-gaap_CommitmentsAndContingenciesDisclosureAbstract_7F4466D732311F7955C8F54BDE585992_label_en-US" xlink:label="lab_us-gaap_CommitmentsAndContingenciesDisclosureAbstract_7F4466D732311F7955C8F54BDE585992" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Commitments and Contingencies Disclosure [Abstract]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CommitmentsAndContingenciesDisclosureAbstract" xlink:label="loc_us-gaap_CommitmentsAndContingenciesDisclosureAbstract_7F4466D732311F7955C8F54BDE585992" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_CommitmentsAndContingenciesDisclosureAbstract_7F4466D732311F7955C8F54BDE585992" xlink:to="lab_us-gaap_CommitmentsAndContingenciesDisclosureAbstract_7F4466D732311F7955C8F54BDE585992" xlink:type="arc" />
    <link:label id="lab_us-gaap_ScheduleOfEquityMethodInvestmentsTable_1CD146379F1956B088E2F54BDE582272_terseLabel_en-US" xlink:label="lab_us-gaap_ScheduleOfEquityMethodInvestmentsTable_1CD146379F1956B088E2F54BDE582272" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Schedule of Equity Method Investments [Table]</link:label>
    <link:label id="lab_us-gaap_ScheduleOfEquityMethodInvestmentsTable_1CD146379F1956B088E2F54BDE582272_label_en-US" xlink:label="lab_us-gaap_ScheduleOfEquityMethodInvestmentsTable_1CD146379F1956B088E2F54BDE582272" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Schedule of Equity Method Investments [Table]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfEquityMethodInvestmentsTable" xlink:label="loc_us-gaap_ScheduleOfEquityMethodInvestmentsTable_1CD146379F1956B088E2F54BDE582272" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsTable_1CD146379F1956B088E2F54BDE582272" xlink:to="lab_us-gaap_ScheduleOfEquityMethodInvestmentsTable_1CD146379F1956B088E2F54BDE582272" xlink:type="arc" />
    <link:label id="lab_us-gaap_LossContingenciesByNatureOfContingencyAxis_069EE4AE807BF36A4A3BF54BDE58AD51_terseLabel_en-US" xlink:label="lab_us-gaap_LossContingenciesByNatureOfContingencyAxis_069EE4AE807BF36A4A3BF54BDE58AD51" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Loss Contingency Nature [Axis]</link:label>
    <link:label id="lab_us-gaap_LossContingenciesByNatureOfContingencyAxis_069EE4AE807BF36A4A3BF54BDE58AD51_label_en-US" xlink:label="lab_us-gaap_LossContingenciesByNatureOfContingencyAxis_069EE4AE807BF36A4A3BF54BDE58AD51" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Loss Contingency Nature [Axis]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LossContingenciesByNatureOfContingencyAxis" xlink:label="loc_us-gaap_LossContingenciesByNatureOfContingencyAxis_069EE4AE807BF36A4A3BF54BDE58AD51" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_LossContingenciesByNatureOfContingencyAxis_069EE4AE807BF36A4A3BF54BDE58AD51" xlink:to="lab_us-gaap_LossContingenciesByNatureOfContingencyAxis_069EE4AE807BF36A4A3BF54BDE58AD51" xlink:type="arc" />
    <link:label id="lab_us-gaap_LossContingencyNatureDomain_4E7929F01E141D7E9F67F54BDE5839A2_terseLabel_en-US" xlink:label="lab_us-gaap_LossContingencyNatureDomain_4E7929F01E141D7E9F67F54BDE5839A2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Loss Contingency, Nature [Domain]</link:label>
    <link:label id="lab_us-gaap_LossContingencyNatureDomain_4E7929F01E141D7E9F67F54BDE5839A2_label_en-US" xlink:label="lab_us-gaap_LossContingencyNatureDomain_4E7929F01E141D7E9F67F54BDE5839A2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Loss Contingency, Nature [Domain]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LossContingencyNatureDomain" xlink:label="loc_us-gaap_LossContingencyNatureDomain_4E7929F01E141D7E9F67F54BDE5839A2" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_LossContingencyNatureDomain_4E7929F01E141D7E9F67F54BDE5839A2" xlink:to="lab_us-gaap_LossContingencyNatureDomain_4E7929F01E141D7E9F67F54BDE5839A2" xlink:type="arc" />
    <link:label id="lab_us-gaap_LossFromCatastrophesMember_3792D557782A4B8FB8FFF54BDE58DD72_terseLabel_en-US" xlink:label="lab_us-gaap_LossFromCatastrophesMember_3792D557782A4B8FB8FFF54BDE58DD72" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Environmental Clean-up</link:label>
    <link:label id="lab_us-gaap_LossFromCatastrophesMember_3792D557782A4B8FB8FFF54BDE58DD72_label_en-US" xlink:label="lab_us-gaap_LossFromCatastrophesMember_3792D557782A4B8FB8FFF54BDE58DD72" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Loss from Catastrophes [Member]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LossFromCatastrophesMember" xlink:label="loc_us-gaap_LossFromCatastrophesMember_3792D557782A4B8FB8FFF54BDE58DD72" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_LossFromCatastrophesMember_3792D557782A4B8FB8FFF54BDE58DD72" xlink:to="lab_us-gaap_LossFromCatastrophesMember_3792D557782A4B8FB8FFF54BDE58DD72" xlink:type="arc" />
    <link:label id="lab_us-gaap_BusinessAcquisitionAxis_C87D7F88AD1F7E611143F54BDE589075_terseLabel_en-US" xlink:label="lab_us-gaap_BusinessAcquisitionAxis_C87D7F88AD1F7E611143F54BDE589075" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Business Acquisition [Axis]</link:label>
    <link:label id="lab_us-gaap_BusinessAcquisitionAxis_C87D7F88AD1F7E611143F54BDE589075_label_en-US" xlink:label="lab_us-gaap_BusinessAcquisitionAxis_C87D7F88AD1F7E611143F54BDE589075" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Business Acquisition [Axis]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionAxis" xlink:label="loc_us-gaap_BusinessAcquisitionAxis_C87D7F88AD1F7E611143F54BDE589075" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_BusinessAcquisitionAxis_C87D7F88AD1F7E611143F54BDE589075" xlink:to="lab_us-gaap_BusinessAcquisitionAxis_C87D7F88AD1F7E611143F54BDE589075" xlink:type="arc" />
    <link:label id="lab_us-gaap_BusinessAcquisitionAcquireeDomain_070858EBF37F344C1496F54BDE59F300_terseLabel_en-US" xlink:label="lab_us-gaap_BusinessAcquisitionAcquireeDomain_070858EBF37F344C1496F54BDE59F300" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Business Acquisition, Acquiree [Domain]</link:label>
    <link:label id="lab_us-gaap_BusinessAcquisitionAcquireeDomain_070858EBF37F344C1496F54BDE59F300_label_en-US" xlink:label="lab_us-gaap_BusinessAcquisitionAcquireeDomain_070858EBF37F344C1496F54BDE59F300" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Business Acquisition, Acquiree [Domain]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionAcquireeDomain" xlink:label="loc_us-gaap_BusinessAcquisitionAcquireeDomain_070858EBF37F344C1496F54BDE59F300" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_BusinessAcquisitionAcquireeDomain_070858EBF37F344C1496F54BDE59F300" xlink:to="lab_us-gaap_BusinessAcquisitionAcquireeDomain_070858EBF37F344C1496F54BDE59F300" xlink:type="arc" />
    <link:label id="lab_asys_BTUInternationalIncBTUMergerMember_44402E4AFCC5BF5167E9F54BDE595662_terseLabel_en-US" xlink:label="lab_asys_BTUInternationalIncBTUMergerMember_44402E4AFCC5BF5167E9F54BDE595662" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">BTU International, Inc (BTU) Merger</link:label>
    <link:label id="lab_asys_BTUInternationalIncBTUMergerMember_44402E4AFCC5BF5167E9F54BDE595662_label_en-US" xlink:label="lab_asys_BTUInternationalIncBTUMergerMember_44402E4AFCC5BF5167E9F54BDE595662" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">BTU International, Inc (BTU) Merger [Member]</link:label>
    <link:label id="lab_asys_BTUInternationalIncBTUMergerMember_44402E4AFCC5BF5167E9F54BDE595662_documentation_en-US" xlink:label="lab_asys_BTUInternationalIncBTUMergerMember_44402E4AFCC5BF5167E9F54BDE595662" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">BTU International, Inc (BTU) Merger</link:label>
    <link:loc xlink:href="asys-20150630.xsd#asys_BTUInternationalIncBTUMergerMember" xlink:label="loc_asys_BTUInternationalIncBTUMergerMember_44402E4AFCC5BF5167E9F54BDE595662" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_BTUInternationalIncBTUMergerMember_44402E4AFCC5BF5167E9F54BDE595662" xlink:to="lab_asys_BTUInternationalIncBTUMergerMember_44402E4AFCC5BF5167E9F54BDE595662" xlink:type="arc" />
    <link:label id="lab_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis_4691D4434F9E72FFE514F54BDE59D2A2_terseLabel_en-US" xlink:label="lab_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis_4691D4434F9E72FFE514F54BDE59D2A2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Research and Development Arrangement, Contract to Perform for Others, Type [Axis]</link:label>
    <link:label id="lab_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis_4691D4434F9E72FFE514F54BDE59D2A2_label_en-US" xlink:label="lab_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis_4691D4434F9E72FFE514F54BDE59D2A2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Research and Development Arrangement, Contract to Perform for Others, Type [Axis]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis" xlink:label="loc_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis_4691D4434F9E72FFE514F54BDE59D2A2" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis_4691D4434F9E72FFE514F54BDE59D2A2" xlink:to="lab_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis_4691D4434F9E72FFE514F54BDE59D2A2" xlink:type="arc" />
    <link:label id="lab_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersTypeDomain_E0458096E3B3DEB49505F54BDE59CAB5_terseLabel_en-US" xlink:label="lab_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersTypeDomain_E0458096E3B3DEB49505F54BDE59CAB5" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Research and Development Arrangement, Contract to Perform for Others, Type [Domain]</link:label>
    <link:label id="lab_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersTypeDomain_E0458096E3B3DEB49505F54BDE59CAB5_label_en-US" xlink:label="lab_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersTypeDomain_E0458096E3B3DEB49505F54BDE59CAB5" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Research and Development Arrangement, Contract to Perform for Others, Type [Domain]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersTypeDomain" xlink:label="loc_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersTypeDomain_E0458096E3B3DEB49505F54BDE59CAB5" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersTypeDomain_E0458096E3B3DEB49505F54BDE59CAB5" xlink:to="lab_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersTypeDomain_E0458096E3B3DEB49505F54BDE59CAB5" xlink:type="arc" />
    <link:label id="lab_asys_TempressSystemsandEnergyResearchCentreAgreementMember_99AD34B231149657B214F54BDE599097_terseLabel_en-US" xlink:label="lab_asys_TempressSystemsandEnergyResearchCentreAgreementMember_99AD34B231149657B214F54BDE599097" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Tempress Systems and Energy Research Centre Agreement [Member]</link:label>
    <link:label id="lab_asys_TempressSystemsandEnergyResearchCentreAgreementMember_99AD34B231149657B214F54BDE599097_label_en-US" xlink:label="lab_asys_TempressSystemsandEnergyResearchCentreAgreementMember_99AD34B231149657B214F54BDE599097" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Tempress Systems and Energy Research Centre Agreement [Member]</link:label>
    <link:label id="lab_asys_TempressSystemsandEnergyResearchCentreAgreementMember_99AD34B231149657B214F54BDE599097_documentation_en-US" xlink:label="lab_asys_TempressSystemsandEnergyResearchCentreAgreementMember_99AD34B231149657B214F54BDE599097" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Tempress Systems and Energy Research Centre Agreement [Member]</link:label>
    <link:loc xlink:href="asys-20150630.xsd#asys_TempressSystemsandEnergyResearchCentreAgreementMember" xlink:label="loc_asys_TempressSystemsandEnergyResearchCentreAgreementMember_99AD34B231149657B214F54BDE599097" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_TempressSystemsandEnergyResearchCentreAgreementMember_99AD34B231149657B214F54BDE599097" xlink:to="lab_asys_TempressSystemsandEnergyResearchCentreAgreementMember_99AD34B231149657B214F54BDE599097" xlink:type="arc" />
    <link:label id="lab_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_B62E1573481F960BB788F54BDE597505_terseLabel_en-US" xlink:label="lab_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_B62E1573481F960BB788F54BDE597505" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Investment, Name [Axis]</link:label>
    <link:label id="lab_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_B62E1573481F960BB788F54BDE597505_label_en-US" xlink:label="lab_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_B62E1573481F960BB788F54BDE597505" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Investment, Name [Axis]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis" xlink:label="loc_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_B62E1573481F960BB788F54BDE597505" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_B62E1573481F960BB788F54BDE597505" xlink:to="lab_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_B62E1573481F960BB788F54BDE597505" xlink:type="arc" />
    <link:label id="lab_us-gaap_EquityMethodInvesteeNameDomain_3D9C1F9A29FCD15B60D6F54BDE5946FC_terseLabel_en-US" xlink:label="lab_us-gaap_EquityMethodInvesteeNameDomain_3D9C1F9A29FCD15B60D6F54BDE5946FC" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Investment, Name [Domain]</link:label>
    <link:label id="lab_us-gaap_EquityMethodInvesteeNameDomain_3D9C1F9A29FCD15B60D6F54BDE5946FC_label_en-US" xlink:label="lab_us-gaap_EquityMethodInvesteeNameDomain_3D9C1F9A29FCD15B60D6F54BDE5946FC" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Investment, Name [Domain]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EquityMethodInvesteeNameDomain" xlink:label="loc_us-gaap_EquityMethodInvesteeNameDomain_3D9C1F9A29FCD15B60D6F54BDE5946FC" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_EquityMethodInvesteeNameDomain_3D9C1F9A29FCD15B60D6F54BDE5946FC" xlink:to="lab_us-gaap_EquityMethodInvesteeNameDomain_3D9C1F9A29FCD15B60D6F54BDE5946FC" xlink:type="arc" />
    <link:label id="lab_asys_KingstoneHoldingCompanyMember_AAA943B4E3F0D80C5D79F54BDE59523B_terseLabel_en-US" xlink:label="lab_asys_KingstoneHoldingCompanyMember_AAA943B4E3F0D80C5D79F54BDE59523B" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Kingstone Holding Company</link:label>
    <link:label id="lab_asys_KingstoneHoldingCompanyMember_AAA943B4E3F0D80C5D79F54BDE59523B_label_en-US" xlink:label="lab_asys_KingstoneHoldingCompanyMember_AAA943B4E3F0D80C5D79F54BDE59523B" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Kingstone Holding Company [Member]</link:label>
    <link:label id="lab_asys_KingstoneHoldingCompanyMember_AAA943B4E3F0D80C5D79F54BDE59523B_documentation_en-US" xlink:label="lab_asys_KingstoneHoldingCompanyMember_AAA943B4E3F0D80C5D79F54BDE59523B" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Kingstone Holding Company [Member]</link:label>
    <link:loc xlink:href="asys-20150630.xsd#asys_KingstoneHoldingCompanyMember" xlink:label="loc_asys_KingstoneHoldingCompanyMember_AAA943B4E3F0D80C5D79F54BDE59523B" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_KingstoneHoldingCompanyMember_AAA943B4E3F0D80C5D79F54BDE59523B" xlink:to="lab_asys_KingstoneHoldingCompanyMember_AAA943B4E3F0D80C5D79F54BDE59523B" xlink:type="arc" />
    <link:label id="lab_asys_KingstoneSemiconductorCompanyLtdMember_F74C1D7D6F4613E2A7C2F54BDE591208_terseLabel_en-US" xlink:label="lab_asys_KingstoneSemiconductorCompanyLtdMember_F74C1D7D6F4613E2A7C2F54BDE591208" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Kingstone Semiconductor Company Ltd</link:label>
    <link:label id="lab_asys_KingstoneSemiconductorCompanyLtdMember_F74C1D7D6F4613E2A7C2F54BDE591208_label_en-US" xlink:label="lab_asys_KingstoneSemiconductorCompanyLtdMember_F74C1D7D6F4613E2A7C2F54BDE591208" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Kingstone Semiconductor Company Ltd [Member]</link:label>
    <link:label id="lab_asys_KingstoneSemiconductorCompanyLtdMember_F74C1D7D6F4613E2A7C2F54BDE591208_documentation_en-US" xlink:label="lab_asys_KingstoneSemiconductorCompanyLtdMember_F74C1D7D6F4613E2A7C2F54BDE591208" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Kingstone Semiconductor Company Ltd [Member]</link:label>
    <link:loc xlink:href="asys-20150630.xsd#asys_KingstoneSemiconductorCompanyLtdMember" xlink:label="loc_asys_KingstoneSemiconductorCompanyLtdMember_F74C1D7D6F4613E2A7C2F54BDE591208" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_KingstoneSemiconductorCompanyLtdMember_F74C1D7D6F4613E2A7C2F54BDE591208" xlink:to="lab_asys_KingstoneSemiconductorCompanyLtdMember_F74C1D7D6F4613E2A7C2F54BDE591208" xlink:type="arc" />
    <link:label id="lab_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_5A3C07E9C1B9C0BBD6B7F54BDE594D9A_terseLabel_en-US" xlink:label="lab_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_5A3C07E9C1B9C0BBD6B7F54BDE594D9A" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Schedule of Equity Method Investments [Line Items]</link:label>
    <link:label id="lab_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_5A3C07E9C1B9C0BBD6B7F54BDE594D9A_label_en-US" xlink:label="lab_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_5A3C07E9C1B9C0BBD6B7F54BDE594D9A" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Schedule of Equity Method Investments [Line Items]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfEquityMethodInvestmentsLineItems" xlink:label="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_5A3C07E9C1B9C0BBD6B7F54BDE594D9A" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_5A3C07E9C1B9C0BBD6B7F54BDE594D9A" xlink:to="lab_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_5A3C07E9C1B9C0BBD6B7F54BDE594D9A" xlink:type="arc" />
    <link:label id="lab_us-gaap_PurchaseObligation_09A04647E8C8A2D414DBF54BDE595979_terseLabel_en-US" xlink:label="lab_us-gaap_PurchaseObligation_09A04647E8C8A2D414DBF54BDE595979" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Purchase obligation</link:label>
    <link:label id="lab_us-gaap_PurchaseObligation_09A04647E8C8A2D414DBF54BDE595979_label_en-US" xlink:label="lab_us-gaap_PurchaseObligation_09A04647E8C8A2D414DBF54BDE595979" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Purchase Obligation</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PurchaseObligation" xlink:label="loc_us-gaap_PurchaseObligation_09A04647E8C8A2D414DBF54BDE595979" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_PurchaseObligation_09A04647E8C8A2D414DBF54BDE595979" xlink:to="lab_us-gaap_PurchaseObligation_09A04647E8C8A2D414DBF54BDE595979" xlink:type="arc" />
    <link:label id="lab_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_2017E76A1F83D7610831F54BDE5A2931_terseLabel_en-US" xlink:label="lab_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_2017E76A1F83D7610831F54BDE5A2931" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Price of an ion implanter</link:label>
    <link:label id="lab_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_2017E76A1F83D7610831F54BDE5A2931_label_en-US" xlink:label="lab_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_2017E76A1F83D7610831F54BDE5A2931" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Payments to Acquire Property, Plant, and Equipment</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PaymentsToAcquirePropertyPlantAndEquipment" xlink:label="loc_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_2017E76A1F83D7610831F54BDE5A2931" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_2017E76A1F83D7610831F54BDE5A2931" xlink:to="lab_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_2017E76A1F83D7610831F54BDE5A2931" xlink:type="arc" />
    <link:label id="lab_asys_OwnershipRightsResultsofProjectsDevelopedSeparatelyByIndividualParties_E70074D9A7A248D753B4F54BDE5A47E2_terseLabel_en-US" xlink:label="lab_asys_OwnershipRightsResultsofProjectsDevelopedSeparatelyByIndividualParties_E70074D9A7A248D753B4F54BDE5A47E2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Ownership rights to results of projects developed separately by individual parties</link:label>
    <link:label id="lab_asys_OwnershipRightsResultsofProjectsDevelopedSeparatelyByIndividualParties_E70074D9A7A248D753B4F54BDE5A47E2_label_en-US" xlink:label="lab_asys_OwnershipRightsResultsofProjectsDevelopedSeparatelyByIndividualParties_E70074D9A7A248D753B4F54BDE5A47E2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Ownership Rights, Results of Projects Developed Separately By Individual Parties</link:label>
    <link:label id="lab_asys_OwnershipRightsResultsofProjectsDevelopedSeparatelyByIndividualParties_E70074D9A7A248D753B4F54BDE5A47E2_documentation_en-US" xlink:label="lab_asys_OwnershipRightsResultsofProjectsDevelopedSeparatelyByIndividualParties_E70074D9A7A248D753B4F54BDE5A47E2" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Ownership Rights, Results of Projects Developed Separately By Individual Parties</link:label>
    <link:loc xlink:href="asys-20150630.xsd#asys_OwnershipRightsResultsofProjectsDevelopedSeparatelyByIndividualParties" xlink:label="loc_asys_OwnershipRightsResultsofProjectsDevelopedSeparatelyByIndividualParties_E70074D9A7A248D753B4F54BDE5A47E2" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_OwnershipRightsResultsofProjectsDevelopedSeparatelyByIndividualParties_E70074D9A7A248D753B4F54BDE5A47E2" xlink:to="lab_asys_OwnershipRightsResultsofProjectsDevelopedSeparatelyByIndividualParties_E70074D9A7A248D753B4F54BDE5A47E2" xlink:type="arc" />
    <link:label id="lab_asys_ResearchandDevelopmentAgreementTerm_16B6697E9533893EC2DBF54BDE5A1083_terseLabel_en-US" xlink:label="lab_asys_ResearchandDevelopmentAgreementTerm_16B6697E9533893EC2DBF54BDE5A1083" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">R&amp;D Agreement term</link:label>
    <link:label id="lab_asys_ResearchandDevelopmentAgreementTerm_16B6697E9533893EC2DBF54BDE5A1083_label_en-US" xlink:label="lab_asys_ResearchandDevelopmentAgreementTerm_16B6697E9533893EC2DBF54BDE5A1083" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Research and Development Agreement Term</link:label>
    <link:label id="lab_asys_ResearchandDevelopmentAgreementTerm_16B6697E9533893EC2DBF54BDE5A1083_documentation_en-US" xlink:label="lab_asys_ResearchandDevelopmentAgreementTerm_16B6697E9533893EC2DBF54BDE5A1083" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Research and Development Agreement Term</link:label>
    <link:loc xlink:href="asys-20150630.xsd#asys_ResearchandDevelopmentAgreementTerm" xlink:label="loc_asys_ResearchandDevelopmentAgreementTerm_16B6697E9533893EC2DBF54BDE5A1083" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_ResearchandDevelopmentAgreementTerm_16B6697E9533893EC2DBF54BDE5A1083" xlink:to="lab_asys_ResearchandDevelopmentAgreementTerm_16B6697E9533893EC2DBF54BDE5A1083" xlink:type="arc" />
    <link:label id="lab_asys_ResearchandDevelopmentRequiredContributionLaborandAssets_19D2D663EF74ABBFCB76F54BDE5AA5B3_terseLabel_en-US" xlink:label="lab_asys_ResearchandDevelopmentRequiredContributionLaborandAssets_19D2D663EF74ABBFCB76F54BDE5AA5B3" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Required contribution in form of labor and assets</link:label>
    <link:label id="lab_asys_ResearchandDevelopmentRequiredContributionLaborandAssets_19D2D663EF74ABBFCB76F54BDE5AA5B3_label_en-US" xlink:label="lab_asys_ResearchandDevelopmentRequiredContributionLaborandAssets_19D2D663EF74ABBFCB76F54BDE5AA5B3" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Research and Development, Required Contribution, Labor and Assets</link:label>
    <link:label id="lab_asys_ResearchandDevelopmentRequiredContributionLaborandAssets_19D2D663EF74ABBFCB76F54BDE5AA5B3_documentation_en-US" xlink:label="lab_asys_ResearchandDevelopmentRequiredContributionLaborandAssets_19D2D663EF74ABBFCB76F54BDE5AA5B3" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Research and Development, Required Contribution, Labor and Assets</link:label>
    <link:loc xlink:href="asys-20150630.xsd#asys_ResearchandDevelopmentRequiredContributionLaborandAssets" xlink:label="loc_asys_ResearchandDevelopmentRequiredContributionLaborandAssets_19D2D663EF74ABBFCB76F54BDE5AA5B3" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_ResearchandDevelopmentRequiredContributionLaborandAssets_19D2D663EF74ABBFCB76F54BDE5AA5B3" xlink:to="lab_asys_ResearchandDevelopmentRequiredContributionLaborandAssets_19D2D663EF74ABBFCB76F54BDE5AA5B3" xlink:type="arc" />
    <link:label id="lab_asys_ResearchandDevelopmentPeriodRequiredforEquipmentRepairsandMaintenance_BA0B6DA3526C4D27E571F54BDE5A1E43_terseLabel_en-US" xlink:label="lab_asys_ResearchandDevelopmentPeriodRequiredforEquipmentRepairsandMaintenance_BA0B6DA3526C4D27E571F54BDE5A1E43" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Number of years from agreement start for contribution for project support</link:label>
    <link:label id="lab_asys_ResearchandDevelopmentPeriodRequiredforEquipmentRepairsandMaintenance_BA0B6DA3526C4D27E571F54BDE5A1E43_label_en-US" xlink:label="lab_asys_ResearchandDevelopmentPeriodRequiredforEquipmentRepairsandMaintenance_BA0B6DA3526C4D27E571F54BDE5A1E43" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Research and Development, Period Required for Equipment Repairs and Maintenance</link:label>
    <link:label id="lab_asys_ResearchandDevelopmentPeriodRequiredforEquipmentRepairsandMaintenance_BA0B6DA3526C4D27E571F54BDE5A1E43_documentation_en-US" xlink:label="lab_asys_ResearchandDevelopmentPeriodRequiredforEquipmentRepairsandMaintenance_BA0B6DA3526C4D27E571F54BDE5A1E43" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Research and Development, Period Required for Equipment Repairs and Maintenance</link:label>
    <link:loc xlink:href="asys-20150630.xsd#asys_ResearchandDevelopmentPeriodRequiredforEquipmentRepairsandMaintenance" xlink:label="loc_asys_ResearchandDevelopmentPeriodRequiredforEquipmentRepairsandMaintenance_BA0B6DA3526C4D27E571F54BDE5A1E43" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_ResearchandDevelopmentPeriodRequiredforEquipmentRepairsandMaintenance_BA0B6DA3526C4D27E571F54BDE5A1E43" xlink:to="lab_asys_ResearchandDevelopmentPeriodRequiredforEquipmentRepairsandMaintenance_BA0B6DA3526C4D27E571F54BDE5A1E43" xlink:type="arc" />
    <link:label id="lab_us-gaap_RevenueFromGrants_CC163DFEB8FBC15FBDC9F54BDE5A7CDA_terseLabel_en-US" xlink:label="lab_us-gaap_RevenueFromGrants_CC163DFEB8FBC15FBDC9F54BDE5A7CDA" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Revenue from Grants</link:label>
    <link:label id="lab_us-gaap_RevenueFromGrants_CC163DFEB8FBC15FBDC9F54BDE5A7CDA_label_en-US" xlink:label="lab_us-gaap_RevenueFromGrants_CC163DFEB8FBC15FBDC9F54BDE5A7CDA" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Revenue from Grants</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RevenueFromGrants" xlink:label="loc_us-gaap_RevenueFromGrants_CC163DFEB8FBC15FBDC9F54BDE5A7CDA" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_RevenueFromGrants_CC163DFEB8FBC15FBDC9F54BDE5A7CDA" xlink:to="lab_us-gaap_RevenueFromGrants_CC163DFEB8FBC15FBDC9F54BDE5A7CDA" xlink:type="arc" />
    <link:label id="lab_asys_GrantRevenueCommitmenttoProject_36B9D3056832A3B56A79F54BDE5A5E3A_terseLabel_en-US" xlink:label="lab_asys_GrantRevenueCommitmenttoProject_36B9D3056832A3B56A79F54BDE5A5E3A" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Grant revenue commitment to the project</link:label>
    <link:label id="lab_asys_GrantRevenueCommitmenttoProject_36B9D3056832A3B56A79F54BDE5A5E3A_label_en-US" xlink:label="lab_asys_GrantRevenueCommitmenttoProject_36B9D3056832A3B56A79F54BDE5A5E3A" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Grant Revenue Commitment to Project</link:label>
    <link:label id="lab_asys_GrantRevenueCommitmenttoProject_36B9D3056832A3B56A79F54BDE5A5E3A_documentation_en-US" xlink:label="lab_asys_GrantRevenueCommitmenttoProject_36B9D3056832A3B56A79F54BDE5A5E3A" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Grant Revenue Commitment to Project</link:label>
    <link:loc xlink:href="asys-20150630.xsd#asys_GrantRevenueCommitmenttoProject" xlink:label="loc_asys_GrantRevenueCommitmenttoProject_36B9D3056832A3B56A79F54BDE5A5E3A" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_GrantRevenueCommitmenttoProject_36B9D3056832A3B56A79F54BDE5A5E3A" xlink:to="lab_asys_GrantRevenueCommitmenttoProject_36B9D3056832A3B56A79F54BDE5A5E3A" xlink:type="arc" />
    <link:label id="lab_us-gaap_EquityMethodInvestmentOwnershipPercentage_4D3DC957697117992F91F54BDE5A32DE_terseLabel_en-US" xlink:label="lab_us-gaap_EquityMethodInvestmentOwnershipPercentage_4D3DC957697117992F91F54BDE5A32DE" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Equity method investment, ownership percentage</link:label>
    <link:label id="lab_us-gaap_EquityMethodInvestmentOwnershipPercentage_4D3DC957697117992F91F54BDE5A32DE_label_en-US" xlink:label="lab_us-gaap_EquityMethodInvestmentOwnershipPercentage_4D3DC957697117992F91F54BDE5A32DE" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Equity Method Investment, Ownership Percentage</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EquityMethodInvestmentOwnershipPercentage" xlink:label="loc_us-gaap_EquityMethodInvestmentOwnershipPercentage_4D3DC957697117992F91F54BDE5A32DE" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_EquityMethodInvestmentOwnershipPercentage_4D3DC957697117992F91F54BDE5A32DE" xlink:to="lab_us-gaap_EquityMethodInvestmentOwnershipPercentage_4D3DC957697117992F91F54BDE5A32DE" xlink:type="arc" />
    <link:label id="lab_asys_PercentageofVotingInterestofAcquireeOwnedSubsidiary_A4EC31DD60D2C2B81009F54BDE5A3306_terseLabel_en-US" xlink:label="lab_asys_PercentageofVotingInterestofAcquireeOwnedSubsidiary_A4EC31DD60D2C2B81009F54BDE5A3306" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Percentage of voting interest of acquiree owned subsidiary</link:label>
    <link:label id="lab_asys_PercentageofVotingInterestofAcquireeOwnedSubsidiary_A4EC31DD60D2C2B81009F54BDE5A3306_label_en-US" xlink:label="lab_asys_PercentageofVotingInterestofAcquireeOwnedSubsidiary_A4EC31DD60D2C2B81009F54BDE5A3306" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Percentage of Voting Interest of Acquiree Owned Subsidiary</link:label>
    <link:label id="lab_asys_PercentageofVotingInterestofAcquireeOwnedSubsidiary_A4EC31DD60D2C2B81009F54BDE5A3306_documentation_en-US" xlink:label="lab_asys_PercentageofVotingInterestofAcquireeOwnedSubsidiary_A4EC31DD60D2C2B81009F54BDE5A3306" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Percentage of Voting Interest of Acquiree Owned Subsidiary</link:label>
    <link:loc xlink:href="asys-20150630.xsd#asys_PercentageofVotingInterestofAcquireeOwnedSubsidiary" xlink:label="loc_asys_PercentageofVotingInterestofAcquireeOwnedSubsidiary_A4EC31DD60D2C2B81009F54BDE5A3306" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_PercentageofVotingInterestofAcquireeOwnedSubsidiary_A4EC31DD60D2C2B81009F54BDE5A3306" xlink:to="lab_asys_PercentageofVotingInterestofAcquireeOwnedSubsidiary_A4EC31DD60D2C2B81009F54BDE5A3306" xlink:type="arc" />
    <link:label id="lab_us-gaap_LossContingencyAccrualAtCarryingValue_384AABB82F230797F9F4F54BDE5A7A8D_terseLabel_en-US" xlink:label="lab_us-gaap_LossContingencyAccrualAtCarryingValue_384AABB82F230797F9F4F54BDE5A7A8D" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Loss contingency accrual</link:label>
    <link:label id="lab_us-gaap_LossContingencyAccrualAtCarryingValue_384AABB82F230797F9F4F54BDE5A7A8D_label_en-US" xlink:label="lab_us-gaap_LossContingencyAccrualAtCarryingValue_384AABB82F230797F9F4F54BDE5A7A8D" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Loss Contingency Accrual</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LossContingencyAccrualAtCarryingValue" xlink:label="loc_us-gaap_LossContingencyAccrualAtCarryingValue_384AABB82F230797F9F4F54BDE5A7A8D" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_LossContingencyAccrualAtCarryingValue_384AABB82F230797F9F4F54BDE5A7A8D" xlink:to="lab_us-gaap_LossContingencyAccrualAtCarryingValue_384AABB82F230797F9F4F54BDE5A7A8D" xlink:type="arc" />
    <link:label id="lab_us-gaap_LettersOfCreditOutstandingAmount_260B67A92F4D79147715F54BDE5AC605_terseLabel_en-US" xlink:label="lab_us-gaap_LettersOfCreditOutstandingAmount_260B67A92F4D79147715F54BDE5AC605" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Letter of credit</link:label>
    <link:label id="lab_us-gaap_LettersOfCreditOutstandingAmount_260B67A92F4D79147715F54BDE5AC605_label_en-US" xlink:label="lab_us-gaap_LettersOfCreditOutstandingAmount_260B67A92F4D79147715F54BDE5AC605" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Letters of Credit Outstanding, Amount</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LettersOfCreditOutstandingAmount" xlink:label="loc_us-gaap_LettersOfCreditOutstandingAmount_260B67A92F4D79147715F54BDE5AC605" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_LettersOfCreditOutstandingAmount_260B67A92F4D79147715F54BDE5AC605" xlink:to="lab_us-gaap_LettersOfCreditOutstandingAmount_260B67A92F4D79147715F54BDE5AC605" xlink:type="arc" />
    <link:label id="lab_us-gaap_BusinessCombinationsAbstract_4E889B29250F7991B0A3F541EE18B2A1_label_en-US" xlink:label="lab_us-gaap_BusinessCombinationsAbstract_4E889B29250F7991B0A3F541EE18B2A1" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Business Combinations [Abstract]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessCombinationsAbstract" xlink:label="loc_us-gaap_BusinessCombinationsAbstract_4E889B29250F7991B0A3F541EE18B2A1" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_BusinessCombinationsAbstract_4E889B29250F7991B0A3F541EE18B2A1" xlink:to="lab_us-gaap_BusinessCombinationsAbstract_4E889B29250F7991B0A3F541EE18B2A1" xlink:type="arc" />
    <link:label id="lab_us-gaap_ScheduleOfBusinessAcquisitionsByAcquisitionTable_43FA899F87A97EEFCD1BF541EE1882D8_terseLabel_en-US" xlink:label="lab_us-gaap_ScheduleOfBusinessAcquisitionsByAcquisitionTable_43FA899F87A97EEFCD1BF541EE1882D8" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Schedule of Business Acquisitions, by Acquisition [Table]</link:label>
    <link:label id="lab_us-gaap_ScheduleOfBusinessAcquisitionsByAcquisitionTable_43FA899F87A97EEFCD1BF541EE1882D8_label_en-US" xlink:label="lab_us-gaap_ScheduleOfBusinessAcquisitionsByAcquisitionTable_43FA899F87A97EEFCD1BF541EE1882D8" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Schedule of Business Acquisitions, by Acquisition [Table]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfBusinessAcquisitionsByAcquisitionTable" xlink:label="loc_us-gaap_ScheduleOfBusinessAcquisitionsByAcquisitionTable_43FA899F87A97EEFCD1BF541EE1882D8" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ScheduleOfBusinessAcquisitionsByAcquisitionTable_43FA899F87A97EEFCD1BF541EE1882D8" xlink:to="lab_us-gaap_ScheduleOfBusinessAcquisitionsByAcquisitionTable_43FA899F87A97EEFCD1BF541EE1882D8" xlink:type="arc" />
    <link:label id="lab_us-gaap_BusinessAcquisitionLineItems_2725A8BBEE396AC67D31F541EE187F81_terseLabel_en-US" xlink:label="lab_us-gaap_BusinessAcquisitionLineItems_2725A8BBEE396AC67D31F541EE187F81" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Business Acquisition [Line Items]</link:label>
    <link:label id="lab_us-gaap_BusinessAcquisitionLineItems_2725A8BBEE396AC67D31F541EE187F81_label_en-US" xlink:label="lab_us-gaap_BusinessAcquisitionLineItems_2725A8BBEE396AC67D31F541EE187F81" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Business Acquisition [Line Items]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionLineItems" xlink:label="loc_us-gaap_BusinessAcquisitionLineItems_2725A8BBEE396AC67D31F541EE187F81" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_BusinessAcquisitionLineItems_2725A8BBEE396AC67D31F541EE187F81" xlink:to="lab_us-gaap_BusinessAcquisitionLineItems_2725A8BBEE396AC67D31F541EE187F81" xlink:type="arc" />
    <link:label id="lab_us-gaap_BusinessAcquisitionsProFormaRevenue_777D9D13DEE5D0A0A4F4F541EE187E07_terseLabel_en-US" xlink:label="lab_us-gaap_BusinessAcquisitionsProFormaRevenue_777D9D13DEE5D0A0A4F4F541EE187E07" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Revenue, net</link:label>
    <link:label id="lab_us-gaap_BusinessAcquisitionsProFormaRevenue_777D9D13DEE5D0A0A4F4F541EE187E07_label_en-US" xlink:label="lab_us-gaap_BusinessAcquisitionsProFormaRevenue_777D9D13DEE5D0A0A4F4F541EE187E07" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Business Acquisition, Pro Forma Revenue</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionsProFormaRevenue" xlink:label="loc_us-gaap_BusinessAcquisitionsProFormaRevenue_777D9D13DEE5D0A0A4F4F541EE187E07" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_BusinessAcquisitionsProFormaRevenue_777D9D13DEE5D0A0A4F4F541EE187E07" xlink:to="lab_us-gaap_BusinessAcquisitionsProFormaRevenue_777D9D13DEE5D0A0A4F4F541EE187E07" xlink:type="arc" />
    <link:label id="lab_us-gaap_BusinessAcquisitionsProFormaNetIncomeLoss_57CE8F86850F0E399B72F541EE198C92_terseLabel_en-US" xlink:label="lab_us-gaap_BusinessAcquisitionsProFormaNetIncomeLoss_57CE8F86850F0E399B72F541EE198C92" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Net loss</link:label>
    <link:label id="lab_us-gaap_BusinessAcquisitionsProFormaNetIncomeLoss_57CE8F86850F0E399B72F541EE198C92_label_en-US" xlink:label="lab_us-gaap_BusinessAcquisitionsProFormaNetIncomeLoss_57CE8F86850F0E399B72F541EE198C92" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Business Acquisition, Pro Forma Net Income (Loss)</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionsProFormaNetIncomeLoss" xlink:label="loc_us-gaap_BusinessAcquisitionsProFormaNetIncomeLoss_57CE8F86850F0E399B72F541EE198C92" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_BusinessAcquisitionsProFormaNetIncomeLoss_57CE8F86850F0E399B72F541EE198C92" xlink:to="lab_us-gaap_BusinessAcquisitionsProFormaNetIncomeLoss_57CE8F86850F0E399B72F541EE198C92" xlink:type="arc" />
    <link:label id="lab_us-gaap_BusinessAcquisitionProFormaEarningsPerShareBasic_5C4A1CBEA4308C557925F541EE1956CE_terseLabel_en-US" xlink:label="lab_us-gaap_BusinessAcquisitionProFormaEarningsPerShareBasic_5C4A1CBEA4308C557925F541EE1956CE" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Basic (in dollars per share)</link:label>
    <link:label id="lab_us-gaap_BusinessAcquisitionProFormaEarningsPerShareBasic_5C4A1CBEA4308C557925F541EE1956CE_label_en-US" xlink:label="lab_us-gaap_BusinessAcquisitionProFormaEarningsPerShareBasic_5C4A1CBEA4308C557925F541EE1956CE" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Business Acquisition, Pro Forma Earnings Per Share, Basic</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionProFormaEarningsPerShareBasic" xlink:label="loc_us-gaap_BusinessAcquisitionProFormaEarningsPerShareBasic_5C4A1CBEA4308C557925F541EE1956CE" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_BusinessAcquisitionProFormaEarningsPerShareBasic_5C4A1CBEA4308C557925F541EE1956CE" xlink:to="lab_us-gaap_BusinessAcquisitionProFormaEarningsPerShareBasic_5C4A1CBEA4308C557925F541EE1956CE" xlink:type="arc" />
    <link:label id="lab_us-gaap_BusinessAcquisitionProFormaEarningsPerShareDiluted_DDBE59F57DB11F2F0B5EF541EE191417_terseLabel_en-US" xlink:label="lab_us-gaap_BusinessAcquisitionProFormaEarningsPerShareDiluted_DDBE59F57DB11F2F0B5EF541EE191417" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Diluted (in dollars per share)</link:label>
    <link:label id="lab_us-gaap_BusinessAcquisitionProFormaEarningsPerShareDiluted_DDBE59F57DB11F2F0B5EF541EE191417_label_en-US" xlink:label="lab_us-gaap_BusinessAcquisitionProFormaEarningsPerShareDiluted_DDBE59F57DB11F2F0B5EF541EE191417" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Business Acquisition, Pro Forma Earnings Per Share, Diluted</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionProFormaEarningsPerShareDiluted" xlink:label="loc_us-gaap_BusinessAcquisitionProFormaEarningsPerShareDiluted_DDBE59F57DB11F2F0B5EF541EE191417" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_BusinessAcquisitionProFormaEarningsPerShareDiluted_DDBE59F57DB11F2F0B5EF541EE191417" xlink:to="lab_us-gaap_BusinessAcquisitionProFormaEarningsPerShareDiluted_DDBE59F57DB11F2F0B5EF541EE191417" xlink:type="arc" />
    <link:label id="lab_us-gaap_StatementOfCashFlowsAbstract_736E2F04BA6BB8208F7CF54B796CF6C9_label_en-US" xlink:label="lab_us-gaap_StatementOfCashFlowsAbstract_736E2F04BA6BB8208F7CF54B796CF6C9" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Statement of Cash Flows [Abstract]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StatementOfCashFlowsAbstract" xlink:label="loc_us-gaap_StatementOfCashFlowsAbstract_736E2F04BA6BB8208F7CF54B796CF6C9" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_StatementOfCashFlowsAbstract_736E2F04BA6BB8208F7CF54B796CF6C9" xlink:to="lab_us-gaap_StatementOfCashFlowsAbstract_736E2F04BA6BB8208F7CF54B796CF6C9" xlink:type="arc" />
    <link:label id="lab_us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract_1DD1E33F38B700A45F4EF54B796DB4C5_terseLabel_en-US" xlink:label="lab_us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract_1DD1E33F38B700A45F4EF54B796DB4C5" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Operating Activities</link:label>
    <link:label id="lab_us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract_1DD1E33F38B700A45F4EF54B796DB4C5_label_en-US" xlink:label="lab_us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract_1DD1E33F38B700A45F4EF54B796DB4C5" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Net Cash Provided by (Used in) Operating Activities [Abstract]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract" xlink:label="loc_us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract_1DD1E33F38B700A45F4EF54B796DB4C5" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract_1DD1E33F38B700A45F4EF54B796DB4C5" xlink:to="lab_us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract_1DD1E33F38B700A45F4EF54B796DB4C5" xlink:type="arc" />
    <link:label id="lab_us-gaap_ProfitLoss_8FDE2D9B426A84F85179F54B796DA16C_verboseLabel_en-US" xlink:label="lab_us-gaap_ProfitLoss_8FDE2D9B426A84F85179F54B796DA16C" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:type="resource" xml:lang="en-US">Net loss</link:label>
    <link:label id="lab_us-gaap_ProfitLoss_8FDE2D9B426A84F85179F54B796DA16C_label_en-US" xlink:label="lab_us-gaap_ProfitLoss_8FDE2D9B426A84F85179F54B796DA16C" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Net Income (Loss), Including Portion Attributable to Noncontrolling Interest</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProfitLoss" xlink:label="loc_us-gaap_ProfitLoss_8FDE2D9B426A84F85179F54B796DA16C" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ProfitLoss_8FDE2D9B426A84F85179F54B796DA16C" xlink:to="lab_us-gaap_ProfitLoss_8FDE2D9B426A84F85179F54B796DA16C" xlink:type="arc" />
    <link:label id="lab_us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_55292F85DAE1FB1E7B37F54B796DE15F_terseLabel_en-US" xlink:label="lab_us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_55292F85DAE1FB1E7B37F54B796DE15F" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Adjustments to reconcile net loss to net cash provided by (used in) operating activities:</link:label>
    <link:label id="lab_us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_55292F85DAE1FB1E7B37F54B796DE15F_label_en-US" xlink:label="lab_us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_55292F85DAE1FB1E7B37F54B796DE15F" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Adjustments to Reconcile Net Income (Loss) to Cash Provided by (Used in) Operating Activities [Abstract]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract" xlink:label="loc_us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_55292F85DAE1FB1E7B37F54B796DE15F" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_55292F85DAE1FB1E7B37F54B796DE15F" xlink:to="lab_us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_55292F85DAE1FB1E7B37F54B796DE15F" xlink:type="arc" />
    <link:label id="lab_us-gaap_DepreciationDepletionAndAmortization_4C1B6B1CA9C49BCDDE70F54B796DA70D_terseLabel_en-US" xlink:label="lab_us-gaap_DepreciationDepletionAndAmortization_4C1B6B1CA9C49BCDDE70F54B796DA70D" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Depreciation and amortization</link:label>
    <link:label id="lab_us-gaap_DepreciationDepletionAndAmortization_4C1B6B1CA9C49BCDDE70F54B796DA70D_label_en-US" xlink:label="lab_us-gaap_DepreciationDepletionAndAmortization_4C1B6B1CA9C49BCDDE70F54B796DA70D" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Depreciation, Depletion and Amortization</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DepreciationDepletionAndAmortization" xlink:label="loc_us-gaap_DepreciationDepletionAndAmortization_4C1B6B1CA9C49BCDDE70F54B796DA70D" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_DepreciationDepletionAndAmortization_4C1B6B1CA9C49BCDDE70F54B796DA70D" xlink:to="lab_us-gaap_DepreciationDepletionAndAmortization_4C1B6B1CA9C49BCDDE70F54B796DA70D" xlink:type="arc" />
    <link:label id="lab_us-gaap_InventoryWriteDown_7DEB842A02DB503523D5F54B796D3280_terseLabel_en-US" xlink:label="lab_us-gaap_InventoryWriteDown_7DEB842A02DB503523D5F54B796D3280" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Write-down of inventory</link:label>
    <link:label id="lab_us-gaap_InventoryWriteDown_7DEB842A02DB503523D5F54B796D3280_label_en-US" xlink:label="lab_us-gaap_InventoryWriteDown_7DEB842A02DB503523D5F54B796D3280" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Inventory Write-down</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_InventoryWriteDown" xlink:label="loc_us-gaap_InventoryWriteDown_7DEB842A02DB503523D5F54B796D3280" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_InventoryWriteDown_7DEB842A02DB503523D5F54B796D3280" xlink:to="lab_us-gaap_InventoryWriteDown_7DEB842A02DB503523D5F54B796D3280" xlink:type="arc" />
    <link:label id="lab_us-gaap_IncreaseDecreaseInDeferredIncomeTaxes_45B1491F84F0F6649146F54B796D9EEA_negatedLabel_en-US" xlink:label="lab_us-gaap_IncreaseDecreaseInDeferredIncomeTaxes_45B1491F84F0F6649146F54B796D9EEA" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:type="resource" xml:lang="en-US">Deferred income taxes</link:label>
    <link:label id="lab_us-gaap_IncreaseDecreaseInDeferredIncomeTaxes_45B1491F84F0F6649146F54B796D9EEA_label_en-US" xlink:label="lab_us-gaap_IncreaseDecreaseInDeferredIncomeTaxes_45B1491F84F0F6649146F54B796D9EEA" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Increase (Decrease) in Deferred Income Taxes</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncreaseDecreaseInDeferredIncomeTaxes" xlink:label="loc_us-gaap_IncreaseDecreaseInDeferredIncomeTaxes_45B1491F84F0F6649146F54B796D9EEA" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_IncreaseDecreaseInDeferredIncomeTaxes_45B1491F84F0F6649146F54B796D9EEA" xlink:to="lab_us-gaap_IncreaseDecreaseInDeferredIncomeTaxes_45B1491F84F0F6649146F54B796D9EEA" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensation_5DD8A0F919AFC92807EBF54B796DC942_terseLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensation_5DD8A0F919AFC92807EBF54B796DC942" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Non-cash share based compensation expense</link:label>
    <link:label id="lab_us-gaap_ShareBasedCompensation_5DD8A0F919AFC92807EBF54B796DC942_label_en-US" xlink:label="lab_us-gaap_ShareBasedCompensation_5DD8A0F919AFC92807EBF54B796DC942" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share-based Compensation</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensation" xlink:label="loc_us-gaap_ShareBasedCompensation_5DD8A0F919AFC92807EBF54B796DC942" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensation_5DD8A0F919AFC92807EBF54B796DC942" xlink:to="lab_us-gaap_ShareBasedCompensation_5DD8A0F919AFC92807EBF54B796DC942" xlink:type="arc" />
    <link:label id="lab_us-gaap_ProvisionForDoubtfulAccounts_82F844829C6DC98F9AB3F54B796EAFDE_terseLabel_en-US" xlink:label="lab_us-gaap_ProvisionForDoubtfulAccounts_82F844829C6DC98F9AB3F54B796EAFDE" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Provision for (reversal of) allowance for doubtful accounts</link:label>
    <link:label id="lab_us-gaap_ProvisionForDoubtfulAccounts_82F844829C6DC98F9AB3F54B796EAFDE_label_en-US" xlink:label="lab_us-gaap_ProvisionForDoubtfulAccounts_82F844829C6DC98F9AB3F54B796EAFDE" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Provision for Doubtful Accounts</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProvisionForDoubtfulAccounts" xlink:label="loc_us-gaap_ProvisionForDoubtfulAccounts_82F844829C6DC98F9AB3F54B796EAFDE" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ProvisionForDoubtfulAccounts_82F844829C6DC98F9AB3F54B796EAFDE" xlink:to="lab_us-gaap_ProvisionForDoubtfulAccounts_82F844829C6DC98F9AB3F54B796EAFDE" xlink:type="arc" />
    <link:label id="lab_us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_8C38B34DC7F8F8CA4A8AF54B796E055D_terseLabel_en-US" xlink:label="lab_us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_8C38B34DC7F8F8CA4A8AF54B796E055D" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Changes in operating assets and liabilities:</link:label>
    <link:label id="lab_us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_8C38B34DC7F8F8CA4A8AF54B796E055D_label_en-US" xlink:label="lab_us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_8C38B34DC7F8F8CA4A8AF54B796E055D" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Increase (Decrease) in Operating Capital [Abstract]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncreaseDecreaseInOperatingCapitalAbstract" xlink:label="loc_us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_8C38B34DC7F8F8CA4A8AF54B796E055D" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_8C38B34DC7F8F8CA4A8AF54B796E055D" xlink:to="lab_us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_8C38B34DC7F8F8CA4A8AF54B796E055D" xlink:type="arc" />
    <link:label id="lab_us-gaap_IncreaseDecreaseInRestrictedCashForOperatingActivities_46765E0E0AEFE2E9CA70F54B796E040F_negatedTerseLabel_en-US" xlink:label="lab_us-gaap_IncreaseDecreaseInRestrictedCashForOperatingActivities_46765E0E0AEFE2E9CA70F54B796E040F" xlink:role="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:type="resource" xml:lang="en-US">Restricted cash</link:label>
    <link:label id="lab_us-gaap_IncreaseDecreaseInRestrictedCashForOperatingActivities_46765E0E0AEFE2E9CA70F54B796E040F_label_en-US" xlink:label="lab_us-gaap_IncreaseDecreaseInRestrictedCashForOperatingActivities_46765E0E0AEFE2E9CA70F54B796E040F" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Increase (Decrease) in Restricted Cash for Operating Activities</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncreaseDecreaseInRestrictedCashForOperatingActivities" xlink:label="loc_us-gaap_IncreaseDecreaseInRestrictedCashForOperatingActivities_46765E0E0AEFE2E9CA70F54B796E040F" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_IncreaseDecreaseInRestrictedCashForOperatingActivities_46765E0E0AEFE2E9CA70F54B796E040F" xlink:to="lab_us-gaap_IncreaseDecreaseInRestrictedCashForOperatingActivities_46765E0E0AEFE2E9CA70F54B796E040F" xlink:type="arc" />
    <link:label id="lab_us-gaap_IncreaseDecreaseInAccountsReceivable_5B0069F141609898B76DF54B796E7193_negatedTerseLabel_en-US" xlink:label="lab_us-gaap_IncreaseDecreaseInAccountsReceivable_5B0069F141609898B76DF54B796E7193" xlink:role="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:type="resource" xml:lang="en-US">Accounts receivable</link:label>
    <link:label id="lab_us-gaap_IncreaseDecreaseInAccountsReceivable_5B0069F141609898B76DF54B796E7193_label_en-US" xlink:label="lab_us-gaap_IncreaseDecreaseInAccountsReceivable_5B0069F141609898B76DF54B796E7193" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Increase (Decrease) in Accounts Receivable</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncreaseDecreaseInAccountsReceivable" xlink:label="loc_us-gaap_IncreaseDecreaseInAccountsReceivable_5B0069F141609898B76DF54B796E7193" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_IncreaseDecreaseInAccountsReceivable_5B0069F141609898B76DF54B796E7193" xlink:to="lab_us-gaap_IncreaseDecreaseInAccountsReceivable_5B0069F141609898B76DF54B796E7193" xlink:type="arc" />
    <link:label id="lab_us-gaap_IncreaseDecreaseInInventories_AC64FAC81EA867B87C5DF54B796E0E36_negatedTerseLabel_en-US" xlink:label="lab_us-gaap_IncreaseDecreaseInInventories_AC64FAC81EA867B87C5DF54B796E0E36" xlink:role="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:type="resource" xml:lang="en-US">Inventories</link:label>
    <link:label id="lab_us-gaap_IncreaseDecreaseInInventories_AC64FAC81EA867B87C5DF54B796E0E36_label_en-US" xlink:label="lab_us-gaap_IncreaseDecreaseInInventories_AC64FAC81EA867B87C5DF54B796E0E36" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Increase (Decrease) in Inventories</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncreaseDecreaseInInventories" xlink:label="loc_us-gaap_IncreaseDecreaseInInventories_AC64FAC81EA867B87C5DF54B796E0E36" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_IncreaseDecreaseInInventories_AC64FAC81EA867B87C5DF54B796E0E36" xlink:to="lab_us-gaap_IncreaseDecreaseInInventories_AC64FAC81EA867B87C5DF54B796E0E36" xlink:type="arc" />
    <link:label id="lab_us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable_0ECCA0B7CEB2EB466F8EF54B796E3F7E_terseLabel_en-US" xlink:label="lab_us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable_0ECCA0B7CEB2EB466F8EF54B796E3F7E" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Income taxes refundable and payable, net</link:label>
    <link:label id="lab_us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable_0ECCA0B7CEB2EB466F8EF54B796E3F7E_label_en-US" xlink:label="lab_us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable_0ECCA0B7CEB2EB466F8EF54B796E3F7E" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Increase (Decrease) in Income Taxes Payable</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable" xlink:label="loc_us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable_0ECCA0B7CEB2EB466F8EF54B796E3F7E" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable_0ECCA0B7CEB2EB466F8EF54B796E3F7E" xlink:to="lab_us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable_0ECCA0B7CEB2EB466F8EF54B796E3F7E" xlink:type="arc" />
    <link:label id="lab_us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets_DA845B5C0465FA0DE20DF54B796E0A8D_negatedTerseLabel_en-US" xlink:label="lab_us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets_DA845B5C0465FA0DE20DF54B796E0A8D" xlink:role="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:type="resource" xml:lang="en-US">Prepaid expenses and other assets</link:label>
    <link:label id="lab_us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets_DA845B5C0465FA0DE20DF54B796E0A8D_label_en-US" xlink:label="lab_us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets_DA845B5C0465FA0DE20DF54B796E0A8D" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Increase (Decrease) in Prepaid Expense and Other Assets</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets" xlink:label="loc_us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets_DA845B5C0465FA0DE20DF54B796E0A8D" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets_DA845B5C0465FA0DE20DF54B796E0A8D" xlink:to="lab_us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets_DA845B5C0465FA0DE20DF54B796E0A8D" xlink:type="arc" />
    <link:label id="lab_us-gaap_IncreaseDecreaseInAccountsPayable_2E29712B16E0B7704E50F54B796E8D0F_terseLabel_en-US" xlink:label="lab_us-gaap_IncreaseDecreaseInAccountsPayable_2E29712B16E0B7704E50F54B796E8D0F" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Accounts payable</link:label>
    <link:label id="lab_us-gaap_IncreaseDecreaseInAccountsPayable_2E29712B16E0B7704E50F54B796E8D0F_label_en-US" xlink:label="lab_us-gaap_IncreaseDecreaseInAccountsPayable_2E29712B16E0B7704E50F54B796E8D0F" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Increase (Decrease) in Accounts Payable</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncreaseDecreaseInAccountsPayable" xlink:label="loc_us-gaap_IncreaseDecreaseInAccountsPayable_2E29712B16E0B7704E50F54B796E8D0F" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_IncreaseDecreaseInAccountsPayable_2E29712B16E0B7704E50F54B796E8D0F" xlink:to="lab_us-gaap_IncreaseDecreaseInAccountsPayable_2E29712B16E0B7704E50F54B796E8D0F" xlink:type="arc" />
    <link:label id="lab_asys_IncreaseDecreaseInAccruedLiabilitiesAndCustomerDeposits_F7684C671BC7D54FEBEAF54B796EFE5B_terseLabel_en-US" xlink:label="lab_asys_IncreaseDecreaseInAccruedLiabilitiesAndCustomerDeposits_F7684C671BC7D54FEBEAF54B796EFE5B" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Accrued liabilities and customer deposits</link:label>
    <link:label id="lab_asys_IncreaseDecreaseInAccruedLiabilitiesAndCustomerDeposits_F7684C671BC7D54FEBEAF54B796EFE5B_label_en-US" xlink:label="lab_asys_IncreaseDecreaseInAccruedLiabilitiesAndCustomerDeposits_F7684C671BC7D54FEBEAF54B796EFE5B" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Increase (Decrease) In Accrued Liabilities And Customer Deposits</link:label>
    <link:label id="lab_asys_IncreaseDecreaseInAccruedLiabilitiesAndCustomerDeposits_F7684C671BC7D54FEBEAF54B796EFE5B_documentation_en-US" xlink:label="lab_asys_IncreaseDecreaseInAccruedLiabilitiesAndCustomerDeposits_F7684C671BC7D54FEBEAF54B796EFE5B" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Increase (Decrease) In Accrued Liabilities And Customer Deposits</link:label>
    <link:loc xlink:href="asys-20150630.xsd#asys_IncreaseDecreaseInAccruedLiabilitiesAndCustomerDeposits" xlink:label="loc_asys_IncreaseDecreaseInAccruedLiabilitiesAndCustomerDeposits_F7684C671BC7D54FEBEAF54B796EFE5B" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_IncreaseDecreaseInAccruedLiabilitiesAndCustomerDeposits_F7684C671BC7D54FEBEAF54B796EFE5B" xlink:to="lab_asys_IncreaseDecreaseInAccruedLiabilitiesAndCustomerDeposits_F7684C671BC7D54FEBEAF54B796EFE5B" xlink:type="arc" />
    <link:label id="lab_asys_IncreaseDecreaseInDeferredProfit_7BF2ACED1120931E711CF54B796F6C12_terseLabel_en-US" xlink:label="lab_asys_IncreaseDecreaseInDeferredProfit_7BF2ACED1120931E711CF54B796F6C12" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Deferred profit</link:label>
    <link:label id="lab_asys_IncreaseDecreaseInDeferredProfit_7BF2ACED1120931E711CF54B796F6C12_label_en-US" xlink:label="lab_asys_IncreaseDecreaseInDeferredProfit_7BF2ACED1120931E711CF54B796F6C12" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Increase (Decrease) In Deferred Profit</link:label>
    <link:label id="lab_asys_IncreaseDecreaseInDeferredProfit_7BF2ACED1120931E711CF54B796F6C12_documentation_en-US" xlink:label="lab_asys_IncreaseDecreaseInDeferredProfit_7BF2ACED1120931E711CF54B796F6C12" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Increase (Decrease) In Deferred Profit</link:label>
    <link:loc xlink:href="asys-20150630.xsd#asys_IncreaseDecreaseInDeferredProfit" xlink:label="loc_asys_IncreaseDecreaseInDeferredProfit_7BF2ACED1120931E711CF54B796F6C12" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_IncreaseDecreaseInDeferredProfit_7BF2ACED1120931E711CF54B796F6C12" xlink:to="lab_asys_IncreaseDecreaseInDeferredProfit_7BF2ACED1120931E711CF54B796F6C12" xlink:type="arc" />
    <link:label id="lab_us-gaap_NetCashProvidedByUsedInOperatingActivities_4F83EE3B0CF4AEBD9E64F54B796F8B72_totalLabel_en-US" xlink:label="lab_us-gaap_NetCashProvidedByUsedInOperatingActivities_4F83EE3B0CF4AEBD9E64F54B796F8B72" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:type="resource" xml:lang="en-US">Net cash used in operating activities</link:label>
    <link:label id="lab_us-gaap_NetCashProvidedByUsedInOperatingActivities_4F83EE3B0CF4AEBD9E64F54B796F8B72_label_en-US" xlink:label="lab_us-gaap_NetCashProvidedByUsedInOperatingActivities_4F83EE3B0CF4AEBD9E64F54B796F8B72" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Net Cash Provided by (Used in) Operating Activities</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:label="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_4F83EE3B0CF4AEBD9E64F54B796F8B72" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_4F83EE3B0CF4AEBD9E64F54B796F8B72" xlink:to="lab_us-gaap_NetCashProvidedByUsedInOperatingActivities_4F83EE3B0CF4AEBD9E64F54B796F8B72" xlink:type="arc" />
    <link:label id="lab_us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract_1C00CECCD0469848F24BF54B796F9C8A_terseLabel_en-US" xlink:label="lab_us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract_1C00CECCD0469848F24BF54B796F9C8A" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Investing Activities</link:label>
    <link:label id="lab_us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract_1C00CECCD0469848F24BF54B796F9C8A_label_en-US" xlink:label="lab_us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract_1C00CECCD0469848F24BF54B796F9C8A" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Net Cash Provided by (Used in) Investing Activities [Abstract]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract" xlink:label="loc_us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract_1C00CECCD0469848F24BF54B796F9C8A" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract_1C00CECCD0469848F24BF54B796F9C8A" xlink:to="lab_us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract_1C00CECCD0469848F24BF54B796F9C8A" xlink:type="arc" />
    <link:label id="lab_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_63722D9E77C8AE85CA32F54B796F701F_negatedTerseLabel_en-US" xlink:label="lab_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_63722D9E77C8AE85CA32F54B796F701F" xlink:role="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:type="resource" xml:lang="en-US">Purchases of property, plant and equipment</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PaymentsToAcquirePropertyPlantAndEquipment" xlink:label="loc_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_63722D9E77C8AE85CA32F54B796F701F" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_63722D9E77C8AE85CA32F54B796F701F" xlink:to="lab_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_63722D9E77C8AE85CA32F54B796F701F" xlink:type="arc" />
    <link:label id="lab_us-gaap_CashAcquiredInExcessOfPaymentsToAcquireBusiness_22B2E2B409ADA1F46090F54B796F339F_terseLabel_en-US" xlink:label="lab_us-gaap_CashAcquiredInExcessOfPaymentsToAcquireBusiness_22B2E2B409ADA1F46090F54B796F339F" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Net cash provided by (used in) investing activities</link:label>
    <link:label id="lab_us-gaap_CashAcquiredInExcessOfPaymentsToAcquireBusiness_22B2E2B409ADA1F46090F54B796F339F_label_en-US" xlink:label="lab_us-gaap_CashAcquiredInExcessOfPaymentsToAcquireBusiness_22B2E2B409ADA1F46090F54B796F339F" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Cash Acquired in Excess of Payments to Acquire Business</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CashAcquiredInExcessOfPaymentsToAcquireBusiness" xlink:label="loc_us-gaap_CashAcquiredInExcessOfPaymentsToAcquireBusiness_22B2E2B409ADA1F46090F54B796F339F" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_CashAcquiredInExcessOfPaymentsToAcquireBusiness_22B2E2B409ADA1F46090F54B796F339F" xlink:to="lab_us-gaap_CashAcquiredInExcessOfPaymentsToAcquireBusiness_22B2E2B409ADA1F46090F54B796F339F" xlink:type="arc" />
    <link:label id="lab_us-gaap_NetCashProvidedByUsedInInvestingActivities_ACFF6100747CADD89748F54B796F07EC_totalLabel_en-US" xlink:label="lab_us-gaap_NetCashProvidedByUsedInInvestingActivities_ACFF6100747CADD89748F54B796F07EC" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:type="resource" xml:lang="en-US">Net cash provided by (used in) investing activities</link:label>
    <link:label id="lab_us-gaap_NetCashProvidedByUsedInInvestingActivities_ACFF6100747CADD89748F54B796F07EC_label_en-US" xlink:label="lab_us-gaap_NetCashProvidedByUsedInInvestingActivities_ACFF6100747CADD89748F54B796F07EC" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Net Cash Provided by (Used in) Investing Activities</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NetCashProvidedByUsedInInvestingActivities" xlink:label="loc_us-gaap_NetCashProvidedByUsedInInvestingActivities_ACFF6100747CADD89748F54B796F07EC" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_NetCashProvidedByUsedInInvestingActivities_ACFF6100747CADD89748F54B796F07EC" xlink:to="lab_us-gaap_NetCashProvidedByUsedInInvestingActivities_ACFF6100747CADD89748F54B796F07EC" xlink:type="arc" />
    <link:label id="lab_us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_F117B2735420D1ACCCCFF54B796FA513_terseLabel_en-US" xlink:label="lab_us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_F117B2735420D1ACCCCFF54B796FA513" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Financing Activities</link:label>
    <link:label id="lab_us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_F117B2735420D1ACCCCFF54B796FA513_label_en-US" xlink:label="lab_us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_F117B2735420D1ACCCCFF54B796FA513" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Net Cash Provided by (Used in) Financing Activities [Abstract]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract" xlink:label="loc_us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_F117B2735420D1ACCCCFF54B796FA513" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_F117B2735420D1ACCCCFF54B796FA513" xlink:to="lab_us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_F117B2735420D1ACCCCFF54B796FA513" xlink:type="arc" />
    <link:label id="lab_us-gaap_ProceedsFromIssuanceOfCommonStock_C2A0E39C433B3ED73783F54B796F5020_terseLabel_en-US" xlink:label="lab_us-gaap_ProceedsFromIssuanceOfCommonStock_C2A0E39C433B3ED73783F54B796F5020" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Proceeds from the exercise of stock options</link:label>
    <link:label id="lab_us-gaap_ProceedsFromIssuanceOfCommonStock_C2A0E39C433B3ED73783F54B796F5020_label_en-US" xlink:label="lab_us-gaap_ProceedsFromIssuanceOfCommonStock_C2A0E39C433B3ED73783F54B796F5020" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Proceeds from Issuance of Common Stock</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProceedsFromIssuanceOfCommonStock" xlink:label="loc_us-gaap_ProceedsFromIssuanceOfCommonStock_C2A0E39C433B3ED73783F54B796F5020" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ProceedsFromIssuanceOfCommonStock_C2A0E39C433B3ED73783F54B796F5020" xlink:to="lab_us-gaap_ProceedsFromIssuanceOfCommonStock_C2A0E39C433B3ED73783F54B796F5020" xlink:type="arc" />
    <link:label id="lab_us-gaap_RepaymentsOfLongTermDebt_F0025D6FC6BA2D880253F54B796F4E8E_negatedTerseLabel_en-US" xlink:label="lab_us-gaap_RepaymentsOfLongTermDebt_F0025D6FC6BA2D880253F54B796F4E8E" xlink:role="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:type="resource" xml:lang="en-US">Payments on long-term debt</link:label>
    <link:label id="lab_us-gaap_RepaymentsOfLongTermDebt_F0025D6FC6BA2D880253F54B796F4E8E_label_en-US" xlink:label="lab_us-gaap_RepaymentsOfLongTermDebt_F0025D6FC6BA2D880253F54B796F4E8E" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Repayments of Long-term Debt</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RepaymentsOfLongTermDebt" xlink:label="loc_us-gaap_RepaymentsOfLongTermDebt_F0025D6FC6BA2D880253F54B796F4E8E" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_RepaymentsOfLongTermDebt_F0025D6FC6BA2D880253F54B796F4E8E" xlink:to="lab_us-gaap_RepaymentsOfLongTermDebt_F0025D6FC6BA2D880253F54B796F4E8E" xlink:type="arc" />
    <link:label id="lab_us-gaap_ProceedsFromIssuanceOfLongTermDebt_6F18C2964C00570E8435F54B796F9714_terseLabel_en-US" xlink:label="lab_us-gaap_ProceedsFromIssuanceOfLongTermDebt_6F18C2964C00570E8435F54B796F9714" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Borrowings on long-term debt</link:label>
    <link:label id="lab_us-gaap_ProceedsFromIssuanceOfLongTermDebt_6F18C2964C00570E8435F54B796F9714_label_en-US" xlink:label="lab_us-gaap_ProceedsFromIssuanceOfLongTermDebt_6F18C2964C00570E8435F54B796F9714" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Proceeds from Issuance of Long-term Debt</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProceedsFromIssuanceOfLongTermDebt" xlink:label="loc_us-gaap_ProceedsFromIssuanceOfLongTermDebt_6F18C2964C00570E8435F54B796F9714" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ProceedsFromIssuanceOfLongTermDebt_6F18C2964C00570E8435F54B796F9714" xlink:to="lab_us-gaap_ProceedsFromIssuanceOfLongTermDebt_6F18C2964C00570E8435F54B796F9714" xlink:type="arc" />
    <link:label id="lab_us-gaap_ExcessTaxBenefitFromShareBasedCompensationFinancingActivities_222F182B41A4BF752F52F54B797060C0_terseLabel_en-US" xlink:label="lab_us-gaap_ExcessTaxBenefitFromShareBasedCompensationFinancingActivities_222F182B41A4BF752F52F54B797060C0" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Excess tax benefit of stock options</link:label>
    <link:label id="lab_us-gaap_ExcessTaxBenefitFromShareBasedCompensationFinancingActivities_222F182B41A4BF752F52F54B797060C0_label_en-US" xlink:label="lab_us-gaap_ExcessTaxBenefitFromShareBasedCompensationFinancingActivities_222F182B41A4BF752F52F54B797060C0" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Excess Tax Benefit from Share-based Compensation, Financing Activities</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ExcessTaxBenefitFromShareBasedCompensationFinancingActivities" xlink:label="loc_us-gaap_ExcessTaxBenefitFromShareBasedCompensationFinancingActivities_222F182B41A4BF752F52F54B797060C0" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ExcessTaxBenefitFromShareBasedCompensationFinancingActivities_222F182B41A4BF752F52F54B797060C0" xlink:to="lab_us-gaap_ExcessTaxBenefitFromShareBasedCompensationFinancingActivities_222F182B41A4BF752F52F54B797060C0" xlink:type="arc" />
    <link:label id="lab_us-gaap_NetCashProvidedByUsedInFinancingActivities_5503B75427C51ADE0B74F54B79702623_totalLabel_en-US" xlink:label="lab_us-gaap_NetCashProvidedByUsedInFinancingActivities_5503B75427C51ADE0B74F54B79702623" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:type="resource" xml:lang="en-US">Net cash provided by financing activities</link:label>
    <link:label id="lab_us-gaap_NetCashProvidedByUsedInFinancingActivities_5503B75427C51ADE0B74F54B79702623_label_en-US" xlink:label="lab_us-gaap_NetCashProvidedByUsedInFinancingActivities_5503B75427C51ADE0B74F54B79702623" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Net Cash Provided by (Used in) Financing Activities</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NetCashProvidedByUsedInFinancingActivities" xlink:label="loc_us-gaap_NetCashProvidedByUsedInFinancingActivities_5503B75427C51ADE0B74F54B79702623" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_NetCashProvidedByUsedInFinancingActivities_5503B75427C51ADE0B74F54B79702623" xlink:to="lab_us-gaap_NetCashProvidedByUsedInFinancingActivities_5503B75427C51ADE0B74F54B79702623" xlink:type="arc" />
    <link:label id="lab_us-gaap_EffectOfExchangeRateOnCashAndCashEquivalents_1D863FC006CE2B80231BF54B79702D52_terseLabel_en-US" xlink:label="lab_us-gaap_EffectOfExchangeRateOnCashAndCashEquivalents_1D863FC006CE2B80231BF54B79702D52" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Effect of Exchange Rate Changes on Cash</link:label>
    <link:label id="lab_us-gaap_EffectOfExchangeRateOnCashAndCashEquivalents_1D863FC006CE2B80231BF54B79702D52_label_en-US" xlink:label="lab_us-gaap_EffectOfExchangeRateOnCashAndCashEquivalents_1D863FC006CE2B80231BF54B79702D52" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Effect of Exchange Rate on Cash and Cash Equivalents</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EffectOfExchangeRateOnCashAndCashEquivalents" xlink:label="loc_us-gaap_EffectOfExchangeRateOnCashAndCashEquivalents_1D863FC006CE2B80231BF54B79702D52" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_EffectOfExchangeRateOnCashAndCashEquivalents_1D863FC006CE2B80231BF54B79702D52" xlink:to="lab_us-gaap_EffectOfExchangeRateOnCashAndCashEquivalents_1D863FC006CE2B80231BF54B79702D52" xlink:type="arc" />
    <link:label id="lab_us-gaap_CashAndCashEquivalentsPeriodIncreaseDecrease_54509A5EE28517E2BD2BF54B7970CC37_totalLabel_en-US" xlink:label="lab_us-gaap_CashAndCashEquivalentsPeriodIncreaseDecrease_54509A5EE28517E2BD2BF54B7970CC37" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:type="resource" xml:lang="en-US">Net Decrease in Cash and Cash Equivalents</link:label>
    <link:label id="lab_us-gaap_CashAndCashEquivalentsPeriodIncreaseDecrease_54509A5EE28517E2BD2BF54B7970CC37_label_en-US" xlink:label="lab_us-gaap_CashAndCashEquivalentsPeriodIncreaseDecrease_54509A5EE28517E2BD2BF54B7970CC37" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Cash and Cash Equivalents, Period Increase (Decrease)</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CashAndCashEquivalentsPeriodIncreaseDecrease" xlink:label="loc_us-gaap_CashAndCashEquivalentsPeriodIncreaseDecrease_54509A5EE28517E2BD2BF54B7970CC37" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_CashAndCashEquivalentsPeriodIncreaseDecrease_54509A5EE28517E2BD2BF54B7970CC37" xlink:to="lab_us-gaap_CashAndCashEquivalentsPeriodIncreaseDecrease_54509A5EE28517E2BD2BF54B7970CC37" xlink:type="arc" />
    <link:label id="lab_us-gaap_CashAndCashEquivalentsAtCarryingValue_A4D11F6478F16461A524F54B79705BE5_periodStartLabel_en-US" xlink:label="lab_us-gaap_CashAndCashEquivalentsAtCarryingValue_A4D11F6478F16461A524F54B79705BE5" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel" xlink:type="resource" xml:lang="en-US">Cash and Cash Equivalents, Beginning of Period</link:label>
    <link:label id="lab_us-gaap_CashAndCashEquivalentsAtCarryingValue_A4D11F6478F16461A524F54B79705BE5_label_en-US" xlink:label="lab_us-gaap_CashAndCashEquivalentsAtCarryingValue_A4D11F6478F16461A524F54B79705BE5" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Cash and Cash Equivalents, at Carrying Value</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CashAndCashEquivalentsAtCarryingValue" xlink:label="loc_us-gaap_CashAndCashEquivalentsAtCarryingValue_A4D11F6478F16461A524F54B79705BE5" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_CashAndCashEquivalentsAtCarryingValue_A4D11F6478F16461A524F54B79705BE5" xlink:to="lab_us-gaap_CashAndCashEquivalentsAtCarryingValue_A4D11F6478F16461A524F54B79705BE5" xlink:type="arc" />
    <link:label id="lab_us-gaap_CashAndCashEquivalentsAtCarryingValue_E0C7C80B23383498C7ABF54B79700D6D_periodEndLabel_en-US" xlink:label="lab_us-gaap_CashAndCashEquivalentsAtCarryingValue_E0C7C80B23383498C7ABF54B79700D6D" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel" xlink:type="resource" xml:lang="en-US">Cash and Cash Equivalents, End of Period</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CashAndCashEquivalentsAtCarryingValue" xlink:label="loc_us-gaap_CashAndCashEquivalentsAtCarryingValue_E0C7C80B23383498C7ABF54B79700D6D" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_CashAndCashEquivalentsAtCarryingValue_E0C7C80B23383498C7ABF54B79700D6D" xlink:to="lab_us-gaap_CashAndCashEquivalentsAtCarryingValue_E0C7C80B23383498C7ABF54B79700D6D" xlink:type="arc" />
    <link:label id="lab_us-gaap_SupplementalCashFlowInformationAbstract_C546B7008265E1FF916EF54B7970A842_terseLabel_en-US" xlink:label="lab_us-gaap_SupplementalCashFlowInformationAbstract_C546B7008265E1FF916EF54B7970A842" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Supplemental Cash Flow Information:</link:label>
    <link:label id="lab_us-gaap_SupplementalCashFlowInformationAbstract_C546B7008265E1FF916EF54B7970A842_label_en-US" xlink:label="lab_us-gaap_SupplementalCashFlowInformationAbstract_C546B7008265E1FF916EF54B7970A842" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Supplemental Cash Flow Information [Abstract]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SupplementalCashFlowInformationAbstract" xlink:label="loc_us-gaap_SupplementalCashFlowInformationAbstract_C546B7008265E1FF916EF54B7970A842" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_SupplementalCashFlowInformationAbstract_C546B7008265E1FF916EF54B7970A842" xlink:to="lab_us-gaap_SupplementalCashFlowInformationAbstract_C546B7008265E1FF916EF54B7970A842" xlink:type="arc" />
    <link:label id="lab_us-gaap_ProceedsFromIncomeTaxRefunds_98A0458625363F66C62BF54B797181B6_terseLabel_en-US" xlink:label="lab_us-gaap_ProceedsFromIncomeTaxRefunds_98A0458625363F66C62BF54B797181B6" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Income tax refunds</link:label>
    <link:label id="lab_us-gaap_ProceedsFromIncomeTaxRefunds_98A0458625363F66C62BF54B797181B6_label_en-US" xlink:label="lab_us-gaap_ProceedsFromIncomeTaxRefunds_98A0458625363F66C62BF54B797181B6" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Proceeds from Income Tax Refunds</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProceedsFromIncomeTaxRefunds" xlink:label="loc_us-gaap_ProceedsFromIncomeTaxRefunds_98A0458625363F66C62BF54B797181B6" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ProceedsFromIncomeTaxRefunds_98A0458625363F66C62BF54B797181B6" xlink:to="lab_us-gaap_ProceedsFromIncomeTaxRefunds_98A0458625363F66C62BF54B797181B6" xlink:type="arc" />
    <link:label id="lab_us-gaap_IncomeTaxesPaid_A1F1EB71D40ED70342FBF54BE95D7802_terseLabel_en-US" xlink:label="lab_us-gaap_IncomeTaxesPaid_A1F1EB71D40ED70342FBF54BE95D7802" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Income tax payments</link:label>
    <link:label id="lab_us-gaap_IncomeTaxesPaid_A1F1EB71D40ED70342FBF54BE95D7802_label_en-US" xlink:label="lab_us-gaap_IncomeTaxesPaid_A1F1EB71D40ED70342FBF54BE95D7802" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Income Taxes Paid</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncomeTaxesPaid" xlink:label="loc_us-gaap_IncomeTaxesPaid_A1F1EB71D40ED70342FBF54BE95D7802" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_IncomeTaxesPaid_A1F1EB71D40ED70342FBF54BE95D7802" xlink:to="lab_us-gaap_IncomeTaxesPaid_A1F1EB71D40ED70342FBF54BE95D7802" xlink:type="arc" />
    <link:label id="lab_us-gaap_StockIssued1_00A7253C768EFB631186F54B79718A4A_terseLabel_en-US" xlink:label="lab_us-gaap_StockIssued1_00A7253C768EFB631186F54B79718A4A" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Issuance of common stock for acquisitions</link:label>
    <link:label id="lab_us-gaap_StockIssued1_00A7253C768EFB631186F54B79718A4A_label_en-US" xlink:label="lab_us-gaap_StockIssued1_00A7253C768EFB631186F54B79718A4A" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Stock Issued</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StockIssued1" xlink:label="loc_us-gaap_StockIssued1_00A7253C768EFB631186F54B79718A4A" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_StockIssued1_00A7253C768EFB631186F54B79718A4A" xlink:to="lab_us-gaap_StockIssued1_00A7253C768EFB631186F54B79718A4A" xlink:type="arc" />
    <link:label id="lab_us-gaap_SubsequentEventsAbstract_2D97FCA21F8658F1650DF54BDE27AD94_label_en-US" xlink:label="lab_us-gaap_SubsequentEventsAbstract_2D97FCA21F8658F1650DF54BDE27AD94" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Subsequent Events [Abstract]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SubsequentEventsAbstract" xlink:label="loc_us-gaap_SubsequentEventsAbstract_2D97FCA21F8658F1650DF54BDE27AD94" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_SubsequentEventsAbstract_2D97FCA21F8658F1650DF54BDE27AD94" xlink:to="lab_us-gaap_SubsequentEventsAbstract_2D97FCA21F8658F1650DF54BDE27AD94" xlink:type="arc" />
    <link:label id="lab_us-gaap_SubsequentEventTable_EC09EAED3885908230C5F54BDE282018_terseLabel_en-US" xlink:label="lab_us-gaap_SubsequentEventTable_EC09EAED3885908230C5F54BDE282018" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Subsequent Event [Table]</link:label>
    <link:label id="lab_us-gaap_SubsequentEventTable_EC09EAED3885908230C5F54BDE282018_label_en-US" xlink:label="lab_us-gaap_SubsequentEventTable_EC09EAED3885908230C5F54BDE282018" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Subsequent Event [Table]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SubsequentEventTable" xlink:label="loc_us-gaap_SubsequentEventTable_EC09EAED3885908230C5F54BDE282018" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_SubsequentEventTable_EC09EAED3885908230C5F54BDE282018" xlink:to="lab_us-gaap_SubsequentEventTable_EC09EAED3885908230C5F54BDE282018" xlink:type="arc" />
    <link:label id="lab_us-gaap_DebtInstrumentAxis_7AC0165D94C0B9F06FFDF5C37E8A8219_terseLabel_en-US" xlink:label="lab_us-gaap_DebtInstrumentAxis_7AC0165D94C0B9F06FFDF5C37E8A8219" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Debt Instrument [Axis]</link:label>
    <link:label id="lab_us-gaap_DebtInstrumentAxis_7AC0165D94C0B9F06FFDF5C37E8A8219_label_en-US" xlink:label="lab_us-gaap_DebtInstrumentAxis_7AC0165D94C0B9F06FFDF5C37E8A8219" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Debt Instrument [Axis]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DebtInstrumentAxis" xlink:label="loc_us-gaap_DebtInstrumentAxis_7AC0165D94C0B9F06FFDF5C37E8A8219" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_DebtInstrumentAxis_7AC0165D94C0B9F06FFDF5C37E8A8219" xlink:to="lab_us-gaap_DebtInstrumentAxis_7AC0165D94C0B9F06FFDF5C37E8A8219" xlink:type="arc" />
    <link:label id="lab_us-gaap_DebtInstrumentNameDomain_631645267C28B805C428F5C37E8BAF3F_terseLabel_en-US" xlink:label="lab_us-gaap_DebtInstrumentNameDomain_631645267C28B805C428F5C37E8BAF3F" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Debt Instrument, Name [Domain]</link:label>
    <link:label id="lab_us-gaap_DebtInstrumentNameDomain_631645267C28B805C428F5C37E8BAF3F_label_en-US" xlink:label="lab_us-gaap_DebtInstrumentNameDomain_631645267C28B805C428F5C37E8BAF3F" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Debt Instrument, Name [Domain]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DebtInstrumentNameDomain" xlink:label="loc_us-gaap_DebtInstrumentNameDomain_631645267C28B805C428F5C37E8BAF3F" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_DebtInstrumentNameDomain_631645267C28B805C428F5C37E8BAF3F" xlink:to="lab_us-gaap_DebtInstrumentNameDomain_631645267C28B805C428F5C37E8BAF3F" xlink:type="arc" />
    <link:label id="lab_asys_SolarToolLoanAgreementMember_88A9345C908EBD1A7099F5C3F2809813_terseLabel_en-US" xlink:label="lab_asys_SolarToolLoanAgreementMember_88A9345C908EBD1A7099F5C3F2809813" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Solar Tool Loan Agreement</link:label>
    <link:label id="lab_asys_SolarToolLoanAgreementMember_88A9345C908EBD1A7099F5C3F2809813_label_en-US" xlink:label="lab_asys_SolarToolLoanAgreementMember_88A9345C908EBD1A7099F5C3F2809813" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Solar Tool Loan Agreement [Member]</link:label>
    <link:label id="lab_asys_SolarToolLoanAgreementMember_88A9345C908EBD1A7099F5C3F2809813_documentation_en-US" xlink:label="lab_asys_SolarToolLoanAgreementMember_88A9345C908EBD1A7099F5C3F2809813" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Solar Tool Loan Agreement</link:label>
    <link:loc xlink:href="asys-20150630.xsd#asys_SolarToolLoanAgreementMember" xlink:label="loc_asys_SolarToolLoanAgreementMember_88A9345C908EBD1A7099F5C3F2809813" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_SolarToolLoanAgreementMember_88A9345C908EBD1A7099F5C3F2809813" xlink:to="lab_asys_SolarToolLoanAgreementMember_88A9345C908EBD1A7099F5C3F2809813" xlink:type="arc" />
    <link:label id="lab_us-gaap_CounterpartyNameAxis_078909C27E780925D1A5F5B2D367422F_terseLabel_en-US" xlink:label="lab_us-gaap_CounterpartyNameAxis_078909C27E780925D1A5F5B2D367422F" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Counterparty Name [Axis]</link:label>
    <link:label id="lab_us-gaap_CounterpartyNameAxis_078909C27E780925D1A5F5B2D367422F_label_en-US" xlink:label="lab_us-gaap_CounterpartyNameAxis_078909C27E780925D1A5F5B2D367422F" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Counterparty Name [Axis]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CounterpartyNameAxis" xlink:label="loc_us-gaap_CounterpartyNameAxis_078909C27E780925D1A5F5B2D367422F" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_CounterpartyNameAxis_078909C27E780925D1A5F5B2D367422F" xlink:to="lab_us-gaap_CounterpartyNameAxis_078909C27E780925D1A5F5B2D367422F" xlink:type="arc" />
    <link:label id="lab_us-gaap_RepurchaseAgreementCounterpartyNameDomain_7EC9523CB6F477A10CD5F5B2D369783A_terseLabel_en-US" xlink:label="lab_us-gaap_RepurchaseAgreementCounterpartyNameDomain_7EC9523CB6F477A10CD5F5B2D369783A" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Counterparty Name [Domain]</link:label>
    <link:label id="lab_us-gaap_RepurchaseAgreementCounterpartyNameDomain_7EC9523CB6F477A10CD5F5B2D369783A_label_en-US" xlink:label="lab_us-gaap_RepurchaseAgreementCounterpartyNameDomain_7EC9523CB6F477A10CD5F5B2D369783A" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Counterparty Name [Domain]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RepurchaseAgreementCounterpartyNameDomain" xlink:label="loc_us-gaap_RepurchaseAgreementCounterpartyNameDomain_7EC9523CB6F477A10CD5F5B2D369783A" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_RepurchaseAgreementCounterpartyNameDomain_7EC9523CB6F477A10CD5F5B2D369783A" xlink:to="lab_us-gaap_RepurchaseAgreementCounterpartyNameDomain_7EC9523CB6F477A10CD5F5B2D369783A" xlink:type="arc" />
    <link:label id="lab_asys_KingstoneHongKongMember_560B4B871DB647EF21D3F5B3CE137A08_terseLabel_en-US" xlink:label="lab_asys_KingstoneHongKongMember_560B4B871DB647EF21D3F5B3CE137A08" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Kingstone Hong Kong</link:label>
    <link:label id="lab_asys_KingstoneHongKongMember_560B4B871DB647EF21D3F5B3CE137A08_label_en-US" xlink:label="lab_asys_KingstoneHongKongMember_560B4B871DB647EF21D3F5B3CE137A08" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Kingstone Hong Kong [Member]</link:label>
    <link:label id="lab_asys_KingstoneHongKongMember_560B4B871DB647EF21D3F5B3CE137A08_documentation_en-US" xlink:label="lab_asys_KingstoneHongKongMember_560B4B871DB647EF21D3F5B3CE137A08" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Kingstone Hong Kong</link:label>
    <link:loc xlink:href="asys-20150630.xsd#asys_KingstoneHongKongMember" xlink:label="loc_asys_KingstoneHongKongMember_560B4B871DB647EF21D3F5B3CE137A08" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_KingstoneHongKongMember_560B4B871DB647EF21D3F5B3CE137A08" xlink:to="lab_asys_KingstoneHongKongMember_560B4B871DB647EF21D3F5B3CE137A08" xlink:type="arc" />
    <link:label id="lab_asys_SuzhouZhuoJingInvestmentCenterMember_BF527A12D0EB83ACE499F5B479E95FDA_terseLabel_en-US" xlink:label="lab_asys_SuzhouZhuoJingInvestmentCenterMember_BF527A12D0EB83ACE499F5B479E95FDA" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Suzhou Zhuo Jing Investment Center</link:label>
    <link:label id="lab_asys_SuzhouZhuoJingInvestmentCenterMember_BF527A12D0EB83ACE499F5B479E95FDA_label_en-US" xlink:label="lab_asys_SuzhouZhuoJingInvestmentCenterMember_BF527A12D0EB83ACE499F5B479E95FDA" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Suzhou Zhuo Jing Investment Center [Member]</link:label>
    <link:label id="lab_asys_SuzhouZhuoJingInvestmentCenterMember_BF527A12D0EB83ACE499F5B479E95FDA_documentation_en-US" xlink:label="lab_asys_SuzhouZhuoJingInvestmentCenterMember_BF527A12D0EB83ACE499F5B479E95FDA" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Suzhou Zhuo Jing Investment Center</link:label>
    <link:loc xlink:href="asys-20150630.xsd#asys_SuzhouZhuoJingInvestmentCenterMember" xlink:label="loc_asys_SuzhouZhuoJingInvestmentCenterMember_BF527A12D0EB83ACE499F5B479E95FDA" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_SuzhouZhuoJingInvestmentCenterMember_BF527A12D0EB83ACE499F5B479E95FDA" xlink:to="lab_asys_SuzhouZhuoJingInvestmentCenterMember_BF527A12D0EB83ACE499F5B479E95FDA" xlink:type="arc" />
    <link:label id="lab_us-gaap_RestructuringPlanAxis_C57C312E0469EC4782A0F5AFC3835484_terseLabel_en-US" xlink:label="lab_us-gaap_RestructuringPlanAxis_C57C312E0469EC4782A0F5AFC3835484" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Restructuring Plan [Axis]</link:label>
    <link:label id="lab_us-gaap_RestructuringPlanAxis_C57C312E0469EC4782A0F5AFC3835484_label_en-US" xlink:label="lab_us-gaap_RestructuringPlanAxis_C57C312E0469EC4782A0F5AFC3835484" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Restructuring Plan [Axis]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RestructuringPlanAxis" xlink:label="loc_us-gaap_RestructuringPlanAxis_C57C312E0469EC4782A0F5AFC3835484" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_RestructuringPlanAxis_C57C312E0469EC4782A0F5AFC3835484" xlink:to="lab_us-gaap_RestructuringPlanAxis_C57C312E0469EC4782A0F5AFC3835484" xlink:type="arc" />
    <link:label id="lab_us-gaap_RestructuringPlanDomain_F07F7DFE71225514A357F5AFC39D5C50_terseLabel_en-US" xlink:label="lab_us-gaap_RestructuringPlanDomain_F07F7DFE71225514A357F5AFC39D5C50" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Restructuring Plan [Domain]</link:label>
    <link:label id="lab_us-gaap_RestructuringPlanDomain_F07F7DFE71225514A357F5AFC39D5C50_label_en-US" xlink:label="lab_us-gaap_RestructuringPlanDomain_F07F7DFE71225514A357F5AFC39D5C50" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Restructuring Plan [Domain]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RestructuringPlanDomain" xlink:label="loc_us-gaap_RestructuringPlanDomain_F07F7DFE71225514A357F5AFC39D5C50" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_RestructuringPlanDomain_F07F7DFE71225514A357F5AFC39D5C50" xlink:to="lab_us-gaap_RestructuringPlanDomain_F07F7DFE71225514A357F5AFC39D5C50" xlink:type="arc" />
    <link:label id="lab_asys_RestructuringOfInvestmentInvestmentAgreementMember_176051C0A9C1675CAE64F5B1B66D8690_terseLabel_en-US" xlink:label="lab_asys_RestructuringOfInvestmentInvestmentAgreementMember_176051C0A9C1675CAE64F5B1B66D8690" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Restructuring Of Investment, Investment Agreement</link:label>
    <link:label id="lab_asys_RestructuringOfInvestmentInvestmentAgreementMember_176051C0A9C1675CAE64F5B1B66D8690_label_en-US" xlink:label="lab_asys_RestructuringOfInvestmentInvestmentAgreementMember_176051C0A9C1675CAE64F5B1B66D8690" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Restructuring Of Investment, Investment Agreement [Member]</link:label>
    <link:label id="lab_asys_RestructuringOfInvestmentInvestmentAgreementMember_176051C0A9C1675CAE64F5B1B66D8690_documentation_en-US" xlink:label="lab_asys_RestructuringOfInvestmentInvestmentAgreementMember_176051C0A9C1675CAE64F5B1B66D8690" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Restructuring Of Investment, Investment Agreement</link:label>
    <link:loc xlink:href="asys-20150630.xsd#asys_RestructuringOfInvestmentInvestmentAgreementMember" xlink:label="loc_asys_RestructuringOfInvestmentInvestmentAgreementMember_176051C0A9C1675CAE64F5B1B66D8690" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_RestructuringOfInvestmentInvestmentAgreementMember_176051C0A9C1675CAE64F5B1B66D8690" xlink:to="lab_asys_RestructuringOfInvestmentInvestmentAgreementMember_176051C0A9C1675CAE64F5B1B66D8690" xlink:type="arc" />
    <link:label id="lab_us-gaap_SubsequentEventTypeAxis_D9C6EE546ABEA62ADADDF54BDE283CA9_terseLabel_en-US" xlink:label="lab_us-gaap_SubsequentEventTypeAxis_D9C6EE546ABEA62ADADDF54BDE283CA9" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Subsequent Event Type [Axis]</link:label>
    <link:label id="lab_us-gaap_SubsequentEventTypeAxis_D9C6EE546ABEA62ADADDF54BDE283CA9_label_en-US" xlink:label="lab_us-gaap_SubsequentEventTypeAxis_D9C6EE546ABEA62ADADDF54BDE283CA9" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Subsequent Event Type [Axis]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SubsequentEventTypeAxis" xlink:label="loc_us-gaap_SubsequentEventTypeAxis_D9C6EE546ABEA62ADADDF54BDE283CA9" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_SubsequentEventTypeAxis_D9C6EE546ABEA62ADADDF54BDE283CA9" xlink:to="lab_us-gaap_SubsequentEventTypeAxis_D9C6EE546ABEA62ADADDF54BDE283CA9" xlink:type="arc" />
    <link:label id="lab_us-gaap_SubsequentEventTypeDomain_B9ECB92FA5BA6D72B497F54BDE28BF13_terseLabel_en-US" xlink:label="lab_us-gaap_SubsequentEventTypeDomain_B9ECB92FA5BA6D72B497F54BDE28BF13" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Subsequent Event Type [Domain]</link:label>
    <link:label id="lab_us-gaap_SubsequentEventTypeDomain_B9ECB92FA5BA6D72B497F54BDE28BF13_label_en-US" xlink:label="lab_us-gaap_SubsequentEventTypeDomain_B9ECB92FA5BA6D72B497F54BDE28BF13" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Subsequent Event Type [Domain]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SubsequentEventTypeDomain" xlink:label="loc_us-gaap_SubsequentEventTypeDomain_B9ECB92FA5BA6D72B497F54BDE28BF13" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_SubsequentEventTypeDomain_B9ECB92FA5BA6D72B497F54BDE28BF13" xlink:to="lab_us-gaap_SubsequentEventTypeDomain_B9ECB92FA5BA6D72B497F54BDE28BF13" xlink:type="arc" />
    <link:label id="lab_us-gaap_SubsequentEventMember_B354CC0EDF1CE8500AB3F59F361A6CBB_terseLabel_en-US" xlink:label="lab_us-gaap_SubsequentEventMember_B354CC0EDF1CE8500AB3F59F361A6CBB" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Subsequent Event</link:label>
    <link:label id="lab_us-gaap_SubsequentEventMember_B354CC0EDF1CE8500AB3F59F361A6CBB_label_en-US" xlink:label="lab_us-gaap_SubsequentEventMember_B354CC0EDF1CE8500AB3F59F361A6CBB" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Subsequent Event [Member]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SubsequentEventMember" xlink:label="loc_us-gaap_SubsequentEventMember_B354CC0EDF1CE8500AB3F59F361A6CBB" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_SubsequentEventMember_B354CC0EDF1CE8500AB3F59F361A6CBB" xlink:to="lab_us-gaap_SubsequentEventMember_B354CC0EDF1CE8500AB3F59F361A6CBB" xlink:type="arc" />
    <link:label id="lab_us-gaap_SubsequentEventLineItems_C7AEFBAFFF041574041BF54BDE2840F5_terseLabel_en-US" xlink:label="lab_us-gaap_SubsequentEventLineItems_C7AEFBAFFF041574041BF54BDE2840F5" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Subsequent Event [Line Items]</link:label>
    <link:label id="lab_us-gaap_SubsequentEventLineItems_C7AEFBAFFF041574041BF54BDE2840F5_label_en-US" xlink:label="lab_us-gaap_SubsequentEventLineItems_C7AEFBAFFF041574041BF54BDE2840F5" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Subsequent Event [Line Items]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SubsequentEventLineItems" xlink:label="loc_us-gaap_SubsequentEventLineItems_C7AEFBAFFF041574041BF54BDE2840F5" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_SubsequentEventLineItems_C7AEFBAFFF041574041BF54BDE2840F5" xlink:to="lab_us-gaap_SubsequentEventLineItems_C7AEFBAFFF041574041BF54BDE2840F5" xlink:type="arc" />
    <link:label id="lab_us-gaap_EquityMethodInvestmentSoldCarryingAmount_3E14A9DBB297D7ED15FEF5B7AD9C2779_terseLabel_en-US" xlink:label="lab_us-gaap_EquityMethodInvestmentSoldCarryingAmount_3E14A9DBB297D7ED15FEF5B7AD9C2779" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Amount to be received for a portion of its equity ownership</link:label>
    <link:label id="lab_us-gaap_EquityMethodInvestmentSoldCarryingAmount_3E14A9DBB297D7ED15FEF5B7AD9C2779_label_en-US" xlink:label="lab_us-gaap_EquityMethodInvestmentSoldCarryingAmount_3E14A9DBB297D7ED15FEF5B7AD9C2779" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Equity Method Investment, Amount Sold</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EquityMethodInvestmentSoldCarryingAmount" xlink:label="loc_us-gaap_EquityMethodInvestmentSoldCarryingAmount_3E14A9DBB297D7ED15FEF5B7AD9C2779" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_EquityMethodInvestmentSoldCarryingAmount_3E14A9DBB297D7ED15FEF5B7AD9C2779" xlink:to="lab_us-gaap_EquityMethodInvestmentSoldCarryingAmount_3E14A9DBB297D7ED15FEF5B7AD9C2779" xlink:type="arc" />
    <link:label id="lab_us-gaap_ProceedsFromCollectionOfNotesReceivable_7E1D6DA19B1DC46E4259F5C35899FE33_terseLabel_en-US" xlink:label="lab_us-gaap_ProceedsFromCollectionOfNotesReceivable_7E1D6DA19B1DC46E4259F5C35899FE33" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Repayment of outstanding principal</link:label>
    <link:label id="lab_us-gaap_ProceedsFromCollectionOfNotesReceivable_7E1D6DA19B1DC46E4259F5C35899FE33_label_en-US" xlink:label="lab_us-gaap_ProceedsFromCollectionOfNotesReceivable_7E1D6DA19B1DC46E4259F5C35899FE33" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Proceeds from Collection of Notes Receivable</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProceedsFromCollectionOfNotesReceivable" xlink:label="loc_us-gaap_ProceedsFromCollectionOfNotesReceivable_7E1D6DA19B1DC46E4259F5C35899FE33" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ProceedsFromCollectionOfNotesReceivable_7E1D6DA19B1DC46E4259F5C35899FE33" xlink:to="lab_us-gaap_ProceedsFromCollectionOfNotesReceivable_7E1D6DA19B1DC46E4259F5C35899FE33" xlink:type="arc" />
    <link:label id="lab_asys_ProceedsFromSaleOfExclusiveRightToSellAndServiceProducts_2D59A833DA0967F5C46DF5C9364155C2_terseLabel_en-US" xlink:label="lab_asys_ProceedsFromSaleOfExclusiveRightToSellAndServiceProducts_2D59A833DA0967F5C46DF5C9364155C2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Purchase from the Company of exclusive right to sell and service products</link:label>
    <link:label id="lab_asys_ProceedsFromSaleOfExclusiveRightToSellAndServiceProducts_2D59A833DA0967F5C46DF5C9364155C2_label_en-US" xlink:label="lab_asys_ProceedsFromSaleOfExclusiveRightToSellAndServiceProducts_2D59A833DA0967F5C46DF5C9364155C2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Proceeds From Sale Of Exclusive Right To Sell And Service Products</link:label>
    <link:label id="lab_asys_ProceedsFromSaleOfExclusiveRightToSellAndServiceProducts_2D59A833DA0967F5C46DF5C9364155C2_documentation_en-US" xlink:label="lab_asys_ProceedsFromSaleOfExclusiveRightToSellAndServiceProducts_2D59A833DA0967F5C46DF5C9364155C2" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Proceeds From Sale Of Exclusive Right To Sell And Service Products</link:label>
    <link:loc xlink:href="asys-20150630.xsd#asys_ProceedsFromSaleOfExclusiveRightToSellAndServiceProducts" xlink:label="loc_asys_ProceedsFromSaleOfExclusiveRightToSellAndServiceProducts_2D59A833DA0967F5C46DF5C9364155C2" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_ProceedsFromSaleOfExclusiveRightToSellAndServiceProducts_2D59A833DA0967F5C46DF5C9364155C2" xlink:to="lab_asys_ProceedsFromSaleOfExclusiveRightToSellAndServiceProducts_2D59A833DA0967F5C46DF5C9364155C2" xlink:type="arc" />
    <link:label id="lab_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_9A83C3BDD9F7B5547A16F541EE2AA652_label_en-US" xlink:label="lab_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_9A83C3BDD9F7B5547A16F541EE2AA652" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Organization, Consolidation and Presentation of Financial Statements [Abstract]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:label="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_9A83C3BDD9F7B5547A16F541EE2AA652" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_9A83C3BDD9F7B5547A16F541EE2AA652" xlink:to="lab_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_9A83C3BDD9F7B5547A16F541EE2AA652" xlink:type="arc" />
    <link:label id="lab_us-gaap_ConcentrationRiskTable_3FBE894DE5B6F84CF7E0F541EE2A12FD_terseLabel_en-US" xlink:label="lab_us-gaap_ConcentrationRiskTable_3FBE894DE5B6F84CF7E0F541EE2A12FD" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Concentration Risk [Table]</link:label>
    <link:label id="lab_us-gaap_ConcentrationRiskTable_3FBE894DE5B6F84CF7E0F541EE2A12FD_label_en-US" xlink:label="lab_us-gaap_ConcentrationRiskTable_3FBE894DE5B6F84CF7E0F541EE2A12FD" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Concentration Risk [Table]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskTable" xlink:label="loc_us-gaap_ConcentrationRiskTable_3FBE894DE5B6F84CF7E0F541EE2A12FD" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ConcentrationRiskTable_3FBE894DE5B6F84CF7E0F541EE2A12FD" xlink:to="lab_us-gaap_ConcentrationRiskTable_3FBE894DE5B6F84CF7E0F541EE2A12FD" xlink:type="arc" />
    <link:label id="lab_us-gaap_StatementGeographicalAxis_CEB3B8371A444CEB6D42F541EE2AF3F0_terseLabel_en-US" xlink:label="lab_us-gaap_StatementGeographicalAxis_CEB3B8371A444CEB6D42F541EE2AF3F0" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Geographical [Axis]</link:label>
    <link:label id="lab_us-gaap_StatementGeographicalAxis_CEB3B8371A444CEB6D42F541EE2AF3F0_label_en-US" xlink:label="lab_us-gaap_StatementGeographicalAxis_CEB3B8371A444CEB6D42F541EE2AF3F0" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Geographical [Axis]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StatementGeographicalAxis" xlink:label="loc_us-gaap_StatementGeographicalAxis_CEB3B8371A444CEB6D42F541EE2AF3F0" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_StatementGeographicalAxis_CEB3B8371A444CEB6D42F541EE2AF3F0" xlink:to="lab_us-gaap_StatementGeographicalAxis_CEB3B8371A444CEB6D42F541EE2AF3F0" xlink:type="arc" />
    <link:label id="lab_us-gaap_SegmentGeographicalDomain_356B648B03ED065917EEF541EE2A1E8F_terseLabel_en-US" xlink:label="lab_us-gaap_SegmentGeographicalDomain_356B648B03ED065917EEF541EE2A1E8F" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Segment, Geographical [Domain]</link:label>
    <link:label id="lab_us-gaap_SegmentGeographicalDomain_356B648B03ED065917EEF541EE2A1E8F_label_en-US" xlink:label="lab_us-gaap_SegmentGeographicalDomain_356B648B03ED065917EEF541EE2A1E8F" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Geographical [Domain]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SegmentGeographicalDomain" xlink:label="loc_us-gaap_SegmentGeographicalDomain_356B648B03ED065917EEF541EE2A1E8F" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_SegmentGeographicalDomain_356B648B03ED065917EEF541EE2A1E8F" xlink:to="lab_us-gaap_SegmentGeographicalDomain_356B648B03ED065917EEF541EE2A1E8F" xlink:type="arc" />
    <link:label id="lab_country_US_DC0F0A92BC79EB5CAF7FF541EE2B9C75_verboseLabel_en-US" xlink:label="lab_country_US_DC0F0A92BC79EB5CAF7FF541EE2B9C75" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:type="resource" xml:lang="en-US">UNITED STATES</link:label>
    <link:label id="lab_country_US_DC0F0A92BC79EB5CAF7FF541EE2B9C75_label_en-US" xlink:label="lab_country_US_DC0F0A92BC79EB5CAF7FF541EE2B9C75" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">UNITED STATES</link:label>
    <link:loc xlink:href="http://xbrl.sec.gov/country/2013/country-2013-01-31.xsd#country_US" xlink:label="loc_country_US_DC0F0A92BC79EB5CAF7FF541EE2B9C75" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_country_US_DC0F0A92BC79EB5CAF7FF541EE2B9C75" xlink:to="lab_country_US_DC0F0A92BC79EB5CAF7FF541EE2B9C75" xlink:type="arc" />
    <link:label id="lab_us-gaap_ConcentrationRiskByBenchmarkAxis_951C3AC4ADC5C6F815ABF541EE2B6BAB_terseLabel_en-US" xlink:label="lab_us-gaap_ConcentrationRiskByBenchmarkAxis_951C3AC4ADC5C6F815ABF541EE2B6BAB" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Concentration Risk Benchmark [Axis]</link:label>
    <link:label id="lab_us-gaap_ConcentrationRiskByBenchmarkAxis_951C3AC4ADC5C6F815ABF541EE2B6BAB_label_en-US" xlink:label="lab_us-gaap_ConcentrationRiskByBenchmarkAxis_951C3AC4ADC5C6F815ABF541EE2B6BAB" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Concentration Risk Benchmark [Axis]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskByBenchmarkAxis" xlink:label="loc_us-gaap_ConcentrationRiskByBenchmarkAxis_951C3AC4ADC5C6F815ABF541EE2B6BAB" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ConcentrationRiskByBenchmarkAxis_951C3AC4ADC5C6F815ABF541EE2B6BAB" xlink:to="lab_us-gaap_ConcentrationRiskByBenchmarkAxis_951C3AC4ADC5C6F815ABF541EE2B6BAB" xlink:type="arc" />
    <link:label id="lab_us-gaap_ConcentrationRiskBenchmarkDomain_2537EAA9309E7C480759F541EE2B8AED_terseLabel_en-US" xlink:label="lab_us-gaap_ConcentrationRiskBenchmarkDomain_2537EAA9309E7C480759F541EE2B8AED" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Concentration Risk Benchmark [Domain]</link:label>
    <link:label id="lab_us-gaap_ConcentrationRiskBenchmarkDomain_2537EAA9309E7C480759F541EE2B8AED_label_en-US" xlink:label="lab_us-gaap_ConcentrationRiskBenchmarkDomain_2537EAA9309E7C480759F541EE2B8AED" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Concentration Risk Benchmark [Domain]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskBenchmarkDomain" xlink:label="loc_us-gaap_ConcentrationRiskBenchmarkDomain_2537EAA9309E7C480759F541EE2B8AED" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ConcentrationRiskBenchmarkDomain_2537EAA9309E7C480759F541EE2B8AED" xlink:to="lab_us-gaap_ConcentrationRiskBenchmarkDomain_2537EAA9309E7C480759F541EE2B8AED" xlink:type="arc" />
    <link:label id="lab_asys_CashAndCashEquivalentsAndRestrictedCashMember_06A517C55B4025B18D3BF541EE2BE5E4_terseLabel_en-US" xlink:label="lab_asys_CashAndCashEquivalentsAndRestrictedCashMember_06A517C55B4025B18D3BF541EE2BE5E4" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Cash and Cash Equivalents and Restricted Cash [Member]</link:label>
    <link:label id="lab_asys_CashAndCashEquivalentsAndRestrictedCashMember_06A517C55B4025B18D3BF541EE2BE5E4_label_en-US" xlink:label="lab_asys_CashAndCashEquivalentsAndRestrictedCashMember_06A517C55B4025B18D3BF541EE2BE5E4" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Cash And Cash Equivalents And Restricted Cash [Member]</link:label>
    <link:label id="lab_asys_CashAndCashEquivalentsAndRestrictedCashMember_06A517C55B4025B18D3BF541EE2BE5E4_documentation_en-US" xlink:label="lab_asys_CashAndCashEquivalentsAndRestrictedCashMember_06A517C55B4025B18D3BF541EE2BE5E4" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Cash And Cash Equivalents And Restricted Cash [Member]</link:label>
    <link:loc xlink:href="asys-20150630.xsd#asys_CashAndCashEquivalentsAndRestrictedCashMember" xlink:label="loc_asys_CashAndCashEquivalentsAndRestrictedCashMember_06A517C55B4025B18D3BF541EE2BE5E4" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_CashAndCashEquivalentsAndRestrictedCashMember_06A517C55B4025B18D3BF541EE2BE5E4" xlink:to="lab_asys_CashAndCashEquivalentsAndRestrictedCashMember_06A517C55B4025B18D3BF541EE2BE5E4" xlink:type="arc" />
    <link:label id="lab_us-gaap_AccountsReceivableMember_208C7E45F4348E43946EF541EE2BDFB3_terseLabel_en-US" xlink:label="lab_us-gaap_AccountsReceivableMember_208C7E45F4348E43946EF541EE2BDFB3" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Accounts Receivable [Member]</link:label>
    <link:label id="lab_us-gaap_AccountsReceivableMember_208C7E45F4348E43946EF541EE2BDFB3_label_en-US" xlink:label="lab_us-gaap_AccountsReceivableMember_208C7E45F4348E43946EF541EE2BDFB3" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Accounts Receivable [Member]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AccountsReceivableMember" xlink:label="loc_us-gaap_AccountsReceivableMember_208C7E45F4348E43946EF541EE2BDFB3" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_AccountsReceivableMember_208C7E45F4348E43946EF541EE2BDFB3" xlink:to="lab_us-gaap_AccountsReceivableMember_208C7E45F4348E43946EF541EE2BDFB3" xlink:type="arc" />
    <link:label id="lab_us-gaap_ConcentrationRiskByTypeAxis_E95F5147E267B7B7B547F541EE2B85A9_terseLabel_en-US" xlink:label="lab_us-gaap_ConcentrationRiskByTypeAxis_E95F5147E267B7B7B547F541EE2B85A9" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Concentration Risk Type [Axis]</link:label>
    <link:label id="lab_us-gaap_ConcentrationRiskByTypeAxis_E95F5147E267B7B7B547F541EE2B85A9_label_en-US" xlink:label="lab_us-gaap_ConcentrationRiskByTypeAxis_E95F5147E267B7B7B547F541EE2B85A9" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Concentration Risk Type [Axis]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskByTypeAxis" xlink:label="loc_us-gaap_ConcentrationRiskByTypeAxis_E95F5147E267B7B7B547F541EE2B85A9" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ConcentrationRiskByTypeAxis_E95F5147E267B7B7B547F541EE2B85A9" xlink:to="lab_us-gaap_ConcentrationRiskByTypeAxis_E95F5147E267B7B7B547F541EE2B85A9" xlink:type="arc" />
    <link:label id="lab_us-gaap_ConcentrationRiskTypeDomain_8C7E16088DDED601CA55F541EE2B108C_terseLabel_en-US" xlink:label="lab_us-gaap_ConcentrationRiskTypeDomain_8C7E16088DDED601CA55F541EE2B108C" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Concentration Risk Type [Domain]</link:label>
    <link:label id="lab_us-gaap_ConcentrationRiskTypeDomain_8C7E16088DDED601CA55F541EE2B108C_label_en-US" xlink:label="lab_us-gaap_ConcentrationRiskTypeDomain_8C7E16088DDED601CA55F541EE2B108C" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Concentration Risk Type [Domain]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskTypeDomain" xlink:label="loc_us-gaap_ConcentrationRiskTypeDomain_8C7E16088DDED601CA55F541EE2B108C" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ConcentrationRiskTypeDomain_8C7E16088DDED601CA55F541EE2B108C" xlink:to="lab_us-gaap_ConcentrationRiskTypeDomain_8C7E16088DDED601CA55F541EE2B108C" xlink:type="arc" />
    <link:label id="lab_asys_CustomerOneMember_683C9B9307AB3EDA159FF541EE2C7D74_terseLabel_en-US" xlink:label="lab_asys_CustomerOneMember_683C9B9307AB3EDA159FF541EE2C7D74" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Customer One [Member]</link:label>
    <link:label id="lab_asys_CustomerOneMember_683C9B9307AB3EDA159FF541EE2C7D74_label_en-US" xlink:label="lab_asys_CustomerOneMember_683C9B9307AB3EDA159FF541EE2C7D74" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Customer One [Member]</link:label>
    <link:label id="lab_asys_CustomerOneMember_683C9B9307AB3EDA159FF541EE2C7D74_documentation_en-US" xlink:label="lab_asys_CustomerOneMember_683C9B9307AB3EDA159FF541EE2C7D74" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Customer One [Member]</link:label>
    <link:loc xlink:href="asys-20150630.xsd#asys_CustomerOneMember" xlink:label="loc_asys_CustomerOneMember_683C9B9307AB3EDA159FF541EE2C7D74" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_CustomerOneMember_683C9B9307AB3EDA159FF541EE2C7D74" xlink:to="lab_asys_CustomerOneMember_683C9B9307AB3EDA159FF541EE2C7D74" xlink:type="arc" />
    <link:label id="lab_us-gaap_ConcentrationRiskLineItems_D137F9DBCCB8DD4E4A0EF541EE2C86B3_terseLabel_en-US" xlink:label="lab_us-gaap_ConcentrationRiskLineItems_D137F9DBCCB8DD4E4A0EF541EE2C86B3" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Concentration Risk [Line Items]</link:label>
    <link:label id="lab_us-gaap_ConcentrationRiskLineItems_D137F9DBCCB8DD4E4A0EF541EE2C86B3_label_en-US" xlink:label="lab_us-gaap_ConcentrationRiskLineItems_D137F9DBCCB8DD4E4A0EF541EE2C86B3" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Concentration Risk [Line Items]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskLineItems" xlink:label="loc_us-gaap_ConcentrationRiskLineItems_D137F9DBCCB8DD4E4A0EF541EE2C86B3" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ConcentrationRiskLineItems_D137F9DBCCB8DD4E4A0EF541EE2C86B3" xlink:to="lab_us-gaap_ConcentrationRiskLineItems_D137F9DBCCB8DD4E4A0EF541EE2C86B3" xlink:type="arc" />
    <link:label id="lab_us-gaap_ConcentrationRiskPercentage1_0422C94D66F14CA6A41FF541EE2CF1D3_terseLabel_en-US" xlink:label="lab_us-gaap_ConcentrationRiskPercentage1_0422C94D66F14CA6A41FF541EE2CF1D3" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Concentration risk, percentage</link:label>
    <link:label id="lab_us-gaap_ConcentrationRiskPercentage1_0422C94D66F14CA6A41FF541EE2CF1D3_label_en-US" xlink:label="lab_us-gaap_ConcentrationRiskPercentage1_0422C94D66F14CA6A41FF541EE2CF1D3" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Concentration Risk, Percentage</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskPercentage1" xlink:label="loc_us-gaap_ConcentrationRiskPercentage1_0422C94D66F14CA6A41FF541EE2CF1D3" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ConcentrationRiskPercentage1_0422C94D66F14CA6A41FF541EE2CF1D3" xlink:to="lab_us-gaap_ConcentrationRiskPercentage1_0422C94D66F14CA6A41FF541EE2CF1D3" xlink:type="arc" />
    <link:label id="lab_asys_NumberOfCustomers_A27C5E4838E87A440B38F541EE2CBB73_terseLabel_en-US" xlink:label="lab_asys_NumberOfCustomers_A27C5E4838E87A440B38F541EE2CBB73" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Number of customers</link:label>
    <link:label id="lab_asys_NumberOfCustomers_A27C5E4838E87A440B38F541EE2CBB73_label_en-US" xlink:label="lab_asys_NumberOfCustomers_A27C5E4838E87A440B38F541EE2CBB73" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Number Of Customers</link:label>
    <link:label id="lab_asys_NumberOfCustomers_A27C5E4838E87A440B38F541EE2CBB73_documentation_en-US" xlink:label="lab_asys_NumberOfCustomers_A27C5E4838E87A440B38F541EE2CBB73" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Number Of Customers</link:label>
    <link:loc xlink:href="asys-20150630.xsd#asys_NumberOfCustomers" xlink:label="loc_asys_NumberOfCustomers_A27C5E4838E87A440B38F541EE2CBB73" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_NumberOfCustomers_A27C5E4838E87A440B38F541EE2CBB73" xlink:to="lab_asys_NumberOfCustomers_A27C5E4838E87A440B38F541EE2CBB73" xlink:type="arc" />
    <link:label id="lab_asys_MajorCustomersAndForeignSalesAbstract_7431C306B84C4B019C1CF54BDE6F511A_label_en-US" xlink:label="lab_asys_MajorCustomersAndForeignSalesAbstract_7431C306B84C4B019C1CF54BDE6F511A" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Major Customers and Foreign Sales [Abstract]</link:label>
    <link:label id="lab_asys_MajorCustomersAndForeignSalesAbstract_7431C306B84C4B019C1CF54BDE6F511A_documentation_en-US" xlink:label="lab_asys_MajorCustomersAndForeignSalesAbstract_7431C306B84C4B019C1CF54BDE6F511A" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Major Customers and Foreign Sales [Abstract]</link:label>
    <link:loc xlink:href="asys-20150630.xsd#asys_MajorCustomersAndForeignSalesAbstract" xlink:label="loc_asys_MajorCustomersAndForeignSalesAbstract_7431C306B84C4B019C1CF54BDE6F511A" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_MajorCustomersAndForeignSalesAbstract_7431C306B84C4B019C1CF54BDE6F511A" xlink:to="lab_asys_MajorCustomersAndForeignSalesAbstract_7431C306B84C4B019C1CF54BDE6F511A" xlink:type="arc" />
    <link:label id="lab_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_14AB974B48CF22DB05CBF54BDE6FF513_terseLabel_en-US" xlink:label="lab_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_14AB974B48CF22DB05CBF54BDE6FF513" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Schedule of Segment Reporting Information, by Segment [Table]</link:label>
    <link:label id="lab_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_14AB974B48CF22DB05CBF54BDE6FF513_label_en-US" xlink:label="lab_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_14AB974B48CF22DB05CBF54BDE6FF513" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Schedule of Segment Reporting Information, by Segment [Table]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:label="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_14AB974B48CF22DB05CBF54BDE6FF513" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_14AB974B48CF22DB05CBF54BDE6FF513" xlink:to="lab_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_14AB974B48CF22DB05CBF54BDE6FF513" xlink:type="arc" />
    <link:label id="lab_us-gaap_SalesRevenueNetMember_A20CAFF824BA2BDEF7FEF561BB8B84BF_terseLabel_en-US" xlink:label="lab_us-gaap_SalesRevenueNetMember_A20CAFF824BA2BDEF7FEF561BB8B84BF" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Net Revenues</link:label>
    <link:label id="lab_us-gaap_SalesRevenueNetMember_A20CAFF824BA2BDEF7FEF561BB8B84BF_label_en-US" xlink:label="lab_us-gaap_SalesRevenueNetMember_A20CAFF824BA2BDEF7FEF561BB8B84BF" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Sales Revenue, Net [Member]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SalesRevenueNetMember" xlink:label="loc_us-gaap_SalesRevenueNetMember_A20CAFF824BA2BDEF7FEF561BB8B84BF" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_SalesRevenueNetMember_A20CAFF824BA2BDEF7FEF561BB8B84BF" xlink:to="lab_us-gaap_SalesRevenueNetMember_A20CAFF824BA2BDEF7FEF561BB8B84BF" xlink:type="arc" />
    <link:label id="lab_us-gaap_CustomerConcentrationRiskMember_0347FA9E66C56275314FF561689CA2B9_terseLabel_en-US" xlink:label="lab_us-gaap_CustomerConcentrationRiskMember_0347FA9E66C56275314FF561689CA2B9" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Customer Concentration Risk</link:label>
    <link:label id="lab_us-gaap_CustomerConcentrationRiskMember_0347FA9E66C56275314FF561689CA2B9_label_en-US" xlink:label="lab_us-gaap_CustomerConcentrationRiskMember_0347FA9E66C56275314FF561689CA2B9" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Customer Concentration Risk [Member]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CustomerConcentrationRiskMember" xlink:label="loc_us-gaap_CustomerConcentrationRiskMember_0347FA9E66C56275314FF561689CA2B9" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_CustomerConcentrationRiskMember_0347FA9E66C56275314FF561689CA2B9" xlink:to="lab_us-gaap_CustomerConcentrationRiskMember_0347FA9E66C56275314FF561689CA2B9" xlink:type="arc" />
    <link:label id="lab_us-gaap_MajorCustomersAxis_E9E7D1A6458A3517D081F54BDE6F0131_terseLabel_en-US" xlink:label="lab_us-gaap_MajorCustomersAxis_E9E7D1A6458A3517D081F54BDE6F0131" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Major Customers [Axis]</link:label>
    <link:label id="lab_us-gaap_MajorCustomersAxis_E9E7D1A6458A3517D081F54BDE6F0131_label_en-US" xlink:label="lab_us-gaap_MajorCustomersAxis_E9E7D1A6458A3517D081F54BDE6F0131" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Customer [Axis]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MajorCustomersAxis" xlink:label="loc_us-gaap_MajorCustomersAxis_E9E7D1A6458A3517D081F54BDE6F0131" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_MajorCustomersAxis_E9E7D1A6458A3517D081F54BDE6F0131" xlink:to="lab_us-gaap_MajorCustomersAxis_E9E7D1A6458A3517D081F54BDE6F0131" xlink:type="arc" />
    <link:label id="lab_us-gaap_NameOfMajorCustomerDomain_B625FC42F0B086E7D3EBF54BDE6F4245_terseLabel_en-US" xlink:label="lab_us-gaap_NameOfMajorCustomerDomain_B625FC42F0B086E7D3EBF54BDE6F4245" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Name of Major Customer [Domain]</link:label>
    <link:label id="lab_us-gaap_NameOfMajorCustomerDomain_B625FC42F0B086E7D3EBF54BDE6F4245_label_en-US" xlink:label="lab_us-gaap_NameOfMajorCustomerDomain_B625FC42F0B086E7D3EBF54BDE6F4245" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Customer [Domain]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NameOfMajorCustomerDomain" xlink:label="loc_us-gaap_NameOfMajorCustomerDomain_B625FC42F0B086E7D3EBF54BDE6F4245" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_NameOfMajorCustomerDomain_B625FC42F0B086E7D3EBF54BDE6F4245" xlink:to="lab_us-gaap_NameOfMajorCustomerDomain_B625FC42F0B086E7D3EBF54BDE6F4245" xlink:type="arc" />
    <link:label id="lab_asys_CustomerNumberOneMember_F77EF397B29ED4C799E3F54BDE701F1F_terseLabel_en-US" xlink:label="lab_asys_CustomerNumberOneMember_F77EF397B29ED4C799E3F54BDE701F1F" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Customer Number One</link:label>
    <link:label id="lab_asys_CustomerNumberOneMember_F77EF397B29ED4C799E3F54BDE701F1F_label_en-US" xlink:label="lab_asys_CustomerNumberOneMember_F77EF397B29ED4C799E3F54BDE701F1F" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Customer Number One [Member]</link:label>
    <link:label id="lab_asys_CustomerNumberOneMember_F77EF397B29ED4C799E3F54BDE701F1F_documentation_en-US" xlink:label="lab_asys_CustomerNumberOneMember_F77EF397B29ED4C799E3F54BDE701F1F" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Customer Number One [Member]</link:label>
    <link:loc xlink:href="asys-20150630.xsd#asys_CustomerNumberOneMember" xlink:label="loc_asys_CustomerNumberOneMember_F77EF397B29ED4C799E3F54BDE701F1F" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_CustomerNumberOneMember_F77EF397B29ED4C799E3F54BDE701F1F" xlink:to="lab_asys_CustomerNumberOneMember_F77EF397B29ED4C799E3F54BDE701F1F" xlink:type="arc" />
    <link:label id="lab_asys_CustomerNumberTwoMember_9C646F0D5D2607AA255EF54BDE70BE60_terseLabel_en-US" xlink:label="lab_asys_CustomerNumberTwoMember_9C646F0D5D2607AA255EF54BDE70BE60" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Customer Number Two</link:label>
    <link:label id="lab_asys_CustomerNumberTwoMember_9C646F0D5D2607AA255EF54BDE70BE60_label_en-US" xlink:label="lab_asys_CustomerNumberTwoMember_9C646F0D5D2607AA255EF54BDE70BE60" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Customer Number Two [Member]</link:label>
    <link:label id="lab_asys_CustomerNumberTwoMember_9C646F0D5D2607AA255EF54BDE70BE60_documentation_en-US" xlink:label="lab_asys_CustomerNumberTwoMember_9C646F0D5D2607AA255EF54BDE70BE60" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Customer Number Two [Member]</link:label>
    <link:loc xlink:href="asys-20150630.xsd#asys_CustomerNumberTwoMember" xlink:label="loc_asys_CustomerNumberTwoMember_9C646F0D5D2607AA255EF54BDE70BE60" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_CustomerNumberTwoMember_9C646F0D5D2607AA255EF54BDE70BE60" xlink:to="lab_asys_CustomerNumberTwoMember_9C646F0D5D2607AA255EF54BDE70BE60" xlink:type="arc" />
    <link:label id="lab_country_US_6D18AF0EC26BBC375621F54BDE707FB1_terseLabel_en-US" xlink:label="lab_country_US_6D18AF0EC26BBC375621F54BDE707FB1" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">United States</link:label>
    <link:loc xlink:href="http://xbrl.sec.gov/country/2013/country-2013-01-31.xsd#country_US" xlink:label="loc_country_US_6D18AF0EC26BBC375621F54BDE707FB1" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_country_US_6D18AF0EC26BBC375621F54BDE707FB1" xlink:to="lab_country_US_6D18AF0EC26BBC375621F54BDE707FB1" xlink:type="arc" />
    <link:label id="lab_asys_OtherNorthAmericaMember_60C3EC1D4B5E24637C1DF54BDE70B057_terseLabel_en-US" xlink:label="lab_asys_OtherNorthAmericaMember_60C3EC1D4B5E24637C1DF54BDE70B057" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Other</link:label>
    <link:label id="lab_asys_OtherNorthAmericaMember_60C3EC1D4B5E24637C1DF54BDE70B057_label_en-US" xlink:label="lab_asys_OtherNorthAmericaMember_60C3EC1D4B5E24637C1DF54BDE70B057" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Other, North America [Member]</link:label>
    <link:label id="lab_asys_OtherNorthAmericaMember_60C3EC1D4B5E24637C1DF54BDE70B057_documentation_en-US" xlink:label="lab_asys_OtherNorthAmericaMember_60C3EC1D4B5E24637C1DF54BDE70B057" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Other, North America</link:label>
    <link:loc xlink:href="asys-20150630.xsd#asys_OtherNorthAmericaMember" xlink:label="loc_asys_OtherNorthAmericaMember_60C3EC1D4B5E24637C1DF54BDE70B057" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_OtherNorthAmericaMember_60C3EC1D4B5E24637C1DF54BDE70B057" xlink:to="lab_asys_OtherNorthAmericaMember_60C3EC1D4B5E24637C1DF54BDE70B057" xlink:type="arc" />
    <link:label id="lab_us-gaap_NorthAmericaMember_3F4D34BC6078E47FC5C6F54BDE70ED3B_terseLabel_en-US" xlink:label="lab_us-gaap_NorthAmericaMember_3F4D34BC6078E47FC5C6F54BDE70ED3B" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Total North America</link:label>
    <link:label id="lab_us-gaap_NorthAmericaMember_3F4D34BC6078E47FC5C6F54BDE70ED3B_label_en-US" xlink:label="lab_us-gaap_NorthAmericaMember_3F4D34BC6078E47FC5C6F54BDE70ED3B" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">North America [Member]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NorthAmericaMember" xlink:label="loc_us-gaap_NorthAmericaMember_3F4D34BC6078E47FC5C6F54BDE70ED3B" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_NorthAmericaMember_3F4D34BC6078E47FC5C6F54BDE70ED3B" xlink:to="lab_us-gaap_NorthAmericaMember_3F4D34BC6078E47FC5C6F54BDE70ED3B" xlink:type="arc" />
    <link:label id="lab_country_CN_BDDF17E67312EDD0271AF54BDE70E27E_terseLabel_en-US" xlink:label="lab_country_CN_BDDF17E67312EDD0271AF54BDE70E27E" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">China</link:label>
    <link:label id="lab_country_CN_BDDF17E67312EDD0271AF54BDE70E27E_label_en-US" xlink:label="lab_country_CN_BDDF17E67312EDD0271AF54BDE70E27E" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">CHINA</link:label>
    <link:loc xlink:href="http://xbrl.sec.gov/country/2013/country-2013-01-31.xsd#country_CN" xlink:label="loc_country_CN_BDDF17E67312EDD0271AF54BDE70E27E" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_country_CN_BDDF17E67312EDD0271AF54BDE70E27E" xlink:to="lab_country_CN_BDDF17E67312EDD0271AF54BDE70E27E" xlink:type="arc" />
    <link:label id="lab_country_TW_C87DCEBF5931C0566695F54BDE70332E_terseLabel_en-US" xlink:label="lab_country_TW_C87DCEBF5931C0566695F54BDE70332E" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Taiwan</link:label>
    <link:label id="lab_country_TW_C87DCEBF5931C0566695F54BDE70332E_label_en-US" xlink:label="lab_country_TW_C87DCEBF5931C0566695F54BDE70332E" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">TAIWAN, PROVINCE OF CHINA</link:label>
    <link:loc xlink:href="http://xbrl.sec.gov/country/2013/country-2013-01-31.xsd#country_TW" xlink:label="loc_country_TW_C87DCEBF5931C0566695F54BDE70332E" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_country_TW_C87DCEBF5931C0566695F54BDE70332E" xlink:to="lab_country_TW_C87DCEBF5931C0566695F54BDE70332E" xlink:type="arc" />
    <link:label id="lab_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupOneMember_BD1C54B7314B9D327A56F54BDE70F1CA_terseLabel_en-US" xlink:label="lab_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupOneMember_BD1C54B7314B9D327A56F54BDE70F1CA" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Other</link:label>
    <link:label id="lab_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupOneMember_BD1C54B7314B9D327A56F54BDE70F1CA_label_en-US" xlink:label="lab_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupOneMember_BD1C54B7314B9D327A56F54BDE70F1CA" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Segment, Geographical, Groups of Countries, Other Immaterial Locations, Group One [Member]</link:label>
    <link:label id="lab_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupOneMember_BD1C54B7314B9D327A56F54BDE70F1CA_documentation_en-US" xlink:label="lab_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupOneMember_BD1C54B7314B9D327A56F54BDE70F1CA" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Segment, Geographical, Groups of Countries, Other Immaterial Locations, Group One [Member]</link:label>
    <link:loc xlink:href="asys-20150630.xsd#asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupOneMember" xlink:label="loc_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupOneMember_BD1C54B7314B9D327A56F54BDE70F1CA" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupOneMember_BD1C54B7314B9D327A56F54BDE70F1CA" xlink:to="lab_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupOneMember_BD1C54B7314B9D327A56F54BDE70F1CA" xlink:type="arc" />
    <link:label id="lab_us-gaap_AsiaMember_D29A8E70B5B71BD784F3F54BDE718753_terseLabel_en-US" xlink:label="lab_us-gaap_AsiaMember_D29A8E70B5B71BD784F3F54BDE718753" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Total Asia</link:label>
    <link:label id="lab_us-gaap_AsiaMember_D29A8E70B5B71BD784F3F54BDE718753_label_en-US" xlink:label="lab_us-gaap_AsiaMember_D29A8E70B5B71BD784F3F54BDE718753" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Asia [Member]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AsiaMember" xlink:label="loc_us-gaap_AsiaMember_D29A8E70B5B71BD784F3F54BDE718753" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_AsiaMember_D29A8E70B5B71BD784F3F54BDE718753" xlink:to="lab_us-gaap_AsiaMember_D29A8E70B5B71BD784F3F54BDE718753" xlink:type="arc" />
    <link:label id="lab_country_DE_56A4DAA999E1CE80F99AF54BDE71A1AB_terseLabel_en-US" xlink:label="lab_country_DE_56A4DAA999E1CE80F99AF54BDE71A1AB" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Germany</link:label>
    <link:label id="lab_country_DE_56A4DAA999E1CE80F99AF54BDE71A1AB_label_en-US" xlink:label="lab_country_DE_56A4DAA999E1CE80F99AF54BDE71A1AB" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">GERMANY</link:label>
    <link:loc xlink:href="http://xbrl.sec.gov/country/2013/country-2013-01-31.xsd#country_DE" xlink:label="loc_country_DE_56A4DAA999E1CE80F99AF54BDE71A1AB" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_country_DE_56A4DAA999E1CE80F99AF54BDE71A1AB" xlink:to="lab_country_DE_56A4DAA999E1CE80F99AF54BDE71A1AB" xlink:type="arc" />
    <link:label id="lab_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupTwoMember_40524EC35C478B936779F54BDE71E860_terseLabel_en-US" xlink:label="lab_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupTwoMember_40524EC35C478B936779F54BDE71E860" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Other</link:label>
    <link:label id="lab_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupTwoMember_40524EC35C478B936779F54BDE71E860_label_en-US" xlink:label="lab_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupTwoMember_40524EC35C478B936779F54BDE71E860" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Segment, Geographical, Groups of Countries, Other Immaterial Locations, Group Two [Member]</link:label>
    <link:label id="lab_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupTwoMember_40524EC35C478B936779F54BDE71E860_documentation_en-US" xlink:label="lab_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupTwoMember_40524EC35C478B936779F54BDE71E860" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Segment, Geographical, Groups of Countries, Other Immaterial Locations, Group Two [Member]</link:label>
    <link:loc xlink:href="asys-20150630.xsd#asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupTwoMember" xlink:label="loc_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupTwoMember_40524EC35C478B936779F54BDE71E860" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupTwoMember_40524EC35C478B936779F54BDE71E860" xlink:to="lab_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupTwoMember_40524EC35C478B936779F54BDE71E860" xlink:type="arc" />
    <link:label id="lab_us-gaap_EuropeMember_C1B76B4B564D86E8F213F54BDE711A58_terseLabel_en-US" xlink:label="lab_us-gaap_EuropeMember_C1B76B4B564D86E8F213F54BDE711A58" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Total Europe</link:label>
    <link:label id="lab_us-gaap_EuropeMember_C1B76B4B564D86E8F213F54BDE711A58_label_en-US" xlink:label="lab_us-gaap_EuropeMember_C1B76B4B564D86E8F213F54BDE711A58" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Europe [Member]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EuropeMember" xlink:label="loc_us-gaap_EuropeMember_C1B76B4B564D86E8F213F54BDE711A58" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_EuropeMember_C1B76B4B564D86E8F213F54BDE711A58" xlink:to="lab_us-gaap_EuropeMember_C1B76B4B564D86E8F213F54BDE711A58" xlink:type="arc" />
    <link:label id="lab_us-gaap_EntityWideRevenueMajorCustomerLineItems_1AE2D7A7EA0083709F9CF54BDE71895B_terseLabel_en-US" xlink:label="lab_us-gaap_EntityWideRevenueMajorCustomerLineItems_1AE2D7A7EA0083709F9CF54BDE71895B" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Revenue, Major Customer [Line Items]</link:label>
    <link:label id="lab_us-gaap_EntityWideRevenueMajorCustomerLineItems_1AE2D7A7EA0083709F9CF54BDE71895B_label_en-US" xlink:label="lab_us-gaap_EntityWideRevenueMajorCustomerLineItems_1AE2D7A7EA0083709F9CF54BDE71895B" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Revenue, Major Customer [Line Items]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EntityWideRevenueMajorCustomerLineItems" xlink:label="loc_us-gaap_EntityWideRevenueMajorCustomerLineItems_1AE2D7A7EA0083709F9CF54BDE71895B" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_EntityWideRevenueMajorCustomerLineItems_1AE2D7A7EA0083709F9CF54BDE71895B" xlink:to="lab_us-gaap_EntityWideRevenueMajorCustomerLineItems_1AE2D7A7EA0083709F9CF54BDE71895B" xlink:type="arc" />
    <link:label id="lab_asys_EntityWideRevenueMajorCustomerNumber_1EBF134C389A822CF77CF54BDE71A738_terseLabel_en-US" xlink:label="lab_asys_EntityWideRevenueMajorCustomerNumber_1EBF134C389A822CF77CF54BDE71A738" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Revenue, number of major customers</link:label>
    <link:label id="lab_asys_EntityWideRevenueMajorCustomerNumber_1EBF134C389A822CF77CF54BDE71A738_label_en-US" xlink:label="lab_asys_EntityWideRevenueMajorCustomerNumber_1EBF134C389A822CF77CF54BDE71A738" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Entity-Wide Revenue, Major Customer, Number</link:label>
    <link:label id="lab_asys_EntityWideRevenueMajorCustomerNumber_1EBF134C389A822CF77CF54BDE71A738_documentation_en-US" xlink:label="lab_asys_EntityWideRevenueMajorCustomerNumber_1EBF134C389A822CF77CF54BDE71A738" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Entity-Wide Revenue, Major Customer, Number</link:label>
    <link:loc xlink:href="asys-20150630.xsd#asys_EntityWideRevenueMajorCustomerNumber" xlink:label="loc_asys_EntityWideRevenueMajorCustomerNumber_1EBF134C389A822CF77CF54BDE71A738" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_EntityWideRevenueMajorCustomerNumber_1EBF134C389A822CF77CF54BDE71A738" xlink:to="lab_asys_EntityWideRevenueMajorCustomerNumber_1EBF134C389A822CF77CF54BDE71A738" xlink:type="arc" />
    <link:label id="lab_asys_RevenuesPercentage_FC9F381876F11CC8326BF54BDE715E82_terseLabel_en-US" xlink:label="lab_asys_RevenuesPercentage_FC9F381876F11CC8326BF54BDE715E82" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Revenues, percentage</link:label>
    <link:label id="lab_asys_RevenuesPercentage_FC9F381876F11CC8326BF54BDE715E82_label_en-US" xlink:label="lab_asys_RevenuesPercentage_FC9F381876F11CC8326BF54BDE715E82" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Revenues, Percentage</link:label>
    <link:label id="lab_asys_RevenuesPercentage_FC9F381876F11CC8326BF54BDE715E82_documentation_en-US" xlink:label="lab_asys_RevenuesPercentage_FC9F381876F11CC8326BF54BDE715E82" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Revenues, Percentage</link:label>
    <link:loc xlink:href="asys-20150630.xsd#asys_RevenuesPercentage" xlink:label="loc_asys_RevenuesPercentage_FC9F381876F11CC8326BF54BDE715E82" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_RevenuesPercentage_FC9F381876F11CC8326BF54BDE715E82" xlink:to="lab_asys_RevenuesPercentage_FC9F381876F11CC8326BF54BDE715E82" xlink:type="arc" />
    <link:label id="lab_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_7C96A80113826DBF6A7CF54BDE32B1CB_terseLabel_en-US" xlink:label="lab_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_7C96A80113826DBF6A7CF54BDE32B1CB" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Finite-Lived Intangible Assets by Major Class [Axis]</link:label>
    <link:label id="lab_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_7C96A80113826DBF6A7CF54BDE32B1CB_label_en-US" xlink:label="lab_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_7C96A80113826DBF6A7CF54BDE32B1CB" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Finite-Lived Intangible Assets by Major Class [Axis]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_7C96A80113826DBF6A7CF54BDE32B1CB" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_7C96A80113826DBF6A7CF54BDE32B1CB" xlink:to="lab_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_7C96A80113826DBF6A7CF54BDE32B1CB" xlink:type="arc" />
    <link:label id="lab_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_CC5ED128D761CC75AB7CF54BDE325088_terseLabel_en-US" xlink:label="lab_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_CC5ED128D761CC75AB7CF54BDE325088" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Finite-Lived Intangible Assets, Major Class Name [Domain]</link:label>
    <link:label id="lab_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_CC5ED128D761CC75AB7CF54BDE325088_label_en-US" xlink:label="lab_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_CC5ED128D761CC75AB7CF54BDE325088" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Finite-Lived Intangible Assets, Major Class Name [Domain]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_CC5ED128D761CC75AB7CF54BDE325088" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_CC5ED128D761CC75AB7CF54BDE325088" xlink:to="lab_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_CC5ED128D761CC75AB7CF54BDE325088" xlink:type="arc" />
    <link:label id="lab_us-gaap_TradeNamesMember_7130C288EA9581A0FD33F54BDE3290C8_terseLabel_en-US" xlink:label="lab_us-gaap_TradeNamesMember_7130C288EA9581A0FD33F54BDE3290C8" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Trade names</link:label>
    <link:label id="lab_us-gaap_TradeNamesMember_7130C288EA9581A0FD33F54BDE3290C8_label_en-US" xlink:label="lab_us-gaap_TradeNamesMember_7130C288EA9581A0FD33F54BDE3290C8" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Trade Names [Member]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_TradeNamesMember" xlink:label="loc_us-gaap_TradeNamesMember_7130C288EA9581A0FD33F54BDE3290C8" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_TradeNamesMember_7130C288EA9581A0FD33F54BDE3290C8" xlink:to="lab_us-gaap_TradeNamesMember_7130C288EA9581A0FD33F54BDE3290C8" xlink:type="arc" />
    <link:label id="lab_us-gaap_StatementBusinessSegmentsAxis_5E62123B58C98BE6ECDCF54BDE32206F_terseLabel_en-US" xlink:label="lab_us-gaap_StatementBusinessSegmentsAxis_5E62123B58C98BE6ECDCF54BDE32206F" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Business Segments [Axis]</link:label>
    <link:label id="lab_us-gaap_StatementBusinessSegmentsAxis_5E62123B58C98BE6ECDCF54BDE32206F_label_en-US" xlink:label="lab_us-gaap_StatementBusinessSegmentsAxis_5E62123B58C98BE6ECDCF54BDE32206F" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Segments [Axis]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StatementBusinessSegmentsAxis" xlink:label="loc_us-gaap_StatementBusinessSegmentsAxis_5E62123B58C98BE6ECDCF54BDE32206F" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_StatementBusinessSegmentsAxis_5E62123B58C98BE6ECDCF54BDE32206F" xlink:to="lab_us-gaap_StatementBusinessSegmentsAxis_5E62123B58C98BE6ECDCF54BDE32206F" xlink:type="arc" />
    <link:label id="lab_us-gaap_SegmentDomain_C9ECDE00DDBB166C6EE1F54BDE329C87_terseLabel_en-US" xlink:label="lab_us-gaap_SegmentDomain_C9ECDE00DDBB166C6EE1F54BDE329C87" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Segment [Domain]</link:label>
    <link:label id="lab_us-gaap_SegmentDomain_C9ECDE00DDBB166C6EE1F54BDE329C87_label_en-US" xlink:label="lab_us-gaap_SegmentDomain_C9ECDE00DDBB166C6EE1F54BDE329C87" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Segments [Domain]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SegmentDomain" xlink:label="loc_us-gaap_SegmentDomain_C9ECDE00DDBB166C6EE1F54BDE329C87" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_SegmentDomain_C9ECDE00DDBB166C6EE1F54BDE329C87" xlink:to="lab_us-gaap_SegmentDomain_C9ECDE00DDBB166C6EE1F54BDE329C87" xlink:type="arc" />
    <link:label id="lab_asys_SemiconductorEquipmentMember_03CE439B3070B71924AEF54BDE32516B_terseLabel_en-US" xlink:label="lab_asys_SemiconductorEquipmentMember_03CE439B3070B71924AEF54BDE32516B" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Semiconductor</link:label>
    <link:label id="lab_asys_SemiconductorEquipmentMember_03CE439B3070B71924AEF54BDE32516B_label_en-US" xlink:label="lab_asys_SemiconductorEquipmentMember_03CE439B3070B71924AEF54BDE32516B" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Semiconductor Equipment [Member]</link:label>
    <link:label id="lab_asys_SemiconductorEquipmentMember_03CE439B3070B71924AEF54BDE32516B_documentation_en-US" xlink:label="lab_asys_SemiconductorEquipmentMember_03CE439B3070B71924AEF54BDE32516B" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Semiconductor Equipment</link:label>
    <link:loc xlink:href="asys-20150630.xsd#asys_SemiconductorEquipmentMember" xlink:label="loc_asys_SemiconductorEquipmentMember_03CE439B3070B71924AEF54BDE32516B" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_SemiconductorEquipmentMember_03CE439B3070B71924AEF54BDE32516B" xlink:to="lab_asys_SemiconductorEquipmentMember_03CE439B3070B71924AEF54BDE32516B" xlink:type="arc" />
    <link:label id="lab_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNet_041AB2CF8DF5503E878DF54BDE3385D1_terseLabel_en-US" xlink:label="lab_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNet_041AB2CF8DF5503E878DF54BDE3385D1" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Fair value of net tangible assets acquired</link:label>
    <link:label id="lab_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNet_041AB2CF8DF5503E878DF54BDE3385D1_label_en-US" xlink:label="lab_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNet_041AB2CF8DF5503E878DF54BDE3385D1" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Business Combination, Recognized Identifiable Assets Acquired and Liabilities Assumed, Net</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNet" xlink:label="loc_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNet_041AB2CF8DF5503E878DF54BDE3385D1" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNet_041AB2CF8DF5503E878DF54BDE3385D1" xlink:to="lab_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNet_041AB2CF8DF5503E878DF54BDE3385D1" xlink:type="arc" />
    <link:label id="lab_us-gaap_Goodwill_967A6BE0B34FA03BFB53F54BDE3343DF_terseLabel_en-US" xlink:label="lab_us-gaap_Goodwill_967A6BE0B34FA03BFB53F54BDE3343DF" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Goodwill</link:label>
    <link:label id="lab_us-gaap_Goodwill_967A6BE0B34FA03BFB53F54BDE3343DF_label_en-US" xlink:label="lab_us-gaap_Goodwill_967A6BE0B34FA03BFB53F54BDE3343DF" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Goodwill</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_Goodwill" xlink:label="loc_us-gaap_Goodwill_967A6BE0B34FA03BFB53F54BDE3343DF" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_Goodwill_967A6BE0B34FA03BFB53F54BDE3343DF" xlink:to="lab_us-gaap_Goodwill_967A6BE0B34FA03BFB53F54BDE3343DF" xlink:type="arc" />
    <link:label id="lab_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibleAssetsOtherThanGoodwill_713264EE8D103495BC1DF54BDE33DA55_terseLabel_en-US" xlink:label="lab_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibleAssetsOtherThanGoodwill_713264EE8D103495BC1DF54BDE33DA55" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Identifiable intangible assets</link:label>
    <link:label id="lab_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibleAssetsOtherThanGoodwill_713264EE8D103495BC1DF54BDE33DA55_label_en-US" xlink:label="lab_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibleAssetsOtherThanGoodwill_713264EE8D103495BC1DF54BDE33DA55" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Business Combination, Recognized Identifiable Assets Acquired and Liabilities Assumed, Intangible Assets, Other than Goodwill</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibleAssetsOtherThanGoodwill" xlink:label="loc_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibleAssetsOtherThanGoodwill_713264EE8D103495BC1DF54BDE33DA55" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibleAssetsOtherThanGoodwill_713264EE8D103495BC1DF54BDE33DA55" xlink:to="lab_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibleAssetsOtherThanGoodwill_713264EE8D103495BC1DF54BDE33DA55" xlink:type="arc" />
    <link:label id="lab_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredGoodwillAndLiabilitiesAssumedNet_D13ABFA0684FCC1D29E3F54BDE338B96_totalLabel_en-US" xlink:label="lab_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredGoodwillAndLiabilitiesAssumedNet_D13ABFA0684FCC1D29E3F54BDE338B96" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:type="resource" xml:lang="en-US">Total consideration allocated</link:label>
    <link:label id="lab_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredGoodwillAndLiabilitiesAssumedNet_D13ABFA0684FCC1D29E3F54BDE338B96_label_en-US" xlink:label="lab_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredGoodwillAndLiabilitiesAssumedNet_D13ABFA0684FCC1D29E3F54BDE338B96" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Business Combination, Recognized Identifiable Assets Acquired, Goodwill, and Liabilities Assumed, Net</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredGoodwillAndLiabilitiesAssumedNet" xlink:label="loc_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredGoodwillAndLiabilitiesAssumedNet_D13ABFA0684FCC1D29E3F54BDE338B96" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredGoodwillAndLiabilitiesAssumedNet_D13ABFA0684FCC1D29E3F54BDE338B96" xlink:to="lab_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredGoodwillAndLiabilitiesAssumedNet_D13ABFA0684FCC1D29E3F54BDE338B96" xlink:type="arc" />
    <link:label id="lab_us-gaap_FiniteLivedIntangibleAssetUsefulLife_61819B34772EFFF93D0AF54BDE33014E_terseLabel_en-US" xlink:label="lab_us-gaap_FiniteLivedIntangibleAssetUsefulLife_61819B34772EFFF93D0AF54BDE33014E" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Useful Life (in years)</link:label>
    <link:label id="lab_us-gaap_FiniteLivedIntangibleAssetUsefulLife_61819B34772EFFF93D0AF54BDE33014E_label_en-US" xlink:label="lab_us-gaap_FiniteLivedIntangibleAssetUsefulLife_61819B34772EFFF93D0AF54BDE33014E" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Finite-Lived Intangible Asset, Useful Life</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetUsefulLife" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetUsefulLife_61819B34772EFFF93D0AF54BDE33014E" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_FiniteLivedIntangibleAssetUsefulLife_61819B34772EFFF93D0AF54BDE33014E" xlink:to="lab_us-gaap_FiniteLivedIntangibleAssetUsefulLife_61819B34772EFFF93D0AF54BDE33014E" xlink:type="arc" />
    <link:label id="lab_us-gaap_GoodwillAcquiredDuringPeriod_2D5335C2789FA272E7E8F54BDE333453_terseLabel_en-US" xlink:label="lab_us-gaap_GoodwillAcquiredDuringPeriod_2D5335C2789FA272E7E8F54BDE333453" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Goodwill recognized due to acquisitions</link:label>
    <link:label id="lab_us-gaap_GoodwillAcquiredDuringPeriod_2D5335C2789FA272E7E8F54BDE333453_label_en-US" xlink:label="lab_us-gaap_GoodwillAcquiredDuringPeriod_2D5335C2789FA272E7E8F54BDE333453" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Goodwill, Acquired During Period</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GoodwillAcquiredDuringPeriod" xlink:label="loc_us-gaap_GoodwillAcquiredDuringPeriod_2D5335C2789FA272E7E8F54BDE333453" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_GoodwillAcquiredDuringPeriod_2D5335C2789FA272E7E8F54BDE333453" xlink:to="lab_us-gaap_GoodwillAcquiredDuringPeriod_2D5335C2789FA272E7E8F54BDE333453" xlink:type="arc" />
    <link:label id="lab_us-gaap_BusinessCombinationAcquisitionRelatedCosts_06DFF24705CA34CE117EF54BDE33C049_terseLabel_en-US" xlink:label="lab_us-gaap_BusinessCombinationAcquisitionRelatedCosts_06DFF24705CA34CE117EF54BDE33C049" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Transaction-related costs</link:label>
    <link:label id="lab_us-gaap_BusinessCombinationAcquisitionRelatedCosts_06DFF24705CA34CE117EF54BDE33C049_label_en-US" xlink:label="lab_us-gaap_BusinessCombinationAcquisitionRelatedCosts_06DFF24705CA34CE117EF54BDE33C049" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Business Combination, Acquisition Related Costs</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessCombinationAcquisitionRelatedCosts" xlink:label="loc_us-gaap_BusinessCombinationAcquisitionRelatedCosts_06DFF24705CA34CE117EF54BDE33C049" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_BusinessCombinationAcquisitionRelatedCosts_06DFF24705CA34CE117EF54BDE33C049" xlink:to="lab_us-gaap_BusinessCombinationAcquisitionRelatedCosts_06DFF24705CA34CE117EF54BDE33C049" xlink:type="arc" />
    <link:label id="lab_asys_ScheduleOfAcquiredFiniteAndIndefiniteLivedIntangibleAssetByMajorClassTable_A445E375B8811DA73338F54BDEC2E013_terseLabel_en-US" xlink:label="lab_asys_ScheduleOfAcquiredFiniteAndIndefiniteLivedIntangibleAssetByMajorClassTable_A445E375B8811DA73338F54BDEC2E013" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Schedule of Acquired Finite and Indefinite-Lived Intangible Asset by Major Class [Table]</link:label>
    <link:label id="lab_asys_ScheduleOfAcquiredFiniteAndIndefiniteLivedIntangibleAssetByMajorClassTable_A445E375B8811DA73338F54BDEC2E013_label_en-US" xlink:label="lab_asys_ScheduleOfAcquiredFiniteAndIndefiniteLivedIntangibleAssetByMajorClassTable_A445E375B8811DA73338F54BDEC2E013" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Schedule of Acquired Finite and Indefinite-Lived Intangible Asset by Major Class [Table]</link:label>
    <link:label id="lab_asys_ScheduleOfAcquiredFiniteAndIndefiniteLivedIntangibleAssetByMajorClassTable_A445E375B8811DA73338F54BDEC2E013_documentation_en-US" xlink:label="lab_asys_ScheduleOfAcquiredFiniteAndIndefiniteLivedIntangibleAssetByMajorClassTable_A445E375B8811DA73338F54BDEC2E013" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Schedule of Acquired Finite and Indefinite-Lived Intangible Asset by Major Class [Table]</link:label>
    <link:loc xlink:href="asys-20150630.xsd#asys_ScheduleOfAcquiredFiniteAndIndefiniteLivedIntangibleAssetByMajorClassTable" xlink:label="loc_asys_ScheduleOfAcquiredFiniteAndIndefiniteLivedIntangibleAssetByMajorClassTable_A445E375B8811DA73338F54BDEC2E013" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_ScheduleOfAcquiredFiniteAndIndefiniteLivedIntangibleAssetByMajorClassTable_A445E375B8811DA73338F54BDEC2E013" xlink:to="lab_asys_ScheduleOfAcquiredFiniteAndIndefiniteLivedIntangibleAssetByMajorClassTable_A445E375B8811DA73338F54BDEC2E013" xlink:type="arc" />
    <link:label id="lab_asys_SoLayTecB.V.Member_2D4537CC3DEDE4E5A3A5F54BDEC2FF88_terseLabel_en-US" xlink:label="lab_asys_SoLayTecB.V.Member_2D4537CC3DEDE4E5A3A5F54BDEC2FF88" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">SoLayTec, B.V.</link:label>
    <link:label id="lab_asys_SoLayTecB.V.Member_2D4537CC3DEDE4E5A3A5F54BDEC2FF88_label_en-US" xlink:label="lab_asys_SoLayTecB.V.Member_2D4537CC3DEDE4E5A3A5F54BDEC2FF88" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">SoLayTec, B.V. [Member]</link:label>
    <link:label id="lab_asys_SoLayTecB.V.Member_2D4537CC3DEDE4E5A3A5F54BDEC2FF88_documentation_en-US" xlink:label="lab_asys_SoLayTecB.V.Member_2D4537CC3DEDE4E5A3A5F54BDEC2FF88" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">SoLayTec, B.V.</link:label>
    <link:loc xlink:href="asys-20150630.xsd#asys_SoLayTecB.V.Member" xlink:label="loc_asys_SoLayTecB.V.Member_2D4537CC3DEDE4E5A3A5F54BDEC2FF88" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_SoLayTecB.V.Member_2D4537CC3DEDE4E5A3A5F54BDEC2FF88" xlink:to="lab_asys_SoLayTecB.V.Member_2D4537CC3DEDE4E5A3A5F54BDEC2FF88" xlink:type="arc" />
    <link:label id="lab_asys_BTUInternationalIncBTUMember_9F290DC1209BB5B58238F54BDEC273B0_terseLabel_en-US" xlink:label="lab_asys_BTUInternationalIncBTUMember_9F290DC1209BB5B58238F54BDEC273B0" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">BTU International, Inc (BTU)</link:label>
    <link:label id="lab_asys_BTUInternationalIncBTUMember_9F290DC1209BB5B58238F54BDEC273B0_label_en-US" xlink:label="lab_asys_BTUInternationalIncBTUMember_9F290DC1209BB5B58238F54BDEC273B0" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">BTU International, Inc (BTU) [Member]</link:label>
    <link:label id="lab_asys_BTUInternationalIncBTUMember_9F290DC1209BB5B58238F54BDEC273B0_documentation_en-US" xlink:label="lab_asys_BTUInternationalIncBTUMember_9F290DC1209BB5B58238F54BDEC273B0" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">BTU International, Inc (BTU)</link:label>
    <link:loc xlink:href="asys-20150630.xsd#asys_BTUInternationalIncBTUMember" xlink:label="loc_asys_BTUInternationalIncBTUMember_9F290DC1209BB5B58238F54BDEC273B0" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_BTUInternationalIncBTUMember_9F290DC1209BB5B58238F54BDEC273B0" xlink:to="lab_asys_BTUInternationalIncBTUMember_9F290DC1209BB5B58238F54BDEC273B0" xlink:type="arc" />
    <link:label id="lab_us-gaap_NoncompeteAgreementsMember_1AE693781B5332EEC0E5F54BDEC3671B_terseLabel_en-US" xlink:label="lab_us-gaap_NoncompeteAgreementsMember_1AE693781B5332EEC0E5F54BDEC3671B" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Non-compete agreements</link:label>
    <link:label id="lab_us-gaap_NoncompeteAgreementsMember_1AE693781B5332EEC0E5F54BDEC3671B_label_en-US" xlink:label="lab_us-gaap_NoncompeteAgreementsMember_1AE693781B5332EEC0E5F54BDEC3671B" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Noncompete Agreements [Member]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NoncompeteAgreementsMember" xlink:label="loc_us-gaap_NoncompeteAgreementsMember_1AE693781B5332EEC0E5F54BDEC3671B" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_NoncompeteAgreementsMember_1AE693781B5332EEC0E5F54BDEC3671B" xlink:to="lab_us-gaap_NoncompeteAgreementsMember_1AE693781B5332EEC0E5F54BDEC3671B" xlink:type="arc" />
    <link:label id="lab_us-gaap_CustomerListsMember_7D9C7F620AFDF2FD88A4F54BDEC39F47_terseLabel_en-US" xlink:label="lab_us-gaap_CustomerListsMember_7D9C7F620AFDF2FD88A4F54BDEC39F47" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Customer lists</link:label>
    <link:label id="lab_us-gaap_CustomerListsMember_7D9C7F620AFDF2FD88A4F54BDEC39F47_label_en-US" xlink:label="lab_us-gaap_CustomerListsMember_7D9C7F620AFDF2FD88A4F54BDEC39F47" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Customer Lists [Member]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CustomerListsMember" xlink:label="loc_us-gaap_CustomerListsMember_7D9C7F620AFDF2FD88A4F54BDEC39F47" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_CustomerListsMember_7D9C7F620AFDF2FD88A4F54BDEC39F47" xlink:to="lab_us-gaap_CustomerListsMember_7D9C7F620AFDF2FD88A4F54BDEC39F47" xlink:type="arc" />
    <link:label id="lab_us-gaap_PatentedTechnologyMember_9599A399DBCF48EBDB08F54BDEC3DB8E_terseLabel_en-US" xlink:label="lab_us-gaap_PatentedTechnologyMember_9599A399DBCF48EBDB08F54BDEC3DB8E" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Technology</link:label>
    <link:label id="lab_us-gaap_PatentedTechnologyMember_9599A399DBCF48EBDB08F54BDEC3DB8E_label_en-US" xlink:label="lab_us-gaap_PatentedTechnologyMember_9599A399DBCF48EBDB08F54BDEC3DB8E" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Patented Technology [Member]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PatentedTechnologyMember" xlink:label="loc_us-gaap_PatentedTechnologyMember_9599A399DBCF48EBDB08F54BDEC3DB8E" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_PatentedTechnologyMember_9599A399DBCF48EBDB08F54BDEC3DB8E" xlink:to="lab_us-gaap_PatentedTechnologyMember_9599A399DBCF48EBDB08F54BDEC3DB8E" xlink:type="arc" />
    <link:label id="lab_us-gaap_InProcessResearchAndDevelopmentMember_3E38FB136113E4CEBEA9F54BDEC32C04_terseLabel_en-US" xlink:label="lab_us-gaap_InProcessResearchAndDevelopmentMember_3E38FB136113E4CEBEA9F54BDEC32C04" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">In-process research and development</link:label>
    <link:label id="lab_us-gaap_InProcessResearchAndDevelopmentMember_3E38FB136113E4CEBEA9F54BDEC32C04_label_en-US" xlink:label="lab_us-gaap_InProcessResearchAndDevelopmentMember_3E38FB136113E4CEBEA9F54BDEC32C04" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">In Process Research and Development [Member]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_InProcessResearchAndDevelopmentMember" xlink:label="loc_us-gaap_InProcessResearchAndDevelopmentMember_3E38FB136113E4CEBEA9F54BDEC32C04" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_InProcessResearchAndDevelopmentMember_3E38FB136113E4CEBEA9F54BDEC32C04" xlink:to="lab_us-gaap_InProcessResearchAndDevelopmentMember_3E38FB136113E4CEBEA9F54BDEC32C04" xlink:type="arc" />
    <link:label id="lab_us-gaap_OtherIntangibleAssetsMember_7A317E3A5211279CB05FF54BDEC3F6AF_terseLabel_en-US" xlink:label="lab_us-gaap_OtherIntangibleAssetsMember_7A317E3A5211279CB05FF54BDEC3F6AF" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Other</link:label>
    <link:label id="lab_us-gaap_OtherIntangibleAssetsMember_7A317E3A5211279CB05FF54BDEC3F6AF_label_en-US" xlink:label="lab_us-gaap_OtherIntangibleAssetsMember_7A317E3A5211279CB05FF54BDEC3F6AF" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Other Intangible Assets [Member]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherIntangibleAssetsMember" xlink:label="loc_us-gaap_OtherIntangibleAssetsMember_7A317E3A5211279CB05FF54BDEC3F6AF" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_OtherIntangibleAssetsMember_7A317E3A5211279CB05FF54BDEC3F6AF" xlink:to="lab_us-gaap_OtherIntangibleAssetsMember_7A317E3A5211279CB05FF54BDEC3F6AF" xlink:type="arc" />
    <link:label id="lab_us-gaap_RangeAxis_94D07FD17C36706EC574F54BDEC345B4_terseLabel_en-US" xlink:label="lab_us-gaap_RangeAxis_94D07FD17C36706EC574F54BDEC345B4" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Range [Axis]</link:label>
    <link:label id="lab_us-gaap_RangeAxis_94D07FD17C36706EC574F54BDEC345B4_label_en-US" xlink:label="lab_us-gaap_RangeAxis_94D07FD17C36706EC574F54BDEC345B4" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Range [Axis]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeAxis" xlink:label="loc_us-gaap_RangeAxis_94D07FD17C36706EC574F54BDEC345B4" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_RangeAxis_94D07FD17C36706EC574F54BDEC345B4" xlink:to="lab_us-gaap_RangeAxis_94D07FD17C36706EC574F54BDEC345B4" xlink:type="arc" />
    <link:label id="lab_us-gaap_RangeMember_24CA7F49544978CD0CADF54BDEC3616E_terseLabel_en-US" xlink:label="lab_us-gaap_RangeMember_24CA7F49544978CD0CADF54BDEC3616E" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Range [Domain]</link:label>
    <link:label id="lab_us-gaap_RangeMember_24CA7F49544978CD0CADF54BDEC3616E_label_en-US" xlink:label="lab_us-gaap_RangeMember_24CA7F49544978CD0CADF54BDEC3616E" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Range [Domain]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeMember" xlink:label="loc_us-gaap_RangeMember_24CA7F49544978CD0CADF54BDEC3616E" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_RangeMember_24CA7F49544978CD0CADF54BDEC3616E" xlink:to="lab_us-gaap_RangeMember_24CA7F49544978CD0CADF54BDEC3616E" xlink:type="arc" />
    <link:label id="lab_us-gaap_MinimumMember_7A81C9F51F847BF444A5F54BDEC35646_terseLabel_en-US" xlink:label="lab_us-gaap_MinimumMember_7A81C9F51F847BF444A5F54BDEC35646" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Minimum</link:label>
    <link:label id="lab_us-gaap_MinimumMember_7A81C9F51F847BF444A5F54BDEC35646_label_en-US" xlink:label="lab_us-gaap_MinimumMember_7A81C9F51F847BF444A5F54BDEC35646" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Minimum [Member]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MinimumMember" xlink:label="loc_us-gaap_MinimumMember_7A81C9F51F847BF444A5F54BDEC35646" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_MinimumMember_7A81C9F51F847BF444A5F54BDEC35646" xlink:to="lab_us-gaap_MinimumMember_7A81C9F51F847BF444A5F54BDEC35646" xlink:type="arc" />
    <link:label id="lab_us-gaap_MaximumMember_7A2AB52D1B13498AE4DCF54BDEC336CD_terseLabel_en-US" xlink:label="lab_us-gaap_MaximumMember_7A2AB52D1B13498AE4DCF54BDEC336CD" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Maximum</link:label>
    <link:label id="lab_us-gaap_MaximumMember_7A2AB52D1B13498AE4DCF54BDEC336CD_label_en-US" xlink:label="lab_us-gaap_MaximumMember_7A2AB52D1B13498AE4DCF54BDEC336CD" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Maximum [Member]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MaximumMember" xlink:label="loc_us-gaap_MaximumMember_7A2AB52D1B13498AE4DCF54BDEC336CD" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_MaximumMember_7A2AB52D1B13498AE4DCF54BDEC336CD" xlink:to="lab_us-gaap_MaximumMember_7A2AB52D1B13498AE4DCF54BDEC336CD" xlink:type="arc" />
    <link:label id="lab_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems_05D961EEF34725D95806F54BDEC450F3_terseLabel_en-US" xlink:label="lab_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems_05D961EEF34725D95806F54BDEC450F3" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]</link:label>
    <link:label id="lab_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems_05D961EEF34725D95806F54BDEC450F3_label_en-US" xlink:label="lab_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems_05D961EEF34725D95806F54BDEC450F3" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]</link:label>
    <link:label id="lab_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems_05D961EEF34725D95806F54BDEC450F3_documentation_en-US" xlink:label="lab_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems_05D961EEF34725D95806F54BDEC450F3" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]</link:label>
    <link:loc xlink:href="asys-20150630.xsd#asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems" xlink:label="loc_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems_05D961EEF34725D95806F54BDEC450F3" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems_05D961EEF34725D95806F54BDEC450F3" xlink:to="lab_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems_05D961EEF34725D95806F54BDEC450F3" xlink:type="arc" />
    <link:label id="lab_us-gaap_BusinessAcquisitionPercentageOfVotingInterestsAcquired_846D51724CEB78096570F54BDEC46157_terseLabel_en-US" xlink:label="lab_us-gaap_BusinessAcquisitionPercentageOfVotingInterestsAcquired_846D51724CEB78096570F54BDEC46157" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Percentage of voting interests acquired</link:label>
    <link:label id="lab_us-gaap_BusinessAcquisitionPercentageOfVotingInterestsAcquired_846D51724CEB78096570F54BDEC46157_label_en-US" xlink:label="lab_us-gaap_BusinessAcquisitionPercentageOfVotingInterestsAcquired_846D51724CEB78096570F54BDEC46157" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Business Acquisition, Percentage of Voting Interests Acquired</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionPercentageOfVotingInterestsAcquired" xlink:label="loc_us-gaap_BusinessAcquisitionPercentageOfVotingInterestsAcquired_846D51724CEB78096570F54BDEC46157" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_BusinessAcquisitionPercentageOfVotingInterestsAcquired_846D51724CEB78096570F54BDEC46157" xlink:to="lab_us-gaap_BusinessAcquisitionPercentageOfVotingInterestsAcquired_846D51724CEB78096570F54BDEC46157" xlink:type="arc" />
    <link:label id="lab_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibles_350BAADC7473DBF1D40BF54BDEC4A21F_terseLabel_en-US" xlink:label="lab_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibles_350BAADC7473DBF1D40BF54BDEC4A21F" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Intangible assets acquired</link:label>
    <link:label id="lab_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibles_350BAADC7473DBF1D40BF54BDEC4A21F_label_en-US" xlink:label="lab_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibles_350BAADC7473DBF1D40BF54BDEC4A21F" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Business Combination, Recognized Identifiable Assets Acquired and Liabilities Assumed, Finite-Lived Intangibles</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibles" xlink:label="loc_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibles_350BAADC7473DBF1D40BF54BDEC4A21F" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibles_350BAADC7473DBF1D40BF54BDEC4A21F" xlink:to="lab_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibles_350BAADC7473DBF1D40BF54BDEC4A21F" xlink:type="arc" />
    <link:label id="lab_us-gaap_FiniteLivedIntangibleAssetsGross_D5D3865CF157DE4F7777F54BDEC4D7CE_terseLabel_en-US" xlink:label="lab_us-gaap_FiniteLivedIntangibleAssetsGross_D5D3865CF157DE4F7777F54BDEC4D7CE" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Gross Carrying Amount</link:label>
    <link:label id="lab_us-gaap_FiniteLivedIntangibleAssetsGross_D5D3865CF157DE4F7777F54BDEC4D7CE_label_en-US" xlink:label="lab_us-gaap_FiniteLivedIntangibleAssetsGross_D5D3865CF157DE4F7777F54BDEC4D7CE" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Finite-Lived Intangible Assets, Gross</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsGross" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsGross_D5D3865CF157DE4F7777F54BDEC4D7CE" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_FiniteLivedIntangibleAssetsGross_D5D3865CF157DE4F7777F54BDEC4D7CE" xlink:to="lab_us-gaap_FiniteLivedIntangibleAssetsGross_D5D3865CF157DE4F7777F54BDEC4D7CE" xlink:type="arc" />
    <link:label id="lab_us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization_BD21100143F9CCE582D1F54BDEC4C765_negatedTerseLabel_en-US" xlink:label="lab_us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization_BD21100143F9CCE582D1F54BDEC4C765" xlink:role="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:type="resource" xml:lang="en-US">Accumulated Amortization</link:label>
    <link:label id="lab_us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization_BD21100143F9CCE582D1F54BDEC4C765_label_en-US" xlink:label="lab_us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization_BD21100143F9CCE582D1F54BDEC4C765" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Finite-Lived Intangible Assets, Accumulated Amortization</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization_BD21100143F9CCE582D1F54BDEC4C765" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization_BD21100143F9CCE582D1F54BDEC4C765" xlink:to="lab_us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization_BD21100143F9CCE582D1F54BDEC4C765" xlink:type="arc" />
    <link:label id="lab_us-gaap_FiniteLivedIntangibleAssetsNet_10BDA651F307890E502EF54BDEC4B989_totalLabel_en-US" xlink:label="lab_us-gaap_FiniteLivedIntangibleAssetsNet_10BDA651F307890E502EF54BDEC4B989" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:type="resource" xml:lang="en-US">Net Carrying Amount</link:label>
    <link:label id="lab_us-gaap_FiniteLivedIntangibleAssetsNet_10BDA651F307890E502EF54BDEC4B989_label_en-US" xlink:label="lab_us-gaap_FiniteLivedIntangibleAssetsNet_10BDA651F307890E502EF54BDEC4B989" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Finite-Lived Intangible Assets, Net</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsNet" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsNet_10BDA651F307890E502EF54BDEC4B989" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_FiniteLivedIntangibleAssetsNet_10BDA651F307890E502EF54BDEC4B989" xlink:to="lab_us-gaap_FiniteLivedIntangibleAssetsNet_10BDA651F307890E502EF54BDEC4B989" xlink:type="arc" />
    <link:label id="lab_us-gaap_IncomeTaxDisclosureAbstract_AAF214E3DAFC404B339FF54BDE9EC1D5_label_en-US" xlink:label="lab_us-gaap_IncomeTaxDisclosureAbstract_AAF214E3DAFC404B339FF54BDE9EC1D5" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Income Tax Disclosure [Abstract]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncomeTaxDisclosureAbstract" xlink:label="loc_us-gaap_IncomeTaxDisclosureAbstract_AAF214E3DAFC404B339FF54BDE9EC1D5" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_IncomeTaxDisclosureAbstract_AAF214E3DAFC404B339FF54BDE9EC1D5" xlink:to="lab_us-gaap_IncomeTaxDisclosureAbstract_AAF214E3DAFC404B339FF54BDE9EC1D5" xlink:type="arc" />
    <link:label id="lab_us-gaap_IncomeTaxContingencyTable_00B66C876DABB0C89BDAF54BDE9E29FD_terseLabel_en-US" xlink:label="lab_us-gaap_IncomeTaxContingencyTable_00B66C876DABB0C89BDAF54BDE9E29FD" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Income Tax Contingency [Table]</link:label>
    <link:label id="lab_us-gaap_IncomeTaxContingencyTable_00B66C876DABB0C89BDAF54BDE9E29FD_label_en-US" xlink:label="lab_us-gaap_IncomeTaxContingencyTable_00B66C876DABB0C89BDAF54BDE9E29FD" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Income Tax Contingency [Table]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncomeTaxContingencyTable" xlink:label="loc_us-gaap_IncomeTaxContingencyTable_00B66C876DABB0C89BDAF54BDE9E29FD" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_IncomeTaxContingencyTable_00B66C876DABB0C89BDAF54BDE9E29FD" xlink:to="lab_us-gaap_IncomeTaxContingencyTable_00B66C876DABB0C89BDAF54BDE9E29FD" xlink:type="arc" />
    <link:label id="lab_us-gaap_IncomeTaxContingencyLineItems_CEC58CBF507EFED22C4EF54BDE9FB482_terseLabel_en-US" xlink:label="lab_us-gaap_IncomeTaxContingencyLineItems_CEC58CBF507EFED22C4EF54BDE9FB482" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Income Tax Contingency [Line Items]</link:label>
    <link:label id="lab_us-gaap_IncomeTaxContingencyLineItems_CEC58CBF507EFED22C4EF54BDE9FB482_label_en-US" xlink:label="lab_us-gaap_IncomeTaxContingencyLineItems_CEC58CBF507EFED22C4EF54BDE9FB482" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Income Tax Contingency [Line Items]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncomeTaxContingencyLineItems" xlink:label="loc_us-gaap_IncomeTaxContingencyLineItems_CEC58CBF507EFED22C4EF54BDE9FB482" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_IncomeTaxContingencyLineItems_CEC58CBF507EFED22C4EF54BDE9FB482" xlink:to="lab_us-gaap_IncomeTaxContingencyLineItems_CEC58CBF507EFED22C4EF54BDE9FB482" xlink:type="arc" />
    <link:label id="lab_us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount_7FBC949FFBCA836E7A00F55368563AB0_terseLabel_en-US" xlink:label="lab_us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount_7FBC949FFBCA836E7A00F55368563AB0" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Valuation allowance increase</link:label>
    <link:label id="lab_us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount_7FBC949FFBCA836E7A00F55368563AB0_label_en-US" xlink:label="lab_us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount_7FBC949FFBCA836E7A00F55368563AB0" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Valuation Allowance, Deferred Tax Asset, Increase (Decrease), Amount</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount" xlink:label="loc_us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount_7FBC949FFBCA836E7A00F55368563AB0" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount_7FBC949FFBCA836E7A00F55368563AB0" xlink:to="lab_us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount_7FBC949FFBCA836E7A00F55368563AB0" xlink:type="arc" />
    <link:label id="lab_us-gaap_UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate_2FD1905B71D0F1C413FDF54BDE9FAAFB_terseLabel_en-US" xlink:label="lab_us-gaap_UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate_2FD1905B71D0F1C413FDF54BDE9FAAFB" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Unrecognized tax benefits that would impact effective tax rate</link:label>
    <link:label id="lab_us-gaap_UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate_2FD1905B71D0F1C413FDF54BDE9FAAFB_label_en-US" xlink:label="lab_us-gaap_UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate_2FD1905B71D0F1C413FDF54BDE9FAAFB" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Unrecognized Tax Benefits that Would Impact Effective Tax Rate</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate" xlink:label="loc_us-gaap_UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate_2FD1905B71D0F1C413FDF54BDE9FAAFB" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate_2FD1905B71D0F1C413FDF54BDE9FAAFB" xlink:to="lab_us-gaap_UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate_2FD1905B71D0F1C413FDF54BDE9FAAFB" xlink:type="arc" />
    <link:label id="lab_us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued_EE359A8640896175930CF54BDE9FA8A8_terseLabel_en-US" xlink:label="lab_us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued_EE359A8640896175930CF54BDE9FA8A8" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Unrecognized tax benefits, income tax penalties and interest accrued</link:label>
    <link:label id="lab_us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued_EE359A8640896175930CF54BDE9FA8A8_label_en-US" xlink:label="lab_us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued_EE359A8640896175930CF54BDE9FA8A8" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Unrecognized Tax Benefits, Income Tax Penalties and Interest Accrued</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued" xlink:label="loc_us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued_EE359A8640896175930CF54BDE9FA8A8" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued_EE359A8640896175930CF54BDE9FA8A8" xlink:to="lab_us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued_EE359A8640896175930CF54BDE9FA8A8" xlink:type="arc" />
    <link:label id="lab_asys_IncomeTaxExaminationNumberofYearsGenerallyOpenForTaxExaminations_4AE411B8BFBDFA4A9F4DF54BDE9FD0B4_terseLabel_en-US" xlink:label="lab_asys_IncomeTaxExaminationNumberofYearsGenerallyOpenForTaxExaminations_4AE411B8BFBDFA4A9F4DF54BDE9FD0B4" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Number of years open for tax examinations</link:label>
    <link:label id="lab_asys_IncomeTaxExaminationNumberofYearsGenerallyOpenForTaxExaminations_4AE411B8BFBDFA4A9F4DF54BDE9FD0B4_label_en-US" xlink:label="lab_asys_IncomeTaxExaminationNumberofYearsGenerallyOpenForTaxExaminations_4AE411B8BFBDFA4A9F4DF54BDE9FD0B4" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Income Tax Examination, Number of Years Generally Open For Tax Examinations</link:label>
    <link:label id="lab_asys_IncomeTaxExaminationNumberofYearsGenerallyOpenForTaxExaminations_4AE411B8BFBDFA4A9F4DF54BDE9FD0B4_documentation_en-US" xlink:label="lab_asys_IncomeTaxExaminationNumberofYearsGenerallyOpenForTaxExaminations_4AE411B8BFBDFA4A9F4DF54BDE9FD0B4" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Income Tax Examination, Number of Years Generally Open For Tax Examinations</link:label>
    <link:loc xlink:href="asys-20150630.xsd#asys_IncomeTaxExaminationNumberofYearsGenerallyOpenForTaxExaminations" xlink:label="loc_asys_IncomeTaxExaminationNumberofYearsGenerallyOpenForTaxExaminations_4AE411B8BFBDFA4A9F4DF54BDE9FD0B4" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_IncomeTaxExaminationNumberofYearsGenerallyOpenForTaxExaminations_4AE411B8BFBDFA4A9F4DF54BDE9FD0B4" xlink:to="lab_asys_IncomeTaxExaminationNumberofYearsGenerallyOpenForTaxExaminations_4AE411B8BFBDFA4A9F4DF54BDE9FD0B4" xlink:type="arc" />
    <link:label id="lab_us-gaap_StockholdersEquityNoteAbstract_49A948A9507FC8CE4699F541ED8D9AA8_label_en-US" xlink:label="lab_us-gaap_StockholdersEquityNoteAbstract_49A948A9507FC8CE4699F541ED8D9AA8" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Stockholders' Equity Note [Abstract]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StockholdersEquityNoteAbstract" xlink:label="loc_us-gaap_StockholdersEquityNoteAbstract_49A948A9507FC8CE4699F541ED8D9AA8" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_StockholdersEquityNoteAbstract_49A948A9507FC8CE4699F541ED8D9AA8" xlink:to="lab_us-gaap_StockholdersEquityNoteAbstract_49A948A9507FC8CE4699F541ED8D9AA8" xlink:type="arc" />
    <link:label id="lab_us-gaap_StockholdersEquityNoteDisclosureTextBlock_935FEF441FC93CDF3EFCF541ED8D136B_terseLabel_en-US" xlink:label="lab_us-gaap_StockholdersEquityNoteDisclosureTextBlock_935FEF441FC93CDF3EFCF541ED8D136B" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Stockholders' Equity</link:label>
    <link:label id="lab_us-gaap_StockholdersEquityNoteDisclosureTextBlock_935FEF441FC93CDF3EFCF541ED8D136B_label_en-US" xlink:label="lab_us-gaap_StockholdersEquityNoteDisclosureTextBlock_935FEF441FC93CDF3EFCF541ED8D136B" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Stockholders' Equity Note Disclosure [Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StockholdersEquityNoteDisclosureTextBlock" xlink:label="loc_us-gaap_StockholdersEquityNoteDisclosureTextBlock_935FEF441FC93CDF3EFCF541ED8D136B" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_StockholdersEquityNoteDisclosureTextBlock_935FEF441FC93CDF3EFCF541ED8D136B" xlink:to="lab_us-gaap_StockholdersEquityNoteDisclosureTextBlock_935FEF441FC93CDF3EFCF541ED8D136B" xlink:type="arc" />
    <link:label id="lab_us-gaap_ScheduleOfStockByClassTable_2D493512A55DCE4C3EA3F54BDE8BE676_terseLabel_en-US" xlink:label="lab_us-gaap_ScheduleOfStockByClassTable_2D493512A55DCE4C3EA3F54BDE8BE676" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Schedule of Stock by Class [Table]</link:label>
    <link:label id="lab_us-gaap_ScheduleOfStockByClassTable_2D493512A55DCE4C3EA3F54BDE8BE676_label_en-US" xlink:label="lab_us-gaap_ScheduleOfStockByClassTable_2D493512A55DCE4C3EA3F54BDE8BE676" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Schedule of Stock by Class [Table]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfStockByClassTable" xlink:label="loc_us-gaap_ScheduleOfStockByClassTable_2D493512A55DCE4C3EA3F54BDE8BE676" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ScheduleOfStockByClassTable_2D493512A55DCE4C3EA3F54BDE8BE676" xlink:to="lab_us-gaap_ScheduleOfStockByClassTable_2D493512A55DCE4C3EA3F54BDE8BE676" xlink:type="arc" />
    <link:label id="lab_us-gaap_StatementClassOfStockAxis_0D74F58895E7AE8534B3F54BDE8BB023_terseLabel_en-US" xlink:label="lab_us-gaap_StatementClassOfStockAxis_0D74F58895E7AE8534B3F54BDE8BB023" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Class of Stock [Axis]</link:label>
    <link:label id="lab_us-gaap_StatementClassOfStockAxis_0D74F58895E7AE8534B3F54BDE8BB023_label_en-US" xlink:label="lab_us-gaap_StatementClassOfStockAxis_0D74F58895E7AE8534B3F54BDE8BB023" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Class of Stock [Axis]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StatementClassOfStockAxis" xlink:label="loc_us-gaap_StatementClassOfStockAxis_0D74F58895E7AE8534B3F54BDE8BB023" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_StatementClassOfStockAxis_0D74F58895E7AE8534B3F54BDE8BB023" xlink:to="lab_us-gaap_StatementClassOfStockAxis_0D74F58895E7AE8534B3F54BDE8BB023" xlink:type="arc" />
    <link:label id="lab_us-gaap_ClassOfStockDomain_DC1E48DCEAF7222853F1F54BDE8BBB9B_terseLabel_en-US" xlink:label="lab_us-gaap_ClassOfStockDomain_DC1E48DCEAF7222853F1F54BDE8BBB9B" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Class of Stock [Domain]</link:label>
    <link:label id="lab_us-gaap_ClassOfStockDomain_DC1E48DCEAF7222853F1F54BDE8BBB9B_label_en-US" xlink:label="lab_us-gaap_ClassOfStockDomain_DC1E48DCEAF7222853F1F54BDE8BBB9B" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Class of Stock [Domain]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ClassOfStockDomain" xlink:label="loc_us-gaap_ClassOfStockDomain_DC1E48DCEAF7222853F1F54BDE8BBB9B" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ClassOfStockDomain_DC1E48DCEAF7222853F1F54BDE8BBB9B" xlink:to="lab_us-gaap_ClassOfStockDomain_DC1E48DCEAF7222853F1F54BDE8BBB9B" xlink:type="arc" />
    <link:label id="lab_us-gaap_SeriesAPreferredStockMember_36A352091381BACA27F1F54BDE8B0341_terseLabel_en-US" xlink:label="lab_us-gaap_SeriesAPreferredStockMember_36A352091381BACA27F1F54BDE8B0341" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Series A Preferred Stock</link:label>
    <link:label id="lab_us-gaap_SeriesAPreferredStockMember_36A352091381BACA27F1F54BDE8B0341_label_en-US" xlink:label="lab_us-gaap_SeriesAPreferredStockMember_36A352091381BACA27F1F54BDE8B0341" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Series A Preferred Stock [Member]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SeriesAPreferredStockMember" xlink:label="loc_us-gaap_SeriesAPreferredStockMember_36A352091381BACA27F1F54BDE8B0341" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_SeriesAPreferredStockMember_36A352091381BACA27F1F54BDE8B0341" xlink:to="lab_us-gaap_SeriesAPreferredStockMember_36A352091381BACA27F1F54BDE8B0341" xlink:type="arc" />
    <link:label id="lab_us-gaap_ClassOfStockLineItems_90D84FBEE245BF6DC443F54BDE8B31D3_terseLabel_en-US" xlink:label="lab_us-gaap_ClassOfStockLineItems_90D84FBEE245BF6DC443F54BDE8B31D3" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Class of Stock [Line Items]</link:label>
    <link:label id="lab_us-gaap_ClassOfStockLineItems_90D84FBEE245BF6DC443F54BDE8B31D3_label_en-US" xlink:label="lab_us-gaap_ClassOfStockLineItems_90D84FBEE245BF6DC443F54BDE8B31D3" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Class of Stock [Line Items]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ClassOfStockLineItems" xlink:label="loc_us-gaap_ClassOfStockLineItems_90D84FBEE245BF6DC443F54BDE8B31D3" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ClassOfStockLineItems_90D84FBEE245BF6DC443F54BDE8B31D3" xlink:to="lab_us-gaap_ClassOfStockLineItems_90D84FBEE245BF6DC443F54BDE8B31D3" xlink:type="arc" />
    <link:label id="lab_us-gaap_ClassOfWarrantOrRightNumberOfSecuritiesCalledByWarrantsOrRights_F3FBFBC49ECCD9CA35BDF54BDE8B446B_terseLabel_en-US" xlink:label="lab_us-gaap_ClassOfWarrantOrRightNumberOfSecuritiesCalledByWarrantsOrRights_F3FBFBC49ECCD9CA35BDF54BDE8B446B" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Class of warrant or right, number of securities called by warrants or rights</link:label>
    <link:label id="lab_us-gaap_ClassOfWarrantOrRightNumberOfSecuritiesCalledByWarrantsOrRights_F3FBFBC49ECCD9CA35BDF54BDE8B446B_label_en-US" xlink:label="lab_us-gaap_ClassOfWarrantOrRightNumberOfSecuritiesCalledByWarrantsOrRights_F3FBFBC49ECCD9CA35BDF54BDE8B446B" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Class of Warrant or Right, Number of Securities Called by Warrants or Rights</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ClassOfWarrantOrRightNumberOfSecuritiesCalledByWarrantsOrRights" xlink:label="loc_us-gaap_ClassOfWarrantOrRightNumberOfSecuritiesCalledByWarrantsOrRights_F3FBFBC49ECCD9CA35BDF54BDE8B446B" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ClassOfWarrantOrRightNumberOfSecuritiesCalledByWarrantsOrRights_F3FBFBC49ECCD9CA35BDF54BDE8B446B" xlink:to="lab_us-gaap_ClassOfWarrantOrRightNumberOfSecuritiesCalledByWarrantsOrRights_F3FBFBC49ECCD9CA35BDF54BDE8B446B" xlink:type="arc" />
    <link:label id="lab_us-gaap_ClassOfWarrantOrRightExercisePriceOfWarrantsOrRights1_897AB86ABE597958B496F54BDE8B50E5_terseLabel_en-US" xlink:label="lab_us-gaap_ClassOfWarrantOrRightExercisePriceOfWarrantsOrRights1_897AB86ABE597958B496F54BDE8B50E5" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Exercise price of rights</link:label>
    <link:label id="lab_us-gaap_ClassOfWarrantOrRightExercisePriceOfWarrantsOrRights1_897AB86ABE597958B496F54BDE8B50E5_label_en-US" xlink:label="lab_us-gaap_ClassOfWarrantOrRightExercisePriceOfWarrantsOrRights1_897AB86ABE597958B496F54BDE8B50E5" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Class of Warrant or Right, Exercise Price of Warrants or Rights</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ClassOfWarrantOrRightExercisePriceOfWarrantsOrRights1" xlink:label="loc_us-gaap_ClassOfWarrantOrRightExercisePriceOfWarrantsOrRights1_897AB86ABE597958B496F54BDE8B50E5" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ClassOfWarrantOrRightExercisePriceOfWarrantsOrRights1_897AB86ABE597958B496F54BDE8B50E5" xlink:to="lab_us-gaap_ClassOfWarrantOrRightExercisePriceOfWarrantsOrRights1_897AB86ABE597958B496F54BDE8B50E5" xlink:type="arc" />
    <link:label id="lab_asys_ClassOfWarrantOrRightExpirationPeriod_9CE538F6A93AEBAC2672F57F6BE70FD6_terseLabel_en-US" xlink:label="lab_asys_ClassOfWarrantOrRightExpirationPeriod_9CE538F6A93AEBAC2672F57F6BE70FD6" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Rights expiration period</link:label>
    <link:label id="lab_asys_ClassOfWarrantOrRightExpirationPeriod_9CE538F6A93AEBAC2672F57F6BE70FD6_label_en-US" xlink:label="lab_asys_ClassOfWarrantOrRightExpirationPeriod_9CE538F6A93AEBAC2672F57F6BE70FD6" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Class Of Warrant Or Right, Expiration Period</link:label>
    <link:label id="lab_asys_ClassOfWarrantOrRightExpirationPeriod_9CE538F6A93AEBAC2672F57F6BE70FD6_documentation_en-US" xlink:label="lab_asys_ClassOfWarrantOrRightExpirationPeriod_9CE538F6A93AEBAC2672F57F6BE70FD6" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Class Of Warrant Or Right, Expiration Period</link:label>
    <link:loc xlink:href="asys-20150630.xsd#asys_ClassOfWarrantOrRightExpirationPeriod" xlink:label="loc_asys_ClassOfWarrantOrRightExpirationPeriod_9CE538F6A93AEBAC2672F57F6BE70FD6" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_ClassOfWarrantOrRightExpirationPeriod_9CE538F6A93AEBAC2672F57F6BE70FD6" xlink:to="lab_asys_ClassOfWarrantOrRightExpirationPeriod_9CE538F6A93AEBAC2672F57F6BE70FD6" xlink:type="arc" />
    <link:label id="lab_asys_CommonStockMinimumPercentOwnershipForExerciseOfRights_C57C7BD93B2698C2FB0CF5899C1CF37A_terseLabel_en-US" xlink:label="lab_asys_CommonStockMinimumPercentOwnershipForExerciseOfRights_C57C7BD93B2698C2FB0CF5899C1CF37A" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Minimum percent ownership of common stock for exercise of rights</link:label>
    <link:label id="lab_asys_CommonStockMinimumPercentOwnershipForExerciseOfRights_C57C7BD93B2698C2FB0CF5899C1CF37A_label_en-US" xlink:label="lab_asys_CommonStockMinimumPercentOwnershipForExerciseOfRights_C57C7BD93B2698C2FB0CF5899C1CF37A" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Common Stock, Minimum Percent Ownership For Exercise Of Rights</link:label>
    <link:label id="lab_asys_CommonStockMinimumPercentOwnershipForExerciseOfRights_C57C7BD93B2698C2FB0CF5899C1CF37A_documentation_en-US" xlink:label="lab_asys_CommonStockMinimumPercentOwnershipForExerciseOfRights_C57C7BD93B2698C2FB0CF5899C1CF37A" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Common Stock, Minimum Percent Ownership For Exercise Of Rights</link:label>
    <link:loc xlink:href="asys-20150630.xsd#asys_CommonStockMinimumPercentOwnershipForExerciseOfRights" xlink:label="loc_asys_CommonStockMinimumPercentOwnershipForExerciseOfRights_C57C7BD93B2698C2FB0CF5899C1CF37A" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_CommonStockMinimumPercentOwnershipForExerciseOfRights_C57C7BD93B2698C2FB0CF5899C1CF37A" xlink:to="lab_asys_CommonStockMinimumPercentOwnershipForExerciseOfRights_C57C7BD93B2698C2FB0CF5899C1CF37A" xlink:type="arc" />
    <link:label id="lab_dei_LegalEntityAxis_48415A109ACAC6CDA197F541ED823555_terseLabel_en-US" xlink:label="lab_dei_LegalEntityAxis_48415A109ACAC6CDA197F541ED823555" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Legal Entity [Axis]</link:label>
    <link:label id="lab_dei_LegalEntityAxis_48415A109ACAC6CDA197F541ED823555_label_en-US" xlink:label="lab_dei_LegalEntityAxis_48415A109ACAC6CDA197F541ED823555" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Legal Entity [Axis]</link:label>
    <link:loc xlink:href="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd#dei_LegalEntityAxis" xlink:label="loc_dei_LegalEntityAxis_48415A109ACAC6CDA197F541ED823555" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_dei_LegalEntityAxis_48415A109ACAC6CDA197F541ED823555" xlink:to="lab_dei_LegalEntityAxis_48415A109ACAC6CDA197F541ED823555" xlink:type="arc" />
    <link:label id="lab_dei_EntityDomain_357A5F16BE1133AAAE0AF541ED8243E2_terseLabel_en-US" xlink:label="lab_dei_EntityDomain_357A5F16BE1133AAAE0AF541ED8243E2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Entity [Domain]</link:label>
    <link:label id="lab_dei_EntityDomain_357A5F16BE1133AAAE0AF541ED8243E2_label_en-US" xlink:label="lab_dei_EntityDomain_357A5F16BE1133AAAE0AF541ED8243E2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Entity [Domain]</link:label>
    <link:loc xlink:href="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd#dei_EntityDomain" xlink:label="loc_dei_EntityDomain_357A5F16BE1133AAAE0AF541ED8243E2" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_dei_EntityDomain_357A5F16BE1133AAAE0AF541ED8243E2" xlink:to="lab_dei_EntityDomain_357A5F16BE1133AAAE0AF541ED8243E2" xlink:type="arc" />
    <link:label id="lab_us-gaap_ParentCompanyMember_4274ABDFEDB55B61756BF541ED8232F7_terseLabel_en-US" xlink:label="lab_us-gaap_ParentCompanyMember_4274ABDFEDB55B61756BF541ED8232F7" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Parent Company</link:label>
    <link:label id="lab_us-gaap_ParentCompanyMember_4274ABDFEDB55B61756BF541ED8232F7_label_en-US" xlink:label="lab_us-gaap_ParentCompanyMember_4274ABDFEDB55B61756BF541ED8232F7" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Parent Company [Member]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ParentCompanyMember" xlink:label="loc_us-gaap_ParentCompanyMember_4274ABDFEDB55B61756BF541ED8232F7" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ParentCompanyMember_4274ABDFEDB55B61756BF541ED8232F7" xlink:to="lab_us-gaap_ParentCompanyMember_4274ABDFEDB55B61756BF541ED8232F7" xlink:type="arc" />
    <link:label id="lab_us-gaap_RelatedPartyTransactionAxis_03D0132D2FEBC17676B7F541ED833DC6_terseLabel_en-US" xlink:label="lab_us-gaap_RelatedPartyTransactionAxis_03D0132D2FEBC17676B7F541ED833DC6" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Related Party Transaction [Axis]</link:label>
    <link:label id="lab_us-gaap_RelatedPartyTransactionAxis_03D0132D2FEBC17676B7F541ED833DC6_label_en-US" xlink:label="lab_us-gaap_RelatedPartyTransactionAxis_03D0132D2FEBC17676B7F541ED833DC6" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Related Party Transaction [Axis]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RelatedPartyTransactionAxis" xlink:label="loc_us-gaap_RelatedPartyTransactionAxis_03D0132D2FEBC17676B7F541ED833DC6" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_RelatedPartyTransactionAxis_03D0132D2FEBC17676B7F541ED833DC6" xlink:to="lab_us-gaap_RelatedPartyTransactionAxis_03D0132D2FEBC17676B7F541ED833DC6" xlink:type="arc" />
    <link:label id="lab_us-gaap_RelatedPartyTransactionDomain_424AC8637604BBAC9B0DF541ED831679_terseLabel_en-US" xlink:label="lab_us-gaap_RelatedPartyTransactionDomain_424AC8637604BBAC9B0DF541ED831679" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Related Party Transaction [Domain]</link:label>
    <link:label id="lab_us-gaap_RelatedPartyTransactionDomain_424AC8637604BBAC9B0DF541ED831679_label_en-US" xlink:label="lab_us-gaap_RelatedPartyTransactionDomain_424AC8637604BBAC9B0DF541ED831679" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Related Party Transaction [Domain]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RelatedPartyTransactionDomain" xlink:label="loc_us-gaap_RelatedPartyTransactionDomain_424AC8637604BBAC9B0DF541ED831679" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_RelatedPartyTransactionDomain_424AC8637604BBAC9B0DF541ED831679" xlink:to="lab_us-gaap_RelatedPartyTransactionDomain_424AC8637604BBAC9B0DF541ED831679" xlink:type="arc" />
    <link:label id="lab_asys_MergerAgreementMember_AD9AA88DD3C7FA638A53F541ED83656C_terseLabel_en-US" xlink:label="lab_asys_MergerAgreementMember_AD9AA88DD3C7FA638A53F541ED83656C" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Merger Agreement</link:label>
    <link:label id="lab_asys_MergerAgreementMember_AD9AA88DD3C7FA638A53F541ED83656C_label_en-US" xlink:label="lab_asys_MergerAgreementMember_AD9AA88DD3C7FA638A53F541ED83656C" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Merger Agreement [Member]</link:label>
    <link:label id="lab_asys_MergerAgreementMember_AD9AA88DD3C7FA638A53F541ED83656C_documentation_en-US" xlink:label="lab_asys_MergerAgreementMember_AD9AA88DD3C7FA638A53F541ED83656C" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Plan of Merger by and among the Company, BTU International, Inc., and BTU Merger Sub, Inc.</link:label>
    <link:loc xlink:href="asys-20150630.xsd#asys_MergerAgreementMember" xlink:label="loc_asys_MergerAgreementMember_AD9AA88DD3C7FA638A53F541ED83656C" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_MergerAgreementMember_AD9AA88DD3C7FA638A53F541ED83656C" xlink:to="lab_asys_MergerAgreementMember_AD9AA88DD3C7FA638A53F541ED83656C" xlink:type="arc" />
    <link:label id="lab_us-gaap_ConversionOfStockSharesIssued1_D2B18A6F9C40B7A0E6B3F541ED83B5FB_terseLabel_en-US" xlink:label="lab_us-gaap_ConversionOfStockSharesIssued1_D2B18A6F9C40B7A0E6B3F541ED83B5FB" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Shares issued upon conversion</link:label>
    <link:label id="lab_us-gaap_ConversionOfStockSharesIssued1_D2B18A6F9C40B7A0E6B3F541ED83B5FB_label_en-US" xlink:label="lab_us-gaap_ConversionOfStockSharesIssued1_D2B18A6F9C40B7A0E6B3F541ED83B5FB" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Conversion of Stock, Shares Issued</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConversionOfStockSharesIssued1" xlink:label="loc_us-gaap_ConversionOfStockSharesIssued1_D2B18A6F9C40B7A0E6B3F541ED83B5FB" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ConversionOfStockSharesIssued1_D2B18A6F9C40B7A0E6B3F541ED83B5FB" xlink:to="lab_us-gaap_ConversionOfStockSharesIssued1_D2B18A6F9C40B7A0E6B3F541ED83B5FB" xlink:type="arc" />
    <link:label id="lab_asys_ConversionOfStockConversionRatioSharesOfStockExchangedPerEachShareOfSubsidiaryStock_3B3C7CD7D03A6A830AE6F541ED838715_terseLabel_en-US" xlink:label="lab_asys_ConversionOfStockConversionRatioSharesOfStockExchangedPerEachShareOfSubsidiaryStock_3B3C7CD7D03A6A830AE6F541ED838715" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Exchange ratio</link:label>
    <link:label id="lab_asys_ConversionOfStockConversionRatioSharesOfStockExchangedPerEachShareOfSubsidiaryStock_3B3C7CD7D03A6A830AE6F541ED838715_label_en-US" xlink:label="lab_asys_ConversionOfStockConversionRatioSharesOfStockExchangedPerEachShareOfSubsidiaryStock_3B3C7CD7D03A6A830AE6F541ED838715" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Conversion Of Stock, Conversion Ratio, Shares Of Stock Exchanged Per Each Share Of Subsidiary Stock</link:label>
    <link:label id="lab_asys_ConversionOfStockConversionRatioSharesOfStockExchangedPerEachShareOfSubsidiaryStock_3B3C7CD7D03A6A830AE6F541ED838715_documentation_en-US" xlink:label="lab_asys_ConversionOfStockConversionRatioSharesOfStockExchangedPerEachShareOfSubsidiaryStock_3B3C7CD7D03A6A830AE6F541ED838715" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Conversion Of Stock, Conversion Ratio, Shares Of Stock Exchanged Per Each Share Of Subsidiary Stock</link:label>
    <link:loc xlink:href="asys-20150630.xsd#asys_ConversionOfStockConversionRatioSharesOfStockExchangedPerEachShareOfSubsidiaryStock" xlink:label="loc_asys_ConversionOfStockConversionRatioSharesOfStockExchangedPerEachShareOfSubsidiaryStock_3B3C7CD7D03A6A830AE6F541ED838715" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_ConversionOfStockConversionRatioSharesOfStockExchangedPerEachShareOfSubsidiaryStock_3B3C7CD7D03A6A830AE6F541ED838715" xlink:to="lab_asys_ConversionOfStockConversionRatioSharesOfStockExchangedPerEachShareOfSubsidiaryStock_3B3C7CD7D03A6A830AE6F541ED838715" xlink:type="arc" />
    <link:label id="lab_us-gaap_PaymentsToAcquireBusinessesGross_5867924E1D60E151DEE5F541ED8349C1_terseLabel_en-US" xlink:label="lab_us-gaap_PaymentsToAcquireBusinessesGross_5867924E1D60E151DEE5F541ED8349C1" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Purchase price consideration</link:label>
    <link:label id="lab_us-gaap_PaymentsToAcquireBusinessesGross_5867924E1D60E151DEE5F541ED8349C1_label_en-US" xlink:label="lab_us-gaap_PaymentsToAcquireBusinessesGross_5867924E1D60E151DEE5F541ED8349C1" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Payments to Acquire Businesses, Gross</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PaymentsToAcquireBusinessesGross" xlink:label="loc_us-gaap_PaymentsToAcquireBusinessesGross_5867924E1D60E151DEE5F541ED8349C1" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_PaymentsToAcquireBusinessesGross_5867924E1D60E151DEE5F541ED8349C1" xlink:to="lab_us-gaap_PaymentsToAcquireBusinessesGross_5867924E1D60E151DEE5F541ED8349C1" xlink:type="arc" />
    <link:label id="lab_asys_ScheduleOfWarrantiesTable_0B1C456289D2D9C012BAF541EE08DDC1_terseLabel_en-US" xlink:label="lab_asys_ScheduleOfWarrantiesTable_0B1C456289D2D9C012BAF541EE08DDC1" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Schedule of Product Warranty [Table]</link:label>
    <link:label id="lab_asys_ScheduleOfWarrantiesTable_0B1C456289D2D9C012BAF541EE08DDC1_label_en-US" xlink:label="lab_asys_ScheduleOfWarrantiesTable_0B1C456289D2D9C012BAF541EE08DDC1" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Schedule of Warranties [Table]</link:label>
    <link:label id="lab_asys_ScheduleOfWarrantiesTable_0B1C456289D2D9C012BAF541EE08DDC1_documentation_en-US" xlink:label="lab_asys_ScheduleOfWarrantiesTable_0B1C456289D2D9C012BAF541EE08DDC1" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Schedule of Warranties [Table]</link:label>
    <link:loc xlink:href="asys-20150630.xsd#asys_ScheduleOfWarrantiesTable" xlink:label="loc_asys_ScheduleOfWarrantiesTable_0B1C456289D2D9C012BAF541EE08DDC1" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_ScheduleOfWarrantiesTable_0B1C456289D2D9C012BAF541EE08DDC1" xlink:to="lab_asys_ScheduleOfWarrantiesTable_0B1C456289D2D9C012BAF541EE08DDC1" xlink:type="arc" />
    <link:label id="lab_asys_ScheduleOfProductWarrantyLineItems_7A711B110056969D3EA2F541EE09481E_terseLabel_en-US" xlink:label="lab_asys_ScheduleOfProductWarrantyLineItems_7A711B110056969D3EA2F541EE09481E" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Product Warranty [Line Items]</link:label>
    <link:label id="lab_asys_ScheduleOfProductWarrantyLineItems_7A711B110056969D3EA2F541EE09481E_label_en-US" xlink:label="lab_asys_ScheduleOfProductWarrantyLineItems_7A711B110056969D3EA2F541EE09481E" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Schedule of Product Warranty [Line Items]</link:label>
    <link:label id="lab_asys_ScheduleOfProductWarrantyLineItems_7A711B110056969D3EA2F541EE09481E_documentation_en-US" xlink:label="lab_asys_ScheduleOfProductWarrantyLineItems_7A711B110056969D3EA2F541EE09481E" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Schedule of Product Warranty [Line Items]</link:label>
    <link:loc xlink:href="asys-20150630.xsd#asys_ScheduleOfProductWarrantyLineItems" xlink:label="loc_asys_ScheduleOfProductWarrantyLineItems_7A711B110056969D3EA2F541EE09481E" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_ScheduleOfProductWarrantyLineItems_7A711B110056969D3EA2F541EE09481E" xlink:to="lab_asys_ScheduleOfProductWarrantyLineItems_7A711B110056969D3EA2F541EE09481E" xlink:type="arc" />
    <link:label id="lab_asys_StandardProductWarrantyPeriod_CCE33C1F535B0A7034CFF541EE098DCE_terseLabel_en-US" xlink:label="lab_asys_StandardProductWarrantyPeriod_CCE33C1F535B0A7034CFF541EE098DCE" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Standard product warranty, period (in months)</link:label>
    <link:label id="lab_asys_StandardProductWarrantyPeriod_CCE33C1F535B0A7034CFF541EE098DCE_label_en-US" xlink:label="lab_asys_StandardProductWarrantyPeriod_CCE33C1F535B0A7034CFF541EE098DCE" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Standard Product Warranty, Period</link:label>
    <link:label id="lab_asys_StandardProductWarrantyPeriod_CCE33C1F535B0A7034CFF541EE098DCE_documentation_en-US" xlink:label="lab_asys_StandardProductWarrantyPeriod_CCE33C1F535B0A7034CFF541EE098DCE" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Standard Product Warranty, Period</link:label>
    <link:loc xlink:href="asys-20150630.xsd#asys_StandardProductWarrantyPeriod" xlink:label="loc_asys_StandardProductWarrantyPeriod_CCE33C1F535B0A7034CFF541EE098DCE" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_StandardProductWarrantyPeriod_CCE33C1F535B0A7034CFF541EE098DCE" xlink:to="lab_asys_StandardProductWarrantyPeriod_CCE33C1F535B0A7034CFF541EE098DCE" xlink:type="arc" />
    <link:label id="lab_us-gaap_MovementInStandardProductWarrantyAccrualRollForward_5155179D946AE439CBEEF541EE09F9B8_terseLabel_en-US" xlink:label="lab_us-gaap_MovementInStandardProductWarrantyAccrualRollForward_5155179D946AE439CBEEF541EE09F9B8" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Movement in Standard Product Warranty Accrual [Roll Forward]</link:label>
    <link:label id="lab_us-gaap_MovementInStandardProductWarrantyAccrualRollForward_5155179D946AE439CBEEF541EE09F9B8_label_en-US" xlink:label="lab_us-gaap_MovementInStandardProductWarrantyAccrualRollForward_5155179D946AE439CBEEF541EE09F9B8" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Movement in Standard Product Warranty Accrual [Roll Forward]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MovementInStandardProductWarrantyAccrualRollForward" xlink:label="loc_us-gaap_MovementInStandardProductWarrantyAccrualRollForward_5155179D946AE439CBEEF541EE09F9B8" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_MovementInStandardProductWarrantyAccrualRollForward_5155179D946AE439CBEEF541EE09F9B8" xlink:to="lab_us-gaap_MovementInStandardProductWarrantyAccrualRollForward_5155179D946AE439CBEEF541EE09F9B8" xlink:type="arc" />
    <link:label id="lab_us-gaap_ProductWarrantyAccrualClassifiedCurrent_3EBDB12DCAF8958BAEE6F541EE096E05_periodStartLabel_en-US" xlink:label="lab_us-gaap_ProductWarrantyAccrualClassifiedCurrent_3EBDB12DCAF8958BAEE6F541EE096E05" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel" xlink:type="resource" xml:lang="en-US">Beginning balance</link:label>
    <link:label id="lab_us-gaap_ProductWarrantyAccrualClassifiedCurrent_3EBDB12DCAF8958BAEE6F541EE096E05_label_en-US" xlink:label="lab_us-gaap_ProductWarrantyAccrualClassifiedCurrent_3EBDB12DCAF8958BAEE6F541EE096E05" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Product Warranty Accrual, Current</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProductWarrantyAccrualClassifiedCurrent" xlink:label="loc_us-gaap_ProductWarrantyAccrualClassifiedCurrent_3EBDB12DCAF8958BAEE6F541EE096E05" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ProductWarrantyAccrualClassifiedCurrent_3EBDB12DCAF8958BAEE6F541EE096E05" xlink:to="lab_us-gaap_ProductWarrantyAccrualClassifiedCurrent_3EBDB12DCAF8958BAEE6F541EE096E05" xlink:type="arc" />
    <link:label id="lab_us-gaap_StandardProductWarrantyAccrualPayments_CAD6D645BDDFDD4BDE21F541EE0983AB_negatedTerseLabel_en-US" xlink:label="lab_us-gaap_StandardProductWarrantyAccrualPayments_CAD6D645BDDFDD4BDE21F541EE0983AB" xlink:role="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:type="resource" xml:lang="en-US">Warranty expenditures</link:label>
    <link:label id="lab_us-gaap_StandardProductWarrantyAccrualPayments_CAD6D645BDDFDD4BDE21F541EE0983AB_label_en-US" xlink:label="lab_us-gaap_StandardProductWarrantyAccrualPayments_CAD6D645BDDFDD4BDE21F541EE0983AB" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Standard Product Warranty Accrual, Payments</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StandardProductWarrantyAccrualPayments" xlink:label="loc_us-gaap_StandardProductWarrantyAccrualPayments_CAD6D645BDDFDD4BDE21F541EE0983AB" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_StandardProductWarrantyAccrualPayments_CAD6D645BDDFDD4BDE21F541EE0983AB" xlink:to="lab_us-gaap_StandardProductWarrantyAccrualPayments_CAD6D645BDDFDD4BDE21F541EE0983AB" xlink:type="arc" />
    <link:label id="lab_us-gaap_StandardProductWarrantyAccrualPreexistingIncreaseDecrease_1B991A774558C66B3CFDF541EE09C47B_terseLabel_en-US" xlink:label="lab_us-gaap_StandardProductWarrantyAccrualPreexistingIncreaseDecrease_1B991A774558C66B3CFDF541EE09C47B" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Warranty provisions/(adjustment)</link:label>
    <link:label id="lab_us-gaap_StandardProductWarrantyAccrualPreexistingIncreaseDecrease_1B991A774558C66B3CFDF541EE09C47B_label_en-US" xlink:label="lab_us-gaap_StandardProductWarrantyAccrualPreexistingIncreaseDecrease_1B991A774558C66B3CFDF541EE09C47B" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Standard Product Warranty Accrual, Preexisting, Increase (Decrease)</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StandardProductWarrantyAccrualPreexistingIncreaseDecrease" xlink:label="loc_us-gaap_StandardProductWarrantyAccrualPreexistingIncreaseDecrease_1B991A774558C66B3CFDF541EE09C47B" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_StandardProductWarrantyAccrualPreexistingIncreaseDecrease_1B991A774558C66B3CFDF541EE09C47B" xlink:to="lab_us-gaap_StandardProductWarrantyAccrualPreexistingIncreaseDecrease_1B991A774558C66B3CFDF541EE09C47B" xlink:type="arc" />
    <link:label id="lab_us-gaap_ProductWarrantyAccrualClassifiedCurrent_16C65F8D7EE008A5B259F541EE095285_periodEndLabel_en-US" xlink:label="lab_us-gaap_ProductWarrantyAccrualClassifiedCurrent_16C65F8D7EE008A5B259F541EE095285" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel" xlink:type="resource" xml:lang="en-US">Ending balance</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProductWarrantyAccrualClassifiedCurrent" xlink:label="loc_us-gaap_ProductWarrantyAccrualClassifiedCurrent_16C65F8D7EE008A5B259F541EE095285" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ProductWarrantyAccrualClassifiedCurrent_16C65F8D7EE008A5B259F541EE095285" xlink:to="lab_us-gaap_ProductWarrantyAccrualClassifiedCurrent_16C65F8D7EE008A5B259F541EE095285" xlink:type="arc" />
    <link:label id="lab_us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_481BA4569555BF99F109F541ED58DAE0_terseLabel_en-US" xlink:label="lab_us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_481BA4569555BF99F109F541ED58DAE0" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Schedule of Property, Plant and Equipment [Table]</link:label>
    <link:label id="lab_us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_481BA4569555BF99F109F541ED58DAE0_label_en-US" xlink:label="lab_us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_481BA4569555BF99F109F541ED58DAE0" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Property, Plant and Equipment [Table]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfPropertyPlantAndEquipmentTable" xlink:label="loc_us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_481BA4569555BF99F109F541ED58DAE0" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_481BA4569555BF99F109F541ED58DAE0" xlink:to="lab_us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_481BA4569555BF99F109F541ED58DAE0" xlink:type="arc" />
    <link:label id="lab_us-gaap_PropertyPlantAndEquipmentByTypeAxis_7813AA948B763E7838A6F541ED59EF21_terseLabel_en-US" xlink:label="lab_us-gaap_PropertyPlantAndEquipmentByTypeAxis_7813AA948B763E7838A6F541ED59EF21" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Property, Plant and Equipment, Type [Axis]</link:label>
    <link:label id="lab_us-gaap_PropertyPlantAndEquipmentByTypeAxis_7813AA948B763E7838A6F541ED59EF21_label_en-US" xlink:label="lab_us-gaap_PropertyPlantAndEquipmentByTypeAxis_7813AA948B763E7838A6F541ED59EF21" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Property, Plant and Equipment, Type [Axis]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PropertyPlantAndEquipmentByTypeAxis" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentByTypeAxis_7813AA948B763E7838A6F541ED59EF21" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentByTypeAxis_7813AA948B763E7838A6F541ED59EF21" xlink:to="lab_us-gaap_PropertyPlantAndEquipmentByTypeAxis_7813AA948B763E7838A6F541ED59EF21" xlink:type="arc" />
    <link:label id="lab_us-gaap_PropertyPlantAndEquipmentTypeDomain_55E4EB5FC326F343CB57F541ED592FB3_terseLabel_en-US" xlink:label="lab_us-gaap_PropertyPlantAndEquipmentTypeDomain_55E4EB5FC326F343CB57F541ED592FB3" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Property, Plant and Equipment, Type [Domain]</link:label>
    <link:label id="lab_us-gaap_PropertyPlantAndEquipmentTypeDomain_55E4EB5FC326F343CB57F541ED592FB3_label_en-US" xlink:label="lab_us-gaap_PropertyPlantAndEquipmentTypeDomain_55E4EB5FC326F343CB57F541ED592FB3" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Property, Plant and Equipment, Type [Domain]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentTypeDomain_55E4EB5FC326F343CB57F541ED592FB3" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentTypeDomain_55E4EB5FC326F343CB57F541ED592FB3" xlink:to="lab_us-gaap_PropertyPlantAndEquipmentTypeDomain_55E4EB5FC326F343CB57F541ED592FB3" xlink:type="arc" />
    <link:label id="lab_us-gaap_BuildingAndBuildingImprovementsMember_68B1D22A20A45E72E868F541ED59FE42_terseLabel_en-US" xlink:label="lab_us-gaap_BuildingAndBuildingImprovementsMember_68B1D22A20A45E72E868F541ED59FE42" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Building</link:label>
    <link:label id="lab_us-gaap_BuildingAndBuildingImprovementsMember_68B1D22A20A45E72E868F541ED59FE42_label_en-US" xlink:label="lab_us-gaap_BuildingAndBuildingImprovementsMember_68B1D22A20A45E72E868F541ED59FE42" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Building and Building Improvements [Member]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BuildingAndBuildingImprovementsMember" xlink:label="loc_us-gaap_BuildingAndBuildingImprovementsMember_68B1D22A20A45E72E868F541ED59FE42" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_BuildingAndBuildingImprovementsMember_68B1D22A20A45E72E868F541ED59FE42" xlink:to="lab_us-gaap_BuildingAndBuildingImprovementsMember_68B1D22A20A45E72E868F541ED59FE42" xlink:type="arc" />
    <link:label id="lab_us-gaap_LandBuildingsAndImprovementsMember_B4E99308C3A09B1DAEAEF541ED595859_terseLabel_en-US" xlink:label="lab_us-gaap_LandBuildingsAndImprovementsMember_B4E99308C3A09B1DAEAEF541ED595859" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Land, building and leasehold improvements</link:label>
    <link:label id="lab_us-gaap_LandBuildingsAndImprovementsMember_B4E99308C3A09B1DAEAEF541ED595859_label_en-US" xlink:label="lab_us-gaap_LandBuildingsAndImprovementsMember_B4E99308C3A09B1DAEAEF541ED595859" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Land, Buildings and Improvements [Member]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LandBuildingsAndImprovementsMember" xlink:label="loc_us-gaap_LandBuildingsAndImprovementsMember_B4E99308C3A09B1DAEAEF541ED595859" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_LandBuildingsAndImprovementsMember_B4E99308C3A09B1DAEAEF541ED595859" xlink:to="lab_us-gaap_LandBuildingsAndImprovementsMember_B4E99308C3A09B1DAEAEF541ED595859" xlink:type="arc" />
    <link:label id="lab_us-gaap_MachineryAndEquipmentMember_13EDAE7B2761704710D4F541ED5957CE_terseLabel_en-US" xlink:label="lab_us-gaap_MachineryAndEquipmentMember_13EDAE7B2761704710D4F541ED5957CE" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Equipment and machinery</link:label>
    <link:label id="lab_us-gaap_MachineryAndEquipmentMember_13EDAE7B2761704710D4F541ED5957CE_label_en-US" xlink:label="lab_us-gaap_MachineryAndEquipmentMember_13EDAE7B2761704710D4F541ED5957CE" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Machinery and Equipment [Member]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MachineryAndEquipmentMember" xlink:label="loc_us-gaap_MachineryAndEquipmentMember_13EDAE7B2761704710D4F541ED5957CE" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_MachineryAndEquipmentMember_13EDAE7B2761704710D4F541ED5957CE" xlink:to="lab_us-gaap_MachineryAndEquipmentMember_13EDAE7B2761704710D4F541ED5957CE" xlink:type="arc" />
    <link:label id="lab_us-gaap_FurnitureAndFixturesMember_6B506BEE6BAD79A43BC2F541ED5979BB_terseLabel_en-US" xlink:label="lab_us-gaap_FurnitureAndFixturesMember_6B506BEE6BAD79A43BC2F541ED5979BB" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Furniture and fixtures</link:label>
    <link:label id="lab_us-gaap_FurnitureAndFixturesMember_6B506BEE6BAD79A43BC2F541ED5979BB_label_en-US" xlink:label="lab_us-gaap_FurnitureAndFixturesMember_6B506BEE6BAD79A43BC2F541ED5979BB" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Furniture and Fixtures [Member]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FurnitureAndFixturesMember" xlink:label="loc_us-gaap_FurnitureAndFixturesMember_6B506BEE6BAD79A43BC2F541ED5979BB" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_FurnitureAndFixturesMember_6B506BEE6BAD79A43BC2F541ED5979BB" xlink:to="lab_us-gaap_FurnitureAndFixturesMember_6B506BEE6BAD79A43BC2F541ED5979BB" xlink:type="arc" />
    <link:label id="lab_us-gaap_LeaseholdImprovementsMember_57B30100DFDFFCF6FEABF541ED5967CE_terseLabel_en-US" xlink:label="lab_us-gaap_LeaseholdImprovementsMember_57B30100DFDFFCF6FEABF541ED5967CE" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Leasehold Improvements</link:label>
    <link:label id="lab_us-gaap_LeaseholdImprovementsMember_57B30100DFDFFCF6FEABF541ED5967CE_label_en-US" xlink:label="lab_us-gaap_LeaseholdImprovementsMember_57B30100DFDFFCF6FEABF541ED5967CE" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Leasehold Improvements [Member]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LeaseholdImprovementsMember" xlink:label="loc_us-gaap_LeaseholdImprovementsMember_57B30100DFDFFCF6FEABF541ED5967CE" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_LeaseholdImprovementsMember_57B30100DFDFFCF6FEABF541ED5967CE" xlink:to="lab_us-gaap_LeaseholdImprovementsMember_57B30100DFDFFCF6FEABF541ED5967CE" xlink:type="arc" />
    <link:label id="lab_us-gaap_PropertyPlantAndEquipmentLineItems_7D0ACD321F9C9D7B1F07F541ED5A9E44_terseLabel_en-US" xlink:label="lab_us-gaap_PropertyPlantAndEquipmentLineItems_7D0ACD321F9C9D7B1F07F541ED5A9E44" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Property, Plant and Equipment [Line Items]</link:label>
    <link:label id="lab_us-gaap_PropertyPlantAndEquipmentLineItems_7D0ACD321F9C9D7B1F07F541ED5A9E44_label_en-US" xlink:label="lab_us-gaap_PropertyPlantAndEquipmentLineItems_7D0ACD321F9C9D7B1F07F541ED5A9E44" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Property, Plant and Equipment [Line Items]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PropertyPlantAndEquipmentLineItems" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentLineItems_7D0ACD321F9C9D7B1F07F541ED5A9E44" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentLineItems_7D0ACD321F9C9D7B1F07F541ED5A9E44" xlink:to="lab_us-gaap_PropertyPlantAndEquipmentLineItems_7D0ACD321F9C9D7B1F07F541ED5A9E44" xlink:type="arc" />
    <link:label id="lab_us-gaap_PropertyPlantAndEquipmentUsefulLife_78E010BB09650EEABD7EF541ED5A2258_terseLabel_en-US" xlink:label="lab_us-gaap_PropertyPlantAndEquipmentUsefulLife_78E010BB09650EEABD7EF541ED5A2258" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Property, plant and equipment, useful life (in years)</link:label>
    <link:label id="lab_us-gaap_PropertyPlantAndEquipmentUsefulLife_78E010BB09650EEABD7EF541ED5A2258_label_en-US" xlink:label="lab_us-gaap_PropertyPlantAndEquipmentUsefulLife_78E010BB09650EEABD7EF541ED5A2258" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Property, Plant and Equipment, Useful Life</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PropertyPlantAndEquipmentUsefulLife" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentUsefulLife_78E010BB09650EEABD7EF541ED5A2258" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentUsefulLife_78E010BB09650EEABD7EF541ED5A2258" xlink:to="lab_us-gaap_PropertyPlantAndEquipmentUsefulLife_78E010BB09650EEABD7EF541ED5A2258" xlink:type="arc" />
    <link:label id="lab_us-gaap_PropertyPlantAndEquipmentGross_62B0F653E4892B1A518AF541ED5A4A5B_terseLabel_en-US" xlink:label="lab_us-gaap_PropertyPlantAndEquipmentGross_62B0F653E4892B1A518AF541ED5A4A5B" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Property, plant and equipment, gross</link:label>
    <link:label id="lab_us-gaap_PropertyPlantAndEquipmentGross_62B0F653E4892B1A518AF541ED5A4A5B_label_en-US" xlink:label="lab_us-gaap_PropertyPlantAndEquipmentGross_62B0F653E4892B1A518AF541ED5A4A5B" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Property, Plant and Equipment, Gross</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PropertyPlantAndEquipmentGross" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentGross_62B0F653E4892B1A518AF541ED5A4A5B" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentGross_62B0F653E4892B1A518AF541ED5A4A5B" xlink:to="lab_us-gaap_PropertyPlantAndEquipmentGross_62B0F653E4892B1A518AF541ED5A4A5B" xlink:type="arc" />
    <link:label id="lab_us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment_0DF21A1D9FD899A2BAEEF541ED5AA4E4_negatedTerseLabel_en-US" xlink:label="lab_us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment_0DF21A1D9FD899A2BAEEF541ED5AA4E4" xlink:role="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:type="resource" xml:lang="en-US">Accumulated depreciation</link:label>
    <link:label id="lab_us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment_0DF21A1D9FD899A2BAEEF541ED5AA4E4_label_en-US" xlink:label="lab_us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment_0DF21A1D9FD899A2BAEEF541ED5AA4E4" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Accumulated Depreciation, Depletion and Amortization, Property, Plant, and Equipment</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment" xlink:label="loc_us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment_0DF21A1D9FD899A2BAEEF541ED5AA4E4" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment_0DF21A1D9FD899A2BAEEF541ED5AA4E4" xlink:to="lab_us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment_0DF21A1D9FD899A2BAEEF541ED5AA4E4" xlink:type="arc" />
    <link:label id="lab_us-gaap_PropertyPlantAndEquipmentNet_BB3C58A55FEB02B01FA7F541ED5A67D5_totalLabel_en-US" xlink:label="lab_us-gaap_PropertyPlantAndEquipmentNet_BB3C58A55FEB02B01FA7F541ED5A67D5" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:type="resource" xml:lang="en-US">Property, plant and equipment - net</link:label>
    <link:label id="lab_us-gaap_PropertyPlantAndEquipmentNet_BB3C58A55FEB02B01FA7F541ED5A67D5_label_en-US" xlink:label="lab_us-gaap_PropertyPlantAndEquipmentNet_BB3C58A55FEB02B01FA7F541ED5A67D5" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Property, Plant and Equipment, Net</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PropertyPlantAndEquipmentNet" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentNet_BB3C58A55FEB02B01FA7F541ED5A67D5" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentNet_BB3C58A55FEB02B01FA7F541ED5A67D5" xlink:to="lab_us-gaap_PropertyPlantAndEquipmentNet_BB3C58A55FEB02B01FA7F541ED5A67D5" xlink:type="arc" />
    <link:label id="lab_us-gaap_ScheduleOfRevenueFromExternalCustomersAttributedToForeignCountriesByGeographicAreaTextBlock_7E1031E5315122FEE62BF541ED4124B7_terseLabel_en-US" xlink:label="lab_us-gaap_ScheduleOfRevenueFromExternalCustomersAttributedToForeignCountriesByGeographicAreaTextBlock_7E1031E5315122FEE62BF541ED4124B7" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Schedule of Revenue from External Customers Attributed to Foreign Countries by Geographic Area</link:label>
    <link:label id="lab_us-gaap_ScheduleOfRevenueFromExternalCustomersAttributedToForeignCountriesByGeographicAreaTextBlock_7E1031E5315122FEE62BF541ED4124B7_label_en-US" xlink:label="lab_us-gaap_ScheduleOfRevenueFromExternalCustomersAttributedToForeignCountriesByGeographicAreaTextBlock_7E1031E5315122FEE62BF541ED4124B7" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Schedule of Revenue from External Customers Attributed to Foreign Countries by Geographic Area [Table Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfRevenueFromExternalCustomersAttributedToForeignCountriesByGeographicAreaTextBlock" xlink:label="loc_us-gaap_ScheduleOfRevenueFromExternalCustomersAttributedToForeignCountriesByGeographicAreaTextBlock_7E1031E5315122FEE62BF541ED4124B7" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ScheduleOfRevenueFromExternalCustomersAttributedToForeignCountriesByGeographicAreaTextBlock_7E1031E5315122FEE62BF541ED4124B7" xlink:to="lab_us-gaap_ScheduleOfRevenueFromExternalCustomersAttributedToForeignCountriesByGeographicAreaTextBlock_7E1031E5315122FEE62BF541ED4124B7" xlink:type="arc" />
    <link:label id="lab_us-gaap_BusinessCombinationDisclosureTextBlock_730BEC7853E95AACD372F541ED8F7C19_terseLabel_en-US" xlink:label="lab_us-gaap_BusinessCombinationDisclosureTextBlock_730BEC7853E95AACD372F541ED8F7C19" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Acquisition</link:label>
    <link:label id="lab_us-gaap_BusinessCombinationDisclosureTextBlock_730BEC7853E95AACD372F541ED8F7C19_label_en-US" xlink:label="lab_us-gaap_BusinessCombinationDisclosureTextBlock_730BEC7853E95AACD372F541ED8F7C19" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Business Combination Disclosure [Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessCombinationDisclosureTextBlock" xlink:label="loc_us-gaap_BusinessCombinationDisclosureTextBlock_730BEC7853E95AACD372F541ED8F7C19" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_BusinessCombinationDisclosureTextBlock_730BEC7853E95AACD372F541ED8F7C19" xlink:to="lab_us-gaap_BusinessCombinationDisclosureTextBlock_730BEC7853E95AACD372F541ED8F7C19" xlink:type="arc" />
    <link:label id="lab_us-gaap_OtherLiabilitiesDisclosureAbstract_80BDF324788DED126228F541ED99CDCD_label_en-US" xlink:label="lab_us-gaap_OtherLiabilitiesDisclosureAbstract_80BDF324788DED126228F541ED99CDCD" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Other Liabilities Disclosure [Abstract]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherLiabilitiesDisclosureAbstract" xlink:label="loc_us-gaap_OtherLiabilitiesDisclosureAbstract_80BDF324788DED126228F541ED99CDCD" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_OtherLiabilitiesDisclosureAbstract_80BDF324788DED126228F541ED99CDCD" xlink:to="lab_us-gaap_OtherLiabilitiesDisclosureAbstract_80BDF324788DED126228F541ED99CDCD" xlink:type="arc" />
    <link:label id="lab_us-gaap_OtherLiabilitiesTableTextBlock_7CCB9096A2C572178D61F541ED9A59D7_terseLabel_en-US" xlink:label="lab_us-gaap_OtherLiabilitiesTableTextBlock_7CCB9096A2C572178D61F541ED9A59D7" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Other accrued liabilities</link:label>
    <link:label id="lab_us-gaap_OtherLiabilitiesTableTextBlock_7CCB9096A2C572178D61F541ED9A59D7_label_en-US" xlink:label="lab_us-gaap_OtherLiabilitiesTableTextBlock_7CCB9096A2C572178D61F541ED9A59D7" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Other Liabilities [Table Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherLiabilitiesTableTextBlock" xlink:label="loc_us-gaap_OtherLiabilitiesTableTextBlock_7CCB9096A2C572178D61F541ED9A59D7" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_OtherLiabilitiesTableTextBlock_7CCB9096A2C572178D61F541ED9A59D7" xlink:to="lab_us-gaap_OtherLiabilitiesTableTextBlock_7CCB9096A2C572178D61F541ED9A59D7" xlink:type="arc" />
    <link:label id="lab_us-gaap_DeferredRevenue_09C02BCC146C54522124F541EF05C0DD_terseLabel_en-US" xlink:label="lab_us-gaap_DeferredRevenue_09C02BCC146C54522124F541EF05C0DD" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Deferred revenues</link:label>
    <link:label id="lab_us-gaap_DeferredRevenue_09C02BCC146C54522124F541EF05C0DD_label_en-US" xlink:label="lab_us-gaap_DeferredRevenue_09C02BCC146C54522124F541EF05C0DD" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Deferred Revenue</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DeferredRevenue" xlink:label="loc_us-gaap_DeferredRevenue_09C02BCC146C54522124F541EF05C0DD" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_DeferredRevenue_09C02BCC146C54522124F541EF05C0DD" xlink:to="lab_us-gaap_DeferredRevenue_09C02BCC146C54522124F541EF05C0DD" xlink:type="arc" />
    <link:label id="lab_us-gaap_DeferredCostsCurrent_CB7BE3CA1961A61B6082F541EF0555E4_terseLabel_en-US" xlink:label="lab_us-gaap_DeferredCostsCurrent_CB7BE3CA1961A61B6082F541EF0555E4" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Deferred costs</link:label>
    <link:label id="lab_us-gaap_DeferredCostsCurrent_CB7BE3CA1961A61B6082F541EF0555E4_label_en-US" xlink:label="lab_us-gaap_DeferredCostsCurrent_CB7BE3CA1961A61B6082F541EF0555E4" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Deferred Costs, Current</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DeferredCostsCurrent" xlink:label="loc_us-gaap_DeferredCostsCurrent_CB7BE3CA1961A61B6082F541EF0555E4" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_DeferredCostsCurrent_CB7BE3CA1961A61B6082F541EF0555E4" xlink:to="lab_us-gaap_DeferredCostsCurrent_CB7BE3CA1961A61B6082F541EF0555E4" xlink:type="arc" />
    <link:label id="lab_us-gaap_OtherDeferredCreditsCurrent_001C6A4D5DDF51F838B6F541EF055027_totalLabel_en-US" xlink:label="lab_us-gaap_OtherDeferredCreditsCurrent_001C6A4D5DDF51F838B6F541EF055027" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:type="resource" xml:lang="en-US">Deferred profit</link:label>
    <link:label id="lab_us-gaap_OtherDeferredCreditsCurrent_001C6A4D5DDF51F838B6F541EF055027_label_en-US" xlink:label="lab_us-gaap_OtherDeferredCreditsCurrent_001C6A4D5DDF51F838B6F541EF055027" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Other Deferred Credits, Current</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherDeferredCreditsCurrent" xlink:label="loc_us-gaap_OtherDeferredCreditsCurrent_001C6A4D5DDF51F838B6F541EF055027" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_OtherDeferredCreditsCurrent_001C6A4D5DDF51F838B6F541EF055027" xlink:to="lab_us-gaap_OtherDeferredCreditsCurrent_001C6A4D5DDF51F838B6F541EF055027" xlink:type="arc" />
    <link:label id="lab_us-gaap_SegmentReportingAbstract_3FCABECBFA9210784D9F007D9825360E_label_en-US" xlink:label="lab_us-gaap_SegmentReportingAbstract_3FCABECBFA9210784D9F007D9825360E" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Segment Reporting [Abstract]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SegmentReportingAbstract" xlink:label="loc_us-gaap_SegmentReportingAbstract_3FCABECBFA9210784D9F007D9825360E" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_SegmentReportingAbstract_3FCABECBFA9210784D9F007D9825360E" xlink:to="lab_us-gaap_SegmentReportingAbstract_3FCABECBFA9210784D9F007D9825360E" xlink:type="arc" />
    <link:label id="lab_us-gaap_ProductConcentrationRiskMember_1F8F9DDF5E5FD4F22029007D9826745D_terseLabel_en-US" xlink:label="lab_us-gaap_ProductConcentrationRiskMember_1F8F9DDF5E5FD4F22029007D9826745D" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Product Concentration Risk</link:label>
    <link:label id="lab_us-gaap_ProductConcentrationRiskMember_1F8F9DDF5E5FD4F22029007D9826745D_label_en-US" xlink:label="lab_us-gaap_ProductConcentrationRiskMember_1F8F9DDF5E5FD4F22029007D9826745D" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Product Concentration Risk [Member]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProductConcentrationRiskMember" xlink:label="loc_us-gaap_ProductConcentrationRiskMember_1F8F9DDF5E5FD4F22029007D9826745D" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ProductConcentrationRiskMember_1F8F9DDF5E5FD4F22029007D9826745D" xlink:to="lab_us-gaap_ProductConcentrationRiskMember_1F8F9DDF5E5FD4F22029007D9826745D" xlink:type="arc" />
    <link:label id="lab_us-gaap_SalesRevenueProductLineMember_8CB3E96B7B8299066D1E007D9826D17A_terseLabel_en-US" xlink:label="lab_us-gaap_SalesRevenueProductLineMember_8CB3E96B7B8299066D1E007D9826D17A" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Sales Revenue, Product Line</link:label>
    <link:label id="lab_us-gaap_SalesRevenueProductLineMember_8CB3E96B7B8299066D1E007D9826D17A_label_en-US" xlink:label="lab_us-gaap_SalesRevenueProductLineMember_8CB3E96B7B8299066D1E007D9826D17A" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Sales Revenue, Product Line [Member]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SalesRevenueProductLineMember" xlink:label="loc_us-gaap_SalesRevenueProductLineMember_8CB3E96B7B8299066D1E007D9826D17A" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_SalesRevenueProductLineMember_8CB3E96B7B8299066D1E007D9826D17A" xlink:to="lab_us-gaap_SalesRevenueProductLineMember_8CB3E96B7B8299066D1E007D9826D17A" xlink:type="arc" />
    <link:label id="lab_asys_SolarEquipmentMember_E61910C95EC2B3974F68007D9827A753_terseLabel_en-US" xlink:label="lab_asys_SolarEquipmentMember_E61910C95EC2B3974F68007D9827A753" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Solar</link:label>
    <link:label id="lab_asys_SolarEquipmentMember_E61910C95EC2B3974F68007D9827A753_label_en-US" xlink:label="lab_asys_SolarEquipmentMember_E61910C95EC2B3974F68007D9827A753" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Solar Equipment [Member]</link:label>
    <link:label id="lab_asys_SolarEquipmentMember_E61910C95EC2B3974F68007D9827A753_documentation_en-US" xlink:label="lab_asys_SolarEquipmentMember_E61910C95EC2B3974F68007D9827A753" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Solar Equipment</link:label>
    <link:loc xlink:href="asys-20150630.xsd#asys_SolarEquipmentMember" xlink:label="loc_asys_SolarEquipmentMember_E61910C95EC2B3974F68007D9827A753" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_SolarEquipmentMember_E61910C95EC2B3974F68007D9827A753" xlink:to="lab_asys_SolarEquipmentMember_E61910C95EC2B3974F68007D9827A753" xlink:type="arc" />
    <link:label id="lab_asys_PolishingSuppliesAndEquipmentMember_6FECD5B2C665BD6EC9F8007D9828FA96_terseLabel_en-US" xlink:label="lab_asys_PolishingSuppliesAndEquipmentMember_6FECD5B2C665BD6EC9F8007D9828FA96" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Polishing</link:label>
    <link:label id="lab_asys_PolishingSuppliesAndEquipmentMember_6FECD5B2C665BD6EC9F8007D9828FA96_label_en-US" xlink:label="lab_asys_PolishingSuppliesAndEquipmentMember_6FECD5B2C665BD6EC9F8007D9828FA96" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Polishing Supplies And Equipment [Member]</link:label>
    <link:label id="lab_asys_PolishingSuppliesAndEquipmentMember_6FECD5B2C665BD6EC9F8007D9828FA96_documentation_en-US" xlink:label="lab_asys_PolishingSuppliesAndEquipmentMember_6FECD5B2C665BD6EC9F8007D9828FA96" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Polishing supplies and equipment</link:label>
    <link:loc xlink:href="asys-20150630.xsd#asys_PolishingSuppliesAndEquipmentMember" xlink:label="loc_asys_PolishingSuppliesAndEquipmentMember_6FECD5B2C665BD6EC9F8007D9828FA96" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_PolishingSuppliesAndEquipmentMember_6FECD5B2C665BD6EC9F8007D9828FA96" xlink:to="lab_asys_PolishingSuppliesAndEquipmentMember_6FECD5B2C665BD6EC9F8007D9828FA96" xlink:type="arc" />
    <link:label id="lab_us-gaap_MaterialReconcilingItemsMember_0928D56BB099C057E81B007D98287631_terseLabel_en-US" xlink:label="lab_us-gaap_MaterialReconcilingItemsMember_0928D56BB099C057E81B007D98287631" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Non-segment related</link:label>
    <link:label id="lab_us-gaap_MaterialReconcilingItemsMember_0928D56BB099C057E81B007D98287631_label_en-US" xlink:label="lab_us-gaap_MaterialReconcilingItemsMember_0928D56BB099C057E81B007D98287631" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Segment Reconciling Items [Member]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MaterialReconcilingItemsMember" xlink:label="loc_us-gaap_MaterialReconcilingItemsMember_0928D56BB099C057E81B007D98287631" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_MaterialReconcilingItemsMember_0928D56BB099C057E81B007D98287631" xlink:to="lab_us-gaap_MaterialReconcilingItemsMember_0928D56BB099C057E81B007D98287631" xlink:type="arc" />
    <link:label id="lab_us-gaap_SegmentReportingInformationLineItems_4F91E1AB4F05FEB403AC007D9828AF1C_terseLabel_en-US" xlink:label="lab_us-gaap_SegmentReportingInformationLineItems_4F91E1AB4F05FEB403AC007D9828AF1C" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Segment Reporting Information [Line Items]</link:label>
    <link:label id="lab_us-gaap_SegmentReportingInformationLineItems_4F91E1AB4F05FEB403AC007D9828AF1C_label_en-US" xlink:label="lab_us-gaap_SegmentReportingInformationLineItems_4F91E1AB4F05FEB403AC007D9828AF1C" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Segment Reporting Information [Line Items]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SegmentReportingInformationLineItems" xlink:label="loc_us-gaap_SegmentReportingInformationLineItems_4F91E1AB4F05FEB403AC007D9828AF1C" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_SegmentReportingInformationLineItems_4F91E1AB4F05FEB403AC007D9828AF1C" xlink:to="lab_us-gaap_SegmentReportingInformationLineItems_4F91E1AB4F05FEB403AC007D9828AF1C" xlink:type="arc" />
    <link:label id="lab_us-gaap_NumberOfOperatingSegments_6EE0E617A7677C0094FD007D9828AC6B_terseLabel_en-US" xlink:label="lab_us-gaap_NumberOfOperatingSegments_6EE0E617A7677C0094FD007D9828AC6B" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Number of business segments</link:label>
    <link:label id="lab_us-gaap_NumberOfOperatingSegments_6EE0E617A7677C0094FD007D9828AC6B_label_en-US" xlink:label="lab_us-gaap_NumberOfOperatingSegments_6EE0E617A7677C0094FD007D9828AC6B" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Number of Operating Segments</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NumberOfOperatingSegments" xlink:label="loc_us-gaap_NumberOfOperatingSegments_6EE0E617A7677C0094FD007D9828AC6B" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_NumberOfOperatingSegments_6EE0E617A7677C0094FD007D9828AC6B" xlink:to="lab_us-gaap_NumberOfOperatingSegments_6EE0E617A7677C0094FD007D9828AC6B" xlink:type="arc" />
    <link:label id="lab_us-gaap_SalesRevenueNet_7D9FB80D9596D563F308007D9828C32B_verboseLabel_en-US" xlink:label="lab_us-gaap_SalesRevenueNet_7D9FB80D9596D563F308007D9828C32B" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:type="resource" xml:lang="en-US">Net Revenues</link:label>
    <link:label id="lab_us-gaap_SalesRevenueNet_7D9FB80D9596D563F308007D9828C32B_label_en-US" xlink:label="lab_us-gaap_SalesRevenueNet_7D9FB80D9596D563F308007D9828C32B" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Revenue, Net</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SalesRevenueNet" xlink:label="loc_us-gaap_SalesRevenueNet_7D9FB80D9596D563F308007D9828C32B" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_SalesRevenueNet_7D9FB80D9596D563F308007D9828C32B" xlink:to="lab_us-gaap_SalesRevenueNet_7D9FB80D9596D563F308007D9828C32B" xlink:type="arc" />
    <link:label id="lab_us-gaap_OperatingIncomeLoss_2B48235601231C0BEAFA007D98293942_terseLabel_en-US" xlink:label="lab_us-gaap_OperatingIncomeLoss_2B48235601231C0BEAFA007D98293942" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Operating Income (Loss)</link:label>
    <link:label id="lab_us-gaap_OperatingIncomeLoss_2B48235601231C0BEAFA007D98293942_label_en-US" xlink:label="lab_us-gaap_OperatingIncomeLoss_2B48235601231C0BEAFA007D98293942" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Operating Income (Loss)</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OperatingIncomeLoss" xlink:label="loc_us-gaap_OperatingIncomeLoss_2B48235601231C0BEAFA007D98293942" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_OperatingIncomeLoss_2B48235601231C0BEAFA007D98293942" xlink:to="lab_us-gaap_OperatingIncomeLoss_2B48235601231C0BEAFA007D98293942" xlink:type="arc" />
    <link:label id="lab_us-gaap_ConcentrationRiskPercentage1_FA6A71BD812622D4E61F007D9829B1AE_verboseLabel_en-US" xlink:label="lab_us-gaap_ConcentrationRiskPercentage1_FA6A71BD812622D4E61F007D9829B1AE" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:type="resource" xml:lang="en-US">Concentration risk, percentage (less than 25%)</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskPercentage1" xlink:label="loc_us-gaap_ConcentrationRiskPercentage1_FA6A71BD812622D4E61F007D9829B1AE" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ConcentrationRiskPercentage1_FA6A71BD812622D4E61F007D9829B1AE" xlink:to="lab_us-gaap_ConcentrationRiskPercentage1_FA6A71BD812622D4E61F007D9829B1AE" xlink:type="arc" />
    <link:label id="lab_us-gaap_Assets_9987946FF07C6AAD6A61007D982915E6_terseLabel_en-US" xlink:label="lab_us-gaap_Assets_9987946FF07C6AAD6A61007D982915E6" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Identifiable Assets</link:label>
    <link:label id="lab_us-gaap_Assets_9987946FF07C6AAD6A61007D982915E6_label_en-US" xlink:label="lab_us-gaap_Assets_9987946FF07C6AAD6A61007D982915E6" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Assets</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_Assets" xlink:label="loc_us-gaap_Assets_9987946FF07C6AAD6A61007D982915E6" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_Assets_9987946FF07C6AAD6A61007D982915E6" xlink:to="lab_us-gaap_Assets_9987946FF07C6AAD6A61007D982915E6" xlink:type="arc" />
    <link:label id="lab_us-gaap_CommitmentsAndContingenciesDisclosureTextBlock_ECE940554EF1741B92B2F541EE342E90_terseLabel_en-US" xlink:label="lab_us-gaap_CommitmentsAndContingenciesDisclosureTextBlock_ECE940554EF1741B92B2F541EE342E90" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Commitments and Contingencies</link:label>
    <link:label id="lab_us-gaap_CommitmentsAndContingenciesDisclosureTextBlock_ECE940554EF1741B92B2F541EE342E90_label_en-US" xlink:label="lab_us-gaap_CommitmentsAndContingenciesDisclosureTextBlock_ECE940554EF1741B92B2F541EE342E90" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Commitments and Contingencies Disclosure [Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CommitmentsAndContingenciesDisclosureTextBlock" xlink:label="loc_us-gaap_CommitmentsAndContingenciesDisclosureTextBlock_ECE940554EF1741B92B2F541EE342E90" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_CommitmentsAndContingenciesDisclosureTextBlock_ECE940554EF1741B92B2F541EE342E90" xlink:to="lab_us-gaap_CommitmentsAndContingenciesDisclosureTextBlock_ECE940554EF1741B92B2F541EE342E90" xlink:type="arc" />
    <link:label id="lab_us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue_EAA1748BB1D4E63E9530F541ED146792_terseLabel_en-US" xlink:label="lab_us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue_EAA1748BB1D4E63E9530F541ED146792" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Restricted cash</link:label>
    <link:label id="lab_us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue_EAA1748BB1D4E63E9530F541ED146792_label_en-US" xlink:label="lab_us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue_EAA1748BB1D4E63E9530F541ED146792" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Restricted Cash and Cash Equivalents, Current</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue" xlink:label="loc_us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue_EAA1748BB1D4E63E9530F541ED146792" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue_EAA1748BB1D4E63E9530F541ED146792" xlink:to="lab_us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue_EAA1748BB1D4E63E9530F541ED146792" xlink:type="arc" />
    <link:label id="lab_us-gaap_AssetsAbstract_EB543DDB4546727A2618FC388808CC3F_terseLabel_en-US" xlink:label="lab_us-gaap_AssetsAbstract_EB543DDB4546727A2618FC388808CC3F" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Assets</link:label>
    <link:label id="lab_us-gaap_AssetsAbstract_EB543DDB4546727A2618FC388808CC3F_label_en-US" xlink:label="lab_us-gaap_AssetsAbstract_EB543DDB4546727A2618FC388808CC3F" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Assets [Abstract]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AssetsAbstract" xlink:label="loc_us-gaap_AssetsAbstract_EB543DDB4546727A2618FC388808CC3F" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_AssetsAbstract_EB543DDB4546727A2618FC388808CC3F" xlink:to="lab_us-gaap_AssetsAbstract_EB543DDB4546727A2618FC388808CC3F" xlink:type="arc" />
    <link:label id="lab_us-gaap_AssetsCurrentAbstract_CF04E5D94272A5BA6769FC388809364C_verboseLabel_en-US" xlink:label="lab_us-gaap_AssetsCurrentAbstract_CF04E5D94272A5BA6769FC388809364C" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:type="resource" xml:lang="en-US">Current Assets</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AssetsCurrentAbstract" xlink:label="loc_us-gaap_AssetsCurrentAbstract_CF04E5D94272A5BA6769FC388809364C" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_AssetsCurrentAbstract_CF04E5D94272A5BA6769FC388809364C" xlink:to="lab_us-gaap_AssetsCurrentAbstract_CF04E5D94272A5BA6769FC388809364C" xlink:type="arc" />
    <link:label id="lab_us-gaap_CashAndCashEquivalentsAtCarryingValue_055F36EF9A37A1AC087BFC3888091C9A_verboseLabel_en-US" xlink:label="lab_us-gaap_CashAndCashEquivalentsAtCarryingValue_055F36EF9A37A1AC087BFC3888091C9A" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:type="resource" xml:lang="en-US">Cash and cash equivalents</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CashAndCashEquivalentsAtCarryingValue" xlink:label="loc_us-gaap_CashAndCashEquivalentsAtCarryingValue_055F36EF9A37A1AC087BFC3888091C9A" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_CashAndCashEquivalentsAtCarryingValue_055F36EF9A37A1AC087BFC3888091C9A" xlink:to="lab_us-gaap_CashAndCashEquivalentsAtCarryingValue_055F36EF9A37A1AC087BFC3888091C9A" xlink:type="arc" />
    <link:label id="lab_us-gaap_AccountsReceivableNetCurrentAbstract_D4220BEA4128D4AA92EBFC3888097AC8_terseLabel_en-US" xlink:label="lab_us-gaap_AccountsReceivableNetCurrentAbstract_D4220BEA4128D4AA92EBFC3888097AC8" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Accounts receivable</link:label>
    <link:label id="lab_us-gaap_AccountsReceivableNetCurrentAbstract_D4220BEA4128D4AA92EBFC3888097AC8_label_en-US" xlink:label="lab_us-gaap_AccountsReceivableNetCurrentAbstract_D4220BEA4128D4AA92EBFC3888097AC8" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Accounts Receivable, Net, Current [Abstract]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AccountsReceivableNetCurrentAbstract" xlink:label="loc_us-gaap_AccountsReceivableNetCurrentAbstract_D4220BEA4128D4AA92EBFC3888097AC8" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_AccountsReceivableNetCurrentAbstract_D4220BEA4128D4AA92EBFC3888097AC8" xlink:to="lab_us-gaap_AccountsReceivableNetCurrentAbstract_D4220BEA4128D4AA92EBFC3888097AC8" xlink:type="arc" />
    <link:label id="lab_us-gaap_AccountsReceivableNetCurrent_3E845D8D4C7A61A54FC4FC388809B5B0_terseLabel_en-US" xlink:label="lab_us-gaap_AccountsReceivableNetCurrent_3E845D8D4C7A61A54FC4FC388809B5B0" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Trade (less allowance for doubtful accounts of $3,440 and $2,846 at June 30, 2015, and September 30, 2014, respectively)</link:label>
    <link:label id="lab_us-gaap_AccountsReceivableNetCurrent_3E845D8D4C7A61A54FC4FC388809B5B0_label_en-US" xlink:label="lab_us-gaap_AccountsReceivableNetCurrent_3E845D8D4C7A61A54FC4FC388809B5B0" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Accounts Receivable, Net, Current</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AccountsReceivableNetCurrent" xlink:label="loc_us-gaap_AccountsReceivableNetCurrent_3E845D8D4C7A61A54FC4FC388809B5B0" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_AccountsReceivableNetCurrent_3E845D8D4C7A61A54FC4FC388809B5B0" xlink:to="lab_us-gaap_AccountsReceivableNetCurrent_3E845D8D4C7A61A54FC4FC388809B5B0" xlink:type="arc" />
    <link:label id="lab_asys_UnbilledAndOther_B36F6E39BB9A5837F2B7FC38880956D1_terseLabel_en-US" xlink:label="lab_asys_UnbilledAndOther_B36F6E39BB9A5837F2B7FC38880956D1" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Unbilled and other</link:label>
    <link:label id="lab_asys_UnbilledAndOther_B36F6E39BB9A5837F2B7FC38880956D1_label_en-US" xlink:label="lab_asys_UnbilledAndOther_B36F6E39BB9A5837F2B7FC38880956D1" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Unbilled And Other</link:label>
    <link:label id="lab_asys_UnbilledAndOther_B36F6E39BB9A5837F2B7FC38880956D1_documentation_en-US" xlink:label="lab_asys_UnbilledAndOther_B36F6E39BB9A5837F2B7FC38880956D1" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Primarily the contingent portion of the sales price that is not billable until acceptance of the product.  The majority of these amounts are offset by balances included in deferred profit.</link:label>
    <link:loc xlink:href="asys-20150630.xsd#asys_UnbilledAndOther" xlink:label="loc_asys_UnbilledAndOther_B36F6E39BB9A5837F2B7FC38880956D1" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_UnbilledAndOther_B36F6E39BB9A5837F2B7FC38880956D1" xlink:to="lab_asys_UnbilledAndOther_B36F6E39BB9A5837F2B7FC38880956D1" xlink:type="arc" />
    <link:label id="lab_us-gaap_InventoryNet_9B57CD2974331E0D54C7FC3888095667_terseLabel_en-US" xlink:label="lab_us-gaap_InventoryNet_9B57CD2974331E0D54C7FC3888095667" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Inventories</link:label>
    <link:label id="lab_us-gaap_InventoryNet_9B57CD2974331E0D54C7FC3888095667_label_en-US" xlink:label="lab_us-gaap_InventoryNet_9B57CD2974331E0D54C7FC3888095667" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Inventory, Net</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_InventoryNet" xlink:label="loc_us-gaap_InventoryNet_9B57CD2974331E0D54C7FC3888095667" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_InventoryNet_9B57CD2974331E0D54C7FC3888095667" xlink:to="lab_us-gaap_InventoryNet_9B57CD2974331E0D54C7FC3888095667" xlink:type="arc" />
    <link:label id="lab_us-gaap_DeferredTaxAssetsNetCurrent_6DA743F79CB669742385FC388809491E_terseLabel_en-US" xlink:label="lab_us-gaap_DeferredTaxAssetsNetCurrent_6DA743F79CB669742385FC388809491E" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Deferred income taxes</link:label>
    <link:label id="lab_us-gaap_DeferredTaxAssetsNetCurrent_6DA743F79CB669742385FC388809491E_label_en-US" xlink:label="lab_us-gaap_DeferredTaxAssetsNetCurrent_6DA743F79CB669742385FC388809491E" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Deferred Tax Assets, Net of Valuation Allowance, Current</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DeferredTaxAssetsNetCurrent" xlink:label="loc_us-gaap_DeferredTaxAssetsNetCurrent_6DA743F79CB669742385FC388809491E" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_DeferredTaxAssetsNetCurrent_6DA743F79CB669742385FC388809491E" xlink:to="lab_us-gaap_DeferredTaxAssetsNetCurrent_6DA743F79CB669742385FC388809491E" xlink:type="arc" />
    <link:label id="lab_us-gaap_IncomeTaxesReceivable_6C7D84D23270EA3BB6B6FC3888098F23_terseLabel_en-US" xlink:label="lab_us-gaap_IncomeTaxesReceivable_6C7D84D23270EA3BB6B6FC3888098F23" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Refundable income taxes</link:label>
    <link:label id="lab_us-gaap_IncomeTaxesReceivable_6C7D84D23270EA3BB6B6FC3888098F23_label_en-US" xlink:label="lab_us-gaap_IncomeTaxesReceivable_6C7D84D23270EA3BB6B6FC3888098F23" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Income Taxes Receivable, Current</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncomeTaxesReceivable" xlink:label="loc_us-gaap_IncomeTaxesReceivable_6C7D84D23270EA3BB6B6FC3888098F23" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_IncomeTaxesReceivable_6C7D84D23270EA3BB6B6FC3888098F23" xlink:to="lab_us-gaap_IncomeTaxesReceivable_6C7D84D23270EA3BB6B6FC3888098F23" xlink:type="arc" />
    <link:label id="lab_us-gaap_OtherAssetsCurrent_6F64159EB41C8DA724C9FC38880A3F3C_terseLabel_en-US" xlink:label="lab_us-gaap_OtherAssetsCurrent_6F64159EB41C8DA724C9FC38880A3F3C" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Other</link:label>
    <link:label id="lab_us-gaap_OtherAssetsCurrent_6F64159EB41C8DA724C9FC38880A3F3C_label_en-US" xlink:label="lab_us-gaap_OtherAssetsCurrent_6F64159EB41C8DA724C9FC38880A3F3C" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Other Assets, Current</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherAssetsCurrent" xlink:label="loc_us-gaap_OtherAssetsCurrent_6F64159EB41C8DA724C9FC38880A3F3C" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_OtherAssetsCurrent_6F64159EB41C8DA724C9FC38880A3F3C" xlink:to="lab_us-gaap_OtherAssetsCurrent_6F64159EB41C8DA724C9FC38880A3F3C" xlink:type="arc" />
    <link:label id="lab_us-gaap_AssetsCurrent_CBA6EE53FFAD7BE4BF2EFC38880AB62C_totalLabel_en-US" xlink:label="lab_us-gaap_AssetsCurrent_CBA6EE53FFAD7BE4BF2EFC38880AB62C" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:type="resource" xml:lang="en-US">Total current assets</link:label>
    <link:label id="lab_us-gaap_AssetsCurrent_CBA6EE53FFAD7BE4BF2EFC38880AB62C_label_en-US" xlink:label="lab_us-gaap_AssetsCurrent_CBA6EE53FFAD7BE4BF2EFC38880AB62C" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Assets, Current</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AssetsCurrent" xlink:label="loc_us-gaap_AssetsCurrent_CBA6EE53FFAD7BE4BF2EFC38880AB62C" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_AssetsCurrent_CBA6EE53FFAD7BE4BF2EFC38880AB62C" xlink:to="lab_us-gaap_AssetsCurrent_CBA6EE53FFAD7BE4BF2EFC38880AB62C" xlink:type="arc" />
    <link:label id="lab_us-gaap_PropertyPlantAndEquipmentNet_596BBE9190C38B9A6983FC38880A8CAC_terseLabel_en-US" xlink:label="lab_us-gaap_PropertyPlantAndEquipmentNet_596BBE9190C38B9A6983FC38880A8CAC" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Property, Plant and Equipment - Net</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PropertyPlantAndEquipmentNet" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentNet_596BBE9190C38B9A6983FC38880A8CAC" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentNet_596BBE9190C38B9A6983FC38880A8CAC" xlink:to="lab_us-gaap_PropertyPlantAndEquipmentNet_596BBE9190C38B9A6983FC38880A8CAC" xlink:type="arc" />
    <link:label id="lab_us-gaap_DeferredTaxAssetsNetNoncurrent_2EAAF74E1B775E804633FC38880AD7BE_terseLabel_en-US" xlink:label="lab_us-gaap_DeferredTaxAssetsNetNoncurrent_2EAAF74E1B775E804633FC38880AD7BE" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Deferred Income Taxes - Long Term</link:label>
    <link:label id="lab_us-gaap_DeferredTaxAssetsNetNoncurrent_2EAAF74E1B775E804633FC38880AD7BE_label_en-US" xlink:label="lab_us-gaap_DeferredTaxAssetsNetNoncurrent_2EAAF74E1B775E804633FC38880AD7BE" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Deferred Tax Assets, Net of Valuation Allowance, Noncurrent</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DeferredTaxAssetsNetNoncurrent" xlink:label="loc_us-gaap_DeferredTaxAssetsNetNoncurrent_2EAAF74E1B775E804633FC38880AD7BE" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_DeferredTaxAssetsNetNoncurrent_2EAAF74E1B775E804633FC38880AD7BE" xlink:to="lab_us-gaap_DeferredTaxAssetsNetNoncurrent_2EAAF74E1B775E804633FC38880AD7BE" xlink:type="arc" />
    <link:label id="lab_us-gaap_IntangibleAssetsNetExcludingGoodwill_10DA288389B41F705511FC38880F7A6B_terseLabel_en-US" xlink:label="lab_us-gaap_IntangibleAssetsNetExcludingGoodwill_10DA288389B41F705511FC38880F7A6B" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Intangible Assets - Net</link:label>
    <link:label id="lab_us-gaap_IntangibleAssetsNetExcludingGoodwill_10DA288389B41F705511FC38880F7A6B_label_en-US" xlink:label="lab_us-gaap_IntangibleAssetsNetExcludingGoodwill_10DA288389B41F705511FC38880F7A6B" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Intangible Assets, Net (Excluding Goodwill)</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IntangibleAssetsNetExcludingGoodwill" xlink:label="loc_us-gaap_IntangibleAssetsNetExcludingGoodwill_10DA288389B41F705511FC38880F7A6B" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_IntangibleAssetsNetExcludingGoodwill_10DA288389B41F705511FC38880F7A6B" xlink:to="lab_us-gaap_IntangibleAssetsNetExcludingGoodwill_10DA288389B41F705511FC38880F7A6B" xlink:type="arc" />
    <link:label id="lab_us-gaap_OtherAssetsNoncurrent_9927CF83C046A2847A13FC38880F1FB4_terseLabel_en-US" xlink:label="lab_us-gaap_OtherAssetsNoncurrent_9927CF83C046A2847A13FC38880F1FB4" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Other Assets - Long Term</link:label>
    <link:label id="lab_us-gaap_OtherAssetsNoncurrent_9927CF83C046A2847A13FC38880F1FB4_label_en-US" xlink:label="lab_us-gaap_OtherAssetsNoncurrent_9927CF83C046A2847A13FC38880F1FB4" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Other Assets, Noncurrent</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherAssetsNoncurrent" xlink:label="loc_us-gaap_OtherAssetsNoncurrent_9927CF83C046A2847A13FC38880F1FB4" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_OtherAssetsNoncurrent_9927CF83C046A2847A13FC38880F1FB4" xlink:to="lab_us-gaap_OtherAssetsNoncurrent_9927CF83C046A2847A13FC38880F1FB4" xlink:type="arc" />
    <link:label id="lab_us-gaap_Assets_DD261328DB5B60FC067CFC38880F56D0_totalLabel_en-US" xlink:label="lab_us-gaap_Assets_DD261328DB5B60FC067CFC38880F56D0" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:type="resource" xml:lang="en-US">Total Assets</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_Assets" xlink:label="loc_us-gaap_Assets_DD261328DB5B60FC067CFC38880F56D0" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_Assets_DD261328DB5B60FC067CFC38880F56D0" xlink:to="lab_us-gaap_Assets_DD261328DB5B60FC067CFC38880F56D0" xlink:type="arc" />
    <link:label id="lab_us-gaap_LiabilitiesAndStockholdersEquityAbstract_A9EB433ED86D33A029F7FC38880F2581_terseLabel_en-US" xlink:label="lab_us-gaap_LiabilitiesAndStockholdersEquityAbstract_A9EB433ED86D33A029F7FC38880F2581" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Liabilities and Stockholders' Equity</link:label>
    <link:label id="lab_us-gaap_LiabilitiesAndStockholdersEquityAbstract_A9EB433ED86D33A029F7FC38880F2581_label_en-US" xlink:label="lab_us-gaap_LiabilitiesAndStockholdersEquityAbstract_A9EB433ED86D33A029F7FC38880F2581" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Liabilities and Equity [Abstract]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LiabilitiesAndStockholdersEquityAbstract" xlink:label="loc_us-gaap_LiabilitiesAndStockholdersEquityAbstract_A9EB433ED86D33A029F7FC38880F2581" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_LiabilitiesAndStockholdersEquityAbstract_A9EB433ED86D33A029F7FC38880F2581" xlink:to="lab_us-gaap_LiabilitiesAndStockholdersEquityAbstract_A9EB433ED86D33A029F7FC38880F2581" xlink:type="arc" />
    <link:label id="lab_us-gaap_LiabilitiesCurrentAbstract_26DD1A2210749D8FC749FC38880F6BB8_terseLabel_en-US" xlink:label="lab_us-gaap_LiabilitiesCurrentAbstract_26DD1A2210749D8FC749FC38880F6BB8" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Current Liabilities</link:label>
    <link:label id="lab_us-gaap_LiabilitiesCurrentAbstract_26DD1A2210749D8FC749FC38880F6BB8_label_en-US" xlink:label="lab_us-gaap_LiabilitiesCurrentAbstract_26DD1A2210749D8FC749FC38880F6BB8" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Liabilities, Current [Abstract]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LiabilitiesCurrentAbstract" xlink:label="loc_us-gaap_LiabilitiesCurrentAbstract_26DD1A2210749D8FC749FC38880F6BB8" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_LiabilitiesCurrentAbstract_26DD1A2210749D8FC749FC38880F6BB8" xlink:to="lab_us-gaap_LiabilitiesCurrentAbstract_26DD1A2210749D8FC749FC38880F6BB8" xlink:type="arc" />
    <link:label id="lab_us-gaap_AccountsPayableCurrent_803A19205039256BE6B9FC3888108306_terseLabel_en-US" xlink:label="lab_us-gaap_AccountsPayableCurrent_803A19205039256BE6B9FC3888108306" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Accounts payable</link:label>
    <link:label id="lab_us-gaap_AccountsPayableCurrent_803A19205039256BE6B9FC3888108306_label_en-US" xlink:label="lab_us-gaap_AccountsPayableCurrent_803A19205039256BE6B9FC3888108306" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Accounts Payable, Current</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AccountsPayableCurrent" xlink:label="loc_us-gaap_AccountsPayableCurrent_803A19205039256BE6B9FC3888108306" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_AccountsPayableCurrent_803A19205039256BE6B9FC3888108306" xlink:to="lab_us-gaap_AccountsPayableCurrent_803A19205039256BE6B9FC3888108306" xlink:type="arc" />
    <link:label id="lab_us-gaap_LongTermDebtCurrent_EFFDA1A90F9E0AE3DE7CFC3888106342_terseLabel_en-US" xlink:label="lab_us-gaap_LongTermDebtCurrent_EFFDA1A90F9E0AE3DE7CFC3888106342" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Current maturities of long-term debt</link:label>
    <link:label id="lab_us-gaap_LongTermDebtCurrent_EFFDA1A90F9E0AE3DE7CFC3888106342_label_en-US" xlink:label="lab_us-gaap_LongTermDebtCurrent_EFFDA1A90F9E0AE3DE7CFC3888106342" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Long-term Debt, Current Maturities</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LongTermDebtCurrent" xlink:label="loc_us-gaap_LongTermDebtCurrent_EFFDA1A90F9E0AE3DE7CFC3888106342" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_LongTermDebtCurrent_EFFDA1A90F9E0AE3DE7CFC3888106342" xlink:to="lab_us-gaap_LongTermDebtCurrent_EFFDA1A90F9E0AE3DE7CFC3888106342" xlink:type="arc" />
    <link:label id="lab_us-gaap_EmployeeRelatedLiabilitiesCurrent_5E9D64BBCBCA37853BB7FC388810D1D4_terseLabel_en-US" xlink:label="lab_us-gaap_EmployeeRelatedLiabilitiesCurrent_5E9D64BBCBCA37853BB7FC388810D1D4" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Accrued compensation and related taxes</link:label>
    <link:label id="lab_us-gaap_EmployeeRelatedLiabilitiesCurrent_5E9D64BBCBCA37853BB7FC388810D1D4_label_en-US" xlink:label="lab_us-gaap_EmployeeRelatedLiabilitiesCurrent_5E9D64BBCBCA37853BB7FC388810D1D4" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Employee-related Liabilities, Current</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EmployeeRelatedLiabilitiesCurrent" xlink:label="loc_us-gaap_EmployeeRelatedLiabilitiesCurrent_5E9D64BBCBCA37853BB7FC388810D1D4" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_EmployeeRelatedLiabilitiesCurrent_5E9D64BBCBCA37853BB7FC388810D1D4" xlink:to="lab_us-gaap_EmployeeRelatedLiabilitiesCurrent_5E9D64BBCBCA37853BB7FC388810D1D4" xlink:type="arc" />
    <link:label id="lab_us-gaap_ProductWarrantyAccrualClassifiedCurrent_78BDC2982B9F8CC20FDEFC388810481F_terseLabel_en-US" xlink:label="lab_us-gaap_ProductWarrantyAccrualClassifiedCurrent_78BDC2982B9F8CC20FDEFC388810481F" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Accrued warranty expense</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProductWarrantyAccrualClassifiedCurrent" xlink:label="loc_us-gaap_ProductWarrantyAccrualClassifiedCurrent_78BDC2982B9F8CC20FDEFC388810481F" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ProductWarrantyAccrualClassifiedCurrent_78BDC2982B9F8CC20FDEFC388810481F" xlink:to="lab_us-gaap_ProductWarrantyAccrualClassifiedCurrent_78BDC2982B9F8CC20FDEFC388810481F" xlink:type="arc" />
    <link:label id="lab_us-gaap_OtherDeferredCreditsCurrent_3FB85F48F2F4B019CE19FC388810B61C_terseLabel_en-US" xlink:label="lab_us-gaap_OtherDeferredCreditsCurrent_3FB85F48F2F4B019CE19FC388810B61C" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Deferred profit</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherDeferredCreditsCurrent" xlink:label="loc_us-gaap_OtherDeferredCreditsCurrent_3FB85F48F2F4B019CE19FC388810B61C" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_OtherDeferredCreditsCurrent_3FB85F48F2F4B019CE19FC388810B61C" xlink:to="lab_us-gaap_OtherDeferredCreditsCurrent_3FB85F48F2F4B019CE19FC388810B61C" xlink:type="arc" />
    <link:label id="lab_us-gaap_CustomerAdvancesCurrent_313C98D43D9EE3ADCF11FC3888107991_terseLabel_en-US" xlink:label="lab_us-gaap_CustomerAdvancesCurrent_313C98D43D9EE3ADCF11FC3888107991" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Customer deposits</link:label>
    <link:label id="lab_us-gaap_CustomerAdvancesCurrent_313C98D43D9EE3ADCF11FC3888107991_label_en-US" xlink:label="lab_us-gaap_CustomerAdvancesCurrent_313C98D43D9EE3ADCF11FC3888107991" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Customer Advances, Current</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CustomerAdvancesCurrent" xlink:label="loc_us-gaap_CustomerAdvancesCurrent_313C98D43D9EE3ADCF11FC3888107991" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_CustomerAdvancesCurrent_313C98D43D9EE3ADCF11FC3888107991" xlink:to="lab_us-gaap_CustomerAdvancesCurrent_313C98D43D9EE3ADCF11FC3888107991" xlink:type="arc" />
    <link:label id="lab_us-gaap_AccruedLiabilitiesCurrent_B9A904462602358DFFF3FC3888105C96_terseLabel_en-US" xlink:label="lab_us-gaap_AccruedLiabilitiesCurrent_B9A904462602358DFFF3FC3888105C96" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Other accrued liabilities</link:label>
    <link:label id="lab_us-gaap_AccruedLiabilitiesCurrent_B9A904462602358DFFF3FC3888105C96_label_en-US" xlink:label="lab_us-gaap_AccruedLiabilitiesCurrent_B9A904462602358DFFF3FC3888105C96" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Accrued Liabilities, Current</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AccruedLiabilitiesCurrent" xlink:label="loc_us-gaap_AccruedLiabilitiesCurrent_B9A904462602358DFFF3FC3888105C96" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_AccruedLiabilitiesCurrent_B9A904462602358DFFF3FC3888105C96" xlink:to="lab_us-gaap_AccruedLiabilitiesCurrent_B9A904462602358DFFF3FC3888105C96" xlink:type="arc" />
    <link:label id="lab_us-gaap_AccruedIncomeTaxesCurrent_2D809B01AE272CFEFD1BFC388810D94B_terseLabel_en-US" xlink:label="lab_us-gaap_AccruedIncomeTaxesCurrent_2D809B01AE272CFEFD1BFC388810D94B" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Income taxes payable</link:label>
    <link:label id="lab_us-gaap_AccruedIncomeTaxesCurrent_2D809B01AE272CFEFD1BFC388810D94B_label_en-US" xlink:label="lab_us-gaap_AccruedIncomeTaxesCurrent_2D809B01AE272CFEFD1BFC388810D94B" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Accrued Income Taxes, Current</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AccruedIncomeTaxesCurrent" xlink:label="loc_us-gaap_AccruedIncomeTaxesCurrent_2D809B01AE272CFEFD1BFC388810D94B" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_AccruedIncomeTaxesCurrent_2D809B01AE272CFEFD1BFC388810D94B" xlink:to="lab_us-gaap_AccruedIncomeTaxesCurrent_2D809B01AE272CFEFD1BFC388810D94B" xlink:type="arc" />
    <link:label id="lab_us-gaap_LiabilitiesCurrent_4678068E54D3B429E456FC3888100F0E_totalLabel_en-US" xlink:label="lab_us-gaap_LiabilitiesCurrent_4678068E54D3B429E456FC3888100F0E" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:type="resource" xml:lang="en-US">Total current liabilities</link:label>
    <link:label id="lab_us-gaap_LiabilitiesCurrent_4678068E54D3B429E456FC3888100F0E_label_en-US" xlink:label="lab_us-gaap_LiabilitiesCurrent_4678068E54D3B429E456FC3888100F0E" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Liabilities, Current</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LiabilitiesCurrent" xlink:label="loc_us-gaap_LiabilitiesCurrent_4678068E54D3B429E456FC3888100F0E" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_LiabilitiesCurrent_4678068E54D3B429E456FC3888100F0E" xlink:to="lab_us-gaap_LiabilitiesCurrent_4678068E54D3B429E456FC3888100F0E" xlink:type="arc" />
    <link:label id="lab_us-gaap_LongTermDebtNoncurrent_7E43B27CEF8A33426B41FC3888109C7F_terseLabel_en-US" xlink:label="lab_us-gaap_LongTermDebtNoncurrent_7E43B27CEF8A33426B41FC3888109C7F" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Long-term Debt</link:label>
    <link:label id="lab_us-gaap_LongTermDebtNoncurrent_7E43B27CEF8A33426B41FC3888109C7F_label_en-US" xlink:label="lab_us-gaap_LongTermDebtNoncurrent_7E43B27CEF8A33426B41FC3888109C7F" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Long-term Debt, Excluding Current Maturities</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LongTermDebtNoncurrent" xlink:label="loc_us-gaap_LongTermDebtNoncurrent_7E43B27CEF8A33426B41FC3888109C7F" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_LongTermDebtNoncurrent_7E43B27CEF8A33426B41FC3888109C7F" xlink:to="lab_us-gaap_LongTermDebtNoncurrent_7E43B27CEF8A33426B41FC3888109C7F" xlink:type="arc" />
    <link:label id="lab_us-gaap_LiabilityForUncertainTaxPositionsNoncurrent_CF93484AEE84D1C30C44FC388810740C_terseLabel_en-US" xlink:label="lab_us-gaap_LiabilityForUncertainTaxPositionsNoncurrent_CF93484AEE84D1C30C44FC388810740C" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Income Taxes Payable - Long Term</link:label>
    <link:label id="lab_us-gaap_LiabilityForUncertainTaxPositionsNoncurrent_CF93484AEE84D1C30C44FC388810740C_label_en-US" xlink:label="lab_us-gaap_LiabilityForUncertainTaxPositionsNoncurrent_CF93484AEE84D1C30C44FC388810740C" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Liability for Uncertain Tax Positions, Noncurrent</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LiabilityForUncertainTaxPositionsNoncurrent" xlink:label="loc_us-gaap_LiabilityForUncertainTaxPositionsNoncurrent_CF93484AEE84D1C30C44FC388810740C" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_LiabilityForUncertainTaxPositionsNoncurrent_CF93484AEE84D1C30C44FC388810740C" xlink:to="lab_us-gaap_LiabilityForUncertainTaxPositionsNoncurrent_CF93484AEE84D1C30C44FC388810740C" xlink:type="arc" />
    <link:label id="lab_us-gaap_DeferredTaxLiabilitiesNoncurrent_FF4309432EF76B756515FC3888115770_terseLabel_en-US" xlink:label="lab_us-gaap_DeferredTaxLiabilitiesNoncurrent_FF4309432EF76B756515FC3888115770" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Deferred Income Taxes - Long Term</link:label>
    <link:label id="lab_us-gaap_DeferredTaxLiabilitiesNoncurrent_FF4309432EF76B756515FC3888115770_label_en-US" xlink:label="lab_us-gaap_DeferredTaxLiabilitiesNoncurrent_FF4309432EF76B756515FC3888115770" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Deferred Tax Liabilities, Net, Noncurrent</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DeferredTaxLiabilitiesNoncurrent" xlink:label="loc_us-gaap_DeferredTaxLiabilitiesNoncurrent_FF4309432EF76B756515FC3888115770" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_DeferredTaxLiabilitiesNoncurrent_FF4309432EF76B756515FC3888115770" xlink:to="lab_us-gaap_DeferredTaxLiabilitiesNoncurrent_FF4309432EF76B756515FC3888115770" xlink:type="arc" />
    <link:label id="lab_us-gaap_Liabilities_2ED0C7B492F008845EF3FC3888110359_totalLabel_en-US" xlink:label="lab_us-gaap_Liabilities_2ED0C7B492F008845EF3FC3888110359" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:type="resource" xml:lang="en-US">Total liabilities</link:label>
    <link:label id="lab_us-gaap_Liabilities_2ED0C7B492F008845EF3FC3888110359_label_en-US" xlink:label="lab_us-gaap_Liabilities_2ED0C7B492F008845EF3FC3888110359" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Liabilities</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_Liabilities" xlink:label="loc_us-gaap_Liabilities_2ED0C7B492F008845EF3FC3888110359" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_Liabilities_2ED0C7B492F008845EF3FC3888110359" xlink:to="lab_us-gaap_Liabilities_2ED0C7B492F008845EF3FC3888110359" xlink:type="arc" />
    <link:label id="lab_us-gaap_CommitmentsAndContingencies_AAAAF3FE3E6825552FB1FC388811F6E9_terseLabel_en-US" xlink:label="lab_us-gaap_CommitmentsAndContingencies_AAAAF3FE3E6825552FB1FC388811F6E9" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Commitments and Contingencies</link:label>
    <link:label id="lab_us-gaap_CommitmentsAndContingencies_AAAAF3FE3E6825552FB1FC388811F6E9_label_en-US" xlink:label="lab_us-gaap_CommitmentsAndContingencies_AAAAF3FE3E6825552FB1FC388811F6E9" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Commitments and Contingencies</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CommitmentsAndContingencies" xlink:label="loc_us-gaap_CommitmentsAndContingencies_AAAAF3FE3E6825552FB1FC388811F6E9" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_CommitmentsAndContingencies_AAAAF3FE3E6825552FB1FC388811F6E9" xlink:to="lab_us-gaap_CommitmentsAndContingencies_AAAAF3FE3E6825552FB1FC388811F6E9" xlink:type="arc" />
    <link:label id="lab_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_F487A07CF14F282C3B11FC388811FCDA_verboseLabel_en-US" xlink:label="lab_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_F487A07CF14F282C3B11FC388811FCDA" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:type="resource" xml:lang="en-US">Stockholders' Equity</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract" xlink:label="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_F487A07CF14F282C3B11FC388811FCDA" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_F487A07CF14F282C3B11FC388811FCDA" xlink:to="lab_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_F487A07CF14F282C3B11FC388811FCDA" xlink:type="arc" />
    <link:label id="lab_us-gaap_PreferredStockValue_79C448C139E76D6F9C30FC388811C9ED_terseLabel_en-US" xlink:label="lab_us-gaap_PreferredStockValue_79C448C139E76D6F9C30FC388811C9ED" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Preferred stock; 100,000,000 shares authorized; none issued</link:label>
    <link:label id="lab_us-gaap_PreferredStockValue_79C448C139E76D6F9C30FC388811C9ED_label_en-US" xlink:label="lab_us-gaap_PreferredStockValue_79C448C139E76D6F9C30FC388811C9ED" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Preferred Stock, Value, Issued</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PreferredStockValue" xlink:label="loc_us-gaap_PreferredStockValue_79C448C139E76D6F9C30FC388811C9ED" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_PreferredStockValue_79C448C139E76D6F9C30FC388811C9ED" xlink:to="lab_us-gaap_PreferredStockValue_79C448C139E76D6F9C30FC388811C9ED" xlink:type="arc" />
    <link:label id="lab_us-gaap_CommonStockValue_45838B2C212914D51B74FC3888118964_terseLabel_en-US" xlink:label="lab_us-gaap_CommonStockValue_45838B2C212914D51B74FC3888118964" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Common stock; $0.01 par value; 100,000,000 shares authorized; shares issued and outstanding: 13,150,222 and 9,848,253 at June 30, 2015, and September 30, 2014, respectively</link:label>
    <link:label id="lab_us-gaap_CommonStockValue_45838B2C212914D51B74FC3888118964_label_en-US" xlink:label="lab_us-gaap_CommonStockValue_45838B2C212914D51B74FC3888118964" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Common Stock, Value, Issued</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CommonStockValue" xlink:label="loc_us-gaap_CommonStockValue_45838B2C212914D51B74FC3888118964" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_CommonStockValue_45838B2C212914D51B74FC3888118964" xlink:to="lab_us-gaap_CommonStockValue_45838B2C212914D51B74FC3888118964" xlink:type="arc" />
    <link:label id="lab_us-gaap_AdditionalPaidInCapital_E8AD7B8C688BB30AFD3FFC388811C422_terseLabel_en-US" xlink:label="lab_us-gaap_AdditionalPaidInCapital_E8AD7B8C688BB30AFD3FFC388811C422" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Additional paid-in capital</link:label>
    <link:label id="lab_us-gaap_AdditionalPaidInCapital_E8AD7B8C688BB30AFD3FFC388811C422_label_en-US" xlink:label="lab_us-gaap_AdditionalPaidInCapital_E8AD7B8C688BB30AFD3FFC388811C422" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Additional Paid in Capital</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AdditionalPaidInCapital" xlink:label="loc_us-gaap_AdditionalPaidInCapital_E8AD7B8C688BB30AFD3FFC388811C422" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_AdditionalPaidInCapital_E8AD7B8C688BB30AFD3FFC388811C422" xlink:to="lab_us-gaap_AdditionalPaidInCapital_E8AD7B8C688BB30AFD3FFC388811C422" xlink:type="arc" />
    <link:label id="lab_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_A264374ADD656725E0E3FC388811F7E1_terseLabel_en-US" xlink:label="lab_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_A264374ADD656725E0E3FC388811F7E1" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Accumulated other comprehensive loss</link:label>
    <link:label id="lab_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_A264374ADD656725E0E3FC388811F7E1_label_en-US" xlink:label="lab_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_A264374ADD656725E0E3FC388811F7E1" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Accumulated Other Comprehensive Income (Loss), Net of Tax</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax" xlink:label="loc_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_A264374ADD656725E0E3FC388811F7E1" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_A264374ADD656725E0E3FC388811F7E1" xlink:to="lab_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_A264374ADD656725E0E3FC388811F7E1" xlink:type="arc" />
    <link:label id="lab_us-gaap_RetainedEarningsAccumulatedDeficit_4D78DAB316D8A12AFD2CFC388811F2B8_terseLabel_en-US" xlink:label="lab_us-gaap_RetainedEarningsAccumulatedDeficit_4D78DAB316D8A12AFD2CFC388811F2B8" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Retained deficit</link:label>
    <link:label id="lab_us-gaap_RetainedEarningsAccumulatedDeficit_4D78DAB316D8A12AFD2CFC388811F2B8_label_en-US" xlink:label="lab_us-gaap_RetainedEarningsAccumulatedDeficit_4D78DAB316D8A12AFD2CFC388811F2B8" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Retained Earnings (Accumulated Deficit)</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RetainedEarningsAccumulatedDeficit" xlink:label="loc_us-gaap_RetainedEarningsAccumulatedDeficit_4D78DAB316D8A12AFD2CFC388811F2B8" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_RetainedEarningsAccumulatedDeficit_4D78DAB316D8A12AFD2CFC388811F2B8" xlink:to="lab_us-gaap_RetainedEarningsAccumulatedDeficit_4D78DAB316D8A12AFD2CFC388811F2B8" xlink:type="arc" />
    <link:label id="lab_us-gaap_StockholdersEquity_F3C3D31503F50C308E6AFC388811149B_totalLabel_en-US" xlink:label="lab_us-gaap_StockholdersEquity_F3C3D31503F50C308E6AFC388811149B" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:type="resource" xml:lang="en-US">Total stockholders' equity</link:label>
    <link:label id="lab_us-gaap_StockholdersEquity_F3C3D31503F50C308E6AFC388811149B_label_en-US" xlink:label="lab_us-gaap_StockholdersEquity_F3C3D31503F50C308E6AFC388811149B" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Stockholders' Equity Attributable to Parent</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StockholdersEquity" xlink:label="loc_us-gaap_StockholdersEquity_F3C3D31503F50C308E6AFC388811149B" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_StockholdersEquity_F3C3D31503F50C308E6AFC388811149B" xlink:to="lab_us-gaap_StockholdersEquity_F3C3D31503F50C308E6AFC388811149B" xlink:type="arc" />
    <link:label id="lab_us-gaap_MinorityInterest_2296F75AF5A3EED2A631FC388811A680_terseLabel_en-US" xlink:label="lab_us-gaap_MinorityInterest_2296F75AF5A3EED2A631FC388811A680" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Noncontrolling interest</link:label>
    <link:label id="lab_us-gaap_MinorityInterest_2296F75AF5A3EED2A631FC388811A680_label_en-US" xlink:label="lab_us-gaap_MinorityInterest_2296F75AF5A3EED2A631FC388811A680" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Stockholders' Equity Attributable to Noncontrolling Interest</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MinorityInterest" xlink:label="loc_us-gaap_MinorityInterest_2296F75AF5A3EED2A631FC388811A680" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_MinorityInterest_2296F75AF5A3EED2A631FC388811A680" xlink:to="lab_us-gaap_MinorityInterest_2296F75AF5A3EED2A631FC388811A680" xlink:type="arc" />
    <link:label id="lab_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterest_16429FE7F2098FA3049DFC388811D24A_totalLabel_en-US" xlink:label="lab_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterest_16429FE7F2098FA3049DFC388811D24A" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:type="resource" xml:lang="en-US">Total equity</link:label>
    <link:label id="lab_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterest_16429FE7F2098FA3049DFC388811D24A_label_en-US" xlink:label="lab_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterest_16429FE7F2098FA3049DFC388811D24A" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Stockholders' Equity, Including Portion Attributable to Noncontrolling Interest</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterest" xlink:label="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterest_16429FE7F2098FA3049DFC388811D24A" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterest_16429FE7F2098FA3049DFC388811D24A" xlink:to="lab_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterest_16429FE7F2098FA3049DFC388811D24A" xlink:type="arc" />
    <link:label id="lab_us-gaap_LiabilitiesAndStockholdersEquity_747CD28685CE6C5EB038FC388811FCD0_totalLabel_en-US" xlink:label="lab_us-gaap_LiabilitiesAndStockholdersEquity_747CD28685CE6C5EB038FC388811FCD0" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:type="resource" xml:lang="en-US">Total Liabilities and Stockholders' Equity</link:label>
    <link:label id="lab_us-gaap_LiabilitiesAndStockholdersEquity_747CD28685CE6C5EB038FC388811FCD0_label_en-US" xlink:label="lab_us-gaap_LiabilitiesAndStockholdersEquity_747CD28685CE6C5EB038FC388811FCD0" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Liabilities and Equity</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LiabilitiesAndStockholdersEquity" xlink:label="loc_us-gaap_LiabilitiesAndStockholdersEquity_747CD28685CE6C5EB038FC388811FCD0" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_LiabilitiesAndStockholdersEquity_747CD28685CE6C5EB038FC388811FCD0" xlink:to="lab_us-gaap_LiabilitiesAndStockholdersEquity_747CD28685CE6C5EB038FC388811FCD0" xlink:type="arc" />
    <link:label id="lab_us-gaap_ScheduleOfGoodwillTable_98DBCC557D624A5CB38A007D98740AD5_terseLabel_en-US" xlink:label="lab_us-gaap_ScheduleOfGoodwillTable_98DBCC557D624A5CB38A007D98740AD5" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Schedule of Goodwill [Table]</link:label>
    <link:label id="lab_us-gaap_ScheduleOfGoodwillTable_98DBCC557D624A5CB38A007D98740AD5_label_en-US" xlink:label="lab_us-gaap_ScheduleOfGoodwillTable_98DBCC557D624A5CB38A007D98740AD5" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Schedule of Goodwill [Table]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfGoodwillTable" xlink:label="loc_us-gaap_ScheduleOfGoodwillTable_98DBCC557D624A5CB38A007D98740AD5" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ScheduleOfGoodwillTable_98DBCC557D624A5CB38A007D98740AD5" xlink:to="lab_us-gaap_ScheduleOfGoodwillTable_98DBCC557D624A5CB38A007D98740AD5" xlink:type="arc" />
    <link:label id="lab_us-gaap_GoodwillLineItems_76247DCC0ADECEEC64E0007D9875BA97_terseLabel_en-US" xlink:label="lab_us-gaap_GoodwillLineItems_76247DCC0ADECEEC64E0007D9875BA97" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Goodwill [Line Items]</link:label>
    <link:label id="lab_us-gaap_GoodwillLineItems_76247DCC0ADECEEC64E0007D9875BA97_label_en-US" xlink:label="lab_us-gaap_GoodwillLineItems_76247DCC0ADECEEC64E0007D9875BA97" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Goodwill [Line Items]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GoodwillLineItems" xlink:label="loc_us-gaap_GoodwillLineItems_76247DCC0ADECEEC64E0007D9875BA97" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_GoodwillLineItems_76247DCC0ADECEEC64E0007D9875BA97" xlink:to="lab_us-gaap_GoodwillLineItems_76247DCC0ADECEEC64E0007D9875BA97" xlink:type="arc" />
    <link:label id="lab_us-gaap_GoodwillRollForward_94CDBF1774234AF16F93007D98757E35_terseLabel_en-US" xlink:label="lab_us-gaap_GoodwillRollForward_94CDBF1774234AF16F93007D98757E35" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Goodwill [Roll Forward]</link:label>
    <link:label id="lab_us-gaap_GoodwillRollForward_94CDBF1774234AF16F93007D98757E35_label_en-US" xlink:label="lab_us-gaap_GoodwillRollForward_94CDBF1774234AF16F93007D98757E35" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Goodwill [Roll Forward]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GoodwillRollForward" xlink:label="loc_us-gaap_GoodwillRollForward_94CDBF1774234AF16F93007D98757E35" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_GoodwillRollForward_94CDBF1774234AF16F93007D98757E35" xlink:to="lab_us-gaap_GoodwillRollForward_94CDBF1774234AF16F93007D98757E35" xlink:type="arc" />
    <link:label id="lab_us-gaap_GoodwillGross_BBCA05DC66F423343C6C007D98753156_periodStartLabel_en-US" xlink:label="lab_us-gaap_GoodwillGross_BBCA05DC66F423343C6C007D98753156" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel" xlink:type="resource" xml:lang="en-US">Goodwill, gross, beginning of year</link:label>
    <link:label id="lab_us-gaap_GoodwillGross_BBCA05DC66F423343C6C007D98753156_label_en-US" xlink:label="lab_us-gaap_GoodwillGross_BBCA05DC66F423343C6C007D98753156" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Goodwill, Gross</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GoodwillGross" xlink:label="loc_us-gaap_GoodwillGross_BBCA05DC66F423343C6C007D98753156" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_GoodwillGross_BBCA05DC66F423343C6C007D98753156" xlink:to="lab_us-gaap_GoodwillGross_BBCA05DC66F423343C6C007D98753156" xlink:type="arc" />
    <link:label id="lab_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss_F5966101AF55357A55AE007D98758EFA_negatedPeriodStartLabel_en-US" xlink:label="lab_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss_F5966101AF55357A55AE007D98758EFA" xlink:role="http://www.xbrl.org/2009/role/negatedPeriodStartLabel" xlink:type="resource" xml:lang="en-US">Goodwill, impaired, accumulated impairment loss, beginning of year</link:label>
    <link:label id="lab_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss_F5966101AF55357A55AE007D98758EFA_label_en-US" xlink:label="lab_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss_F5966101AF55357A55AE007D98758EFA" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Goodwill, Impaired, Accumulated Impairment Loss</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GoodwillImpairedAccumulatedImpairmentLoss" xlink:label="loc_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss_F5966101AF55357A55AE007D98758EFA" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss_F5966101AF55357A55AE007D98758EFA" xlink:to="lab_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss_F5966101AF55357A55AE007D98758EFA" xlink:type="arc" />
    <link:label id="lab_us-gaap_Goodwill_89ADB30BA031A07D319A007D9875F037_periodStartLabel_en-US" xlink:label="lab_us-gaap_Goodwill_89ADB30BA031A07D319A007D9875F037" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel" xlink:type="resource" xml:lang="en-US">Goodwill, net, beginning of year</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_Goodwill" xlink:label="loc_us-gaap_Goodwill_89ADB30BA031A07D319A007D9875F037" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_Goodwill_89ADB30BA031A07D319A007D9875F037" xlink:to="lab_us-gaap_Goodwill_89ADB30BA031A07D319A007D9875F037" xlink:type="arc" />
    <link:label id="lab_us-gaap_GoodwillTranslationAdjustments_727A45583EB2EE52777A007D987558B7_terseLabel_en-US" xlink:label="lab_us-gaap_GoodwillTranslationAdjustments_727A45583EB2EE52777A007D987558B7" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Change in foreign exchange rates</link:label>
    <link:label id="lab_us-gaap_GoodwillTranslationAdjustments_727A45583EB2EE52777A007D987558B7_label_en-US" xlink:label="lab_us-gaap_GoodwillTranslationAdjustments_727A45583EB2EE52777A007D987558B7" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Goodwill, Translation Adjustments</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GoodwillTranslationAdjustments" xlink:label="loc_us-gaap_GoodwillTranslationAdjustments_727A45583EB2EE52777A007D987558B7" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_GoodwillTranslationAdjustments_727A45583EB2EE52777A007D987558B7" xlink:to="lab_us-gaap_GoodwillTranslationAdjustments_727A45583EB2EE52777A007D987558B7" xlink:type="arc" />
    <link:label id="lab_us-gaap_GoodwillGross_B7F3C9C6E7FCE3DBE36B007D9876E670_periodEndLabel_en-US" xlink:label="lab_us-gaap_GoodwillGross_B7F3C9C6E7FCE3DBE36B007D9876E670" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel" xlink:type="resource" xml:lang="en-US">Goodwill, gross, end of quarter</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GoodwillGross" xlink:label="loc_us-gaap_GoodwillGross_B7F3C9C6E7FCE3DBE36B007D9876E670" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_GoodwillGross_B7F3C9C6E7FCE3DBE36B007D9876E670" xlink:to="lab_us-gaap_GoodwillGross_B7F3C9C6E7FCE3DBE36B007D9876E670" xlink:type="arc" />
    <link:label id="lab_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss_F7C2CB50B0DA3F6A4E09007D9876B63C_negatedPeriodEndLabel_en-US" xlink:label="lab_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss_F7C2CB50B0DA3F6A4E09007D9876B63C" xlink:role="http://www.xbrl.org/2009/role/negatedPeriodEndLabel" xlink:type="resource" xml:lang="en-US">Goodwill, impaired, accumulated impairment loss, end of quarter</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GoodwillImpairedAccumulatedImpairmentLoss" xlink:label="loc_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss_F7C2CB50B0DA3F6A4E09007D9876B63C" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss_F7C2CB50B0DA3F6A4E09007D9876B63C" xlink:to="lab_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss_F7C2CB50B0DA3F6A4E09007D9876B63C" xlink:type="arc" />
    <link:label id="lab_us-gaap_Goodwill_860EAC5FBC0F2B05AA09007D98764374_periodEndLabel_en-US" xlink:label="lab_us-gaap_Goodwill_860EAC5FBC0F2B05AA09007D98764374" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel" xlink:type="resource" xml:lang="en-US">Goodwill, net, end of quarter</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_Goodwill" xlink:label="loc_us-gaap_Goodwill_860EAC5FBC0F2B05AA09007D98764374" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_Goodwill_860EAC5FBC0F2B05AA09007D98764374" xlink:to="lab_us-gaap_Goodwill_860EAC5FBC0F2B05AA09007D98764374" xlink:type="arc" />
    <link:label id="lab_asys_DocumentAndEntityInformationAbstract_025127A9FEC9B9846723F541ED4FD7CD_label_en-US" xlink:label="lab_asys_DocumentAndEntityInformationAbstract_025127A9FEC9B9846723F541ED4FD7CD" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Document and Entity Information [Abstract]</link:label>
    <link:label id="lab_asys_DocumentAndEntityInformationAbstract_025127A9FEC9B9846723F541ED4FD7CD_documentation_en-US" xlink:label="lab_asys_DocumentAndEntityInformationAbstract_025127A9FEC9B9846723F541ED4FD7CD" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Document and Entity Information [Abstract]</link:label>
    <link:loc xlink:href="asys-20150630.xsd#asys_DocumentAndEntityInformationAbstract" xlink:label="loc_asys_DocumentAndEntityInformationAbstract_025127A9FEC9B9846723F541ED4FD7CD" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_DocumentAndEntityInformationAbstract_025127A9FEC9B9846723F541ED4FD7CD" xlink:to="lab_asys_DocumentAndEntityInformationAbstract_025127A9FEC9B9846723F541ED4FD7CD" xlink:type="arc" />
    <link:label id="lab_dei_EntityRegistrantName_D2E018C3BFECA4946243F541ED4FE042_terseLabel_en-US" xlink:label="lab_dei_EntityRegistrantName_D2E018C3BFECA4946243F541ED4FE042" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Entity Registrant Name</link:label>
    <link:label id="lab_dei_EntityRegistrantName_D2E018C3BFECA4946243F541ED4FE042_label_en-US" xlink:label="lab_dei_EntityRegistrantName_D2E018C3BFECA4946243F541ED4FE042" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Entity Registrant Name</link:label>
    <link:loc xlink:href="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd#dei_EntityRegistrantName" xlink:label="loc_dei_EntityRegistrantName_D2E018C3BFECA4946243F541ED4FE042" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_dei_EntityRegistrantName_D2E018C3BFECA4946243F541ED4FE042" xlink:to="lab_dei_EntityRegistrantName_D2E018C3BFECA4946243F541ED4FE042" xlink:type="arc" />
    <link:label id="lab_dei_EntityCentralIndexKey_DDDED5D5373ADF7ED942F541ED4F4A2A_terseLabel_en-US" xlink:label="lab_dei_EntityCentralIndexKey_DDDED5D5373ADF7ED942F541ED4F4A2A" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Entity Central Index Key</link:label>
    <link:label id="lab_dei_EntityCentralIndexKey_DDDED5D5373ADF7ED942F541ED4F4A2A_label_en-US" xlink:label="lab_dei_EntityCentralIndexKey_DDDED5D5373ADF7ED942F541ED4F4A2A" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Entity Central Index Key</link:label>
    <link:loc xlink:href="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd#dei_EntityCentralIndexKey" xlink:label="loc_dei_EntityCentralIndexKey_DDDED5D5373ADF7ED942F541ED4F4A2A" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_dei_EntityCentralIndexKey_DDDED5D5373ADF7ED942F541ED4F4A2A" xlink:to="lab_dei_EntityCentralIndexKey_DDDED5D5373ADF7ED942F541ED4F4A2A" xlink:type="arc" />
    <link:label id="lab_dei_CurrentFiscalYearEndDate_CDBB169ED4884FA85B07F541ED4F0242_terseLabel_en-US" xlink:label="lab_dei_CurrentFiscalYearEndDate_CDBB169ED4884FA85B07F541ED4F0242" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Current Fiscal Year End Date</link:label>
    <link:label id="lab_dei_CurrentFiscalYearEndDate_CDBB169ED4884FA85B07F541ED4F0242_label_en-US" xlink:label="lab_dei_CurrentFiscalYearEndDate_CDBB169ED4884FA85B07F541ED4F0242" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Current Fiscal Year End Date</link:label>
    <link:loc xlink:href="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd#dei_CurrentFiscalYearEndDate" xlink:label="loc_dei_CurrentFiscalYearEndDate_CDBB169ED4884FA85B07F541ED4F0242" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_dei_CurrentFiscalYearEndDate_CDBB169ED4884FA85B07F541ED4F0242" xlink:to="lab_dei_CurrentFiscalYearEndDate_CDBB169ED4884FA85B07F541ED4F0242" xlink:type="arc" />
    <link:label id="lab_dei_EntityFilerCategory_AC363FAC08357BC79C4EF541ED50BE10_terseLabel_en-US" xlink:label="lab_dei_EntityFilerCategory_AC363FAC08357BC79C4EF541ED50BE10" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Entity Filer Category</link:label>
    <link:label id="lab_dei_EntityFilerCategory_AC363FAC08357BC79C4EF541ED50BE10_label_en-US" xlink:label="lab_dei_EntityFilerCategory_AC363FAC08357BC79C4EF541ED50BE10" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Entity Filer Category</link:label>
    <link:loc xlink:href="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd#dei_EntityFilerCategory" xlink:label="loc_dei_EntityFilerCategory_AC363FAC08357BC79C4EF541ED50BE10" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_dei_EntityFilerCategory_AC363FAC08357BC79C4EF541ED50BE10" xlink:to="lab_dei_EntityFilerCategory_AC363FAC08357BC79C4EF541ED50BE10" xlink:type="arc" />
    <link:label id="lab_dei_DocumentType_2D1497FC1600DDB8577BF541ED50FA98_terseLabel_en-US" xlink:label="lab_dei_DocumentType_2D1497FC1600DDB8577BF541ED50FA98" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Document Type</link:label>
    <link:label id="lab_dei_DocumentType_2D1497FC1600DDB8577BF541ED50FA98_label_en-US" xlink:label="lab_dei_DocumentType_2D1497FC1600DDB8577BF541ED50FA98" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Document Type</link:label>
    <link:loc xlink:href="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd#dei_DocumentType" xlink:label="loc_dei_DocumentType_2D1497FC1600DDB8577BF541ED50FA98" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_dei_DocumentType_2D1497FC1600DDB8577BF541ED50FA98" xlink:to="lab_dei_DocumentType_2D1497FC1600DDB8577BF541ED50FA98" xlink:type="arc" />
    <link:label id="lab_dei_DocumentPeriodEndDate_D2ABD6F513A06DE9CDCBF541ED50B588_terseLabel_en-US" xlink:label="lab_dei_DocumentPeriodEndDate_D2ABD6F513A06DE9CDCBF541ED50B588" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Document Period End Date</link:label>
    <link:label id="lab_dei_DocumentPeriodEndDate_D2ABD6F513A06DE9CDCBF541ED50B588_label_en-US" xlink:label="lab_dei_DocumentPeriodEndDate_D2ABD6F513A06DE9CDCBF541ED50B588" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Document Period End Date</link:label>
    <link:loc xlink:href="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd#dei_DocumentPeriodEndDate" xlink:label="loc_dei_DocumentPeriodEndDate_D2ABD6F513A06DE9CDCBF541ED50B588" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_dei_DocumentPeriodEndDate_D2ABD6F513A06DE9CDCBF541ED50B588" xlink:to="lab_dei_DocumentPeriodEndDate_D2ABD6F513A06DE9CDCBF541ED50B588" xlink:type="arc" />
    <link:label id="lab_dei_DocumentFiscalYearFocus_C85519DCA26D0651CFB0F541ED5099E8_terseLabel_en-US" xlink:label="lab_dei_DocumentFiscalYearFocus_C85519DCA26D0651CFB0F541ED5099E8" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Document Fiscal Year Focus</link:label>
    <link:label id="lab_dei_DocumentFiscalYearFocus_C85519DCA26D0651CFB0F541ED5099E8_label_en-US" xlink:label="lab_dei_DocumentFiscalYearFocus_C85519DCA26D0651CFB0F541ED5099E8" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Document Fiscal Year Focus</link:label>
    <link:loc xlink:href="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd#dei_DocumentFiscalYearFocus" xlink:label="loc_dei_DocumentFiscalYearFocus_C85519DCA26D0651CFB0F541ED5099E8" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_dei_DocumentFiscalYearFocus_C85519DCA26D0651CFB0F541ED5099E8" xlink:to="lab_dei_DocumentFiscalYearFocus_C85519DCA26D0651CFB0F541ED5099E8" xlink:type="arc" />
    <link:label id="lab_dei_DocumentFiscalPeriodFocus_3B8E346B18B65D72A604F541ED50BDDF_terseLabel_en-US" xlink:label="lab_dei_DocumentFiscalPeriodFocus_3B8E346B18B65D72A604F541ED50BDDF" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Document Fiscal Period Focus</link:label>
    <link:label id="lab_dei_DocumentFiscalPeriodFocus_3B8E346B18B65D72A604F541ED50BDDF_label_en-US" xlink:label="lab_dei_DocumentFiscalPeriodFocus_3B8E346B18B65D72A604F541ED50BDDF" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Document Fiscal Period Focus</link:label>
    <link:loc xlink:href="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd#dei_DocumentFiscalPeriodFocus" xlink:label="loc_dei_DocumentFiscalPeriodFocus_3B8E346B18B65D72A604F541ED50BDDF" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_dei_DocumentFiscalPeriodFocus_3B8E346B18B65D72A604F541ED50BDDF" xlink:to="lab_dei_DocumentFiscalPeriodFocus_3B8E346B18B65D72A604F541ED50BDDF" xlink:type="arc" />
    <link:label id="lab_dei_AmendmentFlag_8106EDA33FD577377A3EF541ED502B42_terseLabel_en-US" xlink:label="lab_dei_AmendmentFlag_8106EDA33FD577377A3EF541ED502B42" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Amendment Flag</link:label>
    <link:label id="lab_dei_AmendmentFlag_8106EDA33FD577377A3EF541ED502B42_label_en-US" xlink:label="lab_dei_AmendmentFlag_8106EDA33FD577377A3EF541ED502B42" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Amendment Flag</link:label>
    <link:loc xlink:href="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd#dei_AmendmentFlag" xlink:label="loc_dei_AmendmentFlag_8106EDA33FD577377A3EF541ED502B42" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_dei_AmendmentFlag_8106EDA33FD577377A3EF541ED502B42" xlink:to="lab_dei_AmendmentFlag_8106EDA33FD577377A3EF541ED502B42" xlink:type="arc" />
    <link:label id="lab_dei_EntityCommonStockSharesOutstanding_0344F13844C5DB273D83F541ED50A2A9_terseLabel_en-US" xlink:label="lab_dei_EntityCommonStockSharesOutstanding_0344F13844C5DB273D83F541ED50A2A9" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Entity Common Stock, Shares Outstanding</link:label>
    <link:label id="lab_dei_EntityCommonStockSharesOutstanding_0344F13844C5DB273D83F541ED50A2A9_label_en-US" xlink:label="lab_dei_EntityCommonStockSharesOutstanding_0344F13844C5DB273D83F541ED50A2A9" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Entity Common Stock, Shares Outstanding</link:label>
    <link:loc xlink:href="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd#dei_EntityCommonStockSharesOutstanding" xlink:label="loc_dei_EntityCommonStockSharesOutstanding_0344F13844C5DB273D83F541ED50A2A9" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_dei_EntityCommonStockSharesOutstanding_0344F13844C5DB273D83F541ED50A2A9" xlink:to="lab_dei_EntityCommonStockSharesOutstanding_0344F13844C5DB273D83F541ED50A2A9" xlink:type="arc" />
    <link:label id="lab_us-gaap_MoneyMarketFundsAtCarryingValue_B263CAF90ECBE41A0C8FF541ED2E31F6_verboseLabel_en-US" xlink:label="lab_us-gaap_MoneyMarketFundsAtCarryingValue_B263CAF90ECBE41A0C8FF541ED2E31F6" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:type="resource" xml:lang="en-US">Money market funds</link:label>
    <link:label id="lab_us-gaap_MoneyMarketFundsAtCarryingValue_B263CAF90ECBE41A0C8FF541ED2E31F6_label_en-US" xlink:label="lab_us-gaap_MoneyMarketFundsAtCarryingValue_B263CAF90ECBE41A0C8FF541ED2E31F6" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Money Market Funds, at Carrying Value</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MoneyMarketFundsAtCarryingValue" xlink:label="loc_us-gaap_MoneyMarketFundsAtCarryingValue_B263CAF90ECBE41A0C8FF541ED2E31F6" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_MoneyMarketFundsAtCarryingValue_B263CAF90ECBE41A0C8FF541ED2E31F6" xlink:to="lab_us-gaap_MoneyMarketFundsAtCarryingValue_B263CAF90ECBE41A0C8FF541ED2E31F6" xlink:type="arc" />
    <link:label id="lab_us-gaap_DebtDisclosureAbstract_35C72B4D35323886BA94F541ED0ADBD2_label_en-US" xlink:label="lab_us-gaap_DebtDisclosureAbstract_35C72B4D35323886BA94F541ED0ADBD2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Debt Disclosure [Abstract]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DebtDisclosureAbstract" xlink:label="loc_us-gaap_DebtDisclosureAbstract_35C72B4D35323886BA94F541ED0ADBD2" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_DebtDisclosureAbstract_35C72B4D35323886BA94F541ED0ADBD2" xlink:to="lab_us-gaap_DebtDisclosureAbstract_35C72B4D35323886BA94F541ED0ADBD2" xlink:type="arc" />
    <link:label id="lab_us-gaap_DebtInstrumentTable_E3EBFD2E3662D315CE86F541ED0A2CFB_terseLabel_en-US" xlink:label="lab_us-gaap_DebtInstrumentTable_E3EBFD2E3662D315CE86F541ED0A2CFB" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Schedule of Long-term Debt Instruments [Table]</link:label>
    <link:label id="lab_us-gaap_DebtInstrumentTable_E3EBFD2E3662D315CE86F541ED0A2CFB_label_en-US" xlink:label="lab_us-gaap_DebtInstrumentTable_E3EBFD2E3662D315CE86F541ED0A2CFB" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Schedule of Long-term Debt Instruments [Table]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DebtInstrumentTable" xlink:label="loc_us-gaap_DebtInstrumentTable_E3EBFD2E3662D315CE86F541ED0A2CFB" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_DebtInstrumentTable_E3EBFD2E3662D315CE86F541ED0A2CFB" xlink:to="lab_us-gaap_DebtInstrumentTable_E3EBFD2E3662D315CE86F541ED0A2CFB" xlink:type="arc" />
    <link:label id="lab_us-gaap_DebtInstrumentLineItems_1F767833667823579DC4F541ED0B207C_terseLabel_en-US" xlink:label="lab_us-gaap_DebtInstrumentLineItems_1F767833667823579DC4F541ED0B207C" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Debt Instrument [Line Items]</link:label>
    <link:label id="lab_us-gaap_DebtInstrumentLineItems_1F767833667823579DC4F541ED0B207C_label_en-US" xlink:label="lab_us-gaap_DebtInstrumentLineItems_1F767833667823579DC4F541ED0B207C" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Debt Instrument [Line Items]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DebtInstrumentLineItems" xlink:label="loc_us-gaap_DebtInstrumentLineItems_1F767833667823579DC4F541ED0B207C" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_DebtInstrumentLineItems_1F767833667823579DC4F541ED0B207C" xlink:to="lab_us-gaap_DebtInstrumentLineItems_1F767833667823579DC4F541ED0B207C" xlink:type="arc" />
    <link:label id="lab_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNoncurrentLiabilitiesLongTermDebt_9192F33D69B37B2A68D7F541ED0B0592_terseLabel_en-US" xlink:label="lab_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNoncurrentLiabilitiesLongTermDebt_9192F33D69B37B2A68D7F541ED0B0592" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Long-term debt acquired</link:label>
    <link:label id="lab_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNoncurrentLiabilitiesLongTermDebt_9192F33D69B37B2A68D7F541ED0B0592_label_en-US" xlink:label="lab_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNoncurrentLiabilitiesLongTermDebt_9192F33D69B37B2A68D7F541ED0B0592" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Business Combination, Recognized Identifiable Assets Acquired and Liabilities Assumed, Noncurrent Liabilities, Long-term Debt</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNoncurrentLiabilitiesLongTermDebt" xlink:label="loc_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNoncurrentLiabilitiesLongTermDebt_9192F33D69B37B2A68D7F541ED0B0592" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNoncurrentLiabilitiesLongTermDebt_9192F33D69B37B2A68D7F541ED0B0592" xlink:to="lab_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNoncurrentLiabilitiesLongTermDebt_9192F33D69B37B2A68D7F541ED0B0592" xlink:type="arc" />
    <link:label id="lab_us-gaap_LongTermDebt_471D4AC31E38710C2D0DF541ED0B229B_terseLabel_en-US" xlink:label="lab_us-gaap_LongTermDebt_471D4AC31E38710C2D0DF541ED0B229B" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Long-term debt</link:label>
    <link:label id="lab_us-gaap_LongTermDebt_471D4AC31E38710C2D0DF541ED0B229B_label_en-US" xlink:label="lab_us-gaap_LongTermDebt_471D4AC31E38710C2D0DF541ED0B229B" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Long-term Debt</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LongTermDebt" xlink:label="loc_us-gaap_LongTermDebt_471D4AC31E38710C2D0DF541ED0B229B" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_LongTermDebt_471D4AC31E38710C2D0DF541ED0B229B" xlink:to="lab_us-gaap_LongTermDebt_471D4AC31E38710C2D0DF541ED0B229B" xlink:type="arc" />
    <link:label id="lab_us-gaap_DebtInstrumentInterestRateStatedPercentage_113E72FE1260AD2F3EC7F541ED0B0BAD_terseLabel_en-US" xlink:label="lab_us-gaap_DebtInstrumentInterestRateStatedPercentage_113E72FE1260AD2F3EC7F541ED0B0BAD" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Interest rate</link:label>
    <link:label id="lab_us-gaap_DebtInstrumentInterestRateStatedPercentage_113E72FE1260AD2F3EC7F541ED0B0BAD_label_en-US" xlink:label="lab_us-gaap_DebtInstrumentInterestRateStatedPercentage_113E72FE1260AD2F3EC7F541ED0B0BAD" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Debt Instrument, Interest Rate, Stated Percentage</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DebtInstrumentInterestRateStatedPercentage" xlink:label="loc_us-gaap_DebtInstrumentInterestRateStatedPercentage_113E72FE1260AD2F3EC7F541ED0B0BAD" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_DebtInstrumentInterestRateStatedPercentage_113E72FE1260AD2F3EC7F541ED0B0BAD" xlink:to="lab_us-gaap_DebtInstrumentInterestRateStatedPercentage_113E72FE1260AD2F3EC7F541ED0B0BAD" xlink:type="arc" />
    <link:label id="lab_us-gaap_DeferredRevenueByArrangementDisclosureTextBlock_B83B43A3EC4A3B932D7FF541EE437E68_terseLabel_en-US" xlink:label="lab_us-gaap_DeferredRevenueByArrangementDisclosureTextBlock_B83B43A3EC4A3B932D7FF541EE437E68" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Deferred Revenue, by Arrangement, Disclosure</link:label>
    <link:label id="lab_us-gaap_DeferredRevenueByArrangementDisclosureTextBlock_B83B43A3EC4A3B932D7FF541EE437E68_label_en-US" xlink:label="lab_us-gaap_DeferredRevenueByArrangementDisclosureTextBlock_B83B43A3EC4A3B932D7FF541EE437E68" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Deferred Revenue, by Arrangement, Disclosure [Table Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DeferredRevenueByArrangementDisclosureTextBlock" xlink:label="loc_us-gaap_DeferredRevenueByArrangementDisclosureTextBlock_B83B43A3EC4A3B932D7FF541EE437E68" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_DeferredRevenueByArrangementDisclosureTextBlock_B83B43A3EC4A3B932D7FF541EE437E68" xlink:to="lab_us-gaap_DeferredRevenueByArrangementDisclosureTextBlock_B83B43A3EC4A3B932D7FF541EE437E68" xlink:type="arc" />
    <link:label id="lab_us-gaap_ScheduleOfInventoryCurrentTableTextBlock_109409F1F0EE5F794AB3F541EE438F93_terseLabel_en-US" xlink:label="lab_us-gaap_ScheduleOfInventoryCurrentTableTextBlock_109409F1F0EE5F794AB3F541EE438F93" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Schedule of Inventory, Current</link:label>
    <link:label id="lab_us-gaap_ScheduleOfInventoryCurrentTableTextBlock_109409F1F0EE5F794AB3F541EE438F93_label_en-US" xlink:label="lab_us-gaap_ScheduleOfInventoryCurrentTableTextBlock_109409F1F0EE5F794AB3F541EE438F93" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Schedule of Inventory, Current [Table Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfInventoryCurrentTableTextBlock" xlink:label="loc_us-gaap_ScheduleOfInventoryCurrentTableTextBlock_109409F1F0EE5F794AB3F541EE438F93" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ScheduleOfInventoryCurrentTableTextBlock_109409F1F0EE5F794AB3F541EE438F93" xlink:to="lab_us-gaap_ScheduleOfInventoryCurrentTableTextBlock_109409F1F0EE5F794AB3F541EE438F93" xlink:type="arc" />
    <link:label id="lab_us-gaap_PropertyPlantAndEquipmentTextBlock_F8B360D90C9DA30B0BB7F541EE43862D_terseLabel_en-US" xlink:label="lab_us-gaap_PropertyPlantAndEquipmentTextBlock_F8B360D90C9DA30B0BB7F541EE43862D" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Property, Plant and Equipment</link:label>
    <link:label id="lab_us-gaap_PropertyPlantAndEquipmentTextBlock_F8B360D90C9DA30B0BB7F541EE43862D_label_en-US" xlink:label="lab_us-gaap_PropertyPlantAndEquipmentTextBlock_F8B360D90C9DA30B0BB7F541EE43862D" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Property, Plant and Equipment [Table Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PropertyPlantAndEquipmentTextBlock" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentTextBlock_F8B360D90C9DA30B0BB7F541EE43862D" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentTextBlock_F8B360D90C9DA30B0BB7F541EE43862D" xlink:to="lab_us-gaap_PropertyPlantAndEquipmentTextBlock_F8B360D90C9DA30B0BB7F541EE43862D" xlink:type="arc" />
    <link:label id="lab_us-gaap_ScheduleOfGoodwillTextBlock_5DB7C087A52F193E4830F541EE43E9AD_terseLabel_en-US" xlink:label="lab_us-gaap_ScheduleOfGoodwillTextBlock_5DB7C087A52F193E4830F541EE43E9AD" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Schedule of Goodwill</link:label>
    <link:label id="lab_us-gaap_ScheduleOfGoodwillTextBlock_5DB7C087A52F193E4830F541EE43E9AD_label_en-US" xlink:label="lab_us-gaap_ScheduleOfGoodwillTextBlock_5DB7C087A52F193E4830F541EE43E9AD" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Schedule of Goodwill [Table Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfGoodwillTextBlock" xlink:label="loc_us-gaap_ScheduleOfGoodwillTextBlock_5DB7C087A52F193E4830F541EE43E9AD" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ScheduleOfGoodwillTextBlock_5DB7C087A52F193E4830F541EE43E9AD" xlink:to="lab_us-gaap_ScheduleOfGoodwillTextBlock_5DB7C087A52F193E4830F541EE43E9AD" xlink:type="arc" />
    <link:label id="lab_us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTableTextBlock_58D5239C86D8152910A1F541EE4453D3_terseLabel_en-US" xlink:label="lab_us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTableTextBlock_58D5239C86D8152910A1F541EE4453D3" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Schedule of Finite-Lived Intangible Assets</link:label>
    <link:label id="lab_us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTableTextBlock_58D5239C86D8152910A1F541EE4453D3_label_en-US" xlink:label="lab_us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTableTextBlock_58D5239C86D8152910A1F541EE4453D3" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Schedule of Finite-Lived Intangible Assets [Table Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTableTextBlock" xlink:label="loc_us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTableTextBlock_58D5239C86D8152910A1F541EE4453D3" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTableTextBlock_58D5239C86D8152910A1F541EE4453D3" xlink:to="lab_us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTableTextBlock_58D5239C86D8152910A1F541EE4453D3" xlink:type="arc" />
    <link:label id="lab_us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock_D7673DBD2B1C904EB371F541EE44CF42_terseLabel_en-US" xlink:label="lab_us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock_D7673DBD2B1C904EB371F541EE44CF42" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Schedule of Product Warranty Liability</link:label>
    <link:label id="lab_us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock_D7673DBD2B1C904EB371F541EE44CF42_label_en-US" xlink:label="lab_us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock_D7673DBD2B1C904EB371F541EE44CF42" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Schedule of Product Warranty Liability [Table Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock" xlink:label="loc_us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock_D7673DBD2B1C904EB371F541EE44CF42" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock_D7673DBD2B1C904EB371F541EE44CF42" xlink:to="lab_us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock_D7673DBD2B1C904EB371F541EE44CF42" xlink:type="arc" />
    <link:label id="lab_us-gaap_ScheduleOfCompensationCostForShareBasedPaymentArrangementsAllocationOfShareBasedCompensationCostsByPlanTableTextBlock_16F4BD4A49409131E2B9F541EE4473C8_terseLabel_en-US" xlink:label="lab_us-gaap_ScheduleOfCompensationCostForShareBasedPaymentArrangementsAllocationOfShareBasedCompensationCostsByPlanTableTextBlock_16F4BD4A49409131E2B9F541EE4473C8" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Effects of share-based compensation expense</link:label>
    <link:label id="lab_us-gaap_ScheduleOfCompensationCostForShareBasedPaymentArrangementsAllocationOfShareBasedCompensationCostsByPlanTableTextBlock_16F4BD4A49409131E2B9F541EE4473C8_label_en-US" xlink:label="lab_us-gaap_ScheduleOfCompensationCostForShareBasedPaymentArrangementsAllocationOfShareBasedCompensationCostsByPlanTableTextBlock_16F4BD4A49409131E2B9F541EE4473C8" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Schedule of Compensation Cost for Share-based Payment Arrangements, Allocation of Share-based Compensation Costs by Plan [Table Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfCompensationCostForShareBasedPaymentArrangementsAllocationOfShareBasedCompensationCostsByPlanTableTextBlock" xlink:label="loc_us-gaap_ScheduleOfCompensationCostForShareBasedPaymentArrangementsAllocationOfShareBasedCompensationCostsByPlanTableTextBlock_16F4BD4A49409131E2B9F541EE4473C8" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ScheduleOfCompensationCostForShareBasedPaymentArrangementsAllocationOfShareBasedCompensationCostsByPlanTableTextBlock_16F4BD4A49409131E2B9F541EE4473C8" xlink:to="lab_us-gaap_ScheduleOfCompensationCostForShareBasedPaymentArrangementsAllocationOfShareBasedCompensationCostsByPlanTableTextBlock_16F4BD4A49409131E2B9F541EE4473C8" xlink:type="arc" />
    <link:label id="lab_us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock_9DB9C47AB4DCD231637AF541EE44CB12_terseLabel_en-US" xlink:label="lab_us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock_9DB9C47AB4DCD231637AF541EE44CB12" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Schedule of Share-based Compensation, Stock Options, Activity</link:label>
    <link:label id="lab_us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock_9DB9C47AB4DCD231637AF541EE44CB12_label_en-US" xlink:label="lab_us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock_9DB9C47AB4DCD231637AF541EE44CB12" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Schedule of Share-based Compensation, Stock Options, Activity [Table Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock" xlink:label="loc_us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock_9DB9C47AB4DCD231637AF541EE44CB12" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock_9DB9C47AB4DCD231637AF541EE44CB12" xlink:to="lab_us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock_9DB9C47AB4DCD231637AF541EE44CB12" xlink:type="arc" />
    <link:label id="lab_us-gaap_ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock_67F4F89DA978752CF5F0F541EE44A122_terseLabel_en-US" xlink:label="lab_us-gaap_ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock_67F4F89DA978752CF5F0F541EE44A122" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Schedule of Share-based Payment Award, Stock Options, Valuation Assumptions</link:label>
    <link:label id="lab_us-gaap_ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock_67F4F89DA978752CF5F0F541EE44A122_label_en-US" xlink:label="lab_us-gaap_ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock_67F4F89DA978752CF5F0F541EE44A122" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Schedule of Share-based Payment Award, Stock Options, Valuation Assumptions [Table Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock" xlink:label="loc_us-gaap_ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock_67F4F89DA978752CF5F0F541EE44A122" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock_67F4F89DA978752CF5F0F541EE44A122" xlink:to="lab_us-gaap_ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock_67F4F89DA978752CF5F0F541EE44A122" xlink:type="arc" />
    <link:label id="lab_us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock_B6CE92120976BD42746BF541EE4974B0_terseLabel_en-US" xlink:label="lab_us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock_B6CE92120976BD42746BF541EE4974B0" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Schedule of Share-based Compensation, Restricted Stock Activity</link:label>
    <link:label id="lab_us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock_B6CE92120976BD42746BF541EE4974B0_label_en-US" xlink:label="lab_us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock_B6CE92120976BD42746BF541EE4974B0" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Schedule of Share-based Compensation, Restricted Stock and Restricted Stock Units Activity [Table Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock" xlink:label="loc_us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock_B6CE92120976BD42746BF541EE4974B0" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock_B6CE92120976BD42746BF541EE4974B0" xlink:to="lab_us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock_B6CE92120976BD42746BF541EE4974B0" xlink:type="arc" />
    <link:label id="lab_asys_ResearchAndDevelopmentExpenseTableTextBlock_D4C35A725C8013ABD1A8F541EE49F63D_terseLabel_en-US" xlink:label="lab_asys_ResearchAndDevelopmentExpenseTableTextBlock_D4C35A725C8013ABD1A8F541EE49F63D" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Research and Development Expense</link:label>
    <link:label id="lab_asys_ResearchAndDevelopmentExpenseTableTextBlock_D4C35A725C8013ABD1A8F541EE49F63D_label_en-US" xlink:label="lab_asys_ResearchAndDevelopmentExpenseTableTextBlock_D4C35A725C8013ABD1A8F541EE49F63D" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Research and Development Expense [Table Text Block]</link:label>
    <link:label id="lab_asys_ResearchAndDevelopmentExpenseTableTextBlock_D4C35A725C8013ABD1A8F541EE49F63D_documentation_en-US" xlink:label="lab_asys_ResearchAndDevelopmentExpenseTableTextBlock_D4C35A725C8013ABD1A8F541EE49F63D" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Research and Development Expense [Table Text Block]</link:label>
    <link:loc xlink:href="asys-20150630.xsd#asys_ResearchAndDevelopmentExpenseTableTextBlock" xlink:label="loc_asys_ResearchAndDevelopmentExpenseTableTextBlock_D4C35A725C8013ABD1A8F541EE49F63D" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_ResearchAndDevelopmentExpenseTableTextBlock_D4C35A725C8013ABD1A8F541EE49F63D" xlink:to="lab_asys_ResearchAndDevelopmentExpenseTableTextBlock_D4C35A725C8013ABD1A8F541EE49F63D" xlink:type="arc" />
    <link:label id="lab_us-gaap_IncomeStatementAbstract_54A883B70CF073825AB5FB79B168DC43_label_en-US" xlink:label="lab_us-gaap_IncomeStatementAbstract_54A883B70CF073825AB5FB79B168DC43" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Income Statement [Abstract]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncomeStatementAbstract" xlink:label="loc_us-gaap_IncomeStatementAbstract_54A883B70CF073825AB5FB79B168DC43" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_IncomeStatementAbstract_54A883B70CF073825AB5FB79B168DC43" xlink:to="lab_us-gaap_IncomeStatementAbstract_54A883B70CF073825AB5FB79B168DC43" xlink:type="arc" />
    <link:label id="lab_us-gaap_SalesRevenueNet_9C879756BB924F879515FB79B1683DDC_terseLabel_en-US" xlink:label="lab_us-gaap_SalesRevenueNet_9C879756BB924F879515FB79B1683DDC" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Revenues, net of returns and allowances</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SalesRevenueNet" xlink:label="loc_us-gaap_SalesRevenueNet_9C879756BB924F879515FB79B1683DDC" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_SalesRevenueNet_9C879756BB924F879515FB79B1683DDC" xlink:to="lab_us-gaap_SalesRevenueNet_9C879756BB924F879515FB79B1683DDC" xlink:type="arc" />
    <link:label id="lab_us-gaap_CostOfGoodsAndServicesSold_AD0F34DDB33E9F0EFB78FB79B168EC7B_terseLabel_en-US" xlink:label="lab_us-gaap_CostOfGoodsAndServicesSold_AD0F34DDB33E9F0EFB78FB79B168EC7B" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Cost of sales</link:label>
    <link:label id="lab_us-gaap_CostOfGoodsAndServicesSold_AD0F34DDB33E9F0EFB78FB79B168EC7B_label_en-US" xlink:label="lab_us-gaap_CostOfGoodsAndServicesSold_AD0F34DDB33E9F0EFB78FB79B168EC7B" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Cost of Goods and Services Sold</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CostOfGoodsAndServicesSold" xlink:label="loc_us-gaap_CostOfGoodsAndServicesSold_AD0F34DDB33E9F0EFB78FB79B168EC7B" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_CostOfGoodsAndServicesSold_AD0F34DDB33E9F0EFB78FB79B168EC7B" xlink:to="lab_us-gaap_CostOfGoodsAndServicesSold_AD0F34DDB33E9F0EFB78FB79B168EC7B" xlink:type="arc" />
    <link:label id="lab_us-gaap_GrossProfit_2E37988EFCDF5FACF662FB79B168D1E5_totalLabel_en-US" xlink:label="lab_us-gaap_GrossProfit_2E37988EFCDF5FACF662FB79B168D1E5" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:type="resource" xml:lang="en-US">Gross profit</link:label>
    <link:label id="lab_us-gaap_GrossProfit_2E37988EFCDF5FACF662FB79B168D1E5_label_en-US" xlink:label="lab_us-gaap_GrossProfit_2E37988EFCDF5FACF662FB79B168D1E5" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Gross Profit</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GrossProfit" xlink:label="loc_us-gaap_GrossProfit_2E37988EFCDF5FACF662FB79B168D1E5" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_GrossProfit_2E37988EFCDF5FACF662FB79B168D1E5" xlink:to="lab_us-gaap_GrossProfit_2E37988EFCDF5FACF662FB79B168D1E5" xlink:type="arc" />
    <link:label id="lab_us-gaap_SellingGeneralAndAdministrativeExpense_3BAE72EAE647368660D6FB79B1688FA3_terseLabel_en-US" xlink:label="lab_us-gaap_SellingGeneralAndAdministrativeExpense_3BAE72EAE647368660D6FB79B1688FA3" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Selling, general and administrative</link:label>
    <link:label id="lab_us-gaap_SellingGeneralAndAdministrativeExpense_3BAE72EAE647368660D6FB79B1688FA3_label_en-US" xlink:label="lab_us-gaap_SellingGeneralAndAdministrativeExpense_3BAE72EAE647368660D6FB79B1688FA3" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Selling, General and Administrative Expense</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SellingGeneralAndAdministrativeExpense" xlink:label="loc_us-gaap_SellingGeneralAndAdministrativeExpense_3BAE72EAE647368660D6FB79B1688FA3" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_SellingGeneralAndAdministrativeExpense_3BAE72EAE647368660D6FB79B1688FA3" xlink:to="lab_us-gaap_SellingGeneralAndAdministrativeExpense_3BAE72EAE647368660D6FB79B1688FA3" xlink:type="arc" />
    <link:label id="lab_asys_ResearchAndDevelopmentNetOfGrantsEarned_4C60663569B9050A8BE5FB79B1689B15_terseLabel_en-US" xlink:label="lab_asys_ResearchAndDevelopmentNetOfGrantsEarned_4C60663569B9050A8BE5FB79B1689B15" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Research, development and engineering</link:label>
    <link:label id="lab_asys_ResearchAndDevelopmentNetOfGrantsEarned_4C60663569B9050A8BE5FB79B1689B15_label_en-US" xlink:label="lab_asys_ResearchAndDevelopmentNetOfGrantsEarned_4C60663569B9050A8BE5FB79B1689B15" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Research And Development, Net Of Grants Earned</link:label>
    <link:label id="lab_asys_ResearchAndDevelopmentNetOfGrantsEarned_4C60663569B9050A8BE5FB79B1689B15_documentation_en-US" xlink:label="lab_asys_ResearchAndDevelopmentNetOfGrantsEarned_4C60663569B9050A8BE5FB79B1689B15" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Research And Development, Net Of Grants</link:label>
    <link:loc xlink:href="asys-20150630.xsd#asys_ResearchAndDevelopmentNetOfGrantsEarned" xlink:label="loc_asys_ResearchAndDevelopmentNetOfGrantsEarned_4C60663569B9050A8BE5FB79B1689B15" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_ResearchAndDevelopmentNetOfGrantsEarned_4C60663569B9050A8BE5FB79B1689B15" xlink:to="lab_asys_ResearchAndDevelopmentNetOfGrantsEarned_4C60663569B9050A8BE5FB79B1689B15" xlink:type="arc" />
    <link:label id="lab_us-gaap_OperatingIncomeLoss_D1907055E231F43C28C5FB79B16853DB_totalLabel_en-US" xlink:label="lab_us-gaap_OperatingIncomeLoss_D1907055E231F43C28C5FB79B16853DB" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:type="resource" xml:lang="en-US">Operating loss</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OperatingIncomeLoss" xlink:label="loc_us-gaap_OperatingIncomeLoss_D1907055E231F43C28C5FB79B16853DB" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_OperatingIncomeLoss_D1907055E231F43C28C5FB79B16853DB" xlink:to="lab_us-gaap_OperatingIncomeLoss_D1907055E231F43C28C5FB79B16853DB" xlink:type="arc" />
    <link:label id="lab_us-gaap_OtherNonoperatingIncomeExpense_FDC31B91043D533041D8FB79B16806D4_terseLabel_en-US" xlink:label="lab_us-gaap_OtherNonoperatingIncomeExpense_FDC31B91043D533041D8FB79B16806D4" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Interest expense and other income, net</link:label>
    <link:label id="lab_us-gaap_OtherNonoperatingIncomeExpense_FDC31B91043D533041D8FB79B16806D4_label_en-US" xlink:label="lab_us-gaap_OtherNonoperatingIncomeExpense_FDC31B91043D533041D8FB79B16806D4" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Other Nonoperating Income (Expense)</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherNonoperatingIncomeExpense" xlink:label="loc_us-gaap_OtherNonoperatingIncomeExpense_FDC31B91043D533041D8FB79B16806D4" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_OtherNonoperatingIncomeExpense_FDC31B91043D533041D8FB79B16806D4" xlink:to="lab_us-gaap_OtherNonoperatingIncomeExpense_FDC31B91043D533041D8FB79B16806D4" xlink:type="arc" />
    <link:label id="lab_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments_CB841CDD60A8953500FBFB79B168431E_totalLabel_en-US" xlink:label="lab_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments_CB841CDD60A8953500FBFB79B168431E" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:type="resource" xml:lang="en-US">Loss before income taxes</link:label>
    <link:label id="lab_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments_CB841CDD60A8953500FBFB79B168431E_label_en-US" xlink:label="lab_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments_CB841CDD60A8953500FBFB79B168431E" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Income (Loss) from Continuing Operations before Equity Method Investments, Income Taxes, Extraordinary Items, Noncontrolling Interest</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments" xlink:label="loc_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments_CB841CDD60A8953500FBFB79B168431E" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments_CB841CDD60A8953500FBFB79B168431E" xlink:to="lab_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments_CB841CDD60A8953500FBFB79B168431E" xlink:type="arc" />
    <link:label id="lab_us-gaap_IncomeTaxExpenseBenefit_8E85FA0B6B2DF3AB9458FB79B16821A4_terseLabel_en-US" xlink:label="lab_us-gaap_IncomeTaxExpenseBenefit_8E85FA0B6B2DF3AB9458FB79B16821A4" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Income tax provision</link:label>
    <link:label id="lab_us-gaap_IncomeTaxExpenseBenefit_8E85FA0B6B2DF3AB9458FB79B16821A4_label_en-US" xlink:label="lab_us-gaap_IncomeTaxExpenseBenefit_8E85FA0B6B2DF3AB9458FB79B16821A4" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Income Tax Expense (Benefit)</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncomeTaxExpenseBenefit" xlink:label="loc_us-gaap_IncomeTaxExpenseBenefit_8E85FA0B6B2DF3AB9458FB79B16821A4" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_IncomeTaxExpenseBenefit_8E85FA0B6B2DF3AB9458FB79B16821A4" xlink:to="lab_us-gaap_IncomeTaxExpenseBenefit_8E85FA0B6B2DF3AB9458FB79B16821A4" xlink:type="arc" />
    <link:label id="lab_us-gaap_ProfitLoss_37BFF604C8A3249FBED9FB79B168348C_totalLabel_en-US" xlink:label="lab_us-gaap_ProfitLoss_37BFF604C8A3249FBED9FB79B168348C" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:type="resource" xml:lang="en-US">Net loss</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProfitLoss" xlink:label="loc_us-gaap_ProfitLoss_37BFF604C8A3249FBED9FB79B168348C" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ProfitLoss_37BFF604C8A3249FBED9FB79B168348C" xlink:to="lab_us-gaap_ProfitLoss_37BFF604C8A3249FBED9FB79B168348C" xlink:type="arc" />
    <link:label id="lab_us-gaap_NetIncomeLossAttributableToNoncontrollingInterest_2969C29993C0A7F5FDCAFB79B168E1F2_negatedTerseLabel_en-US" xlink:label="lab_us-gaap_NetIncomeLossAttributableToNoncontrollingInterest_2969C29993C0A7F5FDCAFB79B168E1F2" xlink:role="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:type="resource" xml:lang="en-US">Add: net loss (income) attributable to noncontrolling interest</link:label>
    <link:label id="lab_us-gaap_NetIncomeLossAttributableToNoncontrollingInterest_2969C29993C0A7F5FDCAFB79B168E1F2_label_en-US" xlink:label="lab_us-gaap_NetIncomeLossAttributableToNoncontrollingInterest_2969C29993C0A7F5FDCAFB79B168E1F2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Net Income (Loss) Attributable to Noncontrolling Interest</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NetIncomeLossAttributableToNoncontrollingInterest" xlink:label="loc_us-gaap_NetIncomeLossAttributableToNoncontrollingInterest_2969C29993C0A7F5FDCAFB79B168E1F2" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_NetIncomeLossAttributableToNoncontrollingInterest_2969C29993C0A7F5FDCAFB79B168E1F2" xlink:to="lab_us-gaap_NetIncomeLossAttributableToNoncontrollingInterest_2969C29993C0A7F5FDCAFB79B168E1F2" xlink:type="arc" />
    <link:label id="lab_us-gaap_NetIncomeLoss_9360F27692C2A9D529ADFB79B168A19C_totalLabel_en-US" xlink:label="lab_us-gaap_NetIncomeLoss_9360F27692C2A9D529ADFB79B168A19C" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:type="resource" xml:lang="en-US">Net loss attributable to Amtech Systems, Inc.</link:label>
    <link:label id="lab_us-gaap_NetIncomeLoss_9360F27692C2A9D529ADFB79B168A19C_label_en-US" xlink:label="lab_us-gaap_NetIncomeLoss_9360F27692C2A9D529ADFB79B168A19C" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Net Income (Loss) Attributable to Parent</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NetIncomeLoss" xlink:label="loc_us-gaap_NetIncomeLoss_9360F27692C2A9D529ADFB79B168A19C" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_NetIncomeLoss_9360F27692C2A9D529ADFB79B168A19C" xlink:to="lab_us-gaap_NetIncomeLoss_9360F27692C2A9D529ADFB79B168A19C" xlink:type="arc" />
    <link:label id="lab_us-gaap_EarningsPerShareAbstract_9F03F490329FA6DB74A5FB79B1698B50_terseLabel_en-US" xlink:label="lab_us-gaap_EarningsPerShareAbstract_9F03F490329FA6DB74A5FB79B1698B50" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Loss Per Share:</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EarningsPerShareAbstract" xlink:label="loc_us-gaap_EarningsPerShareAbstract_9F03F490329FA6DB74A5FB79B1698B50" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_EarningsPerShareAbstract_9F03F490329FA6DB74A5FB79B1698B50" xlink:to="lab_us-gaap_EarningsPerShareAbstract_9F03F490329FA6DB74A5FB79B1698B50" xlink:type="arc" />
    <link:label id="lab_us-gaap_EarningsPerShareBasic_DFB25506FEC44BDE61FCFB79B169B4F5_verboseLabel_en-US" xlink:label="lab_us-gaap_EarningsPerShareBasic_DFB25506FEC44BDE61FCFB79B169B4F5" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:type="resource" xml:lang="en-US">Basic loss per share attributable to Amtech shareholders (dollars per share)</link:label>
    <link:label id="lab_us-gaap_EarningsPerShareBasic_DFB25506FEC44BDE61FCFB79B169B4F5_label_en-US" xlink:label="lab_us-gaap_EarningsPerShareBasic_DFB25506FEC44BDE61FCFB79B169B4F5" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Earnings Per Share, Basic</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EarningsPerShareBasic" xlink:label="loc_us-gaap_EarningsPerShareBasic_DFB25506FEC44BDE61FCFB79B169B4F5" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_EarningsPerShareBasic_DFB25506FEC44BDE61FCFB79B169B4F5" xlink:to="lab_us-gaap_EarningsPerShareBasic_DFB25506FEC44BDE61FCFB79B169B4F5" xlink:type="arc" />
    <link:label id="lab_us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_97BB72E2D6F14FF26E49FB79B169DB15_terseLabel_en-US" xlink:label="lab_us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_97BB72E2D6F14FF26E49FB79B169DB15" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Weighted average shares outstanding (in shares)</link:label>
    <link:label id="lab_us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_97BB72E2D6F14FF26E49FB79B169DB15_label_en-US" xlink:label="lab_us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_97BB72E2D6F14FF26E49FB79B169DB15" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Weighted Average Number of Shares Outstanding, Basic</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_WeightedAverageNumberOfSharesOutstandingBasic" xlink:label="loc_us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_97BB72E2D6F14FF26E49FB79B169DB15" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_97BB72E2D6F14FF26E49FB79B169DB15" xlink:to="lab_us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_97BB72E2D6F14FF26E49FB79B169DB15" xlink:type="arc" />
    <link:label id="lab_us-gaap_EarningsPerShareDiluted_5271CE6601FD2BB1B3FDFB79B169A4EF_verboseLabel_en-US" xlink:label="lab_us-gaap_EarningsPerShareDiluted_5271CE6601FD2BB1B3FDFB79B169A4EF" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:type="resource" xml:lang="en-US">Diluted loss per share attributable to Amtech shareholders (dollars per share)</link:label>
    <link:label id="lab_us-gaap_EarningsPerShareDiluted_5271CE6601FD2BB1B3FDFB79B169A4EF_label_en-US" xlink:label="lab_us-gaap_EarningsPerShareDiluted_5271CE6601FD2BB1B3FDFB79B169A4EF" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Earnings Per Share, Diluted</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EarningsPerShareDiluted" xlink:label="loc_us-gaap_EarningsPerShareDiluted_5271CE6601FD2BB1B3FDFB79B169A4EF" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_EarningsPerShareDiluted_5271CE6601FD2BB1B3FDFB79B169A4EF" xlink:to="lab_us-gaap_EarningsPerShareDiluted_5271CE6601FD2BB1B3FDFB79B169A4EF" xlink:type="arc" />
    <link:label id="lab_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_87A08EA067CF789AE66CFB79B1697FBB_terseLabel_en-US" xlink:label="lab_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_87A08EA067CF789AE66CFB79B1697FBB" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Weighted average shares outstanding (in shares)</link:label>
    <link:label id="lab_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_87A08EA067CF789AE66CFB79B1697FBB_label_en-US" xlink:label="lab_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_87A08EA067CF789AE66CFB79B1697FBB" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Weighted Average Number of Shares Outstanding, Diluted</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding" xlink:label="loc_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_87A08EA067CF789AE66CFB79B1697FBB" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_87A08EA067CF789AE66CFB79B1697FBB" xlink:to="lab_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_87A08EA067CF789AE66CFB79B1697FBB" xlink:type="arc" />
    <link:label id="lab_us-gaap_ConcentrationRiskDisclosureTextBlock_6A21FC22888C8E29787DF541ED30871B_terseLabel_en-US" xlink:label="lab_us-gaap_ConcentrationRiskDisclosureTextBlock_6A21FC22888C8E29787DF541ED30871B" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Major Customers And Foreign Sales</link:label>
    <link:label id="lab_us-gaap_ConcentrationRiskDisclosureTextBlock_6A21FC22888C8E29787DF541ED30871B_label_en-US" xlink:label="lab_us-gaap_ConcentrationRiskDisclosureTextBlock_6A21FC22888C8E29787DF541ED30871B" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Concentration Risk Disclosure [Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskDisclosureTextBlock" xlink:label="loc_us-gaap_ConcentrationRiskDisclosureTextBlock_6A21FC22888C8E29787DF541ED30871B" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ConcentrationRiskDisclosureTextBlock_6A21FC22888C8E29787DF541ED30871B" xlink:to="lab_us-gaap_ConcentrationRiskDisclosureTextBlock_6A21FC22888C8E29787DF541ED30871B" xlink:type="arc" />
    <link:label id="lab_us-gaap_LongTermDebtTextBlock_2DD6846ECE977855B9DFF541EE73B865_terseLabel_en-US" xlink:label="lab_us-gaap_LongTermDebtTextBlock_2DD6846ECE977855B9DFF541EE73B865" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Long-term Debt</link:label>
    <link:label id="lab_us-gaap_LongTermDebtTextBlock_2DD6846ECE977855B9DFF541EE73B865_label_en-US" xlink:label="lab_us-gaap_LongTermDebtTextBlock_2DD6846ECE977855B9DFF541EE73B865" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Long-term Debt [Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LongTermDebtTextBlock" xlink:label="loc_us-gaap_LongTermDebtTextBlock_2DD6846ECE977855B9DFF541EE73B865" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_LongTermDebtTextBlock_2DD6846ECE977855B9DFF541EE73B865" xlink:to="lab_us-gaap_LongTermDebtTextBlock_2DD6846ECE977855B9DFF541EE73B865" xlink:type="arc" />
    <link:label id="lab_us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_38E35B005F8B0334FF5CF54BDEB1D5EA_terseLabel_en-US" xlink:label="lab_us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_38E35B005F8B0334FF5CF54BDEB1D5EA" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Schedule of Share-based Compensation Arrangements by Share-based Payment Award [Table]</link:label>
    <link:label id="lab_us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_38E35B005F8B0334FF5CF54BDEB1D5EA_label_en-US" xlink:label="lab_us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_38E35B005F8B0334FF5CF54BDEB1D5EA" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Schedule of Share-based Compensation Arrangements by Share-based Payment Award [Table]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:label="loc_us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_38E35B005F8B0334FF5CF54BDEB1D5EA" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_38E35B005F8B0334FF5CF54BDEB1D5EA" xlink:to="lab_us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_38E35B005F8B0334FF5CF54BDEB1D5EA" xlink:type="arc" />
    <link:label id="lab_us-gaap_AwardTypeAxis_368EB854FF72C2387EF1F54BDEB10459_terseLabel_en-US" xlink:label="lab_us-gaap_AwardTypeAxis_368EB854FF72C2387EF1F54BDEB10459" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Award Type [Axis]</link:label>
    <link:label id="lab_us-gaap_AwardTypeAxis_368EB854FF72C2387EF1F54BDEB10459_label_en-US" xlink:label="lab_us-gaap_AwardTypeAxis_368EB854FF72C2387EF1F54BDEB10459" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Award Type [Axis]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AwardTypeAxis" xlink:label="loc_us-gaap_AwardTypeAxis_368EB854FF72C2387EF1F54BDEB10459" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_AwardTypeAxis_368EB854FF72C2387EF1F54BDEB10459" xlink:to="lab_us-gaap_AwardTypeAxis_368EB854FF72C2387EF1F54BDEB10459" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_C88DD3D92D0A4013BCF3F54BDEB16775_terseLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_C88DD3D92D0A4013BCF3F54BDEB16775" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Award Type [Domain]</link:label>
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_C88DD3D92D0A4013BCF3F54BDEB16775_label_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_C88DD3D92D0A4013BCF3F54BDEB16775" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Equity Award [Domain]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_C88DD3D92D0A4013BCF3F54BDEB16775" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_C88DD3D92D0A4013BCF3F54BDEB16775" xlink:to="lab_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_C88DD3D92D0A4013BCF3F54BDEB16775" xlink:type="arc" />
    <link:label id="lab_us-gaap_RestrictedStockMember_7B8B59D14CA79B08C3C3F54BDEB14798_terseLabel_en-US" xlink:label="lab_us-gaap_RestrictedStockMember_7B8B59D14CA79B08C3C3F54BDEB14798" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Restricted Stock</link:label>
    <link:label id="lab_us-gaap_RestrictedStockMember_7B8B59D14CA79B08C3C3F54BDEB14798_label_en-US" xlink:label="lab_us-gaap_RestrictedStockMember_7B8B59D14CA79B08C3C3F54BDEB14798" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Restricted Stock [Member]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RestrictedStockMember" xlink:label="loc_us-gaap_RestrictedStockMember_7B8B59D14CA79B08C3C3F54BDEB14798" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_RestrictedStockMember_7B8B59D14CA79B08C3C3F54BDEB14798" xlink:to="lab_us-gaap_RestrictedStockMember_7B8B59D14CA79B08C3C3F54BDEB14798" xlink:type="arc" />
    <link:label id="lab_us-gaap_EmployeeStockOptionMember_653745BF728821EB994FF54BDEB17D38_terseLabel_en-US" xlink:label="lab_us-gaap_EmployeeStockOptionMember_653745BF728821EB994FF54BDEB17D38" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Stock Options</link:label>
    <link:label id="lab_us-gaap_EmployeeStockOptionMember_653745BF728821EB994FF54BDEB17D38_label_en-US" xlink:label="lab_us-gaap_EmployeeStockOptionMember_653745BF728821EB994FF54BDEB17D38" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Employee Stock Option [Member]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EmployeeStockOptionMember" xlink:label="loc_us-gaap_EmployeeStockOptionMember_653745BF728821EB994FF54BDEB17D38" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_EmployeeStockOptionMember_653745BF728821EB994FF54BDEB17D38" xlink:to="lab_us-gaap_EmployeeStockOptionMember_653745BF728821EB994FF54BDEB17D38" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_1E9F3B5F8240B1EF5DD2F54BDEB22251_terseLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_1E9F3B5F8240B1EF5DD2F54BDEB22251" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award [Line Items]</link:label>
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_1E9F3B5F8240B1EF5DD2F54BDEB22251_label_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_1E9F3B5F8240B1EF5DD2F54BDEB22251" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award [Line Items]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_1E9F3B5F8240B1EF5DD2F54BDEB22251" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_1E9F3B5F8240B1EF5DD2F54BDEB22251" xlink:to="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_1E9F3B5F8240B1EF5DD2F54BDEB22251" xlink:type="arc" />
    <link:label id="lab_us-gaap_AllocatedShareBasedCompensationExpense_C25AA9D66C27546D0D51F54BDEB27116_negatedTerseLabel_en-US" xlink:label="lab_us-gaap_AllocatedShareBasedCompensationExpense_C25AA9D66C27546D0D51F54BDEB27116" xlink:role="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:type="resource" xml:lang="en-US">Effect on income before income taxes</link:label>
    <link:label id="lab_us-gaap_AllocatedShareBasedCompensationExpense_C25AA9D66C27546D0D51F54BDEB27116_label_en-US" xlink:label="lab_us-gaap_AllocatedShareBasedCompensationExpense_C25AA9D66C27546D0D51F54BDEB27116" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Allocated Share-based Compensation Expense</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AllocatedShareBasedCompensationExpense" xlink:label="loc_us-gaap_AllocatedShareBasedCompensationExpense_C25AA9D66C27546D0D51F54BDEB27116" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_AllocatedShareBasedCompensationExpense_C25AA9D66C27546D0D51F54BDEB27116" xlink:to="lab_us-gaap_AllocatedShareBasedCompensationExpense_C25AA9D66C27546D0D51F54BDEB27116" xlink:type="arc" />
    <link:label id="lab_us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense_0AB2A7787DC800DDF078F54BDEB2DF77_terseLabel_en-US" xlink:label="lab_us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense_0AB2A7787DC800DDF078F54BDEB2DF77" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Effect on income taxes</link:label>
    <link:label id="lab_us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense_0AB2A7787DC800DDF078F54BDEB2DF77_label_en-US" xlink:label="lab_us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense_0AB2A7787DC800DDF078F54BDEB2DF77" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Employee Service Share-based Compensation, Tax Benefit from Compensation Expense</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense" xlink:label="loc_us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense_0AB2A7787DC800DDF078F54BDEB2DF77" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense_0AB2A7787DC800DDF078F54BDEB2DF77" xlink:to="lab_us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense_0AB2A7787DC800DDF078F54BDEB2DF77" xlink:type="arc" />
    <link:label id="lab_us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax_ED3FCCF1F246CDADEB5CF54BDEB2EDCE_negatedTotalLabel_en-US" xlink:label="lab_us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax_ED3FCCF1F246CDADEB5CF54BDEB2EDCE" xlink:role="http://www.xbrl.org/2009/role/negatedTotalLabel" xlink:type="resource" xml:lang="en-US">Effect on net income</link:label>
    <link:label id="lab_us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax_ED3FCCF1F246CDADEB5CF54BDEB2EDCE_label_en-US" xlink:label="lab_us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax_ED3FCCF1F246CDADEB5CF54BDEB2EDCE" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Allocated Share-based Compensation Expense, Net of Tax</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax" xlink:label="loc_us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax_ED3FCCF1F246CDADEB5CF54BDEB2EDCE" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax_ED3FCCF1F246CDADEB5CF54BDEB2EDCE" xlink:to="lab_us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax_ED3FCCF1F246CDADEB5CF54BDEB2EDCE" xlink:type="arc" />
    <link:label id="lab_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod_ED628BF041FA40DE08BBF54BDEB2F7B5_terseLabel_en-US" xlink:label="lab_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod_ED628BF041FA40DE08BBF54BDEB2F7B5" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Option expiration period (in years)</link:label>
    <link:label id="lab_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod_ED628BF041FA40DE08BBF54BDEB2F7B5_label_en-US" xlink:label="lab_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod_ED628BF041FA40DE08BBF54BDEB2F7B5" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award, Expiration Period</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod" xlink:label="loc_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod_ED628BF041FA40DE08BBF54BDEB2F7B5" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod_ED628BF041FA40DE08BBF54BDEB2F7B5" xlink:to="lab_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod_ED628BF041FA40DE08BBF54BDEB2F7B5" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1_CD10D1E266AC58AA2CAEF54BDEB21ACE_terseLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1_CD10D1E266AC58AA2CAEF54BDEB21ACE" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Option vesting period (in years)</link:label>
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1_CD10D1E266AC58AA2CAEF54BDEB21ACE_label_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1_CD10D1E266AC58AA2CAEF54BDEB21ACE" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award, Award Vesting Period</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1_CD10D1E266AC58AA2CAEF54BDEB21ACE" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1_CD10D1E266AC58AA2CAEF54BDEB21ACE" xlink:to="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1_CD10D1E266AC58AA2CAEF54BDEB21ACE" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_92D2CA83CC3306BB8736F54BDEB272EE_terseLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_92D2CA83CC3306BB8736F54BDEB272EE" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding [Roll Forward]</link:label>
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_92D2CA83CC3306BB8736F54BDEB272EE_label_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_92D2CA83CC3306BB8736F54BDEB272EE" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding [Roll Forward]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_92D2CA83CC3306BB8736F54BDEB272EE" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_92D2CA83CC3306BB8736F54BDEB272EE" xlink:to="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_92D2CA83CC3306BB8736F54BDEB272EE" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_81A58146A00054236AF9F54BDEB2061B_periodStartLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_81A58146A00054236AF9F54BDEB2061B" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel" xlink:type="resource" xml:lang="en-US">Outstanding at beginning of period (in shares)</link:label>
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_81A58146A00054236AF9F54BDEB2061B_label_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_81A58146A00054236AF9F54BDEB2061B" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Number</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_81A58146A00054236AF9F54BDEB2061B" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_81A58146A00054236AF9F54BDEB2061B" xlink:to="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_81A58146A00054236AF9F54BDEB2061B" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross_09C448E1AEA559DB1629F54BDEB3CEAA_terseLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross_09C448E1AEA559DB1629F54BDEB3CEAA" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Granted (in shares)</link:label>
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross_09C448E1AEA559DB1629F54BDEB3CEAA_label_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross_09C448E1AEA559DB1629F54BDEB3CEAA" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award, Options, Grants in Period, Gross</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross_09C448E1AEA559DB1629F54BDEB3CEAA" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross_09C448E1AEA559DB1629F54BDEB3CEAA" xlink:to="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross_09C448E1AEA559DB1629F54BDEB3CEAA" xlink:type="arc" />
    <link:label id="lab_asys_SharebasedCompensationArrangementbySharebasedPaymentAwardOptionsAssumedInMerger_0CD6CFB5D1B02CBA7D81F54BDEB34861_terseLabel_en-US" xlink:label="lab_asys_SharebasedCompensationArrangementbySharebasedPaymentAwardOptionsAssumedInMerger_0CD6CFB5D1B02CBA7D81F54BDEB34861" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Assumed - merger (in shares)</link:label>
    <link:label id="lab_asys_SharebasedCompensationArrangementbySharebasedPaymentAwardOptionsAssumedInMerger_0CD6CFB5D1B02CBA7D81F54BDEB34861_label_en-US" xlink:label="lab_asys_SharebasedCompensationArrangementbySharebasedPaymentAwardOptionsAssumedInMerger_0CD6CFB5D1B02CBA7D81F54BDEB34861" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award, Options, Assumed In Merger</link:label>
    <link:label id="lab_asys_SharebasedCompensationArrangementbySharebasedPaymentAwardOptionsAssumedInMerger_0CD6CFB5D1B02CBA7D81F54BDEB34861_documentation_en-US" xlink:label="lab_asys_SharebasedCompensationArrangementbySharebasedPaymentAwardOptionsAssumedInMerger_0CD6CFB5D1B02CBA7D81F54BDEB34861" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award, Options, Assumed In Merger</link:label>
    <link:loc xlink:href="asys-20150630.xsd#asys_SharebasedCompensationArrangementbySharebasedPaymentAwardOptionsAssumedInMerger" xlink:label="loc_asys_SharebasedCompensationArrangementbySharebasedPaymentAwardOptionsAssumedInMerger_0CD6CFB5D1B02CBA7D81F54BDEB34861" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_SharebasedCompensationArrangementbySharebasedPaymentAwardOptionsAssumedInMerger_0CD6CFB5D1B02CBA7D81F54BDEB34861" xlink:to="lab_asys_SharebasedCompensationArrangementbySharebasedPaymentAwardOptionsAssumedInMerger_0CD6CFB5D1B02CBA7D81F54BDEB34861" xlink:type="arc" />
    <link:label id="lab_us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised_BFFC0686E232A20F4C03F54BDEB315AD_negatedTerseLabel_en-US" xlink:label="lab_us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised_BFFC0686E232A20F4C03F54BDEB315AD" xlink:role="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:type="resource" xml:lang="en-US">Exercised (in shares)</link:label>
    <link:label id="lab_us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised_BFFC0686E232A20F4C03F54BDEB315AD_label_en-US" xlink:label="lab_us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised_BFFC0686E232A20F4C03F54BDEB315AD" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercises in Period</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised" xlink:label="loc_us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised_BFFC0686E232A20F4C03F54BDEB315AD" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised_BFFC0686E232A20F4C03F54BDEB315AD" xlink:to="lab_us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised_BFFC0686E232A20F4C03F54BDEB315AD" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresInPeriod_3C6A0BF4A35C8F4F7155F54BDEB37007_negatedTerseLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresInPeriod_3C6A0BF4A35C8F4F7155F54BDEB37007" xlink:role="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:type="resource" xml:lang="en-US">Forfeited (in shares)</link:label>
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresInPeriod_3C6A0BF4A35C8F4F7155F54BDEB37007_label_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresInPeriod_3C6A0BF4A35C8F4F7155F54BDEB37007" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award, Options, Forfeitures in Period</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresInPeriod" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresInPeriod_3C6A0BF4A35C8F4F7155F54BDEB37007" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresInPeriod_3C6A0BF4A35C8F4F7155F54BDEB37007" xlink:to="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresInPeriod_3C6A0BF4A35C8F4F7155F54BDEB37007" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_2C31844022DCFCCC0E35F54BDEB38C45_periodEndLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_2C31844022DCFCCC0E35F54BDEB38C45" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel" xlink:type="resource" xml:lang="en-US">Outstanding at end of period (in shares)</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_2C31844022DCFCCC0E35F54BDEB38C45" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_2C31844022DCFCCC0E35F54BDEB38C45" xlink:to="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_2C31844022DCFCCC0E35F54BDEB38C45" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber_403C3F1AF6530052D9BFF54BDEB34F7F_terseLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber_403C3F1AF6530052D9BFF54BDEB34F7F" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Exercisable at end of period (in shares)</link:label>
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber_403C3F1AF6530052D9BFF54BDEB34F7F_label_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber_403C3F1AF6530052D9BFF54BDEB34F7F" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercisable, Number</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber_403C3F1AF6530052D9BFF54BDEB34F7F" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber_403C3F1AF6530052D9BFF54BDEB34F7F" xlink:to="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber_403C3F1AF6530052D9BFF54BDEB34F7F" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageGrantDateFairValue_A4FD78F74B881F375DC3F54BDEB34167_terseLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageGrantDateFairValue_A4FD78F74B881F375DC3F54BDEB34167" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Weighted average fair value of options granted during the period (usd per share)</link:label>
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageGrantDateFairValue_A4FD78F74B881F375DC3F54BDEB34167_label_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageGrantDateFairValue_A4FD78F74B881F375DC3F54BDEB34167" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award, Options, Grants in Period, Weighted Average Grant Date Fair Value</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageGrantDateFairValue_A4FD78F74B881F375DC3F54BDEB34167" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageGrantDateFairValue_A4FD78F74B881F375DC3F54BDEB34167" xlink:to="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageGrantDateFairValue_A4FD78F74B881F375DC3F54BDEB34167" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward_BCF414D1BC20C71D8861F54BDEB3EFC8_terseLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward_BCF414D1BC20C71D8861F54BDEB3EFC8" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Weighted Average Exercise Price [Roll Forward]</link:label>
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward_BCF414D1BC20C71D8861F54BDEB3EFC8_label_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward_BCF414D1BC20C71D8861F54BDEB3EFC8" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Weighted Average Exercise Price [Abstract]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward_BCF414D1BC20C71D8861F54BDEB3EFC8" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward_BCF414D1BC20C71D8861F54BDEB3EFC8" xlink:to="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward_BCF414D1BC20C71D8861F54BDEB3EFC8" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice_0DA7DC4BFC2C851621C9F54BDEB3DA27_periodStartLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice_0DA7DC4BFC2C851621C9F54BDEB3DA27" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel" xlink:type="resource" xml:lang="en-US">Outstanding at beginning of period, Weighted Average Exercise Price (usd per share)</link:label>
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice_0DA7DC4BFC2C851621C9F54BDEB3DA27_label_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice_0DA7DC4BFC2C851621C9F54BDEB3DA27" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Weighted Average Exercise Price</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice_0DA7DC4BFC2C851621C9F54BDEB3DA27" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice_0DA7DC4BFC2C851621C9F54BDEB3DA27" xlink:to="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice_0DA7DC4BFC2C851621C9F54BDEB3DA27" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageExercisePrice_1C24B7C5EE2A3B39B04FF54BDEB49883_terseLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageExercisePrice_1C24B7C5EE2A3B39B04FF54BDEB49883" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Granted, Weighted Average Exercise Price (usd per share)</link:label>
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageExercisePrice_1C24B7C5EE2A3B39B04FF54BDEB49883_label_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageExercisePrice_1C24B7C5EE2A3B39B04FF54BDEB49883" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangements by Share-based Payment Award, Options, Grants in Period, Weighted Average Exercise Price</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageExercisePrice" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageExercisePrice_1C24B7C5EE2A3B39B04FF54BDEB49883" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageExercisePrice_1C24B7C5EE2A3B39B04FF54BDEB49883" xlink:to="lab_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageExercisePrice_1C24B7C5EE2A3B39B04FF54BDEB49883" xlink:type="arc" />
    <link:label id="lab_asys_SharebasedCompensationArrangementsbySharebasedPaymentAwardOptionsAssumedWeightedAverageExercisePrice_EED07C99997CAE50960EF54BDEB4C567_terseLabel_en-US" xlink:label="lab_asys_SharebasedCompensationArrangementsbySharebasedPaymentAwardOptionsAssumedWeightedAverageExercisePrice_EED07C99997CAE50960EF54BDEB4C567" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Assumed - Merger, Weighted Average Exercise Price (usd per share)</link:label>
    <link:label id="lab_asys_SharebasedCompensationArrangementsbySharebasedPaymentAwardOptionsAssumedWeightedAverageExercisePrice_EED07C99997CAE50960EF54BDEB4C567_label_en-US" xlink:label="lab_asys_SharebasedCompensationArrangementsbySharebasedPaymentAwardOptionsAssumedWeightedAverageExercisePrice_EED07C99997CAE50960EF54BDEB4C567" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangements by Share-based Payment Award, Options, Assumed, Weighted Average Exercise Price</link:label>
    <link:label id="lab_asys_SharebasedCompensationArrangementsbySharebasedPaymentAwardOptionsAssumedWeightedAverageExercisePrice_EED07C99997CAE50960EF54BDEB4C567_documentation_en-US" xlink:label="lab_asys_SharebasedCompensationArrangementsbySharebasedPaymentAwardOptionsAssumedWeightedAverageExercisePrice_EED07C99997CAE50960EF54BDEB4C567" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangements by Share-based Payment Award, Options, Assumed, Weighted Average Exercise Price</link:label>
    <link:loc xlink:href="asys-20150630.xsd#asys_SharebasedCompensationArrangementsbySharebasedPaymentAwardOptionsAssumedWeightedAverageExercisePrice" xlink:label="loc_asys_SharebasedCompensationArrangementsbySharebasedPaymentAwardOptionsAssumedWeightedAverageExercisePrice_EED07C99997CAE50960EF54BDEB4C567" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_SharebasedCompensationArrangementsbySharebasedPaymentAwardOptionsAssumedWeightedAverageExercisePrice_EED07C99997CAE50960EF54BDEB4C567" xlink:to="lab_asys_SharebasedCompensationArrangementsbySharebasedPaymentAwardOptionsAssumedWeightedAverageExercisePrice_EED07C99997CAE50960EF54BDEB4C567" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice_9D88F15D1C809A9132A7F54BDEB40C0A_terseLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice_9D88F15D1C809A9132A7F54BDEB40C0A" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Exercised, Weighted Average Exercise Price (usd per share)</link:label>
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice_9D88F15D1C809A9132A7F54BDEB40C0A_label_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice_9D88F15D1C809A9132A7F54BDEB40C0A" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangements by Share-based Payment Award, Options, Exercises in Period, Weighted Average Exercise Price</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice_9D88F15D1C809A9132A7F54BDEB40C0A" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice_9D88F15D1C809A9132A7F54BDEB40C0A" xlink:to="lab_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice_9D88F15D1C809A9132A7F54BDEB40C0A" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsForfeituresInPeriodWeightedAverageExercisePrice_6F82CC8C24874FD32486F54BDEB418CE_terseLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsForfeituresInPeriodWeightedAverageExercisePrice_6F82CC8C24874FD32486F54BDEB418CE" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Forfeited, Weighted Average Exercise Price (usd per share)</link:label>
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsForfeituresInPeriodWeightedAverageExercisePrice_6F82CC8C24874FD32486F54BDEB418CE_label_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsForfeituresInPeriodWeightedAverageExercisePrice_6F82CC8C24874FD32486F54BDEB418CE" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangements by Share-based Payment Award, Options, Forfeitures in Period, Weighted Average Exercise Price</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsForfeituresInPeriodWeightedAverageExercisePrice" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsForfeituresInPeriodWeightedAverageExercisePrice_6F82CC8C24874FD32486F54BDEB418CE" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsForfeituresInPeriodWeightedAverageExercisePrice_6F82CC8C24874FD32486F54BDEB418CE" xlink:to="lab_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsForfeituresInPeriodWeightedAverageExercisePrice_6F82CC8C24874FD32486F54BDEB418CE" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice_DF40E5A7FD528D41BE86F54BDEB49864_periodEndLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice_DF40E5A7FD528D41BE86F54BDEB49864" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel" xlink:type="resource" xml:lang="en-US">Outstanding at end of period, Weighted Average Exercise Price (usd per share)</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice_DF40E5A7FD528D41BE86F54BDEB49864" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice_DF40E5A7FD528D41BE86F54BDEB49864" xlink:to="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice_DF40E5A7FD528D41BE86F54BDEB49864" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice_1791B83CF7CFB0367C54F54BDEB404C6_terseLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice_1791B83CF7CFB0367C54F54BDEB404C6" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Exercisable at end of period, Weighted Average Exercise Price (usd per share)</link:label>
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice_1791B83CF7CFB0367C54F54BDEB404C6_label_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice_1791B83CF7CFB0367C54F54BDEB404C6" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercisable, Weighted Average Exercise Price</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice_1791B83CF7CFB0367C54F54BDEB404C6" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice_1791B83CF7CFB0367C54F54BDEB404C6" xlink:to="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice_1791B83CF7CFB0367C54F54BDEB404C6" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_6CCDC437872D96972D0CF54BDEB4AFD0_terseLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_6CCDC437872D96972D0CF54BDEB4AFD0" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award, Fair Value Assumptions and Methodology [Abstract]</link:label>
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_6CCDC437872D96972D0CF54BDEB4AFD0_label_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_6CCDC437872D96972D0CF54BDEB4AFD0" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award, Fair Value Assumptions and Methodology [Abstract]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_6CCDC437872D96972D0CF54BDEB4AFD0" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_6CCDC437872D96972D0CF54BDEB4AFD0" xlink:to="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_6CCDC437872D96972D0CF54BDEB4AFD0" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate_708A4FBE1C4E9D6BD834F54BDEB497F4_terseLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate_708A4FBE1C4E9D6BD834F54BDEB497F4" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Risk free interest rate</link:label>
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate_708A4FBE1C4E9D6BD834F54BDEB497F4_label_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate_708A4FBE1C4E9D6BD834F54BDEB497F4" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award, Fair Value Assumptions, Risk Free Interest Rate</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate_708A4FBE1C4E9D6BD834F54BDEB497F4" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate_708A4FBE1C4E9D6BD834F54BDEB497F4" xlink:to="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate_708A4FBE1C4E9D6BD834F54BDEB497F4" xlink:type="arc" />
    <link:label id="lab_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1_2A7DC86B5A9FFF8A6ECBF54BDEB453C0_terseLabel_en-US" xlink:label="lab_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1_2A7DC86B5A9FFF8A6ECBF54BDEB453C0" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Expected life</link:label>
    <link:label id="lab_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1_2A7DC86B5A9FFF8A6ECBF54BDEB453C0_label_en-US" xlink:label="lab_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1_2A7DC86B5A9FFF8A6ECBF54BDEB453C0" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award, Fair Value Assumptions, Expected Term</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1" xlink:label="loc_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1_2A7DC86B5A9FFF8A6ECBF54BDEB453C0" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1_2A7DC86B5A9FFF8A6ECBF54BDEB453C0" xlink:to="lab_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1_2A7DC86B5A9FFF8A6ECBF54BDEB453C0" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate_AA0F4AB553D6A1591D72F54BDEB49A0A_terseLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate_AA0F4AB553D6A1591D72F54BDEB49A0A" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Dividend rate</link:label>
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate_AA0F4AB553D6A1591D72F54BDEB49A0A_label_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate_AA0F4AB553D6A1591D72F54BDEB49A0A" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award, Fair Value Assumptions, Expected Dividend Rate</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate_AA0F4AB553D6A1591D72F54BDEB49A0A" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate_AA0F4AB553D6A1591D72F54BDEB49A0A" xlink:to="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate_AA0F4AB553D6A1591D72F54BDEB49A0A" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate_964D03FDCFB858401B58F54BDEB4048E_terseLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate_964D03FDCFB858401B58F54BDEB4048E" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Volatility</link:label>
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate_964D03FDCFB858401B58F54BDEB4048E_label_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate_964D03FDCFB858401B58F54BDEB4048E" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award, Fair Value Assumptions, Expected Volatility Rate</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate_964D03FDCFB858401B58F54BDEB4048E" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate_964D03FDCFB858401B58F54BDEB4048E" xlink:to="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate_964D03FDCFB858401B58F54BDEB4048E" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_7FB336B8E6946CA4F3ADF54BDEB552CE_terseLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_7FB336B8E6946CA4F3ADF54BDEB552CE" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Number of Shares [Roll Forward]</link:label>
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_7FB336B8E6946CA4F3ADF54BDEB552CE_label_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_7FB336B8E6946CA4F3ADF54BDEB552CE" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Number of Shares [Roll Forward]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_7FB336B8E6946CA4F3ADF54BDEB552CE" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_7FB336B8E6946CA4F3ADF54BDEB552CE" xlink:to="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_7FB336B8E6946CA4F3ADF54BDEB552CE" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_688CAF6C235BED7873B3F54BDEB5D548_periodStartLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_688CAF6C235BED7873B3F54BDEB5D548" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel" xlink:type="resource" xml:lang="en-US">Beginning Outstanding (in shares)</link:label>
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_688CAF6C235BED7873B3F54BDEB5D548_label_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_688CAF6C235BED7873B3F54BDEB5D548" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Number</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_688CAF6C235BED7873B3F54BDEB5D548" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_688CAF6C235BED7873B3F54BDEB5D548" xlink:to="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_688CAF6C235BED7873B3F54BDEB5D548" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod_481ED5FD22F996BA4827F54BDEB5B57F_negatedTerseLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod_481ED5FD22F996BA4827F54BDEB5B57F" xlink:role="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:type="resource" xml:lang="en-US">Released (in shares)</link:label>
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod_481ED5FD22F996BA4827F54BDEB5B57F_label_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod_481ED5FD22F996BA4827F54BDEB5B57F" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Vested in Period</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod_481ED5FD22F996BA4827F54BDEB5B57F" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod_481ED5FD22F996BA4827F54BDEB5B57F" xlink:to="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod_481ED5FD22F996BA4827F54BDEB5B57F" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_11ABEC315E331ECF6AB4F54BDEB5D3B4_periodEndLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_11ABEC315E331ECF6AB4F54BDEB5D3B4" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel" xlink:type="resource" xml:lang="en-US">Ending Outstanding (in shares)</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_11ABEC315E331ECF6AB4F54BDEB5D3B4" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_11ABEC315E331ECF6AB4F54BDEB5D3B4" xlink:to="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_11ABEC315E331ECF6AB4F54BDEB5D3B4" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward_83A75244B95A2A0F984FF54BDEB51E2B_terseLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward_83A75244B95A2A0F984FF54BDEB51E2B" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Weighted Average Grant Date Fair Value [Roll Forward]</link:label>
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward_83A75244B95A2A0F984FF54BDEB51E2B_label_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward_83A75244B95A2A0F984FF54BDEB51E2B" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Weighted Average Grant Date Fair Value [Abstract]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward_83A75244B95A2A0F984FF54BDEB51E2B" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward_83A75244B95A2A0F984FF54BDEB51E2B" xlink:to="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward_83A75244B95A2A0F984FF54BDEB51E2B" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_5872113694C4B05F23A8F54BDEB5D817_periodStartLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_5872113694C4B05F23A8F54BDEB5D817" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel" xlink:type="resource" xml:lang="en-US">Beginning Outstanding, Weighted Average Grant Date Fair Value (usd per share)</link:label>
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_5872113694C4B05F23A8F54BDEB5D817_label_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_5872113694C4B05F23A8F54BDEB5D817" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Weighted Average Grant Date Fair Value</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_5872113694C4B05F23A8F54BDEB5D817" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_5872113694C4B05F23A8F54BDEB5D817" xlink:to="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_5872113694C4B05F23A8F54BDEB5D817" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue_ED84B70499ADD5D8D94FF54BDEB50DA8_terseLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue_ED84B70499ADD5D8D94FF54BDEB50DA8" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Released, Weighted Average Grant Date Fair Value (usd per share)</link:label>
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue_ED84B70499ADD5D8D94FF54BDEB50DA8_label_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue_ED84B70499ADD5D8D94FF54BDEB50DA8" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Vested in Period, Weighted Average Grant Date Fair Value</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue_ED84B70499ADD5D8D94FF54BDEB50DA8" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue_ED84B70499ADD5D8D94FF54BDEB50DA8" xlink:to="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue_ED84B70499ADD5D8D94FF54BDEB50DA8" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_6DA4A5EBE36C05A6B47DF54BDEB5DBC6_periodEndLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_6DA4A5EBE36C05A6B47DF54BDEB5DBC6" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel" xlink:type="resource" xml:lang="en-US">Ending Outstanding, Weighted Average Grant Date Fair Value (usd per share)</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_6DA4A5EBE36C05A6B47DF54BDEB5DBC6" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_6DA4A5EBE36C05A6B47DF54BDEB5DBC6" xlink:to="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_6DA4A5EBE36C05A6B47DF54BDEB5DBC6" xlink:type="arc" />
    <link:label id="lab_us-gaap_ResearchAndDevelopmentExpense_84455BE5D38C5881FBF8F541EEFD23D8_terseLabel_en-US" xlink:label="lab_us-gaap_ResearchAndDevelopmentExpense_84455BE5D38C5881FBF8F541EEFD23D8" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Research, development and engineering</link:label>
    <link:label id="lab_us-gaap_ResearchAndDevelopmentExpense_84455BE5D38C5881FBF8F541EEFD23D8_label_en-US" xlink:label="lab_us-gaap_ResearchAndDevelopmentExpense_84455BE5D38C5881FBF8F541EEFD23D8" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Research and Development Expense</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ResearchAndDevelopmentExpense" xlink:label="loc_us-gaap_ResearchAndDevelopmentExpense_84455BE5D38C5881FBF8F541EEFD23D8" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ResearchAndDevelopmentExpense_84455BE5D38C5881FBF8F541EEFD23D8" xlink:to="lab_us-gaap_ResearchAndDevelopmentExpense_84455BE5D38C5881FBF8F541EEFD23D8" xlink:type="arc" />
    <link:label id="lab_us-gaap_ResearchAndDevelopmentArrangementWithFederalGovernmentCustomerFundingToOffsetCostsIncurred_F78A0805BB07706A436AF541EEFD6690_negatedTerseLabel_en-US" xlink:label="lab_us-gaap_ResearchAndDevelopmentArrangementWithFederalGovernmentCustomerFundingToOffsetCostsIncurred_F78A0805BB07706A436AF541EEFD6690" xlink:role="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:type="resource" xml:lang="en-US">Grants earned</link:label>
    <link:label id="lab_us-gaap_ResearchAndDevelopmentArrangementWithFederalGovernmentCustomerFundingToOffsetCostsIncurred_F78A0805BB07706A436AF541EEFD6690_label_en-US" xlink:label="lab_us-gaap_ResearchAndDevelopmentArrangementWithFederalGovernmentCustomerFundingToOffsetCostsIncurred_F78A0805BB07706A436AF541EEFD6690" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Research and Development Arrangement with Federal Government, Customer Funding to Offset Costs Incurred</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ResearchAndDevelopmentArrangementWithFederalGovernmentCustomerFundingToOffsetCostsIncurred" xlink:label="loc_us-gaap_ResearchAndDevelopmentArrangementWithFederalGovernmentCustomerFundingToOffsetCostsIncurred_F78A0805BB07706A436AF541EEFD6690" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ResearchAndDevelopmentArrangementWithFederalGovernmentCustomerFundingToOffsetCostsIncurred_F78A0805BB07706A436AF541EEFD6690" xlink:to="lab_us-gaap_ResearchAndDevelopmentArrangementWithFederalGovernmentCustomerFundingToOffsetCostsIncurred_F78A0805BB07706A436AF541EEFD6690" xlink:type="arc" />
    <link:label id="lab_asys_ResearchAndDevelopmentNetOfGrantsEarned_BF90645C9D9AD49025EBF541EEFD24AE_totalLabel_en-US" xlink:label="lab_asys_ResearchAndDevelopmentNetOfGrantsEarned_BF90645C9D9AD49025EBF541EEFD24AE" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:type="resource" xml:lang="en-US">Net research, development and engineering</link:label>
    <link:loc xlink:href="asys-20150630.xsd#asys_ResearchAndDevelopmentNetOfGrantsEarned" xlink:label="loc_asys_ResearchAndDevelopmentNetOfGrantsEarned_BF90645C9D9AD49025EBF541EEFD24AE" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_ResearchAndDevelopmentNetOfGrantsEarned_BF90645C9D9AD49025EBF541EEFD24AE" xlink:to="lab_asys_ResearchAndDevelopmentNetOfGrantsEarned_BF90645C9D9AD49025EBF541EEFD24AE" xlink:type="arc" />
    <link:label id="lab_us-gaap_OrganizationConsolidationBasisOfPresentationBusinessDescriptionAndAccountingPoliciesTextBlock_2AD84213120FC9D38DDDF541EEF5CCCD_terseLabel_en-US" xlink:label="lab_us-gaap_OrganizationConsolidationBasisOfPresentationBusinessDescriptionAndAccountingPoliciesTextBlock_2AD84213120FC9D38DDDF541EEF5CCCD" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Basis of Presentation</link:label>
    <link:label id="lab_us-gaap_OrganizationConsolidationBasisOfPresentationBusinessDescriptionAndAccountingPoliciesTextBlock_2AD84213120FC9D38DDDF541EEF5CCCD_label_en-US" xlink:label="lab_us-gaap_OrganizationConsolidationBasisOfPresentationBusinessDescriptionAndAccountingPoliciesTextBlock_2AD84213120FC9D38DDDF541EEF5CCCD" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Organization, Consolidation, Basis of Presentation, Business Description and Accounting Policies [Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OrganizationConsolidationBasisOfPresentationBusinessDescriptionAndAccountingPoliciesTextBlock" xlink:label="loc_us-gaap_OrganizationConsolidationBasisOfPresentationBusinessDescriptionAndAccountingPoliciesTextBlock_2AD84213120FC9D38DDDF541EEF5CCCD" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_OrganizationConsolidationBasisOfPresentationBusinessDescriptionAndAccountingPoliciesTextBlock_2AD84213120FC9D38DDDF541EEF5CCCD" xlink:to="lab_us-gaap_OrganizationConsolidationBasisOfPresentationBusinessDescriptionAndAccountingPoliciesTextBlock_2AD84213120FC9D38DDDF541EEF5CCCD" xlink:type="arc" />
    <link:label id="lab_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTextBlock_DBE30CBD9E46447AD20BF54BDE8373DE_terseLabel_en-US" xlink:label="lab_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTextBlock_DBE30CBD9E46447AD20BF54BDE8373DE" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Schedule of Segment Reporting Information, by Segment</link:label>
    <link:label id="lab_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTextBlock_DBE30CBD9E46447AD20BF54BDE8373DE_label_en-US" xlink:label="lab_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTextBlock_DBE30CBD9E46447AD20BF54BDE8373DE" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Schedule of Segment Reporting Information, by Segment [Table Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfSegmentReportingInformationBySegmentTextBlock" xlink:label="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTextBlock_DBE30CBD9E46447AD20BF54BDE8373DE" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTextBlock_DBE30CBD9E46447AD20BF54BDE8373DE" xlink:to="lab_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTextBlock_DBE30CBD9E46447AD20BF54BDE8373DE" xlink:type="arc" />
    <link:label id="lab_us-gaap_PercentageOfWeightedAverageCostInventory_76163083A84C54865927F541EF0E0D36_terseLabel_en-US" xlink:label="lab_us-gaap_PercentageOfWeightedAverageCostInventory_76163083A84C54865927F541EF0E0D36" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Percentage of weighted average cost inventory</link:label>
    <link:label id="lab_us-gaap_PercentageOfWeightedAverageCostInventory_76163083A84C54865927F541EF0E0D36_label_en-US" xlink:label="lab_us-gaap_PercentageOfWeightedAverageCostInventory_76163083A84C54865927F541EF0E0D36" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Percentage of Weighted Average Cost Inventory</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PercentageOfWeightedAverageCostInventory" xlink:label="loc_us-gaap_PercentageOfWeightedAverageCostInventory_76163083A84C54865927F541EF0E0D36" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_PercentageOfWeightedAverageCostInventory_76163083A84C54865927F541EF0E0D36" xlink:to="lab_us-gaap_PercentageOfWeightedAverageCostInventory_76163083A84C54865927F541EF0E0D36" xlink:type="arc" />
    <link:label id="lab_us-gaap_InventoryNetAbstract_FE031A243B460C9A87ABF541EF0EA862_terseLabel_en-US" xlink:label="lab_us-gaap_InventoryNetAbstract_FE031A243B460C9A87ABF541EF0EA862" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Inventory, Net [Abstract]</link:label>
    <link:label id="lab_us-gaap_InventoryNetAbstract_FE031A243B460C9A87ABF541EF0EA862_label_en-US" xlink:label="lab_us-gaap_InventoryNetAbstract_FE031A243B460C9A87ABF541EF0EA862" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Inventory, Net [Abstract]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_InventoryNetAbstract" xlink:label="loc_us-gaap_InventoryNetAbstract_FE031A243B460C9A87ABF541EF0EA862" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_InventoryNetAbstract_FE031A243B460C9A87ABF541EF0EA862" xlink:to="lab_us-gaap_InventoryNetAbstract_FE031A243B460C9A87ABF541EF0EA862" xlink:type="arc" />
    <link:label id="lab_us-gaap_InventoryRawMaterialsAndSuppliesNetOfReserves_8944340B33BD1F67C1D7F541EF0EA1B9_terseLabel_en-US" xlink:label="lab_us-gaap_InventoryRawMaterialsAndSuppliesNetOfReserves_8944340B33BD1F67C1D7F541EF0EA1B9" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Purchased parts and raw materials</link:label>
    <link:label id="lab_us-gaap_InventoryRawMaterialsAndSuppliesNetOfReserves_8944340B33BD1F67C1D7F541EF0EA1B9_label_en-US" xlink:label="lab_us-gaap_InventoryRawMaterialsAndSuppliesNetOfReserves_8944340B33BD1F67C1D7F541EF0EA1B9" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Inventory, Raw Materials and Supplies, Net of Reserves</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_InventoryRawMaterialsAndSuppliesNetOfReserves" xlink:label="loc_us-gaap_InventoryRawMaterialsAndSuppliesNetOfReserves_8944340B33BD1F67C1D7F541EF0EA1B9" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_InventoryRawMaterialsAndSuppliesNetOfReserves_8944340B33BD1F67C1D7F541EF0EA1B9" xlink:to="lab_us-gaap_InventoryRawMaterialsAndSuppliesNetOfReserves_8944340B33BD1F67C1D7F541EF0EA1B9" xlink:type="arc" />
    <link:label id="lab_us-gaap_InventoryWorkInProcessNetOfReserves_3E9AD875FA2B4222DA17F541EF0E739A_terseLabel_en-US" xlink:label="lab_us-gaap_InventoryWorkInProcessNetOfReserves_3E9AD875FA2B4222DA17F541EF0E739A" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Work-in-process</link:label>
    <link:label id="lab_us-gaap_InventoryWorkInProcessNetOfReserves_3E9AD875FA2B4222DA17F541EF0E739A_label_en-US" xlink:label="lab_us-gaap_InventoryWorkInProcessNetOfReserves_3E9AD875FA2B4222DA17F541EF0E739A" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Inventory, Work in Process, Net of Reserves</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_InventoryWorkInProcessNetOfReserves" xlink:label="loc_us-gaap_InventoryWorkInProcessNetOfReserves_3E9AD875FA2B4222DA17F541EF0E739A" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_InventoryWorkInProcessNetOfReserves_3E9AD875FA2B4222DA17F541EF0E739A" xlink:to="lab_us-gaap_InventoryWorkInProcessNetOfReserves_3E9AD875FA2B4222DA17F541EF0E739A" xlink:type="arc" />
    <link:label id="lab_us-gaap_InventoryFinishedGoodsNetOfReserves_378B9EA605745E1DC243F541EF0F5A42_terseLabel_en-US" xlink:label="lab_us-gaap_InventoryFinishedGoodsNetOfReserves_378B9EA605745E1DC243F541EF0F5A42" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Finished goods</link:label>
    <link:label id="lab_us-gaap_InventoryFinishedGoodsNetOfReserves_378B9EA605745E1DC243F541EF0F5A42_label_en-US" xlink:label="lab_us-gaap_InventoryFinishedGoodsNetOfReserves_378B9EA605745E1DC243F541EF0F5A42" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Inventory, Finished Goods, Net of Reserves</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_InventoryFinishedGoodsNetOfReserves" xlink:label="loc_us-gaap_InventoryFinishedGoodsNetOfReserves_378B9EA605745E1DC243F541EF0F5A42" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_InventoryFinishedGoodsNetOfReserves_378B9EA605745E1DC243F541EF0F5A42" xlink:to="lab_us-gaap_InventoryFinishedGoodsNetOfReserves_378B9EA605745E1DC243F541EF0F5A42" xlink:type="arc" />
    <link:label id="lab_us-gaap_InventoryNet_F94741FB915B0BC3648FF541EF0FB85D_totalLabel_en-US" xlink:label="lab_us-gaap_InventoryNet_F94741FB915B0BC3648FF541EF0FB85D" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:type="resource" xml:lang="en-US">Inventory</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_InventoryNet" xlink:label="loc_us-gaap_InventoryNet_F94741FB915B0BC3648FF541EF0FB85D" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_InventoryNet_F94741FB915B0BC3648FF541EF0FB85D" xlink:to="lab_us-gaap_InventoryNet_F94741FB915B0BC3648FF541EF0FB85D" xlink:type="arc" />
    <link:label id="lab_us-gaap_OtherLiabilitiesDisclosureTextBlock_708407DDCF508E3090F0F541ED42F695_terseLabel_en-US" xlink:label="lab_us-gaap_OtherLiabilitiesDisclosureTextBlock_708407DDCF508E3090F0F541ED42F695" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Other Accrued Liabilities</link:label>
    <link:label id="lab_us-gaap_OtherLiabilitiesDisclosureTextBlock_708407DDCF508E3090F0F541ED42F695_label_en-US" xlink:label="lab_us-gaap_OtherLiabilitiesDisclosureTextBlock_708407DDCF508E3090F0F541ED42F695" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Other Liabilities Disclosure [Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherLiabilitiesDisclosureTextBlock" xlink:label="loc_us-gaap_OtherLiabilitiesDisclosureTextBlock_708407DDCF508E3090F0F541ED42F695" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_OtherLiabilitiesDisclosureTextBlock_708407DDCF508E3090F0F541ED42F695" xlink:to="lab_us-gaap_OtherLiabilitiesDisclosureTextBlock_708407DDCF508E3090F0F541ED42F695" xlink:type="arc" />
    <link:label id="lab_us-gaap_IncomeTaxDisclosureTextBlock_1953A731A08964FF2B04F541ED524D81_terseLabel_en-US" xlink:label="lab_us-gaap_IncomeTaxDisclosureTextBlock_1953A731A08964FF2B04F541ED524D81" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Income Taxes</link:label>
    <link:label id="lab_us-gaap_IncomeTaxDisclosureTextBlock_1953A731A08964FF2B04F541ED524D81_label_en-US" xlink:label="lab_us-gaap_IncomeTaxDisclosureTextBlock_1953A731A08964FF2B04F541ED524D81" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Income Tax Disclosure [Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncomeTaxDisclosureTextBlock" xlink:label="loc_us-gaap_IncomeTaxDisclosureTextBlock_1953A731A08964FF2B04F541ED524D81" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_IncomeTaxDisclosureTextBlock_1953A731A08964FF2B04F541ED524D81" xlink:to="lab_us-gaap_IncomeTaxDisclosureTextBlock_1953A731A08964FF2B04F541ED524D81" xlink:type="arc" />
    <link:label id="lab_us-gaap_ScheduleOfAntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareTable_E69AF24EE9E44D95E3EEF54BDE959CE5_terseLabel_en-US" xlink:label="lab_us-gaap_ScheduleOfAntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareTable_E69AF24EE9E44D95E3EEF54BDE959CE5" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Schedule of Antidilutive Securities Excluded from Computation of Earnings Per Share [Table]</link:label>
    <link:label id="lab_us-gaap_ScheduleOfAntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareTable_E69AF24EE9E44D95E3EEF54BDE959CE5_label_en-US" xlink:label="lab_us-gaap_ScheduleOfAntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareTable_E69AF24EE9E44D95E3EEF54BDE959CE5" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Schedule of Antidilutive Securities Excluded from Computation of Earnings Per Share [Table]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfAntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareTable" xlink:label="loc_us-gaap_ScheduleOfAntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareTable_E69AF24EE9E44D95E3EEF54BDE959CE5" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ScheduleOfAntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareTable_E69AF24EE9E44D95E3EEF54BDE959CE5" xlink:to="lab_us-gaap_ScheduleOfAntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareTable_E69AF24EE9E44D95E3EEF54BDE959CE5" xlink:type="arc" />
    <link:label id="lab_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_BC005BD42388AAC654BFF54BDE952EA7_terseLabel_en-US" xlink:label="lab_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_BC005BD42388AAC654BFF54BDE952EA7" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Antidilutive Securities [Axis]</link:label>
    <link:label id="lab_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_BC005BD42388AAC654BFF54BDE952EA7_label_en-US" xlink:label="lab_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_BC005BD42388AAC654BFF54BDE952EA7" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Antidilutive Securities [Axis]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis" xlink:label="loc_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_BC005BD42388AAC654BFF54BDE952EA7" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_BC005BD42388AAC654BFF54BDE952EA7" xlink:to="lab_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_BC005BD42388AAC654BFF54BDE952EA7" xlink:type="arc" />
    <link:label id="lab_us-gaap_AntidilutiveSecuritiesNameDomain_E03ACF0A96E645270E41F54BDE963087_terseLabel_en-US" xlink:label="lab_us-gaap_AntidilutiveSecuritiesNameDomain_E03ACF0A96E645270E41F54BDE963087" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Antidilutive Securities, Name [Domain]</link:label>
    <link:label id="lab_us-gaap_AntidilutiveSecuritiesNameDomain_E03ACF0A96E645270E41F54BDE963087_label_en-US" xlink:label="lab_us-gaap_AntidilutiveSecuritiesNameDomain_E03ACF0A96E645270E41F54BDE963087" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Antidilutive Securities, Name [Domain]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AntidilutiveSecuritiesNameDomain" xlink:label="loc_us-gaap_AntidilutiveSecuritiesNameDomain_E03ACF0A96E645270E41F54BDE963087" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_AntidilutiveSecuritiesNameDomain_E03ACF0A96E645270E41F54BDE963087" xlink:to="lab_us-gaap_AntidilutiveSecuritiesNameDomain_E03ACF0A96E645270E41F54BDE963087" xlink:type="arc" />
    <link:label id="lab_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems_746D48DA5F74E40E4878F54BDE963954_terseLabel_en-US" xlink:label="lab_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems_746D48DA5F74E40E4878F54BDE963954" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Antidilutive Securities Excluded from Computation of Earnings Per Share [Line Items]</link:label>
    <link:label id="lab_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems_746D48DA5F74E40E4878F54BDE963954_label_en-US" xlink:label="lab_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems_746D48DA5F74E40E4878F54BDE963954" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Antidilutive Securities Excluded from Computation of Earnings Per Share [Line Items]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems" xlink:label="loc_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems_746D48DA5F74E40E4878F54BDE963954" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems_746D48DA5F74E40E4878F54BDE963954" xlink:to="lab_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems_746D48DA5F74E40E4878F54BDE963954" xlink:type="arc" />
    <link:label id="lab_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount_C246AF85079AC82EDDD5F54BDE96660C_terseLabel_en-US" xlink:label="lab_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount_C246AF85079AC82EDDD5F54BDE96660C" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Antidilutive securities excluded from computation of earnings per share, amount</link:label>
    <link:label id="lab_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount_C246AF85079AC82EDDD5F54BDE96660C_label_en-US" xlink:label="lab_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount_C246AF85079AC82EDDD5F54BDE96660C" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Antidilutive Securities Excluded from Computation of Earnings Per Share, Amount</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount" xlink:label="loc_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount_C246AF85079AC82EDDD5F54BDE96660C" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount_C246AF85079AC82EDDD5F54BDE96660C" xlink:to="lab_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount_C246AF85079AC82EDDD5F54BDE96660C" xlink:type="arc" />
    <link:label id="lab_us-gaap_NetIncomeLoss_A8E1522E2341FECC5854F54BDE96DD06_terseLabel_en-US" xlink:label="lab_us-gaap_NetIncomeLoss_A8E1522E2341FECC5854F54BDE96DD06" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Net income (loss) attributable to Amtech Systems, Inc.</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NetIncomeLoss" xlink:label="loc_us-gaap_NetIncomeLoss_A8E1522E2341FECC5854F54BDE96DD06" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_NetIncomeLoss_A8E1522E2341FECC5854F54BDE96DD06" xlink:to="lab_us-gaap_NetIncomeLoss_A8E1522E2341FECC5854F54BDE96DD06" xlink:type="arc" />
    <link:label id="lab_us-gaap_EarningsPerShareBasic_4F29818A316EA3202F25F54BDE968FF0_terseLabel_en-US" xlink:label="lab_us-gaap_EarningsPerShareBasic_4F29818A316EA3202F25F54BDE968FF0" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Basic income (loss) per share attributable to Amtech shareholders (dollars per share)</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EarningsPerShareBasic" xlink:label="loc_us-gaap_EarningsPerShareBasic_4F29818A316EA3202F25F54BDE968FF0" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_EarningsPerShareBasic_4F29818A316EA3202F25F54BDE968FF0" xlink:to="lab_us-gaap_EarningsPerShareBasic_4F29818A316EA3202F25F54BDE968FF0" xlink:type="arc" />
    <link:label id="lab_us-gaap_WeightedAverageNumberDilutedSharesOutstandingAdjustment_43B919785A7FDC45E41AF54BDE965F56_terseLabel_en-US" xlink:label="lab_us-gaap_WeightedAverageNumberDilutedSharesOutstandingAdjustment_43B919785A7FDC45E41AF54BDE965F56" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Common stock equivalents (in shares)</link:label>
    <link:label id="lab_us-gaap_WeightedAverageNumberDilutedSharesOutstandingAdjustment_43B919785A7FDC45E41AF54BDE965F56_label_en-US" xlink:label="lab_us-gaap_WeightedAverageNumberDilutedSharesOutstandingAdjustment_43B919785A7FDC45E41AF54BDE965F56" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Weighted Average Number Diluted Shares Outstanding Adjustment</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_WeightedAverageNumberDilutedSharesOutstandingAdjustment" xlink:label="loc_us-gaap_WeightedAverageNumberDilutedSharesOutstandingAdjustment_43B919785A7FDC45E41AF54BDE965F56" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_WeightedAverageNumberDilutedSharesOutstandingAdjustment_43B919785A7FDC45E41AF54BDE965F56" xlink:to="lab_us-gaap_WeightedAverageNumberDilutedSharesOutstandingAdjustment_43B919785A7FDC45E41AF54BDE965F56" xlink:type="arc" />
    <link:label id="lab_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_99BE55141790D85A5F9BF54BDE966E7E_totalLabel_en-US" xlink:label="lab_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_99BE55141790D85A5F9BF54BDE966E7E" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:type="resource" xml:lang="en-US">Diluted shares (in shares)</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding" xlink:label="loc_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_99BE55141790D85A5F9BF54BDE966E7E" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_99BE55141790D85A5F9BF54BDE966E7E" xlink:to="lab_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_99BE55141790D85A5F9BF54BDE966E7E" xlink:type="arc" />
    <link:label id="lab_us-gaap_EarningsPerShareDiluted_9B1682C061D095222CB2F54BDE963F0B_terseLabel_en-US" xlink:label="lab_us-gaap_EarningsPerShareDiluted_9B1682C061D095222CB2F54BDE963F0B" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Diluted income (loss) per share attributable to Amtech shareholders (dollars per share)</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EarningsPerShareDiluted" xlink:label="loc_us-gaap_EarningsPerShareDiluted_9B1682C061D095222CB2F54BDE963F0B" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_EarningsPerShareDiluted_9B1682C061D095222CB2F54BDE963F0B" xlink:to="lab_us-gaap_EarningsPerShareDiluted_9B1682C061D095222CB2F54BDE963F0B" xlink:type="arc" />
    <link:label id="lab_us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock_ACB4BD6AFAC9D76FCF55F541ED15346B_terseLabel_en-US" xlink:label="lab_us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock_ACB4BD6AFAC9D76FCF55F541ED15346B" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Schedule of Earnings Per Share, Basic and Diluted</link:label>
    <link:label id="lab_us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock_ACB4BD6AFAC9D76FCF55F541ED15346B_label_en-US" xlink:label="lab_us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock_ACB4BD6AFAC9D76FCF55F541ED15346B" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Schedule of Earnings Per Share, Basic and Diluted [Table Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock" xlink:label="loc_us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock_ACB4BD6AFAC9D76FCF55F541ED15346B" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock_ACB4BD6AFAC9D76FCF55F541ED15346B" xlink:to="lab_us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock_ACB4BD6AFAC9D76FCF55F541ED15346B" xlink:type="arc" />
    <link:label id="lab_asys_UnearnedResearchandDevelopmentGrantsCurrent_54953047222B55895429F541EE7A71D4_terseLabel_en-US" xlink:label="lab_asys_UnearnedResearchandDevelopmentGrantsCurrent_54953047222B55895429F541EE7A71D4" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Unearned research and development grants</link:label>
    <link:label id="lab_asys_UnearnedResearchandDevelopmentGrantsCurrent_54953047222B55895429F541EE7A71D4_label_en-US" xlink:label="lab_asys_UnearnedResearchandDevelopmentGrantsCurrent_54953047222B55895429F541EE7A71D4" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Unearned Research and Development Grants, Current</link:label>
    <link:label id="lab_asys_UnearnedResearchandDevelopmentGrantsCurrent_54953047222B55895429F541EE7A71D4_documentation_en-US" xlink:label="lab_asys_UnearnedResearchandDevelopmentGrantsCurrent_54953047222B55895429F541EE7A71D4" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Unearned Research and Development Grants, Current</link:label>
    <link:loc xlink:href="asys-20150630.xsd#asys_UnearnedResearchandDevelopmentGrantsCurrent" xlink:label="loc_asys_UnearnedResearchandDevelopmentGrantsCurrent_54953047222B55895429F541EE7A71D4" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_UnearnedResearchandDevelopmentGrantsCurrent_54953047222B55895429F541EE7A71D4" xlink:to="lab_asys_UnearnedResearchandDevelopmentGrantsCurrent_54953047222B55895429F541EE7A71D4" xlink:type="arc" />
    <link:label id="lab_asys_OtherAccruedLiabilitiesOtherCurrent_A86A05A35FD9B9463270F541EE7B6E52_terseLabel_en-US" xlink:label="lab_asys_OtherAccruedLiabilitiesOtherCurrent_A86A05A35FD9B9463270F541EE7B6E52" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Other</link:label>
    <link:label id="lab_asys_OtherAccruedLiabilitiesOtherCurrent_A86A05A35FD9B9463270F541EE7B6E52_label_en-US" xlink:label="lab_asys_OtherAccruedLiabilitiesOtherCurrent_A86A05A35FD9B9463270F541EE7B6E52" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Other Accrued Liabilities, Other, Current</link:label>
    <link:label id="lab_asys_OtherAccruedLiabilitiesOtherCurrent_A86A05A35FD9B9463270F541EE7B6E52_documentation_en-US" xlink:label="lab_asys_OtherAccruedLiabilitiesOtherCurrent_A86A05A35FD9B9463270F541EE7B6E52" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Other Accrued Liabilities, Other, Current</link:label>
    <link:loc xlink:href="asys-20150630.xsd#asys_OtherAccruedLiabilitiesOtherCurrent" xlink:label="loc_asys_OtherAccruedLiabilitiesOtherCurrent_A86A05A35FD9B9463270F541EE7B6E52" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_OtherAccruedLiabilitiesOtherCurrent_A86A05A35FD9B9463270F541EE7B6E52" xlink:to="lab_asys_OtherAccruedLiabilitiesOtherCurrent_A86A05A35FD9B9463270F541EE7B6E52" xlink:type="arc" />
    <link:label id="lab_us-gaap_AccruedLiabilitiesCurrent_9190507517CC8175071BF541EE7BAED0_totalLabel_en-US" xlink:label="lab_us-gaap_AccruedLiabilitiesCurrent_9190507517CC8175071BF541EE7BAED0" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:type="resource" xml:lang="en-US">Other accrued liabilities</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AccruedLiabilitiesCurrent" xlink:label="loc_us-gaap_AccruedLiabilitiesCurrent_9190507517CC8175071BF541EE7BAED0" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_AccruedLiabilitiesCurrent_9190507517CC8175071BF541EE7BAED0" xlink:to="lab_us-gaap_AccruedLiabilitiesCurrent_9190507517CC8175071BF541EE7BAED0" xlink:type="arc" />
    <link:label id="lab_us-gaap_SegmentReportingDisclosureTextBlock_BFD52E03C3B822E158C6F54BDE852EA8_terseLabel_en-US" xlink:label="lab_us-gaap_SegmentReportingDisclosureTextBlock_BFD52E03C3B822E158C6F54BDE852EA8" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Business Segment Information</link:label>
    <link:label id="lab_us-gaap_SegmentReportingDisclosureTextBlock_BFD52E03C3B822E158C6F54BDE852EA8_label_en-US" xlink:label="lab_us-gaap_SegmentReportingDisclosureTextBlock_BFD52E03C3B822E158C6F54BDE852EA8" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Segment Reporting Disclosure [Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SegmentReportingDisclosureTextBlock" xlink:label="loc_us-gaap_SegmentReportingDisclosureTextBlock_BFD52E03C3B822E158C6F54BDE852EA8" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_SegmentReportingDisclosureTextBlock_BFD52E03C3B822E158C6F54BDE852EA8" xlink:to="lab_us-gaap_SegmentReportingDisclosureTextBlock_BFD52E03C3B822E158C6F54BDE852EA8" xlink:type="arc" />
    <link:label id="lab_asys_CommonAndRestrictedSharesMember_382DA5F3F97F468B1C08F541EED23267_terseLabel_en-US" xlink:label="lab_asys_CommonAndRestrictedSharesMember_382DA5F3F97F468B1C08F541EED23267" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Common And Restricted Shares</link:label>
    <link:label id="lab_asys_CommonAndRestrictedSharesMember_382DA5F3F97F468B1C08F541EED23267_label_en-US" xlink:label="lab_asys_CommonAndRestrictedSharesMember_382DA5F3F97F468B1C08F541EED23267" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Common And Restricted Shares [Member]</link:label>
    <link:label id="lab_asys_CommonAndRestrictedSharesMember_382DA5F3F97F468B1C08F541EED23267_documentation_en-US" xlink:label="lab_asys_CommonAndRestrictedSharesMember_382DA5F3F97F468B1C08F541EED23267" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Common And Restricted Shares</link:label>
    <link:loc xlink:href="asys-20150630.xsd#asys_CommonAndRestrictedSharesMember" xlink:label="loc_asys_CommonAndRestrictedSharesMember_382DA5F3F97F468B1C08F541EED23267" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_CommonAndRestrictedSharesMember_382DA5F3F97F468B1C08F541EED23267" xlink:to="lab_asys_CommonAndRestrictedSharesMember_382DA5F3F97F468B1C08F541EED23267" xlink:type="arc" />
    <link:label id="lab_us-gaap_ConversionOfStockSharesConverted1_E1CC3638CCA60920E944F541EED2B8CA_terseLabel_en-US" xlink:label="lab_us-gaap_ConversionOfStockSharesConverted1_E1CC3638CCA60920E944F541EED2B8CA" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">BTU common shares and restricted stock units exchanged</link:label>
    <link:label id="lab_us-gaap_ConversionOfStockSharesConverted1_E1CC3638CCA60920E944F541EED2B8CA_label_en-US" xlink:label="lab_us-gaap_ConversionOfStockSharesConverted1_E1CC3638CCA60920E944F541EED2B8CA" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Conversion of Stock, Shares Converted</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConversionOfStockSharesConverted1" xlink:label="loc_us-gaap_ConversionOfStockSharesConverted1_E1CC3638CCA60920E944F541EED2B8CA" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ConversionOfStockSharesConverted1_E1CC3638CCA60920E944F541EED2B8CA" xlink:to="lab_us-gaap_ConversionOfStockSharesConverted1_E1CC3638CCA60920E944F541EED2B8CA" xlink:type="arc" />
    <link:label id="lab_us-gaap_NoncashOrPartNoncashAcquisitionNoncashFinancialOrEquityInstrumentConsiderationSharesIssued1_D47702AA8C4E68E67909F541EED2B7F4_verboseLabel_en-US" xlink:label="lab_us-gaap_NoncashOrPartNoncashAcquisitionNoncashFinancialOrEquityInstrumentConsiderationSharesIssued1_D47702AA8C4E68E67909F541EED2B7F4" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:type="resource" xml:lang="en-US">Amtech common stock issued for consideration</link:label>
    <link:label id="lab_us-gaap_NoncashOrPartNoncashAcquisitionNoncashFinancialOrEquityInstrumentConsiderationSharesIssued1_D47702AA8C4E68E67909F541EED2B7F4_label_en-US" xlink:label="lab_us-gaap_NoncashOrPartNoncashAcquisitionNoncashFinancialOrEquityInstrumentConsiderationSharesIssued1_D47702AA8C4E68E67909F541EED2B7F4" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Noncash or Part Noncash Acquisition, Noncash Financial or Equity Instrument Consideration, Shares Issued</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NoncashOrPartNoncashAcquisitionNoncashFinancialOrEquityInstrumentConsiderationSharesIssued1" xlink:label="loc_us-gaap_NoncashOrPartNoncashAcquisitionNoncashFinancialOrEquityInstrumentConsiderationSharesIssued1_D47702AA8C4E68E67909F541EED2B7F4" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_NoncashOrPartNoncashAcquisitionNoncashFinancialOrEquityInstrumentConsiderationSharesIssued1_D47702AA8C4E68E67909F541EED2B7F4" xlink:to="lab_us-gaap_NoncashOrPartNoncashAcquisitionNoncashFinancialOrEquityInstrumentConsiderationSharesIssued1_D47702AA8C4E68E67909F541EED2B7F4" xlink:type="arc" />
    <link:label id="lab_us-gaap_SharePrice_3FD576F53A93FE35F949F541EED209F3_terseLabel_en-US" xlink:label="lab_us-gaap_SharePrice_3FD576F53A93FE35F949F541EED209F3" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Amtech common stock per share price on January 30, 2015</link:label>
    <link:label id="lab_us-gaap_SharePrice_3FD576F53A93FE35F949F541EED209F3_label_en-US" xlink:label="lab_us-gaap_SharePrice_3FD576F53A93FE35F949F541EED209F3" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share Price</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SharePrice" xlink:label="loc_us-gaap_SharePrice_3FD576F53A93FE35F949F541EED209F3" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_SharePrice_3FD576F53A93FE35F949F541EED209F3" xlink:to="lab_us-gaap_SharePrice_3FD576F53A93FE35F949F541EED209F3" xlink:type="arc" />
    <link:label id="lab_asys_BusinessCombinationConsiderationTransferredForCommonAndRestrictedStockUnits_F84BA34FA2DBF5AD1244F541EED39497_terseLabel_en-US" xlink:label="lab_asys_BusinessCombinationConsiderationTransferredForCommonAndRestrictedStockUnits_F84BA34FA2DBF5AD1244F541EED39497" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Consideration for BTU common shares and restricted stock units</link:label>
    <link:label id="lab_asys_BusinessCombinationConsiderationTransferredForCommonAndRestrictedStockUnits_F84BA34FA2DBF5AD1244F541EED39497_label_en-US" xlink:label="lab_asys_BusinessCombinationConsiderationTransferredForCommonAndRestrictedStockUnits_F84BA34FA2DBF5AD1244F541EED39497" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Business Combination, Consideration Transferred For Common And Restricted Stock Units</link:label>
    <link:label id="lab_asys_BusinessCombinationConsiderationTransferredForCommonAndRestrictedStockUnits_F84BA34FA2DBF5AD1244F541EED39497_documentation_en-US" xlink:label="lab_asys_BusinessCombinationConsiderationTransferredForCommonAndRestrictedStockUnits_F84BA34FA2DBF5AD1244F541EED39497" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Business Combination, Consideration Transferred For Common And Restricted Stock Units</link:label>
    <link:loc xlink:href="asys-20150630.xsd#asys_BusinessCombinationConsiderationTransferredForCommonAndRestrictedStockUnits" xlink:label="loc_asys_BusinessCombinationConsiderationTransferredForCommonAndRestrictedStockUnits_F84BA34FA2DBF5AD1244F541EED39497" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_BusinessCombinationConsiderationTransferredForCommonAndRestrictedStockUnits_F84BA34FA2DBF5AD1244F541EED39497" xlink:to="lab_asys_BusinessCombinationConsiderationTransferredForCommonAndRestrictedStockUnits_F84BA34FA2DBF5AD1244F541EED39497" xlink:type="arc" />
    <link:label id="lab_us-gaap_BusinessCombinationConsiderationTransferred1_F1577D6C1627CDF90445F541EED8BD26_terseLabel_en-US" xlink:label="lab_us-gaap_BusinessCombinationConsiderationTransferred1_F1577D6C1627CDF90445F541EED8BD26" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Total fair value of consideration transferred</link:label>
    <link:label id="lab_us-gaap_BusinessCombinationConsiderationTransferred1_F1577D6C1627CDF90445F541EED8BD26_label_en-US" xlink:label="lab_us-gaap_BusinessCombinationConsiderationTransferred1_F1577D6C1627CDF90445F541EED8BD26" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Business Combination, Consideration Transferred</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessCombinationConsiderationTransferred1" xlink:label="loc_us-gaap_BusinessCombinationConsiderationTransferred1_F1577D6C1627CDF90445F541EED8BD26" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_BusinessCombinationConsiderationTransferred1_F1577D6C1627CDF90445F541EED8BD26" xlink:to="lab_us-gaap_BusinessCombinationConsiderationTransferred1_F1577D6C1627CDF90445F541EED8BD26" xlink:type="arc" />
    <link:label id="lab_us-gaap_BusinessAcquisitionProFormaInformationTextBlock_C8F16D7C8A53B8F65465F541ED711393_terseLabel_en-US" xlink:label="lab_us-gaap_BusinessAcquisitionProFormaInformationTextBlock_C8F16D7C8A53B8F65465F541ED711393" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Business Acquisition, Pro Forma Information</link:label>
    <link:label id="lab_us-gaap_BusinessAcquisitionProFormaInformationTextBlock_C8F16D7C8A53B8F65465F541ED711393_label_en-US" xlink:label="lab_us-gaap_BusinessAcquisitionProFormaInformationTextBlock_C8F16D7C8A53B8F65465F541ED711393" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Business Acquisition, Pro Forma Information [Table Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionProFormaInformationTextBlock" xlink:label="loc_us-gaap_BusinessAcquisitionProFormaInformationTextBlock_C8F16D7C8A53B8F65465F541ED711393" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_BusinessAcquisitionProFormaInformationTextBlock_C8F16D7C8A53B8F65465F541ED711393" xlink:to="lab_us-gaap_BusinessAcquisitionProFormaInformationTextBlock_C8F16D7C8A53B8F65465F541ED711393" xlink:type="arc" />
    <link:label id="lab_asys_BusinessCombinationScheduleOfConsiderationTransferredTableTextBlock_10A14052C40AD0B84458F541ED713B37_terseLabel_en-US" xlink:label="lab_asys_BusinessCombinationScheduleOfConsiderationTransferredTableTextBlock_10A14052C40AD0B84458F541ED713B37" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Business Combination, Schedule Of Consideration Transferred</link:label>
    <link:label id="lab_asys_BusinessCombinationScheduleOfConsiderationTransferredTableTextBlock_10A14052C40AD0B84458F541ED713B37_label_en-US" xlink:label="lab_asys_BusinessCombinationScheduleOfConsiderationTransferredTableTextBlock_10A14052C40AD0B84458F541ED713B37" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Business Combination, Schedule Of Consideration Transferred [Table Text Block]</link:label>
    <link:label id="lab_asys_BusinessCombinationScheduleOfConsiderationTransferredTableTextBlock_10A14052C40AD0B84458F541ED713B37_documentation_en-US" xlink:label="lab_asys_BusinessCombinationScheduleOfConsiderationTransferredTableTextBlock_10A14052C40AD0B84458F541ED713B37" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Business Combination, Schedule Of Consideration Transferred [Table Text Block]</link:label>
    <link:loc xlink:href="asys-20150630.xsd#asys_BusinessCombinationScheduleOfConsiderationTransferredTableTextBlock" xlink:label="loc_asys_BusinessCombinationScheduleOfConsiderationTransferredTableTextBlock_10A14052C40AD0B84458F541ED713B37" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_BusinessCombinationScheduleOfConsiderationTransferredTableTextBlock_10A14052C40AD0B84458F541ED713B37" xlink:to="lab_asys_BusinessCombinationScheduleOfConsiderationTransferredTableTextBlock_10A14052C40AD0B84458F541ED713B37" xlink:type="arc" />
    <link:label id="lab_us-gaap_ScheduleOfRecognizedIdentifiedAssetsAcquiredAndLiabilitiesAssumedTableTextBlock_401C1041C6A73EACBB51F541ED7194D6_terseLabel_en-US" xlink:label="lab_us-gaap_ScheduleOfRecognizedIdentifiedAssetsAcquiredAndLiabilitiesAssumedTableTextBlock_401C1041C6A73EACBB51F541ED7194D6" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Schedule of Recognized Identified Assets Acquired and Liabilities Assumed</link:label>
    <link:label id="lab_us-gaap_ScheduleOfRecognizedIdentifiedAssetsAcquiredAndLiabilitiesAssumedTableTextBlock_401C1041C6A73EACBB51F541ED7194D6_label_en-US" xlink:label="lab_us-gaap_ScheduleOfRecognizedIdentifiedAssetsAcquiredAndLiabilitiesAssumedTableTextBlock_401C1041C6A73EACBB51F541ED7194D6" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Schedule of Recognized Identified Assets Acquired and Liabilities Assumed [Table Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfRecognizedIdentifiedAssetsAcquiredAndLiabilitiesAssumedTableTextBlock" xlink:label="loc_us-gaap_ScheduleOfRecognizedIdentifiedAssetsAcquiredAndLiabilitiesAssumedTableTextBlock_401C1041C6A73EACBB51F541ED7194D6" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ScheduleOfRecognizedIdentifiedAssetsAcquiredAndLiabilitiesAssumedTableTextBlock_401C1041C6A73EACBB51F541ED7194D6" xlink:to="lab_us-gaap_ScheduleOfRecognizedIdentifiedAssetsAcquiredAndLiabilitiesAssumedTableTextBlock_401C1041C6A73EACBB51F541ED7194D6" xlink:type="arc" />
    <link:label id="lab_us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract_85ECDB3479C1872E08F6F54BDEEF25B0_label_en-US" xlink:label="lab_us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract_85ECDB3479C1872E08F6F54BDEEF25B0" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Statement of Comprehensive Income [Abstract]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract" xlink:label="loc_us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract_85ECDB3479C1872E08F6F54BDEEF25B0" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract_85ECDB3479C1872E08F6F54BDEEF25B0" xlink:to="lab_us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract_85ECDB3479C1872E08F6F54BDEEF25B0" xlink:type="arc" />
    <link:label id="lab_us-gaap_ProfitLoss_D6B2D84B105355632E99F54BDEEF198B_terseLabel_en-US" xlink:label="lab_us-gaap_ProfitLoss_D6B2D84B105355632E99F54BDEEF198B" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Net loss</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProfitLoss" xlink:label="loc_us-gaap_ProfitLoss_D6B2D84B105355632E99F54BDEEF198B" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ProfitLoss_D6B2D84B105355632E99F54BDEEF198B" xlink:to="lab_us-gaap_ProfitLoss_D6B2D84B105355632E99F54BDEEF198B" xlink:type="arc" />
    <link:label id="lab_us-gaap_OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax_5CC877257EB54336D479F54BDEEFCC10_terseLabel_en-US" xlink:label="lab_us-gaap_OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax_5CC877257EB54336D479F54BDEEFCC10" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Foreign currency translation adjustment</link:label>
    <link:label id="lab_us-gaap_OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax_5CC877257EB54336D479F54BDEEFCC10_label_en-US" xlink:label="lab_us-gaap_OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax_5CC877257EB54336D479F54BDEEFCC10" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Other Comprehensive Income (Loss), Foreign Currency Transaction and Translation Adjustment, Net of Tax</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax" xlink:label="loc_us-gaap_OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax_5CC877257EB54336D479F54BDEEFCC10" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax_5CC877257EB54336D479F54BDEEFCC10" xlink:to="lab_us-gaap_OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax_5CC877257EB54336D479F54BDEEFCC10" xlink:type="arc" />
    <link:label id="lab_us-gaap_ComprehensiveIncomeNetOfTaxIncludingPortionAttributableToNoncontrollingInterest_07D62C99D43A274EB97AF54BDEEFE704_totalLabel_en-US" xlink:label="lab_us-gaap_ComprehensiveIncomeNetOfTaxIncludingPortionAttributableToNoncontrollingInterest_07D62C99D43A274EB97AF54BDEEFE704" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:type="resource" xml:lang="en-US">Comprehensive loss</link:label>
    <link:label id="lab_us-gaap_ComprehensiveIncomeNetOfTaxIncludingPortionAttributableToNoncontrollingInterest_07D62C99D43A274EB97AF54BDEEFE704_label_en-US" xlink:label="lab_us-gaap_ComprehensiveIncomeNetOfTaxIncludingPortionAttributableToNoncontrollingInterest_07D62C99D43A274EB97AF54BDEEFE704" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Comprehensive Income (Loss), Net of Tax, Including Portion Attributable to Noncontrolling Interest</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ComprehensiveIncomeNetOfTaxIncludingPortionAttributableToNoncontrollingInterest" xlink:label="loc_us-gaap_ComprehensiveIncomeNetOfTaxIncludingPortionAttributableToNoncontrollingInterest_07D62C99D43A274EB97AF54BDEEFE704" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ComprehensiveIncomeNetOfTaxIncludingPortionAttributableToNoncontrollingInterest_07D62C99D43A274EB97AF54BDEEFE704" xlink:to="lab_us-gaap_ComprehensiveIncomeNetOfTaxIncludingPortionAttributableToNoncontrollingInterest_07D62C99D43A274EB97AF54BDEEFE704" xlink:type="arc" />
    <link:label id="lab_us-gaap_ComprehensiveIncomeNetOfTaxAttributableToNoncontrollingInterest_28062902579CBF1019B0F54BDEEF07E8_negatedTerseLabel_en-US" xlink:label="lab_us-gaap_ComprehensiveIncomeNetOfTaxAttributableToNoncontrollingInterest_28062902579CBF1019B0F54BDEEF07E8" xlink:role="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:type="resource" xml:lang="en-US">Comprehensive (income) loss attributable to noncontrolling interest</link:label>
    <link:label id="lab_us-gaap_ComprehensiveIncomeNetOfTaxAttributableToNoncontrollingInterest_28062902579CBF1019B0F54BDEEF07E8_label_en-US" xlink:label="lab_us-gaap_ComprehensiveIncomeNetOfTaxAttributableToNoncontrollingInterest_28062902579CBF1019B0F54BDEEF07E8" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Comprehensive Income (Loss), Net of Tax, Attributable to Noncontrolling Interest</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ComprehensiveIncomeNetOfTaxAttributableToNoncontrollingInterest" xlink:label="loc_us-gaap_ComprehensiveIncomeNetOfTaxAttributableToNoncontrollingInterest_28062902579CBF1019B0F54BDEEF07E8" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ComprehensiveIncomeNetOfTaxAttributableToNoncontrollingInterest_28062902579CBF1019B0F54BDEEF07E8" xlink:to="lab_us-gaap_ComprehensiveIncomeNetOfTaxAttributableToNoncontrollingInterest_28062902579CBF1019B0F54BDEEF07E8" xlink:type="arc" />
    <link:label id="lab_us-gaap_ComprehensiveIncomeNetOfTax_56740549F69060437D31F54BDEEF180F_totalLabel_en-US" xlink:label="lab_us-gaap_ComprehensiveIncomeNetOfTax_56740549F69060437D31F54BDEEF180F" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:type="resource" xml:lang="en-US">Comprehensive loss attributable to Amtech Systems, Inc.</link:label>
    <link:label id="lab_us-gaap_ComprehensiveIncomeNetOfTax_56740549F69060437D31F54BDEEF180F_label_en-US" xlink:label="lab_us-gaap_ComprehensiveIncomeNetOfTax_56740549F69060437D31F54BDEEF180F" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Comprehensive Income (Loss), Net of Tax, Attributable to Parent</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ComprehensiveIncomeNetOfTax" xlink:label="loc_us-gaap_ComprehensiveIncomeNetOfTax_56740549F69060437D31F54BDEEF180F" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ComprehensiveIncomeNetOfTax_56740549F69060437D31F54BDEEF180F" xlink:to="lab_us-gaap_ComprehensiveIncomeNetOfTax_56740549F69060437D31F54BDEEF180F" xlink:type="arc" />
    <link:label id="lab_us-gaap_SubsequentEventsTextBlock_D4F80AF2A92BB3515249F541ED7D861B_terseLabel_en-US" xlink:label="lab_us-gaap_SubsequentEventsTextBlock_D4F80AF2A92BB3515249F541ED7D861B" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Subsequent Event</link:label>
    <link:label id="lab_us-gaap_SubsequentEventsTextBlock_D4F80AF2A92BB3515249F541ED7D861B_label_en-US" xlink:label="lab_us-gaap_SubsequentEventsTextBlock_D4F80AF2A92BB3515249F541ED7D861B" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Subsequent Events [Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SubsequentEventsTextBlock" xlink:label="loc_us-gaap_SubsequentEventsTextBlock_D4F80AF2A92BB3515249F541ED7D861B" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_SubsequentEventsTextBlock_D4F80AF2A92BB3515249F541ED7D861B" xlink:to="lab_us-gaap_SubsequentEventsTextBlock_D4F80AF2A92BB3515249F541ED7D861B" xlink:type="arc" />
    <link:label id="lab_us-gaap_BasisOfAccountingPolicyPolicyTextBlock_7E36D1F1637E78B48B43F541EE63FEC5_terseLabel_en-US" xlink:label="lab_us-gaap_BasisOfAccountingPolicyPolicyTextBlock_7E36D1F1637E78B48B43F541EE63FEC5" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Nature of Operations and Basis of Presentation</link:label>
    <link:label id="lab_us-gaap_BasisOfAccountingPolicyPolicyTextBlock_7E36D1F1637E78B48B43F541EE63FEC5_label_en-US" xlink:label="lab_us-gaap_BasisOfAccountingPolicyPolicyTextBlock_7E36D1F1637E78B48B43F541EE63FEC5" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Basis of Accounting, Policy [Policy Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BasisOfAccountingPolicyPolicyTextBlock" xlink:label="loc_us-gaap_BasisOfAccountingPolicyPolicyTextBlock_7E36D1F1637E78B48B43F541EE63FEC5" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_BasisOfAccountingPolicyPolicyTextBlock_7E36D1F1637E78B48B43F541EE63FEC5" xlink:to="lab_us-gaap_BasisOfAccountingPolicyPolicyTextBlock_7E36D1F1637E78B48B43F541EE63FEC5" xlink:type="arc" />
    <link:label id="lab_us-gaap_ConsolidationPolicyTextBlock_1107391FEA3C37BC911DF541EE63D6BE_terseLabel_en-US" xlink:label="lab_us-gaap_ConsolidationPolicyTextBlock_1107391FEA3C37BC911DF541EE63D6BE" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Principles of Consolidation</link:label>
    <link:label id="lab_us-gaap_ConsolidationPolicyTextBlock_1107391FEA3C37BC911DF541EE63D6BE_label_en-US" xlink:label="lab_us-gaap_ConsolidationPolicyTextBlock_1107391FEA3C37BC911DF541EE63D6BE" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Consolidation, Policy [Policy Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConsolidationPolicyTextBlock" xlink:label="loc_us-gaap_ConsolidationPolicyTextBlock_1107391FEA3C37BC911DF541EE63D6BE" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ConsolidationPolicyTextBlock_1107391FEA3C37BC911DF541EE63D6BE" xlink:to="lab_us-gaap_ConsolidationPolicyTextBlock_1107391FEA3C37BC911DF541EE63D6BE" xlink:type="arc" />
    <link:label id="lab_us-gaap_UseOfEstimates_9FA478409E5B5E659E0EF541EE63E496_terseLabel_en-US" xlink:label="lab_us-gaap_UseOfEstimates_9FA478409E5B5E659E0EF541EE63E496" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Use of Estimates</link:label>
    <link:label id="lab_us-gaap_UseOfEstimates_9FA478409E5B5E659E0EF541EE63E496_label_en-US" xlink:label="lab_us-gaap_UseOfEstimates_9FA478409E5B5E659E0EF541EE63E496" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Use of Estimates, Policy [Policy Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_UseOfEstimates" xlink:label="loc_us-gaap_UseOfEstimates_9FA478409E5B5E659E0EF541EE63E496" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_UseOfEstimates_9FA478409E5B5E659E0EF541EE63E496" xlink:to="lab_us-gaap_UseOfEstimates_9FA478409E5B5E659E0EF541EE63E496" xlink:type="arc" />
    <link:label id="lab_us-gaap_RevenueRecognitionPolicyTextBlock_2F1CE1287AB57FD42BE9F541EE649B46_terseLabel_en-US" xlink:label="lab_us-gaap_RevenueRecognitionPolicyTextBlock_2F1CE1287AB57FD42BE9F541EE649B46" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Revenue Recognition</link:label>
    <link:label id="lab_us-gaap_RevenueRecognitionPolicyTextBlock_2F1CE1287AB57FD42BE9F541EE649B46_label_en-US" xlink:label="lab_us-gaap_RevenueRecognitionPolicyTextBlock_2F1CE1287AB57FD42BE9F541EE649B46" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Revenue Recognition, Policy [Policy Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RevenueRecognitionPolicyTextBlock" xlink:label="loc_us-gaap_RevenueRecognitionPolicyTextBlock_2F1CE1287AB57FD42BE9F541EE649B46" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_RevenueRecognitionPolicyTextBlock_2F1CE1287AB57FD42BE9F541EE649B46" xlink:to="lab_us-gaap_RevenueRecognitionPolicyTextBlock_2F1CE1287AB57FD42BE9F541EE649B46" xlink:type="arc" />
    <link:label id="lab_us-gaap_RevenueRecognitionDeferredRevenue_CF26DBD2F9E914E33D53F541EE643E42_terseLabel_en-US" xlink:label="lab_us-gaap_RevenueRecognitionDeferredRevenue_CF26DBD2F9E914E33D53F541EE643E42" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Deferred Profit</link:label>
    <link:label id="lab_us-gaap_RevenueRecognitionDeferredRevenue_CF26DBD2F9E914E33D53F541EE643E42_label_en-US" xlink:label="lab_us-gaap_RevenueRecognitionDeferredRevenue_CF26DBD2F9E914E33D53F541EE643E42" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Revenue Recognition, Deferred Revenue [Policy Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RevenueRecognitionDeferredRevenue" xlink:label="loc_us-gaap_RevenueRecognitionDeferredRevenue_CF26DBD2F9E914E33D53F541EE643E42" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_RevenueRecognitionDeferredRevenue_CF26DBD2F9E914E33D53F541EE643E42" xlink:to="lab_us-gaap_RevenueRecognitionDeferredRevenue_CF26DBD2F9E914E33D53F541EE643E42" xlink:type="arc" />
    <link:label id="lab_us-gaap_ConcentrationRiskCreditRisk_8B5CD4D236889381E352F541EE64EFD0_terseLabel_en-US" xlink:label="lab_us-gaap_ConcentrationRiskCreditRisk_8B5CD4D236889381E352F541EE64EFD0" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Concentrations of Credit Risk</link:label>
    <link:label id="lab_us-gaap_ConcentrationRiskCreditRisk_8B5CD4D236889381E352F541EE64EFD0_label_en-US" xlink:label="lab_us-gaap_ConcentrationRiskCreditRisk_8B5CD4D236889381E352F541EE64EFD0" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Concentration Risk, Credit Risk, Policy [Policy Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskCreditRisk" xlink:label="loc_us-gaap_ConcentrationRiskCreditRisk_8B5CD4D236889381E352F541EE64EFD0" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ConcentrationRiskCreditRisk_8B5CD4D236889381E352F541EE64EFD0" xlink:to="lab_us-gaap_ConcentrationRiskCreditRisk_8B5CD4D236889381E352F541EE64EFD0" xlink:type="arc" />
    <link:label id="lab_us-gaap_CashAndCashEquivalentsRestrictedCashAndCashEquivalentsPolicy_4FE469BD7937F79A5717F541EE644CA2_terseLabel_en-US" xlink:label="lab_us-gaap_CashAndCashEquivalentsRestrictedCashAndCashEquivalentsPolicy_4FE469BD7937F79A5717F541EE644CA2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Restricted Cash</link:label>
    <link:label id="lab_us-gaap_CashAndCashEquivalentsRestrictedCashAndCashEquivalentsPolicy_4FE469BD7937F79A5717F541EE644CA2_label_en-US" xlink:label="lab_us-gaap_CashAndCashEquivalentsRestrictedCashAndCashEquivalentsPolicy_4FE469BD7937F79A5717F541EE644CA2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Cash and Cash Equivalents, Restricted Cash and Cash Equivalents, Policy [Policy Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CashAndCashEquivalentsRestrictedCashAndCashEquivalentsPolicy" xlink:label="loc_us-gaap_CashAndCashEquivalentsRestrictedCashAndCashEquivalentsPolicy_4FE469BD7937F79A5717F541EE644CA2" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_CashAndCashEquivalentsRestrictedCashAndCashEquivalentsPolicy_4FE469BD7937F79A5717F541EE644CA2" xlink:to="lab_us-gaap_CashAndCashEquivalentsRestrictedCashAndCashEquivalentsPolicy_4FE469BD7937F79A5717F541EE644CA2" xlink:type="arc" />
    <link:label id="lab_us-gaap_ReceivablesPolicyTextBlock_E0EEF92AE859FE365A94F541EE64942C_terseLabel_en-US" xlink:label="lab_us-gaap_ReceivablesPolicyTextBlock_E0EEF92AE859FE365A94F541EE64942C" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Accounts Receivable - Unbilled and Other</link:label>
    <link:label id="lab_us-gaap_ReceivablesPolicyTextBlock_E0EEF92AE859FE365A94F541EE64942C_label_en-US" xlink:label="lab_us-gaap_ReceivablesPolicyTextBlock_E0EEF92AE859FE365A94F541EE64942C" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Receivables, Policy [Policy Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ReceivablesPolicyTextBlock" xlink:label="loc_us-gaap_ReceivablesPolicyTextBlock_E0EEF92AE859FE365A94F541EE64942C" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ReceivablesPolicyTextBlock_E0EEF92AE859FE365A94F541EE64942C" xlink:to="lab_us-gaap_ReceivablesPolicyTextBlock_E0EEF92AE859FE365A94F541EE64942C" xlink:type="arc" />
    <link:label id="lab_us-gaap_InventoryPolicyTextBlock_4A7FA9D54F1FC59D96F5F541EE649B16_terseLabel_en-US" xlink:label="lab_us-gaap_InventoryPolicyTextBlock_4A7FA9D54F1FC59D96F5F541EE649B16" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Inventories</link:label>
    <link:label id="lab_us-gaap_InventoryPolicyTextBlock_4A7FA9D54F1FC59D96F5F541EE649B16_label_en-US" xlink:label="lab_us-gaap_InventoryPolicyTextBlock_4A7FA9D54F1FC59D96F5F541EE649B16" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Inventory, Policy [Policy Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_InventoryPolicyTextBlock" xlink:label="loc_us-gaap_InventoryPolicyTextBlock_4A7FA9D54F1FC59D96F5F541EE649B16" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_InventoryPolicyTextBlock_4A7FA9D54F1FC59D96F5F541EE649B16" xlink:to="lab_us-gaap_InventoryPolicyTextBlock_4A7FA9D54F1FC59D96F5F541EE649B16" xlink:type="arc" />
    <link:label id="lab_us-gaap_PropertyPlantAndEquipmentPolicyTextBlock_7E22660EB68A3DE34576F541EE643929_terseLabel_en-US" xlink:label="lab_us-gaap_PropertyPlantAndEquipmentPolicyTextBlock_7E22660EB68A3DE34576F541EE643929" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Property, Plant and Equipment</link:label>
    <link:label id="lab_us-gaap_PropertyPlantAndEquipmentPolicyTextBlock_7E22660EB68A3DE34576F541EE643929_label_en-US" xlink:label="lab_us-gaap_PropertyPlantAndEquipmentPolicyTextBlock_7E22660EB68A3DE34576F541EE643929" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Property, Plant and Equipment, Policy [Policy Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PropertyPlantAndEquipmentPolicyTextBlock" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentPolicyTextBlock_7E22660EB68A3DE34576F541EE643929" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentPolicyTextBlock_7E22660EB68A3DE34576F541EE643929" xlink:to="lab_us-gaap_PropertyPlantAndEquipmentPolicyTextBlock_7E22660EB68A3DE34576F541EE643929" xlink:type="arc" />
    <link:label id="lab_us-gaap_GoodwillAndIntangibleAssetsGoodwillPolicy_61B85950A23E37E8FC08F541EE643E70_terseLabel_en-US" xlink:label="lab_us-gaap_GoodwillAndIntangibleAssetsGoodwillPolicy_61B85950A23E37E8FC08F541EE643E70" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Goodwill</link:label>
    <link:label id="lab_us-gaap_GoodwillAndIntangibleAssetsGoodwillPolicy_61B85950A23E37E8FC08F541EE643E70_label_en-US" xlink:label="lab_us-gaap_GoodwillAndIntangibleAssetsGoodwillPolicy_61B85950A23E37E8FC08F541EE643E70" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Goodwill and Intangible Assets, Goodwill, Policy [Policy Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GoodwillAndIntangibleAssetsGoodwillPolicy" xlink:label="loc_us-gaap_GoodwillAndIntangibleAssetsGoodwillPolicy_61B85950A23E37E8FC08F541EE643E70" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_GoodwillAndIntangibleAssetsGoodwillPolicy_61B85950A23E37E8FC08F541EE643E70" xlink:to="lab_us-gaap_GoodwillAndIntangibleAssetsGoodwillPolicy_61B85950A23E37E8FC08F541EE643E70" xlink:type="arc" />
    <link:label id="lab_us-gaap_GoodwillAndIntangibleAssetsIntangibleAssetsPolicy_B00F4253E11352B5F032F541EE64163F_terseLabel_en-US" xlink:label="lab_us-gaap_GoodwillAndIntangibleAssetsIntangibleAssetsPolicy_B00F4253E11352B5F032F541EE64163F" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Intangibles</link:label>
    <link:label id="lab_us-gaap_GoodwillAndIntangibleAssetsIntangibleAssetsPolicy_B00F4253E11352B5F032F541EE64163F_label_en-US" xlink:label="lab_us-gaap_GoodwillAndIntangibleAssetsIntangibleAssetsPolicy_B00F4253E11352B5F032F541EE64163F" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Goodwill and Intangible Assets, Intangible Assets, Policy [Policy Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GoodwillAndIntangibleAssetsIntangibleAssetsPolicy" xlink:label="loc_us-gaap_GoodwillAndIntangibleAssetsIntangibleAssetsPolicy_B00F4253E11352B5F032F541EE64163F" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_GoodwillAndIntangibleAssetsIntangibleAssetsPolicy_B00F4253E11352B5F032F541EE64163F" xlink:to="lab_us-gaap_GoodwillAndIntangibleAssetsIntangibleAssetsPolicy_B00F4253E11352B5F032F541EE64163F" xlink:type="arc" />
    <link:label id="lab_us-gaap_ImpairmentOrDisposalOfLongLivedAssetsIncludingIntangibleAssetsPolicyPolicyTextBlock_E79FEC02ACC0EC5CB237F541EE64699B_terseLabel_en-US" xlink:label="lab_us-gaap_ImpairmentOrDisposalOfLongLivedAssetsIncludingIntangibleAssetsPolicyPolicyTextBlock_E79FEC02ACC0EC5CB237F541EE64699B" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Long-lived assets</link:label>
    <link:label id="lab_us-gaap_ImpairmentOrDisposalOfLongLivedAssetsIncludingIntangibleAssetsPolicyPolicyTextBlock_E79FEC02ACC0EC5CB237F541EE64699B_label_en-US" xlink:label="lab_us-gaap_ImpairmentOrDisposalOfLongLivedAssetsIncludingIntangibleAssetsPolicyPolicyTextBlock_E79FEC02ACC0EC5CB237F541EE64699B" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Impairment or Disposal of Long-Lived Assets, Including Intangible Assets, Policy [Policy Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ImpairmentOrDisposalOfLongLivedAssetsIncludingIntangibleAssetsPolicyPolicyTextBlock" xlink:label="loc_us-gaap_ImpairmentOrDisposalOfLongLivedAssetsIncludingIntangibleAssetsPolicyPolicyTextBlock_E79FEC02ACC0EC5CB237F541EE64699B" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ImpairmentOrDisposalOfLongLivedAssetsIncludingIntangibleAssetsPolicyPolicyTextBlock_E79FEC02ACC0EC5CB237F541EE64699B" xlink:to="lab_us-gaap_ImpairmentOrDisposalOfLongLivedAssetsIncludingIntangibleAssetsPolicyPolicyTextBlock_E79FEC02ACC0EC5CB237F541EE64699B" xlink:type="arc" />
    <link:label id="lab_us-gaap_StandardProductWarrantyPolicy_2912E9C46FD45B7D6BAAF541EE64ABF9_terseLabel_en-US" xlink:label="lab_us-gaap_StandardProductWarrantyPolicy_2912E9C46FD45B7D6BAAF541EE64ABF9" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Warranty</link:label>
    <link:label id="lab_us-gaap_StandardProductWarrantyPolicy_2912E9C46FD45B7D6BAAF541EE64ABF9_label_en-US" xlink:label="lab_us-gaap_StandardProductWarrantyPolicy_2912E9C46FD45B7D6BAAF541EE64ABF9" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Standard Product Warranty, Policy [Policy Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StandardProductWarrantyPolicy" xlink:label="loc_us-gaap_StandardProductWarrantyPolicy_2912E9C46FD45B7D6BAAF541EE64ABF9" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_StandardProductWarrantyPolicy_2912E9C46FD45B7D6BAAF541EE64ABF9" xlink:to="lab_us-gaap_StandardProductWarrantyPolicy_2912E9C46FD45B7D6BAAF541EE64ABF9" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy_E37852AE518E233D34CCF541EE6A4037_terseLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy_E37852AE518E233D34CCF541EE6A4037" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Stock-Based Compensation</link:label>
    <link:label id="lab_us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy_E37852AE518E233D34CCF541EE6A4037_label_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy_E37852AE518E233D34CCF541EE6A4037" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share-based Compensation, Option and Incentive Plans Policy [Policy Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy" xlink:label="loc_us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy_E37852AE518E233D34CCF541EE6A4037" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy_E37852AE518E233D34CCF541EE6A4037" xlink:to="lab_us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy_E37852AE518E233D34CCF541EE6A4037" xlink:type="arc" />
    <link:label id="lab_us-gaap_FairValueOfFinancialInstrumentsPolicy_D46BF433717C6ABF427DF541EE6A7952_terseLabel_en-US" xlink:label="lab_us-gaap_FairValueOfFinancialInstrumentsPolicy_D46BF433717C6ABF427DF541EE6A7952" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Fair Value of Financial Instruments</link:label>
    <link:label id="lab_us-gaap_FairValueOfFinancialInstrumentsPolicy_D46BF433717C6ABF427DF541EE6A7952_label_en-US" xlink:label="lab_us-gaap_FairValueOfFinancialInstrumentsPolicy_D46BF433717C6ABF427DF541EE6A7952" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Fair Value of Financial Instruments, Policy [Policy Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FairValueOfFinancialInstrumentsPolicy" xlink:label="loc_us-gaap_FairValueOfFinancialInstrumentsPolicy_D46BF433717C6ABF427DF541EE6A7952" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_FairValueOfFinancialInstrumentsPolicy_D46BF433717C6ABF427DF541EE6A7952" xlink:to="lab_us-gaap_FairValueOfFinancialInstrumentsPolicy_D46BF433717C6ABF427DF541EE6A7952" xlink:type="arc" />
    <link:label id="lab_us-gaap_PensionAndOtherPostretirementPlansPensionsPolicy_B1F60F8305534394AB81F541EE6A2E71_terseLabel_en-US" xlink:label="lab_us-gaap_PensionAndOtherPostretirementPlansPensionsPolicy_B1F60F8305534394AB81F541EE6A2E71" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Pensions</link:label>
    <link:label id="lab_us-gaap_PensionAndOtherPostretirementPlansPensionsPolicy_B1F60F8305534394AB81F541EE6A2E71_label_en-US" xlink:label="lab_us-gaap_PensionAndOtherPostretirementPlansPensionsPolicy_B1F60F8305534394AB81F541EE6A2E71" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Pension and Other Postretirement Plans, Pensions, Policy [Policy Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PensionAndOtherPostretirementPlansPensionsPolicy" xlink:label="loc_us-gaap_PensionAndOtherPostretirementPlansPensionsPolicy_B1F60F8305534394AB81F541EE6A2E71" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_PensionAndOtherPostretirementPlansPensionsPolicy_B1F60F8305534394AB81F541EE6A2E71" xlink:to="lab_us-gaap_PensionAndOtherPostretirementPlansPensionsPolicy_B1F60F8305534394AB81F541EE6A2E71" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShippingAndHandlingCostPolicyTextBlock_84F9E05724BC47533C2AF541EE6A2211_terseLabel_en-US" xlink:label="lab_us-gaap_ShippingAndHandlingCostPolicyTextBlock_84F9E05724BC47533C2AF541EE6A2211" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Shipping expense</link:label>
    <link:label id="lab_us-gaap_ShippingAndHandlingCostPolicyTextBlock_84F9E05724BC47533C2AF541EE6A2211_label_en-US" xlink:label="lab_us-gaap_ShippingAndHandlingCostPolicyTextBlock_84F9E05724BC47533C2AF541EE6A2211" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Shipping and Handling Cost, Policy [Policy Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShippingAndHandlingCostPolicyTextBlock" xlink:label="loc_us-gaap_ShippingAndHandlingCostPolicyTextBlock_84F9E05724BC47533C2AF541EE6A2211" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShippingAndHandlingCostPolicyTextBlock_84F9E05724BC47533C2AF541EE6A2211" xlink:to="lab_us-gaap_ShippingAndHandlingCostPolicyTextBlock_84F9E05724BC47533C2AF541EE6A2211" xlink:type="arc" />
    <link:label id="lab_us-gaap_ResearchAndDevelopmentExpensePolicy_96374624209A02A12F59F541EE6AD736_terseLabel_en-US" xlink:label="lab_us-gaap_ResearchAndDevelopmentExpensePolicy_96374624209A02A12F59F541EE6AD736" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Research and development expense</link:label>
    <link:label id="lab_us-gaap_ResearchAndDevelopmentExpensePolicy_96374624209A02A12F59F541EE6AD736_label_en-US" xlink:label="lab_us-gaap_ResearchAndDevelopmentExpensePolicy_96374624209A02A12F59F541EE6AD736" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Research and Development Expense, Policy [Policy Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ResearchAndDevelopmentExpensePolicy" xlink:label="loc_us-gaap_ResearchAndDevelopmentExpensePolicy_96374624209A02A12F59F541EE6AD736" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ResearchAndDevelopmentExpensePolicy_96374624209A02A12F59F541EE6AD736" xlink:to="lab_us-gaap_ResearchAndDevelopmentExpensePolicy_96374624209A02A12F59F541EE6AD736" xlink:type="arc" />
    <link:label id="lab_us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock_9172704A763445EF1031F541EE6ACA18_terseLabel_en-US" xlink:label="lab_us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock_9172704A763445EF1031F541EE6ACA18" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Impact of Recently Issued Accounting Pronouncements</link:label>
    <link:label id="lab_us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock_9172704A763445EF1031F541EE6ACA18_label_en-US" xlink:label="lab_us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock_9172704A763445EF1031F541EE6ACA18" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">New Accounting Pronouncements, Policy [Policy Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock" xlink:label="loc_us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock_9172704A763445EF1031F541EE6ACA18" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock_9172704A763445EF1031F541EE6ACA18" xlink:to="lab_us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock_9172704A763445EF1031F541EE6ACA18" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShippingHandlingAndTransportationCosts_D56C29471D96BD984A59F541ED9864E2_terseLabel_en-US" xlink:label="lab_us-gaap_ShippingHandlingAndTransportationCosts_D56C29471D96BD984A59F541ED9864E2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Shipping expenses</link:label>
    <link:label id="lab_us-gaap_ShippingHandlingAndTransportationCosts_D56C29471D96BD984A59F541ED9864E2_label_en-US" xlink:label="lab_us-gaap_ShippingHandlingAndTransportationCosts_D56C29471D96BD984A59F541ED9864E2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Shipping, Handling and Transportation Costs</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShippingHandlingAndTransportationCosts" xlink:label="loc_us-gaap_ShippingHandlingAndTransportationCosts_D56C29471D96BD984A59F541ED9864E2" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShippingHandlingAndTransportationCosts_D56C29471D96BD984A59F541ED9864E2" xlink:to="lab_us-gaap_ShippingHandlingAndTransportationCosts_D56C29471D96BD984A59F541ED9864E2" xlink:type="arc" />
  </link:labelLink>
</link:linkbase>
</XBRL>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.PRE
<SEQUENCE>12
<FILENAME>asys-20150630_pre.xml
<DESCRIPTION>XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE DOCUMENT
<TEXT>
<XBRL>
<?xml version="1.0" encoding="US-ASCII"?>
<!--XBRL Document Created with Wdesk from Workiva-->
<!-- -->
<linkbase xsi:schemaLocation="http://www.xbrl.org/2003/linkbase http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd" xmlns="http://www.xbrl.org/2003/linkbase" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance">
  <roleRef roleURI="http://www.amtechsystems.com/role/Acquisition" xlink:href="asys-20150630.xsd#Acquisition" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/AcquisitionAcquisitionTables" xlink:href="asys-20150630.xsd#AcquisitionAcquisitionTables" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/AcquisitionAssetsAcquiredAndLiabilitiesAssumedDetails" xlink:href="asys-20150630.xsd#AcquisitionAssetsAcquiredAndLiabilitiesAssumedDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/AcquisitionConsiderationTransferredDetails" xlink:href="asys-20150630.xsd#AcquisitionConsiderationTransferredDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/AcquisitionDetails" xlink:href="asys-20150630.xsd#AcquisitionDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/AcquisitionProFormaDetails" xlink:href="asys-20150630.xsd#AcquisitionProFormaDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/BasisOfPresentation" xlink:href="asys-20150630.xsd#BasisOfPresentation" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/BasisOfPresentationCashEquivalentsDetails" xlink:href="asys-20150630.xsd#BasisOfPresentationCashEquivalentsDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/BasisOfPresentationConcentrationsOfCreditRiskDetails" xlink:href="asys-20150630.xsd#BasisOfPresentationConcentrationsOfCreditRiskDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/BasisOfPresentationDeferredProfitDetails" xlink:href="asys-20150630.xsd#BasisOfPresentationDeferredProfitDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/BasisOfPresentationGoodwillDetails" xlink:href="asys-20150630.xsd#BasisOfPresentationGoodwillDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/BasisOfPresentationIntangiblesDetails" xlink:href="asys-20150630.xsd#BasisOfPresentationIntangiblesDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/BasisOfPresentationInventoriesDetails" xlink:href="asys-20150630.xsd#BasisOfPresentationInventoriesDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/BasisOfPresentationPolicies" xlink:href="asys-20150630.xsd#BasisOfPresentationPolicies" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/BasisOfPresentationPropertyPlantAndEquipmentDetails" xlink:href="asys-20150630.xsd#BasisOfPresentationPropertyPlantAndEquipmentDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/BasisOfPresentationResearchAndDevelopmentExpenseDetails" xlink:href="asys-20150630.xsd#BasisOfPresentationResearchAndDevelopmentExpenseDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/BasisOfPresentationRestrictedCashDetails" xlink:href="asys-20150630.xsd#BasisOfPresentationRestrictedCashDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/BasisOfPresentationShippingExpenseDetails" xlink:href="asys-20150630.xsd#BasisOfPresentationShippingExpenseDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/BasisOfPresentationStockBasedCompensationDetails" xlink:href="asys-20150630.xsd#BasisOfPresentationStockBasedCompensationDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/BasisOfPresentationTables" xlink:href="asys-20150630.xsd#BasisOfPresentationTables" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/BasisOfPresentationWarrantyDetails" xlink:href="asys-20150630.xsd#BasisOfPresentationWarrantyDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/BusinessSegmentInformation" xlink:href="asys-20150630.xsd#BusinessSegmentInformation" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/BusinessSegmentInformationDetails" xlink:href="asys-20150630.xsd#BusinessSegmentInformationDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/BusinessSegmentInformationTables" xlink:href="asys-20150630.xsd#BusinessSegmentInformationTables" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/CommitmentsAndContingencies" xlink:href="asys-20150630.xsd#CommitmentsAndContingencies" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/CommitmentsAndContingenciesDetails" xlink:href="asys-20150630.xsd#CommitmentsAndContingenciesDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/CondensedConsolidatedBalanceSheets" xlink:href="asys-20150630.xsd#CondensedConsolidatedBalanceSheets" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/CondensedConsolidatedBalanceSheetsParenthetical" xlink:href="asys-20150630.xsd#CondensedConsolidatedBalanceSheetsParenthetical" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/CondensedConsolidatedStatementsOfCashFlowsUnaudited" xlink:href="asys-20150630.xsd#CondensedConsolidatedStatementsOfCashFlowsUnaudited" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/CondensedConsolidatedStatementsOfComprehensiveIncomeLossUnaudited" xlink:href="asys-20150630.xsd#CondensedConsolidatedStatementsOfComprehensiveIncomeLossUnaudited" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/CondensedConsolidatedStatementsOfOperationsUnaudited" xlink:href="asys-20150630.xsd#CondensedConsolidatedStatementsOfOperationsUnaudited" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/DocumentAndEntityInformation" xlink:href="asys-20150630.xsd#DocumentAndEntityInformation" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/EarningsPerShare" xlink:href="asys-20150630.xsd#EarningsPerShare" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/EarningsPerShareDetails" xlink:href="asys-20150630.xsd#EarningsPerShareDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/EarningsPerShareTables" xlink:href="asys-20150630.xsd#EarningsPerShareTables" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/IncomeTaxes" xlink:href="asys-20150630.xsd#IncomeTaxes" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/IncomeTaxesDetails" xlink:href="asys-20150630.xsd#IncomeTaxesDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/LongTermDebt" xlink:href="asys-20150630.xsd#LongTermDebt" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/LongTermDebtDetails" xlink:href="asys-20150630.xsd#LongTermDebtDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/MajorCustomersAndForeignSales" xlink:href="asys-20150630.xsd#MajorCustomersAndForeignSales" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/MajorCustomersAndForeignSalesDetails" xlink:href="asys-20150630.xsd#MajorCustomersAndForeignSalesDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/MajorCustomersAndForeignSalesTables" xlink:href="asys-20150630.xsd#MajorCustomersAndForeignSalesTables" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/OtherAccruedLiabilities" xlink:href="asys-20150630.xsd#OtherAccruedLiabilities" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/OtherAccruedLiabilitiesDetails" xlink:href="asys-20150630.xsd#OtherAccruedLiabilitiesDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/OtherAccruedLiabilitiesTables" xlink:href="asys-20150630.xsd#OtherAccruedLiabilitiesTables" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/StockholdersEquity" xlink:href="asys-20150630.xsd#StockholdersEquity" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/StockholdersEquityDetails" xlink:href="asys-20150630.xsd#StockholdersEquityDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/SubsequentEventDetails" xlink:href="asys-20150630.xsd#SubsequentEventDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.amtechsystems.com/role/SubsequentEventNotes" xlink:href="asys-20150630.xsd#SubsequentEventNotes" xlink:type="simple" />
  <roleRef roleURI="http://www.xbrl.org/2009/role/negatedLabel" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedLabel" xlink:type="simple" />
  <roleRef roleURI="http://www.xbrl.org/2009/role/negatedNetLabel" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedNetLabel" xlink:type="simple" />
  <roleRef roleURI="http://www.xbrl.org/2009/role/negatedPeriodEndLabel" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedPeriodEndLabel" xlink:type="simple" />
  <roleRef roleURI="http://www.xbrl.org/2009/role/negatedPeriodStartLabel" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedPeriodStartLabel" xlink:type="simple" />
  <roleRef roleURI="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedTerseLabel" xlink:type="simple" />
  <roleRef roleURI="http://www.xbrl.org/2009/role/negatedTotalLabel" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedTotalLabel" xlink:type="simple" />
  <roleRef roleURI="http://www.xbrl.org/2009/role/netLabel" xlink:href="http://www.xbrl.org/lrr/role/net-2009-12-16.xsd#netLabel" xlink:type="simple" />
  <presentationLink xlink:role="http://www.amtechsystems.com/role/Acquisition" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessCombinationsAbstract" xlink:label="loc_us-gaap_BusinessCombinationsAbstract_6616098C15BF49D21054F541ED8E6DF5" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessCombinationDisclosureTextBlock" xlink:label="loc_us-gaap_BusinessCombinationDisclosureTextBlock_730BEC7853E95AACD372F541ED8F7C19" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BusinessCombinationsAbstract_6616098C15BF49D21054F541ED8E6DF5" xlink:to="loc_us-gaap_BusinessCombinationDisclosureTextBlock_730BEC7853E95AACD372F541ED8F7C19" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.amtechsystems.com/role/AcquisitionAcquisitionTables" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessCombinationsAbstract" xlink:label="loc_us-gaap_BusinessCombinationsAbstract_780B95E091B1819D75AFF541ED71F861" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionProFormaInformationTextBlock" xlink:label="loc_us-gaap_BusinessAcquisitionProFormaInformationTextBlock_C8F16D7C8A53B8F65465F541ED711393" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BusinessCombinationsAbstract_780B95E091B1819D75AFF541ED71F861" xlink:to="loc_us-gaap_BusinessAcquisitionProFormaInformationTextBlock_C8F16D7C8A53B8F65465F541ED711393" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_BusinessCombinationScheduleOfConsiderationTransferredTableTextBlock" xlink:label="loc_asys_BusinessCombinationScheduleOfConsiderationTransferredTableTextBlock_10A14052C40AD0B84458F541ED713B37" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BusinessCombinationsAbstract_780B95E091B1819D75AFF541ED71F861" xlink:to="loc_asys_BusinessCombinationScheduleOfConsiderationTransferredTableTextBlock_10A14052C40AD0B84458F541ED713B37" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfRecognizedIdentifiedAssetsAcquiredAndLiabilitiesAssumedTableTextBlock" xlink:label="loc_us-gaap_ScheduleOfRecognizedIdentifiedAssetsAcquiredAndLiabilitiesAssumedTableTextBlock_401C1041C6A73EACBB51F541ED7194D6" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BusinessCombinationsAbstract_780B95E091B1819D75AFF541ED71F861" xlink:to="loc_us-gaap_ScheduleOfRecognizedIdentifiedAssetsAcquiredAndLiabilitiesAssumedTableTextBlock_401C1041C6A73EACBB51F541ED7194D6" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.amtechsystems.com/role/AcquisitionAssetsAcquiredAndLiabilitiesAssumedDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessCombinationsAbstract" xlink:label="loc_us-gaap_BusinessCombinationsAbstract_FCC9C95C3FFA51B9E92CF54BDE319320" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfBusinessAcquisitionsByAcquisitionTable" xlink:label="loc_us-gaap_ScheduleOfBusinessAcquisitionsByAcquisitionTable_1E1D7C589270804FD9AFF54BDE31A6F6" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BusinessCombinationsAbstract_FCC9C95C3FFA51B9E92CF54BDE319320" xlink:to="loc_us-gaap_ScheduleOfBusinessAcquisitionsByAcquisitionTable_1E1D7C589270804FD9AFF54BDE31A6F6" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_7C96A80113826DBF6A7CF54BDE32B1CB" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfBusinessAcquisitionsByAcquisitionTable_1E1D7C589270804FD9AFF54BDE31A6F6" xlink:to="loc_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_7C96A80113826DBF6A7CF54BDE32B1CB" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_CC5ED128D761CC75AB7CF54BDE325088" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_7C96A80113826DBF6A7CF54BDE32B1CB" xlink:to="loc_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_CC5ED128D761CC75AB7CF54BDE325088" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_TradeNamesMember" xlink:label="loc_us-gaap_TradeNamesMember_7130C288EA9581A0FD33F54BDE3290C8" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_CC5ED128D761CC75AB7CF54BDE325088" xlink:to="loc_us-gaap_TradeNamesMember_7130C288EA9581A0FD33F54BDE3290C8" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StatementBusinessSegmentsAxis" xlink:label="loc_us-gaap_StatementBusinessSegmentsAxis_5E62123B58C98BE6ECDCF54BDE32206F" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfBusinessAcquisitionsByAcquisitionTable_1E1D7C589270804FD9AFF54BDE31A6F6" xlink:to="loc_us-gaap_StatementBusinessSegmentsAxis_5E62123B58C98BE6ECDCF54BDE32206F" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SegmentDomain" xlink:label="loc_us-gaap_SegmentDomain_C9ECDE00DDBB166C6EE1F54BDE329C87" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementBusinessSegmentsAxis_5E62123B58C98BE6ECDCF54BDE32206F" xlink:to="loc_us-gaap_SegmentDomain_C9ECDE00DDBB166C6EE1F54BDE329C87" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_SemiconductorEquipmentMember" xlink:label="loc_asys_SemiconductorEquipmentMember_03CE439B3070B71924AEF54BDE32516B" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentDomain_C9ECDE00DDBB166C6EE1F54BDE329C87" xlink:to="loc_asys_SemiconductorEquipmentMember_03CE439B3070B71924AEF54BDE32516B" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionAxis" xlink:label="loc_us-gaap_BusinessAcquisitionAxis_3CE8AB051C1929697B74F54BDE32625A" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfBusinessAcquisitionsByAcquisitionTable_1E1D7C589270804FD9AFF54BDE31A6F6" xlink:to="loc_us-gaap_BusinessAcquisitionAxis_3CE8AB051C1929697B74F54BDE32625A" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionAcquireeDomain" xlink:label="loc_us-gaap_BusinessAcquisitionAcquireeDomain_A66183E8042F95F6374EF54BDE32C155" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BusinessAcquisitionAxis_3CE8AB051C1929697B74F54BDE32625A" xlink:to="loc_us-gaap_BusinessAcquisitionAcquireeDomain_A66183E8042F95F6374EF54BDE32C155" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_BTUInternationalIncBTUMergerMember" xlink:label="loc_asys_BTUInternationalIncBTUMergerMember_7CB00AB89B4974563C88F54BDE33162A" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BusinessAcquisitionAcquireeDomain_A66183E8042F95F6374EF54BDE32C155" xlink:to="loc_asys_BTUInternationalIncBTUMergerMember_7CB00AB89B4974563C88F54BDE33162A" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionLineItems" xlink:label="loc_us-gaap_BusinessAcquisitionLineItems_01F4862F98BD845CE083F54BDE33AAF0" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfBusinessAcquisitionsByAcquisitionTable_1E1D7C589270804FD9AFF54BDE31A6F6" xlink:to="loc_us-gaap_BusinessAcquisitionLineItems_01F4862F98BD845CE083F54BDE33AAF0" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNet" xlink:label="loc_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNet_041AB2CF8DF5503E878DF54BDE3385D1" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BusinessAcquisitionLineItems_01F4862F98BD845CE083F54BDE33AAF0" xlink:to="loc_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNet_041AB2CF8DF5503E878DF54BDE3385D1" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_Goodwill" xlink:label="loc_us-gaap_Goodwill_967A6BE0B34FA03BFB53F54BDE3343DF" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BusinessAcquisitionLineItems_01F4862F98BD845CE083F54BDE33AAF0" xlink:to="loc_us-gaap_Goodwill_967A6BE0B34FA03BFB53F54BDE3343DF" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibleAssetsOtherThanGoodwill" xlink:label="loc_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibleAssetsOtherThanGoodwill_713264EE8D103495BC1DF54BDE33DA55" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BusinessAcquisitionLineItems_01F4862F98BD845CE083F54BDE33AAF0" xlink:to="loc_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibleAssetsOtherThanGoodwill_713264EE8D103495BC1DF54BDE33DA55" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredGoodwillAndLiabilitiesAssumedNet" xlink:label="loc_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredGoodwillAndLiabilitiesAssumedNet_D13ABFA0684FCC1D29E3F54BDE338B96" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BusinessAcquisitionLineItems_01F4862F98BD845CE083F54BDE33AAF0" xlink:to="loc_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredGoodwillAndLiabilitiesAssumedNet_D13ABFA0684FCC1D29E3F54BDE338B96" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetUsefulLife" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetUsefulLife_61819B34772EFFF93D0AF54BDE33014E" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BusinessAcquisitionLineItems_01F4862F98BD845CE083F54BDE33AAF0" xlink:to="loc_us-gaap_FiniteLivedIntangibleAssetUsefulLife_61819B34772EFFF93D0AF54BDE33014E" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GoodwillAcquiredDuringPeriod" xlink:label="loc_us-gaap_GoodwillAcquiredDuringPeriod_2D5335C2789FA272E7E8F54BDE333453" xlink:type="locator" />
    <presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BusinessAcquisitionLineItems_01F4862F98BD845CE083F54BDE33AAF0" xlink:to="loc_us-gaap_GoodwillAcquiredDuringPeriod_2D5335C2789FA272E7E8F54BDE333453" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessCombinationAcquisitionRelatedCosts" xlink:label="loc_us-gaap_BusinessCombinationAcquisitionRelatedCosts_06DFF24705CA34CE117EF54BDE33C049" xlink:type="locator" />
    <presentationArc order="7" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BusinessAcquisitionLineItems_01F4862F98BD845CE083F54BDE33AAF0" xlink:to="loc_us-gaap_BusinessCombinationAcquisitionRelatedCosts_06DFF24705CA34CE117EF54BDE33C049" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.amtechsystems.com/role/AcquisitionConsiderationTransferredDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessCombinationsAbstract" xlink:label="loc_us-gaap_BusinessCombinationsAbstract_FE49C1566214E82B58C3F541EED1E21F" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfBusinessAcquisitionsByAcquisitionTable" xlink:label="loc_us-gaap_ScheduleOfBusinessAcquisitionsByAcquisitionTable_277B384D8CD2FC186B51F541EED15908" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BusinessCombinationsAbstract_FE49C1566214E82B58C3F541EED1E21F" xlink:to="loc_us-gaap_ScheduleOfBusinessAcquisitionsByAcquisitionTable_277B384D8CD2FC186B51F541EED15908" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionAxis" xlink:label="loc_us-gaap_BusinessAcquisitionAxis_19005C95A4F550074A42F541EED15779" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfBusinessAcquisitionsByAcquisitionTable_277B384D8CD2FC186B51F541EED15908" xlink:to="loc_us-gaap_BusinessAcquisitionAxis_19005C95A4F550074A42F541EED15779" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionAcquireeDomain" xlink:label="loc_us-gaap_BusinessAcquisitionAcquireeDomain_AF4AEDC73B31FB84908FF541EED1A9C6" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BusinessAcquisitionAxis_19005C95A4F550074A42F541EED15779" xlink:to="loc_us-gaap_BusinessAcquisitionAcquireeDomain_AF4AEDC73B31FB84908FF541EED1A9C6" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_BTUInternationalIncBTUMergerMember" xlink:label="loc_asys_BTUInternationalIncBTUMergerMember_BB532829930E0DB81CE1F541EED1D0DD" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BusinessAcquisitionAcquireeDomain_AF4AEDC73B31FB84908FF541EED1A9C6" xlink:to="loc_asys_BTUInternationalIncBTUMergerMember_BB532829930E0DB81CE1F541EED1D0DD" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StatementClassOfStockAxis" xlink:label="loc_us-gaap_StatementClassOfStockAxis_226CA62B60D56478F1F2F541EED2C636" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfBusinessAcquisitionsByAcquisitionTable_277B384D8CD2FC186B51F541EED15908" xlink:to="loc_us-gaap_StatementClassOfStockAxis_226CA62B60D56478F1F2F541EED2C636" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ClassOfStockDomain" xlink:label="loc_us-gaap_ClassOfStockDomain_C23D11B756B4ED29CD90F541EED25335" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementClassOfStockAxis_226CA62B60D56478F1F2F541EED2C636" xlink:to="loc_us-gaap_ClassOfStockDomain_C23D11B756B4ED29CD90F541EED25335" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_CommonAndRestrictedSharesMember" xlink:label="loc_asys_CommonAndRestrictedSharesMember_382DA5F3F97F468B1C08F541EED23267" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ClassOfStockDomain_C23D11B756B4ED29CD90F541EED25335" xlink:to="loc_asys_CommonAndRestrictedSharesMember_382DA5F3F97F468B1C08F541EED23267" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EmployeeStockOptionMember" xlink:label="loc_us-gaap_EmployeeStockOptionMember_C8C47F866CA4E700048AF541EED20030" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ClassOfStockDomain_C23D11B756B4ED29CD90F541EED25335" xlink:to="loc_us-gaap_EmployeeStockOptionMember_C8C47F866CA4E700048AF541EED20030" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionLineItems" xlink:label="loc_us-gaap_BusinessAcquisitionLineItems_983586B32D69B87A5D72F541EED2BE9E" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfBusinessAcquisitionsByAcquisitionTable_277B384D8CD2FC186B51F541EED15908" xlink:to="loc_us-gaap_BusinessAcquisitionLineItems_983586B32D69B87A5D72F541EED2BE9E" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConversionOfStockSharesConverted1" xlink:label="loc_us-gaap_ConversionOfStockSharesConverted1_E1CC3638CCA60920E944F541EED2B8CA" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BusinessAcquisitionLineItems_983586B32D69B87A5D72F541EED2BE9E" xlink:to="loc_us-gaap_ConversionOfStockSharesConverted1_E1CC3638CCA60920E944F541EED2B8CA" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_ConversionOfStockConversionRatioSharesOfStockExchangedPerEachShareOfSubsidiaryStock" xlink:label="loc_asys_ConversionOfStockConversionRatioSharesOfStockExchangedPerEachShareOfSubsidiaryStock_8120351568A86EC3A474F541EED228FE" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BusinessAcquisitionLineItems_983586B32D69B87A5D72F541EED2BE9E" xlink:to="loc_asys_ConversionOfStockConversionRatioSharesOfStockExchangedPerEachShareOfSubsidiaryStock_8120351568A86EC3A474F541EED228FE" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NoncashOrPartNoncashAcquisitionNoncashFinancialOrEquityInstrumentConsiderationSharesIssued1" xlink:label="loc_us-gaap_NoncashOrPartNoncashAcquisitionNoncashFinancialOrEquityInstrumentConsiderationSharesIssued1_D47702AA8C4E68E67909F541EED2B7F4" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BusinessAcquisitionLineItems_983586B32D69B87A5D72F541EED2BE9E" xlink:to="loc_us-gaap_NoncashOrPartNoncashAcquisitionNoncashFinancialOrEquityInstrumentConsiderationSharesIssued1_D47702AA8C4E68E67909F541EED2B7F4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SharePrice" xlink:label="loc_us-gaap_SharePrice_3FD576F53A93FE35F949F541EED209F3" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BusinessAcquisitionLineItems_983586B32D69B87A5D72F541EED2BE9E" xlink:to="loc_us-gaap_SharePrice_3FD576F53A93FE35F949F541EED209F3" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_BusinessCombinationConsiderationTransferredForCommonAndRestrictedStockUnits" xlink:label="loc_asys_BusinessCombinationConsiderationTransferredForCommonAndRestrictedStockUnits_F84BA34FA2DBF5AD1244F541EED39497" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BusinessAcquisitionLineItems_983586B32D69B87A5D72F541EED2BE9E" xlink:to="loc_asys_BusinessCombinationConsiderationTransferredForCommonAndRestrictedStockUnits_F84BA34FA2DBF5AD1244F541EED39497" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessCombinationConsiderationTransferred1" xlink:label="loc_us-gaap_BusinessCombinationConsiderationTransferred1_F1577D6C1627CDF90445F541EED8BD26" xlink:type="locator" />
    <presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BusinessAcquisitionLineItems_983586B32D69B87A5D72F541EED2BE9E" xlink:to="loc_us-gaap_BusinessCombinationConsiderationTransferred1_F1577D6C1627CDF90445F541EED8BD26" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.amtechsystems.com/role/AcquisitionDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessCombinationsAbstract" xlink:label="loc_us-gaap_BusinessCombinationsAbstract_95A69EC39C1350F00012F541ED822C58" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfBusinessAcquisitionsByAcquisitionTable" xlink:label="loc_us-gaap_ScheduleOfBusinessAcquisitionsByAcquisitionTable_1BDC21959B82C08BF482F541ED8218AF" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BusinessCombinationsAbstract_95A69EC39C1350F00012F541ED822C58" xlink:to="loc_us-gaap_ScheduleOfBusinessAcquisitionsByAcquisitionTable_1BDC21959B82C08BF482F541ED8218AF" xlink:type="arc" />
    <loc xlink:href="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd#dei_LegalEntityAxis" xlink:label="loc_dei_LegalEntityAxis_48415A109ACAC6CDA197F541ED823555" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfBusinessAcquisitionsByAcquisitionTable_1BDC21959B82C08BF482F541ED8218AF" xlink:to="loc_dei_LegalEntityAxis_48415A109ACAC6CDA197F541ED823555" xlink:type="arc" />
    <loc xlink:href="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd#dei_EntityDomain" xlink:label="loc_dei_EntityDomain_357A5F16BE1133AAAE0AF541ED8243E2" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_LegalEntityAxis_48415A109ACAC6CDA197F541ED823555" xlink:to="loc_dei_EntityDomain_357A5F16BE1133AAAE0AF541ED8243E2" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_BTUInternationalIncBTUMergerMember" xlink:label="loc_asys_BTUInternationalIncBTUMergerMember_A8E3D22EF2D4ECC5D2F7F541ED82F6ED" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_EntityDomain_357A5F16BE1133AAAE0AF541ED8243E2" xlink:to="loc_asys_BTUInternationalIncBTUMergerMember_A8E3D22EF2D4ECC5D2F7F541ED82F6ED" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ParentCompanyMember" xlink:label="loc_us-gaap_ParentCompanyMember_4274ABDFEDB55B61756BF541ED8232F7" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_EntityDomain_357A5F16BE1133AAAE0AF541ED8243E2" xlink:to="loc_us-gaap_ParentCompanyMember_4274ABDFEDB55B61756BF541ED8232F7" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RelatedPartyTransactionAxis" xlink:label="loc_us-gaap_RelatedPartyTransactionAxis_03D0132D2FEBC17676B7F541ED833DC6" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfBusinessAcquisitionsByAcquisitionTable_1BDC21959B82C08BF482F541ED8218AF" xlink:to="loc_us-gaap_RelatedPartyTransactionAxis_03D0132D2FEBC17676B7F541ED833DC6" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RelatedPartyTransactionDomain" xlink:label="loc_us-gaap_RelatedPartyTransactionDomain_424AC8637604BBAC9B0DF541ED831679" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RelatedPartyTransactionAxis_03D0132D2FEBC17676B7F541ED833DC6" xlink:to="loc_us-gaap_RelatedPartyTransactionDomain_424AC8637604BBAC9B0DF541ED831679" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_MergerAgreementMember" xlink:label="loc_asys_MergerAgreementMember_AD9AA88DD3C7FA638A53F541ED83656C" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RelatedPartyTransactionDomain_424AC8637604BBAC9B0DF541ED831679" xlink:to="loc_asys_MergerAgreementMember_AD9AA88DD3C7FA638A53F541ED83656C" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionAxis" xlink:label="loc_us-gaap_BusinessAcquisitionAxis_584C858801A3F8DEAC7FF541ED83BDC4" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfBusinessAcquisitionsByAcquisitionTable_1BDC21959B82C08BF482F541ED8218AF" xlink:to="loc_us-gaap_BusinessAcquisitionAxis_584C858801A3F8DEAC7FF541ED83BDC4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionAcquireeDomain" xlink:label="loc_us-gaap_BusinessAcquisitionAcquireeDomain_6777228E21451B3EEF7FF541ED838DA0" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BusinessAcquisitionAxis_584C858801A3F8DEAC7FF541ED83BDC4" xlink:to="loc_us-gaap_BusinessAcquisitionAcquireeDomain_6777228E21451B3EEF7FF541ED838DA0" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_SoLayTecB.V.Member" xlink:label="loc_asys_SoLayTecB.V.Member_7597889C1E19B795F623F541ED838E98" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BusinessAcquisitionAcquireeDomain_6777228E21451B3EEF7FF541ED838DA0" xlink:to="loc_asys_SoLayTecB.V.Member_7597889C1E19B795F623F541ED838E98" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionLineItems" xlink:label="loc_us-gaap_BusinessAcquisitionLineItems_00A5C03701AC06A15762F541ED8338D2" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfBusinessAcquisitionsByAcquisitionTable_1BDC21959B82C08BF482F541ED8218AF" xlink:to="loc_us-gaap_BusinessAcquisitionLineItems_00A5C03701AC06A15762F541ED8338D2" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConversionOfStockSharesIssued1" xlink:label="loc_us-gaap_ConversionOfStockSharesIssued1_D2B18A6F9C40B7A0E6B3F541ED83B5FB" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BusinessAcquisitionLineItems_00A5C03701AC06A15762F541ED8338D2" xlink:to="loc_us-gaap_ConversionOfStockSharesIssued1_D2B18A6F9C40B7A0E6B3F541ED83B5FB" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_ConversionOfStockConversionRatioSharesOfStockExchangedPerEachShareOfSubsidiaryStock" xlink:label="loc_asys_ConversionOfStockConversionRatioSharesOfStockExchangedPerEachShareOfSubsidiaryStock_3B3C7CD7D03A6A830AE6F541ED838715" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BusinessAcquisitionLineItems_00A5C03701AC06A15762F541ED8338D2" xlink:to="loc_asys_ConversionOfStockConversionRatioSharesOfStockExchangedPerEachShareOfSubsidiaryStock_3B3C7CD7D03A6A830AE6F541ED838715" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionPercentageOfVotingInterestsAcquired" xlink:label="loc_us-gaap_BusinessAcquisitionPercentageOfVotingInterestsAcquired_25F9301B7EB5A57B6738F541ED839DAB" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BusinessAcquisitionLineItems_00A5C03701AC06A15762F541ED8338D2" xlink:to="loc_us-gaap_BusinessAcquisitionPercentageOfVotingInterestsAcquired_25F9301B7EB5A57B6738F541ED839DAB" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PaymentsToAcquireBusinessesGross" xlink:label="loc_us-gaap_PaymentsToAcquireBusinessesGross_5867924E1D60E151DEE5F541ED8349C1" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BusinessAcquisitionLineItems_00A5C03701AC06A15762F541ED8338D2" xlink:to="loc_us-gaap_PaymentsToAcquireBusinessesGross_5867924E1D60E151DEE5F541ED8349C1" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.amtechsystems.com/role/AcquisitionProFormaDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessCombinationsAbstract" xlink:label="loc_us-gaap_BusinessCombinationsAbstract_4E889B29250F7991B0A3F541EE18B2A1" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfBusinessAcquisitionsByAcquisitionTable" xlink:label="loc_us-gaap_ScheduleOfBusinessAcquisitionsByAcquisitionTable_43FA899F87A97EEFCD1BF541EE1882D8" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BusinessCombinationsAbstract_4E889B29250F7991B0A3F541EE18B2A1" xlink:to="loc_us-gaap_ScheduleOfBusinessAcquisitionsByAcquisitionTable_43FA899F87A97EEFCD1BF541EE1882D8" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionAxis" xlink:label="loc_us-gaap_BusinessAcquisitionAxis_AD85A1A95C76A74B924CF541EE18C097" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfBusinessAcquisitionsByAcquisitionTable_43FA899F87A97EEFCD1BF541EE1882D8" xlink:to="loc_us-gaap_BusinessAcquisitionAxis_AD85A1A95C76A74B924CF541EE18C097" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionAcquireeDomain" xlink:label="loc_us-gaap_BusinessAcquisitionAcquireeDomain_B4254159FB1AEBCA1931F541EE18D466" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BusinessAcquisitionAxis_AD85A1A95C76A74B924CF541EE18C097" xlink:to="loc_us-gaap_BusinessAcquisitionAcquireeDomain_B4254159FB1AEBCA1931F541EE18D466" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_BTUInternationalIncBTUMergerMember" xlink:label="loc_asys_BTUInternationalIncBTUMergerMember_64FFE9FA75E6BE3F3C2DF541EE1841E2" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BusinessAcquisitionAcquireeDomain_B4254159FB1AEBCA1931F541EE18D466" xlink:to="loc_asys_BTUInternationalIncBTUMergerMember_64FFE9FA75E6BE3F3C2DF541EE1841E2" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionLineItems" xlink:label="loc_us-gaap_BusinessAcquisitionLineItems_2725A8BBEE396AC67D31F541EE187F81" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfBusinessAcquisitionsByAcquisitionTable_43FA899F87A97EEFCD1BF541EE1882D8" xlink:to="loc_us-gaap_BusinessAcquisitionLineItems_2725A8BBEE396AC67D31F541EE187F81" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionsProFormaRevenue" xlink:label="loc_us-gaap_BusinessAcquisitionsProFormaRevenue_777D9D13DEE5D0A0A4F4F541EE187E07" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BusinessAcquisitionLineItems_2725A8BBEE396AC67D31F541EE187F81" xlink:to="loc_us-gaap_BusinessAcquisitionsProFormaRevenue_777D9D13DEE5D0A0A4F4F541EE187E07" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionsProFormaNetIncomeLoss" xlink:label="loc_us-gaap_BusinessAcquisitionsProFormaNetIncomeLoss_57CE8F86850F0E399B72F541EE198C92" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BusinessAcquisitionLineItems_2725A8BBEE396AC67D31F541EE187F81" xlink:to="loc_us-gaap_BusinessAcquisitionsProFormaNetIncomeLoss_57CE8F86850F0E399B72F541EE198C92" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionProFormaEarningsPerShareBasic" xlink:label="loc_us-gaap_BusinessAcquisitionProFormaEarningsPerShareBasic_5C4A1CBEA4308C557925F541EE1956CE" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BusinessAcquisitionLineItems_2725A8BBEE396AC67D31F541EE187F81" xlink:to="loc_us-gaap_BusinessAcquisitionProFormaEarningsPerShareBasic_5C4A1CBEA4308C557925F541EE1956CE" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionProFormaEarningsPerShareDiluted" xlink:label="loc_us-gaap_BusinessAcquisitionProFormaEarningsPerShareDiluted_DDBE59F57DB11F2F0B5EF541EE191417" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BusinessAcquisitionLineItems_2725A8BBEE396AC67D31F541EE187F81" xlink:to="loc_us-gaap_BusinessAcquisitionProFormaEarningsPerShareDiluted_DDBE59F57DB11F2F0B5EF541EE191417" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.amtechsystems.com/role/BasisOfPresentation" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:label="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_8FCC32CC3E76EE9BD13DF541EEF54D7B" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OrganizationConsolidationBasisOfPresentationBusinessDescriptionAndAccountingPoliciesTextBlock" xlink:label="loc_us-gaap_OrganizationConsolidationBasisOfPresentationBusinessDescriptionAndAccountingPoliciesTextBlock_2AD84213120FC9D38DDDF541EEF5CCCD" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_8FCC32CC3E76EE9BD13DF541EEF54D7B" xlink:to="loc_us-gaap_OrganizationConsolidationBasisOfPresentationBusinessDescriptionAndAccountingPoliciesTextBlock_2AD84213120FC9D38DDDF541EEF5CCCD" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.amtechsystems.com/role/BasisOfPresentationCashEquivalentsDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:label="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_4A59F1EDCEC4C7EE8943F541ED2EB528" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MoneyMarketFundsAtCarryingValue" xlink:label="loc_us-gaap_MoneyMarketFundsAtCarryingValue_B263CAF90ECBE41A0C8FF541ED2E31F6" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_4A59F1EDCEC4C7EE8943F541ED2EB528" xlink:to="loc_us-gaap_MoneyMarketFundsAtCarryingValue_B263CAF90ECBE41A0C8FF541ED2E31F6" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.amtechsystems.com/role/BasisOfPresentationConcentrationsOfCreditRiskDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:label="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_9A83C3BDD9F7B5547A16F541EE2AA652" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskTable" xlink:label="loc_us-gaap_ConcentrationRiskTable_3FBE894DE5B6F84CF7E0F541EE2A12FD" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_9A83C3BDD9F7B5547A16F541EE2AA652" xlink:to="loc_us-gaap_ConcentrationRiskTable_3FBE894DE5B6F84CF7E0F541EE2A12FD" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StatementGeographicalAxis" xlink:label="loc_us-gaap_StatementGeographicalAxis_CEB3B8371A444CEB6D42F541EE2AF3F0" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ConcentrationRiskTable_3FBE894DE5B6F84CF7E0F541EE2A12FD" xlink:to="loc_us-gaap_StatementGeographicalAxis_CEB3B8371A444CEB6D42F541EE2AF3F0" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SegmentGeographicalDomain" xlink:label="loc_us-gaap_SegmentGeographicalDomain_356B648B03ED065917EEF541EE2A1E8F" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementGeographicalAxis_CEB3B8371A444CEB6D42F541EE2AF3F0" xlink:to="loc_us-gaap_SegmentGeographicalDomain_356B648B03ED065917EEF541EE2A1E8F" xlink:type="arc" />
    <loc xlink:href="http://xbrl.sec.gov/country/2013/country-2013-01-31.xsd#country_US" xlink:label="loc_country_US_DC0F0A92BC79EB5CAF7FF541EE2B9C75" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentGeographicalDomain_356B648B03ED065917EEF541EE2A1E8F" xlink:to="loc_country_US_DC0F0A92BC79EB5CAF7FF541EE2B9C75" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskByBenchmarkAxis" xlink:label="loc_us-gaap_ConcentrationRiskByBenchmarkAxis_951C3AC4ADC5C6F815ABF541EE2B6BAB" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ConcentrationRiskTable_3FBE894DE5B6F84CF7E0F541EE2A12FD" xlink:to="loc_us-gaap_ConcentrationRiskByBenchmarkAxis_951C3AC4ADC5C6F815ABF541EE2B6BAB" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskBenchmarkDomain" xlink:label="loc_us-gaap_ConcentrationRiskBenchmarkDomain_2537EAA9309E7C480759F541EE2B8AED" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ConcentrationRiskByBenchmarkAxis_951C3AC4ADC5C6F815ABF541EE2B6BAB" xlink:to="loc_us-gaap_ConcentrationRiskBenchmarkDomain_2537EAA9309E7C480759F541EE2B8AED" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_CashAndCashEquivalentsAndRestrictedCashMember" xlink:label="loc_asys_CashAndCashEquivalentsAndRestrictedCashMember_06A517C55B4025B18D3BF541EE2BE5E4" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ConcentrationRiskBenchmarkDomain_2537EAA9309E7C480759F541EE2B8AED" xlink:to="loc_asys_CashAndCashEquivalentsAndRestrictedCashMember_06A517C55B4025B18D3BF541EE2BE5E4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AccountsReceivableMember" xlink:label="loc_us-gaap_AccountsReceivableMember_208C7E45F4348E43946EF541EE2BDFB3" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ConcentrationRiskBenchmarkDomain_2537EAA9309E7C480759F541EE2B8AED" xlink:to="loc_us-gaap_AccountsReceivableMember_208C7E45F4348E43946EF541EE2BDFB3" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskByTypeAxis" xlink:label="loc_us-gaap_ConcentrationRiskByTypeAxis_E95F5147E267B7B7B547F541EE2B85A9" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ConcentrationRiskTable_3FBE894DE5B6F84CF7E0F541EE2A12FD" xlink:to="loc_us-gaap_ConcentrationRiskByTypeAxis_E95F5147E267B7B7B547F541EE2B85A9" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskTypeDomain" xlink:label="loc_us-gaap_ConcentrationRiskTypeDomain_8C7E16088DDED601CA55F541EE2B108C" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ConcentrationRiskByTypeAxis_E95F5147E267B7B7B547F541EE2B85A9" xlink:to="loc_us-gaap_ConcentrationRiskTypeDomain_8C7E16088DDED601CA55F541EE2B108C" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_CustomerOneMember" xlink:label="loc_asys_CustomerOneMember_683C9B9307AB3EDA159FF541EE2C7D74" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ConcentrationRiskTypeDomain_8C7E16088DDED601CA55F541EE2B108C" xlink:to="loc_asys_CustomerOneMember_683C9B9307AB3EDA159FF541EE2C7D74" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskLineItems" xlink:label="loc_us-gaap_ConcentrationRiskLineItems_D137F9DBCCB8DD4E4A0EF541EE2C86B3" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ConcentrationRiskTable_3FBE894DE5B6F84CF7E0F541EE2A12FD" xlink:to="loc_us-gaap_ConcentrationRiskLineItems_D137F9DBCCB8DD4E4A0EF541EE2C86B3" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskPercentage1" xlink:label="loc_us-gaap_ConcentrationRiskPercentage1_0422C94D66F14CA6A41FF541EE2CF1D3" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ConcentrationRiskLineItems_D137F9DBCCB8DD4E4A0EF541EE2C86B3" xlink:to="loc_us-gaap_ConcentrationRiskPercentage1_0422C94D66F14CA6A41FF541EE2CF1D3" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_NumberOfCustomers" xlink:label="loc_asys_NumberOfCustomers_A27C5E4838E87A440B38F541EE2CBB73" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ConcentrationRiskLineItems_D137F9DBCCB8DD4E4A0EF541EE2C86B3" xlink:to="loc_asys_NumberOfCustomers_A27C5E4838E87A440B38F541EE2CBB73" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.amtechsystems.com/role/BasisOfPresentationDeferredProfitDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:label="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_F6C5688C3AEAAF51C191F541EF0542F7" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DeferredRevenue" xlink:label="loc_us-gaap_DeferredRevenue_09C02BCC146C54522124F541EF05C0DD" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_F6C5688C3AEAAF51C191F541EF0542F7" xlink:to="loc_us-gaap_DeferredRevenue_09C02BCC146C54522124F541EF05C0DD" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DeferredCostsCurrent" xlink:label="loc_us-gaap_DeferredCostsCurrent_CB7BE3CA1961A61B6082F541EF0555E4" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_F6C5688C3AEAAF51C191F541EF0542F7" xlink:to="loc_us-gaap_DeferredCostsCurrent_CB7BE3CA1961A61B6082F541EF0555E4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherDeferredCreditsCurrent" xlink:label="loc_us-gaap_OtherDeferredCreditsCurrent_001C6A4D5DDF51F838B6F541EF055027" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_F6C5688C3AEAAF51C191F541EF0542F7" xlink:to="loc_us-gaap_OtherDeferredCreditsCurrent_001C6A4D5DDF51F838B6F541EF055027" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.amtechsystems.com/role/BasisOfPresentationGoodwillDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:label="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_3B318806A0C37FF1B484007D9874CB3E" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfGoodwillTable" xlink:label="loc_us-gaap_ScheduleOfGoodwillTable_98DBCC557D624A5CB38A007D98740AD5" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_3B318806A0C37FF1B484007D9874CB3E" xlink:to="loc_us-gaap_ScheduleOfGoodwillTable_98DBCC557D624A5CB38A007D98740AD5" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StatementBusinessSegmentsAxis" xlink:label="loc_us-gaap_StatementBusinessSegmentsAxis_A5AA0F22463CC17D0E4A007D987419BC" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfGoodwillTable_98DBCC557D624A5CB38A007D98740AD5" xlink:to="loc_us-gaap_StatementBusinessSegmentsAxis_A5AA0F22463CC17D0E4A007D987419BC" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SegmentDomain" xlink:label="loc_us-gaap_SegmentDomain_A37A92903AE6912C6994007D9874B9CE" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementBusinessSegmentsAxis_A5AA0F22463CC17D0E4A007D987419BC" xlink:to="loc_us-gaap_SegmentDomain_A37A92903AE6912C6994007D9874B9CE" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_SolarEquipmentMember" xlink:label="loc_asys_SolarEquipmentMember_9B3C1CA037829A6990F1007D9874E71C" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentDomain_A37A92903AE6912C6994007D9874B9CE" xlink:to="loc_asys_SolarEquipmentMember_9B3C1CA037829A6990F1007D9874E71C" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_SemiconductorEquipmentMember" xlink:label="loc_asys_SemiconductorEquipmentMember_23041D6FAF48BE1900E0007D98743874" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentDomain_A37A92903AE6912C6994007D9874B9CE" xlink:to="loc_asys_SemiconductorEquipmentMember_23041D6FAF48BE1900E0007D98743874" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_PolishingSuppliesAndEquipmentMember" xlink:label="loc_asys_PolishingSuppliesAndEquipmentMember_CC8BAAE2B1553908AA8C007D9875E7AB" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentDomain_A37A92903AE6912C6994007D9874B9CE" xlink:to="loc_asys_PolishingSuppliesAndEquipmentMember_CC8BAAE2B1553908AA8C007D9875E7AB" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GoodwillLineItems" xlink:label="loc_us-gaap_GoodwillLineItems_76247DCC0ADECEEC64E0007D9875BA97" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfGoodwillTable_98DBCC557D624A5CB38A007D98740AD5" xlink:to="loc_us-gaap_GoodwillLineItems_76247DCC0ADECEEC64E0007D9875BA97" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GoodwillRollForward" xlink:label="loc_us-gaap_GoodwillRollForward_94CDBF1774234AF16F93007D98757E35" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_GoodwillLineItems_76247DCC0ADECEEC64E0007D9875BA97" xlink:to="loc_us-gaap_GoodwillRollForward_94CDBF1774234AF16F93007D98757E35" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GoodwillGross" xlink:label="loc_us-gaap_GoodwillGross_BBCA05DC66F423343C6C007D98753156" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_GoodwillRollForward_94CDBF1774234AF16F93007D98757E35" xlink:to="loc_us-gaap_GoodwillGross_BBCA05DC66F423343C6C007D98753156" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GoodwillImpairedAccumulatedImpairmentLoss" xlink:label="loc_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss_F5966101AF55357A55AE007D98758EFA" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2009/role/negatedPeriodStartLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_GoodwillRollForward_94CDBF1774234AF16F93007D98757E35" xlink:to="loc_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss_F5966101AF55357A55AE007D98758EFA" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_Goodwill" xlink:label="loc_us-gaap_Goodwill_89ADB30BA031A07D319A007D9875F037" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_GoodwillRollForward_94CDBF1774234AF16F93007D98757E35" xlink:to="loc_us-gaap_Goodwill_89ADB30BA031A07D319A007D9875F037" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GoodwillAcquiredDuringPeriod" xlink:label="loc_us-gaap_GoodwillAcquiredDuringPeriod_D52F770AFC091A010D2C007D98752498" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_GoodwillRollForward_94CDBF1774234AF16F93007D98757E35" xlink:to="loc_us-gaap_GoodwillAcquiredDuringPeriod_D52F770AFC091A010D2C007D98752498" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GoodwillTranslationAdjustments" xlink:label="loc_us-gaap_GoodwillTranslationAdjustments_727A45583EB2EE52777A007D987558B7" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_GoodwillRollForward_94CDBF1774234AF16F93007D98757E35" xlink:to="loc_us-gaap_GoodwillTranslationAdjustments_727A45583EB2EE52777A007D987558B7" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GoodwillGross" xlink:label="loc_us-gaap_GoodwillGross_B7F3C9C6E7FCE3DBE36B007D9876E670" xlink:type="locator" />
    <presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_GoodwillRollForward_94CDBF1774234AF16F93007D98757E35" xlink:to="loc_us-gaap_GoodwillGross_B7F3C9C6E7FCE3DBE36B007D9876E670" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GoodwillImpairedAccumulatedImpairmentLoss" xlink:label="loc_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss_F7C2CB50B0DA3F6A4E09007D9876B63C" xlink:type="locator" />
    <presentationArc order="7" preferredLabel="http://www.xbrl.org/2009/role/negatedPeriodEndLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_GoodwillRollForward_94CDBF1774234AF16F93007D98757E35" xlink:to="loc_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss_F7C2CB50B0DA3F6A4E09007D9876B63C" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_Goodwill" xlink:label="loc_us-gaap_Goodwill_860EAC5FBC0F2B05AA09007D98764374" xlink:type="locator" />
    <presentationArc order="8" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_GoodwillRollForward_94CDBF1774234AF16F93007D98757E35" xlink:to="loc_us-gaap_Goodwill_860EAC5FBC0F2B05AA09007D98764374" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.amtechsystems.com/role/BasisOfPresentationIntangiblesDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:label="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_60201A73D6E457179C79F54BDEC233B5" xlink:type="locator" />
    <loc xlink:href="asys-20150630.xsd#asys_ScheduleOfAcquiredFiniteAndIndefiniteLivedIntangibleAssetByMajorClassTable" xlink:label="loc_asys_ScheduleOfAcquiredFiniteAndIndefiniteLivedIntangibleAssetByMajorClassTable_A445E375B8811DA73338F54BDEC2E013" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_60201A73D6E457179C79F54BDEC233B5" xlink:to="loc_asys_ScheduleOfAcquiredFiniteAndIndefiniteLivedIntangibleAssetByMajorClassTable_A445E375B8811DA73338F54BDEC2E013" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionAxis" xlink:label="loc_us-gaap_BusinessAcquisitionAxis_6C68AC094AA30620A942F54BDEC2BC88" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_asys_ScheduleOfAcquiredFiniteAndIndefiniteLivedIntangibleAssetByMajorClassTable_A445E375B8811DA73338F54BDEC2E013" xlink:to="loc_us-gaap_BusinessAcquisitionAxis_6C68AC094AA30620A942F54BDEC2BC88" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionAcquireeDomain" xlink:label="loc_us-gaap_BusinessAcquisitionAcquireeDomain_99E4EBFD70318A130F34F54BDEC26D2B" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BusinessAcquisitionAxis_6C68AC094AA30620A942F54BDEC2BC88" xlink:to="loc_us-gaap_BusinessAcquisitionAcquireeDomain_99E4EBFD70318A130F34F54BDEC26D2B" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_SoLayTecB.V.Member" xlink:label="loc_asys_SoLayTecB.V.Member_2D4537CC3DEDE4E5A3A5F54BDEC2FF88" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BusinessAcquisitionAcquireeDomain_99E4EBFD70318A130F34F54BDEC26D2B" xlink:to="loc_asys_SoLayTecB.V.Member_2D4537CC3DEDE4E5A3A5F54BDEC2FF88" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_BTUInternationalIncBTUMember" xlink:label="loc_asys_BTUInternationalIncBTUMember_9F290DC1209BB5B58238F54BDEC273B0" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BusinessAcquisitionAcquireeDomain_99E4EBFD70318A130F34F54BDEC26D2B" xlink:to="loc_asys_BTUInternationalIncBTUMember_9F290DC1209BB5B58238F54BDEC273B0" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_F20E3CEA473598DAB969F54BDEC21B4D" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_asys_ScheduleOfAcquiredFiniteAndIndefiniteLivedIntangibleAssetByMajorClassTable_A445E375B8811DA73338F54BDEC2E013" xlink:to="loc_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_F20E3CEA473598DAB969F54BDEC21B4D" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_583633BA32AB606579C3F54BDEC203A7" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_F20E3CEA473598DAB969F54BDEC21B4D" xlink:to="loc_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_583633BA32AB606579C3F54BDEC203A7" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NoncompeteAgreementsMember" xlink:label="loc_us-gaap_NoncompeteAgreementsMember_1AE693781B5332EEC0E5F54BDEC3671B" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_583633BA32AB606579C3F54BDEC203A7" xlink:to="loc_us-gaap_NoncompeteAgreementsMember_1AE693781B5332EEC0E5F54BDEC3671B" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CustomerListsMember" xlink:label="loc_us-gaap_CustomerListsMember_7D9C7F620AFDF2FD88A4F54BDEC39F47" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_583633BA32AB606579C3F54BDEC203A7" xlink:to="loc_us-gaap_CustomerListsMember_7D9C7F620AFDF2FD88A4F54BDEC39F47" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PatentedTechnologyMember" xlink:label="loc_us-gaap_PatentedTechnologyMember_9599A399DBCF48EBDB08F54BDEC3DB8E" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_583633BA32AB606579C3F54BDEC203A7" xlink:to="loc_us-gaap_PatentedTechnologyMember_9599A399DBCF48EBDB08F54BDEC3DB8E" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_InProcessResearchAndDevelopmentMember" xlink:label="loc_us-gaap_InProcessResearchAndDevelopmentMember_3E38FB136113E4CEBEA9F54BDEC32C04" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_583633BA32AB606579C3F54BDEC203A7" xlink:to="loc_us-gaap_InProcessResearchAndDevelopmentMember_3E38FB136113E4CEBEA9F54BDEC32C04" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_TradeNamesMember" xlink:label="loc_us-gaap_TradeNamesMember_05BBC80B36A632A59EA5F54BDEC3E4AB" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_583633BA32AB606579C3F54BDEC203A7" xlink:to="loc_us-gaap_TradeNamesMember_05BBC80B36A632A59EA5F54BDEC3E4AB" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherIntangibleAssetsMember" xlink:label="loc_us-gaap_OtherIntangibleAssetsMember_7A317E3A5211279CB05FF54BDEC3F6AF" xlink:type="locator" />
    <presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_583633BA32AB606579C3F54BDEC203A7" xlink:to="loc_us-gaap_OtherIntangibleAssetsMember_7A317E3A5211279CB05FF54BDEC3F6AF" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeAxis" xlink:label="loc_us-gaap_RangeAxis_94D07FD17C36706EC574F54BDEC345B4" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_asys_ScheduleOfAcquiredFiniteAndIndefiniteLivedIntangibleAssetByMajorClassTable_A445E375B8811DA73338F54BDEC2E013" xlink:to="loc_us-gaap_RangeAxis_94D07FD17C36706EC574F54BDEC345B4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeMember" xlink:label="loc_us-gaap_RangeMember_24CA7F49544978CD0CADF54BDEC3616E" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RangeAxis_94D07FD17C36706EC574F54BDEC345B4" xlink:to="loc_us-gaap_RangeMember_24CA7F49544978CD0CADF54BDEC3616E" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MinimumMember" xlink:label="loc_us-gaap_MinimumMember_7A81C9F51F847BF444A5F54BDEC35646" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RangeMember_24CA7F49544978CD0CADF54BDEC3616E" xlink:to="loc_us-gaap_MinimumMember_7A81C9F51F847BF444A5F54BDEC35646" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MaximumMember" xlink:label="loc_us-gaap_MaximumMember_7A2AB52D1B13498AE4DCF54BDEC336CD" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RangeMember_24CA7F49544978CD0CADF54BDEC3616E" xlink:to="loc_us-gaap_MaximumMember_7A2AB52D1B13498AE4DCF54BDEC336CD" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems" xlink:label="loc_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems_05D961EEF34725D95806F54BDEC450F3" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_asys_ScheduleOfAcquiredFiniteAndIndefiniteLivedIntangibleAssetByMajorClassTable_A445E375B8811DA73338F54BDEC2E013" xlink:to="loc_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems_05D961EEF34725D95806F54BDEC450F3" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionPercentageOfVotingInterestsAcquired" xlink:label="loc_us-gaap_BusinessAcquisitionPercentageOfVotingInterestsAcquired_846D51724CEB78096570F54BDEC46157" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems_05D961EEF34725D95806F54BDEC450F3" xlink:to="loc_us-gaap_BusinessAcquisitionPercentageOfVotingInterestsAcquired_846D51724CEB78096570F54BDEC46157" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibles" xlink:label="loc_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibles_350BAADC7473DBF1D40BF54BDEC4A21F" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems_05D961EEF34725D95806F54BDEC450F3" xlink:to="loc_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibles_350BAADC7473DBF1D40BF54BDEC4A21F" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsGross" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsGross_D5D3865CF157DE4F7777F54BDEC4D7CE" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems_05D961EEF34725D95806F54BDEC450F3" xlink:to="loc_us-gaap_FiniteLivedIntangibleAssetsGross_D5D3865CF157DE4F7777F54BDEC4D7CE" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization_BD21100143F9CCE582D1F54BDEC4C765" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems_05D961EEF34725D95806F54BDEC450F3" xlink:to="loc_us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization_BD21100143F9CCE582D1F54BDEC4C765" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsNet" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsNet_10BDA651F307890E502EF54BDEC4B989" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems_05D961EEF34725D95806F54BDEC450F3" xlink:to="loc_us-gaap_FiniteLivedIntangibleAssetsNet_10BDA651F307890E502EF54BDEC4B989" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetUsefulLife" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetUsefulLife_2D1D520FF8879BA6594CF54BDEC47BF4" xlink:type="locator" />
    <presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems_05D961EEF34725D95806F54BDEC450F3" xlink:to="loc_us-gaap_FiniteLivedIntangibleAssetUsefulLife_2D1D520FF8879BA6594CF54BDEC47BF4" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.amtechsystems.com/role/BasisOfPresentationInventoriesDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:label="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_C91E36BB829D50FA166CF541EF0E560A" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PercentageOfWeightedAverageCostInventory" xlink:label="loc_us-gaap_PercentageOfWeightedAverageCostInventory_76163083A84C54865927F541EF0E0D36" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_C91E36BB829D50FA166CF541EF0E560A" xlink:to="loc_us-gaap_PercentageOfWeightedAverageCostInventory_76163083A84C54865927F541EF0E0D36" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_InventoryNetAbstract" xlink:label="loc_us-gaap_InventoryNetAbstract_FE031A243B460C9A87ABF541EF0EA862" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_C91E36BB829D50FA166CF541EF0E560A" xlink:to="loc_us-gaap_InventoryNetAbstract_FE031A243B460C9A87ABF541EF0EA862" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_InventoryRawMaterialsAndSuppliesNetOfReserves" xlink:label="loc_us-gaap_InventoryRawMaterialsAndSuppliesNetOfReserves_8944340B33BD1F67C1D7F541EF0EA1B9" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_InventoryNetAbstract_FE031A243B460C9A87ABF541EF0EA862" xlink:to="loc_us-gaap_InventoryRawMaterialsAndSuppliesNetOfReserves_8944340B33BD1F67C1D7F541EF0EA1B9" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_InventoryWorkInProcessNetOfReserves" xlink:label="loc_us-gaap_InventoryWorkInProcessNetOfReserves_3E9AD875FA2B4222DA17F541EF0E739A" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_InventoryNetAbstract_FE031A243B460C9A87ABF541EF0EA862" xlink:to="loc_us-gaap_InventoryWorkInProcessNetOfReserves_3E9AD875FA2B4222DA17F541EF0E739A" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_InventoryFinishedGoodsNetOfReserves" xlink:label="loc_us-gaap_InventoryFinishedGoodsNetOfReserves_378B9EA605745E1DC243F541EF0F5A42" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_InventoryNetAbstract_FE031A243B460C9A87ABF541EF0EA862" xlink:to="loc_us-gaap_InventoryFinishedGoodsNetOfReserves_378B9EA605745E1DC243F541EF0F5A42" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_InventoryNet" xlink:label="loc_us-gaap_InventoryNet_F94741FB915B0BC3648FF541EF0FB85D" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_InventoryNetAbstract_FE031A243B460C9A87ABF541EF0EA862" xlink:to="loc_us-gaap_InventoryNet_F94741FB915B0BC3648FF541EF0FB85D" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.amtechsystems.com/role/BasisOfPresentationPolicies" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:label="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_61BBA9403604DB919396F541EE633F71" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BasisOfAccountingPolicyPolicyTextBlock" xlink:label="loc_us-gaap_BasisOfAccountingPolicyPolicyTextBlock_7E36D1F1637E78B48B43F541EE63FEC5" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_61BBA9403604DB919396F541EE633F71" xlink:to="loc_us-gaap_BasisOfAccountingPolicyPolicyTextBlock_7E36D1F1637E78B48B43F541EE63FEC5" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConsolidationPolicyTextBlock" xlink:label="loc_us-gaap_ConsolidationPolicyTextBlock_1107391FEA3C37BC911DF541EE63D6BE" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_61BBA9403604DB919396F541EE633F71" xlink:to="loc_us-gaap_ConsolidationPolicyTextBlock_1107391FEA3C37BC911DF541EE63D6BE" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_UseOfEstimates" xlink:label="loc_us-gaap_UseOfEstimates_9FA478409E5B5E659E0EF541EE63E496" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_61BBA9403604DB919396F541EE633F71" xlink:to="loc_us-gaap_UseOfEstimates_9FA478409E5B5E659E0EF541EE63E496" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RevenueRecognitionPolicyTextBlock" xlink:label="loc_us-gaap_RevenueRecognitionPolicyTextBlock_2F1CE1287AB57FD42BE9F541EE649B46" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_61BBA9403604DB919396F541EE633F71" xlink:to="loc_us-gaap_RevenueRecognitionPolicyTextBlock_2F1CE1287AB57FD42BE9F541EE649B46" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RevenueRecognitionDeferredRevenue" xlink:label="loc_us-gaap_RevenueRecognitionDeferredRevenue_CF26DBD2F9E914E33D53F541EE643E42" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_61BBA9403604DB919396F541EE633F71" xlink:to="loc_us-gaap_RevenueRecognitionDeferredRevenue_CF26DBD2F9E914E33D53F541EE643E42" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskCreditRisk" xlink:label="loc_us-gaap_ConcentrationRiskCreditRisk_8B5CD4D236889381E352F541EE64EFD0" xlink:type="locator" />
    <presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_61BBA9403604DB919396F541EE633F71" xlink:to="loc_us-gaap_ConcentrationRiskCreditRisk_8B5CD4D236889381E352F541EE64EFD0" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CashAndCashEquivalentsRestrictedCashAndCashEquivalentsPolicy" xlink:label="loc_us-gaap_CashAndCashEquivalentsRestrictedCashAndCashEquivalentsPolicy_4FE469BD7937F79A5717F541EE644CA2" xlink:type="locator" />
    <presentationArc order="7" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_61BBA9403604DB919396F541EE633F71" xlink:to="loc_us-gaap_CashAndCashEquivalentsRestrictedCashAndCashEquivalentsPolicy_4FE469BD7937F79A5717F541EE644CA2" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ReceivablesPolicyTextBlock" xlink:label="loc_us-gaap_ReceivablesPolicyTextBlock_E0EEF92AE859FE365A94F541EE64942C" xlink:type="locator" />
    <presentationArc order="8" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_61BBA9403604DB919396F541EE633F71" xlink:to="loc_us-gaap_ReceivablesPolicyTextBlock_E0EEF92AE859FE365A94F541EE64942C" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_InventoryPolicyTextBlock" xlink:label="loc_us-gaap_InventoryPolicyTextBlock_4A7FA9D54F1FC59D96F5F541EE649B16" xlink:type="locator" />
    <presentationArc order="9" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_61BBA9403604DB919396F541EE633F71" xlink:to="loc_us-gaap_InventoryPolicyTextBlock_4A7FA9D54F1FC59D96F5F541EE649B16" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PropertyPlantAndEquipmentPolicyTextBlock" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentPolicyTextBlock_7E22660EB68A3DE34576F541EE643929" xlink:type="locator" />
    <presentationArc order="10" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_61BBA9403604DB919396F541EE633F71" xlink:to="loc_us-gaap_PropertyPlantAndEquipmentPolicyTextBlock_7E22660EB68A3DE34576F541EE643929" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GoodwillAndIntangibleAssetsGoodwillPolicy" xlink:label="loc_us-gaap_GoodwillAndIntangibleAssetsGoodwillPolicy_61B85950A23E37E8FC08F541EE643E70" xlink:type="locator" />
    <presentationArc order="11" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_61BBA9403604DB919396F541EE633F71" xlink:to="loc_us-gaap_GoodwillAndIntangibleAssetsGoodwillPolicy_61B85950A23E37E8FC08F541EE643E70" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GoodwillAndIntangibleAssetsIntangibleAssetsPolicy" xlink:label="loc_us-gaap_GoodwillAndIntangibleAssetsIntangibleAssetsPolicy_B00F4253E11352B5F032F541EE64163F" xlink:type="locator" />
    <presentationArc order="12" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_61BBA9403604DB919396F541EE633F71" xlink:to="loc_us-gaap_GoodwillAndIntangibleAssetsIntangibleAssetsPolicy_B00F4253E11352B5F032F541EE64163F" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ImpairmentOrDisposalOfLongLivedAssetsIncludingIntangibleAssetsPolicyPolicyTextBlock" xlink:label="loc_us-gaap_ImpairmentOrDisposalOfLongLivedAssetsIncludingIntangibleAssetsPolicyPolicyTextBlock_E79FEC02ACC0EC5CB237F541EE64699B" xlink:type="locator" />
    <presentationArc order="13" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_61BBA9403604DB919396F541EE633F71" xlink:to="loc_us-gaap_ImpairmentOrDisposalOfLongLivedAssetsIncludingIntangibleAssetsPolicyPolicyTextBlock_E79FEC02ACC0EC5CB237F541EE64699B" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StandardProductWarrantyPolicy" xlink:label="loc_us-gaap_StandardProductWarrantyPolicy_2912E9C46FD45B7D6BAAF541EE64ABF9" xlink:type="locator" />
    <presentationArc order="14" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_61BBA9403604DB919396F541EE633F71" xlink:to="loc_us-gaap_StandardProductWarrantyPolicy_2912E9C46FD45B7D6BAAF541EE64ABF9" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy" xlink:label="loc_us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy_E37852AE518E233D34CCF541EE6A4037" xlink:type="locator" />
    <presentationArc order="15" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_61BBA9403604DB919396F541EE633F71" xlink:to="loc_us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy_E37852AE518E233D34CCF541EE6A4037" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FairValueOfFinancialInstrumentsPolicy" xlink:label="loc_us-gaap_FairValueOfFinancialInstrumentsPolicy_D46BF433717C6ABF427DF541EE6A7952" xlink:type="locator" />
    <presentationArc order="16" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_61BBA9403604DB919396F541EE633F71" xlink:to="loc_us-gaap_FairValueOfFinancialInstrumentsPolicy_D46BF433717C6ABF427DF541EE6A7952" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PensionAndOtherPostretirementPlansPensionsPolicy" xlink:label="loc_us-gaap_PensionAndOtherPostretirementPlansPensionsPolicy_B1F60F8305534394AB81F541EE6A2E71" xlink:type="locator" />
    <presentationArc order="17" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_61BBA9403604DB919396F541EE633F71" xlink:to="loc_us-gaap_PensionAndOtherPostretirementPlansPensionsPolicy_B1F60F8305534394AB81F541EE6A2E71" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShippingAndHandlingCostPolicyTextBlock" xlink:label="loc_us-gaap_ShippingAndHandlingCostPolicyTextBlock_84F9E05724BC47533C2AF541EE6A2211" xlink:type="locator" />
    <presentationArc order="18" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_61BBA9403604DB919396F541EE633F71" xlink:to="loc_us-gaap_ShippingAndHandlingCostPolicyTextBlock_84F9E05724BC47533C2AF541EE6A2211" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ResearchAndDevelopmentExpensePolicy" xlink:label="loc_us-gaap_ResearchAndDevelopmentExpensePolicy_96374624209A02A12F59F541EE6AD736" xlink:type="locator" />
    <presentationArc order="19" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_61BBA9403604DB919396F541EE633F71" xlink:to="loc_us-gaap_ResearchAndDevelopmentExpensePolicy_96374624209A02A12F59F541EE6AD736" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock" xlink:label="loc_us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock_9172704A763445EF1031F541EE6ACA18" xlink:type="locator" />
    <presentationArc order="20" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_61BBA9403604DB919396F541EE633F71" xlink:to="loc_us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock_9172704A763445EF1031F541EE6ACA18" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.amtechsystems.com/role/BasisOfPresentationPropertyPlantAndEquipmentDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:label="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_E7615F1346E8B9E15998F541ED58653F" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfPropertyPlantAndEquipmentTable" xlink:label="loc_us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_481BA4569555BF99F109F541ED58DAE0" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_E7615F1346E8B9E15998F541ED58653F" xlink:to="loc_us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_481BA4569555BF99F109F541ED58DAE0" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PropertyPlantAndEquipmentByTypeAxis" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentByTypeAxis_7813AA948B763E7838A6F541ED59EF21" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_481BA4569555BF99F109F541ED58DAE0" xlink:to="loc_us-gaap_PropertyPlantAndEquipmentByTypeAxis_7813AA948B763E7838A6F541ED59EF21" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentTypeDomain_55E4EB5FC326F343CB57F541ED592FB3" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentByTypeAxis_7813AA948B763E7838A6F541ED59EF21" xlink:to="loc_us-gaap_PropertyPlantAndEquipmentTypeDomain_55E4EB5FC326F343CB57F541ED592FB3" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BuildingAndBuildingImprovementsMember" xlink:label="loc_us-gaap_BuildingAndBuildingImprovementsMember_68B1D22A20A45E72E868F541ED59FE42" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentTypeDomain_55E4EB5FC326F343CB57F541ED592FB3" xlink:to="loc_us-gaap_BuildingAndBuildingImprovementsMember_68B1D22A20A45E72E868F541ED59FE42" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LandBuildingsAndImprovementsMember" xlink:label="loc_us-gaap_LandBuildingsAndImprovementsMember_B4E99308C3A09B1DAEAEF541ED595859" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentTypeDomain_55E4EB5FC326F343CB57F541ED592FB3" xlink:to="loc_us-gaap_LandBuildingsAndImprovementsMember_B4E99308C3A09B1DAEAEF541ED595859" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MachineryAndEquipmentMember" xlink:label="loc_us-gaap_MachineryAndEquipmentMember_13EDAE7B2761704710D4F541ED5957CE" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentTypeDomain_55E4EB5FC326F343CB57F541ED592FB3" xlink:to="loc_us-gaap_MachineryAndEquipmentMember_13EDAE7B2761704710D4F541ED5957CE" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FurnitureAndFixturesMember" xlink:label="loc_us-gaap_FurnitureAndFixturesMember_6B506BEE6BAD79A43BC2F541ED5979BB" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentTypeDomain_55E4EB5FC326F343CB57F541ED592FB3" xlink:to="loc_us-gaap_FurnitureAndFixturesMember_6B506BEE6BAD79A43BC2F541ED5979BB" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LeaseholdImprovementsMember" xlink:label="loc_us-gaap_LeaseholdImprovementsMember_57B30100DFDFFCF6FEABF541ED5967CE" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentTypeDomain_55E4EB5FC326F343CB57F541ED592FB3" xlink:to="loc_us-gaap_LeaseholdImprovementsMember_57B30100DFDFFCF6FEABF541ED5967CE" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeAxis" xlink:label="loc_us-gaap_RangeAxis_4A84BAE60F7BB39D2679F541ED597EB6" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_481BA4569555BF99F109F541ED58DAE0" xlink:to="loc_us-gaap_RangeAxis_4A84BAE60F7BB39D2679F541ED597EB6" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeMember" xlink:label="loc_us-gaap_RangeMember_6CCF91C4DA09C3876C5DF541ED599F3C" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RangeAxis_4A84BAE60F7BB39D2679F541ED597EB6" xlink:to="loc_us-gaap_RangeMember_6CCF91C4DA09C3876C5DF541ED599F3C" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MinimumMember" xlink:label="loc_us-gaap_MinimumMember_8F61D49EF8E492BAFE35F541ED5AB729" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RangeMember_6CCF91C4DA09C3876C5DF541ED599F3C" xlink:to="loc_us-gaap_MinimumMember_8F61D49EF8E492BAFE35F541ED5AB729" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MaximumMember" xlink:label="loc_us-gaap_MaximumMember_97CC56F39FA7378D5F7AF541ED5A1871" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RangeMember_6CCF91C4DA09C3876C5DF541ED599F3C" xlink:to="loc_us-gaap_MaximumMember_97CC56F39FA7378D5F7AF541ED5A1871" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PropertyPlantAndEquipmentLineItems" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentLineItems_7D0ACD321F9C9D7B1F07F541ED5A9E44" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_481BA4569555BF99F109F541ED58DAE0" xlink:to="loc_us-gaap_PropertyPlantAndEquipmentLineItems_7D0ACD321F9C9D7B1F07F541ED5A9E44" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PropertyPlantAndEquipmentUsefulLife" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentUsefulLife_78E010BB09650EEABD7EF541ED5A2258" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentLineItems_7D0ACD321F9C9D7B1F07F541ED5A9E44" xlink:to="loc_us-gaap_PropertyPlantAndEquipmentUsefulLife_78E010BB09650EEABD7EF541ED5A2258" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PropertyPlantAndEquipmentGross" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentGross_62B0F653E4892B1A518AF541ED5A4A5B" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentLineItems_7D0ACD321F9C9D7B1F07F541ED5A9E44" xlink:to="loc_us-gaap_PropertyPlantAndEquipmentGross_62B0F653E4892B1A518AF541ED5A4A5B" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment" xlink:label="loc_us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment_0DF21A1D9FD899A2BAEEF541ED5AA4E4" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentLineItems_7D0ACD321F9C9D7B1F07F541ED5A9E44" xlink:to="loc_us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment_0DF21A1D9FD899A2BAEEF541ED5AA4E4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PropertyPlantAndEquipmentNet" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentNet_BB3C58A55FEB02B01FA7F541ED5A67D5" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentLineItems_7D0ACD321F9C9D7B1F07F541ED5A9E44" xlink:to="loc_us-gaap_PropertyPlantAndEquipmentNet_BB3C58A55FEB02B01FA7F541ED5A67D5" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.amtechsystems.com/role/BasisOfPresentationResearchAndDevelopmentExpenseDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:label="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_A3E29C73E8451EF109F7F541EEFD11F3" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ResearchAndDevelopmentExpense" xlink:label="loc_us-gaap_ResearchAndDevelopmentExpense_84455BE5D38C5881FBF8F541EEFD23D8" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_A3E29C73E8451EF109F7F541EEFD11F3" xlink:to="loc_us-gaap_ResearchAndDevelopmentExpense_84455BE5D38C5881FBF8F541EEFD23D8" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ResearchAndDevelopmentArrangementWithFederalGovernmentCustomerFundingToOffsetCostsIncurred" xlink:label="loc_us-gaap_ResearchAndDevelopmentArrangementWithFederalGovernmentCustomerFundingToOffsetCostsIncurred_F78A0805BB07706A436AF541EEFD6690" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_A3E29C73E8451EF109F7F541EEFD11F3" xlink:to="loc_us-gaap_ResearchAndDevelopmentArrangementWithFederalGovernmentCustomerFundingToOffsetCostsIncurred_F78A0805BB07706A436AF541EEFD6690" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_ResearchAndDevelopmentNetOfGrantsEarned" xlink:label="loc_asys_ResearchAndDevelopmentNetOfGrantsEarned_BF90645C9D9AD49025EBF541EEFD24AE" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_A3E29C73E8451EF109F7F541EEFD11F3" xlink:to="loc_asys_ResearchAndDevelopmentNetOfGrantsEarned_BF90645C9D9AD49025EBF541EEFD24AE" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.amtechsystems.com/role/BasisOfPresentationRestrictedCashDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:label="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_6FEFB80EAD465559A077F541ED13A402" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue" xlink:label="loc_us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue_EAA1748BB1D4E63E9530F541ED146792" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_6FEFB80EAD465559A077F541ED13A402" xlink:to="loc_us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue_EAA1748BB1D4E63E9530F541ED146792" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.amtechsystems.com/role/BasisOfPresentationShippingExpenseDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:label="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_43547DFEA73810B62A33F541ED982133" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShippingHandlingAndTransportationCosts" xlink:label="loc_us-gaap_ShippingHandlingAndTransportationCosts_D56C29471D96BD984A59F541ED9864E2" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_43547DFEA73810B62A33F541ED982133" xlink:to="loc_us-gaap_ShippingHandlingAndTransportationCosts_D56C29471D96BD984A59F541ED9864E2" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.amtechsystems.com/role/BasisOfPresentationStockBasedCompensationDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:label="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_3FEFE99BF3A3E7F4BCB4F54BDEB1702D" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:label="loc_us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_38E35B005F8B0334FF5CF54BDEB1D5EA" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_3FEFE99BF3A3E7F4BCB4F54BDEB1702D" xlink:to="loc_us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_38E35B005F8B0334FF5CF54BDEB1D5EA" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AwardTypeAxis" xlink:label="loc_us-gaap_AwardTypeAxis_368EB854FF72C2387EF1F54BDEB10459" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_38E35B005F8B0334FF5CF54BDEB1D5EA" xlink:to="loc_us-gaap_AwardTypeAxis_368EB854FF72C2387EF1F54BDEB10459" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_C88DD3D92D0A4013BCF3F54BDEB16775" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AwardTypeAxis_368EB854FF72C2387EF1F54BDEB10459" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_C88DD3D92D0A4013BCF3F54BDEB16775" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RestrictedStockMember" xlink:label="loc_us-gaap_RestrictedStockMember_7B8B59D14CA79B08C3C3F54BDEB14798" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_C88DD3D92D0A4013BCF3F54BDEB16775" xlink:to="loc_us-gaap_RestrictedStockMember_7B8B59D14CA79B08C3C3F54BDEB14798" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EmployeeStockOptionMember" xlink:label="loc_us-gaap_EmployeeStockOptionMember_653745BF728821EB994FF54BDEB17D38" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_C88DD3D92D0A4013BCF3F54BDEB16775" xlink:to="loc_us-gaap_EmployeeStockOptionMember_653745BF728821EB994FF54BDEB17D38" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeAxis" xlink:label="loc_us-gaap_RangeAxis_0618CB767D1D0809C252F54BDEB1B1A0" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_38E35B005F8B0334FF5CF54BDEB1D5EA" xlink:to="loc_us-gaap_RangeAxis_0618CB767D1D0809C252F54BDEB1B1A0" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeMember" xlink:label="loc_us-gaap_RangeMember_1C43E21AC8D955CFA3DDF54BDEB136A4" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RangeAxis_0618CB767D1D0809C252F54BDEB1B1A0" xlink:to="loc_us-gaap_RangeMember_1C43E21AC8D955CFA3DDF54BDEB136A4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MaximumMember" xlink:label="loc_us-gaap_MaximumMember_B6D86D89317735F17216F54BDEB20401" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RangeMember_1C43E21AC8D955CFA3DDF54BDEB136A4" xlink:to="loc_us-gaap_MaximumMember_B6D86D89317735F17216F54BDEB20401" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MinimumMember" xlink:label="loc_us-gaap_MinimumMember_D3B9043343D5D76DDA3AF54BDEB2FB3A" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RangeMember_1C43E21AC8D955CFA3DDF54BDEB136A4" xlink:to="loc_us-gaap_MinimumMember_D3B9043343D5D76DDA3AF54BDEB2FB3A" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_1E9F3B5F8240B1EF5DD2F54BDEB22251" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_38E35B005F8B0334FF5CF54BDEB1D5EA" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_1E9F3B5F8240B1EF5DD2F54BDEB22251" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AllocatedShareBasedCompensationExpense" xlink:label="loc_us-gaap_AllocatedShareBasedCompensationExpense_C25AA9D66C27546D0D51F54BDEB27116" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_1E9F3B5F8240B1EF5DD2F54BDEB22251" xlink:to="loc_us-gaap_AllocatedShareBasedCompensationExpense_C25AA9D66C27546D0D51F54BDEB27116" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense" xlink:label="loc_us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense_0AB2A7787DC800DDF078F54BDEB2DF77" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_1E9F3B5F8240B1EF5DD2F54BDEB22251" xlink:to="loc_us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense_0AB2A7787DC800DDF078F54BDEB2DF77" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax" xlink:label="loc_us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax_ED3FCCF1F246CDADEB5CF54BDEB2EDCE" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2009/role/negatedTotalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_1E9F3B5F8240B1EF5DD2F54BDEB22251" xlink:to="loc_us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax_ED3FCCF1F246CDADEB5CF54BDEB2EDCE" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod" xlink:label="loc_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod_ED628BF041FA40DE08BBF54BDEB2F7B5" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_1E9F3B5F8240B1EF5DD2F54BDEB22251" xlink:to="loc_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod_ED628BF041FA40DE08BBF54BDEB2F7B5" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1_CD10D1E266AC58AA2CAEF54BDEB21ACE" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_1E9F3B5F8240B1EF5DD2F54BDEB22251" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1_CD10D1E266AC58AA2CAEF54BDEB21ACE" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_92D2CA83CC3306BB8736F54BDEB272EE" xlink:type="locator" />
    <presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_1E9F3B5F8240B1EF5DD2F54BDEB22251" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_92D2CA83CC3306BB8736F54BDEB272EE" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_81A58146A00054236AF9F54BDEB2061B" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_92D2CA83CC3306BB8736F54BDEB272EE" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_81A58146A00054236AF9F54BDEB2061B" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross_09C448E1AEA559DB1629F54BDEB3CEAA" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_92D2CA83CC3306BB8736F54BDEB272EE" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross_09C448E1AEA559DB1629F54BDEB3CEAA" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_SharebasedCompensationArrangementbySharebasedPaymentAwardOptionsAssumedInMerger" xlink:label="loc_asys_SharebasedCompensationArrangementbySharebasedPaymentAwardOptionsAssumedInMerger_0CD6CFB5D1B02CBA7D81F54BDEB34861" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_92D2CA83CC3306BB8736F54BDEB272EE" xlink:to="loc_asys_SharebasedCompensationArrangementbySharebasedPaymentAwardOptionsAssumedInMerger_0CD6CFB5D1B02CBA7D81F54BDEB34861" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised" xlink:label="loc_us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised_BFFC0686E232A20F4C03F54BDEB315AD" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_92D2CA83CC3306BB8736F54BDEB272EE" xlink:to="loc_us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised_BFFC0686E232A20F4C03F54BDEB315AD" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresInPeriod" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresInPeriod_3C6A0BF4A35C8F4F7155F54BDEB37007" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_92D2CA83CC3306BB8736F54BDEB272EE" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresInPeriod_3C6A0BF4A35C8F4F7155F54BDEB37007" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_2C31844022DCFCCC0E35F54BDEB38C45" xlink:type="locator" />
    <presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_92D2CA83CC3306BB8736F54BDEB272EE" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_2C31844022DCFCCC0E35F54BDEB38C45" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber_403C3F1AF6530052D9BFF54BDEB34F7F" xlink:type="locator" />
    <presentationArc order="7" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_1E9F3B5F8240B1EF5DD2F54BDEB22251" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber_403C3F1AF6530052D9BFF54BDEB34F7F" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageGrantDateFairValue_A4FD78F74B881F375DC3F54BDEB34167" xlink:type="locator" />
    <presentationArc order="8" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_1E9F3B5F8240B1EF5DD2F54BDEB22251" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageGrantDateFairValue_A4FD78F74B881F375DC3F54BDEB34167" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward_BCF414D1BC20C71D8861F54BDEB3EFC8" xlink:type="locator" />
    <presentationArc order="9" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_1E9F3B5F8240B1EF5DD2F54BDEB22251" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward_BCF414D1BC20C71D8861F54BDEB3EFC8" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice_0DA7DC4BFC2C851621C9F54BDEB3DA27" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward_BCF414D1BC20C71D8861F54BDEB3EFC8" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice_0DA7DC4BFC2C851621C9F54BDEB3DA27" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageExercisePrice" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageExercisePrice_1C24B7C5EE2A3B39B04FF54BDEB49883" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward_BCF414D1BC20C71D8861F54BDEB3EFC8" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageExercisePrice_1C24B7C5EE2A3B39B04FF54BDEB49883" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_SharebasedCompensationArrangementsbySharebasedPaymentAwardOptionsAssumedWeightedAverageExercisePrice" xlink:label="loc_asys_SharebasedCompensationArrangementsbySharebasedPaymentAwardOptionsAssumedWeightedAverageExercisePrice_EED07C99997CAE50960EF54BDEB4C567" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward_BCF414D1BC20C71D8861F54BDEB3EFC8" xlink:to="loc_asys_SharebasedCompensationArrangementsbySharebasedPaymentAwardOptionsAssumedWeightedAverageExercisePrice_EED07C99997CAE50960EF54BDEB4C567" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice_9D88F15D1C809A9132A7F54BDEB40C0A" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward_BCF414D1BC20C71D8861F54BDEB3EFC8" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice_9D88F15D1C809A9132A7F54BDEB40C0A" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsForfeituresInPeriodWeightedAverageExercisePrice" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsForfeituresInPeriodWeightedAverageExercisePrice_6F82CC8C24874FD32486F54BDEB418CE" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward_BCF414D1BC20C71D8861F54BDEB3EFC8" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsForfeituresInPeriodWeightedAverageExercisePrice_6F82CC8C24874FD32486F54BDEB418CE" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice_DF40E5A7FD528D41BE86F54BDEB49864" xlink:type="locator" />
    <presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward_BCF414D1BC20C71D8861F54BDEB3EFC8" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice_DF40E5A7FD528D41BE86F54BDEB49864" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice_1791B83CF7CFB0367C54F54BDEB404C6" xlink:type="locator" />
    <presentationArc order="10" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_1E9F3B5F8240B1EF5DD2F54BDEB22251" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice_1791B83CF7CFB0367C54F54BDEB404C6" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_6CCDC437872D96972D0CF54BDEB4AFD0" xlink:type="locator" />
    <presentationArc order="11" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_1E9F3B5F8240B1EF5DD2F54BDEB22251" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_6CCDC437872D96972D0CF54BDEB4AFD0" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate_708A4FBE1C4E9D6BD834F54BDEB497F4" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_6CCDC437872D96972D0CF54BDEB4AFD0" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate_708A4FBE1C4E9D6BD834F54BDEB497F4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1" xlink:label="loc_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1_2A7DC86B5A9FFF8A6ECBF54BDEB453C0" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_6CCDC437872D96972D0CF54BDEB4AFD0" xlink:to="loc_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1_2A7DC86B5A9FFF8A6ECBF54BDEB453C0" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate_AA0F4AB553D6A1591D72F54BDEB49A0A" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_6CCDC437872D96972D0CF54BDEB4AFD0" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate_AA0F4AB553D6A1591D72F54BDEB49A0A" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate_964D03FDCFB858401B58F54BDEB4048E" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_6CCDC437872D96972D0CF54BDEB4AFD0" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate_964D03FDCFB858401B58F54BDEB4048E" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_7FB336B8E6946CA4F3ADF54BDEB552CE" xlink:type="locator" />
    <presentationArc order="12" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_1E9F3B5F8240B1EF5DD2F54BDEB22251" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_7FB336B8E6946CA4F3ADF54BDEB552CE" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_688CAF6C235BED7873B3F54BDEB5D548" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_7FB336B8E6946CA4F3ADF54BDEB552CE" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_688CAF6C235BED7873B3F54BDEB5D548" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod_481ED5FD22F996BA4827F54BDEB5B57F" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_7FB336B8E6946CA4F3ADF54BDEB552CE" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod_481ED5FD22F996BA4827F54BDEB5B57F" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_11ABEC315E331ECF6AB4F54BDEB5D3B4" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_7FB336B8E6946CA4F3ADF54BDEB552CE" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_11ABEC315E331ECF6AB4F54BDEB5D3B4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward_83A75244B95A2A0F984FF54BDEB51E2B" xlink:type="locator" />
    <presentationArc order="13" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_1E9F3B5F8240B1EF5DD2F54BDEB22251" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward_83A75244B95A2A0F984FF54BDEB51E2B" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_5872113694C4B05F23A8F54BDEB5D817" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward_83A75244B95A2A0F984FF54BDEB51E2B" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_5872113694C4B05F23A8F54BDEB5D817" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue_ED84B70499ADD5D8D94FF54BDEB50DA8" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward_83A75244B95A2A0F984FF54BDEB51E2B" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue_ED84B70499ADD5D8D94FF54BDEB50DA8" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_6DA4A5EBE36C05A6B47DF54BDEB5DBC6" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward_83A75244B95A2A0F984FF54BDEB51E2B" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_6DA4A5EBE36C05A6B47DF54BDEB5DBC6" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.amtechsystems.com/role/BasisOfPresentationTables" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:label="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_9BC5A56354AB5B894396F541EE43A9D0" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DeferredRevenueByArrangementDisclosureTextBlock" xlink:label="loc_us-gaap_DeferredRevenueByArrangementDisclosureTextBlock_B83B43A3EC4A3B932D7FF541EE437E68" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_9BC5A56354AB5B894396F541EE43A9D0" xlink:to="loc_us-gaap_DeferredRevenueByArrangementDisclosureTextBlock_B83B43A3EC4A3B932D7FF541EE437E68" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfInventoryCurrentTableTextBlock" xlink:label="loc_us-gaap_ScheduleOfInventoryCurrentTableTextBlock_109409F1F0EE5F794AB3F541EE438F93" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_9BC5A56354AB5B894396F541EE43A9D0" xlink:to="loc_us-gaap_ScheduleOfInventoryCurrentTableTextBlock_109409F1F0EE5F794AB3F541EE438F93" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PropertyPlantAndEquipmentTextBlock" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentTextBlock_F8B360D90C9DA30B0BB7F541EE43862D" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_9BC5A56354AB5B894396F541EE43A9D0" xlink:to="loc_us-gaap_PropertyPlantAndEquipmentTextBlock_F8B360D90C9DA30B0BB7F541EE43862D" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfGoodwillTextBlock" xlink:label="loc_us-gaap_ScheduleOfGoodwillTextBlock_5DB7C087A52F193E4830F541EE43E9AD" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_9BC5A56354AB5B894396F541EE43A9D0" xlink:to="loc_us-gaap_ScheduleOfGoodwillTextBlock_5DB7C087A52F193E4830F541EE43E9AD" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTableTextBlock" xlink:label="loc_us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTableTextBlock_58D5239C86D8152910A1F541EE4453D3" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_9BC5A56354AB5B894396F541EE43A9D0" xlink:to="loc_us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTableTextBlock_58D5239C86D8152910A1F541EE4453D3" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock" xlink:label="loc_us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock_D7673DBD2B1C904EB371F541EE44CF42" xlink:type="locator" />
    <presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_9BC5A56354AB5B894396F541EE43A9D0" xlink:to="loc_us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock_D7673DBD2B1C904EB371F541EE44CF42" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfCompensationCostForShareBasedPaymentArrangementsAllocationOfShareBasedCompensationCostsByPlanTableTextBlock" xlink:label="loc_us-gaap_ScheduleOfCompensationCostForShareBasedPaymentArrangementsAllocationOfShareBasedCompensationCostsByPlanTableTextBlock_16F4BD4A49409131E2B9F541EE4473C8" xlink:type="locator" />
    <presentationArc order="7" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_9BC5A56354AB5B894396F541EE43A9D0" xlink:to="loc_us-gaap_ScheduleOfCompensationCostForShareBasedPaymentArrangementsAllocationOfShareBasedCompensationCostsByPlanTableTextBlock_16F4BD4A49409131E2B9F541EE4473C8" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock" xlink:label="loc_us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock_9DB9C47AB4DCD231637AF541EE44CB12" xlink:type="locator" />
    <presentationArc order="8" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_9BC5A56354AB5B894396F541EE43A9D0" xlink:to="loc_us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock_9DB9C47AB4DCD231637AF541EE44CB12" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock" xlink:label="loc_us-gaap_ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock_67F4F89DA978752CF5F0F541EE44A122" xlink:type="locator" />
    <presentationArc order="9" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_9BC5A56354AB5B894396F541EE43A9D0" xlink:to="loc_us-gaap_ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock_67F4F89DA978752CF5F0F541EE44A122" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock" xlink:label="loc_us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock_B6CE92120976BD42746BF541EE4974B0" xlink:type="locator" />
    <presentationArc order="10" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_9BC5A56354AB5B894396F541EE43A9D0" xlink:to="loc_us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock_B6CE92120976BD42746BF541EE4974B0" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_ResearchAndDevelopmentExpenseTableTextBlock" xlink:label="loc_asys_ResearchAndDevelopmentExpenseTableTextBlock_D4C35A725C8013ABD1A8F541EE49F63D" xlink:type="locator" />
    <presentationArc order="11" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_9BC5A56354AB5B894396F541EE43A9D0" xlink:to="loc_asys_ResearchAndDevelopmentExpenseTableTextBlock_D4C35A725C8013ABD1A8F541EE49F63D" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.amtechsystems.com/role/BasisOfPresentationWarrantyDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:label="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_44CA1425D600779D66A2F541EE089135" xlink:type="locator" />
    <loc xlink:href="asys-20150630.xsd#asys_ScheduleOfWarrantiesTable" xlink:label="loc_asys_ScheduleOfWarrantiesTable_0B1C456289D2D9C012BAF541EE08DDC1" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_44CA1425D600779D66A2F541EE089135" xlink:to="loc_asys_ScheduleOfWarrantiesTable_0B1C456289D2D9C012BAF541EE08DDC1" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeAxis" xlink:label="loc_us-gaap_RangeAxis_DC9C6049E802EFCAB2F4F541EE084A5F" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_asys_ScheduleOfWarrantiesTable_0B1C456289D2D9C012BAF541EE08DDC1" xlink:to="loc_us-gaap_RangeAxis_DC9C6049E802EFCAB2F4F541EE084A5F" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeMember" xlink:label="loc_us-gaap_RangeMember_3F54886D6220B3F37CFEF541EE086FFE" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RangeAxis_DC9C6049E802EFCAB2F4F541EE084A5F" xlink:to="loc_us-gaap_RangeMember_3F54886D6220B3F37CFEF541EE086FFE" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MinimumMember" xlink:label="loc_us-gaap_MinimumMember_1E0583FBCCAB0200AE46F541EE081C30" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RangeMember_3F54886D6220B3F37CFEF541EE086FFE" xlink:to="loc_us-gaap_MinimumMember_1E0583FBCCAB0200AE46F541EE081C30" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MaximumMember" xlink:label="loc_us-gaap_MaximumMember_E67B4DBC08040DCC5D58F541EE08EDE9" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RangeMember_3F54886D6220B3F37CFEF541EE086FFE" xlink:to="loc_us-gaap_MaximumMember_E67B4DBC08040DCC5D58F541EE08EDE9" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_ScheduleOfProductWarrantyLineItems" xlink:label="loc_asys_ScheduleOfProductWarrantyLineItems_7A711B110056969D3EA2F541EE09481E" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_asys_ScheduleOfWarrantiesTable_0B1C456289D2D9C012BAF541EE08DDC1" xlink:to="loc_asys_ScheduleOfProductWarrantyLineItems_7A711B110056969D3EA2F541EE09481E" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_StandardProductWarrantyPeriod" xlink:label="loc_asys_StandardProductWarrantyPeriod_CCE33C1F535B0A7034CFF541EE098DCE" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_asys_ScheduleOfProductWarrantyLineItems_7A711B110056969D3EA2F541EE09481E" xlink:to="loc_asys_StandardProductWarrantyPeriod_CCE33C1F535B0A7034CFF541EE098DCE" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MovementInStandardProductWarrantyAccrualRollForward" xlink:label="loc_us-gaap_MovementInStandardProductWarrantyAccrualRollForward_5155179D946AE439CBEEF541EE09F9B8" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_asys_ScheduleOfProductWarrantyLineItems_7A711B110056969D3EA2F541EE09481E" xlink:to="loc_us-gaap_MovementInStandardProductWarrantyAccrualRollForward_5155179D946AE439CBEEF541EE09F9B8" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProductWarrantyAccrualClassifiedCurrent" xlink:label="loc_us-gaap_ProductWarrantyAccrualClassifiedCurrent_3EBDB12DCAF8958BAEE6F541EE096E05" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_MovementInStandardProductWarrantyAccrualRollForward_5155179D946AE439CBEEF541EE09F9B8" xlink:to="loc_us-gaap_ProductWarrantyAccrualClassifiedCurrent_3EBDB12DCAF8958BAEE6F541EE096E05" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StandardProductWarrantyAccrualPayments" xlink:label="loc_us-gaap_StandardProductWarrantyAccrualPayments_CAD6D645BDDFDD4BDE21F541EE0983AB" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_MovementInStandardProductWarrantyAccrualRollForward_5155179D946AE439CBEEF541EE09F9B8" xlink:to="loc_us-gaap_StandardProductWarrantyAccrualPayments_CAD6D645BDDFDD4BDE21F541EE0983AB" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StandardProductWarrantyAccrualPreexistingIncreaseDecrease" xlink:label="loc_us-gaap_StandardProductWarrantyAccrualPreexistingIncreaseDecrease_1B991A774558C66B3CFDF541EE09C47B" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_MovementInStandardProductWarrantyAccrualRollForward_5155179D946AE439CBEEF541EE09F9B8" xlink:to="loc_us-gaap_StandardProductWarrantyAccrualPreexistingIncreaseDecrease_1B991A774558C66B3CFDF541EE09C47B" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProductWarrantyAccrualClassifiedCurrent" xlink:label="loc_us-gaap_ProductWarrantyAccrualClassifiedCurrent_16C65F8D7EE008A5B259F541EE095285" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_MovementInStandardProductWarrantyAccrualRollForward_5155179D946AE439CBEEF541EE09F9B8" xlink:to="loc_us-gaap_ProductWarrantyAccrualClassifiedCurrent_16C65F8D7EE008A5B259F541EE095285" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.amtechsystems.com/role/BusinessSegmentInformation" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SegmentReportingAbstract" xlink:label="loc_us-gaap_SegmentReportingAbstract_FFD7944D0D9BBCD3FBDAF54BDE85BB1E" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SegmentReportingDisclosureTextBlock" xlink:label="loc_us-gaap_SegmentReportingDisclosureTextBlock_BFD52E03C3B822E158C6F54BDE852EA8" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentReportingAbstract_FFD7944D0D9BBCD3FBDAF54BDE85BB1E" xlink:to="loc_us-gaap_SegmentReportingDisclosureTextBlock_BFD52E03C3B822E158C6F54BDE852EA8" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.amtechsystems.com/role/BusinessSegmentInformationDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SegmentReportingAbstract" xlink:label="loc_us-gaap_SegmentReportingAbstract_3FCABECBFA9210784D9F007D9825360E" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:label="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_7D4A761F2CE24C2A32C4007D98265E74" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentReportingAbstract_3FCABECBFA9210784D9F007D9825360E" xlink:to="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_7D4A761F2CE24C2A32C4007D98265E74" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskByTypeAxis" xlink:label="loc_us-gaap_ConcentrationRiskByTypeAxis_737E8990ADFB16D750BA007D9826ABB2" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_7D4A761F2CE24C2A32C4007D98265E74" xlink:to="loc_us-gaap_ConcentrationRiskByTypeAxis_737E8990ADFB16D750BA007D9826ABB2" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskTypeDomain" xlink:label="loc_us-gaap_ConcentrationRiskTypeDomain_0C61DE26CB250AD93F06007D98265E47" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ConcentrationRiskByTypeAxis_737E8990ADFB16D750BA007D9826ABB2" xlink:to="loc_us-gaap_ConcentrationRiskTypeDomain_0C61DE26CB250AD93F06007D98265E47" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProductConcentrationRiskMember" xlink:label="loc_us-gaap_ProductConcentrationRiskMember_1F8F9DDF5E5FD4F22029007D9826745D" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ConcentrationRiskTypeDomain_0C61DE26CB250AD93F06007D98265E47" xlink:to="loc_us-gaap_ProductConcentrationRiskMember_1F8F9DDF5E5FD4F22029007D9826745D" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskByBenchmarkAxis" xlink:label="loc_us-gaap_ConcentrationRiskByBenchmarkAxis_08DEE780BA2A06821955007D98267FEC" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_7D4A761F2CE24C2A32C4007D98265E74" xlink:to="loc_us-gaap_ConcentrationRiskByBenchmarkAxis_08DEE780BA2A06821955007D98267FEC" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskBenchmarkDomain" xlink:label="loc_us-gaap_ConcentrationRiskBenchmarkDomain_12BB73F58CDCE6B19582007D9826F941" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ConcentrationRiskByBenchmarkAxis_08DEE780BA2A06821955007D98267FEC" xlink:to="loc_us-gaap_ConcentrationRiskBenchmarkDomain_12BB73F58CDCE6B19582007D9826F941" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SalesRevenueProductLineMember" xlink:label="loc_us-gaap_SalesRevenueProductLineMember_8CB3E96B7B8299066D1E007D9826D17A" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ConcentrationRiskBenchmarkDomain_12BB73F58CDCE6B19582007D9826F941" xlink:to="loc_us-gaap_SalesRevenueProductLineMember_8CB3E96B7B8299066D1E007D9826D17A" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionAxis" xlink:label="loc_us-gaap_BusinessAcquisitionAxis_0AE2388095BBB154EB9F007D9827D8FF" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_7D4A761F2CE24C2A32C4007D98265E74" xlink:to="loc_us-gaap_BusinessAcquisitionAxis_0AE2388095BBB154EB9F007D9827D8FF" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionAcquireeDomain" xlink:label="loc_us-gaap_BusinessAcquisitionAcquireeDomain_C5587C1572D07F70A6DF007D9827E3B9" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BusinessAcquisitionAxis_0AE2388095BBB154EB9F007D9827D8FF" xlink:to="loc_us-gaap_BusinessAcquisitionAcquireeDomain_C5587C1572D07F70A6DF007D9827E3B9" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_SoLayTecB.V.Member" xlink:label="loc_asys_SoLayTecB.V.Member_4F0F56105AF0073CF9EC007D9827493A" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BusinessAcquisitionAcquireeDomain_C5587C1572D07F70A6DF007D9827E3B9" xlink:to="loc_asys_SoLayTecB.V.Member_4F0F56105AF0073CF9EC007D9827493A" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StatementBusinessSegmentsAxis" xlink:label="loc_us-gaap_StatementBusinessSegmentsAxis_640902BCE6288CF29125007D9827C1EA" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_7D4A761F2CE24C2A32C4007D98265E74" xlink:to="loc_us-gaap_StatementBusinessSegmentsAxis_640902BCE6288CF29125007D9827C1EA" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SegmentDomain" xlink:label="loc_us-gaap_SegmentDomain_044A5BF5243ED60379D3007D98276940" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementBusinessSegmentsAxis_640902BCE6288CF29125007D9827C1EA" xlink:to="loc_us-gaap_SegmentDomain_044A5BF5243ED60379D3007D98276940" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_SolarEquipmentMember" xlink:label="loc_asys_SolarEquipmentMember_E61910C95EC2B3974F68007D9827A753" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentDomain_044A5BF5243ED60379D3007D98276940" xlink:to="loc_asys_SolarEquipmentMember_E61910C95EC2B3974F68007D9827A753" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_SemiconductorEquipmentMember" xlink:label="loc_asys_SemiconductorEquipmentMember_63870DCBD7DE79D944C3007D98277B37" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentDomain_044A5BF5243ED60379D3007D98276940" xlink:to="loc_asys_SemiconductorEquipmentMember_63870DCBD7DE79D944C3007D98277B37" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_PolishingSuppliesAndEquipmentMember" xlink:label="loc_asys_PolishingSuppliesAndEquipmentMember_6FECD5B2C665BD6EC9F8007D9828FA96" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentDomain_044A5BF5243ED60379D3007D98276940" xlink:to="loc_asys_PolishingSuppliesAndEquipmentMember_6FECD5B2C665BD6EC9F8007D9828FA96" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MaterialReconcilingItemsMember" xlink:label="loc_us-gaap_MaterialReconcilingItemsMember_0928D56BB099C057E81B007D98287631" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentDomain_044A5BF5243ED60379D3007D98276940" xlink:to="loc_us-gaap_MaterialReconcilingItemsMember_0928D56BB099C057E81B007D98287631" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SegmentReportingInformationLineItems" xlink:label="loc_us-gaap_SegmentReportingInformationLineItems_4F91E1AB4F05FEB403AC007D9828AF1C" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_7D4A761F2CE24C2A32C4007D98265E74" xlink:to="loc_us-gaap_SegmentReportingInformationLineItems_4F91E1AB4F05FEB403AC007D9828AF1C" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NumberOfOperatingSegments" xlink:label="loc_us-gaap_NumberOfOperatingSegments_6EE0E617A7677C0094FD007D9828AC6B" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentReportingInformationLineItems_4F91E1AB4F05FEB403AC007D9828AF1C" xlink:to="loc_us-gaap_NumberOfOperatingSegments_6EE0E617A7677C0094FD007D9828AC6B" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionPercentageOfVotingInterestsAcquired" xlink:label="loc_us-gaap_BusinessAcquisitionPercentageOfVotingInterestsAcquired_A6990D00F02848B514BF007D9828B50F" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentReportingInformationLineItems_4F91E1AB4F05FEB403AC007D9828AF1C" xlink:to="loc_us-gaap_BusinessAcquisitionPercentageOfVotingInterestsAcquired_A6990D00F02848B514BF007D9828B50F" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SalesRevenueNet" xlink:label="loc_us-gaap_SalesRevenueNet_7D9FB80D9596D563F308007D9828C32B" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentReportingInformationLineItems_4F91E1AB4F05FEB403AC007D9828AF1C" xlink:to="loc_us-gaap_SalesRevenueNet_7D9FB80D9596D563F308007D9828C32B" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OperatingIncomeLoss" xlink:label="loc_us-gaap_OperatingIncomeLoss_2B48235601231C0BEAFA007D98293942" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentReportingInformationLineItems_4F91E1AB4F05FEB403AC007D9828AF1C" xlink:to="loc_us-gaap_OperatingIncomeLoss_2B48235601231C0BEAFA007D98293942" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskPercentage1" xlink:label="loc_us-gaap_ConcentrationRiskPercentage1_FA6A71BD812622D4E61F007D9829B1AE" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentReportingInformationLineItems_4F91E1AB4F05FEB403AC007D9828AF1C" xlink:to="loc_us-gaap_ConcentrationRiskPercentage1_FA6A71BD812622D4E61F007D9829B1AE" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_Assets" xlink:label="loc_us-gaap_Assets_9987946FF07C6AAD6A61007D982915E6" xlink:type="locator" />
    <presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentReportingInformationLineItems_4F91E1AB4F05FEB403AC007D9828AF1C" xlink:to="loc_us-gaap_Assets_9987946FF07C6AAD6A61007D982915E6" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.amtechsystems.com/role/BusinessSegmentInformationTables" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SegmentReportingAbstract" xlink:label="loc_us-gaap_SegmentReportingAbstract_BE998C31DBA417CCDB85F54BDE837CD1" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfSegmentReportingInformationBySegmentTextBlock" xlink:label="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTextBlock_DBE30CBD9E46447AD20BF54BDE8373DE" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentReportingAbstract_BE998C31DBA417CCDB85F54BDE837CD1" xlink:to="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTextBlock_DBE30CBD9E46447AD20BF54BDE8373DE" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.amtechsystems.com/role/CommitmentsAndContingencies" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CommitmentsAndContingenciesDisclosureAbstract" xlink:label="loc_us-gaap_CommitmentsAndContingenciesDisclosureAbstract_64D5B0C81FF7A6F7D081F541EE343AC6" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CommitmentsAndContingenciesDisclosureTextBlock" xlink:label="loc_us-gaap_CommitmentsAndContingenciesDisclosureTextBlock_ECE940554EF1741B92B2F541EE342E90" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_CommitmentsAndContingenciesDisclosureAbstract_64D5B0C81FF7A6F7D081F541EE343AC6" xlink:to="loc_us-gaap_CommitmentsAndContingenciesDisclosureTextBlock_ECE940554EF1741B92B2F541EE342E90" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.amtechsystems.com/role/CommitmentsAndContingenciesDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CommitmentsAndContingenciesDisclosureAbstract" xlink:label="loc_us-gaap_CommitmentsAndContingenciesDisclosureAbstract_7F4466D732311F7955C8F54BDE585992" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfEquityMethodInvestmentsTable" xlink:label="loc_us-gaap_ScheduleOfEquityMethodInvestmentsTable_1CD146379F1956B088E2F54BDE582272" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_CommitmentsAndContingenciesDisclosureAbstract_7F4466D732311F7955C8F54BDE585992" xlink:to="loc_us-gaap_ScheduleOfEquityMethodInvestmentsTable_1CD146379F1956B088E2F54BDE582272" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LossContingenciesByNatureOfContingencyAxis" xlink:label="loc_us-gaap_LossContingenciesByNatureOfContingencyAxis_069EE4AE807BF36A4A3BF54BDE58AD51" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsTable_1CD146379F1956B088E2F54BDE582272" xlink:to="loc_us-gaap_LossContingenciesByNatureOfContingencyAxis_069EE4AE807BF36A4A3BF54BDE58AD51" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LossContingencyNatureDomain" xlink:label="loc_us-gaap_LossContingencyNatureDomain_4E7929F01E141D7E9F67F54BDE5839A2" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LossContingenciesByNatureOfContingencyAxis_069EE4AE807BF36A4A3BF54BDE58AD51" xlink:to="loc_us-gaap_LossContingencyNatureDomain_4E7929F01E141D7E9F67F54BDE5839A2" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LossFromCatastrophesMember" xlink:label="loc_us-gaap_LossFromCatastrophesMember_3792D557782A4B8FB8FFF54BDE58DD72" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LossContingencyNatureDomain_4E7929F01E141D7E9F67F54BDE5839A2" xlink:to="loc_us-gaap_LossFromCatastrophesMember_3792D557782A4B8FB8FFF54BDE58DD72" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionAxis" xlink:label="loc_us-gaap_BusinessAcquisitionAxis_C87D7F88AD1F7E611143F54BDE589075" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsTable_1CD146379F1956B088E2F54BDE582272" xlink:to="loc_us-gaap_BusinessAcquisitionAxis_C87D7F88AD1F7E611143F54BDE589075" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionAcquireeDomain" xlink:label="loc_us-gaap_BusinessAcquisitionAcquireeDomain_070858EBF37F344C1496F54BDE59F300" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BusinessAcquisitionAxis_C87D7F88AD1F7E611143F54BDE589075" xlink:to="loc_us-gaap_BusinessAcquisitionAcquireeDomain_070858EBF37F344C1496F54BDE59F300" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_BTUInternationalIncBTUMergerMember" xlink:label="loc_asys_BTUInternationalIncBTUMergerMember_44402E4AFCC5BF5167E9F54BDE595662" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BusinessAcquisitionAcquireeDomain_070858EBF37F344C1496F54BDE59F300" xlink:to="loc_asys_BTUInternationalIncBTUMergerMember_44402E4AFCC5BF5167E9F54BDE595662" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis" xlink:label="loc_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis_4691D4434F9E72FFE514F54BDE59D2A2" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsTable_1CD146379F1956B088E2F54BDE582272" xlink:to="loc_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis_4691D4434F9E72FFE514F54BDE59D2A2" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersTypeDomain" xlink:label="loc_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersTypeDomain_E0458096E3B3DEB49505F54BDE59CAB5" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis_4691D4434F9E72FFE514F54BDE59D2A2" xlink:to="loc_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersTypeDomain_E0458096E3B3DEB49505F54BDE59CAB5" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_TempressSystemsandEnergyResearchCentreAgreementMember" xlink:label="loc_asys_TempressSystemsandEnergyResearchCentreAgreementMember_99AD34B231149657B214F54BDE599097" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersTypeDomain_E0458096E3B3DEB49505F54BDE59CAB5" xlink:to="loc_asys_TempressSystemsandEnergyResearchCentreAgreementMember_99AD34B231149657B214F54BDE599097" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis" xlink:label="loc_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_B62E1573481F960BB788F54BDE597505" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsTable_1CD146379F1956B088E2F54BDE582272" xlink:to="loc_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_B62E1573481F960BB788F54BDE597505" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EquityMethodInvesteeNameDomain" xlink:label="loc_us-gaap_EquityMethodInvesteeNameDomain_3D9C1F9A29FCD15B60D6F54BDE5946FC" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_B62E1573481F960BB788F54BDE597505" xlink:to="loc_us-gaap_EquityMethodInvesteeNameDomain_3D9C1F9A29FCD15B60D6F54BDE5946FC" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_KingstoneHoldingCompanyMember" xlink:label="loc_asys_KingstoneHoldingCompanyMember_AAA943B4E3F0D80C5D79F54BDE59523B" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_EquityMethodInvesteeNameDomain_3D9C1F9A29FCD15B60D6F54BDE5946FC" xlink:to="loc_asys_KingstoneHoldingCompanyMember_AAA943B4E3F0D80C5D79F54BDE59523B" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_KingstoneSemiconductorCompanyLtdMember" xlink:label="loc_asys_KingstoneSemiconductorCompanyLtdMember_F74C1D7D6F4613E2A7C2F54BDE591208" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_EquityMethodInvesteeNameDomain_3D9C1F9A29FCD15B60D6F54BDE5946FC" xlink:to="loc_asys_KingstoneSemiconductorCompanyLtdMember_F74C1D7D6F4613E2A7C2F54BDE591208" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfEquityMethodInvestmentsLineItems" xlink:label="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_5A3C07E9C1B9C0BBD6B7F54BDE594D9A" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsTable_1CD146379F1956B088E2F54BDE582272" xlink:to="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_5A3C07E9C1B9C0BBD6B7F54BDE594D9A" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PurchaseObligation" xlink:label="loc_us-gaap_PurchaseObligation_09A04647E8C8A2D414DBF54BDE595979" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_5A3C07E9C1B9C0BBD6B7F54BDE594D9A" xlink:to="loc_us-gaap_PurchaseObligation_09A04647E8C8A2D414DBF54BDE595979" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PaymentsToAcquirePropertyPlantAndEquipment" xlink:label="loc_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_2017E76A1F83D7610831F54BDE5A2931" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_5A3C07E9C1B9C0BBD6B7F54BDE594D9A" xlink:to="loc_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_2017E76A1F83D7610831F54BDE5A2931" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_OwnershipRightsResultsofProjectsDevelopedSeparatelyByIndividualParties" xlink:label="loc_asys_OwnershipRightsResultsofProjectsDevelopedSeparatelyByIndividualParties_E70074D9A7A248D753B4F54BDE5A47E2" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_5A3C07E9C1B9C0BBD6B7F54BDE594D9A" xlink:to="loc_asys_OwnershipRightsResultsofProjectsDevelopedSeparatelyByIndividualParties_E70074D9A7A248D753B4F54BDE5A47E2" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_ResearchandDevelopmentAgreementTerm" xlink:label="loc_asys_ResearchandDevelopmentAgreementTerm_16B6697E9533893EC2DBF54BDE5A1083" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_5A3C07E9C1B9C0BBD6B7F54BDE594D9A" xlink:to="loc_asys_ResearchandDevelopmentAgreementTerm_16B6697E9533893EC2DBF54BDE5A1083" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_ResearchandDevelopmentRequiredContributionLaborandAssets" xlink:label="loc_asys_ResearchandDevelopmentRequiredContributionLaborandAssets_19D2D663EF74ABBFCB76F54BDE5AA5B3" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_5A3C07E9C1B9C0BBD6B7F54BDE594D9A" xlink:to="loc_asys_ResearchandDevelopmentRequiredContributionLaborandAssets_19D2D663EF74ABBFCB76F54BDE5AA5B3" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_ResearchandDevelopmentPeriodRequiredforEquipmentRepairsandMaintenance" xlink:label="loc_asys_ResearchandDevelopmentPeriodRequiredforEquipmentRepairsandMaintenance_BA0B6DA3526C4D27E571F54BDE5A1E43" xlink:type="locator" />
    <presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_5A3C07E9C1B9C0BBD6B7F54BDE594D9A" xlink:to="loc_asys_ResearchandDevelopmentPeriodRequiredforEquipmentRepairsandMaintenance_BA0B6DA3526C4D27E571F54BDE5A1E43" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RevenueFromGrants" xlink:label="loc_us-gaap_RevenueFromGrants_CC163DFEB8FBC15FBDC9F54BDE5A7CDA" xlink:type="locator" />
    <presentationArc order="7" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_5A3C07E9C1B9C0BBD6B7F54BDE594D9A" xlink:to="loc_us-gaap_RevenueFromGrants_CC163DFEB8FBC15FBDC9F54BDE5A7CDA" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_GrantRevenueCommitmenttoProject" xlink:label="loc_asys_GrantRevenueCommitmenttoProject_36B9D3056832A3B56A79F54BDE5A5E3A" xlink:type="locator" />
    <presentationArc order="8" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_5A3C07E9C1B9C0BBD6B7F54BDE594D9A" xlink:to="loc_asys_GrantRevenueCommitmenttoProject_36B9D3056832A3B56A79F54BDE5A5E3A" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EquityMethodInvestmentOwnershipPercentage" xlink:label="loc_us-gaap_EquityMethodInvestmentOwnershipPercentage_4D3DC957697117992F91F54BDE5A32DE" xlink:type="locator" />
    <presentationArc order="9" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_5A3C07E9C1B9C0BBD6B7F54BDE594D9A" xlink:to="loc_us-gaap_EquityMethodInvestmentOwnershipPercentage_4D3DC957697117992F91F54BDE5A32DE" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_PercentageofVotingInterestofAcquireeOwnedSubsidiary" xlink:label="loc_asys_PercentageofVotingInterestofAcquireeOwnedSubsidiary_A4EC31DD60D2C2B81009F54BDE5A3306" xlink:type="locator" />
    <presentationArc order="10" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_5A3C07E9C1B9C0BBD6B7F54BDE594D9A" xlink:to="loc_asys_PercentageofVotingInterestofAcquireeOwnedSubsidiary_A4EC31DD60D2C2B81009F54BDE5A3306" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LossContingencyAccrualAtCarryingValue" xlink:label="loc_us-gaap_LossContingencyAccrualAtCarryingValue_384AABB82F230797F9F4F54BDE5A7A8D" xlink:type="locator" />
    <presentationArc order="11" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_5A3C07E9C1B9C0BBD6B7F54BDE594D9A" xlink:to="loc_us-gaap_LossContingencyAccrualAtCarryingValue_384AABB82F230797F9F4F54BDE5A7A8D" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LettersOfCreditOutstandingAmount" xlink:label="loc_us-gaap_LettersOfCreditOutstandingAmount_260B67A92F4D79147715F54BDE5AC605" xlink:type="locator" />
    <presentationArc order="12" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_5A3C07E9C1B9C0BBD6B7F54BDE594D9A" xlink:to="loc_us-gaap_LettersOfCreditOutstandingAmount_260B67A92F4D79147715F54BDE5AC605" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.amtechsystems.com/role/CondensedConsolidatedBalanceSheets" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StatementOfFinancialPositionAbstract" xlink:label="loc_us-gaap_StatementOfFinancialPositionAbstract_E93A83803066C4572EA2FC3888084243" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AssetsAbstract" xlink:label="loc_us-gaap_AssetsAbstract_EB543DDB4546727A2618FC388808CC3F" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementOfFinancialPositionAbstract_E93A83803066C4572EA2FC3888084243" xlink:to="loc_us-gaap_AssetsAbstract_EB543DDB4546727A2618FC388808CC3F" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AssetsCurrentAbstract" xlink:label="loc_us-gaap_AssetsCurrentAbstract_CF04E5D94272A5BA6769FC388809364C" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AssetsAbstract_EB543DDB4546727A2618FC388808CC3F" xlink:to="loc_us-gaap_AssetsCurrentAbstract_CF04E5D94272A5BA6769FC388809364C" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CashAndCashEquivalentsAtCarryingValue" xlink:label="loc_us-gaap_CashAndCashEquivalentsAtCarryingValue_055F36EF9A37A1AC087BFC3888091C9A" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AssetsCurrentAbstract_CF04E5D94272A5BA6769FC388809364C" xlink:to="loc_us-gaap_CashAndCashEquivalentsAtCarryingValue_055F36EF9A37A1AC087BFC3888091C9A" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue" xlink:label="loc_us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue_8586CFC1FBE64486EFC8FC3888095838" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AssetsCurrentAbstract_CF04E5D94272A5BA6769FC388809364C" xlink:to="loc_us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue_8586CFC1FBE64486EFC8FC3888095838" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AccountsReceivableNetCurrentAbstract" xlink:label="loc_us-gaap_AccountsReceivableNetCurrentAbstract_D4220BEA4128D4AA92EBFC3888097AC8" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AssetsCurrentAbstract_CF04E5D94272A5BA6769FC388809364C" xlink:to="loc_us-gaap_AccountsReceivableNetCurrentAbstract_D4220BEA4128D4AA92EBFC3888097AC8" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AccountsReceivableNetCurrent" xlink:label="loc_us-gaap_AccountsReceivableNetCurrent_3E845D8D4C7A61A54FC4FC388809B5B0" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AccountsReceivableNetCurrentAbstract_D4220BEA4128D4AA92EBFC3888097AC8" xlink:to="loc_us-gaap_AccountsReceivableNetCurrent_3E845D8D4C7A61A54FC4FC388809B5B0" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_UnbilledAndOther" xlink:label="loc_asys_UnbilledAndOther_B36F6E39BB9A5837F2B7FC38880956D1" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AccountsReceivableNetCurrentAbstract_D4220BEA4128D4AA92EBFC3888097AC8" xlink:to="loc_asys_UnbilledAndOther_B36F6E39BB9A5837F2B7FC38880956D1" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_InventoryNet" xlink:label="loc_us-gaap_InventoryNet_9B57CD2974331E0D54C7FC3888095667" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AssetsCurrentAbstract_CF04E5D94272A5BA6769FC388809364C" xlink:to="loc_us-gaap_InventoryNet_9B57CD2974331E0D54C7FC3888095667" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DeferredTaxAssetsNetCurrent" xlink:label="loc_us-gaap_DeferredTaxAssetsNetCurrent_6DA743F79CB669742385FC388809491E" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AssetsCurrentAbstract_CF04E5D94272A5BA6769FC388809364C" xlink:to="loc_us-gaap_DeferredTaxAssetsNetCurrent_6DA743F79CB669742385FC388809491E" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncomeTaxesReceivable" xlink:label="loc_us-gaap_IncomeTaxesReceivable_6C7D84D23270EA3BB6B6FC3888098F23" xlink:type="locator" />
    <presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AssetsCurrentAbstract_CF04E5D94272A5BA6769FC388809364C" xlink:to="loc_us-gaap_IncomeTaxesReceivable_6C7D84D23270EA3BB6B6FC3888098F23" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherAssetsCurrent" xlink:label="loc_us-gaap_OtherAssetsCurrent_6F64159EB41C8DA724C9FC38880A3F3C" xlink:type="locator" />
    <presentationArc order="7" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AssetsCurrentAbstract_CF04E5D94272A5BA6769FC388809364C" xlink:to="loc_us-gaap_OtherAssetsCurrent_6F64159EB41C8DA724C9FC38880A3F3C" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AssetsCurrent" xlink:label="loc_us-gaap_AssetsCurrent_CBA6EE53FFAD7BE4BF2EFC38880AB62C" xlink:type="locator" />
    <presentationArc order="8" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AssetsCurrentAbstract_CF04E5D94272A5BA6769FC388809364C" xlink:to="loc_us-gaap_AssetsCurrent_CBA6EE53FFAD7BE4BF2EFC38880AB62C" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PropertyPlantAndEquipmentNet" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentNet_596BBE9190C38B9A6983FC38880A8CAC" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AssetsAbstract_EB543DDB4546727A2618FC388808CC3F" xlink:to="loc_us-gaap_PropertyPlantAndEquipmentNet_596BBE9190C38B9A6983FC38880A8CAC" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DeferredTaxAssetsNetNoncurrent" xlink:label="loc_us-gaap_DeferredTaxAssetsNetNoncurrent_2EAAF74E1B775E804633FC38880AD7BE" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AssetsAbstract_EB543DDB4546727A2618FC388808CC3F" xlink:to="loc_us-gaap_DeferredTaxAssetsNetNoncurrent_2EAAF74E1B775E804633FC38880AD7BE" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IntangibleAssetsNetExcludingGoodwill" xlink:label="loc_us-gaap_IntangibleAssetsNetExcludingGoodwill_10DA288389B41F705511FC38880F7A6B" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AssetsAbstract_EB543DDB4546727A2618FC388808CC3F" xlink:to="loc_us-gaap_IntangibleAssetsNetExcludingGoodwill_10DA288389B41F705511FC38880F7A6B" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_Goodwill" xlink:label="loc_us-gaap_Goodwill_25C044A7DE8B4D96CEADFC38880F4E2A" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AssetsAbstract_EB543DDB4546727A2618FC388808CC3F" xlink:to="loc_us-gaap_Goodwill_25C044A7DE8B4D96CEADFC38880F4E2A" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherAssetsNoncurrent" xlink:label="loc_us-gaap_OtherAssetsNoncurrent_9927CF83C046A2847A13FC38880F1FB4" xlink:type="locator" />
    <presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AssetsAbstract_EB543DDB4546727A2618FC388808CC3F" xlink:to="loc_us-gaap_OtherAssetsNoncurrent_9927CF83C046A2847A13FC38880F1FB4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_Assets" xlink:label="loc_us-gaap_Assets_DD261328DB5B60FC067CFC38880F56D0" xlink:type="locator" />
    <presentationArc order="7" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AssetsAbstract_EB543DDB4546727A2618FC388808CC3F" xlink:to="loc_us-gaap_Assets_DD261328DB5B60FC067CFC38880F56D0" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LiabilitiesAndStockholdersEquityAbstract" xlink:label="loc_us-gaap_LiabilitiesAndStockholdersEquityAbstract_A9EB433ED86D33A029F7FC38880F2581" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementOfFinancialPositionAbstract_E93A83803066C4572EA2FC3888084243" xlink:to="loc_us-gaap_LiabilitiesAndStockholdersEquityAbstract_A9EB433ED86D33A029F7FC38880F2581" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LiabilitiesCurrentAbstract" xlink:label="loc_us-gaap_LiabilitiesCurrentAbstract_26DD1A2210749D8FC749FC38880F6BB8" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LiabilitiesAndStockholdersEquityAbstract_A9EB433ED86D33A029F7FC38880F2581" xlink:to="loc_us-gaap_LiabilitiesCurrentAbstract_26DD1A2210749D8FC749FC38880F6BB8" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AccountsPayableCurrent" xlink:label="loc_us-gaap_AccountsPayableCurrent_803A19205039256BE6B9FC3888108306" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LiabilitiesCurrentAbstract_26DD1A2210749D8FC749FC38880F6BB8" xlink:to="loc_us-gaap_AccountsPayableCurrent_803A19205039256BE6B9FC3888108306" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LongTermDebtCurrent" xlink:label="loc_us-gaap_LongTermDebtCurrent_EFFDA1A90F9E0AE3DE7CFC3888106342" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LiabilitiesCurrentAbstract_26DD1A2210749D8FC749FC38880F6BB8" xlink:to="loc_us-gaap_LongTermDebtCurrent_EFFDA1A90F9E0AE3DE7CFC3888106342" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EmployeeRelatedLiabilitiesCurrent" xlink:label="loc_us-gaap_EmployeeRelatedLiabilitiesCurrent_5E9D64BBCBCA37853BB7FC388810D1D4" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LiabilitiesCurrentAbstract_26DD1A2210749D8FC749FC38880F6BB8" xlink:to="loc_us-gaap_EmployeeRelatedLiabilitiesCurrent_5E9D64BBCBCA37853BB7FC388810D1D4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProductWarrantyAccrualClassifiedCurrent" xlink:label="loc_us-gaap_ProductWarrantyAccrualClassifiedCurrent_78BDC2982B9F8CC20FDEFC388810481F" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LiabilitiesCurrentAbstract_26DD1A2210749D8FC749FC38880F6BB8" xlink:to="loc_us-gaap_ProductWarrantyAccrualClassifiedCurrent_78BDC2982B9F8CC20FDEFC388810481F" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherDeferredCreditsCurrent" xlink:label="loc_us-gaap_OtherDeferredCreditsCurrent_3FB85F48F2F4B019CE19FC388810B61C" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LiabilitiesCurrentAbstract_26DD1A2210749D8FC749FC38880F6BB8" xlink:to="loc_us-gaap_OtherDeferredCreditsCurrent_3FB85F48F2F4B019CE19FC388810B61C" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CustomerAdvancesCurrent" xlink:label="loc_us-gaap_CustomerAdvancesCurrent_313C98D43D9EE3ADCF11FC3888107991" xlink:type="locator" />
    <presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LiabilitiesCurrentAbstract_26DD1A2210749D8FC749FC38880F6BB8" xlink:to="loc_us-gaap_CustomerAdvancesCurrent_313C98D43D9EE3ADCF11FC3888107991" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AccruedLiabilitiesCurrent" xlink:label="loc_us-gaap_AccruedLiabilitiesCurrent_B9A904462602358DFFF3FC3888105C96" xlink:type="locator" />
    <presentationArc order="7" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LiabilitiesCurrentAbstract_26DD1A2210749D8FC749FC38880F6BB8" xlink:to="loc_us-gaap_AccruedLiabilitiesCurrent_B9A904462602358DFFF3FC3888105C96" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AccruedIncomeTaxesCurrent" xlink:label="loc_us-gaap_AccruedIncomeTaxesCurrent_2D809B01AE272CFEFD1BFC388810D94B" xlink:type="locator" />
    <presentationArc order="8" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LiabilitiesCurrentAbstract_26DD1A2210749D8FC749FC38880F6BB8" xlink:to="loc_us-gaap_AccruedIncomeTaxesCurrent_2D809B01AE272CFEFD1BFC388810D94B" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LiabilitiesCurrent" xlink:label="loc_us-gaap_LiabilitiesCurrent_4678068E54D3B429E456FC3888100F0E" xlink:type="locator" />
    <presentationArc order="9" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LiabilitiesCurrentAbstract_26DD1A2210749D8FC749FC38880F6BB8" xlink:to="loc_us-gaap_LiabilitiesCurrent_4678068E54D3B429E456FC3888100F0E" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LongTermDebtNoncurrent" xlink:label="loc_us-gaap_LongTermDebtNoncurrent_7E43B27CEF8A33426B41FC3888109C7F" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LiabilitiesAndStockholdersEquityAbstract_A9EB433ED86D33A029F7FC38880F2581" xlink:to="loc_us-gaap_LongTermDebtNoncurrent_7E43B27CEF8A33426B41FC3888109C7F" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LiabilityForUncertainTaxPositionsNoncurrent" xlink:label="loc_us-gaap_LiabilityForUncertainTaxPositionsNoncurrent_CF93484AEE84D1C30C44FC388810740C" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LiabilitiesAndStockholdersEquityAbstract_A9EB433ED86D33A029F7FC38880F2581" xlink:to="loc_us-gaap_LiabilityForUncertainTaxPositionsNoncurrent_CF93484AEE84D1C30C44FC388810740C" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DeferredTaxLiabilitiesNoncurrent" xlink:label="loc_us-gaap_DeferredTaxLiabilitiesNoncurrent_FF4309432EF76B756515FC3888115770" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LiabilitiesAndStockholdersEquityAbstract_A9EB433ED86D33A029F7FC38880F2581" xlink:to="loc_us-gaap_DeferredTaxLiabilitiesNoncurrent_FF4309432EF76B756515FC3888115770" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_Liabilities" xlink:label="loc_us-gaap_Liabilities_2ED0C7B492F008845EF3FC3888110359" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LiabilitiesAndStockholdersEquityAbstract_A9EB433ED86D33A029F7FC38880F2581" xlink:to="loc_us-gaap_Liabilities_2ED0C7B492F008845EF3FC3888110359" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CommitmentsAndContingencies" xlink:label="loc_us-gaap_CommitmentsAndContingencies_AAAAF3FE3E6825552FB1FC388811F6E9" xlink:type="locator" />
    <presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LiabilitiesAndStockholdersEquityAbstract_A9EB433ED86D33A029F7FC38880F2581" xlink:to="loc_us-gaap_CommitmentsAndContingencies_AAAAF3FE3E6825552FB1FC388811F6E9" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract" xlink:label="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_F487A07CF14F282C3B11FC388811FCDA" xlink:type="locator" />
    <presentationArc order="7" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LiabilitiesAndStockholdersEquityAbstract_A9EB433ED86D33A029F7FC38880F2581" xlink:to="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_F487A07CF14F282C3B11FC388811FCDA" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PreferredStockValue" xlink:label="loc_us-gaap_PreferredStockValue_79C448C139E76D6F9C30FC388811C9ED" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_F487A07CF14F282C3B11FC388811FCDA" xlink:to="loc_us-gaap_PreferredStockValue_79C448C139E76D6F9C30FC388811C9ED" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CommonStockValue" xlink:label="loc_us-gaap_CommonStockValue_45838B2C212914D51B74FC3888118964" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_F487A07CF14F282C3B11FC388811FCDA" xlink:to="loc_us-gaap_CommonStockValue_45838B2C212914D51B74FC3888118964" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AdditionalPaidInCapital" xlink:label="loc_us-gaap_AdditionalPaidInCapital_E8AD7B8C688BB30AFD3FFC388811C422" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_F487A07CF14F282C3B11FC388811FCDA" xlink:to="loc_us-gaap_AdditionalPaidInCapital_E8AD7B8C688BB30AFD3FFC388811C422" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax" xlink:label="loc_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_A264374ADD656725E0E3FC388811F7E1" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_F487A07CF14F282C3B11FC388811FCDA" xlink:to="loc_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_A264374ADD656725E0E3FC388811F7E1" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RetainedEarningsAccumulatedDeficit" xlink:label="loc_us-gaap_RetainedEarningsAccumulatedDeficit_4D78DAB316D8A12AFD2CFC388811F2B8" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_F487A07CF14F282C3B11FC388811FCDA" xlink:to="loc_us-gaap_RetainedEarningsAccumulatedDeficit_4D78DAB316D8A12AFD2CFC388811F2B8" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StockholdersEquity" xlink:label="loc_us-gaap_StockholdersEquity_F3C3D31503F50C308E6AFC388811149B" xlink:type="locator" />
    <presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_F487A07CF14F282C3B11FC388811FCDA" xlink:to="loc_us-gaap_StockholdersEquity_F3C3D31503F50C308E6AFC388811149B" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MinorityInterest" xlink:label="loc_us-gaap_MinorityInterest_2296F75AF5A3EED2A631FC388811A680" xlink:type="locator" />
    <presentationArc order="7" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_F487A07CF14F282C3B11FC388811FCDA" xlink:to="loc_us-gaap_MinorityInterest_2296F75AF5A3EED2A631FC388811A680" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterest" xlink:label="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterest_16429FE7F2098FA3049DFC388811D24A" xlink:type="locator" />
    <presentationArc order="8" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_F487A07CF14F282C3B11FC388811FCDA" xlink:to="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterest_16429FE7F2098FA3049DFC388811D24A" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LiabilitiesAndStockholdersEquity" xlink:label="loc_us-gaap_LiabilitiesAndStockholdersEquity_747CD28685CE6C5EB038FC388811FCD0" xlink:type="locator" />
    <presentationArc order="8" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LiabilitiesAndStockholdersEquityAbstract_A9EB433ED86D33A029F7FC38880F2581" xlink:to="loc_us-gaap_LiabilitiesAndStockholdersEquity_747CD28685CE6C5EB038FC388811FCD0" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.amtechsystems.com/role/CondensedConsolidatedBalanceSheetsParenthetical" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StatementOfFinancialPositionAbstract" xlink:label="loc_us-gaap_StatementOfFinancialPositionAbstract_B99C0B800619D97DA8B8F541ED753785" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StatementTable" xlink:label="loc_us-gaap_StatementTable_BF8D028C2AFBD014FA1BF541ED75229A" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementOfFinancialPositionAbstract_B99C0B800619D97DA8B8F541ED753785" xlink:to="loc_us-gaap_StatementTable_BF8D028C2AFBD014FA1BF541ED75229A" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StatementScenarioAxis" xlink:label="loc_us-gaap_StatementScenarioAxis_EB020A4304967B4C103DF541ED76FB72" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementTable_BF8D028C2AFBD014FA1BF541ED75229A" xlink:to="loc_us-gaap_StatementScenarioAxis_EB020A4304967B4C103DF541ED76FB72" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScenarioUnspecifiedDomain" xlink:label="loc_us-gaap_ScenarioUnspecifiedDomain_75AE1F36F069E776EE2FF541ED76C6A7" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementScenarioAxis_EB020A4304967B4C103DF541ED76FB72" xlink:to="loc_us-gaap_ScenarioUnspecifiedDomain_75AE1F36F069E776EE2FF541ED76C6A7" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StatementLineItems" xlink:label="loc_us-gaap_StatementLineItems_60783097CD9F043C800CF541ED76827A" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementTable_BF8D028C2AFBD014FA1BF541ED75229A" xlink:to="loc_us-gaap_StatementLineItems_60783097CD9F043C800CF541ED76827A" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AssetsCurrentAbstract" xlink:label="loc_us-gaap_AssetsCurrentAbstract_D946321B257CB8E2F189F541ED76E67A" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementLineItems_60783097CD9F043C800CF541ED76827A" xlink:to="loc_us-gaap_AssetsCurrentAbstract_D946321B257CB8E2F189F541ED76E67A" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent" xlink:label="loc_us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent_A648D73F223A569E959AF541ED76D470" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AssetsCurrentAbstract_D946321B257CB8E2F189F541ED76E67A" xlink:to="loc_us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent_A648D73F223A569E959AF541ED76D470" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract" xlink:label="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_804CB866243C1E9EA749F541ED76C36D" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementLineItems_60783097CD9F043C800CF541ED76827A" xlink:to="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_804CB866243C1E9EA749F541ED76C36D" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CommonStockParOrStatedValuePerShare" xlink:label="loc_us-gaap_CommonStockParOrStatedValuePerShare_8FB520BBA1DB9ADDFFD2F541ED763CAA" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_804CB866243C1E9EA749F541ED76C36D" xlink:to="loc_us-gaap_CommonStockParOrStatedValuePerShare_8FB520BBA1DB9ADDFFD2F541ED763CAA" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CommonStockSharesAuthorized" xlink:label="loc_us-gaap_CommonStockSharesAuthorized_0518041475723A0E7FE0F541ED76B421" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_804CB866243C1E9EA749F541ED76C36D" xlink:to="loc_us-gaap_CommonStockSharesAuthorized_0518041475723A0E7FE0F541ED76B421" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CommonStockSharesIssued" xlink:label="loc_us-gaap_CommonStockSharesIssued_8604DA240E76DA9C1D0DF541ED76062F" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_804CB866243C1E9EA749F541ED76C36D" xlink:to="loc_us-gaap_CommonStockSharesIssued_8604DA240E76DA9C1D0DF541ED76062F" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CommonStockSharesOutstanding" xlink:label="loc_us-gaap_CommonStockSharesOutstanding_A017E0773AA245594654F541ED7786C7" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_804CB866243C1E9EA749F541ED76C36D" xlink:to="loc_us-gaap_CommonStockSharesOutstanding_A017E0773AA245594654F541ED7786C7" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PreferredStockSharesAuthorized" xlink:label="loc_us-gaap_PreferredStockSharesAuthorized_637399D1010BDDAB86EEF541ED77C621" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_804CB866243C1E9EA749F541ED76C36D" xlink:to="loc_us-gaap_PreferredStockSharesAuthorized_637399D1010BDDAB86EEF541ED77C621" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PreferredStockSharesIssued" xlink:label="loc_us-gaap_PreferredStockSharesIssued_F5F58B34D18ABD7BFFF6F541ED779B86" xlink:type="locator" />
    <presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_804CB866243C1E9EA749F541ED76C36D" xlink:to="loc_us-gaap_PreferredStockSharesIssued_F5F58B34D18ABD7BFFF6F541ED779B86" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.amtechsystems.com/role/CondensedConsolidatedStatementsOfCashFlowsUnaudited" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StatementOfCashFlowsAbstract" xlink:label="loc_us-gaap_StatementOfCashFlowsAbstract_736E2F04BA6BB8208F7CF54B796CF6C9" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract" xlink:label="loc_us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract_1DD1E33F38B700A45F4EF54B796DB4C5" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementOfCashFlowsAbstract_736E2F04BA6BB8208F7CF54B796CF6C9" xlink:to="loc_us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract_1DD1E33F38B700A45F4EF54B796DB4C5" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProfitLoss" xlink:label="loc_us-gaap_ProfitLoss_8FDE2D9B426A84F85179F54B796DA16C" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract_1DD1E33F38B700A45F4EF54B796DB4C5" xlink:to="loc_us-gaap_ProfitLoss_8FDE2D9B426A84F85179F54B796DA16C" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract" xlink:label="loc_us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_55292F85DAE1FB1E7B37F54B796DE15F" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract_1DD1E33F38B700A45F4EF54B796DB4C5" xlink:to="loc_us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_55292F85DAE1FB1E7B37F54B796DE15F" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DepreciationDepletionAndAmortization" xlink:label="loc_us-gaap_DepreciationDepletionAndAmortization_4C1B6B1CA9C49BCDDE70F54B796DA70D" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_55292F85DAE1FB1E7B37F54B796DE15F" xlink:to="loc_us-gaap_DepreciationDepletionAndAmortization_4C1B6B1CA9C49BCDDE70F54B796DA70D" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_InventoryWriteDown" xlink:label="loc_us-gaap_InventoryWriteDown_7DEB842A02DB503523D5F54B796D3280" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_55292F85DAE1FB1E7B37F54B796DE15F" xlink:to="loc_us-gaap_InventoryWriteDown_7DEB842A02DB503523D5F54B796D3280" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncreaseDecreaseInDeferredIncomeTaxes" xlink:label="loc_us-gaap_IncreaseDecreaseInDeferredIncomeTaxes_45B1491F84F0F6649146F54B796D9EEA" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_55292F85DAE1FB1E7B37F54B796DE15F" xlink:to="loc_us-gaap_IncreaseDecreaseInDeferredIncomeTaxes_45B1491F84F0F6649146F54B796D9EEA" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensation" xlink:label="loc_us-gaap_ShareBasedCompensation_5DD8A0F919AFC92807EBF54B796DC942" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_55292F85DAE1FB1E7B37F54B796DE15F" xlink:to="loc_us-gaap_ShareBasedCompensation_5DD8A0F919AFC92807EBF54B796DC942" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProvisionForDoubtfulAccounts" xlink:label="loc_us-gaap_ProvisionForDoubtfulAccounts_82F844829C6DC98F9AB3F54B796EAFDE" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_55292F85DAE1FB1E7B37F54B796DE15F" xlink:to="loc_us-gaap_ProvisionForDoubtfulAccounts_82F844829C6DC98F9AB3F54B796EAFDE" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncreaseDecreaseInOperatingCapitalAbstract" xlink:label="loc_us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_8C38B34DC7F8F8CA4A8AF54B796E055D" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract_1DD1E33F38B700A45F4EF54B796DB4C5" xlink:to="loc_us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_8C38B34DC7F8F8CA4A8AF54B796E055D" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncreaseDecreaseInRestrictedCashForOperatingActivities" xlink:label="loc_us-gaap_IncreaseDecreaseInRestrictedCashForOperatingActivities_46765E0E0AEFE2E9CA70F54B796E040F" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_8C38B34DC7F8F8CA4A8AF54B796E055D" xlink:to="loc_us-gaap_IncreaseDecreaseInRestrictedCashForOperatingActivities_46765E0E0AEFE2E9CA70F54B796E040F" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncreaseDecreaseInAccountsReceivable" xlink:label="loc_us-gaap_IncreaseDecreaseInAccountsReceivable_5B0069F141609898B76DF54B796E7193" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_8C38B34DC7F8F8CA4A8AF54B796E055D" xlink:to="loc_us-gaap_IncreaseDecreaseInAccountsReceivable_5B0069F141609898B76DF54B796E7193" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncreaseDecreaseInInventories" xlink:label="loc_us-gaap_IncreaseDecreaseInInventories_AC64FAC81EA867B87C5DF54B796E0E36" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_8C38B34DC7F8F8CA4A8AF54B796E055D" xlink:to="loc_us-gaap_IncreaseDecreaseInInventories_AC64FAC81EA867B87C5DF54B796E0E36" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable" xlink:label="loc_us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable_0ECCA0B7CEB2EB466F8EF54B796E3F7E" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_8C38B34DC7F8F8CA4A8AF54B796E055D" xlink:to="loc_us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable_0ECCA0B7CEB2EB466F8EF54B796E3F7E" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets" xlink:label="loc_us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets_DA845B5C0465FA0DE20DF54B796E0A8D" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_8C38B34DC7F8F8CA4A8AF54B796E055D" xlink:to="loc_us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets_DA845B5C0465FA0DE20DF54B796E0A8D" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncreaseDecreaseInAccountsPayable" xlink:label="loc_us-gaap_IncreaseDecreaseInAccountsPayable_2E29712B16E0B7704E50F54B796E8D0F" xlink:type="locator" />
    <presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_8C38B34DC7F8F8CA4A8AF54B796E055D" xlink:to="loc_us-gaap_IncreaseDecreaseInAccountsPayable_2E29712B16E0B7704E50F54B796E8D0F" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_IncreaseDecreaseInAccruedLiabilitiesAndCustomerDeposits" xlink:label="loc_asys_IncreaseDecreaseInAccruedLiabilitiesAndCustomerDeposits_F7684C671BC7D54FEBEAF54B796EFE5B" xlink:type="locator" />
    <presentationArc order="7" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_8C38B34DC7F8F8CA4A8AF54B796E055D" xlink:to="loc_asys_IncreaseDecreaseInAccruedLiabilitiesAndCustomerDeposits_F7684C671BC7D54FEBEAF54B796EFE5B" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_IncreaseDecreaseInDeferredProfit" xlink:label="loc_asys_IncreaseDecreaseInDeferredProfit_7BF2ACED1120931E711CF54B796F6C12" xlink:type="locator" />
    <presentationArc order="8" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_8C38B34DC7F8F8CA4A8AF54B796E055D" xlink:to="loc_asys_IncreaseDecreaseInDeferredProfit_7BF2ACED1120931E711CF54B796F6C12" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:label="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_4F83EE3B0CF4AEBD9E64F54B796F8B72" xlink:type="locator" />
    <presentationArc order="9" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_8C38B34DC7F8F8CA4A8AF54B796E055D" xlink:to="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_4F83EE3B0CF4AEBD9E64F54B796F8B72" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract" xlink:label="loc_us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract_1C00CECCD0469848F24BF54B796F9C8A" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementOfCashFlowsAbstract_736E2F04BA6BB8208F7CF54B796CF6C9" xlink:to="loc_us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract_1C00CECCD0469848F24BF54B796F9C8A" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PaymentsToAcquirePropertyPlantAndEquipment" xlink:label="loc_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_63722D9E77C8AE85CA32F54B796F701F" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract_1C00CECCD0469848F24BF54B796F9C8A" xlink:to="loc_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_63722D9E77C8AE85CA32F54B796F701F" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CashAcquiredInExcessOfPaymentsToAcquireBusiness" xlink:label="loc_us-gaap_CashAcquiredInExcessOfPaymentsToAcquireBusiness_22B2E2B409ADA1F46090F54B796F339F" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract_1C00CECCD0469848F24BF54B796F9C8A" xlink:to="loc_us-gaap_CashAcquiredInExcessOfPaymentsToAcquireBusiness_22B2E2B409ADA1F46090F54B796F339F" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NetCashProvidedByUsedInInvestingActivities" xlink:label="loc_us-gaap_NetCashProvidedByUsedInInvestingActivities_ACFF6100747CADD89748F54B796F07EC" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract_1C00CECCD0469848F24BF54B796F9C8A" xlink:to="loc_us-gaap_NetCashProvidedByUsedInInvestingActivities_ACFF6100747CADD89748F54B796F07EC" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract" xlink:label="loc_us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_F117B2735420D1ACCCCFF54B796FA513" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementOfCashFlowsAbstract_736E2F04BA6BB8208F7CF54B796CF6C9" xlink:to="loc_us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_F117B2735420D1ACCCCFF54B796FA513" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProceedsFromIssuanceOfCommonStock" xlink:label="loc_us-gaap_ProceedsFromIssuanceOfCommonStock_C2A0E39C433B3ED73783F54B796F5020" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_F117B2735420D1ACCCCFF54B796FA513" xlink:to="loc_us-gaap_ProceedsFromIssuanceOfCommonStock_C2A0E39C433B3ED73783F54B796F5020" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RepaymentsOfLongTermDebt" xlink:label="loc_us-gaap_RepaymentsOfLongTermDebt_F0025D6FC6BA2D880253F54B796F4E8E" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_F117B2735420D1ACCCCFF54B796FA513" xlink:to="loc_us-gaap_RepaymentsOfLongTermDebt_F0025D6FC6BA2D880253F54B796F4E8E" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProceedsFromIssuanceOfLongTermDebt" xlink:label="loc_us-gaap_ProceedsFromIssuanceOfLongTermDebt_6F18C2964C00570E8435F54B796F9714" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_F117B2735420D1ACCCCFF54B796FA513" xlink:to="loc_us-gaap_ProceedsFromIssuanceOfLongTermDebt_6F18C2964C00570E8435F54B796F9714" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ExcessTaxBenefitFromShareBasedCompensationFinancingActivities" xlink:label="loc_us-gaap_ExcessTaxBenefitFromShareBasedCompensationFinancingActivities_222F182B41A4BF752F52F54B797060C0" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_F117B2735420D1ACCCCFF54B796FA513" xlink:to="loc_us-gaap_ExcessTaxBenefitFromShareBasedCompensationFinancingActivities_222F182B41A4BF752F52F54B797060C0" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NetCashProvidedByUsedInFinancingActivities" xlink:label="loc_us-gaap_NetCashProvidedByUsedInFinancingActivities_5503B75427C51ADE0B74F54B79702623" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_F117B2735420D1ACCCCFF54B796FA513" xlink:to="loc_us-gaap_NetCashProvidedByUsedInFinancingActivities_5503B75427C51ADE0B74F54B79702623" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EffectOfExchangeRateOnCashAndCashEquivalents" xlink:label="loc_us-gaap_EffectOfExchangeRateOnCashAndCashEquivalents_1D863FC006CE2B80231BF54B79702D52" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementOfCashFlowsAbstract_736E2F04BA6BB8208F7CF54B796CF6C9" xlink:to="loc_us-gaap_EffectOfExchangeRateOnCashAndCashEquivalents_1D863FC006CE2B80231BF54B79702D52" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CashAndCashEquivalentsPeriodIncreaseDecrease" xlink:label="loc_us-gaap_CashAndCashEquivalentsPeriodIncreaseDecrease_54509A5EE28517E2BD2BF54B7970CC37" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementOfCashFlowsAbstract_736E2F04BA6BB8208F7CF54B796CF6C9" xlink:to="loc_us-gaap_CashAndCashEquivalentsPeriodIncreaseDecrease_54509A5EE28517E2BD2BF54B7970CC37" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CashAndCashEquivalentsAtCarryingValue" xlink:label="loc_us-gaap_CashAndCashEquivalentsAtCarryingValue_A4D11F6478F16461A524F54B79705BE5" xlink:type="locator" />
    <presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementOfCashFlowsAbstract_736E2F04BA6BB8208F7CF54B796CF6C9" xlink:to="loc_us-gaap_CashAndCashEquivalentsAtCarryingValue_A4D11F6478F16461A524F54B79705BE5" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CashAndCashEquivalentsAtCarryingValue" xlink:label="loc_us-gaap_CashAndCashEquivalentsAtCarryingValue_E0C7C80B23383498C7ABF54B79700D6D" xlink:type="locator" />
    <presentationArc order="7" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementOfCashFlowsAbstract_736E2F04BA6BB8208F7CF54B796CF6C9" xlink:to="loc_us-gaap_CashAndCashEquivalentsAtCarryingValue_E0C7C80B23383498C7ABF54B79700D6D" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SupplementalCashFlowInformationAbstract" xlink:label="loc_us-gaap_SupplementalCashFlowInformationAbstract_C546B7008265E1FF916EF54B7970A842" xlink:type="locator" />
    <presentationArc order="8" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementOfCashFlowsAbstract_736E2F04BA6BB8208F7CF54B796CF6C9" xlink:to="loc_us-gaap_SupplementalCashFlowInformationAbstract_C546B7008265E1FF916EF54B7970A842" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProceedsFromIncomeTaxRefunds" xlink:label="loc_us-gaap_ProceedsFromIncomeTaxRefunds_98A0458625363F66C62BF54B797181B6" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SupplementalCashFlowInformationAbstract_C546B7008265E1FF916EF54B7970A842" xlink:to="loc_us-gaap_ProceedsFromIncomeTaxRefunds_98A0458625363F66C62BF54B797181B6" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncomeTaxesPaid" xlink:label="loc_us-gaap_IncomeTaxesPaid_A1F1EB71D40ED70342FBF54BE95D7802" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SupplementalCashFlowInformationAbstract_C546B7008265E1FF916EF54B7970A842" xlink:to="loc_us-gaap_IncomeTaxesPaid_A1F1EB71D40ED70342FBF54BE95D7802" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StockIssued1" xlink:label="loc_us-gaap_StockIssued1_00A7253C768EFB631186F54B79718A4A" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SupplementalCashFlowInformationAbstract_C546B7008265E1FF916EF54B7970A842" xlink:to="loc_us-gaap_StockIssued1_00A7253C768EFB631186F54B79718A4A" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.amtechsystems.com/role/CondensedConsolidatedStatementsOfComprehensiveIncomeLossUnaudited" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract" xlink:label="loc_us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract_85ECDB3479C1872E08F6F54BDEEF25B0" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProfitLoss" xlink:label="loc_us-gaap_ProfitLoss_D6B2D84B105355632E99F54BDEEF198B" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract_85ECDB3479C1872E08F6F54BDEEF25B0" xlink:to="loc_us-gaap_ProfitLoss_D6B2D84B105355632E99F54BDEEF198B" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax" xlink:label="loc_us-gaap_OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax_5CC877257EB54336D479F54BDEEFCC10" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract_85ECDB3479C1872E08F6F54BDEEF25B0" xlink:to="loc_us-gaap_OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax_5CC877257EB54336D479F54BDEEFCC10" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ComprehensiveIncomeNetOfTaxIncludingPortionAttributableToNoncontrollingInterest" xlink:label="loc_us-gaap_ComprehensiveIncomeNetOfTaxIncludingPortionAttributableToNoncontrollingInterest_07D62C99D43A274EB97AF54BDEEFE704" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract_85ECDB3479C1872E08F6F54BDEEF25B0" xlink:to="loc_us-gaap_ComprehensiveIncomeNetOfTaxIncludingPortionAttributableToNoncontrollingInterest_07D62C99D43A274EB97AF54BDEEFE704" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ComprehensiveIncomeNetOfTaxAttributableToNoncontrollingInterest" xlink:label="loc_us-gaap_ComprehensiveIncomeNetOfTaxAttributableToNoncontrollingInterest_28062902579CBF1019B0F54BDEEF07E8" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract_85ECDB3479C1872E08F6F54BDEEF25B0" xlink:to="loc_us-gaap_ComprehensiveIncomeNetOfTaxAttributableToNoncontrollingInterest_28062902579CBF1019B0F54BDEEF07E8" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ComprehensiveIncomeNetOfTax" xlink:label="loc_us-gaap_ComprehensiveIncomeNetOfTax_56740549F69060437D31F54BDEEF180F" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract_85ECDB3479C1872E08F6F54BDEEF25B0" xlink:to="loc_us-gaap_ComprehensiveIncomeNetOfTax_56740549F69060437D31F54BDEEF180F" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.amtechsystems.com/role/CondensedConsolidatedStatementsOfOperationsUnaudited" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncomeStatementAbstract" xlink:label="loc_us-gaap_IncomeStatementAbstract_54A883B70CF073825AB5FB79B168DC43" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SalesRevenueNet" xlink:label="loc_us-gaap_SalesRevenueNet_9C879756BB924F879515FB79B1683DDC" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncomeStatementAbstract_54A883B70CF073825AB5FB79B168DC43" xlink:to="loc_us-gaap_SalesRevenueNet_9C879756BB924F879515FB79B1683DDC" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CostOfGoodsAndServicesSold" xlink:label="loc_us-gaap_CostOfGoodsAndServicesSold_AD0F34DDB33E9F0EFB78FB79B168EC7B" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncomeStatementAbstract_54A883B70CF073825AB5FB79B168DC43" xlink:to="loc_us-gaap_CostOfGoodsAndServicesSold_AD0F34DDB33E9F0EFB78FB79B168EC7B" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GrossProfit" xlink:label="loc_us-gaap_GrossProfit_2E37988EFCDF5FACF662FB79B168D1E5" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncomeStatementAbstract_54A883B70CF073825AB5FB79B168DC43" xlink:to="loc_us-gaap_GrossProfit_2E37988EFCDF5FACF662FB79B168D1E5" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SellingGeneralAndAdministrativeExpense" xlink:label="loc_us-gaap_SellingGeneralAndAdministrativeExpense_3BAE72EAE647368660D6FB79B1688FA3" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncomeStatementAbstract_54A883B70CF073825AB5FB79B168DC43" xlink:to="loc_us-gaap_SellingGeneralAndAdministrativeExpense_3BAE72EAE647368660D6FB79B1688FA3" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_ResearchAndDevelopmentNetOfGrantsEarned" xlink:label="loc_asys_ResearchAndDevelopmentNetOfGrantsEarned_4C60663569B9050A8BE5FB79B1689B15" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncomeStatementAbstract_54A883B70CF073825AB5FB79B168DC43" xlink:to="loc_asys_ResearchAndDevelopmentNetOfGrantsEarned_4C60663569B9050A8BE5FB79B1689B15" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OperatingIncomeLoss" xlink:label="loc_us-gaap_OperatingIncomeLoss_D1907055E231F43C28C5FB79B16853DB" xlink:type="locator" />
    <presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncomeStatementAbstract_54A883B70CF073825AB5FB79B168DC43" xlink:to="loc_us-gaap_OperatingIncomeLoss_D1907055E231F43C28C5FB79B16853DB" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherNonoperatingIncomeExpense" xlink:label="loc_us-gaap_OtherNonoperatingIncomeExpense_FDC31B91043D533041D8FB79B16806D4" xlink:type="locator" />
    <presentationArc order="7" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncomeStatementAbstract_54A883B70CF073825AB5FB79B168DC43" xlink:to="loc_us-gaap_OtherNonoperatingIncomeExpense_FDC31B91043D533041D8FB79B16806D4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments" xlink:label="loc_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments_CB841CDD60A8953500FBFB79B168431E" xlink:type="locator" />
    <presentationArc order="8" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncomeStatementAbstract_54A883B70CF073825AB5FB79B168DC43" xlink:to="loc_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments_CB841CDD60A8953500FBFB79B168431E" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncomeTaxExpenseBenefit" xlink:label="loc_us-gaap_IncomeTaxExpenseBenefit_8E85FA0B6B2DF3AB9458FB79B16821A4" xlink:type="locator" />
    <presentationArc order="9" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncomeStatementAbstract_54A883B70CF073825AB5FB79B168DC43" xlink:to="loc_us-gaap_IncomeTaxExpenseBenefit_8E85FA0B6B2DF3AB9458FB79B16821A4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProfitLoss" xlink:label="loc_us-gaap_ProfitLoss_37BFF604C8A3249FBED9FB79B168348C" xlink:type="locator" />
    <presentationArc order="10" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncomeStatementAbstract_54A883B70CF073825AB5FB79B168DC43" xlink:to="loc_us-gaap_ProfitLoss_37BFF604C8A3249FBED9FB79B168348C" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NetIncomeLossAttributableToNoncontrollingInterest" xlink:label="loc_us-gaap_NetIncomeLossAttributableToNoncontrollingInterest_2969C29993C0A7F5FDCAFB79B168E1F2" xlink:type="locator" />
    <presentationArc order="11" preferredLabel="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncomeStatementAbstract_54A883B70CF073825AB5FB79B168DC43" xlink:to="loc_us-gaap_NetIncomeLossAttributableToNoncontrollingInterest_2969C29993C0A7F5FDCAFB79B168E1F2" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NetIncomeLoss" xlink:label="loc_us-gaap_NetIncomeLoss_9360F27692C2A9D529ADFB79B168A19C" xlink:type="locator" />
    <presentationArc order="12" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncomeStatementAbstract_54A883B70CF073825AB5FB79B168DC43" xlink:to="loc_us-gaap_NetIncomeLoss_9360F27692C2A9D529ADFB79B168A19C" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EarningsPerShareAbstract" xlink:label="loc_us-gaap_EarningsPerShareAbstract_9F03F490329FA6DB74A5FB79B1698B50" xlink:type="locator" />
    <presentationArc order="13" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncomeStatementAbstract_54A883B70CF073825AB5FB79B168DC43" xlink:to="loc_us-gaap_EarningsPerShareAbstract_9F03F490329FA6DB74A5FB79B1698B50" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EarningsPerShareBasic" xlink:label="loc_us-gaap_EarningsPerShareBasic_DFB25506FEC44BDE61FCFB79B169B4F5" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_EarningsPerShareAbstract_9F03F490329FA6DB74A5FB79B1698B50" xlink:to="loc_us-gaap_EarningsPerShareBasic_DFB25506FEC44BDE61FCFB79B169B4F5" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_WeightedAverageNumberOfSharesOutstandingBasic" xlink:label="loc_us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_97BB72E2D6F14FF26E49FB79B169DB15" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_EarningsPerShareAbstract_9F03F490329FA6DB74A5FB79B1698B50" xlink:to="loc_us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_97BB72E2D6F14FF26E49FB79B169DB15" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EarningsPerShareDiluted" xlink:label="loc_us-gaap_EarningsPerShareDiluted_5271CE6601FD2BB1B3FDFB79B169A4EF" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_EarningsPerShareAbstract_9F03F490329FA6DB74A5FB79B1698B50" xlink:to="loc_us-gaap_EarningsPerShareDiluted_5271CE6601FD2BB1B3FDFB79B169A4EF" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding" xlink:label="loc_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_87A08EA067CF789AE66CFB79B1697FBB" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_EarningsPerShareAbstract_9F03F490329FA6DB74A5FB79B1698B50" xlink:to="loc_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_87A08EA067CF789AE66CFB79B1697FBB" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.amtechsystems.com/role/DocumentAndEntityInformation" xlink:type="extended">
    <loc xlink:href="asys-20150630.xsd#asys_DocumentAndEntityInformationAbstract" xlink:label="loc_asys_DocumentAndEntityInformationAbstract_025127A9FEC9B9846723F541ED4FD7CD" xlink:type="locator" />
    <loc xlink:href="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd#dei_EntityRegistrantName" xlink:label="loc_dei_EntityRegistrantName_D2E018C3BFECA4946243F541ED4FE042" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_asys_DocumentAndEntityInformationAbstract_025127A9FEC9B9846723F541ED4FD7CD" xlink:to="loc_dei_EntityRegistrantName_D2E018C3BFECA4946243F541ED4FE042" xlink:type="arc" />
    <loc xlink:href="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd#dei_EntityCentralIndexKey" xlink:label="loc_dei_EntityCentralIndexKey_DDDED5D5373ADF7ED942F541ED4F4A2A" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_asys_DocumentAndEntityInformationAbstract_025127A9FEC9B9846723F541ED4FD7CD" xlink:to="loc_dei_EntityCentralIndexKey_DDDED5D5373ADF7ED942F541ED4F4A2A" xlink:type="arc" />
    <loc xlink:href="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd#dei_CurrentFiscalYearEndDate" xlink:label="loc_dei_CurrentFiscalYearEndDate_CDBB169ED4884FA85B07F541ED4F0242" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_asys_DocumentAndEntityInformationAbstract_025127A9FEC9B9846723F541ED4FD7CD" xlink:to="loc_dei_CurrentFiscalYearEndDate_CDBB169ED4884FA85B07F541ED4F0242" xlink:type="arc" />
    <loc xlink:href="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd#dei_EntityFilerCategory" xlink:label="loc_dei_EntityFilerCategory_AC363FAC08357BC79C4EF541ED50BE10" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_asys_DocumentAndEntityInformationAbstract_025127A9FEC9B9846723F541ED4FD7CD" xlink:to="loc_dei_EntityFilerCategory_AC363FAC08357BC79C4EF541ED50BE10" xlink:type="arc" />
    <loc xlink:href="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd#dei_DocumentType" xlink:label="loc_dei_DocumentType_2D1497FC1600DDB8577BF541ED50FA98" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_asys_DocumentAndEntityInformationAbstract_025127A9FEC9B9846723F541ED4FD7CD" xlink:to="loc_dei_DocumentType_2D1497FC1600DDB8577BF541ED50FA98" xlink:type="arc" />
    <loc xlink:href="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd#dei_DocumentPeriodEndDate" xlink:label="loc_dei_DocumentPeriodEndDate_D2ABD6F513A06DE9CDCBF541ED50B588" xlink:type="locator" />
    <presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_asys_DocumentAndEntityInformationAbstract_025127A9FEC9B9846723F541ED4FD7CD" xlink:to="loc_dei_DocumentPeriodEndDate_D2ABD6F513A06DE9CDCBF541ED50B588" xlink:type="arc" />
    <loc xlink:href="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd#dei_DocumentFiscalYearFocus" xlink:label="loc_dei_DocumentFiscalYearFocus_C85519DCA26D0651CFB0F541ED5099E8" xlink:type="locator" />
    <presentationArc order="7" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_asys_DocumentAndEntityInformationAbstract_025127A9FEC9B9846723F541ED4FD7CD" xlink:to="loc_dei_DocumentFiscalYearFocus_C85519DCA26D0651CFB0F541ED5099E8" xlink:type="arc" />
    <loc xlink:href="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd#dei_DocumentFiscalPeriodFocus" xlink:label="loc_dei_DocumentFiscalPeriodFocus_3B8E346B18B65D72A604F541ED50BDDF" xlink:type="locator" />
    <presentationArc order="8" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_asys_DocumentAndEntityInformationAbstract_025127A9FEC9B9846723F541ED4FD7CD" xlink:to="loc_dei_DocumentFiscalPeriodFocus_3B8E346B18B65D72A604F541ED50BDDF" xlink:type="arc" />
    <loc xlink:href="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd#dei_AmendmentFlag" xlink:label="loc_dei_AmendmentFlag_8106EDA33FD577377A3EF541ED502B42" xlink:type="locator" />
    <presentationArc order="9" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_asys_DocumentAndEntityInformationAbstract_025127A9FEC9B9846723F541ED4FD7CD" xlink:to="loc_dei_AmendmentFlag_8106EDA33FD577377A3EF541ED502B42" xlink:type="arc" />
    <loc xlink:href="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd#dei_EntityCommonStockSharesOutstanding" xlink:label="loc_dei_EntityCommonStockSharesOutstanding_0344F13844C5DB273D83F541ED50A2A9" xlink:type="locator" />
    <presentationArc order="10" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_asys_DocumentAndEntityInformationAbstract_025127A9FEC9B9846723F541ED4FD7CD" xlink:to="loc_dei_EntityCommonStockSharesOutstanding_0344F13844C5DB273D83F541ED50A2A9" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.amtechsystems.com/role/EarningsPerShare" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EarningsPerShareAbstract" xlink:label="loc_us-gaap_EarningsPerShareAbstract_877A3450FEBF49F720CDF541EEC1640B" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EarningsPerShareTextBlock" xlink:label="loc_us-gaap_EarningsPerShareTextBlock_FE1BACAB8D35C59F5918F541EEC16544" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_EarningsPerShareAbstract_877A3450FEBF49F720CDF541EEC1640B" xlink:to="loc_us-gaap_EarningsPerShareTextBlock_FE1BACAB8D35C59F5918F541EEC16544" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.amtechsystems.com/role/EarningsPerShareDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EarningsPerShareAbstract" xlink:label="loc_us-gaap_EarningsPerShareAbstract_8D2034906E3DED2A0CA7F54BDE954EAC" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfAntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareTable" xlink:label="loc_us-gaap_ScheduleOfAntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareTable_E69AF24EE9E44D95E3EEF54BDE959CE5" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_EarningsPerShareAbstract_8D2034906E3DED2A0CA7F54BDE954EAC" xlink:to="loc_us-gaap_ScheduleOfAntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareTable_E69AF24EE9E44D95E3EEF54BDE959CE5" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis" xlink:label="loc_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_BC005BD42388AAC654BFF54BDE952EA7" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfAntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareTable_E69AF24EE9E44D95E3EEF54BDE959CE5" xlink:to="loc_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_BC005BD42388AAC654BFF54BDE952EA7" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AntidilutiveSecuritiesNameDomain" xlink:label="loc_us-gaap_AntidilutiveSecuritiesNameDomain_E03ACF0A96E645270E41F54BDE963087" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_BC005BD42388AAC654BFF54BDE952EA7" xlink:to="loc_us-gaap_AntidilutiveSecuritiesNameDomain_E03ACF0A96E645270E41F54BDE963087" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EmployeeStockOptionMember" xlink:label="loc_us-gaap_EmployeeStockOptionMember_6130A33AB67FFCA847E4F54BDE96B651" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AntidilutiveSecuritiesNameDomain_E03ACF0A96E645270E41F54BDE963087" xlink:to="loc_us-gaap_EmployeeStockOptionMember_6130A33AB67FFCA847E4F54BDE96B651" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RestrictedStockMember" xlink:label="loc_us-gaap_RestrictedStockMember_0C77E7E4E3BC39E5B5EFF54BDE964AB5" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AntidilutiveSecuritiesNameDomain_E03ACF0A96E645270E41F54BDE963087" xlink:to="loc_us-gaap_RestrictedStockMember_0C77E7E4E3BC39E5B5EFF54BDE964AB5" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems" xlink:label="loc_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems_746D48DA5F74E40E4878F54BDE963954" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfAntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareTable_E69AF24EE9E44D95E3EEF54BDE959CE5" xlink:to="loc_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems_746D48DA5F74E40E4878F54BDE963954" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount" xlink:label="loc_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount_C246AF85079AC82EDDD5F54BDE96660C" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems_746D48DA5F74E40E4878F54BDE963954" xlink:to="loc_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount_C246AF85079AC82EDDD5F54BDE96660C" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NetIncomeLoss" xlink:label="loc_us-gaap_NetIncomeLoss_A8E1522E2341FECC5854F54BDE96DD06" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_EarningsPerShareAbstract_8D2034906E3DED2A0CA7F54BDE954EAC" xlink:to="loc_us-gaap_NetIncomeLoss_A8E1522E2341FECC5854F54BDE96DD06" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_WeightedAverageNumberOfSharesOutstandingBasic" xlink:label="loc_us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_FB5E7A75FA45E8CDA379F54BDE96C3D8" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_EarningsPerShareAbstract_8D2034906E3DED2A0CA7F54BDE954EAC" xlink:to="loc_us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_FB5E7A75FA45E8CDA379F54BDE96C3D8" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EarningsPerShareBasic" xlink:label="loc_us-gaap_EarningsPerShareBasic_4F29818A316EA3202F25F54BDE968FF0" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_EarningsPerShareAbstract_8D2034906E3DED2A0CA7F54BDE954EAC" xlink:to="loc_us-gaap_EarningsPerShareBasic_4F29818A316EA3202F25F54BDE968FF0" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_WeightedAverageNumberDilutedSharesOutstandingAdjustment" xlink:label="loc_us-gaap_WeightedAverageNumberDilutedSharesOutstandingAdjustment_43B919785A7FDC45E41AF54BDE965F56" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_EarningsPerShareAbstract_8D2034906E3DED2A0CA7F54BDE954EAC" xlink:to="loc_us-gaap_WeightedAverageNumberDilutedSharesOutstandingAdjustment_43B919785A7FDC45E41AF54BDE965F56" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding" xlink:label="loc_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_99BE55141790D85A5F9BF54BDE966E7E" xlink:type="locator" />
    <presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_EarningsPerShareAbstract_8D2034906E3DED2A0CA7F54BDE954EAC" xlink:to="loc_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_99BE55141790D85A5F9BF54BDE966E7E" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EarningsPerShareDiluted" xlink:label="loc_us-gaap_EarningsPerShareDiluted_9B1682C061D095222CB2F54BDE963F0B" xlink:type="locator" />
    <presentationArc order="7" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_EarningsPerShareAbstract_8D2034906E3DED2A0CA7F54BDE954EAC" xlink:to="loc_us-gaap_EarningsPerShareDiluted_9B1682C061D095222CB2F54BDE963F0B" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.amtechsystems.com/role/EarningsPerShareTables" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EarningsPerShareAbstract" xlink:label="loc_us-gaap_EarningsPerShareAbstract_4F87B2103E01827E7F85F541ED15BF63" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock" xlink:label="loc_us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock_ACB4BD6AFAC9D76FCF55F541ED15346B" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_EarningsPerShareAbstract_4F87B2103E01827E7F85F541ED15BF63" xlink:to="loc_us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock_ACB4BD6AFAC9D76FCF55F541ED15346B" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.amtechsystems.com/role/IncomeTaxes" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncomeTaxDisclosureAbstract" xlink:label="loc_us-gaap_IncomeTaxDisclosureAbstract_4785BBA5E0F306FB5AE7F541ED52441E" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncomeTaxDisclosureTextBlock" xlink:label="loc_us-gaap_IncomeTaxDisclosureTextBlock_1953A731A08964FF2B04F541ED524D81" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncomeTaxDisclosureAbstract_4785BBA5E0F306FB5AE7F541ED52441E" xlink:to="loc_us-gaap_IncomeTaxDisclosureTextBlock_1953A731A08964FF2B04F541ED524D81" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.amtechsystems.com/role/IncomeTaxesDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncomeTaxDisclosureAbstract" xlink:label="loc_us-gaap_IncomeTaxDisclosureAbstract_AAF214E3DAFC404B339FF54BDE9EC1D5" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncomeTaxContingencyTable" xlink:label="loc_us-gaap_IncomeTaxContingencyTable_00B66C876DABB0C89BDAF54BDE9E29FD" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncomeTaxDisclosureAbstract_AAF214E3DAFC404B339FF54BDE9EC1D5" xlink:to="loc_us-gaap_IncomeTaxContingencyTable_00B66C876DABB0C89BDAF54BDE9E29FD" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeAxis" xlink:label="loc_us-gaap_RangeAxis_8630B0D638E75DA33261F54BDE9EE327" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncomeTaxContingencyTable_00B66C876DABB0C89BDAF54BDE9E29FD" xlink:to="loc_us-gaap_RangeAxis_8630B0D638E75DA33261F54BDE9EE327" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeMember" xlink:label="loc_us-gaap_RangeMember_09110E18C73AFFC51321F54BDE9F27C2" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RangeAxis_8630B0D638E75DA33261F54BDE9EE327" xlink:to="loc_us-gaap_RangeMember_09110E18C73AFFC51321F54BDE9F27C2" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MinimumMember" xlink:label="loc_us-gaap_MinimumMember_7D7019A8F29238243FBBF54BDE9F023D" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RangeMember_09110E18C73AFFC51321F54BDE9F27C2" xlink:to="loc_us-gaap_MinimumMember_7D7019A8F29238243FBBF54BDE9F023D" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MaximumMember" xlink:label="loc_us-gaap_MaximumMember_9266EF56940933EFF7AAF54BDE9F10DC" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RangeMember_09110E18C73AFFC51321F54BDE9F27C2" xlink:to="loc_us-gaap_MaximumMember_9266EF56940933EFF7AAF54BDE9F10DC" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncomeTaxContingencyLineItems" xlink:label="loc_us-gaap_IncomeTaxContingencyLineItems_CEC58CBF507EFED22C4EF54BDE9FB482" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncomeTaxContingencyTable_00B66C876DABB0C89BDAF54BDE9E29FD" xlink:to="loc_us-gaap_IncomeTaxContingencyLineItems_CEC58CBF507EFED22C4EF54BDE9FB482" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount" xlink:label="loc_us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount_7FBC949FFBCA836E7A00F55368563AB0" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncomeTaxContingencyLineItems_CEC58CBF507EFED22C4EF54BDE9FB482" xlink:to="loc_us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount_7FBC949FFBCA836E7A00F55368563AB0" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate" xlink:label="loc_us-gaap_UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate_2FD1905B71D0F1C413FDF54BDE9FAAFB" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncomeTaxContingencyLineItems_CEC58CBF507EFED22C4EF54BDE9FB482" xlink:to="loc_us-gaap_UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate_2FD1905B71D0F1C413FDF54BDE9FAAFB" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued" xlink:label="loc_us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued_EE359A8640896175930CF54BDE9FA8A8" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncomeTaxContingencyLineItems_CEC58CBF507EFED22C4EF54BDE9FB482" xlink:to="loc_us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued_EE359A8640896175930CF54BDE9FA8A8" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_IncomeTaxExaminationNumberofYearsGenerallyOpenForTaxExaminations" xlink:label="loc_asys_IncomeTaxExaminationNumberofYearsGenerallyOpenForTaxExaminations_4AE411B8BFBDFA4A9F4DF54BDE9FD0B4" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncomeTaxContingencyLineItems_CEC58CBF507EFED22C4EF54BDE9FB482" xlink:to="loc_asys_IncomeTaxExaminationNumberofYearsGenerallyOpenForTaxExaminations_4AE411B8BFBDFA4A9F4DF54BDE9FD0B4" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.amtechsystems.com/role/LongTermDebt" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DebtDisclosureAbstract" xlink:label="loc_us-gaap_DebtDisclosureAbstract_3FABBC9E23699FF69738F541EE739616" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LongTermDebtTextBlock" xlink:label="loc_us-gaap_LongTermDebtTextBlock_2DD6846ECE977855B9DFF541EE73B865" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_DebtDisclosureAbstract_3FABBC9E23699FF69738F541EE739616" xlink:to="loc_us-gaap_LongTermDebtTextBlock_2DD6846ECE977855B9DFF541EE73B865" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.amtechsystems.com/role/LongTermDebtDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DebtDisclosureAbstract" xlink:label="loc_us-gaap_DebtDisclosureAbstract_35C72B4D35323886BA94F541ED0ADBD2" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DebtInstrumentTable" xlink:label="loc_us-gaap_DebtInstrumentTable_E3EBFD2E3662D315CE86F541ED0A2CFB" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_DebtDisclosureAbstract_35C72B4D35323886BA94F541ED0ADBD2" xlink:to="loc_us-gaap_DebtInstrumentTable_E3EBFD2E3662D315CE86F541ED0A2CFB" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionAxis" xlink:label="loc_us-gaap_BusinessAcquisitionAxis_92E240E4B4A726873E20F541ED0AF637" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_DebtInstrumentTable_E3EBFD2E3662D315CE86F541ED0A2CFB" xlink:to="loc_us-gaap_BusinessAcquisitionAxis_92E240E4B4A726873E20F541ED0AF637" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionAcquireeDomain" xlink:label="loc_us-gaap_BusinessAcquisitionAcquireeDomain_E77E018988D13E6BCC98F541ED0ABD60" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BusinessAcquisitionAxis_92E240E4B4A726873E20F541ED0AF637" xlink:to="loc_us-gaap_BusinessAcquisitionAcquireeDomain_E77E018988D13E6BCC98F541ED0ABD60" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_BTUInternationalIncBTUMergerMember" xlink:label="loc_asys_BTUInternationalIncBTUMergerMember_AAA970A0F540DEDD182AF541ED0A0D06" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BusinessAcquisitionAcquireeDomain_E77E018988D13E6BCC98F541ED0ABD60" xlink:to="loc_asys_BTUInternationalIncBTUMergerMember_AAA970A0F540DEDD182AF541ED0A0D06" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_SoLayTecB.V.Member" xlink:label="loc_asys_SoLayTecB.V.Member_F4E7A086F905D060C6D9F541ED0A823C" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BusinessAcquisitionAcquireeDomain_E77E018988D13E6BCC98F541ED0ABD60" xlink:to="loc_asys_SoLayTecB.V.Member_F4E7A086F905D060C6D9F541ED0A823C" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeAxis" xlink:label="loc_us-gaap_RangeAxis_472919814F0BB3C9B284F541ED0A9FE9" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_DebtInstrumentTable_E3EBFD2E3662D315CE86F541ED0A2CFB" xlink:to="loc_us-gaap_RangeAxis_472919814F0BB3C9B284F541ED0A9FE9" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeMember" xlink:label="loc_us-gaap_RangeMember_ABEFD14260A64900A5D8F541ED0AC389" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RangeAxis_472919814F0BB3C9B284F541ED0A9FE9" xlink:to="loc_us-gaap_RangeMember_ABEFD14260A64900A5D8F541ED0AC389" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MinimumMember" xlink:label="loc_us-gaap_MinimumMember_F9FDC320046F03B5CFE6F541ED0B379F" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RangeMember_ABEFD14260A64900A5D8F541ED0AC389" xlink:to="loc_us-gaap_MinimumMember_F9FDC320046F03B5CFE6F541ED0B379F" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MaximumMember" xlink:label="loc_us-gaap_MaximumMember_94FCA5BA6B6DB17B994DF541ED0BE81C" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RangeMember_ABEFD14260A64900A5D8F541ED0AC389" xlink:to="loc_us-gaap_MaximumMember_94FCA5BA6B6DB17B994DF541ED0BE81C" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DebtInstrumentLineItems" xlink:label="loc_us-gaap_DebtInstrumentLineItems_1F767833667823579DC4F541ED0B207C" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_DebtInstrumentTable_E3EBFD2E3662D315CE86F541ED0A2CFB" xlink:to="loc_us-gaap_DebtInstrumentLineItems_1F767833667823579DC4F541ED0B207C" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNoncurrentLiabilitiesLongTermDebt" xlink:label="loc_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNoncurrentLiabilitiesLongTermDebt_9192F33D69B37B2A68D7F541ED0B0592" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_DebtInstrumentLineItems_1F767833667823579DC4F541ED0B207C" xlink:to="loc_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNoncurrentLiabilitiesLongTermDebt_9192F33D69B37B2A68D7F541ED0B0592" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LongTermDebt" xlink:label="loc_us-gaap_LongTermDebt_471D4AC31E38710C2D0DF541ED0B229B" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_DebtInstrumentLineItems_1F767833667823579DC4F541ED0B207C" xlink:to="loc_us-gaap_LongTermDebt_471D4AC31E38710C2D0DF541ED0B229B" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DebtInstrumentInterestRateStatedPercentage" xlink:label="loc_us-gaap_DebtInstrumentInterestRateStatedPercentage_113E72FE1260AD2F3EC7F541ED0B0BAD" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_DebtInstrumentLineItems_1F767833667823579DC4F541ED0B207C" xlink:to="loc_us-gaap_DebtInstrumentInterestRateStatedPercentage_113E72FE1260AD2F3EC7F541ED0B0BAD" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.amtechsystems.com/role/MajorCustomersAndForeignSales" xlink:type="extended">
    <loc xlink:href="asys-20150630.xsd#asys_MajorCustomersAndForeignSalesAbstract" xlink:label="loc_asys_MajorCustomersAndForeignSalesAbstract_CB05D3A72469D00931E1F541ED308CC4" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskDisclosureTextBlock" xlink:label="loc_us-gaap_ConcentrationRiskDisclosureTextBlock_6A21FC22888C8E29787DF541ED30871B" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_asys_MajorCustomersAndForeignSalesAbstract_CB05D3A72469D00931E1F541ED308CC4" xlink:to="loc_us-gaap_ConcentrationRiskDisclosureTextBlock_6A21FC22888C8E29787DF541ED30871B" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.amtechsystems.com/role/MajorCustomersAndForeignSalesDetails" xlink:type="extended">
    <loc xlink:href="asys-20150630.xsd#asys_MajorCustomersAndForeignSalesAbstract" xlink:label="loc_asys_MajorCustomersAndForeignSalesAbstract_7431C306B84C4B019C1CF54BDE6F511A" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:label="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_14AB974B48CF22DB05CBF54BDE6FF513" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_asys_MajorCustomersAndForeignSalesAbstract_7431C306B84C4B019C1CF54BDE6F511A" xlink:to="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_14AB974B48CF22DB05CBF54BDE6FF513" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskByBenchmarkAxis" xlink:label="loc_us-gaap_ConcentrationRiskByBenchmarkAxis_8F8B0BB50D5AB1309D23F561482BDECE" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_14AB974B48CF22DB05CBF54BDE6FF513" xlink:to="loc_us-gaap_ConcentrationRiskByBenchmarkAxis_8F8B0BB50D5AB1309D23F561482BDECE" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskBenchmarkDomain" xlink:label="loc_us-gaap_ConcentrationRiskBenchmarkDomain_598DBD50078A4710A5F1F56148374F1B" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ConcentrationRiskByBenchmarkAxis_8F8B0BB50D5AB1309D23F561482BDECE" xlink:to="loc_us-gaap_ConcentrationRiskBenchmarkDomain_598DBD50078A4710A5F1F56148374F1B" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SalesRevenueNetMember" xlink:label="loc_us-gaap_SalesRevenueNetMember_A20CAFF824BA2BDEF7FEF561BB8B84BF" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ConcentrationRiskBenchmarkDomain_598DBD50078A4710A5F1F56148374F1B" xlink:to="loc_us-gaap_SalesRevenueNetMember_A20CAFF824BA2BDEF7FEF561BB8B84BF" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskByTypeAxis" xlink:label="loc_us-gaap_ConcentrationRiskByTypeAxis_3147E4CC1C9537F871D8F5612DA4567D" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_14AB974B48CF22DB05CBF54BDE6FF513" xlink:to="loc_us-gaap_ConcentrationRiskByTypeAxis_3147E4CC1C9537F871D8F5612DA4567D" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskTypeDomain" xlink:label="loc_us-gaap_ConcentrationRiskTypeDomain_88DBEE0381A6BE5B9CAAF5612DAA1432" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ConcentrationRiskByTypeAxis_3147E4CC1C9537F871D8F5612DA4567D" xlink:to="loc_us-gaap_ConcentrationRiskTypeDomain_88DBEE0381A6BE5B9CAAF5612DAA1432" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CustomerConcentrationRiskMember" xlink:label="loc_us-gaap_CustomerConcentrationRiskMember_0347FA9E66C56275314FF561689CA2B9" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ConcentrationRiskTypeDomain_88DBEE0381A6BE5B9CAAF5612DAA1432" xlink:to="loc_us-gaap_CustomerConcentrationRiskMember_0347FA9E66C56275314FF561689CA2B9" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MajorCustomersAxis" xlink:label="loc_us-gaap_MajorCustomersAxis_E9E7D1A6458A3517D081F54BDE6F0131" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_14AB974B48CF22DB05CBF54BDE6FF513" xlink:to="loc_us-gaap_MajorCustomersAxis_E9E7D1A6458A3517D081F54BDE6F0131" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NameOfMajorCustomerDomain" xlink:label="loc_us-gaap_NameOfMajorCustomerDomain_B625FC42F0B086E7D3EBF54BDE6F4245" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_MajorCustomersAxis_E9E7D1A6458A3517D081F54BDE6F0131" xlink:to="loc_us-gaap_NameOfMajorCustomerDomain_B625FC42F0B086E7D3EBF54BDE6F4245" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_CustomerNumberOneMember" xlink:label="loc_asys_CustomerNumberOneMember_F77EF397B29ED4C799E3F54BDE701F1F" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_NameOfMajorCustomerDomain_B625FC42F0B086E7D3EBF54BDE6F4245" xlink:to="loc_asys_CustomerNumberOneMember_F77EF397B29ED4C799E3F54BDE701F1F" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_CustomerNumberTwoMember" xlink:label="loc_asys_CustomerNumberTwoMember_9C646F0D5D2607AA255EF54BDE70BE60" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_NameOfMajorCustomerDomain_B625FC42F0B086E7D3EBF54BDE6F4245" xlink:to="loc_asys_CustomerNumberTwoMember_9C646F0D5D2607AA255EF54BDE70BE60" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StatementGeographicalAxis" xlink:label="loc_us-gaap_StatementGeographicalAxis_1314F6AD74745543FC15F54BDE70A56C" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_14AB974B48CF22DB05CBF54BDE6FF513" xlink:to="loc_us-gaap_StatementGeographicalAxis_1314F6AD74745543FC15F54BDE70A56C" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SegmentGeographicalDomain" xlink:label="loc_us-gaap_SegmentGeographicalDomain_FC6346FA1A596CFAAF07F54BDE701D0F" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementGeographicalAxis_1314F6AD74745543FC15F54BDE70A56C" xlink:to="loc_us-gaap_SegmentGeographicalDomain_FC6346FA1A596CFAAF07F54BDE701D0F" xlink:type="arc" />
    <loc xlink:href="http://xbrl.sec.gov/country/2013/country-2013-01-31.xsd#country_US" xlink:label="loc_country_US_6D18AF0EC26BBC375621F54BDE707FB1" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentGeographicalDomain_FC6346FA1A596CFAAF07F54BDE701D0F" xlink:to="loc_country_US_6D18AF0EC26BBC375621F54BDE707FB1" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_OtherNorthAmericaMember" xlink:label="loc_asys_OtherNorthAmericaMember_60C3EC1D4B5E24637C1DF54BDE70B057" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentGeographicalDomain_FC6346FA1A596CFAAF07F54BDE701D0F" xlink:to="loc_asys_OtherNorthAmericaMember_60C3EC1D4B5E24637C1DF54BDE70B057" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NorthAmericaMember" xlink:label="loc_us-gaap_NorthAmericaMember_3F4D34BC6078E47FC5C6F54BDE70ED3B" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentGeographicalDomain_FC6346FA1A596CFAAF07F54BDE701D0F" xlink:to="loc_us-gaap_NorthAmericaMember_3F4D34BC6078E47FC5C6F54BDE70ED3B" xlink:type="arc" />
    <loc xlink:href="http://xbrl.sec.gov/country/2013/country-2013-01-31.xsd#country_CN" xlink:label="loc_country_CN_BDDF17E67312EDD0271AF54BDE70E27E" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentGeographicalDomain_FC6346FA1A596CFAAF07F54BDE701D0F" xlink:to="loc_country_CN_BDDF17E67312EDD0271AF54BDE70E27E" xlink:type="arc" />
    <loc xlink:href="http://xbrl.sec.gov/country/2013/country-2013-01-31.xsd#country_TW" xlink:label="loc_country_TW_C87DCEBF5931C0566695F54BDE70332E" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentGeographicalDomain_FC6346FA1A596CFAAF07F54BDE701D0F" xlink:to="loc_country_TW_C87DCEBF5931C0566695F54BDE70332E" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupOneMember" xlink:label="loc_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupOneMember_BD1C54B7314B9D327A56F54BDE70F1CA" xlink:type="locator" />
    <presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentGeographicalDomain_FC6346FA1A596CFAAF07F54BDE701D0F" xlink:to="loc_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupOneMember_BD1C54B7314B9D327A56F54BDE70F1CA" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AsiaMember" xlink:label="loc_us-gaap_AsiaMember_D29A8E70B5B71BD784F3F54BDE718753" xlink:type="locator" />
    <presentationArc order="7" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentGeographicalDomain_FC6346FA1A596CFAAF07F54BDE701D0F" xlink:to="loc_us-gaap_AsiaMember_D29A8E70B5B71BD784F3F54BDE718753" xlink:type="arc" />
    <loc xlink:href="http://xbrl.sec.gov/country/2013/country-2013-01-31.xsd#country_DE" xlink:label="loc_country_DE_56A4DAA999E1CE80F99AF54BDE71A1AB" xlink:type="locator" />
    <presentationArc order="8" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentGeographicalDomain_FC6346FA1A596CFAAF07F54BDE701D0F" xlink:to="loc_country_DE_56A4DAA999E1CE80F99AF54BDE71A1AB" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupTwoMember" xlink:label="loc_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupTwoMember_40524EC35C478B936779F54BDE71E860" xlink:type="locator" />
    <presentationArc order="9" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentGeographicalDomain_FC6346FA1A596CFAAF07F54BDE701D0F" xlink:to="loc_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupTwoMember_40524EC35C478B936779F54BDE71E860" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EuropeMember" xlink:label="loc_us-gaap_EuropeMember_C1B76B4B564D86E8F213F54BDE711A58" xlink:type="locator" />
    <presentationArc order="10" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentGeographicalDomain_FC6346FA1A596CFAAF07F54BDE701D0F" xlink:to="loc_us-gaap_EuropeMember_C1B76B4B564D86E8F213F54BDE711A58" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EntityWideRevenueMajorCustomerLineItems" xlink:label="loc_us-gaap_EntityWideRevenueMajorCustomerLineItems_1AE2D7A7EA0083709F9CF54BDE71895B" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_14AB974B48CF22DB05CBF54BDE6FF513" xlink:to="loc_us-gaap_EntityWideRevenueMajorCustomerLineItems_1AE2D7A7EA0083709F9CF54BDE71895B" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_EntityWideRevenueMajorCustomerNumber" xlink:label="loc_asys_EntityWideRevenueMajorCustomerNumber_1EBF134C389A822CF77CF54BDE71A738" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_EntityWideRevenueMajorCustomerLineItems_1AE2D7A7EA0083709F9CF54BDE71895B" xlink:to="loc_asys_EntityWideRevenueMajorCustomerNumber_1EBF134C389A822CF77CF54BDE71A738" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskPercentage1" xlink:label="loc_us-gaap_ConcentrationRiskPercentage1_2962961123A72D64129FF54BDE713F92" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_EntityWideRevenueMajorCustomerLineItems_1AE2D7A7EA0083709F9CF54BDE71895B" xlink:to="loc_us-gaap_ConcentrationRiskPercentage1_2962961123A72D64129FF54BDE713F92" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_RevenuesPercentage" xlink:label="loc_asys_RevenuesPercentage_FC9F381876F11CC8326BF54BDE715E82" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_EntityWideRevenueMajorCustomerLineItems_1AE2D7A7EA0083709F9CF54BDE71895B" xlink:to="loc_asys_RevenuesPercentage_FC9F381876F11CC8326BF54BDE715E82" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.amtechsystems.com/role/MajorCustomersAndForeignSalesTables" xlink:type="extended">
    <loc xlink:href="asys-20150630.xsd#asys_MajorCustomersAndForeignSalesAbstract" xlink:label="loc_asys_MajorCustomersAndForeignSalesAbstract_E460859D54C7BBEB26B9F541ED41EE65" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfRevenueFromExternalCustomersAttributedToForeignCountriesByGeographicAreaTextBlock" xlink:label="loc_us-gaap_ScheduleOfRevenueFromExternalCustomersAttributedToForeignCountriesByGeographicAreaTextBlock_7E1031E5315122FEE62BF541ED4124B7" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_asys_MajorCustomersAndForeignSalesAbstract_E460859D54C7BBEB26B9F541ED41EE65" xlink:to="loc_us-gaap_ScheduleOfRevenueFromExternalCustomersAttributedToForeignCountriesByGeographicAreaTextBlock_7E1031E5315122FEE62BF541ED4124B7" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.amtechsystems.com/role/OtherAccruedLiabilities" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherLiabilitiesDisclosureAbstract" xlink:label="loc_us-gaap_OtherLiabilitiesDisclosureAbstract_AC7C469BB73A66F13574F541ED42B806" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherLiabilitiesDisclosureTextBlock" xlink:label="loc_us-gaap_OtherLiabilitiesDisclosureTextBlock_708407DDCF508E3090F0F541ED42F695" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OtherLiabilitiesDisclosureAbstract_AC7C469BB73A66F13574F541ED42B806" xlink:to="loc_us-gaap_OtherLiabilitiesDisclosureTextBlock_708407DDCF508E3090F0F541ED42F695" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.amtechsystems.com/role/OtherAccruedLiabilitiesDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherLiabilitiesDisclosureAbstract" xlink:label="loc_us-gaap_OtherLiabilitiesDisclosureAbstract_8F284910595E5752ACCEF541EE7A715D" xlink:type="locator" />
    <loc xlink:href="asys-20150630.xsd#asys_UnearnedResearchandDevelopmentGrantsCurrent" xlink:label="loc_asys_UnearnedResearchandDevelopmentGrantsCurrent_54953047222B55895429F541EE7A71D4" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OtherLiabilitiesDisclosureAbstract_8F284910595E5752ACCEF541EE7A715D" xlink:to="loc_asys_UnearnedResearchandDevelopmentGrantsCurrent_54953047222B55895429F541EE7A71D4" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_OtherAccruedLiabilitiesOtherCurrent" xlink:label="loc_asys_OtherAccruedLiabilitiesOtherCurrent_A86A05A35FD9B9463270F541EE7B6E52" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OtherLiabilitiesDisclosureAbstract_8F284910595E5752ACCEF541EE7A715D" xlink:to="loc_asys_OtherAccruedLiabilitiesOtherCurrent_A86A05A35FD9B9463270F541EE7B6E52" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AccruedLiabilitiesCurrent" xlink:label="loc_us-gaap_AccruedLiabilitiesCurrent_9190507517CC8175071BF541EE7BAED0" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OtherLiabilitiesDisclosureAbstract_8F284910595E5752ACCEF541EE7A715D" xlink:to="loc_us-gaap_AccruedLiabilitiesCurrent_9190507517CC8175071BF541EE7BAED0" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.amtechsystems.com/role/OtherAccruedLiabilitiesTables" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherLiabilitiesDisclosureAbstract" xlink:label="loc_us-gaap_OtherLiabilitiesDisclosureAbstract_80BDF324788DED126228F541ED99CDCD" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherLiabilitiesTableTextBlock" xlink:label="loc_us-gaap_OtherLiabilitiesTableTextBlock_7CCB9096A2C572178D61F541ED9A59D7" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OtherLiabilitiesDisclosureAbstract_80BDF324788DED126228F541ED99CDCD" xlink:to="loc_us-gaap_OtherLiabilitiesTableTextBlock_7CCB9096A2C572178D61F541ED9A59D7" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.amtechsystems.com/role/StockholdersEquity" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StockholdersEquityNoteAbstract" xlink:label="loc_us-gaap_StockholdersEquityNoteAbstract_49A948A9507FC8CE4699F541ED8D9AA8" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StockholdersEquityNoteDisclosureTextBlock" xlink:label="loc_us-gaap_StockholdersEquityNoteDisclosureTextBlock_935FEF441FC93CDF3EFCF541ED8D136B" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StockholdersEquityNoteAbstract_49A948A9507FC8CE4699F541ED8D9AA8" xlink:to="loc_us-gaap_StockholdersEquityNoteDisclosureTextBlock_935FEF441FC93CDF3EFCF541ED8D136B" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.amtechsystems.com/role/StockholdersEquityDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StockholdersEquityNoteAbstract" xlink:label="loc_us-gaap_StockholdersEquityNoteAbstract_F8F15235380887E1BE6EF54BDE8A0E55" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfStockByClassTable" xlink:label="loc_us-gaap_ScheduleOfStockByClassTable_2D493512A55DCE4C3EA3F54BDE8BE676" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StockholdersEquityNoteAbstract_F8F15235380887E1BE6EF54BDE8A0E55" xlink:to="loc_us-gaap_ScheduleOfStockByClassTable_2D493512A55DCE4C3EA3F54BDE8BE676" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StatementClassOfStockAxis" xlink:label="loc_us-gaap_StatementClassOfStockAxis_0D74F58895E7AE8534B3F54BDE8BB023" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfStockByClassTable_2D493512A55DCE4C3EA3F54BDE8BE676" xlink:to="loc_us-gaap_StatementClassOfStockAxis_0D74F58895E7AE8534B3F54BDE8BB023" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ClassOfStockDomain" xlink:label="loc_us-gaap_ClassOfStockDomain_DC1E48DCEAF7222853F1F54BDE8BBB9B" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementClassOfStockAxis_0D74F58895E7AE8534B3F54BDE8BB023" xlink:to="loc_us-gaap_ClassOfStockDomain_DC1E48DCEAF7222853F1F54BDE8BBB9B" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SeriesAPreferredStockMember" xlink:label="loc_us-gaap_SeriesAPreferredStockMember_36A352091381BACA27F1F54BDE8B0341" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ClassOfStockDomain_DC1E48DCEAF7222853F1F54BDE8BBB9B" xlink:to="loc_us-gaap_SeriesAPreferredStockMember_36A352091381BACA27F1F54BDE8B0341" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ClassOfStockLineItems" xlink:label="loc_us-gaap_ClassOfStockLineItems_90D84FBEE245BF6DC443F54BDE8B31D3" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfStockByClassTable_2D493512A55DCE4C3EA3F54BDE8BE676" xlink:to="loc_us-gaap_ClassOfStockLineItems_90D84FBEE245BF6DC443F54BDE8B31D3" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CommonStockParOrStatedValuePerShare" xlink:label="loc_us-gaap_CommonStockParOrStatedValuePerShare_6ECB30FFFC50558A7E23F54BDE8BE7D0" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ClassOfStockLineItems_90D84FBEE245BF6DC443F54BDE8B31D3" xlink:to="loc_us-gaap_CommonStockParOrStatedValuePerShare_6ECB30FFFC50558A7E23F54BDE8BE7D0" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ClassOfWarrantOrRightNumberOfSecuritiesCalledByWarrantsOrRights" xlink:label="loc_us-gaap_ClassOfWarrantOrRightNumberOfSecuritiesCalledByWarrantsOrRights_F3FBFBC49ECCD9CA35BDF54BDE8B446B" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ClassOfStockLineItems_90D84FBEE245BF6DC443F54BDE8B31D3" xlink:to="loc_us-gaap_ClassOfWarrantOrRightNumberOfSecuritiesCalledByWarrantsOrRights_F3FBFBC49ECCD9CA35BDF54BDE8B446B" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ClassOfWarrantOrRightExercisePriceOfWarrantsOrRights1" xlink:label="loc_us-gaap_ClassOfWarrantOrRightExercisePriceOfWarrantsOrRights1_897AB86ABE597958B496F54BDE8B50E5" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ClassOfStockLineItems_90D84FBEE245BF6DC443F54BDE8B31D3" xlink:to="loc_us-gaap_ClassOfWarrantOrRightExercisePriceOfWarrantsOrRights1_897AB86ABE597958B496F54BDE8B50E5" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_ClassOfWarrantOrRightExpirationPeriod" xlink:label="loc_asys_ClassOfWarrantOrRightExpirationPeriod_9CE538F6A93AEBAC2672F57F6BE70FD6" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ClassOfStockLineItems_90D84FBEE245BF6DC443F54BDE8B31D3" xlink:to="loc_asys_ClassOfWarrantOrRightExpirationPeriod_9CE538F6A93AEBAC2672F57F6BE70FD6" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_CommonStockMinimumPercentOwnershipForExerciseOfRights" xlink:label="loc_asys_CommonStockMinimumPercentOwnershipForExerciseOfRights_C57C7BD93B2698C2FB0CF5899C1CF37A" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ClassOfStockLineItems_90D84FBEE245BF6DC443F54BDE8B31D3" xlink:to="loc_asys_CommonStockMinimumPercentOwnershipForExerciseOfRights_C57C7BD93B2698C2FB0CF5899C1CF37A" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.amtechsystems.com/role/SubsequentEventDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SubsequentEventsAbstract" xlink:label="loc_us-gaap_SubsequentEventsAbstract_2D97FCA21F8658F1650DF54BDE27AD94" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SubsequentEventTable" xlink:label="loc_us-gaap_SubsequentEventTable_EC09EAED3885908230C5F54BDE282018" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SubsequentEventsAbstract_2D97FCA21F8658F1650DF54BDE27AD94" xlink:to="loc_us-gaap_SubsequentEventTable_EC09EAED3885908230C5F54BDE282018" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DebtInstrumentAxis" xlink:label="loc_us-gaap_DebtInstrumentAxis_7AC0165D94C0B9F06FFDF5C37E8A8219" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SubsequentEventTable_EC09EAED3885908230C5F54BDE282018" xlink:to="loc_us-gaap_DebtInstrumentAxis_7AC0165D94C0B9F06FFDF5C37E8A8219" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DebtInstrumentNameDomain" xlink:label="loc_us-gaap_DebtInstrumentNameDomain_631645267C28B805C428F5C37E8BAF3F" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_DebtInstrumentAxis_7AC0165D94C0B9F06FFDF5C37E8A8219" xlink:to="loc_us-gaap_DebtInstrumentNameDomain_631645267C28B805C428F5C37E8BAF3F" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_SolarToolLoanAgreementMember" xlink:label="loc_asys_SolarToolLoanAgreementMember_88A9345C908EBD1A7099F5C3F2809813" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_DebtInstrumentNameDomain_631645267C28B805C428F5C37E8BAF3F" xlink:to="loc_asys_SolarToolLoanAgreementMember_88A9345C908EBD1A7099F5C3F2809813" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CounterpartyNameAxis" xlink:label="loc_us-gaap_CounterpartyNameAxis_078909C27E780925D1A5F5B2D367422F" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SubsequentEventTable_EC09EAED3885908230C5F54BDE282018" xlink:to="loc_us-gaap_CounterpartyNameAxis_078909C27E780925D1A5F5B2D367422F" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RepurchaseAgreementCounterpartyNameDomain" xlink:label="loc_us-gaap_RepurchaseAgreementCounterpartyNameDomain_7EC9523CB6F477A10CD5F5B2D369783A" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_CounterpartyNameAxis_078909C27E780925D1A5F5B2D367422F" xlink:to="loc_us-gaap_RepurchaseAgreementCounterpartyNameDomain_7EC9523CB6F477A10CD5F5B2D369783A" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_KingstoneHongKongMember" xlink:label="loc_asys_KingstoneHongKongMember_560B4B871DB647EF21D3F5B3CE137A08" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RepurchaseAgreementCounterpartyNameDomain_7EC9523CB6F477A10CD5F5B2D369783A" xlink:to="loc_asys_KingstoneHongKongMember_560B4B871DB647EF21D3F5B3CE137A08" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_SuzhouZhuoJingInvestmentCenterMember" xlink:label="loc_asys_SuzhouZhuoJingInvestmentCenterMember_BF527A12D0EB83ACE499F5B479E95FDA" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RepurchaseAgreementCounterpartyNameDomain_7EC9523CB6F477A10CD5F5B2D369783A" xlink:to="loc_asys_SuzhouZhuoJingInvestmentCenterMember_BF527A12D0EB83ACE499F5B479E95FDA" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RestructuringPlanAxis" xlink:label="loc_us-gaap_RestructuringPlanAxis_C57C312E0469EC4782A0F5AFC3835484" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SubsequentEventTable_EC09EAED3885908230C5F54BDE282018" xlink:to="loc_us-gaap_RestructuringPlanAxis_C57C312E0469EC4782A0F5AFC3835484" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RestructuringPlanDomain" xlink:label="loc_us-gaap_RestructuringPlanDomain_F07F7DFE71225514A357F5AFC39D5C50" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RestructuringPlanAxis_C57C312E0469EC4782A0F5AFC3835484" xlink:to="loc_us-gaap_RestructuringPlanDomain_F07F7DFE71225514A357F5AFC39D5C50" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_RestructuringOfInvestmentInvestmentAgreementMember" xlink:label="loc_asys_RestructuringOfInvestmentInvestmentAgreementMember_176051C0A9C1675CAE64F5B1B66D8690" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RestructuringPlanDomain_F07F7DFE71225514A357F5AFC39D5C50" xlink:to="loc_asys_RestructuringOfInvestmentInvestmentAgreementMember_176051C0A9C1675CAE64F5B1B66D8690" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis" xlink:label="loc_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_BE319D16B42F8D3B44CCF54BDE288512" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SubsequentEventTable_EC09EAED3885908230C5F54BDE282018" xlink:to="loc_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_BE319D16B42F8D3B44CCF54BDE288512" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EquityMethodInvesteeNameDomain" xlink:label="loc_us-gaap_EquityMethodInvesteeNameDomain_52200133321ECB288C74F54BDE28B447" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_BE319D16B42F8D3B44CCF54BDE288512" xlink:to="loc_us-gaap_EquityMethodInvesteeNameDomain_52200133321ECB288C74F54BDE28B447" xlink:type="arc" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_EquityMethodInvesteeNameDomain_52200133321ECB288C74F54BDE28B447" xlink:to="loc_asys_KingstoneHongKongMember_560B4B871DB647EF21D3F5B3CE137A08" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_KingstoneSemiconductorCompanyLtdMember" xlink:label="loc_asys_KingstoneSemiconductorCompanyLtdMember_8E1CB4325A41939C0AB5F5AD221A584B" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_EquityMethodInvesteeNameDomain_52200133321ECB288C74F54BDE28B447" xlink:to="loc_asys_KingstoneSemiconductorCompanyLtdMember_8E1CB4325A41939C0AB5F5AD221A584B" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SubsequentEventTypeAxis" xlink:label="loc_us-gaap_SubsequentEventTypeAxis_D9C6EE546ABEA62ADADDF54BDE283CA9" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SubsequentEventTable_EC09EAED3885908230C5F54BDE282018" xlink:to="loc_us-gaap_SubsequentEventTypeAxis_D9C6EE546ABEA62ADADDF54BDE283CA9" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SubsequentEventTypeDomain" xlink:label="loc_us-gaap_SubsequentEventTypeDomain_B9ECB92FA5BA6D72B497F54BDE28BF13" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SubsequentEventTypeAxis_D9C6EE546ABEA62ADADDF54BDE283CA9" xlink:to="loc_us-gaap_SubsequentEventTypeDomain_B9ECB92FA5BA6D72B497F54BDE28BF13" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SubsequentEventMember" xlink:label="loc_us-gaap_SubsequentEventMember_B354CC0EDF1CE8500AB3F59F361A6CBB" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SubsequentEventTypeDomain_B9ECB92FA5BA6D72B497F54BDE28BF13" xlink:to="loc_us-gaap_SubsequentEventMember_B354CC0EDF1CE8500AB3F59F361A6CBB" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SubsequentEventLineItems" xlink:label="loc_us-gaap_SubsequentEventLineItems_C7AEFBAFFF041574041BF54BDE2840F5" xlink:type="locator" />
    <presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SubsequentEventTable_EC09EAED3885908230C5F54BDE282018" xlink:to="loc_us-gaap_SubsequentEventLineItems_C7AEFBAFFF041574041BF54BDE2840F5" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EquityMethodInvestmentOwnershipPercentage" xlink:label="loc_us-gaap_EquityMethodInvestmentOwnershipPercentage_330F66CFFDEEEBA1E96DF54BDE29482F" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SubsequentEventLineItems_C7AEFBAFFF041574041BF54BDE2840F5" xlink:to="loc_us-gaap_EquityMethodInvestmentOwnershipPercentage_330F66CFFDEEEBA1E96DF54BDE29482F" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EquityMethodInvestmentSoldCarryingAmount" xlink:label="loc_us-gaap_EquityMethodInvestmentSoldCarryingAmount_3E14A9DBB297D7ED15FEF5B7AD9C2779" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SubsequentEventLineItems_C7AEFBAFFF041574041BF54BDE2840F5" xlink:to="loc_us-gaap_EquityMethodInvestmentSoldCarryingAmount_3E14A9DBB297D7ED15FEF5B7AD9C2779" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProceedsFromCollectionOfNotesReceivable" xlink:label="loc_us-gaap_ProceedsFromCollectionOfNotesReceivable_7E1D6DA19B1DC46E4259F5C35899FE33" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SubsequentEventLineItems_C7AEFBAFFF041574041BF54BDE2840F5" xlink:to="loc_us-gaap_ProceedsFromCollectionOfNotesReceivable_7E1D6DA19B1DC46E4259F5C35899FE33" xlink:type="arc" />
    <loc xlink:href="asys-20150630.xsd#asys_ProceedsFromSaleOfExclusiveRightToSellAndServiceProducts" xlink:label="loc_asys_ProceedsFromSaleOfExclusiveRightToSellAndServiceProducts_2D59A833DA0967F5C46DF5C9364155C2" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SubsequentEventLineItems_C7AEFBAFFF041574041BF54BDE2840F5" xlink:to="loc_asys_ProceedsFromSaleOfExclusiveRightToSellAndServiceProducts_2D59A833DA0967F5C46DF5C9364155C2" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.amtechsystems.com/role/SubsequentEventNotes" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SubsequentEventsAbstract" xlink:label="loc_us-gaap_SubsequentEventsAbstract_632CB655E6A43689C56EF541ED7D0724" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SubsequentEventsTextBlock" xlink:label="loc_us-gaap_SubsequentEventsTextBlock_D4F80AF2A92BB3515249F541ED7D861B" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SubsequentEventsAbstract_632CB655E6A43689C56EF541ED7D0724" xlink:to="loc_us-gaap_SubsequentEventsTextBlock_D4F80AF2A92BB3515249F541ED7D861B" xlink:type="arc" />
  </presentationLink>
</linkbase>
</XBRL>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>13
<FILENAME>R39.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.2.0.727</span><table class="report" border="0" cellspacing="2" id="idm140187059435920">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Stockholders' Equity (Details) - $ / shares<br></strong></div></th>
<th class="th" colspan="1"></th>
<th class="th" colspan="1">9 Months Ended</th>
<th class="th" colspan="1"></th>
</tr>
<tr>
<th class="th"><div>Dec. 15, 2008</div></th>
<th class="th"><div>Jun. 30, 2015</div></th>
<th class="th"><div>Sep. 30, 2014</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ClassOfStockLineItems', window );"><strong>Class of Stock [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CommonStockParOrStatedValuePerShare', window );">Common stock, par value</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 0.01<span></span>
</td>
<td class="nump">$ 0.01<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_CommonStockMinimumPercentOwnershipForExerciseOfRights', window );">Minimum percent ownership of common stock for exercise of rights</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">15.00%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StatementClassOfStockAxis=us-gaap_SeriesAPreferredStockMember', window );">Series A Preferred Stock</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ClassOfStockLineItems', window );"><strong>Class of Stock [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CommonStockParOrStatedValuePerShare', window );">Common stock, par value</a></td>
<td class="nump">$ 0.01<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ClassOfWarrantOrRightNumberOfSecuritiesCalledByWarrantsOrRights', window );">Class of warrant or right, number of securities called by warrants or rights</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">0.001<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ClassOfWarrantOrRightExercisePriceOfWarrantsOrRights1', window );">Exercise price of rights</a></td>
<td class="nump">$ 51.60<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_ClassOfWarrantOrRightExpirationPeriod', window );">Rights expiration period</a></td>
<td class="text">10 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_asys_ClassOfWarrantOrRightExpirationPeriod">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Class Of Warrant Or Right, Expiration Period</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">asys_ClassOfWarrantOrRightExpirationPeriod</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>asys_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_asys_CommonStockMinimumPercentOwnershipForExerciseOfRights">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Common Stock, Minimum Percent Ownership For Exercise Of Rights</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">asys_CommonStockMinimumPercentOwnershipForExerciseOfRights</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>asys_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ClassOfStockLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ClassOfStockLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ClassOfWarrantOrRightExercisePriceOfWarrantsOrRights1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Exercise price per share or per unit of warrants or rights outstanding.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 235<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.4-08.(i)(4))<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=26873400&amp;loc=d3e23780-122690<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ClassOfWarrantOrRightExercisePriceOfWarrantsOrRights1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ClassOfWarrantOrRightNumberOfSecuritiesCalledByWarrantsOrRights">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Number of securities into which the class of warrant or right may be converted. For example, but not limited to, 500,000 warrants may be converted into 1,000,000 shares.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 235<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.4-08.(i)(2))<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=26873400&amp;loc=d3e23780-122690<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ClassOfWarrantOrRightNumberOfSecuritiesCalledByWarrantsOrRights</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CommonStockParOrStatedValuePerShare">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Face amount or stated value per share of common stock.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.29)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 02<br><br><br><br> -Paragraph 30<br><br><br><br> -Article 5<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CommonStockParOrStatedValuePerShare</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StatementClassOfStockAxis=us-gaap_SeriesAPreferredStockMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StatementClassOfStockAxis=us-gaap_SeriesAPreferredStockMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>

</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>14
<FILENAME>R48.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.2.0.727</span><table class="report" border="0" cellspacing="2" id="idm140187049810832">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Acquisition - Assets Acquired and Liabilities Assumed (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="1">3 Months Ended</th>
<th class="th" colspan="2">9 Months Ended</th>
<th class="th" colspan="1"></th>
<th class="th" colspan="1"></th>
</tr>
<tr>
<th class="th"><div>Jun. 30, 2015</div></th>
<th class="th"><div>Jun. 30, 2015</div></th>
<th class="th"><div>Jun. 30, 2014</div></th>
<th class="th"><div>Jan. 30, 2015</div></th>
<th class="th"><div>Sep. 30, 2014</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_BusinessAcquisitionLineItems', window );"><strong>Business Acquisition [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_Goodwill', window );">Goodwill</a></td>
<td class="nump">$ 15,043<span></span>
</td>
<td class="nump">$ 15,043<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 8,323<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillAcquiredDuringPeriod', window );">Goodwill recognized due to acquisitions</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">7,021<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_BusinessAcquisitionAxis=asys_BTUInternationalIncBTUMergerMember', window );">BTU International, Inc (BTU) Merger</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_BusinessAcquisitionLineItems', window );"><strong>Business Acquisition [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNet', window );">Fair value of net tangible assets acquired</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 20,598<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_Goodwill', window );">Goodwill</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">4,697<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibleAssetsOtherThanGoodwill', window );">Identifiable intangible assets</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">1,330<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredGoodwillAndLiabilitiesAssumedNet', window );">Total consideration allocated</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 26,625<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_BusinessCombinationAcquisitionRelatedCosts', window );">Transaction-related costs</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">1,800<span></span>
</td>
<td class="nump">$ 200<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StatementBusinessSegmentsAxis=asys_SemiconductorEquipmentMember', window );">Semiconductor</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_BusinessAcquisitionLineItems', window );"><strong>Business Acquisition [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_Goodwill', window );">Goodwill</a></td>
<td class="nump">$ 4,697<span></span>
</td>
<td class="nump">4,697<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 0<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillAcquiredDuringPeriod', window );">Goodwill recognized due to acquisitions</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">4,697<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StatementBusinessSegmentsAxis=asys_SemiconductorEquipmentMember', window );">Semiconductor | BTU International, Inc (BTU) Merger</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_BusinessAcquisitionLineItems', window );"><strong>Business Acquisition [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillAcquiredDuringPeriod', window );">Goodwill recognized due to acquisitions</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 4,700<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_TradeNamesMember', window );">Trade names</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_BusinessAcquisitionLineItems', window );"><strong>Business Acquisition [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetUsefulLife', window );">Useful Life (in years)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">15 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_TradeNamesMember', window );">Trade names | BTU International, Inc (BTU) Merger</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_BusinessAcquisitionLineItems', window );"><strong>Business Acquisition [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetUsefulLife', window );">Useful Life (in years)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">15 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_BusinessAcquisitionLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_BusinessAcquisitionLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_BusinessCombinationAcquisitionRelatedCosts">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>This element represents acquisition-related costs incurred to effect a business combination which costs have been expensed during the period. Such costs include finder's fees; advisory, legal, accounting, valuation, and other professional or consulting fees; general administrative costs, including the costs of maintaining an internal acquisitions department; and may include costs of registering and issuing debt and equity securities.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 805<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 25<br><br><br><br> -Paragraph 23<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=34752592&amp;loc=d3e1043-128460<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_BusinessCombinationAcquisitionRelatedCosts</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibleAssetsOtherThanGoodwill">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of intangible assets, excluding goodwill, acquired at the acquisition date.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 805<br><br><br><br> -SubTopic 20<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (c)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=56956791&amp;loc=d3e4845-128472<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibleAssetsOtherThanGoodwill</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount recognized as of the acquisition date for the identifiable assets acquired in excess of (less than) the aggregate liabilities assumed.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 805<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 55<br><br><br><br> -Paragraph 37<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=35744172&amp;loc=d3e2207-128464<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 805<br><br><br><br> -SubTopic 20<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (c)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=56956791&amp;loc=d3e4845-128472<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredGoodwillAndLiabilitiesAssumedNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount recognized for assets, including goodwill, in excess of (less than) the aggregate liabilities assumed.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 805<br><br><br><br> -SubTopic 20<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (c)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=56956791&amp;loc=d3e4845-128472<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredGoodwillAndLiabilitiesAssumedNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FiniteLivedIntangibleAssetUsefulLife">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Useful life of finite-lived intangible assets, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FiniteLivedIntangibleAssetUsefulLife</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_Goodwill">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount after accumulated impairment loss of an asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 350<br><br><br><br> -SubTopic 20<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=35741047&amp;loc=d3e13816-109267<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 350<br><br><br><br> -SubTopic 20<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6388280&amp;loc=d3e13770-109266<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_Goodwill</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_GoodwillAcquiredDuringPeriod">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of increase in asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized resulting from a business combination.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 350<br><br><br><br> -SubTopic 20<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (a)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=35741047&amp;loc=d3e13816-109267<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_GoodwillAcquiredDuringPeriod</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_BusinessAcquisitionAxis=asys_BTUInternationalIncBTUMergerMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_BusinessAcquisitionAxis=asys_BTUInternationalIncBTUMergerMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StatementBusinessSegmentsAxis=asys_SemiconductorEquipmentMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StatementBusinessSegmentsAxis=asys_SemiconductorEquipmentMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_TradeNamesMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_TradeNamesMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>

</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EXCEL
<SEQUENCE>15
<FILENAME>Financial_Report.xlsx
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
begin 644 Financial_Report.xlsx
M4$L#!!0````(`*N!!D<P0O^NY`$``)(>```3````6T-O;G1E;G1?5'EP97-=
M+GAM;,V9S4[C,!2%7Z7*%C6N?V`81-D`6T""%_`DMXW5.+9L4\K;8Z>`9JHR
M@ADJG4U^>J[O.<EUODW/'YX]Q<G&]D.<5UU*_HRQV'1D=:R=IR$K"Q>L3ODV
M+)G7S4HOB8G9[(0U;D@TI&DJ/:J+\]LUA6!:FEQNA=)[7FGO>]/H9-S`UD.[
MTW7J%@O34.N:1YN7U"E;TU'6J\F=#NE&V]R";7HV"MLCKXO.OL<P^D"ZC1U1
MLGT=TW-/<9__5GESOJ*%?NS3EXQ?WUT=J!]K8F?\J]7U)G>)^;=YE=7X*8?=
MA7]+9FP9FA^6?ZPH]__X+#LO<6W[JZ"?S([!^F!C*N?::C/L&]63"ZM?SJV^
M<YM0>:J6VJD/N3`DLV>7Y.*[K$:66_^7]]M.:5R@3QF6P@-^%)T.U-ZGD.>[
M_]OXO>!P.<I<Q^N/ACZ*D8VG`T+B2SD$2`X)DD.!Y#@&R7$"DN,'2(Y3D!P_
M07+P&4H0%*)R%*1R%*9R%*AR%*IR%*QR%*YR%+!R%+(*%+(*%+(*%+(*%+(*
M%+(*%+(*%+(*%+(*%+(*%+)*%+)*%+)*%+)*%+)*%+)*%+)*%+)*%+)*%+)*
M%+(J%+(J%+(J%+(J%+(J%+(J%+(J%+(J%+(J%+*J=[*R\:_HBQ=02P,$%```
M``@`JX$&1TAU!>[%````*P(```L```!?<F5L<R\N<F5L<ZV2RV["0`Q%?R6:
M?7%*)1818<6&'4+\@#OC/)3,>.0Q(OW[CMB`PD.MQ-*O>X^NO`ZIK`XTHO8<
M4M?'5$Q^#*G*_=ITJK$"2+8CCVG!D4*>-BP>-9?20D0[8$NP+,L5R*V.V:SG
MVL7.U49V[M,41Y26M#;3"&>6X9MY6&3I//B)]!=C;IK>TI;MR5/0!_ZS#0//
M>997'L=V+YRO+0O]C^AY%.!)T:'B1?4C9@,2[2F]@OIZ`(4QOCLEFI2"(S>C
M@KN_V/P"4$L#!!0````(`*N!!D=AI.76UP$``"`>```:````>&PO7W)E;',O
M=V]R:V)O;VLN>&UL+G)E;'/%V<UNFT`8A>%;L;B`#-^/[<2*L\HFVZ8W@.RQ
ML6(#8J9J??>A7E1NDCG*PM+9@`#IFW?U@(;'+M6K'_'8Y$/?I?8PI-F?T[%+
MJ^G^NFIS'E8AI$T;3TVZZX?834]W_7AJ\G0Y[L/0;-Z:?0Q:UXLP7L^IGAX_
MSIZ];-?5^+*5:O:S&?<QKZO?_?B6VAAS"I>3W$T+3(_/0_S.\OUN=]C$YW[S
MZQ2[_$5%^+=`%<I!6@Y22I"5@XP2Y.4@IP3-RT%S2M"B'+2@!"W+04M*T'TY
MZ)X2]%`.>J`$20UDK#E)"&N.U@*X%H[7`L`6CM@"R!:.V0+0%H[:`M@6CML"
MX!:.W`+H%H[=`O`6CMX*]%:.W@KT5M*W-OK8YNBM0&_EZ*U`;^7HK4!OY>BM
M0&_EZ*U`;^7HK4!OY>BM0&_EZ&U`;^/H;4!OX^AM0&\C[96@S1*.W@;T-H[>
M!O0VCMX&]#:.W@;T-H[>!O0VCMX&]#:.W@[T=H[>#O1VCMX.]':.W@[T=M)>
M-]KLYNCM0&_GZ.U`;^?H[4!OY^CM0&_GZ.U`;^?H/;_2.[7-&+>O>3QT^W3K
MFO^&PZ(KO%,^'^/M4RY38<.5UGE:*8;+\>:OCLO4OR'AT\_@IW=02P,$%```
M``@`JX$&1VJTAC,6`P``O@P``!````!D;V-0<F]P<R]A<'`N>&ULO5?!<MHP
M$/T5#9?2`S&A-#-AB&<(T#8S2<,4FIR%O,9J;,G1RA3Z]5W;0$VP(>90#B#)
M^Z3=]W;7HJ^PW9L8'8.Q$I"MHE!ACQ9O&H&U<<]Q4`00<;P@$T5/?6TB;FEJ
M%H[V?2E@I$42@;).I]V^<F!E07G@M>+=I@VWGYXRB.-0"FZE5NZ#%$:C]BT;
MKP2$?>>M08:@G:<@$B/MVFWG-L6ES&8J>`A#.LOU>8B06_U;S&R&.HJY6COY
M[%ZJ%_P9S_2(6RBB]A_DNP?<@$>'[NV^6\QLOJTISC#%#@.N%N`5;0\?;KEX
M`H-II)>=BS9]=A1LU_.]@7M2+29<&G3[2]M;@K#:;&1:VG-5\K1(1<>G&?F'
M#3;G".GPIK'D1G)E&PSE'YIV&OFQ^6HV#F.TQGW6Y@4#`(M]9[>8#8NVQ;'L
MNMWKS()&^Y;.+C)W0]M>W.G*3-H0\-&?<&/_$Q593%LBNM>-0O3;+1A7'ALK
M2^G([E1^%(E7I&0W&FJJ"X7@,1JA#J5':>:Q6QYR)8"=@?E4!S.U]$,^GX'Y
M?`;FJA1SRU$BTSZ;&$#BKYJM.R5T!&S&5X"E!F-N%*4(L@D8EI5DJ=G4:O$2
MZ-"CLOK`QJ\)257N6H)2`2*;PB*3]I2>#_P7I=\P04N.&LQ2X8LV(!>*37E8
MBGFT`7D[$,(D1-6]Y',9RK1'EEK?:[5H63`1&\'<5H@01=*F_N8.D!266`$E
MJC8=".(`9658TV2.\)JD#(R7Z7?SN[:`']^O)VM.*!LJ':C`S/@\K#KF4.OC
M]L>T)&1].3N=>G+F[IWBGQ7'FX!J4-:BM/#!5"1^%88R1-"T%N8'T%,I:F'N
M5)H]NA9F<Q&IA?FJM?=;EG-=[9NEE[&LA7GFQO":O&7-IW5;3Q^.`?6I>N<$
M,HYE>3T?T12X*=>TV'Q9<P26R[!&:1X%E#7D$Y#CY3RJ7\[=R[KEG/KWCAY]
M(I"CW9HU3_:+X[L7+;-:2@..^!;U#DSZ(I<D3,[LS)2'O(\9(-(E,&]E="UF
MY9C#MTI9*`?WP#>W/F?_WXK[%U!+`P04````"`"K@09'Q<HF+#\!``!I`P``
M$0```&1O8U!R;W!S+V-O<F4N>&ULS9--3\,P#(;_"NJ]2[.)":*N!T"<F(3$
M$(A;EGA;6/.AQ%/7?T^6=2T#+KMQJVN_CU_'22D<$];#L[<./"H(5WM=F\"$
MFV4;1,<("6(#FH=1K#`QN;)><XRA7Q/'Q9:O@8R+8DHT()<<.3D`<]<3LZJ4
M@@D/'*WO\%+T>+?S=8))0:`&#08#H2-*LNK5;(UM3$D&?55&QS4/.+=2K13(
MNW8H^YV*G1&\#D<YR+Y]^ONGAY0A65>Y#ZJO:IIFU$Q271R8DO?YTTLZFUR9
M@-P(B*J@&+8.9MFI\]OD_F'QF%7C@E[GQ4U>3!=TRNB$T=N/PV1G_@;#NAOB
MWSH^&4S;184U7+C;I)%IN>DS@20$X95#9<U%N(3Y)DZPL%M^@L#+09TP7;8M
MM(WU,E3I?@W1X>7$E:VM;X^I']'9JZJ^`%!+`P04````"`"K@09'F5R<(Q`&
M``"<)P``$P```'AL+W1H96UE+W1H96UE,2YX;6SM6EMSVC@4?N^OT'AG]FT+
MQC:!MK03<VEVV[29A.U.'X416(UL>621A'^_1S80RY8-[9)-NIL\!"SI^\Y%
M1^?H.'GS[BYBZ(:(E/)X8-DOV]:[MR_>X%<R)!%!,!FGK_#`"J5,7K5::0##
M.'W)$Q+#W(*+"$MX%,O67.!;&B\CUNJTV]U6A&ELH1A'9&!]7BQH0-!445IO
M7R"TY1\S^!7+5(UEHP$35T$FN8BT\OELQ?S:WCYES^DZ'3*!;C`;6"!_SF^G
MY$Y:B.%4PL3`:F<_5FO'T=)(@(+)?90%NDGVH],5"#(-.SJ=6,YV?/;$[9^,
MRMIT-&T:X./Q>#BVR]*+<!P$X%&[GL*=]&R_I$$)M*-IT&38]MJND::JC5-/
MT_=]W^N;:)P*C5M/TVMWW=..B<:MT'@-OO%/A\.NB<:KT'3K:28G_:YKI.D6
M:$)&X^MZ$A6UY4#3(`!8<';6S-(#EEXI^G64&MD=N]U!7/!8[CF)$?[&Q036
M:=(9EC1&<IV0!0X`-\313%!\KT&VBN#"DM)<D-;/*;50&@B:R('U1X(AQ=RO
M_?67N\FD,WJ=?3K.:Y1_::L!I^V[F\^3_'/HY)^GD]=-0LYPO"P)\?LC6V&'
M)VX[$W(Z'&="?,_V]I&E)3+/[_D*ZTX\9Q]6EK!=S\_DGHQR([O=]EA]]D]'
M;B/7J<"S(M>41B1%G\@MNN01.+5)#3(3/PB=AIAJ4!P"I`DQEJ&&^+3&K!'@
M$WVWO@C(WXV(]ZMOFCU7H5A)VH3X$$8:XIQSYG/1;/L'I4;1]E6\W*.76!4!
MEQC?-*HU+,76>)7`\:V</!T3$LV4"P9!AI<D)A*I.7Y-2!/^*Z7:_IS30/"4
M+R3Z2I&/:;,CIW0FS>@S&L%&KQMUAVC2/'K^!?F<-0H<D1L=`F<;LT8AA&F[
M\!ZO)(Z:K<(1*T(^8ADV&G*U%H&V<:F$8%H2QM%X3M*T$?Q9K#63/F#([,V1
M=<[6D0X1DEXW0CYBSHN0$;\>ACA*FNVB<5@$_9Y>PTG!Z(++9OVX?H;5,VPL
MCO='U!=*Y`\FIS_I,C0'HYI9";V$5FJ?JH<T/J@>,@H%\;D>/N5Z>`HWEL:\
M4*Z">P'_T=HWPJOX@L`Y?RY]SZ7ON?0]H=*W-R-]9\'3BUO>1FY;Q/NN,=K7
M-"XH8U=RS<C'5*^3*=@YG\#L_6@^GO'M^MDDA*^:62TC%I!+@;-!)+C\B\KP
M*L0)Z&1;)0G+5--E-XH2GD(;;NE3]4J5U^6ON2BX/%ODZ:^A=#XLS_D\7^>T
MS0LS0[=R2^JVE+ZU)CA*]+',<$X>RPP[9SR2';9WH!TU^_9==N0CI3!3ET.X
M&D*^`VVZG=PZ.)Z8D;D*TU*0;\/YZ<5X&N(YV02Y?9A7;>?8T='[Y\%1L*/O
M/)8=QXCRHB'NH8:8S\-#AWE[7YAGE<90-!1M;*PD+$:W8+C7\2P4X&1@+:`'
M@Z]1`O)256`Q6\8#*Y"B?$R,1>APYY=<7^/1DN/;IF6U;J\I=QEM(E(YPFF8
M$V>KRMYEL<%5'<]56_*POFH]M!5.S_Y9K<B?#!%.%@L22&.4%Z9*HO,94[[G
M*TG$53B_13.V$I<8O./FQW%.4[@2=K8/`C*YNSFI>F4Q9Z;RWRT,"2Q;B%D2
MXDU=[=7GFYRN>B)V^I=WP6#R_7#)1P_E.^=?]%U#KG[VW>/Z;I,[2$R<><41
M`71%`B.5'`86%S+D4.Z2D`83`<V4R43P`H)DIAR`F/H+O?(,N2D5SJT^.7]%
M+(.&3E[2)1(4BK`,!2$7<N/O[Y-J=XS7^BR!;814,F35%\I#B<$],W)#V%0E
M\Z[:)@N%V^)4S;L:OB9@2\-Z;ITM)__;7M0]M!<]1O.CF>`>LX=SFWJXPD6L
M_UC6'ODRWSEPVSK>`U[F$RQ#I'[!?8J*@!&K8KZZKT_Y)9P[M'OQ@2";_-;;
MI/;=X`Q\U*M:I60K$3]+!WP?D@9CC%OT-%^/%&*MIK&MQMHQ#'F`6/,,H68X
MWX=%FAHSU8NL.8T*;T'50.4_V]0-:/8--!R1!5XQF;8VH^1."CS<_N\-L,+$
MCN'MB[\!4$L#!!0````(`*N!!D>Q_N1.9@(``"@,```-````>&PO<W1Y;&5S
M+GAM;,U76VO;,!3^*T(=HX41VPE)V]4VC$)@L)5!\["W(MNR(]#%D^4LZ:^?
M+K[$ABQMUI7D1<>?SOG.)^G81PDKM:/X<8VQ`EM&>17!M5+E9\^KTC5FJ)J(
M$G,]DPO)D-*/LO"J4F*452:(46_J^PN/(<)A'/*:+9FJ0"IJKB(X[R#@XN]%
MAB/X=/GQ5RW4W0?@QHM/%Q?^T]7=&+^T$U<0.(ZO602#Q1QZ+R>=^(=Y]=R(
M>O$ZZK\PCXBO#Q"W.@Q5)VH<?',L>!@]#K\UX5YS,'&8"]Z?SQ0Z(`ZK9[!!
M5/L'QCT55$B@=`'H/!;AB&'G<8\H220Q8(X8H3L'3PU@:Z;Q8X0+:7.[#.,\
M$[_/)(LD@G[S>WFZI&>W@UD>H72X/`W$88F4PI(O]0-H[-6NU(OC@F,GTOH=
M\2XDV@73^5Z`'73>1,@,RRYS`%LH#BG.E0Z0I%B;48G22!=*"::-C*!"<$0-
M91O1&)HVQ90^FC?T9S[@WN;`^9@S]B$P*EI3;T1C]F5@-]7;9W/<^[2SDWC!
M-N\2Z&A4EG3WA9*",^S$.F@IFJ=C],$!^CA$+2M8"TF>M;\IA%0#6$*PP5*1
M=!_Y+5&YPEO55+"WS0\I/'7)_U/3V^]:KT:7X'MOS\G)+?10LP3+I?WXO5[2
M[/KXD=FW$XYDOF_5G"#A#3;'--2SE;8X5VFSVW-59BX;9ROMYGRE_>N!>DT[
MW>O9@X[=H2"I"56$MQJ0N6,]&-UTT$S[;JTYLVW?J.VL0HF^M@^R:+(,YZBF
MZ@?9"&4G(]C;WXS\8-%YK3J*"/;V=YR1FKE+8__?(/X#4$L#!!0````(`*N!
M!D=P??]#2@0``"T0```/````>&PO=V]R:V)O;VLN>&ULE9??<]HX$(#_%8U?
M+O?`@7]`&Z9T)@FTS4S:9@K3/@M;8#6R1"4YY/K7W\H.US4L#+R`95N?I=W/
M\NJ=&V^-?5H:\\1>*J7=V$ZBTOO-N-]W>2DJ[OXQ&Z'AVLK8BGMHVG7?K%8R
M%U.3UY70OI\,!J.^%8I[:;0KY<9%KS1W#LUMK."%*X7PE6IA%9<Z>O_.C5=2
MB>_".@`SOME\X9681"\J8HH[/RND%\4DRJ!IMJ)SPM:;VUJJT!@.AE$_P'93
M?;0L-X5H88M2NA^O%R)6B!6OE5_`8'?/G41QDB7)J&6$V[Y+L748&$XPGGOY
M+!9\.8D&$>.U-Q^D\L).N1<?K:DW4J^!%;&5M,[/PW2;.RNI925_AW%#RY5F
M^\E8^=MHS]4\MT:IIE>XT'2")[C_S\`8O<P[-WJ^_!8R,8E&`P`^2R>74DG_
M[R1JCI4(,^GO3:4)_Y\CIIO@[%+,N"[83'N@L'O=)@]"$\8`-]\7S8/M6,*!
MO2_B-E08=&=T(;03!8,C9Y0L("H%N^6*ZUPP!$H0*+D4E")0BD#IV:"YAS^8
M,@)E")1="AHBT!"!AI>"1@@T0J#1(>B6.^F86;%'*QQD;S]7;U#W-X?=[W5N
M*L$6_$4XU.LMZO7VL->,6PV&._8H+)N7W`K4]QKUO3[L._<F?RJ-*N"-^XO-
M?M7@&79K@.4:$!.NG=3".387ZT;7(XYV)"4L_<Q_&LON:N<A`-8UUG\P5LBU
M9G.N,`IK&A.>?O4EQ.$FSVT-.7R0O'D'92>B,58T)AQ],'K=@R6D8E.Q]+@G
M=C(FI:PJZ4,LVEF`41ZR(W2^-P3L9$Q(>9-#-IS<CR0V,"84G-=+)W[5(1>S
MY_![]<5XX?[&#*QA3'A(:LRN'N'-V)\%=C,FY#R"@J54[0T*FQH3JAYJ3F$2
M;&QRH;$`Q"@L;7*IM$F"49VU]1)IVSEB%%8W(=1%WC!\_!HLC,(N)X3+=/)Z
M\$ZLA.TL,PFV.2%L/H:"UR.')D9APY-S%UE`?8,ZQ,H<H[#HR=FB]\")\.H8
MC,*B)V>+WH,F%%ZV,T%L>D*8?@SUT9AB*[$,*;8]I6P_.D'/]5IB%+8])6P_
MAOK!K>6=#*;8]I2P_1BJ^1KU;C&J4TL0MA_UBKL2OF<8A6U/+[!]#G4UE)`8
MA6U/+[`=%!7<8D53;'M*V(YK`G8U%9Y+U5GQ4BQY2DA.+9P4!QN>$H93M0)-
MPH*GE.`GU^`IK@"QX!DA^,DU.(LQ"@N>$8*?6(/#)#$*"YX1@G?+!S)(&38[
M(\OD$X4$N\*H3IU,F-WY#%!CP3YGIVN1=DD+,:[X#H91V.>,\+F+"O6V!*':
MU"]L)\I8[(P0NXNZ<0[V4>TGST(".RCL=D:Y?5`U46'"7F?7KYNY/_LWV,*"
MUD78W;KF";`]S,.6%_[:TC4;AC(GM#_#-G@2A;TJ;$MKI>[@W%?]8'BSHVO)
MNTWN^_\`4$L#!!0````(`*N!!D=#*T_<1P(``(T'```8````>&PO=V]R:W-H
M965T<R]S:&5E=#$N>&UL?979CILP%(9?!?$`@S%+%A&D2:JJO:@TFHOVVB%.
M0&-L:CMA^O;U`L2,##>`S?^?[W@]1<_XAZ@QEL%G2Z@XA+64W3Z*1%7C%HD7
MUF&J_EP9;Y%437Z+1,<QNAA32R((0!ZUJ*%A69B^-UX6["Y)0_$;#\2];1'_
M=\2$]8<P#L>.]^962]T1E44T^2Y-BZEH&`TXOA["UWA_BA,M,8K?#>Z%\QWH
MY,^,?>C&S\LA!#H'3'`E=0BD7@]\PH3H2(K\=PCZ9&JC^SU&_VZ&J](_(X%/
MC/QI+K)6V8(PN.`KNA/YSOH?>!A#I@-6C`CS#*J[D*P=+6'0HD_[;JAY]_9/
MF@PVOP$.!C@9XMVJ(1D,R=.0FI':S,RXOB&)RH*S/N!V,3JDUSS>)VKFJD"8
M3FZG2XU,J-Y'"8KHH<,,"F@41U<13XI(Q9X`T`<8[-"Q0Q_@Y"H2/R#Q`1([
M@L2QIWY[ZK.GUIXZ]FR>GU4<747N!V0K@,RQ;^:`S`*L@EH%!!D`?DJ^0LD=
MRM8[#%>Q\P,V*X"-NPV`ES"3+&R5[0IBZ_JA%S&3+&R6W0IBY_I3+V(FR?P(
M?3\L,O3/9X3<N^2#QJXY!(L<[]$=.;.3^65KY0-GIMDN4+SG=Z2XQS/>>:=L
MIH$+NS?V'N*1XIYB&/OF[#1HZ+#X<0;2_.M&CIS;K\7\9JJ"""IVIZ8(.;U3
MY7F%YO9\RLNB0S?\"_%;0T5P9E+=P>;"O#(FL4H%O*B4:E4;IP;!5ZD_-SI7
M6RUL0[)N+'Y3!2[_`U!+`P04````"`"K@09'63&B\-\$``"?&```&````'AL
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MU<LP-5&.'Q]54=7UU-+8\S]+H]_[G`+I]UOKOUV'.]I_+ONJ:.N_C_OA,+HU
MZ]6^>BW?Z^%+>_F]6L;@IP9?VKJ__EV]O/=#V]Q"UJNF_#9_'D_7S\O\2VJ6
M,#D`E@"X!U@7#<`E`'\(V,S.KN/ZM1S*W;9K+ZMN?ACG<GKF]A''S+VL^NO-
M;D[7.+)^O/NQ`]AN/J9V%@E<)3F32(J"*?`NV8S]WTV`9`)G$T#CG1R/4KR;
MXY'&>VXQF0<Q2TZ+Q<2*JH*I$@R)[,5%O#CJ)?!>_.S%D5ZL3YPD*APSG!K9
MB8]DU5,GRDA"9"2!QJ?B2`(=2>9])@Z%JM(T"[*5)&(EH5;$3O*$6C$V@&B%
MJD*J936-6$F)%32BE90^NLRA.`L*JK(A"8J7+.(EHUZLZ"5CO7C1<,%$1G,R
M05&U,OWXW8N8_'S1G);<R5Z82',B$NWFA-((479BJ9.,K'-FA:K`I*"X$=%V
M<T/9AN)2SQ?-W$]F,(BF"R8+WA'2<3\Q5%K*2O2R'X9!8YR\EI@L2[R6GA@M
M+<6EO%!RRW@)RK1A(CJYN!D1F#<SE)@HSHE\T<S]>)LJ,X>J("2IXB:&7TOY
MBS)_+0.P-TZ9.8S`J&W1-H9@2QF,,H,MQ2NJ*YRJP(&R']@8A2W%L),Q;!EA
MT1DO3O>"Z=(L,TH%8D44+YNMI2QV5FX!8@0%2E!YR>5`X6BSU,O/F\F",5I)
M%L,H4(S*\RH'"LB0R9A@(F590@RA0!'J9(0"8R,&<3,LF&J<>)GB)@90H`!U
M,D"!DM$:4)X25050&`$Q?`+%IY/Q"8X12^$G4X7,:&YB_`3*3R?S$SQ+C=4F
M#96Y+%/V%H@!%"A`G0Q0H&3T+LB$X"IT"K$@QD^@_'0R/R$1EPJSDO#$:`LJ
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MV[\#[O^3V/T'4$L#!!0````(`*N!!D<,NFP/*`(``$L'```8````>&PO=V]R
M:W-H965T<R]S:&5E=#,N>&ULC97?CJ,@&,5?Q?@`!?%_8TVV3C:[%YM,YF+W
MFK:TFD%Q@-;9MU\0Z^"&FO:B"ISS?;\C!HN!\7=1$R*]SY9V8N?74O9;`,2Q
M)BT6&]:33JV<&6^Q5$-^`:+G!)]&4TL!@C`!+6XZORS&N5=>%NPJ:=.15^Z)
M:]MB_G=/*!MV?N#?)]Z:2RWU!"@+,/M.34LZT;#.X^2\\[\%VRJ`6C(J?C=D
M$-:]I^$/C+WKP<_3SH>:@5!RE+H$5I<;J0BENI+J_#$5_>JIC?;]O?KW,:["
M/V!!*D;_-"=9*UKH>R=RQE<JW]CP@TP98EWPR*@8_[WC54C6WBV^U^)/<VVZ
M\3J8E32?;&X#F@QH-@31JB&<#.%_!F#(QEPO6.*RX&SPN-F,'NL]#[:A>G)'
M3XR3W#PNE4RHV5N9Q`6XZ3J3!(V2O2U!+D6U4(2S!*C^,P1R080&`MG^R.T/
M7?[(^$,[1+)$3$T((^E&21A%T"6J;!'*HL1-$JTDB2R2.';[XY4DL9TD74)F
M)DEL0<(-#%RBZJ%H09*LD"0V2;9L$AN2Q&H2P.GG4E;KR@53NL*4VDRYDRFU
M.X5!#!%"3B1;F&=1AN('+VZV`I190*DS^CY[%BA[%BA?`<IMH,`)E#^]:^O*
M!9,^,!]"Z<4O*F?Z_:29WE@GS@.)X0#6L=?C"_F%^:7IA'=@4IV@XW%W9DP2
M50AN5,%:?=GF`25GJ6]3W<F<]68@67__=,W?S_(?4$L#!!0````(`*N!!D?8
M@(=>%P0``'<2```8````>&PO=V]R:W-H965T<R]S:&5E=#0N>&ULC9C)DN(X
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M^$>3T0PW8*,!>Q@\XN`&?#3@GP9BUD",!N+9"'(TD),(X:"]G[E-VJ3K557>
M@FHH]R7M5A5=RK8VNZ#N!ZNA(.W<U>WHQSKBJ_"C\S,BK$=B@`@,V;@(?1!A
M&_^1!,.2&",PQYQA`1*7B"2:PV^=;#U.0)H<2Y,/<\5=>X7;"\Q>#/;"M8]@
MBM$P$P-2](@@A"J,2ES*4$,P:.-"D5):8M36I;A2D<9ER1E9TI6E810YR)).
M%&:T1JG$I2(I#09M7$@J)@A&;4'`2%%/M=6,+.7*0G.)E1.%$LIP68!2G**R
M7(@1(20JRZ4,41Q7%<VHBAQ5&IV[.`*JB!2H*I<2E'!4E0LQ(2E*;4%`+HG`
M9>D96=J5A<YPK$$4@M<*0@9?@B[$M4'G9^M"0@A/J<R,)N-J8J@FXP1YH8SC
MI0(4UQ&^`@$5&85&W`*JO9$]M>I:M%=8]^>G,G1-Q"-SEX;>#@F`!+X$)XXX
M?F,!JET='E5H)[VK<IN@1BL1C\RC8`)=8`G$N,8WE@W$-#$1K@UBD?35#&W1
M=W5N\YSVDKLZ!K9Y='=)`$0Y0UUM`*4\FSQTI;5GDZ=H3[_K<INZ5K@N#M<B
M]U0-8++E<&D<EH-[J@:#MIN]\<B;.W)0]\RAT4@Q=<\`+\ISJPF8#KJ^-Y#B
M^*ZU!91V]$-=<V<.ZAXZIL>)\2Q%)4A937,>#U,0DTRB)[,-Q`RE!L.V$TP3
MYE&''CW&@R9USQ[:5_>Y-D_=/C^]$_4X/V[??2&OE&%8,L6FRUJ/\S/!IB=!
M/<X/P.@K\3PNT+EN3]UV;_!V3V$K]YQ0$H`9[6LBP!E5`N_YT)DROHUVKNM3
MM^T;M"0Q-<]5SCQ7.?-<Y<QSE6-SK9^1WU>.D:<J!S!OY:`S;^6@L_]7+G2>
MJG-;'?OW&76P*Z]%T]VVSNCCG<D7UCV53\9CNDPH,KZAR^WP1N33_7IU28_V
MK[0ZGHLZ>"^;ILS[!_=#63:V3;LMZ2(XV73_N,CLH>E^1IVNX;W(<-&4E_MK
MGL>[IO5_4$L#!!0````(`*N!!D?X@3[6DP(``,@(```8````>&PO=V]R:W-H
M965T<R]S:&5E=#4N>&ULC99-<YLP$(;_"L,]X4,28`]F)L;NM(?.9')HSHHM
MVTP`N9)LI_^^$L)$\FS<7@Q:GG=W7\E"E!<NWN6!,15\=&TO%^%!J>,\BN3F
MP#HJ'_F1]?K)CHN.*CT4^T@>!:/;0=2U41K'6=31I@^K<H@]BZKD)]4V/7L6
M@3QU'15_EJSEET68A-?`2[,_*!.(JC*:=-NF8[UL>!\(MEN$3\E\71AB`'XU
M["*=^\#T_L;YNQG\V"["V+3`6K91)@/5ES.K6=N:1+KP[S'G9TDC=.^OV;\-
M;G7W;U2RFK>OS58==+-Q&&S9CIY:]<(OW]EH@9B$&][*X3?8G*3BW542!AW]
ML->F'ZX7^Z2(1QDL2$=!.@FF.K``C0+T*<!W!7@4X/^M0$8!N:D06>_#S*VH
MHE4I^"40=K6/U/RIDCG1:[,)Y!`4=D'TW$D=/5<S5$9GDV=$T@%9NDB.(63E
M(LE$1+K^U$0*-3%62!UY"A6H72(G8`__3++^(HG7)H+:1':ND#M7&-9C2(^M
M'COZ(O-;S.U,6*0?D(>$H!E$U1Y%-`91*X\J<I1#U-JO&&=.2<\8N6.,N!-S
MLSK$&B-.F31!$%.[S`-"8**5#R59`5%KE\)Q!EO*[EC*7$L9:"GS9@ZE(%5[
M%,$%V._*SY7,8M#\VL?B%"'867['6>XZRT%GN5<&[+CVF"(&7?EY"%AL[4(%
M_F);%7<,%:ZA`MQ6A;]4&(/;RJ,(N?UKC=O*SY7&60KN*P^;H>)V6T7.>[IC
M8C^<D#+8\%.OS!O'B4Z'\%-JWO,W\64RKQ,@OM*'MCUC/]-7Y9'NV4\J]DTO
M@S>N].DR'`4[SA73;<>/>E4.^K-B&K1LI\QM;I;+GK1VH/CQ^MTP?;Q4?P%0
M2P,$%`````@`JX$&1^`-Y)=Y!```G14``!@```!X;"]W;W)K<VAE971S+W-H
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M?Y=&W_L<*_+?M]9_G\(=[#\579DWU3^G0W\<W,:KZ%`^%Z]5_Z.Y_E$N,9BQ
MP7U3==-GM'_M^J:^55E%=?%K_CZ=I^_K_$\:+]7T"KA4P'N%>S]Z!5HJT'N%
M9(IT=C;%]5O1%]M-VURC=AZ,2S&..3S0D+E]U$V%[9RN(;)N*'W;9MEF_3:V
MLTAPDNRX!.Z*]=#XO0?4>EBJ(ZN.6@<Y5SBC]T!:#S3'0-Q@'.L-)%H#R=Q`
MPAI(K?3HYBAFR7F2?$D=.4V5"Q7$EC+=C`E$8T0TGH3;0#16-/`AY68.QS*C
MF*2I)LJY"%QF=2LN8,4)*Z1:<:P7`M4(ET#FR6D:\)$R'WH?NY3UD4&B^N`:
M%WMF:A;PD8E\J)WL,M9):G4C7&-97H61$6)>)^.?S(I1K2RB93X36UK<C%`!
MQ9[Q`15#RZ0'`9G8,]5`Y<PM(@$:JP>$/+F>:2]$&+O48T9%TLT,9Q(ZW0SQ
M[":0J>LCES*(7>8S%$(<<,:1.I`[$/BBQ'K&F\O(^8`+*N1N=B3E/`DRW(\Q
M5J>#D#F;^-(38B9(:*H38P<<B)SMP@T79<9G)D1-X-A,=(`#9V)B/,`2*C"8
M>-R$V`FI2(T:]0XX&FVFXB07HB\P'"B=QT^(H<`AFGC6>29Z`J/*<B&S8#V#
MA2&0H@`IZ"L+8QDY.7V\I,XZXP$AAEB*@J7@.[*%6(HHFM"G(*)8GJ"O3JE"
M\$Q!#-$4Q0D/]',$<DZFQC,'A<I#+@R!%)//>.&(3./4,]K)YU(3.BVB`*FW
MB1#[4+`/]*,`<JP9](RU.#$"^69O"'XHSHR@KV_D7/M"OJGG/C'6(?2A0!_H
MNQ1RJAFCBG(A\ED)40_%T1'T#0HYS_1-/A<:[]L2A9!'$GGZCD`<92[3TR)$
M`Q8]$X94W-W<"-RA#N!%=`.PT?=NH0+OJVB(G"3(J:^3'0DFDC4J8',I,\9X
M3M848B<)=J*.<N)41$?6,UQ<1@XRS_Y-(8"2`"CJ`"6.QF&[U*F4"QF!)<\.
M3B&$DD"H[XQ$(8220"CJ""6K,D#$(TZ8SOD&/`10$@#UO`B1.#XZYTGO)P!*
M(8"2`.C']Z#E:H4X&]':C^E;[E8HA-`UN_6JR_9EN@WLHGWS>N['>R96>K]Q
M_(;CK=F'\AT\Y/.]X7LSV\VE>"G_*MJ7T[F+GIJ^;^KI`NVY:?IR\!9_'1)V
M+(O#_:$JG_OQIQLS.=\>S@]]<[E=AMYO9+?_`U!+`P04````"`"K@09'@I%*
M;J(!``"Q`P``&````'AL+W=O<FMS:&5E=',O<VAE970W+GAM;'U3RV[;,!#\
M%8(?$,JTTZ:&+"!.4;2'`$$.Z9F65A(14JN2E)7\??B0%3D0>A%W5S.SLWSD
M(YI7VP(X\J959P^T=:[?,V;+%K2P-]A#Y__4:+1P/C4-L[T!44625HQGV3>F
MA>QHD<?:DRER')R2'3P98@>MA7D_@L+Q0#?T4GB63>M"@14YFWF5U-!9B1TQ
M4!_H_69_W`5$!+Q(&.TB)L'["?$U)'^J`\V"!5!0NJ`@_'*&!U`J"/G&_R;-
MSY:!N(POZK_BM-[]25AX0/575J[U9C-**JC%H-PSCK]A&N$V"):H;/R2<K`.
M]85"B19O:95=7,?TYRZ;:.L$/A'X%P)+C:+-G\*)(C<X$I.VMA?A!#=[[C>B
M)#8639K>&[6^>BXV_"YGYR`T87C$'*\P,X)Y];D%7VLQT?F"SM?IVS7Z-CG<
M7CG\L2ZP6Q/8)8'=_T9,F.,59IM]:<(6>ZK!-/'J6%+BT,6+NJC.M_.>QS/Y
MA!=Y+QIX%*:1G24G=/YDXS'4B`Z\B>SFEI+6OY\Y45"[$'[WL4E7*B4.^\L#
MF5]I\0%02P,$%`````@`JX$&1U#*X_VB`0``L0,``!@```!X;"]W;W)K<VAE
M971S+W-H965T."YX;6Q]4]MNG#`0_17+'Q"#V;31BD7*IHJ:ATA1'MIG+PQ@
MQ1=BFR7]^_C"$K:B?<$SPSEGSOA23MJ\V1[`H0\IE#W@WKEA3XBM>Y#,WN@!
ME/_3:B.9\ZGIB!T,L":2I"`TR[X1R;C"51EK+Z8J]>@$5_!BD!VE9.;/$82>
M#CC'E\(K[WH7"J0JR<)KN`1EN5;(0'O`]_G^N`N("/C%8;*K&`7O)ZW?0O+4
M''`6+("`V@4%YI<S/(`00<@W?I\UOUH&XCJ^J#_&:;W[$[/PH,5OWKC>F\TP
M:J!EHW"O>OH)\PBW0;#6PL8OJD?KM+Q0,)+L(ZU<Q75*?XIBIFT3Z$R@"^$N
MB\93HVCS!W.L*HV>D$E;.[!P@OF>^HVHD8U%DZ;W1JVOGJN\R$MR#D(SAD;,
M\0JS((A77UK0K18SG:[H=)M>;-&+Y+"X<O@/@=V6P"X)[/XW8L(<KS'%7TW(
M:D\EF"Y>'8MJ/:IX45?5Y7;>TW@F7_"J'%@'S\QT7%ETTLZ?;#R&5FL'WD1V
M<XM1[]_/D@AH70B_^]BD*Y42IX?+`UE>:?4)4$L#!!0````(`*N!!D?.P54\
MH@$``+$#```8````>&PO=V]R:W-H965T<R]S:&5E=#DN>&UL?5/;;IPP$/T5
MRQ\0LX9-HQ6+E$T5I0^5HCRTSUX8P(HOU#9+^O?QA25LA?J"9X9SSISQI9RT
M>;<]@$,?4BA[Q+USPX$06_<@F;W3`RC_I]5&,N=3TQ$[&&!-)$E!:);=$\FX
MPE49:Z^F*O7H!%?P:I`=I63F[PF$GHYXAZ^%-][U+A1(59*%UW`)RG*MD('V
MB!]WAU,1$!'PB\-D5S$*WL]:OX?D1W/$6;```FH7%)A?+O`$0@0AW_C/K/G5
M,A#7\57].4[KW9^9A2<M?O/&]=YLAE$#+1N%>]/3"\PC[(-@K86-7U2/UFEY
MI6`DV4=:N8KKE/[DV4S;)M"90!?"0R20U"C:_,X<JTJC)V32U@XLG.#N0/U&
MU,C&HDG3>Z/65R_5+B]*<@E",X9&S.D&LR"(5U]:T*T6,YVNZ'2;GF_1\^0P
MOW&XWQ8HM@2*)%#\;\2$.=UB[O]I0E9[*L%T\>I85.M1Q8NZJBZW\Y'&,_F"
M5^7`.OC)3,>516?M_,G&8VBU=N!-9'=[C'K_?I9$0.M"^,W')EVIE#@]7!_(
M\DJK3U!+`P04````"`"K@09'K0?+.*4!``"O`P``&0```'AL+W=O<FMS:&5E
M=',O<VAE970Q,"YX;6Q]4]MNG#`0_17+'Q"SALU&*Q8IFZI*'B)%>6B?O3"`
M%5^H;9;T[^L+2VB%^H)GACEGSGC&Y:3-A^T!'/J40MD3[IT;CH38N@?)[)T>
M0/D_K3:2.>^:CMC!`&LB2`I"L^R>2,85KLH8>S-5J4<GN((W@^PH)3._SR#T
M=,([?`N\\ZYW(4"JDBRXADM0EFN%#+0G_+@[GHN0$1-^<)CLRD9!^T7KC^"\
M-"><!0D@H':!@?GC"D\@1"#RA7_-G%\E`W!MW]B_QVZ]^@NS\*3%3]ZXWHO-
M,&J@9:-P[WIZAKF%?2"LM;#QB^K1.BUO$(PD^TPG5_&<TI_\,,.V`70&T`7P
MD$7AJ5"4^8TY5I5&3\BDJQU8F.#N2/U%U,C&H$G=>Z'61Z_5?E^2:^"94VA,
M.:]3=DL&\>1+!;I588;3%9QNP_,M>)X$YNOJ^6&;H-@B*!)!\9\.4\JY^*O&
MPS\UR.I&)9@N+HY%M1Y57--5=-G-1QHG\I5>E0/KX)69CBN++MKYN<8AM%H[
M\"*RNSU&O7\]BR.@=<$\>-NDA4J.T\/M>2QOM/H#4$L#!!0````(`*N!!D>N
M="F+I`$``+$#```9````>&PO=V]R:W-H965T<R]S:&5E=#$Q+GAM;'U3VVZ<
M,!#]%<L?$+->TC8K%BF;*FH?*D5Y:)^],(`5FR&V6=*_KR\L(1'J"[:'<\Z<
M\8R+"<V+[0`<>=.JMT?:.3<<&+-5!UK8&QR@]W\:-%HX?S0MLX,!44>25HQG
MV1>FA>QI6<38DRD+')V2/3P98D>MA?E[`H73D>[H-?`LV\Z%`"L+MO!JJ:&W
M$GMBH#G2^]WAE`=$!/R6,-G5G@3O9\27</A9'VD6+(""R@4%X9<+/(!20<@G
M?ITUWU,&XGI_57^,U7KW9V'A`=4?6;O.F\THJ:$1HW+/./V`N83;(%BALO%+
MJM$ZU%<*)5J\I57V<9W2'WXWT[8)?";PA?`MB\93HFCSNW"B+`Q.Q*2K'43H
MX.[`_454Q,:@2=5[H]9'+^5N?U>P2Q":,3QB3A\P"X)Y]24%WTHQT_F*SK?I
M^RWZ/CG<K[/GV;9`OB60)X'\?R4FS.D#)O]<)%O=J0;3QM&QI,*QCX.ZBB[3
M><]C3][A93&(%GX)T\K>DC,ZW]G8A@;1@3>1W=Q2TOGWLQP4-"YLO_J]22.5
M#@Z'ZP-97FGY#U!+`P04````"`"K@09'@?XK<:,!``"Q`P``&0```'AL+W=O
M<FMS:&5E=',O<VAE970Q,BYX;6QM4]MNG#`0_17+'Q"S7K:M5BQ2-E74/E2*
M\M`^>V$`*[X0VRSIW]<7(%#Q@F>&<\Z<\:48M7FS'8!#'U(H>\&=<_V9$%MU
M()E]T#TH_Z?11C+G4],2VQM@=21)06B6?2&2<87+(M9>3%GHP0FNX,4@.TC)
MS-\K"#U>\`'/A5?>=BX42%F0A5=S"<IRK9"!YH(?#^=K'A`1\)O#:%<Q"MYO
M6K^%Y&=]P5FP``(J%Q287^[P!$($(=_X?=+\;!F(ZWA6?X[3>O<W9N%)BS^\
M=ITWFV%40\,&X5[U^`.F$4Y!L-+"QB^J!NNTG"D82?:15J[B.J8_^4S;)]")
M0!?"MRP:3XVBS>_,L;(P>D0F;6W/P@D>SM1O1(5L+)HTO3=J??5>'G):D'L0
MFC`T8JX;S((@7GUI0?=:3'2ZHM-]^G&/?DP.CQN'QWV!?$\@3P+Y1B#?CI@P
MURWF]%\3LMI3"::-5\>B2@\J7M15=;F=CS2>R2>\+'K6PB]F6JXLNFGG3S8>
M0Z.U`V\B>SAAU/GWLR0"&A?"KSXVZ4JEQ.E^?B#+*RW_`5!+`P04````"`"K
M@09':1B:UZ,!``"Q`P``&0```'AL+W=O<FMS:&5E=',O<VAE970Q,RYX;6Q]
M4]N.FS`0_16+#U@3A[TH(DB;K:KVH=)J']IG!P:PUO90VX3MW]<7PI(*]07/
M#.><.>-+.:%YMSV`(Q]*:GO,>N>&`Z6V[D%Q>X<#:/^G1:.X\ZGIJ!T,\":2
ME*0LSQ^HXD)G51EKKZ8J<712:'@UQ(Y*<?/G!!*G8[;+KH4WT?4N%&A5TH77
M"`7:"M3$0'O,GG>'4Q$0$?!3P&17,0G>SXCO(?G>'+,\6``)M0L*W"\7>`$I
M@Y!O_'O6_&P9B.OXJOXU3NO=G[F%%Y2_1.-Z;S;/2`,M'Z5[P^D;S"/<!\$:
MI8U?4H_6H;I2,J+X1UJ%CNN4_A3Y3-LFL)G`%L)3)-#4*-K\PAVO2H,3,6EK
M!QY.<'=@?B-J8F/1I.F]4>NKEVI7/)3T$H1F#(N8TPUF05"OOK1@6RUF.EO1
MV39]OT7?)X?[&X>/VP+%ED"1!(K_C9@PIUO,TS]-Z&I/%9@N7AU+:AQUO*BK
MZG([GUD\DT]X50Z\@Q_<=$);<D;G3S8>0XOHP)O([^XSTOOWLR026A?"1Q^;
M=*52XG"X/I#EE59_`5!+`P04````"`"K@09'934[C:0!``"O`P``&0```'AL
M+W=O<FMS:&5E=',O<VAE970Q-"YX;6Q]4]MNG#`0_17+'Q"#ETW:%8N4356E
M#Y6B/+3/7AC`BB_4-DOR]_&%95&$^H)GAG/.G/&EG+1YLSV`0^]2*'O$O7/#
M@1!;]R"9O=,#*/^GU48RYU/3$3L88$TD24%HEMT3R;C"51EK+Z8J]>@$5_!B
MD!VE9.;C!$)/1YSC:^&5=[T+!5*59.$U7(*R7"MDH#WBQ_QP*@(B`OYPF.PJ
M1L'[6>NWD/QJCC@+%D!`[8("\\L%GD"((.0;_YLU;RT#<1U?U7_&:;W[,[/P
MI,5?WKC>F\TP:J!EHW"O>GJ&>81]$*RUL/&+ZM$Z+:\4C"1[3RM7<9W2'_HP
MT[8)=";0A?`MB\93HVCS!W.L*HV>D$E;.[!P@OF!^HVHD8U%DZ;W1JVO7JI]
M7I)+T)DA-$).:\@-0;SXTH%N=9CI=$6GV_3=%GV7#.[6W8OOVP+%ED"1!(K_
M3)@@IS4DWV=?>I#5CDHP7;PX%M5Z5/&:KJK+W7RD\41N\*H<6`>_F>FXLNBL
MG3_7>`BMU@Z\B>QNCU'O7\^2"&A="!]\;-*%2HG3P_5Y+&^T^@102P,$%```
M``@`JX$&1RLJS+*C`0``KP,``!D```!X;"]W;W)K<VAE971S+W-H965T,34N
M>&UL?5/;;IPP$/T5RQ\0LUYHJQ6+E$T5-0^1HCRTSUX8P(HOQ#9+^O?UA24D
M(GW!,\.<,V<\XW+2YL7V``Z]2:'L$??.#0=";-V#9/9&#Z#\GU8;R9QW34?L
M8(`U$20%H5GVC4C&%:[*&'LR5:E')[B")X/L*"4S?T\@]'3$.WP-//.N=R%`
MJI(LN(9+4)9KA0RT1WR[.YSRD!$3?G.8[,I&0?M9ZY?@/#1'G`4)(*!V@8'Y
MXP)W($0@\H5?9\[WD@&XMJ_L][%;K_[,+-QI\8<WKO=B,XP::-DHW+.>?L'<
M0A$(:RUL_*)ZM$[+*P0CR=[2R54\I_2GH#-L&T!G`%T`/[(H/!6*,G\RQZK2
MZ`F9=+4#"Q/<':B_B!K9&#2I>R_4^NBE*O*27`+/G$)CRFF=LELRB"=?*M"M
M"C.<KN!T&[[?@N^3P/VZ>O%%_7R+($\$^7\Z3"FG_$.-SR+)ZD8EF"XNCD6U
M'E5<TU5TV<W;.$+RGEZ5`^O@D9F.*XO.VOFYQB&T6COP(K*;`J/>OY[%$="Z
M8'[WMDD+E1RGA^OS6-YH]0]02P,$%`````@`JX$&1Q/"-P"C`0``L0,``!D`
M``!X;"]W;W)K<VAE971S+W-H965T,38N>&UL?5/;;IPP$/T5RQ\0LX9MJQ6+
ME$U4-0^1HCRTSUX8P(HOU#9+^O?UA25LA/*"9X9SSISQI9RT>;,]@$/O4BA[
MQ+USPX$06_<@F;W3`RC_I]5&,N=3TQ$[&&!-)$E!:)9](Y)QA:LRUEY,5>K1
M":[@Q2`[2LG,OQ,(/1WQ#E\+K[SK72B0JB0+K^$2E.5:(0/M$=_O#J<B("+@
M-X?)KF(4O)^U?@O)4W/$6;```FH7%)A?+O``0@0AW_COK/G1,A#7\57]9YS6
MNS\S"P]:_.&-Z[W9#*,&6C8*]ZJG7S"/L`^"M18V?E$]6J?EE8*19.]IY2JN
M4_J3YS-MFT!G`ET(/[)H/#6*-A^98U5I](1,VMJ!A1/<':C?B!K96#1I>F_4
M^NJEVNWSDER"T(RA$7.ZP2P(XM67%G2KQ4RG*SK=IN=;]#PYS&\<%ML"Q99`
MD02*KT9,F-,M9O^I"5GMJ033Q:MC4:U'%2_JJKK<SGL:S^0#7I4#Z^"9F8XK
MB\[:^9.-Q]!J[<";R.[V&/7^_2R)@-:%\+N/3;I2*7%ZN#Z0Y956_P%02P,$
M%`````@`JX$&1_&XYN>E`0``L0,``!D```!X;"]W;W)K<VAE971S+W-H965T
M,3<N>&UL;5/;;J,P$/T5RQ]0$R?I)2)(35>KW8>5JCZTSPX,8-47UC:A_?OZ
M0BA4O."9X9PS9WS)!VW>;0O@T(<4RAYQZUQW(,26+4AF;W0'RO^IM9',^=0T
MQ'8&6!5)4A":9;=$,JYPD<?:LRERW3O!%3P;9'LIF?D\@=##$6_PM?#"F]:%
M`BER,O$J+D%9KA4R4!_QX^9PV@5$!+QR&.PL1L'[6>OWD/RMCC@+%D!`Z8("
M\\L%GD"((.0;_Q\UOUL&XCR^JO^.TWKW9V;A28LW7KG6F\TPJJ!FO7`O>O@#
MXPC[(%AJ8>,7E;UU6EXI&$GVD5:NXCJD/_1AI*T3Z$B@$^$^B\93HVCS%W.L
MR(T>D$E;V[%P@IL#]1M1(AN+)DWOC5I?O12;_6U.+D%HQ-"(.2TP$X)X]:D%
M76LQTNF,3M?IVS7Z-CG<+AS>K0OLU@1V26"W$+A?CI@PIR7FX4<3,MM3"::)
M5\>B4O<J7M19=;J=CS2>R3>\R#O6P#]F&JXL.FOG3S8>0ZVU`V\BN]ECU/KW
M,R4":A?".Q^;=*52XG1W?2#3*RV^`%!+`P04````"`"K@09'OK:4^ZT"``!9
M"P``&0```'AL+W=O<FMS:&5E=',O<VAE970Q."YX;6Q]5L&.FS`0_17$!RS8
M)`%6!&FS5=4>*JWVT)Z=Q$G0`DYM)]G^?6T3L@P:^Q*P>?/>.)XWFNHFY(<Z
M<:ZCSZ[MU3H^:7U^3A*U._&.J2=QYKWY<A"R8]HLY3%19\G9W@5U;4+3=)5T
MK.GCNG)[;[*NQ$6W3<_?9*0N7<?DOPUOQ6T=DWC<>&^.)VTWDKI*'G'[IN.]
M:D0?27Y8QR_D>4,S"W&(WPV_J<E[9)/?"O%A%S_WZSBU.?"6[[2E8.9QY:^\
M;2V34?Y[)_W2M('3]Y']NSNN27_+%'\5[9]FKT\FVS2.]OS`+JU^%[<?_'Z&
MI27<B5:YWVAW45IT8T@<=>QS>#:]>]Z&+T5Z#\,#Z#V`S@*20<BE^8UI5E=2
MW"(Y_+=G9J^0/%/S1^PBY3;E<'J3J#*[UYJLTBJY6J([ACK,!F`>B,2P/R0H
M)G$/IY-PBH=G6'@V9)A-U6F)$RPP@L5`L`!')/"(`V8#,9XLEP&1)2#(4!&(
M6>`BJX#("A`L41&(6>$B>4`D!P0Y*@(Q!2Y2!$0*0%"B(@"3I[A(&1`I`0%^
M\1#CN7CK;J^*_3BAP*]^!O+</4&=.NH`&^;X[<]`GNLGJ%U'G:E?LQ27H4`F
M]\B@MAYE@*_S`M>!((_Y2<C]9&KMS",#[%]X2HV$_$^`N0N\V&8@7[6%6@`!
M_BX\U09!OFH+=0$"+%YXJ@V"?-46:@0$N+S`V\T,Y.DW)-0+"#!Z@7<<""H]
M=4!#W8`"HY=X'<Q`GCJ@H6Y`@=%+O`YF($\=T%`WH,#I)5X',Y"G#FBH'5#@
M]!*O@QEH7@?)9/3IN#RZ"4]%.W'IW4`YV7U,D2_4C4Y?\+HZLR/_Q>2QZ56T
M%=H,8&Y:.@BAN<DB?3(N/IDY][%H^4';U]R\RV'R&Q9:G,=!]C%-U_\!4$L#
M!!0````(`*N!!D?+G#7H-P(``+,'```9````>&PO=V]R:W-H965T<R]S:&5E
M=#$Y+GAM;'V5VVZC,!"&7\7B`0HV.1$1I*:KJGNQ4M6+W6N'.`$58]9V0O?M
MUS:'XFC@)MCFG_\;$X\G;87\5`5C&GWQJE:'H-"ZV8>AR@O&J7H2#:O-FXN0
MG&HSE==0-9+1LPOB54BB:!-R6M9!EKJU=YFEXJ:KLF;O$JD;YU3^.[)*M(<`
M!\/"1WDMM%T(LS0<X\XE9[4J18TDNQR"9[P_XI65.,7ODK5J,D8V^9,0GW;R
M\WP((IL#JUBNK04UCSM[855EG0SY;V_ZS;2!T_'@_NJV:](_4<5>1/6G/.O"
M9!L%Z,PN]%;I#]&^L7X/:VN8BTJY7Y3?E!9\"`D0IU_=LZS=L^W>[*(^#`X@
M?0!Y"`@[D$OS!]4T2Z5HD>R^;4/M7XCWQ'R('"FW*+O=FT256;UG.$G2\&Z-
M>@UQFJ.G&16A<1\1!$+TX6023N#P&`J/NPSC*9TDL,$*,EAU!JLI/XK\+7::
MHZ^9V>1Z`;+V#`@(\34Q#-DL0#;33['=@9"-!UG!D.T"9.L9K$&(K]G`D-T"
M9.<9;$&(K]G!D&0!DG@&"0CQ-#B"(;:Z9RGVY<0"@Y@'T4P98+!2!P[V+&*8
MXXMF_GX,ENO`\>H5PP?@031S`C!8UP,G]BS@,_`@FCD$>*G\L5?;&#X&OH@\
MGH-P<JER)J^N=RB4BUOM6M5D=>Q/S\1=RM_R+&WHE?VB\EK6"IV$-E>[NX<O
M0FAFLHB>S`U1F`XZ3BIVT7:X-6/9]91NHD4SM,BQ3V?_`5!+`P04````"`"K
M@09'9%N%QZ0!``"Q`P``&0```'AL+W=O<FMS:&5E=',O<VAE970R,"YX;6QM
M4]N.FS`0_16+#U@3D[151)`V6U7M0Z75/K3/#@Q@K>VAM@G;OZ\OA)"*%SPS
MG'-FQC,N)S3OM@=PY$-);4]9[]QPI-36/2ANGW``[?^T:!1WWC4=M8,!WD22
MDI3E^2>JN-!95<;8JZE*')T4&EX-L:-2W/P]@\3IE.VR6^!-=+T+`5J5=.$U
M0H&V`C4QT)ZRY]WQO`^("/@E8+(KFX3:+XCOP?G1G+(\E``2:A<4N#^N\`)2
M!B&?^,^L>4\9B&O[IOXM=NNKOW`++RA_B\;UOM@\(PVT?)3N#:?O,+=P"((U
M2AN_I!ZM0W6C9$3QCW0*'<\I_3GD,VV;P&8"6PA?(H&F1+',K]SQJC0X$9.N
M=N!A@KLC\Q=1$QN#)G7O"[4^>JT8VY7T&H1F#(N8\QIS1U"OOJ1@6REF.ENG
MV*876_0B55BLLQ>';8']EL`^">P?6F2/+2;,^1%3_)>$KNY4@>GBZEA2XZCC
MHJZBRW8^LSB3.[PJ!][!3VXZH2VYH/.3C6-H$1WX(O*G0T9Z_WX61T+K@OG9
MVR:M5'(<#K<'LKS2ZA]02P,$%`````@`JX$&1QM#H1*F`0``L0,``!D```!X
M;"]W;W)K<VAE971S+W-H965T,C$N>&UL;5/;CILP$/T5RQ^P)@[95A%!VFQ5
MM0^55OO0/CLP@+4V0VT3MG]?7PA+5KQ@>SCGS!G/N)C0O-D.P)%WK7I[HIUS
MPY$Q6W6@A7W``7K_IT&CA?-'TS([&!!U)&G%>)8],BUD3\LBQEY,6>#HE.SA
MQ1`[:BW,OS,HG$YT1V^!5]EV+@186;"%5TL-O978$P/-B3[MCN<\("+@MX3)
MKO8D>+\@OH7#S_I$LV`!%%0N*`B_7.$9E`I"/O'?6?,C92"N]S?U[[%:[_XB
M+#RC^B-KUWFS&24U-&)4[A6G'S"7<`B"%2H;OZ0:K4-]HU"BQ7M:91_7*?TY
MY#-MF\!G`E\(7[-H/"6*-K\))\K"X$1,NMI!A`[NCMQ?1$5L#)I4O3=J??1:
M<IX7[!J$9@R/F/,:LUL0S*LO*?A6BIG.URFVZ?LM^CXYW*^SY]FV0+XED">!
M_*[$PWV)"7.^QSQ^2L)6=ZK!M'%T+*EP[..@KJ++=#[QV),/>%D,HH5?PK2R
MM^2"SG<VMJ%!=.!-9`\'2CK_?I:#@L:%[1>_-VFDTL'A<'L@RRLM_P-02P,$
M%`````@`JX$&1VKK/[FD`0``L0,``!D```!X;"]W;W)K<VAE971S+W-H965T
M,C(N>&UL;5/;;MLP#/T501]0.8J[=H%CH.DP;`\#BCYLSXI-VT(ETY/DN/O[
MZ>*X3N$7BZ3/.21%JIC0O-D.P)%WK7I[I)USPX$Q6W6@A;W#`7K_IT&CA?.N
M:9D=#(@ZDK1B/,N^,"UD3\LBQEY,6>#HE.SAQ1`[:BW,OQ,HG(YT1Z^!5]EV
M+@186;"%5TL-O978$P/-D3[M#J<\("+@MX3)KFP2:C\CO@7G9WVD62@!%%0N
M*`A_7.`9E`I"/O'?6?,C92"N[:OZ]]BMK_XL+#RC^B-KU_EB,TIJ:,2HW"M.
M/V!NX3X(5JAL_))JM`[UE4*)%N_IE'T\I_3G,9MIVP0^$_@G`DN)8IG?A!-E
M87`B)EWM(,($=P?N+Z(B-@9-ZMX7:GWT4G+^4+!+$)HQ/&).:\QN03"OOJ3@
M6REF.E^GV*;OM^C[5.%^G3W?;POD6P)Y$LAO6GR\;3%A3K>8KY^2L-6=:C!M
M7!U+*AS[N*BKZ+*=3SS.Y`->%H-HX9<PK>PM.:/SDXUC:!`=^"*RNWM*.O]^
M%D=!XX+YX&V35BHY#H?K`UE>:?D?4$L#!!0````(`*N!!D<+,]-_I0$``+`#
M```9````>&PO=V]R:W-H965T<R]S:&5E=#(S+GAM;&U3VVZ<,!#]%<L?$+,L
M::(5BY1-534/D:(\),]>&,"*[:&V6=*_KR\L(14O>&8XY\S-+B<T'[8'<.13
M26V/M'=N.#!FZQX4MS<X@/9_6C2*.^^:CMG!`&\B24F69]D/IKC0M"IC[,54
M)8Y."@TOAMA1*6[^GD#B=*0[>@V\BJYW(<"JDBV\1BC05J`F!MHC?=@=3D5`
M1,";@,FN;!)J/R-^!.>I.=(LE``2:A<4N#\N\`A2!B&?^,^L^94R$-?V5?U7
M[-97?^86'E&^B\;UOMB,D@9:/DKWBM-OF%NX#8(U2AN_I!ZM0W6E4*+X9SJ%
MCN>4_A393-LFY#,A7PCWD<!2HECF3^YX51J<B$FC'7C8X.Z0^T'4Q,:@2=W[
M0JV/7JI\GY7L$H1F3!XQIS5FMR"85U]2Y%LI9GJ^3K%-WV_1]ZG"_3I[<;<M
M4&P)%$F@6`D4]]\[3)!3\6T*__?(5B-58+IX<RRI<=3QGJZBR^5\R.-*ON!5
M.?`.GKGIA+;DC,XO-FZA173@B\AN;BGI_?-9'`FM"^:=MTVZ4<EQ.%S?Q_)(
MJW]02P,$%`````@`JX$&1Q[$&6K``0``>P0``!D```!X;"]W;W)K<VAE971S
M+W-H965T,C0N>&UL?51;;YLP%/XK%C^@)N:2*B)(3:=I>YA4]6%[=N!P46W,
M;!.Z?S]?"(7)ZTML'[[;(3X4LY!OJ@/0Z)VS09VC3NOQA+&J.N!4/8@1!O.D
M$9)3;8ZRQ6J40&M'X@R3.,XQI_T0E86KO<BR$)-F_0`O$JF)<RK_7(")^1P=
MHGOAM6\[;0NX+/#*JWL.@^K%@"0TY^CI<+KD%N$`/WN8U6:/;/:K$&_V\+T^
M1[&-``PJ;16H66[P#(Q9(6/\>]'\L+3$[?ZN_M5U:])?J8)GP7[UM>Y,V#A"
M-31T8OI5S-]@:2&S@I5@ROVB:E):\#LE0IR^^[4?W#K[)\=TH84)9"&0E?`8
MN^#>R,7\0C4M"REF)/VK':G]!P\G8EY$A90K2M^]":I,]5:2A!3X9H46#'&8
MRQ9S6!'8J*\6)&2QT,G6(DQ/0O3$)TRV[ED:%DA#`JD72'<M)OL6/>:RQ_S'
M)/O$)-L)9$&3/28/F^2?F.0[@6/09(]Y_,<$;VX'!]FZ(5"H$M/@1FY37>?L
MB;C;]0$OBY&V\(/*MA\4N@IM[JB[4(T0&DR(^,&TVIDOP7I@T&B[/9J]],/A
M#UJ,]U%?OS?E7U!+`P04````"`"K@09'-_L.S]$!``#&!```&0```'AL+W=O
M<FMS:&5E=',O<VAE970R-2YX;6Q]E-N.G"`<QE^%^`"+H,XICDG'IFDOFFSV
MHKUF'!S-@EA@QNW;EX-C<4/F1@Y^W\?OCT@Y"?FN.DHU^.!L4,>DTWH\0*B:
MCG*B7L1(!_.F%9(3;8;R"M4H*;DX$V<0I^D&<M(/256ZN5=9E>*F63_05PG4
MC7,B_YXH$],Q0<ECXJV_=MI.P*J$B^_2<SJH7@Q`TO:8?$&'NK`*)_C5TTD%
M?6#9ST*\V\&/RS%)+0)EM-$V@9CF3FO*F`TR"_^9,_\O:8UA_Y'^S55KZ,]$
MT5JPW_U%=P8V3<"%MN3&])N8OM.Y!$?8"*;<$S0WI05_6!+`R8=O^\&UDW^S
M2V=;W(!G`UX,*']JR&9#]LD`/9FKZRO1I"JEF(#TWV(D]I.C0V9VK@'*34J_
M7:8R96;O%<[V);S;H%F#G>:TTL04]3IED4`#L%#@&$7F*7#@1W@?#\AB`;D/
MR$*`/%U#;GT97C,XS;;(-C%1'8IV".WB*/D3E'R%@M:K%!XE#U8QFDU,5(<B
MA%$:1RF>H!0!2AZM]U0$BQ0(1W>N#D6;??IY4V!PY$9RI3^)O/:#`F>AS>EU
M1ZT50E,3E;Z8K,Y<*LN`T5;;[M96[?\S/]!B?-P:R]55_0-02P,$%`````@`
MJX$&1\[ROI;0`0``204``!D```!X;"]W;W)K<VAE971S+W-H965T,C8N>&UL
MC53+;J,P%/T5BP^H@4!((H(TZ:AJ%R-57736#EP"JHVI[83.W]</PL05PW03
MV]?GG@>.G0]<O,D&0*$/1CNY#QJE^AW&LFR`$7G'>^CT3LT%(THOQ0G+7@"I
M;!.C.`[#-6:D[8(BM[5G4>3\K&C;P;-`\LP8$7\.0/FP#Z+@6GAI3XTR!5SD
M>.JK6@:=;'F'!-3[X$>T.T2A@5C$:PN#O)DC8_[(^9M9/%7[(#0>@$*I#`71
MPP7N@5+#I)7?1]*_FJ;Q=GYE?[!QM?TCD7#/Z>^V4HUV&P:H@IJ<J7KAPR.,
M&5)#6'(J[2\JSU)Q=FT)$",?;FP[.PYN9Q..;?,-\=@03PV9]>UTK,N?1)$B
M%WQ`PGW:GI@3C':Q_@XEDK8H7'CM4^KJI8B3.,<70S1B8HLY^)C5A,&:?Q*)
MYT02)Q)[!,D\P6J.8.4(5AY!.D^0+#A(/(*U'S-U,1VFLYAH7B)=D$@]B6R>
M8+T0<OV=D-F"@\PCV/@A'>;@8[;S(IL%D<TM01K.$VP78FZ_$]-<IW]:,)O_
M#>J#TJ\'BF^N24].\(N(4]M)=.1*7SA[/6K.%6BJ\$X?;:/?M6E!H59FFIE_
MCKOI;J%X?WVXIM>S^`102P,$%`````@`JX$&1R;,_;.?`0``L`,``!D```!X
M;"]W;W)K<VAE971S+W-H965T,C<N>&UL?5/+;MLP$/P50A\02J0=)X8LH%%1
MM(<"00[IF996%A$^5)*VDK\/'[(J!T(OXNYR9CB[%,M1FS?;`SCT+H6RAZQW
M;MAC;)L>)+-W>@#E=SIM)',^-2=L!P.LC20I,,GS>RP95UE5QMJSJ4I]=H(K
M>#;(GJ5DYN,)A!X/69%="R_\U+M0P%6)9U[+)2C+M4(&ND/VK=C7-"`BX)7#
M:!<Q"MZ/6K^%Y%=[R/)@`00T+B@POUR@!B&"D#_X[Z3Y[\A`7,97]1^Q6^_^
MR"S46OSAK>N]V3Q#+73L+-R+'G_"U,(V"#9:V/A%S=DZ+:^4#$GVGE:NXCJF
MG8=\HJT3R$0@,Z'8_)=`)P+]0L#)6>SK.W.L*HT>D4EW,;!PY<6>^LDUR,:B
M2>/RG5E?O51D2TI\"4(3AD3,TPUF#5'?(.@,P=[`[(*LN:#)!5GP"_*X+D#7
M!#9)@"X-W-]ZW*4N$D2E,[:[S1JH7H((?<B_.,&+X0[L!+^9.7%ET5$[?T]Q
MJ)W6#KQ4?K?-4.^?SYP(Z%P(=SXVZ8]*B=/#]7W,C[3Z!%!+`P04````"`"K
M@09'QUL<:`D"```@!@``&0```'AL+W=O<FMS:&5E=',O<VAE970R."YX;6Q]
ME=V.HR`<Q5_%^`"#XF<;:S)UL]F]V&0R%[O75+&:07&!UMFW7Q#KP(3QIGQX
MSN'WAXK%3-D;[S`6WOM`1G[R.R&F(P"\[O"`^!.=\"B?M)0-2,@ANP(^,8R:
MQ300`(,@!0/J1[\LEKD75A;T)D@_XA?F\=LP(/;OC`F=3W[H/R9>^VLGU`0H
M"[#YFG[`(^_IZ#'<GOSG\%CE2K$(?O=XYD;?4^P72M_4X&=S\@.%@`FNA4I`
MLKGC"A.B@N3"?]?,CR65T>P_TK\OU4KZ"^*XHN1/WXA.P@:^U^`6W8AXI?,/
MO):0J,":$K[\>O6-"SH\++XWH'?=]N/2SOI)'JPVMP&N!K@9PGC7$*V&Z),!
M:+*EKF](H+)@=/:8/HL)J2,/CY'<N=KCRR33VR4KXW+V7L(D*L!=!:T:N&C.
MEL:EJ"S%1PB0`!L%=%%$F@(:_A`>W`&1*R#6`9%51FQ#:LW9UB0N365K4C=(
MO%-);`5D[H!DIY+$"LAMRDQ7HC6CWJ[(W#!#59FJ/#M\P9+NL*06RZ=5$LV2
M&JND,,Y=HLH4Q7GPQ0%G.RB9B9(&3I3,W)8@<`-7IBH*C?^*Q9+OL.062^@\
MHMQ8!1[B*'4>D:D*T\RH2\,`XV6>T!7_0NS:C]R[4"'OA>4E;BD56&8%3[*^
M3E[7VX#@5JANI@K7-Y@>"#H][N/MHU#^!U!+`P04````"`"K@09'1UJE25T#
M``#T#P``&0```'AL+W=O<FMS:&5E=',O<VAE970R.2YX;6R-5TV/FS`0_2N(
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M!YY`Q@GD/B'KE0[,>EV?"UULUZV\1>WP,BZ%>>?HD725VT>J'VR'<G7*5#?Z
MOL4Y7B?O)M"(P3WF>8E!,R+IHL\I,)1BG(Z7*:`$.PM!X`P$RD`&$<02X0B0
M00&R(4!F!<ALDFR0,6":'D,HIBL(M5NB<);2'"9#/62H18;::>A`AB[2?$(4
M(P;!=C8L(VD&T\D]='*+3@[6)E^J3M,,@VR6J!6C&.;"/%R8Q87!`;AGI?"0
ME;+R,%A9`;BM<\`\VY@5G,1L,<XLYN$]!$L=(4!CCTH1"I&*0.-.+'"`6!O$
M'/L#`NT[Y;'\RQSK`H$&GM1F06I]MD,T8!-`2T<AC@CL.QN69LCA.^0S'K*<
MQUR:0+],96%!90$=,['@(67A2[V(I1E<EB6,(^ZRAL^`R'(7<Q06@^X:JX+3
MD*I@T%TC"XP"K&&#&'7D\5D0V^YR=!/L:XXXJ#MB7WO$68A:"\0<FS/V61!;
M%F3<$0(TS:0V#U+K:S*8!:SX$30L99HA#J%V_Z"HBX[/@-@R('-X!H.>F8JR
M"BD*\74DD@8L`1O$'6V+^(Q%+,]P1SLAH&>FKT$<I-;7D0@)46N!N*-M$9^Q
MB.49[J(*>F922X/4^AH-R4/4YB&;&?$9BUC&XHZMF_B^WTC0!QSQ-1`2\@EG
M@_[;S)+%(:L6[:D_?*IH+Z]-?]9=C,X'W"?<']+N\.WZ4IS$]Z(]E8V*7J7N
MCGK]N>PHI18=B_2A>[?G[@@^WU3BJ,U?9AKJ<"@=;K2\3&?L^:"__0M02P,$
M%`````@`JX$&1TW=OQ1&`P``V1$``!D```!X;"]W;W)K<VAE971S+W-H965T
M,S`N>&ULC9A+;YM`$(#_"N+>P,[PC&Q+2:JJ/52*<FC/Q%[;*,"ZL([3?U\>
MQEFDW>E<`BP[\\TL?%;8U46U;]U12NU]U%73K?VCUJ?[(.BV1UD7W9TZR::_
MLU=M7>C^LCT$W:F5Q6X,JJL`PC`)ZJ)L_,UJ''MN-RMUUE79R.?6Z\YU7;1_
M'V6E+FM?^//`2WDXZF$@V*R"6]RNK&73E:KQ6KE?^P_B_C$:IXPS?I7RTAGG
MWE#\JU)OP\6/W=H/AQID);=Z2%'TAW?Y)*MJR-23_UR3?C*'0/-\SOYM;+<O
M_[7HY).J?I<[?>RK#7UO)_?%N=(OZO)=7GN(AX1;577C7V][[K2JYQ#?JXN/
MZ5@VX_$RW4G2:Y@]`*X!<`N`J?`)-);YM=#%9M6JB]=.:WLJAD<H[J%?B*W7
MC8/MU'U?:->/OF\@BU?!^Y#H.@?&.8_F''&;$?39;PBP(:[AL$`D]@1H2X!3
MC;A(D-H31+8$T90@6B3(EDVF4Y73G&9J$L,([9B8P,0+3+[$Q!,F-C!?HA1"
M.R8A,(F)R4,K)C$P&8*CF92@I`N*L%)2@Y*&X'@W,H*2+2A@I63FDF'HH.0$
M)5]0T$K)S>>?QYGCP0RB.SG#30,464'72?,K$*/CA196;6?2PML\MI.$V5/L
M?*>%U=Z9M-`W=^@K*'\%2V!!&2Q(A>=^%PX#BMA!HB06'(L%4V-!>2PX(@O3
MY#3.72U1*@N.R\*4&1`B!XBR67!T%CR?!26TX!@M%DI'(G:L'5!*`T=I8"H-
ME-+`41I,I?-$9`X0930LC7;52AD-+*.!,AHX1H-IM,,QH&P&CLT0,RB4R<`Q
M&1(&A=(8.!J#J7&4.)\NI3%P-(:,T0[E,'`<AIS5#E(*(T=A#/_?#E+Z(D=?
M%+QV*'UQJ:_C%P#)?ZA9^B*E+W+T15/?%%RE4@(C1V!D"(R4P,@1&!-6-Y3"
MR%$84T8WE+_(\1<9_B+E+W+\Q9RS9A&E;\31-V+H&U'Z1J2^\S>B(+L)C$_O
M6K:'<8>A\[;JW(P;&L;H;1?C`<9/]\_IF]6I.,B?17LHF\Y[55JK>OQ:WRNE
M95]%>-?W?)3%[G91R;T>3M-A,::=A^E"J].\D7+;S=G\`U!+`P04````"`"K
M@09'<H0,K^H$```2'```&0```'AL+W=O<FMS:&5E=',O<VAE970S,2YX;6R-
M6<MNVT@0_!5"=X><)TE#%I#8"G8/"P0Y;,ZT-+:$D*)"TE;V[Y=/>5KH[LQ%
M#ZIZNF;85=,CKB]U\[,].-=%OZORU#ZL#EUWOH_C=G=P5=%^JL_NU/_R4C=5
MT?5?F]>X/3>NV(]!51G+)+%Q51Q/J\UZO/:MV:SKMZX\GMRW)FK?JJIH_OOB
MROKRL!*KY<+WX^NA&R[$FW5\C=L?*W=JC_4I:MS+P^JSN-]:/4!&Q+]'=VF]
MS]%`_KFN?PY?_MX_K)*!@RO=KAN&*/JW=_?HRG(8J<_\:Q[T(^<0Z']>1O\Z
M3K>G_URT[K$N?QSWW:%GFZRBO7LIWLKN>WWYR\US,,.`N[ILQ]=H]]9V=;6$
MK**J^#V]'T_C^V7Z)15S&!X@YP!Y#;CFP0/4'*`^`C0;H.<`'1I@Y@!S$Q!/
M<Q]7[JGHBLVZJ2]1,]WN<S%4E;@W_;W91>UXL9EN2+]V;7_U?2/S?!V_#P/-
M&#EBOO@8<47$_>C7%!)+,8=+/P66X-%'J"3!,$\0(S#,%F12.%.%,5738BB0
M0^(#:&P`/0V@P0`*DDRGY9@PIQ&3RS3'0%L?9(4@J!B&B@%4-,QB)BK&RW*G
MDUQBJ"U`*:TT3L8R9"P@8U`RUDMC1):B7'R0M&F&4TD9*BF@8O$!,J9(LI`B
MR1D&.5<D\V+DWCQ%HM`5VT*0,3B5P2U)+L./?RR3&317`$D'PG*2#VI'"Q_!
M5<JLH!DT)4IP+@*L34)006UKH0(=)R6&X/Q$!!F*X!Q%0$O)X&SUO"`0E!-Y
M.+L0P"\$M6"HR)?9VJ#9<N(4:<AL`4@0.Y)`-;SD`2*F[%6@*EYFFX?,5G+B
MDTG`=B%]5:4"5>@6@#)!U*KDE"=%@!-(7U9W)L>-X!9%K0VG/BD#C&`&S2H7
M.<[&!TE)N))$=;R040%E"4`RHR;-B5T"'0NB@Y&HCN>RE":H++G-6MJ0L@0[
ML1`67WN`4H)P)LEY@DQ#"C,%6U2&]QC;&Y@E[Q)G'C(+*<W,R^2;%*#C@ZRB
M9,LU$Q+8D"!Z,X7:T-+U)B$EHSCS4")`(``D,V*+49PK*.`*@M"R8GO\H#U9
M<3)5(7LR`)%VH+@]6<$]F>A5%;<GJZ`]67'Z4VF`'2A?6,+>GN'F>J=1D`ZG
M/I4%V('RA777'Q1P.A!%R$]Q\E-Y@!<HT*@KA;;\6X@R*>'^FNLH=!)0F0!$
MZE!S>M=`[U2_H5$ISY6I94AE:FY;UBJ@,F?0=?'QR@0H:D78D[\.*$OM'^OO
M%%Z5`$11X6Q#FX":U/ZI7L@<KTF`HKAPO82V(04)0((XU&O.I#0P*4HZW+%>
M!YWK-6<&FCW9+POORUSJ#&_H`4I)XHQC."\P(4=[`\[LRN!E`%&"^MO%<)9A
M0D[VQC\Y2*$$AMH"E-#$W39<(V%@(T'TI89K)$Q0(V$XTS`AC00$24*%AOTO
M$#@"64U<(V&"&@G#:=2$'.XA2%)YN`[!`"53_P,;[G!O@@[WEI.?!?*3&IOM
MTPV(Z&<MIRL+="4MII@G"W0EJ<;+<I*Q0#)4MV0YR=@@R5A.,E;_>;J/EMM"
M8^\!2>6:U_'15!OMZK?3^"3,NWI]_/59C@]8/N";];EX=?\4S>OQU$;/==?5
MU?A,Y:6N.]=S2#[UFCNX8G_]4KJ7;OB8#J8Z/;*:OG3U>7D"=WT,N/D?4$L#
M!!0````(`*N!!D=W_OK06P(``+D'```9````>&PO=V]R:W-H965T<R]S:&5E
M=#,R+GAM;(U538^;,!#]*XC[+F#SD40$:4-5M8=*JSVT9X<X`2U@:CO+]M_7
M'T#LR$1["7AX[\T;.Y[)1T+?68TQ]SZ[MF=[O^9\V`4!JVK<(?9,!MR++V="
M.\3%DEX"-E",3HK4M0$(PS3H4-/[1:YBK[3(R96W38]?J<>N78?HOP-NR;CW
M(W\.O#67FLM`4.3!PCLU'>Y90WJ/XO/>?XEV900E1"%^-WADQKLGS1\)>9>+
MGZ>]'TH/N,45EQ)(/#YPB=M6*HG,?R?16TY)--]G]>^J7&'_B!@N2?NG.?%:
MN`U][X3/Z-KR-S+^P%,-B12L2,O4KU==&2?=3/&]#GWJ9].KYZB_I)N)YB:`
MB0`6PI+'38`3`=X(L:I4.U-U?4,<%3DEHT?U80Q(GGFT@V+G*H^I(-7;)2IC
M(OI10+#)@P\I-&&`PAQ,3+0@`J&^I`"N%!,=&'3@2E":B"QQ9X"N#%`7`:TB
MMFZ!V"40:X'8%("A;3+396A,KS#I_4YI3&EBHCB)W4Z2!TX2RTED9TFTD\3(
M\I3<V]6@T@*E*71;21]822TKP&DE-;)L0>)T8F*>P,KQ9@^,9)81Z#R=S-SY
M$#A!I0G*TM3M9//`R<9RLG*\VP?_U*TEL+(7LONL6I`?#8G4+C2>;JP-RE;R
M.!O#G,?J#'"S(N&\^%.Q$?A2M<Z;/;N`7ZG6!MW?_\#HB!VF%S4IF%>1:\]E
M"S*BRS1Z`;*CWL4/<DJI3GN3*?(!7?`O1"]-S[PCX:)?J^9Z)H1CX2Y\%M>@
M%G-T6;3XS.5K)N^'GBQZP<DP#\IE6A?_`5!+`P04````"`"K@09'@!V=>WP%
M``#I'```&0```'AL+W=O<FMS:&5E=',O<VAE970S,RYX;6R564UOXS80_2N&
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MS_[S?.L^/_I?8C8,HP>(88!X#'C,0P^0PP#Y.4`%!ZAA@)H[@QX&Z,D,J][W
M+G+[K,XVZ[+X6)3]<M^S-JOXDV[6YK"HNIMEOR!-[*KF[H^-5&R]^M$:&C"B
MPVQ=C%449.]"^`.Q:@@\6`B*Q3"#<(8+:H*=B[":Y/"?1E*/$:`I*9JR#Y:$
M8'G\5)0!U1M08&!"TO:QZ#&W#O.+2`P%VB%(,@JT!U!L%`5*`628I)W2`:<T
M."5Q%MT[I9U9IEG60W8N1!H*LG<A7"H*DP+&B1ZX8P+N&'"'#-K60/@UO48`
MX@EI:0\@2R]D"B#%+.V4#3AEP2E/ZL>!U(_!@">L28!!`@8LN;Z)FP):,#*7
M4A=E$JX53:;=);QLVA\=.C%)9P"-R\R-H0DA3K)8Q!Y*I!*/E%"*$[*.!M!8
M`MI32P"3L11T/<VSE@:LH7NDQ`\)Q%WQE9IY3)#R.T8(]%=S)!L//DG7)Q9Q
M2<'2``P)A>2<@Y[KB9XG`R%783F/IKF?#(04$F*^'`I),0<MUJ3K6^Y*I(V2
MF$+M`-4&R-+AGF,L#1A#YT+"S$&9O65/RN"8A*B#GAV<DT(XL@`EU)-61`U1
M`1!+//.$])*#8&I/R0E2Y`9O!9OCK0B)DN`SO$60\)2V(-5AG`?5P9,>(M2<
M"50'3_F(4#T+K&=2@O<""]5(*>A.9`+4B?*EO0C5M(":-J1$[P5T3\)J1DLY
MX(05"?,E5J@2!52BX30EMVN1Q@KA*0,1:EP$5*P1]%36W8`3I;1G10`GFJ7S
MIDE(`@14-]T4[`?08RYMR3"EB&N8^Q8D)!8"Q&+:Z0^]@W`;)VZD98+L>W8(
M9$8I[BF%F1;3H$5\_`IU;1($S6C23<E@+J9-0C=)`&QZ.R'HVIIK,`T91"=#
MDBM!3<VD<QNV7>FV9#I*R%XH!92*I"?99:AODZ#,QJ-@,M2W25!F,TF1H4V2
M;D-F(TEW28`RD?7L:3*D\A)4WB0T'5>\DVCZVF,,L`+2S$<GI.\2]-TRF@XT
M4"KRED](MB7(]E2/QID,9!;=9:>`:C++YWA(VB5(NZ6[9^E*MDBBZ:/:F!<N
M+&[R@CE_/G(AC9>@\9;NI&4,2<)YXOZ1;34,\:7Y_O\8'B/@-8Q.A[81"=L(
MG?-;F6!E:-K/!!:$*WI!0-/F&$YG&L97<J$N6<&FXGLMJ$*2K4"R[42RARYY
M`K(4*/6"D$RHE58@V#:FR2`HH<GX0$@F)/T*I#]F-!D$<9J,#X1D@F]?0?AC
M09-!D*3)(,CS**I"LJ]`]F-?VI%Z/F8NOJKTA22DP0HT./9DK@L23MQPGI"<
MJCE/S6K64[,**9@"!8L]]:-#>J!G/37KD![H.4_-.OS4O'+.<:YY^=:=H%6+
M0_%^JUNNSMW'*=T7T9X#3>YO^=..$_?W_"GMS^`^S6_6]^PM_R,KW\ZW:O%2
MU'5Q[8Z*7HNBSAO6+&K2]I1GQ\?%)7^MVZ^V;8+[D[C^HB[NX\'BXW1S\R]0
M2P,$%`````@`JX$&1U#70,NA`0``KP,``!D```!X;"]W;W)K<VAE971S+W-H
M965T,S0N>&UL?5/;;J,P$/T5RQ\0`VZ;BPC2-JM5^[!2U8?NLP-#L.H+:SNA
M^_?UA;"D0GW!GO$YQV=F<#EH\VX[`(<^I%!VCSOG^ATAMNY`,KO2/2A_TFHC
MF?.A.1';&V!-)$E!BBQ[())QA:LRYEY,5>JS$US!BT'V+"4S_QY!Z&&/<WQ-
MO/)3YT*"5"69>`V7H"S7"AEH]_A'OCO0@(B`-PZ#G>U1\'[4^CT$S\T>9\$"
M"*A=4&!^N<`!A`A"_N*_H^;_*P-QOK^J_XK5>O='9N&@Q1_>N,Z;S3!JH&5G
MX5[U\`1C"?=!L-;"QB^JS]9I>:5@)-E'6KF*ZY!.-ME(6R84(Z&8"/G=MP0Z
M$N@7`DG.8ET_F6-5:?2`3)I%S\+(\QWUG:N1C4F3VN4KLSY[J>AF4Y)+$!HQ
M1<0\SC'%$N)P@Z`3A'@#DXMBR05-+HH9/R^VRP)T2>`N"=";,K:W)L,T0QT)
MI")HNWJX!:U3)7-,OOYBA,QZV[,3_&;FQ)5%1^W\F&)/6ZT=>*%L=8]1YU_/
M%`AH7=BN_=ZD'RH%3O?7YS&]T>H34$L#!!0````(`*N!!D>EU3Z0_@$``'0%
M```9````>&PO=V]R:W-H965T<R]S:&5E=#,U+GAM;(U4VX[;(!#]%>0/"+YE
MTT2.I<UEU3Y46NU#^TR<<6PM&!=(O/W[<G$<$K%M\Q!@?,Z9PP!3#%R\RP9`
MH0]&.[F.&J7Z%<:R:H`1.>,]=/I+S04C2B_%"<M>`#E:$J,XC>,GS$C;165A
M8Z^B+/A9T;:#5X'DF3$B?F^`\F$=)=$U\-:>&F4"N"SPQ#NV##K9\@X)J-?1
M<[+:YP9A`3]:&*0W1\;[@?-WL_AV7$>QL0`4*F44B!XNL`5*C9!._&O4O*4T
M1']^57^QN]7N#T3"EM.?[5$UVFP<H2/4Y$S5&Q^^PKB%N1&L.)7V'U5GJ3B[
M4B+$R(<;V\Z.@_OR)1YI84(Z$M*),.4)$[*1D-T(^5\)^4C(_S?#?"3,'S)@
MMW=;N1U1I"P$'Y!PI]T3<ZF2U5R?386D#0IW(+IV4D<O9;:,"WPQ0B,FM9B-
MCUGD(<C.AR03`FL#DXLTY&+,D'KT-)1@ZR,6\Z"'?XKL/Q&YLYF%;&:N6)F_
MRW09%LA#`KD3R.^JG=R;7+A:.$PW)HG-+X3;^K@0S+P24Y8[O=DR"-K[H'BV
M>-@9]NX4`W&RKUFBBI\[98KC1:>&\9R:._D0WR2K;1*([W2#<?W@)E\6/3G!
M=R).;2?1@2O]$NRUK3E7H$W',_T"&MT"IP6%6IGI0L^%ZPINH7A_[7%3HRW_
M`%!+`P04````"`"K@09']A'!*4T"```<!P``&0```'AL+W=O<FMS:&5E=',O
M<VAE970S-BYX;6R-54V/FS`0_2N(>Q?P!X&((&U(JO90:;6']NP0)Z`%3&UG
MV?[[VI@0$WG37F(\O/?FC8>,LX'Q-U%1*KV/MNG$QJ^D[-=!(,J*MD0\L9YV
MZLV)\99(M>7G0/2<DN-(:IL`A&$<M*3N_#P;8R\\S]A%-G5'7[@G+FU+^)\M
M;=BP\2/_&GBMSY74@2#/@IEWK%O:B9IU'J>GC?\<K?>Q1HR`GS4=A/7L:>\'
MQM[TYOMQXX?:`FUH*;4"4<L[+6C3:"&5^/>D>4NIB?;S5?WK6*UR?R""%JSY
M51]EI<R&OG>D)W)IY"L;OM&I!*P%2]:(\=<K+T*R]DKQO99\F+7NQG4P;Y)P
MHKD)8"*`F3#G<1/@1(`W`GI(0!,!_6\&/!'P78;`U#Z>W(Y(DF><#1XWW>Z)
M_JBB-5:]*3TQ!KEIB#H[H:+O.4Q!%KQKH0D#1LS6QJR0"[*S(=&,")2!V05P
MN9@R`(ON]%#8B!5V>OBGR/X3D85-Z+()S6%!NTJ0N@602P`9`60))-'2X\H<
MA8%TIB$Q#EV@8@$*,7*!=C8H7<70!=K;H`0AX*X)/Z@)+[Z@NRS8%(6M+%\`
M1,"%*A:H*,;8A=HM4#B)4Q=JOT#!-/VD6?&#PN)%8<XSWL96F@B&B;-;2U":
M.KME@V#B3K>W00@A>%=48/WW6\K/X]057LDNG=0?L16=!_LST+/C+KZ-UD7D
MB._416#F]DT^SWIRIC\(/]>=\`Y,JHDUCI<38Y(JU^&3:D:EKJIYT]"3U(\K
MW2PSO<U&LOYZ%\T78OX74$L#!!0````(`*N!!D>+'!NO0@(``%X'```9````
M>&PO=V]R:W-H965T<R]S:&5E=#,W+GAM;(U56X^B,!3^*PT_0*`@7H(DHV:S
M^[#)9!YVGRM6(4,ITU:9_??;"V)K*O$%VL/Y+N?02]Y3]LDKC`7X)DW+-T$E
M1+<.0UY6F"`^HQUNY9<3900).67GD'<,HZ,&D2:$492%!-5M4.0Z]LZ*G%Y$
M4[?XG0%^(02Q?UO<T'X3Q,$M\%&?*Z$"89&'(^Y8$]SRFK:`X=,F>(O7^QBJ
M%)WQI\8]M\9`F3]0^JDFOXZ;(%(><(-+H2B0?%WQ#C>-8I+*7P/I75,![?&-
M_8<N5]H_((YWM/E;'T4EW48!..(3NC3B@_8_\5##7!&6M.'Z"<H+%Y3<(`$@
MZ-N\ZU:_>_,E6PTP/P`.`#@"1AT_(!D`R1V03@+2`9`^`$)3BF[$'@E4Y(SV
M@)F_UR&U2.)U*EM=`JZ#S/17MH++Z+5(5O,\O"JB(0?JG*V=$X\9H60?):!/
M8H!#"PY]`CL[8^'UL'=($K^)Q&<B,74F3IV9GR#U$:2&('4(%JY)M<!4(2:I
M-9V:+?TJ\PF5N:.R]*ILYY9*,H/>I/VS),=*-F$E<ZRL_%:R)P4[5MRD)[U?
M3%A9V%:2U$^PG/C[RU?^_FK"P<HB2*/(K=/D;.T<:"UC1T3UY*F*^F@5^F3]
MQ-[]/%0:QZ^4&GOWZ\T%?*%8)PDNHP>=T#J%"&9G?9QS4-)+*]2>MJ+CE?&F
M;XR'^#9>[\S!?Z<I\@Z=\6_$SG7+P8$*>4;J`^U$J<#27323J[^2E]TX:?!)
MJ.%"CIDY_LU$T.YVFXU7:O$?4$L#!!0````(`*R!!D?[4`"C)P,```H-```9
M````>&PO=V]R:W-H965T<R]S:&5E=#,X+GAM;(U738^;,!#]*XA[%\PW$4'J
M)J#V4&FUA_;L39P$+>`4.YOMOZ\-A-AD8+F$8-Z,WYL9QD-RI<T[.Q'"C<^J
MK-G:/'%^7ED6VYU(A=D3/9-:/#G0IL)<W#9'BYT;@O>M455:CFT'5H6+VDR3
M=NVE21-ZX651DY?&8)>JPLV_9U+2Z]I$YFWAM3B>N%RPTL0:[/9%16I6T-IH
MR&%M?D>K'(42TB)^%^3*E/^&)/]&Z;N\^;E?F[;D0$JRX](%%I</LB%E*3V)
MG?_V3N][2D/U_\U[WLH5]-\P(QM:_BGV_"38VJ:Q)P=\*?DKO?X@O09?.MS1
MDK6_QN[".*UN)J91X<_N6M3M]=H]B>S>##9P>@-GJ8';&[B#P4`,-O!Z`^]N
MX,T:^+V!OW2'H#<(1CM87;#:4&\QQVG2T*O1=/5QQK(,T2H0R=P9K%ULN@R*
M8#.Q^I%Z-DJL#^FHQS@M9J-B0@^"9"KD[L02!`86#L2BW\%1S!UH@ZV*"'V0
MPY=.\@DG&DT7HNEVP7*U8#FP`P]RX'4./,V!JY,,NUATF+K%?$.![4&HK8;R
M'3^$4)F&BA&*(52NHZ(I8?Z,,%\1%H^JR.]T^<HNR$6V:]LV!-RJP#CRIG"9
MYA`%GC<!S#6'0:SA-(7!C,)`2]TH*5$G,5`#:3\A!T)M1RC?A5#9"!5&$"K7
M4.C)GGCWPAEAH29L]&IUF&<=$X#Y#14J<&*_1&1?(G(8H8F-9L1&FI`0%!(M
M+=1H8:%&2PLU6EJH\8S$6),(ELTF7E2H\:)"C1<5:KRL4.4L,*E,/ARDN4K+
MTUV`QUW?P9%^WDUT.@2>53<6CN8B!E/>@_J<!S*3<,IUH"WZ_53.$7@RW4BI
M1Y/K39QM"#R;;J'Q%H5F[A1`_I+0:'U[\EW08&XT'9;'IMU2N7?&1Y.Y=HAF
M>UW?#W40&E.SE!FL(LVQ'9>9L:.7FDN!RNHPDC\[<H8;K6_0:HN`]4R.\,"Z
MD+W*A/3')X*R>-)._=:=4IJ<\9'\PLVQJ)GQ1KF8-MO1\$`I)T*I>.M-XR0^
M3(:;DARX_!O*/'6C>G?#Z?GVY3%\_J3_`5!+`P04````"`"L@09'2%05`P4"
M``"(!@``&0```'AL+W=O<FMS:&5E=',O<VAE970S.2YX;6R-5<F.FS`8?A7$
M`\3LD(@@-4%5>Z@TFD-[=L`$-`93VPG3MZ\70G$$-)=XX=O^/\:D`Z$?K$:(
M6Y\M[MC1KCGO#P"PHD8M9#O2HTX\J0AM(1=+>@6LIPB6BM1BX#E.!%K8=':6
MJKTWFJ7DQG'3H3=JL5O;0OKGA#`9CK9K/S;>FVO-Y0;(4C#QRJ9%'6M(9U%4
M'>TO[B%W'0E1B)\-&MAL;LGP%T(^Y.)[>;0=F0%A5'`I`<5P1V>$L502SK]'
MT7^>DCB?/]2_JG)%_`MDZ$SPKZ;DM4CKV%:)*GC#_)T,W]!80R@%"X*9^K6*
M&^.D?5!LJX6?>FPZ-0[Z21R/M&6"-Q*\B>`&FP1_)/BO$H*1$#P1@"Y%-2*'
M'&8I)8-%];_70WE(W$,@6EU83&U2W5_1"B9V[UG@NBFX2Z$1XRG,R<1X2YCS
M'+.(R`V$/T&`"#DE]9:2^CJI9Z18$?"7!`(MX,\$HMC,F.@J-*13$&?GN$N@
M?!5D)`DVD@1&*8'IHC%G$Q,NFX0;)J$A$"T+1!L-CUYI>+R1(/YOPT_Q2[U,
M-DP2(^63BZM/>9Z8-FL^^PV?O>&3+%:SG]F$[FZEY_(V6K61#V<^^Z6S<3)`
M7N(]^8#9%=##*_H!Z;7IF'4A7-PFZM6O".%(2#D[<4QJ\5F8%AA57$YC,:?Z
MHM0+3OK'O3]]?+*_4$L#!!0````(`*R!!D><MS(R100``.04```9````>&PO
M=V]R:W-H965T<R]S:&5E=#0P+GAM;(V8R9+:2!"&7T7!W99JEPB:"+?`>`X3
MX?#!<U9#L82U8$DTGK<?K70ED553%T#%EYLR]4NJU;VJ?S5GK=O@3Y&7S<OB
MW+;791@V^[,NLN9S==5E]\^QJHNL[0[K4]A<:YT=!J,B#VD4R;#(+N5BO1K6
MOM?K575K\TNIO]=!<RN*K/[W5>?5_65!%O/"C\OIW/8+X7H5/NP.ET*7S:4J
M@UH?7Q9?R'+':(\,Q,^+OC?&[Z!/_JVJ?O4'?QU>%E&?@\[UONU=9-W7NTYU
MGO>>NLB_)Z<?,7M#\_?L_>M0;I?^6];HM,K_N1S:<Y=MM`@.^IC=\O9'=?^F
MIQI$[W!?Y<WP&>QO35L5L\DB*+(_X_>E'+[OXS^*36:X`9T,Z,.`$J<!FPR8
MKP&?#/B'0>PT$).!\(T@)P/Y,"#<::`F`_44(1S/[M";3=9FZU5=W8-Z'*AK
MUL\M6:JN^_N@&1;KL>5==YIN]7W-:;0*WWM'$T,'YM5D%,>0C8F0!Q%V"3RR
MH%@64P1JF--88B%2"C(E:!J0H1BS]?#SU618A#([Z(?A13.L:#:>>@8<<-P!
MQQSPT0$'#@3,4HQG9&3*L1(\A'"$$"#$4V/4V#QAA.!11%`J-:F$)!$&;4Q(
M21D+C-J:%)-2Q7A=TE&7!'4I[-2]2B/,)T(9QZ@44"Q6!&T#H%0B*49M`17'
ML64FE*,P!0J+T<*4$88P'@E\=/X/&[NQ,[$X22)+TK$CZ=B\_!.).T@<EU+B
M<RGU-R9K"OV?]DF?3MP$C;52SA*TC2G`N&0HM8$4)1R=G"V,20A3ENI0E9^K
M(Q[S/D%3PRF>=@JH3\RF.Q`C28S&W$),*6&Y>1#T[C%71SV&?H+&2%)08NF*
M%[8#F.B$RJ)!!+T!S'DS,/>VQJ*W@&GP"?>:?)?$$Z?&SV=/@-E(.-KU%&"4
MV"8?4$))U-D68#&WR3QQZ3SQ$7H"E;Z[QO#B3(RH!*\-^.(QZFH+J(3:.N\2
M>N*C],049\&%L"3MA>T@)A++\P1Q23V!6F_KJ4OLB9?:4Y?:4Q^UIT!Y)=[P
M%%(67QM`Q0KWM064BJ3E!%.7U%,?J:>F[(KG9_JY,@*D$(4V`"()P64>4M)X
M,H>%N52>^J@\!?(=*93:>%$[2%%AZX9+XBE\R$\L+EP23[TDGKHDG@J?F1!`
M!9-G;'J.?\*H10<AIGB48-ZV$&,RMDV&2^2I=$W&])9"3<F-:82^I6R\J!V@
MND>$*+)D[1)P:@HXL[U`4E1,Y]&(O48#%=,YBP1D\721\^EU&$("C\-<BLN`
MXC++"6.HLLWOR\2G6N;2$`8TA!&LVLT3]#R1H;'!4NCZ-&R>-<&^NI5MGZNQ
M^MB@^S+LSSVMOY)E2I#U#5ENQPV=#_?KU34[Z;^S^G0IF^"M:MNJ&/9PCE75
MZB[KZ'-W)9UU=G@<Y/K8]C]5?T6.FW#C05M=YSW%Q\;F^C]02P,$%`````@`
MK($&1U?\92MP`P``GA$``!D```!X;"]W;W)K<VAE971S+W-H965T-#$N>&UL
MC5C;CILP$/T5Q`<4?(%<E$3:I*K:ATJK?6B?O8F3H`6<8F>S_?MB+EDF&KM^
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M`#H$T'L`\0>P(8!]!O"NTIY95]=78<1FU:A;U/0OXR+L.R=+UBJWCW37V/1R
MM97IMO5]PQE;)>\VT8"A'68[Q9`[(FFSW[N@6!=#.)V$4ZR#W10QR_`>&-8#
MZXM@H`B.)^!8`MXGX"!!!DEF?1D]IL;*Z!$['`%(9!X2&2"1PRYZS!9B9AAF
MY\(`(KF'2`X2S/$$,\_[F(6\C[F'P3Q`"HBAJ!00L\")+#Q$%I,$$W>`>#M8
M.*6P#_^O!4$M.G`@)$`-`&(S_,N`H+G#RP0U\TAFZE7.4T<*GUM)D%V)SZ^$
MATC"'6\?2.("03(^WQ)@..Y2%77<*$D>)`GJN9'%+$02`.*X:1Y`KJ_>YU\"
MC,==]:#.&R59A$A"4>\-+&@:(`D$D0R5!(*X8XJB/A=3$C"44-1Z@R*4!BF"
M6F\DP4(488YB@2(LY".A/A-38#V>.U*@UALER8(D\4UV-`^1!(`X/KH^@!SS
M)O69F$+K.48CBEIOE&0>)(EOTJ.+$$D`*$MQ22#(,30RGXE9&N`;ACIO7!V2
M$$68;]9C-$`1",KPP?4!Y*K'9V(&K)>YZD&M-TK"@R3QS7HL9+D*09SADL!,
MCH^>^4S,@/4RUQ;"MV9E08M6YIOUV-1Z=#(``$GF`:,K!!%7/3X3,V@]Q^C*
M?6M7'K1VY;Y9CY,`21Y`^$(-@'CVN*U))MO>2C:G[CA`1WMUK8W=9TY:[T<.
M3]1NFQ_:MV2YZP\./M-L5A=QDC]%<RIJ';TJTV[*NQWT42DC6W;IE_8;/DMQ
MN-^4\FCLWYG=&_;'!_V-49?Q-.1^)+/Y!U!+`P04````"`"L@09'[<O?F-$!
M``#$!```&0```'AL+W=O<FMS:&5E=',O<VAE970T,BYX;6Q]5%V/G"`4_2O&
M'["HH/,1QZ1KT[0/33;[T#XSBJ-9$`O,N/WWY<.QN&'G1>!RSKGG7I!RYN)-
M]H2HZ)W149[B7JGI"(!L>L*P?.(3&?5.QP7#2B_%!<A)$-Q:$J,@2Y(",#R,
M<57:V(NH2GY5=!C)BXCDE3$L_CX3RN=3G,;WP.MPZ94)@*H$*Z\=&!GEP,=(
MD.X4?TF/=6X0%O!K(+/TYI'Q?N;\S2Q^M*<X,18()8TR"E@/-U(32HV03OQG
MT?R?TA#]^5W]FZU6NS]C26I.?P^MZK79)(Y:TN$K5:]\_DZ6$JS#AE-IOU%S
ME8JS.R6.&'YWXS#:<78[1;K0PH1L(60K(44/"7`AP`\$X)S9NKYBA:M2\#D2
M[BPF;(X\/4+=N2:2-BA<NW1E4D=O%<KW);@9H0636<RSC\E"B'J#@"L$:`.K
MBRSD`CH7F<=/T2XL`$,"R`G`31F'K<F=*\-A1HO9AS&UCX&'_2'L!#UP@CPG
M$&Z3Y,X(\I*@(BE"H-H'I3#_I"?Y`R>YWY-]L"6YER1'11[LR08$4?'!"?`N
MW(0OY"<6EV&4T9DK?7?M1>LX5T1+)4]:J]=/RKJ@I%-FNC-5N[_,+12?[F_&
M^G!5_P!02P,$%`````@`K($&1SY!/5M``@``%@@``!D```!X;"]W;W)K<VAE
M971S+W-H965T-#,N>&ULC5;)KMHP%/V5*!^`,P=0B%1`5;NH]/06[=J`(=%S
MXM0VY/7OZREIC)R4#1YR[CEW\+4I>D(_6(40]SX;W+*=7W'>;0%@YPHUD*U(
MAUKQY4IH`[E8TAM@'47PHHP:#*(@R$`#Z]8O"[7W1LN"W#FN6_1&/79O&DC_
M[!$F_<X/_6'CO;Y57&Z`L@"CW:5N4,MJTGH477?^EW![##,)48B?->K99.Y)
MYT^$?,C%]\O.#Z0/"*,SEQ10#`]T0!A+)J'\VY#^TY2&T_G`_E6%*]P_088.
M!/^J+[P2W@:^=T%7>,?\G?3?D(DAE81G@IGZ]<YWQDDSF/A>`S_U6+=J[/67
M9&/,W`:1,8A&@S!9-(B-0?RJ06(,DB<#H$-1B3A"#LN"DMZCNGH=E(<DW"8B
MU6>/J4VJ\RM2P<3NHTRRH``/260PD<+LIYC(A3A,$7'@9#G:2N&(`<++T=7(
MY6JB78TL@LA-$+L(8DT06P2QFR!9\""Q"!([3'G(9"XTJ%6@?#7C9KJ@DEHJ
MJ:V2ZY*D4Q&W1+8@D5D2F2VA,0<;,R.2+XCDTT,1S:1[O5"O]2OUVBQXL%FJ
ME\[D<3/)Y$RQ9&5G->3'^7*90[$W*".SFHDE=';J(&0WT'J&PME!)J%A]$I&
M0V</#5[$_S\Z^R?09D9GJ=5"J]?R8(;"V4=#M.E+T2[U2?A"H^QM4/Y\LX')
MA=S!&_H!Z:UNF7<B7-SMZB*^$L*1H`I6PN5*/-+C`J,KE]-<S*E^MO2"DVYX
MA<>_`N5?4$L#!!0````(`*R!!D<K,-_W\0(``"8,```9````>&PO=V]R:W-H
M965T<R]S:&5E=#0T+GAM;(U7VVZC,!#]%<0'%&S,+2)(3=K5[L-*51]VG]W$
M25`!I]AING^_-C;4CHR5EP+FS)PS@X\SK:YT>&<G0GCPU;4]6X<GSL^K*&*[
M$^DP>Z!GTHLW!SITF(O'X1BQ\T#P?@SJV@C&<19UN.G#NAK77H:ZHA?>-CUY
M&0)VZ3H\_-N0EE[7(0BGA=?F>.)R(:JK:([;-QWI64/[8""'=?@(5L\02<B(
M^-.0*S/N`RG^C=)W^?!KOPYCJ8&T9,=E"BPNGV1+VE9F$LP?.NDWIPPT[Z?L
M/\9RA?PWS,B6MG^;/3\)M7$8[,D!7UK^2J\_B:XAE0EWM&7CWV!W89QV4T@8
M=/A+79M^O%[5FR+68>X`J`/@'##SN`,2'9!\!R!O`-(!Z-Z`5`>D-P&1JGWL
MW!/FN*X&>@T&];G/6.XJL$K%M]D%;%P<U`<1O6-B];-&.:RB3YE(8^"(V9@8
M,",BD7VF@"X*'0Z-<"?!UD3DJ0OR9$*2.'9AGBVBQ"TT<0E-5"\2JQ<+"9`K
M`5()D)4`V2)SU0V%Z54S$;@M1:&>351>&B!+2^K1DEI:;IJ:*BVIP9("X%*R
M-3$0(+>0S",DLX1D3B&906+UQ&+)/2RYQ9([6Y\;+-DB2^%A*2R6PIV@]&RQ
M\IXM)L^W10GRI9&BM"M%VK$6J%BH%#@/AHG'.AF*!=\#I_%UL0#>5:W3DI,*
MRY,%=%=K@9)\@<?G7&!9MUB2ZC3<5&UZ5[4^JX#,9UJ]BT%FG2!+VQCXW`(L
MNQ3(W=;\KK;Z_`(LPQ2IFZ>PSO9R@<=IJXG'\E61N1M7WM4XZ',?M(V5.PNR
M0`E<XO&Y#]KN6SAIH,]]\"[W09_[H.V^TME6#=)M=?^>/5D@N-AZGT6A9='2
MR;.!R,L3&<-11X;C.):R8$<O/9=CA+$ZC[Z/4`Y7-^L;L-JJ`?8[35V=\9'\
MQL.QZ5GP1KD8W<8YZT`I)T)=_"".B),8VN>'EARXO,WE[Z`:8]4#I^=I*I__
M-:C_`U!+`P04````"`"L@09'(W0CT0,"```1!@``&0```'AL+W=O<FMS:&5E
M=',O<VAE970T-2YX;6R-5<N.FS`4_17$!\1@((&(('6HJG91:32+=NV`"6@,
MIK83IG]?/X#!E8=V@U_GGG/N]8-\HNR5MQ@+[ZTG`[_XK1#C&0!>M;A'_$!'
M/,B5AK(>"3ED-\!'AE&M@WH"8!`<08^ZP2]R/??,BIS>!>D&_,P\?N][Q'X_
M84*GBQ_ZR\1+=VN%F@!%#M:XNNOQP#LZ>`PW%_]3>"Y##=&('QV>^*;O*?-7
M2E_5X%M]\0/E`1-<"46!9//`)29$,4GE7S/INZ8*W/87]B\Z76G_BC@N*?G9
MU:*5;@/?JW&#[D2\T.DKGG-(%&%%"==?K[IS0?LEQ/=Z]&;:;M#M9%:2)<P=
M`.<`N`;`8#<@F@.B]P"3J7&F\_J,!"IR1B>/F<T8D=KS\!S)RE4>UY/,E$MF
MQN7LHXBS,`</131CH,8\V1CHPI0V)EHQ0'I8C4"7D=@8@1N""'Y`$+D((D,0
M60YB-T&\XR"V',1VF@93VIC$+9+LB"26R\064<=.J1C0H$'A(7.K''=4CI;*
MT4UPVBGFZ7^*F>XX2"V"DYUG8LY5NDDS"M,D3:!;*-L1RBRAU$V@"OMAKFKQ
MW\F&SELTFPCMXY_]M:W+/0HW"0>'"&[NF]$"F\L[HAO^CMBM&[AWI4*^`_K2
M-I0*+-F"@ZQB*]_G=4!P(U3WI,IK7BPS$'1<'N#U+U#\`5!+`P04````"`"L
M@09'-\4VP68"``#_!P``&0```'AL+W=O<FMS:&5E=',O<VAE970T-BYX;6R-
M55V3VB`4_2N9O-<`"2$Z,3/K1Z=]Z,S./K3/&%$SFP0+N&[_?2'$2!QT?1&X
M.>?><P"Y^9F+=WE@3`6?3=W*>7A0ZCB+(ED>6$/EA!]9J[_LN&BHTDNQC^11
M,+KM2$T=(0#2J*%5&Q9Y%WL51<Y/JJY:]BH">6H:*OXM6,W/\Q"&E\!;M3\H
M$XB*/!IXVZIAK:QX&PBVFX<O<+8F!M$!?E?L+)UY8+1O.'\WBY_;>0B,!%:S
M4ID,5`\?;,GJVB32A?_V.:\E#=&=7[)_[]QJ]1LJV9+7?ZJM.FBQ(`RV;$=/
MM7KCYQ^LMX!-PI+7LOL-RI-4O+E0PJ"AGW:LVFX\VR\9Z&E^`NH):"`,=?R$
MN"?$5T+RD)#TA.39"K@GX)L*D?7>[=R**EKD@I\#84_[2,VE@C.LSZ8,9!<4
M]D#TWDD=_2@P`'GT81+U&-1A%BZ&)#[(RH7``1%I`8,*Y%/15T`.'?D*+%T$
MP5X-7R99WTDRDAG[9,9VLV*'GTP3?X+$ER"Q"9+1;L.Q2&+WPF):6P0`F/I0
M2Q>%<(JP#[5R45,TS3(?:NVB"";3.P>('QC#CK',JWB!G2K?8)I.O;Y&J`0#
MXO4US@4!\AL;PZ9I<L=9^L!9.CJRFWN566NI6P=,8.Q#+6]0,?:A5C>H+/&A
MUB,4G&#D-T8>&",C8U[)"_*4,?*4,?*4,?*%L<AYWAHF]EUCD4')3ZTR_U,G
M.O2N%V2>QYOX`LZ6T!-?Z5YG6],U?9$?Z9[]HF)?M3+8<*4?Y>X%W7&NF)8-
M)OJJ'70W'A8UVRDS)7HN;(.R"\6/EW8[]/SB/U!+`P04````"`"L@09'7TAJ
M!1P"``"^!@``&0```'AL+W=O<FMS:&5E=',O<VAE970T-RYX;6R-E=N.VR`0
MAE_%\@/$!I\CQU*S5=5>5%KM17M-$A);BXT+)-Z^?3DX+JR(E5R$T\S_S1@&
MZHFR=]YB+(*/G@Q\%[9"C-LHXL<6]XAOZ(@'N7*FK$="#MDEXB/#Z*2=>A+!
M.,ZC'G5#V-1Z[I4U-;T*T@WXE07\VO>(_=UC0J==",+[Q%MW:86:B)HZ6OQ.
M78\'WM$A8/B\"[^`[1XDRD1;_.KPQ*U^H((_4/JN!C].NS!6,6""CT))(-G<
M\`LF1"E)\I]9]#]3.=K]N_HWG:X,_X`X?J'D=W<2K8PV#H,3/J,K$6]T^H[G
M'#(E>*2$Z__@>.6"]G>7,.C1AVF[0;>362GCV<WO`&<'N#C`5`=N0#K,KTB@
MIF9T"ICYMB-26PBV4'Z(8\#U)#/9RT"YG+TU69S6T4T)S390V^Q=FVRQB:3^
M`H$^2&(@T!)(J]0OD/@$4B.0.`*5&R68PS1&@S:*-PFL@!^4KH!2)]7<!66&
MDUJ<!)2YGY*M4#*'4KB4TE`RBU)N0.7\_,A\!9D[R-)%%@:96TB8`_A@IXL5
M3.%@*B^F<##Y(TRY@BEM#(C]`M7*B:R>.9&JJ!^&H!:M&(#WJ,Q&)M<J+Q^<
M2."MT#O(+K\D*QY(K-4?>*H`P5H%@N29=.T2S.+/^Q)95].(+O@G8I=NX,&!
M"GG+Z2OI3*G`4BK>2,E6/B;+@."S4-U"L<SU:@:"CO?78GFRFG]02P,$%```
M``@`K($&1^PMM1P6`P``"0T``!D```!X;"]W;W)K<VAE971S+W-H965T-#@N
M>&ULC5?;;J,P$/T5Q`<4;#"7B""U2:/=AY6J/NP^NXF3H`+.8J?I_OUB;*@=
M&9>7`.:<.3/CF8DI;K1[9V="N/?9U"U;^V?.+ZL@8/LS:3![H!?2]F^.M&LP
M[Q^[4\`N'<&'@=34`0S#)&APU?IE,:R]=&5!K[RN6O+2>>S:-+C[]T1J>EO[
MP!\77JO3F8N%H"R"B7>H&M*RBK9>1XYK_Q&L=A`)R(#X79$;T^X]X?P;I>_B
MX>=A[8?"!U*3/1<F<'_Y(!M2U\)2K_Q7&?W2%$3]?K2^&\+MW7_#C&QH_:<Z
M\'/O;>A[!W+$UYJ_TML/HF(8/-S3F@V_WO[*.&U&BN\U^%->JW:XWN2;+%0T
M.P$J`IP(DXZ=$"E"M)00*T+\18B=!*0(:"DA483DCA#(9`VIWF*.RZ*C-Z^3
M]7'!H@S!*NDW<^^Q8;&3.]@GF_6K'R4"L`@^A"&%@0/F2<>DL0VRT2%@0@2]
M`Y,7T.:%4H`:W>K#YEO$5D>DR`9YUB%1&-HP.T,HLH<2V4*)9$(CC1_GL=U`
M;#,02P.Q[F1F^IC*=$E(*[.-PCBRH3:+4#L=E45S$2.'PTC/6`Y,%21]09I*
M&L*9$DD<*HF>UP3:#:2.C4F7;$SF\"`S6L6:S>=,BQ.&*,_L,KE#)G?LO\SF
M<ZZIQ$F>VD7$7)U5$2^U:&*KC@*I$HJB<$;(.F!&(7/"(&O:%$CE+4D@FE&R
M#I%1"1I*B;40%4B%E-T/`>G/UD#!<"YNZQP8O8F,MIC;(^LD4!4+XB4E"UR]
M"=#WTP2@N7(R$N=&J6EBH.;2YFISD"R8)@KT;0-8Q\$HE!K5,F?".A#&_<D6
M[8^KV4'N"E<-<F#T>SI7CM#5[U#O]V@N7&CM9!4N!$O"A:X6A>8_\%T]QNJO
MW@"!F1$*7<T'(V-SYTRXF@\N:C[H:CZ(ED2+G-$&VG&N(=UI.'DS;T^O+1=G
M%FUU.MT_0G$<O%O?@-56GM&_S)3%!9_(+]R=JI9Y;Y3WA\WA9'BDE)/>N_"A
M]^[<?Y=,#S4Y<G&;BE:4)W7YP.EE_/"8OG[*_U!+`P04````"`"L@09'W5NS
M4),"```Y"@``&0```'AL+W=O<FMS:&5E=',O<VAE970T.2YX;6R-5MN.FS`4
M_!7$!P1L0T@B@K1)5;4/E5;[T#X[Q$G0`DYM)VS_OKX`BROC\A)L<\[,&3N#
M3]Y1]LYOA(C@HZE;O@]O0MQW4<3+&VDP7]$[:>6;"V4-%G+*KA&_,X+/.JFI
M(QC'ZZC!51L6N5Y[945.'Z*N6O+*`OYH&LS^'$A-NWT(PF'AK;K>A%J(BCP:
M\\Y50UI>T39@Y+(/7\#N"!,5HB-^5J3CDW&@BC]1^JXFW\_[,%8UD)J40D%@
M^7B2(ZEKA229?_>@GYPJ<3H>T+]JN;+\$^;D2.M?U5G<9+5Q&)S)!3]J\4:[
M;Z37D"K`DM9<_P;E@PO:#"EAT.`/\ZQ:_>S,FTW<I[D38)\`QX21QYV`^@3T
MF:"W+C*5:5U?L,!%SF@7,',8=ZS.'.R0W+DRX'J1F>V2RKA<?18IV.;14P'U
M,5#''*P8&(\QD<0?2:"+I`>`%@!PD1RG,=!-@5P4B=&!+(H9@,0%@`Q`8@$@
M-T#JJ2"=`"39/SMI8HY6S&9F)]<>DK559>(&R#PRLR4R-YX*-A9`:LO,S'F;
MF-;(=%-L/11;BV)M4RAK*H[MA"-=K=TL*GB61KV<\&0S$$[W]+L)P)+M!$YO
M#%7`__]O#G802&=X?`8!MD,V,Q`^BX!%'@$^DX`%+CE802G<SO#X?`(LHZ`9
MIP&?4\`BJP"?5\!FB5K+40C,\/@,`RS'H)FO'W2:H5<+XR5JH=,,?140+%`+
MP9*SA3['0.LZ07.E.LTPJ$6+U#K-,%1AF0$ES@]A'^3^$D:3F[HA[*H[&!Z4
M]-'JAFFR.G9)+U#?])_A17['5_(#LVO5\N!$A>P7].5^H50064.\DFZZR3YN
MG-3D(M0PDV-F.ALS$?0^-&ICMUC\!5!+`P04````"`"L@09'VN>;#:UW``#!
MNP$`%````'AL+W-H87)E9%-T<FEN9W,N>&UL[+WK;AM9EB;Z>\Y3!`PG4FJ$
MF+Q?G-T-R+*RVMVVTVW96>A3F!\A,BA%)LE@19"659@?]0YG_@S0_7+U)&==
M]UX[+B3ES)P^<]!`59HB(_9U[;77]5M_7Y:[Z,MZM2G_X=G];K=]\=UWY?P^
M72=E)]^F&_AEF1?K9`=_%G??E=LB31;E?9KNUJOO^MWN^+MUDFV>1?M-]N=]
M>I7O-[M_>#8:C)[]X]^7V3_^_>X?7^7S_3K=[*)DLXBN-[ML]QB]WG";6;Z)
M+J+R/BG2\N^_V_WCWW^'[_![L^AMOMG=E_#.(EU4?_WG_:83#;IQU._V1M4?
M+_=WG:C;:_[QV'C^='E;[HIDOOOOU3?EX0_I789/0!/ODG5:Z_SMQ^NK?XIN
M_NWFX_7;F^CUNZN6=JY@$$6R@LX7Z9?H7]+'ZG-7^Z+`@?Z0E7-X[M_2I,#%
MB%XENUJO%Q?=V<6@V]+5#]DJ+:(K>.\N+VK]7,[G*?P.OR[XR=8E^_BXK?7<
MZU[\:^L+[],BRQ>MH]9=_+_^VW\[N%5V!7Z`+VO$4GU2^FU\]E\'M06`5Q?\
M^BJYJ_ZZ3%9E;>2ZA_EZ#31SL\OGO\31#1%R].-^5^Z`NK)-K:VK'#9[4\)"
MPZ<R7V4+6O67R2K9S%-H`,Y5"4?BT\VKZ.SY>?0\RC;1Q_M\7T)[M9G<I%MW
M"(9MU'-9EM!F[=>DO*<3,,</Z9_WV>=D!8_7'OR0`JUG<QPE/MI`.WCDRZA(
MYRFT<;NJ+=7'(EFDT=DJ+<LH6:WR!YHJ'+AHD>]O=\O]*DJTE7P9/1_$PV&7
MQO:\'T^'XRC914`HJ3ON,?T(D]^EZUN@:UV!&`91;M/Y+ON<KA[/J^/XM+G-
M5BN8![Z=[^[K=/YZ\QF6("^R.C=ZE2Y36,\%[,<\7Z?1+OE2?^A#NMQO%K@&
M!Q_[L:GOC_D.Z'8NFY8T;MK[`CARL7N,H_>K1#D8;-V6:/<B>I?N6L?]F@?T
M$0<$C[[)-W?1Q[18U]<`2/<NPSDPY32W^X<\7SS`<C;.S;_9V@U/MX4V91'>
M9`GL6+9KV`Y'=MODL8GFM`G@Z?N"6D#26L%H+G8PFFB1WM:F!&T6>R3S?`WW
M7LFW`2YQD:[HE#9NIK[UD!1X)3Q&Z1=\NS8BMQ';(E]FM<ZO]N4.]@?.1+K-
MRZR^*+RPB?2V:E^:UX;RVI8G)+8#C;UQ*_:J8<4"FGK/71W?]`/=(3O-=DC-
M):T\,,D=<-%T,V]XF)CN?;Y:I$7Y+9V#7>UJ>U_HLI?X]/=1K]N-N_Q_D3NB
M9+^[AS/_EW3Q?;3)@<]D9;FO2QS"ZJ6=Y]U.MP?+6T3`-_?IT8;E*VZ:.9"_
M)5Y$O4'<&W7C?K]/O\V`[TWC_FCPE;RO1J2+18;D#*N_3;+%!5PJ\V2;P6XT
MD/-^O6=Z)QY)QZ%([X&FH6DX0F4#V]N!"`@O+-)E-J_3-F][&6Q7VKA=[W*@
M*)"*\M4*E@68*)`>W#_-#38WP;\9UL$+=@*MG'8WG[U/\-#<I[L,!(WSD^_J
MR\,WWR%JBSV='7ZL1G<G/7Z<W-VC>;MD4SEI)PRF[8VV\33NSLT._F&&`0S^
MQRV*L4#HL$^?-LD>J#Y=V#W2+LQ&Q4<V;G"R'E(3P80_NC$>T"T^I"!Z[%,8
MS2;=X52*%&ZN#5.ODYH:R*2DITL0WFH__J&`P]IRW]RD=,3B")AKBEH(];-8
M9QO2;9"--$B"('_/[V,XY\!D\JW3HE(0&#8IB-QULI`=@</<Q#E>RP'72].+
M9B)`T7+4+R68UFT*Y^BPG.5O0ER$SUD)A%'C.+#:32,#COF"M@)_C,ZXFW-@
MQR`,W^YW=-/M<KPO3F%8VDOM_<OU+IW?1S>/)5`(;#X,N=,X75!H6+UX4?WY
M95)F<VX=UIHIO*T?^E'88'2V@%$GA7FM)C+_,<WN[O&8)9]A&^_2!CZ`:R-?
MUUY_E:WV^/;O,[CC'.'')2IHYO82BCC#)3UO81%'5"YWEO.6QMO/^`]`L-G=
M1N2N^6.$1H1R)8+FXF<0`;'E!DY\Y`(.GW#$VDAQ)U)LO=.OHMW3]@A5T!^`
MQ;5Q[<-;XEG,)8H_S?J"6]T2AP[**BQ#!O-P1QR7!CZ3.DS<`IA]=/L8G>U+
MTOK.H]SUD[A^:J?Q50K+-L^\\I"L\V*7_86^J!TO4$W2BT7^L$%JRD3[;)**
M+FA<?'QND[*JI;3H'.^5ZY',<58`VR[@IH#.SH]IXK6-O`>MD&].LPZLYN$T
MC5!?6Y-`(RF\CHSOB8+2R.=!0$!I56=7FMNA63^^K&M';.,XIER]TYV7S6[<
MZR9K07F$[M[OX<),2E8_MTY]WSKU/57UO75(S<28N<[;!_A#MH$-/C+`(I^G
MZ:*,ED6^CF!M8;738I[!78QB!0IFL!@D4M5>31Y%\-H<T:Q?YD61/\!`3GCV
M^LL<#45X:=^":`*BR]&!-"[5TDV^?8&NETO0F+!]Z)4(//H`C"E28H?!7C78
MO+"_5^F\2&%CD5B<+8T^7+?;TEH?C*.7*8A0&QPNC(:MET]X&^VKK>_=[+?;
M%7%;./J.UUJ;]X$3*^?UH&PE=%![!.1X8C`PLKG1)HCA)',8?YDU[B=*-'1@
M@`&4..PFWOEC<9=LA*_&YG91OFO?Q;;D,,`2F,NG_:YN'$/T#LU):473P-Z:
M'[^`2RLE*2'9/$9E6L"9C3;9'+Y<)\4OR#N!?++-8H\V5OAM=P_Z/O)X9'GP
M#1-P`:KZ(L++=I.O\CO4.T%<^$P*`?7^<`]M1O<@N8.F!;^N'J-[D-C@`*6;
M"'C^8S1_G*_PEPZ.J"#1.8Z6>YH-*PC,,1^IO3LXK;M[Y)8I$M:&^(),XV]_
M_5_0J3P,EZ;H`I'N:<%\G>?GVJ:;]@'_7.SG<F5`N]DN:"M9)-L=?M#A@H0$
M(RAIU'0UT1!P3?8J)P!IJ8@QMR+&TNUWZ??;K\H6[Q8RQ^T+)%/J%J=9[%>R
MJD5ZMU_)'L/.XH\WZ5S-B61[5:Y!=JN2;MHS?.YO?_WWF^NKO_WU/\[97H,C
M`TX/8X"M6:`0MD/-9;5?I'@11XNLG(,4LD?9>H.G$K>P2&DYB9O)M8PSWX*:
M-<^V.$K1W5;T.YJ$Z.["`7S:9$[.HM%?PO4'*]J!8T\/Y%O0]/ADK),-B/:X
M0#']U++.)"EFZR>M-TJ:"0P)YY@8$6R3(I-/"K@*\2<8!)-PPH<KD460;4!Y
M&<>RH=,7XTYM^9A%RR0K8/KYOC`#H#N>V`(\M5^Q:2`/#RS=%TN4.3O1%5S*
M"1U$[P7$9V"7TN:MD;VCY3Y":'ZYX(3DZVRW>S+175_1`8#+YBEK7X*\O`+B
M@=;3A$8*[_R\W\QI?@\9''#:;7^,CC2H2X)L"G@(#-TN`V[!Y6:SAW<^@)15
M[/!\@\:SCGK=BW\AGH_=+=D_]XB>O!0-*@VV3#[NP8":-U(;W=T7*;,=N$&!
MM[*]AINO6D^!PO#T*05FM)L+.!IH\M`EU^Y@CK?,C,D!YB:Q!Z(U,^D`VW>'
MDO1">QO][:__3WU"C2NL+$%/H;K$#/NE62+;?`!->?5X`;H#&M#VMV6VR))"
M.5/P!>P.'R^0I4`8A>/5I`%V@LNJH#TLV]3%4NC)3RA%ARAUSQVLM_E&U&0V
MU,+]!QP7Q2LG:MHKA1_J1)>PM'`&@=7`VE!W<YVYK@A.D%3G9,YTX$];NLK6
ML++"">=V'SK1)Q9JKT%N7A-?Y/N9KP(G*)RR3?@0\@J<%IVDWXH_*],O#5=&
M*EPGOP`=NH&38@GBU9H%8I$;6)IE^L7=2TG[5")J5M;H;\_C9`'8Z;)K?8=[
MP252\CR-?;2-K6#K)VM$JNTM]L3U_3NTNB3B=E"C05:C!W5.O&Z1P1(42E]Y
M:9:L$XF%%?Z=YW>;3`2T/V+CGS,OF_#Q`5$M`\F5S*I\6A(46VBOU]`C[B^(
M/JL,[6*W^!")0JC5(`?*EI[:]YM,-L#32$)B%UUAG>B/R$T//Y]^`=DN]LL$
MNON<79*YC@)I"^TP44;\&;2L!U@*Q\]6S-]*-OLBD<[=WM5:8!KER9-;4PA1
MV!_M!1\6>BYHDT@Q*XG)&DK:`SO`S:,;=N/[EI7N\$;0SOPE=1-]N$_I+;@L
MR0Z5HGHG;R>;8&RT1.7W/$#92F1VQ!;\#(D*LQWL'OY(7(2=$#'.3D9C.0H*
MH/CF]XZ`<;YI04Q+ILR7^.W^$>W6<"UE7_BZ5X)PUHXYL%$XHRKR9F@.2<H<
M'WBD`PT==?#6C/8E"F/PP!9.U?S1L!(E^6SCEJDP)"UG<YFC?8>V)0<N6KZ(
M>MPPWM/.Z`!C+H%>2^S,,M0'(LE5>H<B.*W6%EE!J5-U!A7:UO*>6XNCAZ9-
M#)Z1.Q3/IE,&N#?;+BTN>A/I<H/;-UO2#1TR^S4H&,Q]=S#6I(29/^11"3?`
M*D&I$)ET=K<G#Q,;*=GDA"8/F@TIHG17)05M`<B->SI7.I!.]..^""D<6;.3
M`*/;?'=OUM,P#UC3K)-VX+\;X(*KE9<KX<]B=['?>G*3@\&R?KYWA,A*7P:L
M="-*4'-7Q%`:^9*7;OV;=$19$&!1&184&=POM'D%F1+*_1P7"4V"M?&[W>=;
MC8XS#@#O@(P.BPA.1;[?(3N4U>?%M,1J6#]1B8S\449PWS1H/I7<,@EO-#HY
MVOZ>)8D"R9<I=L<^Z(!5P<G<ER?PQ_W&\P]=<67;^'MM@<RZH'Z5TW/`KUK)
MTT\39XBL\S8E^XK,,SYYU7Q+L`(H#,DM05<"4CW="6?9^>^R*LCTSC)I?(-F
M:R-+T'7?B6XR7)<')%.\K/,-+`4SA'F.@N4"Q)_YCAC=2N\XN\+$J-D*C%=E
MY:;$M7L$ON#&%CN^7;FV]%:769'Y9L<*&U$Q,80[X,_`PV7[CJP)SB%C7PB>
M8>'<R)"S=8K"PTH%%F3>-/V"K/%B)G%W)\AC:"OF\:),0+Q>"$PV<Z'.<R$%
M(L@-WQDB`H".F[)*?T>>X'52W%%+PJ%9;X/SR4(5#_!610==MLJ[(KRA4D]:
M!ILU@B:R-1IB841]OG)^#:/GL_`;,/M8ML\+FC5"8_I#3N865VY3W$#B2?>&
M^:Z(,LQJ5AYN8I.P&@]NF^;H_BEP3QU?@UF2*(1SCU&#SN>PBT3USB1(#E4X
M4T*53CL%DD\>12[`6$RD3C9SH#P\EVM`1X67#CMP45JO<'D4A6@1S=@[T6M8
M@)SGAO3M6T(;<4ERT#9Y%#6?8XT>62[0$_N`?@4:ISP1+DUXS)NH/'H@09^I
MPJQ]C`91&`K>"*P'D2D=S4)LY/3V'K8].O^.B%.=:`"L*1$%?EZ],V,@3A+:
MDT)4&603^S7+_OB+H8.*4)2(P41L#WCG[CPEY;>K[$X-/L35:%?)O9X4+JXP
MPRMG"$,4P4#7@T3(L.=V*;LD]1)T(A8T[$'T^I%ANRJ%>`4H[`Z6D+@D'';1
M#)@+5#DL;2UQZ6)!PW+6)Y2/R^KSL9@KO,P[SU&G7J2E?_,K9^G",-\SRT7C
MC,[<$5O5/&?M%$TR-W-Z%[KC[@D.B>,VB;G$J!E"2[$N9($FJJ0T7?.PLDU3
M=*8:QL2V0@M7?9,"+$J1_T'L=_:OT,[FXBM(V1//^KE?'IEF&3V/)O%H,(9_
MIW&O-_5/,+?LQ\/>..K%_5XWJH2XPBNCN-?OPK_C>-:=HEEL3CD/SKQY!4_#
M@Q^R\A?:">^D0590[,5AC]?B-M^AB8G(`>Z=G]74H08K)-<,-@3OCPVIGI6^
MYMQ7@7W1'5_NU%9#C>+&4:1Z4@]I=R;CP$A&]."X8!PYI?P>Q+8[6%0>X4->
MK(!!:9]L<=\O@="!,14TMC*'O0"NLUI!,V6ZSM#0"U=F7E3_!GZPY,XP,N<B
M18,RLK$%G#O8K;,WUZ]@&\D#D\V+_")%?1/^7:?HJB"?BEZ/9V^OW]Z<=W03
M:&$R-3S1T9$S1JQT<Y?3A<(/IQB-&)JIW4+`LA@+$(Y<K/&WZM/`ANQFJ5M>
M!(1DB])/D<%BLO1&#A".;$7C;H9N+AP+:],XB$[T)MWM9#5EC,R5Q8=BF+J_
MM]C!Q=-C#H)ZJ\P'SV8!M]#C-KS-D9FAQ8DZ@;V%JYPU:+7,$O6P-+[(81>R
M58K<5=Q_J'-:6MYO=!I(9Y[D1*>#`4MP+8=]D(9!=KFRU#"DT*H0VG&U@9*'
M!B0<UU(^Q/$0Y'D@7W`*Y3(XEJ`CRYI+:&S9;-4\HWW\0O8WF.BX^PTM+8>>
M8Q>W\OJYV,/@2;''?V;N#<U^ZMS`A-!*LB=;-FKL%/;7,BC\8U]XSO]#NJ#P
MQE=,8M%K_)DNC:N\`%F6Y9VS'UZ]OCKGE2M27+.%-YX%IYV6IK3[`D.Y33:_
M2%!IBLD20,4K#BW]@?J*HRL@DB0V`2Q+B07[&:95+K*YM>,69`3<B#7HDF@Z
M<&-$,8GM5L!$FA,/1:__C5&*+!LC,M1=ID@`OOXJ.P],O]<9`P,!#4<TVN?]
MSM!_T3BBYKCT*`Q,YR66C5<C2DD4C-(T;!3.`-<SNMLG*/BD<I^K)[1^BDF\
M?;C/UYZ/6/,=3EX4%O:9UP1YFK5[D)HK)-:5%043[GJ'8RJMD(1")JX*:#T4
MU>/\](]B!:&8'9Q6:Z-P3/`^*]&L+9OVP=\]%U&0N<2)(+AQ]82FQKM++QZD
M6;GG1-@2S;QJSR4IN,F:Z_D4:MNK5B.1-"1ZGSHOU=Z/].U%.YD"2:ZL$S3H
M3:Q'[BANXF=@_CN=AF\6"-")2H]>H=*$&:=P._$$7>$NW8O6T_Z-@R3GA5/K
MG$%]3C'7!4E[P)A6V5]HF2D^'W8P8'HC8'JX.Q-F?B[$#]>47G`<70)LJ?%;
MBB9QHJ[G2,[#P*_!@A7E[B*#NY4_H<AQ]L/K'WX\ES:^+GVD2<[,*HOS]3*F
MQL0MC#95)`_.ZX<R)^;#]&<D=$YFD^B/>?$+3/-"M'F0)_O#:32,I]T9RHQ9
M>0^MW>7YHHQZW;@[FD683S.$]_NS>$C2:V\<3\;=Z'`*'5+!^T-1>D[58\%]
M1_O5B=[B=9!NV!)*E^DV@0UAJ^A]4MPQJW!1[N3J1?E^H4O-@J%&"&+T/XLM
M!<J&"^,\8[Z3F#2=11!R2N-;YXZ3D2]YN\5P&A)DE4&0&0(-31(L@9:&?2&N
M11`<[I#)0O<4'!NH?:A$F1[1D`&40H'>Z$U@CQV&59&$NB*//-R)Z+7[5*;(
M+-`TQY*04;#7R1PEJ8)=W&CBH6!PM2:Q*D#^'IT8.OU)2P7*)#]\^3TUNMP7
M((CL)1)IF7W94?0&O;4D8S>H=?X5>@AOG7VV6E"08K][T1_QS[P_WIN"9PKX
MWAI$E<>C,9U//1EOX)_8C>/0.@`]@SHVF."'+JA@0T/$''ZEB]GKQ9/N$)6W
M*9R5YI4900M3_.]H$`U&<1_.3W\(QV@<7;;1V1GPDGYO$IW#IV$\@!XP3+L/
MAV_8AP^S>#+J1YHD"E>8^RB7B5/A\B!"FH7H4GRR<F_"S.$TL;3+S)+C3(C%
MD80N06_"J=.-,T&8(`VR0I$M?EFX6"Q0Q^=9`7,L=RS)HB@&LSVV[1)3BK(J
M\1V<VHOHAM2XFT!?>Y^O@#UA&YR9UK+U;GU@0_OQ`"2JY\"-_B>JW_TI,\3N
M<!#LAUD6/*0H<0_C">C;Y_0F_M]]<944!<5ST:6#"]4@JH&B/QO1>]CG-![T
M!WY<QNRSV-,1LB&<$8RY/P2./`9N32W$W7X/96%@>A(DQ][YE);Y;-#MV7'R
MG_51AD(FTM6XA\O!';G%&='BV#4<`O\?U1^<Q:-I]_@JC@:3<!7YBU\Y/I]:
MK?*&2[760`NR5%)B)EN4?0(!7@9B9LO0/2R,=$G!!B2?T.<R<#J3S=;^B$?/
M/A"'IT^>T`NN$_VXP4AGIA-@"2(K!/%(<Y'-DVC4^Z8QL@A)_29_DSQ^3.=Q
M]++S4R<ZPPA)^0K#)/F\9;4%@:.FCXGF")I(/U!-6!WT@6C/2$!^ICHI!Y_>
M@JS]((<:MELV4)A$K5N)@^0H"^V'OK*+)<9.EA39=4*Q&FP:\2JHK!0MYC\G
MP+F`A7AYS*XEWJ.KE$U(>&D6:.0G,?#EQT\1)<MM$L[CY72;Z.P9_/+LT/+A
MF[)RO<Y`5RYN7CJ&:D!4D[)Y`6_@RGV'89%PZV"4ZZ7A`3%L)/'K-2?F^6#*
M(KU+BH6*!H9O!/NKBUR9]S%6[&<-DJ@(&&^0W#G]T9W92](3@K-_:;<3>57U
MX=^@B9!#-'#=E@N!DGXPQP<6.[D#48<O_N'%E`439"MQ=X!,YXP_G+LK`_XF
MYG<V&_'7O6XW<@@#*PR4@:^DG0F.`1G_.<@*LV@*ESK\V8<_^R`$??3:[.C"
MO=./>[TQ]COMXGN#7@\O`'@;OAI/\=TQ,,S77F!O57U%S((ACV&,9_TQ\ME>
M/!@,W%?\S6@RB)@\-TB>P%/=FX,!/#;@Q_JS@>/;^'_6EOL7O;X;^G`*$QZ`
MJ'..\QCTH@'<5&>]R10;`#:-7+P_0>4#&'^75H(LV=,)6;)[/11PS@:@5XC0
M$X_A74)*6)$%(;'H%^%W+)XWRS8DD:,LNR,SU]QG7(4BBH2KBG+.CEZA.=:%
M-3H*NZ1@%>,ND[B03O1'Q:O`F^C2A0HX&(NL].DT2Y2T4?,E528VVCM9,XD/
M$K.!I0'!``0!#L&-.<(&6./6YD%5C6JUS``7+T()7:@1!FH7*0X2V&=&+.Y;
MXX1M=)(]1;1+6L`]7D3O4*VQB>&5@W[H:/M<'S6$`5VQH``B^-!O#?6VR%A(
M/QL-4)([&X^1<MTS+K.Y_.[,A]B?1S,XO&=]/)W7;.+V?0%[Z".93\9C!D:X
M>)EPBJ9)*0QS5]9D@$W+,.V05YPC$Y"YYYRA>'$KVOTC1^[8R#+^B:P]'%Q`
M]G^*"J[=RPDL.VV7#PZI>%I!D5:=VOD@R5@(UXOS!PJ!JE<QLW&Y^((FTFEH
M*5DH.?6,R37Y`BP+J5,,S"C2(E.C.!PWEMK*L#1';@)6_Y-6%`XU&DA@;.G=
MU:JUUI/9T/OJW,7U5YHR&#NRW>T9I#`(F*@((*';LRD`7R0<?YC$&/<"%A%Y
M1O,!.>GL'#U%FKRW40R`!D0`8.O(H<_ZLW'$'^@,P8?IF)GWV;B+QZG6&+\^
M[$:#,>A>0]`<QN8A-/W)@]CH2%KOS:31B78S[+**?'Y\Y;,RD,7*XP`-+E1:
M]E7S(Q5E9D\VPYJ;'0T5I4:8%!RRPW]1-(ED?[+]-XBAHQ,JB5W!00VR^_1.
M6N4<;H].5>-B>Y>4B^3/'-R1(/O*T+(K,4TFH)SG(@Q"XL(S#J!8^9`L)Y$X
M6Y>V02_&WHBZQA.)5G$UXG.#K*<`H?5'(*"'ZQ?*[\0GF,W0+3=4`Y%=^Y#9
MJ42K^V)A$TAMH%M'.9DSIYYT/G2L#J+A4BS(U[J#[VD'3W[.C@W%!9./*IH.
MW!OC`>GY<'=T0.!".7,6#WLD&'4F/9"7$W)##?J3>`3"VZPS@9,\Z<>S[AA>
M`27_$K,6X(D+%?,'XTG<[\]`\NJ`_*B#6H#L.J3+\#P:=48]E`RAZQ'*:,,.
MR&P_Y,4R)<8*OX!PB.:#_JPSG)*V/L0#.<415:8EIB$W(1!3X3+$JW?6`>$%
M9PC=]F8Z0QD/FT[KKW>[(U#TN_3Z9!3!U0QSP3^G'=BB&GI&>,4I5=S)HIE\
M!^D`Q,[.K(?FA,Y@VJ"\:@L/>`\Z@4@.H+E:O5GVY2H!+G0SO\\ITHEI%H\Z
M/K#.%^G*GQC#U7VJR8G421$=)#8Z(P`E-_2_P?]=:\@:F27&<H3UWU<91?DO
M^(WN-_B_GW*4,<BU,YY\$XUGWT0?<S=G'P/G+<L48>>B%&+,?<)E2H3^2'9V
MZR>!CZFCO@0Y',O4"(:ZX/R\)?(=BLREN+D]2A#LJNXH09*09/*1JKNBP8&>
MKVGGJ!:4&,F6+6U^)%X%U3#+DL*(.`-F:?H]F/]B!_B`819^;$8H\TG$)N`0
M7O9TQ\9^3:6$=NZ!RC$H![%"=FI>1[G*[QD&N^2%+O[W0I\:6FL?98,(-BD_
M.=]"73ZL'*`P\&&/RH:9#5].$L$?).LTCC5LC"31TL9("!".OV(I_X3HQ8C`
MP45/]V[0[K?U)K6KSV(WXPM8#-[B9!74!;R)$HR"O<#Y+/-]<4%IE5:.9<N/
M7;72=9$YX5F\B1S.EXKKT`G4H1BMBY^NMZO\D;WS&FWJV(Y,\V]__??P9;00
M27`R'01A>2R8M[4J+O?UGB[P-<5ENL<T)5/V0WDI+H@[GD'8`]-![9J6-?DM
M;^A+;K)V\=(E27"X?*Q^HMUYVM->A;07'/INN@.R]W1Z`^"2X@3E/S^DY$S"
M&Q,N/M(B>[W.<(+6]WC:)_-'M].=JL)H6^X-X%+MTJTXFT8#]`V,I>&)'5<`
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M%7?J^[=#,0.@H6/`?EO?.*7VOG]JFI3FP^U9Z<.,8@E)\W8)&HY8^&1Q?0N=
MWY]%P-F/X%23+"BWD+^()5L'3@)-P<X>Y`^.ET#\+)NQN<5H=0FLH&@)$@9R
M3*&"^?V%10M9D?VFN4VUAI-$Z?G$VDQ+4GN2SPFL&3GM=E5!I_$LX$BXF>!,
MOUY6GG-4'';0/)K@",J..H+R,9S2@UH"BV2=4G@NTTG@'20Q_S%+5YA9B#&R
ML2HF3BKS0%Z"G%>P3`LDX^(!$TKRX0ABZ9U:KAZJAIGJ4F8FU%"3[G_>+^Z$
MN&XQO,HVI\N8%$`%V9;$%$Y0D708IZ!4UI,P3I8-P>Z=R`"M$?6@@+EZK&AA
MQ+5CLYAZWGAAV%[BT`*@MUH63"PI\X8%N-09.7;.X*>9"+G+IJ%98&XIQ1-7
M\:BH^VJDZ04Z+)UUJQ7+2N=]&A@OAJK.JJ&JO4FG>S!6]:1(U9A3-S>IHV7"
MP0J"DW<<E\Q!C`C=FNOB<S0F9YB%*3[,BVQ8\V.S7SHKJX':P='3>UA8B2R;
M:>0^@ZN@F-\_=DPP*8].H+H5`,/'LZTMY$A9#?R66]#275NN1%+!9X\C$PPN
M,0QFK*!3)\(G69A'_)@0NYT'9(;!C*Q9RM+5:,"AB`]-34[O+9HOX;C!P6#!
M7Z_;@ZN,".F_?D5#=#S#]0Z#V8<+;`:H?GZ3G*V"U<'9O$=U'BDV=`1A8"T'
M)W+D,MF2R:U(NN_^%E4&26U`\<9I:AW!6I&$&WDSD7Q02C609PN7$*H`@%L>
MB[S3X$$T+HEZ%#XM`0?B^UQ@^(4$L7M0FRD+@TSQ3JV$5F`!-N7CZG.RR1(>
M?#A('DQCYH/MD#P25M`*<\J^;7.M<(!>+8NF:C_0I:*X&T1G]>M$N]*P)34%
MOFD.U2R2W1S(U[TCO)"4&;QZD")`)D).B`I-!_ASMMTR<@E[-]#+7/V2RWWT
M*O$\S[OFBQ#AJ1W8B=YLY.+5&)<G^E5:ACRK#GE2&_(1**K?:\0GH70'V_*D
M-TJ;Q[8SH<N.G#C3#2@Z45%`\SKS@F"KH!L\#[%KW@:%U(,!7`;W]R9"G#&N
M,*PY+1UH*YL\O;OS>WV?P&#@WUV.L:*;NRK4%65^X$',UK?[HDPU[9#2^*([
M/$<;P<\\EACB<>PV*4&])1A(7>Z$_;M5)-'?R:YZNBOH)F+#\P%8>#,^E)*2
MWSJ4`"]7Q@5/`IMH],L>,&8=^-#BE6WY^C0:>QX-XO&H2_]VR7(UBR?C`:4!
M#(=]MH7I7**S?CP8]LF]"F]AI,/9*)Z.9_AA$,]F^.$=Y6B<UG<O'G0Y"&,P
MF]$8IK,AQ7(.AP,0&$4-N!`_,!X[9WU$/.D%:&&@"7"2B`0><XR?]Z2$G+\2
MZ58)!B1%@*^K!T2<V3E0-C1`E3P>&V>','3IYPP6??48&:0&'XCG\5-`X"IW
M#(6]7*G,KX(&OTMD)]U4[H,-D*(=C+^H##H1\VQMX`4GN5;36>F$:HBTB2\<
MO8B>O11P(EU["UG[C$.+?$2%G6:(6$I7;,.$L"_@);D&-$*/-ISQ8`^T9<*V
MFVYT<C/;`&F05N%7!AO^0#_#'KUF/[.Q1KXO\@U\GJ?.:OK/>WC0AXJ2$2.K
MO>>MF)^VY/)#^^6G9QA&V*&W+WJ].+K!'+5L^:B4:&PG."[-?R*%!'0-:`$-
M-?@*@].&AH`@GRG([9T[0$W]F3/AK+2.K9V84O61(F^E1)N0E@R/L'*#XV@B
M_DOCQ6;?G8MEQN6$91F[Y`]%-U4'&TJ/:;8A,`X!;&4G(U"$6"=42\-QP/R(
M<R<&NU#VFZ$Q6_#Q7/:-I.#6!<$.$P%PW18B@-YY@X$I?V2X*,1YSHLB-?Z-
MUS9[1$.A0,DI>&\_PX<<87_08.8D0K:8';.5=^P8R*M4XX^ZNIQ<1+XL76A)
MP&[>GU$GNB9T%[?H&8%E,8PJ;0[I-LRW&$,-&(;2=^:.G&X49M?L*AN:[7[O
M[7N;M!YA7;GN-(X<OP-.<IMMM)`-&S&GW='YB^C]OKRG>@%F5RZB2W\X8"8W
MUU>@X1<)W/Q;N-+?&S`+V,#ETK[[<K]:@>R^(3[1PQ'"CIE!-1T^\S/_XJ@'
M>][ZGJT0JQ,G=>VX^Z5R,64&2ORT.=Q<OL3/'?V`NS//4&F1;%>G1Q)M;E&#
M`0*XVV<+FYKLQDYPSC#TUM[Q1G;PJ[<%Y9$YG[!I%M&M*^"AN*#"IX<7O<G7
M$H*>:@G;+2D&6+,S4JY7R0A*&Q>ME%-NX&.TU>8,E%:V$4%#85N;4#W)XT.I
M@X4!9J0H9N^P\@,!;G_+<`22*.)<4N%`'0@2G_Q4TR]:Z#`V/`</V]1ENY8-
M+Y)=E:_)\/Z@R2BM">DKXUED##OT^_`)8A.7VR);'6`4[B[OCF*;3'3A$I]<
M?OB%)(NL+A#T]B9?[AYPJF<W^UMB\=%@U+T8=L_-3>_(QA$KF?4Y/#!=;3W"
MKV:XR,8Y@J'K%PT*5+4#03M\+C?AA<U7^7XA$1WL87?XG=8$!KH1F4\/ON#!
M`Q*0+&5^JVR.F@^9!K_Z;5I\(V,X2%X6D65"E`#'-G>G!50:4E69@OL=WG:8
M_<*&XNJ;H+HZO*PX[%=@O:M]V[D1LF,5NXG)&>=3NZ&MR"0P)A5I"$?O%.SP
M\6,B%E[A2CAS9`TK3?O$DU4]G6E&ZP&TZ"TB]#`2MY\BB@T[1JQ%ALH]DU'+
M38SC0-%=MVMJC.-.97Y?(4@\[<`.XDA+G5V\=N%3+'.+%\P?S>D`7@B.IJ-`
M,@F[R]"$WTN`>9"EB<]ZU_^M0QSVEYJF!%`Y;R8;<5FX>'<?6-N09"+A!9(=
M''2'-@^$G8>G."W.=YZ4+CO%$Z6;8K!?FKEN>*>T0R#CG%>:!;>6@]\^D>!/
M(N!V&53::[@9!;#48AANO7K.5/*UA*=IA">07B_6PF2^=-E%=/T%F$*..7F)
M)-Q_VNQ+E,M?,S:4H\9^?W31[TJ&H?1"'?$050\KR0M*.B%=LG#@$PT&Y)P"
MS>#8+"3/\8M/LM'-4]0[X"N_;$@<8?N"**Y*":]=\^:0..AW"09O`%]O1FEO
M!B]Z%OWA\O+]LW,Q<FZP";)S!BOG`+.1LRV7Z+;"+!C<=0IP8YKUTR<9;46Y
MI4`*G)^!ZC[IRU)]1;&%Q+^V9R\VZJG[%>$O>KCV7Z$;_QZ,_LG$_)^BC:DR
M/3QX<H:8,E@1J)UDA*:T_*$J`S0E/TE<H4<^#5(QZ%=M7T**`F3#'2;<"3`L
M.^=+EZ\T5U\E8CVDE&3H[L&V)*BF2^6)W;(+C:!/GMX_/KZCP%^^!X)>C9-+
M9'O:A!K[#BT()Q!R]86CI,QMIK^IZ>$_T_)PC-2[L]BA8!+SO`I+'EQYD$,^
M$N4>4?E3/!3KW#B#G`&Y#I)IX[@4]:9(/2/6-M`!Y/5E)<^-:K`B_]9AYBF&
M$6XLB;,79'_!:%E35#\C!%F<?]3&'9`8LW$1;ZA;L4&4>@DP,+2JSB9LF<?&
MV^K*QFP(.G\A&8,LK(B\#D19&TPG>@=3M_6&..*(%D5*'_'@8KQ<]"S:ZR,/
M2VE8T-LB(]ID+.!P=_T*4``ZFL0U#$KXA=V/NG7/A4]IU$4!%%'WA5!P.I#;
MU!XN(]\)^(0Y8TYQH-AOKS`$),+)+8B'AP3TD!^0(!F&J.++P#@;=X@5U]*A
M&+$\XN(&PK/YY./H%(:C!W)Z6@$[L0GUNR,&_3P,;R5/#\8JS[5(#D*KCI%K
M>"6#V&DI%HHY0VF*4,R""`PO/791>@1^WO)T4$NA4C;(GWDJTT#!U^PLL+AD
M[JF8'].*%N1.R#>*BBM)W1T0\S!(4QD5Q6&AH(?X4T`,#(B5$`RK0%WS*<=Q
MFHH&,$<^DK3"%%)HU1$=T[<E`6'MTCOQZUO\]);U.[@S`@)%6T.A'\Z0T+8;
MMX^<VW]HQ_R>(A/5)3BPULH=M0R;3!(VO+S/EH'R<V933,_IGOL9\_==+JU=
MK-;X%X?2?6!MA%21"R?DQK:LE(K<'EIP.HHHY[/95[`54'JPS<CMHQ+;OA3(
MV48-D*L%5<%0/%-7L!D3P.]J_(A88\-.OH9>+#.WVY?KK)B4T/S-5=*IWJJ@
MOO&.(]P$3';/R,L!Q'+C8:656^0I<W-,7\J6CX?6WY/?[ZO.G*C'#,/K@6@W
ML'@VB':8&\21L4%B$=G%:S6Q11W_>*!D/?QFXM@/E"FU;44?(QB=W+M<I-"5
M:'6%H"FJ=#47]!J^.Y,@3Y%E9;_25`26H)A-CH=+N'29:=A73)=W0C0AA3#P
M..S)!>PCDS$\#0,XL&7E'%X/5V=2B(P;)+_HWC`-H>3T3_D#!N?'BN&5^>":
ML!V*E>&(-2G6(3DSK).HLV/U:*#B<9PM^3;6286/I:(L(7&D:\07+AX#X+/;
M=/>0IIO0HN:#PIM["6U,IAC:O@!6G?I$<PTW=9"SE@;DX5KP4XX*:F)R57QI
M\&Q9R45ZH/0T&JJ&T+NB7)I701QOE?U"UE9,TD<^0%R!KE2'-EMH-&+BH5G=
M4O.Y<\`UC(?&!828]ASO4&@IB1MPAO5]T=!L6<E5JLP)K<Q-\W*N"2I*M)18
M-HPMYX)&%'65%!OR^G'2Z6-LZD8*;TB^2/8';0HYPUUOM$5X,-@.IJ>"\)\3
MN?]413H8-V0P8A6]]\B.R&J1++04O.RFI:O4WN`]B47DU8!GSH:0I-,:/8FI
MC:+?@_A212EOIL-JN(V>;;IL8S=H">8@8.VF"="4ZX!(I&HDL+'".V/A0PWC
M1X*[<`AOP"-\SOZQ>,_6-C=<29P\9L][G:F+)!6<1:HJX=!</(-K#W..=1,(
M[GF)QPG:WF,JC3\@;<T25'FX/2X8OM0CB_3B%$^FW5RA(*F"U>9"1>P`4$72
M`8"JJ\AHK4D9Q%HIC=D['O8;X^@PI>(9"B'$G7\^\/'$Y!BT56-V`3(U$_@R
M^9QS]2>YZ4/'DMZ'K4OD$IOHKDLWR4JN"N>G:1\^(P,KRQ;IKQD#_N""^7#]
M!7O?"4<K+#[0-E!DA.$*6J+D%!N3<],$'6V+U9)F+J"`XAX(JM,N,\\2N>`\
M,,O&0/XX^@.)%X\>5_\&:#?94C7SMPF6/\H2`=NGOO\I!]+^EQQC(Q)$/4#^
M7GH6E)C8E9+M_FT<BJ3+ZM#%<K?9TQ:PNL^G@5U+`B9+)YL%(6*!*?(:9N59
M858/W\2S&$@L'+'DG1F9N#<&2$@*4EP5"Z_U+GH/X[I!L_3Q)PY(F0T/8\'[
MN;_SMJF8OZ.S9]?O;YZ=![#0MR@#P6V*DS/026?(=,X59N>ABI;BEU7QA3C'
MW^;HJPE*K=NOLA7U"&,(1N#KA*%MCL:.CR"0UW87.2`]N.]S<B+EA>`Q"6OV
MQ:Z9U[NAF?C0<)0</$$,Q<=TVZ%GRZ`.R`)'CD00-H,'F%Y5A^%KE1U++96>
M,G)MS$VDBZ9="<7^3`N\KC%5$F1QA.;PR^+1]D\NK!W%#HV#2E#$XV$W[G:[
M.@ULHC>D;XHJ%H.X2$B_^R+JMX=S,ANJ,V"[AJ2,P4./;+>$E;S057SZ%(:U
M*71[X^H4!M.#4V!8E:^<`[U<F01R(!,\3H(BT!!BJNM^L4+C.OAMD==L$'^L
MI\53E=R;YZ<_R&SC#5H7/"^Y\H@R%+!/QH=DQ_E,+!SGT>4:<\6C&X:&%/A;
MPCX="_CX&2*73_CC+$8L4_DX[6*60`U9XX;WU<!<O,"A>"0S+$+0'430P'"`
M..KCX1`!GF=#F0:-TTRR><3T(R*XIP3:>M9%H*ES_D0@I/2)T$=Q.AU"PE8^
M]G_\2@6/V9I#B(EG@5KQ_SIK.7'MK>J#O^,.X/@^WC?=0K6I--E4V`<EZ<'\
M"GL?O*XNBQO@9-0PP&I7.Z'-R62^)=O^[I$S&-KO[\9W;ORJ1!]PPTOR&407
M`>@W&\4PPG)7D8:8%J%%6OJ/!;IHY'=@-)W+#LE<TO(E%9HYPS;^]M=_MU\B
M^G=<">?:<$1SNG"9Y+2R[C5!0_;MM3V!C6L,JFFQT.>]0YZ3O-S:^T"=9`^[
MQ@A`AHZB@GLZ(UDN<9.B#K$.IN#=PB7`QD"T#(OX4D]?O>'(X4L,VV8D`4D&
M41V6(08)--T]JC]2E\8-O=LEB%A&\`->T`S398T8(@>4CS@ICF*.>M[%@V`$
M.^@]>)AQV]$\P4L;<W^T#NK\U$+"=Q@&B3.1Y0N72.Y)9]9#C6&37NB-LKMG
M28?'@2'@M46(Q$<<HE=BKN8(=)6NHY00])!ISY:B<`"Z4@N,=YEMP(P_Z1`G
MV7KL@O$LE%MJ4`-!S#M+SCG2H62S%WNRN,(S+Q#K?V3=RQ\VS&YZHV^LWE3=
MPX`;8=GEVZ9.\"DV/"98\F3!]>N<-SHGO#@CJOKRQ-@?_8R54=SPT*#P0,?D
M"<,3!PL5=[K&5>0+C#"MSA*?PRR]MIYF4BH\9^)R!-,:ASR4-E;CC/+(!V=3
M;>>BA]H%<;,YQ:\2[DO6.@J0=Y8@M%A(/ERZJ"PENL2*NV0C9AMR+Q5[*AS9
M,1A@+KCX2!ZB/61KA%)7C'%4;W8M:7+O3:2LLY38`FL$6QCYO`;-AU,#D+RJ
M"8O>?&WF\K%"/BRU-XRG5GN*:ZY<J%X4L%7Z2=Z,L>0XO8PU=<282PG$6N@/
MMG*EV<;TLPI0WOSKRB_M=_E:@"5]$2L-Y(AU!2CC\;OM?;[+/^>K70(R8P8;
M7>XDYI*\<WP&WU]?_?0J.MNNDG*=7*2;^X0*/0,G7U,^UV>T<FB!.^CWW-2D
MDM[N5ODM4@C-6L&:PF(TS<L4/&*72Q.U3;W2F-+1[72;EL[4RZ+K5NMK4\H'
MZU>H]Z!O6O<B&$10(%5=>Y'4,MUD<_P.MR#G$`\'N"*K2W9S7WBG.FLX5?Y'
M-U][.#AG7)+=797GC:VKA'-8)0P.<(;\*TIN&>GX/$QJ)1P935R/V8,`!%S"
MN_<900S>LKE?<(_F;$H0MSN\D*UP95SA5Q!(@2ECKM[C-I5ZIX^("VE[F8-L
MN<9,/AITN@O:_%W*NK"I[^0")V3LK/%&R]342%%C:=RLKQX#).R"/K)ZUIE&
MX_@LC8`KX+BAYZ<WTW1J#A=(`7$C_LJD8L%@;THK-@U0F#)+L6B@=]-QS#,K
M`][Y-#``L@N$)I-#O[75-4EW&FKHN/??816-83R8];ETTH#^[<>](8(?]WM4
MZ2QD4[U^/!N.J(!'/^J/XLEXA"`!H,3YHXV%.698\*,_QCJ"\'F""-;8=A>M
M.X0OT"/XYLDX'D^Q9,I@3-4\?G2.D<!6:0?<B_L#K032'XGN&,^FHE=/XLD(
M]<APV/!$KT?(FS":L^$4/\[Z$S/HT608C4=#:'[60X3M<;]/M6#\]<G,%/OJ
M,[@\52LYQRZ'74$_X"(L-**^E"F!;Z<$DTV#FXWE@6D\G>(#?\?&IGH<"Z5P
M*"7M-QS>7TF.M$?*&4K)M\C%1#%N/K@2^-+4:](N487AT=-8J-KP]ICXB`0T
MKG!8Y-3LC[Y1\2D<D(34=)Y8C>\UH4$N,Y(_+LF#J/O_'+8H[E,AF-$XGHZF
ME6T>#>/1:!:-XM%L8/9V''>!ML9Q?S1HW--IW.^.D=Y!XZ::;T,IY#.=Q;/N
ML"J0OJ5(JBL?O8D.0'%_WN"Z/_F%`])O]=W+7]_9$YRG,45VVE!=$Y3DXM#@
MM=Z4"ZY*$60&%&!N\P1O[?`)'8ZDPT%#AQBN8+]A(V\UZ'@76'GOTISRIT%8
M1+WY=,SU,($%6-(W$3"(;[0$$GQ"&]LW4H?P'58N1SL+PF/S@_0?=IX!Q_P&
M-"Q\.LD>L-`"-M>;NN;H(S]`S5V6&4@*,_A[B*^*HR["M_Q+^'-OYMZYWF.T
M*K="?6.9*OEOE9JX@4NIQ_/&!\<T/V@>."V0JK5]&;I6`K)A.14D)+>%+[ZZ
MZ->GC6#;'(,9`I8P8HR:V70F0X2+$[A'+QZ,)E2P:C@>T;^#X;@Z6X*J.VE=
MWCB4.7JG,?>L)C,^GQ@(KQI4G4T6P]>Q0AU'M+`>R,]H6U2>"8NLW9%/,*>4
MDKF6>&>ME94/KIP+"_H22THC6:-3N"Q!9`=E8[=31:(TA9T;2YH\/P(@V33,
M>\YJ#$%-X<5A9_A-I$A2GA#Z8S9>Q#@("6S#?#&*+PS:4)L2FZ8TSW.;<AH,
ME@;ZDDJIA*!82W)WA[%1OJ#*#Q(D\T]X+;_)8;`,BOT#JE#_AK'Y5Q3#,(\N
MI4[Z!WQ[NT)5`WCA_7ZS*#BL;"<X;Z#D9"Z;0]`)'X,J+K6]K"Y!?]")+C&F
MQ)@D/4A@PE"2=/(XUX%2R]T*Z>(L).%!PDL\<K89$KE.O=;3KO%4J!4)HA\2
MA*5>7[[0B^6&0$Z@MKXOR_@4:@O(A"LCNP2/46<&UQ)00D_JCP<K47G8FX@F
MA)NO?_9[-=,:VG^SG<=:OM(B\O.3&>WA)K0V>/2CP4RE"G4-$3#50!=G4;:`
MJW*_^MBAYUAIQBTX2I*)X/W"N9]5=J*!=2LH>F-OYDH(*-H]6Y`3"I5`SO^Q
M=B/$><9@&#->D^_LVO#5(*5.*1<"4=,<)Q_1.9&D!1*1L6((4KDO)<GY")OT
M+L=D6K3?S_'88\82ZKA<(Y:CW,P%!(SV9PIQY0JVAGJ&B#^TQO&6%>?CV3/]
MX=EYS=7C1N3-F-<;N`X>'6A<=`6_>C.SC7D[>W9]]0YA^I/@:P_9%Y5;3*`K
M[)V*N>D9!N.(-A[]C&RL_<Z5*6ONB'<::1:GSL`L@%1MCRCF>DVUP>%5&*ZJ
M0<_(3P2CIS$\[W6&/DCM90X+X9JB'!YX#O=+TB79%GEXN*4$_*G$:PJ$<[`+
M]9W,19J1$$AD;8_^#O%;(QD<*)U]HWX1><SD.['S3/J7005AU1KMX^5ICE6D
M2%>*1^:VYOF%?UW9/.T3NR`H&%@KE&#MD\@6/SFT,Q60;P><F@:;H'.3R7@Q
M':X%`CZC2BPNF#)8X%@RSCF5EM-F8]?2.DTYCW:'#AD.8P-62?G>8DV.+5NP
M]N=?TG2K^^D5ZHQKD/O\685*P.M&[56<E8<7.;NOJBM$UR.<XD&,[KW-W7V2
M1?^"440[=,>%ZJTRW3>[!1YN]]CQTZT1H^:`)LK[LXWK66/X7'@7QZY3%HR'
MRS=GBPL)<)W:)6=^7;"AS^3_`8GY&>$5&F+CAM67>;VV]XG"4F=ETRG3Z.>4
MJKP^MU=+KE6>&"S7S46YB1]+IK#B=(^@]<X$(I&T2PB5X[#Q;,=N-KY-*P3;
MT>`'."ME-&+3B._1E/5U,9*@]5`-6,WQI3?IN-M77</W%.=K;C^\-0A7F8KO
MP+*X=[ZU`_5%DU"T]^1W_?Y2Z[TBI-D3H]ZUKI>:<E$?X$0#SA[#6R`3;!)<
MU?DJ3387Y"&5JK%)=(-)S31RS%QGU_;&G#/KE8A);?'U-B2O!*F4N$^YQDCI
M/R/PFD/LICQN]/=I[5ZR!AA@[OOD+R"1HVV?E^AZ\SDK<CXF[PM0?1B2!>,F
MYH_DD(=%(_\_B/H:588V=`XKPQ'Z"EBK1TX+260$FN>'E+[F\=@)B*G<#9A6
MB#+Z7;0D[AB[B'P^?[B&O$KHX<2BS:ZB(KZ(\M7&W>D.6\IMU4IR_7V^B#RI
M217A#G:BES9/Q=3U:"<$"E#Q\H^"HRV8*NEV\`..*^UZJ!L3V$TTO4;.3O&C
M%LJZ,8@[EOMS+7`?!C^'WN[Y>NVN>*TUOK9;+=PZ'"^CT*QTT&V`N`!9<UD6
M<[7:<XB^^UNT=Q*EK=*=.&VX#B[+.A;@6[B6(KWK50H$$L:J4RJ[@&J0$P,U
M^I7)2ZXZ2X)]=^O:@47:*;]""?;C_9$8;Y2Z,)<$K^J=UADE53WG?Z6RD+)K
MWGV?<(_)GB[6VR<GF_3-'V$?X5HEK;37Y(NK!4>Y.Y52OI'E0@]OF3U2I,LS
M^<,]^8S"K(FVUWD8I,!G5%ZXV=^RS(X2]2L@[`>N'5!@*ALM6M`^/$["-_O0
M$"X=EISJB"@02.,<\(?J""U?!R'%H0YRO./GE$-))'R(LBUDV?G>Q@0B,:]B
M0H%S35R!:$@;<$4>]<+5P"(S*?[A9GFVR^](A^#5?V:BYN"(,2:PY,VS<(!\
MC3O#<$Q$5[TE,QSKB1KG)PY,^PAB//(VDV"#">$HU6[@&-PGJZ4X0YF,]W":
MYG;R*!T*IKB[!=?4KA/J<$/)N!/K94U>%+=G/(F&^?D;R;$*VC#DU++:N3&B
M#&W"K-D&`[VT6J5WDHE&K`3:WL@U1AM.="%>Y6;"B-V4;LE>19G0"%*&*7BW
M1<K1;BI8+D&GF&>4=;EG1OC`K!D:H&Q\OXZU89=HI-NYC!"4]3GQ.D6@W(2R
M6#D4X>?]AC,VL+A:N@RR2US-1WQ\D:Q!ON5#KH;3WKC)-2YG")I"^Y/GLU))
MQG,@ODEWC$]<C9Q$2H"3"H+ZFO.D<*)JA=`@N+<_?M(X1>:B<B!JY-`)P&-I
M<WX4BA.E3;]OHB5_B\*UFZ\$M0"6,EN7CC#TE%26P;Q,59AT>XWGW*;E^RQ0
M3T&\YH3UU/\M%YQ//$@ZNVPK,A>UY3D9<AMT4!+JC.1IZ67E-L&^3H8F?8)C
M5G4T=?ZE/M<:_Z)R7[#[&25FZG;I66_IS8-;L;15<)%(S8;5W?)%#'[U^MEP
MRXVD"F12-\/E=9+.0P0&DY-1<(4X(8!8%N'HM$A:)2G4U=D-)4RFYD?=.4=I
M8D[+J)Q*AI[@90DL&?7VO,"R4`1U&H`T-/`WO@%T6,<V(ROM\LQI[RD7[W.R
MJN>CX:QJ]VI[XW`&%0#S<Y[QL1-0.I!5?BDK:$*LDN.NL8EAY04GCG5%O]6.
M"I'L!!CLT0BP"/L!NLO=(E=@!ZH_AG<<JHVHKQ4>99;'@M-E'-NMASEIG1#1
M`X53$=QPK.HOJS!^T9DI;S`??Z79>(=72NRFU@3ZT2B@B<:%,6)"0]23%#LZ
ME6[HUA4H`56DS$I*,"X\C,L<@G:RJ*#/6->+NM2"B*2@PD',)0YJ""726/4B
MKGD#3%NML;(!@G6[5\`.2SM6@3`2+&/A^S_6ESMZ6I19(,.B2/>Z^=SR`Q+6
M[H+/L8$P^-HF]:V!UV5LZ62(63F6)G]8*H#;'KR%#UNOI9=QU`T=%"T^]W7]
M".E^3@M16+N=07_6,ZD)X<R"8.0J;!:A5@WBWG043T=]TX;9!]-60%3LD*M*
M%X%5O2X'JE7,)@_4=N,>ZTC""2?FZ$I<<7*=V(CD_%M6ZA>%Y=V&GH[/+S0G
M$N?'#$N>E?2R\$GR/"8V3TK"$G$S'+FTN9448+9,(%.$S28X4)>H4(.S<,']
MI+#A>&63E4+"'`D5P'R>TY&)F@N*AFN'VHA6H<2W$VF;4CRL;9&XFSE$COA(
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M(4-V!-MF:3,7F.00HG3N=YZ-Q:[8A`-1UG`71#N!RPVN8Z[-B[ZW.1M5<@7Q
M;BI!6$UA=Y2?!1S:I:C[>]>*(](;^A4VDE:_:QB"8.1X1)**5S&XA)I65I\7
MB%5%9G*&`6Z?1$69FH#-AW,C$]XC_VWL6+6;FG$9L*<5NTV`T,0?OY$</O(Y
MAZ!$F[N<H7LQ;D,QUL6JR$?;+T#YB&YP\8SAW9+^>>_S:=A\\<@Y)#+G"@=S
MY>7N$<ZW])*V,\IYO%*8U[YH4V!.G+Q1SA%)#G-!Z`\G\/(,2;RAQ!]="C'%
MO/7R=4((.1=\$QA,M>:4>!+%,4>S$:A5D&`++']W]OK41'4C5_C\_Q;)3*_<
M!:8G3WO1=7@%R_TK7"BX3$6*(MTW&#7*5>/&5_Q@)<FQ01Y^'DT[_2[9_'V3
MV,F3IO4<8[1ZP*A_8J&S)IB8B6/CELVZ1YY'HVY7`C[#$L>MV\0=XPUQPF8C
MD-(\\,//:[.FYP1:S>6U5##65#AL6LX*W9QS_7DW$;S=]-*N]0-SZ<:CV31R
M15J&\7@V":/+_:6O[_?BP4"7+9R03+BZ3%QZW82Q5=O4DO>PT(N4C#+1,]C1
M9^I:H@A&C/.E.(I]F2[WZ#A9@ISNAH[A4T-3ZY2.:HD>0/5_M2;&N#8LL)L(
M/RBL[7>N9L2.R8WPZ]88Q*!1*VB:V@GD(-QC9Z2Y+@OFBWBQ+4WI.;I@<@$U
MEBBJ<S..!J]7K+>E<S)R,)54PW`6HP!-K]6M5ZF,HU9L>YVS#UVJ0Z!HL.+2
M'0S\M97::`Q3F"L\HB:.DA"@U-P('&@CEBQV?65DSBLU-\IZK.8.Q=6\*S3)
MJ)3@,1RY\T:*Y=N#Q;8?;]QK8K8\#-GJI`P,:63,X6">`/O1=T]7%F-4^POB
M0KVQH7$%A^H`UI]<5/A(#Q146(7(:JIB?&I)X&,5@<EZI56!_V"J`E^&58%7
M`E6\:_<$&RQIF,:/QBUY&=I-7)SKR\Y/IR00.A1>C,W:>EP#C-G9:'2!2U0E
M96VN]2-/S3FLE&>X?/-*DW9=3>#[[.X>12+HG8(FN-,Y+%ZIT7\,+N=4*KY5
M0^K-*T6?*]AO=D';Q6GLS:VB1Z'-6Y>R6LS(5$HKQ0C.*U`G<;1A5(L'!!E=
ME7'YXW`"V!/0AI/TD#S-MG\;:-:Z#AXXTI0WEJ&2MWC)W%8,,TD+Y<'08M&0
M8.&P9^6?/AW'ZP,!YG*I.DO(?6N*BPC(9G>6;/X35A244&I?X1KV^U,NB::(
M\M_]IJ@!(WA]XYJ*^9VA#;D\/_;<(2-O]=FC?8;E;XT*I/;"^ZQ8:`1R`-[I
MR?&E.HU?.:>Q@71)*MI(`Y(%1^9IH.5I(704F^4?=;\SX$CB(TP>*STVXQQ[
M=!<;S4>W8;+-=I2M23@;EV%N0C`W7IB&0;&'<O\7$&^C__M^GT?_C"OQVD_[
M*N7@Y3?OSQF#AIXE/V4U-,6\58?I"6!Y*/;!67_]G-6Q+`Y@,FLF6EL3YV4!
MMH7]H3CGD4MD*H)3,NAU^BWK1<SEQ%C76()=<?JU5W@^C?O]OZCD_4J#ELW.
M=Z*K55X:H@MFEI6!$,KF"(ZQO$T1XS:ZW-\AY-*@ITS90Y`(/S,ZD6V[<:2\
MB%AR:SSM3)ZV8(9^7"NR[""!X@;.VV<:2@VRE11.6T$A_70#N@?"[Q$$7RTV
MD/1P1K8B")WR/MN&!]:`@1JZ(?%>81XY>4929VCX@<MY__2YD,.9DC&J5FZ3
MY>1R4\(Y[IWPSEG''_-\Q9E;_FSQQ>,$B!D10^\H;9'5R%CR6W:UB5#2+^E<
MZFE*'B]'.#`8B!\969O.,HQ-A0L^0Q](E;425&))<30$&D4!*75T$8'CX%NU
M8:1G!R?"T`FM[1]I6P&1X7R?93"9,*Z@>=F^`]IL/6+ML%?LRJXL"=(Y4L4H
M'@M5B)"$]7,$NP;QI=Y2*H@P@[$"0HG+A2"@5/(C?!..*B/H&:9%@FYI7@-V
M0\#L8?H(\=.XE1AP[\=>.KK09>;9M-@7C^R!M\*ZQ:/:Q.F:]\2Y?HQ7GDO`
M;MS]JJ?6N.#0)K*D+&A12$Q<I<C3R_UJB<FD9!9^2"C&OYG]4IT3ZH_#7\A)
MYVXQV3.YV\ZEPBSM!.7;H,7911M$7%8B"(RD2`MX?+DOV$KLH^Y%%A+'$#;'
MVHDY\M6X$DH^1^&C8578'DC1Y!3O)M$GI)/?8EZ2VZ``8+F.PD4)HK#Z01VC
M,P1#P&R/FB#YCLOI!$HH1[DT-?3KWHXN`OT-:13+E<"=H'",-%V/.,&GG1%J
M41/`C!5T4<#EN/"I)Z3S))P\R[V+9<W&X'L-Z#-&<\T?Y^C_74F$S)*@K,57
MP>58-`P$V[LK\@?8@D6*`G\EUIV.H3Y,Q=`H687J+,RU`,S"PTURVRNNIN5.
MH,#X4."$;RM9)%LF'1DN8EMNM)(6ZC`TA-!!.W<6AY8:=D9=\JOBO&';2G!`
ML5^E`7EFIHC[C0\8HW0Y-<!3MBGY(7S@'59R_P^)6L:1.?.A>%%<.:I5&&2X
M0762X1]$ER*C15-)T8;:HXU51F'T@L#@@)TQM4E$FG6R2>Y,#&S+.FO1FZ>L
M-]I6*,H-;T/CIU8W(1J=V-XKZ)F%HDW3(FC6$^@E.!:M3H>:J%2$0E,_"KV-
M5=+B%@L)[8BK60="C#/F&E5^LV`4@,:ML5:R(X3FEPM.2"[5?)]&=-=7F@S\
ME+67&E)<0V,A=R)'%-M+T1RC(PWJDM"M7*0>J]Q9*2ZY2@^C'$8$5UBLHU[W
MXE],?J`OTL<VGWKNLT9,FP&UF[J>9%**W95[FJ-:*BRZ`BLZB?UJ96=2NY7>
M^S-*\2TZDX8KY<"C+G/D^-Y8U'CA%567MLL[847QHJ(H*D\+OG!F`@I*H6+8
M#=;2:JD?W'T2U9H>UO!5/R&7E"4=F')?HFFY+(VJ,,OB/3W$^`Z^NBEVIV%`
M;D4HT,7J*/Z<NKK.BW"`Z`VN[MDGCER^EFI6-7"8ZN\B"/"=XVQEI^RJ@EWB
M*G!TUF]T$?BZO)[]NS#XU`V<4GG09:F1:KY4KQP4*32H<<QY:W4I25U4Z`9>
M`,9DV+6^L_,!'L;M>IQ/M8W-EBUUCA6#AFV*7DFIATN&/?`)X\A4N=26DB.F
M#+LEJQ&+%KS]X(O4GO`(D,P?J>ALYL6F0--AW:=28G4-8Z0BMPL@9P3^)D1)
MDM*D6A,:J-UQ8O][&.5CW)@(%($F_X//4SQ0[!?6N8VI5QH%1<A2`7-6Z.#6
M=6BHG-9(RAQ[FCRF,NU\M04M*4'W98$`(Z)QBN869G&&;6J=*N3_AO;(W&(+
M1+N7::4[O!'5.L`/J%HA#O(^(5U4RWBQ[AN,C9:H_-[JH%Z9]#,DND4T:_K1
M>#+CH):PQ<3=4$+O]R8)#"&))#&1IBQYC_M'3A5E&!^*$A1%D!SW)**N,)#)
M)(:BL2K?4(4B"J-';?<'@E2-67=$[-'YHV$^>DBR3=14FEE.LX^T8%R?%U&/
M&T81PJ=!J[LXKMIBD217Z1UJ![1:6RJ)[>&`&?*,MQ7-<PYGMKZ)P3-RO>>E
ML13X@NK:+BVN0DFC]Y3J5%9ODW4JF88NG("R#5UY&#)PW!&\E+H2"5B(#20N
M389A8V@+0*3=,[RM#(1AWP(*+X,ZMZ1&AWB('CHXZZ2=.,27H`=VH-ECMK,C
M-SD8K(;D^\);S%`?1;1NK0W:W!4QE$:^Y`5O@S',!5VI9#M)\9_)PC#_14J_
M4>#P?HZ+A'$CM?&[W3?0&$F8_<XRG5;8E=7GQ;3$:BX+HA(9^:.,X+YIT'PJ
MN662*VET<K3]S5R&$%KL&`Y9%9S,?7D"?T3;K?(/B^^C5%M;(+,NJ/KE]!R"
M*;21IY^F]PT25*G,,SYYU0R22&D"^OA*0*IG*V-V_KNL"MDJ,VF<"L<9Z8,$
MA`Z6^<*(6,[$1C\(Q=?GI8:#<$+H*LC%MRM,C)HM9'A55FY*7+M'X`MN;#[P
MNG)MZ:TNLR++TDX,CQ0M@`SACFJ)%K)]1]8$YR"E4BE0@CDW,N0,BP-47%M<
MU#`AQ5R*]>K=B=@-/N6="XUQQ]Y&Z&HB.D34/]ZG4F)71`"L*\76AKL"`['7
M27%'+;EZ=:A2;EQLCCHY6'309:N\ZVM>)_5`5FY""EMWHCY?.;^&T3L_^:]E
M]@K/X$73&J'Y<*2%*45!YT3R;]PM1C(T4899S<K#36P23<]NF^9%AHJ41`3H
M+$D4PKG'Y".<PRX2U3MK9<JP=DJ53G$&DD\>12Y`IQL9@\D"@Q*T"R!V:*4:
M:$`1"!44I$(6T8R=K/"VQJAOJ4B75/HJQ^1+L4!0Y#"G8OH3^X"Y*C1.>2)<
MFO"8-U%YM6ZIK_Z8+."XEZD+05'@;+&_>E,4FT6KH>F=:-`1%YA)''7<-`;B
M)*'=%0@(T.0+.Y:J4)2(+4?,(GCG[CPE6<0YYFJTJQKX'SV0D,L1@,..\\WI
M>I`(&?;<+F4S6A9'9(H;PPLZ'YPPZ=BN2B%>`0J[@R4D+IDK>%>(V.4X+&UM
M8SY$D"6FSZM/U\N\\QRU\$5:&C_35\VR#IXJ]/6>.'#EY^C+>O4"-GZ>_L,S
M4M>*S^FSZCMD0-+%<_1:-3Z&V.]UL9TO"\ZNL4H;G6MI4Q)\&?TOUKTH)&+3
M=\W#HK/.53N",-(ZB.,&H>@+;P^]8GR7#UGYRY,>II7XP5D+\#07^[7/T;`E
M$IT+RQBUD.*"FO35O@1X!C.<'3JC<[VO'B6D9&&L<\P)O?X%7*!>H,0Q,BPY
M+GHUH[RBJPY'^)`7*\14](B0054+NAIL,&(0-UW]VU5_6*$?]2+5G.L%'!T@
MWK,WUZ]*KCL!+Q7YA93*N%BGZ`@ACXW><&>(IG[>T4V@A<G4VD34;T`&7<(*
M/^S+UO@#J`N!.<[>[.,\BC&VR#8M2FHQFR753/2.-_F-+("1>X5C8-%TG*$3
MC9R5I!!S8-V;E.%V_$XS8Q4/C>'+_NIA]YG$7A(30-53$Q$1H3.FXAK!A8S\
M",U,U,D#NHU%"5;K+5$/"]2+''8APS+''U)Q+@9H1@C%M=%I()UYDA.U3.IA
MXWXHK!7:+E`H*1U206`8:"NH34,#$H[Y.K-UZRJI'_0[+)33"9?!L43$3%YS
M08\JFTV99V'8SEAR/#F3`;N0!':DUT+S%MC:K\G-&ZF_R_7S,M81.`BZ95#X
MAV)"XY`4[/@5DUCT>J-P`U<6R^B'5Z^O!-*'0;@6WOX5G'9:FM+N"[K#D\TO
MS76*M3PQA8[$)O=)JY,')7Z]=QF4$YY'@['2[=,5#.;(SW*_5+:V#`LW4YAZ
MWT!>-F1$1+%$]S34F:Z7?59H`I<"BR2*$J\$W>."17?[!(63-#4XG+!K]6-*
M(NC#?;[VC,*:V`1RD4!A/NN5'@C;-&OW(#5W#%?="#(H"%+L1!UADBT5%&*.
MTSJ*Q-J`G"!WS0=_UUS`.;K-G%6"H-U.DBU.;8R((OB::;+IXM-;"PE^]6B%
M+=',J_9<DH*;K+F>R:&VO6HU$N4./!9O//6KJH<`#X<7[60*)+FR3M"@-_D2
MP&NL1$&!@=2';S8.<#:<0J6(XT[A=@)231)JWA&,@MW@;94J3++_&V?B$<$#
MJSMEA>9:,8(21W'=*,^L$UT&;'4DP-X39J^9]$#V87K!W1E29I0:9]1V)P][
MGN?<$/P:`YQ=,-P1?D*AYNR'US_\>"YMP-BK#MQ&/E%E$W4O*^/VQX1CQ^?6
M`>D^Z6%::?_$UCUAS)^B<['XNZ,UZ41OD:FG&U?%D8%S>:<X=9:+:;)7BG()
M?.;1O:PL&V2X!$&1[C)))188Z$4@G`-][==[%=0-*`"/;YT[=D5>8X\0X4XJ
MV0,8K5/,>Q@?+%Y!N/X1K@F[IUSZ0/]",&_3HZV1[@O78OP^R9F40,0YYYWH
MDZ8$JCQC-%U?%XVL'!A-BXGV:M9A@9X<+SHQ#`P@=1$(ER&)OZ=&E_L"Q(F]
M1"LMLR\[BO`0I/K/[#GQK]!#E,.6K1:$`=#O7O0YB;'.=UWRWX7/`Q1.96&I
M+"2#Y-"SPR^M927*(>/X"CH:)#M*L)><<`K66E;#+&)7/[.2PI@50!_ECF4L
M%!(0+*4ZE=<>)^+`3\)^:MFIA8OL9BL4`T-*+J:JYEF0!JH9-/RY#!Q59.>Q
M/^**V@<J.!?RA)[%VN2HZLB*KFT>\4ELM_86;'/].SYDS;M)YTH@`C`E6\IC
MHE@2;(IB&D0>O"HI"HK+\L'<(K`SG)2Q/HF;I<X+_\AFF\>V[[D0@K/0/^C7
M6:EAR<@V4M9;B''%YM)<NBJ>).;U^DCJ_:$$Y4@RG`E0;JQ47(L5=&X:@6XN
M0R9+;$(\\&;$#G39V3X;;5/-Q:\O&.GW2G$6&_SV;<]5`C_7I%^D!K/1)[BR
M[1P98LZI\A>LB2E47.#[K$#P,.PW!4>$*>_$SV$5Z.;P[HN*+=!GPGHK&8G*
M!+_L`M=I+PTPL-]J?.$SX\Z[<`F2SQEEEW<V^:)YS5(F`\$02@G&<&.IK0SS
M#M*"^5ZTJ`])MKC`PR))(W*;2K!'Z0VJRLY)E<-#@_*!`$`GWJ!9?\7;8/TK
M'4:?E/T)!JS+2%`;Z:)&SLW1:Z)#>G>XB(N-!1.=%'12C2[_J:4"U+4@_6#0
M(WGS)-Q<_H)=0Q6[1U`S_=F8,6?Z@ZX4\QL+"LVXBQ`UM<;X]6$W&HRQNES4
M@Q;\0RAWRH/8Z&BL,#O2Z$2[&7:Y\.#Y\96O`%:7FK5\9[*6DS!K6<-_9%\=
MDH1@9>R;BW"@O%>J#Z3P!2NXW'*(>15X>1N+\NPD<<*A;BB;7TD9@AW7>E4+
MTKND7"1_EIBH"B2;#9+BN0B#D%BGC$W\*^\T=#7&G1"H;="+L9?@UPPD,W<J
M+#?(<7U8PV?4B7X,UZ^"?H9\@MD,70A#D9R"M0^9G8JSNB\VJ8FT&P7H6`3%
M1D\Z'SK6/Z8H?\(SEZ*^A(7;3W_.CFT7YO6*XZ&'-4'C`=R$SZ-)9X`U-[NC
M63SL816U<6?2B_Y`]HI%-.A/8@0SF74F<)(G_7C6'<,KW1Y6AR3PD`L%31B,
M)W&_/XNPUM#,#6H1G<V&\7"$YVG4&?7@D&'7(\2S&G8&/=18ERDGD/;'\8C*
M=?9GG>&4,+"&>""G.*+*M$2^=!,:#R:$DO4<A@KW/,X0NNW-=(;7ICY]P^O=
M[B@>4UE4F.DH&L,8^_TN@<K`%KDE5\TRO.*4*NYDT4P,GW3P',M386%7F/*4
M(5X:6T!P$2\[R`$T5ZO75UZN$N!"-W-0.5!L89K%HXX/K/-%NO(GQG!U'SYY
M(G62PX(DK+!&6_\;_-^U.E5)"![+$=9_7V44AR:EVD!KA__]E*.,0<:'\>2;
M:#S#RHANSMY+ZU4N\@$[(WR,X;^"P;)GD%U8)K=^XII/'?4E!&Y-8FJ)J-D<
MW$[9510[0I[=/4H0;(GM*$&2D&1"<JN[HNYKS]=\\B.5AR</E$DN:$2T(B\5
M1W4N3;^'8CJ#`1(,@A^;$<H,)H%WB7<LC`]KP9J'`.T@<`3ZG.`JDF@GYN:?
M_9ZA+X>`2VCQOQ?ZU.`/^R@[IK%)^<DIW77YL'*`0KO^'N5R,QN!A.(8LR"<
MM'&L%0SA!T*)L^A/C`GEKU@/*F=$X."BIWLW:/?;>I/:U6>!\.`+6+1F,0,*
M;@+>1`G&:5Q0'9E\7]C"3I+:1LX$NVJEZR)SPK.8LMCAG(K=R@G4H1BMB^\1
M0WT\A&,[,LV__?7?PY?_]M?_<.!*>!"$Y?F<]J96Q>"\WM,%OJ;(`?>8*S+.
M^Z&\E`KKZ/&L*4=$S3_IHGB?ZFOO4_V*5R@#NL$++[9[AW9!7A??W%M6K7S@
M]RN3KO,QWU+V*;_D>KWT(5DW#L.0\1O.GOUP>?/RV7GS,U?YPL4`P:.7-U?/
MSL-<[+LBWV_9&>8=2"VQ[:(5^HJ-0FA$3"[GB<F)A'>\$%9H]@<MVKGKV/#L
M<@D],;1%U!<"S178"ST(]%)?=B'_Y'\(SKP?K=K/>5C8^(OH#7Z.>B"D_.20
M0;)`=_WS/D<R<RF"2.)D(2&LLGG5/\^CE?HGG]UT.])3O[FGYGZDUA6'9@7=
MU-J/]7WSHA]A>RNZ&\[;AC89;IJMUR0I"(_SX"D<3HO!(=23Y,/![69=V79?
M*%?N%EF$8+L96M"U&537QE>2HGO.#L4,@(:.85-M?>.4VOO^J6E2&I6\E_IJ
M<$X%E<OKWC0<,?C(XOH6.K\_BX"S'\&I)GDG"Y+/OW71[G`2:`IV]G#'LK$\
M_4QA=RYN?HLQ0V)5)U,Y77@Y!K+"_*1Z@JS(?M/<IBU%9_C$VDQ+`BP=&&W(
ME.@R;SP+5,J!F@G.].MEY3E'Q6$'S:,)CJ#LJ",H[X970"ZQ=A7).MUQH7+%
M*`^%W\<,$;>!+7[&@$D1OIWDH0E&'%8$VU2PW(:0Z^KQ32C4DH-`I/>"\^?#
M0]4P4X]&'MFBCI0L]?-^<2?$=4OY\Z8Y74;%)=LXE"H)2G1">&4]*0EVV1"O
MU*$*'7<^*H*$J-5C1=,@KFT!W_6\21E?L@FX+"_HK1:+&$NJDV$!+H!1CITS
M:FDP5^YB&FD6&.%/(2$4*W!="0FIQA)<8$$H9\&AK_"QVKN'@>:"DF,DICV?
M58,1>D<*;Y\6BQ!S`#V66I!MY@*,-KYDQZ$E[$HN8TF?]3YQCO,-`RV9%]G(
M%`E[J,KP65F-M0F.GM[#PDJTLJAOY#Z#JZ"8WS]VC$N?1_>>"UQKXJ)W9JYM
M9FE9C=V16]#275NXF_M>:FG'%H9'O$)FK+=2:U#C`+``F%:;5L0F&I`9!C.R
M9BE+5Z,A?S`^-#4YO;<IUP:#@\'F)[UN#ZXRE;;_U2M:K7+ON%YU0<('PP4V
M`Z3="%-D5+`Z-)N:TQPU6&BB[?N*3P2C(-B!S2$L9%8EIQ6I@4&)`Y2"G-+2
M41A:037B-Q,)WJ>@,GFV<-'[6O9ORV.1=QK\3L8Z7X^WHI7BD"N?N(%5\5!>
MNP<-DN+MR"KM-"QH!19@4SZN/B>;+)$"+\$@>3"-,6ZV0S+.6WDLC-[]MLW+
MP.[M6KQD5976I7)UBOTZT:XT;$E-EVV:0S5><#<'*G?O",LDG0=OJ(+0Q!`R
MAO2>NF/N/MMN.>N4=.^3_+75E\B_6?U2X57[Q^%53\9SK5T858#5I[DI&H+Q
MFN/!GK(XVD@<M$#BP>8.*(+/HUVY)[T1E*K?F2@61S4<N@R$FZA@H+'VB*'X
M<)]+[=?8-6_G6_<4NZR:[QT8@`(;8(1+ZC%;V<CG'7S?Z_N4H`O_[G(,L9"R
M4@;?@"+]\+QEZ]M]4:8:1TYQV:;F-*>-'PP$]+`GFY2004P)M-)O/BL"3I+U
M,$I!QFF=1%[#D+F@QP=RWL#)?<WN&6/@>%_DFWPOT%WU*(^G-U$!U'2J559[
MS]M6/FW)V(Y6E4_/SJ-W>8?>ONCUXN@&8R.SY:-:R8Q&A^/2L#<2DQ#2ZN83
MJH_X2B;H[>OP#1_&%@2->U!O_9DC,*T,\81(.B0:T&HVB[676V5X!/'D8'<I
M'LD'[)3&?\16<X>[A\M)P&L:CZ2@/&K:WG'Y.TK4$IPA-N\#6Q&=265''`?,
MCR@H,<`9LM\-N+-UA!V-[:[?.QTF`BR+V$P$T#MO,'#-CYQ*#`U?Y461&@?@
M:QO8I4$(6":3]U9K:.Y0C7<7$.OQQRQX'3L&LN<&&X(-Z>IRO!M9D76A);*_
M>7]&':P5@]>D+GI&B=2,_D.;0Q*7PUOEB'NE[\P=.=TH+H01;FBV^[VW[VW2
M>H1UY;K3.&HNPG;&II5I=W3^(GJ_+^\7B-=I=N4"H4CT<""DXO45Z!U%`IQQ
M"Q>K+=H%&[A<VG=?[E<(/+HA/M'#$6)="#^HIL-G?N9?'/5@SUO?<Q4"'2=.
MTN%QHS`5(>6",+21)4Z!0\9/F\/-Y4O\W-$/N#OS#&4DB81V8BO1YA8%IL\&
M=;\&WXXH9##TUMY+Q;RE3)B"0AN=-\8T2W4B0R@:7%#AT\,+K#7\=810PU?'
MB!R%D29L((6^V;@X@9S"51%@4IHS:=89P\IYS*`FC!BR0TLQ'@_:02%YWHSN
M!X)(B)SG(I!&SE`>#M0ER/+)EU"@5CJ,#<_!PS9U0<YEPXMD[>%K,KP_:#)*
M:T+ZRG@6F4%$_\WY!+&)2U#&5@<8A;O+NZ/8!(F6%[Y&AN8.7$@-QM4%0BC=
MY,L=E\R^V=\2BX\&H^[%L'MN;GI'-HY8N9X4!>:DJZV'EY*LL@`D*Q-`=*H=
M1/BYF`WFX_PIEWR^RO<+\:5R](G#=K&*.<AH9-0Y^()/6DFB4N>WRN8HYC&8
MZ->^+6B?[FYW`$\D=NN$\.CPU+WWK]*0BNP*"NH)W8/EL_FJ^B:(T"Z7.@[[
M%32Z:M]V;H3Z4<WK97+&^=1N:"LR27Y<11K"T3M!/WS\F(B%5[@2#I:335<:
MM8TGJWHZI<07T*)7]^AA)&X_Q;("9.X`9ZLE&-")L&MJC".^7&FN)PL23SNP
M@YB+HJ;E[N*U"UQ@F5ML\_YH3@?P0G`T'062H<I=AB;P54([;20H/>L=DK<.
MC<I?:F%I6B(;,:2Z2%,?TM80,2U.3TF,"+K3VD#PU&W*&!K:N90+0[>J)THW
MQ6"_-)G"\$YIAQ#N&#,T"VXM!^9V(L&?1,#M,JBTUW`S"IB-Q;?88G0-"$HK
M+<?ZM82G%:].(+T>DA[%B+K2,2`Q7G\!ID!U.1+)`?FTV9<HE[_FI&-'C?W^
MZ*+?E:1+Z84ZXB&J'N8+&61TR<*!3S0,AZ-Y-79ZLQ"\^R],)W;S7"G$./IE
M0^((QP"(XJJ4\-HU;PZ)PQV4,,P&*+]FS+_FK-AGT1\N+]\_4TSN#16>0WM+
ML'(.3`TYVQ+1J2G^/-%ZODRS?OHDHZT(W0U((9%RD%K"FW="DU;%ZK]GWQKJ
MJ?L587-X\+]?H1O_'HS^R<3\GZ*-J3(]/'AR0!+O5P5J6Y/K/G^HR@!-:0<2
MY>11<8(@:/I5VY=`AP#U8H=9(0(:Q"[#TF4*S-6#@KE<*67,N'NP+?V@Z5)Y
M8K=LL:=LO*?W3V7:*>1.RJ;;7HU-761[VH0:^PXM""<0<O6%HZ3,;::_J>GA
M/]/R<(S4N[/8P9L0\[P*X3"O/'H&'XERCXB-*1Z*=6Z,TN(_:T(_L=$EFHA9
MI)X1:QMHB/;ZLI+G1C58D7_K$(04604WED2X"NJC)'JN*9[V+J=D*H,!Z=#U
M.6*"!!,6;ZA;L4$TEBFU17!D;*8^ZZU\N6)IRQ7Y%GD=B+(VF$[T#J9N8;(Y
M#H(611"[>7`Q7BYZ%NWUD8?`K!80J<B(-ADG*MQ=OP(4^HFE1C0X0_B%W8^Z
M=<_40F)?<`$4(>6=*"3"0%4#N4WMX3+RG209FC/F%`>*NO0*0T`B'%:.$&=(
M0`_Y`0F2,V,KKC3T_KM#K(`I+K%6$)K431F>S2<?1Z<P'#V0T[``0A#M:6H`
MBDVHWQTQFLSAC&MY>C!6>:Y%<A!:K<6$,7B"`OM2)`Q*4Y2\'CA\O?381>D1
M^'G+TP'.9@6SVI]Y@O"DD%!V%MBRE>ZIF!]SQ3'1G9!O!"A)G%./6F%3&15%
MAZ"@ARG10`R<HYT0OH_`H/$IQW$:M$N8(Q])6F$*=++JB([IVY)RLW?IG3@M
M+;9>R_H=W!G)SZ:M(4^S,R2T[<;M(R>@'MHQOZ?(1'4)#JRU<D>M'B"3A`TO
M[[-EH/R<V>2N<[KG?L8D4Y?%9A>KU=WN$-P.K(V0JJ]D:5DIDN[!!:>CB'(^
MFWTE41BE!]N,W#XJL>U+P3)JU``929JS`4U!!,?4.;(XMF'%#O]9Q!KK5/\:
M>K',W&Y?KK/2@DTI%<GEPZ)`!+SCF#L-D^42OB%V5^-AI95;Y"ES<TP<R):/
MA];?D]_OJ\Z<J,<,P^N!:#>P>#:(=I@WQ_%Z0>8=V<5/K;3SD0+%:G5V'!*=
MR&>$SW5I#:<^#+?Z+@M9]@17`>3HPC=)?R[^(HS::TE^?55!;L3JX9-X-!AC
M[EG<@YO^58!K%_7C86\<]>)^K^M_DJ$\CT9QC]+6QO&L.ZU%K$@"5."HCD$R
M)49^?.99!=/EZV?]7A+N%P8ILD@>3)3$\Z@W@+G,:!DFLTGTQ[SXY2+;7&C=
MKG'<'TZC83SMSO!>S\I[)YWVNIC.B/7D1YCAV)_%0UK/WCB>C+M-\_09<AD9
M?BF=\]$BG#2BJSQUVF\2+.>JN!V'<$-@L+#[`\S'A-D,>T,C@K"!0\%'>KUX
MTATBK4QA(9J11$;0PA3_.QI$@U'<A\7I#V&-QNCZ:L9E.8.CW.]QSO,P'G0Y
M'[H/*SOL8Y9D/!GU#]&7^E.>MMHJ8^"ZW4D++Z048%BC$HMJP44);7#!^)85
M=VX=6,=^/.B-X,/?_OH_\9!1LB@067<X");!8&,@"T=#UC">]#$/'-_$_[LO
MKM2@*^&+NZ9073C.LQ&]AWU.XT%_X,=EK<VL@1GO!IYVS-(=QF,X`=1"W.WW
M,!#0JT.<*Y@22,?9H-NSX^0_ZZ,,8\1P.\<]7`[NR"W.B!;'KN$0SM2H_N`L
M'DV[QU=Q-)B$J\A?_+KQ':)"9`R[].(-@:$83)C+)H25([29>6_A"P4&>H-I
MKW\@Y&<WB4M6?NUB7%H@&-R\ZL._01/ADC608<L)>4?PX^MMBA92+<!71L.+
MJ1CWGV-Z]&!$L`CTX=R=(4P;IQ]F(_ZZU^TZ0P?(9'A?N<3^"8X!3\(Y\*Q9
M-`7F`G_V,=V[/[*EA2D&AM_IPPTXQGZG77QOT.OAB8"WX:OQ%-\=`P6]]K="
M:XR;P"-AICB,\:P_1L+KQ8/!P'W%WXPF@^@CH:-N$H0C[_DW!P-X;,"/]6<#
M1\CX?X:;ZZ.Q38<^G,*$!R-$I8!Y#'K1`([N66^"J>\].%=(UOW)C-`EXBZM
M!%W@4\K"AYDCHST;P.4ES#<>3P[>Z>\E7-"!Y[Q17]+7<V$%AG,X-B).GY@^
MWD)T+YT`J?XSF#&?:<(*^&/0VT*2G<]&A,9Q-A[CFKIG2).@N.[OSGQAM_-H
M!F1UUD>ZN>8`*=\7$&X?-V`R'E>7YEILM82LV)(`W!S4^H__A<GR_TM,ED-'
M[L:0B$5=B@5,1$`[8BS=1&?JM"CQ_P(B^2\@DO\-0"2G4O9[\<1=HJ^M1MH^
MQ?;2)_TUWCC_A7DBF"=?QU),EB)O00M3L=#(C)91XR'B4_TMV<<E-UGC"G2"
MHU>X'"83^FE/>WG!GCY49;L#$CL[O0&LJRC\_.>'=,45[L_Z<"I)9.CU.L,)
M:D7QM$]26+?3G:IT8%L&M7`T[-*1G4VC`>IL8VEX<C#UY941.:^;I00\"0+/
MD6*B>7F/SB4N'],JOCHC)OX@^1KPY"9=-$H#!S;LP(<66:#EZ]-R;YY'@W@\
MZM*_7=J=63P9#\BL,QSV>;]U+K!5\6#8ITL=WD+1[6P43\<S_#"(9S/\\(X2
M'$[K&V3V+DN5@]F,QC"=#4F/'-85QVL8`\4<OX=+A$YAJT71GM?Z:S&5X)Y+
M@O\*06\."^!,#G`8$7R6TF;E[06_'5V_O_EMI3Z[E3'!(&[);:C8-2QIGI_^
M(,_X#1*Q7[XKCS!$VT8F\63'27TTYUT.^BOB*D0WC*I)H58=5C;'8G4Z0Y/5
MA#_"&>_-]..TB[12XR$W#"%C#O0+JHKMD.W0M`B,`QH`-:P''0V':&(`TN!I
MT#C-))M'3#^BZ2XE+?FLB_?].7\BK8\^D;J'T^F0+4;HX?_\E0H>LR464!ZW
MFC'^7V<MX#[MK>J#O^,.X/CP^&WV9!]A#UWS5"BK?347$XP71%PJ/;_"/G$G
MFZML%F#*U$2QND]#O:XW*6$XP/9ZC]<IC$C?^^!<D:8%\GG($W7P9-\1A>D5
M+*;O"^\*+E,!ELC*0#1XVN5#',C^-3SX6YO)*MVI*Z=4Z_#?H8%D"&R^SV;"
M`?W;CWM#E'9!`D!C>FA"[H$2,1R1;:8?]4=P+8WP4@)R\<9EM+G,T)8#]_\T
MGL#G":HLV'8WQN0WO,]Z)*]/QO%XBM:PP1@--2`?*VZK*+-G2-3G=L"]N#]0
M(T]_)%0:SZ9R@B?Q9(04&PX;GNCU2)J!T9P-I_AQUI^808]`11K#70M-]5"E
M&O?[9.:3/73QQMA7GU5H,D2=8Y?#KMRV;%^C$?7%`@7?3DDOHL'-QO+`-)Y.
M\8&_8VB(NA^70IB5DKAP;RTYB!9%1ZCA#!1`4&JYL;"H)WN.)/,\J!P41R5(
MV_`GEQ"BI[$"$/IA]R@9<Z;O>BL!/5CP,2(4TO[H&XVA"@?DJ@<^S>'SFC":
MEEGBC<ZZ_Z#?HH<%MW\TCJ>@AX;;/`*E<S2+1O%H-C![.XZ[0%MC8/.#QCV=
M@D@\1GKO=[ODWQB*C78Z`Y5Y6#WZ;RF2X,I'+V&6OQ1LX3)OIW">(.[M^@NG
MS9A6+X5]<XB]MG]%U8/0F0BLZ0]I3BEO</M>`G>M]H8543FS5;RD!'Q8#3T+
M%;\[WV0!^L/I^E\8Q@P'$_2^"?Q';+SP">^T;\3S]`X+([E2YO0@_8<*X43`
M-[Z)H$UX.LD>$.@6F^M-77/TD1^@YB[++(E@X[^)AOCJ']*"HFKP+?\2_MR;
MN7>N]^BEY%:H;[3#RW]K*TD-7(I9]XV!8VO;:7Y##<$6P*V23^^6_L57>R,^
M;403.):L#@0]8HE^-IW)J@#;[Z)K?#":D"5].![1OX-AS<I[:5*([.>V-7"7
MLWDX1H,[4O,ZL3?M85%_OTGVC".^+1#K$5]>)+O$EV+98C$.J1#$YFP5'*S)
MV`!BTNMP%.[(:BF@2+EDIY-%+"&<T0S#B1:::4BX/#\"JZ&X#=J5@02`:%J7
MLZ5+[(_U#XM"6BER$+K)?$U9#5729"T%W`^*O?ON7D3_*J&/_ULDB@:]!M?T
MW,>+(.LQ5SX("^,^^25!A)BB@CD!\6'6\Z([2^5CD;^!E7?E3N_UR#HH%FV0
M?/$Z=2JDD7@5],N*NRAMBKC[0E05EGJ=K"ON.?@T':K4.^H;O>/$YUOIWZ33
MPAVH=\"/2T*^\J&]'WW%^),LWB0Y"+4^2';3:G51LUX)^E1%<W9FJ\8H8S^4
M%]'9ZU/UV8^?G%[`2DL2EH[CH;$PH[[X!6HQTQY<@>*;IR%$L,Q](`[9Q4#;
MD,!5/%[AJ$%#FHX;7_&#E9K*/I?)>,RGG7ZWLB?8R9.F!80^CGM`Z#\QB!B^
M7`;X]'[BV+@E4_<(,&"XAOB>"@W`K=O$'<,).RQSN,`)E;)0L66DT4M-A<;9
MV3M.G`6GF&,J1`7DF,^#NEWSVNKZB$2?C%T#/15W1=.V5>CSW*(UYTOB0K6R
M-MH/!>>,9E,?KL'!$H$(FM7*XK!7F[<GG)!,^,!V-$?A7435RJ]GK](=<#.8
MST7TZ>95=/8<.0V!6LE,6R/V5-YK?8""XDX=V.&RK':8LQJF4L=OTX47;6N$
MA`MY2NF[/[TE@>B_'ZP<R^/ZTQN\_BBIL/;X.V_$:!O2H=ZC_^'#-7[<G#HJ
MK)\:(Q_"[Y*[FH6[U^]TNS7!\].[UQ^O7T4W'R\_7M]@QZVHBDV(C&TC&W>;
M^FHC@&JK3Z?,MI9MO;NGM_K>K26%RU>]?(3MXY"`JB^/&I=@TOBM"?M$6>5/
ME[<EI;'4UO5HA&:M8E,8GUF#W0Y"-%N'=>IR'TG2>/H&'&SOT`D\6'XO9K].
MPY%LC+I\4MLP-[@0ZH*:!)?^C^@M`OONUT\<L"U_AM9_<FO6Y,&^1&@=ZC[Y
MTM2]%JJKU3\[-3:VYK9I#HP]\;'V=1HTC_-`.\T3GC2WTQRJ>]I3[8-N6=SV
M9IK'W&O9WC=N1P(PK-;AM#_?W&_;<7<RC3_9A\]S<&$+"VBMC/BG#R#ZH2*/
M/NG:`=?'Y"S'82`++E/[&QP%B^C'27ML[)-:A"/_A.>/A!?7KGF7?J5%FU.C
MR=2IL[8T$LTBB8N_>EU.;8X6Y?##9'2M?6DMKC4^J3;7TT4`7X/RZ3<0*`.>
M8NOB[KR#[@TR8C3:LE`6YFAGQJK;2&I;:_#SP4NM,1[YT"UFPY-K,FH]6KGV
M2&,0\FE/M7,?&Z3=?I4-FUE=>V?-K&O:W$P8#5U3%US4<_LO[?,+GVD>U@FQ
MT;5F??1S[5YHN5_8_MHZT/Z1MUHNH9;7;O(WR2/,/8Y>=GYJP'ZVHO3G?&?A
M^[V^7+LX>\WB<IN^76,*'S]%`AA&L,$K<L]'9_!]W9C6PD!<1//3N<=;N5LI
M<U@SKFOQX%*P],B%5PO.KHGZ3='9K0^UA&?7Y*H@1KLVOU99-ISA(:;FUD5A
M=36F/=;H2&02K/?7A@?$R+_4/6C-8NZPY?FVS6^MW]I,#-^I_0Z&C/XJN"T/
M4TA;6*%-A*08@;:XSX-K>TJ\^-%WCCSEX\(/Q#O2,O[F<X])&03ZLE6BF'V1
MW]C%PL*MP147X*,SS4B4S:FGS@8B(D7R1M<HTL<WMC_3$-IXX.G_E&4Z,0+T
M*Q;OY+;/]N7"F]5;%_JW:J^^*;_=2"L!PJUWZX]2LR:HF'Q`2&IJN9DE!\'A
MOP.%.1JR1'V8.DY(1#AP*C0#X<`CM12$0T?2YR.T/V1R$=H?.IB(<'P$S1D(
M!][[U<D'1ZCW=R*.AL-5253YM=1SO(<C,Q<2^]7M>#ID5^JO;M`1ZZ]NR5'T
MKV[I$-G_5A-N/!N_NO'?@,!M!H4M%881;A2%RNI@NUV_);>E)KXV:4-!YDO-
M$=.LK`7Y,-4?&UT4/ENFUL6DZ?GQK.G;X!HZ>@]2!7$I[GKL*JRUW'P/MOH@
MJ]ZN5F7O+==Z:=#UJG6^3M8QM-",I*8T]5TGVDIQFE,[.Y87\Q5:;I`LTF1F
M.BDOI*[DD_;QD7-:G[H;_FU"_(/VJ>;?(67))\RAC_U!P?(QJ+QV1#YMC`D7
M`8:D?I3@0W$),('3\=`^^&#3@6MM+38Z&):F2E:NC*'C$Q(!6%MWI^=P!EP.
MKW,T!#25?DG6BKY?8R<-^3:_C:Y["?M`J3.X%C=8OY9C+ZZ_2-"Q`#0&,-(-
MPSGH>?=9RAS8?5*Z1M/AF5?:>5K:@XMH:[]WVE,UVH6]/_5J,ZXD<1QX69_\
MG><5;'/IMSD-MGD>;G-:B[532,B:'?3_@TDB-R8$\%O5MNVI\:>ET8?``%UU
M:*@KK"#(I4%PL(<(7^X[C?^(\H<-#`9NB=HJ(1-(54)"7$V4GAILRHWW-U<"
MN<1;14)]&DT[;N!BS".\>NPG-GMG:&/^_Q9W=3]*Q$#\7^')^'"@"'>>,3$Q
M9Z+Q2##`T[WMX:J8A27L@M'PQ]O.=+KMSK2417-O%VZW7]O.5W^_&9TV&K"U
MYH7*OL$%%(W=`.U",YC!K]R(8(<]RO#I<+,Y#NALZ?:SDKD_\WQ[LKDHL2@1
MGL2)1,=>8$@NO8?;:T2J,7KWN2;2L1$+O`OI?J=%G@A%EP5,UM&P(RQ"F)Z%
MQ3CVHC>+<325$I<N'X5#+\3SDD#D<*0$/<?#/&8Z?G/1;]R`I.W'QOR4043:
MS.9GC&#(7HK.@4?-8"LC^@<"2X-]$$W58*W=2*T-QV(?P.U@S]Z&QZ-I'NP.
M2O1DQN(X#"^$-2$]*PY#[&LH_NJ23&*'U443BF?&_M?(A>GFW[:W^%6R&8VD
M&45(,&<[):F4E?9[$UL2%VKQGNUX@#X?#65,0.PZT@2'>'N/M1.XCY[Y2:ON
M;^!2U'^,>TZ1`,1X,!:,`N_F-X*"&KRY3G@YA'V2=HRVH5>&#`.@5>OK==LU
M7@8!-.,P@`-(4J+=1(&'Q*%I*G9S!;:R]<0@/?@:(']!N8\&\T=QN^*%!*5&
M7]KE(*K1=E?^5-YG^[5[;6O7.K7XIQ*1?8;%Q(PM7`1C)J_L(EPY!F9875R+
M@J_IW.=64F+:2<UU?@P^@,G18*_G,*RO4(I8.2$9!QPN\K7FMU3D`"*F5$WE
M^^\F-G*G99HR40A@$L0Y3^TBH`V*16%LVC"S^A7)'3TR4W2N@,JB30IB`/2N
MN/:</<O6V[<?G+'HD\MWB@$;><69$3&VUB,ILL<2*;>9;'>UP@6PY2S`1G.&
M=S7Q89H.]`]FCE`\5VESMH$VA]6NI&*W=T6>;?K[K3KG'60A9&=8.N&<#)$3
M[#E=*!?=0R`2,`_5I1;Z!GY(K'LXL(@G1VBP@,TN$1;3Q`DZ.QX7I(-VT?(5
M_[#[20R'5T2!@L*!2WTOO(.ZZ,>`&_LE@ZSS=(1/=^.3L6)?J.\0.EV)GC+=
MB^)5+L]0CA#I8,OI@`C%7=*>]J<>Y.]Y2^'MSL2E$1>D^6'1T/%.&%JXP$US
M\@8YAV:7\FX*W^X8B;M<2,)33<OV>"J93FC`!`3?^SR;N3C\;D3(^%Y+9.EU
M,*O2"7/1D`'CR<F?($"88P\W_-4^Y6D0>6N^E=))<[FI:SLU,%<&C=+Q<%%S
MB))I0AILZ%&U>6RJL&X+PSF[UJ*RN^Y+?EO#QA>/36AW9EEC7'7ZS3&NKYR_
M'9OGV&MWP&4$%C>"`D4[X-09T9)1862JX9>C36L-V*#.M14B2:U!E;QEH93X
M(4>+#XKBY:9`K:T(AE$G0:&</V]A[1-6X[*>@F9Y0L^CX>`5]_+D63S=*&]N
M!Z\%7W3_1TFPWL./?=G[C-%,.P;M$H#]]'2#Q@PUB[(L>I-2^8YN#__C2,UR
MJO6G<40.OL-4-G,-[Q=55;_["U!+`0(4`Q0````(`*N!!D<P0O^NY`$``)(>
M```3``````````````"``0````!;0V]N=&5N=%]4>7!E<UTN>&UL4$L!`A0#
M%`````@`JX$&1TAU!>[%````*P(```L``````````````(`!%0(``%]R96QS
M+RYR96QS4$L!`A0#%`````@`JX$&1V&DY=;7`0``(!X``!H`````````````
M`(`!`P,``'AL+U]R96QS+W=O<FMB;V]K+GAM;"YR96QS4$L!`A0#%`````@`
MJX$&1VJTAC,6`P``O@P``!```````````````(`!$@4``&1O8U!R;W!S+V%P
M<"YX;6Q02P$"%`,4````"`"K@09'Q<HF+#\!``!I`P``$0``````````````
M@`%6"```9&]C4')O<',O8V]R92YX;6Q02P$"%`,4````"`"K@09'F5R<(Q`&
M``"<)P``$P``````````````@`'$"0``>&PO=&AE;64O=&AE;64Q+GAM;%!+
M`0(4`Q0````(`*N!!D>Q_N1.9@(``"@,```-``````````````"``040``!X
M;"]S='EL97,N>&UL4$L!`A0#%`````@`JX$&1W!]_T-*!```+1````\`````
M`````````(`!EA(``'AL+W=O<FMB;V]K+GAM;%!+`0(4`Q0````(`*N!!D=#
M*T_<1P(``(T'```8``````````````"``0T7``!X;"]W;W)K<VAE971S+W-H
M965T,2YX;6Q02P$"%`,4````"`"K@09'63&B\-\$``"?&```&```````````
M````@`&*&0``>&PO=V]R:W-H965T<R]S:&5E=#(N>&UL4$L!`A0#%`````@`
MJX$&1PRZ;`\H`@``2P<``!@``````````````(`!GQX``'AL+W=O<FMS:&5E
M=',O<VAE970S+GAM;%!+`0(4`Q0````(`*N!!D?8@(=>%P0``'<2```8````
M``````````"``?T@``!X;"]W;W)K<VAE971S+W-H965T-"YX;6Q02P$"%`,4
M````"`"K@09'^($^UI,"``#("```&```````````````@`%*)0``>&PO=V]R
M:W-H965T<R]S:&5E=#4N>&UL4$L!`A0#%`````@`JX$&1^`-Y)=Y!```G14`
M`!@``````````````(`!$R@``'AL+W=O<FMS:&5E=',O<VAE970V+GAM;%!+
M`0(4`Q0````(`*N!!D>"D4INH@$``+$#```8``````````````"``<(L``!X
M;"]W;W)K<VAE971S+W-H965T-RYX;6Q02P$"%`,4````"`"K@09'4,KC_:(!
M``"Q`P``&```````````````@`&:+@``>&PO=V]R:W-H965T<R]S:&5E=#@N
M>&UL4$L!`A0#%`````@`JX$&1\[!53RB`0``L0,``!@``````````````(`!
M<C```'AL+W=O<FMS:&5E=',O<VAE970Y+GAM;%!+`0(4`Q0````(`*N!!D>M
M!\LXI0$``*\#```9``````````````"``4HR``!X;"]W;W)K<VAE971S+W-H
M965T,3`N>&UL4$L!`A0#%`````@`JX$&1ZYT*8ND`0``L0,``!D`````````
M`````(`!)C0``'AL+W=O<FMS:&5E=',O<VAE970Q,2YX;6Q02P$"%`,4````
M"`"K@09'@?XK<:,!``"Q`P``&0``````````````@`$!-@``>&PO=V]R:W-H
M965T<R]S:&5E=#$R+GAM;%!+`0(4`Q0````(`*N!!D=I&)K7HP$``+$#```9
M``````````````"``=LW``!X;"]W;W)K<VAE971S+W-H965T,3,N>&UL4$L!
M`A0#%`````@`JX$&1V4U.XVD`0``KP,``!D``````````````(`!M3D``'AL
M+W=O<FMS:&5E=',O<VAE970Q-"YX;6Q02P$"%`,4````"`"K@09'*RK,LJ,!
M``"O`P``&0``````````````@`&0.P``>&PO=V]R:W-H965T<R]S:&5E=#$U
M+GAM;%!+`0(4`Q0````(`*N!!D<3PC<`HP$``+$#```9``````````````"`
M`6H]``!X;"]W;W)K<VAE971S+W-H965T,38N>&UL4$L!`A0#%`````@`JX$&
M1_&XYN>E`0``L0,``!D``````````````(`!1#\``'AL+W=O<FMS:&5E=',O
M<VAE970Q-RYX;6Q02P$"%`,4````"`"K@09'OK:4^ZT"``!9"P``&0``````
M````````@`$@00``>&PO=V]R:W-H965T<R]S:&5E=#$X+GAM;%!+`0(4`Q0`
M```(`*N!!D?+G#7H-P(``+,'```9``````````````"``01$``!X;"]W;W)K
M<VAE971S+W-H965T,3DN>&UL4$L!`A0#%`````@`JX$&1V1;A<>D`0``L0,`
M`!D``````````````(`!<D8``'AL+W=O<FMS:&5E=',O<VAE970R,"YX;6Q0
M2P$"%`,4````"`"K@09'&T.A$J8!``"Q`P``&0``````````````@`%-2```
M>&PO=V]R:W-H965T<R]S:&5E=#(Q+GAM;%!+`0(4`Q0````(`*N!!D=JZS^Y
MI`$``+$#```9``````````````"``2I*``!X;"]W;W)K<VAE971S+W-H965T
M,C(N>&UL4$L!`A0#%`````@`JX$&1PLSTW^E`0``L`,``!D`````````````
M`(`!!4P``'AL+W=O<FMS:&5E=',O<VAE970R,RYX;6Q02P$"%`,4````"`"K
M@09''L09:L`!``![!```&0``````````````@`'A30``>&PO=V]R:W-H965T
M<R]S:&5E=#(T+GAM;%!+`0(4`Q0````(`*N!!D<W^P[/T0$``,8$```9````
M``````````"``=A/``!X;"]W;W)K<VAE971S+W-H965T,C4N>&UL4$L!`A0#
M%`````@`JX$&1\[ROI;0`0``204``!D``````````````(`!X%$``'AL+W=O
M<FMS:&5E=',O<VAE970R-BYX;6Q02P$"%`,4````"`"K@09')LS]LY\!``"P
M`P``&0``````````````@`'G4P``>&PO=V]R:W-H965T<R]S:&5E=#(W+GAM
M;%!+`0(4`Q0````(`*N!!D?'6QQH"0(``"`&```9``````````````"``;U5
M``!X;"]W;W)K<VAE971S+W-H965T,C@N>&UL4$L!`A0#%`````@`JX$&1T=:
MI4E=`P``]`\``!D``````````````(`!_5<``'AL+W=O<FMS:&5E=',O<VAE
M970R.2YX;6Q02P$"%`,4````"`"K@09'3=V_%$8#``#9$0``&0``````````
M````@`&16P``>&PO=V]R:W-H965T<R]S:&5E=#,P+GAM;%!+`0(4`Q0````(
M`*N!!D=RA`ROZ@0``!(<```9``````````````"``0Y?``!X;"]W;W)K<VAE
M971S+W-H965T,S$N>&UL4$L!`A0#%`````@`JX$&1W?^^M!;`@``N0<``!D`
M`````````````(`!+V0``'AL+W=O<FMS:&5E=',O<VAE970S,BYX;6Q02P$"
M%`,4````"`"K@09'@!V=>WP%``#I'```&0``````````````@`'!9@``>&PO
M=V]R:W-H965T<R]S:&5E=#,S+GAM;%!+`0(4`Q0````(`*N!!D=0UT#+H0$`
M`*\#```9``````````````"``71L``!X;"]W;W)K<VAE971S+W-H965T,S0N
M>&UL4$L!`A0#%`````@`JX$&1Z75/I#^`0``=`4``!D``````````````(`!
M3&X``'AL+W=O<FMS:&5E=',O<VAE970S-2YX;6Q02P$"%`,4````"`"K@09'
M]A'!*4T"```<!P``&0``````````````@`&!<```>&PO=V]R:W-H965T<R]S
M:&5E=#,V+GAM;%!+`0(4`Q0````(`*N!!D>+'!NO0@(``%X'```9````````
M``````"``05S``!X;"]W;W)K<VAE971S+W-H965T,S<N>&UL4$L!`A0#%```
M``@`K($&1_M0`*,G`P``"@T``!D``````````````(`!?G4``'AL+W=O<FMS
M:&5E=',O<VAE970S."YX;6Q02P$"%`,4````"`"L@09'2%05`P4"``"(!@``
M&0``````````````@`'<>```>&PO=V]R:W-H965T<R]S:&5E=#,Y+GAM;%!+
M`0(4`Q0````(`*R!!D><MS(R100``.04```9``````````````"``1A[``!X
M;"]W;W)K<VAE971S+W-H965T-#`N>&UL4$L!`A0#%`````@`K($&1U?\92MP
M`P``GA$``!D``````````````(`!E'\``'AL+W=O<FMS:&5E=',O<VAE970T
M,2YX;6Q02P$"%`,4````"`"L@09'[<O?F-$!``#$!```&0``````````````
M@`$[@P``>&PO=V]R:W-H965T<R]S:&5E=#0R+GAM;%!+`0(4`Q0````(`*R!
M!D<^03U;0`(``!8(```9``````````````"``4.%``!X;"]W;W)K<VAE971S
M+W-H965T-#,N>&UL4$L!`A0#%`````@`K($&1RLPW_?Q`@``)@P``!D`````
M`````````(`!NH<``'AL+W=O<FMS:&5E=',O<VAE970T-"YX;6Q02P$"%`,4
M````"`"L@09'(W0CT0,"```1!@``&0``````````````@`'BB@``>&PO=V]R
M:W-H965T<R]S:&5E=#0U+GAM;%!+`0(4`Q0````(`*R!!D<WQ3;!9@(``/\'
M```9``````````````"``1R-``!X;"]W;W)K<VAE971S+W-H965T-#8N>&UL
M4$L!`A0#%`````@`K($&1U](:@4<`@``O@8``!D``````````````(`!N8\`
M`'AL+W=O<FMS:&5E=',O<VAE970T-RYX;6Q02P$"%`,4````"`"L@09'["VU
M'!8#```)#0``&0``````````````@`$,D@``>&PO=V]R:W-H965T<R]S:&5E
M=#0X+GAM;%!+`0(4`Q0````(`*R!!D?=6[-0DP(``#D*```9````````````
M``"``5F5``!X;"]W;W)K<VAE971S+W-H965T-#DN>&UL4$L!`A0#%`````@`
MK($&1]KGFPVM=P``P;L!`!0``````````````(`!(Y@``'AL+W-H87)E9%-T
?<FEN9W,N>&UL4$L%!@`````Z`#H`R`\```(0`0``````
`
end

</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>16
<FILENAME>R46.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.2.0.727</span><table class="report" border="0" cellspacing="2" id="idm140187068690672">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Acquisition - Pro Forma (Details) - BTU International, Inc (BTU) Merger - USD ($)<br> $ / shares in Units, $ in Thousands</strong></div></th>
<th class="th" colspan="2">3 Months Ended</th>
<th class="th" colspan="2">9 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Jun. 30, 2015</div></th>
<th class="th"><div>Jun. 30, 2014</div></th>
<th class="th"><div>Jun. 30, 2015</div></th>
<th class="th"><div>Jun. 30, 2014</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_BusinessAcquisitionLineItems', window );"><strong>Business Acquisition [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_BusinessAcquisitionsProFormaRevenue', window );">Revenue, net</a></td>
<td class="nump">$ 40,016<span></span>
</td>
<td class="nump">$ 25,625<span></span>
</td>
<td class="nump">$ 92,988<span></span>
</td>
<td class="nump">$ 75,791<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_BusinessAcquisitionsProFormaNetIncomeLoss', window );">Net loss</a></td>
<td class="num">$ (1,669)<span></span>
</td>
<td class="num">$ (4,507)<span></span>
</td>
<td class="num">$ (11,028)<span></span>
</td>
<td class="num">$ (19,641)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_BusinessAcquisitionProFormaEarningsPerShareBasic', window );">Basic (in dollars per share)</a></td>
<td class="num">$ (0.13)<span></span>
</td>
<td class="num">$ (0.35)<span></span>
</td>
<td class="num">$ (0.84)<span></span>
</td>
<td class="num">$ (1.52)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_BusinessAcquisitionProFormaEarningsPerShareDiluted', window );">Diluted (in dollars per share)</a></td>
<td class="num">$ (0.13)<span></span>
</td>
<td class="num">$ (0.35)<span></span>
</td>
<td class="num">$ (0.84)<span></span>
</td>
<td class="num">$ (1.52)<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_BusinessAcquisitionLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_BusinessAcquisitionLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_BusinessAcquisitionProFormaEarningsPerShareBasic">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The pro forma basic net income per share for a period as if the business combination or combinations had been completed at the beginning of a period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 805<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (h)(2)-(3)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=56956515&amp;loc=d3e1392-128463<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_BusinessAcquisitionProFormaEarningsPerShareBasic</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_BusinessAcquisitionProFormaEarningsPerShareDiluted">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The pro forma diluted net income per share for a period as if the business combination or combinations had been completed at the beginning of a period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 805<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (h)(2)-(3)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=56956515&amp;loc=d3e1392-128463<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_BusinessAcquisitionProFormaEarningsPerShareDiluted</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_BusinessAcquisitionsProFormaNetIncomeLoss">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The pro forma net Income or Loss for the period as if the business combination or combinations had been completed at the beginning of a period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 805<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (h)(2)-(3)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=56956515&amp;loc=d3e1392-128463<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_BusinessAcquisitionsProFormaNetIncomeLoss</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_BusinessAcquisitionsProFormaRevenue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The pro forma revenue for a period as if the business combination or combinations had been completed at the beginning of the period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 805<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (h)(2)-(3)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=56956515&amp;loc=d3e1392-128463<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_BusinessAcquisitionsProFormaRevenue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_BusinessAcquisitionAxis=asys_BTUInternationalIncBTUMergerMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_BusinessAcquisitionAxis=asys_BTUInternationalIncBTUMergerMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>

</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>17
<FILENAME>R33.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.2.0.727</span><table class="report" border="0" cellspacing="2" id="idm140187049309280">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Basis of Presentation - Stock-Based Compensation (Details) - USD ($)<br> $ / shares in Units, $ in Thousands</strong></div></th>
<th class="th" colspan="2">3 Months Ended</th>
<th class="th" colspan="2">9 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Jun. 30, 2015</div></th>
<th class="th"><div>Jun. 30, 2014</div></th>
<th class="th"><div>Jun. 30, 2015</div></th>
<th class="th"><div>Jun. 30, 2014</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems', window );"><strong>Share-based Compensation Arrangement by Share-based Payment Award [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AllocatedShareBasedCompensationExpense', window );">Effect on income before income taxes</a></td>
<td class="num">$ (296)<span></span>
</td>
<td class="num">$ (230)<span></span>
</td>
<td class="num">$ (864)<span></span>
</td>
<td class="num">$ (603)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense', window );">Effect on income taxes</a></td>
<td class="nump">40<span></span>
</td>
<td class="nump">36<span></span>
</td>
<td class="nump">134<span></span>
</td>
<td class="nump">196<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax', window );">Effect on net income</a></td>
<td class="num">$ (256)<span></span>
</td>
<td class="num">$ (194)<span></span>
</td>
<td class="num">$ (730)<span></span>
</td>
<td class="num">$ (407)<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AwardTypeAxis=us-gaap_RestrictedStockMember', window );">Restricted Stock</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward', window );"><strong>Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Number of Shares [Roll Forward]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber', window );">Beginning Outstanding (in shares)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">35,203<span></span>
</td>
<td class="nump">69,154<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod', window );">Released (in shares)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(21,663)<span></span>
</td>
<td class="num">(30,828)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber', window );">Ending Outstanding (in shares)</a></td>
<td class="nump">13,540<span></span>
</td>
<td class="nump">38,326<span></span>
</td>
<td class="nump">13,540<span></span>
</td>
<td class="nump">38,326<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward', window );"><strong>Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Weighted Average Grant Date Fair Value [Roll Forward]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue', window );">Beginning Outstanding, Weighted Average Grant Date Fair Value (usd per share)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 10.13<span></span>
</td>
<td class="nump">$ 10.13<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue', window );">Released, Weighted Average Grant Date Fair Value (usd per share)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">11.47<span></span>
</td>
<td class="nump">10.08<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue', window );">Ending Outstanding, Weighted Average Grant Date Fair Value (usd per share)</a></td>
<td class="nump">$ 7.98<span></span>
</td>
<td class="nump">$ 10.17<span></span>
</td>
<td class="nump">$ 7.98<span></span>
</td>
<td class="nump">$ 10.17<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AwardTypeAxis=us-gaap_RestrictedStockMember', window );">Restricted Stock | Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems', window );"><strong>Share-based Compensation Arrangement by Share-based Payment Award [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1', window );">Option vesting period (in years)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">4 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AwardTypeAxis=us-gaap_RestrictedStockMember', window );">Restricted Stock | Minimum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems', window );"><strong>Share-based Compensation Arrangement by Share-based Payment Award [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1', window );">Option vesting period (in years)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">2 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AwardTypeAxis=us-gaap_EmployeeStockOptionMember', window );">Stock Options</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward', window );"><strong>Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding [Roll Forward]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber', window );">Outstanding at beginning of period (in shares)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">1,063,324<span></span>
</td>
<td class="nump">1,059,417<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross', window );">Granted (in shares)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">327,500<span></span>
</td>
<td class="nump">272,906<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_SharebasedCompensationArrangementbySharebasedPaymentAwardOptionsAssumedInMerger', window );">Assumed - merger (in shares)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">367,229<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised', window );">Exercised (in shares)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(94,454)<span></span>
</td>
<td class="num">(263,358)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresInPeriod', window );">Forfeited (in shares)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(26,571)<span></span>
</td>
<td class="num">(4,546)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber', window );">Outstanding at end of period (in shares)</a></td>
<td class="nump">1,637,028<span></span>
</td>
<td class="nump">1,064,419<span></span>
</td>
<td class="nump">1,637,028<span></span>
</td>
<td class="nump">1,064,419<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber', window );">Exercisable at end of period (in shares)</a></td>
<td class="nump">1,005,690<span></span>
</td>
<td class="nump">663,220<span></span>
</td>
<td class="nump">1,005,690<span></span>
</td>
<td class="nump">663,220<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageGrantDateFairValue', window );">Weighted average fair value of options granted during the period (usd per share)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 5.91<span></span>
</td>
<td class="nump">$ 4.38<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward', window );"><strong>Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Weighted Average Exercise Price [Roll Forward]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice', window );">Outstanding at beginning of period, Weighted Average Exercise Price (usd per share)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">7.37<span></span>
</td>
<td class="nump">6.71<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageExercisePrice', window );">Granted, Weighted Average Exercise Price (usd per share)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">9.74<span></span>
</td>
<td class="nump">$ 7.01<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_SharebasedCompensationArrangementsbySharebasedPaymentAwardOptionsAssumedWeightedAverageExercisePrice', window );">Assumed - Merger, Weighted Average Exercise Price (usd per share)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">14.19<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice', window );">Exercised, Weighted Average Exercise Price (usd per share)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">5.51<span></span>
</td>
<td class="nump">$ 4.31<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsForfeituresInPeriodWeightedAverageExercisePrice', window );">Forfeited, Weighted Average Exercise Price (usd per share)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">29.48<span></span>
</td>
<td class="nump">8.71<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice', window );">Outstanding at end of period, Weighted Average Exercise Price (usd per share)</a></td>
<td class="nump">$ 9.12<span></span>
</td>
<td class="nump">$ 7.37<span></span>
</td>
<td class="nump">9.12<span></span>
</td>
<td class="nump">7.37<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice', window );">Exercisable at end of period, Weighted Average Exercise Price (usd per share)</a></td>
<td class="nump">$ 9.75<span></span>
</td>
<td class="nump">$ 8.14<span></span>
</td>
<td class="nump">$ 9.75<span></span>
</td>
<td class="nump">$ 8.14<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract', window );"><strong>Share-based Compensation Arrangement by Share-based Payment Award, Fair Value Assumptions and Methodology [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate', window );">Risk free interest rate</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">2.00%<span></span>
</td>
<td class="nump">2.00%<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1', window );">Expected life</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">6 years<span></span>
</td>
<td class="text">6 years<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate', window );">Dividend rate</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">0.00%<span></span>
</td>
<td class="nump">0.00%<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate', window );">Volatility</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">67.00%<span></span>
</td>
<td class="nump">69.00%<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AwardTypeAxis=us-gaap_EmployeeStockOptionMember', window );">Stock Options | Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems', window );"><strong>Share-based Compensation Arrangement by Share-based Payment Award [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod', window );">Option expiration period (in years)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">10 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1', window );">Option vesting period (in years)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">4 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AwardTypeAxis=us-gaap_EmployeeStockOptionMember', window );">Stock Options | Minimum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems', window );"><strong>Share-based Compensation Arrangement by Share-based Payment Award [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1', window );">Option vesting period (in years)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">2 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_asys_SharebasedCompensationArrangementbySharebasedPaymentAwardOptionsAssumedInMerger">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Share-based Compensation Arrangement by Share-based Payment Award, Options, Assumed In Merger</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">asys_SharebasedCompensationArrangementbySharebasedPaymentAwardOptionsAssumedInMerger</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>asys_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_asys_SharebasedCompensationArrangementsbySharebasedPaymentAwardOptionsAssumedWeightedAverageExercisePrice">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Share-based Compensation Arrangements by Share-based Payment Award, Options, Assumed, Weighted Average Exercise Price</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">asys_SharebasedCompensationArrangementsbySharebasedPaymentAwardOptionsAssumedWeightedAverageExercisePrice</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>asys_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AllocatedShareBasedCompensationExpense">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Represents the expense recognized during the period arising from equity-based compensation arrangements (for example, shares of stock, unit, stock options or other equity instruments) with employees, directors and certain consultants qualifying for treatment as employees.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 718<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SAB TOPIC 14.F)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=27013229&amp;loc=d3e301413-122809<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 718<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (b)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5047-113901<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 718<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (h)(1)(i)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Staff Accounting Bulletin (SAB)<br><br><br><br> -Number Topic 14<br><br><br><br> -Section F<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AllocatedShareBasedCompensationExpense</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The amount of expense, net of income tax, recognized during the period arising from equity-based compensation arrangements (for example, shares of stock, unit, stock options or other equity instruments) with employees, directors and certain consultants qualifying for treatment as employees.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The total recognized tax benefit related to compensation cost for equity-based payment arrangements recognized in income during the period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 718<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (h)(1)(i)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Period which an employee's right to exercise an award is no longer contingent on satisfaction of either a service condition, market condition or a performance condition, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 718<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (a)(1)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The number of non-vested equity-based payment instruments, excluding stock (or unit) options, that validly exist and are outstanding as of the balance sheet date.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 718<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (c)(2)(i)-(ii)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The weighted average fair value of nonvested awards on equity-based plans excluding option plans (for example, phantom stock or unit plan, stock or unit appreciation rights plan, revenue or profit achievement stock award plan) for which the employer is contingently obligated to issue equity instruments or transfer assets to an employee who has not yet satisfied service or performance criteria necessary to gain title to proceeds from the sale of the award or underlying shares or units.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 718<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (c)(2)(i)-(ii)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The number of equity-based payment instruments, excluding stock (or unit) options, that vested during the reporting period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 718<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (c)(2)(iii)(2)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The weighted average fair value as of grant date pertaining to an equity-based award plan other than a stock (or unit) option plan for which the grantee gained the right during the reporting period, by satisfying service and performance requirements, to receive or retain shares or units, other instruments, or cash in accordance with the terms of the arrangement.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 718<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (c)(2)(iii)(2)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The estimated dividend rate (a percentage of the share price) to be paid (expected dividends) to holders of the underlying shares over the option's term.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 718<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (f)(2)(iii)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The estimated measure of the percentage by which a share price is expected to fluctuate during a period. Volatility also may be defined as a probability-weighted measure of the dispersion of returns about the mean. The volatility of a share price is the standard deviation of the continuously compounded rates of return on the share over a specified period. That is the same as the standard deviation of the differences in the natural logarithms of the stock prices plus dividends, if any, over the period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 718<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (f)(2)(ii)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The risk-free interest rate assumption that is used in valuing an option on its own shares.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 718<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (f)(2)(iv)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The number of shares into which fully or partially vested stock options outstanding as of the balance sheet date can be currently converted under the option plan.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 718<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (c)(1)(iii)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The weighted-average price as of the balance sheet date at which grantees can acquire the shares reserved for issuance on vested portions of options outstanding and currently exercisable under the stock option plan.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 718<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (c)(1)(iii)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresInPeriod">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The number of shares under options that were cancelled during the reporting period as a result of occurrence of a terminating event specified in contractual agreements pertaining to the stock option plan.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 718<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (c)(1)(iv)(3)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresInPeriod</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Gross number of share options (or share units) granted during the period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageGrantDateFairValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The weighted average grant-date fair value of options granted during the reporting period as calculated by applying the disclosed option pricing methodology.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 718<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (d)(1)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageGrantDateFairValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Number of options outstanding, including both vested and non-vested options.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 718<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 2<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 718<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (c)(1)(i)-(ii)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Weighted average price at which grantees can acquire the shares reserved for issuance under the stock option plan.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 718<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (c)(1)(i)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Weighted average price at which option holders acquired shares when converting their stock options into shares.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsForfeituresInPeriodWeightedAverageExercisePrice">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Weighted average price at which grantees could have acquired the underlying shares with respect to stock options that were terminated.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsForfeituresInPeriodWeightedAverageExercisePrice</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageExercisePrice">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Weighted average per share amount at which grantees can acquire shares of common stock by exercise of options.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageExercisePrice</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Period from grant date that an equity-based award expires, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 718<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (a)(2)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Expected term of share-based compensation awards, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 718<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SAB TOPIC 14.D.2)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=27013229&amp;loc=d3e301413-122809<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 718<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (f)(2)(i)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Staff Accounting Bulletin (SAB)<br><br><br><br> -Number Topic 14<br><br><br><br> -Section D<br><br><br><br> -Subsection 2<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Number of share options (or share units) exercised during the current period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 505<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 2<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6928386&amp;loc=d3e21463-112644<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 505<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.3-04)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=27012166&amp;loc=d3e187085-122770<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 718<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (c)(1)(iv)(2)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.28,29)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 02<br><br><br><br> -Paragraph 29, 30<br><br><br><br> -Article 5<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AwardTypeAxis=us-gaap_RestrictedStockMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AwardTypeAxis=us-gaap_RestrictedStockMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RangeAxis=us-gaap_MaximumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RangeAxis=us-gaap_MaximumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RangeAxis=us-gaap_MinimumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RangeAxis=us-gaap_MinimumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AwardTypeAxis=us-gaap_EmployeeStockOptionMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AwardTypeAxis=us-gaap_EmployeeStockOptionMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>

</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>18
<FILENAME>report.css
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
/* Updated 2009-11-04 */
/* v2.2.0.24 */

/* DefRef Styles */
..report table.authRefData{
	background-color: #def;
	border: 2px solid #2F4497;
	font-size: 1em;
	position: absolute;
}

..report table.authRefData a {
	display: block;
	font-weight: bold;
}

..report table.authRefData p {
	margin-top: 0px;
}

..report table.authRefData .hide {
	background-color: #2F4497;
	padding: 1px 3px 0px 0px;
	text-align: right;
}

..report table.authRefData .hide a:hover {
	background-color: #2F4497;
}

..report table.authRefData .body {
	height: 150px;
	overflow: auto;
	width: 400px;
}

..report table.authRefData table{
	font-size: 1em;
}

/* Report Styles */
..pl a, .pl a:visited {
	color: black;
	text-decoration: none;
}

/* table */
..report {
	background-color: white;
	border: 2px solid #acf;
	clear: both;
	color: black;
	font: normal 8pt Helvetica, Arial, san-serif;
	margin-bottom: 2em;
}

..report hr {
	border: 1px solid #acf;
}

/* Top labels */
..report th {
	background-color: #acf;
	color: black;
	font-weight: bold;
	text-align: center;
}

..report th.void	{
	background-color: transparent;
	color: #000000;
	font: bold 10pt Helvetica, Arial, san-serif;
	text-align: left;
}

..report .pl {
	text-align: left;
	vertical-align: top;
	white-space: normal;
	width: 200px;
	white-space: normal; /* word-wrap: break-word; */
}

..report td.pl a.a {
	cursor: pointer;
	display: block;
	width: 200px;
	overflow: hidden;
}

..report td.pl div.a {
	width: 200px;
}

..report td.pl a:hover {
	background-color: #ffc;
}

/* Header rows... */
..report tr.rh {
	background-color: #acf;
	color: black;
	font-weight: bold;
}

/* Calendars... */
..report .rc {
	background-color: #f0f0f0;
}

/* Even rows... */
..report .re, .report .reu {
	background-color: #def;
}

..report .reu td {
	border-bottom: 1px solid black;
}

/* Odd rows... */
..report .ro, .report .rou {
	background-color: white;
}

..report .rou td {
	border-bottom: 1px solid black;
}

..report .rou table td, .report .reu table td {
	border-bottom: 0px solid black;
}

/* styles for footnote marker */
..report .fn {
	white-space: nowrap;
}

/* styles for numeric types */
..report .num, .report .nump {
	text-align: right;
	white-space: nowrap;
}

..report .nump {
	padding-left: 2em;
}

..report .nump {
	padding: 0px 0.4em 0px 2em;
}

/* styles for text types */
..report .text {
	text-align: left;
	white-space: normal;
}

..report .text .big {
	margin-bottom: 1em;
	width: 17em;
}

..report .text .more {
	display: none;
}

..report .text .note {
	font-style: italic;
	font-weight: bold;
}

..report .text .small {
	width: 10em;
}

..report sup {
	font-style: italic;
}

..report .outerFootnotes {
	font-size: 1em;
}
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>19
<FILENAME>R25.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.2.0.727</span><table class="report" border="0" cellspacing="2" id="idm140187061392928">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Basis of Presentation - Deferred Profit (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th"><div>Jun. 30, 2015</div></th>
<th class="th"><div>Sep. 30, 2014</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract', window );"><strong>Organization, Consolidation and Presentation of Financial Statements [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredRevenue', window );">Deferred revenues</a></td>
<td class="nump">$ 7,536<span></span>
</td>
<td class="nump">$ 8,118<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredCostsCurrent', window );">Deferred costs</a></td>
<td class="nump">2,416<span></span>
</td>
<td class="nump">1,210<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherDeferredCreditsCurrent', window );">Deferred profit</a></td>
<td class="nump">$ 5,120<span></span>
</td>
<td class="nump">$ 6,908<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredCostsCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Sum of the carrying amounts as of the balance sheet date of deferred costs capitalized at the end of the reporting period that are expected to be charged against earnings within one year or the normal operating cycle, if longer.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.8)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredCostsCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredRevenue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of deferred revenue as of balance sheet date. Deferred revenue represents collections of cash or other assets related to a revenue producing activity for which revenue has not yet been recognized. Generally, an entity records deferred revenue when it receives consideration from a customer before achieving certain criteria that must be met for revenue to be recognized in conformity with GAAP.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 605<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SAB TOPIC 13.A.4(a).Q1 Response)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=27012821&amp;loc=d3e214044-122780<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Staff Accounting Bulletin (SAB)<br><br><br><br> -Number Topic 13<br><br><br><br> -Section A<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredRevenue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherDeferredCreditsCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Carrying amount as of the balance sheet date of unearned revenue or income not otherwise specified in the taxonomy which is expected to be taken into income within one year or the normal operating cycle, if longer.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.20)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherDeferredCreditsCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>

</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>20
<FILENAME>R42.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.2.0.727</span><table class="report" border="0" cellspacing="2" id="idm140187061239728">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Other Accrued Liabilities (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th"><div>Jun. 30, 2015</div></th>
<th class="th"><div>Sep. 30, 2014</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherLiabilitiesDisclosureAbstract', window );"><strong>Other Liabilities Disclosure [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_UnearnedResearchandDevelopmentGrantsCurrent', window );">Unearned research and development grants</a></td>
<td class="nump">$ 859<span></span>
</td>
<td class="nump">$ 3,989<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_OtherAccruedLiabilitiesOtherCurrent', window );">Other</a></td>
<td class="nump">4,606<span></span>
</td>
<td class="nump">1,357<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AccruedLiabilitiesCurrent', window );">Other accrued liabilities</a></td>
<td class="nump">$ 5,465<span></span>
</td>
<td class="nump">$ 5,346<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_asys_OtherAccruedLiabilitiesOtherCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Other Accrued Liabilities, Other, Current</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">asys_OtherAccruedLiabilitiesOtherCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>asys_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_asys_UnearnedResearchandDevelopmentGrantsCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Unearned Research and Development Grants, Current</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">asys_UnearnedResearchandDevelopmentGrantsCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>asys_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccruedLiabilitiesCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Carrying value as of the balance sheet date of obligations incurred and payable, pertaining to costs that are statutory in nature, are incurred on contractual obligations, or accumulate over time and for which invoices have not yet been received or will not be rendered. Examples include taxes, interest, rent and utilities. Used to reflect the current portion of the liabilities (due within one year or within the normal operating cycle if longer).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.20)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccruedLiabilitiesCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherLiabilitiesDisclosureAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherLiabilitiesDisclosureAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>

</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>21
<FILENAME>R37.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.2.0.727</span><table class="report" border="0" cellspacing="2" id="idm140187059494832">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Income Taxes (Details) - USD ($)<br> $ in Millions</strong></div></th>
<th class="th" colspan="2">9 Months Ended</th>
<th class="th" colspan="1"></th>
</tr>
<tr>
<th class="th"><div>Jun. 30, 2015</div></th>
<th class="th"><div>Jun. 30, 2014</div></th>
<th class="th"><div>Sep. 30, 2014</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeTaxContingencyLineItems', window );"><strong>Income Tax Contingency [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount', window );">Valuation allowance increase</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 1.8<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate', window );">Unrecognized tax benefits that would impact effective tax rate</a></td>
<td class="nump">$ 3.2<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 3.2<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued', window );">Unrecognized tax benefits, income tax penalties and interest accrued</a></td>
<td class="nump">$ 1.8<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 1.6<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RangeAxis=us-gaap_MinimumMember', window );">Minimum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeTaxContingencyLineItems', window );"><strong>Income Tax Contingency [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_IncomeTaxExaminationNumberofYearsGenerallyOpenForTaxExaminations', window );">Number of years open for tax examinations</a></td>
<td class="text">3 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RangeAxis=us-gaap_MaximumMember', window );">Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeTaxContingencyLineItems', window );"><strong>Income Tax Contingency [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_IncomeTaxExaminationNumberofYearsGenerallyOpenForTaxExaminations', window );">Number of years open for tax examinations</a></td>
<td class="text">5 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_asys_IncomeTaxExaminationNumberofYearsGenerallyOpenForTaxExaminations">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Income Tax Examination, Number of Years Generally Open For Tax Examinations</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">asys_IncomeTaxExaminationNumberofYearsGenerallyOpenForTaxExaminations</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>asys_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxContingencyLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxContingencyLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount accrued for interest on an underpayment of income taxes and penalties related to a tax position claimed or expected to be claimed in the tax return.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 740<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 15<br><br><br><br> -Subparagraph (c)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32718-109319<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The total amount of unrecognized tax benefits that, if recognized, would affect the effective tax rate.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 740<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 15A<br><br><br><br> -Subparagraph (b)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=SL6600010-109319<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of increase (decrease) in the valuation allowance for a specified deferred tax asset.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 740<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 20<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=37586315&amp;loc=d3e32123-109318<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RangeAxis=us-gaap_MinimumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RangeAxis=us-gaap_MinimumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RangeAxis=us-gaap_MaximumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RangeAxis=us-gaap_MaximumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>

</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>22
<FILENAME>R47.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.2.0.727</span><table class="report" border="0" cellspacing="2" id="idm140187066399968">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Acquisition - Consideration Transferred (Details) - Jan. 30, 2015 - BTU International, Inc (BTU) Merger<br> $ / shares in Units, shares in Thousands, $ in Thousands</strong></div></th>
<th class="th">
<div>USD ($) </div>
<div>$ / shares </div>
<div>shares</div>
</th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_BusinessAcquisitionLineItems', window );"><strong>Business Acquisition [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_ConversionOfStockConversionRatioSharesOfStockExchangedPerEachShareOfSubsidiaryStock', window );">Exchange ratio</a></td>
<td class="nump">0.3291<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NoncashOrPartNoncashAcquisitionNoncashFinancialOrEquityInstrumentConsiderationSharesIssued1', window );">Amtech common stock issued for consideration</a></td>
<td class="nump">3,186<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SharePrice', window );">Amtech common stock per share price on January 30, 2015 | $ / shares</a></td>
<td class="nump">$ 8.20<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_BusinessCombinationConsiderationTransferredForCommonAndRestrictedStockUnits', window );">Consideration for BTU common shares and restricted stock units | $</a></td>
<td class="nump">$ 26,125<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_BusinessCombinationConsiderationTransferred1', window );">Total fair value of consideration transferred | $</a></td>
<td class="nump">$ 26,625<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_BusinessAcquisitionAxis=asys_BTUInternationalIncBTUMergerMember', window );">Common And Restricted Shares</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_BusinessAcquisitionLineItems', window );"><strong>Business Acquisition [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConversionOfStockSharesConverted1', window );">BTU common shares and restricted stock units exchanged</a></td>
<td class="nump">9,681<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_BusinessAcquisitionAxis=asys_BTUInternationalIncBTUMergerMember', window );">Stock Options</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_BusinessAcquisitionLineItems', window );"><strong>Business Acquisition [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConversionOfStockSharesConverted1', window );">BTU common shares and restricted stock units exchanged</a></td>
<td class="nump">500<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_asys_BusinessCombinationConsiderationTransferredForCommonAndRestrictedStockUnits">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Business Combination, Consideration Transferred For Common And Restricted Stock Units</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">asys_BusinessCombinationConsiderationTransferredForCommonAndRestrictedStockUnits</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>asys_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_asys_ConversionOfStockConversionRatioSharesOfStockExchangedPerEachShareOfSubsidiaryStock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Conversion Of Stock, Conversion Ratio, Shares Of Stock Exchanged Per Each Share Of Subsidiary Stock</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">asys_ConversionOfStockConversionRatioSharesOfStockExchangedPerEachShareOfSubsidiaryStock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>asys_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:pureItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_BusinessAcquisitionLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_BusinessAcquisitionLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_BusinessCombinationConsiderationTransferred1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of consideration transferred, consisting of acquisition-date fair value of assets transferred by the acquirer, liabilities incurred by the acquirer, and equity interest issued by the acquirer.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 805<br><br><br><br> -SubTopic 30<br><br><br><br> -Section 30<br><br><br><br> -Paragraph 7<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6911251&amp;loc=d3e6578-128477<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 805<br><br><br><br> -SubTopic 30<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (b)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=35744584&amp;loc=d3e6927-128479<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 805<br><br><br><br> -SubTopic 30<br><br><br><br> -Section 30<br><br><br><br> -Paragraph 8<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6911251&amp;loc=d3e6613-128477<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_BusinessCombinationConsiderationTransferred1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConversionOfStockSharesConverted1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The number of shares converted in a noncash (or part noncash) transaction. Noncash is defined as transactions during a period that do not result in cash receipts or cash payments in the period. "Part noncash" refers to that portion of the transaction not resulting in cash receipts or cash payments in the period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 230<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 5<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6367179&amp;loc=d3e4332-108586<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 230<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 3<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6367179&amp;loc=d3e4304-108586<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 230<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 4<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6367179&amp;loc=d3e4313-108586<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConversionOfStockSharesConverted1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NoncashOrPartNoncashAcquisitionNoncashFinancialOrEquityInstrumentConsiderationSharesIssued1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The number of shares issued as [noncash or part noncash] consideration for a business or asset acquired. Noncash is defined as transactions during a period that affect recognized assets or liabilities but that do not result in cash receipts or cash payments in the period. "Part noncash" refers to that portion of the transaction not resulting in cash receipts or cash payments in the period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 230<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 3<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6367179&amp;loc=d3e4304-108586<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 230<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 5<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6367179&amp;loc=d3e4332-108586<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 230<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 4<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6367179&amp;loc=d3e4313-108586<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NoncashOrPartNoncashAcquisitionNoncashFinancialOrEquityInstrumentConsiderationSharesIssued1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SharePrice">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Price of a single share of a number of saleable stocks of a company.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SharePrice</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_BusinessAcquisitionAxis=asys_BTUInternationalIncBTUMergerMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_BusinessAcquisitionAxis=asys_BTUInternationalIncBTUMergerMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StatementClassOfStockAxis=asys_CommonAndRestrictedSharesMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StatementClassOfStockAxis=asys_CommonAndRestrictedSharesMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StatementClassOfStockAxis=us-gaap_EmployeeStockOptionMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StatementClassOfStockAxis=us-gaap_EmployeeStockOptionMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>

</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>ZIP
<SEQUENCE>23
<FILENAME>0000720500-15-000037-xbrl.zip
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
begin 644 0000720500-15-000037-xbrl.zip
M4$L#!!0````(`+&`!D>GCV5^D4D!`#!L%``1`!P`87-Y<RTR,#$U,#8S,"YX
M;6Q55`D``PZ^PU4.OL-5=7@+``$$)0X```0Y`0``[%U;<]NXDGX^6[7_P>OG
MM<W[Q3634[PIZSF.[5C.R9E]2=$D)/&$(C4@Y5C[Z[?!BT1*U-622$J8JB0:
M`@31W1^^[@9!X+>_OP_]BS>$(R\,?K]DKYG+"Q0XH>L%_=\OOW6OM*YQ=W?Y
M]T__^1^__=?5U;_TY_L+,W3&0Q3$%P9&=HS<BU]>/+CX[J+HYT4/A\.+[R'^
MZ;W95U?97:/;GLN*+.<*JFVS@BCSBJ`PHBVYBBJ@UU=%^N_W6T;L<0*#&.'5
M?A5$AE<<U99Z-A)ZLFJSHIRV]OZ*?>^6_'T!'0^B6SN:1+]?#N)X='MS\^O7
MKVM[&"-G`%=C-(RNG7!XPS&LR$@\2);>XH3C(,:3Z5VDM>L(.=?]\.TF*R0W
M\5<,>\6ST]O&&(-JEMV7E9(;A?*-+O*J[X&"BNKHW1E4UR<EB33E&[S@#45Q
M]2UI684T7A0*'"N75)?<&>(^5&?XFZQ&?H/O!3]7U";%KW:$\NJ![3E1=9^2
M(M(EMMRE(`R"\;#Z&6Z,;^+)"-U`I2NHA;#G3.];?U/Y!HQZ2R61;J`TKQAY
M3K4(4%`A0!2/\)+Z4%)QPSBZZMOV:'I/SXY>DXYD!17&AA(<^BBJO"<IJ;Z)
MZ*'ZIJ2DZJ88H_Y2/:DW4)Y7)07N',BG^DP+2U7CRJIB6C4N5O56`32(8CMP
MII![7X#H+SZIS:JJ>I.43JM&;E5%:):]^=>7^ZXS0$-[5ME;7_EJVAN@J;_]
M1AYV&R4ESZAWD3S\=I``CS#65<Y)U]"3RZR8&.+WR\@;CGR0Z29I)^4[)PQB
M]!Y?>-#KCDGN_<K_^6(FC\KK`"%[\22YDE_R7'*QYR%\D70%E<3(L6G<_>/R
M$P/_R1PC,LQO-_,WIT^Y67A,]I01#*W0+3T8-(%C$WS#IX3>6`:0E3<P*RO>
M@0(WKP\PE*YX9O9`=UH[OS9[9'XET]`2G=TE*A.T<9]MK,Y2_,29!I2"QO*2
MCVB@0U0@?!7:(#[X0[4`@+V)#X.F#>+/X7\OXIN)]=O#&?R6G"'LGS-RGOW:
M%IT!;H2:>3;'66MT)FRILT/@+&7F5E"3<`!J(N+S[7!,_`$<TRR:^Y$%_3^>
M[:"/M'<OFE[YX@7><#S\@H:O"!]34]-!@_HDXT^OI1==>/C[R/<<+T[[=>%Z
M4">=1\@Z?CL5Y?)3?JDDRV\WE4UES[Y9?'BKP]`J8QLAY`Q!C.T8%/?L13_U
MB8X"9S"T\<\2!C0GF9J(GI&#O#?[U4?M@\,Z86<H62;M>0$FC5I9$SF<,`6"
M/HZ\`$61YOPU]B*/J#(!"LDK?W3#>WOR@AS]^I_7[</'$M$N/Q'9;A=E.RP:
M2HZ/Y:XX89_,G]J6^\,.>&8SV^HOW^[@?APDP\?V[P('+IV:E5=)>31[IU-A
M=7AZ^_UT/'U1EO,B[H-X^E4MO4Q&:,84QCB*PR'"CP$-$N:Q]K&>Y'K.R&I!
MT13FVB\;NU,XYE>MX<@/)PAUX]#Y^3@B"IT#]0EQ84D%,[@NU<&^\$HY^(C@
M;&M*WB1PTJF`K0*$U+?;T4`+7/*/!?'SF^W#/1%<>491C#TG1DG9'("[,?28
MJ.XS"OO8'@T\Q_:31K,%#S^^==N$XO5!0NJ?MU'6OI"^5->7GS)EWW[KGAG<
ML_=O:XAX9I6$ADZ&7"OE.F8R>\`7BM2DQS)I4]^04A#4!8*F,+M`F;T69C_4
M^UCAJT#M68\]#[+RB:?VK,6>AU@P,#\^.Y!$Q^C>>T/N70#-][U7'VE1A.)(
MGWRQ_QUBP[>CJ&3MQWB`\'SM]ME\"]%GB%@A>^O'>3'#V@473Q`-0)/N"W(&
M0>B'_<F9@&*9X*W.T?;!%/D+CGLO.AN&J)"Y]<SP41S<!4\X=%`4@4-%-G;(
MK)J)WI`?CHC,9X*,C;30>JQ\U(M0K#0/*TWU+S3BJ"OB:"I[T(CC-)CAHSAX
M"`,G'(Y0C+0^1LG[M'.!PW+16X^*C_J+%VR[Z,$>HG/!PKS`K?</'T4`Y84Z
M>:&I40/EA;9[AH\B@,YIUSNG7>LJDZ6K%]MD^KVNS#SCU284#.>RZF0624[7
M7.8?EW534:/BIY&^C<DJT);.0JX4<?J)Y**,)Q4;4CO7;^=#>?HY<M_`U$^A
M[T4#+^AWQR.0&9&5W2=N^0U$/D-7L"5%4-P<'S='3B$W<11HZ$$;[MB)PY-W
M&"MD;;W=MPP$Z>BO=?0?8V*9CO[FC?Y#V'VWL)%F"&<1&.X(#LH+YPB6S3Y0
MI5.+[8P/J5WKM&M]GZE1N[8MHMOL<S5JUS9^ME;TKT\XA#;BR9,/31>ST<)>
M9GG=>SMP];'GDT-I2.9Z-QSA\*VM2W\VD'P&AO6BGX!W%G9"16>,`R\>8P3U
M.MX[^77J:%@N<NLY?U=NH"BH`P5-XP+J(9K@(8XQL[L-*K[8SL`+$)ZT>X)_
M*SBLD+GU.-C51U`<G,[[OHI)W?V$"Z>XU^<QPHHMND.W`-TGE'.GK\W\_Z+O
M/\7ME;="]49:.B3`Z0;,NP+\'MD1&H1^14A[]F2]0C>4K4\(S&?!T36!F3+S
MKF!>D5R</3/OFGA19FY52G@6Q%Q/2DAY^<B\?!98KHF7*9AKF]\XBW"C]OD-
M&G@4`;[?'6U.$=W'W/F&0KMF:"_;Y?`4HY'C;0-)0Y*:8;UBOQV*[.RF7?<D
MHN"N&=QT^V:[&=LWGRK`=@D*SBK:K2,HH+%N34'!62&[IJ"`@KN>.8JS"GCK
MF:.@\>Y'H4T/'*#@V1D\=-_ILX?-%@=JGF(<N+>#-VF,USQ0MC6`:PHHSSPZ
MF]^['01Q/7\<@\OI(F>,O=A#D?7N^&,7N1T<#@T(H,>Q3?8\>.Q9-@[(1XU/
M"'<'-D;ZI+J!]1!O%70/IZ3F'%S?U/WD*4`I0,^=04]C;YUC@+0)AS&<,9-2
MH+8)J`U@U#N.892O;*(X\KD1PM&SUQ_$,TA--\U,9CX>>XG"2J#KPC-!O4\8
M]1#&K77B2P6=@6:%I(>%S6P'`4:Y8KDK5IPJ80\["`!9,>I7UD0.*U*[-\GN
M1;J8M_PZNIBO?]A#ABA*FL`.#3AP:#91%L.#;/\906..YY-5^'!;"U\*K-DV
M>C:SM4K@HR&@_A,E*`+J1<"A3A6`Q/LK/8QJ.0R:<:S(7(;!"$U(A05Z($7S
M#J1HRCS)]N"@O%(SKS0(.ENZ),HK9^-TQ.W!00^Z.398Q"W!<L#%(I1)FL8D
M30''#FZ&,LFYNIVMPEDZ5U+#7$E30UEZ+%_3.:8I8-D^6J$I<\TI<U-BF:V@
M0]U3W>ZI*;#9*@2FL*D;-DT)AK<Z;)C"IG[8U+XBK0HV!F@%A,')BK]G+_JI
M3W04.(.AC><6F]@^BI[1&PK&Z`F')%R\![W/?=53T=S"=T'9W0M5YYHZHS!]
MG1$*"V%666$EFC_6G<6OFU9;<5]=:5$"T]`!/M7@9Q3VL3T:>([M)T/("<=@
MN,F/E^]M&BM+Y;G\E`ET^_*=FGVYV1/F3+9&>0AQ/-"&\#3';A]IK@!"0@M+
M1*306`Z-Z;<.8[(I\$E!8OIQ0D&T,X3"LJG0:I;(G&VQ\#,.QZ/HL6<D7.NA
M*-UD:3C,XNS[T$E"@2BI^/(K/"D49?'&OK1RAM.K&P.0<A&%PER@:CR<"`#R
M0-5X.$.S;QV-G&R8.MO+C0:IVZ>ME`W.TNS?NB=F]F]=:G::AYQ+'M(4`!XY
M$7X,3BN%V0\`'S=Z<W&:8?#6V8]IG0AV<L=G6M3LZ[,?+?).,^N9"49A0,->
M:G8Z]T'9@+ZRIV:GK^PI(QQ[?H2FITU)3YLR/[+U6QJ:IYPU#.@LQ2F97=C#
M(O$'%.^P.#P_*VC=ZO#TQ)BL<F%)>'[I84RJM]*O[;8:?*KNE7#]6#<65X&O
M,=>^^K)H[<S'+S$WC1CID*5#E@Y9ZF6/,61;^7:=#ME=A^PY+U\^%2]+ARP=
MLF?@9=/]U=GIX,B_(M6<O\9>Y!&;%'>=N[<G+\C1K_]YW;[!L42TZ6YS\[(=
M%@FE/;-9[HJ?XF`?>V:G9N7^L`.>V<RV^LNW.[@?!\DXM/V[P(%+7Q#N(WQJ
MMEXOZ]%L#V.:/?29"=3NC;3[04Y*V-CNBWQWB@?/[I7SMWANO8?/-AMG9XN?
M$[?K*9ZFWB3^.-Z)Z@?&6<4TP3.*D(V=@08Y#22E?ICL4*-A3/1`?D*6""FB
M$[^$3PCW0CSLA#A9FA`59@(28+Z@X0B3?7`F$=G&R@Y<*P`//\D?89!D$VE]
MC)*&VX?)O>@J0_!.RCK+%'EOX?2TG?LPBHBI/#!;X'@(K/-@QV.,R.J;_/*D
MQ*/DEN0,4CNVHQB'HP%JX<9T!PW2M^C'Y@:8L?!R"[2:DA>.V0.,N&,?-$&V
M"XLG7U`\"-V[X`U%,1%@\2I"#_:P0,/_(,?BQF&`_B<$I01]<FRN'4S:A]:/
MJ"*#]$I=4-Q4XZ:T:5VFL?O8/6\`K51*FY%TB`E+ZFFIIVW\Y"S-?&CF<Q2&
M->DKH0:_&IC?=[_(.YMDO>R>L]Y#H&6#@]O3A1CA<`@M!RZ,Q1A[3HS<[L#&
MU`'O89?HQ1/DT\40JU5.L7\$[.<UK.'(#R<()26/(](B!?X!@)]76:KO\T)]
MU;3\OD#?\0(O1O?>&X(,%R*9OO?J(RV*4`R!6;I"BYBG-`Q>L.TF>3"E_9W1
MOX7>9^-A7O'G-=U?(G\7>3_N4=_VK424\B$=X!Y)QE&8RBLD=3[TPX4J\034
M&420DY3&3FKL%J9BH)';.8T43KQ85,G>7H@NUV@VJBI5>H84+NR5PMN`R19F
M>`U8K;^6Z+9U\F=&>D=VY90`MXAAOU(";#@!-N5HR?TF/!0LIYH6'#([GLY1
MG/XY?DU)C%>JG)Z:5QDJLB9R.(&N^C[VJN]Y-'!7G+!%XE"J?Z@CF:G?;*;?
MK/T@YG2Y@_#'V.?9XIJ'&`.MCK$7])]\NX"54M%C;[9*:O9K+L,Y^MJSV0/'
MKQ'Z:TR:?H._%CY(GRMO']0K[90!?7M#[<UW-V(]W38=KL9)X6/\*J`<<ZV)
M?)#/C^=&?;*E),(C,H-1'G?=\?\-PO'_#L;A'^3T\:DER1J<BFDF2AYM((\J
M<^<1U`;VWM^\&>4PRF&[A+D'_28BZ/\#_K1O5._W:XBB%MJ\MG)+?[=$`]3%
MM6PPK'!QNX"<>C7JU0[MU<PI4TV'H8E>`1H$,PDT"G-XOHU?PM"_#P%?2TCE
M0%1UZLRQJ//IY.)RI9\X>31P+,Z_LI2WG(@OCM[]3<271B\=@*<TM47'P(G.
M*"^)].DX:WV@>I@`OXE,L/_(=!QXZ:".DH^-2L`>(CL:8_0IZW12(6\I+RLT
M3IJJ:CG=WO7'8V^ZOV_U8TI[PN[RH/S>]:WOT'@P7ACX9?V,X.<.[8XCM[)1
M+PH%CI5OOW7-W5I]0CCY@*S4NNN]`;V4,$7N`1,A;$.:5QPEF_;E;Z7>S#55
M>(B)@G#H!<L?LP9GY>?,MY:7S21<IZ-L%"Y'2U9A$_6G;YZS]]*0*[]ZZ>MG
M(P16<5&ZM7*R:+2',$9N)\FH%S[X(]\_?8,VHXMLI#ZCWH&^&[YPD>,-;3_Z
M_?**OTSG6VTGOC(TQ9`T2>@(%M=A6<[@-;4C"JP!OQ5!,2XOB-!)OQ+H<A++
M@?,"[[5O'<P4FWTY]MTFWYG'C_C9ZP]BZWWDI6T^)3PWKS)&3=;+L.(6'_YU
M$3EP37O"*.UB4B-7V%1%.J^H+*MRG*ZQDL`HIB*P'5'N2'I'5'51N?STQ#)_
M9@K9J.\%41.-I,]-MYN#&F1W[L=?`;#BP!N!VJQWN.9%X#R3ULIH*:R3*QKY
M[J%3$,&49,O2#$G055EA%,&0+;$C*JIJ</#'-`M6SHF/N6;%7*9=.EF4$1PZ
M)MXVL\'LPC-12OK=:U9FO3L#LKD`X3/+=@9)(92!\_5<S\:3I-;R\7+D#X@*
M&A<*^I9%PU(TUN!8QA(47;141<I&E2@K,E^I;YY3V:G&]ZZRFNQQ`/XJ*EHP
M))D7#544.)5G!-52%"Y3-&LQ9KV*3B'X'<@PV_>_M#5^&B<MCF5AS5B683"+
MK,8SBB*(K&PQAF"F(C,=W>#D@LBS"(G+Y-VD2Q\58!T9B1;'"R8OJ:RDFY:F
M:Q:7#PY.Y31ICP)\)B2<520LYB7)1AP^X?#?R(G+?<]>/Y9<I5@D45$3`66"
M9>F"*&@:.`$FZS<O@&N8=Y422Y*]W%.NZ<JLSP!^$.7%?K?>[6'F4U.YPMZ?
MR,;19P2L:_O^Y'&$`F#><M6EWF'CW:9G$K,=CC$U030MEN\HDF6)')M)+*L2
MSX'G$W/']]%NUZN`TG:Y!7J15'#Z'8W35!&8AC$47<L4()FZJ(,"^(,H`$/P
MB2"<2?Z]"S3'P6/DWGOVJ^<#>4+0$K@YZ$TT"J/Y('()E91B/]%B=(YC9%:0
M5<OJ\/"_0CX0&4M>`/057&;D&:1W[.<!!%VDG)*@K"0J+&-("L_)EJZ#E$(^
M<D6.X<2%D:N*!Y72S.)-&/L]+][:;M![1><,DS/!">B&9G)B;C=6Z7#*(A%)
MRBIYRMWY2,?7V*'#RA`*\9S.=7A=EE1%%<TIG^AJ9Q%PK"CMTO/L(+?>='IA
M+2=L?&P2&)^\A(Z>D8.\-_O51XL12MG?67*G`\\#J1598@S.-)G.U&^(G:+4
ME7,G>:RR(-1,WF3+K458)I>-,29A[Z*O$[X*2RVELVJ'XUE3[1B*QDDR=#U/
M"V$<F0LCAN7%`C%LT)T/]GW>3Y=H36=Y4^NPEM!1958#&40KIS56-Q=26D%B
MI%W[GB=`:<X#:>W8CZ.PESGU*-LT#3)+-+(!6\B?Z).[()FT&-L^R3:@[?4.
MJ^XMZY9B6U$MF>4D51!5L:,(O"QU\E@.XB2-J8B_<SCO1W<S6V0YJ=U'8>^?
M89RL<X2<`L%@Z259!XA$GNG.XO5*7!U_:]7ES*%IEB0)G*Q)IJP+.J\J?$[T
MLJA:*[2[@S8*JL2A@Y";[`9)SBT##;P[/F1P;R@QUDO81;X/:.PB_.8Y".H3
MT:JFL1K[ZG19E*^HALXPNL:SJB'RP'L*B7D-E9=$655+4R4)>R0.:LH>NVIN
MIOOJL?Z`XL=>DD)$EHW!;)5!P]=5,9`":)(8D1,93>N0.$[,&1TR2F;!][*\
MJL[DVK!7^Q%C50BAL"8C:I+.6;PLZA8$"&(^)`2--_@%<A<$O@XQQ-76,!A(
M?F5)TRW5@(A-D!DA]U&"S$K,HC48I28Q5EE#53C-E%51$'19(#-;D"GF<Q&<
M)%GS8O"**NQ!#+OL!W->>$%XV`)?.M.>)K*,)$NB+BDDX"*FST&@2HH%V:7P
MYYRN5HB^3D_IW/,S2LC?[14^L7T&#^MA(L`7VP/U!38$PVW2I&`(`J<"#G5.
M)/,4/&OEY"8HO"&`)KG5FMQ2.>MTG3>4J,!['9.LXMY^#4$W;KH=V.K8HW[=
M+G&/EB*8.DNF[WB2$@!]&=/@6N)`T_/$)13=XZ[**JH[F4&+9O'-)BZ$*TC`
M28*>^#]>-2Q=%#7#9*98866E*JBZ+D@P__Q=^K;XCNHS"OO8'@T\Q_9GMDLL
M^A#B>*!!P@=EB];A2A,#NJ%QHL!#JLFI/$3E.1VSD,P91N5L>$VB9=__%PL_
MXW`\BL@.Y6,"A"SINAL.H2'LV?Y]Z*1394G%Z3'MR[2A0@H+?A;"!4LV#!T,
MS4_S;DV3U>J77D([M3$[/7F)-@PR7P3C5=$-4=%%6;!,(W?5LFZ)U=I0CZV-
M9'(%3WX8#\L$X1G.8CH*"69-PV"`^24Y![G`ZFQ#S)H+8EK+!`'>[(`P#.1U
MN@8F$3M</AO&Z:Q8+0BCU"7(R_=E@D!>)*DJ9*J<PDH0F//`0?EDD=#1A&J+
MU";(M^Y2QF!4E9-E@;S:,2$I8BUFNAA"5LVJV0SFFI./+<AT*C+RUC@$15=4
M4>95R81$%M(*0]>,?`*!O,NH%$B0ZA+(&N-PM(;5=5$U#4DU.0V\M:YR+`B8
MBZ1R0J=A-MK<>4N:91F6)3,<F$CB)8.1\E$$0:U13=![$VPQT2LY#P60PT`'
MI8XDZ8S\_^Q=67,C1W+^*XIYYVQ5UNVP)Z).6V$=(\]X'?L(D=`,;`R@`$A)
ML[_>60UT`>AJ-`X"(+6Q#QLKB2"1F965]>6=F"PI6QYB;YCO<L!"7!,S67`^
M2$Y23($G8ACC19\T]Z[?"L.+L'9]S*2199^232Y!<@YDBM"BA&Q#KFO*;RR-
M@YC)6@31D7`TE2&@!)A1+8*DTO/^*TDNA9F.EL9AS(1^CA0$@9^/7@8GP2A;
M(@U4]4,-N-0[<#(C^S$3>FY"!J7P:D:KE5#4M+=5)O1,^T]$O!0C^S%3P,=+
M*>&%LS)'+)#^MG")"<2$PQ5Y-V=D/V8"]"FL)2*"E0:<%:[DUHGQ9L^S=7-&
MCL=,UFJ3?/`J1)!$>3`EED0L5?T,B9M?^E,PDS0T>>&)]9X)$2#2U"H;)"K[
MJ^0NYC*=S-+QC[=67DLB'`E1$"8"NOHM+F$*1'_`XRC,U-3V_3Q:YJC4EU_'
MLV7S;FP%X'[^NOG(^]'7)CSW^VCQL-IGL;3+Y=.7O`1@5<5X$$DVOUNEKO9O
M)MDRB=$E+A1QWC)!.!5@6HPO=5+;,?AUT\<W?RPG_S*;3/_MS>/B:?SFF[_<
MD&WQ3+;WI4JM1I",X)2A9A/.24BZ?:H5WF!;2^$=DPJ@O;<79OP$B2Z/^\O_
M,\[YP_&#_6V\0$UMRZW?XR4Y[*><KUW&(_(W'D23VI?!$MV:=Q5!=!)5I0GE
M.2IV%8%<3N]V`@8*>)2>*F8E(59K4T(XFD@M]DCG'>6;T-HMY+$E_<?1[`%_
M=YUX7O<I?.WIJ7A>Z2@^HE)K`5Q+9CE`8$ZW)7<<D4_.R/#O6Q$,$75%VO=4
M?:+*XXL25#2YSB(0GVR+EAF8D'+#!YQ(^W_/?IY,IW@ZLX?&)SFM',MRDH-J
M1"C/2*+H<;<ETW@9E53=K`N*?BOKTOWN4Z@:*K0"]!8)MP*H0BF!\E2VZ0:F
M>5U620F"W./(&C>9W_YTT2HW?%99&T\R(28%X@$$5T*[4HK'.;X=5;[::+--
M\-%D78B7(>EK5$7*DG'H,'@6#*2T\2`(5+EW+9[!2E[(@(AL]I!_G*:C3_LC
M2(5`XAR*.6F@+*+O[%,HY<4J*FO>O/L%N1K_ZU^J/UZ^<DU"FBP1(^8BZKCJ
M9S_BVY/.:6"BO0+O%3KQSI1:TV0`WKR[NR.F&4LU]$V%E#"_;T:'K#ZQNMX)
M_]M`-?(6_@X121%"&:(MIY(S56AQ2;]Y]Q-;D;'W6_;0D2D]EHHH(`$EZ*7E
M[B0F$"FVJ5MEF?1OFC[C/CK*MU14K"@\_E2,)Y(!M1""#R(8JUBA@4=-WNS,
M"]O[314=^2D_1@2:<YM-J+<J]W`(A(`M5I;H\V4;=??3[A?G/UV^+S;M)TW*
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MQ";3PEWN4J44O"E5W26XGXYSJ1WL-P@4)/.:.R)<B-Q"<JT*^Y`JG3B7SJUN
MA+.D:J1GGA/GI5#!97\"VD"1L-2Y+IV"\4IW^^DXE]I!PQ`1LZ4D$:4CO/6&
M)FBUEB0M:VJY%.=1^_3EJ>G]#N-?%TA+XW[C/T_'C1\^>[!?YHO'R=]7_?LY
MV+I`]VZ*AAM_5JH$3SL*PH13D6O-G(D2C,=#*7'+J"J5H9P1WN7N(G3?2!B#
MC@R7"(^E=])9I@2#6+)L3"9M*V%DA_.FPE@U_\QS'>7G/#?HM_'JQGXW7RZ;
M<F6\NB>^(XX%H((9Q((NX1/HVRH&DA34_55WV778Q_,QY%V6M:'C9."I3C0&
M&?$.JPBR5(@R8NN:\#NM6/6BG\_:P\-D-43@_6B"AM6/?IT\CJ:GG8Z.'ACP
M;'Z",5(F&DJ8P*10N]8T1T)V6.@GXSQ2!Z4M.).(U36C-B`948F6U%R]4/6"
M4O1$##V=UNDTI\[72^I=-UH9_\C_V!^''FJ#B")JT!$=#\\]=TH2U88()-!4
MM4$`ZUR"H\BZ%">#K:W*0"`,%2<AU!(NHA=5\@]*5\^5[,+MVW%RH#5%^<BB
M(CE$01T(1.5E=HE"9Z?R'*"+<&_*R6"O$`"2E@/0R3D*QAI>.,&C@NH:2WX;
M3OH-ZQ'W!8)5U!EC.;KJR()0I2T7WT_7XRV=PU&_87T^9X-GQ6S4N:Y/`,?K
M`B))NPF1T<KD<J)>"V<'[I,E4:#32).S$DB03*2204/T1ZO[),ZY3]?B;'!^
M!-'$H\N.R$1'1-\AW[26,\(K2Z'.LMY[.?L]-^*D^2+,GWY^_.5I6GNIY[GX
M"E^B/.Y$T&`T49"@Y4H@5*GN&.BNFW0*;9?D:@@G!,*]Y-QH#3P$O&#&%4C#
MJ*L`)^.\/JPSN9H]3AXFTZ='1&\?QO=/B\89:_IB'\8/N5,VG_K38W/H/_Z2
MF_YRWW2;+47D_M3EMB_%_;QO<5_[_\!SZQ*2"D%(1,$T<DD=/JJV#1/B#8FZ
M+ZA*:$>A+B'`?]`CZ4P2/&)>`3,I<>ETB,:1"`42$)%$;YF(_G,>1K?BX77>
M#Y9"TXTND[<<HE2:E_N!1\3Z[H?LFJ9_'LFE[D=PB7-F<]EW0-?24Z':^T$C
M8=!W'/S:A[&G7W;H$0=TAYO\>&ZJ$F"EE^V8`&U`U-#?F&Z`;=-X>@0AIZR6
M?C^?3I:?D>D/3[_^.EU-C^INF-[K[FO$(%I[;X@DP3J._][&C:)1E<,LH9LM
MN1I;@QNS]SJ;/";CP"?$CS%9="]EZ3<`8:K<A!#F9OSDQ2#'\N$#NF0&DO&<
M&>X@>!=;/GQ(IN)#XL%=GY%-E=:J_P&!VGQV/YGF<3"Y&?P`5R(`8Y)&D-P3
M=%H<">TM(L[8.CR3!\2=R]4@>A4,F$4'2NG@@G3HO+>8G'AB:[^7<2+$,RBY
MV7V6(27*O%<BA>B"8JD-EA+T>RO]ET2=K38GLG76??;*"R*%=XS0B&@7M!#M
M/6#65\ZNX%6N\7H,G7*A(>#)<(&/GY$"),U5.^W!1,ZK(6+X(0K79^29%QJ/
M``QU/&GT!_/D7&;+0"DJ1*5N&H@\CJGSBA3`.<.XCTI12YQ"52A3<%!_ZKF,
M@D/?K>[U.H?)&DR8.Z#>XX<`SS2PJ'V9B4X1&E4)*4.8['N5^LCJF8.\:3_X
ML3.J:[F>U+5;W+HB/P\[A\T[,#A?^</\N]'7C^-[]_:O;P\A0$^3]TD:*P0^
M:$12P0H@MU+V-R8)NN']/`X/"FDQ3_/%EU$%@D?+R?V^..HUID_OM-4989/7
MR29M$1W+$$RQWI'J3O)E4_Y]1]XR,2RQ(78O+ZN_75]6/E_II",AP4O%112J
MR`JD57ME1=\*>#6R$C?1*XFP'6^;,IQJJA@"2-U6&9%`;!C0*\I>DZQNH%?)
M6@N)>FT9/M/HQ$7%B@>A!1N0E>:WEU7(KO'^\7W7EA;S"&:`@28,\;MT^+J7
M6^C1;;F\Q5HS?`UYW4"[=$2KSHW(]>,\]\.',@"<.!_<Y:W6M>1U&\L%D@%8
M;CC3``(A!/,MP`2FW=!M/--R75%>-]`OXYG(KIY/SAJE;2XF;J&F,\Y<WGH=
M*:]E^_L_C!\W)3>W-%N[Z6$;P<E(M)"03+(JAM*4;8BIBXJXZ"2(C^;Q@I*Y
MD@+MEA+FQA(=O*7<4K#&"%;F>G'JJAC-'362TY<5S?5L4<>'1YN=*Y\A5Q@F
M'DDLHPG0K/?L-Y#2O+AD;J$TR2-6\LQ(Y2F::,]A<YVL"CU*@R!=7UDTZW;\
M%[,Q,3BIF;1YZG:$(,$!+]Z<J;<3`-HB<;1,UMQ=1!JW4!&&[S6E02+(,599
MHJDOD7GE0U58J(0RQYN5BTGC1J9$D^A\E!Q<I)SQ('@J>1>\&55(B)-N$O]6
MTKB%;BB&SZMA0FAF+5/*B9*TI4)#%48T8/3QUF-(&EM[!K=^=;V\S<^7^[?@
M7$4HVY-Q7>[UD2H7K^<>=VI8GK&D<I&7I8Y7-?W=5,GQ+%Y,,I>^/)N7EP1I
M6*0*6+(R.G0)VEEV0CG:30/T3XNX$(>W.'LK$6T&%7.\)@FKP9GVZ6`*6:[R
M4_IJA^_WK-^D-]W1M]MXY+0728<@N;32@]:RQ--SHJ[>,;KO83V&ST,"RBF3
M3[/)W\</WZXW;^?"M57$OHU&V]G.=J=VMLOC:/9I4C[<]"9\_#R:_?M\_O#[
M9#KMB=+?2,(L[[FQCBLKC/5Y76F9)B8MEY7MH8P=U+_KR>D&)[2\:L9D=R(Z
M18_=2<(U2$3104FYF>+O4U5J`D<8_DM(X(6D?`F-'U[0DA0/6N#SZJWU>:QY
M69VA\C2%@7;+/YNDT8]Z.9MB2&)4XB/NJ0J6F9P&;=]P3^H5)4"$Z0=Y%Q+%
M]<0\G]VO4K5;/_MN/ON4MVJ$\<^]Z6-Z<4.B$D((&Y-"IXOI:+QN:XBHB,96
M+40K.W(M>1^2R2LYC:M?B>T3\H+E.7,*8D+3[ICG91\7!U)[@>J:IOXF)]0^
MV:_//$EE*7H55FE'29[N$TO#D#")]2RN/P)47D(D.V+WH^7G]A>_G<4_[L=Y
M._QZB-ORXWS]LY:4D]NF+!BN:`3&''/:<G0\RJ0$06+EB6^Q?R)IEV7K0&>1
M94#`>1?1J]*"&A]MZS]JX6EE"A$.[)[MLYF;/>3_R]5BOXVF3?G5HQ\M%E\G
MLT]_'4V[L9>L^6R@T,EKZS1$SD`RM!BHBZR,#=&IFT9\\X[EN<8U0X>(N@0;
M?*`P2J(?US0[48%OO==)I[)FR:/"56P@?M`OQ<;`]`5N`[)AG0J"">5#4"5E
MXH%5H4U03+[0:0Q.R`"7',\[F*@%1C6:PG:>!\A4S_.`'(JX"ANKV5S=];PG
M&S/.C(M.4:UDT%QX0T)[2WA2=13E3G2+1T\A[X)\';!FN1HV$A59H('D#<A"
ME6A8HJ32MSLF!5R(K^DH&[[U5,H?%\T2RIW1H.6'R_5/E[3[J!/]$VURQY_G
MTX?Q8KGZ6%VQNOZRIM%D=P/G.,_BM^\7ZW7-1[6B$!8``9=.CCI""8(NXDO*
MU_M]DV??"?I6;HON'`D<EF&[C'G3XN)'>9BE^]K]8T?6[U]6>-()<%$GL(PI
M(1-3L6WW)'IW)4_;QY,W@=$#<CN>ZUT)SK]\F3RNJIAGS9HW-"[CV7VU^[A8
M[JU]G]X!B<[:$+0-1CC21E:U4[*;PQV.))]$1V-ZMQH\(OIDWC;35_&[\XS8
ME@[J21?Z'Z9C/2+O_6CQXZ)1@H?&VK9Z?/!%ZYRW1L,21`1.:![&G_+TDK6)
MH23NK:[$0]\^\\-T/9^/SI/6J3ZV`2$M0@L;T;@G)1UI,TN<IFA?!Q\WM(G;
MQ4*"$R>IHRJ!,E3IJ$69Z:=Y=['Y%82SFN=HGQX_SQ?923I125DPQA&C+4-R
M\YHCSZ$HJ9`]D^K?44*Z48X!>LZG>U`I>:0$"14I&4!/0VL)+>P5ENYD]JY!
M][?H6IXLZR@(^DV!62UC'GAL>+&;/"AM>F@VFFL0;(#B%27G43LHX>",H,F;
M/"HX>8NN.I-%PFZGX'EG]"@`/)/<?1-3#TO8!^,=%TY'0;ES`5AI)1?H**FS
M)-R=E7H>W8.R1I^!XAN6&%Y%E5QP09=;:'78.^9U6-9'$'Z&IZ;0[XH6-4"C
M>TFH"M1LM@](6[63=0+0W2\_D;)!YRM)SHC!^Q5(RM%`YMO[!2G6\S0H@Y-(
MZPX\.WMDD$J6`5[XW,'FI#5Y9V8!+K);D=LX5;*2XCYJGD7UD,OD$+_B<V^-
MY\[ZR)47):Z%1JU*\MP9ILWUJ3XPZH?G-O)(',)#CLH*`5SI1>"R'@)V1U=C
M5JY/]?`2=T&4$SJ7`T("#<1O!GX%5452[R@066GS<\FVCZO=SSG@^G&>@]O(
MQF(^G6YUBYT^+TO$P/-Z#FY4X,I1OQDD2T3=7JNK)_LYY%Z=]:%350$]/ZF!
M&>5IL`ZA5YF^CX=:3YC4QZOBRS-_:(8=WJL\#U;ATPPB,6I**LWHY"OS08^V
M>*^"]:%SEU9"WNR,9E-[8R'0N&F5USVC985Z"=[QWZ9/&2V\SW-9Y[.K7']J
M+*,RCV54""`,DWFDY_J1)K[.J**'I8_6A',XN+ETAC0E!B(T5U8A&,P#H#4C
MK:8`J&[G7+;[!#J36O_4XCDTMR^X7+:*VH.N%(F`-D*5R!,)55T//N8@_Z&D
M,VAFF&(J0W*F"3ZN/H#>K)/GJHYIH^4EXH;BF=TWJS.:K.YD^7^;%G2Z[Z*4
MT$SUR^ZK&\_N/W\9+3HQG-%TO%R7*R/IJ^C-T)^I-H[YI^4C\KVH/MOY6]^/
M_G>^:#^\-=.B_4_KP.RA];["D`R)$%@S]*I0NUF)9#3SMO9N'3U&KO\\@,7!
MC<)&HQ.6B/%$I+R54VZ6-N'_[)ZUK^SJ!R!./(`5[_WIP]G#9NA8_EE'DL]9
M-DN3RA4W*3D$-H*AKU+VV7.7'/2*;R<;]#K$UWZP'J!Y@@KOZ-_!JZ^DC""3
M,C$B(G+!:=4F,"1WS/9K'KQ:T;VVJW_P`""/,:8AZ,A#Q-,P2;?KE2BA<<\!
MZ/]G[TJ:XSJ.]'^9.R,J*[.VBR-JG9%-6PQ+/LQ<)F"P*?8$!&BPT.;\^LEJ
MX%6CNUZ_WH!F@Y84I"@`!+*R<ONR<OG]`E[*]LIB)-4V-L_8,*B$CI&@4L4;
M(TIRXBUKP-/VR??SZWTLR/`U3W][VSV\X-"PM8>AD(2)#FUAIVA-%,*+5L6&
M?GP_M3PP+/G",C2OHR>?9:\?/WQ_BBZ9'9X('X5[D2!><::/M&[M5$P8%!8I
MZEZM(*1S;:*`<33Z+*$MK$7F6[CT]G@Z?,5.(VI79P\&HX$\!C;8)J(#UQ81
MZ91D'&&HZI[^7H"?CZ]9$\S\.)O_]_O9+Q=7>;%@[B`&/G6:?;BXO?^Z:*IB
M#JQ<QN/?\K_<SF:[:#8!47;*!E*"43.`#*TQJ:ZB&INW#%99);=R[XD?:ZR[
M8P!9*W1K&/K3[/;+_')V]]/-U<:!.YN+MGR&[$+MX2Q2,L5&M?RIIS+2_[Q>
MB[:1EF-(GDSH@+$Q.,5?"*ZJ-*D6XCECNO)TR8*]#LE?G.:MVT;J$XA,6J6(
MQFG`TO((=7-*OVW$=BFZUZ!Y<E=%W?WGZK\JJCIDPTG91(.#['[8JZ1U@[`;
MS4\!CO_XI4[>/VS((B-\FP`<UAFJ8%,2>GC>L2+VF1JJVS]7B!VGXC!*I]Y4
M1:0Z=CKGO&BL8(+;N%D,LG^RX+#Y`%)K:\0/U^Q3%]M=A^S17]GL/5;"+$.'
MZ4&=>[;][+Y#?6-)!_N>`@'1"4L<M8)O7?>47(#Q^'7)G-T/?N[\6MW;OC&J
M]!%8^$TDJK--ZU+6(5F`VD0[RB^AG/I6+'OM_IFUDL$$S)/$H;8@5-YG55K]
MBC%Q/!<HB%Z`.X\5;XMV]L/FQK(-RRZ3P:QM85>7V]LFA&[*&!L*":OV=XR$
M`VB<'%G-\8*R.N;H)'.7C&VE*]*R0^X<&ZT-#-F9QM%I(%M9*.K">P@^)>U+
ME$6V=)#D:+<;6&YA[8UT[:?O1]D4XXQ%J,NYI7"U"<"`$X-<2H>Y>[0S"L<9
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M_(#K6NE6QG`^+^?=/BEXKY'<F\=#!UUL8,H2P[I"!7PK:X$$:B.UL-((\&+4
M]A!_Y<F3#8FHGMSZB#;X[);5\ZF;([$Z$E:^#K43O!6`RAJ(0GH.W2)JGX9L
M'V6QOL!BA5ICCZ%VRV#HS3TAM4L:E8[!1>68ZM`&T]7.J0,E=VQ*[)ZCF3=2
M#"2EL8K=8-`I1Q'<,"_'H#";.3PMO4=1/"W!68E<%U742G0PWH7Z4C%,]TIV
M\^CZ:0D^EN()'DOT1GJK&?8*;60BE1I`PC(YYGM*BD<I_O1I=GG_XZ?\S\O/
M%:E7^/?C]7AIP`'C#<@S[Y7V(AJ2-5785L.#Z^O_P:SF,_<A[@5/M<5)%G`F
M,.ZR61N7/0N3:4%M'H&O[V`MM7SXL9Y>/Y[2_,]BG8-`4,T?2*,4A*3!:="&
M&HC,[#F[U*)<FZ^[E9YCJ9\*&CTFXQ$#RQ1C<^D)<`F(=%\DK%'#"U#_E.T=
MWWG+`6B87<\^S>^'37G'KEC'&`19QGH@2*J`NI0AJ6J2+IT*K8'IEZ'Z5(R8
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M4%/_O]6:@9V8L;J<]N'R_N&VEGI?73Q[V5CYU(^?EB0N_[16A/`:E[A2SO2D
M`>_O/Z[_P(>_W\W^]Z%^ZR_\6U=>M?;Y;1+A@=@,FV!5$(YA$D&M>0W2Y.R#
ML1N*7*UY&S+QT\/_?;YY^*_/#S=_7!3O#S\FSNI?^%U`=A`04Y<31%=4"C&;
M8C'5$J_`,H,4-Y7+(<AS$I"SO]D-)NNEK](%\@Z5Q,#0->:B)$<@KOBHM=18
M1J\2?K_(<U=11S&)XDDA(*94!`!C2Y^RSREG/7ZOKZ>BM;)H&.HVLIP^M8M]
M[6L]ELOO]//'06-T4C&`-1Q:HG4FLU$,QJ>`-3D^BF-6XO<=F;7*X<4PR=6H
M?CSR+_/KB^O+^ETN[^=?%HF!O5%K7;Z-/AIRWD49I;8M]TC9C70RKQ_Q&&I?
M\]Q;H!F6#$3))B*E8HD@EO.V^&K[49.O=6S^_/Q^]G[^I1ML_[>[V:>'J_?S
M3Z^^B*5]G\W$W(6OCVT2M?!Y1:=^OKWXN+"-K7+\V9H.5]`PI[,G*50JI8W=
MJ1NOW;_]X0.H_UQR=1=>O#SS#CGT4`CX?GYWWY\[$2ZVDV?G?+`YV;8%LTZ9
M8<S%YQ9O\MP_U+U_5?392,\N;B]K0CC-OLRN;E8:,9828'7)T4.!9+1E-?/#
MG$"1K1>%.?$V!6#1(\Q:?C]KONANWT+,I;Q$)6.2H!F-!1^4-#H,\J*]"\PE
M^R_$I=7RRZ6K4A')"HJY)C1J%51NI=R9V&3_X0.]22XM%IBL?_7!PJ2,-#(4
MG[117A*'_[()DPAB87SDOQ*?-HA3T;;NCBV>W;W+QMFDV@(Z"UHRG]XFFSY<
MW-=<Q\>?9Y>?KV^N;G[Y>K`L$<>]EE)2'/`J@TGH,M2MN!BT>KN.[!`F;1`D
M50>&I1""5(YDH:B&Y];%6D?S9GW<1&27M9(:BA:1+4WMJO2^32)+5.0K1G8<
MY%X^_/JP>!+=7$NVM0Y19:],8E\+D>$=0&X3\]F5Z#[^I[6WF?T)?(WSO7P0
MN^DQ.PO'H#<!A&AE,*2@U6TR(NX*[]1:Y\QWP*X=8]]-S4<<LB0.73"*Z!-$
M]&T:DI;8-W5)\[WQ;W,PN/D!50KTH!E$1)6TS#*7QC2=^RIXI]3WQK6)H&=S
M=3CFF*S7,4&NBYY8X@;<3<*M%^W5LB;[O;%MDW_?;.`XT@%+(A@A3;0A0AK>
MZJFRLV]?L-^=A>L=_J;"+*^2,CD2.L=J23+%-N,W(TZM!3H#-DT5;4$,SA1'
MD$Q`P6B\+6(&Y;#?7+[0IS,3@^<5!Z\=%U`*5@D7"5#B0B7:P"EE&'GV<<'9
M6>ACV75<7%""]45X)V2QB_(QI=K.M^+[0<]2GUU@<"P##P@,,$3'QMH4&25'
MG]F;5KC+:NKZ9K,Z9?$[8]LAD8$L0>=@I%,&E!4,?H1K%6DZ][!'X??&MKTC
M@\22XWPVED`1HQ\HK>>(-/6=MF#%=R=K.T<&S!*??$(;ZH,BNB1;WZJVV&_6
MPU-9LW^_O5E?%+@M1Q!K5ZC3GET:B1P->+<<+E/Z?6$:8.=88$'.\;2?S,]'
MF1SI1%E!E,"P(BC?\B7L_/M^[ITO]AQ8<9P/=ZF.OB8R(!)C5.T@-0L1'':"
MLNC$?T/<.<1!>T2;-:*(1`S+G8RII3MLZ1`"B-VA^SFPY!#G"Q@QE1P1"SHA
M4`8Y0$R&4ZD3$Y3PEEBRMV/-.GIMR4>')(5/(.+0J:=3H7Y/)H)[2PS9V6D*
M9ZV`J+RH&Y7J3@G;!,,7WS'B="R8G$$0*0IC&;8DK6J3EG(-*M?M85UR3IJ3
M7M\I8;!.F!U;?VN<"89OS[6$B`8.@[JA(K#S:\(YL.(X]^C!:J-,,JFV;OB8
MI6HY`M3KW:*G=X_?`+]J*W*V*>1D3);DR(7F'MW8`I$]\.LYL.0@;"IS+"5D
MGX61TN687<.F_,'.GDBR;TJ)]O:/&@1Q8$#6@RA!%)\L++.LOI^W"&LCGLZ<
M(;N#2@S2*>NUR!PPU'*Z-I!"<]S8Q]>(KV-`_C+;LX,Y%QN,<G5*:1$J)D&Q
M#7<-(G:P2>K=GV*8F&/I/IE_E`R84^(0Q\;HK5`49.M"R[;WCU+N;.Z^-1N.
M\XV!=9K%FO^I&Y1#$M:U/9I"K2_67:Q3VCDC]ZTY<Y!?3-FI`%`H))\M"->&
M!J*1G<E;+T<_8VX<XA*+S]IXK0SD"-FR&X0A<B*3>_,!]&:$8V]O&&1.OB)`
M,$GH)(MO6^ZU9!O2CU/8.0/UK7FQ^[MKG0Z3(2O@7[*.E+"M'B(6=R!0//;X
M4R`Q,Y0G4].G@"IG"B8.MZ9BM%V@J\">[-I."1!%3G5LMG<Y*:F2\S8L%ZBG
M?DP&[)[J^-9L.!(<%L4!DC6*'9_F&"]XN5QS+$?J+A!/9N.^`3"T6EB0'.\J
MB9FCI3J*>6"'H-#5'[P-1ASB^U*0P:1`3A*6X"DS)&RU7RIW&B,!=TZ7?FM^
M[.W\HHXVU"6!*$BZ(&QVRS?(8CHM07@SO-C9^:DB0M:N8/"@'2-@)YMJD*"1
MJ<SN8$M11^?_8WYUM><H?(40)7EM#!/IL&AJX1J.&'F+<I7"X<?N3LNRM77[
M\IP/-U?SN\_SZU]^>OCMMZOYK.X&F-BALPK!+>MB0#Z.8OS&?PBQS5WA6^@>
MP8VT)SS9KFN!5K&&=,G;3-DX/I.O56Q##D[ZD1J2TYWFYNIBYU,8H8,U.E.A
M'+V*H-I`22E*;R;->@76GF>9"O:LMY%DJ&/F3$&3S%+^,:81#667=I0"K,S6
M>5T%R%BB4RP800H7H[;85@-*F7._K^4X!=CS9`<I`!D;<]8L.]9'8QA?MJ0,
M:D]=[H&T,Z<\TSYJ$#!0SEZE%*/7C)6C'=0`O87^,4K#H??SVFL4UO)#1483
M$ELGA5DP`,9EH9L5_0R"O>YH0>WM[&-Z',,PNYW?[+^NAI%*2&@ULGK(K$(6
MI8T+9K#:U909L?:N/47-T62_>(_\:VECW4>@$:,N&('#_FCULF(BN@XIDUG+
M?9V&C:]M9I/VV8M%D6*L>X5T&U=&KH1.WL_Q_(=%(UEJ(>LF>1^C([02A]<O
M1+4^MGA"T;_]\?>QVY0L*8\V2E\8U""#WB$_)"/'9GT-B*3CCGU`(:`L0(\H
M(Y*/"KUO18W$04"_C`,WQ37]:]-VLDZF>BYAIA24DRQ_CHU/&"K1)<6^0VU3
MA//:9SQ,O3A&1I2J0-$R!2U2'NP*Z]WDWHF3G6L?O2E@!+A:-Q8U>%6L;=M^
MT>?2%\!+A/&X?^]C3:9[M8'"<:4F1E8L/CK99L54"/USEE-VW(L=0M;)P+`C
M+11:,+8D;:T)-"1SI1/4C?I],4TY"2K0!?C6!(9,Q(#2"FR+I1)0%\YM=$2O
M?KJ]_(RS,9IH2BHZB"Q$S@V:DL1^%&_=Z;;GL7[X];>+ZH*>5:H_?JC2]W[_
M\G/+\8]C+2<34#.&L6JX"#2F7ZA$1HZKTE:Z7O`TIU+!$"VQDT+P61I4R>5E
M\H8%N)/2-\26P]`#V0PE689@.M5!Y$$W_.M4[![.WQ(_]DJ'0>9@N8Y1LLIZ
MRCK8EJ?T6O;6ZYLKS62)+0-K[[QCO*QUJ`O6")J4Y]!C0H7CMOB4ISF5"5`<
M>FOB<#65F(!=K,,!.C"JT+OD;\^5+8>9`,90V8>B2V;,G"1X:BN^!.`NT/EL
M^;&/"4@JA0S11C*"P*4@I6I^T_<IA!=6FL5:\ZM%'LE__)^'QYF?^P^HE%`?
MNJ3)202^4/]L91@R1NL,^CN^X]%3C-/S`J2?2L_K4J]:\U,?%XHHKB:GV\A_
MC5-/XF?%@X.4VH!SAL-N-(!U@X0#U_RZ*+I+/9SMX??18-01.80Q*D&FD$I.
MJJUH]19?5O9K./_A]N;3_+X_YY;=-]$;#-)Z(U1=LX3&P7`Y2D`<67FZ5J+P
M[(?O1=24X:#$7Z23DBD@9?`FMZ&K)L3^H<H)C<<3M64EC&(L4TK6?+$YN)0L
MB.'US%+J^\Y!P#IF/I"JR?TLNC:@*!&"$!:495EK[_7!V*Y)40HBM1-5/]3"
MGUGU$8]+6:[OY]</=9SU;[/;A3C>A=FGF]O9X]?]?/'/V=V?Y]<WM_/[KXMW
MB-G=/5O(U>\R/DUZ?.3SU%V85(C=H"_9"2NS*<$.>3Z-9GW=7-4NNW87)SS=
M67%U2I:2,%)7J1;D8X`$,;<"/^]]E\A^9XVBW[FZQ6XX*!0-6JLBR$*9X_R!
MJUJ7TF7:WO'GW>]<W;8@D(37Z*RVH%/T))9U&CK*OIKL'6,K<T9<Y>_WM-OJ
M:?SZWC:0-&)0*@N74RXR!N?:+.%$N>^_P[6&E`V$'$SL)!0(P&`_4/&B1A61
MO!F2ZB+KV"?565U>C]@M&FN""MF;I)0J23`_%YMDGBH5C>H?])QX55HG*Q<\
M?Y%,S-C%5FQ&S69(%@D/V$4EFHZ@=7;WX6*^TS;;U<B)0`HG(0.+`4-5+P=)
MK4WRNDM<CY'W^*/W(VL;ZY2!E,D@*E(<1-795<O>Q-2]IY$Q&V1RFKB_SBYG
M\R\7?[\:V:PVE3Q'4%%$2=(K$V4([)9S>Q^SN7,<XY0M?_HA]$UE]G36WD<9
M-93(IEB"URWT3,%TH!;%!M&;(O)V=G$W2[/'__YP[2\OZ[81YO?7GN#_Y^[*
M>MLZDO5_F7<%W=7[RP"]`ADXL9$X$\PC+1U91&32P\5CW5]_JRF=)GF:/(>K
M;`=!$$>+657=77M]=8@>$I9K%6W4`,*C*R\D*\6]J.OA+`&5A]-/TKD,#"W]
M,*C&F0]:`TL*0S&^7HRK5*S>$A?T.@SLNS4''(+C$KP&(X-F(I$(7)=96*5U
MC49%E*F\]T&R+L#'P%D8"C*@6G/:>8$V6/@R$&-4K#T[3CO=W)=A8[9L[K94
MT6E/(TBBF=?1YN8=ACXKDMO&MR[6ZE!)?L"A[";N<DP-I2!U%-PYQR2J>$%"
M4K9,W"6,<2HW48C.!N/+<16:^V8VV_K%HP])@@*3F)00391&F;C1`\+J?M<;
M12J;-4S6)1@9.!C-I7<,'S_Q$E6:E&M@`!K0)E>,F$$]=CPCV46?+-"E/^$D
M#-IC"#0[WSK$W$A=4A`"4.IU"J+;[-A+SSF4#XA>L&"\LAID3-X8&D3!A&/(
M1&VWN;P<X>]FS6?TE=JS>O$Z,9!:S5<]3[(<?19:`"$Z8N3'?4R,*,)**"04
MJQ,7SRT[?1P=0N=56!TX/!F$RAI*V:"4)'@+2P\_`^!5ON]&LBJ9<'E65_ON
MQK>+YLZ/Y@]I.GL)HL_:ZP:&XU.RP*(U0DH"7+2+EY*)J@IP;X"HH6,]A-"K
M\#J4QL6(R*!#9)/48(/F))4UVY37&`HW6E^!U6J@+'Z]?5SFU=8G#I,1B?J%
MH,<:E63@.0ME_I%96\\_=J%##B'I`CST#@2II##0<2$%;PE&.XJV#RZOH:X>
M7#7]?0(/S\KT*0_[S1^:N_Q3^=?>WN?QY-F7[OT:[,*BFEAE3$(7@;C`096.
M1BU9#7S):)76':3H?`[Z#H$G`]+E#FN70"4>B6V]!:V<KT?/"1%=M7<B"T?C
MY4!PG&-@&1UZ-M*;7#$K%1DGZ^A&JLJ^KC_["*)Z,>&Y3!A%.6E#%!BV`PMM
M`9IHK:I0);=/RR.)^FWTOU]&BV8VQH]'Z]&6R<^XN(&M%K^C8<^;1J*+H$K)
M380:GB]#U^TF^A#:+LE5WUGDX48@(3**]R,Y&HB2)=""&BZ=,@I[+O/I;/TY
MG?U54`_.."(>4&G['%TID9Q89:M:9K2R57$?8\8]O.RGZ'P.>G6+9Q3#=RNI
M<\8&B5'O.NZ5M>F54,6]IW(P&R^:,/W?Y&C7B.&]P0"*1.[1,:($:!DQDMS6
M*QZHV2?TEH2C*1S*C4BAHW<\6."*N^AU+/T/,4%U+U@WZNXE\$VSP%L_?WOO
MT6$=+]XN%W,TLG>[5S=7W5J7&J/+59_GNM''9G*+[\X]_3I:+&<-TE6^_+2%
M%%#*3:/%"-VSZ>>'G9@!8M,!(30I'F,`8YC*T;%O`TU*:#T6"ITP<TA6VX(=
MCSZ,'W?XL(/)ZN@39TE22UGRD6>0IS);K.I7Q-`J;AN8C8\^G*2^AVTECUI(
M9[U$$HQ$DU%*A,;6L"SXL*4XEJ2L=1?3V[\>IH]W*.7G`N"1>]S0OS16FQ`]
M:$LEON`"&FE$#;VM\3'S?73NI.=,XON$[*D0:*,Q]"(8G2EI/2_N,6A6>V:,
M=V&R3Z7>+S%<W?76>^T5U2&D*#U'E\)*)EUHA2THK8TO0_]X[SU]H>!H`GOC
M#0R:=`!T#W@>DS;4NN+J\E0W9'$,-TXB\`E#PC\FM\UL,1I/WH^^OIL^J\)Y
MAOPY1;2&2:]XBA:T,,RAYA<;`(D[ZD&T,S=U!&67XZCO+)*)7KF\_UE`8))&
MHMOX56E7-QEP;2[$T73R\7TS^Q2:#]>U97NM#O4&T/O.N0>,8`0!<*4O$*.8
MRNH\)S<W6=]@X1J\_3Y],WIZW]RZG_[]TP`O+.$3\9S@?VS$""(ZITNN&6+=
M(]>M5![$RTGJB/KH(^2Q%[Q<BC"P96)>HT6H=/\>HG:^\T-HZXT98^"Y93?%
MJ"-DW*92:]#@H+H"LK-&[!@"3]4YW.(_)J>9K+2.)1Y3B1"9JUO6]I!WP#,\
M58?DN#N8:'*4G2S@.RK+L139L2%`RPYLWD%T;CJB3ZL"U>C1+OQH-GO"+_Y[
M]+C<7=S_07UB*2WJYN0\GC%STH(L6&)41#J(L7J0P,X4\34P5EY9S!%%*E0$
MYY-W20:\N:TOPI)FE2]2A1Y'B[G;87=DOD@D0X0V*Z`OA;YT-&MZ3:Q2;S?H
MO&Y7Y+N??R1QO7D&+B4%D1&D%0]&!EF`3RFJ^MJ94.0(TJ:3YNF7T>RO9I&6
MD[OYX-OOBG'K=1$F?."1FN`#4WCFKA0(4W#U3$!E_`?(.8_TKI`W27>@75)"
MY,2KM`J#TN*QH9-<8R28[IZ&8RC_M5GDTLJ[V?3+^*ZY<T]_S'/U.8TG(WR3
M9]6^J,.`$+UI`E*C_YDX^)8/-,L[C@`Z4<KAM%V,I:%6#($>CN?.":=C7B[%
M@*U3T+I&'^OD<B_+T7-W[GF'I!-3-%F-C&'4#H;$@AJE0=8=,S?0Z6$XG+:+
ML324MB.1@!$\,$>#\-Y37[#<(:6*)4WT-5FZ1!E9J$#`\00J8ZX:[C$(:!TP
M)>HVRANIQ$%O::B>>@Y/0RT<"F-GZB#GC7*&-0C1=OTRHVG=UH3Z01UT4`<P
MM6YY/[IG'4^``G6).Z:EL#:PLF\)4-_5W0L"1*4%UI]_)&6]/8G&.NZ3Y9Q[
MRV+27I5954_J0.S&:`*7H6R@&QW=W#Q&B!$$E1B]1D9=>W_QH=9P`#=HZ:JC
M/IFR7IFA41()0T,O0:++@'JP3"FC-JQR_#>F"PE^(&5VL9B-/RP7N<GN_70%
M23U!#_;Q$>_I;F?L@+M(!$C*-5Y!;XPSZ"N2-9PYN!TQ1(]4#Z'P"OSUNA`L
MMSZJ0)7&ZY.4Y:F`\24)=?N,9CU/[5LP./`P4'.D8%D`AL9*2YE3<J5PQTQE
MJSK)_>^!O=Y.K\2%X,D"AC)YNR`+)6MEO"=UUX;NT4?'\X<_@N;A[>S=:+9X
M^9^-H/7E*R_.U^CQ[>PY5__S!$/+91YZPKAOCH;E>93J]X<1?L+/\_FRN:-;
MD@BOB40J\9(8GW<7&$X3>FX@VB=/B=LJ5LQ7%*^2U!UGX'J"V3Z`96;E[7TQ
MR.U`^B$7Z>=?TU;-@S*"&BXO(Y"*0M#%ZA(KZ*:>GC]_"/*]P?$^2K;H+=\]
MPSW`>),SU,I*653-1AE1LGG$F'KS\@W3:KMNO(.*4ZE\+6P(R;5)G*F</E7$
M>:9*R$H"'E6MQOCWP/))4!"Y@8OZ7"42T07T'[1N/89<+ZRKA9UUF]^*UV.0
M'P07BIF@G:0A2:8P,G<E=!>TGDQ%W2Z^,9?M3[7-1+\U^/?=CE?6`7]M:*V!
M%8&C\;&>:8L*)D@92W>9X[)VGFEWC^JE6.Y%E9"6H9O*,SROP7\XY:6?&#WK
M*@&1>VRO\]1>$7EFA9U!E5?1YKX1PWSI_:2![%AB+0&^!YY/4R^..4<3Y+"(
MH#N(]["4!0S4<P`&U'?!ZU$HD,1JK610+K"0J/"*%A\FW^IZ`DB)Z]C(P[D\
M4[T0(B)0E6?<HXA>*:I*,A0=AGI6B$E]A4L\$(Z@'4>3IH.V-BD>DH?BKTN5
M7'TP%-@5U(MX5><E2NXT\Y9JFH&$J+>JC<$(BS4(@5#?!<LG:1<&:,Q(;KA4
M`1U49K4OVL7O0)6]H=GO_AZX/0I]4CD3J5M9#>I3,'1]HH'6TV%XBZ_VUEY'
MO5`7K++X;F7@`GQPTK:S-X0RJ*,.>A6[,50^B<GEI6H8'\@\D1?\>MZ0:%%3
MJ8R\SL&\HO>"*C5#FQL5O4?WT@=ABB_M`ZMR]]30JYW,U?5+RI,YC%ETC2T:
M.YD7IY8"67)U<ISKZZB7:[HO7E,6:%`Z1.*D0A^\N"_$\/I$\;'I;WVD9^J7
M7,=$/:*<MSI%EBN&MHT[6&!U(A9MY)'1T7I0\Z0N-$^#YY)*`4&R1`UCI&SH
M\6"JD!5(U[^J"#B:OK[6B8P>RH+0D3!(6@3IRY`))'1OJU2HD>I$^DYN?J7"
M`?#(=;`.DDVT.`<LKTVO1,A![B-Q3Y?7@53V-A>[!-8D9:EG&`VC[5[GF@34
MK>:LVPEY()5^^NGSK'EH)O/QEV8#(FLZ:\8?)\]'</NT@K9$LG)Z=W*W$^AR
M-47S?O3UZ%2B5LGP0"`:9TC4'&]T*0[0':V[-XR)FM.+\_&M1-5;QLL-^9)I
M%2.U5@DGJ2ASUI37.$ADQ\W]>TAJ*,2+WGEGT18'K?+S<:YL@E:^'J2%KO__
MMY)4WYU"J^&]<"EQ)A,A!E`AMY(2CM2Y-D:E_B:R:F$/GJ>C3K.?`G6-]C%%
M\/B$N(YZ$]X9*L]-&K*#V=V4G$YQ+RH_*G[*.$4Z@S2:6*9+\5MQ7<6R@L(.
M0W`HQ6@JIMLNS`O(Q-%J':AE+$27I(C6Y*A;EWME9(WGPW<\P+W4G$MX/[:J
M%%0Q)U&YH@?H36KQ;DADQM?+6]@.>5^'\@&EQYUBB:<\-86A,;YH10IT(Q"U
M(^VQPY!>C?)>C-"8<N=#I-J"2-QXSLM>]B#K+O$;NLL'.(ST=Z.G5<#P?OJR
MQ:V-))IYO2KHF78:FEO@5YAVX5HI)BR@PV.T%-*V?1\\D?IIKUIR-KD>8J6?
M[W>S+*W%T[O'T62Q&>H?_V0LRP%_U.BC`HE4!E7P&06I)^&ZW96'DW8QCH90
M7EQ0!J-<_$&"8:TWT:XK4,17P:_HK$#_9AR52YH'VD>SVP?\I=!\:1ZGJU^S
M,[2Y'YN7[H;%#'E]/WW7S.ZGLT\9>"8_H[E[>O_TN5E?Z?=-MNT8:C_-<Q`]
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M]:A_;G`Z4NX,-,801&D9J<#XW2C;/FG._%9*I:5\@.)G,DZFME?.`I0BA-$0
M(#%NE""IY.?S2ODK4'O@:,]V<PK>!!=,\!E#5BEC8ZEUH(C[%D[M^.SC:>N+
M210P+1SSR0H,LD7PJ>`Q`PJU;Y9SF+;I;=/<O2"]/SXVJV#Q[?VOT\5>_.-G
MZ\?_M7PLUB^/8*X;^3H9\/?3Z>.;Z6C2L5B;IA-_\7;QO-P7C<KZ][>^]?9^
MC1R__M.^O_7WY8=Y\]\E?B-F15A,[)[O[["B<E/5>><#`(&LKA-32>=N$1>I
ML3[JN@3!:SUQD*#W'D[![L3/R.-71SN-Z/.R(".0H)+7GN7E,459.U.Y6%)U
M.I'ZJ#F#[*%6>HZAE`J&:LJE\R8O]VP]0X6!>N_=/X5@U"VCR>UJ7/33I^ED
M]6Z.%K9/&5I.HJ`5@>2T8:)]L;F.4*\@Z&)I#))T+@-#:-I(+9I'C;H:A!=.
MT1(KL9CJAE,!].+T[\=#.*2GC1G),,I+!#6YX"!IJ0HSQNI%.(.T[X4Z.(7X
MH2DF;2Q1,8#/A3!GC#;K_7"\7@PF.K-`QW.0"[)_CG*TLFBGD?WC:#X?WX^;
MN[V)--9C4#%N4XG0(,'J;++08VEY6$T(U7%'IWWW0*HNPPGO2PGFI7S.*VD(
M*B"N32S#WF@%ZEV42E9O^349Z:EFY@E3D[Q$3D)0><=UP80@4M;9V,YJJ%=E
MI!=^1C!FHD;/743.P2?IVSEL'=&NU1-*P"[!R?UXQ\K+`Y*S`FFRN1DLIA@X
MH&M9UFY3ZTA=Z!945`2_?/@Q-`U,2J)E]21HKS+,.,:?:PA:5>-3W5#214P^
M@:BA.I+,$W+6)J<$1I884]*"`(GT[>@X$A>AJ7=<3#.1GXR,'%V^)(THJU?1
M,]FQ4DTK5JGC/33MSJ/L6:'>"Y46O,DX>"J@PE4!`DME[E5J5Y65@!-1::D>
M:LXEO+C=>W]W(PO6_FQ:SI#HY2Q#;J?QU_RGP9820(LI?=X-[4`1[:0N*.#&
MTJID*WC]T+XW,;P93>[<<OR8D0ESC]C/GS[/IE]6,<^@./#"II`<.OTR233&
M#G01AQ;U=BG"N[GB[T\>OXQN'\:39O9T1+]<L"G';_A,0BXVK8"%UX`MO*IX
M:*HKO7(M.?2B""IBC!3<9R`%`4KP6(!;N*4U=)P`\9J$O]:[MCIBW(?*S6*X
MRO$VJP*AQQB:]_I=T\IW^=[$<,:[UA@61Y\1/`.SVE`?0XEN@MNU-8[6-NE[
MD\<I[]IX]*48!:4B\?AOR+,?I2!`:C@8JLCE%=S14.B12R>D<(YREF>O,E)*
M<6"5KP(\HP0<1G47A/PXFGM;Y')3JJ81Q6<EF$1]0>?&YRAK%X,0?FFB_Y@W
M]\O'-^/[O37ODVY>^PKM^D'6CW&=K\PEO<[-_3K^M/S4WM6UR*S*26Z6L54@
M6DYL`9<7"8CXQS_?@?C/`0):\_UCRVD\V2DG:2Q&V$`,3P%=%:K7&,DLS_IF
M.9$?2$[[#=P)EXB(D(BW!#6#SDV;&)VU'4D,H@`4#OW["V?/S>&.415,7OMG
M@R<<_U`:#PD7%(7S(SVP-WE#3<9XOHCZ<4$#`2=7I69#I"8EQ!?$<H_"47]_
MX>RY.=E]2M9:(RDD3XR'=5$-7U5"X;`?2#@]SM,I.D<3)F5,S$0PD-.$&XM^
M14P_V,TY43A[;@Y$0P'U,?.)."6(R*V\[="%`W'^S?DRGH^GDS2=A>GRPP)_
MJ-U^>726S^9Z6:X]$3!<6X;A`;3E,Z&AQG)BI`H?]U)S!ME#2Q"-\"*/0+D@
M!>.2A5C0]JR!&D"P.XYQ.-G+V>T#ZI6W'Q[''U>]T<=!@JH8,A(HL80%(G(]
M(*WK3*K>Q::JIL**@*/IZ\/]1(?!4XE>E714&_`2S4!+GR!R1QFF"PD\0.!O
MS>>7!K$S*W9.H1,8J<NB_'_VKJRYC2-)_Q6$O)[8C;"HN@]JO1%U>C41,W)X
M9#OV$0*:(G9`@`N`.O;73U:#W3BZ<;(;@"2^2"0(-"HS*\_*^M)&#&JEBV"9
M!E0=Y[&TQ$UK.'*A.S:GX0%S$#NDU-Y($H/DY0T:RJM8?72M67'/U>[H)_QS
M,+N-68)+&OX"SG`RRIL,'Z:S\5TV20BM$)R_&[^]N9EFL]0/-GTSOY54/Z5\
MZ]3WF."&K&8DPH;!AOIR\`*7JF:FCEB;8]$>+>=DV?;INJ!N)#C-TRC*$'3T
MA=9Q[ZM'AE2OS2'Z!EFVX^@'L:1)2D),A@6QQ!%;MHFE>XW5601KU85ODV5;
M#1%-Z!)1VZ@TMCH@9HM#'VY<%4&?*W%!N^SHFR[>>6=\-!"I6)QV03D9@G-O
MJN87K346;%W.$Q>^-:A!7ED4C4<N)-`=&7@Y$4AB71UXP/;:X0TL?(=J&AM4
M0`&!>Y9!.DH8*T<#(8DKQ7>:`TJ>:.%;0PJ?CH^CT#'5+BE$:;:XOBT]KX*%
M:RGH\0M?&BH+[T__I5#_8W>87/W!N/,K1]`IQL`$JRB=PEHP[0HZA-2^.NF,
MJHH`#EE=LY1M*RH3#RF)X0GJ(##)&$I#J!YO?T%T4<U/UG%RGD99FCJ4]4-W
M,LK/8'J]A[N'81<>YK.;06]P8%5?6:DCX=&G0F_4!K9?65*@J'H'[R6!*'<]
M-MRUI"=3L/T:/,\[79VU,CAO.2E!T:2$N*\F[\)R?:L=2,'';/20I4ZU7U(O
MSGZYXG*&XZV%G`'B4(^8"8(2RTL,!"IJ;FFO)SB5):PL\!^PCZ:/;ZF<F>SA
MKAS82PI<A%2!.@XJC(H=CE.O0N6H3N.U45EK"SAF<2=#[(0(PREAJ#%4<4^)
MBV6K#,.Q"I>QCO5P8EJ/0Z.!#(A1QB'"-SJ=2\OB0A6*#H?J.1A>PX$Z-9&'
MH-!X)BRE07$.$8DS5B%3HM!@4YW1S$3#Q&T'[I:".0OA!4X9J)1:E6,E@J^V
MK%&Q/C:]@=6=#.%)&.Q#X)H:0@(.@2SA4X*0JG/FUF*7$]-ZE"Y)3H&DJ*4B
M2&,3(L3TA2XQ9VI"XO,*]"!=@J@3/)/R`<*"`)$_$JJ$K=*0M54-Q7J3QI.H
MVQ'4$^*\S.LZF&O$@_;EV30ANHK*"&$7;M!8GQ:-$7&*@TQ3YV4D!E'A=&$Y
ML**LZIC$VN67$]-ZE#*A8+$C-)5XN0(S*7$HNJ(1Y34=]T0S?E8J#_),V#O.
M;1"(&DRL@$BC*'8@KJH@DX11W:!KVI%I2L,P8589I!.NM2&BC'R4P:;BFJ00
MJEG>G]`UI8DK6K/4BQ!\R..A$HV>B.IH>[5^E>S$M!X).IA.3(2V!D(BAJ@-
MH;PWSTVHYMQ<BK-*]#!MXI1X\*6.&<&9L<@M72GU5<>;!M[B_:G+\OD9OV2C
M5#F$G67Z=X/1`#+U[FSP\7B,&Z2"]!#5&<6-D-)141YFHF@J=2B6KNZNK'FO
M=35%RM89)@0[(8,6*J:)AUQJ6A[+>56-L]-A'3L7+3LB"<ZIEL:S!'5/'+`<
MQ_(FB8RJBN"#UBNRIZ5EZ[7!B#$H/`.Q2*(@!,7EY"9E?;6QEC".G[['TJUV
MVYUF_03K!7^N.>?=!Q8F<"P<MAIV$,1V#MD2CH$*3RMR$.O:4;N,HU:Z@\O>
M&>I9@B&$%-I!""H7928#66?%@0C6S$J7CC;LE\5;'B%.S*?NI)__\\=\)M^O
MV60P7IO+4V>=\\]4ND["W?UP_"7+\ONN;^_3]Q_=D".8#&D.MN28<]B;5I1`
M:LA$EYH`V?_L8M!QU'\3;-W0RL,UA,B*82F($%0Y@U#I4112J4..?"=L7132
M<\8>O5,=LXPH(Q&H,M(A.JU+6!7A7?B.=NK!+-VP2U'(+[DXADBJJ6+-%[-'
M4PO*Q>_2]4E?TQSXZMUM=S37WP29F_`\LOY\I%;M3?-CF+T-_<>+$(Q0'L)?
M!3Z?+I)EKW7=Q#.A,6<-L/E0;ER*#-C2O9Y&9*`Y4LI3AY4#]@>19M:7QP5Z
M97Q).75.42*^:QDTK`<0K6/#-<6,,F0DAZ2^.)Y"=G6N<2D#3A#]CF7`F]8#
M@;GT:2Z:A5C.Q\`X*L''@Y5UM@CR0;8S(/X&9+`&;)>?S_KN+(O=P61#NT$#
MKH*LYBHZ:"_`]S+&0DQ5KW)JG5SO]@2WF9.<LMPK?%HMV<FKKT!X#?B8%;Q(
MBB(.*#5H1X:C,(:57AXD&K8)3SX+[V#A-:IY@A!IE;>4Q72:P14RB^&)DC]K
M7J/":\"KK<";"DL$<<9+I`C50C!9"D\0:C8)3UYI]5W*[H]\-6]&\\1KYV%U
M(X$']P+2'\0<%LZ@&(27?G&FQGE=\`?B/(F`5OEQ(4(X/NW?+`0/QBUAL=@8
M9!#*.2)+&'G'5C"/"B$0+,1)+-P%".%`4]:<JBQ;,P?QN#`L(A\8H<$HY$MT
M6`FZLL45H3-HRV7:M",DV8R^+4N28XLBY<Y)(P(#>T=">79-S?H0@"5)XBMV
MDHCP+)(L'V>FTX>[^4+2255BJA]\'/2S4?\W^-HC=6UCR7ZS5914\T"TIXY;
M1G3>#E:6D<U*VVP)C]Z`>/9EQ+G9_K23DLUL3W4WZXFEE!L'$3?SJ"C)$=`9
M],VS_8]QFI`T!!UM>[\O6R6JTCPQ;I27A"F$%5)EDSC5N);M5T*WS/E57IR?
M]\UM^F7>&^."3V`A.O5O4:<74PP(YBN#X)=XWX0ON`3>_S:8_C-.LNP-\!IB
MR]DI=SW!40#;:9JAE$#NO`IE"ZK6/M9R'I&6.%_'B7/SO9T=CU#.7AF]=NER
MNO:LJ#<32[3Y5OC^ME"I;-(;3!.\_O%'6T?X4C#BAN)T2]7K!!7-;0FB`E8^
MUB5VD-81TH1#W43ZJ1F[NZIT!&.%LDA%;U3PS!A@+"TMMM2<ULT_23UG0G^-
MG%W+`![_DOT*&<]1]?/#_:-&6C!J(>OE,40C*2ZLA8R:BDT9D[K"39R6'\:1
MRY!"0[M^60H66PA4/$..:6$-U6E<\2.</L0N;I,4])7D7[<4XGARD^6`<=,G
M5D>/,34("Z\8,]0KY"A3"?GR<?,[*T*-J6&<-=&AL)GZTW.WK6P3:^8@K7<J
M:*>9U-&Y(MM4V$A65_H47.*OA[WS"\7%HVL`<]O<O)982=*$(J4$=\(R%VBY
M>4.HF\]&)-&HP>U;0__I^=O6]A6>"/",4B8P-8BG*;5%55C2Z.H"/$HDW]W)
M?*G\;:L6?[`WU#'JZ)T/#C8V"9"ZE^,.9(+#WN0-V15MHAQ_'',N2S#MI)94
M"0IA(45..^X1U0HM@L5(U";!\"O=H%4_IV#>/LRFLVZ.C'1\,^L1QHAQKV,@
M,<_L<8P<EY")D.B+6)L4@>(TTN>RB?93<[:=/%X;BR,6G"&O#0F6\=*-&N3J
MQYP*QG`3]=G+X6P+>Y;"%E4)5)`J9J4,$/.5D[4@T43UG*64-)A8GIVSK91(
M',<D*(Y<\,I!NBBM+S$JO5%U;;UI[!-JI+?CU)P]+#EOR/JNM`<HJP*3#CN#
M"<,0:6-5H%A1&_`FKR>NFLQE]N3(94BAA4*5"[#G402G)H3QV,3H>.D!#=X8
M>\@KVHX/_!JDT+@N8,4(!("@!$@K<(*,AZ)B(JCA^ED*IR@7(B$])UH*)AS#
M5OGRJCQ8)HHVZH*^PDV<\[0IA>E^-<IL4_R_11CM):P>Z6B$I1[L4_+(%M$B
MTM$B$KDE83W$0S3*FXL22SOIJJ+12VV)$?`-2,LH3#EO4EFQT7'S*_Z-B*6F
M`'H)^D*(9C0!B3L-N2O2U."B(4:".4.;#YT.BJ@:YLZ%B:8=G1',TI@`RZ45
MA-@H("LN1`/6;:-HB+YBAV07%RV;K16FLV@,2U@RVDG-A5&."DYIT4RC+9<;
M&UOE%6I28_9GS.4(I!T](=0X'APSUB,>#4."EB8,";M1(/I*'E+>:%,@57[-
MPU7RU^Z(HI(U!2:5Z?W?PV`ZR!=8PE+9=[_GG3VC?.'=X9M1#U[Z6S;YD$UV
M'7D[AE@TBFMG:$Q(5>74;(D0W>P#*BTT&^A[OSNT?5]IX/Y\/YCD;V[GM/0(
MR`W/\_L[/MUSI`SS!)!5]$IC)-7ZA+C&:&^&H]O:(--LE!KXC:>:T"7P:.RB
M8I02I!RB+.$FE</UG$SSXT03G-M)X]E8^53CMRB_0.B,6`*G%5Q[F6:&E7VT
M!N4#U<["RL']/>2?_PUIZ'`^NO(=?,7T?CR9Y=^8CZW8"XIN&70\8.Y\5`0Q
M;J76CEA5'$`*[ED%`I&L88[OMZRF*%G#XL++]RR8T)Q#Y&"%-Q39@%F9`47.
M*P#\Z$J>A8H:#+IE>2!/"()D@?MH+"@T(:4\&!&^@K^)SRB0*CC:LD"\L0C\
MG4?2.ZTCEIX4ITU@Y$-EH!B^TD^C(A5H0*U^G8P30.:?W:2!LR^FUYL\=(>/
MBG?XX#G*)!=!H*"$""02QI`L2N*2D8J"B'7TZKV6U0@E.\#J=)0(*ZRX#$XC
MJJPMN]05=J0R;X93U#(EDRP#XYQ0FB"8FJ2IF#Z;_W_X3!J7+C,B[C6GPF@3
M;0F#I"#PJDQ(>4GX(<1M7FE;].X0)@8+X80$TR80<<'C:/SBE)Q54-5U2_2"
M&WT#[BNKPQ;;(;)(*3A:Y[A3L#.ETIP4%ILE/.<M<_*6O_>`!>W@*83FFBDB
M4D73,B&Y=.4M<J7JP+5%A:N[U^4?)B4L61X83)>"D;*"=L+64*(TA(J:(!<L
MDE@I;XLC5LF"K&L-!1Y1KFKIWI.\QKG35F\<,0R"/NLD9"#.VS2%6)5-$[$6
MTTC#]F7-,B=-"\XFT_FEV\.&^>@(IL$36#U$19R#(U;E.,K(5657<UY!2*ZL
MX.`%;IO58W/_*B1$-R[(!([.2E1`[WW%=$L\#WJ>L$`P:L.'=)KS*\03*5J?
MS2:#]P^SU`_^;OSW\2@1,!GG`+C%=9[#N,X$IE(+[0,8"68UTIR5SI949Z1Q
MT">U@ZAC5GT21FR3;B34J83G;XRVV*36@L78(%T=I2/3%(>V&?'[:)+UQA]&
M@_^'5*O[V6:C[&:0#_T;WV7PPJ_9J#N<S<'DBP?DKG'=\NR:JBORJ3-4<P0Y
M.&QP+&49E@2A*S#,^62*9>*?L-+V*-XZIY=#A&E5B!#_$P'>7=G"7D(^[2OC
M#;`Z+<7O;KNS/\</^?!U6&^XN8&$>_`Q/;EZ=7&G>,$W!(VC()0D="?PG+R`
MW85TM!*%T?5L[;A%MD+G-J$:Y%#$EE,7P98I$JQGI5`5J0XL:H'.5"J9EU:&
MP_&G[J@'(>E-EF9TPKO--`WNO$TEES<C<Y?&8^\5CRX3F4\]-P@[2/2D8E$H
MY4HB#:UD>I6=>^@*5\A;*VC/&\W\8/B0X$#R4&&I"<'T__=A.DOYUN%#D`V7
MQ();]>D`7WIA>3FI"*.5(+>(9Y9(/'*5K5&Z+9Q'PB*DI("`QT&@[EU<-+.Q
MP.I`H2Z5TAV#"V1@U-E`"<,DA`BY(2J'G5F(0+XN2K?)-%WSAD#*1$64140P
MH+D<1<5"'=+N*2A]>[/I*0?KIW$2(<MDFG0O)8J4:5+F&YC7M1)KQ59K3@>N
ML7'ZMDF08Y]@;PAQ+J06:"^H+./!P.ON/$,8S2Z'OEWCOZTEFF"/A?(,Q(AI
MV;#,.!*UK>!T?;[+N0G<6GEB1.!(B`I!:Z&LE8N[CA#PU1*(!6M=@I4/V>YT
MT#M8_S@/05&1YJE)(YWU=@'[#S_+)^A?_0H;IFWK&.DT!5-;$;6CB"G#'5]T
MB=%02]N>NM<^;;M\(`U*.P9.0=ND3]C1<LPDCK;VVM"^>G<2XK:62KT-VA/*
M:2!6!T%1,64)8C>(<9ZB<UN(2WT/UT53A!O?O1_,FQ_^T;O-^@_#[.V-&X^F
M`TC,\Y?S$YHBX$VI.)!HAY"\;Z9WR>W!UI3!"6LC$EH$Q8HR`3>*V!?_]9?A
M['5_\+$SG7T99C^_N(%'OKSIW@V&7Z[?#>ZR:>?OV:?.;^.[[NAU_K<IY!K7
M&-W/7K_XRX?9Z[6/#X&FE[<Y1Z[!\?SX.JWO97<X^#"Z'F8WLXW/2*_7K6$P
MNLTF@PV?Z][=O_X!<OO7[VZSSKQEI/.I.^UT1YWN</ARFBH<G5EB'_`".'G5
M26^\&:<\(MGHO++1F3[<W74G\.AI9W:;9W`+WL\_/6?^=5KGJ[208M&O@/)]
MF'#?[:<=\'(VOK_&]/[S,E=Z64JV]^%M\93$QVM4/&4PZL,3\M^7OW<TGL"&
M7_WF])[RP7/:>]EP^/B>GU^`CTF_3R%G+'X_?%<`*S\,1O-%=A]FX^*%2;ZL
M_)5/@_[L]EKA*\$09!`_OGX_G@##7_9`,-W[:79=_%#9/8O53\J?4B$EK7GT
M\POVHC,9?YK_C,OWOIKU%S].:I^0K^CG%U+\N/*$Q9-KG[;X(#[R<X2<Y`LW
MD?TH73!<LT&O.WSD]/OQ;#:^*X0R_^T:WW_N3,?#0;_S0YZ>H]<KVY'`UEK>
M:\N_/SYA^:7Y9DBO["1C20%:LB7S7]/;KP<S>'QO_J1_?P/:?SM^F(+YGO[4
MR3[WLOM9YQY,3.X+.MV\V##]CZU6855X)7GTQ<7QOH;?8UC<#9C*Z]M!'XQ,
M2[9[7_X=MXF[O7]^F("@^LFZC"?7/_1Z6>_FYMO9O?GG[+O?X=OO[L!AS0,5
M<(']SJ0$ONW,76&*9J9I)^?ULOXQ.Y?LVKE-,OQ1#7+G5=&!7;MWB=^YP!IE
MN/Y)*'P`_X[CV?[TGW'OI<^]GW1ZPZP[^?G%:#S*7KPJF="67G];ZAL>-;*3
M!YVMJ&4+#N6L"HBN*-'-:>`.]ES*1CF+KGTG/M3<S;+>;>E&<X<YR-M+(&.<
MK*:%%^\YSZJ;]">L1.O.\5+VS;/_:T7U%HG6?7[+"/[PU^[HH3OYTJ'HITXJ
M=IW*^C]9`<_(VG\[-9.:YTGS!BK=`'L.'9Y#AZ9XNU*NSZ.%0Q+RIG;B41EV
MG8"R"_*NS=FO391^38:+B)\P:<[O7;KPGT.K)[-P/BXJMT=SDS.>-\4OJH"Y
MO7J,P%;>\AQ>/8=71S&%H^?HZCFZ:HRW[\:S[K!STQU,.A]SK.+QS>9#^G8V
M'H6-UQ\_I!/SIUBMC0[WJRCTMV3K:GC[E%BM#5:V$LB)!@.YHQGZ56R\!HWK
MJ[SMI?;]-3__YZNF6K46?5^_95,@HW=K1GV??<R&X_O4"YT`*D;3[/#^+B6D
MYLQ9QZ3B!&D?2TQ38<V_V'O7YL9Q)%WX\V[$_@>$W^W8ZA.T6]1=5=,3X>N<
MFM-=55OEWH[]"%.0Q6Z*5!.D79I?_V8"($59LBW)H$1*N3%;;4F\`(G,)R](
M9#9VF=^%>=W^:&87^\?"9&G=`:D>P9D&CF3WJH]#;"BI7.OAG)9@VBIB:I_[
M7M4W8G!E^)84+JO\O%[NPS;#J5VZF,X%&PS.&LU6N]6SF`SF=M^8#=;>-JMK
MZ_MVDPVVQ_MH@E49:+4G2(&;+1+DBN#7JW8^R"M)SQO22WU\U(KL+@J&F>D0
M"\%^A=_&DEV#VK/F&^Z>T:J5B4F,ML!HG\".VHK/:H)RU66^:J11V\I2W06O
M_C,-Q9SFF$CQG'-M,\&">)9X=D<\VR:>)9ZM&<]6#&>MQ82)H8^4H=<&X9I8
MP/7U\P_`O7HWQ`!P+)E?.(^YR:G+BC%3=5&1F*D,N'IU,_LP<"S;UW06MN)P
M!TZ$]WXH!)9HW:?45C[;D5)=%P\1=3OVTLBJOO;/&5,[8XDCUG^$-,>.-(V.
MM;!1Y=>>D(:0AI!F/T@S<'K=%B$-(0TA#2%-N2><G7:[24A#8>AU2?B/8IKT
M-L'#HZM`]*[IM"S*V)KDF7-.C4Y)4K2^A&C]\0F<ZW0[.R_Z0@)'`G>L`M=Q
M^MT!"1P)'`G<;@2NY0P&)'!6!:[,/?M^W;V^3R+)C]'N9.-^MV45JD+F>E1.
MJ$SPRG5:C?[^2585[J$X>D7CZ`1F!&;K@%E9)AV!&8%93<&L%G6'ZH%T]2AX
MU7+Z`WM)5E3OBC#RX#&R*NQ8#QBL#-*UG7;;7I+7T1M\;RW>MT&]O87.L]BN
M57X>G7L>MOD#9OL"NL*;Z7\W*=$WZ'>ZUU>-_LW%S77__.9JT#O/>JL/SKM-
MM\8E^M3'Y7HH/$EC5:7U\]341=2E^!1)\?LO&',,$UV\=8D1MN&RT\5>L)?1
M!+A]QJ2('X!^H>_!EQ,>_RD2=?3+#X<IEN)7+5]YPK#-"%8-A&]"+&;'8CX%
MPP!K8H<@5?<HF(P/'WCHF;*"CV-X)AO[,HEB_#68L3%_P#*%(F0@RS/FS;P`
M?U%-9V,QBF+AL%&J:#.-HY$/W.P'?C(S90JCQV3,A@+X<HC-3I+Y-/3<^DVW
M]P%>;FY*HBQ>RZ*8<>^OU,>FE'"SGF?^#@"+$/@'/@Y3+]&CA^=C)\#"L_B0
M3Q/\(QLV2V(8B3RS4*RPY!J16R','L>+#,H!5M3:(K.E(4^'/I9I!S09(BZI
MOY1QRO'KD1\"Y_FP*!*$1B"`R0*[36,Q!0X>LFD:RY2':AV1?^(TR#M/W*>!
M$4400/SQF_!2&*)OKLA[T`'337PI433?X749]S4;'[Y=7^:?W`\_.NI&'*GX
M*X4Q@0P,(Q9&"<B7%Z1#@5V8V="77A#)%)M@Z#*3<%TL%+\.V=U,T4)#++;Z
M@7E.<=3W(@3PP&OA=S%%,OA:*GX+%:V^(2G4;,XG`F7PC'W4%T13/\3APT^`
MF?Q>$<Q1/SU#=Q]/GOJ3C>B/R,]]U6D:I`<917\?"L`(R>.9HWZ"06BLX!H3
MN2&"6198`]Q?8:$"30=7;JK1456\ANE':5P8P#22/BZC@_LV:9`H`D2+..MQ
M.69H5<LS=@EF!5>(-\+7*L3%:V"5Q.JE,6NGR/T*X\W)!1`43?PDV9@)KR\5
M/DJQ$>WE.$H#8!YXNN!JI'#/'VFHNGRS1Q^05*WV7*Q>>6!&$M4"/!8P]"(9
M<`G.PS"%>[Z*:10G"*`W0##F-D[_GVJ@@*\;`3GADAG@$!-8"`QD#!@7^\$O
MED[`$@EG-N"I&M;:GK%T87572T6V0HFJ":@6&XNV32)5M$VOU7*%"[3F'"6W
MB&F97/M*1H8`.(G_(#)&SMX+G'.G;0G5YB=GC12@H,`?+Z_^W(3=S!I=-&!-
MU>IS-`TT:'R)(^1:_G$.!IM8LNW+]O7@RFWTNI=7W=;51:_5S"S95J/E7I=N
MR1;=0!><H5UPUR@*`$D7U0784DQ1D`'3<0!$^401HU93*@'O>\Z2FQN/^C'`
M.O?(4>"]`?-D\/FKB.\%&'A@MX[`:(.7`=IZJ#:$LN,^>TFT`#"N8MR6XG(#
M8G)!02%/@IT)NL?7^L#4RW:PI3DXH?_2WP)C@UH$D\`'$U)J78\#,L-#`4.L
M1+P'RT&*HAXOO&[[DMLOK?8KM2(*CUT(R52V##;8[/=^J`?)TR3*OM!1-?5-
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MGR!3%5I8PY(Z00962+57L'&9T6NT_E20L<*62%68Y#A!HNUT&CT""0()`@D"
MB6<M"==I-*T%.@@E""4()0X0)09.MVTM1G$<*$&Y)L\3\9K'(8Q,%O)X^`/W
M`W7J,HG8^01+LL!3(^_/<10,1?S*^=)M,_9V2.[:PW:%>+-RA"..(XXCCJL%
MX2I#+.*X8^`X"_M5C;J;>UC5QB/O\5B]Q\:9:ZU0ZG'XCA1A(HPX-HQH63^S
M2!A!&$$8<4@8T;=^FIXP@C"",.)P,,(]ZS0)(S;!B#+WJ6H?N;CR@S39;[&T
MRF=T4SI_:=&.5RERV-!$T?H*V36$0W7#(7L1%<(APB'"(<*A?4=M"(<(APB'
M"(?V'1DZ<AQZ0Z_.+;L6K>QX=!E-[OQ077B5=SC;I-'1>7_0'5Q<=ZZ:Y]W+
MWL5YWW5=T^BH<].YZI?>Z,C2ZJF/2Q44"Z1]^:CX2R-\@=^:6XYXX;ZRFI#9
M%`[]$2]_[R?P>.\9@IL63JHMW<7M;^PCULC4_,F#JDVJ]!4HHU'79TMM9/_)
MPY3'L^4V<%:>[A1;@3%L1!D(U7T2&Q#.A1);:R&;J.Z;)YIY3GX\8]C>$K`K
M%$^Z'.HK'"8X'HT8FSZ3^`1XQ02N5,<E6)0F,N$A*AGF3R9BZ/-$!#/LN8E-
MZJ)"<R_L0I8`C&7-[;(WZ'9B^`!\>BRPA:YJ<Z??D(8X$]50]P%^PYEM]YY'
MKMIKHHZ%A\`M5LC?.&LU5Q14V>91FLRJR^`BC4?%)88E*S8C]J5,83I6!M!R
MW'['Z:^P7-XXG0)W%J85%EO18:-%F-J7)WT^`=,F<G$EV?E]+$SWU6BJ6S%B
M@].L8]P2CXY%H)KGX0\"Q".:"1C6H\!S0$"]B6ZM5Y0BTX'6L(H?PN-7O>GU
M"<KT#L4C\5435'R%Y)-L5N8M0]\T6<W&-)UBKV1S.$FFGL9W\TP]#$<+*EP:
M1R`"0+N%9GQW'#N>IE-#8I%UX56=*W&\E6/]3(*_B]CS)?:R]CV1=P<,4VQW
MB@-_A>1`[S],FT-%N"+1SM@Y$-GTU'P*#HEJ^:F?&#W":KB-Q@_91460RT42
MUF3[;JM%.YUZ3E+/R77L^86P`?6<+'C/<R>6>DY6[C[J.5F5E:CV!&M2:J]R
MH>9\N-0/D'I.$H]1S\F#93[JB$5]V(CK*L=UU'.2N(ZPCKCN&+B.>DY2S\G-
MZ$$])RN3<40])]<D%.7R%>^CGI/4G8G2A@EJ=@`UU'.2H(:@AJ!F!U!#/2<)
M:@AJ"&IV`#74<Y)Z3FY&0NHY>?25M:CG))7?J[XE4A4F.4Z0H)Z3!!($$@02
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M"X4GI.0QC!O>,P1.5@W@3.<FW>Q)]8N*ID*UOPI-,[G'*`V&;,SQXJP+D;_0
M9PP;%*EN2/.F>J:A%C8KR]XFA@X,),;Q^,F*(8S2),7F>?KU,(W"F(IMW6K/
M`=F\AI%:F%B,`FROY`&^<.``0P>LP9CU\Q.^ZKNTN`9`R@F?Z<^,C["=P\IN
M@0Z[2Q/UIL"?^+JEG^[CA?W6/'^*2P.C`$+,^T!%X7V$:^!%$D<X3#W-$:,X
MFI@N4/.%DK,07NH+5:$3.[F)OU(8/*;T^]%0GF$?OAGC@8RR.3_I>I5-W1MS
M&+R9=+'/'/:K\A+55`[F!?/U7V[&^,KDD1%T_T]<EA'(A?XPPGYW*#-ZAJK%
M(LP\C3-2R.VYK]1*&NN90?L?WNT<-!#X..!=$)SJ5G%)S$/)/=V!;K$/F^[!
M)=/)!/#K7XI!L`M=*/VAP2I]]TB@9%#_,:O]Q_KN6;?=Z#8MMA]KO['[6*^[
MZUY9NVF6M=T&W.YKC>_',M4?\?*LX;,VYS^^7!::3]!,DINXUC6K\UXM#]O>
M+K)W<*<=BRUW=8-6M#:>:>6<=:/=9,\YGUISFY,9VQ+<B(%27DLRL$$M^1*J
M-SK=?KD5U9!FZ\^?RJW567RO%_I#ER*6^^T+9U\`G^E]O:T$OD*>JC#*7F3M
M2'2HJ0BPT,[<ES(%[8E]KA?<PLIKSKW*9LMQ^^7V:_`JM`E"^J\4T9L[6E.P
M805&?O_)PY3',^L=R$I7C@>Q1;<FD>JP4]<_:S;(="#3P19M+Q="QF@M;.*0
MV^)$2C$X^!2#9M=QJ3\-F5;KD_!_`'(`;A"/-.1$4[WCFD<!%5X5RZ%EEY!Y
M1>;55D3I-,BZ(NO*7KY+E&`.!?=C]L"#5"7V/+M)7P[CM8#QAE&*.^9O0:UG
M%6XM`OTE8=T*VK[%5BN#E*48<C8;#6Y-T%HPGD5PI632PYK`&OE<''[U\@3$
MY0PO-'_5=5**1.JD6,R#1(<]\/F='_@)YB#"[^E$IZ`ND6>;H9MHYCP1XMFP
MYC9/IV2U@T]6Z^TZ66W;&RE9;;?):I225KN4M,,KP'^SX*^%(@'M'-[[B.-/
M-*TM*Y@\LKT$QVOB<#6<SJ#\=LNU8)N]!*L."]W^$47#1S\(MM&TKR4"U2[?
MI^UT!];:`%9EA:L3T3T\V^`C>H'^R%=>G1\^,0S*D*G7K%>KA-^K,+I.J[6S
M[1?:03Y\5:>W7Q9C9B:F5O7MECH88[O;53D<6W['FR=U8".+0$=[)$M;#-/8
MGV#F<;XY\-1HP>H3N(F0Q'PH6,@G@IU<W/YVXK#'L>^-V1A/I=O9-["T0<!F
ML"`LE6*4!BSP1^*,94X-!FRLO.,_VV?+?L%6@X4K`E61@:N-&%AK57)!T5R*
MB0_J"6M)1#%\NI^`=5F8C?H'2S7<J4.[@`'_@INQ?H,?RD1P>)!.DL*=('\R
MY7Z,3V`\8<"T$OX(PQ0TWHR]@[L%&\6Z#@46/!GE-29,X9$HA@&JI'4AX9H?
M"^/@JN3(/]-0Y!GL3E9%11>BT'."80YU90QD+[4]Q;^S:1I/(RGD&6/G^*!Y
MM/+)$W5EE[R&2[:]A1E@Q8(OR)&:*")4Q6,"199AJMIC3D6(0L;\1$QD5G4%
MHWGY1MI\G\Q$\Q:WR\Z6.:BJ`OZ;JG*#$[Q/?5TB)PJ?DO`NE3!.*3&K]PZH
MI3+D'#;112=4/9PP$??&/E(U/10?((EUU1!%*E7*!C`PU/5GGDUC4>RI3IGK
M81CNY%)Q2BAU310<LRZ&@I\TTN@-SNSUJJH)/.^,W<[+8)S&(E#%6?)G/0HS
MU`E\'V,1H8QMDG$L!)L`V<;P[A!GL<!O:NKP1QOX\L57V,(42\CDGBT'`]^$
M3$@'.T-KG"U7$7O3T+*U#(&#UUE*!Q/5$8_\!Q',G(R1-`\;MOLFX-E8!^<?
M(@3^#=3-Y\.)'_HRB74!)I3L[/K+"+=^)3P`D^71A%+L\2V!_TPR<?B<EXAZ
M`WR\8&4UMX2*9FG&S,YV"=4WC_K-=U$P-`>O"@H!Z/\M^H7/;H7'+L[^IZ(5
MB6JR`.J^SR&[$IZ8W(&&:+8=(UM/ZD]Q)8A1&K,ICTW=+%P.(S<@*AP+<L5_
M@I%YEUF@J)4LF9,=]P<[:`.Z+(DCA0I*%^)A%YQ%QE29*3R-HP?0>9*=_W+%
MY$PJ"R.5&EK&L#)8P`OH($)O9J:O$CT<K0'!.L%X!)A#'I@PV>G`145JS7YU
MSP89BEIYX%EAC]G.7U7D^S*%M"P/+Y-(KZB=GJ]@B*R8H^6=N/=#[#:/=N,S
M$J^+TJ%65+4+329:P2#/Q&/9%`-S'.%A860RTYLKQC4WVU`GOZ+TT9W(J]:A
MLB_`TW])D$<)+@T&37)"Z+J-.$)5-U#Y#]E8P27B:J)HP<Z6BDP650R,S3%5
M*8%R^.;,(S&NTT)M0S]4_]7!1YG5B5ST9Y:*19IB?X7E&3'!$8*TS3Q_$2#/
M\R1^LO;;.F#SF>_0"WLY_&/^_MM/J3R]YWSZ_L)X.9=S)^?*EUX0R306MR"%
M%T'D_?GW__CW?_M;=LLEE^/S<(C_N8:QP.B09%_SDXZK?_\"9/:4M*%L?Q6C
MGT]NKI!\_]WZW]NK$^8/X0MP)4X;W:M^\_SRZO*ZW;ZY[ES>-!J-FT[;O73=
M[J#7;YW\_0EX%(7^E>R_53&Z'6+/:I-L3CF&-+/D,RE>[3==]P,KO,"#%V`$
MXJTO,7L_)B2J*#84(-F*@=ZC`LCU:=>J/MW,ZWJ%'19G43"A37IJ<;W,5R],
MM7G6MCQ5*S[TNDN%F%92:K)CQ5=>=R+?Q#11"GEI-LL]`[:;3=%9UA5&[WB@
MPDC&:<:H3X#AD-@$5NYX^">[3WG,`?[@9PPH*A0'G9G7K`6PB28B-K5Q'\?P
MSU!,(XDEW.::-P9S`]ZL:SP/'W3T:L3DV)_J(&9HQ#R_4#T.-1\'"UK]/A0P
M]$A??X]CPA'I\(VQ/91#`FH5?F-X4#0$XM_/3+!2V>XXK6<?"GK\#ZRSNZDZ
M>HMN6512T63B)TJ9X_61TLS@8("*7*'?UE!+_<M.K]V[N7)[O8OV%:BEJ^N.
M44NMZ_;YQ<&II0(%U?(NT'!KP]ZJUV'5*=H)4;]D3NSG.W@I7WWJ^LT*__Q0
M%,="Z`3M_3P($,WIEP5.='E6BZ&`]IEK5Z&CHZ+*\P.,[LP"ZUF.:.S8+"E;
MFRO]C5&E59RE@DQ2N]QIHKHAH'<VOQ;S!+0/?A]%IDV"%/&#[^&&V.]C/Q!%
MWHR%\4#E_!G\'AQW!;.9(YFD&%W7Q8:-QIUR?ZB*],/?`6Y*@3^,,C&_6<7L
M8Q&*^RCQ=8\$#VV#0!?X!U-D@OZ=&%H)\];B:.*NP?UJA0%D']S91XP;2`S0
MZ&#3K9@@5TGV38=6';C".V/O3K(?3GYDZA2?SF*(5+'\C&_F'0^NL?7"#)U%
M;=)=PJ]Q'K?Z)+"108"'C>#)UY>?3GX$JW[AZWL\JA.JA\HIQE5BU0W"/`YW
MWOTD3406U?TC\I5$O&Q!GC$VWZU%)LZ[>.13*%!`PEK@]`K6*]P*XP5;43T6
M2`$$@.&K0=@*&=M!H@RE8<H7$2Q*/BLD#0Y991F(&.-BONYJ\K+QS=+$#_Q_
MJ7.RN,`9$;(PF2(#]_+]^VL5*>-Q,LL2+8IL$@3:";&3TM)H6-J$4,EF,AOP
MDTXO.24,>3#(AQUR``>#61:OQ#R.!W^(H*LV9'3&!8!K]C`O.IW?KP@!**S8
M%QX2/8:XV<X^/Q@FM3*M$?A@5AYTJI)^3/CS!<GQ"SXI]E&!1\7^'8BK/2&Q
M:X68!3<KG-F`*!LX304W'%WPPBGP7`!4&!KL"N4[8RJ0VM?.'C410H5Q>9*(
M4&6'.)BHX8?Z*F`1Z105?:%)#/M3B&DF;R*7-Q@<F@=(51UX-[7A,/$HCQ:/
M_!@L#2O$21Z72TIO161DGF7`!6YG5G;K:V%%/$F:[3[)1.Z6GZX$"A\T?<MA
MW[!^UYC[[/_!VV4"<V/?%E+A,E?IEV2(!D!^V>L60!:$*BAQ;GQ]M:5KWNRP
MRS&8D3G3FAPU9!$#D6KW8G7P"&^"!3G56[Q\.@U\+]MAF<\(-TBP]5."3:74
M!M-\?V<N)U-M?R-G^G*5]C,B9D)@=D#,ND,(XU?A-S9*T8+*J9K;/G.R8+.S
M\`&QZE[WRLK*NHU4"J2G6TO9F6>WA'GZ2I%F(:4G\(T*5]>C`W7Z]MT)G>;0
ML61AP.#GRW`[9^?_&P'!_Q_^\XON")9MZ-J;@STSJ3B).;7U9F3!Y457$>46
MUP=Y<G[3?Q673YI&@4KXYGJA@CIAM:=V_>6<G7M>##:?'?*>8LPM:\B7*4R3
M*JKP]>+VM\5$H*RX#/R0>W>]#]C",9IBQK)J(X<;#1B"4+N[&D!1L86GZ31+
M^02@8]]2=`MPN23PH=ZNAC6<&R`3'J8C#"S$V-,.$X/O51)?8JK>#'V),*XL
M1#D!T&5_I0B_J@P.?J=.0#QR\"]-*T?,6<A2<`0V=?P7CX=1FC'&=?C@QY'6
M(U_B*#'M]<[O58[/NVS&S08N1?[)_?`C3/D^#3*M<"$\GDJ=RCQ/3`"5H'8@
MN!F1'CWNM/A@_:GQ%2=DDJKR"2B2(:'FW0&1'X8"D\PU2>024375,!D=4_WS
M7`>\$>-A8>XHBXQL^=J9E&[.S+KF5V89X(M+"K/F<M[X<IZ9\0)G.#B(>>A'
MLQPNK))-G6.>#_AIQD>6/3`K[@$IR9Z@"1S;V"\N)\\U2\QXFF*O/<&)-MD+
M\[,XD>5&)&^92*8YE)*?I]U^5LTC%5#!%[\42E-%+^;87IC=R&]C<&56G4(X
M4U&D9J,Q<)YM%3MW$A?R%R6>%?+E6,D?6&7(()C7#BC@)Q:C*M9SHHW%<0?`
M-_)SC$8!QD%/`:.4O:GW3J=\9J*J8(S")`,39,TL-$..YY$[9[KME6*EO:)=
M:^Q?_,28*/8CJL5L0'6N(]$>B#_T>:P*P<5X0&>DH@&)V9Y/_(G*V%+_53(T
M-\<U;N)]OE2F>IKQFU\X5U),,/L,P@X>G,HB=%?F#3]QW\YS]PU'_`5--GB#
MZ8CZ#N\\,1_R*\$)O-,3Y)/(Q"C,XQVFU)NYXUMZIV/(&.&]`IWPR)6V!U?/
MI-LNO``N5\'@4!DS&!SX-@8Y4)F!62_AE=,H-'X^7_1&M;7T&.71.G`T$WW$
M0!6L'@-?"&1GCN%1SYS`08_3QP52ULG(#^:'%RZC-%9K<#E&F(MGF?RKXPCX
M(9_GNR2Z5U%MO0`GWPHO/->+?/*CZ2NK7%$T"O3+8!2?P']6R:`F%U2119]9
M0S=]X1*WEZVT<J-C@&X,*(:`46,>C'!42]9A"N#K%8F`L:A[CN&NN8TY4<_/
M`S>XM!<1V&=.9O?CH.:KAP=Y%"F6)CJW\W+=HE8.[1U#]F("K)FS>5YA0;2U
MJ9)%@T#<*T^>)\ZJYLN*0TQ&^6H6<?))W>&D5.S!!T]?G<2[BS'?$XVJK`FV
M/TP]'X]R#E.M.A^UA0,/`..G2,GE<<LH!1AB#R#(:-MB=%'J6`>P7HQG_PQB
MA'^DH4[V!1O*%R-ED#T*?080'PA:6E\^Y!-^_Z;3<C4/H+F-5R-FKH5S&$O%
M-MUNT3PLXKV2&QX@)N;FC^[;70!];?;CM\('>VT1CU'B`!O#8:JBS\H'RG>+
M%5@6/)Y?/_^VX/$DD3$Q#"`M2>$9^Y+&,N7SL`D\0D_#;%ADWZ\2X;D+`#Y#
M%#SHUP#_^L#+F3AF*/6$+(6;)_Q/D0M5H>WY,,^F0I?GGJOD[H+<+ML_&RQH
MS@@,-:0R89M-F\NH<1N<O<2?&K=3GVO+]1'J#'@)J'Q?ZOSZ;[D]N+2TQ<=@
MZGM^Y<*"YZ-;UDK96;LEK80K@#SFJWSQC`G.#'`_\];YR1OM@`(V"1,V11\_
MXP&C/FS0$\PF%7S51HKNH)P=2,R81P<K%=O"Y,PHSM`AR=C*,41X=5K*@5>.
MN=F5>^IT:QF992N9\Z])KH`_-=3[HY$L*%K<^XGB4,S82)A./L53N$]UEM;O
MV?!>6Q1?%LGD*1[@4YP3#\Z6C%&<W9+5]/S#0<)Q:Q/I_Q#YP_GA8(>!,?JG
MGDL:&D(D.KR/JZ>WJ8+<S%87XNS0>.7#B9_H33$8UMRA!@H_QL`@PPA^4V-'
M<X&C!8-Q18QQQ7J3+8NTZ.GJT_%JSN+E"2F^D"G8+.(AU_W*TY)J,S>?N-*S
M0"?4W87#*,]3RF33V$B,V5S#52'W<?\;6[>%(*E>/U7).]&F]-/F?\8\VUA@
ME0T;BU&@HVTJN%=@88VXX(RI8%&6R"U5Z$1;X-DUQ7-<>M@PI&]"@$4//[@P
MS)/"\5KIG&AG,%*'J>>GF<S3GIJU&Z=*;Y3A_"0Y.L2ZWMJ9^PJP<*FB-_C7
M&IG0S6;GO'O1/G>[Y^WVH-F]N+QR329TKS6XNCS`3.@"N93]K^G%%,$*D00[
MH8D;@"-81K"M4"W'J8X\*03-HU0`\;D.*2@,-"6!+/[(]]!:])8&;L)TL5EI
ME=PX!7<+#R'C0Y&[54$;<YQ-FBU45;<O.UFPH*06W-/\"(/#3+DP/)>(3A1J
M$1SI8Q0'F)HX3ZPL[DUDFPWS$\`+I5Z>?@;4&.F7X8J=BDQ)#?T(K8-WOUQ?
MR1_5L.&F.#H5"`'PWXG`3ECJC&-V'/G=K]>_?@.W_K)`(!4!#_F]UB:%S"O0
M>*CP,FJ*_(!>[G+GA"ABU"A?V#P1Q,$GZ\0;?&!Q\?*C'X]*JRIM"4O%<2\"
MIZ2.ANLS*'C:T\?-$1Q3%`0B\QM^$3H0-5]YG25J$GT*%M'\\`F\UQQ"-$"%
M_)G-2R6\@A*>3753'G,7&@)J@U>]!-8X&:L8EY/'TQ0WZ;#+$$QI#^SN,Y5K
M&#\8\[3(VV"@F&D@W\U94(?B,+"/@\9UR;9*,*-!`MK+W-33#ZA6%+;*!Q:6
M#D9G9)9Z`4'P'1T<%_.3-T^;7.KSA2&;I`$87FB$+X`9)H":G3VM9_/D_=]"
M/Z\.`M*HN/V[/]&)>E9PM6MQ*UU7)%"3-08#XDR<E0WSL5"42M;0$<C?SKYA
M.1[PO5(53T9G3!D%SY`'/Z3QW(B]$4-UDNQ*0P*8Q)E=?5D,RMY<?;PTD4F]
M^S74>S//;5ADAT$+\@1#PJ-J:EEN%]-^'783ZV0XE0*D15O[@R"^P*(A^P.F
M)X>^"3PHC87S3$,SG\U-G&?ME)?MF>V.>+G7C4[K?.!>=2];C4ZGW^_>]+1A
MT[BY&9SW#\ZP^97_@4EC.?3CBMZ8M?P&`D['O-8;X95.ODI65EQZ*^A4X!B6
ML[-)6,M<G=LS\_3N8#8_@+/#A7'[EA2/M8)C;M.>*L0^'S'&9E*5-U]=4;!U
M^)M$X0VB8"LGTYXHM,H2A:HJJ^JKT\]IO$!+'<'#6'F!D\UQCZP1X+V([F,^
M'?L>[D*A_;E]/[R*47L-2[(>O?=T8[U!_ZS;:O9=FYWUNF_LK-?M;MOHKK/K
MEGS5'FA-NB=4JZE<D9,[);0*VJBE^@IJK=\.U(I7^@GMQE^UW7B]4+]N78+6
MA`M+K<CX)BXLHV'5,JU>;+-0,Z9=Z6OOL*WAH>(A<>(6G+CLZAX64!:M6[</
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M**WT]"QHJ3M5.EOB7/K6`HE6;<<#W73M#*IIB1[Y;BSYDW7P)P\4$]K6]C`(
M$_:=H7'@ONX_1#S!XG1[-.!W<0IHL!V=\ML._J3=6PE$+G*%7>1ZG+/;;ZR)
MCME5R2:N;[RW#/NXTB:PNJ_:3G"5;5IR:RNA5H]3;%V2VPKK8PIIZY#V=1I'
M4U%9`[H.TKZ:O'O>L3KR<!1YPB3(EGB.3O[5+JY<(4N]<L4P]V6IMX`YAU&*
M)9BK+_-NHU$'X]T>32LD\342[GKI]'WM+I/D[WA_^2!AH6`(_*0J^:^\?L7?
M+_3=6J.AJ**SNN$+_.7--FF\U6Q<WEQ>-_O]UN7-=<>][C7.&Z;QUG7_IGE^
M<(VWONB6F]C04/47+U#/?C_16]5V.7N%&!::SDDL<JO[B\*`@G2HNS'GS3\7
MF\?ES1P?QU$0S$ZC1VP9)],[Z0]]KCK;X14+7_@A7.U[8[B/C57K762'&.X'
ML<6&U@*[!RZVO8[%-(JQMSBPX8J+LQ;<\PEAWTC5RMJ\8#*-0M,&$GL5)C,F
MQ93'V+YW%$>39QOBZ8O/V'D0,&P]&.O&?/"'EU$@HPQ.%`0DE-QTNQOS!\'N
MA`B9"'S347IQH'#9%@WPGI6K!0&\$B,1QV+X5;=,N9B=QS"X>[6VVS7#:W6Z
MU\VKP67CXJ)QW;@\[UX-&EF7WW:GT:FQ3.JHGI(*PRF*TX>&AMA>?&1:I7)I
M>LQ0.YF*MI,!.\1>'YG^&_O(]+9MZ[+U?5OW@ZG+?;N98$VR\BKG1^7#;;U6
MB.:5`%P)M'S98M]%*X;E/H3XZ+N8>8'@\<\GV!COY"<5.Z7V(<26NV++;V(*
M5O^=B-?FS4-O*%(=ANV5T.^F8NSW;HC66=;$,4HE=A?_D?8YWLYZF1>8=\[<
MITIYEN95H=9_[BQ^68>#PSVGTRK_Q%!5UOXY75?)+80#,\X(:8X;:?J.NX/*
M.559^[<B#5G4<[/&BV2RB4VS?IG<$MS`#:SN$@J8.FW7GC:O?O+43I0ZZ>XC
MEBC7:;KV,AZ.1*+(65]#J^GMQG)8:T6&"UG8;R+?09C@'<=ME@1FFY"L*MQ#
MT8"*1@,(S`C,7B57UQDT[,43CA[,+.2/;IB-MI#)=LWC$#A-?A'QMS'?+&=M
MX/8&5YU!LWE]U1PTV]<7US>NR5EK-Z^N>S7.65N]E981BP&UF"+7BZM<HRRU
MDK/_+KCT/28R\DV!?!+)Q]Z=7'_Y=O(C\Z7*#DPQB_-NQF"H/@(@"T6"J;+1
M!"X%-I8_XJ^83ZK7!J[F`"S\7K`PQ2UV3"R$JR=1J%\@690F,N&A>MHHBM7-
M\'X_&IZQ*S]0;X0Q+(Q`^C`C'@?PJHC=J;'C)>*[)Z8)/($GZC&@T".5>@J/
M]55*;RRXA/OAKF)^[WQH".N86\J#)Z-4SWR,TF!8R&PM#MT?L6F48.8M#P(D
M$(S<?Q!/'C/F0WVK+V4J8(8?0S4"#X:EWJ\(BH1T]",PFW=Y59`6//#2(,NJ
MQ6=(#HL`DAK"95S.R?)RDBW)0';?C6&^9!P+H1*:@>Q`4;AT+)D(AT#JI;%O
M^"*C(HWN5!,:"B_2)PO>HW)Z+E-J94;4-M-T6#35*=HH;58>Z3K==L-IK#@!
ML\W3,EG!%;`SO+:]L6'"?>Q["H02U,+\D<=#J9*C`7X04H;SI/IA`;\R@56D
MOQ,>3Z5"GYE.K`;@.,U`XXQ5GA>7,Z`JPXL-MUM=7FSUR^?%1_$&9E0W/^'&
MY:GO18-L8\CO:G!X?$*?C$!C0*?X@WF`[\Q4,?)080TJ<H!B5T2EXQ3@^W;?
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MZCYKT0LZ+$E81UA7&M9UG&;'6J,NPCK".L(ZPKJ*8MW`<>O17+C"/$=81UA'
M6%<'K.LWFH1UN\&ZX]XD5??]GM4[.#?U#K[IDZ.?YS4"7C[Q5^FX,NUKU4R#
M$O\0_QP0_U2./L0_Q#^T+UH&G%^:@DE8T6(;AGNU$O/^6M7OV@ER6X[;:)7N
M!-7&G\'[J*[IGA4"R6=^W\#IMTD\23Q)/"LIGB[6M2L_#X;DD^23Y',K]=D=
MD'A:$T\*XIN#32HKMW!B;'5^KOIQ'`7`'/OM*SH_9;RJ/'M=N-?:_F9E25;"
M)F?CS+6VQ_F6K<RZ,Q\=-:YP9/Q`>(P`;BN`ZU@+D!#`$<`1P!'`50S@>M9Z
M-1'`$<`1P!'`50K@W+.&2P!7]5S<"H7>=UK)*&LPMMM:1KND]JZ#T/9[GE:'
M-2NGJ8GCB..(XVI!N,H0BSCN&#C.PF9N[3.)ZU-AJ2Y.R!X\X%KXN#;K);W%
MR:T^!U&<KOIQNNIS$>'02ARR6LN(<(APB'"(<&C?=88(APB'"(<(A_9=`XAP
M:/O`4H7BFX=8`XAV=RC6?E2Q=N(XXKACWMTACB..VRWA:#^Q_,I$V_#5`=47
MJLHRXWUEECD@##Y@D;!:TH<D@B2B]A)AMXH.B02)1.U%PFKAFD.1""J*NJ;K
MP<1?J?_``Q$FDKUS-]E!K$(5*7?ZG<DH\(?5*"*EH:G?=)OE1U\V(D2-19G"
M4SO0>B2B)*(DHB2B)*(DHB2B)*(DHC7Q60_,-<U***AZJ)M40BTUOE/MRL66
M&W/4)<F0@J;547QO$"J\8AG3JRUQ=EMMV*,#22-)XV&J.+O-,TBH2*A(Q>VP
M'0:IN&W]NPK%97;A]]6L6\8K(8NZEXFT=A+P52ZN7,G-BO?7>)6@5-64@N$U
M.1=-($H@N@&(VNOA02!*($H@6@NN)!"U"Z+V^H00B!*($HC6@BL)1&V"J,U>
M)`2B;P'10F#U)Q4J7'E]X>_"!`(_%*=CW<G#;39^V'_$6`<[/1$$9FE_/FF<
MJ,^P#E[V><5(;OV)D.R3>&1?HPD//[#GAK0J^OSH#Y/Q^W9_':6PR-CK7[Q9
M`!S8=Q-.?&$A^S#Y17W0QFENOK+]N?"_7</#_#82M:4)%F3OCU0F_FBV:JA;
MSO!V+%B83NY$S*(1C.R9$T.^9#`C+PTX1N]3"21F"=R:Q(++-)Z96R8B&4=#
MQL.A^I6;BE83'O\I$C:-?4^P81IG=T]A5-%P[2KJK\K_WWY*Y>D]Y]/WUSP.
MX2WRBXA5.:U;H.%%`$/\^W_\^[_]+;OJAOOQ__`@%9]'-W[(0\_GP<=0)G$Z
MP5E_B0+?FP%10ER"KV+T\\G-5;/A=OZ[];^W5R?,'\(7W$M..V[_\@+6ZNJZ
M=W[=O;CJ#)I7-YVV>^FZW9N;\YN3OS]9XY?$^3EIWII%WH1OZN-2!R0D'%.4
M0Z[):<<*Q&,OKNI^)K,]6+\TWJ*F[@+@E#S^CR'CG@?*'6@NV*.?C)4LQ2BN
ML="TAT7![PK+]*N24_,SRN>5+[T@PN\DNXVFOI??E*_F.;PF#1.4UF]8B8['
M0\DN(O@/>W=R<_[MXN3'U==<1D-_!!"(K;#@TO-OER<_.NKAV".+AS.&1M`4
M8`4&,\K?QZ449G2!S^_\P$]\&-U$#QU@)6$CG-&#9CR@`\S:2V.%)W=<`DCY
M(;PF%H(%XD$$TL&OX<XH5&_7.*2N>AS[GB;<,V_%;<DDYD,QA[-89!?,,F+!
MS>EDBO.4@(IP;1*QH4A$/`$N*8SVC`'0RFQ8^/#WVPO(&@RGOO)#\-\2K>QM
M<N`O.`GFLE/%6WJ5@?::U.D4/OV51J@G%G!_%,6`F#`@U(VP!'.D,&3VD;$3
M_R%?IY<5PQLIM&`HE$2BYFH2K2:05!22/CR;QPOT62*,D]U?N'%.VN>?DO%_
M,@910@8/H\0\VE%</HF&(CC5HWS(!XY[\:'_5VK>I$6'!P&\YCY4@@X$*DH"
M/CJZDR)^4#:N7Y2^VB]JZ^FBWHL0S!Q<CE$<319H6*"<HCE`Q+-$P[5XEFB%
M-Q:>Z8=>D`Z%>BP`TA`@'<$87NQQ.688Q='#T?"6<<7\"=LOQHM*KKT=I=L;
MAHD.R8BHN]$`U@`#/>^`2D>9*.CZ_Y)LJ@UIT(V*4XM,/DWAT8]C$"'P%1AZ
M$U$(/\T`VA"8O$P65#`#GP"*%=CX7T*]PC!^&JY^)JABD%@8)]@'!<MA4IC6
M&?L=+^0/'$0#;E\T4^#Y<C56XTCT8Q:T_,?1D^MRE%U\P>K1+*@(([@Y;L`#
MX=&PT-D;])53'O,)6AP9'.!D?0`!6*.$(2ZQF2\"@(0T?A"@.B*%-^PA`E\N
M-W9"]7LL0E@FO`?H`BSC@2?+@?B`)G@GD#3.G3GUY*>@OV*F&2EA:H;;E)$T
MX7\*]D<ZO#?,=1>EBW"8D9&C,^W#(W!-HS08*F+`$V!Z0)!$/*4G\`,O&)5S
M%7C&+L<\O!<RP]84[*,XF"'!GMIQ3H&8&:QJPBA:9>]60C-*$V2#''*!4IX:
M:`'I8=7X:"2\Q(B=3`,M<9KJ"2IM\QPU"Z!_5:&D1M"G/^+E[_T$WN"9NBBP
M4@[#?]EU(<:!"_L55A8$%^5=_7ZZ-*MM2(:]XE!1*QM7/1??M30`PY:7$=KM
M*-OPE\JA5<;%!0\4>'\;"Z$C,E;&]I^#LRZ`:A"L:EN\U61Q;F]]DHF.FTBU
MXI"A`/VE3*#WR'1F]&[OK&%Y^$HN=S6!?Z:AF)L[K8;#,,!4OX7X)J:)P##B
MTF26L\NWF8R#H#D5RE<)9@XNT01>GBO#$8`Y2A"HN$3+61Z:!(\=(P&@FPQZ
M1R!E,<!ZC'@<W0'R<(W\QICY[>P;^.OF]C.&KOL3!9.,54`4Y'<>)%U0WIF+
M;(P1(]F%AXQ]\!EB;SS;W@2W"NI5MKB?@?&OPA.^LOGTLG[A,_WAU`XRWBI-
MC48SQH`F:`)D+`(6R"H+0Q;-!JXC8VCV9.-4P\R_G^KQ@N<]G<;1]]R8`1XI
M,,J=\+@Q<Y&%Y#B*$V!Z,!6TZ98/J#`,X%DT1%?'S3)>S,<O$WBQ&?X+<S/6
MUQU8.@&82V#8X*,ER[SB4GB<;)E7A.!*W"458?@@PN",B"?@=L&@YC[%4WY=
MO'"1_POLHX0%#6N`9A\L=1A4%E8[&EY;WME::\]J89?K'U$T?`0=>!X./X8)
M>$`^H,ZYBGIG/ZV]T]6X.K]H7]VT!Y>]RV:_>WTS..^8G:[^]67#/;B=KHQ"
MMCR!_'F^COC)].X/Y19&*''@Z_Y+1_F0^97+_."+1PPM8H@7/&D_5H$"=07\
M+TQ!'M76!V#W;(KQ7W0UM9LIT-89&;27&!J>`>\YZ&O"J^!+=,B%<DY]\$3]
MV$LGV'((XQ9#<()`'E_9FUWBSK5Y;5T.??IY;4YM7Y\W;\XO;LXO;Z[;C=9E
ML]UO&TX%YNUV#HY3YY1:/BNW%:OFM7]<=&"SA^?[92KD,56ZZ%]FD\QP,)K`
M&,W3M@P8+Z,T8($_$LAFR(WZ;YGOE*$9I&)GQ1]1.HH7.(L"8J[(])5%1EW-
M<@L,^S&7Q,_QE2^GD>3!Y]$OH-=^`?]DF#W':,;5#]3_YHD):[!T__JJ>=V[
MZ@SZC<O+_E6CTVWW,_!U+[I7!\?22-#3`"F:<=TILV/J+#\9^?DYM%6Q9#`]
ME#T$*GP>1EP$33\<XJZWT$%;9&:/Q[$.,"IS2@4G0_U*,(IFBH7OM-6%N3)*
M#EZ._"VS<@G,N,CLH1=-Q"W_/H_^;\*U%U?]QGGKYN:\U3UO]RX[U]>=9L:U
M5X-^\^"X5M.+`<%>J6RUX:"74]OV;IYN3W9WR_'F]]U:P0$0T;]2'B>X#X"N
M#"Y<PK\S<$@>?&GTS%+F&XAPM@,PS(PPH<+[N$F/]^-6@5/,B!#?,7@UOUR_
MR\$4..!K%3X")QRL./3&TR2*9X7MAFD`=^&^"3P9+'WX_MZ?;V,\\-B/4LG^
M`!=+HMVF8ED+.2[9)DPT%69WY_]&C[CCYJB3^`;+S&[/XG/P_;@#$H,JUF,T
MJ3%"S5X*W(!*1%!AQZO*L2WCQ(]$')L%?B8?*1:C(-L_PLLTOVG_7$RF$7B_
M,U@H^!9W\>"&.Y$\"A$NJJ'Y%MGJMZ#BFSOZL9BBQ07W3=,8](IA1Y7X9,(#
M*NE)J<N"\)B+5=)3SGO:4H,G%#)+P%N)'M6NAC]ZDJNE854--=M0!!6,62Z>
MR':9E1<3^'\"]Z'*#94Z5;I7XEC4X"/<.U;9*FIC<+A$:J;<L5P1:W/VC'U.
M8R.T)C@<BWL>JT"'ODC/`!X:P97+CY5/4J*>S`E>N7)>>31%IB"[(U"@42S5
MGD0:JT@B<)<PR:UL[$M$"F>.+F8/$49A]L+5HBC;/'^;6B)$%/6:'$[.V+E4
M&76X-YGYC1,1WX,EKQ(&+FY_6]S2S1/=AIKHKZ^(H98*L(_$$,`H6$DZ'6I\
MLB8Z16D>H-)[P_"$E?P4SD/Y"VPX`8A#F'N.$=54S5X#>N49*JHHJ9./&H<"
M;`\+&JZ<@9KSLH6'G'7-866-UG$,@J^8`'+<J=`_X6U7\[SI$),+)P`D8XE.
M/KP9MY%8MGOT_#-##W<UX/J[F:7=0_>L;W?[;9BJW?T0!%-K*QU:S)04+N4G
M@1LXP,%#C4<W,5?"8_@AP.S,$4HVS#+%'(>YK#[WV,LQ@%YU-5A]PM1Y(#F3
MMWRS0&8@C`B0AIE<*32*I&^L#?3JP],L;CQ7*B+?+P%Y/D_L<&_5-U]WM+.J
M3(HH053+O=0T1,2Z#U4T!]?H3H1BA/G:C[!&A8A]8`M)6F?+57.VHKR!(Q50
MFD\BV]O*#!>M8D;\(8I5OAFZ^\:\6C;E7W/*"1O>B@UYQIKR=T3(`V/U:K\+
M4P>?Y4@NB]8GVD*A%,J<L9#(04"Q"!39VHWY4(6R/"]&?Q9=@&F48`ZZ\FY7
MKB8:OB4@AW4;Q-J2P-#L)E<MIL$`+!$NE8!+*DD(#.ILHPSX%G%&IG?2'_H\
M5IZR/_>OE)H0X'F%JVQ4A_U#!7G`3\LLU6]@?7)P3^'/7WG`9]+GCK9!U;O_
M;P3&Z?^#?QS$MD>!SJ*<^S-X21;T46Z)7'!WGLYD:>AC#JJ-%XY]@D6L#3'<
M'\SW_I27H,-1RI\2Z+=HO]"/"WR(=Z(UO1`W`F\^3<S1"+3(P9U1IR.L2,%R
M9:BMQ!R4BI4'65($BOB;[F.]%)Q_$L7'_8LHWF+?Z:+3Z[?[W<%EY^K\8M"_
M:MZT+K.MU$ZGU3O`"+ZFE5_.5FK^<!5)E5K6S(81N.K946RILL+18S4!)PS>
MF',&Y_;5:*?Q0\6T9\_6B!"_,_9')%)$'&9)%.:0NB*X/D5:.!^#X2(\>5*(
M=:F#IR,_EGC"TC%_X?&%=S<?;S[_:)X!Z[D0E-'1J]Q&R[YO/]7H&\O_:K%>
MD'W<"[R%X6.RV$:"W[@^=WO=JYO!Y<WEM=N^ZG<RP7?[\._!"?XO>68:DJJJ
MIDK=3*N/(?LG#U/<H-"24/0CN&<.!=DQN'N6HPC+^8IHBF&D,0N17]S^9L+D
M)M*L+\JFA5"`5F1RCR"#2>A,XJ%U;5[Y*C\8/":`\ZF($]R$9!?P:AB8Q]$Z
ME!+,KE2*!),M35;87&6H#$B3`I_O[=BB9,,N)?7!B@50/%M!L#'&E\(G1]AL
MS:I]UK:D4Y)Q'*7WXP*B-[MJ4GT'%\;LO?H3?3YM<39JQ^D.;/`ABIL.;W!5
M#AUWAR>@4K[#E^I2\1=ZU_"[VG2[O\==J"3/!K\QNQ'_%[V07R(@FR[/<(-F
M^?\"/+!+%6+QV/GP06T!?,6[IP%X#LECQ,9I.(SU!AZPGE9<T\C7*>2WZOBQ
M2MR=L6'AK4L,_I0&S18&:3':FR:8&Z,VM*8Q>$O^U.R=J+B!21M+PRGWAW,:
M9>09FB1@$_B=5W$HC(EB]O9`^DIX9A657;(2I9]@H36T:9:`-D64_A;]PL$Z
M\O1,]'9#$:]WA:K-,TO.ZXNH^@RL+J`0*!Y,!,.CT=8<\\[9H&,+7RTYYZY-
MMV8!>IX0T*18PP+T</#YQZ:[J4^_TEQ?,.C!JIX7WOD21V&$&VJ%`P";._F7
MW4;_HM/'5.G65>M\T&[=]#(G_^*J?UFZK5^N1Z]W=T!2OJH<"G":/TJ)"JA0
MP&B1D!;2AHY<G_PS#8H6OZH1X2]1?5XVZK>ILC*P8-1O)S^R3]'9?`WP,:>N
MBZ'3R32`P6:Y$(4:%;B\N3^,IB6`.CP*ZY[@+;Z0)J=EX8YY9.!N9DH4X+.S
M_>GYSR#4=V+A5-T&`9M;E3,EPN%D?M3;#`^#0/,M1YV!E9_6P#PNP!B5J\-'
M`-]S+8UT!;)TLUP4#>_^Q)354Y.-A0]J[G=0!I'*1-&)0F!XFBH0V5E6'`?,
MST2&,:P4JWT<(S:AVK3WBL?1YUEBV>Z]2<_)2QN8/`NXB8PTFT(%FOX9H8)%
MU'("AL"M*O*#;'09Q7C2&1=B+D^X5@"*<?3P%.T<X[MX`8^UT&1[#0E6?,GW
M&G3)E]?*OYT51X56UB*GY[X1L*UR"W1V;,;!0KL.JQF_@ZE4F+>;<[.O>DI-
M_$0E3`'7JT,J.I<$K\-LG[QTI9^KA$P"])[%HJ3X"<E%+>3B5SY;U!8OR$>C
M[\ROO<"<;N`+]'7N8/%T(M([7=ZHW^C\^'Y^[9=4CH?18SC_IB``I^Q\#O#`
M--^N+]D7'O/[F$_'DGU)8YEBT2_\*>&C45%X+M(@$/#7HM)S<18@)86!&]M^
M4944?M>_Y"*+8YC.Q^`7ZI!DU,GW)GH?Y!KE'&'TQ51D)*T*+`!C;SBK;^<7
MS$4I-G^@C'@^)O69Q-V\((-"B&DL%&S<I_XPRV9<F`S,=6$NSPX'7#T19V6/
M[F*52BN^^U)=5'@\9G]&(<#4!$U^M2F`E'YJE[1/W5X)_)3AL#J*,%2CG7MS
MF&>1C0F^-_B'8:3I-"@(PG3I!7Q.#[1N<&_8I/"O+`F@DY<CSU2'$N8$DSH,
M-3]C,!\:F$)W.KT678XX"O)*F8M#5_"L81716V19Y<^PM5/0&PN2WL]W5^2*
M)Z@J3]JJ7+2RU*PRWC766:9%AKY./2X']`GS[6'^^33V@Q>,H05)?>)+-#H%
MF2V<G3W-3VCC"GY&&_KT(^)/R(/3WR1&DD;)(W+3NV_IG3*)6*O3.&TW?BRX
M'+G0YG"B$L+5<\<BF&HI0`S*,KR-D.3"J?P`H=)>?;55P,&2D4DT$;$J"`H+
M%:78UW8R3=4-/,9PA)+:XCF"Q['*1'GYA@Q+<:]"9O,+?$\GTGT<;7^W6IB"
MLV-JP&EAS2>$P*6GGEN%3Q^DRT#(1)W'S/9G"\$\)61JID_OE!_T#X^^&<[\
MO7*LLD"?OKLX-ZYF)>('K&&K,`U`0",&SF?)HBWZ;F;#YHE;AJ-7V!1)\>3R
MYWR]@O*<V[X9!WF(QT%61`!1["D2"E\1!IAROM.L+D8NG\\5[>U$U=E0ND\/
M83$A5F\#8/9/LNIA((^8!Z@GNH4%3N"X4W#4VK7EL(\F,'SZ$<4[/RV1?5V`
MNGX+;D"HFV-=+M(FD&X,0HR'+"3P\D(VMKYV7D[[#NM;"BG"9&[/W9F"=Q(+
MWFDY-#6[P.A+E4.K(Z_/'+0V);O5ZY^\#BO8"*ZJ8]P)O3F5O5SO/JI3/`7E
MD8E[/M<%`5!65V8@:\5O'HB#UL?%=17G'-[-;E@@UH22S:#A>;?XR0F_@J&G
M%)2R>?21)4#M*1Z(!S="Y>\AXY!(5RR+XEFA=E&H57+JMVR)P4&]_@[J*\)3
MC/@8Y-3?PE1BQ.6C.MD[E_-FLW/:-'*>OT:]22]U%KN<[[+YRN0&E<1U4BCZ
MB2"F&1"H<E!@/03@:>DTAX(TR,S7=-B?(;@K*J4?;C+!WDRT/N:/+^*/"'PL
M$8(;,@H.YDFG\`:A?(M5@C=/FH6GPC7?=";MNQ/VC_/S+R<_:EB)0GP$SD\L
MT$Z?A/95!AE(+19E@QE+%!^UZ:]18#Y_Y<UA]11P01]\??PL/P25S,SNDCZ:
M:*K'I;K$+@9WTT`=GQSF.9XKPP!K1I2M626%0-SFN$"QMMH<3R]$G=LOPD[[
MU&T^C5KD#A`LSCAZ?&KJ2^S.<YJ5LIYID_M1A9UTN6EU.`VT5QX,4K]FSS>M
M#)"+,4ZC/2T>WPMSZIB;4_)8%E3MZF0U#+DW]H4J_Y);N4JW`QN)W-PW_8E6
MF#H;OE:?FH<?MGD_7IZ56U!64/&M(`]#?R'0KA9AR998#*RO`0%/;W@5!/0S
MA=6(/(%$?8V57_EL'<1H#!SV%<.)J=#J^]+XV"8-^]+XZC*+A\H4E@O@`CL#
MJ2W7D?'I]9'AV#S+^!IJO8MM#K2][>&QGMP4R)X1BL="_#>3\C"+MIIH0>[%
MY.]237_`:C+5.<"AEB.]*0PP-?$1V^XCE#`$/"W;:H<@BT-DAH3Q7=1K39!=
M9F:(*H&9A^#GI5W,V+1T2+-)K;X,M"LEOAL'Q$0W0+:7!G.F<C>&A>X.NB"_
M(@KFO.CJ:RF&EA*TMNY-XM[<@(E&.3F4J9=7PP>1]V6>)>,MKNZ<`@@,',R<
MO$N`@=WB>BSO'>;=!;*BMC%PA*FMH&KSSPT9E9M9Q*B"SV:*R16@*H^N3%*9
M%*(J"RRBJP&IDV(CE4_YO%>H.^,]*8F"M85R+#2!P`P,,Y,XK[BR"'&$:GN.
MJKR*:WWV1<<`\G#*O+/:M[G;;3:&FHW.C[J*M4D$=]B70+4(@N^P2<!4F4;F
MZE8W=\V><0&,S.=V1=;%9:2"=UE9']7:`OTB=1PF9QA\TMP3;*`G".;%,U>K
M*B=9)R*N?+PH%'FM.X-/:(+HKF^FSZ2^2"Y<Y>C+[K(=-,RFB4+`T)%O^E2I
MG2/PV/!(3H;XZM`C^FP.FZBR-*8&'A;3,D5G-%SB0+$42X01;!60T=BF:*Q:
MEQ1C-=F@_DMF17)@?+I*())/@^LS!'QY;7R==V%RJ4=^F`>PGUN/NQE#)_?%
M-9NO*JJCC`8O4#O3,R94E9<"\D#1^:.%B-`[;/NE]B[@TX_*\/H#OM)X;,Y1
MY=0JC$DYKX5R4@J<7DR&,LR*^HRKRC9%I83,^RS%\S@%^NQZ8]B4841SMO@8
MH\<S%R*5J'^4LE@1%E-J2IT"]M56L`GRY>I1U_MQBE6TG$P3&CO;5"20+ZSP
M*_Y\02\6UR_*IJ5Y"7?(=>TZE!>@%=:W,4N.I2EAMJF*BQ1;D#TCKXITPTAH
MQ8B'$`!,7UJ`.?_AJ?0R@Q-K1B7:B[I6L>_"9ML*=P/<JZR"%AIQW-3`4]O?
MAZ5%E[..-\TI7DA(_AS?\]#469IWK8$/%WBFY/.HJ`JS!(DK(;W85W[B>3@L
MO!O?`V*T2?9R]ZI_U>QV.H-F[V9P==-H]_K=K,CHH-\_/[B3BHJNR+M%RE8C
M4;G*\:S5Q/RDS0"@YN=%W;62RG;.)9PN;BYE,(4>&8(NV"L+_6H!OU-L324*
MW3M1K\`WH:>*$O*I;QI.1D%TKS(_N3[TI>>B;2!=,M#4B5>Z7>WT/(AXQKR9
MA_Y*H(`3_$]5G\+@H58JV?X9/@^,N4=0C>#XJCKS8=$?6\C#RFY27K+JQZ?,
M/"]39X76>OH=@7:SX"-N\YF>/3I7J?`L/N137:'/#!N#9"&X6)5FP%KZ/;<F
M-46MK=ZYX.E0[9IX>;.R9X)N!5-JSFY@J4PY)AI,"TF1RE=)LVX^L;C'FKO%
M-,!O>&YVWK#P.@ML`---P`53S:;QNHS[FHT/A9S`IOOA1\=L0\&`L\X')KJ8
M.S!@)11MQ1!-/I25O'GAW>R9[:05^TXK=YA@-N<3=;Y7-5G$"[!%I7$!0`'Q
M+(LG>9[NF86T"?U1C>*1!I7VH8Z>ZN]#L)RDY%A(U)3H,UE]L>FFJ(F0E=\T
M#;>SN!"L7.9!X+DYK+ZX,C[AK`Y./(D6G;'+_.!%P=S6#II8O33%1-!7&&].
M+H"@R&R);\:$UY=9,^]-:&]\#EW.5(T4[OD#+"PUOWE"TURL7GE@1A)SS`.&
M7B0#+L&YCN!_578Y`N@-$(RYC=/_EX?/BN$Q74CTA2)B5@Q@+%Y^]%BZL+JK
MI2);(=W-7BWVRJ*ORU7IG+P3:R;7OI(1U9H`7:X\-4:_UT2,\PK"&6ND``4%
M_C@L]Z=*UN>7N0J!I5GPGHJ%@ZQ8G6R)_5:"2Z8-"SFI.0`^+2WV.(X`A$^C
M1ZR-LU!G3/4<+WZ1YXO[B2[SD"6)!\6FQ4_+AB-\J;*PJRZ6!DKG$\HS:\T+
M"N$-5.&XCY,GO&?98ZO,5GWQF:IC,-]GQ-=Z^:%X0QD5HB\&#.8*)T].&2X.
M5&6"DZ%:MFS]ICLG7F?]FNT(T:GB4&W$YM']=:1JZ3R)+4MRGIDPMQ_S-MOS
M;M7JB%VAU74A6<'H!!/:+G3_>Z930-870EMCA@`X$9TTO?H>_99B+9'U#)WG
MQE;<<<RCK,-YH?1"`P.3RG'N)>D\%&WR,73;A`P.,,:8D^RL]B*0;:Y_G6^(
MVY*"W[.629FOKB'?9*](CKS\9,-W`F176^Y#@>V78MVQ584&3($U;!*6(W0:
M^H8+YX+"XSQ9^(S]KI*$7KQ>'>URYKP2!)&7Y22;4:"`Z80^N7BH.\\A1L-)
M"JU[0%*]0C&<)T_0@JHG7SQ(8.RJO"F%Z>>Z\,RLC0):;P5Q4J>5BED_^<V*
MTG9ZQ1^]9?Y[GC122.U0K;\PX23E$GD@:]61=?(J++#B,_G!;,5H>4`K1]D!
M<S91>(;9&>K'+%DDQ@KEQ?20N0F!42V\\T,.A<@TF8=FK!7#/]J!O4MG>$I(
MFD)24;S02,_$0`),+\D3XE49,AF%JA8ZJ@B5@0$>(TM56V!5&$JU7IPKIPQ$
M_7!EUHU!^U&$_2<4CZO*4N_K%*76T4@/Z&VZ;_U\TCA1G^64>]GG-?84V'.#
M3^+\KV'VH$=_F(S?M_O3[Q].6!P]PKO"GT_<$URU[.]\M,FP\(#U+_ZI\.(5
M0P!>33"H:N0MB::OCF2#I5MN9?:FQ7RMPLX"B9Z=X.NTWB,XH21B4$?DJ2!9
MEH2SZ'KHK-E`W&-`7,',5&599MB0GWU32D6.]=,<]K@*_1:N,:$!-(_RT/P\
M1S=[[@(JJ>P&=`NGPLO3^(O8-A'F-!^`!>@)F:@T*@D^4Z"2M-!>]N]5O14Y
MD[K[6*BV[C&T85("M)?'=1\'Z2>J84X^(-W*:4'/RH6<E;L(WC^G:\&$P?;6
M9^+,4>>%`/+FP4CX&">GZ72.UT8]ZP!QE.9(KK=D?+!JLR2%U:]29LU*ZV@>
M$IW?:5(S5#:PBJ\^J"UK[T_3'PG5DTP])!(V7UT:?\X%VL%01L637MLZ+I0E
MRQCJGS%%S2+,%\QPQ2YFZ#,SA/&J46N]IA\=S++A&>4X]WGD8OE#W:-DT6("
MG9;*-<RT-)QKX'G6XRO5=E>BY4]*)VP)"0O`IP"^;A97N3/X/<>3)98M<"IN
MDT3J.C#!G@6,.=^-N32'VM2)*,-XSMIL/'\2L*1*Q-+RH5P%Q"'E*[SS?RR%
M3=%^>^>;AZON2`5'6_G"9]A0`'N7"=V+C$6AZK\6R>STE3XXJ6RV_#QFD<+*
M]M3'I]&%>N)!(>UF(ID;L4YNBCYQ9S)OS\Q*;9XG>M]%)S`C1-^KPPRQ6;Y7
M:()S,*TQ$56-$8JVI;*P5%J/Z5GG9ZW8>&!RKS$/*O.I,"4NCLQXN6YIH%^L
M4ZI--I[NY&980?F7)G?)N(8>STZ1W\>87C7A\;UZ4GZT%;=?POSP1E;,5+N4
M&=F>W#M/*.0J8JIW)Q<>89(&K8;A*XA&9'#7P>!N'H?!;</,S0]3O]74=0Q4
MSB.>2Z!N3MK&!2`S3K@ZDXH&V;A@>@8*A0O(]>3B548B)@+GD.@!\1"BPKE1
M![/,2_LX3)<.XE)IF#Q=R901SC1`OO4(ZH7/3#C!$_Z#.K"G,@/4R1%C!,^/
MC$Q->3@,&S^Q<3&2HHA8&+LJ9%)L0SI_4BQ&J53ADRF?F9UQ?*8YD3C7CEA#
M1(_37+%(FD65NDJC/&UM.F]/QX</>*X)PR\Z.Q:/EF`FA4[`*AZH"8>%)I99
M5C69LJ0\:J$\6H>O/+YQLYOO/?7<'5`2:@.#QWE1A%"F$[T/HH^7Y'C\)$3#
M3:Z/2?!`SS^9(WIT!]/)<I64):_0-3]']JABU;@/1U!!4%$/J'@EY^P@H,*$
M"3/[0.W$+"+`\SM_4NW["VF:]14-U+/\5'7!Y7]:QTP^>1V8%,I#QU;EVKW7
M'NA3[SZ*LP(N\7#>-7VI5$-V?79T>[YUY$68[#`4A5Y;V\URUU"V=^"J4FK!
M56;<?E&AEJ5Q;Y564.R5E[%P;D4_3=5=E;BU:B]2AXT<W?_]:6DP\VQ3I\?'
MC5VXU$A&/-1E-^9#T&$EY8GH`ZB%%)>LND#QP.73.]5)=VGV1>NU';K-<`KW
M+&B'!B@'Q;#88"_4GXL/U>G=N48!',<'%Q2*-17^9.1:2;L-F-,=+G]\BIOE
M?"K%^^R/I;R)U5H_US3]!0VT@=)68_GYI.?^L*&]8&[<^K[FKE]XF!/<S!B[
MBQ+0:D^,*&#YH@P4/^OK%[Z*E>PTUS$P"X*)^AYC"^_'_A"$<1_0LDCL?+BM
MDY=I92344,*=?F<JG9#]?PWU?V70<@7]"G#@J1JJY>K=Y<3_YTR)E6WJ-S6A
MB2V)+==ARV?.#KW`F^TMS/<JXVBIZ91O8MC>*PR[#:TJQG[OAFB=Q28%-THE
M#X?RQU(Y[(Y[?V)1FW"(-F(4O___/$^(T>C`6._JR2;&\C&*':J49VE>%6K]
MIRWJO,I=Z\KF^L10O&>5&CVGT^J63I&JK/U6(1V;+''$QADAS7$C3=]QW3XA
M#5G4&YLU*O*[C57=W(,;N('5;5_&FD[;M:?-7Z%.5?BD;*5.NON()<IUFFZ#
M)&H'RJM"MO-.M-IT]::L%=9J`6L-HQ0WX-XB>96WLNQ9V*^1[R!,\([C-DL"
MLTU(5A7NH6A`1:,!!&8$9J^2J^L,&O;B"4</9L]FX!6OW]G`=I9897MPN\[Q
MN\0.>)C&F5?!O`3CTD_85U_^:;\^W;Q'!IZEB=-";\IIA,U_?5W!/KW[(RM:
ME56*P_S6A<+V3P?NZ8''.'#333BKNJ4>BHF!,1\62M[I<TCSHBE<CA>JTRWD
M'>;'B1R65Q@:@T3?C[->`8]1'`R=_-VZVFLZXAZ>\-$]",!?X[%.8G.8%!,?
MBXRF7A+%3S^S1S[2+\,5.Q58S-17_2$BS*M]]\OUE=0M1>"F.#I5+8+AOQ.!
M97-5P>3LG-F[7Z]__?;C6;:RBD!^5DI,Y=R:Y%QU)BF\C]3)+'UQUK:F4"(U
M)T2!/(7:7GG+,@>?K`N7X0.+BS<4JJQ!=O*.3_'H;NP#4?718U6$U_0>GD2A
MCS6M57LW5=5&=U3X122)H:H9JSY>8>KX%DYGS`^"Z6K6>IHZ!1G+89AY*0AW
M6#*;+AZ/PVQHK"6F7@)KC+T*5&&.K$2BXB9]E'P8P6KXV/;UJS"UOK&$19&W
MTS";!O+=G`5-B0C3)!+7177-T]TW=">UB2ETN%C=9_LSPWNPXO9<FC4#DXS,
MN@\I"KZCC^`A^P#+YZ7IL`AE[*OSB^IW8*>\BL=H`<S\)#6<>:$[&S_7@51Q
M^W=5?P[8P0JN=AL_V,%G%`55WT!-UK1H1IS1_=0F6;79!YVN#Q-4[7ENL;I4
MJHJ`8L$6U4WE&?+@AS2>I_K?"*P;$+`K#0GL(_ZL3@E<1O$T,@48W]U<?;S\
M48-S+'#UAO,*;BO16BV6+,H3#.F.AW^J9<'G?!)XC"K`-!*'W:AW.NP2A)MK
MT=:GK+!,/G`D^P.F)X>^5ZRL&*N*='H^)(7KC?!<(;85;EU=(-G*HQT[(P1[
MT(Y<%L]JH[8QE9RM/-QMV@./%:85"<:6IOG7N>JY!#2SLT:+QV^>Z#;Y9H8R
MOJUQ>A7%AGC*1J'X>_2/3*S"/>N"X1H$ULJ5(F*O_:17CH@LSD+_B`_)#JT4
MU\M\]<)4FV=MRU.U`J'K+E6I*+O1JKUQ(B_T/K`T&S`637/08*9M%6-!9<7H
MI#+=L2X'6#P(X&B0L/N4X]%M84Y"9FU(EMT752CC<0S_Y`Y4L8XH(JXI,Z0[
M`RV5!%%BGE^H'H>5=GF,[4"PY(ANX*.NO\<QR>+Q4BQ7H=JI3J:J=V7>C6AF
MJLFETNBE9Q\*EB\Z]J_69MNC@5+%@:U6$.>9LOTZCV.<@K<!;F%6;.\SVK#V
M-<?".[2=O"JHDD5"T`@W`1AS;-C4-WM:+5G555A5*WGN,&/-LN#9XH?F0::R
M3];))2LIC@;[_)"RF8(Z@ZVKO:RHB*.+Y":J6]<?4>PGV33FCP44R\^(SN:E
M<N`9<6K:B"[NV;ZAH'/%3"*KPZE[*/4C>,4A1JIL]2$H2ESAX8J-507]O*13
M7M#<4RW38W40&GSRP/^7$D0,X@$KG]N//'1L11YL6`(Z(]UB+,0W5%<5M!41
M\X`<EF^]U_47,5+G%TH=S`,4>=5[?9MN8'[JAX[Y"R/'[VX^WGS^T3P#UA/M
M+5;H]A,6NC9EW[=7V1J+Q]+])PQ#1]+I2#H=2:<CZ92BNIK8=/:7CJ036]:,
M+>E(.AU)IR/I!YCE_B6-O;'*?YA7THSY8]ZID8ZHT\'1=:GAMARW.2B=)%59
M_*WB:)253F?4"6HLG%'O#7J$-&1BKTO"WZ/XSU,_/#5M(+:QLU\[4EN[([-=
MI]FV=C"C*@M=ME8FY7O`$M%V^@UK!NRA2`2YSR]T-_)#7X[!>[Z/HN%>2I]8
M)?1^*S@TG$;'GONX+=VJPEKD7M9`PQV/=+8<M[-V3)^$DSRR`ZE&4!5R[:[H
M0)WB0,V!T[98%O4UTE2%&<C)):0AI-FM=])U>MW=U62J"C-8-'2H6LGV@]MU
MBOV7&!OC)C.'?5$GD#`MX#KKO;DTBVU(M)!T/W_=-']=WNHS[^:I6X@E*A7\
MC/V*!\Y%J(Y?Z0("4^['.@?;&_/X7I^EPJ[(H51IV7ZH.HT-LRQN73ID:MX-
M#TAT08L8O9%AWF,^.YC%/2^=I%FSLRF,R-=G8?3X)E%^U`OOXM-I`'*O2IYD
M)W94Q^>A+]61,E\W=4YCG72!Q1+N\10:O#[`IO8+'07/\-C^_(W8,SJ:3%,<
M2BJQS(8ZU9/$7-4P0?;!#M+C"&[\30H\O1/X68V,0@_5"?>PQD8\TWVL!9=B
MC%/W)T"5!Z&+QL0\O!?9Q&(A=`/$!YC*#-A;?E`/':5QZ*L&R_BDD?\=_S8'
MZ4;P:M5H;GZ+N@B/Y:5^@)"_NP.QS<9IT\ZA2CV7@SEU?:3XI^Y#/-"'-E"6
M\'@(D^EDPG6MF>E+Z$2'/.B0Q_/Q'#KD4>\)UB1.5SGOF;+IZ9`'L67-V)(.
M>51NOX,.>93*817:`R^3]7X!2CJYK_V"K[]/55/Y/5_*P%Z(A_<=MT4IV#OC
MB2.VV@AJCAQJ&DY[?5/SZ*&&;.T/U_.](ZS;GNUR;&-X'UR.N^LZO88U::K*
MBI>MGTD-'[!(@"G;IV,?Y%"O?^QCY6YW&;)T/`GF'3#R2FH3=80)YC42U/HJ
MNJ,2SDZ+A),\M'H(YE9!(<V5*D_EY8;/NQ:^5L=I6C\8N<8\:RQAU1.F^FJY
MVBFK9MMI=*P="CH4D2!_[H5>6<^D=I/1^!:JOG-!<;GV]@C?2K@YW]7H--;:
M"1`U$N7ZZL)C$MZVT[*W3T#"2Q[A09S2K87[5*DCO&50K`2GH>$TVLV=T:T6
M;$1>^`$"6%68JU(851D8&CB]SNY0J"J\8#&V054&MA_<KJL,_".*AH]^$+#3
MI2%O0P^6/\^TLY3I'39!Q;/G?((=,/]E#NR'0WV\_L$7CZ:3JC_!\@$J9\PT
MG@O#E`>Z79S#DMD4Y2N899T`!3;DU$TP1[Z$G]1Q<`>/[\.K\+R\^"N%I\$=
M_HAY?NRE$ZDZ74J&W>UY0@V[UQSARZ>S.?;FPX:@?JBJ<"(#',RA[/6/X-3N
MF#:LW[T?ZD'R-(FR+[1AI[[1)[G[O3.W,6CU.O;.<[O=-Q[H;K=W?=ZY-@>S
M:8+'.D$ZDE]E3_.`SC[WMR-@__F3SU'`E[NW4U2#>*T$7A,3WXO"8>HED36>
MVP,=B2</AR>_P`3E&`9(&$C\M@-^NXT2'FP1W".#;QL&=#L5*QYBG9_V4#ID
M_YOO"R-P^_"TDEANQ5]9I'6?^J(JFQ?6-K+JM$_E-IV6O=)D55E*O(\VO$O5
M2@0#AP0#>1'OIC4>J,IZ$A80%A`6;##I7I.:R1(&$`8<,P:X+:?1MG90O"I+
M^588.+2C=_N,/!2/ZA5RMK!E"E5@>>.1G[;3:Y;4XHI._&Q*ONJ(?^5L!I+=
M73CB1U^FA4241)1$E$3TZ$7T8$30LH5[W!9L3;?-;=+JDL?Q#`^E//`@%7@T
M*.^AP[!USB8M<HZWOEG/Z0RL;273P6J**Q^Q+)5G9))$D40=HT19W-8D22))
M.F))ZCNMINTBTH<M2X>V<6B3MGFQAUAXT7T(/P[9$)PP+/;@_97ZTL=:#^5L
M"1Y,0*0)(DF=M2C:6"&==SC"U7:Z`^J02<)%PE630`>)&(D8B5@A+M]HNB1<
M9?IJA^62?1()$]^],0_O!1OZHY&(!1:\JTIH9+][SZV&-6$ZC@WFZ@E/?;52
M[<2%3A:27)!<D%R07)!<D'E5F?R]"H4(=IO8]\\T%%E.G^UD-4,26QUJGENB
M6FR9[JXMQ*NL7/N>-@.G6U9+]4WH60N^H]AJ16L`$$821M9FDY8PDC"2,+(*
MO$H86>44:$)(0DA"2$+(0T%(MV.S[A6!I/W`Y?X!TC1<:V)WM;V#Y=K="4J@
M6]UH17Q%?$5\17Q5%UH17Q%?6:=5W7>+JTO9C7I%[9"@=2-B90A'G$B<6`W"
M$2<2)U:#<,2)Q\R)-8G85:G./778*V&GHKPYE["ET';<#G78JUUX8^_JBF#@
MD&#`:GY:55:24(!0@%!@/QE855E'P@#"`,*`31R"@=/I6VM>4)6E?"L,E+DO
MU=A'T&%W(8;=M]*S&1^K;IW;=VVGTRJ_\-\RV^TIG;*Z%6(J'.'>NW%`4EMZ
M88WC3M,EX23A).$DX23A/'#A)'NWTB5[]K^/;I-6M:[,4P=FW-VQP#U1K/9U
M=NK`113=WW-N'^$7X=>Z)-MQ#9PZ<!'A%^$7X5=-\&NG]6GJP$.$7H1>A%XU
M0:]=UXZI`QN]%<`*@;*?$@[37W7]S@96(%K@A^+4',QQFXT?]D^UV@ZNP']_
MI#+Q1S-;XU4?'_6K[J)@J!_T,4QX>.\#,RTGQVQ#$)9O:KD?V/SAC$LI$LEX
M+)C'IWX"4\3>MCR$_Y]$(//X"?4A2X`<,4NE&*4!"_R18/X(OS1_2S84B8@G
M?H@2<,8^+OX81LG"!4[V>(Z-<[,KL+LN`,;PC+'/(;L2GIC<P:N;;15OA7_Q
MD9?1!'!BIAOOQCA89H5$'?<'.Z3VX,LX"@(,'/LAS%G(!/Y@WZ)?^.Q6>(ZE
M%;7QE(NS_SEC[S+F:#8^9(/,OW(__'C&;H'N_A+71*-\3BR)@'?LC.D_FV=-
M.R2"*P)D+\7.,4[!"](A9J"%[.0S,%-\@G\B5RG@9G<"S#X]W1$'=M=Q_TCS
M\A(!-#_R((@\S<;X'O55D;>G,+Y(OQ^`(PC@)<@9`I^MTN'N9D6^UKS_3QZF
M/)[E6PV+K._!?P.!]^*W$Q'?@Y0\^LF87=S^AN(MXE"]G`<.?/1@B4_@EY.7
M5A+OM+F([MFRF?&61716K^)MS(>"?>(3(5>O)?LFX/<H$<P%6A8X_;S0N-LI
ML#L;13&#!<07P9\3O8JQN.<QVGQZ@>?W+DA!Q@!/EN2L@GJG;GI2W:<$$Z`U
M>E3@"HJ+R70R04F!99CSM7Q?#3-D/6=O38)Z`@7[V0$6GK+@\6%BL7J*'X(S
MJS\77Q,BCP<++HZ+U^0/UN+DB2`PU_Q\TCA1G\%@][+/*TASZX-4LD_BD7V-
M)GS)CX9EN_=#/4B>)E'VA7;:U3>/_C`9OQ_TS]JM7N>'S)T`5R'@4RG>9W]\
M>.H>S,=>W+F>YU(T5^8PK+'YK08$#VC\\*KWLNA'F1O=UK8W[OB^?DW&.:C)
M.'=-S_:!SX_XQ<;[:I+C4Z^`;'GGO)8L@/YVL\]O^TV[\[^`EVY[]D?,'>O7
M\%F(GRY'2'=3RJ<D!EL=V/I''$G)\L2Z\TF4`DF)MC9H6SQC=UX(01!YK9`7
M.\YOS[A5HR:!ZN%P)H$J@6I-R?L&4"7GI2*5.HZ)/J2IUX>[P1[@KE+@5LII
M(>(PXK"<P[Z)::*3)`R;M4E[DO8D^E27/O/AO@9>^SRX73YRO1OBYFTL==)&
ME$H>#F6YAY,K5&>@S'S63U%XBAE"(A&,W\="8*6M36ILU9"(K^1&;$/&]FF?
MS01PZ`%2KG*H:!\(GR-V5:34WN&%-S2\K<ZY!*?1LE=/H>IKC_=5[<A4Y8E&
M`K-0!V<W$K.L9LHC4G5+.Y(\';P\[;+H6U4XH(IJB.Q:@I4#@A70TO;Z*E5^
M[:L(*)4G&@G,@ET[V(&\D%5+TG04TN0VK/7PJ/S*OU7YU&1#M-1ZIZF$08J8
M!;ZTMV-P:!L#;L/NO@"Y2>M7N2XY8:.$<F'K9V0<2Q>E@U[O=YV!]4RO@S=3
M#Y<=7'=`XD_JD-2AN:_O4G_A8UIO4(?+M9Q('1XK.S2;UHRCJBSL7L(.%4HE
M*Y.VM\(;AS"_^]G.HGJ'$J3HG-H.4U2(=/4UV*P2<;]0[KANMW3>J@H2[=+(
M.QP>>><Z_09MY^W>,#P<%FJY+H$,159(4;]!4;?L!2&/08:.D$=`47?[U@(U
MI*B/D(6Z.^C*6Q56V$O,Y[!".Q_#TVD<>4)*%@L)=/3&JGKZ4#R(()KBD=7Z
MFCTEAW8H_83VV]8D!^AU>RF`5<&.7=IXM5OQ=\VN-45,]EKMV<%U6BUK_=ZJ
MLK04*"&52"J15.+:*I$T(FG$N?QW>J01;40D*I014&H6BFHQ%V*+N=(C7(<6
MJW`M!RLJ1+CZFFR'$W1&[X9..!*/O&C][6!C@LS"P^4?UVD.K-F+QX`Q%%HA
M&5I))ZJN1=J:.(4XA3BE5F&>PXKF?$[@M_I:,^6&:YJG;I.R2_9F[^VW6TT9
MJ<?MOK7R)Z]1IRH`LU-M?F@<\Z[5L>=KKTD<"MK4=B^OZ;@M:^>#JK*T%((A
ME5S>>;JFO?-TI)`/GU_>N;T^*612R.MNEK0IM<9&S*5">0ZETM9^?V8B7.T)
M5SES<0.MU@*M-HS2NT"\2><_NQKK-_@\B"+LK]'V+57:RR"E?8TZ<)H]>\?W
MMZ9G+?BN;,^91)U$O4Q?J^TT[)7+?#M!-_+#:L&MUGJG$!(0$I2(!!W'[=O+
M6B6E3^%R\G\("FL)A5W'=2M@$]6"[\C_(5&OL:B_:SGM5DGY0N3_D/]#2%`7
M)&@ZW;*VG4GI/R%?87_RIX0#759>7_B[,*_`#\7I6"B<=)N-'_8_L9<&5UB%
M/U*9^*/9L8Y7?7S4K[J+@J%^T"\1`K;_((:,2RD2R4X96QK]-J19?C*/!8O%
M@R\>X;M1%#-_,N5^C'4?V>-8A$P\P)^2P2_>F(?W0C(_9)X?>^E$)CSTU!=#
MD/9$L&3,$_A',(_'\0P0C_$)B'/"HA'CH7XEF_`9"Z.$W>&+/?2QD=G/&%LQ
MQ_VO4-TXJF[C72T!OP/_\#"9L?QPD;L\^&THP\Y9X$_\!)C],7N'+]DTCA[\
M(4I`+`1R*_!Z?"\<=B]"X,\@F"G9F,)SHZ'$"]XZ&J/@C`Y3]!V"-,0\\:/P
M/2Z92>19]KFWFG<2[6S(S6778:LA3^#+L704Y6$)V#2-85FD4/1'E+F,`*O"
M6<XCO0^2A>(15W.8>@AN(9@D,YF(B3QCYYX7ISS((,]#FT)#G@".GO`%GO`B
MB?=K-(-?%4B*,!7(+7CS?0BC'9YM#UE["":2P;!ZO+>PQJ,H"*)'5%FPP)S)
M=#+A\4PI+B_Q'WS$"=!@R$-%/A'?IR*4XGTUZ%X>&Q3N6?`H&^#*J-4!&P#L
M!/6Y^-`PBB<\6'"(7+PF?["R=)DG@L!<\_-)XT1]!C/>RSZO(,0M"*5DGT#<
MOT83OA2<?_2'R1C^A#D9[P'@*^!36*OLCP]/O8'YH(KY@;E'T5^9T;E&AJ$:
MR\\GW=X/K_HJB^Z4N='=]K[VKE]XF!.DT[IO/-W1JW:VOMT#O*LMVD\`BNQ7
M9=&PZQ`MCW^F\$VKX6P1'R`NW(8+6WO@PE=HN7^^;#9<:XWA:(>>F.TU9EM[
M6XG@KF2E>P!*]=T03?E8A223<91*</CEVGMK="#H>=:[$/=^&*([?,<#C/+N
M4T=4OAR0O2W'-^PH5F;3L-NTMV58]97?*M1%I\'*SX8DG#EXG'&==L=>EE+5
MU_ZM2$/V]'Q7447MAWZ2QANU$CC<<@'O.O;*MQ]-]8B*24[E]/,!BTNW:ZV\
MQG&("_G::Z@EE84B_2B4/[WC0]SIQC2L<MH"O!)^/)SRQ(.FM?CVUD2K"J>1
MMUH#;7@\HOFN`J))ZK=")FR9M+H.AR6$LTLY?U,5DNWN)$V]PDZ-9DFUD5=0
MIBJ\4+;I0!8"`0T!S<)]O6Z78*:,0W0[&Q@EW*^9R/$MB;P_3R^X%$-UJD.$
M4ITJ8:=+4]B&/NQV?EJ$3027&/@'+B^\2!_XB$4`'\%,3"(FQSP6IW=J3%,^
M4R?BDIC##1[>(9G^*9U&H3HE<H]!'#;$<W`C[L?L@0>IR(ZJ\$<>#\]@')$4
MV>$2<PQ%GR1A7&:'"1AJ)G57+/Y*?>G#$Z6('WQ/F!-(#GL<^]X8CRK,#RCA
M#0]XE`6&KR\[4_.^@RM&?J)/S7"0?(&'8]0,_!#>Z0FI?BN,98DR:K!>+(;J
MY!00!V$3?^4!T,8?GN*90#[U$_B,AVYB,8WB1,_*XW+,4-&R41Q-V,@/P0!7
M9P/UP0H?EB+FV`T(SP^&*VZ)8#IZ6>:WO.'D#1V^6[A/RYYFYH6%S]@Q1H;!
M97_FR!7(4AIH_C(KI:1#<^3\7(T^"BKIJ,P1')5QNV\\*],9[/@H2;\N1UYH
M?BOOV_G9JH.<'\4)Z:336VWYVS&>H7_34:?J<5SE@D7$<72VKD)<6(WC3NO7
MB=H_T]+!.^+$RG"BM31JXD3BQ$/"1&N5!XE-#XI-Z1CSKMC3[=`YYA)8K$*I
MFJ5F?8U&PDM8%`)IO6B"NV&C*!;9IX1_%Y*]<_=Z[*/R:<-T['`Q:W5@+R_C
MN--2:P12E;/?"(:.'8;L'=DD&"(8(A@B&-H&AOK=\FLP$`P1#!$,$0R]="*_
M8>],SG'#$$4LEZ-&*DZT3?3RX$I?M*TY'559;+R/3K;M)IA_<.+0LA8*)'$@
M<:A8[EX)9Z?+:BMZN&T!29Y(GIZ7)XM;44<B3[1;OH[?$XK$^#[E\!=U*K8:
MPJ%.Q>^:G=U52Z".Y13%/HP*,`2@!*`&0-U!2;X9`2@!*`%H)9F2`-0B@/8L
M)F01@!*`$H!6GRD)0"T":+O1JPXYCQA`URJB6.&J7=8*9;'G!K\J<JS+:+7[
MZZB`14XNJSX/L.,FO/?"TO5A\HO@WIY^WV8M^W-W\^WZ'.:WD7!M5EFOOQVW
MYK>]6E?/Q_-^7I!BP1(_9!+X$^CK9"4=52%%/ISXH2\3K*KW(+);Y=F;17E#
MLBPLON)Q>X3"VVI7,)%%4U-#4\H4RX"&0U.T,Q'Q1&9U/Z<!AVO&_$$X+(K9
MHQ\$YA-'1A"QYP,G3&.L[2G^2F'5DTC73<02HA,>_RF2Q4JBP$H38"*I!L$3
M_5V`947Q@ICC,C%3DO03ET/^E_ISR+&_C`]C,"]0A4K-,_5<3`539#O@,S\6
M+(Q8`)>9PIQ+Z[$A\8R>-5I1+=)0>)$N&/D>U]UL:C;8#%AA.=]NF\72%42+
M$U:S=&`IDK'Z?H+U36.!YWP-!=3LD8P@E<U&LW/&/B\NMJEMF564Q:JKNFCK
MKDC4M$,;8(5=C7@YMKC5B!5CO(Q^>T0&"U5%J3CMLUB[6'T986J.70"X:2(3
MKIM\8+5BF4X`/GU36EF7H:7BLU1\]B4SVM3,;.^Z^*S;J$D54IH@3;#4%]+A
MD[++Y5`]T,W<9F+#;=B0JM)6L)A=K7>FB+4.N@!==?G-5GW$^K"7B781>%67
MF2S2<O_\]KOZ0@S7C8;L>'CGL%3\_N6#$/L;W;791*CH\+[@U@8A2761A-02
M,1.I)5)+I);LNE`5RC(M,TSTN;CMEK`[<>^'H4I!&)DNI-O@T:L'N6T2=[\G
MN)U&M^6TFN47T:L*Q^!]919$J)#@54[A6S>(*L]M5":O>%_OK&4OQ;KJ2T]`
M4P'/XJ@T>6?@M%T2,!(PTN2DR<M%F^Y9SR6@*=.!/RP__1^8V?Y*+.MHBG8V
M>TZG085L=Z!5#DSK'JY,#,YZUD)0)!`D$+47B&:OZ0P:5-Z99()D8AX^;%AS
M.@Y%(&AS\'G:GDN93L20G;*)B.]%3`'$EWL)])QF<T!>/84/JZ.C#D>\W/:9
M2\)%PD7"58)P[8W=2-Y(WDC>2-YH2VCS;A\F19<VA?"^=X.VT^Y8BX$O+WMY
MN\O5+;5+RNF`):9SUJ%H(`D$"42N0IJ8RM_IDPXA'4(BLUX[Z;,6Z1`;KDF%
MX@-ETO8FBD?"+RF1[7#"`Z")G,X.$D1)0U5,]NJKN@Y'^)J#L[8U&_#@`W$D
M7"1<FVBVMM-IV^OT2HJ-9(]D;TTZ]>G,4<E>W&$Y:T]J@XAP6')5D%+ZTZW=
MVFO7XN@ZW5;/:33MV9JO-DVK0YNSL@U2TGTEQR`/X8QQ>7,NX^B7N]Q/Z,AC
ML`0"I):W5LN-;MMI6\PU)K5,$DEJ^=C4LLU:7559R+TXU16.8IGN:TULM;9W
M^%B_&O`."5HW(E:&<,2)Q(G5(!QQ(G%B-0A'G'C,G$@[,MF1']7+EW9DR@C]
M-#I.=V"MM!R%?JHIHQ3ZH=!/N<7XK+4.K<I"$@C0CLR>Q*G;;3G-)BEEDD=2
MRJ24MYUT_VS]ILO'HI3KOA]CDY99NT#&'U1C/C;B?LP>>)`*=+(CW;V2O4C:
MDH9VKXN_LV$:8RYF,A:;^_S6P:SR&<#4<&*QVL.`DK]WQA%';#75)=!=*O\=
MTS9+M0E'JNW@55O[K$7G=0EH2+554[45G,R?$MRZ7'7]SD2A0*;`#\6IV=]V
MFXT?]B^G+PVNL*A_I#+Q1S.KX[T=/^?Q/G+)!+QPPI5WG"C_4[FD;`A?L51F
M3NE%`'Q_^LT;1X&0YGXVC7T/+YA$0Q&P1S\9JVM'40"BC3]P[#*@W_6^&DNW
M'HMO,YS"/0M0@-D5:H']$)!.?RX^-(SB"0\6T,+%:_('*\%BG@@"<\W/)XT3
M]1EPPLL^KR#$K3^!M?HD'MG7:,*70/;1'R9C^!/F9,+B`&@!GTKQ/OOCPU.X
MF0\J7@6>[97PM4942HWEYY-N[X=7M<@B;IL;W>ZV-^[FA93@4K9:7MCY6=[;
MV;EV]D#616R+@NKCHP:,NR@8Z@=]`AAAO\)/8\FN`5V&[)\I?--J.%LH<.)+
M:W;V3GBQC*W,73!ML^%:RZ`@QX4X\4V<N/:V8=VWT\I$T*^^_).-8B&8CXL&
M#@6+P7NH2=BB^MRKF?6'FM#S@-&4&'$C1B3C\L/U]ZGP,+82^"-K@+A7$I7`
M45TV$SR6]25/O6#LR-F'++GG27GE/_A#/'I4(_NM.HS8(!-MW]A6(<)5A=?(
M"OOP/U'`$S_PDQGIT&=T:,\:=A%$58T^);/.8!LHHG2![0=7=KI`E.<$,#'W
M7Q^$9*,H9LG8ERJ3@..^OL/\1*41J*U^N#`9\V2>7^`'`;O#QYA^EIAC\,#C
M&28'2&\LABFF$_`1,"5<YT43_&&4!L&,P?O@Q6?,])5)8[APS!\$7"?"Y:P%
M^*A2&W3V`@^'^<MC\8"OAI&.6"@\(24,`#Z%3*9W4OR5@DR8I'N)UW`O27F`
M<\W?._1'(QCA*(XF\+)(BOS]<G&`CR(6A;'=<9QS.HU"!E1+HACA0!$U]D7H
M";AYGI<!LY^F"=>4X_"<,2PY$$**4/H)T)\ED9KJ0Z[.V`@&"VMBB/_!Y&\(
MCO1<O-11G_&1YB?].AC>8FH(_I0MGSF<<,8P@^02KN?AC*42%V(^&_C#^U.E
M@L#W,,*A@)=/<&=RY5C/JB&3;\\#V4'23D9R_LACX$V,K`.9<<WDF".[@9UK
M5E-\AQ514H6_G&K&PR4&YN$Z62?@H5Q8RO]:?F3V*A0^E!"0#EAB'H;X'S^4
M"0^""<B+9*AT&6?)8W2*JSZ*TO@4_7`C2?I%200W+/"6S%\!*(*"$.)`87@<
M?4Z5Z0)C]\WS<692Q`_`6^:Y&8N*R32(9D+@%#P!;JO)4U(L:Z:I%[G?;#8^
M+#XD_\']@,/(X<,<PGD<^][XV;?H-[!)BML<8L*12OEE&B!%MC[9Z1XD4`YJ
M)`%K;BL5>%-A3`+4E``B&B`!X0TG1<5B]L##@(43'L/#X`IILM$H_^P8\L_<
MMR:@M0?;YH-MG4A6E_L:=1EH;2A:[96@N-$;4Q;=?>0L4H8BL>$B&W;WP(6V
M"LY0/F+M8I_$=U7)/B1FW+;LUO/,6!_->ZY\8P(V^[Q$1U%6L%M68F?=L,:N
MI4$7_JGHZ/ZA]BRN7LNYV=\`U2[%_V`8EP"%E!,II^KR$BDG4DZDG,IPIZJ9
M6F@]V'0A[OTPQ*VT0H]H6TAME89EG)>Q7\&HU7&:C5;I!*3"QM42T<I9"-8M
MJ'JS8B7*K-4#P=S&F4L`1@!690`[0L.B.W#<CK6RYR27))=D6)!A089%+0&L
M)AO$I5:A$4`\^4J0KYI=8.R+UKNFZW2[UH1K>=7+(X9UQOAQGQQQ8,I^[3VK
MDG,72U!&[EF[9XM3JL+Z9=O%)!&'K$-:#:??M%9^GW0(2<RAZY#&6<.:O%2%
M]??BFE0HX%)J>3A]:+&,G=97.Z$>7\34;3F=]@Y[S1YU1*)&$EXY#;F[D&I5
MN*T24=/*`%7O;$!=KPAH]KVG2B;$<C97WVDUN_NG,)D0)-ED0I`)\>+>JK5P
M=N77WF*,@@H3;C^XD@M"59N85:ZGI3Z^<'`"JZK=^"$//9\'[&,HDSC59=XJ
M.)ER>*$([MWI][+'_S%DW//`B@.:BWGKS%C\E?JQ,"7V=*F[PC+]*KA,LY^Q
M`MJ5+[T@DJKVY&TT];W\IGPUS^$U::AJ`W[#(*,JF781P7_8NY.;\V\7)S^N
MON8R&OHC4`:J>N"[D_-OER<_ZBJ265U"U`E3R7P8S"A_'Y=2F-$%/K_#VH\^
MC&ZBAZ[J=18K3JK*?\)+8U5Z3]?^\T-X#?83"L2#"*1CZFA&H7K[A,=_XAO@
MJGFEOF?>BN7@DIACX1G\29,XNV"6$:O0IA3+6PX7RUC.1ZO*"LIL6/CP]]L+
MR!H,5RS;UN[#-38Y\!><!'/9J>(MO<I`^T+)TK_2"(OO:7KK"I^JP"&V"%!6
M@JH(F2&%(;./C*VJE9IUVK[<X1H46K!D2R)1<S6)5A-(EX"4/CR;QPOT62*,
MD]U?N'%.VN>?DO&_JK2+#!Y&B7FTH[A<M>,U)4#S0KTL$=XX]/]*S9NTZ/`@
M@-?<ATK0L6YN01+PT=$=5LY4!0#]HO35?E%;3Q?U7H0B5D5[597?(@T+E%,T
M!XAXEFBX%L\2K?#&PC/]T`O2H5"/!4`:`J0C&&/]5B['#-U*/1P-;QE7S)^P
M_6*\J.3:VU&Z70N+J)8&<.E&`U@##/2\*NIM"N/.:P5/H\#W9J@;%:<6F7R:
MPJ,?QR!"6+4WAA=&(?PT`VA#8/(R65!1*WP"*%9@XW_I&M&&\=-P]3-!%8/$
MPCBQ-/C<<I@4IG7&?L<+^0,'T8#;%\T45;%Z)5;C2/1C%K3\Q]&3ZW*477S!
MZM$LJ`@CN#ENP`.Q-BV0QKQ!7SGE,9^@Q9'!`4YVH9LBF_DB`$A(XP<!JL-T
M8,_+:RMC)U2_QR*$98IU<7)@&0]\>JQ2#&B"=P))XPR1]).?@OZ*F6:D]&7&
M;<I(FO`_!?LC'=X;YKJ+TD4XS,C(,:S@3U7EY,<HA8D@,9)"I?DG]`1^X`6C
M<JX"S]CEF(?W0F;8JFI@!ZJB_%,[SBD0,X-531A%J[R&.[YME&(%]SGD`J4\
M-=`"TL.J\=%(>(D1.YD&6N(TU1-4VN8Y:A9`_ZI"28V@3W_$R]_[";S!TT^Z
MA)5R&/[+KH$C@>`YP!4J1ZO?3Y=FM0W)0):4HE8VKGHNOFMI`(8M+R.TVU&V
MX2\5GU?&Q04/%'A_&POEPZSPL+<*?@[.N@"J00"\;V>R.+>W/LD$"\VVA.*0
MH0#]I4R@]\AT9O1N[ZQA>?A*+G<U`2QJ.C=W6@V'K:PJ6?F%^":FB9C<B7AI
M,LL'#;>9C(.@B1U%P%<)9@XNT01>GBO#$8`Y2I#N_:%$*5:*=<;`8\=(`.@F
M@]Y1@ITLAJ"*/#2Y`7E,ZPQCS/QV]@W\=7/[&5,=`9ZVN@#Q4X`O<OE=4-Z9
MBVR,$2/9A8>,??`98F\\HYK^V\+X5]58`2T-O:Q?^$Q_.+6#C+=*4Z/1C#&@
M"9H`<MZ+8I6%(8MF`]>1L:P!A+)-5>N![/NI'B]XWM-I''W/C1G@D0*CW`F/
M&S-7MX>(X@28'DP%;;KE`RH,`W@6#='5<;.,%_/QRP1>;(;_PMR,]74'EDX`
MYA(8-KI+0N85E\+C9,N\(@17XBZI",,'$09G1#P!M^LN*?@43_EU\<)%_B^P
MCQ(6-*P!FGVPU&%065B->.WH\']I#^H+-K="K6V%]T\7.E6-.<)V8D(CN@$2
M\.&#4%L-V/PK`:<.9`']NB"8M_'1[8/`50_19PW,G6HO`8-YX/7YYEHP0`2(
M%+;Z$B'\A8W$U(3,/0;OS8BROD-N[P/\-!6QL5A`$/"%GP2:-'#?4*O"FUBY
M"MG&!3Y1A6['40H.+SB^^)YY[R%X"E`SE+/@@8<^UY-8'*P>E)&[WT(?C:QO
M2>X09R^,E1XJ1#A-X[&%OE&9[UN8!SYC#C`@\4,??S#&U_SNC&9P!?AI=^F\
M/Y5>GA5KL]3V:=4D%AN5`1)Y@'GY/<:Z5#M.&`U`UHA"CK8E[CI5%W+*ZQED
M182_C?VI"LZ9=EYVW)Y<5MP/[.D;K/AVQO,\:];8;V[8'GW6OTQOOX)OAHT[
MA&K<0;[T9O,HS6G6\#P/14D!#!#>.V8+*]`FUQ!#[&#A<;7EF`D.0'&IPC2P
MLTZ&IZVL5R8IR]EP;QI:)BDAI@B0H!R@H#`*WI=E,GP%5Q3]/"?;VU,&NMJ3
M">]A<-I"+\V>V.CU4KNN,LEL4"_2?^>VJ*.N`'N89QL0RK!5[6YQ"Q.3B=":
M=O+'JXO,NUDH'L'7B(:I9^Z&#]BE6,@/:,/"8'BV]9].IP&ZWRI)25G`V(M8
MY7XHO_Q#=C\^#/^;1,D,P7[1,M:Q+-75U)_<I;$TF\.@]:/T?LSNT0@/\3L0
MDM@0JSAF12_3"-4DDN"^H4A40^9[CK$%$W#(J:BV<O.]R,PW*/9TGF"*A&H;
MJ_O`"LQ\D./H$1NI1E(^/Y3\)?B#&1=<"3X&M?VL9MO/P>"LT6RU6[V.Q>Z?
MW;=V_]QY*\=F77I.T@1I@F6^D`K8O;&82H^:C=ZJH$6QV^@&A*P8HU7N0"$Q
MV@M=;=>E8TU0KKK,5XWV1G5J,[H<)7HN>D"-<(EG:\BSUDK@$\\2SQXGSEJK
M)D(,?:0,?6B=S.OKYQ^`>_5NB`'@V.3X1*G$C"BJP$O,M'MFHN*U+S7<6&,7
M=9]26_FR152RJGA?R^EV[%7GK?K:/V=,[8PECEC_$=(<.](T=M`YL2IK3TA#
M2$-(LQ^D&3@]>UW8*K_VA#2$-(0T^T&:OM-N-PEI*`R]+@G_44R3WB9X^%K[
MKCTG`I715-5I692Q-<E#_?*.7+,?L<"Y3K=C;:^<!(X$C@3N98'K./WN\AE>
M$C@2.!*X<GHL.X,!"9Q5@2MSS[Y?=Z_O$Q;]W>7&_:L]SB@V]2;R'43PRG5:
M]AIG;T^RJG`/Q=$K&D<G,",P6P?,RC+I",P(S&H*9K7H6%L/I*M)JV2G/["7
M9$6=D@DC#QXCJ\*.]8#!RB!=VVFW[25Y';W!1\V8*U[3L6[C51^7RU8+T[7,
M4G>H:]49#&N(9J5AI<`RA^ROE,>)B%63,5]B;T\\`>[`90'H00"U)[75)R*^
MA\M5>[^+V]\6&[!YJOF9+@C_R&?8J"\6TRA.=!M>J2?%_'"$]?U,]?4OL7CP
MHU0&,W.QJAZ97Z$*Y:L*C+'PN%3EWF,Q"K)&9UG_!WVO*@MHWO.DXGH8/2Z,
M9EX+/JL7GW?VS1[PGJ%)QF,'OIGX2*\4RV;J.I9@J\FQC]4KO\$MGZ)$L,Y[
M=G*12F`>*9E90O9Q/I<317U4%JJX>[`PSRA<*F._8D;X+A[(2+_0;<`;S[V_
M4E_J@I4OOD$MFJE"NZIJOJ<B[86GG;VARFREQ?D8!K<:6#["<GNJ0NQ7M=X@
M=1^E3$'F"FVVO\11"'][NO)J=4K\UPW;-<5#]L\4R*QQ->]DZB]1?=[<_+<I
M]N-3;<U_._D11/ULO@;XF%/7==@W?S(-8+`91A<ZJ>+R?@P?X*\(NXO=8BLQ
M>!1VY\5;?*&[ITX6[_"S.]C=S#32Q&=G57'G/P-TW(F%WD_X-%`76H_H$L0Q
M5MS%;JN!_R^%8?,FY8S#*X=YR^@D&QZ6Z14+BLJHI)G`,])WXMX/0QP2'Z'*
MN@(&QG9P#.D*9.GJ%A_8J!I/;OL3-H5_HZ&:;"Q\4#:_"S!850M1+,H+<L"'
MIE=IUG$-QP'S4W5_>5[AF/E&;.#"-%85E?.FB7,],HTT;JIQK&Q"4MTV'G44
MJE`\)U2PB%I.&@Z[5:VHD8TNHQC[\>%"S.4)UPI`,0;7_PG:.:9ZM`<6@!::
M!_@#+!5@D*GOY5U>=&/B57)\&0U5DQIMZ11&A8W\Q)))EK&MJOP>ABFRE.%@
MD)?G&;]SQJXY-MW)N1D>#W=.?"QYK;A>-;G2EA)>A_6[908<?JX2,@EPV%V:
M/)$4/R&YJ(5<_,IGB]KB!?EH])WYM;GE"C;A'2R>KH#^3C?A[C<Z/[Z?7_LE
ME>-A]!C.ORD(P"D[GP,\,,VWZTOVA<?\/N;3L61?TEBFIG$3R,IH5!2>BS0(
M!/RUJ/1<G`5(26'@IF_3HBHI_*Y_R446QS"=CZ'8>2&C3EZ$'QM@O2K/3_T0
M)*UJ4`6,O>&LOIU?,!>EV/R!,N+YV`X*'8!BVU"%$%/L#05B>)_ZNM?ZT\G`
M7!?F\NQPT"6+L^;<=ZCM`6F^^U)=5'@\3!5$&QT)/YEI-P(I_=0N:9^ZO1+X
M*<-AQ&A_J$:KO10T/F#E\S'!]P;_8,!\.@T*@C!=>@&?TP.M&^6?(H<DJQM7
MLG2**.>9'N:Z"7C(Q(/V:+-.`_G0P!2Z0[M)ZGX+4=XE[,G0%3QK6$7T-M[S
MLVSM%/3&@J3W':,,N5SQ!-6+7%N5BU:6FE7&N\8ZR[3(T!\J#5`.Z!/FV\/\
M\VGL!R\80PN2^L27:'0*,OLQ!+"[][''[>D_HFCXZ`>Z$\UGM*%//R+^A#PX
M_4T"S$2CY!&YZ=VW]$Z91*S5:9RV&S\67(Y<:',X2<;@,*CGCD4PU5*`&"30
M03#]:5E!.)4?@$WUIASX$5P3#I:,3**)0$,?/P51BFFZDVFJ;N!QC&$HY/UB
M[]#'L>I@^/(-&98"R#"9S2_P/6S@<88=;[>^6RU,P=G1#I;QQ/()(7#IJ<\#
M=4\>E'5\P?<IV,M!Q0@<"IF:Z=,[Y0?]PZ-OAC-_KQRKSKM/WUV<&U>S$O$#
M/"SO(:,1`^>S9-$6?3='\=!3MPQ'G_>)6;S\.5^OH#SGMF_&01[B<6""6PK%
MGB*A\!5A@"GGK9C4Q<CE\[FBO9VH;K!*]^DAJ`Z/^0P5E,(L01>O>AC((_QH
M)KJ%!4[@N%-PU-JUY3`%<$(FIQ]1O'DF3]G7!:CKM^`&A+HYUN4BK9H3YP8A
MQD,PO!HH#8D,HEH@WX<PTJ&^-O#YG1^@(7.'K5V%1/[+[;D['J@'R;$01@Y-
M9WDP^E+ET+)1'$VT2`,?JYB0[JZ<61W9ZY^\#GLA"3[$J^X$WC5_.=>&%C!J
M4E`>F;CG<UT0`&5U90:R5OSF@3AHO3V@0'L.[Z:1;2#6A)+-H.%YM]@\>(6A
MIQ24LGG0^%%;#]/Y'H5F'!+I_<9^>)AB;]PUA-I%H09M+70;7J7*3MGU=U!?
M40R&`3X&.?6W,)48<?D(U\B"G#>;G=.FD?/\->I->JFSV"7:)[&.HRJ3&U22
M;MJG_$00TPP(=`NV"7#\=RV!16F0F:_IL#]#<%?PN?@\$^S-1.MC_O@B_HC`
MGZ"?!5*IX,!T$D3>]#RA?(M5@O=,S^5W)^P?Y^=?3GXT?>5"?(1J+;=`.U_1
M"V<1HM2"PXHSEB@^B3\1!@7F\U?>7(";6`'(%%=#P:T&%61.]%I,\$_X?R7D
MZ'$IOP6#NVD@<2FQ0W(08?AY91A@S8BR-:ND$(C;'!<HUK99@E0UHL[M%V&G
M?>HVGT8M<@<(][2CQZ>FOAP#VYS><6R>..4S;7(_JK#3(VY?Z,['H+WR8)#Z
M-7N^UEH<N5AM^"I/B\?W(C&_*"F0[$'HZ(ZG[/T[]!S&OGA`:,BM7*7;@8U$
M;NYKV3A;8>IL^%K=+AY^V.;]>'D2"YY9)PMO+31T-^$2M0A+ML1B8'T-"'AZ
MPZL@H)\IK$;D"23J:ZS\RF?K($9CX+"O&$Y,A5;?E\;'UOS(+HVO+K-XJ$QA
MN0`N0`HG4:$#;)X0HY]E?`VUWD9L"]DQ7A2+N2F0/0.[OL[COYF4AUFTU40+
M<B\F?U>"W63!:M*.-XP^E".]*0PP-?$1V^XCE#`$/"W;:H<@BT-DAH3Q7=1K
M39!=9F:(!+2+\Q"\)H7RS?78M'1(LTFMO@RT*R6^&P?$1#=`MI<&<Z9:@\[-
M"T"9NRC5TP'+"KYQS.`<-&\R2"L:,##9C!S*U.-RS#"G&!X5^TK$U>IZBZL[
MIP`"@\KP,8N5P6YQ/9;W#K,L)V/*C?P8.&(YN0L-&62W?A&C"CX;/!LAI@!5
M>71E`B,L1%466"15\P)A5`ST&+W@%4X$P.KP26X6O':.A280F(%A9A(;W2&>
M0!RAVIZC*J_B6A]3_#`&D(=3;O(U^S9WN\W&4+/1^5&MX)<8%RZ9.>Q+P,T1
M\&N0"'T@W%S=ZN:NV3,N@)'YW*XPZ*<$1V?8(:.AQ$?H%^'PYPR#3YI[@@WT
M!,&\>.9J4,*S+`*,T0[@;5A('8*98R>:(-@Q.IWJ7!ESD5RXRM&7W64[:)A-
M$X6`H2,_R3IJSV#>OX6`A3GB_W;V[4SY;`X,!:0*A@DR`5CB,.4UP1LT7.)`
M`1QA$`DV"X1):FQ3-$;Y7XC59(/Z+\E4)WIQ;]K7%](UGR/@RVOCZ[P+M3A#
M,?+#/(#]W'K<S1@ZN2^NV7Q541UE-'B!VIF>,:&J;):PY'+LCQ8B0N^BV.Q=
MP*<?E>'U!WRE\9A%B]0JC$DYKT\33E],AC+,BOJ,8Q?'!:6$S/LLQ?,X!?KL
M>F-834";L\7'&#V>N1"I1/VCE,6*L)A24Q,T%XHYI7/UJ"*%P&I9<-''WO-&
M$QH[.^^$_OP*O^+/%_1B<?VB;%J:EW"'G']G1EZ`5@$V:-=+[H.;`+--55P$
M&]^KJ$J8/">OBG3#2&C%"!H5<^Y>6H`Y_\%<2@U.K!F5:"_J6L6^"YMM*]P-
M<*]&J8($9<1QSZ0A8##F92V:_?VWGU)Y>L_Y]/WG^)Z#E:BH<YD[)/#A@DM?
M?AX5M4.6,W`EI!?[RG4Z#X?S7(`O<+,'G'4+^NTBB+P___X?__YO?\O?A+L[
MO\SY[RKG]?QZ97?!AZ]B]//)S17Z:__=^M_;JQ/F#^$+F.BI>]%T^XW!9>?Z
MJM%M=MU.LW5QTVF[EZ[;[`[:C9._/]&^1:WY2G_Y5<==]G[80)$-\T-BY.0"
M_:IJ?M3-7-($YH;`!8#,]G(SORL_=?&^JE,ID_2O=%PJ/&7A8&-C^ET_!:`=
MGJ`^%U\3HK(*%@[MN7A-_F!]QL(306"N^?FD<:(^2P#&[//FPC[A,2"S'B1/
MDRC[0I]-5=^H=O3ONXW"R6D/6T)-I7B?_?'AZ7FX^<"+%:3R,W7]E47#UJA!
MI0;S\TF[TY]^?_6\WN*I07/K8-L;.XUM[VQO_<J=3[+;W-$D:U)`NG*GK2O6
MD/,MS>KZVQ&P_ZR1H#8^L-%F]3K$$L\=*,]]PTUKY<H8QJ-.KL?:?/,-O*5N
MHTZ;9?'9;Z'NTI!7[E2!BV+QSGO5S&&?.J/>!7@JT4NF'G6=^AU[Q>UJS3-;
M^>E4M*G\HDT$7P1?+Y2E&_0)P&P7:CI6#T"%G;<Q_H^NTT';Z3:ZUN3N%>I4
MA3W*-A'($CABB7*=5J='$K4#G54A2[QRX:RW%;.D\JEO(M]!E$_M..UN24W^
MCK%\:HW`K'+&1(7`K!8>9#V0KAZ!B8[3:I?D(%&]_.>MP.=+3+^2<OEZ(N2+
MB9.W^-I-<B9[O?-^L]6Y:70:K<:Y>]YP+YHF9[)UTVYV:IPS21E\ZX^7,O@H
M@X\R^"B#;_\!-\JFH@P^XKF]\QQE\.V-&RF#CT+KE,%7#0I3"@QE\%&HO3XF
M'<$7P1=E\%4G#GZL'@!E\*U+*<K@HPP^RN"S22[*X*,,OOW+7X627JI"QWKD
MM53&(J<,/@HK5,28J!"8U<*#K`?2U2,P01E\M<[@6\S(6TC>^R)"J>LDJIN^
M1#+!#I&ZT"W6SI7F"JFJ)\[62.>[&-Q<='HWUS?MR^OSBZ[K-GHMD\XWN+[I
M]FN<SK=ZGSJCT'*_^VWXYW2AX.:8JRY)9D'8%%<$U@`DR\>.+^D=5KA.?-VH
M!6MS3J9!-!/"E'(UQ=FQP+6ZDYM>$),T`,;0U\:Z?*[`%@FAP**G4STA<X])
M3C0C6F@.NECL&%_X2?7)"W![56T$WL2JQG=6?AN?J*J5CJ,4RX>G(;XG'S0^
M!:@9REGPP$.?ZTDL#E8/:F77F>(+5:G98HG6)"I.X[_DZBK?3XKM%AI#%)?E
MOV1.,U6*W;]+DSG!U/*L6!M#R(79+DUBL=[JA"?>&/L;FGO8*$7*8NU<54(6
M62-2K73NL![JIM55-Y7^1>@P-;95A6UX1%Y?6U^[20;PH-.[:EQ<W5RT!Y<W
M%_V+3K?9U9#1N&YUKWJ'!QDOU2>W`B,L%U3W0Z$<^C1_G<C+H>MRW!XJUR%3
M[55D<L9^Q8X$(LS%-Q93[IL6`]X8V[2H?G2F++/J-16J8N+#K#F$3FR>FG<;
M&!NJC@E1,"_)GW67PV9-(.JFT]P41N2;,M%J?),(&[WDK>I,6P"T&TPG'-7K
M)C1%NTTQ<"PY+$U/]!F[ARGE%9U]6>BD=\:NBF_$E@*J1R>\,<T[JV!I;US'
M4V0?TXO@C/TFQ2@-6.`_F-K:.6&QDKHWAFM-ES"P"*08X]3]0L]X%NN^$GIB
ML5"-,"26OM8UFC_HZLYI#"B1E5D?^=\37<L;[QJ93F')_!9U$=QVE_H!FIQO
MUTW&$C/&EI*7(?*,(MA[-',TWS4;I\UECWDK#E9SV1C2UD2E]:!LH]+/U]<W
MO<;-X/+RNG7I]CM7%YUK8_?T&MV;9HU!3-UW6SRA@"+"0<=-)JA\"F*^$F*V
M/\^P![=[F^'4[G""/GG@-F!.53EXT'-_V"X]?NO[FKM^X6%.L"9[[96+Z!U0
M[G<))C*>.)B3%3/`GXNLT)$$8LN=L65^*&%MWJ13"\=Z:J$$]J.##&6QWB]`
M22=WF%]PV/>I:BJ_0UR);-_*[)NY?<=MV<N#JOKBOW7KJT9(5#FKC:#FR*&F
MX;37-S6/'FK(UOXP[X>+MDZ^5;&-X?U:?G/]\I==I]>P)DU56?&R]3.IX0,6
M"3!E[1U..Q2)((?Z>=K>K-RR+D.67@M$6B7X7H6P`T9>WYJ1MRW9JL)AY&_6
M0-$=E7!V6B2<Y*'50S"W"@JMG8&_:^%K=9RFQ>HOQW#2H'K"5%\M5SMEU6P[
MC8ZU,SV'(A+DSSU/V_-G\K/):'P+5=^YH+C<G=5*>)5P<[XK;_?#.FNNG0!1
M(U&NKRX\)N%M.RU[^P0DO.01'D;E@#JX3[LK$'`P=0":#:?1;NZ,;K5@(_+"
M#Q#`JL)<E<*HRL#0P.EU=H="5>$%B[&-;0N+O'Y.=N%8[5?A"?\!7R4WKPEP
M?M6_N+J\N;[H7[=OW*NNVVEVLC(B[5;S\,J(G&?'V.=D8Z?LM_#.#P*AC\NO
M+NFZ#3,ME`=8>$>4=2O3@XGG@\FZE4VX'P:SK)P%KB0`A:I.$L7ZV+W^17)8
M>"Q!XF'1$9[@F>$PPOH"\#(O\?&9\`X_8#(%1T9*/$?OAS+A0<"+#YK&T3#U
M$E57`$L-3/30L"X`O%?$JL*&F4(ZA?NP@$?`/%BU:*(G(Z8)5C(X8S=1K"N@
M\#\B($XVC?EC'<;S'FVZ_LJ=$&'>OLT/L?2'P#H'.*Z1#\-Z60*7I.AYL7@B
M/;JA`LC9U;R=PK6NM[!V-9ZK1KOO#MSV>>]\<'W3:@_:UP,C1MU^L]$Z.#'*
MR.8L-*%0Q]'#>QB<KIQCRE;8EZ6-7K_4`3`KFI'7B''4%6F`E61T(0M5<`96
M-HJQX$4$K\$J-T[^^&+_#1;"TAGIT7?#!Y0T(3]@;1D8#`_T#S+%@AHPHE1J
M+D_&$0H%R.F#*B+U(;L?'X;_3:)D-H7)+%:LT7@A$#C\R5T:2U/E(AG'47H_
M9O=H78;X'4CH*SU#8'X^_@AR'HI$U0C!$AY`(BVQ.155X0\/-!,6^,AK]DB0
MW@>AQ7<BMI'35P7PB<`^B#`57W55$1S!E4$*\\L:XMJ^O+BXNNGVW.O.Q46W
M?WE^=7F5%9'H=2\&!R>N&8FP1@V`:1D"J6D_1VU@RG2Y(M1"8:O8W!3/UQ*T
M&ZZX@ZR8B6M6NB9_-LHOR*P_PGHS3E9C1A?6D4\5!TJ9JI@#8RET!=V"3U_A
MNU>X='/;[++;:;:NKZ]N!A>-3L>]&%Q?9*5.^N=NH\ZE3IY3*IH?"E2SPZFG
M['=DHP=_#M0:CD7\@':3MJ$RS`>D\Y.Q+H@V#9"GL>Q0K$P)9.>A`$B?8'4B
MX$`IICP&]L0B:[K,F3'JU/'&&,TJ`+@0</%W&*!X^7KQ';24D\L%6%R1IUA?
MO56-`M5&(B:JLA(*1Q`]@C8J2@K6*9(B"/"!VBPTORX](2P8D#Q6%9*47C#&
MVU-#<^&9BZ9F;IPJPQ"\EQ&67`GG[S:4?D7JUF3&:CA]>RP2]+N85]7*N46I
M9R`]P*Y$'@!V'PJS!#Q<6&#%9V!K%,S^N0T^9Q-5.\Q/0`3P1Y"-4&K$<U1Y
M,;VD1?T/(#O$.S_D9<>0:;)3_`;U#?]HM7"78K5!X*.1_UU7+<ND2Q<=4Z:8
M<F0R7T&A/9<17C`#O,>6V4/M<:2@%)(Q7*"52,%MR:H0^N%*I<.3Q<[0\``?
M+*-:%52R5L.(/3?X5=M!NL)1N[].X&HQ7%16Y9LDFFX22WIMZ1;CFNUBU:AM
M%M-]I=+:&A$UF.!&T;)=@Q-*8I06*O2!D$L8@T3I1`Q!;P?]AD>E$`-Q#SZ*
MAIDI1Z<IPX8\LJ"4BAQG]?X>5Z'?PC6J*I]VK7*_3+^M^-P%5,HJC<JI\%0Q
MTQ6^C;8+`"RP9`%`QF/$I`_TX%AD%93@R+]',&)R)I6"77`%U9BXJGC(8X5=
MTD]2I=VS`9VQSVF\J&<E.)`SK/D8I$,82`3O%PLG"C,4!C/X3)PYBY$==4'"
MX^0TG<[QVJAG+$4[4RN5F4&)\,:A[_FP1MK=7/TJ9=:LM([.V*5Q#^=W*D,!
M]0=GNF(DEE$$,^M/8[2C>GHN,J7@?SF^I*MCHD^OM`WRRQUP0I0F:)09ZI\Q
M1<TBS,.;%MC%#'UFAC!>-6JMU_2C@UDV/*,<]9#0H))X+_*Q9EWPVN'#HL4$
M.BV5:YAI:3C7P!G)83)O#D!O"`D+P*<`OFX65[DS^#W'DR66+7`JK.DD4M>!
M"?8L8,SY#ED.3>H[8-M)SM/.VFP\?Q*P9`#O,MZ#<A40AY2O\,[_L10V1?OM
MG6\>#HMZ6O`,=.#WC'WSD2Z/)E3`(@QR:ZA6;CT;^C#71-EL0>;[%"FL;$\=
M/D<7ZHD'A;2;`5+G8W/F5;$7W9G,VS.S\M$7P]JN&:XHB+X'4Q/,4;-\K]`$
MYZ`\*T>AJC%"T;94%M:C'P3&$)W'MWE@RGIBI"+SJ;"X;AR9\:*OJ,Q6PV!F
M,?,HAV$%Y5^&VOPUKJ''I7#47_<QUN*=\/A>/2FKQXO/!<E#A>!'0SW`N\RE
MS,CVY%X<E;Z3J^+;P'!J4Z+P"%/&YV5+IU*RO!4:D<%=!X.[>1P&MPTS5^L=
M"Z:N8Z#21+%PU^$IJ&NL1SLN!S+CA"-8*H-L7#`]`X7"!>1Z<O$J(Q&H\IA#
MH@?$0X@*YT:=VJSX7:BY.TS7,>=2:1C<\HA]#)[`JR/07T8#X/>>#D4'?&;"
M";@3@YH`;A[K4N'Y'HD9%9K<H:IWIK=,%W=?8T/$A0W4CT"`2,\-=<G\2;$8
MI5*%3Z9\IJ,6ZIGP27M'F79\]*70XS17+))F4:6NTBCL,4J#H>&*`NU!HPY!
M0B2:PWPTPCUFF!F.<I2J@^B:$*!%-%N8M@]PC8G"K"V1!VS*DO*H@_)H';[R
M^*:B_PBA3SUW!Y2$VL#@\7Q37*83O0^2M;,P>/PD1,.5!1IK3SV,T/-/YH@>
MW<%TC.;1EKQ"5VSD,N0Q6)$J5JUVZ0@J""IJ`17M(X`*$R;,[(.%WBZO[?SA
MM>`JRD2''8L&ZEF>/5!P^;.8Y'Q3=O%U8%(H#UUU@5+NO?9`GWKWRM11$8)X
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M#"=:J[9#G$B<>$B8:*U:"K'I0;$I]9_<%7NZ'6I`60*+5:@H8ZG]F%3&$J9[
M^:%*L;X3(TS0-I\2_EU(]LZU5NMRJ\)N5:\Z3TWA%NI3-@?62CP?>?')&H%4
MY>PW@J%CAZ%6@V"(8(A@B&!HGS#4[Y;?()=@B&"(8(A@Z`48ZC;L=8D[;ABB
MB.5RU$C%B;:)7AY<BZNV-:>C*HN-]U&M^=T$\P].'%K4[8W$86]-GVHG+FYK
M9WV=2)Y(G@Y?GBQN11V)/-%N^3I^#];CUKY/.?QEJR?:<^M2BRY7NVM$])88
M3SVZJ+UKVFN\_'9R;A0AJ@6O4A1[WU%L`E`"T%+;[@Y*\LT(0`E`"4`KR90$
MH!8!M&<Q(8L`E`"4`+3Z3$D`:A%`VXU>=<AYQ`"Z<5/CBE7MHA*:MDMH]J>6
M*FCVY^[FV_5YN14T^]MQ:W[;JW7UL'6#[O2C&BR8%A-.5HQ2]Q893OS0ETFL
MVU!DS5G?7EURN5KC7NHO/E,!\IK'(=!"?A'YFWT/6\;Z09J(X<8U'-N]3N?B
MXJ9]?75]V;F^OKF!Y3<U'-N#J^NKTFLXVD3!VX6RBAKLHC3!=TIVAY0R1?@5
MK=CUEV\5J;D86&X"M,9"+(`656#<H`)CN[/KRGAU*<5'$Z0)EOK"FF1@5RYX
ML79-O*WB%)ODQ[SLV2V5E'B#J:D^40U&XK>]\AM58-P[#[Y6QLD.K5X,=-6*
M9:M7:^PPL)#X<&,^I.J+Q(=5X$/"0^+#*O`A%5>LL^-2*6YZ5ZRHB)U>L2DJ
M=O1B$O<5LJ9$>ZW_=ZC(1\RU(7,=-YRMIK':^6._8%/Z+T!8M1NHNI"EB=I9
MK*Y*WH!5JZ$5*L9FU04VXA_BG_KS3^7H0_Q#_+,U?<H\UMVOL56EMV=$P@(T
MH7B2Q/Y=JO-8DHB=3Q+AC=FWF4S$!$S8CZ'W]L;6;]GT>B49_/E\WJJ0NA)E
M^<JB5AFG#IUNHZ(%1&O#<W0RIH[6"6'=L6%=QVEV[)UP(:PCK".L(ZRK)M8-
M'-<=$-81UA'6$=8=/-;U&TW"NMU@W7%ODJK[?E>;I&+(SF&V_%[H75')/J>)
M3'B(HW[YQ%^EX\JTKU4S#4K\0_QS0/Q3.?H0_Q#_T+YH&7!^&4TF40AW1=Z?
MVS#<J_7F;?K=FYGRNW:"W);C[J`%5VW\&;ROS+8/%-(A^=R$D`.GWR;Q)/$D
M\:RD>+JNTVV7GP=#\DGR2?*YE?KL6BR/?_3B24%\<[!)9>463HRMSL]5/XZC
M`)ACDRZT]K<VYZ>,5Y74K0OW6MO?K"S)2MCD;)RYUO8XW[*567?FHZ/&%8Z,
M'PB/$<!M!7`=:P$2`C@".`(X`KB*`5RO3P!'`$<`5WT>(X#;YBSI6<,E@*MZ
M+FZ%0N\[K61D>I?LN);1+JF]ZR"T_09WU6'-RFEJXCCB..*X6A"N,L0BCCL&
MCK.PF5O[3.+Z5%BJBQ.R!P^X%CZNS7I);W%RJ\]!%*>K?IRN^EQ$.+02AZS6
M,B(<(APB'"(<VG>=(<(APB'"(<*A?=<`(AS:/K!4H?CF(=8`HMT=BK4?5:R=
M.(XX[IAW=XCCB.-V2SC:3RR_,M$V?'5`]86JLLQX7YEE#@B##U@DK);T(8D@
MB:B]1-BMHD,B02)1>Y&P6KCF4"2"BJ*NZ7HP\5?J/_!`A(ED[]Q-=A"K4$7*
MG7YG,@K\836*2&EHZC?=9OG1EXT(46-1IO#4#K0>B2B)*(DHB2B)*(DHB2B)
M*(EH37S6`W--LQ(*JA[J)I502XWO5+MRL>7&''5),J2@:744WQN$"J]8QO1J
M2YS=5AOVZ$#22-)XF"K.;O,,$BH2*E)Q.VR'02IN6_^N0G&97?A]->N6\4K(
MHNYE(JV=!'R5BRM7<K/B_35>)2A5-:5@>$W.11.($HAN`*+V>G@0B!*($HC6
M@BL)1.V"J+T^(02B!*($HK7@2@)1FR!JLQ<)@>A;0+006/U)A0I77E_XNS"!
MP`_%Z5AW\G";C1_V'S'6P4Y/!(%9VI]/&B?J,ZR#EWU>,9);?R(D^R0>V==H
MPL,/[+DAK8H^/_K#9/R^W5]'*2PR]OH7;Q8`!_;=A!-?6,@^3'Y1'[1QFINO
M;'\N_&_7\#"_C41M:8(%V?LCE8D_FJT:ZI8SO!T+%J:3.Q&S:`0C>^;$D"\9
MS,A+`X[1^U0"B5D"MR:QX#*-9^:6B4C&T9#Q<*A^Y::BU83'?XJ$36/?$VR8
MQMG=4QA5-%R[BOJK\O^WGU)Y>L_Y]/TW;RR&:2`^CZYY',+[Y!<1J\):JEOW
M>3@T.Q&W^)Q;H/!%`!/X^W_\^[_];?D9-W[H)^(7_T$,/X8)#^]]N.E<2I'(
MQ?N!@"$NUU<Q^OGDYJK9<#O_W?K?VZL3Y@_A"^XEI^V;SL"]@O]U+WN#FXMN
M^[S;N.FTW4O7[5Y=WUR?_/T)/[PD^L])_M;L]'8L1(8:10$8D+C*P#><R70"
M'#!#!O-S\LF7BYKM#+K7LTC7)*@'PB+B=99E`:<:`%/J*7X(%K?^7'Q-&,43
M'BR8!&ZC"&W6=,F3D<.RW?NA'B1/DRC[0ILIZANM4`;]LW:KU_DALSH`X@(^
ME>)]]L>'IQ;$:BTUWZ9OKMP67T/+J`'!`QH_;*C@S(UN:]L;=WQ?OR;C'-1D
MG+NF9_O`YT?\8N-]%DX+4-1HBXK%6WK'2Q;`6PWTWZ08I0'[Q1^)?<;,#HP[
MUJ_G]\JAI!)HN3L&4Y^6VIO^(\;DK$L>QS,TX<\G40HD)=K:H.VYYZ43XT4#
M88$J_RJO8>SQD1>;MVW/N%6C)H'JX7`F@2J!:DW)^P90)>>E(EO>QT0?TM3K
MP]U@#W!7*7#[9QH*UFHX#/=J2$*)PZQSV#<Q383:8#5LMO9Q.]*>I#V)/GO$
M+O<U\+)^6+A2R/5NB)NWL61^R))QE$H>#B7U?+/`EI^B$.8WF8I$,'X?"S'!
M+!MK!G`EB?A*;L0V9&R?]ME,<'N'@RM$N<JAXN[2L*LBI97(HZY,(K3K-%K6
M/*3*KSW>5[62+)4G&@G,XLF!G4C,5D<'JL(Q>^UD3O)4*WG:92W:JG!`%=40
MV;4$*P<$*Z"E.V37DL"0P*QKUPYV("]DU9(T'84TN8T&*9\U"5"3#=%2>_JE
M$@8I8A;XTMZ.P:%M#+@-N_L"Y"8=<&/5WOH9&<?25O6@U_M=9V`]T^O@S=3#
M90?7'9#XDSHD=6CNZ[L]DH<C6F]0A];*E9,ZK#T[-)O6C*.J+.Q>P@X52B4K
MD[:WPAN',+_[V<ZB>H<2I.B<V@Y35(AT]378K!)QOU#NN&ZW=-ZJ"A+MTL@[
M'!YYYSK]!FWG[=XP/!P6:KGEUT>N"BM09(44=1F*NF4O"'D,,G2$/`**NMNO
M:%^YJG`6*>H7R=-M68OL'CS(4*K)AX_AZ32./"$EBX4$.GIC5=E]*!Y$$$WQ
MR&I]S9Z20SN4?D+[;6N2`_2ZO13`JF#'+FV\VJWXNV;7FB(F>ZWV[.`ZK9:U
M7J=565H*E)!*))5(*G%ME4@:D33B7/X[/=*(-B(2%<H(*#4+)>9#P4(^$8>8
M2U'R61G+P8H*$:Z^)MOA!)W1NZ$3CL0C+UI_.]B8(+/P</G'=9H#:_;B,6`,
MA59(AE;2B:IKD;8F3B%.(4ZI59CGL*(YGQ/XK;[63+GAFN:IVZ3LDKW9>_OM
M5E-&ZG&[;ZW\R6O4J0K`[%2;'QK'O&MU[/G::Q*'@C:UW<MK.F[+VOF@JBPM
MA6!()9=WGJYI[SP=*>3#YY=W;J]/"ID4\KJ;)6U*K;$1<ZE0GD.IM+7?GYD(
M5WO"5<Y<W$"KM4"K#:/T+A!OTOG/KL;Z#3X/H@C[:[1]2Y7V,DAI7Z,.G&;/
MWO']K>E9"[XKVW,F42=1+]/7:CL->^4RWT[0C?RP6G"KM=XIA`2$!"4B0<=Q
M^_:R5DGI4[B<_!^"PEI"8==QW0K81+7@._)_2-1K+.KO6DZ[55*^$/D_Y/\0
M$M0%"9I.MZQM9U+Z3\A7V)_\*>%`EY77%_XNS"OP0W$Z%@HGW6;CA_U/[*7!
M%5;ACU0F_FBV__%F?__MIU2>WG,^??_-&XMA&HC/HQL_]!/QB_\@AA_#A(?W
M/JS.N90BD;>X4+<PGXL@\O[\^W_\^[_];?G^?T31\-$/@OPZX-(0B?!5C'X^
MN;EJ-MS.?[?^]_;JA/E#^()[R6GSHG-Q?MUL]&XN^M?N3:_5OSZ_Z;3=2]?M
M7KKM]LG?GU"Y2)U;?R(D^R0>V==HPI]W7/>X2+=CP491`-XU`"/S)>-,II,)
MCV<L&C&@@/_@)S/FA^S>4._]UORV![]]3<J^<G2@\)0%/=X`!:*>XH=#>(+Z
M7'Q-&,43'BRH(1>OR1^L\(5Y(@C,-3^?-$[49P!/+_N\.6?!^MW[H1XD3Y,H
M^T);<.J;1W^8C-_W>V=N8]#J=7[(P!V`.^!3*=YG?WQX"M;ST1?3-^:`WUV9
M<;-&!H@:TL\G[?8/K^J2175G;G2WO6_K&^MR7VT&2A-\YK[F3EY8D_-PE0L(
MY\-M[2$?]A5:OFQ^+VF^_G8$Q-O4IT>M^NZB8*B?\RT*>(T/&!*OU8G7Q,0'
MFWZ8>DEDC>?V0$?BR</AR2\P03F&`1(&$K_M@-]NHX0'6P2[R.#;A@'=SGZ/
MK)3/3^^&&`B()<:`DG&42AX.Y=H;)S5AL*<QCH41N'UX6DDLM^*O+$RY3WU1
ME6"^M4VD\N9<PJ$Q;%%'C<')++*:ET8P4#,8**&@5U76D["`L("P8(-)]YK6
MTC^JLHZ$`80!A`&;N`4MIT'E)*P$&"ITN+]*D8=SSTLG:<`3,63^9,K]&/O.
MLB"2<J->+];*`QU.==YW;:?7M->:XZUT._B20G41_\K9#"2[NW#$MR9>562Q
M;.N=1)1$E$241/3@1?1@1-"RA7O<%FQ-M\UMTNJ2Q_$,#Z4\\"`5C"?LFY@F
M8G(G8M9J.*S9<#<Y&UMJC='U#\;M/'#L=`;6MI*/XOQ?]:2LOMKML&2I/".3
M)(HDZA@ERN*V)DD22=(12U+?:35M=PHZ;%DZM(U#F[3-4I!9++SH/H0?AVP(
M3E@2,>[]E?K23_PH+&=+\&`"(DT027O5FRC:6!G)JZ_..QSA:CO=@;V*L"1<
M)%PD7*4&.DC$2,1(Q`IQ^8;%SH.'+ERT'?;ADTB8^.Z->7@OV-`?C40L0J^<
MM,S:2=.[5L.:,!W'!G/UA*>^6JEVXD(G"TDN2"Y(+D@N2"[(O*I,_EZ%0@2[
M3>S[9QJ*+*?/=K*:(0FU9+BGE@PV:3EPNBZU9*B&\5$AX*R<54(821AY&)NT
MA)&$D8215>!5PL@JIT`30A)"$D(20AX*0KH=FW6O""3M!R[W#Y"FX5H3NZOM
M'2S7[DY0`MWJ1BOB*^(KXBOBJ[K0BOB*^,HZK>J^6UQ=RF[4*VJ'!*T;$2M#
M..)$XL1J$(XXD3BQ&H0C3CQF3JQ)Q*Y*=>ZIPUX).Q7ES;F$+86VXW:HPU[M
MPAM[5U<$`X<$`U;STZJRDH0"A`*$`OO)P*K*.A(&$`80!FSB$`R<3M]:\X*J
M+.5;8:#,?:G&/H(.NPLQ[+Z5GLWX6'7KW+YK.YU6^87_EMEN3^F4U:T04^$(
M]]Z-`Y+:T@MK''>:+@DG"2<))PDG">>!"R?9NY4NV;/_?72;M*IU99XZ,./N
MC@7NB6*UK[-3!RZBZ/Z><_L(OPB_UB79CFO@U(&+"+\(OPB_:H)?.ZU/4P<>
M(O0B]"+TJ@EZ[;IV3!W8Z*T`5@B4_91PF/[*ZU?\_;>?4GEZS_GT_3=O+(9I
M(#Z/LJ,8MS#ABR#R_OS[?_S[O_UM^;J/X8,(DRB>7:9Q#'_=XHOSFX":(9+L
MJQC]?')SA<&J_V[][^W5"?.'\`7WDM/!N>MVW$&[W;WN=CN7S2O7O;KIM-U+
MU^VV;QJ7)W]_L@1%<M[Z$R'9)_'(OD83_CQ"%FX/_%"<FE-";K/QPX?"DOZ1
MRL0?S:RNZNU8`!4F4UC.,)$L&C'?D,R'H?-8,"[9*`H`Y^7[%Y?ZI4GL035L
M,YS"/0O:`)..U#KX(2@Z_;GXT#"*)SQ8@#\7K\D?K/B=>2((S#4_GS1.U&<0
M9B_[O#D'/?K#9`Q_PIP,A@`^!'PJQ?OLCP]/,6$^J&*X.L>5_LI]BS4"WFHL
M/Y_TW!]>1:Q%[#0W;GU?<]<O/,P)UF0CHW)6Y_I'41?,@&5%OYL3J04X\`#+
M1&R+@NKCHP;$NR@8Z@?A3M"<K+@E])P=87.KB-B2V/)%MOPFIHF8W(EX;=Y<
MNR5[37!T1SG.6S!L;[]]D';!?N^&:)W%$HQMEHRC5/)P**E+D`76^Y+&WIA+
M,613'H-#`X1E,7]D$PZ+ZO-@DR1ZZUQ8^8:[]D)%;R@O7)TH4,MQFX/225*5
MQ7]K@*=&"%0Y:XV@YKBAIN_T+&[W5WWMWXHT9&)_^#V*_SSUP]-I''E"4CMW
MO*_K--MT)I]")=2!=YY%UF]8,V`/12+(?7Z>MC=^Z,LQ>,_W430LY\#Y*^%&
MJX3>J_"Y#:?1L><^;DNWJK`6N9<UT'#'(YTMQ^VL'=,GX22/[$!2%JM"KDIE
M)58F#M0<..U6=V>DJ0HSD)-+2$-(LUOOI.OTNM9*UQT-TEC-8GXY._F9E.8O
M<31,O>1W'L<\3&:_^/S.#_QDMG%J<Z_?N;R^Z@^:G<'EX/JZW>VU+DQJ<^^J
M<=4^A-1FG;F,M0E\R3B3Z63"XQFF.0,%_`<@&Z9@<,^+4S%DCX:F3'R?BE`*
M2GBFA.=7$YZ[O5WG`[?KDKA<[0F2SUIRHEX9F:452^3[!*#(?H6?QI)=`U8.
M\](W%#FA_.;]\24ETQ.S[9+9*#N^*DKW`)0J9<>7Q7H7XMX/0W2'[WC`0T_L
M4T=4?E.,4E07LNLL5G2I^LJ_-4I8([BIG*U%.'/<..,Z;8N)&55?^[<B#=G3
M'WY?B-H/_22-R^F54[L<IW>=EK4=ON7UK]$6L+7N-:2?#UE<NEUK-;^.0US(
MUUY#+4WCZ,&7?A3*G][Q(>YT8T^W32")TG>7[ALT2^HK<(3)NS42V/IJP^,1
MS7<5$$U2OQ4R8<NDU74X+"&<3?FP5JE4C[!3H[F[BK]5X86R30>R$`AH"&@6
M[NMUZ7S/7K/NUTN@?R;[_JOPHOL09C?\B)G1_L@7PW,I12+/O;]2/X9/X3![
MI"\D_)9.Q'#CY/S6>>_:;?3=IGO5:5STNC?-B[9)SN]TV]?EUQU?R.UN9?G@
MN\K6U_GC.ET?KI,L@9\Y_.KQQ(]"3.!/5.7R4/H@`OK+413KZ]1Z,&X61-4`
M#.9+@K_CFC"X98D!MQGZ/WF8\GBV6$IT90;>-D_?_A#"2TOX2AY/[0X&`)_<
M^Z$>)$^3*/M"&Q'J&WUVH.^>==N-;K-C[P1!^ZTETW=]@J"YFXS^[:+#N\^@
MW(]BU!_Q\O=^`H_W3/3DXS9);_7+4:V6G4X;&2_4!.)^;%K[@MH-10+:.;SW
M$<>?:-I]>HWU[AU?B12@>O1F:C:<SJ#\5,1:L(U%O^I8`\A9)ZEM-.W!94!8
M[3I;E17>BY`<B6V0!4&45^>'3PR#,F3J>/917:=E+WWOZ),<2-5]N(W`SWP2
M,S,Q-7NV._59K<1V1TUL^:[3+2M;A/JL6M@KL;+=\>Q6RH,(4W$31Y/K[XF(
M0QY<IA*63L3R/$EB_RX%7+J-;J)8`*4O03DEV)7T8O8/$=W'?#KVO?-8\$VV
M5?J=[E7SIMOK-5O-5O_\NG_N9C6/VKU.MUOWFD>?TUA%:&)-6\D>12Q8$C$O
MHZP^5%O<:[G/J0FWW6.>*M4]JMKVAMZ[&/3/NJUFW[6Y>=%]:_FC[K9["9U=
M[WI4>Z`U,5"K%;<O<G*GA&C,:VY3Q2HG4#FBO7-A&3'!95J]:,G6C&FI5A%Q
M8F4X\=`+&16M6[</#[/)K[^%/GAL[%O"DXU.8)>EMJL>_;`.>QL==ZE%-.0'
MT@S6-,.QBIFU'4T2LX/;#"U5'WY.X#=KT>W2-C;W*IP[(T\MCX):4W\5$L%Z
MZ<7#%#M-IW[3;>Z.4(<M@#7U!TOUIW7"P:<H3L;L?`+W>;RRYNI&H8H]B>XS
M48L*V[<E4;5\UB6_LZY^)PDR"?(V@EQWS_:IV.=Y$):=VI++).V0H'4C8F4(
M1YQXS)Q84T^GU$C?Y=@/]^K;5,&J,2F]>S5B*F"'D/]0=?^A,L*R?KH!"<LA
MV.@[U4FWW'_D827MR^H(H+W#)\<=_JZ1$-9+OQVHW)5?P.$XY(Z<L9+3+DC,
MCLB^K)[@U$M9U5M8R!FKC#/6V(=26AB"TDI/SX*6NE.ELR7.I6\MD&C5=CS0
M3=?.H)J6Z)'OQI(_60=_\D`QH6VO0CMAPIXS-`[<U_V'B"<\G.W3@-_%*:#!
M=G3*;SOXDW9O)1"YR!5VD>MQSFZ_L28Z9E<EF[B^\=XR[.-*F\#JOFH[P56V
M:<FMK81:/4ZQ=4EN*ZR/*:2M0]K7:1Q-K?5FI3A53MX][U@=>3B*/&$29$L\
M1R?_:A=7KI"E7KEBF/NRU.UUP-V%\F[8:^Y1HO%>S:["):ON"@EWO73ZOG:7
M2?)WO+]\D+!@N76&Y?86S[31^";N)^#,?Q73"#@DO/\8CK!+`7;WN9B9'S=I
MD7'9;S3<\UZWUSAW6V[OO-6\=DV+C$:OUW!WUGG<<%KW">]VIZ7W(B^0$`GF
MP>+!VUF4QNPNE3!>*9G4E)7,QX;BIIW&&SIG;#;KHVW?/1B<M5W+_;O=M_;`
MZ.RZE45_Q^_;]7V'/K]!3<99[?G5)!^L<A9\/MS><R50)C#20)32*;YB)?]O
MQ[%8;)E"X5]BM!(8;:DU3ZG126*^^7!;>V"^5VBY?W;,^D(QZKZS8Z[+(C?'
MRG5SLAKVL[:)O0>2'AY[$BA:!D7B2N)*:UQY:.W)JLN*[K/M1`TO[MHG><,)
MG]5\]6Z(\=*L(W242AX.Y8^E,EB%]E7+3)KX)!)FMG]>V1'8UGBL5FW:O4MM
M98A56[@CCB..(XZK,N$J0RSBN&/@N)HX$&6:<=\B,(_9_]EG=+0JI/A/VT2H
M0T&X9MMI#:PUJ*S*4N)]=S'S`L'CGT_"*!0G/^73H4V`2AY[J0KO'"4,M)UN
MBU"`4(!0X*A1H.FX;9=@@&"`8."(8:#I.F[+VFG=JBSE6V&`-H->B"*(B>]%
MX3#UDFB3*E7YB'?:J'"#'<H2RMDTG4&[_(X\5>&,LI5OA02L<EKY"*4+#%A[
M?BP)%PD7"5=!N#I.KTNJBZ2+I*N,TL).NU=^Q[A#$2[:NOWP)0I\.8:QE2%7
MM1.?IM/M6:L46I4EIM!E=31-#26B;:]1/4D$2<0N3OWLV03KV=,A-:@I21)%
M$E6N1/6<1K=%$G5<.TV5D[\-N&I%S;]M"/CL:M2BA8^U7>]7:?LJU]:^8U2[
MX31<>[T6MR9H+1B/0JX$DG7A50))>[0<..[`7KU@PDC"2,+(*O`J8:1%5[KK
M=/LE5>PAD"20))`DD*P]2+8`)"UF41!(6H]3'E8.QN>IB#EVI&!^Z$43P=X%
MD90_EE(0J03*U5Z=D+HE_B'^(?XA_B'^J2)]ZKZ5>^"EARJ?)FW/-WR#ZU<9
M[\YUFG2ZBV)8=53ZE><V0IKB?>]:3KM9_E&W9:DICTC6.6;M,MH$1`1$!$1;
M`I'K#/K6:K$0$!$0$1`1$&T#1#VGU[%6&^[(@8AVSLHO&56[LS*@ZEW7VF&9
MXQ"DZLE,Y13WX0J,2P?^21Y('N8*I-TG]4'J@\1E/7(,FE3CUH9?4J&H26W+
M+1U.&;-.SUZOZZI'B,JVUBHD6?752X<C6MT.B1:)%HE6*9E%`[?\7382+A*N
MHQ2N;I/2]DKUP0[+U?H4A:=2W$\$W!J+@"=BR*R*V`3`(!"'5VX-LT4L1#4V
M)`_%"$FG':_`-2WL0I'`D<"1P*V9AM1ND,#M-BVR!"8B@3P4@6PYW?[;O3L2
MR`/:AJN<>&X`;U22Z)Y*$MEV$5KV-F[>3-"-H+,6W$KG/PA"*\>4!*%6;<Q^
MS][9$X)0@E""T.HS)4&HU;C9H&MO$Y8@=%?AMFV(^S:,M49M`F`"8`+@#(#[
M3K]/88`J`'`AO/I3PH%J*Z\O_%V80."'XG0L%/'<9N.'I]3J/B$H?BY,^H]4
M)OYHMO^$(_M34E_Y(0!]\K[=AVMLSO'_L-NQ8",_Y*'G\P!NYXE0^4'1B-VE
M$J8@)4M#/Y%8B3E(AV((?[`$[M)U!K-\(O,K\/`$_N&!D/@(\5?J3]7O/!RR
M*8_A.4FD;I?%@^H.DWZ`']DC'XE87?WK]:_?X+%#H$/L"^F`"$RFL0]CNF<!
M#BL9\W`Y?VD;,C0[/UAY#DYYF32Q>!!A*LZV9IS*I=6M.5@/9B_B9U];>,J"
M#=#(!,%P/7XNOB:,X@D/%F3'Q6OR!ROP89X(`G/-SR>-$_49(-3+/J\@U*T_
M`;[])![9UVC"ERRK"8_O_5`/DJ=)E'VA,5]]\^@/DS%<#80PX`[`'?"I%.^S
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M7NE3%=XY2ACH=)U^QUJ?U*HLY5MA@!RD/=9K/IQZ%YVVT^E8*TU[\`4O:B1@
ME=/*QRA=3F=@K<SMP0L7.;SE%NZLG?ATG4:/##_R_Z@.]%PBFAUK"N50)()<
MH8W*DY5BLKVRO7XX)EW?:3:ZUDRZ;<E6%?8B?ZH&6NYPA*_I@O0UR*$Z+(>J
M<I+UMN,L6YV]JL.AE=T=L3J8DU1NJ^TT.O::<[]ZE*H.?%2ZT5"&A-+94\(_
MPK^-O:6!,VCL\"1I'=C(HE6WWI'0[.^__93*TWO.I^^_>6,Q3`/Q>?1-QP:^
MBFD$%`_O/X8C/`F6^%%X,3,_W@(Q+H+(^_/O__'O__:W%<\8\UA<<"F&E]%D
M*D*I;O^6P!V?I_BG//<2_\%/9K<XW/QQL`8A$OJK&/U\<G.%1R/^N_6_MU<G
MS!_"%]Q+3J_.&ZVKB_.K1O-FT+LZ'_0N;EHWG;9[Z;K=R\&%>_+W)PM77(17
M3IZM6O>73MZ5<1Y6$8E%BDHLB3G0SE,44Z<U\=BC_DVR*$UD`E_B24T@-Y/I
M9,)C>-J0<<E&40`*Y)4TX)?FN0>=L\UP:G>\L82SBV[WC8<7VX-=G^UKU.40
M(DV0)DC'3\LU?]X4ZW0[>SCH5[%C?9]`L;%?X:>Q9-<A5H_`\Z>LU7`.+#!8
M739\]O3>\7`AG60FUBJ/M>@@<F7.Y*W);_5A+Q.4(/"J+C,=5!F&W]47KR3>
M[&]XY[!4_%Y4='37WT7L^;*JP_L2^][+8R,D(;5$:NDPF(G4$JFEPU-+E#_]
M/.Y\+FZ[)>Q.W/MAB!^B$9O"75$YZ=0'D['I.HUNRVDU[>4`''K29HT$KW(*
MW[I!5'ENLY>3](:J]I5)-^J=M=[>49Z`AH"&-/DJ3=X9.&V7!(P$C#0Y:?*2
M#SJ?66RB6/6E?RO0U&0/M$P2_B/F84EGFVNGJ5O-GM.Q=TRR*DM<MCHFK7O`
M,C$XZUD+09%`D$#47B":O:8SL%?)@F2"9*+V,M$[:UAS.@Y%(&AS\'G:GDN9
M3L20G;*)B.\%E9I]V2WI]IQFDVK-4OBP0CKJ<,3+;9^Y)%PD7"1<)0C7WMB-
MY(WDC>2-Y(VVA#8F89:B2YM">-^[0=MI=ZS%P)>7O;S=9>N<L787TNH)3'V5
M4^TDIG/6H6@@"00)1*Y"FIC*;Z\5&^D0$ID#%YGV68MTB`W7I$+Q@3)I>Q/%
M(^&7U:3C8,(#H(F<S@X21$E#54SVZJNZ#D?XFH.SMC4;\.`#<21<)%R;:+:V
MTVG;ZR]%BHUDCV1O33KUZ<Q1R5[<83EK3VJ#B'!8<E60_79>V;4XNDZWU7,:
M37NV)K4/J:2,5D[WE1N#/(0SQN7-N8RC7VZ38K`$`J49P,>FEAO=MM.VF&M,
M:IDDDM3RL:EEF[6ZJK*0>W&J*QS%,MW7FMAJ;>_PL7XUX!T2M&Y$K`SAB!.)
M$ZM!..)$XL1J$(XX\9@YD79DLB,_JI<O[<B4$?II=)SNP%II.0K]5%-&*?1#
MH9]RB_%9:QU:E84D$*`=F3V)4[?;<II-4LHDCZ2422EO.^G^V?I-EX]%*==]
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MA&2?Q"/[&DWX\V)0N#WP0W%J=N[=9N.'#P6.^".5B3^:666*V_%S[O(CETS`
M"R=<N=:)<EZ5/\N&\!5+9>;17@0@-*>P-%$`T]7WLVGL>WC!)!J*@#WZR5A=
M.XH"P`7\@<]7Y?VZKOD2=?8@']L,IW#/`HY@:H9:8#\$F-2?BP\-HWC"@P6H
M<?&:_,%**IDG@L!<\_-)XT1]!I#QLL^;L^:C/TS&\"?,R<34`0T#/I7B??;'
MAZ=8-1]4O`IYVRNQ;XV0EAK+SR?=W@^OJJ!%T#<WNMUM;]S-"RD[IFR=OK!M
MM+PQM'/5[H&LB]@6!=7'1PT8=U$PU`_Z!##"?H6?QI)=`[H,V3]3^*;5<$H-
M,1-?5H$7R]@'W073H@6VS_#!@7D]Q(EOX<2U]QSKOA=7)H)^]>6?;!0+P7Q<
M-'`H6`S>0TUB'M7G7LVL/]2$G@>,IL2(&S$B&9<?KK]/A8>QE<`?60/$O9*H
M!([JLIG@L:PO>>H%8T?./F3)/4_**__!'^*YI1K9;]5AQ`:9:/O&M@H1KBJ\
M1E;8A_^)`I[X@9_,2(<^HT-[UK"+(*IJ]"F9=0;;0)'-7(/MDP->RCNX>YK&
M\%7()/;1FU,O.0^'3[[Y+?239Q(<ULE".+^^;G5;O6:GX5YT+RZO>H.6R4+H
MM-SKZ[IG(<R)!7<B29*8`V4]G8G`P>CDN("21<7"QK%@L'83'L/#X`IID@LH
MG>`8T@G<M^83M`?;;N]OG1=0E_L:=1EH;2A:[94@-^"-&2CN/E)0*.&$V'"1
M#;M[X$);Q0<HO:1VKBSQ756228@9MRW!\CPSUD?SJN`&;9%29O%NV"TKM[!N
M6&/7TJ"+0%1T=/]0!VBN7MM"W=\`;_`P$$9':YR24EU`(>5$O$3*B913-4=W
M@,J),KJ>AY\+<>^'(6ZE%?J%VD)JJS0L(_W9?C6+5L=I-EJE$Y"*7%9+1"MG
M(5BWH.K-BI4HN5,/!',;9RX!&`%8E0'L"`V+[L!Q.]9*X))<DER284&&!1D6
MM02PFFP0EUI40`#QY"M!OFIV!+`O6N^:KM/M6A.NY54OCQC6&>/'?7+$@2G[
MM?>L2LY=+$$9N6=M:O!-$K%W\[<Z.J35</I-:Z6828>0Q!RZ#FF<-:S)2U58
M?R^N284"+J56^]&'%LO8:7VU*][Q14S=EM-I[[#OX%%')&HDX973D+L+J5:%
MVRH1-:T,4/7.!M0!A8!FWWNJ9$(L9W/UG5:SNW\*DPE!DDTF!)D0+^ZM6@MG
M5W[M+<8H+-69LEH,:K'JE+C'XE5?Q32"M0KOKWSI!9%,XXV*1UU=7%WT&U>=
M?N>ZT[CJ7@\N+R]T\:C&S>5UX[+&Q:/4QZ53`A?8FDI(R0S]V,=PA)6/<&U>
M9)-M:C&5"//[H:D^:)&WZ<*F7<C</)S]EV3<^ROUI:\Z?$4C=G'[F\-XR,1#
M5DY-M0T#GARFJIH77+/X@"B^YZ'_+W4M#V!8,5P(#'W&V/PX0MXM3`I\%/LK
MY7$B8GS:"$0`[D,^=XJ/9A,^%,P;\_`>^#6)&$@8BY7@J)I64K."/&-?8C^*
M31=NQB<`=7#EF#\(=B=$"/<\^"#/^`AX-_(-_HEO\M(X1FXRMYHGFI?@L`N3
MN9V/3"]VO^GV/JSH0;[-XB3C6"P?@-GF2:LHI.JJV2BF5C*+;J4(]@A3ZO+W
M?@)O\)X!KF]1P&-V:H=+/H9%^5C@0OT>L^`.>Q1ZS1F04@6I93J=!KX6.'@&
M%HUCTSCR`%/5SS.9B(ETF!]Z0:KNB$6@VP2F8$0HX7;8%(16%^^3(G[PX6XG
M$R6)`_AI.HZ2Z"$*$NY[\*PA$#V>Z6I_@8S@Y2,8PI?KR_^Y8N^F`9<3?BI"
MD'`/7@0J>(+6"WO@P,%L"'RL8>E')@"BIDHTS=ON@^@.L4;->L+C/T5R5D$N
M.5BNQI72&B':"7<OO*_(Y4,A@0X.\$"8CKB":@<N"((BEZ[B^#E+X849LZ/I
M%8,A#%`9LU2"`IG-16AA$(47QM)1#_%!:P;"@P>$OH??H>1$8!(*]7.$H\B$
MPA>2&'9W#/LE"GPYQE4LA5G!"IJ_(6?/HBT#G`>,(Y0A)=,)JF<-I!/NP5T"
M4!)9+N#3*3[CW0A+K_&[6+'>C^K*:?X&P'!LX1K[`*K`[:DW1NTNX=ZQKRJH
MW@&'P07P([9N14SU8!RPD&`,P`U^@(P,=MU(\6Z83@3XAV!CS:;8[77$O!CT
M`=Q5>(LG8J"*9P8MDH5G$BM;&N_GD%T)3TSN`"F:;0>-XO8B(RES/4:];(>1
M.^YR/>>M[$X#G0$R:-X8#"#Q6_0+G]T*3V,DL-T_`3DY\'NKX:PP^I&I`H%8
MC.;^LG-R5G`J_/`9ET(_-GOS@BJYRSQ)7QIC1PRS!\&0TR#1X)_;-'-YQO'#
M"+9_W"HM!E[2-R'8IR@1S`6*9$]O-CZ<SR<O\Z_=#XYZ($:OC,?ESWUA[6?!
MB[$/468LK=*HL?"4[BN\8GLA?A)*ZSZ)2>+GNLDY38FFM)X=,)<]D&W0D@J9
MHC2>0T/NA@-&V/#"-YOU*T4\"B]:V%BH;.%Q\/8`__4@T<+.OM!;/^H;79M\
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MT=&JD,+:2<XZ'=ALMIW6H&EKYE592KR/"A#N3U43#-0,!MI.MT4H0"A`*'#4
M*-!TW+9+,$`P0#!PQ##0=!VW147);00+*A2S*C6*4#P@MDW8ZM5>U#;IN-]B
MS4UGT+:7>''H)9)J)&"5T\I'*%U@P-KS8TFX2+A(N`K"U7%Z75)=)%TD725(
M5]]I]ZC\=JG>V&$Y77GAGC+DJG;BTW2ZO0'%+"AT26VA<HEHVZL93Q)!$K&+
M4S][-L%Z]G3(:]0AB2*).GB)ZCD->^V@CT6BZK[35#GYVX"K5G3#V8:`]>Z@
M8Z^GR9M[.=6^=5.[X31<:MU4#5N$0))`DD"R>B`Y<-P!=<@EC"2,)(PDC'S&
ME>XZW7Y)%7L()`DD"20))&L/DBT`28M9%`22UN.4AY6#\7DJ8JX:+OJA%TT$
M>Q=$4OY82D&D$BA7>W5"ZI;XA_B'^(?XA_BGBO2I^U;N@9<>JGR:M#W?\`VN
M7V6\.]=ITNDNBF'54>E7GML(:8KWO6LY[6;Y1]V6I:8\(EGGF+7+:!,0$1`1
M$&T)1*XSZ%NKQ4)`1$!$0$1`M`T0]9Q>QUIMN",'(MHY*[]D5.W.RH"J=UUK
MAV6.0Y"J)S.54]R'*S`N'?@G>2!YF"N0=I_4!ZD/$I?UR#%H4HU;&WY)A:(F
MM2VW=#AES#H]>[VNJQXA*MM:JY!DU5<O'8YH=3LD6B1:)%JE9!8-W/)WV4BX
M2+B.4KBZ34K;*]4'.RQ7ZU,4GDIQ/Q%P:RP"GH@ALRIB$P"#0!Q>N37,%K$0
MU=B0/!0C))UVO`+7M+`+10)'`D<"MV8:4KM!`K?;M,@2F(@$\E`$LN5T^V_W
M[D@@#V@;KG+BN0&\44FB>RI)9-M%:-G;N'DS03>"SEIP*YW_(`BM'%,2A%JU
M,?L]>V=/"$()0@E"J\^4!*%6XV:#KKU-6(+0787;MB'NVS#6&K4)@`F`"8`S
M`.X[_3Z%`:H`P(7PZD\)!ZJMO+[P=V$"@1^*T[%0Q'.;C1^>4JO[A*#XN3#I
M/U*9^*/9_A..[$])?>6'`/3)^W8?KK$YQ__#;L>"C?R0AY[/`[B=)T+E!T4C
M=I=*F(*4+`W]1&(EYB`=BB'\P1*X2]<9S/*)S*_`PQ/XAP="XB/$7ZD_5;_S
M<,BF/(;G))&Z718/JCM,^@%^9(]\)&)U]:_7OWZ#QPZ!#K$OI`,B,)G&/HSI
MG@4XK&3,P^7\I6W(T.S\8.4Y..5ETL3B082I.-N:<2J75K?F8#V8O8B??6WA
M*0LV0",3!,/U^+GXFC"*)SQ8D!T7K\D?K,"'>2((S#4_GS1.U&>`4"_[O()0
MM_X$^/:3>&1?HPE?LJPF/+[W0SU(GB91]H7&?/7-HS],QG`U$,*`.P!WP*=2
MO,_^6%K.^;B+FU(YX/=7[D.NL:VEQO+S2:_UPZNJ9%%%FAO=;>_;^L:ZW+>;
M%]8D8[5R[LCKE9-+3!IXA98OVVZO`.:&%%0?'S5FWD7!4#_HGVDHYF1M-1SV
MG`IH-EQKI1J)+=<OZ'V4;/E-3,'RO!/QVKRYMM-'./I&ANV]@J,E)U<ML=]@
M.W(,GF6^=T.TS6*I79LHE>!_R*-)*RK3O?B(%KP_\I5%?BZE2&0I37QV2<XZ
MR&YEB%5;T"..*[L?QV$AG8KY[--<K@HAK.UNE#?G,FI(.$W7VCYP599RJ^`@
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M#C^&F$[L/X@O`0\EQK"]&1`X1"I^%:.?3VZN\-S#?[?^]_;JA/E#^()[R6GK
MHMVYZ5[T>Y?G[4';'5P-.JV;3MN]=-U.IW%Q??+W)ZM2I/`KQ\I6+>I+Q^HL
M'W95'Y?S\1,@[*FB(RL2DITNK?TVC*7.G>)S>3AC$\%Q/:4ZX9F_R(MD(G4@
M"(]\)A&3N+2G=VI,4SY3@:(DAF6$%8([)-,_I=-(GU"]A]\2-N2)8"/NQ^R!
M!ZG(SFCR1QX/SV`<D13F7?!T>)\7W8<PV"'CDHGO.!ZX!X1<W17CB5;I)WA^
M-7[P/<&F,,=HZ+#'L>^-F2_9O0A%S(-@IFYX$%(-7U]VIN9]!U>,\$@M#H4#
M,@C<_E<S\$-XIX>G6^&WPEB6**,&Z\5BZ&,5?R`.PB[^R@.@C3\\A2=Y?.HG
M\!E/T\9*?O2L/"['#+4X&\71)#O^"X-$.C[`4V`I8@ZCC_49V^5;(IB.7I;Y
M+6<O]Q+8#W-OCV)['*^6/<W,"PN?L6.,#(/+/A<B;3SUFV[O`PJ-3`/-7V:E
ME'1HCAQ%`:RC6KM)E(:O)>2_1(<]6'_;#*=V!XU+.$7L=M]XC+@SV/$IVWY=
M3@/3_%;>UZO).*L]OYK$14MU0LHYO%CB:=N*G:V]'<="L%_AM[%DUR'6<,%3
MX*S5<&RYNQ2))XXK<-PGL*+>QG"$>P=196#]*-?^F9;J71`G5H83K06BB1.)
M$P\)$P]W*Y/8=">`29;E&]G3[>PW57T7#$45@<KBO>O12'@)BT(L&8O%8N_$
M*(I%]BGAWX5D[]R]MC6M?+:EO?2.-Q0(KTSFQKOFP%Z:N]4"WU7A%^I#L^]4
M-(*A(X"A5OGY_@1#!$,$0P1#+W5$Z=K+8B48(A@B&"(8V@*&NHWRR\D<!PQ1
MQ'(Y:J3B1-M$+P^NSD;;FM-1E<7&^ZCLS&Z"^0<G#BUKH4`2!Q*'BN7NE7+J
MVYJ5]@IM2)Y(G@Y?GBQN11V)/-%N^3I^3R@2X_N4PU_4F=MJ"(<Z<[]K=DJ"
M0NK+35'L*D2Q"4`)0,L$4'>PPW(T!*`$H`2@>V=*`E"+`-JSF)!%`$H`2@!:
M?:8D`+4(H.U&KSKD/&(`W;B.8L6J=EDKE,6>&_RJR+$NH]7NKZ,"%CFYK/H\
MP(Z;\-X+2]>'R2^">WOZ?9NU[,_=S;?K<YC?1L*U666]_G;<FM_V:ET]'\_[
M>4&*!4O\D$G@3Z"ODY5T5(44^7#BA[Y,L*K>@\ANE6=O%N4-R;*P^(K'[1$*
M;ZM=P40634T-32E3+`,:#DW1SD3$$YG5_9QBW5<VY@_"85','OT@,)\X,H*(
M/1\X81IC;4_Q5PJKGD2Z;B*6$)WP^$^1+%82!5::`!-)-0B>Z.\"+"N*%\0<
MEXF9DJ2?N!SRO]2?0S[#U\`8S`M4H5+S3#T74\$4V0[XS(\%"R.&C7%,8<ZE
M]=B0>$;/&JVH%FDHO$@7C'R/ZVXV-1ML!JRPG&^WS6+I"J+%":M9.K`4R5A]
M/\'ZIK'`<[Z&`FKV2$:0RF:CV3ECGQ<7V]2VS"K*8M557;1U5R1:[OV]%6V`
M%78UXN78XE8C5HSQ,OKM$1DL5!6EXK3/8NUB]66$J3EV`>"FB4S@2Y1;K%8L
MTPG`IV]**^LRM%1\EHK/OF1&FYJ9[5T7GW4;-:E"2A.D"9;Z0CI\4G:Y'*H'
MNIG;3&RX#1M25=H*%K.K]<X4L=9!%Z"K+K_9JH]8'_8RT2X"K^HRDT5:[I_?
M?E=?O-)_?7_#.X>EXO<O'X38W^BNS29"18?W!;<V"$FJBR2DEHB92"V16B*U
M9->%JE"6:9EAHL_%;;>$W8E[/PQ5"L+(="'=!H]>/<AMD[C[/<'M-+HMI]4L
MOXA>53@&[RNUR7UU!*]R"M^Z051Y;J,R><7[>F<M>RG655]Z`IH*>!9'I<D[
M`Z?MDH"1@)$F)TU>+MITSWHN`4V9#OQA^>G_P,SV5V)91U.TL]ES.@TJ9+L#
MK7)@6O=P96)PUK,6@B*!((&HO4`T>TUGT*#RSB03)!/S\&'#FM-Q*`)!FX//
MT_9<RG0BANR4341\+V(*(+[<2Z#G-)L#\NHI?%@='74XXN6VSUP2+A(N$JX2
MA&MO[$;R1O)&\D;R1EM"FW?[,"FZM"F$][T;M)UVQUH,?'G9R]M=KFZI75).
M!RPQG;,.10-)($@@<A72Q%3^3I]T".D0$IGUVDF?M4B'V'!-*A0?*).V-U$\
M$GY)B6R'$QX`3>1T=I`@2AJJ8K)77]5U.,+7')RUK=F`!Q^((^$BX=I$L[6=
M3MM>IU=2;"1[)'MKTJE/9XY*]N(.RUE[4AM$A,.2JX*4TI]N[=9>NQ9'U^FV
M>DZC:<_6?+5I6AW:G)5MD)+N*SD&>0AGC,N;<QE'O]SE?D)''H,E$""UO+5:
M;G3;3MMBKC&I99)(4LO'II9MUNJJRD+NQ:FN<!3+=%]K8JNUO</'^M6`=TC0
MNA&Q,H0C3B1.K`;AB!.)$ZM!..+$8^9$VI')CORH7KZT(U-&Z*?1<;H#:Z7E
M*/1331FET`^%?LHMQF>M=6A5%I)`@'9D]B1.W6[+:39)*9,\DE(FI;SMI/MG
MZS==/A:E7/?]&)NTS-H%,OZ@&O.Q$?=C]L"#5*"3'>GNE>Q%TI8TM'M=_)T-
MTQAS,9.QV-SGMPYFE<\`IH83B]4>!I3\O3...&*KJ2Z![E+Y[YBV6:I-.%)M
M!Z_:VF<M.J]+0$.JK9JJK>!D_I3@UN6JZW<F"@4R!7XH3LW^MMML_+!_.7UI
M<(5%_2.5B3^:61WO[?@YC_>12R;@A1.NO.-$^9_*)65#^(JE,G-*+P+@^]-O
MWC@*A#3WLVGL>WC!)!J*@#WZR5A=.XH"$&W\@6.7`?VN]]58NO58?)OA%.Y9
M@`+,KE`+[(>`=/IS\:%A%$]XL(`6+EZ3/U@)%O-$$)AK?CYIG*C/@!->]GD%
M(6[]":S5)_'(OD83O@2RC_XP&<.?,"<3%@=`"_A4BO?9'Q^>PLU\4/$J\&RO
MA*\UHE)J+#^?='L_O*I%%G';W.AVM[UQ-R^D!)>RU?+"SL_RWL[.M;,'LBYB
M6Q14'Q\U8-Q%P5`_Z!/`"/L5?AI+=@WH,F3_3.&;5L/90H$37UJSLW?"BV5L
M9>Z":9L-UUH&!3DNQ(EOXL2UMPWKOIU6)H)^]>6?;!0+P7Q<-'`H6`S>0TW"
M%M7G7LVL/]2$G@>,IL2(&S$B&9<?KK]/A8>QE<`?60/$O9*H!([JLIG@L:PO
M>>H%8T?./F3)/4_**__!'^+1HQK9;]5AQ`:9:/O&M@H1KBJ\1E;8A_^)`I[X
M@9_,2(<^HT-[UK"+(*IJ]"F9=0;;0!&E"VP_N++3!:(\)X")N?_Z("0;13%+
MQKY4F00<]_4=YB<JC4!M]<.%R9@G\_P"/PC8'3[&]+/$'(,''L\P.4!Z8S%,
M,9V`CX`IX3HOFN`/HS0(9@S>!R\^8Z:O3!K#A6/^(.`Z$2YG+<!'E=J@LQ=X
M.,Q?'HL'?#6,=,1"X0DI80#P*60RO9/BKQ1DPB3=2[R&>TG*`YQK_MZA/QK!
M"$=Q-(&715+D[Y>+`WP4L2B,[8[CG--I%#*@6A+%"`>*J+$O0D_`S?.\#)C]
M-$VXIAR'YXQAR8$04H323X#^+(G45!]R=<9&,%A8$T/\#R9_0W"DY^*ECOJ,
MCS0_Z=?!\!930_"G;/G,X80SAADDEW`]#V<LE;@0\]G`']Z?*A4$OH<1#@6\
M?(([DRO'>E8-F7Q['L@.DG8RDO-''@-O8F0=R(QK)L<<V0WL7+.:XCNLB)(J
M_.54,QXN,3`/U\DZ`0_EPE+^U_(CLU>A\*&$@'3`$O,PQ/_XH4QX$$Q`7B1#
MI<LX2QZC4USU493&I^B'&TG2+THBN&&!MV3^"D`1%(00!PK#X^ASJDP7&+MO
MGH\SDR)^`-XRS\U85$RF0303`J?@"7!;39Z28EDS3;W(_6:S\6'Q(?D/[@<<
M1@X?YA#.X]CWQL^^1;^!35+<YA`3CE3*+],`*;+UR4[W((%R4'M9`K*___93
M*D_O.9^^_X;/NL`%O2RLYV<EH^?A\&.(2AW@X0LN\)<H\+W9W__CW__M;_/[
M_>D41@[7_E_`16#D^\M()OK*6^#BBP`EV(,!P8>O8O3SR<T5[M+^=^M_;Z].
MF#^$+T!V3V_Z@V[S^K)_?=5OW/2:O<M^Z_RFTW8O7;<+HM0]^?L3F2GR^BO)
M2*OLEK(08/5N8$:FC"N75FD;*<YYT`56>_H&B<QLY37_Z9XU&5P5`$O8&3<J
MT+<^R7C@9@=#X>40='RL^/<]&D)F]`W;H\_$,!GCKN0D4ADR0F7([&I2F(DS
MUS*MAL-6)CY4?G%6;I)O,VH'E0U:DP!5`9@CJ&W\T`M27!4TQD2`T.2P>Q&*
M6&D=,.Z&8$F`9L-A/8A<<,[8RX<U5X'H.B"XB)O8(`-4U9<X&J9>\CN/$<UG
M^I8UX/*R>=%KMF]:7?BCV[T&Q&SV,KCL]JXZI<-E>1;*:@3-*%0$/3L,?P[^
MQP1[2X*K8=X!>GL:1QBN'NK<`\!2#S3EO<@Y"/0M`D%FVEL`VW6%9D75_JWF
M#7;#SN3<CI0;L'44Y6$)V#2-85F,LDOFQF?.([T/$MRR1UQ-%#.IY%[.P/F;
M@)R?>UX,MJ=VB&(<N%IP>/C<R\IYP@.)E@L.(?A^(@3CTU<67'0?PFB'&QM@
M+P'!$\@`$!F#0(A87O^5@M?S*4K$E2^]()+@(&YB;?6OSV^N;QK-BPOXX[S5
M=`>#*PT?C9OV^=7UP<%'D7C_Q33YJNJ=68_I/`GZN?FI@5TN`#H:>@'85_Q-
M,O0IK.#"W!0Z99]#=@7NU.0.WN-VT#!J])TB-B@(N-3QB5C[I;<Q^EOF=X=]
M.CL_`Q-"9N,\O\<@SKMDT>LK_ECP^7YTF`J#*KL#():'['RBK4-\\5=`%H4K
M^>V@7B8KG__<E<67&7>2%]X09_<IG!+Q!#Q%]'?#S(N=8LPJ2B5H,)XFXRA&
MV-).I5F?6+_QG>#X[*5)+PP`IIBA,*A*P!9`?@S<:!_U!5C^AF$JF!;[PC&2
M[4^Y"C%\B<5(Q$@^);+L7>'M\UNRBQ:&XJ7P59C@O)*$8P`01Z<F\<(XHD*W
M,O@=5`Q3O`IJ9LJSV)4=1ZIQ]O]W=VV]B1M1^*]8Z4.)E(`--I!H58F+47<W
M55=B\]*7:@`#[AJ;^K*$_OI^Y\SXEI@06*>[Z4.BQ'C&,W-NW_G.B:,_?9?"
M68$0L$-Q*L7S*2V_>#0(=5&J)%?R1%B2I*IN3"PIG4[HK("&6765(I2%R_QD
M;D?P2_1U#15*(AQ@S,<LU+KPXU-Q4?B$0:2,K23VZDM4+:/9??JZK[,.^+$U
MVNF2/]&2R_8>);._D'K0:8D%.5.R4LD2*4MBMACYA1O6I$I&3=ODYA9%D;M1
ME`@?\BCRVT[AS;'N4FN(2T@8VA=!SX"3J!R^E>2Z4J(9X/$2Y@P?$.R`E&N3
MKF$]+06=M6<L>Q.$SG,^82X-2;+/N+\QJ]HVW45$>T14I<-L*4''!]B+OZ+Y
ME\PR0N=W0>*Q9TX\9CZ9!Z>/@[!P8'!<.#+R0]CKJ<MLYD&0-6_BDANV2><D
M13NFDDL#46V!Q_DR+::)#\:92P*V>2PUF63HGXYO7XA:RU@W*Y[87XD1/HE)
M[`PF'=.P;[K#7J^CF_W^T%*IL36P[==G$O]S:)57FOBT?HPBR!LK3+[WM0\)
M+)`TZJI8O%-UL7CMAL@-H;<PJ[\38!8G+.'*GR-M&""1(X,=P]%3/2HJ(BPA
M"R)(\F0EX!G#=GWB\AD6PDH_XF[8.,+M9V>^]I%SK_;:KP&F^$C?[A1[440"
M^9#LOG+,$KQ%=^&*</]H)?3(O$J17LS!%7Q4Q>O,SCESJS:7+C<P%ULW3JN&
MC'F`X.+TT]+I2]%5'!-'OVGR#T"-]L<Z";0/)*OWN4!&#.^UQMVGRS(XY3$E
M0/HX$2C,<ACW5^+\*\)A%)Y9'W/IT/X(8PD:I(K!@JI:K@+?H?`C"<HC-8PC
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M&5\3@5<C"E3VE"6GZQDW>FV%*TFU(F.T!9@@[LK3Q"9(?`8;/ZC^Y?T\T\`3
MH?8Y"#SM+B"",@,C"\X$LZ3OAF.1<32T"2\*BC3(`1]4Y6"=!V>>,/,GM*G@
MACWR5JJE)E\9Y]$-]Q*"$,NE2[3F(?2,#-Q+(O(+3+_0@JC^*VL_:F))A*JB
M4+77;#R[H=(3#S_GR#-@[:,U,G7`CH:+S:FJ8R2W6WV,+?B1@Z'J,%T7)?`?
MCX^&?%)=ZFI==>M4U]E>=DF)T',EC43DTV\"^TM!4C?E9E3+(;,QK"U$1&+/
MVV3FN7-)M4AK#:A%LUH85RPXB`%R`(Y\7L>`>Z[SPXPRQ4WE+H\7XL5,OL.6
MDK_#ZHA22#J.;TREB8F0XVVDDN"*[%/%W%&RX3HE?)S<<@H+E,$2(':EG48.
MRQMK4,Q/;EQ$V/I!3'UD2V@1-<V%VDY@:XL#\%1K4#2CY\74\\DO]!)9'J)D
MI[*32_:HOI0(+NVUC=AKLI&3QG'3;[X8.B:X6+Y]F80\?P`YKB2/I?)Q^5R>
M3K4#YCZ)7%+!>.=8>+"A1+?B5&3)9)5X`EG#7B*)KU03QB'-\)!<0'1G9FTG
MTV"'"*T2[74?.;\O[;3[]P5<U\#0)Y9AFB-],+&'`V-B3#J*Z^JW.\;P?\=U
MX81(Q;,SJL?77+,&;2G&*[:4&CZ@'O1G\AP2EU!5GUEM9DMEFZHT;YC'AC`<
MF[>8SPD&%*`!>8:\9P2?.]LX9U_O?>9NIC$+'$\=;!QJ?89.`AE2"0V2$2L5
M`P/\]J70'R[;F/+WX,FP@?C(FL^<!^%-(I\8G?`3<+^C.B$\5\RH?]I54RTR
M6E8=`&V$'<2!,?(I;/VIXSEZ:C3)H;6E+15T3];(6'A]O1S#IZLZ@0>RH5X2
M&F0RQ+0_UU+_AO+7:A,XT?.4?0J[&VSAR^TR"&+X?.<.OV@/?"D,:&'K.-[>
MMEJ[W:[Y,`N]9A"N6FU=[[3HXQ;=>*'NC_=;W(_M<V'Q@N96D\.SJ7O6(7FO
MG]A;Z=VAKO=[7:/7'W7;UG@T,?JJZ\0V;=-*Y_7$S/&4ASLVYD]OYI77@V>3
M+[_06D<7U!M8O?9P/!Z-)_JXWQMWAY:>ML$8NCFN6M"Q,=^V(-OLC(9VIVT:
M;=N>&#>6;BI_K@_'=K=R04?&?-."1AW#L,S)8-)O]X=ZNVOB,>GD-Z;=J5K0
ML3$O7%"JH(,0"([>7L)_C2:'`04>459U1XO^,.0ZG2H=3H[A'/T*,$A-=3VV
MC;%N#3LWQJ#;[UFF/9ZH@<;([ED5>H`E?8\=GJ2P;W.'IUC`F]SA22;U2CM\
M9.GG/.$E`>;Q*<A5(;X'2(;HZL;#&NC%M(Y_?3^]^(6@FY\P7\&@I5"Z)PP%
M,"_!&L"!\.8$]*E2DKU\."8B+0'TET,V#@##(@,IZ3_U0?KP!?F3;%AY\O]T
MFN]:I:/B*%N^1&$6E]^U:,ON+7W'K_\"4$L#!!0````(`+&`!D><72-7RQL`
M`!8A`0`5`!P`87-Y<RTR,#$U,#8S,%]C86PN>&UL550)``,.OL-5#K[#575X
M"P`!!"4.```$.0$``.1=6W/<-I9^WZK]#UK/,R+<0:22G7+L.*4J)W;YLIDW
M%JX6-ZVFAJ1D:W[]'+0D1[:ZFVPVB6YG7BR9P@$//AR<&P[`'_[^Z6)Q<AV:
MMJJ7/SXAW^$G)V'I:E\M/_SXY/U;]/3ML[.S)W__W__^KQ_^!Z%__/3FY<GS
MVEU=A&5W\JP)I@O^Y&/5G9_\[D/[QTELZHN3W^OFC^K:('1'=7+[VZ):_F%-
M&TX^M=7WK3L/%^9E[4RW>O-YUUU^?WKZ\>/'[S[99O%=W7PXI1BST\]4&UND
M_Z'[9B@]0H0B1K[[U/HG)S"^93N@_[N6WW]*#[YH_Y&M6A.M]>GJKY^;MM6Z
MAM`M.?W'KR_?KH:(JF7;F:4+3P"#DY,?FGH1WH1XDGZ^?W/V10?FH@ONO+UI
MNW#1?N?JB]/4ZO2I^^=5U58)*'AUXN#[\R;$'Y\8:`H#)@)+AM-P_[:F:7=S
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MK^M%Y:I^IV0`Z9Q<-O5E:+J;UPNS[,"+2*KN,KG5X]$>VN6,HWH#OYK&G</;
MGX?KL*A7[__YTV58MF'\R';I=M[1=4WE(.9)QFFOX6SN9T;^WYY7EY<0V>T]
M']L[FG,$7>W^@.>`7'V1WFUV\"3']C?C>(:%3[V$,W+XNVD@*.ANQF.\H8?)
M>+YJJV5HV[?A0U(*9\N8W/!!#G(OY?P\#H5U:`?S<SQ09`?23\4O+-^+JDNO
M:L%(@+O=@7H*RR%^P`#2#%P.%(3A/4S'\](G)9]>UH)_Y%/.[R>S2#FMM^<A
M=`-X'MI#/IY?FP8P/`]=Y<QB_P&L[6[6T;P%Y1I6<@#1)'@1+Q;UQ_;]TEQ!
M7!G\J!$-ZS+?J,`B-^$<VE37X6P)A.%EW4XYQH$OR#;B5Y=W>;@)![FESZG&
M=;\AD$(.T$?=S0XV>`CM5'S^;)HE:,OV=6C>GL."[>-M4_NY^!EH`GK(YN)N
MF-W?3C45;[>+]9WYU,_0FJ8S<#%PZC933,73RWKYX5UH+IX'V_5QLZ[M''P,
M!&<+R51<_6K^OVZ>7;4=S$*3'*@7=1.J#\NW9H!H#R+.PNE`0'?I(PO?PU3(
M#EU,Q?4K<-V:I\XU5^'A=EX?ISUD,W,W4`J&4<_,Z["9'T0\%:>KU,]YO?`@
M9"E3VMWTL;>98CZ>!DYR+^%D'%[9-OSS*F5?KX<GJ[=3S<3;;W77+W+;:-;R
M!?&=NUJL_-.7T.BN:7K_R%*.V[>$3UT`3]Y/_YZ>@HL97SRR4.(S1RM^@*-%
M[;Z8Q3LN5G4\T;1V575SU:(/QER>IMD]#8NNO7^RFF^$R5U%T-_N'I?W&2J(
M`FVUO,O+N_K#LOI7\&<05'55K!)@7X[C?@]Q[7A^"Y\=J86Q8?'C$^"]G/F-
MI<0L8L4"LH8I5%A*48%I1`7W\%@R98/Y$N)%JKNJF_LY/S:,\V&[$=,B%-1$
M29'PV*'"<(XP9AYY+H2R7(>@9!^F#U;2T\:=U`UHYQ^?D"<G'\&=.>]6O][V
M8!KW:(%]6:9VU^(4&+P-CA%$\A?W]*GL[@AEK3ZV.0(49Y?Y>PBW".M]D](2
M7'B).2*,%X@'*1`KB$)4<VX5XTZ*WI6[7LKH?ZR4[0%N#O&8<A'\61ARVWCE
M/[\[-\L!,IB5C](ZRZ0C$EE+&9*Q$$@3^*_#&O.@O#,^CA-T]A\KZ,<^@P]6
MTP^G7WF5$[N:.Q6QSN?Q9G[=UI+3B5_;6TPZ__N&%(1FX&*W2L[Y&1I0CIDI
MHEHIC7MV;G%IGUTU:6=TBR':0E7Z:(0'78,T"QH)8C1H1D(1T:(0FGNII3],
M9'//\)MP'9978<OXOFI9<J89]:1`3H'K:@MP6&,,$7%P54AD03#OCCFRF&R^
MZJEQRN&^?1YXW0X1[G7-2XVMEE)C)*FVR#MJD&="(%H8:J@53BFZM]>/OF$1
MV!.MN1V/72O+,ZG?W('GO*/XI:G;=L!05NU*+##6IG#(62Y1I$*#GC`&2>8,
M41$T1M#'K%3'3<R&R'<L)#FS(V<7EV85C3AW=9%0AQAD]2@5@[P<-O6]?91!
M*.4U$\@*4:""N(!,=!A12J1,"L1A?-2:=E*YF`.O`^C:ON,PF=3MBVH)<_>R
MNGX</6]/56\G+#V)4E&8Y*"M0)$[AY3%$4DL5"2&>:(.I)JW,-ZGK?M(2VRE
M-%H3)`L8-6>>(N8L`TDW\,2"H5?AF!7XE)-:SXY=#DV_A>T'"NCI1=UTU;^^
M2"CL)C\;.BM%-%X5A4&,V0))`[K,,<<1*#CBO(Z2!7[4NO\P(C4=G`<Q#=O/
M&V8R#?=LW&PW!`^;E<$$I;FC2+$`/AN@BD*$1:RUH3&22+GKS9#//)HWYN.O
M(!=-91:I+.OMU>7E`I`&[E_%=$*ON0[;;,!._91,.>*CD*CP+`)KD2(ME4:!
MR5!XKX(G([?&\AB$\9-;YX4MARWX/(9T-<Q92ER[T.XN.)NIRX)(&K&3B.GT
M>DYP0A@\9<,ECE87NAB95<NSDSJ]N$P*5E8A2=:I/;_=/=M=2#93EX(&;(*%
MH`;#XL#:>F2Q`5XH]TX[)ZT3Q[P+.;V03`K6`0S^^@/[\V^Z[';4/I/;L9&I
M[6[(-K)2N4!483BB7$04C2H0DX8@(:C$VD@E1*\7G7FT?;'H=L)2"DTBYACA
M`E:3U#!8(R1&3J4=>:Z$\4?M>$PWG?7,N.4P*@_"F>?AL@FNNMLTO5R$U?0L
MOPAS-HYQBSQ-]8K2%MP0H3!BV'B(WIE!E(%:UTHJ(WD@(O;N=AXT8IU-]`X(
M\0&,VNZWG?0:F,>%[^E)N?Y-*S_@EW1G0YN.\_UY8/2!\.]"7AIGO8\87)48
M(S(L!IAU$U`4G+@(<8GVO<6T\ZB'K5!O6?-;Z4IIF+-8&!2U`U&C42(/H1@R
MFA=1,(]#&.EGSFM"YIO4>E[X<EB2]3P_37>;?%@=MOZ]ZLY?A%2%MOBEO@[-
M,CV\/\?VXFJ9[E1]5[^*L0W=:H?[;.G2'O>ZY37_2TO&*:/81Z2)YLAZ#O/'
MHP9]6`1!,5>6VJ.T-@>6T@.!?Q@[U'=-U?R1UI"KIC)P,?R>J$S!WM/%:CD&
MOSIF_XBU.[A6"^*=^;3-?=VIHS)X6#],*<0","4)B<AY%1&.-E!N+`FF.(PM
M'S:0O9$HF2\L)80@Y:-'QCB"O,1@J!R6QNC"J/ZBQ$,&B'-.^-=^^UR(YC#X
M/U]<+NJ;$-Z&YKI*%_VL&P(@]%-8AEAU+P#HW>1MFA>4Q'FIG!*(6@ALJ$CW
MGPL/\Z4+67A+F<3''39F%,B#07X`\YWAM.^NM_U-_?J!%_AE>^UA!YUAP@??
ME9?OO3DPW_4&NTP^X,-S7$N_^7J*-;:GC[3DAA$>L4=.1H.$BQ1A&P@RWBNN
MN!0FLL/X>8^9A;!J<96"K=<I!P@FK(.XQ5YU:3V\JW^KEPX$!B826/EPMNP"
MJ*MM"=UI7E!J(QR@%%$(DB'#`4&AB$%,$&&%I]*PD0%V'C]Q6A&ICP3C')[C
M3BMQ#;`>1\:U,8@4@2')*$.%-!Y)*6*A5'*+1Y:NY9&<0TQNKWR-0#6'K(#O
M='OH9<7Q_YG%UL-D:UJ73&B+C>.HP*E>FVJ"HF(6N1@)9K8`?_BH2V?WG:I'
MVY130)1CZI-3<Y=:ZIOWKYN6+G!L&/2IK;1(1\>0C58B'ZTMHO.1ZOVSM]_.
MI$^`3Y;=:.]7)[?-XK6I_-GRF;FL.K/MQ-8&BE(34;@"T"&DT(ARR9%V/.VF
MLB`-I3[*D?5N>4J9)I[_Z6#*7)2P.DJYX2+B(<G;W7HJO9=642R1(SHB[KU`
MC&F+")/:">5BP"/OX>#?I-C,#E^>G4F(@)?!W]^]^T6U1*Q<M2W8Z2<NB1=2
M.(^15S8B'V`E<9\*`WG!,5:6Q-";\E\O-.);%)I9$,LA)[]6R[I9.>.](?#7
M34L;!+44W'#OC4"4A%7:TR&KB"M"-*+0O>F`X_(WLH<D$V":0TK67&2[/7]4
M\J`PE]2A(*)$@7J-L(L"J4@8H]Y;AT>6N^21C5D3'?L!E7G"^R^T>-P8E%T0
M&'B'KHU.&E2A6#!0>R0H'GSTD8PT#]GS7+O-T.:9'@]-)O>SOEJFCY;<)&77
M/^GK"4I*':R`J!$K^,J(PA`#T\@[+@HPJ5:,O<<D^\2/FK#'SN0T*.7<W'X3
M5H[+3CJ@E[8,WC&.K0)="0ABYA52`"$H3!F#+2AE\JB]A8DE8P[`\N0F:W_E
MNOLMW=7-[&;Q;&':MHI5\/VB,K"'TCL*SI/6R%HLD%;IPB!2>*2LUJ&(`;SI
MD?>WY$EG3"PP\\&60VR.\QZX0Z8M)A:/::'*DNJ^*XI]ZJ_3GOD`<=A`43IE
MA4T7TS@JT]E'"-H=AAB>:.<"5_##C+R8.T\R8F)1F`ZF3)[G5]_V&.1\KJ<I
M@XF:1DN0Y-0CZJ1`PAJ%B)',,*E5Y&J<*,AO412F!"JC,#SX)M9@87A,4WH,
M?K:-##D.01N1,B+*?`3+&)PBPMF@1F:VU3<L#),`E24)\>#C7P.R$(];E\XR
M34+!D:7@"RG/%3(T.=,^&`'"KS$?&7,4WZ(`3`-1SOS3S8NZ>0\VK$GI=1#9
MU_7M-==MRL4.3DP-Z*74DH:(*41;0H'T!PT(@[N$HG-2"QP"'RLJV</323)6
M\V"66VT,$Y.U!&4,!:P,89&G)J*H=`&>4I%^HX4+F"EAR#B)R!Y_[B<14\&3
M8_+O(R"0V`?C'R0&?:2E9QKC5-POC0FH<)HC89A&W&`(KHB#&&MD;C-[Q+F7
M0,P`5*[2JIXZ]0U55ANH2L$\)T1$Y)@'1SKI/Q8I0]$3SBU56)*157;9-<3T
MFUS3`I<E^%A==K@MTE@U*$.,CG!PCZ-7%(7@"A1\`&>,!XP5L9K8WCJK.4<P
M(&1ZV*YD.IA@4TH@!`:V'#.4#M4C7#CJ8\0"/,YCWK,9,RU?AT9[`I)%?YDV
M'3O_ZI,G3[MGIFEN8&WUUHL.H2^=9]P'9Y%@%@P#AB"#%A[X,5IQXKC%\:AW
M;O>8R:\5V$QX9;J8XL$Q_7VD9L>>2BRDDKQ0Z:L,H-"-29_HD`PY3TR@SCMK
MCOK2Q>GD9W[D<A8&O`DN`.=VD0[=#B\/6$=6<D]Y$#(B(V#A8&4-P@(7*(I(
M!&,P6G[4?M-T,C(Q3-L%8L.%3^^7X`0N5A^!6VTBK9G5M>U*0Y7TKN#I4G&"
M-%8&64.*NWM4?'+KCCH>VG\:I\(EQT(^U`74A]Q8FVZA[@E+YM3'YQOAAW^-
M:@U5Z8TU/IH"*=`TR%!P:RQ8*.0EMT4PUH6QGZ+-LYDVW?1/BU*>Y?YYE^=/
MX[)UW:]I7RHCB2,B(*R]1!(,4?H"#$8`F!5:0JAN1F;%\^R@3:D`IL$G6['-
MT%S`X\8E8U05@4?D%7%(4VY0)`6(M1?&&%H4'H\\2)AGVVRZ69\$G$QE>4=Y
MS_/A0[F]\D(3XY-'\3_Z+LS/G^Z.M0SX'.`0\K+0W!!:I(])2#!T5"I$`@L`
MJ=/I+DXOW$C'(&<`MY=DS(13#@G)_5'(P\=X>\WT'EAD-O:#MCG7MB^UU460
MA49!>HM8VM<-PC$$UH['&&TJ+3G^2&^O>9X*F$/%>KMN<J\A+#EA0@?ND"*^
M0)I(@BP6'%PGH<"J*:J^A8AO+S&8'*$'\C#+-7_]%Y&]-HGU\]!5[L^+)?)=
MBO:V@W]7&\&O8LJ!OUC4']OW2P.VL@M^`S^'V$M['9JJ3O6133#I6N';GSMO
MJ:WOIHQ1>$N*D$YB@)-HA$=!$XZPH,IB:@I,>M.E\Z"1DADP!'!VKRO`_J>;
M]VTJ$WT%KJ])N_9/75==]YW^'=Y)":LFD&#!<I)H4@4*1B95`V!82<%+QI0:
M6:^?9X]QOFFO,V*:*2R-5=^WF_]L5(I8Z"(E57V$N(I@CU&ZW1\Y+)5D&!LB
M1[HA>21CK@E['):.1RR/?]+_19:M7DH_>:D*9C5W`DG)#>+6I4IHPE#AJ"@<
M!%C@E!]S>B*3K,R$9=8MJ]\;@/)Y_7&;S#QN7+)43Q8MAGX+A@1E$CE--,*!
M6*.E(]:.S%[G25-DDI!)D,NTI_&%;3U;WCOK#[+SV_<X^NE++"S#EDJD,81]
MUA4620P:%7-MK1<V"#[RZI('*8\Y[T[/)C;SH)E#DM9?\KY%=-83E)X[K:W0
MR''0FXX;AQC6"3_OHP>5RLU(6<F3-LDD*I.AE\EGO:Y:X.]%W3ROKVP7KQ;W
M=3K;O=B-9"5F.`K'`;*H`J(&8T0Y42@5X^A08*O"R(@G3UXEGU\[)8:'L4E?
MUOW!2':+H\=U6'K-O$@?M?))ST8K,>C9%'4RRF@(C!*V_T[]7])JS03O883O
M<4'A3J+VF!S`]K"V1+JF2!9(<2D!;`(&G,*"](SY($86]!9_<<&:!,S#B-%]
M2+"KJGI`5PJMN2),@);6`J53QD@'^"\`&6(,UA9Z9/F`_HL+SGXH'DSQ?'6Y
MP-V=9[OJG_6]E"Q82HTSB*L0T+_;NZX>-VX@_(N(L!<@+S'.,?)@7Y`8R.."
M91@K.$N.5C+B?Y^A2GQ%=;7+W3AY.9P@L7T<S@R'4P1WE-C$@8`1GD5M**-=
M,]K3;TF%&A;3<6CKYR5\\K.TOU[N*F[M_:W/ANUUZ[`QU#FZL:>:0$EPBA+P
M@"</2K9XH8/0'>V+C'WC#&P@?,=5J3KRL\=M&\^T`:XB`1L8\;A2DH5"OFZX
M`9&ISJ(K%_NFC-9#(-DI..8H.WT:.[U/N74'GTJ>C$/<Z);N&JM#S,)3PIR6
M.,T@B(A&[D)*LLS9=:T>_DV8LBN#VQ,I[?GC]CGO<IIYVJX!99S1*A"9:,0_
MSI(4K-[-/_H8>%=!5<=);QSBN!G%&N+H"#3EAM#>ZIIQH)-&6:]"XKI`*TN5
M@ERJJ2)OQ3N($8))&SJ&?]>13V.[9O2#:14SM_^R\<EZO_@A(E)+..KK?LKH
M?7$GC;":.YXS80JE-A74$:F4)[QXXPFG@D@=70O'U:9OWO'G-O`A(:V6IV([
M=83G]5\1VE(/^/FR]C5KS[G77=Y3HRT3U'A&+,^*)*LDWFSQ/V>]%PG50[`=
MM>M1E>N^*6QX6$>4C#_.YGX>;Y2,!SIIO#8V<II*P9X2[ZL]L9069YFDM*9&
M)3OI='!C2\9^,*WT`!P!4ELJO?_4MNOB2'V?'Y43//T*?+IM8Z.F5@I4+*G!
MVZNCAGB/$(2,BW6(K#_O!CQ!%\>;M_?E4W#O0-;)O/-IQTCO\^/,B2=HYEB3
M)@2M$^>!4)HL<E\F2,I.$L>4L5G;"/)V97P$E:EO6ND1P!HDLI6X[_U?KV`.
M>/4L)'[80^8Z8793OXU+`0*EDFCC'6&!.1*%,L0&%4.FE`F8=%*>2K16&^3Q
M!-Z%W.M\XR85+[^2V2I+D<LQY$2[H/">HC3/)86"ZFB@&M4^54?DW8AD%8:6
M,\35?<:S\<'/?X=?_`KNYX<5SE/\ZXIN&BEL9`%OO"XK2E160(+VB(F)GMER
M7?&33CY531T?&-51HAN?1!0>KL\[<GSARTE=4+GY1*M&2ZJ4B;@SEFJB`^3B
M45U*5T?CN),VF[,\M/I:+ZF?V@V/BRJS*DU3CH$16LJ\JYQ]*;,7D&\J`\EQ
MX;MZ(%4R.?9&$"]S,U<&MHKA\?BJNA3V[4:8G4H(4V&SU)03YT,D+&N*K-VC
M;,_:":J],7[2ALL1Z+02SO\'R5:EEN%W]=\62;OQF#JBX_RX6.)NS;>9R>*7
M]TN/5\^XB^_<?-KM</ICW:YV::O.*2'##-CD4)(=(:;414^\1F4VNZ2(,3GS
M@#<7#Y-.)C8EHIW,%HVN_.]<1/#;<?5]Q/#K%IQ^;_KZNP8TCV"#)5)BEUQS
M3JQRE@C04AJIP*FS8K_">FY4EJ[NJ]'`!'<I$><8(UX)0YS2I9*,=U%;JD+7
M:+EZK@)=M_GE8]K@X/VW=)QJ3_D]4<#D-91'L@=AV!;Z62-%?N7-KR"C5'H4
M@/!V-E\L9ZLO>Z)%T?2TEVW]H;>P^E"L8<7]X>,9XV'%6329@F>AQ&ZY7$RQ
M/!)M+2<R1J^RAPQ=*\/54<"[DM3!E,A3A;R*<K[W4+U(^!_X=5.6I10#PK04
M1`%GN"1=,H0*EI,U'M6P*9/29&G@N<K<"_8U:.K-$N=VU"/\P*\:#X93IW#V
M)04Q5RH1&Q(CUJ+>KCTWT4_:'G#SWCQ/V'H3-E72C_B'DD;^,\S7<#I!][-?
M-J7NBP0CB77.HR:1\"`XP-N:$=8[T$S%VTW:`^YUY[UYGE'D9ESJ6*1;O%N7
M!,*;`HNP_#R+T/ZZ>$@GMOQXH\9KJ:T,"G7[!,2Q$(B2J.HK0WF2FN,1F;9#
M4%_;WRM&54X\;&YI;V".O.ZAI%]+'V?S6;LJG.\S["(D3S&"BSIHA$E<,&X)
MT%">BVT@24=-LDC,1R:CCV[2%-*W,!@,MTXQ8+]`"]BP/+W?(?-Z6'SZQP+W
M9NE1R7GMEW,XQ!VN:=[X6#(H44Y,SIEXD8$HY6$7RP0VN=31@"+^750P,&K5
M'@#>+>:+IY"<YQBG&S:*2:M]R60>,Q)[SI)($3VA23A+32G?G6[F%/_?//K?
MAGHV'01M-\V=L^-9^\N+%DVP*6;F&*%6H(#G-A4GIEQ*CG.G7;`NW_[N,R0K
MZM58T@<^0S^ZW"WBNI!]"37#0U6."YZCCT\R)`Z2/+ZP83P?Q0ENXU%;=;`[
M6/G90WMDS&%/VV\;,H;TPV=D$;_#N_7'`,O[?#=[6)?WKC*]]GZ]:E=^7IX9
M3YS"*WMJHG<!`B#/H4:08%"FFF`489Y2JU5)>G;V0E$5DQ=+>.7;6;P>D</]
M--;G@/?&B'AD3GRDDJ1MX8CL=$[XI9GT]7K0_5_41;:&G#NXAF-H?7TROY;>
MSO=8`CJ9D7@'3H$'(G)V*&!D(C((!$C+).*D7<!&I[Q!,!Y:UCZ70N_+T^XQ
M(=2/X#N0*GOH<4[+UGZ&.Q2M,OA`-1;VUO^Q6.YSUA1KU\[#9V,!'6_DT9=>
MX:ALLY6]R"$TQIACJJ<O9W.^JNS1-@WX['@.#"4_3X1'K8@*WB#CU\(+[4R6
M5P<R'*UL#QO+SMX`Y)\8@+:VG^-+N;:+)G%57#LD"=8P$A@8H@/C^PQ"DMOS
M[EQC*H\][=FB&GR=3+!'#MC6I_(T,5S0M$DEJ2]WD6@%G"2)2U&![U>1I%9B
MTF:U`8A@&-B&5LV.S+J"V-FD-_BP>,!=;[<6R<K#U9#MOZY#"W^N<>]?EV3'
M(PSY;K$ZO9'??U>^"KX%_/`W4$L#!!0````(`+&`!D>\X_/@GT4``+A1`P`5
M`!P`87-Y<RTR,#$U,#8S,%]D968N>&UL550)``,.OL-5#K[#575X"P`!!"4.
M```$.0$``.1=6W/;.+)^/U7G/_ADGQT#Q'UJ<K9PXY2K/(DK3G;VC45+M,T3
MB?224A+OKS^@),J72")%D13MK:F:R"0:[/ZZB6XT&N#O?_\YG9Q\C[(\3I,/
M[^![\.XD2D;I.$YN/[S[>G4JK_3Y^;N__^]__]?O_W-Z^D_U^>+$I*/Y-$IF
M)SJ+PEDT/OD1S^Y._AI'^;>3FRR=GOR59M_B[^'IZ8KJ9/EK$B??KL,\.OF9
MQ[_EH[MH&EZDHW"V>/+=;';_V]G9CQ\_WO^\SB;OT^SVS`,`G:VIMK8H_CHM
MFYT6ETZA=XK@^Y_Y^-V)DR_):_2_:OE;<7<\6Q,\;4S.EC?730O:9UW_0(NV
M4`AQMKB[;IK'FQJZ3N'9/_^\N%J@<1HG^2Q,1M$[!]?)R>]9.HD^1S<GQ;]?
M/Y\_ZR"<SJ+17?Z0SZ)I_GZ43L^*5F=R]*]YG,<%IN[1!0>_W671S8=WH6OJ
ML($$4`0*9/ZVH>GLX3[Z\"Z/I_<3A\=9&UP\^?DEO)Y$^1YL;:7M@L\\CV;Y
MXD(6C64ROHC#ZWCB[D6YN^<,?FRB61A/]A)@[TX[D$RG21Z/HVSQHGW)PB2_
MB;*LB3@U>^I`AOUY[9ZGRRSUTVP:[L_;%LJV>%1A'N>?;BZS*'>C=%AG+-A!
MTB%7.LSOK$/E>SAQE_*:0.[=49<2I&ZT3F;+-\+=<QYQ',\^Q_FW`X2IVV>'
M<IEH^68[2[V)9\UEV=E/A_S_D:;C'_%DTISS+3UTR/.Y^S>YC0L_UYSM[9UT
MROEW]S/-XL,XW]9)AYQ?II-X%%<')35(N^0R2^^C;/9P.0F3F8LBBJ'NOHC`
MFZ-=M\L.I?KL?H;9Z,X]W43?HTFZ>+[]>1\E>=1<LGVZ[5:Z61:/W/2H<$X'
MB;.]GP[YO[J+[^_=)/!@?>SNJ$L)9NGHF[OND$NGQ;/#/2+)IOUU*$^]Z5,E
M88<<_A5F;E(P>VB.\98>6N-YGL=)E.=7T6TQ*)PG-T487BM`KJ3LGL>ZL-;M
MH'N.:YIL3?JV^'6O[S2>%8_*G9-PX?;,#4]14B<.J$':`Y<U#:%^#^WQG(R+
M0;YX6.[BHW&1'E3AI,AI7=U%T:P&SW5[Z(_GRS!S&-Y%LW@43@X78&-WG4IS
MY0;7:&$';C;IH@A_DO[(OR;AW,TKHW$CB>IUV9]4SB-GT9UK$W^/SA-'&%VD
M>9LRUGQ`;Q)_NE_EX5H4<D>?;<E5KAT44PXW'LT>]O#!=6C;XM.&6>)&R_PR
MRJ[NW`M;Q=NV]EWQ4],%5)!UQ5T]O[^;JBW>EB_KE_!G-4,;FG;`14W5;:=H
MBZ>+-+G]$F53$UW/JKC9U+8+/FJ"LX.D+:[^#/\OS?0\GSDM9$4`Y:=9%-\F
M5V$-TZY%W`NG-0'=IX]>^*XWA.S115M<?W*A6R9'HVP>/5W.J^*T@JQC[FI:
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MUPO-SO/3VS"\/RM&QK-H,LO+*XNQ\A3`5>'=WU:7@S*[^X1C)V]T7LA3,C0)
MKZ/)AW>.@:`.60"@CSGU?,&5X9AH"SCR"5;&(B2E#YX+.BF*#-.L!+XS28LB
MOO%\$GVZV<!\KAY>&L@.Z??M*H`6&J8)%QX#'&#?".FO$(&2^K0*D4=CE-GH
M),U<</#A'2RI5F/!7JZKJ`3M0J5IKT@YP=R%Q4#VVVB2YM'XP[N9BSD?+Z;)
MS+U)=K)(HKDQ;+F(T;FQ^86ZHHOX>S1^K/E8#@7J83DMFH0.C)_QKK=LCUX"
MI@65'$"(N$>-\JED>@6<IZ!6/9G8#B_RJ\EU9QUI7T`N+/!XQO3(^\=P&IEG
ML=!^!K6IIT!K8@WTN&$4:LV(5(]8$,!YL#%2[,RXMD:HOYI6)QJO;U4MHOF?
M;6']6]8S"=^&8?5O4%^R<!P5'.9_/IOZ;+"8ETT#!A'0'N=6"L*A!+Y!9:SA
M":![,XE-4[>][.$P7:6MPM2'TM>+E2]*1JK"G)UT`;'4@QY2A&L7?5IJM5D#
MY@'J-S('[XT$-FU"UXN)+-FK="//V@5:.,XM`,8H!2G5U%JX-G7-V7##D);T
M\U+K+:#S>K4]N)!@"$K>1[F_YLZ+*^Z!T]C-E\?SD<-S77&^U7]7T@0`:8N1
M4`@PH!@4'I9V[>H@[6M*6M.1-\0[[0:-/E[/#;ZIPE-OH0B<:%PJ0*!V<@DJ
MF&*XE(UZ1#;2-'HC/KH=T(YE$,O$=?7$KY(VD)1"CJR#SO,%\2EB>/T":$C(
M<+WXP1JL81%M8/7V;61POG]XIM%")*"^?'5SV2A+%L6;X>0\&;E+?T;9;93M
MC@>J*0.F%0!2<:&P8)A0I#DOEQ(@]9KYBLZB@A;UD7:)4Y^OODZGUW&RVO\V
M2F^3^-_1^'SL0IWX)@[7Z8^=:YX?HUF-@:*E)P4`0ZD\[7/C$P*<LECQ:XDE
M)P8.WN8.7XD[+J1]F&>Y)WR'795-`D&9I,H"A;`O`5*^(FL4,3)])96.:1`-
ML7AM`\W+I.RB,O'+79C4,)=>^2@2NA[%UG(#`<*"*`W7;Y21#6.?_2=1;V60
M:AOP`1M^*5%_GK;JB8&!2"HWG%".?>UP]81=6P!7HEG%"_Y/,.:6H3WN\O'7
M/+J93R[BFUWE5'7(`Q=D0^%<%&.>]7U?(`-D*36`V#8R*/*J#*H#G/J,RTH#
M-_,L3FXOHRQ.QS5BM4UD@6<(0D1[C`M?>DY49M>3(X0):F0-]%590XOX',FU
M/8'C<S0IMKOJ-)_5R3]7=Q(`:GS?PPP0+1'6%D)63LN1!E@TLA#VJBRD,[2>
MV,OO9\\+I=LMGM[K2,-77#$M."*<*N09*A1GDACF.?BAM<935E0ZM[=7,>TQ
MIA#'AFOC^1HZ<`A<(0*)`'T5`36OF*ZMTD,KIO=#:K`5T^TM1D(!W#`FB,1%
M9@HP++&W!H2Q9B/_T"JA:VN]YF+D?J"]@84F'TMK-$,*05]Q["#S2WFET/3U
M+4;6UN#^*TZ-L'K[-O)J%B./9QI#7XQ4BB"/>T(@8(%1'&J['D8-,&;P"T--
M];'G8N1^./5:;+PHL/YTL]@W7[?0^"5-X'E42^HI"@RAF'$?^NMH35/4[%4?
M6I%QTYBA+=CZ,(NG+%:Z@%\;!]I#!D+%"%78"2&T$:"4J$BI##<N:$%+:4?P
MO`7%#\[9#T+?+?CWXAQ,!UHR?CQ+>7'>V/:=0W7(`L0](XF/?,%\3+F"&O"2
M<^31WJK(ZWGV0Z!/.T.EC_?63N\GZ4,4+43_=%\`7KEE;"M-H+G&S.?4O0#8
M,@``YK*4#P!4>?1`OW4=+6B];4AZ&:K39/5)JY7L2Q-=7G86"W>-W%6T@85:
M(XJX=F,@$!ZP`N-UXHWKX=<7'IY#;!NDAN/Z"R8>+WPN)AI+GE;W[,_179C<
M1N/+*+/AZ&YQT]V;7^?Q.`ZSAT6K[;Z@]4<%''H`$4@HEYQ:C21F:X0\[C=;
M;SY.A=B^9C003/L8BCZFR2C,[SYEEV$V6_WQ!,/5%3].PF04AY-/V?)(MO/$
M>=?%:;?/5JB6F)SG^7SW(-;A4P.#&0.>E&[4MY1;R@00:V4[I_^*JLB:#G_#
M@;>71$C!WZ6+]7:NOZT;!<@WA%&?("F0;Q'Q!5Y+X&1I5CIQG,JLQFML3=%H
MEL#\=1E^V[JVGV:;(OAB\/SJ,-^4VVK[$8'/L9)%*;!GE$^D@=XZ-$`.G&83
MI^,46C5R?,?#\DAE.-NDV^7!]NDF\(M%!D,UI![3QA<`8[)"@2OC-4NN'J=8
MJ^F(TR%>O17CO+6B&P`DT0`Q`*4&5#K0Z5*7AB/$C5=EEF^OZ`8JHSTHB#-M
M3P.N?,Q+1#S(9;-=,;T>4UA7I0<?4[@74AT7W>31Z/UM^MV]_'%A9[CX49@7
M?F)>[E)P$=V&D^6W.;8LE&UH%6".(9$0"*FEIMI(*%@I*B*];<GM>&]_77VF
M;0%5W]G75>^2E:UK'R^;!(@X_^5#JBR$12&IM$"6_&)DO>$M=1V$>MHJ#,-7
MWV`6K(ZBM:$7GDAND?$\ZWL&6ZV)\?PU`#ZU`RD\:0[[GO4E^\'1QT1I^1VX
MXL-B8?)0N2*UH76`/8:E,KXUBA!%8;&FL[9Q)]\P,L@'J[@]"/I0ZVK70Y$9
M?%A,NL)1C5+C'50!0`9`-R'T?*LT9)11Q=8QIVE8)3BTTJ%]XZ/V@3NB<526
MD^RD<R\!EII3Q"C`2DDM%#"EG)`R,;PXJU7MU;.(@[!ZN[8QF"!NN";10J2W
M#$7D;19%U4<>;FP<2".DY-P8I)DO*>)R<8C&@DM*J!Y&/-<RXFG+L!QKRT"S
M?4:$8\T)YP!*Y'-CI1.QE,VYR[Y66H?I^-L![?7O(:&,,<_CUH.80(6L]1_E
MY4:"X3K_@S6X]V:29EB]?1L97!`P/--H(0BX2B_"AR_12+W_Q_N*0X]_:1DP
M(ACG0D,+A6+%,8#>VL]Q*P;VS8(6\4[;Q.6(Q:?515N["0/C*></J2\T!HI)
M8*E:2ZJ(/[##KCM916L5H?_$FE.D7)BL#3,`22HY`M+2]=O"8+.EMB.=2KBG
M#0T$TR,%$TZ$D9LTA;=.@'^DLSBY723,H_SQ6+#](HP:'08>\04"4#&KB"1,
M489XB8PPLMF(=:3S!AN.6+T@U\]JQ</BBQ-?TA63I611_D>6YKNFMU6D+JIS
M<WX/6V@HL)!`8RTII<7.M;^B@M&F=M(R1KV5;%UFJ9]FT_"ME6YYS".2*V4M
M$E1JR@Q:[62&G/F\TB3?7ND61K[D0OB<2<%<N*X-5"4BW#/#/R^IMDH/+=W:
M#ZF.2[>&D,>4AA,)I2":4<FP<N.8+@'1H&'!]]`*O&IKO68><S_07G^.2F'/
M24>$KZ"T2DLH'E]/@^DK/"^IM@;W3E8UP^KMV\BKR6,>SS2&7K9&L>];X4M&
M+%46^4A[IN3?_;^WHL.V\IRU];%G/=M^.!WIU<_+Z<'GZ'N4S'?%HS6H`\:8
M$0:B8NYC@`02^W@=P5DPL!,W.@E&VX?IV*;Q,9HY\TZGT<7N+$+M/@+"M.4^
MIYP`'SA\A2JW4$'!M6@VA!PGR=F%F1P"UK&RERO6;9@E<7*;7T;9(AFKPCP>
M[9FWW-550#264"LK,0)<$\*$1THT"-7-SF0X3L:R1=-I$[.!69"))_/9WKGO
MW9T%QBCK/#YA1L'B9"R@B"T1@1@V\U/'R6?V8$7-4.LVPUE8=O[IYC*+\B)5
M/WN2*GB1VBQY:/MQ.LSOBE,COH>3(B^\.[_:&1-I4BQ5+'<0NWLZB\;Q['.<
M?SMFOO<95P4S=;*]VXF*S]TP7QBEM>+&8(LE6!F>IXNMV,?)]?["<%5&=S-!
M@'QEN<#&$D5][J:9+@1<22>AY_>U#VAGWK8-Y?Q:*G`X&H/-S:Z/9OPC2F^S
M\/XN'H63NF?3OJ0)M%5(<<2@Q!B[/Z@I3V_VI(_\OLK#]LK/'JK?;2?0'@A.
M+^?Q+(WL*:>5N;6M-`$B5%',%4#6`$H$+)+7)6)N:C#<O&L+.GMI!2VC]/:L
M87`9UB$905/EEQNX1^G<C6@/A>Y1^4>A=O1$[:O+P=>K#?I]O!D8[>;S4GA*
M,V$5T;*LK[2>$IKU=MIPO3E("YBG!T+04VGH<Z>E'E24C.ZF859ULGP5:2`(
MU$BZN;C11#O?!XE4I;14-2RVZGB7:,M.O&6,CF,1)</51XQ7D`8>0<Q**1`0
MEFG,`2.BE)9+:X;KV=M39*6%M(+96[>4P7G]X1I("^NK1>I')N,7&:!G)P`6
M]RI.K]^GDP!022#3A"@,/*(@-V@-ER6VV4[#[LZR;TU):4^(]3%`R-$B]LD_
M1Z/(<>\<:>6A(MM(`@]PS2PF/D:86XP$IF74I8Q?G1+K^93[MNVA97R.%%I^
M<0_?/ZHLJ0(KB$\@9M:C3!7_$<S6H!'9[.2`CG<?=Q]0-H3G*"90\+I_</!(
M%11&#BDHMM=;0P'4DI!21NA>@5<50>ZON<J4\J%(O4VK>`W1XE&-H8T8<9[/
MTFF4?4JV>_G-#0/*D1;*^4(F%;)&%L5IY8H*,VSHL5X3G-,6`3G*._NX9ZQB
M`_%6L@!@S]/.!U+J0ZPEE1BNI?2A:1;2]:?V#E8$FZ/3Z)7]."]$_G13&N#6
ML_9_:1A(S\TT+"YVM',F,09JM1W0<:<4&WHXWEQWK>#1>ZF(B98'K5]FZ4T\
M.T[IQA]I.OX13R;'+-0H>:A3G_%+VX!1#S.C-9#&:FLUQ18`P(S@C"A9O6NH
MH^6V];Z@DN/Z.^V>402"%^\!(<PX0271SH;E2C[L9.YKA69G8<8!6MFZB^X0
M%(9?D%$6OJU6M/*Z11F;Z`))I`2^YV&*M(;,@&+`7($#A>HKTFZX<:ZAHK=5
M9K2`4(_K\777X,O/:B,FA2<`DI8*Z&DJ!"[E4$+;X<ZT6]+/YD7X@]!YO=H>
MW`QZ"$IN(02_2B?AXEML]]6G<&YJ&PB%M)MF`L2X)Z3C$/BPY-$R.+!#.!OB
MF[:+0C--1=/8^?+Q?.0`K*NQ'32!AP"&AOK2QUQ9*`!8QRT8\899C\ZF4&UH
MKCTT&FGP,IW$^5V<W%[-[^\G<52LI-549`W20&NNI"P2/80@`7CQP<0R#K5L
M:&<+M:#/]D'IPS^6,>#G=#+QT^Q'F.W::[.A=2"P-LJ'C&$/8>E#6IR,M)*)
MV9<?B#_VD-O>A.EP+/K4;]494,_:!4HY[T&,IM1WDB",-%W;*8*DMWW\^^FT
MD2:V:+4)#GWJ\WQZ'Q8GD<G1:#Z=+\[R7EXJ1IN*G;JU^PA\(BB%`$K?C5?%
M5T&(M*7\W/K-OJ3>F5/NP@[:QJA/&ZEA`@$7TB@$E`L6H03%[D%13@V([P+(
M8;GI+C2\)P1]*K`\;M#,,Q=77$99G-;QSIO(`D,\GS$@?0V$$Q,"XZV',@\W
M/)^XLSVO72CZ_]F[LN:V<67]CTYA7QZQWG)5)DDYN3F/*,5F8IV1)5])3HW/
MK[^@+,I++)&"2!#R3&IJXHH)$OUU`^@-W3W`DI/YFZX,LTVL0%W_YWZUWMCS
M'=C_]L#`$5>$4H&=1LY1Q#G?B3D5NK"NSD,(0"_`9`]67<2_YS^GWV=5RR7C
M(^V_9CGX>K95-%8NYMNI5Q^FO^(QM_NN6JVJ]>I0D.BT%X:H8DD&G?.8<!1_
MI@+4%7IU5,@)!>T-Z;OZ+':>[R.GJA_^F/QGL32SR6JU+YK4\Q>"(H0Z'$T0
M(2"TBF.\":'6F"`'8*YT@#>C3[G8O2@!VF)#6OW5?V2&"14/0*(4!@P!)3<W
M\3:`:"-RE0[M%,8:31@ZEH4\#LN1JJWT6/)/2D><]I9'[5DHB./Z)0V]S")=
M;F#L9`X>7?LO#:OW+R/%A=/*$XU>@FLGM+=!EE#,C<'6V3A3JK"BS?R\SW9$
M]%;VL3/>+>UMCL,EB6_[BDVF%/)\#`]Z)($U$`&I-=54H*<CCV.=5DXD9_V]
M/GC9(T(Y-FB_7[%^KM.T*(!'O"5X!!PV3A&.J116:<ED@P'4).W.Z4#WU4M1
M"H?#=V09>YK[Q\EMNTIPY)L"%9AAK!5&2C/`*)<&-U@`K'BY2N0@'.\N53VB
M^?>6L.)4T',4K/P"]7%15\J]J^(NW_0=7K7>JMX_*,`ZXP-S`37%&#EG@&O4
M.<PX+*R'WV#\6PP$6):[6=M;*!^FJPZR\,;3@5MIN*_-.V\]\E8(U>B36'J2
MME<,IA_G$H+3D<K!_<^3=93.ZCI::3?SQ6SQ\Z%5!/8-"9)*J;"LKT-Y(IRV
M&C1:(+9:%%9L.I<<]`17#F&XJ&L:7T7;\;):5?&#=?D06_VJ9HO#28Y'C0_8
M1>-`0\P@Q*XN9.=4<_IB9$!:YNI@D?5<8C($=CEDYNMR<EW5]+>?':\?#8!J
M;030F"D6\:+2[9Q!D;K$G-?!0NRY).%$F'(P_=/ZIEK^!D(;_P^,"EQAR!U6
M%$&((E(:4-_0Z)E*J]/)SET4^D,LAU1<ULV%6SQJNV>")!9P;R&O%5_`G*%\
MIPL1JM..@8'*\93B+TM%+QOW6_>`9T\%1(SBGDA*B.3"6&"4W=E"D!5\1S"!
M#V]Q\B0<SI.GQ?F-\K(R/PO_B'#>WM^V,O'%<_%P$=!$S1)Z0;CVA)`GE8,R
M4MB%AB0.+/JC/PL?)W]UX^/SYR(=4>.@R,)H,Q`IE"/6-'1@9G(%I7+R\03Z
M1\H<>:K;\^G'M\5Z.O^YB;16J_6JT32.2R?I\,(@"+,4<E0;D5P`&952T"05
M,D@+Z3V8.7,R*Z8YI<TL;K]/'T/WE]75XN=\^M^(VW4D:/IC.MDAUU`2,?X0
M_WDZBZ17J_B[^]OG,'?)F>SYBP%3H)6RAA..ZZQV2X!NL%4(IAF(O>]D(\OK
MN*"/'!%MN[+9-C18:K%@U/BX5*TCGL<_#;66E](L<201ZQF]D67EV?5$=;M8
MKJ?_?=$3[SCIV?.RH"V"$`!(L)?&."JB'M(@8CA+N^G=NZ.[/'GJ!\^1)>QC
MM4Z3IC@P0*"M8M'ZP(`+"1P%R#64:BG22E7W[A@O3W*.QVY<*?G?5?7C?O9A
M^N-0O;TNPT-<"I8B4*?0<JDC_9(TAL[&@"W#?UZ<Q"0C.,*UQE_QQ\5RVG:M
M<:@"G'6]EJMIE?VSR\5=M5P_?)Y-YNOG)6+&+`2Z=U(?#ESZ[#XX<`N4L3AJ
MV-)(RS7TX+&(MZ5*.M*ZFH>A^BD`LI>$[K5##[\B$`&U(I1)2JGV4GH(Y!8!
M897+U<+S8#'1/AFYM[IHKS@5>S=S+Y6=NGYT&!VX@%@I283F##LNL%!L"Y1T
M'L%,`I58>K0O*7B=F]0[<%ERUO:"T:431(?1@=+ZA@SU!B/FZS)&FC;+5B*O
M<;F1R5XYVE5:3D;N[R$UQ<4^2Q>6,?SET]GU=/XS3KCY\>+V;KGXU3%5OM/X
MP(2&%B&%0-RT'4=.,-'0[1U!N02E6U2N5T[^YKCN'Z\<<O)A\C3ANG#E44+2
M/CAHXJ3$0!BL@(S$*Z=<0S$5-,T!-%C<=D@)Z1VL/,'ZJYMH`RP?.M6([3`J
MP+J1C^,:<08Y(!P"2W8T%A.;R"$0_:&4Q?=WOXRPWR]K/Y>?_E7_U+Y![!\4
MF*:`:>>85I9+1;`VJ*&02YV6,CU8\OR0<M`;2%G.BVJRJFX6LR,/BOVC`N4:
M`PB`]=9[XYEWVX;`D4:6NB$,ECL_Z`G1&TKE)4D3)8A6C@'/M<;2(L;E3I*=
M3LO#&ZBH0#:O12H\96;,,F.\A(;8J+P8+#@SU#8T2(\+[DF:P(<#J;-I.)PG
M3XOS!.1EY;ED00O/H"72>>&(1%IYAVGCO=<<I5EA6;*@.W/@8!;T<?27FP4M
MN3$TZA32*XZYL-1SU=`!!4_S_6?)@D[FXPGTC^J,[901T6%TX,)%Q4_K.@L7
MN*CV6=XX!11"M+`";`.&$OL':U0!:<OR/#PP,*2!9Q0[(N*.!A6%8K<4B*)I
M]G-^Q]J`8I&"4PZ)>)85:*N[974UW?:FO9M5&W[,7V0+[J7O@.ST]8D0[4T$
M%;326R&EBD>GVZTG15RNNZWC2]E(B(ZZ0QW._#PT+$2-VU!1=WUW&L05"..!
MW5#)>&(+W?S>O0%WI^-1RIZI]W8!#_?77;3%JG%R]^*4ULOI55R%9K*Z&6<.
M7VZF=W?3^<]1@?BR7ES]&?\]`E$7Z)JOMMO1>*F$7VXFR^JW&:GELK8"'F/Q
M3X]\GCS4_Z3J]AX?.J0:GO[R`%VT,S3U`A&@8=QSK=V6<-8HJH:MMM/0J8BM
M)*[VT=@]5_'$;P0LHN&L`8@H:H`Q\9YN4XLUM-2EM07K.9DQIZCL37;,"W2Q
MV9"/%+7G/;YX+F`FG!8T$LV105A$$PXVQ`.2F#.0+<,Q&^M?:Z@G8)A#S4S'
MY8FR^76M1W6J$SO$YX(1PEIL)8K:(`$0:^-Q@RKCG)8;XDB4CM<;7#F@_B.R
M_:!;7`3GC"5UA(C>SA[:&`3ML;VWG@]<"TVEA76E$JGK_#.SHXOPQ!:1@[F8
MQV7MZVAA#X#F$!1W>S=;/%359I:?[FK$6H5E[YC`*.:$ZK@FA4#0:2F);^CC
M%J<)S&#.YZ($IB]0RTOQ`0P*HSGC%EH@@#2(-E83U%#EZBYS9FI[*GYEYHM`
M0[!#4!EA)8T`*&QM0P-FBI2K("?PX4#B2!H.Y\G3XC3(O*P\E]P1S:R(_TD,
M.<?40XX@:YQ:()Y@92EY21PXF#MR'/WEYG)9K"4@\83!EEK.K%58-71XC=-\
ML%ER@)+Y>`+]60+ZLPW*T01X4X?8QHD.N3\[O2#$W4LI:1DSB%/"++"TL841
MA["P6J8C^N$'P3.KE58M?TVOJK>G_W7REZ[FD9=K'T$_3M+Z^4``2B/%N>#6
M"`#B*@9<-,A9SPMKE#.B)(Z"=SE[WL=J_>E')._DO:]Y47`6>V,\](@P8U4$
M8&=F(6=+NSY8_!Z8B&LVY_OW=NR^O\8NDC9=3K:E;J>+0R6'>_M&Q(\AH3T@
MT"L"K`-"ZYU6PG5A"4]CQLA'@KR(>-%!/^.W:E578WZD#K9);4^?"<9"8*%#
MC*DZ%TTAHUR#8E35"[M^.;;@CH-ZT;+[Z,->?;I?K]:3>5W=X'(QF_G%LO[E
M$%)\\(-!(AO!%-@8C`'36G"\,_,Y<FGR/%C_I7.4YS[Q/S/)_GC?XJKI_5M!
M0$4%)$P!`"A!F"DO=VXK5EICVK&%:C@93V+'.8CW_\0'UZN+K5;5=BMI@*\%
M(`TAPD'E%*72:LA0@VG=W+HPC^8[$_'3&7)8R.M*R1O1!0R#C>`^]J!K,P.^
M[S$#MM/>]7CXHUK^?'-+'N(S`1C+C-?40@V0T8I;T;@,,1$L+8A2GONA7U$M
M@!-9-N(ZH^,B3K.ZMO?+G;*_H6KU+-UCY?ZJEE?3U<%F2,>_+&CO#6"".83K
M"G.>&-!DI&!(55J+K/)<$`-MHT/C?0ZJ0`3Q1[4I1;4[$`94!=[X6L`F:E;:
M$X6I$9YX#BEM,.4`I`46RO-&E*D*G,Z0<Q#R[0*ND[8&-^=^^U8@H$X%A:J^
MDAXM"&2E]KMCR_.T[E^\.`$?WSUQ*O3G(,HO=?=_5].?-W6KH5_5<O*SVOS2
M3M:5GTR7WR:S^X-7!//.)"CB+1>>D[IQM,><VEV"-":0I>WSXI]ED)DQY[!(
MGAVRK\AO5+G/R^E551_`/W(ZK3M.)FCC"231S#$(&`ZMB,9-PQ'G35JNO?QG
MJ>3GS3M:+>,OD0!LM/D-T=X@(RAD:-/G^A%[JU`A?7_/03C'64=',K"(Q;/W
M#DB7T[:W!=3?+`(TB&ANJ'-(88VE!KL[1T0*D=;IXQQ<[Z,OHM&8.(R[?M7-
M?7ODDLCV[>"<!=S(^(<;Y2B0##0)&<301(/D'!S[0RV$4EEW%N=(0^#H1\E1
M$PDR2H6'U$(C@%028J1XPPE@0%H@]QPB$,6?)D/R\2Q6U!N^[;'6U)%3"2Q:
MPL:(>,@+3KS%\>\F'$"@>#<9FF>XJH;E9!'KJKN7?21W0<<9!,@EU`(;SXW7
M`+.H+Y/=GD9,XN4Y4-PR&M^/-@Q'BEX-.__Y1E_=JJ[SZS^J]<WB>C%;_'Q0
MWU?KY>3J4$'=#%^OR_!;0S`7'%G)9/P_:*[Y$.5M8C?J\KQF(ZZ"P;AQ=BO@
M<KKZTR^KZF*^KN(1N;Z<K`<Y";I^.W`@%/':04.<M$Q;@7<[CN0^6R6+@85_
M"`D<<G7TP*NB+R2^17-]_[*N&O:U6MZVWO4:Y*,!U>YWP315TGLO%'.FN3]'
M*#:YZC6]E]50`I/.[HAHB+737]/K:GZ=\XAXZ]M!*>")TI1BRQ2D$EJ.=MN.
M2G1AE><'/K<CH@=>G>W:^+:8Q=?,INN',5;'RZ\'R8@%V-MHL@DJ"(":BB>C
M3:0YH\IS\9[K^CB)6T6OD+IQROKA8AY1O]_XYCZM;ZKEUYO)?.MV^+B8_XK*
M8W4]\/7CI(D$[C7&3`O')&$F:K98-;6O*$6)3EQ8GK8UHN&=@S'O9(D,E_A^
M[!P"$\(HSPS"5#L;=U&LFX13:BDYM]K3(PEG_C64Q+[S7C[?-H0/>3/JR"G4
MC<>=I=XBY*5D6A&!FD`MK9O.OQ,3_KTLGI.X=]YK9\>AUBL(Q:AOQ\PT"*PX
M181H216*=JD4NQP\"AU*+--1GN/@+/2[`3GW=UF%A2^]0*.Y#2&.6[LA&E"/
ML!([O4/`]Y+]/[;,%[AVCV3]>2_8EQI#F:OVR#D&9P71'!`IE;618_:ISPD%
M5IU;\YB__=(=EO_/UF^>KL>;=BZYV_G^>U(S8OV0UL!WWZ6-77.;S\O%]?W5
MNOG*AP,==SN.#%QQ"#6$`%`FF;38*;3I7>V`K`V;ME5\-`W;*4RKU;Y^MX<'
MA*BE&D(9$M(B*PV`2*OMC(6U)E<#C#>;U_:.^F(`2":EMIF]/*I/E372L+C]
M.`&0\T9IY$E#-%$TS6DR4'O9OOBWM^G4<6#D4*8NCVY05#L<A6"6(00T]I@;
M[QH:F/?N')I.=>;#@4Y%:3B<)T_S\[)STZD<K,S/PK1F1=`!*K#7)L(`$`#*
M$=;0`0U.S#<>2M=/XL#!9D7'T9^%CTG-PQSCFEAM@``$6&.HW202;.APUJ6U
M9,_2="J9CR?0GW;%NK[U%.VM5[K?WF!3^Z!@C,/80$_KSI2*`TR,;[1%D=HL
MI??5-ZSNVR-`69;GXM=&>;Z8[YFYNKI:WD]FW:(D"6\+%%(*N8Q6.8N[%99&
MNV;!2"]U(>Z9H80F'W(YI.GM.9O99+6:_IA6U^9^N=P8:'LEJ.,;`G;::HBL
M45Y(*K1RKCGH)(N'8!E;31;N+G(@F*>@\2%LMC["@\7B.[T@&&7C^4RHMM9;
M6SL"$=SMPEBEQ4X'4RYRRLX@`!8@.LNJBI92W1#G8GZUK":KRE:/?Z=+T_YW
M!JBEA(IS0JDPC&ELO&WP,82G"=A@L?F"!*PW3`?VXM^OXH&_6GUY]#=>S'\L
MEK<;O_J@;OR]7TWSXO>T\AYG<UG=+9:/C-M-ZY#;_YCA@7@)'52:>$!]G4J.
ME0&`6RF04!Z:8WW_/5&^TP8/$*$?MK_<%T0XX6V!6Z(X@QX9AXA!"B-#MK@P
MZGBN^Z5O1AB&8?#K[61PT(J-09C%_"I^Y[%#87VC53]\C3-NB4H<&!4XYDY(
M"93U&C++*="J`49IC3))4Z<X118!6`R%70Z-Z+?9UG.U+YS*7>3C:50`AL&H
MZ3&C$8V$2NP!>\*-\'+#'KUPKDT:3D;J?4I%<8&3TH1A-"_-;Y-N]=$?'AB@
M%UY&DY`ZZBWQ"`$D&TJCWI[6$&@PGTPO/'O;]](/0*/L!_I!5_.KF]O)\L_C
M58D70P,0UCDNXA)""C"!H*1T1ZUWK5I[3VZ6<](G3@%P''%I)GS\&?)J:(!(
M:XY]M.ZM<4Q'8@5JJ/62P+-2+Q(9V2HAO6#VWB7E'%2.0@1D!$_M9%:M+JM?
MU?R^VAZ7M1^@5?<X."X(H[&33',M4-3?&+/0-71:R-/*J.13/9+9]MH?TB-(
M.82A<6FJJ_^[GZX>\3^L=>P9$8!R"`L!)-5:0TJ<EGY+&[?"IR59'N]R+U;9
MZ`>WL62B_G%9M1NJK6.#H51P`VE=-H5[#A2S.WH=UK)<+>-D#G:0B#ZP>O\R
M4IQ^49YH])&?MO@P>?A:7>E_??O77NU@SY.!>.`I@X"J>EK8>.F:@`(G$A>F
M#_2(]Z)/7#)%[M>/]\%>AC=7+8K`P7&!$2`!TE%Y0D(8CR1$C4(=872Y.D,4
MJP[TB5X6*7F<7NOF_N*Y``A15'N*"':6`<REQ0T=3!)0[F'?$W]><[T'=,Z7
MV\4=VR4PN9>#>C99UK=V[^KOMAW5OS\;'(,2`B.I,TACR8EGHIFCXC2M*=QP
MM172\%WTBT(:IZK;Z=5B7KL%%ITY=F!,8%AP8(VVW+I--A@Q.^JYQFG!O^&N
MUO?`N?[02.+@Y\5LNKJ)*L&7^[N[V;2JBX1V9&2'H8%Y9RS5R#!&M67.2-_(
MH/!*IC4M&:ZHT.G\[!^4/'>JUM5R.IE=5E$6KZ:S6D6L\Z@Z7+(Z-#``B82E
M3&L@I0&4.P%U0REG.,VQ/ERQW9/8/P@D.9C_6`CQTX]/T;28U-9!HS4<X/O>
M,8$Y!^+)$T\8QGDT!27Q=I=Y9UAB';'_9^]:F]NVN?0_ZN)^^8AK-[-IG$F<
M=MY/&,:B8[V51:\N;;V_?@%)E*\B98J$Z.S.9-K$!DC@.8?`N9^!23Y,,&%?
M()W)`/8Y:IJIO,>/J$#^7FW1V?:W6.Z,"4V96]T>&!23$D0L/$"""$TAT;5=
M(OX+C*T@Y)#LDP7!W!ZZ3V5C!ZFG(T-<M=<"6$DEBX<F]ACL;TJ#.Q8E'%I\
M&"@R^21H<I!Y?\Q]F%]5M^7':MET@[PR.B!-!,*4`8@P-$`[Y>MH.8DEZ18P
M/+2X,`RY3X?G+$$9#P=44T^@IFG!*Z8XU%9`Q!"R)-Z3]?DE-51CZQ8Z)!/T
MB%,.;E#+9=DH-6X'!"D%EX1Y#[AA2EFF&*Q7#JGKIA2R=TGA3HB<*Q=M^,)R
MIKJ]G:ZV)LOY)+)_`KR,6M397GO63+B]_V9;PG#;O.7#INCB9K%[_FL2J8Y^
M2*`*&\"=-%!'U51KR_2NG#>5Q,I6']>94#@^$:[I`0$:"PF+:KZ',NKG0`BW
M*P=-!4(\5[92<^[;`,0\F`'7(UJC37I+<M63[UW??RI2/^R+ZX<?W[=XCH]_
M2`!,.D>4$X!KCYDB"NL:-F5IKDC3CF[D?CBBRH1>#I'GZ>)W"V]U,S;,"L1Q
MB:0'49P@T,8/V+/ZNQ58*C1>%_,0A&SDE3Z`^SF99'2>Z9'SQGEXPD>83+$J
MEJM%=7=3MGM;#D\*\=Q%EE+.!5)$"Q__^'J'UF:37H[4J7JAU2OT[P6<]Q6G
M;@2WW(OX:4#/'8,0$ESO30+>K6Y5MJ2X022*?J!Z_V''@`-!A8NG*/>8$`.)
M9+4*X#$8<;3:R11\<_QQ-ZQ^?AX9G20Q/M;H(0I'7W[;./+F&SM;,?LPOXH_
M^JU<_"@7S4$X[3,#(02@*%%Y8U(\`V3I3MVMGS(V,M&@1WI40^*4X]/_4B[+
M^)X;-9_8\J]R5FVBB!ZU/$DR5.KA?%E]+A?)3NNKQ::[R?*HXCV]/#\0)J$E
M!!,O'4?>.PI)C9M%'961;)ER@T@@YP!VY`QY5%V87IX?'"!4I)JC6./4*%Q2
M0&O<C-)TO')/9K[ICVM/1O__N?=8_$8GD?U?8-H>9+S+\O9ND?RJ6^]C,9^X
M>10_[NL-F.3I+]6/*.BTQUYW>EA(#<LPT0C#)#-1KM$#QA+(D?6<S$S9*C.\
M62+O6L2<ES\MRT_%;9O<>,IC@V;(0<HQ$=!+!K3F0M0H<=JQT'JV3,I!Q,6,
M>.;@ND/+;;U`FR<&;*6)>U1(^@@TU0S8O>)'F#?CE>OR$+C*@.;/S#^CDZS>
M(]OT("G]UW3^8[FJYN5_5K-)_'OJ]UK,[YLEHL9)02DE"=;$80^L`(9:_F#;
M07AD62E]D:`:")_3J/HDY7&WC(^KR9'D;9P=/"<&6A[Q(`QBAQ0W]0TL(0(C
MZ?V3A<Y]`I7CU/^\CH)UL2POOL^F/Y[T/GBM<.R+P0%(!0@CW`DC%+($$JOW
M+"QYMB([1T85#Q_)=S)&6:B^:P%S6>VL_)\7513,5_>?9T54]AXESS9QP]$/
M"7$9W'&FH!?8<@:!P'"'0/S..F:D#I=?EH%+AL*NTR5Q\7?4LY<WT[LOJ0G[
M,NK;40)=5JD]VK_+J]5R9P@H)U_+NV)1K,K9O;[_,)],_YI.-@V%%JM'L>+/
M+Y%^GAX<!X`G3+E"1%A.X\59XQ"_K5P.C_/ST/E`[<1<M?6F>&I0JJTXE^7B
M]A#G'#$U0*89DQ$^BK&0V!FT/UQ5^E8R&39&PA;](]8CS;^4VV39C05Q^GV]
MR1LIOE>+..Q@%M-)SPLP=3AG#+LH>2FMO=&\%N:4HKH;=PR7UG86[N@=QAY9
M9MMPM5[A]:-B+5_BN39=)"/Q;Q':53DOYE>OY:/T]_"@%=#,*DP1,\0B[BC?
MW\30D6[,-%P&W5F8:5A,\_@K-]G>*:CUU]35KCF4X]G88`QDV'J7XET-I%Y;
M4ZOT4=FSW2H6\G?((WU!U.DPV;QI]^:'-,-5M9..#AT3+=,"9CJ5HZ%,8*2P
MIDSM[36*NH[E2,4[).X`:)W'Q)U6O!>E'_*\WV3M/O",0"R.G$UYE+4@Y%(B
M+_='&T:V6TJ]?(?<,C1TG8Z(A[=5SXJZ5-=UZ&-:VN3K^OMR.ID6B_M#QT:'
M1P5%G,'06@8L,D@+",#^X\`8=,O&A^`=<D<F",^0<K9KAZM6IE@L[N,/?R]F
MZZ:SY:CY`0NBHA`ND$<8<,F]]'N=G2O1L3_7>[:Y#H%;%GXI5Y')EQ?7)LK*
MT]7%>K5,C97CBM5MM6XTOK9-#8A%P9JK>'02RR4DG,,Z`D<9UC'@`[YGFVO/
MD!6#U@.)[#PIY\N-5KZL9M-)L2HGNI@EI>GK3?G(5C),:8ZVMW\N%I$J-^5J
M>E7,#BPE4\7YC\?4XW@Q.##`!08R:AS2`X*-`,!L.I%;SE*MWK8/9.!=M=;7
M>#(P:"\L0,(@%?4I`(E74.]V0Q%JKR*2I8[&"40X5/B^R^Z+L=;%V._J:Q2&
MBL6T.K9YPN/QP6F`@"(8$,FX)@:"J&WO,/4Z6U+RVT+].M+S$%N<`$B>"-'M
M\K[-EW?EU?1Z6D[:J^0?FA,X50YZS'Q*XN><.8=\O3\3M>X11^B=1J\7`9W]
M(O3S<<+X8NU&P@#Y";_UK)CU(LE1ZOMR$U/?0/17QP<K"<,(:D2YT2GN&0I9
M[\NQL35,[%$`Z`..+&2>S:J_D]CLJX6MUM]7U^M9U$^3OK'\4EZ5T[_2A;?;
M1Q/YW_*<H%ARYF./$%8T<KRD4M4X6,*SY9<?QQ8GTO(Y9PR(5)8;855=_7E3
MS2+FRZTN_&%^-5LG/?5SJH49:;+:^FG3/BZK3]4\R:L1\-DCL]D1)TJ_+PH"
MD$@GQE#\BJ&33G&RIY?!K)M9:CA[0Y^ZR!EQS,&1R;E3S3?;C&K_Q6*#W61C
M5/M<+K[>%(LF1?6(V4%X31'06D&KI;+6>XOJ/6.C1G>-G8?@+^H4]PUL9F;:
M+'&IUJN;:C']G\:^!@VS`J`P0@@)ISP>XL!Q[T"]1TW0V()+1\<\)P)Z%J;Y
ML%RNW\8PVQE!,$"L0B3NBEDE#;1@KUH`AG(UF'[GS-()S+,PRB,K_UNXY=&T
MH%(`-N`<J[A5FI)`*-GMD@MFNBG5PT68CI1ENB.:)2$B/JN,&L'DK1=3\\3`
M,,=26@@@T-:JB*1S]4X-ZW@W#1=_.@[>Z173<W%/ZPUU>%+PU%.A,;%0*&VY
M]MZS>H<R[G=D@:;CY9I.>)[!L;O71I-WNEC>^%GU]_+;O(@@KAZ8*)NG]\ER
MJE24XR;9<_\J']KBC&-QNWX]\;=9UF.KJ_4FGR)5)EEM&'W?IF/(][IB,4\)
MIL^U[1SO.F<K#A5!GDQGZU5DO:_EU7HQ34E+[I]TNI233=GAR)WQ7$E[O;A^
MOO1C`@/Z>D7@A%DBK**>$Q<E8B+X+O%?,BPI:3NSAW(OU6$U)V[T^'8??;PH
M.":51\3%\Y\0*ZG#FSL^H4FE<;G*<36&,^1GG8,%;,Z`^6B#*$[$0M^__H"6
M4(P!WQJT`8!J2Q`60BD3E27M:\(@E\VKV[%V4U[>?.X,&@U9LC@;7UWL445\
MVJ8&EYJK>:`D<XQ0Q.,Q!?>'%!`C#C(9!0\<Q9<GP_VS,]GHXE=^2M[*SU/N
M]FY6W9?E1G6_N$M@M;9E.3@G,(B!PEAIQKTW2A#N2+T_S;*U^SHV^J$W<CU/
MM^H)H#Q)M\O58GJUVEEO6HG_ZO@`#.<N[L5A;;!T5%-7?S&,="WB.Y@G<##"
M]P'.^6Z2HP_/UAR97IX?#"),>4$!E\H(Y*RUM,:-,9"M?N$I3)51*3T'Z,-:
M;%_52`9-O]F:62^+?[*]YIQ6OOTR'J7P'6.Z:YP7C#-4&.TC"SGO+$*&U!JC
M3QW=SV./>VW-;::U@W,"`)HQ(Y+S76M@A-16[?;HD/0=,T'[M9+U1*5J&$Q&
M:\7ZDLJMMS62J<<$$>4!#2S#PG%JHVB'6"TI.(?1*"U$/9#PN=S3$8\L`FY:
M6[M8^S`J``DA<%`8CE64TBG$J-Z#1]R,N"5M!SJ\1LF3<'B?-!V=?2,O*?.3
M\+<(Y^WZMI6(3\8%;CF`4@F/),("$>RUKO<!$,YU[Q[;T:,+!:K^]I^%CL4_
MQ]'Q\;@@$6-1W&"2`(EQ5(>YJB\:#X'MIMH-9B_HA8XG[#\''5/T^D8SW&?Q
MV%U43Q04-GE"YB;!\&'>JOV_]5&!>VTDD3[^3PG,'%<`>$HQ$Y1AI4>6-#6,
M7#TP:#E8Z-M\45Y5/^8I5C`N6I?S2)?5\O*F6/U1K6>3#[=WQ=7*75^75\E&
M$8=\*59-^E>W!P;D+92`:@XM\-`0B+VM21`_LV[-#P8[7(9AIRS0G9&I]JA]
M+N?%;..YF4_V$8VI#%%C".@)3PU1Z*+Q"F8$",D@IQ)OLM6V&`G5K>?"8(D,
M6=EK`/PZE9C;K\/]4]Q.MSUP/ZT34-7UO\IBL?PU+GA1S&;W%W?EW%>+IT,/
M5D,^];F!*$<@U$)[;;TB2GJR_[XLT*VQ:GDS&OKEG7,@.*Q]^F,U_Y$*>]OR
M^S,EN%]S\>/WG-->G-[_8;Y<+=;'5G\Z,"-`SQD7&+/X7X0IE];L\E"`1H"W
MRO\Y]M=F'7YE='#8:6^1BQM#%D-JG-C%NP.%3$?1HV>[\,DTJ?K&8;2VX->:
MLS=;A@_,B`J?2]EZ1!/%$1,<.P1J0#S#H[03GT38:@A<<@B<KZUT5P>U-<RJ
M=6YPG#L`A13"0NR8-D:*>K_:,C!>V_+)%#R"(_K`ZN?GD='9JL?'&CWH$/KR
MVT9SV0J>Q2Q*KO%'OY6+'^6BN7=?^\Q-_T$.5$(#6&<M%$C5ZP>V:Q'JH?2`
M'NE1#8E3)SI_K3X6]Y?EE?[E]U^:Z?IR9/`DV=WB%2@!C<L!AEE9KR\*42.S
M8P]$QY-QR>8R/-JM3SB24`I(/-`:&ZF1J&7AJ'&Z;LT5WT[7LXEK79$8I_-7
M:><M)(@!Q8@$0%&[YVJ#A1ROT-6!#@U>X&XXO$^:CDY(RDO*]^+0]]);@Q$`
MA'F`-37>U0>4QEQVJPJ4Q:%_-`4:'?IOV_^('?K$&T6U8II9#;F6DMAZ'T[`
MD0E"O=#QA/WGU%%-=?M]9SW_LO?9?)A$$6%Z/4U"PK8(Z$X0G*CYY&/\\72V
M38=:+J,T,4F%0[9E.Q_][C7K=X.^FV4=(1ZLR&-LF8R?CT:*"<MK.@`JL\5Y
M'<>'?9MBQXQU#IX_DB6?[()P:$G\TJ'#@D-@T+Z46L0:R9%%"_3-,2=`D8.@
M3[=;>Y)3J,*VYN91C>..?TB`4>OER#N8K@,;N=N9!Y;6JEM\X6"^_6$].3T"
M-:P;]K?BW]7"K)>KZK9<I(@#7RW*Z8_YUV+@;*'&%Y_34;NMD?3'=%+NND0^
M6>DQCMLCGQ"@<LARQ9T"0&`.I)>[8`X.A:2MI^<P^W^H@?%UZRG\4MZE@FBI
MZ-F^;I2^W_WR^`H[1S\M0**TY$0383Q"-MZ'9A>HR[RGL%O'XIX=P;W3^&"5
MG*%P&ZWCV$3A*;YG6R+MRW3YI[[7Y?SJYK98_-EBA&R;&H07\8C5%%BJ-,1`
M6H0]99`(%&$RW;J;9BM*,P`KO"B`VBN`.<2<ETNN%]SJ3FR;&J@45EL*`!<J
M"GA1O_5PNUO,B8=ZO,;/_@C9RB&]8/:S<\KH3*KC99#\C+&1.7?W^*=RU6J^
M>W5\4`@8Y;U`1*L$D><^I:E`K8461(_,'-L?F9Y++CV`<Y[3X/XROOSM$D8]
M*V"82M(8`XVDF'O!8;*&,HBL(I3Q7+UDWI-PT1&[L_!'6NO;+XJ'64'$#\HY
M@`543#NJI4F):YL]*DCPB'.C>Z%<&S><C-3/R17O07(X*S.<@0EV:OZ+5;=*
M#BTS`\"$>R4=8X8RQ&G$TZ>],A%WC70VSWQ'&:(+U9YS0J\(Y7'Z/K%D-LL/
M+P<')QVW$25"A<(4<@L$K*]3`'&WPG]OMYN/5FPX&;(<3)`*X%U</UEJZZUP
M<$[0#%%O"/)``\'B7E,HVFY_!!$Z7DGA%&)5P\+S\['!Z$2#45#_+50_$-=<
MOW&;77DQ/QQ>US0\>,Z=QY)K))TEADOI\,[X#V#4IL=UF_>`>-4[*#V0[_+O
MZBWDVP\/TK`466:I10QPI1"EKEZI=AUS20:+;AB4?%U!R6*]JUOK_%I6/Q;%
MW<WTJIBUB&$'YP28!$JF+"><4$JP-Y#6^U.4=0O&>WN6^6BEL;Z0R\(9VPT_
M7FGK;7QP3O"&X<CZ"BHJF4DE/0#?'UP6^/$*93W0[#D7](S2S\<-HY/-QL0$
M78F_+*]^^5']]1]7J8K3XC[1'M?_2&3'C\B^^W'X]O45^C[\,K#47\\#9Q#3
MVF!.65V4C,=%ZY'5W>\!\^I$"#J)9!>KFRA+Q$OI1D6A(BZ[620[,#PP8+`S
MT!)-'2(,\_CWO?0!:+=2`,-US>Z-6#V"DD4-/H;0AP<'[(G%1)LH80I'N#?4
ML'I'SN)NWO3A^EWW1N;>(!GV2#6?&HY4\REH:SWDCG$,4Q%\@#A4^[4BWBW*
M:KC>T[T?J6^&8%AR7?[10*[+/X(1W)JD$DH,#:",,;F__S%&W<@U7+OGWLGU
M9@BZY<J_7/>OBVI]M^E6FQ8R+9>;$_[#;538XJ=?S#XFJ%/EKLW`5C-4?V^(
M[`M-W'[D7J*EQ8A'.;#&PT.C.K'$<+V<^[UGSX9CCJM9+:?M5_+#H&"15"()
M$JFPI;9<$%^;ZZ#@M%LP-A\_)YP,Q;!GNG4-9[IU@3)%K%)22@>-$\!+6=\_
M,&+038(2XR=;9PC.<Z:WVJ;[>T,@@"+B#*:&<*$E9IS+&@\G.IJSY?A9XKPX
MYCC3W7I1W;67@'@\+!BH.=-1963$"N:$1W!_F$5DNU7BA6#\[-`#&IW.BN:,
MH:V;Y=`I<,S<`*/\"C%)>?=*(&0\Y_M4(\5Q1XH.1="A$JB&PNLLP84/2:.P
MX;MNFA:09/$/A`@KCBPC$$E?[Q+[CDG]@UG,ADZKZQ&J3H?`;E?+QMSK`R/C
M22<]%E'49!Y"8P1&3-?KHZZ].5Q>J]B@'_C)Z)PQJWKX3HP;0697,OY1`8HS
MO+(YD7O(-P^/\J9-[4TUBY_1TOWW.C)[WK>=,TG>S(IE%)TWB_IX1$K\J^.#
M!#;JT-HY1*CVS!I"=E*7T!C:5MO"0'[BAVB*M%Q]OUG\&Q+=G\\*R!*)*42*
M4FM<E#B<VN_3,9ZK8FEC0ON)%#J<OGXB&J--4]_[TQ\C=VS8T?,Y`5A./!7Q
MPG-<.4$QT7M0-$#_6]Z5];9Q`^&?5-X'T!>>*)JT,J(`!?I"*/+:%B!KW97D
MQOWU)67)CF5+*^]!;=V'&$E,4IQO9I<?1W/DJGG0-.RHN9(/A1>U1"@+7?]A
MB_4I0*\&!VN@(R+"HSQ'"$61/'R22,L!9Y=WH*5]8MX5/!]!\<.-'3JGOL\1
M,9;<@NJBVG:3V^RV/CO\\*R`F<(4`0GC344KHQ!_EA%@,K!@HS9*>A4KUA4H
M>1PQM[?E8K/'BTDUJAY+>*4V@T6\<8YO)M4Q*GC"[,"<T1CXU`434"KB]1<]
MGX_<#JQM8[?DL'M\,K[T_YA4U62Q&E5?9M<WJVURP]6XF*ZKS;W31)9=7.J'
M[;CE=N`)EZ.F*P>/O?;:$.F,L=+$ATG;'5:$L(%58>S8EK)B=S8[<]\C+9\M
MBXMJ-BV>?ODDQE'O<)/U@I!<:<&4=E1R22,8DNUPH<`U2SWKS=>8P:8Z1JQ9
M7M/;&[N;/?JSX\MS5K[5N?/TR4$:1['P3$FL7#R,$>/(4^Z93A$KMIFKHK?0
MO6[TWAL\S93\?#INRYUOG=RCOQ=%M;R9W?FRVEGCZ.K@Z=)\L6`H-UQ;B35B
M4ACD=>HR*J0TT'C,FT5_]180V*419("KWV\>QNMOR^*O==RRNX\_SNDCWMO*
M*6[B0U."B9=+KU7D@X!`RDG\N?UR!PD"?.UQE$7"6A?Q&\.#,T`ZY2P6@DH@
M$`:&[B2+'YOK6_NCON'V:MF_#;9'8K!^X9>%H&L<PJ\'!ZX,@(Q:20S0T@/F
M4QMQ@[D32B"8JP3,^SS!K?1YM))V`TQRL/27FTRYU[6.P$-3`L.0$1JIA$%"
M"T`-06(K77RV\(`32]NHZJC66Z/ST6Q@<"[A(:B^`[8]+N>3ZFM9SC^7DX6Z
MKHK-:5'7R_#PG"!$O!L0:N(;SVD+%0=2ICU[)(`4V8J7-^J"T`3ZLA]@\GAY
MUZE-P]VD6CTDT6M+?[X>'@`7$DB#N.-1#$2C8/&0T\ABQ@E"S9[;OFM^=GE:
M=X!*#EU_*>[6U?1FLBR>[')_Y[4O[Y/7"-P921$VFGG"N8+`V)W\D@NLAGNB
MMU/G?M.]G@'[_QG.X&C`0.VE`V;P:;:X7J[*1?%+N;C^%/\<)P4'A@?*@"8Z
M%4+5C'#G$;0X[A0;!W%J\SLL/M"#!LK.06I&]-;_W)3K/V_6Y:^;NDCWQ7*U
M$:](TM40OA/F!NTIBC@@"YR.\AM'$K_1A$LGJ;?-'MW^NCCVJ^@>$,OSLD]4
M>+I:5W'7%_-(8FN:7K\U?N,/3FG_@##I4I(82DW8E3=88$H$:60)?1=T[9(3
M=@'+6=1]PDG^YHR0<LZX]8Y#A"B%1&'*'V63EAH*ADOX6NJJ3O.M\/E8-C`X
M[C8,U7=PMK_XZ-'5\W'S_+<373OO7RE`S@"%!BAI(./4*,=(/,6@9LP*)@<6
MR=5:2V5.M+($>3Y%L3^FU?Q6K&[*RV<)7O]O49S@+6JS;-`.0VDATP1Y8;$F
MQ)C=P2LH;);IUW<1TBX91$;TLB3H']AN[5ES?&*@"`$`,<8(.J.C="9%8S]*
M&L7FPZ4=>12\G_+?!YH?V7X&1UG^BV8S'%\4,DA2*(`2\>8.#;2`B'3A=E)`
MQ.W`NLMT!?LI#JCW(=-.A^/B=C8M%Y>1.)65*6_O)HN'SZO+$U5Z='80#AI-
M,***0(EEY%DZGK?*(I2JF)"!A8+WJN$N@<K"0_?XTT-M+\(#,X*5ACE'28I%
M5@PIJZS=X8:-:O:8OS]\\XSLL1-@SJ3T^IKDA^8$'2_L6B*OJ%;,<J2)Y$\/
MC(=XP'2PK<;J+:`51A_/%H9'[09C`F=7?7V*Z5OC@\8T,EK@K$_U#BF(9QKV
M5'K,H&)&9TLK/K&B6WO]'-=X(U3.<YN[_3'%X&AMJ'>O$3`&GC'CO77.:06=
M9+OG1Q+1,$(IEU5\;AUJWA=0YS.4<3F_-).J>HA,5]VF+VW?;2>OEPC80:*D
MU1I);KFSD*8&W9HKFP(Y>#/2V%]GA3QFTAJG'%9R4973HKA<^HB2*>?S8IJT
M,+KZO5RE1NS38G9?DYARX@J!.VB955!J:`UACB"Z">%,N4[>X6:<HK^V#%W;
M2#\P-7(F_+B55%1N=.6^3^?KY>R^V"2E?2W'Q7RN%I?CHKJ?38LX/EV$#^8)
M-ETO($NE$AA;!22+IW24-\5\2\PBM-3D^J8BMTGD!"UKPN#&EE]^_LLZ=C__
ME'[U;;(LXC_^!5!+`P04````"`"Q@`9'/W&W,WNJ``"H`@D`%0`<`&%S>7,M
M,C`Q-3`V,S!?;&%B+GAM;%54"0`##K[#50Z^PU5U>`L``00E#@``!#D!``#4
M7?MOZS:6_GV!_1^X=X"=%D@:O2EUIS.@7KO!IC=!DML9X&)A*#:3:&I+64G.
MO=F_?DF][#QLDQ0IJT#1)JZC\YWOD-\YI/CXR]^^KY;@&1=EFF>_?-)_TCX!
MG,WS19H]_/+IR\TIN@G.SS_][:__^B]_^;?3TW_XUQ<@S.?K%<XJ$!0XJ?`"
M?$NK1_#W!2Y_!_=%O@)_SXO?T^?D]+3]*]#\M$RSWW^F_[I+2@R^E^G/Y?P1
MKY*+?)Y4M?G'JGKZ^>SLV[=O/WV_*Y8_Y<7#F:%IYEG_5SN_07\[[;YV2C\Z
MU8U34__I>[GX!(B365G;9C#2??W[N^]_,^MOZY[GG=7_M_]JF7[T1?)8_>P?
MOU[<U'Z>IEE9)=D<?R)L`-#P4>1+?(WO`?WOE^OSG?"\,_J-LPP_4,JO<)'F
MBYLJ*:J+Y`XO"8[Z:8\%OO_X$<NB>/4$2I%'*=(=2M&?#CRX>GG"OWPJT]73
MDO!S-L0!`<35>[3*X-4T?!9!N8_7MP^4#?B6]&`L%_+[1\H&W32V*%NH:,-O
M'RL;O%S,:AM'7B5+R8WCW2-W@U[2KUV0G]IOTL?OD>':>BNN6T_&WRN<+?"B
M$<]7SP;IXI=/Y*?9NCQ]2)*G6904&4E@)6D)-X])@=%=617)O)JY$"+3LK4X
M\F/+BZ&A!6%L6WH4!;IC:?ZL?MX,9Z=?;CKS]4>2GO^)AX+W[!:XS-?%O,E0
M!!C-T0W6OW:0`,$$:E#@:P?K?_YRMO'D-7WY_*,64:.Y3\J[&E+K-8&FVV=X
M697=)Z?TDU--;]/LGP[1\Y;1?"Z/T8:@)2TE\J)K?Z]:"2KF("\6N"!E3O=7
M23$_$(KV&V?SG"3NI^KT551HM2/;CUQR4VN((6Y\2,K!KG-+^IU///Q]%D>Z
MCP+DNZ%I![87VY[N]@9MRYI5?<+@[D#L5GAZ4+4C@W%UH]U]1S9_8MJCAKKA
MXD-Q@1K8L>6G9XA#?_A9G:@`"3AR0(%$J6&6(#+ZJ#`=8%[>QVE&!DQILKS*
MRY2.$7OY\STOT'Q7TQS="ST8(M=O;(?0-J%K,_8F*;;4=:P>'LCO00\0=`B/
ME^)9>-O3W:32/I&>)]>G7&$[%>V/M\G=$L_\V`TUPPT,%/NAIELQTOW.BF%X
MB*<.X'RTXN2_Z6U?:SQ[.I44HC@E2CY'HF)TD!ZUFE-;9U$7/L:FIB.<Z'<I
MA@@)_-IP,\=94J0Y^IZ6L\C7#`U9IF9Y#O2M0-?,L#7FQ#XTA"2"R\)82G$"
M.E@D%Q-@PI+!QQ^G<BBCCE-`6*E2*Q_;;+"HB!![4Q,3,2=V:<H`2MBEI;7Q
M)2N?\#R]3_$BS%=)FLV@C2(]-IU8<[P(0B>*C+@S&#@(<LF+L!75$M,".P%;
MT,#7!ARWS(ASR2@UH]`H)C>\#*I1GUT$[5.@P:1.186&._)6B211PU_H7*09
M/B<_EC-'@ZZI>3`(O5BSS(`,O(+.DFM`L8$0^^/'&PQ13*`&)5S><+#&6=NH
M(4QX9,3$E=KZIF>$I;CAIV\JFC+`@UUEC2@9S"J"RA)79;`N"F*MG[<)/<LQ
M#=TW;!CX+M$KW?4Z8Y'#)R1B%A1K20L'-.`X-420,S8944\7GY(T>$Y`Q]C1
M)G@_)&:/H`PC<B*:,M")7&;;XE66Y3+_1A>7Q7D1YNN[ZGZ]1/-YOLZJ\AK/
M<?I,IX%:,#/D6&X(S=@P3&23.LFS/=2!""VH<2F.5,N*E:@'"^[S`BQ:N"!I
M\?)*DUS2&27K:'QS2MDKJCNDH(,*-EA[N1M;XWB8W*=]2B(R%4U4X]Q;K51(
M(<<8+Y___I@O":-E]+_KM'HYS^;+-5T+?947]:NVJBK2NW5%P=SFGPF#>581
M-LE#'\XSHD>XW"B]JUE$X1W'(/6C'GD1@E:O]('IA'SCPU&A*1];;KSY,VC\
MX1Y9CALKUE'I9,/$.Z)]'Z$3T#L#6F_`MCN@RL%KAT#GT3$7*LB,R-X1]5%"
M/Y$L<2SOWXWDCQ@$YCP3Y*M5GM58KY+BLJCG'Q:_)<LU[A99S=S8MPW-]Y$>
M^AX*PS@.C<ZT&2"N.0$9]E3/$-0004DQGH"GI`#/%!YG4I!"+)O2C\TIGWRW
M=-XT=!*`1`%``Q'4&%G6MRK18P;>]HBL3-8GHIQ27<K5-5)QC:OME&A=/>9%
M^G]X,=-LG2BK;D$;D@)>BV`<:9U)WS)T06WCMC.JII4U.I#T\,2UC9]0;DU3
MRN40+6N``<1`HVK]>LL1FVX),SL]O1)W9;=.#:1'7)_.RW)-S+F.9H7(L(@A
M)T1>H(=:OYA%<XQXD#8QVCB&+J4UM*&:Q$JBH!XIX&^X%I%A\0'NQA&B!@6/
M"''2.54!XG7CD/@(T2(N/)?KBAX+0,>H,Z3I,-(@-!$Q;-N>Y=A6:Q.Z3L"U
MLFV0H6-(4+[!-U2'N#@5%"-5=,I0I$L6*L>1I2TH/-HDPNY4!4K(ET,J)4X0
MLU1=D7:!BP(O/J[,'!.:GA?JFJ[Y88A\UXFBSFK@\`WC!II2+%<].EF#N:',
MLDG6B*3RB=:&SXF,ZO8SM4>W)%$\$>62Y4VNI!U*4*^VM(OMV'9]TPIU%_DA
M].,X=CJ+'K$_5+D8S1Q)M82&>D/8%%<K!43*4:JC#/EV,\2I4)RT3EB=>#UA
M4"8A<KB&?VE%%QN7*%L$>5:1`@YG\Q2785K.EWFYWCKD!<:6Y3@A-`U3UV/H
MV79`=W3[862[MN>Q;@24:U3M8*;%"4AI"UXA!1NHQUM.P,7D@?&._(A,I*,J
M<NZ#$9$J"CDV*3[BQ7J)+^^;Y0:_8E+6+,ZS9UPVT)K=UWH0ZA:I<[Q8]VS'
MUURZ\+>U;AB<&Z+EF%2]Q*M%20\N:7""!BC80BIZSH(DTMG$\PA\\ZFF)*H5
M;7MD(6_?LBJY[$]$(65[]6YWI`+2F#7Q(B_+5W+LOWQ.*B+&E_>;CU_JK>-T
MCV9DH<C52(%E.LA"IM\A0*'--84DT:QB;:1(MVJ;%]#@%#M!0B;;;()X)*+Y
M1%&48R4JR,[8'B540/M$U%"%9[GR-CM(%5OK[9YU*X*>X<6:'NF6'L+(BQW8
MF30]Q%4>#K$SLNZ=])U2[%2+092*:)TZ-H>)&P>1(^C;*Y:8!4V,VTDJF*`K
M>R5K"#U<&A43YX*D2LBX.7]ZQ.6O>'6'BQFI$HW0MB%T#63Y;DS^B3N+8<@W
M@AU@1K%"1=ES6N09K9&3)0B6.,E.UT\"LB3*(KLJC4"@@"C5]W]LPP)?&V#'
MD*2/*3J@2`-YG9`@#?7D`SV20@ZS'/GK,LUP6:(Y&<6V9YW2"BUP80ACEU1C
M>@PC1]=UR^S,>1JT>;1(U(9B(>I@@2U<8N-#81+9I&@,_OAT2(@Z)1JT@YL]
M`C24S8FHSV`W<KF-3(+NT!\+W-5?&M1<VXW(^!#&IF4%NN4YK6$O-C6N\S.&
M6SN"%IV`#J/HX$T"R>(*I8[?X5K%1>UHNO6*,4X%$V-[PEHFZ!"#J@VAZJ"^
M)>5+.?-OO]3[G+/ZSKUD>9[-R4>_XN(!%VTY9UF69D06BH/`]F-;=^@`LS5K
M.P[36$^6+=7:=OL%O()8'W(`?B"?_P@:H(RZ)HW<_:IV#%XY->TPI0R#0C7<
M+MJK*^M'3(KC5\C&:;YO<@?UNLX(FF-J=3Y@Y.&#;"";P2/G`NGNY&H:&F>=
M>XU+3+[\B+)%B)_Q,G^B+1`5!6EB]7F8=/J1KIZYS:]P<9\7JS@O+JM'(K/^
MRRVQ51?AEN/IH6695NQ%T(CCR-:M#EQH\+V\&`>1XIS2.5$O8=MR`VSY<0(Z
M3^BI.:TO]4%IC3<G@'HC-N(?*:QLU??T(LJ7S48,II):7@K_>^K]<>,[D3'!
MR$[GQ^Q2X^44"JT=^$2:9;N:YT2F;X:1;WFV9G?@`N1SS?".@^@/E%/$YFM&
M"JSRK*(HIL?+*L>9(Y(2`35Y12#"?_R\(N*TO+PB3#G;G-4M7CV1WE3>O)3T
M='[2::*,C(]>.L0!`5=@]%#@&F<[:O(\%)J63Q?\6YYC0]_89#A/\Y@.4U!H
M7G'&Z$"#%G4M-0UNT,M/@QSTT(4F9A1%AV$>[/B!X9/]/WQ,..;/CA\;L2DU
M53%BFVT38FW7!)S:$$QA3DZQA_EH[5GRMK/WGV+\.5DU(S_?,2+=AJ;EZK'G
M:+X/W6XKG`=)MI:Y&6T0$,49<H.2KI]="<ZVJ0T%VW!H,E'@2X?<`3C*%K5]
MY.T9P(P2DXF,6\;QE7.3FT2"F75YE\UV;&2&7D#L(<.+@U"W?4<+^_?YEA,'
M/,H[T-3HVBHVZS244#;]')'+H0IYG-F>_03M44%)S$Y$YV1YDRMI?CPS*O^=
M9@]EE6?XO_(E/4(NR%=/2?;25JT((<\R?2LR8RUTM<`.X>9]LV'ZS#,GP\PH
MUJ@>'&C1@18>ST![()$,DQSC<<BG33OI$YJP&,@CQ\3$>'R*34`,X95MDF$O
M`[LF$^30-H5)`TF>Y-+;E)"`W^!52KQ>K.>$T=;N1;5H3<?0"O00DH1A.;H9
M&0@&W1$/GFYH+K^2#[,WFJ2_@MGW(`)42)0&DLRC\N/Q*RKW.ZD=)OP#.1;)
M`.-Q/305#.&<,RGL)>5@=I!#Z:32A"27/LP7,NF2=VC917\/NHW,0(,1&8#X
M7J#Y?NCXL!][A![7-602S2I.(XPG:E&\H`8L_00SC@C(F2)61#Y?CI')^W&.
M,^M9'#`S+!"*B<R/J/",]V@S4?+8SY4FC?<Q*?'EW3)]:*H-S4.:Y5@P<@,7
M&:&E6Z'?%_@>]+C.D^9_O&(U[!"!O(?$>WBT`&5LLJ:8+3[YZHFZ9"!*S0G1
M[^C8HT,#N)N(W@SQX.U)T$/)8->/Y*4Y@S%O=WM>%?D3+JJ7*]*8*I0MJ+#5
M2^]F!KW7`SI(CUTSA(ZNN:;>(D"&9_+=L"'/K&J]*=)Y70(D&:!G-Z2K)PJ1
M>2>F"J(9U>@X''.J5`N2KBIN88(.YPFHD9XTBYXZL&.+&#.+^\1-?BBF(GH*
M/'LKAJK(8YO;O/R6$=5X3)^NTX?'JKS&Y9HTF_R>H/@GGE=ENSH9+V[P4U(D
M%5Z^^"_GV2)]3A?K9'F5%%6*RUD$-0W20@\BPW)#:)M^M_8*$55GW\8^$A[%
MLMI[`8K:#=K_B\85*K9/K3-@T7D#RMX=</<"TMXA>C\W]8AGFF^LF#),M4XP
MG'P*OHEDX\$)N-[$L?,"]&Z`C1_`?P$;3\#5=./(,9T[P7B*3?>.%U>V*6$Y
MQ.Z:,AXY;%.84A[;Y?QXO80GWW=+J)/7&X^ZI=2WN%C-=,=W'`]&GFV:KF=&
M@=$/QA`M.IB3N0QCBC/U];\GJZ?_"+>V%Y"'K'A46@JC#*ET;#+Y\N3N798]
ML;?'()8CMXU-L%CB&DPT6SYB(&-7LI')XQ0RB51_<D4-;G@.N,;U\+.^W:E(
M[]:T51(MS0OR-526N"IGNA<:H>.840PMY/MQX,-N=21"MC\T,4A`H#I;M`C!
M?`LB&:V!>K\XJ1R7%&[=-9,:\'"]DQ$6X>PR<D3DI!Q:RK=AVL9]`B[ZX*`)
M!6=PAAHY2'+3EH1@#4EHA[GCRW(28S'=U"?3R</Y4#JE0Y+D%2[2?-%!(JK?
MS\Y>DZ%<6M"]JK\F:5;A+"'TSGRD^4Z(3-MP`BLT8&3#?LI6CZRA&5,V',7I
M\_.:+K6B>?*%.-/>8)#T=6M9D8%O?>K*J_1*/VAG3$&Y?GK*BSUO28X62.$<
M>\P8RDJXC0\;*:<AZ]T`K1_UGVUY,L$@#L[%QPRF[,0L.:A#TC0GK7PY6U7,
MIIO`E7E\.)NK)9OCZ+QGG*TQO6/E/TDA06J((-`=,XPC>J5*H-NQ'P;=QA$$
M@Y!K]2W_TY6/6VM`3<)M('$?2<=-&-LZ#K5<\28X#IH4'?7VAHT]RR[$F9O(
MZHH!#KP[3FT8%6Q#@OK1K:G-C>A5WK[6F9F.[X6F9CNN:2#3MQW4[SU#=F0R
M28@40XK5I(8'BK:SS'N`=)5#]8B[8IVGOAM,+4/Y/2:K?+K3$-JI3_"*T*LC
MD,E1!H])JEB!.XA<MJ+U``F[RE%9W$VAT)3F2ZZ@<0T^68::[5_JDQ)V3EOA
M`YY9H4GRB@T=#^HZ]#PC]OKJU#3":-@A,Z)6%<M_NUMHU>P62K>.3<G[135/
M/=K!A]`(<\]6?QZ'=K[\L&M_U@G8+&.Z8F!\I/-J=A"XIY25'X2)E+@*'#MX
MH(T<ZMA*XLWC\_O?<GI_<GV_"D&1WW<7;%$LBYOU79DNTJ1XF2$K"DP]#!TM
M-`+#=W5-ZU7;-#6'N4Q685RQ=FX@TUGPYQHT2%O4]3Z,[CXZJJ4+4/;(>0I`
M)5%AJ+"/'1`^57T=BP8O.-^*17\W8(T9W$PG%AP%^K%C(E:TJX@-6RTOP->N
M^EXE]5.H^97ZEX_4ACG'!O1F;OHFFF#`V?P%S>?%.EFB*DB*XH5\^%NR7..9
MZ5H(^;YKQ(:I00_&7MROW(7(#7G&!7(L*LYK]87T\PU*DL=JF)S5OR1VV2K_
M\8GERT\UIUL``3K$J9+ZGHFF/;6]7)HG4M=+=BI7V3)Y%0Y75``N[X,"+]+J
M<EV559+1D];0*E_3;8B.YCL0D?&#%4)/MR#4NUM'4.#PG6D^V)AJ7:OQT8)C
M7@/DU;/!7#)*V9@T<JI8`XU2V(`#6^A.0(-O;$D[0-<^-9/%]%2$3)H_;S5,
M+E',\M7=]!WDJ[NTN>>U1'=E?9G2S(I<U_,-S["U&'J>[FO()#;U*-)=WT"L
M9P\,LJ&NJ_4WW&_C`E\[9,>ZVOXCEO;T,"GD3J1WR?%EQUWV$@@2.,:NLUZ/
MN\JTMNZ_;/UVF]PM\<PR8^1Z7NR2'@ZCB)ZF[7<X7"-D.@Q5F7'%1</VT6I]
MG]R&?$+W^&]]`+[6N,5/MI,5%#;Y.VH\^"1102@4'W;'1ND>_506G8EHJCK_
M=AY_IX1([HIFR]Y%?_">`0T;N;X?1:;GD+H)AO69,+5-&+M<QU8-,J184S_J
MO$-.!1U&*E^9J)Q/P3*1GTJE=>)'-#'4B8/8G8BFR?%E1YTH@:`A6E5>%7F<
M%ZND7<@S@Q"&7JB;8139H88T9-7S5HWI2&.Z*U:F/<7*U<(X`1GFG3Z2PJ:P
M5BDE<KADG=#5>Z`&V*WN.[YPO>6,3[^$&9^NC(F[=%C-!M(E1=0^X^H\F^<K
M3.?L9S8,(C=V'9>,OC6BK)X/C1:`YP8>TS%X\JTJ%C@"!BP)#HGBQLGJ<(E3
M1ZA<H:-<-T#!#Q3JCQ.2O%<<"@J?6!S^`/(GZ!B'"`ZA;H@4=O:CI,CH51M7
MN+AY3`KL)V4ZG]F!A?3`CY!E:FY@V]`S[`Z'[01<*Z2E&U<]9J4@P`]I!A;Y
M<DDWO#_A`I04WYY^.Q+OPIHY'N5RI;/#2U=*@QKQ":@Q'U]"]U+*IZ1RHC-=
M097DWV%=E4FD"GD-T^6ZPHM9&/J1[<4V#'U=CXU8\^VH0Z);^M#1]%#SBB6V
MA3&ZR#*S+UUF51"O7FA;U-.5VA:@'+'EC=$?3VZY/1077#$RV=]L5TE5'S]T
M>1\DY6.\S+]MWJ9#TXF()<M'#EUHI[DQ#.@:%>@Y0>P$K#?G#+*A\.5H!ZM>
MG$6`@1K9\5:,[.-IWQM/&?1.I`_*\>7MFTQY!#'W*S(<I;9(KWY.%WCAOWPI
M\>(\NR39.:$+6]&\2I]3>LYUCT0/0STRS=AT?:AIR+)C*VJ1A+X5<"TL56!>
M<2G30P,;;)P%C`K.V13NR'3SZ1Z=1*OEKH-+UX#\0!&#-/L1?!2(XVDB/[-[
ME%)AF":BGRH]S$=K\[S7G!7Y?5K5\WYN'$9&Z/F6X2#7BEU;;XY$H!:0[@2S
M9US<Y<P7F;$_F*>[;F-0_9J!AQLVK5-$"K^&O7H1<$)_7:[I`FMPE1?UH@Y4
M-:=HTM5)]+B3SZ0/T9,UR4!Y>S_EV'>.]?SM42H!DB>B0"+(W]X))NH\LV*@
MQ3_7[26NM_DUIJZE2_SJ%<)MSJMNMFUX!H$8HDB/?3V"O@D[K)%N_S]UY];<
MN(WE\:_"QYFJSBY(`@2Y;P`(S/9.3[NK[=FMFCRHU!)MJR*+&DGN=.?3+T"1
MM'RC<*68I)+XTM$Y^(/\\>#@\$"8Q&\7<3!PA'<RIN.!8.VH5&5(@S;U4_7U
M0@4GV]/@Y+$+3NH^.)GWX_LO0R1>9O+UX#KY>3?#](LI[P?T>B-7_?I/$Y2&
MF*6!A\%%+XJ)/%8NJT$]H;O4\%%75EM)VE7SGHS\>EVI+\AF21Y4E/3'L84&
M9#'-:,Q(P6!!65ER#/K'+`9&+^Q[,1AZW^3$Q^-Q)2?.&3Y._`BL]W@875LS
MW)^Z]R'J'3P>8Z&E<!!<ZZ@V@%^OHD\$IW['5`>\2@UQIWJ`;:2T/_]OMSI4
M9?W[9H9+3G.8$)"4%($4)6F).DMID@,3N%E\?&"4-8[\LI2>J&V,5>>?(<1L
M9--#5F#%S`#5.Q,]R38RC%[K,8`>!_$F`AJ7$=3>KB1CB"QVU7Q?E=7QOQ\E
MQFZKW4Z%<"K`NYG_J/8SB&@,BUCD4`"19?)+F'7&"\[);%/=S0_54I<L/FQJ
MW3K%\=8Y=<_@$7]T2I*F6;T=E%O&L/$BKRY_1M/5$DE'OZ*_=![^59VHU^O<
MKI)OAG4.A"H-Z0;IY5/ZR0#-ZZ!>,<Z_9/JU(&V!GSIL[&%;;?;'2`V594Z`
M*.*""%9(JF)..VNL@$9O=5B:"!Q#?:XWOS1)QZ9N+OJF_%.-_7L'H^J'^MJT
MF[.MH)IE->&U-"RH40[]<E3OU*6QRVC>U&6H@,9-R(F`R744+XMF?(ABLH7[
M?;67!D2]*^O';X?;QS59+%2GI/TL3R3I8)X43-G(14%HVMKD1)BUF7<R%!A#
MO6_-66-_42>,[/;SM5S7_36:K]?U[^I(J.9WR]9SU6>R<=U\5]A!;NU]XG&4
M-H/4<Y$[QR)R5LA0F\'OBC2\/>RN[42XY6<LK[>0?0GDL&KLT_ULOET=YNL^
MUY^S-*<I+!D6N<@9@20GG0<`(:-\NT>S@?G&[N5WU5XM;T[V<9LS;)L4\7HU
M_[9:6^WI^M3>=ETYBNQ>%I=/NZFMJY?;2M67T6BAZ3P7$X%CB)&=77)Z$L\!
MG%\K:7&U.,C@4Q5LU[LW-DYG,,,9XH`#P@5/>,%(OX/``02BR[_=N+#4BR<6
M6;D;FTXKG:M-!8TS0?U,@BU-QQ/>)UE/YJ"I9E$QIEEE^TB4U9'7B+A>YVNR
M]/4[RK,D#B"J`Y6[`/IKM:A6WYN>?X@"D!4BAG$&BKS(*<[*SC:.B]0+@RWL
MCD/<SC%5R]AZYDQ=&Y%M&1M*6)]$[37^JJ'Q2/!\K9L1*AUDGRP87<9T%H/.
M@CE`K]MU5J0E+(."L#SF),\PS3%#O5'`T\P+[4P,CH.Y$X^<\68DIRW7O$OH
M$VA::HX$LA-?C`AF(_!DT64UF+/,LI?(+4+;/3[;*_XR_]GP$G#&"*"8<9IP
M"K-,Y-VK=SP5V&@/Q:?=P"G'CR=5*C)*NWW<+)NWP52Z<7MTT:8SJ5?E':*W
M$43WQ+RG(I:H]?+B\'M7/]-@SG$6)@M&#T/3">V\R.<`S2^[:CM?+;M"&WXL
M]2";Y=7AOMJ19G]B5I(<(HH8@!D2!)0\`4\(5X?N^0C]O'@R3DS8NMH5QAPW
M<&KE9KNCXTQ4/]-B"]?QIL(G9[M9:=UM)J5Q.")G)F4DYNK(:H1?K_,T61+[
M'>59*`<0U4/:L7LP)#PI<)S06-JA&`/(49_OS$M@])ZUN[7``6R?_MJ>BYI"
MJ>F:7`PAI-_,XH0"TE/%K'**IFI/%GG6`]+.)MI)=19DS9'=[P:ZGYYJ7"1/
MV>/^(./>75EMZ_U*0E7@+(<LPS%EN$10<,K['7;!$=5A6U`'PN-..7E:"M0$
M,8O6SVC9.JK)P;"3,8S&R<R#.RT_;J)N9D[\CJ3C4>=Y5$YI9I;UXE&]GW\L
M6I[\##US=P(S]>*!IW1J'F,@2T'S$'-1[HWGVB@3<>%'W3ACK$>\LMT>B-WJ
MXMCM:8:I2`CC91PGH$ACCN.XZ\,I,A9KO67DQU+@1US_9M^V<<<-EZ8B6CVQ
M`NKGY='4*_KE`HHZ/6D"*NOUD:*ML.V#X[D0^D\(2P&G^2BP'<PP\YTD"M#O
M>`9%GG*>4L`$))R6!<]@YT%.L21]?9BO]?(W'LT:8;_W4/O.^MPUMFM[V;W9
MRBY8P^/SHNNE>2ZDM]ECPJ+!\62[&@\D@0+,Q42R02%&9MV]V%`\5V*JNI']
M>_V3&0",,U8"F!4YS$4"NY=O1<%RXJ%#O(OYX+4<K6O>.\0[:>X$SK'D]@K0
MMR9B<AWB!Y0U9ZJ/:9HV6[V,4(^Q_L34;R\P_]EVZVQ.W-E5TB=)^L//+_*Z
M/Y#-DLN?;M4?F64I3A+)>(RE.9XC1M*D\P"#V.:M,H_61RKND#^_GZNJCOI6
MI2D:9S]$6^5NDXZO.H?'?EU>6\F!>SS`=$SDW@XQLI<OUH<23_M>5DAI;4N8
M\!^+:K^_NGWE5W?$UBQ):,(3"D%!2A(+F(&BV]X3:5H8E0OXMATX8OH\W$Q]
MU3_'K5>@WB=#+YJZY#R8A5)-&-6YJI;]1V<56#MW5>OS]D]$G<<C<]50SP&X
MAIJ9B1`VV/#J<2[P8&O4&6%"9#$`&&)&RC(OL(S>6@\`YLQ#5L_&[%A9O6"$
M]3D%OI>J7M4/OD2=[+K4RWI4>RXF0M(0([->?QJ*Y\I/L=K,-XNW5\`BCC%-
M<(I@`LJ8,/F7Z#PA*$X]Y/A<S`>.6'O7O.?XG#1W`N=8<GL%Z%L3,;D<WX"R
MYDSU,4W39JN7$>HQUI^8)BU$%U6UW`LIQ\?]_E$UR[RZ9?7#0[VY/M2+WV8L
M(8"G!8-I2E->XA3G7=\_@4!B=!"$N[7`).T<C-3E$1WNJZCZ4>T6JWVEUIY[
MY6)4;U5QB$7S4%>A]7@ZKL9F^'PN;^==<Y)XXU_4.#A^-]%AP8:RHM[$G@@$
M/0[H=7-1KU)I(^YKM6TS`%>WG^K-W4VU>RBK;Q*I`"2HS`3+*$G*/)??]?8@
MS[G%IH6UK9&V*+KDF;S5UM*]7R0B'Z*E=-"09O::ZD$LK(Y6['IR2?'J4Z]>
M.:A>$&*]I\X`J)P%G0B?W,=1>[[2O`1<SRQG(LY94F20`8`PX#E,N_-Y1(%C
MZ!YQ&9D+''+1>K>K?Y=!KSN5?&CK$F0%D]57E'51:IW7S#C0LA)\(B3S.2*M
M4,M!+&VZ'?=<;N8_:+6I;E<'Y<';9V*\L=:=)4DBW4HHC`FD`J-$H';O&X,,
M,*.E9EA/`C.QW>X\S']$WX[NNRX_`T^,'C6G,R=F0&VG0SH>M9X?T?K>T3T?
MWDP$CHQ;)[$'2#S.)$X$TB,-MK[$?1)L5V:&$$@I1C#!#,6D5`T"8.=!DB6I
MAUUM&[.7V-6^[4'@>R_;2GC?6S)>-0^^%3/9_1<O^R[:<S$1MH88F?4^BZ%X
M^@'Q[6VU.%S=2J0WY_A\G1^JJTU3J+1IVM.KRL_O\[5*0,SB,L]2(2/RC/&$
MYB!)8]K[4"*C,R.]&@X=[C:^JA"W\S92[D;=T4?UIKG334->K])K1KB74MTP
MH'U'\%;HIEJ]^>+$W;'#5P,EAZ+5$!,R$8"&&=O+6#2<@&;%ZZ^L?:EVJWKY
M\M7M&8((%`1QGN0HQM*-,NE]8"S%)L&G5\,CA)^=+ZIDVN)&'D%\/8Q>3'<S
MC+XK\8?HZ&OT1F>(2Q2I:TIYKD+=]XQ,A*-AQO96;7H8`1TY2F2,O-O]E.'P
M_\[7C]6,P#*.109Q+N(,9C%!21\)(\K1;-LX?7V8[PXN&#6U:W(?OW31QRU-
MJ[O59J-6E.HUE,:`%Y0:Z^_"T)"B>X/G7*WLCUY&C9N38.8+Z8QA:2O]I"EI
M/2@M/+I)YIF+'##,<D"3-,U36.0,DQ[*H,S*EHM\L_1)Q7-6S:G8.>CC3N6J
M?_UY&OZ)[U)=_?]4=ZGVH*SN4C/)M._2Z\?M=ETUW=G6R@.QKG__N+FM=P_-
M5DA?*<T0S*BTE"<9XK$019SQSCS)H5$6S9?-P`FT4S>/=ZER-#KQU/1H<&]B
MZP4KE]#9+%PY+_'E7O305&^`A;[UGP@-O0^K#GO9NM02=F<!?6W.Z]K/BIP`
MB/(L06F6BBQC6;^&C/.89M95A*:&`K/OZ;"R]J@RIS<SC%74X]MH`II![46E
M8'_>6/3UG)+A*P1?J*1;&V@K[D2(Y6<L0_6`;@*9G$CS=#;9:CDCL8@YQ7$)
M`2\Q2&$B&C.\0"7.@5%49OK9XQ&HJR4W/W#&3"P]ZH34R0PT+XXR7(V]5GRA
MQ`!,;#6;"#^LW7]]`(R##/IK.E72JDJ4JV4\`X!@22&&LYP+FJ5QG&<]B0@T
M:M1I],&A^7!2@;\XON=X+.65@6(T5SUI]BN;FEXS\3078J%T,UQM-?H<_1A[
M,76BP-"*R4:HB4#"SO>7:Q][`0Q2/M_VU;\?Y1.5?V\R3=V"*BD++!A)8I%G
M2"6#T?$8O9(GF)2%[FL\UI\?,L_0N10=?;ID6N%M=0;S"(Z"3N4.<1['JTR!
M%V%L[YR;YLPVSD#!"2_3/$<%R),4,-3:RN4UD)ME1BT,!$^#/K]WHE\;MP;N
M&X_:61''OVQNM#FOV!BDN3ESD*.3B-,DC.$8ANEB(X@V6=3K@Q\WDE[-03GD
MQVH_PX0!"2Y)*P9H(4`FA&082S'/29[$A0E7+#X^,%641]&32_)Y+)TR98J-
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M9R"U[\O(M$RW?MQ(RFWGN\-/]6QHXE.`\P(4+,$<RP]/D#0G5[DT*=,,PR0Q
M.ZC$QD!@1I_ZU,8Y-NM/.^WT(L3@LIF!V5RQ,.7);Z@R$!,ZB3B1>-!M#"]K
MC=T%,6D1VA[>U:/LI?DV$,6<%2A)&<T$Q)C$@)6=`P7.4Z,]:G]6QV>0W5K5
MH\YZ:+J,Q,Z\NLQ*5ENL`8SY%WPB;`LPL->=2(-(I[<:_KOJP'FH-]5_UYN[
MO\M_VE@.98!"FN.XI!G$7"1QF4I;*>-QB@G0VC-T,A"8;;U;D?(K4HZ9K-NL
M9=-8^(ZAF!FJWA#+:K5KK9K!0G<,]>S6N$:7G-[J]IW!OK>P==5F"FM:YS'4
M'B\6H[SCXQ_W]>._[A_K_Y%6C^<J-;"O%.M;PU2@1)(]*0&GDNB,0[6$IA`7
MO$"BU(HS_5D+7K>A?(R4DY'R,GIR,SKZ:91*\Z*O3F)R;&D-$Y1G5;7+5'J1
MUR1C.;;,EIE+AXM8,X6I(<2[J4R?(DX!_WX'5(>ZWHP3$6KS:W%XW$G3ZG#H
M)NO!$&9IG'!UO#MG$.<)`0(1P=(\13`W.A#`SD+@!\`SIR+EE5V6TU(^W5Q"
M:.7,^&XA6J"TP1NZ#*8(7'2<3#K`:1"OEO[NDM@SILTJ"(`%+@7'<9(@%$.2
M(GPT5Y2((:/N^[8V+L`9VTRFI8B6K`F@GSMM+I6F?%,;$^(8JCE5YI@.XQQU
MK&316_0^LW5U^Q15/7WU<A<YQAE`,0.D8'&&$2,\@S+$BFF6E7E6:/$HE.U1
M.75U>[*6^'"ZKK`JV`DQ%1JKY0O/@@OM-";`:BD=8B8,%M87GA&[9;;'6T-O
MU6VNTGMK\(!Z3V%%'G)X]3B7K>-+=O+_;@+WLF`9YPAFA'*2):0D9?=.7YXR
M8O0^C*V-X"G;%R^.*<?L%NW6*NJ%TF,(:)J8M=%NE!?O6G$&8FE7.2<22SL/
MX\P;>':RN)"G#=YIP1DM$D$0)5F)$PH+W!FD0J]PW=W*9>ACMY1WT-*:0`%D
M],*@RZSHWQ7(C$.&HDZ71*8#.<\B*VEL:=1MD:0(,@9X*6+&<P0`H:E`A4BS
MF&2,4@<2:5H8F4)NW-%5S8HY`01SY,WY]?(8J'EWP>9'QVDBQG00PWBQDL06
M+9]6F^KCH7K8SQ@F7%`BA``P1AC*?],.91`(Y$`7?2-CASF_*M>BQC?'*,=`
M2"O@A-'0E3E:\HW!G5X>??28*SI-^EB,8QA`ML+HG^'X[\?5X><_JL.].JJG
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M\3)Z<O."C>T'Q!M`HF_Y)T)$[\,:Z'SO3S:]DI=3V]?S==6<H;M^W,L`Z>OJ
M[OYP4U]7ZS79+*^KW??5HI)_?OFX..QG28D*DJ=I24"18>D&S%3+K2+-9%2+
MF%:K_+`>!&;EE_8]R..=?+BOY-W\L)UO?JI;N>J&$.W4&%3DN9>C:`XHVQ_'
M(9EZ'(A),4:XZ1H&['1FRA*WRN=(.:VJ,7JWH\;OZ*:.E.>1=#UJ?8^^3&IV
M#`IF)C%+=F4S(6=+KX[&5KSWJFF"3\84:FK"#[(>\_HV7$Y<[>[FF]4?S97.
MZLV^7J^6QX.U-LLO\F+O[H*K6[':S&44/5]?RY\TE3]/';:59RRE95D(3!&"
MF,2J-WW,>4)(AG0/4QG'F7"\/O7_0_1L!,VS\W0,ZCG;CR)Z&L;E>M%[47\@
MOAYW=B<2?8\\Z/J2-Y1QKS&IX$::4!Y\7>U_._;43@7E>0%+CF@F<L@$YJ"S
M%B>B-.LV9F4B<.S]S*M(N6791=]603T:CR">&5YM=`O4=^PM90;0YRCE1%CF
M.HI7W<<\B&)P#%;+M;]5]=UNOKU?+>;KXSN`G*8T3W%,((3RFZR$26=0I,+H
MI3Q[*X&9<^J/90VQO8":V]NC:&>&'"/9`IV5]8XJ0]O:SDI.A#@>!O+J2"T_
MTNASI[I[::ZM%$Q11C.84Y#R$F2HB#'G/>AX;M16U=Y*Z/J:HV,?HN=WDF49
ML;V6F@@:1487!%VH>O@]788@Y*SE5"#D/I"7$/(DS5D(+=1.].[G[)_7LY(!
M`4B14(8+3A$C`HOVDVG!,)I]KW;?ZG.\,?A`DSOBU+;VC?'/SQ]O>!E=WY`;
M?JU)$A-!AI$12`DS-FA*,,"$?;7XC[OZ^W^VPU%(2+MO%`W2$QH\#?F-V]Y"
MCPO?WS8>U]:3[YH<H3]IM5G</\QWOS7A2H%BEA(&2<D0DPNE&!':V<TH,2K]
M=S8V?L*D]\^V5[NKO)8YE)#*.F=3]$4=)ZWR0BR3!(NMSA.).?R-YUS2Q4TH
M!YYU5MO()T$IYH04*2@X9C`'6)6''.WFA+NE?4V-791G=FLC=X%MB1906Y]$
MN\S*Z9Q<1DRS5'JR3+,=SUFF.0FE5WK&YOM[LEFJ_ZB2X._S=;-GMEDVO3-6
MBT/5_*Y]=0MD!,68(40A2!"-\S+MJ<H1UVHO&<!L:,Y)3YJ-[^:+$W^;'SYY
M?/R]37L?S[,PC,`+3X`A#)6DY"WMR32U-R@2N]P<V%6&^9X+O6HP(Y7>*P$+
M(_44ZKX"C:P.?IT:1MYDT60K3DJQ6WL)R!GF$`F8PIS#M(!9EVNDI:!&;XA8
M&PG\!.K\.GDOP91U[CKJ!=:C2&CV#+%3+T@<_9XZ`_&SLZ`3B9O=QU%[OM+<
M<YE]\R;5RAW%$/,DPU3]C2#N0W-DUL?-Q<[X*W[[;FY.>EKG+8-(Z;S`OUQ?
MMP&)S!*5QL).A$M>AG(^/6DICT,9ZE,S)X7#.`-Y7I:\S$#,"$*=R5C"TJT6
M5=_.I>CD*15IHJ@EGP*)Z8E/$\D]:G5]\R'M5`EE,Y2S5:NV\FCF&1_WA_JA
MVEUMNB@MRU-6T"(%F-"4ER1&1;?CS'")#7*)QA\=FD.M0Y'TR"XE92Z63LHO
MJ$Z&B+F`1":9N:!266;?S"333*Z]'.B["31K12:1)+/WOO9R6;@&<Y_ZSE5E
MG&)1E)0Q*OD,.22@6]RR/#-+=SF8&3^4<^AHYR*G92`71DGG..Z"?>W>E\@D
MBC/7=:I!G,5(SL5PMN+8<^E+M5,_F-]5\0S`)&$%++-,Q)"1C,"X9Z&(2S<R
MF1@:E4T[Z=R':-N[YXHF(T4MX11*3%<\?8B^:.@X#IU.-/I_\JZNN6T<V?X5
MOMW9*L\608`$^8@OYKK*ZZ1\/9/:V@>5(M&Q[LIB5I22\?[ZY8=(R1]BT"!`
M\<Z=IXSCL$^?)@ZZ0:`!T2<3:J>J4$:^_$RCS`G2*S1O]U5B]O&AS=6*&0NH
M"!6)<:QBR@CQ.8Y;*YQ3+5TR?+1C)6H`52T8%BTD2`UE0)5&F>F6)9C$'`CZ
M^.")D0@"%)ENB3(K,D&$Z968;]P\5V*:\S&%$G,`^MS*2P$1R;_-_S??=B;8
M9IGFVVSU=5.U\CDVS*`$(X']B,=$$.ZC1"#1-$F.TA`AK9OO[5ARIQ`UON/+
M7N_H.T"L>U_I-;)QQC!`3L9GVDQB[#"NISU:G)S3([N$3D&C+'N4.WO[H(?3
M%X_9<E]U(3L<2;W+ZH;BFZ_7FX=\^U2_H/SY\)=-?PY$&$\HX206:1!([H>"
MMU!*++#;KQS8=YPZMI"KY/&`R^M0>R>PK[POS]UOF/7W<1(>O=+WTI&!34:.
M@N+F+#V<V9XZVF6<)E)>.W7Q]<E\YW3J:W,U`=QEW[/-/KO-VCN`6.`+EJ9Q
M0#@+2A,IK;K*1XCSN)P;.*QIB)$%UZ5Y5@W=&I-NR3F0,4U!=$X64/+JC.\`
MZ,JK:+O4?5_O,=,G68.8G(HH#7/BM>Q8H$3_6\0AV7RSPMB>0\"$IBQ1423"
M**`A1B2MS$9Q(DH<L"VY`VV-M>'D[9(Z]'/$4%(UOTB,R"?PH\1Y*B\E3#\A
MJ^_KA"6:)R)6UMQY_8W"*DW:`O:J9&[V!BLJ$8M(&#,<(BK]&+4YF(\P@FB6
MP>,=R]3KE1^C4P,FK.F)DF/"#'7H(H<"WE+1HS(#>)N(L`SQ(+?V$@'EXW;^
M5-9W+^RU=S='09@*$J0^]^.H-(Y55\F1@(`N/#6WXKK`*H%5ZR0O1<5TK_\`
M,O7$91P>337F,AO[SW+2(S;#>9R(YEAP)+?]BIELZ#]\L.QVQ*:4JA0GE`>)
MDD30)%&XL45]E"*ME9U!!L:JM=I/Y1O=+5_#:-/XUCH&8X8*<R1KT&Y_,&L&
M>_Y=LC=PYS^(1=@!@%=>G_LF.I2D*7P%'>S#>T<"AA%B(KGW/_*#K41$I$PE
M92B#R*>,!6&H6EM<15J=_P<9&%ER2V#FX@&@#2RY;A@;)KDE)@N2"V#-6'+=
ML&='<O58-)'<SFL]R863-#W)-?#AO.2:$@)I.AY)%+/45R*(.!>8AE&`VB?3
ME&LMRP$>YUA.?]NLJB9=]142^KL[77?;UB5E.MVVM1&_[;8-<U8O._BX>RS'
M1+[=/;)R<*P6\_:(HB^P$D@2'JJ`1)B6?^Z&A1]2[>S`U(#CU[F&!9G9C(G2
MR`?&X`B6#]2(KKP:DW<`9900&-,&2`C&H,\L(7B/QJ&)P!EOSR4"0\F90B(P
MV(?<XML"77!_:PFG1&+"19EOQ(K0M.XU?K"D)`;=7F#P>,?*>I_OYFO=5]X:
M99KKZ6[9@FDL5%S=K*;K"(D%^J:R?C[`@]<+YT/)T*XEQ.V,2YDBJB**4:"D
M]`.*6/?D@"I(+:'Q.-=+,X^KC:XH0$CH%P%'_@,76O[[^I:-5CZ)VY[R"<##
M1,HG".+<..C`T7G_>29B*D7U<2S!2/AA%$55M[[FR1@'H-&I\3C7$_A\]6.^
M`0Y/'1;TAJ=E`F##\YY=?V:W5]ZGNX^_7]\*Y7U,O7&'[/WGGB$+X&8B0Q:"
M.#=^$2`K'N_</_AAF^^_%1\?1&UYE15UC7#]]#0OA\]JOKZI6"SKOJ+^Q>/G
M&BZ1*-&4@D)X(G%`6=C-]RD23'N19$1,4UM7&3,<&DLQ$XT$3,7>O7>V_+_:
MD6K[4^?*E5<[XQV]\3IW#O_`^//[F)$%K!9--,)F"TR7B+3>,I4]FL^M;%T@
MD%-8#+N$V_EEQP_TTH]BU5;D,DA87"W@A9PB+FE,TG9#!8II"+OF0_^QHRRQ
M57B@UW@`F-%;47-$"FR^JT!<[&Z.CH">A3,#EB:R8&:"_/6-&Z;.:Y?@4LW"
MB!')6)(D"@D5^VF2M,4]8DCO1F#`XQP/\`_9]FF^>0;6X#HTZ-7@EAF`C>8/
MZNYO[/;OHU7<4KTS<@V8F$C%#4&<&X=]U(K[N%N'^&%`E,"A(#3F"8XH35IX
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MFB'%4X2)P''"XB`0*:6=84:Q5HYDS]I8ZK?I;AYXJL>HT?T#=OC56)@8G5I@
MXE7#^[7"YYW1OJO#0<3QZ06L#HQ.LUG=;X5NO4)>AY%S);I5-J=0?-MU*'?U
MXD%FB+;#Z_%2FUDJDA3'**91BI`0,0XBWIH)51QHSP<&SQY'_0N#ZZZ,V=)0
M=\=$&>6NA=Y55G8X`DBT8Z[,!!G&F9[ROG7TG,X.H&0*JCH$?F[GS0"N+J2K
MZ@#ZS>I[MKPN#6V^KKZL,U84V:[@SXURK^=%TSN/BB1BL8\0CH-(\C1BK6CC
M@",!6F&P:=>QTC90?ZVQ>D>P7H.V:OY_R%<JP&9]-*U&06_EX5(!@"FX7>Z=
MK$8`B.Q9D7`1CHFL2CAQ+7?_-MM3TB.`JBW@H0^@$*&2*(@EC4H]IR'C1QBA
M'X.^Y]BV?5%%O7HQINO6HH:-1*V'9+"T.H^&37DU"L38&OL>HV8Z.R@VT]?:
M8>[IZZT%&K4U]WX[7V:5F>+P#8XB[(L@CA5+PA@Q/Y48MW827X!$%?QPUQ_*
M*SS>I@($U$$X37I"YY0AF)(UY-18+O71_#4;/2ID3-Q$9,8<?V[I#8)>?%7U
M5ZL60_B^6&VRHCAL_FDRPE!%`0HP#V.1Q%Q%2LA.G0(_@EV`-<B28PEI,;77
MU1F6JP/9U!.7\8B$*8TV=6XNQNICI4=Q[+`Y$?FQY,SK"[,L4J0O3(V--DU*
MRL<JWY>2<Q1%(E(*=>HG8JWV@&9/=BP\W?689H4<D"5-@7%&D*F@7*:X>L%#
MGX08\345R3`#_UHB!E"@>ZCG:56ZM-PO2KK4O_:K;Y7![NXKH0A../:ISRE*
M`L)45T6A2&L!?K@5YU)Q@@UV3&,(=1K?-D=C#:H?)["\#I?A49<A'((.KXS$
MI>EQE'<Y'7Z6Y+S7YSZ)6F%J"A]'[3B2VWZ)@`E;FQR*_.G+:M/<3I@M\J^;
MU;^SY?6RM+]Z6,V[U3"V*&%MLR7;+&_*'Z_6J]TJ*\J_*U_*Y6VVF_D$,1Z(
M-)9I&/I8Q30^]$?%.`XEZ);!L;&Y_DPP7VV][_/UOKY;;)/MO&Z!>MY\_YL?
M/`"FDZ/'4"\AG7+X8%-2M\YPXLJ5=W3&._6F_9C;^N/--TOOQ"/OX%)](?7(
MN;'ED/1DUY<*_D3R\XNYGT]C#`)GH0]YOORQ6J]G2419Q)7/,4F9CWG*PW:]
M%!,L04N7V@]UK/LM#J"JZW.B)\=.Z(#IZ,^9<*)ZK=D>N0*3,Q&=@>/.![X5
M%\PO7W^:K4\SWS_.-YT3%.$@(DK%$OF8)"'ONO-C+%D(NIUV6L@=:]2+!&:U
M>9687C`?M1#S\;/5<<,]B5SVG=TV35^+7>FV=R'A'S6F(R7#]MZMB4QA$R7'
M82)M.X2N)^,6UMFJ0"+,>)DU1#%)10DUZ"XD+:L"GD2S7=44P^FT.Q@C:(+M
MW-'?T%.W!2F'1+$JQU/MEC=?UX-OK/6>X6%T.I..&L$1Y\RK;O:[^A,L!?TL
M2O9G06OOQ?_M^<X>#79F-LMAL7`NX;<B>]BO;U8/V2Q",4K*2I;20*5IFF#I
ML]:VCXC652M6#3HNWQHD7@7%^V6U\9ZS^;;XB[7C!1!F]>:(T4F%"7[O08(K
M[X3NR9P<./+6(\%6:9^(GMKU2?M@@#%AX$7Q5G'E?KO:?/V4;5?Y<A;($.-0
M!#1.4A:4AJF*6YN8P%K6#S(TTN*YMSUF6\M]YNWRYFMIL:H;&!JNK9M1"UMO
M=\ZJV1K\U7%1IT'F-=`NM#;_'DL:Z_6#R)V(@-GQY<RZO@6"ABPOL.,8O<O6
M5:TK\F)7S/Q(IFE`J!\*AHE0"-%V-PL6/DD&+M2;FG4L9O?;^::8+RI8OVX;
M7-ZB`C9\`<"8:..:?@R.;93I)SB]`U!/]),^5L%]AD)8#3TT#A-101>>_;S2
MM4.>YE[HQ6.VW*^SCP^M*#?995E!7V^6V</95//TR/]]58G/&"&APC3D<8R0
M9+24[8.`BT#Y2"O[&QN3ZWW6!T^JO75=9M,X4R^['=TY4]:]Z;Y1NP7;;CQB
MA/MU>\K!A8GZ_[>X0C:=3S.^AEO41X^SYAYW:R2?W1$_?A@GL7_^`F[GEQT]
MH&PAOYD_WV<+_M??_WHX`A#(LC:C0F"II"(J9)B%K9DTU6NQ8_ILU[/W`=&5
M5V$":;,!3SISIUN*@'/@"W;,3D(9T`29BMS293BE:+Y4FA/!&Q?/"KHY&9,0
MY@'P<SOO!$0H^?UOI4!GVZ:@FZ^O-XOR1P>#21HDOA0H\!/.0Q[&P5&9*>;Z
M-\$-LN)8/$L@W@MPU7:\A?=+^7/=;X`6F-00U=%(!*X;]?!G)+;#B`3([FB$
MF@FPV8NI)\=]KI\39BMT34&B[3B2VWZ3@-\+;DM/\Z=O69ES?]UF=:^2MF\2
M8BI*,(T1#S$.E!*^:B<*'%$$ZLT[P(QCX2Z1_7J`YLT[;,"/`4-8U%O\'XE`
MF&@?07E'5)?JE7:>H9ZU?`NT3F3MWH8GN?5W#JA&QWM_BLX4E8F@:13X+)5I
MD,HX9J0UE:0$U,#(Y/F.]:>[_6J]@G^$-.)+3W!<4P53FHZE&LZE).8=3GJT
M90B#$Q&502[D]EXHH(Q\FN]*K<J69>'[N,G7^=?G-HD*DX3A))%<I"167'*_
M3:*PY#%H3ZJQ$=<;'#H\0#$Q9TU/448A#"8K+23OB.E2VG*.G1Z!&4SH1%1F
MN!^YY3<-J#?7FT_;?)$5Q5U69.6_>F2;I<R^9^O\M'L05F7%QA&.$,**",45
M2UKC@?`)1'SL6'2L1->;7[\U*+WM`6;]&7%Y!`J4*$M$Z^G5^!S#Q.MZXQT`
M>G>G])Y@O)28:5'7HVQVJ9^(S%EV*G?YM@(%L+G3_G77_D..QS"B"K,P0"B@
MB>!^F+8FTXB!VLD,L>-8[&IH0#D;1)N>B(W%&$RZFK8$;R]?NI!<]9#4(U(V
MJ)V(-%EQ);?_Y@%EZ*ZTE=6MM1,B?9I*1*OE*#]2(J1=84E"#LJU])_J6&)J
M(&;M]0',Z.F*&U)@*J+'AQ/%Z-SOT0<X11-1`P/@^="WPV2DMQL:B&`T)4E(
M2$)C(7W!9+<6C2+0H@[DN>.,=K/N]B!^`"/>`35&8_XR;>U/*/C9N`<2-:61
M#X7^WM@W<E][]/]MM5D][9^Z9")&HJQB4!H3RE-"2+>A"8<1B2#C'_9DQPIP
M``,<^D!R]`:_.UY@P_^`XU*%P@L:>B3`C*Z)B(`A^-S&&P,5@OD?+XP$C(>!
M1!QADL1,D?8^'8%Q)"1("$!/=BT$#1BH$,#(T10"9[P`A:#!<3$A.*6A3PB,
MZ)J*$)B!?RT$`RC0VWT,/#M2W*PVV?4N>RIF?BB3""F58D*#\L]A[$<'-"3T
M4_TSG.X@.)86HV->A?>/R@&O]@"T*]=AJ/KU:T)1@@G=GR=`@#W5TPB4V89K
MIP'3VY=M3-\[,]E(\9C"CNX1O,Q'?<D->\><-&3XE)4O>8GC:_;QX?=\M]I\
MK7>H9\6Q">$L)I$,$0VJSXDT]I,HI'Z+)D(A:(.F(PB.)]$CQ.KD]/<:9-7!
MO4$Y]$HAV^'02_0G$`G81-EUGCE!?.6]#$V#VNM@=Z?<+]2'!D9N3YWA.%H3
M*4A<>WFF5XU34B]\BT<QPZ'/&9."$HHE3Y$D/F_AL@"!]F=<"J/SC6P3O"4.
M%$.8YD\Y?(:3@MV;-L[TIIU`.S,;\=*89R[UADQL(KH8#:/<C`$-BX7^X<6'
M;5X4,QE*'$>A2,OI4BJ2TO*_UJZDPE+O<$UCCB>7&H0GYMOM<Y6;LJ=\#]X7
M/9Q0O0EB5"YA2M_;+KRX\FI\D^D4WM#5([36F)Z(8MKS1[L[N!%1-C2,+1;[
MIWW=R;(<S=O=ZM_-DB>7`4*^CPA.$R%4&`<2M4@$C<+9)OLZKX^MV!`W4Q1:
M0S1IAN@;P(!5T@Z==PK/GO`91V&P%#IEWHDXPJ,QMEZ>X=1,08<&:/J:.MA#
M?96U0Z8-W:UNO$$^ERP*48I]&B>^"OU`M59Y$B>0:]`&F@+EC?#;S$H([K)&
M+2H'"Z5M%NV*XOCW@?539:9U$(ZGKVL@;_0U#$X2X&SP(G_*[N=_R%6Q6.?%
M?INQ+\5N.U_L9HRE`2(*2Y8*XA..<7(X!I,H@:1N*C+$A+OAU:#R2EC>$9?W
MCQ;9^$=2SY+4,[!L4#N1467%E3>'3FW1`Q]/(M]4WU^RS>*YZ0#L^SR*1$PC
MR3CW19R4X[DU&"0I:/NGN17GGR*Z474"#=A0W0*70&5R2J.Q+H$8=*M*KPG2
MT21C4J>F2.:.G-.C@=0,4J.;;I^.4"*,!4]#GZI4R2`0Y)!2)"DG<3!4D?0M
M74B5;L";$"T1:RY/;CBU(U%:=(ZF4S<]NP;M,CQAO3)P1D.S3"G2UJW?Y^M]
M<_G2>IW_F)?NR^PAVVZS90FDKHG$8W6.[WK3K"S,:,I%0LH,C@L6XTA1YOMI
M&.(H#B/,])IX.S/N6-TZO/5M\35@;[59;+-YT7/W[$B\ZRG=12F'B=^1[0[K
ME=>BK37Q<`/P]2$$WB\R:_[TEZN?+H0Y44<HNSV"Z2Q0$]%0=_[E([WQ0*7]
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MC+`D)=WT(WV]/H/C('&L]@W6ZHS=<X76RTN4WD.^K44^.P$*.8SN/CS]HCZ]
MR!BO(Y\@NO*.P:H=\#H/O,H%K_3A];^96-@`K00F%3ZSC@*CA%&OL\!0-M^9
M>L>-TA3Z#(SG;'Z)@0`LM?YGER_^^9BO2\8+]:_]:O=\F^^.VTA(PA(2LR3T
M:2IBH4B45!W+D9*Q3)AV7C[0BCN-/@7V7UX#S:NP76ZK5#]7/=FS)9(GDB#;
M\B9W\B9:&67';5OWV1\[7GK_SUF"PU2EA*!4)%C(%*M4M``0CD`KS_:L.DY?
MWQN%P,4'BPP/D337Y-I2M],]H152KX8Z#:E[AT.PZ@V)PZ0%<)!C6EHXG#I]
M65P\9LO].OOX4$/ASV(]+XIFRU@@26D5!2P,9:G#`BN&FWPGYBJBH+["0^RX
MEKX#M*J.J,%Y7YZ]&I[AKM)!G&I*WTAT`L5N`)-NU.T\37UZ9H'<J2B8#5=>
M:Y8U>@#)VWQ77[];FSH8KJ]7\&5UG4(<)Z&B3,4A)KPSR/U`JX'I<"N.%:H9
M0MV@,KH`90"%NMG8&.S!!`E(G*,,ZPPOO1G54"ZGHC_#'7F3,=FA1O]*[A,[
MS:T;,RF0(G$I<"RE01"4IE+46>()J$(T>/S(:F-V`8L);7I"XYBQ80ISF7M9
MWE+2(RX#^)N(J@SQX/6EW$/)T,]ALFWU7??3]K`+LS;9WDH9,1P&?H)PC#@3
M+*!'DSXF")3%#+#CNM*JH7G,Z\`UPP::R@QA4C.9&8E$8'UUAK]+70+1PU)?
M<F.!VXD(D1577B<XUN@Q2G%NNI,WB2]CDG*E`A+R-)*"D"Z?PDB"2BLS"R,G
M.C?&A_4,"83G.VZX&Y;R:-'F/.VYT3B,-XS)B6C.0"=Z\A]32J`Z\WF^W<XW
MNX_;N]77QUWS";Z$D"WVV[H/IYBOU]F2/Q]^KSC\8C%+<<I3+DBBA)")*+60
MRQ86(;`O<ZZQC*5=/QI@Y7OG;2MD5]ZFVQ7S'^JN;;EQ',G^"A]F(WHC/#V\
M`20>`9"<J(V:KHKJFIV'?5#0$FUS5A8]I%13WJ]?@C?)%]%($"#9#QWMDFSF
MR0/B(`$D$M7@AK5M_!#KL=T?5,-?R*8VS=:*(%E<10,J"N@_SFWWK6V[<T;3
MV0.+#VWWCXNV^_9!VYE47%72/]9FX\VY+A4W[^[[>C\3S=-&AOAG5F[S*OM:
MYMML^'+`XFQ"$E`68LIB1`*":@0$]V"0':/)X\%D!(9'@1Z?]20`"MG0I^C3
MV9^@X[,2KTV]A^;XVC?'.@7[(W:A,JVMM=8LSOJ<E)%DS93*G0:Y@N0I+]/N
M[I>\V&T(CY$7)I@2C\:,<A<';H*"!+,XL)-(*BU$HSG#$MOR;64#+.NIP04Y
M#Z")UW$]78A2%?'\<A;/+Q?B.3#\=2F&`<<JYF=:[>R$'L;E#D=(<?+.X&*`
MT#4<<]#L46'L[0.-$<7C8W%H%Z7;&\Z[*\&^_/M0J^M#_I0493]Z?;GKI@T<
M!3Q@$?&8BTG(W82)LXLA(=SAB1=0^3'#B'G#8TB'5(P<`JI5]%A%B+AM/+*J
M9C%5'!C,^B@2&LZ;;!^9L6?QI@&.12WQ#>`;JV^C#K,U@&Z.D0V1?2VD'\7Q
ML[4)9+1:O&T41R]#;20YGJFP=G5\,]H$JQCOS'I8S/8^2XZ'NRS??,[NTWU\
M..;'YR8)S0]]!U'')I13CGE$'1)T:?JNAY#4DI3*<PV/8`T<J\4#RS]5(FE\
MM#'-#VP8`5$SLL939=M?[XL??ZF]$\L[OOA!:))_L:KSCN?OR,T4?A;6D4G0
MB^FO!Z#GMT_O<L8\%%"4.'5@[3B>1RF-;=H_W_=BJ4+'X(>:7ESN7FE8_B><
MFH\[NS%68#U=FA`-O?S2Y2M=7(F5%?1O-=S%Q-<!N"'U-2U%CGGQ^)0>GKOL
M*]\-?,JB)(X80DR4X,%L$!$W"2#;32K/-]S?6TA6APFXA:3$E]P&D6FJ8"+P
MDJ6E,B_?X61DTV8*@RO9DIGD0J'OA0+*R+>LN1>NMGA\_EZFARK=-B5YF_,J
M7F0[GANY2<RX$^``LSXF\;R(@X[73K%C>@.EA68UV*P+<&KGV"8Q*B<X<Y$)
M$QYU'HTHT`A)(TJD@]J5*)(65PK];YX>A>JB*]_U*0^Q%V#;9XQRPNRH-^K@
M@&C0*$E+RZF4VOFWB;Q.4BH#E&K3JF4.R(T2!=<K(,'K5BRH,W*:I421W!;D
MW[+R/BOI?9DU!X&["(XVU:'"*/)XD%#LA11YO26,,)?>8E1[O.DMQ`:4-:""
M;#\I\B6QY6>>*ICNO&9)8GJFC2[`;IQYVM1VV[[6_Q*[SAV-M\]-G>OTL3C<
M6\>'K)_TWECL^]_;\M=M:<1TWY3)_O6F^7WQ9?>$WT^W[3=3=^+>9>S:3MLT
M>M>PDS;1@T+;NP9-XRX./VIMJU^)[DC1[P_U7+OZ5%6G;.=L(I<Y(<4)X;[-
M`FK'F`U6&8+=Z3+1E&&Y;L%8>8/&.CW5D<]V``S-SIY(JEPH.2.?,$T_`QO.
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M=FFY>V6T*P+`>>QYW$F0AYA-`]OS>=);%%6NY?5_DAG3@7H'SGKJ>E!7YO#Y
MIJO78OV2'ZS'XG!\J/X3I%C3R)49!6;C%3@`])2^%J4;A0(M$VF$:/YL="K*
MO3JMDC(_1L!5A=?"VBK$78\GA?97"KA\_+?B1Y.Q\^EPQ7QS+WRZ_U;L]TE1
MUGJWVR`'(2<@$?$QC7V/<!;'/92$L!"RHFS"ONDDR0ZRE8N2$5>ZF=7AMOY'
M(+<ZZ-#T;B.M([<NO73#P$81,VUB9`5;@=B116V3S;22=6ZC+A;SO?70C;UW
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MMLS2*HNR]O\;AQ'BT"#P$0HYQLSC2=0#XGX`.@AC#H7AV?K0=Y_*XD<N,OBJ
MO_R2[OYYJHZBV617:6=H#2WJ.5-#Z!?4,_#F+%\#V?JE!S_23$L([766U;57
M0\O],>18AZ,PA=9&K?;)NX,Y1DD8!;4].Z2(N8CTYI$;]I/W^+#3.W7_R"Y\
MZMY#E!:%^@^D9NU_\$FE+-,KZ;O:W5*<5,)HDP^F+O?.ZQ?W^"Q.HQ_I81?_
MZY0_B8B@3:/RQ=6G/L($(<020A+';NU'*(QH;(-B)UU&YTU#;9#6([/`VARY
M']`"\RKUDR\9*BW!.WBQ;0K-9F(?2=K&0AW=S*]$'?7[]3J0,4,<)&YYWRI[
M_EX_J2D1%H2.1RGQ0Q9@+PY"3YR4;DV3.'%A!XHTV#.?[GF]B]Y8`J9:C4$M
M7$OO.LQ*LT81E&385)3X$6WC$:(VTE>B?UI=>AL9:J9KNNH)PUV),81B/V8H
MX9Z+$\_W.$-!;]I-&.B>>AWVUJ!Z:C4+M;`]4?<,$6U`]Y:I9"A!G(KR*="^
M=N53<4E6^93IDE8^=LKW8AFFMMK_^.E1K)0W63!55\<+A\R)7)>Z=AURQH$;
MASCLC2>Q+W7OA%Z+AM6O1P94-DULRFG;_$3"U*T'U5;KZ_]Q"7&ILO92S(W(
MFU[F5R)PFITJ3+ZL0)'[G)ZM5C6"=RPS/R;$LT/N49O4(&A,X]XR"A&H`K4&
M<X;E32"\L6XO.^A>[(8\%/N=E5_`!>J?#J+EQ&]FCF'*U]([P&OX78/N?4S:
MB.AI9'PEBJ?3H\+8ZPD]SY%N'_)#5CY?QI&=2<>+:S,!<P/L!+8?.';D#R8#
MN3-Z.NP85K?S^KGH>(\]4.C1BRE$RHG87!S"U&M`]7HS8AG1&B%I1*UT4+L2
MF=+BRNMC#MKHD1:FY%0>FN34VF22_VS25/NPCR$;LSC&C$8!H;['N-M;#`@#
MY:E-,&-8E@9D3;^ZZ[`!56D*BW*B-!.!,$UZR5T/:RE)ND[1B")IX'4E@J3#
MDT+[2P>=$_;SG7=",Q0PSW9L.TJB).$)3F+*>I,8&"=-L6-Z%CA,^3Y-F/)-
MX5%RKC<3A<!)WKOL+3:UN\[1V)Q.`[,K$24MKKR>Q6FC9_I.Y.=S;9?(ICSR
M7"<AG$0!<Q*[WPF@)/9]+1N1\N:6W(=4*1"ED^F)FY!F2-:X!ZE6%\KP#N3G
MD3)2!BA?B;[I]$AV^U&5K.EJ]_<JNSOM/^=WV28(XUIG&;,)1G9<JVP4].MD
MU'41J-B(#GNSZ=W3T!^S<T[`J0%J[6ND3:FIYRPMI2M-::5]HO898EQK`D:+
MT1(@UR)^9]I4U$^!]+7+GXI+LOJG3-=T`6SK;&.7V0E&7NR'Q&4.14Y(>ZL^
M1:"%L8FFEI6]^_%*\T:XG2AP^FG5JFV+U.X?Y4I%T&`DKUW+@-[(RI@*2=(*
M1K?;T^.IN9LWRI[*;)LW=0KKG_=9<ZGX84<?B_*8_U_S^560FWHF[3K4B4@2
MA8105Y01Z?%1/_85ZGC,ADVJ%T^N]''ACK6[\`>HB_.UF)R"KJN5E+3VLF4N
M?;BQ!B\:_;WTX^;U$;N;EQ(]LS;K:H41%9^]H5>B]_/[72S<PW1%P;]EQPUC
M'D<A12B)F5V/84Y"AZ4''$1H<RR.Z7YB#"QC"!0!#YCT1,#6GZU#)GL;NQY:
M)X:_NAG5&OS^-L;EO*%O#44E\(70NQ(9U..+;-`+)TBAAL"W[$=V.&5)[6O\
ML[FG?L]/U;%XK(,[>CR6^>U)A'I%4I19?G_@Q>E0?YA5[/FO67%?ID\/^9:6
M6?H]^WED>W%)8!`[MN?$R'.0X[I)'-=A>PO9=UR?!6IE!^;':7BYX+)20>><
M)=XXJW?/&ORSS@Z*>^PZ%ZW!1^OVV3I[:0DWE<L:+/`^R,GT'^55@*F\V;>@
MJ[Y@"4^MQM7E"C%H;[61,6<-[\I*AJQ54'&U0L32S0,X9-A>'\F+Q]O\T,X]
M\FJ[+ZI3F5U8]VP6\R!$7DSJ^02/O*#+]`J3@#N@,SB:3!H>QIKK-:M<81%'
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ML[#&3&(C;D<11*>@SS8L3#T<JVSQ0`4)3)6<`IED"28Y`T$=E)GEY141(WJB
M2ME*!$09?J'GS5&4"%Y4QZHOELQ9P&*/4X=@AV*'83MT>UNB<)2*3H`,S"46
M6P%*42E@C,'DPAA9BIK1X%GJPJ[W2)'0#R4.5R8B:CY<49()A,`F2H/!^K_\
M;-*V'8ZI'Z$H2I"3A%[(\&#2=@-(YL44.X83+X9.\U06=SDTR6(2@8!9T0S<
MJ4R)SHK3XEI*<T8X^F@J-)'9E2B0%E?>FP1IH4<^MR*[%]D;W[(GD8]VN!\6
MBKR$4Q9SEE#B.G80^A%);#N(2.@B#]NR9\F5GV]P%[N%9`V8EEL:O<;.V&[Q
M5$)7TG^F^_%ZGU8/,=`;A[AP]U!;$EL>W_+J?_NJ/DF8$-%78Y1$?N*ZMDLZ
MJSCP$6@I8:(IPY.%_HZQ%_`L@4_M9F!E1N44:48R8;ITG<>EBER,4S6>1JF#
MXY5(E2YOWK^920])\@-^NL^J;LVD0_`Y/V2=T9`S+R:XGON$+B$VQI$3]T8C
M)Z"@=,A)EDPG-`IP_5+?S7!/H@`(S4:<1JAD&#4;E\!8ZCJ-2XG6*%5C@946
MBE<B69J<>1UB::3H0\%*J^=J\WNQ3\O7!1-C[!#'Y@3%W&4>"?P$AYVA@`9(
MZF80]:>;%B:!25*")E`T+COSL`.4&@$'5!Y5%U>[8GL2O]^,T`MS]@*+*G?2
MBBQ\:G36QI[=J.Q5+]]1UNF,+*RF&APH=+T<$-7\6NSSZJ&>`_]^>GK:YUGU
M3M59G,0\0LSE&",6X9B3I+<;UC-E+"VB.HR9GJ'V$"%:H85$"9F=FS_@I+1'
M9_7P+`JL4FV(6H`JSTVQFDB?J:YZJE^<29VJVA(L7!-QG02N0=.U^E,8>M/`
M%Q'4RIBG^V^98"#?BQM?1"VYSJI-W#!"6%14(MQ&01PZK+<:8`]TB>A$4X;5
M_K?B\.>J6^,OL^84/O@J@FE4RLWI9V11=8-D`-:6I%SN2H(QID;F])HH7LFD
M7I<W;^XFT$B2\L;CI\-=43XV(^;GH0RFGQ`G=BCS$UN<*?=MC_+>-DT<#EJ.
MU&'0].3_S=;D!<HIQ7?UL*VVY6N<Z*G;OW".9]D,?H\WP,;P)-I7HGAZ??I@
MPU@#8=+J]]M):.N7NR]/F=CXJ>/%%DRUP7%LQ]BIY_XX"&I3Q$^BP2#'H!*4
MZE9,AV@-,%%&X+8_2-I%;-!DTPE$RJG9/!S").Q,WX#*^OU#_HR(UE5Z1I1J
M.J4KD2<-CA2ZW[8)V\&BA$_]P(2%=D00P774YR6>/4Q.N>>RS8^LO"U4MH!E
MG@[I,I=`Y'M.=NQW*Z%*`V8*OK.KFR*8J@R[N/-7ZWI%@N0N+82NE2B&,OR1
MG5@X#?+9ZKT,?3ILB\?LLZAKZS(_=#V$;<?U'&ZSF":T,T4\`KN;7.7YAD.3
M\XC:8K)^$:B@%?^5B),3#-.<P40#3)>9;/2WG(QHR!0&5Z(CDUQXG74^F0YI
M/7F3Z_8U*\4'Z7WF;!**:>"P*&RJ$D1^'>WT>;J$.32&A1Z33!F/0U[F>)8U
MO!OK:0!H_;(74Z+C0WJP7/0?<_>F,>I&NI46QE?2O_3X4AAX):'EXJLJJV</
MA(0!\7&2V`''E$:88J=_NH-BJ=U^X",-C].?=C5S^5W>5(5H(4'KLDM2(S<L
M&V`%-A)_Q(&9*N:-T1%1`-*RDNX/1?VZ_K>*TX!!]/$Q/S:K`O2PJT5%C-W9
M8?NBX,^Y=$;,8^+;"/EQX@2^PXC+VH.LL>>[,;$A75^S:<,2<8&VR:1X@1<H
M%KI)EQ.5!?F&B<\HU2LI#`@C<S30,=(J*]$^4]Z]"88,DBBMI=^RZECFVV.V
MXVGU((#4_Q,).S_2?0/MR-.R?*ZA_7>Z/V6;F-+:?,B8(R(T4<30L]LZ1(Z/
M`P):_-!MV[":GN%:VQHH4#^U$RTGH$MR#%U]'>@5&%L5%3]<H%WJL#^0Q1'I
M--4>*]%.8^X5\[S62I/+X:!US)#O11'S4?U0-Z`N=L*$>V$8VB'G7@*?9$H_
MVK#V39A?RK,#F6<:(49EOKE<[8271'PX!04SMA))447_[I14D02@('2#U&",
M)[8?HXCX;N!2Q"@.,.F,$0_['+:PJV;#_(IN"^C#I2B#?>$5)Q]V"54.5]4S
ME)UXMX-,HT1^"4=JU*ZG.XF'XX10+Z`.Y788L-ZXPPD%;HAHL6F^'_7!KYAD
M-(=?.J1SKQ9,C'3UTKV2+J?9J==+`@8H@]RK*^YKJ;YEVZPV?;L7>16OY2#R
M75=LAOJ.&T8^I<2-!]L!Y2$HPM5AT'3<VV&TR@$D_/);#;1*AL9S,PH,F'LR
MS_B:7*MA5K]@+"W!W%@XH9/XE4B=7I_>7A"KFS`M0K?QXM!'46V.!Q0[%/D)
M]WN;##'09M$D0X:%[7N9[OHTBW2_+_Z=UB^%=5>4UJXXW1[O3GMQAT/;78L[
MZT_>C>_;35CR)_<F]+&5'JW_.ATRR[-O+-&IVLND?Z]?K.;45/^Y?U-+9_64
M;8_YCVS_#$TCF]96TU53:S-I5LL52:2B-$JS^P>01'E?`%(()$BN.,;?#[?Y
M?I_MZDBSJ;>Z81Y.<.P1Q@A%H1<D+@MZ(PA'4B>CU9YL6.1Z/(TT%0(1I$@#
MG*=QO3%/$4Q@!G9$/8LOYMD!U*LPRI)B<8HR?TS+?/]LU8"L;;]=>[2:PW/%
M08R2XINJ*0CW5.;U<'I\J$?)O+(.Q=$2#C6I6G5?SYO!M1:<9M#M_O"IK2?V
MJV5]K__UF/ZS*//C<_=ME5GI8SL<I*7XD[LJ.XHK9&_3O7A(9>6'[?ZTJULS
M/UB[EP7&?YU:..-U<[PC]].:;0TE,=3!%SK>7&`0^^GPHW[YBO)9''ZHAX*`
M1RX)?,]S8CM"]7!QMH%!MXN!'FPZQ;'#`L]6@M$C%R<:8P8FVP.,)<XI77(P
M$O0I4;62($\->Z'A75&\F.=[^K-=N[^(&W%$:VM)0#C#N#;L>B'J3?K$B57N
MYU&Q8U@@ALL@\O;LS3']J7ROEQ*-<LHQ%X,P(1G(JV%UNW:-I(B00ZPTMT<S
M:+\XL/3E/N^0-Z)`.BA?B2!I<>7*C3_3Z0%$+**+?A<]]#S5W6`>1*$?N9X;
MV#'U&,,,]\;"Q)4J93O-@O&LP;O38==$_A-$2I$\V<#&-&_0"*?AJ0'T8O5K
M&0%ZEY[1X&<*G2L1G8E.O`F'IE,"NV'L13;#IIZ"_3]UY];;.([E\:^BAP6V
M%W#-4J2N.T^\#K);/5VHKL5@,0^&$RMI;R=6QG:J*_/I5Q=+5IS8YJ%(F=M`
MHZM353SG_"7^='AXB\(XERP*>5;A#4>\6\5`B2*@8[0,FG>,&$CM9HQ(>C1Q
MK`\,)>V=85UR<\6;PMX(<@8>(]3SA!QC(OCH.K`Q8IBMVYMS1A,I8Z(4%2F3
M$5-8=D98@CGD'D)8RR!2P&\>_%;_E>!N/]N^,%_4JZV4YA2<,Y&`<VY7!84N
M(\S4\@0/ALZ?6ZP(E`!RP=ESL=F]?JG>D=WP'..ZJ!/G"6,R#W-4&6(Y3?*,
M=#8S3D$IQ2A#CI.+SK=9T'C73*4=#C__=(4:Y#FUSO0:*R)[THGLQ/+^.BY;
M`HVJ8?ZUTF#?L;&D5*61#%F:QC)#44)ZJW5/'UO&!)B:JI+Y9O#[*?A<KA^"
M;\7FR4)5$R*L>6'3D::.:YL'KSTH;QZ<`58X#;3WA&BVHM&H<QJ+!"AU[JJ7
M<77[6/1&Y8]Z>GZU?OA+62[_6#T^SD,D*,XRDN756$:E*([#<&];I11VSJT5
M@\XG<SL?]QWR4O+@4%K=NNC$JD++I$>"MH3[J?<QZ)R<^OPL'>'.%E`MZNX)
MW^S&]*Z\:ETPDVKK`*QYCE.N,L(KI%96HY2&'5A5J%AD6'`%6)BBYGH`F6F:
M9J@>N!+K2+@QQ=BK95P?RJ)7DC60T1/^C`SB=&'66!+H"7Y"X"0D.!,L9@E2
M'"65L7WK<2(0O"A[L<E)JK%>'UNGJY`G;SG4ZX^/K8,%K?T>?UXM;E>/JUU[
M*=JON_+N]]_*QTJ1;5UIV;WV^YYH/;U!B!19(@BA".>J6R^F<)R!;BJS9M3Q
M]W3@9[N1:.#IOP:MK\!OJSV]]3ZW5Y$:]@4^5KEU['K;+G4E.P,JZZI[@C+[
M<96.7U=S'!YO_,2)$"'%.$1IE(M,\>H_G<6$,=`N\Q%F'".OV_0\\-"<<&`)
MP4QSJ9XQQ3S8.GY:(CUJF>KJ'Z>,(SE-IG'B@+>$?UF\UBO3NGGE#!$:YAC%
MB.0X3IA,V-Y:B#*"8(>&FYEPS*!^D_%SZY;A]FRH;GKPF4`R&'AZM?8>77LK
M]EMASHWFQBGI"6K&1G%BX_4H4?33G7+]4!<(17';K[272@D:TARI7"(JB9#=
M0#-$"8'=)&32_D0)SM-B][)I!QWE??!8.?JI:NTI6%:N0C,>$Q4U4QW'`@)S
MG%ZEVI]#FO-SK^74:<Y[><[E-R/$](0VHT(XSFA&RZ'-&?GT_%B^%L77]N+W
M][G4/):Y2"+&...4I%E,6+<C.40B%*"YF?'6W"<XFY?ZQ.[RZ;E8;]MU'W7I
M8]-Z;+0;QX+&>DR:5EX8H3K?/G5*?C0LFQA2%_4Z@RQ[6GL",(L!E:Y>2_B*
MW/J,C+\M-IO%>O?:=.[%(W]<;+>K^U6Q[,RG&1,<YQFN4K>,<XR4D)WY*`M!
M!W';LCD1Z/[8^QD4/VK@G1G1N5J<JZ/6F7YH6V]/>J/UL-ZOWG4@&VP92+?:
MCE?_K@[+\XEB6:RB3&$5,13F7(;]B(HE(7SWG:$=QSU0O#UUYQJK&CX6YM+:
MAI%R>M+!K(3RT3H'*_+HGXS]LMV53\6&+K\W!SOUYD+"\TQ$1.12$BJXZI9O
MA2C-<]"DL*D-Y_6"UJU@63R7VQ5X:YJQ='K)^!2JP5+P7K#.I6OEW2>D.0.>
ML6)Z`IW181R?`&Y%%LB\1YTT?I#`LYSF*(H2G"!,XDPHI4AG,.8Y=.K#T,HD
MBS@7^\SYT7@>=H2,VC,A$R@(G@QI9/-@V']2GO-3(B,E]01!%@)Y/S%B11HH
MA@:GA'0&L:@/ND4AE3C%7$DE0M;7$?((M$G&W(IC#-T,S@4RGX@U51!$(,?B
MF1%HN&7RR@AZK\]E!(W0U"\$C0GD8P2-EF;$:K1YE*092C(91X*P".<RBI/.
M$E)(0A:<&S0/@L[8HT#,<Q\3X30G9-UJ!IR/O7Z6`TIO1HCG"53&1'!Q01E0
M#*-5'H.=,:F,",,IERJCA$0XJ;?@[:WE/`7-1QB:<)S#O%VO,&)5!T0U38ZX
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MZ=`(.ZZ7#QU<:U;XOW$.NI1HC)QZY)A*21A)#$5TLZKHM$+G5A99T-43]E@)
MY7B%D35YM-GT_FR)F_6^XOFEO3R3[G:;U>W+KJ[+?"OK7*GRJU*J:O3A9EVQ
MH-@>]H"K*$LI2KD*(X4SS`D+#UYR0>??B\UMJ0NTB9V#]-QA'-H=&'9PCI-^
M:U?2,UW]2L_.$SI<*_K2BPX$WCFT'Y8U[M9'0!?S-.=1E/&0Y#)-1*)R3E!G
MBN=2P'8)P=MWG`_U+@7;VJ<_!R%",]3^&VQ_6VSJ0Z!>=K^5F]4_B^6?@W6Y
M+H+5=OM2+('9DI&X>EF2:UUAV=%!TL:=67.6>#$+;BZHYFBKU3MISK!RC)">
M`&]4".^V2XV5`S0T*]<#.U&<D8QACD.<AY&(0Y9V1>TPRQ/0!FQPXQ,,PLIU
M1YQ_07]"8?"\V`3?:^<N(FC_HQ9"S?BC?-EM=]4OJD_%?P0AF84QFF&,F]_+
M9UF4S7!,@L4N^,^7BEX$S8*ZM\S:,P2K=ZIXNBTVW<^C65`U_US<[5;?BT?H
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M'LBW@>;MOL(WOG:+*WZJW?VW_BZJRN?I-ZI`%#V'14?/QA=<N@KO_587AS)J
MX_5K42_#*I9RL5E7@ZWMP"U1W*_N5KMY)-),4$;"1&0TQ!78,>\M8]BQS!;,
M.89HYV&P;/T!`M.&GGJ,G%A*&!9[%3OO@I^&I-P[./4%59<E.\,]BWI[@CJ;
M$97.7L[1LXYS13@1)(P143'B!&4RH9VE,,H99%F40?.3K([:OIG_*TPNSC!1
M3@]5CD6#H>FCF=)@.%<5[,IJK'J%99KO90)-@FIKZ@E^QD1P<3(2*(8V7GY>
MK<M-,]G93F#.,<X3E<94Q91(*3!-2#]Q29,,M&0<W+CC7.CMG&VPVKL%Y`I<
M,CVJ.%7+`5..U+RYJ*83R!RK=@8QQ@)[`AAS_TM+;]I55DS-PR3"N9*IPBC/
M%"4HRD7GG<`1'9?O.'%IDAS)4E;DYIF89E)7?QSC23D+^B""?12>PM.._,Z7
MMFD_7T]`/7743I:R`46W=G_D/(U2+G"69#&7"8\E0R0;+)T#W9`ZVM@D(+_"
MK9&75=8#^*0"P]#\\2V1GET->8:=UJ3UA(KVX@%>`0D42C^]O?NM6+X\%K_<
M=[?3?ZN!.L\SP3B/XU0D%29CSDA&$4I%GJ41HB*&#*%-;3@>27=NU9-_G6/!
MWQO7SEQ<:%=%S0QS`@&!*:.1=F[ROX_%.9?0C933$Q:-#N,XY;(BBS9Y.B.?
M5^OB9E<\;>=IU7XJ.*\:E5Q*GD02[0W%C.8IA#GPUAW3YM!+:I>"QB<H9@PD
MTP.,6[5@:`$*Y80I[_0X0Q-S[3SAR(@`2ENOD2$[OE;#/55N_EALEO,\XH*I
M,$TC3"*JPD3EI#.52@+*6$S:GXP?M5/!WBM3@H"$@S'$E6:F%-&4RRE'!IIH
MD,1$0<]88A3""9J8RP'FR5\VY78[9XQ3%`N>)*HR0R+"$]X9(6&<S)^+S:JL
M!FF+S0[&$[WV(;WBV!5P!YD%#[53L^"V>%BMZX4A=4[_6BPVAFC1U!`&%?O"
MF>%D%C2>7`DCC6T-@,#4\@P=0.=/0,-$`C`N;IZ>%ZM-L1RLI&I_5)_I4*\4
MG:LX3Y(0A53%,8E3&L=4=@YD4M'YNGBH_]H74Z*,=T&KT^1MISGAK4$W6NW]
MGM5WOO1K$%>]Z\W">'M0LO"D8,":Z+F,A-E-_Q2&*T$/C@:?KP>[BPIJ@-#>
M4_`,DA8#.P%0V]*!X3K/<BH808PB$M*J71+F7=TI5HBDYFG8Q:8GSL#6]4F4
M`-0Y[7<:W4I;/\]ZC;[?)SH%,'#P._]MLUAO'YN;T>GR?U^V[>%0\Q2G-(KC
MC$B&I8QQFJ:]U3AC1H510U..JQS\M^K_BGI'ZGVY*58/ZZ#X<=?^;%,A"+I5
M;JRNL&_^!)*:?N@'K@4#WZZ$F(^%T@#/2(4]P]'8:$Y`RHI(IJ635!&>\T2F
MBDLBF"0)VQM)9)*B_3=;KI=&A9,+K<,_VYTCYF63HCX9Y3[XQTOU_2^N]<T&
M%@8T9?2LNP"=/U\8`$G@HC"0<LQ9C!@2E*B$1A+EG0,L(?QM80#<7\8[8%P6
M&-&E-(L"7G2YB8:GFD_)LZYJ,3#SX2E(.H/A:8(DY;%B'"G,4$SIH?UZ5[CI
MI^YBPY-^Y9JAJ1<=3FM<JBF=9]U%W^^3XU)0X!=?]L7V=3L79=6UJMY$U]4+
MM&M68%>#LJ<VL>S."$4X#JO$,E>2YRS/HB3%1,51*$6D1,HOG2UISY"[453G
M7KL`MW$P&'@8_+WS47<RWJ*ZRWTKS5_S3.4WODVJ]A&'ZO`;NJ"$H(8MVH)\
M`!W[8EZ91@X"*EV]=YK\6A:K>6OL:_&PJFVL=W]=/!5S@24*,TY898A&>93@
MJ+<C4:1U+IYQXXYK9_O.<G`JJ+W29)*Y8N<!/XE8,)Y#=3J3U6R+NS\]E-__
MO8JR3FBB^A<U::)!'G-*@0_0,EJL*Y-DO/^EI;<&S`E>$6JS>+Q9+XL?_U6\
MSH404L0B)BFA0J52Y!'N#$444Q@HH*U/0XJ]5T'C5E#Y!68%6#5=6+@4S(@6
M`*VL\>)(A+/`,!7,&V(8!_`.&>.DT&+&_G)HM=K>+1[_IUALJA&V6.R*.1>,
MA4E>-9UED:)9S%#:V4)8/[\P-N!Z?FY_*W;K6%![5B7IRZ#V#4`/<_TN`V02
MZ6`,,5/-`D=.:7$"):.E\X`FXV,H+;Y+X#Q$K1Z+#:],/)2;USGE)"&*<I21
M.&6\OA5!MF9BQ&2H=9"1:=O3Y""-3T'G%#@!`<JEFWZX4\HH^=`5R5KF\2;^
MLWF'F5(><&*4^^]RCC$R:-&AJZ)\J_[*'(LPRE/%PP0A(5@6IRGKVE<TUSK]
M%=RH8Q[T=;_:&0`'8,)<!H`S30R+SN?EL-#CAP&?Z.I&FGC0Q\W\+D>^#`:]
MNI\Y;Y(+@2D3B8I#0E$B9,X%[PVQ.`-W;UCK4_7SUBN3T8.A:OI]WYU@AA#0
MULHB#]Z(<`$,9H)Y1`C#`#Y`Q1@I0,PX#$I4]9/MG&=Q'.:"4YP(E,0A5PQU
MIO)<@JD!;7\J;@P'T8UG!N0`:Z?/#I>R&=(#H)A%?AP)<8$@IK)YQ!#C$#Z@
MR#@Y##C28JLU1E@F292P,&-)+%),$Q3UT!)"F9$$8F%BENP_K^-H`E(0RA-7
MXHTCBIYNUIDR$$.+*B;B><<5HR!.DL5<$BVVT,K2LK'VN'B89R%*I*"$*%&-
MF4B:4M*70S#3GQ2!M>J8(;TS0>T-@!I`;2Z3PITL,#KH*F*!!V]"/L$`,UD\
MZ/>&CI=CWPCXFHG#):>_-K<%_W*X(7B.2!2ID&11Q&/!<$I$1CJK%-,<N(!B
MC*F)5E.\N;"W]3(8N`E?7#%*7MVICLF4-9KY,!?5WBJ,,P*=7Y)A0UD/>&0S
MFO>+->R)I']?3+DN7G]>;'XO=NIEO=S2'5]L-J^5Q?:N9H83PJG*D>1,1B%%
M/%.M62Q)J)+Y]V)S6VI?(#/2&J2/#1W3[FJ-@\%3XV%P7[L(O4QFK)[G674-
M(6&P:A5L70L:WV;!8A=T[K6WMT]]I\QYM3X@EVV=/=ED8RV<XPMHK,JD#2]1
MW.Y$-89[++<OFZ)?0$]BGE;)G"`QP23+$D;S_2`.4<&$[F7EAJT[+#E4#@4'
MCTRV?]CI3Q\K<Z8;C932D]XS-HK2ZOMET%=NUI6-=A*W.<U:$LE4W063!-=W
MT7&9)9TIS!6#G*5BTK[CP<CP8/;/Y?KA4]7&4]#THH.G6\-C[HWTU`>/2REA
MU+&EHC,2'4EU`4.FPGK$(.,0/@#0.#D,Z?.Y/Q,[5&F29J2REF:8Q&DN>`<[
MAE'*S0FD;\/U!,O;GC+FS'MC%4VXXT9`@XP'K-T$I/FL<1C^6#F])(Y!&&>I
M8RJ+-GG8R[8RL=WR\NEVM6YVVGXM[LJ']>J?Q?)F6;FPNE_5Z*/;;;';TKM_
MO#1G::R7PVN(MMO*VV5]L5J["G[P>_4W\5OU2:SCFN=ACA4A(LD921FF22;2
M+@@4YUK3.WYZ[IB2A\QB6??YQ3X8("#]DDP3NWXY[0[F79S!(-!9<`@U&,8:
MM,$&7;3-$0C#&^#V`<^"0\C#WY\=Y:H3?RTF?:9GOD%^OEN>?-D\%:?\_X`'
MZ"6A0QM1&HJ(<A)*DJ4AXE@@T7_I<0XJ.X`:GO0;!KW@$Z20WI?%F3@P\%^5
MQ)J@-)+*$XZ9^7Y\Z::Y`(95@.YBXJ^+7?'K;G]HXEWU&XN'8AZ&1*98R1`G
MB(H*29(?.,2H,"\,C#+KF""=;\T!SZ.*`^/$-:D73*;KJ!+"K+^:/:@=G06M
MJ\'!UZO6%<Z)J%UJL/(D/&&;B\C.%B0LB@?@XGU1967+K\7W8OU2L%>ZV=3G
MO-?^'&:(OA4_=JS2YO<YRPB+"*VL1Y2PG.`J1VO<D!%)9:*UO<65;>?5U-;=
M8._O++A]#08NSP83I&"`6GX*NA2]W@.`HE1?^_U\4%#['32.3U^P!>EZEJYN
MGI`WB'44WCO.NI31X);WFW7E2"7]Z_YHD^:-/=@/41ZA7(4*21FK-(\H(YW]
M3.7$[-KWD48GG#+O/9T%>U^-;X(?J[0>2:\BLOED^GM]KP]-70G/T-+Z4_`$
MD_;C.GGGO%7AM,'X95,^%YO=ZY?JC6U.J/W'R^JY61G06U89(PD2.>*YH*3.
M>5G:6TXP:%1NP9QC&'8>SH+&Q_84YLY+(`MMB*M'P8EUA?'OK*37Q]]E[<Z`
MSZ+PGB#/9D2EL[?4./_K+XGJ3<:"I1QE*8VQ"G,BHXR@SJ3,857',78FS/(Z
MYXQS.P,5H>F<6P'-,[C.K^N#ZXQ66JF:N<*>H,I**"<3LK'R&,!)K=:K7?%Y
M];U8WJQWU1NXZJ=XC]+!.!,Q)CG/$I&%,<Y#1,.]*U%,A.$XU9[]"6'6.OVI
M\3HXN+U?3&*,.(O/`HJ^ZSP&<R2>?P(^@5);62V`VG].WH'508@G@>M*3@,0
M5YGJ\N5N][=%7:W<O78+9UZ/_!!IDI)Z?PX+>8XBR4C:^\&5WL$>SHQ/B."]
MQT'G<K\H3_=`8W=/`,K>*XAO#M[3NOL$73U)M8AK^>EXAUO;\9UDK1,A#4#+
MRZ?G8KUM5CCR<KM3Y:8Y!H$MML7RR^*UN3CK,&6TI8_-TZK^]"_WAS]XW,J6
M-36&XQ)JHB(FHOK:')2'))28Y5TP*>&@&70_(W",?'E_7]Q5"5U%GFWM^:?;
MVO7@;N![4/RH?PV=AO=33O#'PR?GI_D"#7T-:F>#^W+3GE.S?SOV80_7#&QG
MP2'RNI7AGW_7XK9><5`+X-,W;<(GK?5A]/'-\^[KZJ5()S_17GIK^IW_V*'F
MV*-?GNM?;NG=;O7]?0:2"Y;S**4L$EQ@$B8DI7T&PD+#(98S=R8<=)V"YJP]
M+2S8!U*Q=A^*\3?9W<.#?F"]>&[F7TOP(_/IDV>JO=;WZ__8NY+EN)$D^RLX
M5IFQQP)`!!#H6RP(F<Q*BZDTU8<ZI*68()G324"3`%7B?/U@9S)))A%`;,SJ
M/JC+M#">/W?X<X]5NV.=$R/]%K^H+(;(7B03@\#]M=YO#I$U=TMU3R<WI]NZ
MWSM"&<4""IQPDL0X1@$32`S+-)#XP6+)T`C-DGR,-7ICTI-D--KE'1BF0$QT
MNGB^L#CB734B,\.Q;DK.?*](RH\!]SLL12:LGR!+QIPP5Z*^'8OGEZRL]MO+
M*NOPDGQS]#O_G6^KEV251BQ-`C\`21S575@0PXCVF),8TDFO7#H!U(GNY\&>
M/M^IZ7\,NWR6@+GK;1T]TQ-'-QM+G_QF:Z&[#952ETW7.CN1XJ;R6>+BM`[:
M=-"KJK@N[\M5/7Q6_\V;&@G/?F2[HMW*FW;K/\?KB)"%B,0!8ACX(:'<)W@8
M7T3AI#VVR@?5K%8#U#8M'8#U4JDE,O5<GY86JS3+R<1K#$LE>\VD;_KGA]IO
MV4WR'T&TXX0CQ6WH:'441"%H5526H&<441O'EM5-GUV%YN"4[,7>YY?%;7=/
M0]LE#I=H(T@P#FD,F`!QB`-$*!(T3J@?8<[@U'VX<W^\OCS7(?)&2/8N@7^!
MFQ-UYU(V'2D9%YM1J`TRV>F+]2XK^S/X'[-JE3`<)S&**$T"*.K_1OXX3,BY
MU!7,LC];>]G5(BDOO#RKF@9RGU5W^[QL]6F]VQ5_K6N/SWNN<4'7]YBD4XW:
M3#H=^5!FPS]NAQ;1,/G#:+9$=$=]REK1?L_V/[9U</Q>[#8KPH$((><T#--$
M@+0>#0\CIBR6NK%PP3":/Y=VSU:SH:_A6W*&;`EYT[38$&]R<CQ0UL)JT\H`
MS&N0&<XL+U-T(LDHX-61?*/"DD)YT$EFH7?[HBP_[XNK;;4*TC!.,$X%XP()
MPD04!6,%X*=H5175>C<M[<C\7*D\,T*8_-&T4+SO+1;)-"/%SK2\HHL8N432
M<?+Y%4ZT9(T#`DZDB3DT.9(79D$OED>);&&>[>H_O7Z7Y=E^O:O3#=G<;O-M
MTPU4VQ]9WU>O0DK2.$A)&L$XC'`4`1X-HV-!Y([[JAE2]UI?A_+"N^YP=N7[
M(Z2RZWF*J)ZX,F>>9<DUMH'@=P<$/P;Y^DRUGEYI$G6G6BBUW#N2T51;==QP
MZ2!MR4I2W?7555AS/*U,U_L\VZP@BT`4A2A*:`(0()BF8P]8_X(6KB+)#VAH
M!>G"VQS,JS??:99?;_,LVT]_5ELMT;.7D/1R/'/YB#Q>N;CP:I3>I[K!:W%Z
M'5`K/"]>-=++]\(5H].\ZUDE>D*(W`K1?#[=71U:8-/K*T-+"9M<27_ZGC5*
ME5]W4^N_U:7[BOL)B`%":1#Z`H8LP&P<"H6<RO32<WZ^YIYZA.3M:C2&J[1G
M^#A1DBUASY'Z:Y$)A;I@DOTNJIML_['(B\=##O6<X"ST:>(#&'(4A@#Z?)S1
M`A&',IWEPJ$T5U/C&Q#]$?6VD"H:R-ZVQ=FN&$DVE4O9G=9,&B16KH1J@7F'
MR+Q^L?J7'MROIM/22:I.92@U'+N2K!19<YRW5)(DN>&C29*B-I05>3WR73UX
MGT6+O*395;'/NK_W=?TS*S]L\V*_K>Z'C[XN2A[_E.;NT>K^0U;=%)OFZN6R
M:@]1KQC%T&><1W5ADJ`0`2#H8`(,_52F9'`)M^92I('G?6NMZ;.I5S7V2*93
MEQB3VB[D!F3M6Y!^:1#^ZC7YQGLPU7NP=8B!S@*O,\$[L.%B$(B6B0LO_5GM
MUW4ZW.;K_7WWRG/WO&?]TVN<NTY2.IZL;'8RXME7-U"Y%5^.B)R3U#R[T<LQ
MC'/DMX;6RSS-\JQ9$L,I1H(`&M&`BY#0!*)1[0.?2+4.<\?0WC,,4M8L7?_8
MEK7#9DG:#/9DY$<O<;.DHH8T;@'_I4=ENAEX@9Q7L^U\.IW*C`O,>#:++:5%
MYE62^J>WLR)A3(6(`&28A`%,!$UY,N[[@YC)U.,2/U9SN=Q,=%N8LWL@X,0G
M,(,E1Z)^#O*G3U3,,WYR;->N?U!S4E7[[;>[JCTW43PN>P?Y7P5)E+`@29*0
M`1(+5'?99-QTYHM@E6?7S9N57Z?+K7H0DSZ8I/M@GN"=_-V0S>:?[;[NYN/Q
M?NDZS5^]]8$%7E5X^>/^8?MJ_V#*4],TW9)W9JE]D\D>-X?DR!EN-'/2G)[(
MD/K\XT@BU6A@82K4EZ3E51)&0`1QE`0L(`E'04+X,`CQ$ZFJ0^XG&RH\GJ1,
M<EMEES?>[_=E-P530_ZO)?GR=0IGY$*E[*G.<Y_7IY_+U)_6IJ:LR32ZF(ZF
M@S^5:B0IF)Q&FCT.=;8J/V?=9:WCP;Y$@%#`!(1!(DC$:0S)L+J;8(JD[OB9
M/8CFV9)V$:`&U=W9\D_#G\)+K)SX*A83Z<@'LMR.0G&$+?QLZ+K<7J[J#S)`
M"$0B91!2GD:^8,-@%`JT^I'MOQ5SOYII8\A\,H=P)G\T+8Q.D[_7GTY[L?Y+
MZMS^X4VQJ\.I[GXV=66TWA_\LQ/3:RI9GR;<^NF6$_`!ST."NO!:3);35(M!
M(D?)\>AH@I(TXI7L-(>2R:GI7]GV^J;*-J3^NM?7V<>[VV_9OK^DJ?QT5Y75
M.M_4:#H024QI'*0!CX0/A0BBYJJ+'@2?N$5=S\B:M7\`ZZT[M%U&*KWB`6<S
M7]/_MFRF4NR$:1G,'O]RF6VDO@?J=4C'R_-*[P"LG:0G1>6)9*C')8XD24W&
M%2:B>F&]Q[>[NQK3"@6QS](H`K[@`:4^#<70E24$IF)9Q3=U%.TU7P_$C:IO
M,O?SZCX=I"^O_'I4EFN_'H5$]2?+IB.I;;$9KU2`\VA96@/VHSY)G2L<$X!3
M`J*8B1@GI$8TEJ*QH%)7QZ@>^QSKP/F.6%0)&O&!UEK03AJ4I%.^'ESL&$?2
MIC;SIM6$BFB4N(RK9B6ONGV17[;EO_FVO*QKI+O]X07_)*@;^R#`&#.<!LTU
M_[R]5)*'`,>^Y+5<"@;4G%`_K/^GV'OLKJR*VZ8`;`[-BF)?>RSW?I]U:9<*
MDJ?E3>/\RB7+1_"\!I_W`-#[T]X=\5-X.Y$5E=+N2"I4:].3&[^4$S8YZ?U6
MY-=?L_TMS[Y5#X,%G$<81BE+DSC&"-&$B^[JW#BD.)*:1YPW@O:UPOSZ'_6_
MN_4:6)(Y;"9GTY*6?KKDLM1CIFRFI6>9.9&'EC'I2.)9:$2A,K@4/[]Z^'HL
MO7_^^:7V2N]5B-,040"0P!2$(:S1L1H@Y2GU.4J)RE=8U:'2G,*FO%+SZ-GK
MYB'K%U]GZ^_)G_I"@04?3TN?;KI7+N6:]JR5EULG.^)$AC?O;$=4P8+ADL^Y
MZJ)^LOIT(]3_AOS<EJLPPBG%J/[A<<""$,>I\(=!`$2)C(+(_63-*M!]X@T:
M[\\&CVP"EZ1I6A+6QY!<(I4@1TL.?,3#B3PVCR]'<M%,\(6*D)&M2&>GJ@=X
M^>9S'6,?U[<9+V[7VWS%,.8\Y$G``8'`#RD3X8`UBF.I7MD*0(,9JD,D761:
M<=O$>M-UCTDN5G<79_2%XZONTE,Y:J#T5!%ITX..Y'"['!R7EO8=,EE1CA[!
M_)`U2U>KF&**$NY#1N*$`LQ"-@X&XP3+2,*\$33G].-G;B43^DS6IF5D_83)
MI=1CKKP_.TBFT^JSO)S(B\MX="2Q+32B4!E:LIL4;[_OBOLL.WB!OA\P0F$,
M$:UK8XP#/Z5)TC3-W8`Q#Z72R_Q1=$]OMM]*ATAVD7D!==-RC!G6)$NW'I-W
MR)RM9/,B0:<V&RXFU9&DH\"0XPV'BJA1URF_5(+]MLVS]AJ]E9\F(J1(X``"
MZJ<"<1[TR((@0+[2OG@Y'-WI;,(\_BO3^(TMW16%RAMH!=Y4U"Z;=:3DNHPA
M']KIJE]E?DD/K<ZMCN1XDQ;+]L>JR9Z^YK)K_=+OV7P"<;BGF06(D(1'$0MB
M!",..!IF=X/8]Z,9-THI&GE2[EA\C51Z=95=5EZ=./J[BI??7*R*^8GK.P;9
MGK?P,P!\>?W<SN-BTY@[M52DEGI'LJEJJXX7EW20)M_(=T^Y/H_AZ_IG?ZME
M=U'O4W2`T(#$S;9/A@'@7(`8#^BXB.-97;]>2)IKZB=Y=$[F-.4=R8D%=QPS
M=Q:BL^#%!'S17M';VS%<Z6X]/ZOA?\HDAQD'.Y+?35O]TO2)2=(55\WM2V8U
MQE7*0\&8\$4`(\9)/?BX7RI(.4O'ZGGZ'8&*$<RIHN7O$GS(_LV-K)T":*F:
MIS.OLGI6R[;F*KI[.[&X:G*ZDQ7UP.;BREK:+8YD8%W6S:JT9Y(H-WO][?49
MDF_',R0UOFUW#.MSMM\6FQI@%&`J`/0%@8"G`%,Z`!0QE=_<9025YKJ[7UK*
M1EC-;2`UKO9D_7VVWDL?K#?H,(EY:N=\97BZNGD>:71Q9XZ-26L5;GAM[MJH
MJQV1!`N&/S>3;8%Z_<N@[2]_9&7S2&$'T5\Q[@/NIT$4$88P(0$CZ8#1)W7Y
M:&)!=`XP,W+RHP.E1DN,^4SSLJ=N=QE7E&X=M+?(HJ@H<H:.-=$E/G=)6HS;
MKFJ==+D#]`M,OS'NX%J<+\5N)XI]\X>K).`U0!PR%H8@HA3'832N9`2I&:E9
M!M'U_3@7P][$B\,[K;P_&QN]WDAC^W061H-F$3,7",;E;%$,N*5N)[VD0^?4
MA,5;5SQ%+*C2/I5.L:&"W>5Q*^P3A'T8$0``@D$8$9$,0$'DTU779?Q>K?>5
M<1F<B%$F\1V;,[WY.LA;ZSK;9=?;O+G;M)G,/^C$RL8T<ZW8?+\:ES(-SG1"
MQ2[ZNSO?KGQU^,THEV04G)]HR1*@3Z]FN<*85+VK_V)5ON_G+=_MF\?`0,(@
MQ*E/4H)0<Z]]%`Q00Y82N>NM+.#3W*JUD#*;.C3+:6:42+>_[&E19YFW'9:>
MFM\Q_V:U!O]H5*0ET7`FFK2(`L6JM-P=K^K2NKPO7U]'^_;".EJ/DY3EW6VV
M>9]_R/;7M78"QIL;M1'W*0@8)3''PT;H$.)HTM$]*\`T*U$/Q_N'=]OBF2%)
M=OQU6HN<=Y4]$1H\_C[W.KN<=O.FN+QK?D@[SMMU]R,S7'?[4=71D-O6$B`*
M05M)Z*#[F1+"JE<MUPYV;2\<^*QDN]CF'H'W]5C9AM_MQV7.%EIY<,E`F?[,
M]I?;&NN*"L%`A*,T"`,2``$9&&XY"7U$^(Q#FQI0S-EZ/N/@T8!G24^JP043
M6TY+M%L7\\&>@Z;2=#<I3?VI9E&?'UWI!35:>-SJZ2;3V`RC*/97V;:ZJW$/
MG><J9!$!5$`2(H8%%+&/T``U!B">D[PMP#23W7MD5F<<9SG1S(RC-L=9UX<#
MR^PIA'KO:)QO7!(+KFB,30H4SS<N=X?%+1L!"WT,(0@"S@1C#*3A"!0SB/HM
M&VF^L;5AXS6$\ALV!F/F;M?(\HWL1@TGLY;=5?NI?CV3C+6``.VK]G*N,):M
M^J*_>:^D!PI!<\NK3T2$0@!0P!,JQHD9$0N3:_;RZ#2ODQP`FIFE7/&BF9):
MKP.M3[@T=KW1[61//*-1F.9'P9D(TP("%`O34E=8VDYV])!V^X=\765BO=W_
ML=[=92L"!8^QB"'%V!=AC/AX5WD(_4CJ$C'7L&L6M?%M^W7_MOU5C<S[T4!K
MU*WHC/*N^]UJFW86T:MNLE'X[LI-\]^=^MG=PZ8@4FSL;S,;)"[M?1NCKS>]
M^RM>8[S76.^UYK\Q=95TKK&-<^K"[$R461L]6C?<J7:CC<FQ(QN&U:?/^^UE
MUIS,NNI/9E$FH`^Y3UD`6.QSC*-QHT`JF-2;(`["?YNG@9])VP,#7DN!,\>%
ME869F:K`<H39*PSD@HM\*ZO]^K)ZPV>0)[K7S'RQZE@[D^I`)T/Z9ISU.-.U
M&F$%.(DY@U2P@&'D1X'/QO,&G`2QU9/0BY`[<C[Z]3QLM_%7%BA.2;O2Z'@;
M>GZ>(FY?N2>'TM]+KJ?38D>C)=UFX)'X*9,0CTWP60!IS%":!B2D84+!^'H?
M3#`.S;P=KQZWF1/AUI779"0H4E]'@T"]`I<*Y]K=UF%U+EVBQ18"ZZWHL0UJ
M9#79FOL4G7`OIQVL.PD\33F(65+_+V8D12")P'#')V1HVN*X.VB-G87OCBKJ
M$F-W"%5RBMXUSUL4WM[4!7KK:J"H/(?O6L#H.YQO,'`4'=I7X)O9)_E-QL6;
M.-YOE!"I,__F765NLF,\4SVI-$PXQL)'W&<8)"3QPX#$@Q6``;4WW9F%;F9+
M_1N8]%`<$8;F/>P%@\4*[)D+$<YN]D/*L3HG0/1$V+G,@6AB1_4TB$XGFA/M
M9\X)G[0C$CA@#+,`XA@*'M;_/US[#GVL^.4JT^`U"_=XFX3SPJT\*@Q)M\V`
ML"C>S]Y6<7;R+>E<G0*N*\[.1<*U\:-:Q/4ZTKD=@%Q`D**Z\N`HP!SZ-'V`
MG^`(6KQ88Q%NR]=M*-3S_^S?,A(H;R71FJ;%TOXM.;?9N.OC]#)WG/@4ATS$
M3%`01C%#<&SN((LLW0"R"+/%>T&LMT>FPL+,-FH;$6%O&_6CBT;>6`>DQI%F
M[B51$DIG(L/*:=%WAXE"M^F7X?%T=KLLVJ^0YIL/6753;(I=<7T_'&M<18QQ
M!L,8QP%/HJ3^%;`!.A$<&)%@A7C=/^7\<-6$=V"N5U=[WH'!DTZ>NALUFA7:
M4L`85V>%L>*6,D]WH`Y5UA`^;UV1=5"B2HVUN<N.$G_9EO\6^RQ[G]<"E)75
MEW65K6*`"10T]1E,$QY1CL.QA$AB`:WI\"RTFE6XP>1=U:"\;8_*V]>P;`KE
M/*=:D$GM_G1$)"^\-DH:4[W!5N_+R2AQ7R*?<YXI@5P4..<HC\L(T2F."EPE
M)XVGMN[2%W;N/@<\_?D]N^R>'+GU5T%S.!E'%)%$"(%)E#(Z($8AD^]-[<#4
M/B/<@?%VVZM9$FC)>1+:Y[[?G!&],1H:&VU(G19?O:9Q=@/$)7&SS,1SJN:"
M<^QT>@-BOOVQW63YIM5A0H"`A"(4\HCX*/%Y'(PZ3!0?X-".5K.X#5BL]W?S
M7&FAO]/N1?>D;@R2M][>/><[4^W=HKAQ20'=($1G>Z?`57;U\(]B5_^8W;:Z
M;Z$G$>0@%)P)BA&&P*<(/RR?8K5G(PS@U:R)#VA<$$197UJ41(UN=$\4'XP]
M&UE\[#_3PC@S>LY9&N=28D(<%[E+OSRF_WM70WN?E]6^O0ND_%3=9/NO-^N\
MWWOTL<A_9&5M2'.1<G^[_2H6-`PCBM,H@1$C4(2$]U8@%"@^16@6NOL;=SJ[
MO0/#O=9RKZI-?]A(.5H_O-?6;-!M?VQIZ:T"3;&F6<GMAYEQ43<886ZI_BQ?
MZR@`]`;=6Z\%-+.CJBPPX427*H3^?<4(8T9$Q((0T93'.`[I\!(3X@AB@\\4
M*,<N?U!QQD,%='R9X/#0HH7'=M6[WAFMUN#O-R/3YZ?&^A[TU191?Q\-EB7&
MO/S.<IT#ROM'BWZX^&`%L9]R)'@0B"2)*($X&.XH0A3%8I5GU^MNX=I^<RZ)
M?5(B3KI$_,3,Z1MZLUW69EH7Q5;6V[:U5H>''9?:SN2'.WS.1FD?^]**T,X,
MI[/7V;F\&)/918YS0&6/RP3?)S1EH8_2,/13)B)"X5@FA-3<)3S*D<MWM]+7
M\*1=,RO=V+ZQ?.EB9S+5^V>?,6<38ZTSD7.=2SGSU8?;#Z<^<4AB%$!($T0"
M`D2"Q^=FD)\&U+%E1:6VG>.ZXY/K6UJ*O(:CPXTCKJ]&JHUAVVV9_?!UM7N;
M$;EO[L(#/>%AM[[1$LA_GRI(#WWF:R6-8?"F*JH5PG'@^V&40`8I0"(("1ZK
M1>R;?"?>I%GVUF8GZX6E>P^-!M?;J6^41M39%#5_PTK&\?)E<IS^IV:9P9F#
MA8JDPQVH3A[/\;]N8,HQI#&`24(XKTWBR4/Y!3C!;LSTJ+9*\QS/L'K]YLL1
MY=%DNR:Q&4BN%B;':^5_N_I$,B@<6'17%[AG7ZEH(\[2LKUJUSM0LTC48Q$G
MD*"4IF'$`"(1A?&X)Y]3%CFXY+_<*"N[`=37+F],%<ZG:YT:7V>O!3HX<[%K
ME7/X9`7XDI59_9=O2+[AV8]L5WQO@#;GJ_,R6V$($:(IXB%F"&-?4-&TRGZ:
M"AZ$7*J37#:2]NZN`W?A;1ZPM5>P9_GU-L_J#)Q?2[9P"ZF=UE:98U6NU1EP
MM1P>(/-Z:(8EY21-)W*]&GH=2<**C"ET1*"2M'60DO^UK6Y$5A.ZWKTKZJ2:
M-[_)[LJJN,WVXJXMA[X6GZZNRJQB15F5[_/+N_T^VZQ$C`G``%$*XAA$!(81
M&1!'40)F'/2PB-;,T8Y6KTJO-C+/3NS+=\Z52W*L.^Y3FZ`/YZ+^J@WS>LN\
M!],NO,$XK[?.JPJOL\]K#?0&"YW(\RI<)2T21N/#:84QR\0D>;+@G%>U;5W>
MER_`_9A5GZZZ))NV.79%10(BB%C"$\)A`H*Z-1AU%9)T5175>G=:GI0.*%6@
MC]@FIZL:D+=?5J0?)9S&^C:-@"@$;1*1X>.9=*"%3LL?MAZ;"HWQ)UE(?MI?
MK_/M_[4=/:L[\F*WW?Q_=]>VW#B.9'^%C]T1K@V2`$CB$;S->J.F[:C+SD,]
M*%@R[>*V++I)J;IJOGX!WB3+%HVD`!(U$1,]MNQRGCQ)G$2"":#YAA?S17US
M?RL>NNVN_6A?\Z>LKN.\7E=%4\%SU&R]+O?;'7_T;OD_7A=Y_2G_L0LY>W^N
M7!8'V'60X]HI1XZ".(X[T"2*HAA2/R^+5'/]W?@@3C@Z]@(XD5PXE')SR5\G
MBK#IY+%??'IX[-F5]6IT^<>=?]:1@XV<'URT>A^M+\)+JW%S[GYPK3$;F5>:
M\:P8,K4TA(S2Q.$,?>NW_I;?[3?YS?W'_$%DVP_Y4UD)"-?;^[)Z;-'^['YX
M@!.'";*C,*8)]C#V6>S:W6T,`?)1##N84A,&W3N].MC-87PM-FM`;AU!OVKZ
M.-K?@+;^Z`J/9*..`9$!MM5,"0I/*.+*9VNYM#*1Z+$WDYI#9T@JT.[FZ?N_
M66B5EN_;G`\#GE,>.*"3]X9B?>)Z^YW_M*Q^KGS/X:5M@%B`(X(#C]#F,`@G
M2>W$CI$'T6ME1C4+]`&G4(._^W:'K&MW6'.L5M&#!0JS.N+EE'@1SF'2^YSN
M%]TE`J9U_3;=6O15EKX1054>`4,45+U?I>9'%ZB1@X$_\MUP;W2:V,AA+D8A
M]NR(LL!G86^+!9X+T<-)!C1KWX#IRA++I3+[IQ62)Z=IVGF#Z=<$RK1HU6NT
MC.C212P:HD&7^5`J?*RF:LN'[.]_9GR<%MFFYI7\Q_W3TX;7[\W:M5C6KK[G
M]2J@&"-LAPB%L9-Z?N3$@\`Q)Z231$>)9=TS,?[YMV8+PU-6[>IF8:_*_K8>
M>^!354D-[4"YFIWQR3K&D5H#U(;U'FRK<7R>U@->2N1DR)11/Z5!,4T6U3IW
M3B\U4`@7TG^5U9_7V]NJ7.?UB6F44!8'/DF9&V+7=6/F#*9]1$$7J:JPIUDT
M!;)WQ?;=4XMMJD1>0BA0&&?B<K(<"GS-/K@6H3$:>)XW&>53P+II>J?"I7,J
MIXPNN+:EQ;:HO^5W_RC+NU/3?A#2A'DV\3%)G#CB4]7.=$H8GE:/7F!/L[;U
MR*P'`6VJM%W")U#:9J)RLK0-A#8`C5&V\[3)*)L"TDU3-A4NG5,V971-6EI;
MI13[V$E#ZI#0#B/DX2#M;80!B67:$"?]8<WMADNM61]S(+G^(TV5:<,"A'UD
MO0=(@'QKH-BL][[(OHH+1GE-%!?U>E/6^RH_O.+S[0#;?AQ'*;&#!-G4%H.+
MFXZQFWJ4@!K\%-C3G,+;HR;8>EWM>=HYP@IMU5-!K5PVGYM56#9O"3V"9QWP
M+=KR]C9K8XUK"CDW1+64NG3:1*:<+D`R7Y>/^:?LQVLV'4H0\Y'#[(!Z.$W=
MT,:M3>+B.'!@]<D%AK2_-Q/8+`X.+&27\2=;C\Q$';00Z5DS1+/&>!J=2RF@
MUQ"54N/+B[F6,H(FM*BR[:ZX*S;[7?$]_YBO]U4CD<F/]69_E]^EG`)Q*,.^
M;;&]N1>[18KM0WV;5\V9#$V3WRKQ*$M=G"0TP3BF)$&BA59T8E%"HP0T39L9
MVHP-K<?^6`>'K-XC2SQPUI%/XA_U7HF#QMJ#R[K.2O!=`S.'7$Y\#8XV3*X7
M";3FOED5(9%JIYTU]H;DDJ6\/]M\NT`0I//5A=C"GZ__`?:CJ%=A9-LDY/-\
M%`2,11Y'F_:0W83YD.2U)$[-F>R<J'T1X*#):-%XRF6F7R64L#0U-8I:,HU&
MBD?2C@F!-20'&4%%:=ZX4Y*=_L@>\[A\S(KM*K$1BU*;42_Q,'%].\%.9U=T
M9RM(,0!CR^2)*TM`M+ZT(-7D"PC#EXB^)G*5*+<TKS,J^($OL`Q/H-IH+9WB
MCY0@3B9JKCGW^V*;7^_RQWKE8R_&0<Q(ZN,$<W2!'PSX*,$S3K#E02TTFP8O
M$0B/K,:EF>?@@/C.,N'6$UHULVL]435Q3CY$0=\$'!YHHS.$3K_53JVG$C]7
MQF&/XJ2/5>1BCZ4!L7W*HL!-XC@F/3C/LZ,9TXTDHCES37U0I?R9*JV?JU+>
MJ])P3/V5E37NS)MF9(,Z2X[1$,]%$LR5Q=X(I8FYI<6L+[$`H_N?D56@3JM-
M*9,HE\XG?^2[]N7Z^[*N5RQ('.*ZB8MX>91$$0D([HW$L0TZK@/VES7KN^A+
M+]IND=\V',_O5K;;5<57SKHX@6=7\M&^R]??K(\_:Y&^K\3IP?\U\]A_QMC(
M&)[&K"%C<2+X4L7#!1P;+]9-L[I8KW#JTL`)&'*\A"'7=E-W&(A!FMJ0,3+-
M@N:QTH`X&2W##.?<N&E^^*W<\*>GMGZ[*S>;K*J7N[_G56)'AM1E@3!D:%WH
M1*GRV00.M9,#6O[8/W[-JU@DS?RNL5X?W2'%[OYO7^_$05<KC$+J4#\@S$_C
M"),$.ZR'PW&!$I8N#)J'*Y\\//));+TKUW]:^5_[XGNVR<55"+\5VW;PU=";
M/[5%0ZX",2$0L)KCQ:E3+6:K`]U6%/7Q/6C6`??,TCB1W1'QU!TO0^15NYOE
MO,-`A43?W)\#M*(T3`AQL.-3.^9@2$K#H6!)?*GK`739!DDR?.M>/^Q;]943
MXOG&^GG>H&-<001,'MLJW),9T\IHG%S9=/97-'2\P(ULSXEMRBLJ-PK=8=$Z
MM<-+:AM9&YJG2_W8_,^J;SJO`!4.-!R&#-2+W7BCRIE&RX1-):^65^(&DA9`
MTRI\V./"HI#;]EC*(AK[7AJEA+1[7!R"L`<:F+HPS+A-Y+7E^G;9HKE*K(4_
M>?.'XM#(%3TF1`56](`#8M)YYR"2I39HZ`F;(;*KW<VS6RYTTBIW']KG;7NI
M9']-5/;LFJCVAJA(7,?&:R^"*4$V]GG""`D)*,$N;>PG/O.=6*J/2[E1S<+<
M0QTN1VO&_/']:`\-7$D]5L_YN``O2C=,<0>FS]Z<V2(5EV,V6!>C_*Y<-]>-
M-^\TS:3^&<0E0B!W&2"`GE?2E#:&3;@44(M?I>9'$Y)YFE,YNJ-NC@[G:#[N
M[;+`8S9AB*0Q#2GVD.O;G=W02XC4"7[*C&G.-`T6B*8I(5`B?<S-'2QMG#TR
MZ<IJ?C0I72BA%I`FYJ9X6GI00+5<6I"@XUPZ4,FD"6E`J3^EID<.VN;[PFIO
MD#K4)K9/'#^*`L?G7SIA;Y`EL0UYK3+=BN87*.TPRKIAM)$YY$U/-^8Y@L8Z
M+"\FU9":7X$CIYV0BJB17VX]N2SMM>.#PC0F;F*C"(6!ZR8."2*O7>D-Q(;7
M`+2TJL">[NZN_L;;_A+"HPODH"NF*MB57!V=F5C@2NB+&Q_-.(Y,@K6QI4V%
MG!LB:4I=.EVR5$Z77)'8]G^QK:A2=U6Q'MXC_S,7+Y=7*'#%+B244C_%7A`Z
MD1VTTAJ[R/6D-M8K,31/'QS'9QT`=IU7D,+F8CXEZL4YJ81)V1B+UI<6GNPN
M6C5T`FK$.6F=5A].>TCE2L(WO#]7#JHBS8124)DOI8:G"CAWC<KM=ZZ"S9Z@
MCZ*YMS7:?LPQ.*O$B2+DH2"*F&=3UTXHQKWA,(A`%Q-=;DWWO/739['_LFEU
M;M6HN<WM,(C:!NC]MM@UVS:_\7\,[@%0P+G<?'9>NJ$IH,?6W&8NT%WU&6``
M./-,]DV^1N:QZK@V9!:KT*%2UV,)W8;(/<_J;S?5;5;MNF_8^J]]41<BOW:?
MI,4VVZZ+;'-3)?QGNY_76S[\FS3,(=8%Y[U)QRWJZ[K>"\@Q]GW;92R(<.(%
MB>=3FPZ0N62ON&]?2^EMC0LBA8SY8Z>DAW[7[+@^WE)2-."L^[+BGQ]!!TKK
MHA&6$^5?);0P.>]@<UFRA%]6__V19U?#AX-SXM=;]ZR#?]8S!X>DT/HX]V99
M?<$:R24F/"*&9"$CJ#C=%FP")N`2M3!RR^>P^0JE,?&]E"!&49H@DE(\6."V
M$&@E6O[/:IZXOY93#NWV3P*BQ7_P/]EVGU4_+61?66+(0]>B`31*+CGK81"X
MLMR0U*"8>^UX<']LB1C.D2'J-07YZ8+O5.?EUG7[%S51^?B5"Y80I&?J]*G*
MMO5]7E7Y75I6KRU2B*'V6=3#JS3`(4,X96X<IH3%CCO,VA&'*K\&/"<H[>O%
M1[B;Z2UDB0&R!#IK)"56GTT-(DP:AQ>91VY</9^A6D>>6-P5Z\SR:Q/6ST:'
M%;`*;FIXIZV8SQQFN:5VA12?6Y9?(HHF+.$OXG>Y\/`!U@P`B,XJ=8COQU[D
M>*X?Q2FU,28=AB",7=`1*4H-:\[OGT3;F76?%97U/=OLFVUJSQ:PK-T!+;#:
M4!L`N7ID,>ZUIN69JQH(B2-UCY98&%(9Z?&MG.%AGJBB1PM$MU69BF:XHYZX
M0_-.%*2.%_M1P`@*@]0CV.OV%OJ.@RAH>4:U[;F:!I\M&G/$5@/Y@AY"Y4&`
MB>D2_$_4T[>I7WY_-9!6"855'2##1%:Y>V=T5@^-DQ>R#MN[SZG^R;YNQV8.
MMHD;89O%=ACP#!#TN%"(+EK`4@YF+C%^-L,:3F.XN9\RVUHH;--6JQ:-F(KI
ML%2P0'*^4/PN6Y9:-(XJEZ/4QW/R.A244\#ZD[9P&;KNI,_?-]:;-!,]X;2J
M#_FZ?-@6_\[OKN_XF"GNB_R.U76^:V<6'!';'N_KXC_C@^L4)K:=R+&Q$WG,
M1PF+PI`X/4R*8]!2U-S8-"?UX\.4#@Y9!X^LUB6K]ZEY-W7DE=6Y-?G4JYE"
M+/GRW>#H`M_@JPKL\M6=XJ",]14L%'Y#JL/%W#]["M<289!/4WP.EXNIW,U]
M>RD$QR*N5*GR;SE/G]_S[M.O]:[*UKM50)(H#A'V:>0$OIO8O-!M=^$EJ4M"
M6U:C%)O5J$$]4B%"SR!:+4;K2X]R=DV!D3BF&9K"88HFZ'+O=,QKI5%Z3-]6
MY7VQ:VYWB;W0C0,<.C9!A'C(32CM+3@T`)U]"OBSFB=\XD8B<?;PS./M0,#(
M4)K`DB&C9`KR\N)'!/ALMP?(O!Q3PF9:5GGQL&W/Q5C_;$H^/LR*IL>@^6[3
MU(*'\_[Y@W1S_RG[L2)1%/B^2_PD)!@A+^9CLD<;\;P+&2<+0=0\YCKDUKJ#
MWG8`M&BM3.)"#J/"*3=+^04B"9O,M&<#O3J+^4TX]?N5U<>Y=\PZ\JPIKXY\
M.[J(Y<H2HLRG2-S!F6593Y1&)'[AQ\*0=+$T"Z518Q6\0?T%T-XD_VZS%Q=8
MW(JS4#BHHTL5/I5B&TZYW?%`\;_^<+WE2I[7NY7MQYX;41ICQ%P?)R'U60\S
M\6T,.=EL;FR@Q`4_#^VYVHU/&\V(E5QR,CE,L*PTFH\.::6Y5[3UR^H<L]C)
MC2//?;-ZYV;?<:\T-".I:*F'P)`<M)C[+_;^+QD&%5E'"I8;V)Y+;9X-:12F
MCNW0T.YAV7X2K+;Y0R8N%H"<G:(7DI1JT5:U7J"?J&"_M?<C_=XDFQ>7(FV?
M2U3QID0M$\J+D]!\X=.;='ZY%*,OI2@-J?DI1*V[\BE#`\TJ4L2*>#ZV"::I
M1VW/QLB/D3,LZ05VJJC(>-/.[`7#A1?>JR?Z8G%6RO%,PGN;@0Y_UZZSTS14
MFGGS]5'>%7GM`](C_YY[_[7._]KS!RCY+F[X/KQ8CW$:V"QU&77#$!&'N-WY
M`[$?!YX#NQYPLA7=+5(#,*M!!NUTFLZ>9#_`+,0!W_R?<%8O>ASU.8+&WNI?
M3*HA&J3`D=,W]8JHD=\PE]5%?7//UNMRO]TURP&;8OVS_>_!NI\@+W92QT-^
MX@<AYO]#[78]#Z5)1$#[Y-28U/TN/]N)D]YYTK]YZGIUV[-#&OCB\UO^K_M>
M<^@..46LRXG8`H3#%&V@]`#QRFKA65^Z_U]P`YP4?2-ZIYA_0\1/M5>GN]QT
MD`8YJ+GFENZ:P7UJTW%L'U$G31B*D!]&U''BWF;LA0GPC.;IAC1+X&U5;-?%
MTR:OVQ[#(Z3P,Y@OH%.VJIR)26A9>03+(%4;HVNT@E3`LB$*IL:7E\<MJR)(
M6JT^U^)2Y7I7/&:[O%[1E&$_P#9-2$@2C]#$3GHK"::@+3G`/ZU9D3B:YF;R
M'@]0AJ`\R0F/1HI@4G/*CD%J\YRC$7V92*8ABC(5?:GDB0*JQH><EYC[O-L&
M\II<N:D3)8X;^"PD?AIC-TRZ(S`]3$,,$I++K6G6E@Z@=800*"\*")53G'FY
MA(G0*S0:I$-O,C<B3>I8-T2M%#I4ZGI`+]:T.&]W5W<_646IZ\5A[*8TH0Y.
M$(I)7S!BKJ92=VNKLZ99TWHX5KL!XF(]`Y,Y5<]T\JA`SP9>^Y^:J&PG'(*4
M;2K_QBK;9(?>5+;+J(*L2*WS[:Y=B?Y0U']&W&:Q$U^M@I!$,8Y=Y`4!18&3
M(.+V)I,T!NT2NL2.9C5[!JU=DVJP60(<?$5J.IW2"U*S,`E>CSJ@:IB[.J;1
MH+G:"'_C"U07LVZ(BBEQY>7RE")ZY)5+7-BRO1/_)ZYF^9YMQ)O-P]G*K_^\
M??Q6.$VP1\/8I\A/?<J([_@])APQT'1-*Q#MU>EPYKG`!U4[K2&0E$-3V`?J
MI;A"2[SW;;XX0G9EG<3DS&^9HZ<7!&!,<.>(JRF*/(NOIY(]'\&`.GN=<TM?
M-WE]6MDG=I*DU&5)0&B:((\PBH?*'KL1K,">;$:S'G?OI6OK`-%Z9WW>?BTV
MF^Z\IV;G)[CDGLZK;*T]"Z70(GL`99!@GJ=JM):^F%]#Q$Z%)R^J9T7D2`O5
M]5;TT975B\81S/R4T9C@U$DC0F/JI>2P`.F`WFU,-J)9I'I<!?A-Z73:Y%1H
M%L9@&C1`,DB!SM$THC\7,VN(^ESN1ZGXD8.?=O645[N?M_PIV_'YF9B;/8DS
M'%ZVL+FNY]E)Z`4,Q0G"S;6#W8(A=2GP+"PU1K6WEK4X^5@32)OYTH`5J%7J
MB);3KD4XAFG9*+T&Z9LLE2-ZISP:ANB?>K]>GHFF@SAI??Q'6=[]S:LE;OIZ
MN^-/;\&GA>WYH_V/NAK6<T(^*20V<U&"_"1((SLXO%'Q0:\WU%G5K)`]&J`8
M*F153@V7(10FASV01@</*+M3FJ^L_N<&*:,TK2/2J#XTAFBC!L=*W4^U.G4\
M_;X#$MIVBEV"$L=!Q`U):J/A[8WCH5212DZTKKW2[5%!*UT-1%\LG#-PK%9`
M7_GH5U#2UWF>IJ@7QLQ\9;W407F%54*E_`KAXU-65,WIV%5<U$]EG6UN[M^7
MVX?WQ??^1/SAM*S7L;U8S/1IFD2VRZ+(3B(2A2X:WKIXE(+V[B^!3[-:"_#O
M-@*]E34HH:N32X1,<F'3\&@!UT0';[CT6+T_HO.J"6'CTE$2Z$]!-#D=:`C0
MV&KL@H^#(2EE40I.UX`7#P?D`I3M75;=W5;EW7Z]^U=65=EVUUE?N=1Q$QIA
M+XTQ"?W8"QGKC;(P!:T97V9)<ZKHT4`/AKF,/3FMGX\XF&KWN*P.F-4C,TB&
M1[D;$50UG!LBC8J<>7G;BS**Y.7J6U;E85;GS<4R^;9N&DQOGKK#S*^;KE.N
ML6*UN9_0)\@/B,L2X@2)BU",<!1U4!BVY2X`UFE?L[1]W/%Q]Z[!;!V#ADJ=
M#N8E!7!ATH&R*-"^^_J"[RNK1=PM;G28FS=GM4&"">=Z3$8U1LX4<=7IXJGD
M:J=36HA3/L']WVRSSV_NTV*;;==%MKG>UKNJN1BY-QYC+TPQ0K[C1QZ7?>SZ
M_4$4S*<$U%:OQJ)FL14@K0:EJ%X'G-814*#N*B):3FGGYQBFK1+T&C3YE&)S
M1#W51L,0O53L5*GS`8:V8HD371LE;GJR;TMN-]\557,G8JO)[6\,2\U.ZMEI
M@&Q"$$:43XP#I\?A)KX#:LE2;5QW:U:'!MJ%I9QCR6ZL)>D%=F6U0`Z;`ZSG
M:-LI)]?)#K!!B@EE>:QA2U?`#-%1??Z=-G#I)1)0^A=/3\7V@0/Y;_YH\]]\
MB#B6TW72`*<TL8GOXC#"/D$H<ME@W75`FJK(I.X"OT-IY3]$39"#"WLUO,K6
M\K-3"BW?.S:%?/80+8'1()V48W&T,%<:!D,T4;57+\IO#:0!]D+6.?]EL0<S
MSK_GF[+IHDW:,=])+_60CST7NS9EMLL<-R7]<4<L]A'P)+7+[6E6OAYB,U;O
M#B`G*J$2AN5D<&YR81KXC-<C?%8'T"`EE"!R1`95AL$0#53JTHM]E:KIDE:_
M/_*_C\[HKLHM_W*='Q7UIRI,'=_U;<Q\#V%,DM2QT3`+C9@30*10N7'=;:J/
M3]FZN4E([(3=[C8_K>NZWHLFFL$-Z[D?0*E4'PXYW5PT$C`1Y5#/TVV0@D(I
M'9%3;=$Q1%OU^5?.])A/K+G[Z6Y_7_A36;47DHCY;[V*B1>Y%/M.3+TPI@%F
MG>;SKSV<@%[S*#(Y<\T-U4]5Q,**[ADYG59T7QTJ;C'U?`ZR*<)'B-9::8]3
M)U%I*^+>$"54[=692ELI:4>J=_P0O>=?\0_[C_A_1.\&_^3_`5!+`P04````
M"`"Q@`9'!=%N&#YN``#]704`%0`<`&%S>7,M,C`Q-3`V,S!?<')E+GAM;%54
M"0`##K[#50Z^PU5U>`L``00E#@``!#D!``#L75MSVSJ2?M^J_0_>S'-B@+B?
MFK-3N$ZERB=)Y7)FWEBT1-O<R*2'E)-X?OV"DB@[MB12%$E=,I5*8DMHL/OK
M1J/1:(!__=N/V\G9MS@ODBS]_15\`UZ=Q>DH&R?I]>^OOGQZ+3_IMV]?_>U_
M__N__OH_KU__4WV\.#/9Z/XV3J=G.H^C:3P^^YY,;\[^,8Z+KV=7>79[]H\L
M_YI\BUZ_7E"=S7^:).G7RZB(SWX4R6_%Z":^C2ZR432=/?EF.KW[[?S\^_?O
M;WY<YI,W67Y]'@"`SI=4:UN4O[VNFKTN/WH-@]<(OOE1C%^=>?G2HD'_BY:_
M_2@_^*G]=S1K#840Y[-OETV+9%5#WRT\_^<?%Y]F(KY.TF(:I:/XE<?@[.RO
M>3:)/\979^7_7SZ^_:F#Z'8:CVZ*AV(:WQ9O1MGM>=GJ7([^=9\420F4?W3)
MP6\W>7SU^ZO(-_4"0P(H`J6X?UG1=/IP%__^JDAN[R9>R/,NN'CRX^?H<A(7
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M,+Q1@%Q+V3^/36%MVD'_'#<TV8;T7?'KA^]M,BT?5?A)PH?;4^^>XK1)'-"`
M=``N&QI"\QZZXSD=ETZ^?%CAXZ-QF?-3T:3,:7VZB>-I`YZ;]C`<SQ^BW&-X
M$T^3433978"5W?4JS2?O7..9'?C5I(\BW"3[7GQ)HWN_KHS'K21JUN5P4OD9
M.8]O?)OD6_PV]83Q159T*6/#!PPF\?N[11ZN0R$W]-F57-6&0+GD\/YH^K#%
M'-R$MBL^;92GWEL6'^+\TXT?L'6\K6O?%S\-IX`:LKZX:S;O;Z;JBK?Y8/T<
M_:AG:$73'KAHJ+KU%%WQ=)&EUY_C_-;$E],Z;E:U[8./AN!L(.F*JS^B_\MR
M?5],O1;R,H!R61XGU^FGJ(%I-R(>A-.&@&[3QR!\-W,A6W31%=?O?>B6R]$H
MOX^?;N?5<5I#UC-W#:V@&77/O#;3?"/BKCB=I7YNLLG8&UF9*9T^U+&WGJ(_
MGAHJN9:P,P[O+XOX7_=E]O5;\V3U9JJ>>'N73>M-;A/-UGP]K2P1<Y[2^+J,
MR"^BR_C9,G,5W23/?R(KJUE$6<T"Z8S;5;UUR.6[>-HMH\\[[)!7'V`FF5\S
M=`SMZFX[Y]NOT/*.L5[7<8>\^^BLB+OE^F677?*;3:-)Q_R^Z+(;?EL8P_0E
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MLUME*6H?1I`-@+*7:SE@SY^/V*['<4U%YA$/;,:!$L0"`17D4!A&I)N#SJ#C
M%.YW8*\H'GRZ3;;%"&_84ZBY@]0PS25!BCM*,"45'A`)](L,]<9FL6:H]P/W
MDS&_PO1>KES*3U;)69:=C^\G<;F_L;JT=S;*-]E75UV'$$B(`0DT!M(`Q3$F
MO$(`*<1:&EQPX@:W)_PW6V`WSN]1A(_Q*+M.DW_'X[=C#W!RE<3C!K7UM<;;
MTY-"#*"&`$--)4-6:J4(K+`4V-"6MHQ.W)8/0QW#!E0M3X@<<:3EM!9:$(V<
MDP0J846@O3:4L0@*%(#]1%J/-K=BZB[4P_/(MY$W:=95""WT4S_A(F"``^R,
MF(V3&2*2NK;NXMABK<:&L=9=](+W$%.=2])D&E\DW[RC6U;PSWV#>IAO<DTB
M+]>/I-A@>%OT$C(MJ.3`!Y<\H$8Y[QHKL`,%M3H=F^O//+*AX-^S"3[R_BZZ
MC4UV&R5I.S-<U5.H-;$&!MPP"K7V08)ZQ((`SD_'%'NQD.96V`'Z0UBB7Z.,
MXY+#XH_X]C+.-YC:\Z:A7ZL`'7!NI2`<2N`,0I4T`NA?PY9VTW/6*<2#+!2K
M&L9GE>1U\^5&NI!8&L``*<*UX,I2J\T2L`!0=SH)B<%FR"X!'\2PYNS5SG@_
MM0NU\)Q;`(Q1"E*JJ;5P.4`T;YO).D`?U)$^GUO)#FBVRHQ^BF^349:.[T=>
M$<N3D&LGGUJ:$"!M,1(*`084@R+`TBY]+:2G%%RWTU76#Y)#^(05+K)FFEE#
M$7K1N%2`0.WE$E0PQ7`E&PV(/)TLX6`33#=0[\N,YEG`^@56+6TH*84<60]=
MX`1Q%#&\'#8:DMHRA>-Q0#MKO($%[8)MNZVZSU]\3!_G\PQ9-'F;COQ'?\3Y
M=9QOGI;J*?W"4@$@%1<*"X8)19KS!?\(TJ"MVSD2VVBIRZQ/C/?D;R[\!V_+
MG8GM7,V2+`3084X]<EP9CHFV@%<K022EJ\WDK[$D?'B6M,\)K"W>0UK5DWS^
MRRV[:)F8V+C/]2[><DMIER>%`$.I`NVX<80`[P)8^=,<2TY,;;W/47O!%B95
M7\HVH#J&,.WJ`J@--EDU"05EDBH+%,).`J2<(DL4,3(GE"KJQ9A:XGAL#NYY
MFG9VA.GS390V,+5!^2A3O`'%UG(#`<*"*`V7H]'(ULN'`UR9'KQS[%I9!SQH
M*HF&BP[JGA@:B*3RKHAR[+3'-1!V:0%<B;:5&=M'N"^.DISR0.A8+?O=/?]2
MQ%?WDXOD:E/)4!/RD)9%='YJ9"RPSCF!#)"5U`!BV](8R2_BE7O`>,@XM!H<
MYCY/TNOY";X&L>DJLC`P!"&B`\:%DX$7E=EE>@)ATK:XG_XBEM0AMGN:CI_`
M\3&>E(<5=59,FR2"ZCL)`37.!9@!HB7"VD+(JJ0:T@"W/27&?A'KZ@WI00N;
MM[HK_IBKF2T6&A)*`S\[\*#<[$:SVG)KH`U@[=+_]*J9`\84XMAP;0*G(:=5
MM;U'A`AP0B58W1C&KM7,V^%]7%OD4`#OVP21N$P+`H8E#I:R,79"!X[[4WO#
M+?+MH#Z!+7*'I36:(86@4QQ[R%PEKQ3Z!`]=M-;X]EOD6V%[>%OD2A$4\$`(
M!"PPBD-MEV/+`&-.VS9:ZG+++?+M,!ZTC'A6.OW^:G915M,2XN<T81!0+6F@
M*#"$8L8==-7H"C1%;?W+`>X)#39U=07V$,;TE,7:V>IEXU`'R$"H&*$*>R&$
M-@)4$I4)AM-Q01UH->L8SE8S4GG=NL<Z'3^^LF-VK>WZ4RQ-R$+$`R.)0TXP
MARE74`-><8X">D+5Y+NH+>L-T2&<A;V]FV0/<3P3_?U=J:K:HT]K:4+--6:.
M4S]XL&4``,QE)9_72MNRK`.<>3JPF*[A/-9:/L$1\1,Q"@P5BC-)#%OZ6F5%
MV\VE`]SRW^=*NRW>@T0L6;IXN>]B1,V=YOQC[T/AI@"FCC:T4&M$$==^1@<B
M`%9@O)27Z].N.FZA]N<A3<<`MXQPGC'Q^,''4C%SGA;?V1^CFRB]GETV:J/1
MS>Q+_]W]99&,DRA_F+5:'Q5U_JB0PP`@`@GEDE.KD<1LB5#`75L7=X#S8J<F
M>"#Z&,(%OLO2453<O,\_1/ET\<L3#!>?N"2-TE$23=[G\_NSWZ8^SIR]FN2G
M7:\Y)F^+XGZS\^SQJ:'!C(%`2A_#6,HM90*(I;)]^#O4M.YMY3([)JL_/.4,
MD@(K^?O@UTP;=P27C4+D#&'4$20%<A81)_!2`B]+VT*2`SP!THMQM4:R7<K\
MY7;ENEUZE^6K5M&EV_Z2)BL+1;I^1.@X5K(L!`^,<D0:&"P#&N3!:9OX.+9R
MMU;3]?[TL*>"IG72;9IWM^DF=.66F*$:TH!IXP3`F"Q0X,H$;=/YQU8RU];3
M]8CUH&5-IU:^)(BDPL?>0D-$@`,`P.JN\2#0I+98Y_3*EZ`R.H"">/,.-.#*
M8;Y$!'+9]BS7`2<J=C.,G2]CW`KOYM-+$8_>7&??SL=Q4AH>+G\H[0T_L3?_
M47@17T>3^?LDU^SUKF@58HXAD1`(J:6FVD@H6,4U(J=TP4)_"LVZ@K=[HYBS
MLG;?]GF3$!$_%3I(E86PK.Z5%LB*7XQL</SFL).6LDY@.[PZ(<DM,D%@76"P
MU9J8P"T!<-2>0)U0>Y5M60ZT'91#K#+F[^DN7_P<I0^UV[$K6H<X8%@JXZQ1
MA"@*RTW)Y?CP\AU_PGEG\^@.OB%,8G'XHDP%/LQ6+#Y2JB]NWD`5`F0`]*NI
MP%FE(:.,JLKL$3*MJU`/R$0&BR.ZAWN/)E5;,K:1S@\=+#6GB%&`E9):*&`J
M.2$]I;KY3K3=S():8=LJ:)G/C/(ZC^/ZFRA7-@ZE$5)R;@S2S$F*RA<+55Q2
M0O7)6\"VVLHZAO2X#MH0CC4GG`,HD>/&2B]B)9OWPX/M$Y[0/-0-U,=_T(8R
MQH*`VP!B`A6RUCW*RXUL6XYX@)YH9XUO?=!F.VQ;S46?LHOHX7,\4F_^?%-S
M)?*+EB$C@G$N-+10*%;>L!@L72:WX@3/@G:@JZQ+3(^U'A4`231`S(\9#:B$
MA-%@&;MQTS:C=H"5!?N<D-KBO<=ZU/IZJLV$H0F41XDZH3%03`)+U7+\*.).
MZ'+V;A3>K!*U';J_8ADJ4G[]H`TS`$DJ.0+2TJ7_9K#MUM$!IGPZM;\#T<>>
MYE,OPJA4^K47X,]LFJ37LX1Z7#S>FK;=3-N@PS`@3B``%;.*2,(498A7R`@C
MVWK*`UP4]N(I!T%]F)V0A]E;73YG"R8KR>+B[WE6;(KQZDC]VH@R$6`+#046
M$FBL)96TY04JIQ/G]6)C'>,[:"U5]4+T4ZNIPM8OSU0@`@(<$P(J(!<W_T"N
M`EEKTJ=74X61DUP(QYD4S"]\M8&J0H0'Y@33`+L9QJXU5=OA?5R9:FDXD5`*
MHAF5#"OOW'0EFP:MR\(/T);Z4WO#3/5V4!]_IEKAP$M'A%-06J4E%`A6\AI,
M?X$KH1IK?.M,]7;8'EZI%\7.6>$D(Y8JBQS2@:GX]_^>0(5?#[K<L@9L.XR/
M-;,=L(!(KI2U2%"I*3./Z#''VZYX#C#_L\\)K"W>>[*JHEH,?8R_Q>G]INB[
M`77(&#/"0%2N]@R00&*'ES);<$)!4C>JK[>G'2'>MUF]BZ?>X6:W\<7F?$WC
M/D+"M.6.4UZ>#O'X"E6=!(.":]%V0CQ`-S:XB>T"]+[RTPO6;92G27I=?(CS
M6;I=144RVC(SO:FKD&@LH5968@2X)H3YU72%!J'ZA.XI&LKLNL3[P*S/))/[
MZ=8[(YL["XU1UL>^A!D%RPL)@2*V0@1BV'9N/;:,]0`6V`[Q_G/8Y<@HWE]]
M>-++7I+7[_/K*$W^O3Q-G4V2\=RLTO%3YMY?+>\G65ZVV23+W4G_(7=:H\#_
MM8Q:*U09,\VUY_\UK'87<6#L5BBW,ED3%Z,\N5L@($>C[#XM]_`^>.)1$A>?
MO=[59'4YP2#/#0-I.`X@@@%P6AC$C5EBK;4^@0-I>[+-['"UN!=_IZ/BIKSI
MZ%LT*0'=YQ;><7A!+/T,!JW15F/-K.4"+^JB`JM(L*>+%O[(TOCACRC_&D_=
M?3HNY%1'>?[@K?+/:+(Q"U%#&:J`(BV=`-8'CQA*H!?7QGMY?:`P6"Y]B(O'
M!K:0K$]-[,>;9&E9%C._"L9_I[UVD^G'I/CZ'\=29S9"<J21,D8XI@C!3,)Y
M^9H-I*2D-@_36_'NHT9+1=;5%*PF")%3Y4`PEBCJ.-:.65!)!P/WGX"FK36\
MK.K='?Y!;BBL9/Y[G%WGT=U-,HHF35_2\9PFU%8AQ1&#$F/L?Z&F>@5.(!UR
M)W0V:5<%KWL5QXZ0#F(R\?5S3FN+!=;2A(A013%7`%D#*!&06;M$S/(3NA^J
M`QT_MYJ.4-W^PI_98BM_*(T&5;^4]H*>V,OBX_#+IQ6&\?AE:#1P0(I`:29\
M9.9CJ\5!+ALHH=E@=S\-$=IVH+%L1P`'.FOTLW=4#RI.1S>W/JRNF5SJ2$-!
MH$928VDTT=[)0B)5)2U5K:OH#W"CK.,YIF-D]V-'%</U[X"J(0T#@IB54B`@
M+-.8`T9$)2V7IW#95/>*K[6HG3!N=WJMO$`\'3]+H/UT^6[Y7<U+H[;I)`14
M$L@T(0J#@"C(#5K"98EM>[G#45A.6P5G`Z$]A%=:Y)J+C_$H]MQ[GUQ[G=DZ
MDC``7#.+B<,(<XN1P+2:]I5QJNV-[\<PF^UJ2QUCNZ>XZ+-_^/8A44456D$<
M@9C9@#)5_B&8+4$CLNW-5`=8O]%_--02U+T83LGK]C'0(U58#@U(07G_DC44
M0"T)J62$?N"<\B360M.U^;VVR+8+>NZ+:78;Y^_3]5//ZH8AY4@+Y9TLD\HO
M-659=[[@3C/#3CEX::.CK$,P]^(H+AK4UZ\G"@U$S`FCM%8>*VRQ!-4<JLL7
M%YQ.=5;?\TM;3/=B-8\'ZVMNAEE+%@(<!-H#1ZF#6$LJ,5R.#0=-6\LY!D?3
M0M5UUM,>V583S+O[TK^]OZI<WMHW%+UH&,K`+]8L+B_/XDQB#-3BO@7/G5+L
ME%<T[?7>"99[J34P"YU\R+.K9/J?^H*Z'65'-:&<_S][U[;<MI&TWVAKSH?+
M.69=Y=@IKS>Y1#$29'-#B2J2<J+_Z?\&2="R+!+`"!C`-%.NF)8P(/KK#S/=
M,WUPU("O"[:GPWH7YQL19RV*F`^#7:W%YG2I9U<62#M$@.>8@6",$X()J^5Q
MR)_1-FIF_2_[Q#V'$5$_H5NN-VOWL*HP;4&DIY<7#ERP0*L46(&-P!9,=%)+
MQ=.W5B>X>$R#3:\`/P>EWF\^EZO#LVZCV%HPZ\2H`H&O!P:3YU4(,(ZPLEIQ
MD!&1U&R3[OMER\UL<<8$ZT\'HU@UORR7UW_/%XN+/=-$$&HI5@H)@QR8O!%;
MIAA"TFLEF;.T,8%PH!BE0ZI\K<GV19B^&5%H55GQG$LO"#,<1%*FE@\9?T:=
MR3+SX6A1IM?@GS5DLLY$V0?UK-N&3;XTKC#<&!0)88*"42<]JGS&O9Q8VS/:
MCW^UIH_%3O:`:\;XR;8QD_L=:T.ET40C6(B%QL0)K0_OE=7)B=I3Y$<_^GPY
M5C()S:0MM/\L%[-M]_K[YIXS+UU;:$L==@91J8@V\(0HXOH9@\3G-".DZ6;9
M+X)I6BYOYU?+N^N'*P"_K;9/C"D(10Q[$4UDR@:L$0JH?F:JDL_G)N@!]Z'U
M_I!,TGZ5:[K^/+_[])^'^_O%O*R"F%J2H,70PCEEC:F.)#FG&BECE-M+P(,\
MIX+1/7"A?T!S&`.U"=3FF/:[:PL)EI+TSH%Y%%P(3K`#Q;DUR<4[ISA9]&PT
MOA;+G-SXL%PLXG+U]VQUJO3*"U<7FCEO(Y:2$<I,Q*(JA;Z7209Z1L[K*_1Y
MA!GI..;D1E/!^&^N*ZP%:XA[)T0$22BC3ASF/XIYMBSR^W(U7UZ#H;_:9&%%
MDBZ/\"(%R9R,>'-[/ZL:'YBKJX?;AVTOQ]V/JG6PH5Q=ZWL4D6LA,,(FPDI:
M-2GF)M3RJQ#-X"N/WC'IKORT[5;Y`Q.J;[!SDJT%EPJEC;<46?##L$%572M=
M+]$\@F^6RXK]D2>=CB#FI$#=:,4_K*KJ.UN06]#BI6&%YR1*B4QT2(.8&'ER
MF%4)2^YO.,%HPR%(T@.D.8FS;2Z\V.GJ^G\/Z\UVDZ\%=5X>6$@B#>-<T6!)
M")Q(*0^O"%<V=9[A/P=Y>@%UPI:OC-1I)X*,+E!O`Q5V+X<(0J96IA!IBU"X
MN_[A")*"XQG:O=(19SFRR!L:A0&G4M?R6T%3-^7EJ^S>'Y%.?4,].:M7H&`<
MC]:A2"RJ3JT.3\]H\CZ^^GDFG(X0CA(G]`;^OOLT_W-17FHV-H:&"`2/;R3U
M(C`NL=1.5@F^U@='*+6-NY%MC^0.6\6U00P/-=^4\*QO0!<WVW^\G7^!">>@
M/;->EQO[^.OL?\N56\S6ZV/A0CU_0V$8XX%*;I7"V`,X=!OAO\4D('Q&63*9
M.;2<@KYR+$K]M8(33B@#;B(SAB)!D-';,E1;V:Q39]!6<#0VM.P0UTT#8[&K
MOPYQ6@<6;/024:P,IBA25LLK/#GOWO'=--ZY0UPW;!-#G-[.'C^65_9?O_^K
M*<#I^94%\8Q3Z1SUP<.3<D,-KY\OQG.8;0;0U;)/3)-T?JSO7$H_P%V05B0:
M>8<)TM9RRQ7Y.H=*:E-W9B88PS`0#WI$-\>*$H^NK^NG"VR##=/A+D4D*%`7
M#).4:^6-U>)@,V++4E,4)\2PJ=@UPVEE9&9^??9WL]MFRZ?CG0JNJ`#OQ5!B
MK$""@UM#:RP0-6?47W`0AK1G80_HYV#BNV75K^Z^A)?W$ZP.6Q>XL<;<\4$%
MK@(IJ538<DI)"`Z%VBZ@0N(SLK,'T_UR(+"SE'?9%Y1X.U^WX-$+5Q?2:R=C
MY9]$'TGT2IG:,*$ZLC,*-,U%H->CG(,YO\TV@%EY#6[&Y[OE8OGIL9$^QX84
MFFMMJ*ZJHD2F@O46U48%]5:=4:O)7!SJ">H<1'I3=26\`N?G`R@1OK`J`.O+
M+^5B>3I7HM/X@@:P4RVF`F,:JDKZP=06`R4.I1ZZ33!^*!?%AL`]!]\^KF;7
M925_\WKW_-("<6N=0I8*(P`OKL-A%P6D2TZ[F6`@42X6O1+B;*5&O@.AB3LG
M1A724"P#-9Q@3``IBWBL98S"I'8VZ1QR=#XTZ@_M'(SZ`(_95-KY<$VAF4<R
M>BPK)P&)X+@\V'Z,V]2E:T+6T50VJ5(QS\:9QEGGR54%8<[(R#1G3$OE/'+&
M'[Q-+,ZH+D""WE[2?!)N.73_*W#_]N&V4?O?7`?SGL).;^LH,6DC8^SK2LH%
MRY;2E4G_7;7WO+GG*[#+PH'9/^TX\/0ZD`,64DX\!A.<:64"\ZZ6@XKD-M43
MW)WIA0.OP"[IR+3C2K=^>R(7_'4W!+O;:U$UOJ9,$OC,%1)[:1E'\0S*>8]M
M9615T$@10%^+4;^_^7U9-5W?'D"7Z\VZEKQ;6%"+&Q:*"<^Q)-7V@E1(@]N`
M:F0$YF=P1I:+.LVA1/WK(R=3W?+VS_DN&N)#>;7\=#?_/\#M&@2:W\QG!^1J
M20#CM_#C^0)$+]?PNX?;IS"WB:3L^1L+RI$UQCO))*UBZ#U#ML;6$)RZ=3"A
M!7UDKH^KL)&#&9HRYYJ&%IY[J@1W$5YS'UB4\%\MK9?)M>BFME>1GYX](S\R
MSYZD=IG;Y6JS#_Y/8]Z1FQ76$XP1PHQ&[5S@"DSY&A$G16J)F_86[;<)>1]_
M(DKVHY*12?JN/)7X='I@@9'U1G`<*9)*H\`1";6D5JO4[GO=3XH&JR8^/=9U
MQWU<AOUW7=X\+-[.;TY5GVXSO(#7R'."JD!NJ2W(KUF]5;'=OOKQ#Y0FQ[9D
M]$?*1OT"'Y>K^24;M3F3T&E<%2^PBF@/Y#!8"+?O0A"X0(T5K`8*N'KB>?]1
MSC]]KA;7+^4*?E#UZJ@U_'@J`*OE+0HIL*!(4:.8XPS,2DUDC0#R](R.#C(S
MYGF8UC`*R1.VM7\V6'5;O)DO75[$4-6L(HQ:)I#31LE]=WF0RBA!?OS-C&G0
MK`?PLU+JP^SO7T'X%:!0U>JMR_;"T[^_J:+-5E].[KUUND^A-&.TZI]'+3@C
M0CKL#Z^6P3;54I_@7/<Z&ASCU``@9R7;'\O57X=8QLX4.SZZH$$;7Q7A,\0R
M0H@W^""SI'KX0I@_.+%Z@S8KG2J/8?VYO*YJU72GT_'1!97*ZF`$XI+Q@+T#
M:/<R1VY8ZF(YH:W58>G4&[2YK:N65E41-9,,1ZLQM\@Z*IB*M116\=18C^XG
M^(,WL!N&(-TQ',65K[H97,W+BP-_HA00MM9HAJA`S(,N-=6[-H)!4!HE;GH3
M!CJ$WNG27%TM'^ZJD_.M)A]W__\("K3PO7^=.E-N=8-"@H\`1A8XC#+`Q,;@
M#ZVEC\&=46G_S&QY?F(\A#JR)'T^A:H]_4X-*S!&8'CA&`QU5%KP5+&OI?3"
MIA[\3M#8'9=T/2HA!]7^NR[?WX3U9GX+")RR@+^]L-#1,*D8TH%;'@37`85:
MDL!TZ@;D!(W=<>GT*MBSI#WLFIKO0W&Z35B-8PL2L0N85*8BE]$S8H/>R\NT
M30Z1GU#0ZS1HUK<FQF%>W;1Z_YM.S'LVMG"1"&\]B3IHS`*EGM=6`8-7+=6;
MGV`FZ=28]SI-9++/JE.AU2X(<;[^:]<EO?ITVCP[-JI0ECO//*%"*4T5#I23
M6L80?;8:]^?.MOYTD(5GLW65M%_]5;5#_#);5"!\*`&$^=6FO'[Y][N9^Q01
M7W';@L7`A+9>:BJCU*:JY%NCQ)Q)G1?;5]'_69B:3TEY%NNK$AZRBKCN8A\>
M&U2`W1NB)B8HKB,X\!PP/I@CC*0V<^A<H__<:=B;"K)NRK>GV+$A!3,R&NTY
MBS@ZKGT%UU=[%Z=Z'OI"L$$4D*6BUFIY7ZXVC[\M9G>;IRV*V].M[2T*&0@1
M`@4KE*$^4,:E.!B]FB0'/:`+_[)H)`<?#\WC[KY/.=G_JM$6;'V/"F"8Z#DR
MA`8J@XIN6YAL[X8EM^'"EV.+8ST!>U;)R)1\_N_74//E>Q46H<@(IP%C\-UL
MU5WSX,%A05-S+_'ED*,]17M1319C\="R[/W*S]?WR_5L\?[F[?+NTS:;H);F
M:O%PO4NB?D&L#G9F_]]6!`EVMT/$.(>"X\X2>O#RA-;)I8$OAS#/;=31E9?C
MA0#`[JYG*\!S>?UPM?ECMEJ!2?38.$^?'%<0C4G0CHGH&;?2"VM,+:>Q,=F0
MO1SA+(=30Q:Z?090[6Q=7KNJ&O?=>H?-_1ZP-]N-6GB]*L.\V5A(N%L!-I/B
MQ`2.52"4>LJ<VV-B6'IW<WPYXWE.S<&5DR5/%-:`WV>+A_()2&_N`)J'VU;;
M[JW&%YX)&QFE$DLGX,UD1-8A(D9JGKJ_CB]'0<\S1P=01Y9=*'A_=AAM:ZK^
MMH1'+C?SU1:6W1NTNZ*9D5UO55@<!8J*(LXIHQI6#H5K-$AHCML\1L[+Z<]W
M>8>#:B;/^CZ_OP=S&&3X-U@F</]/5<ID>Y>IW0T*Q:(.B$O"K&.24^J(.4A.
M<#(G+T=!WZWB`^@CS]GC2_7OPS^5)5(V3I(M1A=:4,D$801I`RX=)I'7P5'&
MR_1T[,MIT7?'D7TK(P<!WY5_/PE"7RWOX.-5^<3,:#\I=KU5H;$D$C$C!:W*
M84:,Z&%A<`:G]NHDEX.DYVVEAM7,.*E,QP['+C5*FF@4I,`\8LI$J'(7,==Z
M=S;CN1*\^2QB(*/L4%WWJ&JWM7-/F64M;U$PA:UA7&C.N8U:`\%UC8`W(?G`
M\%PGGM:,>6Z7#:.042,J[.-'>(B&#APM1A=286I@.E<6IMD@%55&[&76(9)D
M[V!Z).R?!FTC)9+A'I5BU3,W=H-M,;K@O.K\S*.C1$1POEV5(+&7F42;6IA]
M@A3KE0%MV96,=`YVV0<`;.<3UQ_?W-ZOEE]:-GYM-;X0RF)/B"$(WML@25"B
M7AET3,]%^9$8EL*"[PI(]X]U#HZ]G7U]X*J`3R>"-0\N+`M:4Z0<-4B#\":8
M4$O,%4\]H9U@T,R0[.H=Z!S4^G4&B-V5J\>G8+3H8'-T5(%I`+FD)6#,@G,K
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MJ#:OC`[L##J`CW_*D(KVJ/QJU4&FQ>A"J@"VMK55LT84P-+VLMX[,H3PU#".
M":Y)?1*@+;>2@1Z57$W-`$\/+`2Q*`I.`U.P4F/#L3I,T\SPU&V6"2YQ8U`J
M!>,<;'K2^<V7H*BK^6Q7=.M^4>Y#%IYVA#LJWPG>]?45!?*18(.]CEYI;<"<
M#(=WT;`P_+*:JT%@!J*.I)11)\C3M=E/#2O`"79<&<YCL`A>8@RV;"VED'[X
MWI39:K6/,3EV1WB4\,>3T<:7$,BF@#9#`]%.TJ`8QV'K`.Q3G*/'.#8&QHR0
M#9":!U`HQL#/"56/7V"UPM%&5<M*J#\C^SPS-[HD`'34PGBY)Z;*S?ZTA>2/
M^>9S+$'9L\4ORR_EZJ[ZH7M8;Y:WY2H^W%7Q!!^7[V]NUN6F2K>IZ@P\5'3H
M3-4^OK2(4AFD$`<'24HD#*/"U`@+H5.#>ML[#;E-LBG2?01-GGY7JN:OVS<`
M"8JV_-^V@WWYZ;>M?7ZIBA.LPVQU]R*3NPPO;-1(,`ZFB3:>:41XL(>WGIE\
M,2>#VVKCD'%`98QEUCTIHGJQXQHSHF*(5J$`^A2<<VU@PMA9ZI@:AAK#3P=;
M64^6PC4;-UNM'F'^VV;YGUXNN]RI",9@R92UV+.J[X+F%.WQ8$+J,PK'S<R?
M[Q>_`?4RRM13YU!??,B6W&&4,^EC,)(JC*P@ANZ*_WNM"*8C^9"U&NL\>!#I
M(RR"Z_OE:K,7&$RM$^"TNT'AN7!$,XF]%A8D9F:?R@R?!0N7F2:5+4=*&_2J
MCG$FF,WRZJ_O2BU=YIDFYE!8HX+6-E*PCF5DUMDJJMKZ8+%$I+$WY]#INB^7
MT'KB"*[MX]=K?IL];OW$OV>KZ_;YO*_\CH*J0+E%B$=E$:4L1NYJ##T/J?V4
MSW:V:LVYHPF_>366Y7AR^W#-N;_?7%=0H8)5')Y?$D>HDN#5UG(@EIS"-$'F
MC:#[YP>)KT`^3]VI5%R^2@9O\6)V]VYVVYPA/,37%4XI[ZG7Q"-PD#"U+M(:
M52'E&76(3613JP*36960Z3!A[Q!OS;SFH/:7KB^D599K\(F=D=I6Z8CN(!>3
M^HR.JL:EQ='=C'1EY"!9N+U?+!_+<ON4NQJMC40[.J80G$K&+;S/"CRP8+6N
M%IJ]C>-I<OFI"]E.DJTOA4PO:PL)K)R50GKLD4+:D6V7ONWS6VR&/X#\B4R]
M5-2GF=:%':.!8..4UQP`,-3[6@8J3&HTX037O02]G4CKZH;;=%-ZK/`*_FB*
MI:0\8DFPV,M!$$RN9Z;_KMH[F=+3#;OIIO9Y:C5B,`52S[T4WAMJ:CFBI:E;
M5!-</7KAP"NPFX2K?VQ9?-LB[>OU-R]PT)%:6'4)0Q:'R+VO9U]""$^=<2:=
M%C:6K9)=75EV0Q=;4H#+^*)TS4&K[6Y0@%E@C/9"."(Y$QYY7N^[$(F3FYVV
M7QIS1_7E9,OS_=,A5))U8Z!<?9E?E2\__L?9/[:\*V_FFPB@=R-K/U]0(&.)
MD5))[Q1"L-(AJ6KD?)2I;7TFN,:/R.)1=#6=*7<;]PCBO7KJK6]4!$^C<Q%'
MPH3S!@`XK'LD^`R%TYY-P8/'LDY^"DY433;#]\]F[/Y\CAV(-E_M$OS*U7QY
M*HF@M^\`_`11-B*&HV'(!Z2L/3@.TN;+I3OG"7DL=4W:S]O^[_=RO6W)L)4.
M#^'QO?`UA?,8>1R($*9*<S3$;8M];E$$3_R,ZL^-3?IQ-#9IWN].?-;O'S;K
MJBLH"/EAN5C$Y:KZY1!OP,DO+#3Q`*:BSE&*A+5*TL/NH20A]5V88$O#'_%=
MZ%-W/]A;\>[_V;O2Y39R)/TN^P"SN(^(_8-S1K%V6Z'V]/Q$T&19JFV*Y651
MGM8^_:)(%G7R`NLBY0Y'VY8)$,C\$GD@,_&P)WK<^'<%`145D#`%`*`$545W
M<A-)9S#YT>YC9>''\M3[?3&:+X8I$0W!LCTI26+H.0C(JI[O:FT/[NLRU,*W
M!2`-(<)!Y12ETFK(4$U3;)RZH&N:"Q./TYF95&B\U_GYML7Y62];E>7#?3:Y
MFGW.YK?O*H0VOB8`8YGQFEJH`3):<2OJ&"\F@EW2_=`P8#X`+G:B`*JLKZNX
MS&QB'^8;%V>YJ_)92ECI_LKFX[S<V4SB^,F"]MX`)IA#N'I(Q1,#ZJPU#*G:
M6TQS<L#G;*Z36CK%VV;9.5@QD8C?L^4#"!M]U*(5\\ZW!6RB4:@]49@:X8GG
MD-*:IAR`U(NHPT-`'UT,>N?I.<A)O^XP,A@*0@!"UGAC#%CU"U_24QB2>C=P
M=&AHY0Z[V>27@'3'SG,0C[6*K'*36A>/-]\5"*CJ0:"J>L@"0)&5VF]L2\_W
MOB*\13SX!7D(_4=.3V7;.8C!2\?^7UE^>Q=-"O4SFX]NL^4_VFAC^%$^W]=M
MI^.5!$6\Y<)SHJN&@)A3NZFPP@2R5"M,_!*ALV'J.0C8,UWZ:ONUDW8]S\=9
MI?:_=WF/=^!B@C:>0&*A-@@8#JT0;!,%<=ZD%OK)7V)V3GR]($GK7[P"L(I;
M0[0WR`@*&8)F$SFW"J6JKH]P5]@XO/N1Q",A,`CQVUK@<8BN;TP$FUM%@`81
MS0UU#BFLL=1@4S)-I!![>]!]R-O(W@6P-P"T<X-9'G8K=:0X=?;=P3D+N)'Q
M/VZ4HT`R4&?7$4.3W;#+ONML2XB&RO:ST%_U!GM784<M),B("@^IA48`J23$
M:/G>RI(3P(#4G)I+RL(_0RW6)@;.0AK?N:3K2QZ/7$I@T?\W1D3C0G#B+8Z_
MU]<V!(I?)0+G*9'MHF`0,GDQ`1;K"7`TGH&6(F$)U.Z)]E5+YU^WST.5PEX`
M<`["]^PRLB?A.W`%`7()M<#&<^,UP"PZV&1CC!"3W'0"7)#^Z__*H!UN#EJ2
M-M>,2P=W[>O.)I^SQ5TQ*:;%[>,!;>D[^/;`C+&&8"XXLI+)^']0%Z83Y6UJ
M+T0XP)9FYRA!K7'R[*3G)B__]/,LNYI%I&3EXF:T:$4#'?K=@0.AB-<.&N*D
M9=H*O#FM)/<7U`MR4.AM4[(:X/.@6W>\M^>J4\EXE=I]O[>S02M?&E!U/RF8
MIDIZ[X5BSM3=(@C%YI+Z\0Y=DH;`X+-33?5F;?XSGV2S29>JZ;WO#DH!3Y2F
M%%NF()70<K0YLE1RG/Z2+LK.334UP.>SE:L_BFF<9IHO'ON0K)??'B0C%F!O
MHXLJJ"``:BJ>G%21&G&_I#NP<Y6MDS@]:.FJ7CQ=/%[-(M4?EA<07Q9WV?SK
MW6BV#M'\5LQ^1H,WF[3<Y"=I(8%[C3'3PC%)F(G6.%9U\VE*4?(M%[PD"[''
M($473+T0\6JO_NO8-00FA%&>&82I=C:>P%C7]0_44M+9&TZ#SPQN&=[=2V$2
M`,Y;`/]8;KS-(OXCEQ"(@,Y2;Q'R4C*MB$!U'@W5-+DL\W"5=C:5_9<B?R<!
MX+S%;XCZ#T*EG<&0.HRA,YZIS=.YU&*=&K\_.D@R\,2-2Y&^T]A_(>*WMRIV
M,.[?,2L-`BM.$2%:4H44\%)LBBLH="BY(>8E!3S/PC]LD>L?18('+K:!"HX@
MQ%$O&*(!]0@KL3EW!?Q5D#H4J1F@]!\)GO,6^9?NPC#E_L@U!F<%T1P0*96U
MD6/VZ>5@"JSZ2$\Y?WBQ;Q<[YRW[EZ/NF55$4:<=9@90Q33A&T?0ZN0,[8_K
M99^YU+<&G6<"_U__^1PUT?'Y<_7CUS]=CW^#@-'](AO?E8]EY2[];5S<KR`4
M-YN77[Y?/YME^=YH^7(AV5^+;#;))O_1[N'S97X[FN7_MUR&B80MIOEDQ:79
MY/D2OWSW^6PT&^>C:31V%ZOZLP.2SQN9/TAMJ*(,TRI-10M)L*R*8Z!S!"NY
M/[V\'=K9]<EQD_W,9@^9?GR&;)N7XVE1/LRSKY&3.B[@SQU4.G*FH`76<>?8
M&:*PEAA9[FMZ<,<ZNW1KWP#J&#]%EWSIQ+C8/(=\%4_,683!HWF85Y1?'CJ'
M@//0*0($D@#IH0?.4<]E)#:N=R^\O*#N-/VBLB6&=`''ZWD13:C%X_4TZNE(
MK$K1_ZBH<@@0]P\.7FC,@)7`2*LPT$!KOMDQ0ZG]_@<8P>T7@HVSHMNS\.]%
M,?EW/IT>=_R]&16B`<D-$%Q1Y*'$C@@,ZCTZV<'S$A\$;LWQH%N<15KDB^Q3
M_K.*4"RBY9#'\UF59;8H$]3OP;,%*BQ%6!K!K(`420@47-.$4&Q3-?$`^WD,
M!9=M\:9;O,9C??(P7OQK5)FYB\=/^>C;,I$Y`:R'314L9QQ;;9&&1@)2O5VQ
MH8;Q!'75]^+C(+45QG0+T^?1)%.4"U_,W\:1GO7)6;^ROB3N^S&I:I92+\V9
M!*QWN)X`F2?:$D4JTQ[B*OPF:[YPG-S=>H#O,`Q%8(;+W6ZE[OV]/'_$2XT7
M^<\T=9$Z>9!62T.XTL0:BS!DF*O-.:5AJ@(9X*,*0Y&'CEC5%[B?WT,\WU1U
MF[`B]U/)UTE`3_^BP+@G7D2_6G+!*3*>^MKG(0JB5-`/\(F#X8&^,[;U(`!O
MZO9OLDC!O*IJ7&XU$OW53_X9W9Z3S_U&OS9H9IQ$$`')6=2EB!.FUU26G.CD
M7D0#[.8U*.GHDXM)G<[C:K(X\"XNS&8_LVFQC&!69;RS,MN+Y6.G")883!5'
MU`@`L=(6+K/.ECOR#*<&"X?8(ZL?7+;,D5Y2`VHWW6:+43[]E2.P'2W1AE20
M(&H9`)Q+RYA"*V8"$5VIO>]W'GAH/!UZ:];DV4K-;SLBM@X(0$-#*$/1(D!6
M&@"15O6*K36ICZY?['EP,(>+%LC?A35V4\40U%]YN4-8-I\)UDC#`)%.`.2\
M41IY4J^?*)I:^CD@^#3%P*(9$G8&@<_9GO+&9Y\*U8V^$,PRA(#&'G/C7;T'
MYGUR5XOAP.`$OKW'^22Z=<'[S_DLOW^XW\O]%Y\+T`$JL-<FD@%$JBI'6+T/
M:'"RNS-0_A_+O:(YVG6"@=%?AV'@^>>"8UP3JPT0@`!K#+54U/MPULG+R;QJ
M!`,GT"[)T=QQ^;:NIMQO/&X;&;CB$&H(`:!,,FFQVUA%LFH.</Z\;]@,:(>P
M:<"H7@88S2>OUK"UO<C^0<$8A[&!GF*J@>(`$^/K50N;WN1JL'`XG7]%2\3M
M1%\4/Y=>TM5LR\K5>#Q_&$T/J\A/F"U02"F,WI@D+*I/+(UV]2DLO=074(S7
M%N"ZHWI'J;WOK-E,1V69?\^SR3I%>7=^[R$S!.RTU1!9H[R05&CE7&VU218M
MNJZ.N*YJOUO%Q]O$WA9XT,E5UD[:K&_M=D56#IL@&&6CR4FHMM9;6]61(;C1
M`5BE=@D9;L>M+N'7"@\&@+YYEOV5EXM\=GLU&\^S49G9;/5[.B"WSQF@EA(J
MS@FEPC"FL?&VIH\A/!6C`RR#&!`X&^/'96EKR`RC7E@>-PN$HAI16>^=(I&J
MK8^ND>BF='N(NOHX#G1PS?E01INY+'_/;E>D^E[,[Y>3]7*]N5[&3?:CF%?2
M>\B36EN&!.\MEX188*76QF*OK5H5FPNJ]?Y@3#<[/*XX^8#105?/%CJ`#=8"
M(0>K8Z[>-W+)'5D&%'5HCO6OM4KCY.U3@OO,4VA2D'%UJU2]+Z,D@H`+8J4'
M@%LI$,4,]"7(3QE7KQ;^C`7Z<?V/V](23I@M<$L49]`CXQ`Q2&%DR)HNC#I^
M2<^5G0R-[>ER+9&["\/1%+-Q7-Y\E>&7EW_JQZ_QR_=D+>P8%3CF3D@)E/4:
M,LLIT*K>H](Z-9EYB)!J$P%%6Q3O!5756FUQ/\IGQZ#J:50`AD'K$#/1VHT;
ME=@#]D0WTEF#R/91U0BG]Z$GF;(=.K-O%KWW%GWWP`"]\-)&3]U1;XE'""!9
M[S3Z\LD9NV>`H11^O^^>-D/<GE2;SF;CN_O1_,_C]=N+H0$(ZQP74?R0`DP@
M*"G=[-8[<_ZW9`-1<J>0O1^0U0L^7MV]&AH@TIIC'[U#:QS3<;,"U;OUDEQ0
M0G%SC-^+J)-HW,G5PVB:E>L.9>LSM[J3WJO\=HX+PFCL)--<"Q0-",8L=/4^
M+>2ICW^>!9926?[:X6N0P%T`J8[JJ/'_/N1EON3<;K6W940`RB$L!)!4:PTI
M<7KC(G,K?&IJ^@#OG[K4=LU0NR\D57^<9_N=NKUC@Z%4<`-I]<PG]QPH9C?[
M=5BG9KL.\&@ZF>,'(.@4VJ8E/1:?1H]?L['^VQ]_VZJDMGPRD*IBFD%`5;4L
M;+QTIEX?D?B"U%*#O"J:I&E'V12KXJ]7%PWE'GVT<UQ@!$B`=-3A2`CCD82H
MM@DC&5TJ=@;8K:]+K=0DS3O!UFIY>_70B\\%0(BBVE-$L+,,8"XMKO?!)+F@
M*IN&^/G^+6<2-1.US'0TW[0EW:=GWGXV.`8E!$929Y#&DA//1+U&Q6EJ#\4A
M<CR--T6S%$SC<G:?CXM9Y5H5!W-[QYC`L.#`&FVY=<N4'&(VN^<:IUX;##%.
MUP#7FZ-D$O>OBVE>WD6M]OO#CQ_3/"N?=R+>#8(#A@;FG;%4(\,8U98Y(WV-
M7^&5[.S1D;/`0O,$[:;<,A(W'TUOLHCC<3ZM+*0JU>6`^LM=`P.02%C*M`92
M&D"Y$U#7.^4,IT9BAVAJG@2=5LC9H17YGEW]:4=1YS'#HU\FH8/5@[*`>J<)
MP*KVRX3R,/7.:(!=G#OU5YHG?1>`6[TW_.7[EQ]9%:F.Y^S:+-^!LJUC`G,.
M1/,LFF&,\[@S2;S=[,^PY*=N!PBM1ME=M$/@GF*RU]F\NOD8W4;!^Z-842=R
M)"L7Y3K4M*M8-&W"H)B4(-+"`R2(T!0274>MXM]`ZMW`<"WL=J#7"?6[OK[\
M+=N9K/ORDU$#2*\%L))*%JT#[#'8F),&)[_7?;1]_C.;?RO.&4NG$;8+D&P.
MV*O9N+C//A7E+KWWSJ<#TD0@3!F`"$,#M%.^SH236"8_-#!<B[P=J)Q.VEZ2
M;)Z.1K@#-[N&!:^8XE!;`1%#R)*HW>N34VJH4AMK'&V-G_UITR"5N\#2ZA&7
M':A9?2!(*;@DS'O`#5/*,L5@O7)(76JT:(`OF;2*CB1J]EGQU./CK4T6/&D7
M26XPM%H1R(VQ6M!UB1GFQNZ-6`VBX.FXUN/'S!BL=A@8;:4CC!"N+`)Z0Q]L
M+Z"O4G,0.:WP*9'D[9\!IKB_SQ>KN]#9)*JQ:@O9;)SW)/X[UO-41'K`F7#4
M/($12S4P`GK/%?/<`K'NO8%)/./WZKD>:7'(^7#<1,$9)PF@E#@/.8%:(HUJ
M:B`G+R@OH"64O#$.6R1_KT=$GY71_9P4W!/"F.4XNH70<TFI$:OSFPHJY5Z7
MNVV3HKJ>7#Q^SA9WQ:1Z2;E<[>SPLNE=$P08-2)AF$L/)64:".%0O7N$^`65
MM;:$BJU61(-D[\*!K&(D+XBB'W\;+2))JJ?EZA\_[LEL/'R2`)ATCB@G`-<>
M,U4]15]30%EZ055`34.BZ(CFW:-NO?"]28\[1@7BN$32@^C6$VBYDY[Q>H]8
MJ@LZT-I@_$YLG4+HKL#D(YG,:#&*QWCQXR[;GR*S?5"(LH@LI9P+I(@6/O[R
M]0ZMO23=V`B?W\%.(X0]KZ(R([CE7D2QBF:#8Q!"@NN]2<!3&\D-\>*X7;W6
M#('/OXX,<""H</'<YAX38B"1ZZY:5'H,+LAW/YGC1]>1'4?;I.Q?_?6?R_R&
MV9(!H^G5;!Q_]#F;WV;SW<F_^T<&0@A`4;%[8ZI\1LBJXWF]?LK8!6FH!GE9
MM$GC+LZ;]Q\/?/:X=Z7**R_V:W&=S:O8M2_F7Q9WD4D'M<%J9/Y`F(26$$R\
M=!QY[R@D-=TL2C;$AYB7WJXB[(,=`X?Q07VW&ID_.$"HJ+K%8XVMTT120&NZ
M&:4[:^/?P:-%W>*L.90G<RM)H7_-[BN>EK^OHNJCV<3-HKYXK#=@JJR13-U&
MS;2_P"=ILB"ELICH*C09E1SE&CW16`)Y05WC.D9%T3%K.LE<W:.=WOXTRWX;
MW>\S$DZ9-FA6M0?FF`CH)0-:<U%'UR6GR6^C##'-L5W;H$,N=('5;<O=J^MW
M#PS82A/WJ)#TD=!4,V`WO@%A/K5&:8`'9C>`*%JD?I)2_N]\=ELNBEGVCV(Z
MB7\VQ?V/T>QQM_+=.2@HI23!FCCL@17`4,N?_#Z$+ZCXJ"GV%2W1]C1$O"C_
M7B_CTV)R(#1VC@Z>$P,MC_0@#&*'%#?UL2TA`A?PJEPG&&F2R$,PJ<I/AQ37
M'CQ)H`H;P%TDL98F'LN6:;ZAKI6I+8$&76+;B[F43/,N4'?]$+V.49E]^3;-
M;U\\1/->S^@W'PY`*D`8X4X8H9`ED%B].70EOZ"&=&VP^77;Z%/IVPEBUB_1
M?2W6L?+K>?$CFR\>KZ>CZ$4_:WVQ"TD'3Q+B,KCC3$$OL.4,`H'AF@)1,R3W
MDQB@.NP"86W1/<F<^O+O623J7?[C)K^]6Y0W6?D0`5A4S\S^3S9>E.OH3#;Y
M/8L4'"VRZ:-^O)I-\I_Y9/DFXGSQ+`']M;G5S.S!<0!X15.N$!&6TVABUG2(
M<OF1KAS2\=<?0Y*`68?C1B\CA'58[FLVO]^&N@.&!L@T8S*2CV(L)'8&;0YU
M5<G9!XI4G0BIYJG=(%YNLE7G@64X.?_VL$RL'WTKYO%C6TLK3YHO0&F190R[
MZ-\HK;W1O':9E*(Z%5GG:-2W@JS&6=`@W*Z7KWS6*_S^K"W=33Q/\WEUV_`Y
M^M6+;#::C=]+\V]N\J`5T,PJ3!$SQ"+N*-]8#]"15"`.L22X%R"VRX]N;NJ7
M33>J;,Z_5X^X[DX>>?798`QDV'I7)7H:2+VVI@[V*6YL:O2"?RA\-47>I$-L
M^4WK;WXJHUD4:VMPV_&T9UC`3%>-]R@3&"FL*5.;*+"B+KE+NOA0P&B!TOW<
M]%4KWK@=3\TVCKKTVS)'^'_RKJVY;5Q)_R7<+X^XIE)U=IQ*,GL>48I$)]R5
M):\D>^+SZQ>01-FQ98F"2(A1YL5)AH#97W]L=#<:#6)Q_"HHC[XEA%Q*Y.7.
MI&*4?2Q>_E%,ZQOV+-/T_-OFK[J)S6^;`M'T:I,O#]^6]:0>+9[>,U<94P5%
M7&HU8!FPR"`M(`"[#PMCD-M.!8(_BEF%X+_`@;;M;?=J94:+Q5/\Q_\>31\.
MV;16XP,61,6`12"/,."2>^EW>16N1/:5CW]F+K\/S(MPK5HE_&]N3517O;IY
M6"U7,99(S5#NY@\'D_K'A@;$8A#"5339Q'()">>P*9E3AF57:,$_,Y??,=PE
M.D3,)M5LN<Z>+.?3>C):51,]FJ8`]<N/ZD4^K&PKJ>;6CYM;7Z=HN1Y-/\VW
MQT%:M)5J,3PXB97``L3E(\;?E".GD#=8"`$$0<?3(?U(OLE8M9#QUP>#TY1@
M:S6AA''$%6)0--(8@W/[V`YQH>A4N7O[O66B6F(MV+R@>5@DJ%K3Y-7SP7A`
M'+62((X4U8I%UWTKE\2,%*N3+-$],E>E>YEQ'I`E"&)&RU1%GWZD9>YQ-$U+
M6WO'M-7X`"CUF#DO%>8**@,$UXW<T&17*@V80-F:?]U2J@=\"YWB6BWJ<70/
MSF78B3,%004SWD"O'2-$1%1,\\5*&HW\]52;=,NT?G$NLMB-Q\EK7GZNQE5\
MZV_3U`_\A+6OQ?!@"4*I232!2-@8^4GD=E\:5R:770.L)>F673V`>VE*95(I
M8"<(M5%`PQ6#BA)O2".EIOJ*.C=TJ_03&'4BQEDIYK]GW^KIM)I$2[D^6?A>
M_OCU<T%CYIG#4FNIHJ'D'FF^,YSL>+/BWVB!ZD/_78!:PG2D3-$L:N[I\+T@
M+Q\+D9O<6"0YP1@Z8&GD[[,4+/<$[P#+RKI=7<X`L005[!;[KZ.?&[E;+2('
M1@5F513/<VG6E7$$84$;&8F$Q>YS^-V(TAVF94Q(NJ8DOFOUPH0>M"5[G@_,
M<"N(11AQX!36FFG6R"4\NJ)"KJZ-ROEHEF#)>@'\1?0#%'G[<(@+)X%4.DV@
M$?$;0,0T^"CL<6YV;X"%6-WRXVPHBR>`VR9^@XDH.$>Q]\IR[8CVR#5R:(9R
M*7%Z"=9\-9K^1I0X!\4B)[_>.RMTV$<]-"Q0R;1V$DH018O>-Y,"-U(*HW*Y
M,L1PIINM@0[1O)3S^M=\-L[R7Y\'!N24\IPXJ#FG3@#"\$[2]+E<6R;M;-YT
MBF<9]W4UFGVOH]>T>U_W<SQ]2`4.'^;SR3\QA#_HS1X?'B"P"@F!A8QKKN>`
M4@BW4J>[.W+;<0PV8CZ;13V@6H)++?BR>WM$3;K*G5LG-+&2&:=L\_;$H2OJ
MB]`1)S*1*QS<M%IT]CX?I$3<>(&C="P2FW`%&]OHH=<DDQ&##8'/9D07,)8+
M;X[&-<':*#E&PNK4A,8;P*(@VS>GS.;NN9P>XQ8*:#JJ7SD1MR+5K?7H6SVM
MTSGRZ#M_6<W'__MC/HW:6&[*-%ML]+:=(J@4R6/LK&`68P60]$TFV2,JKFBG
MIM<JN9[P+LRV]H4$[P\*B%D+%4(0<")M_!+CCT;"&/CEE@\,<.^W>Z6_SZKS
M4"Y91_!I])2RR.TK"'X=$.+'IZ!$@`(L$67:,;V5+/5!R#]8-&C^9*OWG8J!
MLS`M<UIH]CTUOK#5MQ;[A'N>#LY[JZ"2P$L'E,/6->LV!`R_OM7^=UZY>N#)
M^8`6.2I[=S^=/U75YVJ:3F&\Q>$`98Z.#=1)RXC61AN%N:!8-_44$%AH<R.F
M`6;G>B!0U_`6VAI(C3;_/4I-U%?-:3<S'2V7]6U=38Z3JN4,@0MM#9("13,;
M8Q`$O'6-[*G%\/6D['J@5C\@%\OD-#GLS8&WMOO5^T<%[-,=[D1XY(D&4!H'
M=PNW9C!WYVF`>;X>B-0=L$6.J3PL5_.[:J$FC^FL80OBO#,B8(B-%)9@*YW#
MRAK?I+8C@E+FQO0#3`7V0)IN0"T4<"T>3O2*WAT3M(R>'R$,,8`P%=9[CQOY
MJ)&Y8=<`2V3Z";LZ@;4@;5Z4?K6FS=LQ`=E4;@Z@<H@CXYVW4.^\/$ER-R<'
MV,FH/]J<#>METH0GI0<#85P`)APE%FN"I".4-1(!#\HU(NI]>Z*/</U</$NG
M=%IM9.X?$+@C6"-NG!<*8X)8VJ#?2B8-SPV>AIW8Z2F!W`7"):W+DY\O_HYN
MUV(UJF?1(C8;-.UVQD^8)1@O,1%$.2>(A08#0\C.GR,@-[(:=O:GWVV*[F$O
M7/SW`JE3R__V#@W>$PPDP<AYSC2GC,+M>0L(*>>Y>_+#S@/U0[*.L2[L,K7S
ME0)R%ABNB40>`"$(=;MH`0),<R\J.3W=4]))ZGWO]$18BR1[=JU*D_C/+=@.
M4^7`J'2QF(I2.>R80)12Y'6SID//7"YUAIWTZ8<ZW<%<@DIO`8CQY*;8]=-\
ML5;G:M,&/NT(?YTGDYD:P\^GTQ>=)EOU$.OR%P5/!%>`&P^)1P(9K.$SD@6;
M8Y=HF-,[92^JFS)[=UN=KB4]UE!GS].!R^AJ"@.Q=)Q9YF5T/AN9C'39G4.'
M9R`O188W^WCG*J'42CR?M6+5ZT<#24V`-#(((@F)I5#S)IB!0K+<"H(!9BH&
M0JDS-5`DO3Z9K(/>=!54/?DX,Z/[.CK3AY+K^T<$)]*A)F&8$%ICH+S%?O>M
M$'1-=WH-@UW=**+0'L[#W<.Z\F:]R9UNCEU4/ZK9LGZL-ML)J;7S7]7JYC8&
MS(=W=DZ9*2C$".9$6<LHXX@ZX':AE.<N=V]Y@!F-H9"R5P65(.OG*N4#JXD;
M+6;IWN,7$MGJMA[7AX*.XX,#L5Q8I3%D5BB(XN>)S$YBE%UP/L`:F8%0LG.=
M7"9,/BG4#1X;;#&D`'L*HM<J'%.-1)#(W(WNT_,KO:?F!L*RLW50@E7_5<_F
MBS5"&ZD/<.KUHP$AR3RGRE.%G;-(,;P#1C%1[L#>GV*WSM3`[Y/,ZSV)%R`C
M2'K'/4HMH10&1-H&.8M(N0O,_EQK6$!O0SCLVF[G;._0P$GJDBB8H,8Q0YT&
M6+P`.]?"#I"E);?3NL#Z!;,N=H_+IS6R/ZI5/7[.SUS=I2Y:IOMZ!``,2BNY
M54(+3PETZ4YR+HY>9]2SY%^/]'O\]<&@O;``"1,C"FU!M*$*ZD::N)H7NV5A
M(,?56ROWS6IR!JIE_*#M"WX95[/1HIZKG_6AG?&]SX=HA!!0)*URC&MB(,!V
M*Q?SFN=F4(?,EA,5^AXOSH"Q"#VVK_?W;'E?C=>GPNS\;E3/#E'DO3$A1@`.
M>LP\8-)QSIQ#OI'/,)7;DGK(-,G3[VNV=(1H48/RK^9*NS;69/=P8(`+#&3T
M<:0'!)MH<TTCD4`\=^$9Y%9?MZ8D%\-RO97.O3O,2L(P@AI1;K2(5(="-G(Y
MELV-(=N/#*6VNCWL-"B+4&0ZG?^3@@8_7]CYP[?5[</T[:4/+8Y0G3)/4(P(
MR[%'""L:;:BD4C4X6))=.#Q`2IW)@]>LZA'EWR?_5[Z83P`2]<08BA8`.NE4
M.MC4+/B8Y197#7EY/-\$7E0'A6NK/HT6-XLU=I-UY<ZG:O'E1P2\7;G5>Z.#
M\)HBH+6"5DMEK?<6-3)CHZYJZ;T,6=ZOP.I(*86)N'[%I7I8_9@OZO]4DW8$
M?#TJ``HCA)!PRN/B`1SW#C0R:H*NJF_BT(AWIC(N0KB/R^7#:63;C`B"`6(5
M(B`5S"IIH`6[X!PPE'L:]OJK`#LC6I8B+D*RFX?5<C6:)<1.8=J+84$!R!W@
M'*LH*J71#:=D*R47S%S1]6Q#I5N^-LJ?PSAA,3T\,##,L906`@BTM2HBZ5PC
MJ6'9Z^GU%_'E\JY3?5R*>4=7U?<'!4\]%1H3"X72EFOO/6LDE%'>8@5]?S+C
MLG1QH>*!7>2_O+E-%X?[Z?R?Y=^S401R]4S"2Q40[-[HM,*!-\,"Q\PA#XA6
MJ2,-`L+SE,W07#+CF3EZD+@?2=,EEO%5/RWFCW7$53_]O4R-DV[NJ\4H'<]5
MXU7]N"E/.2[_Z9,%:"UT&'LL-`=`$>J)VZ)B-3%'RRA^IT1#%^28%T:\S`HT
MOZU7Z;3%P16G>2@(;QVR,D:@3`GB!85<-A(HR');S)S,F1(GG/M4\-O^L'D(
MESG^]S\/RTWO@*_SSU5<1\?U^D[PYZ,Z7^?=6;(^?EV@%$D4P;1I$U]#QS7F
M#:H.TBMJP%60M0/05)EN2E''XWJM^_CG:;4FP6RB[I*G^9_UOQ_@<YOA@1BH
MF89&24.D-M8Z#G9?/0=7=)+_LJ1YTX&I<]V48.3'V6/$;[YX^O<B^NEV_L\A
M_KU].'#KM"!(`60U!9@B;&DC$4;9QW0&:`T'Q;:S-5&&6^-%-5I6MMK\_#AK
MVI2]Z.EZD&XMQ@="-202^NCA`,]8_"-AC=S2N=Q-SO9;`'+#P%GU?7W7PQ_$
MP>[54Z2*).56]&B=O[B[KV;+8\ON_@&!6BL4\!)*Y8V,7QAWNI',R.PK=@:X
M&3`HVG6BC4(!\6.]C.^VI]KJ<(C\[K`@(F*$""1-DDIXJ33>2NE4#/>N9R-@
M4)SK4">767AWH&R[MK0(GMM/$D2ZJAX3:[@77AA%E%`-`H#2W)!C@+OP!4/B
MWO"_#`,_5_%EZW'TD-9YT_EB#V8GL;'-A*D//$M-7H!RWB$GC=H%7`X0D)NL
M:1\,_^H<?NV=H'VPYB@Q>U#%94CZMACZ)$J^'1ZH!H!)#PED0`H9;0"SC=0<
M2IQ)P/;Q\1]!P+.!OPS=FBC^5-/W8EQ0AA&OC(!."<:UX(;NY`0.YV[4YX:_
M5TJP?,0O9LA>W9VSO?/V5'NV?Y8`G#$*:&Z<1DX3QKQHG!J'/<^-0P88^U[*
MGG4"_&7(]VE1W8_J29,-<C]3E%ZIV:9%W^9(TTD\;#-AL$H0JJD!A%&O@'4(
M/'^62N0&(>U#XS_"$/:@BLNZ>IEV\>78@!R2'"(-HWB:<T`<W;FVPF9'&0,L
MEKNH=Y<']V%ZC99/RS5I`,-@39GT+^^;Y%\[_3378=KJ/C4?V6?5SIDN>,X$
M,8Q#;;BEQ#OM=AAZ1W/;*@ZP"5Z/Q"JH@8ZXUEC732U/>U+].BYP[9$RSD*(
M@,0PACVP*4?SS,#<#8H!WCY9GCUG05UBQ6N?J>RD%#00+[!S6`/CB7+:2L=(
M@X#([R8TP!LL"ZR!O>%^0>:E$'K953'R@<D"-`"8&";9Z'Y*D2XQ)\U.H)=&
M7&,SF@+%R-TA7F3O=?2TW3I4X_][J!=5%"=^/*NG3]/1;!47^G32X_[N<%.2
M]I.D`T$(V=3-*8KK!#4*HP8!#N#U[3/TR9+7FZ]]J:'(*=0(TO:U(SSNY[A:
M+F]NWXBD'Y;UK#I8.G_B3`$A'0,E38!45D%/&)!-E.0QEM=?I]P'%_M5PK!6
MYTY6Y:",]PP"D#K@*FN%Y$0T"`#NRMTDW+M?6)"&O>%_009N^[AVXQ\>F"QX
M"+E&'%."@(7*Q/]\@XBB,'=+=H#5*B7]P^X0+U2;-ZZJR=)'S-(IV]04+8+T
MW&W@<('>X;'!(`4<EH9@K+&S''/15(1Y"M`5]:?KDPQO:_`ZA;T$S3Y7]UO7
MX.;V7_/9]^B7W]GJV^$KG?8/"1X`1"WSAFF%K!#Q;SOIB!.Y6Z[#K20IR*V.
M0+^<Y6I)KN.#`_-0&"09B:X)Y<`)@NG.)>$P]];.`:Z.%[==9^!>@FF;Z.;K
MZ*>N9M5MO4HOO[_X?@]D!TAXUKPQHDKM3F-(!57TE3F-\?TVQ.>``9.[M@ZP
M\J0@/TNJ9%@A1B>A1:`48,TCZMQ0J&S:EB8-`HBAW)#B]&,9EPIR^R!E;_@7
M,9ZWM]4XQEWQR_HQFGVO/D>?Z6:V3A_-UE72*6GY.)I6AP\#G3)-@%8P[./Z
MP8Q#.OHJ&.H="I9>T8&T7@+;'K$NEFE^\Z*?JD4]G[S>LCR69FXY3:"$`JFH
M<R@U%XE`6+1#P1B<VP]Q@':O%\;UB/7E&*>BU5XLGJ*!7O<]/IEJK\8'12R$
MGA$N/&2$0471SK93[7)[2YU<7'>_5DODP6)U+4P[#^KKH9@#AAL!-,)88"*%
MX6KW:0&;W9__Y#*[#<7<K-\F`A<DV&E`%VD&\'!_/UVC,9HV:'R<W<X7=Z.V
M]PRVFR$82E@Z`2H0HPYZ+R%SC>Q*9+<+&&`U7B\$ZP?FXAF[YD3'Y^KV838Y
MT@?@W6%!"@4(%0Q1'-U0Q@S;.0-00)U[ZFN`.PR=Z_U0:NX\F`L=9'@^$E0?
M:N[[ZLF@H(=.<V@)<)8#3)!?R^(DM3P&,-=3#](W9<Y#MLBJEO;#-MV#X:&E
MZ\5C`0#%(\\-9\)YS3"$@NVXKK(O+1]@XK]O?IP!ZPMR7*QY\_PN_HH?\9GZ
ML7INMC*85LZ;5TJ^YML7/:V[<YN9@J#.6(T)EP8*CEQT6-;ZL\YY1/71_8;>
M?(J3FNU:II$51$-`,:4,(R=E(P64(O<@T1#]A;[T^WZ?W=/`+6'_UX<QW_F0
M_7Q1U=]GFUO^QD]?%Z/9,@*QZ5:Y_MMTH^9=`Z:_J@AF7.X.4*V?7QBH,8)'
M\\F=I@3C=.W@#EECX!5UERQ%VT$HJDCFZ*V,S=OFW.]P*,?4[6\*@%N&C)26
M8(4X<5IRU6#I."A7@5$RJ=XKZ2^KH0NSO3]VM\(*"<"0!-$T2*,]!%!JT&`%
MN!.];TJ6+EL;`*E[4,R%29Q'T$`9)X`2Z9D$#!#,+88[STQD-V88]O[DI5AW
M(MH#"'6WYVGC_[UL=+O!<?=F[9IS[AL1*%%"8,V!B=\P%H@J3;WF4D,FK"%'
M"Y%ZBMY'TVKYN7JL9@^)+8>B\U^?##*ZE9)3IK5$Q,<_4[B3!UM;[)*8(BT,
MSM/HZR3464B6,??+:#@^S.>3U'GC2[5XK,?5\LM\>BBK_?Z@H"SPF-AHU;"3
M'K@HG6@D=(;GYC@&&"QVS97.0"U!FP^+&*J^VQEESU,!.<RE$#$2M9YZ93QC
M:`<+S*X@&6!`U34Q\E$LLLM1K3W:#]4L+N/3=-?*Y*Z>U4GF5?1.MKW)#JTV
MK28(6"L7723E&.&8"<:`98WDPJO<ZMX!UE5VO@CU`7!6DZ7/405Q8*I1L7%1
MG,[O=_FK#XM1]`;=:#';>UGJ*<,#,0RP_R?ORI;<QI'M'_5@7QZQ3CBNEP[;
M/1WW":%6T56:48D>+3U=]^LO((FL5:($D12+$S$QX;8!"GGR`)D`$ID,4R:U
M!!0HH5T-5/R_W*5F@/GYVZ)*A_#V<M)>I>1Y/$8]=DS^NG6P4`(.*'4H[I8(
M-DB86B:*;:[;<G[RP'=GG2Y'L[>[F,_EHGP^VF;K=+QC\-9@J"6,&VU+,08$
MVMHS`\SF'A,/,S=@N[QI$]C^@GZV5S01'%,NXJ`W<=R/YQ>Z^%$NBR>!*9]F
MBW*YK66]KT^]N'G^E5VIZT_%^B[%FJ>\$?<-;U%Z'$4P6A!HK&5QC9<44P"\
MKG1`,,Q]['Q^L.2[6Q2'JZ5>P^/VDWG_GO&4,+GG/8)P(N4NUNENWV.E):'U
M*H"@REU>S\]G^.Z6UW80[2DR]ZPH&LRU]PP0(Q1&1'KMK*S/T(C(/HT$XU^6
MLE'LZ;GPXX)WX7WIV=\*2#)ID)02&Z"XI]'_4/41&_2Y@;EPN,D#VR97UYCW
MSL%3^14D9L`CSB0R2$E+D52VDD-!F;TBG7_H_>Y6I$N`[.4%^62YB)1-ST&W
MJ1A.N!4\U"5(#[`G$F`DO6)6<Z(JC*30-#LAU0"#N]NF24N87H,Q>K*:3<^@
MR[9]B+1'E`+FG2'I[IY!;RJY-/&Y1YAG7[G^62S_*#LFR^7*;6!+#J1]4.7W
M8G9[%VV]BBA/;HO/F_L_BN67']LQK[YLUJOU9)&BXIHH=-9W@N1:<^2091X2
M[Q%SI/+\I,T_'1_@#6WKQ.H2Z&NL378VWZS?O&]IZ!$HXM`XQ@#T%FD--?:5
MI9:*N-R8KK--V2C6ISQ0K[A"[0?\BO?GKU&'OA0$5T`X!1@WG@NI(BSU:LV]
MSKV0&>!U;U^K5$M0=Q\Q:,OI9NLU+F[<8KT]$JV?!9X9&7C@'OK8+QSQ\$_N
M&P"B$'$EHZ\AM12$<90R5D)GB;?<-.:R.#:;5\7TE]ORS[_=%+,TD4GZ0Y*1
M/)F_\:_";G1?B]OM3?]B_7ER_]9%UZ&FP2('H#!81R$4D80A4LO@0':JA`%%
M_76@S[)54$]?XL\CA8GR+B?S#W'N_/4_Q<-15KQH&ZRUSE)+,<=Q<\Z=E015
M$A"%1E#8I0]:7(9J^[S8/3=;^]EJ.IG_;S%9NL6-C;OW`]0XU#P8JY/9B,,6
M@G@EJ`:\D@.@[$5C0$<<W;*C)6"[6CC\;%XL31S/;;D\OFP\:QF42:D[E`$"
M4ZX-EX:XW>@IT"[[">F`O+D^%HU+,&V?$96PW^/W#U#A:9.`+"31GS20`6"M
M%I1S78W7*YG[!FU`47G=<N`",+M3_J]5LK0CQN+-MM$34MHR3R&..P_KI+&F
MED!3D4N'`97K[8<.EZ#:'2\>#9B/?_/65=J1UL$(2J&T1B%F`:,P;D=!)864
MV<]5!Q15UP\W+L.U:W;LF'LZ/YZT#U@+APG34&A&+4>*`5+SW-K<\\<!Y?'K
MDR'YR+;/$16'=;,=VGSRUH'BJS9!0,"<51A[&\T@YESAVA%".GO/,:`@L6ZY
M<`F:G9U0/%84.N64^;2.`6!"/,2"$$-MRH9O!:YDBYMLF<F4C-"Q=TJ5UC'N
M_C3YY?'ZF2?(PPLC$6E*DNCF.^V)]!R!]!8P`NSB;H"`QIN1?B3\'I'5\^,U
MW`[V"=Y!K8S2PF)JJ/140E'+2$ENW.^`SI[;4W/#Y6(NJ/W/3%NL)[/YZOU/
M4(OB(BBC&<76Q0T9,"FX,86<2$J<:@P'[$;";].[XF8S+[[\4'$1OTF7@;,_
MBV_%=+/<EF]Q?Z4<3,7-[L'"_<_-3J]??KPB5(KI/()+NS\4')/*(^*<=(18
M21UVKD)3FNQWX^]J*3B54"\?_EY3$WV$)UPHEGYX^P/JK]FQX-\.?S7H5'A.
M6X*P$$J9N"QK7V&,G,JMY3)`ME^+G.50E7F]"9-NIFUY/YDMSF;]8]?@`%;&
M`R698X0B#AS9)YZ2#`,Q(NH.@C,G\3A;/;U$(][_G)</1;'=2'[YF<#Z5*18
MI6-.UZ$^@4$,%,9*,^Z]48)P1RKY-*-P[/3+4?7+K4-+X/9!GJ]%=(YFTVTN
MN3C:1N*\V3X`P[F+LCBL#9:.:NJJV<:(TB.*A>Z,-&T`^PY\Q;B_+3ZD_6MW
MCF']$X$39HFPBGI.'(F:$%S4NH@^_WAH.0XO,%=S[X#WZK[<+(X=@[3R_6`0
M8<H+"KA41B!GK:45;HR!$:68[)]J[7(]2V'#?;NKA(,4(8=P-'?.&"IH[=E8
M"W)K>`UPJ6W]>.D2(,?[O,Y'5X<K3KTBU`EC%:Z*,$AFL,V-71E0!&QGA.H2
MZ/?S])=X)`44"D/F%$8`>52OK,+[$<3*=D:@-@"]VLITZ'W68Z&7<]>HYB\&
M@K6$D@L:`;8F3B0"585-!"G7_`TH*+??U:IUR,?]RE-*[2B%!'();$2$>JEK
M+]+QW`QS`TR[V9>Q;`GJ]_4:?9>]S``&+9#1"45&HWHKY)M#8H8?+]R;R<R#
MM/]@D>UYS_N/%4E%(#2"`*=GH8@['K?4NV@Y2+5GURH54I_*O>E1I031.YIL
MM7!*J%?F%X,R.G*.*:^,M)QYXVF-3XI2'L^YT.44.1C]T27DW<_\)SE2KS+=
MZ]^WL]5T7JXV)\WX([T"B<Z?UHHZX#%@<1^KW/XM)T6$-.?5[4W.4V;VL6X!
M2HH5QU`!(5G*@:/KQP2(6#&B2]E6]'THA^OET/8Z3:\9R-G^;%7*(TBB6Z6\
M(8!HC&5UE>D,M(UWQ!W+N4LN?;NM%=L0F7FP3P!`,V8$9U9I#8R0VE9[4H>D
M;\Q7,HYY>K*F#\W3"W'M)6YB$L?7$.!8MPF"8:"!95@X3M.C(,2JH`#G,!I1
M3%<+.GP9&)&)8F\L:(Z9>6P5@(00."@,Q\I[0R%&E0P><3.";$`7Z.TMS6?A
MUH?N/\T6L_O-?:/VG[4+W'(`I1(>281%REJDJ^,C#Q`>D87(TE[9'G:]<&#R
MUVD<>-HN2,28\Y1)`B3&SGNNJI700Y!=!W2`=^6M<.`"[/K@P%L6[^,)46Y'
M^P7C#!4IYP3@SCN+T"XKS59.342NG1@@1]KW&-I$M@\&_6,RW^P4-9^7_YDL
MIH7=JRB5/U^MBK6Y2Q/IPZ(QBNS<3P7NM9$D^N?:*(&9XPH`3REF@C*L='8R
M]??!LPQ6E+T"W@?]?ELLBVEYNYC]WW;0^PHWJ^]WD_7OY69^\^'^9]S5N1\_
MBFF*=8M-OKZ=I.BR#P;D4[T[JCFTP$-#8$K;NU=!7.1'5_*X;2KV`OL5"5FC
M]FNQF,RW+WU2;:]]F:_I=+DY>NEYP5=#W*;0Z'@RD@X)(:<2`U-C)-2(@M%Z
MI68'V!_GYX$\QD^*?$WN9XNMFG:!`.6/E/5IM:_Y.W_X\K-8^'+YO.E;7EXK
MWPU$.0*A%MIKZQ51TI-Z;EJ@<Q\P##"&K5W>70/][J\&/I:+V^_%\MX6?ZR?
M_W9/EP+IA\^Z#WB[0\`^.O0F.O&8R>@),<GQ/H,&QW&.-T;+=2/=4WA/N;%[
MLWU`UC)!F#-.<BXHU=+Z2C8MV(CR+%RJW+)]./N=@]>\GVMM*E+#D2864YR>
M2C.MY/[Z$RBK;>,Y0W?2?5C$(>XRM3;<Q[W1.CCLM+?(8<:0Q9`:)U@E%S+9
MFXEW-`U/56S9-IA];!'T9A6=@]5*3?^]F:UF6RT=OXP[T"-(Y%!Z]:6)XH@)
MCAT"E6R>X1%=S5VDV;(+-*_%E/3'9=&<JZ.Q;W"<IW`R*82%V#%MC!25O-JR
M$1V?7:SQ$QAT";99&S_]_;?M=G/G\:<Z$M/X5Y^*Y6VQ/'BI<V+/H)22'*B$
M!K#.6BB0JL8/\I]$OA-N9.JR[!+C+(Y\*S].'KX74_W+/WXYSHG7+8,GZ8`W
MKJD2T#@<8)B5U?@$PB.ZZNN(`Q=C.KQ@(,*1A%)`XH'6V$B-1.V92>]RL^<.
MD!-M>ARY^`TS#$AIYRTDB`'%B`1`45O/!8-%=@;EX7$@0V]'PH#.PVVX84!>
M>FMPA),P#["FQKMJ%NCT_GID^C]7>T?#@,[#;L!A0,0;1;5BFED-N9:2V$H.
M)^"(?(-6.'`!=GUPX+FM.R4`Z$"/`#UG7.!H('ET9RB7UE3KI$:`Y_)B@)>-
M;?H'[:#9YXF$*>__V-\U?:UO1S_<Q-'/?LP2%MOPD=7>B[Y1BYN/\:]G\UV2
MR]4J"GKSN5Q,=Z7NGOS;6_=$1TXW>AE'B*8?>8PMDW&1UD@Q87FE!T#EB`*?
M+V;B@9.2(>JIC_ER(IV?24$XM"3:$^BPX!`89$%M'Q"2(XHE:IMM%\#8OYFM
M8D52(-.WJ*WBYM=B.4V*NSW]PNC81P*$V''D'4P.BXTSPYG'Z:!5;KS^X(WQ
MY43J#.3N+WD_3?Y9+LUFM2[O(^QQ(?7ELIC=+KY-SL^5<.!4\>A/--5./ZES
M,'&]MEAQ1)BT`,@XB^$.50R$,8W!0]U,8!,M4)&*-F_MV&SUK_.>29_2/3"%
MH#<("2&,<$ARP6TM.8<CN/SM@@9EYTA?>>;FQ6M<;P)S@J'!@&E!#-$`2@/W
MD8^I,BEL+!'?S01^S(?QK;A-2_O7XF>Y3#%[3ZJCZ8?]/YY>Y>;DKP5(E):<
M:"*,1\A&?AM=X9)*MOY73>^327(PK4E7P/?A#KY:I/2#+A;3N_O)\E\-%S)-
M78/P(GH?F@)+E8882)L*^S%(!(H2F]RD:@.B62]<:#(KE\%^'9)5`VZ,(&GJ
M&J@45EL*`!<J[K:`HA[NI,6<^#&X*NTKOI%1%V'<!Z.V2_C7XL]BL2D^%^O&
MBX,WVP>%@%'>"T2T2A!Y[M/36*BUB-9`C^@2J3T5O[2"+0![)3OW/?[X^2:N
MZA4P3,5G3/06),7<1V<]W<,PB*PBE/'<@XT!GI!=V;IE(GX55J6QGF_3'GL%
M$:>A<P`+J)AV5$N3GN=O9520X!&=\K>BZ2;V9"/;"WOV6Y-7HVXT9PT]4^UK
M[I5TC!G*$*<13Y]D92)*C?2(HF-:T?A+%K6*;C_Q$\]VNL>-VNO&P4G';42)
M4*$PA=P"`:O5&D"<FQYQ@(?T?=JRBX'N@SJI\MJ7'\^&VFC`#O8)FB'J#4$>
M:"!8E#4%(^SE(XB,Z/'>)<I]6;^F)3BSHK.K7]SG;5\<#L,\UCQXSIW'DFLD
MG26&2^GP;J0<P+B5&(_B6]!6V3J@+:C^^W_*<U1?-P_2L!1(:*E%#'"E$*6N
M&JEVV4]X!K@1ZE3UN8#V<MR2+IR30?Q[4=XN)S_O9M/)O,'-.-@GP.0P,64Y
MX812@KV!M))/498;GS?`I`Q]>AMMX=T+GW8"/QUIH]-QL$_PAN$X81145#*3
M<NX`7B^5%HS(]K2@XY>L:0G5TUFS*J:_W)9__FV:LGDM'Q)I</4?B2_X"5_V
M?QU^^_8&,1[_,3`+11R?,XAI;3"/VS)8C95[/:+T[BWHJ[P0OBQ?X\OZ+AJZ
MN/;=J6CQXK"/^QH'F@<&#$XIL(FF#A&&>?QS;1H!S7UL/D!?HSU%MPAH+QO2
M4TARN''`GEA,M(FNDW"$>T,-JR1R%N=>"`[Q+*,UBK0&9[=FP'P^8@;,YZ"M
M]9`[QC%,A8`!XE5%NSA6E%W%;8B.9>MFX&SXNE7U]]^/J/K[[\$(;DW:8TD,
M#:",,5G[.QBC7%4/L%YD^ZH^&[Z\9_^OQ_WW9;GYN?KRPVP',BM66ZOTX3[N
M@^*2,YE_3&I*F>.V#1O/HMK[A4A]:*+XD?E$2XL1CSYSA8>'IC%2L+7ZC^^(
M3M?501^NB%K-FEV0QT;!(JE$<IQ2,EAMN2"^.K.#@M/<N,H!EG]LW_7(AK%;
M.V3=$3MD7:!,$:N4E-)!XP3P4E8V$T8,<KU-,6:59\-W'3O4>##>WB\$`B@B
MSF!J"!=:8L:K6O(<.I%]EB['3*?KZJ`/.^0VR_)G<WZ4I\V"@9HS';?UC%C!
MG/`(UHMH1#8WXS8$8Z92"TCVPH?%>K9^^'UV4^PC+Y]=27T\(77"B5\(4#ED
MN>).`2`P!])+4YMB27/-VQ"W63U>U72#?I9U/#Z4W<WD(;MW2M\`XRX38I(R
MDRB!D/&<US(HCK/7H>$QJ'6MEMUB?94`V<='R_#(\G2L6T"2Q?]!B-*;3,L(
M1%5U3!X7YNQ$&`.\`^B*41W`G+7X[*5:'<TY<*!EM.W28Q$WA,Q#:(S`B.EJ
M?-1E%_@:X#E_IPO+Q<A>^4WRUA*_GR?)CC`@J+24&*ZUTQ':?>[-E)*_N;I!
M1_$8M?.SIX./)'1_;5/'SA]E6L=MU!^;=7'SO=P+5^^M],.C^ZV6Q>245`0=
M_FK@#@(,'<600H1\A!;I"F=$]`BRDG=!NH-/G*^MH.X7F>WAP+YDTI/43F<N
M+.U,Q^U8G@SBK#H5S9V#,MP0)K7F6+&XR&/*]QEI"-*B.;%VWU*?LIB<T#MP
M(`C@UD:K"(3#0`(/*KD]DR.*3F^3!&770%]M<E^S_DS7<UQX)(B$@$KJ**=(
M&>/V=7]4=.,:GZ>>Z#+]MB@FRT5Q\S7J)^KQ;K*XL=%6S,N?VR.YY62Q7IE=
MPKQ#CM,9GPB42(H!X0@A36ET:@F2CU+9W'IN[W,&GZSBLA>T\^,"7\_,[5\W
M\.:$KD$)I@!5F'HKM20,(P[V$FCFZ(C."KKB2_LH]W)S_VK`A\G4V">E]`04
M<`IYW`U#'O\(=26?<C;W5N[\HX9R/9F_-Q:U#>_5O(6LDX9WXBP`;3U&A`MA
MG86((;3/*2ZEL>9L9Z$;J;<*R-D+/.\8(LVT!)(I9"A'D`O+]@G]I(J[Y!&<
M#72A^H9MP$48=S^GOZWCJ.[*>=34ROU[,UL_7&4BOQ[&YW)]RB0^WC$0J201
M2L:UTQMA'$FE0[=PBPAX<WWM/J4];U]_\C>"C/Z'\X1`;R0VD=3.FPH#B-F(
M,H&U1897+PB[@?H:L_N:6_NN)KD7'E*$*19`".Z@=FS_+E@HX.C5[PZVP]</
M9CY9K<Y(6_JR5T"61()!I"BUD;T&.[4/N!%19#ZBNG]M*?QP:M(+P>WU<?EV
ME/LQG_JX_&6?`&PZQA0B[DZX<H)BHFOY-$`CR&W;JI8//2*_$-=>8DN>#+$Y
MY]JKQL&:_^_N6G\3N8'XGU2_'U*_^*FJEXHH.;52OZPX<!(DPJ8+I)?^];5)
M()<$6&*696\_7'2YLXWG-\,\[)DQ=$1$>)1/)UR1)`\W%.GL)RZZ*"G'<_5]
MYLBQ<+;392!=0:K+-3=6NZUO%;I[5H&9PA0!";&`6AF%^"N-`),>U9D?P^`/
M+0::`K1MK7)Q0";MUO&%!%80KYU#A&K/K"%D\[W"T.9:H0Z>.Y_""C6!:3O9
MC??WY6RUS<MA-:B>WV7Y<SA=ALM07=]%`/<F.=;.+I@S&@/OO:&`4J&X0Z\(
M\NR3YXXKG`R>?\AL;!K;%G7/7\,J7<,-JJO)[=WBI3'8S748+:OG<_/A=!K&
M^NEEW/QEX`%:*G?EPF.OO39$.F.L-%%I:[O&BI#LLY4.ZK.&Y;!5W,\FH^Y[
MJ$:3>;BL)J.P^<\-&7M3O7/6*X3D2@NFM*.22QK!D&R-"XVA<7^2?UN0QX;1
MSLH#V+&QA\ES<GI4VI-RO$6,#I]<2.,H%IXIB96+SB9B''G*/=.IP-SF'BMU
ML#M(,S)S,FCS!.35HK^\9OV2L3[X=Q8!O9L\^+):2_+@9J=%S%^L,)0;KJW$
M&C$I#/(:F!@\R]6+09CG-HGH8#%<DP+4`M0M7#`LO\W#/\NX@GN,/\YZN_!V
M*_OJ$NJFQ`!-<F_2$W2"4>$AH^#%O4!<67FF%P[?;;?V*F'+\,(9()UR%@M!
M)1`(`_/2X`:)^+$]*CL\GKGOSVN.Q[,-1_3M\Z@U]P4?!Q=<&1`QB4`8H*4'
MS/L(C\'<"240[-$;"<<Q=.^KM!E(MB\;J6US[07!KBD%PY`1&CT:@X06@!J2
M$F16U&D5X[/^R,DQK-TK)=EHYC5\*:?#ZFM93B_*X4S=5F%U]5'3PF7/G$*(
MZ-<2:N+7Q&D+%0<IG\)@CP20H@_/93;'MO(TH+9SFKM,;VQ'I!9/B?3:M\$^
M#B\`%Q)(@[CCD0Q$(V%1JVID,>,$H5QET<%SLD:-2@-8MB$A5^%AF4HFYF$C
MS>]W7FMG#EZCX,Y(BK#1S!/.%03&KNF77.#<<+.#:N<X]I?M`)QEB[Y,9K?S
M13D+OY6SVR_QSWXSM&-X01G01*=GT#0CW'D4H^VX4VP<C,$PZ%$T<P+NE8T#
MG.>6+/^[*Y=_WRW+WU=-A1[#?+$B+R3J:MR3`^86VM,8V$%D@=.1?N-(LJB:
M<.DD]3977W30]IQ82$Z`=CO6*3ENH\6RBKN^G$:7:[\#LW7\ZN0M]7\&A$F7
M.N`A!3Q5WF"!*1&Y%98=O%EIU(-I`LRS",D!#LO6&45JI<>M=QPB1"DD"E/^
M3)NTU-`>I28<R=LZ2<G",[/?T@\?/;AYU6RO?SLP7O[\2@7D#%!H@)(&,DZ-
M<HQ$A0DU8U8PV6=Y^2R'RS:1;B43<Y,D]ISE_D=8W)7C5PH^_FL(!X3@QRQ;
M:(>AM)!I@KRP6!-BS%K3"PIS2\,[>!W<J*%K$?,V)'/7=FO-XOZ)!46141!C
MC*`S.E)G5MU55I1&LGM48]J.0+SOH-HD^F_E[.=!OBD0.A(@;S[Z.MQ/1N5L
M'*U>69GR_F$X>[I8C`\\.MD[NQ`.&DTPHHI`B64TDCJJ/6412JV<28\2&4\J
M'4V"W(H#\LX$Q@^N\RVVSRBL-,PY2E(VG&)(6677M^H"&Y5[;=S!)*!FW89&
MX#R3J-2_3;IK3J%C;*@E\HIJQ2Q'FDB^^9KY/MT='LWA>HG)PO0,,E-?8[9M
M?*$QC>X/<-:GMU`HB&HSVECI,8.*&=VG@L3C>;M?6K(0/8.D7!Q08;9K2F&X
M<EXK[ST@D'(2?^HU5@3XW"3X+CY:=D)3E(OG>:+3%%%M,F?W]DW_]!H%QL`S
M9KRWSCFMH)-LK:DE$=G)"]W7/QDB4!N/-@/R^83LNIR.S;"JGJ++K^[3[=JG
M9>SC$@5VD"AIM4:26^XL3'UDJ$[YJ`9QGNL]=S#\:DG$CL:X#0F[K,I1".-Y
M:A]NRNDTC!+_!C>IV<G\*HS"Y+$FQ_O`%5)7<<NL@E)#:PAS!-%55EDJ'?`.
MY[K;W;^]/%Z^3@-QUDG0CUM)G>P'-^[[:+J<3Q[#JC[D:WD=IE,U&U^'ZG$R
M"G%\.HG86>Z3NUZ!+)5*8&P5D"SZH9'>E/XJ,8O04M/?.X)\<6H3\-;K?E;?
MA;=[^`FK?AA&1C-*'5,$,R$-9<\=7"VW@*-N5/W,#VH.N&M.88D70'FD)-(Q
M"H04$;FF43#8WU@Z@\W[XZ-L4.N^G;_^D@9_&\Y#_.5_4$L#!!0````(`+&`
M!D<#92>A<0X```N7```1`!P`87-Y<RTR,#$U,#8S,"YX<V155`D``PZ^PU4.
MOL-5=7@+``$$)0X```0Y`0``[5U;<]NX%7[O3/\#JI=F9RI+LNQ-XHEWQ[>D
M[CJ1Q[(WV[[L0"0DH:$`+0#:5G]]#\"+2(DD2$J.V4HSR9@B<3Z<@P\'.+@0
M_/#S\\Q#CT1(RMEIJW?0;2'"'.Y2-CEM/0S;9\.+Z^O6SS_]^4\?_M)N_W9^
M=X,NN>//"%/H0A"LB(N>J)JBKRZ1W]!8\!GZRL4W^HC;[5`*!5?/TCV1SI3,
M,,)*"3KR%?G(Q>R2C+'OJ=.6S_[PL4?'E+B@A4=T)JD$B<<*BPE17_",R#EV
MR&EKJM3\I--Y>GHZP#-%G*E<2$5F\L#AL\YAMW?<_;$/QH&Y3)Y@>%A1Q*/L
M6TKD>22\`RXFD++;[^C'(RQ)E)QQQOQ9MH"K1$<MYJ0#B=J0B@CJQ')VH;2`
M3N"J6":IU7$G>)A,2@MLH$PJS)S8AN<UFY_Z)G7O_?OW'?,T3BK=K(0`V^O\
M]OEF:&AO02U`R-0#.IMSH1!;XV^,Y<B(^K(]P7AN>&AW>^U^KX6"VG/#':Q,
M=4W:G"G8(9Z2T9WV$NH`=&BA3D5]!/>(W))"!FMCC72%V)9&!JN61D4U*4>?
M=1']JQW)M?6M=N]P0S663EE-C4AN*VJ\[V#A:+J!.4>UR?/<PPPK+A8?X7<Y
MU3PA4BA72Q"MXWNM8^_'370TT(Q,=(->7J>DU'85J5`PD<3F"F0WS&7T2$I^
M"02WJ4X]53;0([L;*>E%D8#.^;ABGI(X!Q/^V'&XSY18Z":J7Z9MRY*+?K27
M('6U\86`L,C`'E52)RD8_VHO86HJY!):69=(1E]LK@%Y=J:E>YXU(7-5J[-)
MX5'V2*2J7$D28N'UYE6$8>J8KKA719.E5'#97@+4U$-2I[(6D8R^V((&:BZJ
MJQ`)F:LB)3!C7!DD<R^Z.Y]3-N;A+;BI^_"3J"._(V-DXM63L!<MCFH[<\'G
M1"@*P54BL#<`4T'&IRT]@&A'0X3?'>P=0!P<)5G+(!UBF/X*1!S?,V;<+)6,
M$'3[?=J24-X>B8S_[E:Y9%S5*A"AC#;9*`^/JAH%(L1KJCUS0:K:`R(21M;U
MZIY&N(<4B,*`[\SYPZ?2\-U"^LG#W;5E6&TT2,K%^%$.RSKTTV&OU^]UNZB-
M+JET/"Y]0>!'0OQ#9U5F%<Z7Q!VPG\SUJN6A=)BD2'+%7<L+ICTB6RZ\&Q5M
MR1)/7-[C$8PFZU*P#E3(2;_7[W=[!9RDKM\$D#_L,E%2$B7-#4'<,^;>4#RB
M'M4^#L\@2G<OB<+4J\]@^1P*J3WJ]8^ZQT74PB^3%XHR0YBY*)$="O-#;\(<
M=YGY"\XD=8DP2MT+S.28P`A@4[IML':.CXHY3F6`$CGL606\#=DKS])A$4M[
M)CB[%5RO#^`-&5F%L3/3+_8?`$0&<7=9.L>2RL'X-F%()7JRY(M#11@QKH>*
M!@;Q,4H"[;E@%UA.KZ#*/F(/;LDZ#E0>M=B?NKVCWEI+E\F;[ID@!Y3(8N]@
MR>+GS('KH-N&9Q?08U-U1^6W;?%KS<!*]7KHD4MU*C.=(,@.Z?SVO"<,N21!
M=`;=SIBJ+7&=#6KG=ZUKS.,WR@`%.>P931CRB7/WB7K>EKA<A;.S^*XLBQ'T
MGKZ$(=?PETVHGOC8$H,9B'82WY<E,8&^YS%5ZH]PR07=(H]KB'8>?RS/8XR^
MYS%AR"WWJ$,KSI`6X11R=MCM':Y/D&9S]B:"W--DQN%ZZ6-QZV&FSIBKX_RY
MW@2X)>>SXMM=\6U95XSR^ALRN9EITCB_O7,F#+F#2RR<*1!R21Z)QTT173W/
M"9-D2\R7RL,^3"T]=HGR,[0G<D1AEOL*D"9'">HHXNK1_?88SP"U._C:ZD<!
MQ6$&P:3$GM&E(<,IU=LQ)MMUXAQ4N]N6'I)&.>S=-*OX%7>^P7WP*#[3Q8/K
M+H94!K=37#+<`HIU1FV3$TIFM:<Z84B-_03Y*,6;";J]_OHZ5TZLO*-;"3**
M]BL6`J+*Q9:\;Q7.[F_E%EK@?@2]P_[E2\J(E$,RT2'@-1OKE<'J"V+Y,)9U
ML;=9ZV(A&@KA4`)O3U!4$K7<RXIF\:ZW&0O_173M/6N]J.MT8#8P2S_V-F-3
M7#%M.]J=0=0UHTH7AX3A^`5G"B)NPBK/SQ7A%+>(O<.,%C$!9T;M*<`]1W%1
MU&D32\!9]MSHJ*,28[O;*D(QN'KPJLM9<H^Z^N6\<^SI]RJ'4T)45>ZL<$7<
M@:?!OZX9>8&D:07-VGX`BI*H*(1%`>Z>N-62OL4"3)P214'G+;.8QK91>FS<
ML3*EZ$TJF[UOZC**2U'OJ,%R^M'C3_*!8=^EYF7<36FVX%NH/BKMO<M\T&`<
M3(J:K-";.+,]X6N$\!E8.84T])%<,V"2W'#Y8O3;<K-4AG[=RI#,%P49HS<Z
MZQ_VM:.`K\$\W(3_4A4B*P-+'3BL4P?X&"VSVF7*H\-S]/(SA*MJ47<^J!"H
MB,)N')'%!_DD+LTZM<';Y2FA*RP8#"7D+1'#*40LE9A9$[;,SV6]XAAA(`!!
M!F77*:@S[LS#L,S`9;UZLT[([HXP5XNUQFQ;#H1ECBWKQ=,L8G9T9BV(J^[Q
M<T4RDG*6MBIKYBP,YXS\#A=YG08J0]S2-F5-A"4)V-U6Z8:SR3W1IP6.5"42
M4H*6F>.L=\RT?%L!`-((NUSL=5P@2]XR&=S+\($T";OK!9_QO[FX\*6"%D'H
MV?:/7!`Z84-<M8LN1K+T$^\R_,0`HAC1##5"3&1`]UPE2KB.+Y4"M'0P[S*"
M7RMS>W_++/(:@7$9/$N4_"XC2B[!X(X&S0,U)>+,<81/DL>F5"(M#\,23'0S
M&DD#A4*LY,$J>UY,,=1I%BU0EFBCF]$@YK*TNPUA3B'7:`*+D8H;OUXWH_$K
M8&M'&SVS"WK*/1?Z`OU6DEI48BA#W!(/'F<T=4F4OZ(`9T]$G08N'\42[!UG
MC*2R:-G=9FWHCR3YP]=OBSW6?!,Q!\+2[1QE41,C(0.UIR4LTR]<5>QD,@$L
M\=I15B.V1HF!^G\FY$-G]<#=\$[Z8%YS+&_X%0^$1U()[*C3EH).N&4XU`>9
M_AZ=(_A1*T-@O'/-0LW(#7TD[O)H@N#@05"67&LJ6^88XO`XL)H`U/-T_Q\I
M)8%+196O3?@DN#\_;9E/9IP`UJR%@H-1@SOZW3\VT3BZ8%HHN#LG@G+WWJ1S
M?1$NZG8J%,?Y_0,H3`0SLMB[9@[<^DQF(R(BBRUIZA@5?*WDQ.4S3-GWLTI,
MB"AG6RKEZUFXM"C<V7W!9R,:*)MW*B,,L_5.5<Z@;BY?&C6][`/4TK@B;Q>R
M?M4&6.A4Q&*UD$;!3K[3EF..8=IJV>GOP[B^1_0.I6R33:!^3Y[5N0=6%I19
M#:@-ZI.*8+;O-'H#G=XMG3Y3+<6X?I;VGZI"#7"E"P]+.1B'+XH-Q!V=3/6K
M^300OC6`L7TE$]>O_I'2+T!HALOJ]6JY0J$U61-(,TJ:%N<S]+4S?P9%KX]K
M&SPQ&#=,Z1S:J*MGN$<EN**A2:8MK"Y<RVXP>AZ@;\-J%GXJ;3`VZB]OW&GQ
M@*?PV=6S,X7(@[A@W!5VIN8A/`.MJ4NA@36IEF7R$M#UW6`.X>T+N$`X`?W%
MUU5YP,A*U<]]W,"@)JWL_1,OLB7YN,&VY#+2<"Z*-D.>A4*12273OMK8(#8J
MT.XKA#!W!(:6/DFM#07U*C*J9-KZ1E&(RB$&W]RJ3[KC#I5<OL&E^*W@_R9+
MENS)7B7"#3Y0IXI-C'?U7#WC61B6!A3P\3\)%O(3@7X.>]YB,"<,^KITTKB?
MW`+.*\9!R>(0!.L#6X*_UVQ]<E_'K&%EO21S+A/CHOKB+UA#7#+:9`BT;E/Z
MN-5\V]?2-<[(W$;Z%[U-4T&F?^>>_KZL?BD$LT6ZP[$E:F#GDU"937Z!_[D6
MK3QNLBU#,J,.9Z[O*#/9H$FX46Z.:;;4#;2T<*/%:LQ0-G'S)A2#J;.SB2`F
M89J_O(<-&&"&0X!Q7.B1SED/&A#6Y"Q:F]L7YK./<64JE[1QX4UN%3.*?^%"
M3<_,!T=QNI+E/VY`-8MG'())ACLB?4])/@[#3!F>W4C<(9EC`"3>XAP&#"Y]
MI*Z/O5LL@LU"H:G;0GOUF8YP0@9/"!__RO6Q"F9:GH#/C<,5%Z*M=9=S#E$A
MU!-]08MK56I]+B\PR29#?S[W@A`S/K\U7<'+)6U`98=JZ!#BRH^"SW3/-1A?
M/3N>K]_)-17VG@^)YX'V0R(>J4,@O>[1X^J]@7SCHM2X4`J/ALU>=:@F\JJK
M"Q8SOQ`U&)NAMM3O41&WV,2LY,UG%J=LB*,=_=+!JKG%29LPF,[6-%CWN"/!
M4OB8B[C]N8.>A@H)R3]C'>PP7;3%9E<':V[!1%;HLX$$'1F5;O"(0QUV@_T`
MQ6512OY_)U0S2TK0)/MZL#$87YMO7P?'G457.4.%6I(-Z//"*42YC$J6%F4\
M>:W`*Y>QY7)VQ8TNYXM@T*H73$V?%-F]5<1RY>6JD^E"%Y$_,HM*WV?HNS0T
M#$2BLTC7]A"52MF\L?U2[5#?:)?TNEWK"1K-7'!<XB?")P+/I_JH**.3.<'&
MURUQ.%R^GLU@%"4H]J*ORTN3<&T=:ZN(#9S-VMB^M?7+K2(VLL024Y8Y(SM+
MF@9T;V;E?[1Z;OJ9=O:)23I:+)/<XH7IIY^P<`=SPU3XM>9K%DP%QH9O'7:#
MUM/L?/@.127+&?65Z+$N<<\>B8"@(=JG<BOH,K#^3GEM$*V8W%_`J_@-7MP3
MY_S@UX,57\IZTL1V@7LXMSW(?M94*^XYAS89LYR0WI*F":T;Q)\N.,5*5);>
M$FA+U,2M@$/_/U/N_VOJ\W^8^=%H"'5!]%3I"DWETC:P$MX3?>J?E,/@Y0NL
M-]Q`?["(AMK:`D%R:F==X094VP<V`BV@U6:NB9`BDS+NO\;L6:D]+`^,F!F^
M[&F18`YP95VKFLCK3YH$;ZU(&"/-,/S\+U!+`0(>`Q0````(`+&`!D>GCV5^
MD4D!`#!L%``1`!@```````$```"D@0````!A<WES+3(P,34P-C,P+GAM;%54
M!0`##K[#575X"P`!!"4.```$.0$``%!+`0(>`Q0````(`+&`!D><72-7RQL`
M`!8A`0`5`!@```````$```"D@=Q)`0!A<WES+3(P,34P-C,P7V-A;"YX;6Q5
M5`4``PZ^PU5U>`L``00E#@``!#D!``!02P$"'@,4````"`"Q@`9'O./SX)]%
M``"X40,`%0`8```````!````I('V90$`87-Y<RTR,#$U,#8S,%]D968N>&UL
M550%``,.OL-5=7@+``$$)0X```0Y`0``4$L!`AX#%`````@`L8`&1S]QMS-[
MJ@``J`()`!4`&````````0```*2!Y*L!`&%S>7,M,C`Q-3`V,S!?;&%B+GAM
M;%54!0`##K[#575X"P`!!"4.```$.0$``%!+`0(>`Q0````(`+&`!D<%T6X8
M/FX``/U=!0`5`!@```````$```"D@:Y6`@!A<WES+3(P,34P-C,P7W!R92YX
M;6Q55`4``PZ^PU5U>`L``00E#@``!#D!``!02P$"'@,4````"`"Q@`9'`V4G
MH7$.```+EP``$0`8```````!````I($[Q0(`87-Y<RTR,#$U,#8S,"YX<V15
M5`4``PZ^PU5U>`L``00E#@``!#D!``!02P4&``````8`!@`:`@``]],"````
`
end

</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>24
<FILENAME>R9.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.2.0.727</span><table class="report" border="0" cellspacing="2" id="idm140187068956816">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Earnings Per Share<br></strong></div></th>
<th class="th" colspan="1">9 Months Ended</th>
</tr>
<tr><th class="th"><div>Jun. 30, 2015</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EarningsPerShareAbstract', window );"><strong>Earnings Per Share [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EarningsPerShareTextBlock', window );">Earnings Per Share</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Earnings Per Share</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Basic earnings per share ("EPS") is computed by dividing net income (loss) by the weighted average number of common shares outstanding for the period. Diluted EPS is computed similarly to basic EPS except that the denominator is increased to include the number of additional common shares that would have been outstanding if potentially dilutive common shares had been issued. In the case of a net loss, diluted earnings per share is calculated in the same manner as basic EPS.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">For the three and nine months ended </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">June&#160;30, 2015</font><font style="font-family:inherit;font-size:10pt;">, options for </font><font style="font-family:inherit;font-size:10pt;">1,640,000</font><font style="font-family:inherit;font-size:10pt;"> shares and </font><font style="font-family:inherit;font-size:10pt;">14,000</font><font style="font-family:inherit;font-size:10pt;"> restricted stock awards are excluded from the diluted EPS calculations because they are anti-dilutive. For the three and nine months ended </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">June&#160;30, 2014</font><font style="font-family:inherit;font-size:10pt;">, options for </font><font style="font-family:inherit;font-size:10pt;">1,016,000</font><font style="font-family:inherit;font-size:10pt;"> shares and </font><font style="font-family:inherit;font-size:10pt;">38,000</font><font style="font-family:inherit;font-size:10pt;"> restricted stock awards were excluded from the diluted EPS calculations because they were anti-dilutive.  </font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The following table outlines basic and diluted EPS:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="16" rowspan="1"></td></tr><tr><td width="45%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="11%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="11%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="11%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="11%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Three Months Ended June 30,</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Nine Months Ended June 30,</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">2014</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">2014</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">(in thousands, except per share amounts)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">(in thousands, except per share amounts)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Basic Loss Per Share Computation</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Net loss attributable to Amtech Systems, Inc.</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,604</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(5,257</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(9,119</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(9,802</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Weighted Average Shares Outstanding:</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Common stock</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">13,103</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9,843</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">11,644</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9,694</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Basic loss per share attributable to Amtech shareholders</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(0.12</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(0.53</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(0.78</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1.01</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Diluted Loss Per Share Computation</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Net loss attributable to Amtech Systems, Inc.</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,604</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(5,257</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(9,119</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(9,802</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Weighted Average Shares Outstanding:</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Common stock</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">13,103</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9,843</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">11,644</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9,694</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Common stock equivalents (1)</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Diluted shares</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">13,103</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:3px double #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9,843</font></div></td><td style="vertical-align:bottom;border-top:1px solid #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">11,644</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:3px double #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9,694</font></div></td><td style="vertical-align:bottom;border-top:1px solid #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Diluted loss per share attributable to Amtech shareholders</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(0.12</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(0.53</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(0.78</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1.01</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;" rowspan="1" colspan="1"></td><td rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:top" rowspan="1" colspan="1"><div style="line-height:120%;font-size:8pt;padding-left:24px;"><font style="font-family:inherit;font-size:8pt;">(1)</font></div></td><td style="vertical-align:top;" rowspan="1" colspan="1"><div style="line-height:120%;text-align:justify;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">The number of common stock equivalents is calculated using the treasury stock method and the average market price during the period.</font></div></td></tr></table></div><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EarningsPerShareAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EarningsPerShareAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EarningsPerShareTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for earnings per share.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 260<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 3<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=7655603&amp;loc=d3e1278-109256<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 260<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (a)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6371337&amp;loc=d3e3550-109257<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 260<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 2<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=7655603&amp;loc=d3e1252-109256<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 260<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 55<br><br><br><br> -Paragraph 52<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=32703322&amp;loc=d3e4984-109258<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 225<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (SX 210.5-03.21)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=26872669&amp;loc=d3e20235-122688<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EarningsPerShareTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>

</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>25
<FILENAME>R43.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.2.0.727</span><table class="report" border="0" cellspacing="2" id="idm140187061143152">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Long-term Debt (Details) - USD ($)<br> $ in Millions</strong></div></th>
<th class="th"><div>Jun. 30, 2015</div></th>
<th class="th"><div>Jan. 30, 2015</div></th>
<th class="th"><div>Dec. 31, 2014</div></th>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_BusinessAcquisitionAxis=asys_BTUInternationalIncBTUMergerMember', window );">BTU International, Inc (BTU) Merger</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Debt Instrument [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNoncurrentLiabilitiesLongTermDebt', window );">Long-term debt acquired</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 7.2<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LongTermDebt', window );">Long-term debt</a></td>
<td class="nump">$ 7.0<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentInterestRateStatedPercentage', window );">Interest rate</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">4.40%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_BusinessAcquisitionAxis=asys_SoLayTecB.V.Member', window );">SoLayTec, B.V.</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Debt Instrument [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNoncurrentLiabilitiesLongTermDebt', window );">Long-term debt acquired</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 2.0<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LongTermDebt', window );">Long-term debt</a></td>
<td class="nump">$ 2.3<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_BusinessAcquisitionAxis=asys_SoLayTecB.V.Member', window );">SoLayTec, B.V. | Minimum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Debt Instrument [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentInterestRateStatedPercentage', window );">Interest rate</a></td>
<td class="nump">5.95%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_BusinessAcquisitionAxis=asys_SoLayTecB.V.Member', window );">SoLayTec, B.V. | Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Debt Instrument [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentInterestRateStatedPercentage', window );">Interest rate</a></td>
<td class="nump">10.00%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNoncurrentLiabilitiesLongTermDebt">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of long-term debt due after one year or the normal operating cycle, if longer, assumed at the acquisition date.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 805<br><br><br><br> -SubTopic 20<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (c)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=56956791&amp;loc=d3e4845-128472<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNoncurrentLiabilitiesLongTermDebt</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentInterestRateStatedPercentage">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Contractual interest rate for funds borrowed, under the debt agreement.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.22(a)(1))<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentInterestRateStatedPercentage</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LongTermDebt">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Carrying amount of long-term debt, net of unamortized discount or premium, including current and noncurrent amounts. Includes, but not limited to, notes payable, bonds payable, debentures, mortgage loans and commercial paper. Excludes capital lease obligations.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 942<br><br><br><br> -SubTopic 210<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.9-03.16)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6876686&amp;loc=d3e534808-122878<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.22)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 944<br><br><br><br> -SubTopic 210<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.7-03.16)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6879938&amp;loc=d3e572229-122910<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 02<br><br><br><br> -Paragraph 20, 22<br><br><br><br> -Article 5<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LongTermDebt</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_BusinessAcquisitionAxis=asys_BTUInternationalIncBTUMergerMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_BusinessAcquisitionAxis=asys_BTUInternationalIncBTUMergerMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_BusinessAcquisitionAxis=asys_SoLayTecB.V.Member">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_BusinessAcquisitionAxis=asys_SoLayTecB.V.Member</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RangeAxis=us-gaap_MinimumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RangeAxis=us-gaap_MinimumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RangeAxis=us-gaap_MaximumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RangeAxis=us-gaap_MaximumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>

</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>26
<FILENAME>R29.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.2.0.727</span><table class="report" border="0" cellspacing="2" id="idm140187061336912">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Basis of Presentation - Property, Plant and Equipment (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="1">9 Months Ended</th>
<th class="th" colspan="1"></th>
</tr>
<tr>
<th class="th"><div>Jun. 30, 2015</div></th>
<th class="th"><div>Sep. 30, 2014</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, Plant and Equipment [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentGross', window );">Property, plant and equipment, gross</a></td>
<td class="nump">$ 35,259<span></span>
</td>
<td class="nump">$ 24,056<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment', window );">Accumulated depreciation</a></td>
<td class="num">(15,217)<span></span>
</td>
<td class="num">(14,304)<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentNet', window );">Property, plant and equipment - net</a></td>
<td class="nump">$ 20,042<span></span>
</td>
<td class="nump">9,752<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_BuildingAndBuildingImprovementsMember', window );">Building | Minimum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, Plant and Equipment [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentUsefulLife', window );">Property, plant and equipment, useful life (in years)</a></td>
<td class="text">20 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_BuildingAndBuildingImprovementsMember', window );">Building | Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, Plant and Equipment [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentUsefulLife', window );">Property, plant and equipment, useful life (in years)</a></td>
<td class="text">25 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_LandBuildingsAndImprovementsMember', window );">Land, building and leasehold improvements</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, Plant and Equipment [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentGross', window );">Property, plant and equipment, gross</a></td>
<td class="nump">$ 18,137<span></span>
</td>
<td class="nump">10,414<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_MachineryAndEquipmentMember', window );">Equipment and machinery</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, Plant and Equipment [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentGross', window );">Property, plant and equipment, gross</a></td>
<td class="nump">$ 11,704<span></span>
</td>
<td class="nump">8,189<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_MachineryAndEquipmentMember', window );">Equipment and machinery | Minimum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, Plant and Equipment [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentUsefulLife', window );">Property, plant and equipment, useful life (in years)</a></td>
<td class="text">3 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_MachineryAndEquipmentMember', window );">Equipment and machinery | Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, Plant and Equipment [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentUsefulLife', window );">Property, plant and equipment, useful life (in years)</a></td>
<td class="text">7 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_FurnitureAndFixturesMember', window );">Furniture and fixtures</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, Plant and Equipment [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentGross', window );">Property, plant and equipment, gross</a></td>
<td class="nump">$ 5,418<span></span>
</td>
<td class="nump">$ 5,453<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_FurnitureAndFixturesMember', window );">Furniture and fixtures | Minimum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, Plant and Equipment [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentUsefulLife', window );">Property, plant and equipment, useful life (in years)</a></td>
<td class="text">5 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_FurnitureAndFixturesMember', window );">Furniture and fixtures | Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, Plant and Equipment [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentUsefulLife', window );">Property, plant and equipment, useful life (in years)</a></td>
<td class="text">10 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_LeaseholdImprovementsMember', window );">Leasehold Improvements | Minimum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, Plant and Equipment [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentUsefulLife', window );">Property, plant and equipment, useful life (in years)</a></td>
<td class="text">3 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_LeaseholdImprovementsMember', window );">Leasehold Improvements | Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, Plant and Equipment [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentUsefulLife', window );">Property, plant and equipment, useful life (in years)</a></td>
<td class="text">7 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of accumulated depreciation, depletion and amortization for physical assets used in the normal conduct of business to produce goods and services.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 360<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (c)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6391035&amp;loc=d3e2868-110229<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.14)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentGross">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount before accumulated depreciation, depletion and amortization of physical assets used in the normal conduct of business and not intended for resale. Examples include, but are not limited to, land, buildings, machinery and equipment, office equipment, and furniture and fixtures.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 360<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (b)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6391035&amp;loc=d3e2868-110229<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.13)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentGross</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount after accumulated depreciation, depletion and amortization of physical assets used in the normal conduct of business to produce goods and services and not intended for resale. Examples include, but are not limited to, land, buildings, machinery and equipment, office equipment, and furniture and fixtures.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.13)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 360<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6391035&amp;loc=d3e2868-110229<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 02<br><br><br><br> -Paragraph 13<br><br><br><br> -Subparagraph a<br><br><br><br> -Article 5<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 03<br><br><br><br> -Paragraph 8<br><br><br><br> -Article 7<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentUsefulLife">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Useful life of long lived, physical assets used in the normal conduct of business and not intended for resale, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days. Examples include, but not limited to, land, buildings, machinery and equipment, office equipment, furniture and fixtures, and computer equipment.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentUsefulLife</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_BuildingAndBuildingImprovementsMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_BuildingAndBuildingImprovementsMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RangeAxis=us-gaap_MinimumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RangeAxis=us-gaap_MinimumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RangeAxis=us-gaap_MaximumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RangeAxis=us-gaap_MaximumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_LandBuildingsAndImprovementsMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_LandBuildingsAndImprovementsMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_MachineryAndEquipmentMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_MachineryAndEquipmentMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_FurnitureAndFixturesMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_FurnitureAndFixturesMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_LeaseholdImprovementsMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_LeaseholdImprovementsMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>

</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>27
<FILENAME>R28.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.2.0.727</span><table class="report" border="0" cellspacing="2" id="idm140187059347136">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Basis of Presentation - Inventories (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th"><div>Jun. 30, 2015</div></th>
<th class="th"><div>Sep. 30, 2014</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract', window );"><strong>Organization, Consolidation and Presentation of Financial Statements [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PercentageOfWeightedAverageCostInventory', window );">Percentage of weighted average cost inventory</a></td>
<td class="nump">50.00%<span></span>
</td>
<td class="nump">70.00%<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InventoryNetAbstract', window );"><strong>Inventory, Net [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InventoryRawMaterialsAndSuppliesNetOfReserves', window );">Purchased parts and raw materials</a></td>
<td class="nump">$ 13,129<span></span>
</td>
<td class="nump">$ 8,797<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InventoryWorkInProcessNetOfReserves', window );">Work-in-process</a></td>
<td class="nump">6,248<span></span>
</td>
<td class="nump">4,809<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InventoryFinishedGoodsNetOfReserves', window );">Finished goods</a></td>
<td class="nump">10,059<span></span>
</td>
<td class="nump">3,154<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InventoryNet', window );">Inventory</a></td>
<td class="nump">$ 29,436<span></span>
</td>
<td class="nump">$ 16,760<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InventoryFinishedGoodsNetOfReserves">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Carrying amount, net of valuation reserves and adjustments, as of the balance sheet date of merchandise or goods held by the company that are readily available for sale.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.6(a)(1))<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 330<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (SAB TOPIC 5.BB)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=27011343&amp;loc=d3e100047-122729<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Staff Accounting Bulletin (SAB)<br><br><br><br> -Number Topic 5<br><br><br><br> -Section BB<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InventoryFinishedGoodsNetOfReserves</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InventoryNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount after valuation and LIFO reserves of inventory expected to be sold, or consumed within one year or operating cycle, if longer.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.6(a))<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 330<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 35<br><br><br><br> -Paragraph 2<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51655945&amp;loc=d3e3927-108312<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (b)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=28358313&amp;loc=d3e6676-107765<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InventoryNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InventoryNetAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InventoryNetAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InventoryRawMaterialsAndSuppliesNetOfReserves">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Aggregated amount of unprocessed materials to be used in manufacturing or production process and supplies that will be consumed. This amount is net of valuation reserves and adjustments.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.6(a)(4),(5))<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 330<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (SAB TOPIC 5.BB)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=27011343&amp;loc=d3e100047-122729<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Staff Accounting Bulletin (SAB)<br><br><br><br> -Number Topic 5<br><br><br><br> -Section BB<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InventoryRawMaterialsAndSuppliesNetOfReserves</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InventoryWorkInProcessNetOfReserves">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Carrying amount, net of reserves and adjustments, as of the balance sheet date of merchandise or goods which are partially completed. This inventory is generally comprised of raw materials, labor and factory overhead costs, which require further materials, labor and overhead to be converted into finished goods, and which generally require the use of estimates to determine percentage complete and pricing.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.6(a)(3))<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 330<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (SAB TOPIC 5.BB)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=27011343&amp;loc=d3e100047-122729<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Staff Accounting Bulletin (SAB)<br><br><br><br> -Number Topic 5<br><br><br><br> -Section BB<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InventoryWorkInProcessNetOfReserves</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PercentageOfWeightedAverageCostInventory">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The percentage of weighted average cost inventory present at the reporting date when inventory is valued using different valuation methods.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PercentageOfWeightedAverageCostInventory</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>

</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>28
<FILENAME>R44.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.2.0.727</span><table class="report" border="0" cellspacing="2" id="idm140187061335184">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Commitments and Contingencies (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="2">9 Months Ended</th>
<th class="th" colspan="1"></th>
<th class="th" colspan="1"></th>
</tr>
<tr>
<th class="th"><div>Jun. 30, 2015</div></th>
<th class="th"><div>Jun. 30, 2014</div></th>
<th class="th"><div>Jan. 30, 2015</div></th>
<th class="th"><div>Sep. 30, 2014</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems', window );"><strong>Schedule of Equity Method Investments [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PurchaseObligation', window );">Purchase obligation</a></td>
<td class="nump">$ 14,100<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 7,900<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment', window );">Price of an ion implanter</a></td>
<td class="nump">511<span></span>
</td>
<td class="nump">$ 214<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RevenueFromGrants', window );">Revenue from Grants</a></td>
<td class="nump">4,100<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_GrantRevenueCommitmenttoProject', window );">Grant revenue commitment to the project</a></td>
<td class="nump">$ 6,100<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis=asys_KingstoneHoldingCompanyMember', window );">Kingstone Holding Company</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems', window );"><strong>Schedule of Equity Method Investments [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EquityMethodInvestmentOwnershipPercentage', window );">Equity method investment, ownership percentage</a></td>
<td class="nump">55.00%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis=asys_KingstoneSemiconductorCompanyLtdMember', window );">Kingstone Semiconductor Company Ltd</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems', window );"><strong>Schedule of Equity Method Investments [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_PercentageofVotingInterestofAcquireeOwnedSubsidiary', window );">Percentage of voting interest of acquiree owned subsidiary</a></td>
<td class="nump">100.00%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis=asys_TempressSystemsandEnergyResearchCentreAgreementMember', window );">Tempress Systems and Energy Research Centre Agreement [Member]</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems', window );"><strong>Schedule of Equity Method Investments [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment', window );">Price of an ion implanter</a></td>
<td class="nump">$ 1,400<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_OwnershipRightsResultsofProjectsDevelopedSeparatelyByIndividualParties', window );">Ownership rights to results of projects developed separately by individual parties</a></td>
<td class="nump">100.00%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_ResearchandDevelopmentAgreementTerm', window );">R&amp;D Agreement term</a></td>
<td class="text">4 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_ResearchandDevelopmentRequiredContributionLaborandAssets', window );">Required contribution in form of labor and assets</a></td>
<td class="nump">$ 1,400<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_ResearchandDevelopmentPeriodRequiredforEquipmentRepairsandMaintenance', window );">Number of years from agreement start for contribution for project support</a></td>
<td class="text">2 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LossContingenciesByNatureOfContingencyAxis=us-gaap_LossFromCatastrophesMember', window );">Environmental Clean-up | BTU International, Inc (BTU) Merger</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems', window );"><strong>Schedule of Equity Method Investments [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LossContingencyAccrualAtCarryingValue', window );">Loss contingency accrual</a></td>
<td class="nump">$ 100<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 200<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LettersOfCreditOutstandingAmount', window );">Letter of credit</a></td>
<td class="nump">$ 200<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_asys_GrantRevenueCommitmenttoProject">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Grant Revenue Commitment to Project</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">asys_GrantRevenueCommitmenttoProject</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>asys_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_asys_OwnershipRightsResultsofProjectsDevelopedSeparatelyByIndividualParties">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Ownership Rights, Results of Projects Developed Separately By Individual Parties</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">asys_OwnershipRightsResultsofProjectsDevelopedSeparatelyByIndividualParties</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>asys_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_asys_PercentageofVotingInterestofAcquireeOwnedSubsidiary">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Percentage of Voting Interest of Acquiree Owned Subsidiary</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">asys_PercentageofVotingInterestofAcquireeOwnedSubsidiary</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>asys_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_asys_ResearchandDevelopmentAgreementTerm">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Research and Development Agreement Term</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">asys_ResearchandDevelopmentAgreementTerm</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>asys_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_asys_ResearchandDevelopmentPeriodRequiredforEquipmentRepairsandMaintenance">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Research and Development, Period Required for Equipment Repairs and Maintenance</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">asys_ResearchandDevelopmentPeriodRequiredforEquipmentRepairsandMaintenance</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>asys_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_asys_ResearchandDevelopmentRequiredContributionLaborandAssets">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Research and Development, Required Contribution, Labor and Assets</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">asys_ResearchandDevelopmentRequiredContributionLaborandAssets</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>asys_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EquityMethodInvestmentOwnershipPercentage">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The percentage of ownership of common stock or equity participation in the investee accounted for under the equity method of accounting.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 323<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 3<br><br><br><br> -Subparagraph (a)(1)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6382943&amp;loc=d3e33918-111571<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EquityMethodInvestmentOwnershipPercentage</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LettersOfCreditOutstandingAmount">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The total amount of the contingent obligation under letters of credit outstanding as of the reporting date.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LettersOfCreditOutstandingAmount</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LossContingencyAccrualAtCarryingValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of loss contingency liability.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 450<br><br><br><br> -SubTopic 20<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=25496072&amp;loc=d3e14326-108349<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LossContingencyAccrualAtCarryingValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The cash outflow associated with the acquisition of long-lived, physical assets that are used in the normal conduct of business to produce goods and services and not intended for resale; includes cash outflows to pay for construction of self-constructed assets.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Glossary Investing Activities<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6516133<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 230<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 13<br><br><br><br> -Subparagraph (c)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3213-108585<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PaymentsToAcquirePropertyPlantAndEquipment</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PurchaseObligation">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Minimum amount of purchase arrangement in which the entity has agreed to expend funds to procure goods or services from a supplier.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PurchaseObligation</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RevenueFromGrants">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Revenue earned during the period from non-repayable sum of money awarded to an entity to carry out a specific purpose as provided in grant agreements.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 225<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (SX 210.5-03.1(e))<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=26872669&amp;loc=d3e20235-122688<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RevenueFromGrants</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfEquityMethodInvestmentsLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis=asys_KingstoneHoldingCompanyMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis=asys_KingstoneHoldingCompanyMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis=asys_KingstoneSemiconductorCompanyLtdMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis=asys_KingstoneSemiconductorCompanyLtdMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis=asys_TempressSystemsandEnergyResearchCentreAgreementMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis=asys_TempressSystemsandEnergyResearchCentreAgreementMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LossContingenciesByNatureOfContingencyAxis=us-gaap_LossFromCatastrophesMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LossContingenciesByNatureOfContingencyAxis=us-gaap_LossFromCatastrophesMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_BusinessAcquisitionAxis=asys_BTUInternationalIncBTUMergerMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_BusinessAcquisitionAxis=asys_BTUInternationalIncBTUMergerMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>

</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>29
<FILENAME>R30.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.2.0.727</span><table class="report" border="0" cellspacing="2" id="idm140187059574528">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Basis of Presentation - Goodwill (Details)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="1">9 Months Ended</th>
</tr>
<tr><th class="th">
<div>Jun. 30, 2015 </div>
<div>USD ($)</div>
</th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillRollForward', window );"><strong>Goodwill [Roll Forward]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillGross', window );">Goodwill, gross, beginning of year</a></td>
<td class="nump">$ 13,043<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss', window );">Goodwill, impaired, accumulated impairment loss, beginning of year</a></td>
<td class="num">(4,720)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_Goodwill', window );">Goodwill, net, beginning of year</a></td>
<td class="nump">8,323<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillAcquiredDuringPeriod', window );">Goodwill recognized due to acquisitions</a></td>
<td class="nump">7,021<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillTranslationAdjustments', window );">Change in foreign exchange rates</a></td>
<td class="num">(301)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillGross', window );">Goodwill, gross, end of quarter</a></td>
<td class="nump">19,580<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss', window );">Goodwill, impaired, accumulated impairment loss, end of quarter</a></td>
<td class="num">(4,537)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_Goodwill', window );">Goodwill, net, end of quarter</a></td>
<td class="nump">15,043<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StatementBusinessSegmentsAxis=asys_SolarEquipmentMember', window );">Solar</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillRollForward', window );"><strong>Goodwill [Roll Forward]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillGross', window );">Goodwill, gross, beginning of year</a></td>
<td class="nump">12,315<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss', window );">Goodwill, impaired, accumulated impairment loss, beginning of year</a></td>
<td class="num">(4,720)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_Goodwill', window );">Goodwill, net, beginning of year</a></td>
<td class="nump">7,595<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillAcquiredDuringPeriod', window );">Goodwill recognized due to acquisitions</a></td>
<td class="nump">2,324<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillTranslationAdjustments', window );">Change in foreign exchange rates</a></td>
<td class="num">(301)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillGross', window );">Goodwill, gross, end of quarter</a></td>
<td class="nump">14,155<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss', window );">Goodwill, impaired, accumulated impairment loss, end of quarter</a></td>
<td class="num">(4,537)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_Goodwill', window );">Goodwill, net, end of quarter</a></td>
<td class="nump">9,618<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StatementBusinessSegmentsAxis=asys_SemiconductorEquipmentMember', window );">Semiconductor</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillRollForward', window );"><strong>Goodwill [Roll Forward]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillGross', window );">Goodwill, gross, beginning of year</a></td>
<td class="nump">0<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss', window );">Goodwill, impaired, accumulated impairment loss, beginning of year</a></td>
<td class="nump">0<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_Goodwill', window );">Goodwill, net, beginning of year</a></td>
<td class="nump">0<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillAcquiredDuringPeriod', window );">Goodwill recognized due to acquisitions</a></td>
<td class="nump">4,697<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillTranslationAdjustments', window );">Change in foreign exchange rates</a></td>
<td class="nump">0<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillGross', window );">Goodwill, gross, end of quarter</a></td>
<td class="nump">4,697<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss', window );">Goodwill, impaired, accumulated impairment loss, end of quarter</a></td>
<td class="nump">0<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_Goodwill', window );">Goodwill, net, end of quarter</a></td>
<td class="nump">4,697<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StatementBusinessSegmentsAxis=asys_PolishingSuppliesAndEquipmentMember', window );">Polishing</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillRollForward', window );"><strong>Goodwill [Roll Forward]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillGross', window );">Goodwill, gross, beginning of year</a></td>
<td class="nump">728<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss', window );">Goodwill, impaired, accumulated impairment loss, beginning of year</a></td>
<td class="nump">0<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_Goodwill', window );">Goodwill, net, beginning of year</a></td>
<td class="nump">728<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillAcquiredDuringPeriod', window );">Goodwill recognized due to acquisitions</a></td>
<td class="nump">0<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillTranslationAdjustments', window );">Change in foreign exchange rates</a></td>
<td class="nump">0<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillGross', window );">Goodwill, gross, end of quarter</a></td>
<td class="nump">728<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss', window );">Goodwill, impaired, accumulated impairment loss, end of quarter</a></td>
<td class="nump">0<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_Goodwill', window );">Goodwill, net, end of quarter</a></td>
<td class="nump">$ 728<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_Goodwill">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount after accumulated impairment loss of an asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 350<br><br><br><br> -SubTopic 20<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=35741047&amp;loc=d3e13816-109267<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 350<br><br><br><br> -SubTopic 20<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6388280&amp;loc=d3e13770-109266<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_Goodwill</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_GoodwillAcquiredDuringPeriod">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of increase in asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized resulting from a business combination.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 350<br><br><br><br> -SubTopic 20<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (a)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=35741047&amp;loc=d3e13816-109267<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_GoodwillAcquiredDuringPeriod</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_GoodwillGross">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount before accumulated impairment loss of an asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 350<br><br><br><br> -SubTopic 20<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (a,h)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=35741047&amp;loc=d3e13816-109267<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_GoodwillGross</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of accumulated impairment loss for an asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 350<br><br><br><br> -SubTopic 20<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (a,h)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=35741047&amp;loc=d3e13816-109267<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_GoodwillImpairedAccumulatedImpairmentLoss</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_GoodwillRollForward">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_GoodwillRollForward</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_GoodwillTranslationAdjustments">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of increase (decrease) from foreign currency translation adjustments of an asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 350<br><br><br><br> -SubTopic 20<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (f)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=35741047&amp;loc=d3e13816-109267<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_GoodwillTranslationAdjustments</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StatementBusinessSegmentsAxis=asys_SolarEquipmentMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StatementBusinessSegmentsAxis=asys_SolarEquipmentMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StatementBusinessSegmentsAxis=asys_SemiconductorEquipmentMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StatementBusinessSegmentsAxis=asys_SemiconductorEquipmentMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StatementBusinessSegmentsAxis=asys_PolishingSuppliesAndEquipmentMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StatementBusinessSegmentsAxis=asys_PolishingSuppliesAndEquipmentMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>

</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>30
<FILENAME>R31.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.2.0.727</span><table class="report" border="0" cellspacing="2" id="idm140187049951808">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Basis of Presentation - Intangibles (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="1">9 Months Ended</th>
<th class="th" colspan="1"></th>
<th class="th" colspan="1"></th>
<th class="th" colspan="1"></th>
</tr>
<tr>
<th class="th"><div>Jun. 30, 2015</div></th>
<th class="th"><div>Jan. 30, 2015</div></th>
<th class="th"><div>Dec. 24, 2014</div></th>
<th class="th"><div>Sep. 30, 2014</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems', window );"><strong>Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsGross', window );">Gross Carrying Amount</a></td>
<td class="nump">$ 9,279<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 6,112<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization', window );">Accumulated Amortization</a></td>
<td class="num">(4,092)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(3,434)<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsNet', window );">Net Carrying Amount</a></td>
<td class="nump">5,187<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">2,678<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_NoncompeteAgreementsMember', window );">Non-compete agreements</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems', window );"><strong>Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsGross', window );">Gross Carrying Amount</a></td>
<td class="nump">1,035<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">1,055<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization', window );">Accumulated Amortization</a></td>
<td class="num">(1,035)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(955)<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsNet', window );">Net Carrying Amount</a></td>
<td class="nump">$ 0<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">100<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_NoncompeteAgreementsMember', window );">Non-compete agreements | Minimum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems', window );"><strong>Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetUsefulLife', window );">Useful Life (in years)</a></td>
<td class="text">4 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_NoncompeteAgreementsMember', window );">Non-compete agreements | Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems', window );"><strong>Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetUsefulLife', window );">Useful Life (in years)</a></td>
<td class="text">8 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_CustomerListsMember', window );">Customer lists</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems', window );"><strong>Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsGross', window );">Gross Carrying Amount</a></td>
<td class="nump">$ 714<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">817<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization', window );">Accumulated Amortization</a></td>
<td class="num">(595)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(592)<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsNet', window );">Net Carrying Amount</a></td>
<td class="nump">$ 119<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">225<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetUsefulLife', window );">Useful Life (in years)</a></td>
<td class="text">10 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_PatentedTechnologyMember', window );">Technology</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems', window );"><strong>Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsGross', window );">Gross Carrying Amount</a></td>
<td class="nump">$ 2,116<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">2,319<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization', window );">Accumulated Amortization</a></td>
<td class="num">(1,805)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(1,682)<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsNet', window );">Net Carrying Amount</a></td>
<td class="nump">$ 311<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">637<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_PatentedTechnologyMember', window );">Technology | Minimum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems', window );"><strong>Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetUsefulLife', window );">Useful Life (in years)</a></td>
<td class="text">5 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_PatentedTechnologyMember', window );">Technology | Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems', window );"><strong>Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetUsefulLife', window );">Useful Life (in years)</a></td>
<td class="text">10 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_InProcessResearchAndDevelopmentMember', window );">In-process research and development</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems', window );"><strong>Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsGross', window );">Gross Carrying Amount</a></td>
<td class="nump">$ 1,600<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">1,600<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization', window );">Accumulated Amortization</a></td>
<td class="num">(267)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(27)<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsNet', window );">Net Carrying Amount</a></td>
<td class="nump">$ 1,333<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">1,573<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetUsefulLife', window );">Useful Life (in years)</a></td>
<td class="text">5 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_TradeNamesMember', window );">Trade names</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems', window );"><strong>Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsGross', window );">Gross Carrying Amount</a></td>
<td class="nump">$ 1,330<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">0<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization', window );">Accumulated Amortization</a></td>
<td class="num">(37)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">0<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsNet', window );">Net Carrying Amount</a></td>
<td class="nump">$ 1,293<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">0<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetUsefulLife', window );">Useful Life (in years)</a></td>
<td class="text">15 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_OtherIntangibleAssetsMember', window );">Other</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems', window );"><strong>Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsGross', window );">Gross Carrying Amount</a></td>
<td class="nump">$ 2,484<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">321<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization', window );">Accumulated Amortization</a></td>
<td class="num">(353)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(178)<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsNet', window );">Net Carrying Amount</a></td>
<td class="nump">$ 2,131<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 143<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_OtherIntangibleAssetsMember', window );">Other | Minimum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems', window );"><strong>Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetUsefulLife', window );">Useful Life (in years)</a></td>
<td class="text">2 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_OtherIntangibleAssetsMember', window );">Other | Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems', window );"><strong>Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetUsefulLife', window );">Useful Life (in years)</a></td>
<td class="text">12 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_BusinessAcquisitionAxis=asys_SoLayTecB.V.Member', window );">SoLayTec, B.V.</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems', window );"><strong>Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_BusinessAcquisitionPercentageOfVotingInterestsAcquired', window );">Percentage of voting interests acquired</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">51.00%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibles', window );">Intangible assets acquired</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 2,200<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_BusinessAcquisitionAxis=asys_BTUInternationalIncBTUMember', window );">BTU International, Inc (BTU)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems', window );"><strong>Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibles', window );">Intangible assets acquired</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 0<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>asys_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_BusinessAcquisitionPercentageOfVotingInterestsAcquired">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Percentage of voting equity interests acquired at the acquisition date in the business combination.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 805<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (c)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=56956515&amp;loc=d3e1392-128463<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_BusinessAcquisitionPercentageOfVotingInterestsAcquired</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibles">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The amount of identifiable intangible assets recognized as of the acquisition date.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 805<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 55<br><br><br><br> -Paragraph 37<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=35744172&amp;loc=d3e2207-128464<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 805<br><br><br><br> -SubTopic 20<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (c)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=56956791&amp;loc=d3e4845-128472<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibles</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FiniteLivedIntangibleAssetUsefulLife">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Useful life of finite-lived intangible assets, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FiniteLivedIntangibleAssetUsefulLife</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Accumulated amount of amortization of assets, excluding financial assets and goodwill, lacking physical substance with a finite life.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 350<br><br><br><br> -SubTopic 30<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (a)(1)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=26713463&amp;loc=d3e16323-109275<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FiniteLivedIntangibleAssetsGross">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount before amortization of assets, excluding financial assets and goodwill, lacking physical substance with a finite life.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 350<br><br><br><br> -SubTopic 30<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (a)(1)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=26713463&amp;loc=d3e16323-109275<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FiniteLivedIntangibleAssetsGross</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FiniteLivedIntangibleAssetsNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount after amortization of assets, excluding financial assets and goodwill, lacking physical substance with a finite life.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 350<br><br><br><br> -SubTopic 30<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (a)(1)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=26713463&amp;loc=d3e16323-109275<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FiniteLivedIntangibleAssetsNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_NoncompeteAgreementsMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_NoncompeteAgreementsMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RangeAxis=us-gaap_MinimumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RangeAxis=us-gaap_MinimumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RangeAxis=us-gaap_MaximumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RangeAxis=us-gaap_MaximumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_CustomerListsMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_CustomerListsMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_PatentedTechnologyMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_PatentedTechnologyMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_InProcessResearchAndDevelopmentMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_InProcessResearchAndDevelopmentMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_TradeNamesMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_TradeNamesMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_OtherIntangibleAssetsMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_OtherIntangibleAssetsMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_BusinessAcquisitionAxis=asys_SoLayTecB.V.Member">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_BusinessAcquisitionAxis=asys_SoLayTecB.V.Member</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_BusinessAcquisitionAxis=asys_BTUInternationalIncBTUMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_BusinessAcquisitionAxis=asys_BTUInternationalIncBTUMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>

</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>31
<FILENAME>R8.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.2.0.727</span><table class="report" border="0" cellspacing="2" id="idm140187059663696">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Income Taxes<br></strong></div></th>
<th class="th" colspan="1">9 Months Ended</th>
</tr>
<tr><th class="th"><div>Jun. 30, 2015</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeTaxDisclosureAbstract', window );"><strong>Income Tax Disclosure [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeTaxDisclosureTextBlock', window );">Income Taxes</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Income Taxes</font></div><div style="line-height:120%;text-align:justify;padding-left:24px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:11pt;"><font style="font-family:inherit;font-size:11pt;">T</font><font style="font-family:inherit;font-size:10pt;">he quarterly income tax provision is calculated using an estimated annual effective tax rate, based upon expected annual income, permanent items, statutory rates and planned tax strategies in the various jurisdictions in which the Company operates. However, losses in certain jurisdictions and discrete items are treated separately.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Deferred tax assets and liabilities reflect the tax effects of temporary differences between the carrying value of assets and liabilities for financial reporting purposes and the amounts used for income tax purposes. The Company records a valuation allowance if, based on the weight of available evidence, it is more likely than not that some portion or all of a deferred tax asset will not be realized. Our expectations regarding realization of our deferred tax assets is based upon the weight of all available evidence, including such factors as our recent earnings history, expected future taxable income and available tax planning strategies. As a result of the merger with BTU, the Company determined that is more likely than not that some of our U.S. federal deferred tax assets would not be realized, and recorded a partial valuation allowance in the U.S.  The Company maintains a valuation allowance with respect to certain state, federal and foreign deferred tax assets that may not be recovered. Each quarter, the valuation allowance is re-evaluated. During the nine months ended June 30, 2015 the valuation allowance increased by </font><font style="font-family:inherit;font-size:10pt;">$1.8 million</font><font style="font-family:inherit;font-size:10pt;"> due to net operating losses in The Netherlands and France, partially offset by utilization of net operating losses in China.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The Company classifies all of our uncertain tax positions as non-current income taxes payable.  At </font><font style="font-family:inherit;font-size:10pt;">June&#160;30, 2015</font><font style="font-family:inherit;font-size:10pt;"> and </font><font style="font-family:inherit;font-size:10pt;">September&#160;30, 2014</font><font style="font-family:inherit;font-size:10pt;">, the total amount of unrecognized tax benefits was approximately </font><font style="font-family:inherit;font-size:10pt;">$3.2</font><font style="font-family:inherit;font-size:10pt;"> million. If recognized, these amounts would favorably impact the effective tax rate.  </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The Company classifies interest and penalties related to unrecognized tax benefits as income tax expense. As of </font><font style="font-family:inherit;font-size:10pt;">June&#160;30, 2015</font><font style="font-family:inherit;font-size:10pt;"> and </font><font style="font-family:inherit;font-size:10pt;">September&#160;30, 2014</font><font style="font-family:inherit;font-size:10pt;">, the Company had an accrual for potential interest and penalties of approximately </font><font style="font-family:inherit;font-size:10pt;">$1.8 million</font><font style="font-family:inherit;font-size:10pt;"> and </font><font style="font-family:inherit;font-size:10pt;">$1.6 million</font><font style="font-family:inherit;font-size:10pt;">, respectively.   </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The Company and one or more of its subsidiaries file income tax returns in The Netherlands, Germany, France, Singapore, Malaysia, China and Hong Kong, as well as the U.S. and various states in the U.S. The Company and its subsidiaries have a number of open tax years dictated by statute in each of their respective taxing jurisdictions, but generally is from </font><font style="font-family:inherit;font-size:10pt;">3</font><font style="font-family:inherit;font-size:10pt;"> to </font><font style="font-family:inherit;font-size:10pt;">5</font><font style="font-family:inherit;font-size:10pt;"> years.</font></div></div><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxDisclosureAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxDisclosureAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxDisclosureTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for income taxes. Disclosures may include net deferred tax liability or asset recognized in an enterprise's statement of financial position, net change during the year in the total valuation allowance, approximate tax effect of each type of temporary difference and carryforward that gives rise to a significant portion of deferred tax liabilities and deferred tax assets, utilization of a tax carryback, and tax uncertainties information.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 235<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.4-08.(h))<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=26873400&amp;loc=d3e23780-122690<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 740<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 3<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32559-109319<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 740<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 15<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32718-109319<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 740<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 9<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32639-109319<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 740<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 2<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32537-109319<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxDisclosureTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>

</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>32
<FILENAME>R32.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.2.0.727</span><table class="report" border="0" cellspacing="2" id="idm140187049894928">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Basis of Presentation - Warranty (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="2">9 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Jun. 30, 2015</div></th>
<th class="th"><div>Jun. 30, 2014</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_MovementInStandardProductWarrantyAccrualRollForward', window );"><strong>Movement in Standard Product Warranty Accrual [Roll Forward]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProductWarrantyAccrualClassifiedCurrent', window );">Beginning balance</a></td>
<td class="nump">$ 628<span></span>
</td>
<td class="nump">$ 1,454<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StandardProductWarrantyAccrualPayments', window );">Warranty expenditures</a></td>
<td class="num">(530)<span></span>
</td>
<td class="num">(663)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StandardProductWarrantyAccrualPreexistingIncreaseDecrease', window );">Warranty provisions/(adjustment)</a></td>
<td class="nump">925<span></span>
</td>
<td class="num">(25)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProductWarrantyAccrualClassifiedCurrent', window );">Ending balance</a></td>
<td class="nump">$ 1,023<span></span>
</td>
<td class="nump">$ 766<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RangeAxis=us-gaap_MinimumMember', window );">Minimum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_ScheduleOfProductWarrantyLineItems', window );"><strong>Product Warranty [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_StandardProductWarrantyPeriod', window );">Standard product warranty, period (in months)</a></td>
<td class="text">12 months<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RangeAxis=us-gaap_MaximumMember', window );">Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_ScheduleOfProductWarrantyLineItems', window );"><strong>Product Warranty [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_StandardProductWarrantyPeriod', window );">Standard product warranty, period (in months)</a></td>
<td class="text">24 months<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_asys_ScheduleOfProductWarrantyLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Schedule of Product Warranty [Line Items]</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">asys_ScheduleOfProductWarrantyLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>asys_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_asys_StandardProductWarrantyPeriod">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Standard Product Warranty, Period</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">asys_StandardProductWarrantyPeriod</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>asys_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_MovementInStandardProductWarrantyAccrualRollForward">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_MovementInStandardProductWarrantyAccrualRollForward</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProductWarrantyAccrualClassifiedCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Carrying value as of the balance sheet date of obligations incurred through that date and payable for estimated claims under standard and extended warranty protection rights granted to customers. For classified balance sheets, represents the current portion of the liabilities (due within one year or within the normal operating cycle if longer).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 460<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 25<br><br><br><br> -Paragraph 5<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51667650&amp;loc=d3e11281-110244<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 460<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 7<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51674963&amp;loc=d3e12524-110249<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.20)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProductWarrantyAccrualClassifiedCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StandardProductWarrantyAccrualPayments">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Represents the aggregate decrease in the liability for payments made (in cash or in kind) to satisfy claims under the terms of the standard product warranty. Does not include any Increase or Decrease in the liability for payments related to extended product warranties.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 460<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 8<br><br><br><br> -Subparagraph ((c)(2))<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51674963&amp;loc=d3e12565-110249<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StandardProductWarrantyAccrualPayments</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StandardProductWarrantyAccrualPreexistingIncreaseDecrease">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Represents the aggregate Increase or Decrease in the liability during the reporting period for accruals related to preexisting standard product warranties (including adjustments related to changes in estimates). Does not include any Increase or Decrease in the liability for accruals related to extended product warranties.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 460<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 8<br><br><br><br> -Subparagraph ((c)(4))<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51674963&amp;loc=d3e12565-110249<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StandardProductWarrantyAccrualPreexistingIncreaseDecrease</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RangeAxis=us-gaap_MinimumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RangeAxis=us-gaap_MinimumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RangeAxis=us-gaap_MaximumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RangeAxis=us-gaap_MaximumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>

</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>33
<FILENAME>R40.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.2.0.727</span><table class="report" border="0" cellspacing="2" id="idm140187050005312">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Business Segment Information (Details)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="2">3 Months Ended</th>
<th class="th" colspan="2">9 Months Ended</th>
<th class="th" colspan="1"></th>
<th class="th" colspan="1"></th>
</tr>
<tr>
<th class="th">
<div>Jun. 30, 2015 </div>
<div>USD ($)</div>
</th>
<th class="th">
<div>Jun. 30, 2014 </div>
<div>USD ($)</div>
</th>
<th class="th">
<div>Jun. 30, 2015 </div>
<div>USD ($) </div>
<div>segment</div>
</th>
<th class="th">
<div>Jun. 30, 2014 </div>
<div>USD ($)</div>
</th>
<th class="th"><div>Dec. 24, 2014</div></th>
<th class="th">
<div>Sep. 30, 2014 </div>
<div>USD ($)</div>
</th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SegmentReportingInformationLineItems', window );"><strong>Segment Reporting Information [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NumberOfOperatingSegments', window );">Number of business segments | segment</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">3<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SalesRevenueNet', window );">Net Revenues</a></td>
<td class="nump">$ 40,016<span></span>
</td>
<td class="nump">$ 9,190<span></span>
</td>
<td class="nump">$ 76,685<span></span>
</td>
<td class="nump">$ 36,678<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingIncomeLoss', window );">Operating Income (Loss)</a></td>
<td class="num">(1,234)<span></span>
</td>
<td class="num">(3,871)<span></span>
</td>
<td class="num">(7,962)<span></span>
</td>
<td class="num">(8,884)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_Assets', window );">Identifiable Assets</a></td>
<td class="nump">134,055<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">134,055<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 89,904<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StatementBusinessSegmentsAxis=asys_SolarEquipmentMember', window );">Solar</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SegmentReportingInformationLineItems', window );"><strong>Segment Reporting Information [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SalesRevenueNet', window );">Net Revenues</a></td>
<td class="nump">24,392<span></span>
</td>
<td class="nump">4,632<span></span>
</td>
<td class="nump">42,141<span></span>
</td>
<td class="nump">21,137<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingIncomeLoss', window );">Operating Income (Loss)</a></td>
<td class="nump">1,232<span></span>
</td>
<td class="num">(3,425)<span></span>
</td>
<td class="num">(1,987)<span></span>
</td>
<td class="num">(7,751)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_Assets', window );">Identifiable Assets</a></td>
<td class="nump">65,212<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">65,212<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">56,858<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StatementBusinessSegmentsAxis=asys_SemiconductorEquipmentMember', window );">Semiconductor</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SegmentReportingInformationLineItems', window );"><strong>Segment Reporting Information [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SalesRevenueNet', window );">Net Revenues</a></td>
<td class="nump">12,945<span></span>
</td>
<td class="nump">2,132<span></span>
</td>
<td class="nump">25,765<span></span>
</td>
<td class="nump">8,478<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingIncomeLoss', window );">Operating Income (Loss)</a></td>
<td class="num">(1,113)<span></span>
</td>
<td class="nump">179<span></span>
</td>
<td class="num">(483)<span></span>
</td>
<td class="nump">927<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_Assets', window );">Identifiable Assets</a></td>
<td class="nump">54,559<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">54,559<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">5,593<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StatementBusinessSegmentsAxis=asys_PolishingSuppliesAndEquipmentMember', window );">Polishing</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SegmentReportingInformationLineItems', window );"><strong>Segment Reporting Information [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SalesRevenueNet', window );">Net Revenues</a></td>
<td class="nump">2,679<span></span>
</td>
<td class="nump">2,426<span></span>
</td>
<td class="nump">8,779<span></span>
</td>
<td class="nump">7,063<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingIncomeLoss', window );">Operating Income (Loss)</a></td>
<td class="nump">574<span></span>
</td>
<td class="nump">654<span></span>
</td>
<td class="nump">1,917<span></span>
</td>
<td class="nump">1,622<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_Assets', window );">Identifiable Assets</a></td>
<td class="nump">6,078<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">6,078<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">6,253<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StatementBusinessSegmentsAxis=us-gaap_MaterialReconcilingItemsMember', window );">Non-segment related</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SegmentReportingInformationLineItems', window );"><strong>Segment Reporting Information [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingIncomeLoss', window );">Operating Income (Loss)</a></td>
<td class="num">(1,927)<span></span>
</td>
<td class="num">$ (1,279)<span></span>
</td>
<td class="num">(7,409)<span></span>
</td>
<td class="num">$ (3,682)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_Assets', window );">Identifiable Assets</a></td>
<td class="nump">$ 8,206<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 8,206<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 21,200<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_BusinessAcquisitionAxis=asys_SoLayTecB.V.Member', window );">SoLayTec, B.V.</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SegmentReportingInformationLineItems', window );"><strong>Segment Reporting Information [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_BusinessAcquisitionPercentageOfVotingInterestsAcquired', window );">Percentage of voting interests acquired</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">51.00%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskByTypeAxis=us-gaap_ProductConcentrationRiskMember', window );">Product Concentration Risk | Sales Revenue, Product Line | Semiconductor</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SegmentReportingInformationLineItems', window );"><strong>Segment Reporting Information [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskPercentage1', window );">Concentration risk, percentage (less than 25%)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">25.00%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_Assets">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Sum of the carrying amounts as of the balance sheet date of all assets that are recognized. Assets are probable future economic benefits obtained or controlled by an entity as a result of past transactions or events.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.18)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 03<br><br><br><br> -Paragraph 12<br><br><br><br> -Article 7<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_Assets</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_BusinessAcquisitionPercentageOfVotingInterestsAcquired">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Percentage of voting equity interests acquired at the acquisition date in the business combination.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 805<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (c)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=56956515&amp;loc=d3e1392-128463<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_BusinessAcquisitionPercentageOfVotingInterestsAcquired</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConcentrationRiskPercentage1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>For an entity that discloses a concentration risk in relation to quantitative amount, which serves as the "benchmark" (or denominator) in the equation, this concept represents the concentration percentage derived from the division.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 275<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 18<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51801978&amp;loc=d3e6351-108592<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 825<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 20<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=49121117&amp;loc=d3e13531-108611<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 275<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 20<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51801978&amp;loc=d3e6404-108592<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 825<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 21<br><br><br><br> -Subparagraph (a)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=49121117&amp;loc=d3e13537-108611<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConcentrationRiskPercentage1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NumberOfOperatingSegments">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Number of operating segments. An operating segment is a component of an enterprise: (a) that engages in business activities from which it may earn revenues and incur expenses (including revenues and expenses relating to transactions with other components of the same enterprise), (b) whose operating results are regularly reviewed by the enterprise's chief operating decision maker to make decisions about resources to be allocated to the segment and assess its performance, and (c) for which discrete financial information is available. An operating segment may engage in business activities for which it has yet to earn revenues, for example, start-up operations may be operating segments before earning revenues.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NumberOfOperatingSegments</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:integerItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingIncomeLoss">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The net result for the period of deducting operating expenses from operating revenues.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingIncomeLoss</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SalesRevenueNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Total revenue from sale of goods and services rendered during the reporting period, in the normal course of business, reduced by sales returns and allowances, and sales discounts.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 225<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (SX 210.5-03.1)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=26872669&amp;loc=d3e20235-122688<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SalesRevenueNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SegmentReportingInformationLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SegmentReportingInformationLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StatementBusinessSegmentsAxis=asys_SolarEquipmentMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StatementBusinessSegmentsAxis=asys_SolarEquipmentMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StatementBusinessSegmentsAxis=asys_SemiconductorEquipmentMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StatementBusinessSegmentsAxis=asys_SemiconductorEquipmentMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StatementBusinessSegmentsAxis=asys_PolishingSuppliesAndEquipmentMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StatementBusinessSegmentsAxis=asys_PolishingSuppliesAndEquipmentMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StatementBusinessSegmentsAxis=us-gaap_MaterialReconcilingItemsMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StatementBusinessSegmentsAxis=us-gaap_MaterialReconcilingItemsMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_BusinessAcquisitionAxis=asys_SoLayTecB.V.Member">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_BusinessAcquisitionAxis=asys_SoLayTecB.V.Member</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConcentrationRiskByTypeAxis=us-gaap_ProductConcentrationRiskMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConcentrationRiskByTypeAxis=us-gaap_ProductConcentrationRiskMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_SalesRevenueProductLineMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_SalesRevenueProductLineMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>

</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>34
<FILENAME>R2.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.2.0.727</span><table class="report" border="0" cellspacing="2" id="idm140187050859264">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Condensed Consolidated Balance Sheets - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th"><div>Jun. 30, 2015</div></th>
<th class="th"><div>Sep. 30, 2014</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AssetsCurrentAbstract', window );"><strong>Current Assets</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CashAndCashEquivalentsAtCarryingValue', window );">Cash and cash equivalents</a></td>
<td class="nump">$ 23,715<span></span>
</td>
<td class="nump">$ 27,367<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue', window );">Restricted cash</a></td>
<td class="nump">1,574<span></span>
</td>
<td class="nump">2,380<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AccountsReceivableNetCurrentAbstract', window );"><strong>Accounts receivable</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AccountsReceivableNetCurrent', window );">Trade (less allowance for doubtful accounts of $3,440 and $2,846 at June 30, 2015, and September 30, 2014, respectively)</a></td>
<td class="nump">19,559<span></span>
</td>
<td class="nump">8,896<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_UnbilledAndOther', window );">Unbilled and other</a></td>
<td class="nump">10,162<span></span>
</td>
<td class="nump">6,880<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InventoryNet', window );">Inventories</a></td>
<td class="nump">29,436<span></span>
</td>
<td class="nump">16,760<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredTaxAssetsNetCurrent', window );">Deferred income taxes</a></td>
<td class="nump">1,650<span></span>
</td>
<td class="nump">1,060<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeTaxesReceivable', window );">Refundable income taxes</a></td>
<td class="nump">300<span></span>
</td>
<td class="nump">0<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherAssetsCurrent', window );">Other</a></td>
<td class="nump">3,967<span></span>
</td>
<td class="nump">2,082<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AssetsCurrent', window );">Total current assets</a></td>
<td class="nump">90,363<span></span>
</td>
<td class="nump">65,425<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentNet', window );">Property, Plant and Equipment - Net</a></td>
<td class="nump">20,042<span></span>
</td>
<td class="nump">9,752<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredTaxAssetsNetNoncurrent', window );">Deferred Income Taxes - Long Term</a></td>
<td class="nump">120<span></span>
</td>
<td class="nump">1,300<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IntangibleAssetsNetExcludingGoodwill', window );">Intangible Assets - Net</a></td>
<td class="nump">5,187<span></span>
</td>
<td class="nump">2,678<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_Goodwill', window );">Goodwill</a></td>
<td class="nump">15,043<span></span>
</td>
<td class="nump">8,323<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherAssetsNoncurrent', window );">Other Assets - Long Term</a></td>
<td class="nump">3,300<span></span>
</td>
<td class="nump">2,426<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_Assets', window );">Total Assets</a></td>
<td class="nump">134,055<span></span>
</td>
<td class="nump">89,904<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LiabilitiesCurrentAbstract', window );"><strong>Current Liabilities</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AccountsPayableCurrent', window );">Accounts payable</a></td>
<td class="nump">19,853<span></span>
</td>
<td class="nump">6,003<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LongTermDebtCurrent', window );">Current maturities of long-term debt</a></td>
<td class="nump">692<span></span>
</td>
<td class="nump">0<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EmployeeRelatedLiabilitiesCurrent', window );">Accrued compensation and related taxes</a></td>
<td class="nump">6,361<span></span>
</td>
<td class="nump">4,269<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProductWarrantyAccrualClassifiedCurrent', window );">Accrued warranty expense</a></td>
<td class="nump">1,023<span></span>
</td>
<td class="nump">628<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherDeferredCreditsCurrent', window );">Deferred profit</a></td>
<td class="nump">5,120<span></span>
</td>
<td class="nump">6,908<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CustomerAdvancesCurrent', window );">Customer deposits</a></td>
<td class="nump">10,192<span></span>
</td>
<td class="nump">4,992<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AccruedLiabilitiesCurrent', window );">Other accrued liabilities</a></td>
<td class="nump">5,465<span></span>
</td>
<td class="nump">5,346<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AccruedIncomeTaxesCurrent', window );">Income taxes payable</a></td>
<td class="nump">0<span></span>
</td>
<td class="nump">4,990<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LiabilitiesCurrent', window );">Total current liabilities</a></td>
<td class="nump">48,706<span></span>
</td>
<td class="nump">33,136<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LongTermDebtNoncurrent', window );">Long-term Debt</a></td>
<td class="nump">8,619<span></span>
</td>
<td class="nump">0<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LiabilityForUncertainTaxPositionsNoncurrent', window );">Income Taxes Payable - Long Term</a></td>
<td class="nump">4,890<span></span>
</td>
<td class="nump">3,180<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredTaxLiabilitiesNoncurrent', window );">Deferred Income Taxes - Long Term</a></td>
<td class="nump">250<span></span>
</td>
<td class="nump">0<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_Liabilities', window );">Total liabilities</a></td>
<td class="nump">$ 62,465<span></span>
</td>
<td class="nump">$ 36,316<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CommitmentsAndContingencies', window );">Commitments and Contingencies</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract', window );"><strong>Stockholders' Equity</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PreferredStockValue', window );">Preferred stock; 100,000,000 shares authorized; none issued</a></td>
<td class="nump">$ 0<span></span>
</td>
<td class="nump">$ 0<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CommonStockValue', window );">Common stock; $0.01 par value; 100,000,000 shares authorized; shares issued and outstanding: 13,150,222 and 9,848,253 at June 30, 2015, and September 30, 2014, respectively</a></td>
<td class="nump">132<span></span>
</td>
<td class="nump">98<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AdditionalPaidInCapital', window );">Additional paid-in capital</a></td>
<td class="nump">109,891<span></span>
</td>
<td class="nump">81,884<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax', window );">Accumulated other comprehensive loss</a></td>
<td class="num">(8,733)<span></span>
</td>
<td class="num">(5,790)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RetainedEarningsAccumulatedDeficit', window );">Retained deficit</a></td>
<td class="num">(30,170)<span></span>
</td>
<td class="num">(21,051)<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockholdersEquity', window );">Total stockholders' equity</a></td>
<td class="nump">71,120<span></span>
</td>
<td class="nump">55,141<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_MinorityInterest', window );">Noncontrolling interest</a></td>
<td class="nump">470<span></span>
</td>
<td class="num">(1,553)<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterest', window );">Total equity</a></td>
<td class="nump">71,590<span></span>
</td>
<td class="nump">53,588<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LiabilitiesAndStockholdersEquity', window );">Total Liabilities and Stockholders' Equity</a></td>
<td class="nump">$ 134,055<span></span>
</td>
<td class="nump">$ 89,904<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_asys_UnbilledAndOther">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Primarily the contingent portion of the sales price that is not billable until acceptance of the product.  The majority of these amounts are offset by balances included in deferred profit.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">asys_UnbilledAndOther</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>asys_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccountsPayableCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Carrying value as of the balance sheet date of liabilities incurred (and for which invoices have typically been received) and payable to vendors for goods and services received that are used in an entity's business. Used to reflect the current portion of the liabilities (due within one year or within the normal operating cycle if longer).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.19(a))<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccountsPayableCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccountsReceivableNetCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount due from customers or clients, within one year of the balance sheet date (or the normal operating cycle, whichever is longer), for goods or services (including trade receivables) that have been delivered or sold in the normal course of business, reduced to the estimated net realizable fair value by an allowance established by the entity of the amount it deems uncertain of collection.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.3-4)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 02<br><br><br><br> -Paragraph 3<br><br><br><br> -Subparagraph a(1)<br><br><br><br> -Article 5<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 02<br><br><br><br> -Paragraph 4<br><br><br><br> -Article 5<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccountsReceivableNetCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccountsReceivableNetCurrentAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccountsReceivableNetCurrentAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccruedIncomeTaxesCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Carrying amount as of the balance sheet date of the unpaid sum of the known and estimated amounts payable to satisfy all currently due domestic and foreign income tax obligations.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.20)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 03<br><br><br><br> -Paragraph 15<br><br><br><br> -Article 9<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 03<br><br><br><br> -Paragraph 15<br><br><br><br> -Subparagraph b(1)<br><br><br><br> -Article 7<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccruedIncomeTaxesCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccruedLiabilitiesCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Carrying value as of the balance sheet date of obligations incurred and payable, pertaining to costs that are statutory in nature, are incurred on contractual obligations, or accumulate over time and for which invoices have not yet been received or will not be rendered. Examples include taxes, interest, rent and utilities. Used to reflect the current portion of the liabilities (due within one year or within the normal operating cycle if longer).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.20)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccruedLiabilitiesCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Accumulated change in equity from transactions and other events and circumstances from non-owner sources, net of tax effect, at period end. Excludes Net Income (Loss), and accumulated changes in equity from transactions resulting from investments by owners and distributions to owners. Includes foreign currency translation items, certain pension adjustments, unrealized gains and losses on certain investments in debt and equity securities, other than temporary impairment (OTTI) losses related to factors other than credit losses on available-for-sale and held-to-maturity debt securities that an entity does not intend to sell and it is not more likely than not that the entity will be required to sell before recovery of the amortized cost basis, as well as changes in the fair value of derivatives related to the effective portion of a designated cash flow hedge.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 220<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 11<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=36458714&amp;loc=d3e637-108580<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 220<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 14<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=36458714&amp;loc=d3e681-108580<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 220<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 14A<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=36458714&amp;loc=SL7669686-108580<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 02<br><br><br><br> -Paragraph 31<br><br><br><br> -Article 5<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 04<br><br><br><br> -Article 3<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AdditionalPaidInCapital">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Excess of issue price over par or stated value of the entity's capital stock and amounts received from other transactions involving the entity's stock or stockholders. Includes adjustments to additional paid in capital. Some examples of such adjustments include recording the issuance of debt with a beneficial conversion feature and certain tax consequences of equity instruments awarded to employees. Use this element for the aggregate amount of additional paid-in capital associated with common and preferred stock. For additional paid-in capital associated with only common stock, use the element additional paid in capital, common stock. For additional paid-in capital associated with only preferred stock, use the element additional paid in capital, preferred stock.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.30(a)(1))<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 02<br><br><br><br> -Paragraph 31<br><br><br><br> -Article 5<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AdditionalPaidInCapital</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_Assets">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Sum of the carrying amounts as of the balance sheet date of all assets that are recognized. Assets are probable future economic benefits obtained or controlled by an entity as a result of past transactions or events.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.18)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 03<br><br><br><br> -Paragraph 12<br><br><br><br> -Article 7<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_Assets</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AssetsCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Sum of the carrying amounts as of the balance sheet date of all assets that are expected to be realized in cash, sold, or consumed within one year (or the normal operating cycle, if longer). Assets are probable future economic benefits obtained or controlled by an entity as a result of past transactions or events.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.9)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 3<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=28358313&amp;loc=d3e6801-107765<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=28358313&amp;loc=d3e6676-107765<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AssetsCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AssetsCurrentAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AssetsCurrentAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CashAndCashEquivalentsAtCarryingValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of currency on hand as well as demand deposits with banks or financial institutions. Includes other kinds of accounts that have the general characteristics of demand deposits. Also includes short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates. Excludes cash and cash equivalents within disposal group and discontinued operation.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Glossary Cash<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6506951<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (a)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=28358313&amp;loc=d3e6676-107765<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 230<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 4<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3044-108585<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Glossary Cash Equivalents<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6507016<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.1)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CashAndCashEquivalentsAtCarryingValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CommitmentsAndContingencies">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Represents the caption on the face of the balance sheet to indicate that the entity has entered into (1) purchase or supply arrangements that will require expending a portion of its resources to meet the terms thereof, and (2) is exposed to potential losses or, less frequently, gains, arising from (a) possible claims against a company's resources due to future performance under contract terms, and (b) possible losses or likely gains from uncertainties that will ultimately be resolved when one or more future events that are deemed likely to occur do occur or fail to occur.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 944<br><br><br><br> -SubTopic 210<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.7-03.(a),19)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6879938&amp;loc=d3e572229-122910<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 450<br><br><br><br> -SubTopic 20<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=25496072&amp;loc=d3e14326-108349<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 942<br><br><br><br> -SubTopic 210<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.9-03.17)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6876686&amp;loc=d3e534808-122878<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.25)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CommitmentsAndContingencies</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CommonStockValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Aggregate par or stated value of issued nonredeemable common stock (or common stock redeemable solely at the option of the issuer). This item includes treasury stock repurchased by the entity. Note: elements for number of nonredeemable common shares, par value and other disclosure concepts are in another section within stockholders' equity.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.29)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 02<br><br><br><br> -Paragraph 30<br><br><br><br> -Article 5<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CommonStockValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CustomerAdvancesCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The current portion of prepayments received from customers for goods or services to be provided in the future.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.20)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CustomerAdvancesCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxAssetsNetCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount after allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences and carryforwards expected to be realized or consumed within one year or operating cycle, if longer.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 740<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (b)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32537-109319<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 740<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 4<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=37586315&amp;loc=d3e31917-109318<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 740<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 6<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=37586315&amp;loc=d3e31931-109318<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 740<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 5<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=37586315&amp;loc=d3e31928-109318<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 740<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 9<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=37586315&amp;loc=d3e31958-109318<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredTaxAssetsNetCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxAssetsNetNoncurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount after allocation of valuation allowances of noncurrent deferred tax asset attributable to deductible temporary differences and carryforwards. Noncurrent assets are expected to be realized or consumed after one year (or the normal operating cycle, if longer).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 740<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (b)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32537-109319<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 740<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 6<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=37586315&amp;loc=d3e31931-109318<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 740<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 5<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=37586315&amp;loc=d3e31928-109318<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 740<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 9<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=37586315&amp;loc=d3e31958-109318<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 740<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 4<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=37586315&amp;loc=d3e31917-109318<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredTaxAssetsNetNoncurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxLiabilitiesNoncurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount, after deferred tax asset, of deferred tax liability attributable to taxable differences, netted by jurisdiction and classified as noncurrent.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 740<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 6<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=37586315&amp;loc=d3e31931-109318<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 740<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 9<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=37586315&amp;loc=d3e31958-109318<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 740<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 4<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=37586315&amp;loc=d3e31917-109318<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredTaxLiabilitiesNoncurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EmployeeRelatedLiabilitiesCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Total of the carrying values as of the balance sheet date of obligations incurred through that date and payable for obligations related to services received from employees, such as accrued salaries and bonuses, payroll taxes and fringe benefits. Used to reflect the current portion of the liabilities (due within one year or within the normal operating cycle if longer).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.20)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EmployeeRelatedLiabilitiesCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_Goodwill">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount after accumulated impairment loss of an asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 350<br><br><br><br> -SubTopic 20<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=35741047&amp;loc=d3e13816-109267<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 350<br><br><br><br> -SubTopic 20<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6388280&amp;loc=d3e13770-109266<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_Goodwill</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxesReceivable">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Carrying amount due within one year of the balance sheet date (or one operating cycle, if longer) from tax authorities as of the balance sheet date representing refunds of overpayments or recoveries based on agreed-upon resolutions of disputes.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 944<br><br><br><br> -SubTopic 210<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.7-03.5(c))<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6879938&amp;loc=d3e572229-122910<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.3(a)(4))<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 942<br><br><br><br> -SubTopic 210<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.9-03.10)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6876686&amp;loc=d3e534808-122878<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxesReceivable</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IntangibleAssetsNetExcludingGoodwill">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Sum of the carrying amounts of all intangible assets, excluding goodwill, as of the balance sheet date, net of accumulated amortization and impairment charges.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 350<br><br><br><br> -SubTopic 30<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6388964&amp;loc=d3e16212-109274<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 350<br><br><br><br> -SubTopic 30<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph ((a)(1),(b))<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=26713463&amp;loc=d3e16323-109275<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IntangibleAssetsNetExcludingGoodwill</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InventoryNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount after valuation and LIFO reserves of inventory expected to be sold, or consumed within one year or operating cycle, if longer.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.6(a))<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 330<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 35<br><br><br><br> -Paragraph 2<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51655945&amp;loc=d3e3927-108312<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (b)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=28358313&amp;loc=d3e6676-107765<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InventoryNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_Liabilities">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Sum of the carrying amounts as of the balance sheet date of all liabilities that are recognized. Liabilities are probable future sacrifices of economic benefits arising from present obligations of an entity to transfer assets or provide services to other entities in the future.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.19-26)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_Liabilities</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LiabilitiesAndStockholdersEquity">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of liabilities and equity items, including the portion of equity attributable to noncontrolling interests, if any.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.32)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 03<br><br><br><br> -Paragraph 25<br><br><br><br> -Article 7<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LiabilitiesAndStockholdersEquity</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LiabilitiesCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Total obligations incurred as part of normal operations that are expected to be paid during the following twelve months or within one business cycle, if longer.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.21)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LiabilitiesCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LiabilitiesCurrentAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LiabilitiesCurrentAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LiabilityForUncertainTaxPositionsNoncurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The noncurrent portion of the amount recognized for uncertain tax positions as of the balance sheet date.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.24)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LiabilityForUncertainTaxPositionsNoncurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LongTermDebtCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of long-term debt, after unamortized discount or premium, scheduled to be repaid within one year or the normal operating cycle, if longer. Includes, but not limited to, notes payable, bonds payable, debentures, mortgage loans and commercial paper. Excludes capital lease obligations.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.19,20)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LongTermDebtCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LongTermDebtNoncurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Carrying amount of long-term debt, net of unamortized discount or premium, excluding amounts to be repaid within one year or the normal operating cycle, if longer (current maturities). Includes, but not limited to, notes payable, bonds payable, debentures, mortgage loans and commercial paper. Excludes capital lease obligations.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.22)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LongTermDebtNoncurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_MinorityInterest">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Total of all stockholders' equity (deficit) items, net of receivables from officers, directors, owners, and affiliates of the entity which is directly or indirectly attributable to that ownership interest in subsidiary equity which is not attributable to the parent (that is, noncontrolling interest, previously referred to as minority interest).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.31)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 02<br><br><br><br> -Paragraph 27<br><br><br><br> -Article 5<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 03<br><br><br><br> -Paragraph 20<br><br><br><br> -Article 7<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_MinorityInterest</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherAssetsCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Aggregate carrying amount, as of the balance sheet date, of current assets not separately disclosed in the balance sheet. Current assets are expected to be realized or consumed within one year (or the normal operating cycle, if longer).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.8)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherAssetsCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherAssetsNoncurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Aggregate carrying amount, as of the balance sheet date, of noncurrent assets not separately disclosed in the balance sheet. Noncurrent assets are expected to be realized or consumed after one year (or the normal operating cycle, if longer).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.17)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherAssetsNoncurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherDeferredCreditsCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Carrying amount as of the balance sheet date of unearned revenue or income not otherwise specified in the taxonomy which is expected to be taken into income within one year or the normal operating cycle, if longer.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.20)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherDeferredCreditsCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PreferredStockValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Aggregate par or stated value of issued nonredeemable preferred stock (or preferred stock redeemable solely at the option of the issuer). This item includes treasury stock repurchased by the entity. Note: elements for number of nonredeemable preferred shares, par value and other disclosure concepts are in another section within stockholders' equity.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 505<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.3-04)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=27012166&amp;loc=d3e187085-122770<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.28)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 02<br><br><br><br> -Paragraph 29<br><br><br><br> -Article 5<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PreferredStockValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProductWarrantyAccrualClassifiedCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Carrying value as of the balance sheet date of obligations incurred through that date and payable for estimated claims under standard and extended warranty protection rights granted to customers. For classified balance sheets, represents the current portion of the liabilities (due within one year or within the normal operating cycle if longer).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 460<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 25<br><br><br><br> -Paragraph 5<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51667650&amp;loc=d3e11281-110244<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 460<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 7<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51674963&amp;loc=d3e12524-110249<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.20)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProductWarrantyAccrualClassifiedCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount after accumulated depreciation, depletion and amortization of physical assets used in the normal conduct of business to produce goods and services and not intended for resale. Examples include, but are not limited to, land, buildings, machinery and equipment, office equipment, and furniture and fixtures.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.13)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 360<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6391035&amp;loc=d3e2868-110229<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 02<br><br><br><br> -Paragraph 13<br><br><br><br> -Subparagraph a<br><br><br><br> -Article 5<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 03<br><br><br><br> -Paragraph 8<br><br><br><br> -Article 7<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The carrying amounts of cash and cash equivalent items which are restricted as to withdrawal or usage. Restrictions may include legally restricted deposits held as compensating balances against short-term borrowing arrangements, contracts entered into with others, or entity statements of intention with regard to particular deposits; however, time deposits and short-term certificates of deposit are not generally included in legally restricted deposits. Excludes compensating balance arrangements that are not agreements which legally restrict the use of cash amounts shown on the balance sheet. For a classified balance sheet represents the current portion only (the noncurrent portion has a separate concept); there is a separate and distinct element for unclassified presentations.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.1)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RetainedEarningsAccumulatedDeficit">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The cumulative amount of the reporting entity's undistributed earnings or deficit.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.31(a)(3))<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 04<br><br><br><br> -Article 3<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RetainedEarningsAccumulatedDeficit</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockholdersEquity">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Total of all stockholders' equity (deficit) items, net of receivables from officers, directors, owners, and affiliates of the entity which are attributable to the parent. The amount of the economic entity's stockholders' equity attributable to the parent excludes the amount of stockholders' equity which is allocable to that ownership interest in subsidiary equity which is not attributable to the parent (noncontrolling interest, minority interest). This excludes temporary equity and is sometimes called permanent equity.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 310<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (SAB TOPIC 4.E)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=27010918&amp;loc=d3e74512-122707<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.29-31)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Staff Accounting Bulletin (SAB)<br><br><br><br> -Number Topic 4<br><br><br><br> -Section E<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockholdersEquity</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterest">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of stockholders' equity (deficit), net of receivables from officers, directors, owners, and affiliates of the entity, attributable to both the parent and noncontrolling interests. Amount excludes temporary equity. Alternate caption for the concept is permanent equity.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 810<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 55<br><br><br><br> -Paragraph 4I<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=35736750&amp;loc=SL4590271-111686<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 810<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 16<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51664549&amp;loc=SL4568740-111683<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 810<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 15<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51664549&amp;loc=SL4568447-111683<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterest</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>

</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>35
<FILENAME>R45.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.2.0.727</span><table class="report" border="0" cellspacing="2" id="idm140187056416896">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Acquisition (Details)<br> $ in Millions</strong></div></th>
<th class="th">
<div>Jan. 30, 2015 </div>
<div>shares</div>
</th>
<th class="th">
<div>Dec. 24, 2014 </div>
<div>USD ($)</div>
</th>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_BusinessAcquisitionAxis=asys_SoLayTecB.V.Member', window );">SoLayTec, B.V.</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_BusinessAcquisitionLineItems', window );"><strong>Business Acquisition [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_BusinessAcquisitionPercentageOfVotingInterestsAcquired', window );">Percentage of voting interests acquired</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">51.00%<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PaymentsToAcquireBusinessesGross', window );">Purchase price consideration</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 1.9<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_LegalEntityAxis=asys_BTUInternationalIncBTUMergerMember', window );">BTU International, Inc (BTU) Merger | Merger Agreement</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_BusinessAcquisitionLineItems', window );"><strong>Business Acquisition [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConversionOfStockSharesIssued1', window );">Shares issued upon conversion | shares</a></td>
<td class="nump">3,185,852<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_LegalEntityAxis=us-gaap_ParentCompanyMember', window );">Parent Company | Merger Agreement</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_BusinessAcquisitionLineItems', window );"><strong>Business Acquisition [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_ConversionOfStockConversionRatioSharesOfStockExchangedPerEachShareOfSubsidiaryStock', window );">Exchange ratio</a></td>
<td class="nump">0.3291<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_asys_ConversionOfStockConversionRatioSharesOfStockExchangedPerEachShareOfSubsidiaryStock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Conversion Of Stock, Conversion Ratio, Shares Of Stock Exchanged Per Each Share Of Subsidiary Stock</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">asys_ConversionOfStockConversionRatioSharesOfStockExchangedPerEachShareOfSubsidiaryStock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>asys_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:pureItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_BusinessAcquisitionLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_BusinessAcquisitionLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_BusinessAcquisitionPercentageOfVotingInterestsAcquired">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Percentage of voting equity interests acquired at the acquisition date in the business combination.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 805<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (c)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=56956515&amp;loc=d3e1392-128463<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_BusinessAcquisitionPercentageOfVotingInterestsAcquired</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConversionOfStockSharesIssued1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The number of new shares issued in the conversion of stock in a noncash (or part noncash) transaction. Noncash is defined as transactions during a period that do not result in cash receipts or cash payments in the period. "Part noncash" refers to that portion of the transaction not resulting in cash receipts or cash payments in the period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 230<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 4<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6367179&amp;loc=d3e4313-108586<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 230<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 5<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6367179&amp;loc=d3e4332-108586<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 230<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 3<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6367179&amp;loc=d3e4304-108586<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConversionOfStockSharesIssued1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PaymentsToAcquireBusinessesGross">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The cash outflow associated with the acquisition of business during the period. The cash portion only of the acquisition price.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Glossary Investing Activities<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6516133<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 230<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 13<br><br><br><br> -Subparagraph (b)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3213-108585<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PaymentsToAcquireBusinessesGross</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_BusinessAcquisitionAxis=asys_SoLayTecB.V.Member">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_BusinessAcquisitionAxis=asys_SoLayTecB.V.Member</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_LegalEntityAxis=asys_BTUInternationalIncBTUMergerMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_LegalEntityAxis=asys_BTUInternationalIncBTUMergerMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RelatedPartyTransactionAxis=asys_MergerAgreementMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RelatedPartyTransactionAxis=asys_MergerAgreementMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_LegalEntityAxis=us-gaap_ParentCompanyMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_LegalEntityAxis=us-gaap_ParentCompanyMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>

</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>36
<FILENAME>R6.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.2.0.727</span><table class="report" border="0" cellspacing="2" id="idm140187056269536">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Condensed Consolidated Statements Of Cash Flows (Unaudited) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="2">9 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Jun. 30, 2015</div></th>
<th class="th"><div>Jun. 30, 2014</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract', window );"><strong>Operating Activities</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProfitLoss', window );">Net loss</a></td>
<td class="num">$ (8,737)<span></span>
</td>
<td class="num">$ (10,639)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract', window );"><strong>Adjustments to reconcile net loss to net cash provided by (used in) operating activities:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DepreciationDepletionAndAmortization', window );">Depreciation and amortization</a></td>
<td class="nump">2,488<span></span>
</td>
<td class="nump">1,796<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InventoryWriteDown', window );">Write-down of inventory</a></td>
<td class="nump">31<span></span>
</td>
<td class="nump">199<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInDeferredIncomeTaxes', window );">Deferred income taxes</a></td>
<td class="nump">914<span></span>
</td>
<td class="nump">705<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensation', window );">Non-cash share based compensation expense</a></td>
<td class="nump">864<span></span>
</td>
<td class="nump">603<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProvisionForDoubtfulAccounts', window );">Provision for (reversal of) allowance for doubtful accounts</a></td>
<td class="num">(300)<span></span>
</td>
<td class="nump">1,309<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInOperatingCapitalAbstract', window );"><strong>Changes in operating assets and liabilities:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInRestrictedCashForOperatingActivities', window );">Restricted cash</a></td>
<td class="nump">888<span></span>
</td>
<td class="nump">2,078<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInAccountsReceivable', window );">Accounts receivable</a></td>
<td class="num">(4,193)<span></span>
</td>
<td class="num">(10,798)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInInventories', window );">Inventories</a></td>
<td class="num">(3,460)<span></span>
</td>
<td class="nump">3,700<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable', window );">Income taxes refundable and payable, net</a></td>
<td class="num">(5,561)<span></span>
</td>
<td class="nump">7,648<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets', window );">Prepaid expenses and other assets</a></td>
<td class="nump">639<span></span>
</td>
<td class="nump">958<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInAccountsPayable', window );">Accounts payable</a></td>
<td class="nump">4,514<span></span>
</td>
<td class="nump">1,524<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_IncreaseDecreaseInAccruedLiabilitiesAndCustomerDeposits', window );">Accrued liabilities and customer deposits</a></td>
<td class="nump">695<span></span>
</td>
<td class="num">(12,007)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_IncreaseDecreaseInDeferredProfit', window );">Deferred profit</a></td>
<td class="num">(1,156)<span></span>
</td>
<td class="nump">6,168<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NetCashProvidedByUsedInOperatingActivities', window );">Net cash used in operating activities</a></td>
<td class="num">(12,374)<span></span>
</td>
<td class="num">(6,756)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract', window );"><strong>Investing Activities</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment', window );">Purchases of property, plant and equipment</a></td>
<td class="num">(511)<span></span>
</td>
<td class="num">(214)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CashAcquiredInExcessOfPaymentsToAcquireBusiness', window );">Net cash provided by (used in) investing activities</a></td>
<td class="nump">8,595<span></span>
</td>
<td class="nump">0<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NetCashProvidedByUsedInInvestingActivities', window );">Net cash provided by (used in) investing activities</a></td>
<td class="nump">8,084<span></span>
</td>
<td class="num">(214)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract', window );"><strong>Financing Activities</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProceedsFromIssuanceOfCommonStock', window );">Proceeds from the exercise of stock options</a></td>
<td class="nump">521<span></span>
</td>
<td class="nump">1,136<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RepaymentsOfLongTermDebt', window );">Payments on long-term debt</a></td>
<td class="num">(311)<span></span>
</td>
<td class="nump">0<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProceedsFromIssuanceOfLongTermDebt', window );">Borrowings on long-term debt</a></td>
<td class="nump">557<span></span>
</td>
<td class="nump">0<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ExcessTaxBenefitFromShareBasedCompensationFinancingActivities', window );">Excess tax benefit of stock options</a></td>
<td class="nump">30<span></span>
</td>
<td class="nump">100<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NetCashProvidedByUsedInFinancingActivities', window );">Net cash provided by financing activities</a></td>
<td class="nump">797<span></span>
</td>
<td class="nump">1,236<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EffectOfExchangeRateOnCashAndCashEquivalents', window );">Effect of Exchange Rate Changes on Cash</a></td>
<td class="num">(159)<span></span>
</td>
<td class="nump">175<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CashAndCashEquivalentsPeriodIncreaseDecrease', window );">Net Decrease in Cash and Cash Equivalents</a></td>
<td class="num">(3,652)<span></span>
</td>
<td class="num">(5,559)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CashAndCashEquivalentsAtCarryingValue', window );">Cash and Cash Equivalents, Beginning of Period</a></td>
<td class="nump">27,367<span></span>
</td>
<td class="nump">37,197<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CashAndCashEquivalentsAtCarryingValue', window );">Cash and Cash Equivalents, End of Period</a></td>
<td class="nump">23,715<span></span>
</td>
<td class="nump">31,638<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SupplementalCashFlowInformationAbstract', window );"><strong>Supplemental Cash Flow Information:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProceedsFromIncomeTaxRefunds', window );">Income tax refunds</a></td>
<td class="nump">0<span></span>
</td>
<td class="nump">6,779<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeTaxesPaid', window );">Income tax payments</a></td>
<td class="nump">4,775<span></span>
</td>
<td class="nump">0<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockIssued1', window );">Issuance of common stock for acquisitions</a></td>
<td class="nump">$ 26,625<span></span>
</td>
<td class="nump">$ 0<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_asys_IncreaseDecreaseInAccruedLiabilitiesAndCustomerDeposits">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Increase (Decrease) In Accrued Liabilities And Customer Deposits</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">asys_IncreaseDecreaseInAccruedLiabilitiesAndCustomerDeposits</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>asys_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_asys_IncreaseDecreaseInDeferredProfit">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Increase (Decrease) In Deferred Profit</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">asys_IncreaseDecreaseInDeferredProfit</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>asys_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CashAcquiredInExcessOfPaymentsToAcquireBusiness">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The cash inflow associated with the acquisition of a business when the cash held by the acquired business exceeds the cash payments to acquire the business.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CashAcquiredInExcessOfPaymentsToAcquireBusiness</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CashAndCashEquivalentsAtCarryingValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of currency on hand as well as demand deposits with banks or financial institutions. Includes other kinds of accounts that have the general characteristics of demand deposits. Also includes short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates. Excludes cash and cash equivalents within disposal group and discontinued operation.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Glossary Cash<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6506951<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (a)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=28358313&amp;loc=d3e6676-107765<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 230<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 4<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3044-108585<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Glossary Cash Equivalents<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6507016<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.1)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CashAndCashEquivalentsAtCarryingValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CashAndCashEquivalentsPeriodIncreaseDecrease">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of increase (decrease) in cash and cash equivalents. Cash and cash equivalents are the amount of currency on hand as well as demand deposits with banks or financial institutions. Includes other kinds of accounts that have the general characteristics of demand deposits. Also includes short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates. Includes effect from exchange rate changes.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 230<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 24<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3521-108585<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 830<br><br><br><br> -SubTopic 230<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=49171198&amp;loc=d3e33268-110906<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CashAndCashEquivalentsPeriodIncreaseDecrease</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DepreciationDepletionAndAmortization">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The aggregate expense recognized in the current period that allocates the cost of tangible assets, intangible assets, or depleting assets to periods that benefit from use of the assets.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 230<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 28<br><br><br><br> -Subparagraph (b)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3602-108585<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DepreciationDepletionAndAmortization</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EffectOfExchangeRateOnCashAndCashEquivalents">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of increase (decrease) from the effect of exchange rate changes on cash and cash equivalent balances held in foreign currencies.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 830<br><br><br><br> -SubTopic 230<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=49171198&amp;loc=d3e33268-110906<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EffectOfExchangeRateOnCashAndCashEquivalents</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ExcessTaxBenefitFromShareBasedCompensationFinancingActivities">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of cash inflow from realized tax benefit related to deductible compensation cost reported on the entity's tax return for equity instruments in excess of the compensation cost for those instruments recognized for financial reporting purposes.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 718<br><br><br><br> -SubTopic 20<br><br><br><br> -Section 55<br><br><br><br> -Paragraph 24<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=32706628&amp;loc=d3e11374-113907<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ExcessTaxBenefitFromShareBasedCompensationFinancingActivities</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxesPaid">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The amount of cash paid during the current period to foreign, federal, state, and local authorities as taxes on income.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 230<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 2<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6367179&amp;loc=d3e4297-108586<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 230<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 25<br><br><br><br> -Subparagraph (f)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3536-108585<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxesPaid</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncreaseDecreaseInAccountsPayable">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The increase (decrease) during the reporting period in the aggregate amount of liabilities incurred (and for which invoices have typically been received) and payable to vendors for goods and services received that are used in an entity's business.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 230<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 28<br><br><br><br> -Subparagraph (a)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3602-108585<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncreaseDecreaseInAccountsPayable</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncreaseDecreaseInAccountsReceivable">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The increase (decrease) during the reporting period in amount due within one year (or one business cycle) from customers for the credit sale of goods and services.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 230<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 28<br><br><br><br> -Subparagraph (a)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3602-108585<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncreaseDecreaseInAccountsReceivable</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The increase (decrease) during the period in the amount due for taxes based on the reporting entity's earnings or attributable to the entity's income earning process (business presence) within a given jurisdiction.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 230<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 28<br><br><br><br> -Subparagraph (a)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3602-108585<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncreaseDecreaseInDeferredIncomeTaxes">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The increase (decrease) during the reporting period in the account that represents the temporary difference that results from Income or Loss that is recognized for accounting purposes but not for tax purposes and vice versa.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 230<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 28<br><br><br><br> -Subparagraph (a)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3602-108585<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncreaseDecreaseInDeferredIncomeTaxes</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncreaseDecreaseInInventories">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The increase (decrease) during the reporting period in the aggregate value of all inventory held by the reporting entity, associated with underlying transactions that are classified as operating activities.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 230<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 28<br><br><br><br> -Subparagraph (a)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3602-108585<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncreaseDecreaseInInventories</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncreaseDecreaseInOperatingCapitalAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncreaseDecreaseInOperatingCapitalAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The increase (decrease) during the reporting period in the value of prepaid expenses and other assets not separately disclosed in the statement of cash flows, for example, deferred expenses, intangible assets, or income taxes.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 230<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 28<br><br><br><br> -Subparagraph (a)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3602-108585<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncreaseDecreaseInRestrictedCashForOperatingActivities">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The net cash inflow or outflow for the increase (decrease) associated with funds that are not available for withdrawal or use (such as funds held in escrow) and are associated with underlying transactions that are classified as operating activities. This may include cash restricted for regulatory purposes.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 230<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 28<br><br><br><br> -Subparagraph (a)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3602-108585<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncreaseDecreaseInRestrictedCashForOperatingActivities</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InventoryWriteDown">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Charge to cost of goods sold that represents the reduction of the carrying amount of inventory, generally attributable to obsolescence or market conditions.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 330<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 2<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=28360613&amp;loc=d3e4542-108314<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 225<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (SX 210.5-03.2)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=26872669&amp;loc=d3e20235-122688<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InventoryWriteDown</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetCashProvidedByUsedInFinancingActivities">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of cash inflow (outflow) from financing activities, including discontinued operations. Financing activity cash flows include obtaining resources from owners and providing them with a return on, and a return of, their investment; borrowing money and repaying amounts borrowed, or settling the obligation; and obtaining and paying for other resources obtained from creditors on long-term credit.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 230<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 24<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3521-108585<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 230<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 26<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3574-108585<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NetCashProvidedByUsedInFinancingActivities</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetCashProvidedByUsedInInvestingActivities">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of cash inflow (outflow) from investing activities, including discontinued operations. Investing activity cash flows include making and collecting loans and acquiring and disposing of debt or equity instruments and property, plant, and equipment and other productive assets.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 230<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 24<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3521-108585<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 230<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 26<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3574-108585<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NetCashProvidedByUsedInInvestingActivities</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetCashProvidedByUsedInOperatingActivities">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of cash inflow (outflow) from operating activities, including discontinued operations. Operating activity cash flows include transactions, adjustments, and changes in value not defined as investing or financing activities.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 230<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 24<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3521-108585<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 230<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 28<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3602-108585<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 230<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 25<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3536-108585<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NetCashProvidedByUsedInOperatingActivities</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The cash outflow associated with the acquisition of long-lived, physical assets that are used in the normal conduct of business to produce goods and services and not intended for resale; includes cash outflows to pay for construction of self-constructed assets.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Glossary Investing Activities<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6516133<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 230<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 13<br><br><br><br> -Subparagraph (c)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3213-108585<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PaymentsToAcquirePropertyPlantAndEquipment</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProceedsFromIncomeTaxRefunds">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The amount of cash received during the period as refunds for the overpayment of taxes.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 230<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 25<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3536-108585<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 230<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 2<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6367179&amp;loc=d3e4297-108586<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProceedsFromIncomeTaxRefunds</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProceedsFromIssuanceOfCommonStock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The cash inflow from the additional capital contribution to the entity.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Glossary Financing Activities<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6513228<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 230<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 14<br><br><br><br> -Subparagraph (a)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3255-108585<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProceedsFromIssuanceOfCommonStock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProceedsFromIssuanceOfLongTermDebt">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The cash inflow from a debt initially having maturity due after one year or beyond the operating cycle, if longer.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 230<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 14<br><br><br><br> -Subparagraph (b)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3255-108585<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Glossary Financing Activities<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6513228<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProceedsFromIssuanceOfLongTermDebt</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProfitLoss">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The consolidated profit or loss for the period, net of income taxes, including the portion attributable to the noncontrolling interest.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 810<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 19<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51664549&amp;loc=SL4569616-111683<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 810<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 55<br><br><br><br> -Paragraph 4K<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=35736750&amp;loc=SL4591552-111686<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 810<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1A<br><br><br><br> -Subparagraph (a),(c)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=18733093&amp;loc=SL4573702-111684<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 810<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 55<br><br><br><br> -Paragraph 4J<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=35736750&amp;loc=SL4591551-111686<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProfitLoss</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProvisionForDoubtfulAccounts">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of expense related to write-down of receivables to the amount expected to be collected. Includes, but is not limited to, accounts receivable and notes receivable.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 225<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (SX 210.5-03.5)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=26872669&amp;loc=d3e20235-122688<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 230<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 28<br><br><br><br> -Subparagraph (a)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3602-108585<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProvisionForDoubtfulAccounts</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RepaymentsOfLongTermDebt">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The cash outflow for debt initially having maturity due after one year or beyond the normal operating cycle, if longer.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 230<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 15<br><br><br><br> -Subparagraph (b)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3291-108585<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Glossary Financing Activities<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6513228<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RepaymentsOfLongTermDebt</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensation">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The aggregate amount of noncash, equity-based employee remuneration. This may include the value of stock or unit options, amortization of restricted stock or units, and adjustment for officers' compensation. As noncash, this element is an add back when calculating net cash generated by operating activities using the indirect method.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 230<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 28<br><br><br><br> -Subparagraph (a)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3602-108585<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensation</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockIssued1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The fair value of stock issued in noncash financing activities.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 230<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 5<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6367179&amp;loc=d3e4332-108586<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 230<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 3<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6367179&amp;loc=d3e4304-108586<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 230<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 4<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6367179&amp;loc=d3e4313-108586<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockIssued1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SupplementalCashFlowInformationAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SupplementalCashFlowInformationAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>

</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>37
<FILENAME>R35.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.2.0.727</span><table class="report" border="0" cellspacing="2" id="idm140187051185040">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Basis of Presentation - Shipping Expense (Details) - USD ($)<br></strong></div></th>
<th class="th" colspan="2">3 Months Ended</th>
<th class="th" colspan="2">9 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Jun. 30, 2015</div></th>
<th class="th"><div>Jun. 30, 2014</div></th>
<th class="th"><div>Jun. 30, 2015</div></th>
<th class="th"><div>Jun. 30, 2014</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract', window );"><strong>Organization, Consolidation and Presentation of Financial Statements [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShippingHandlingAndTransportationCosts', window );">Shipping expenses</a></td>
<td class="nump">$ 1,200,000<span></span>
</td>
<td class="nump">$ 200,000<span></span>
</td>
<td class="nump">$ 1.9<span></span>
</td>
<td class="nump">$ 0.7<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShippingHandlingAndTransportationCosts">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Cost incurred during the reporting period in transporting goods and services to customers. Includes freight-out costs.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 235<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 3<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51655414&amp;loc=d3e18780-107790<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 605<br><br><br><br> -SubTopic 45<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 2<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51667946&amp;loc=d3e61069-111654<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Glossary Handling Costs<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51575068<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 605<br><br><br><br> -SubTopic 45<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 20<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51671805&amp;loc=d3e60635-111653<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 235<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51655414&amp;loc=d3e18726-107790<br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 605<br><br><br><br> -SubTopic 45<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6408413&amp;loc=d3e221937-122793<br><br><br><br>Reference 7: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Glossary Shipping Costs<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51575562<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShippingHandlingAndTransportationCosts</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>

</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>38
<FILENAME>R22.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.2.0.727</span><table class="report" border="0" cellspacing="2" id="idm140187056140704">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Major Customers and Foreign Sales (Tables)<br></strong></div></th>
<th class="th" colspan="1">9 Months Ended</th>
</tr>
<tr><th class="th"><div>Jun. 30, 2015</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_MajorCustomersAndForeignSalesAbstract', window );"><strong>Major Customers and Foreign Sales [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfRevenueFromExternalCustomersAttributedToForeignCountriesByGeographicAreaTextBlock', window );">Schedule of Revenue from External Customers Attributed to Foreign Countries by Geographic Area</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Our net revenues were to customers in the following geographic regions:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:98.6328125%;border-collapse:collapse;text-align:left;"><tr><td colspan="6" rowspan="1"></td></tr><tr><td width="66%" rowspan="1" colspan="1"></td><td width="15%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="2%" rowspan="1" colspan="1"></td><td width="15%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="5" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Nine Months Ended June 30,</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2014</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;text-indent:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">United States</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">25</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">27</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;text-indent:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Other</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Total North America</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">27</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">27</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">%</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;height:12px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;height:12px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;height:12px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;height:12px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;text-indent:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">China</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">26</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">14</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;text-indent:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Taiwan</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">15</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">18</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;text-indent:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Other</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">18</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">14</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;padding-left:18px;text-indent:0px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Total Asia</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">59</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">46</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;text-indent:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Germany</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">5</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;text-indent:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Other</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">19</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;padding-left:18px;text-indent:0px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Total Europe</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">14</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">27</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">%</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">100</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">100</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">%</font></div></td></tr></table></div></div></div><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_asys_MajorCustomersAndForeignSalesAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Major Customers and Foreign Sales [Abstract]</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">asys_MajorCustomersAndForeignSalesAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>asys_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfRevenueFromExternalCustomersAttributedToForeignCountriesByGeographicAreaTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of the names of foreign countries from which revenue is material and the amount of revenue from external customers attributed to those countries. An entity may also provide subtotals of geographic information about groups of countries.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 280<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 41<br><br><br><br> -Subparagraph (a)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51669610&amp;loc=d3e9038-108599<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 225<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (SX 210.5-03.1)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=26872669&amp;loc=d3e20235-122688<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfRevenueFromExternalCustomersAttributedToForeignCountriesByGeographicAreaTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>

</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>39
<FILENAME>R36.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.2.0.727</span><table class="report" border="0" cellspacing="2" id="idm140187061426992">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Basis of Presentation - Research and Development Expense (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="2">3 Months Ended</th>
<th class="th" colspan="2">9 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Jun. 30, 2015</div></th>
<th class="th"><div>Jun. 30, 2014</div></th>
<th class="th"><div>Jun. 30, 2015</div></th>
<th class="th"><div>Jun. 30, 2014</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract', window );"><strong>Organization, Consolidation and Presentation of Financial Statements [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ResearchAndDevelopmentExpense', window );">Research, development and engineering</a></td>
<td class="nump">$ 3,650<span></span>
</td>
<td class="nump">$ 3,054<span></span>
</td>
<td class="nump">$ 9,763<span></span>
</td>
<td class="nump">$ 8,442<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ResearchAndDevelopmentArrangementWithFederalGovernmentCustomerFundingToOffsetCostsIncurred', window );">Grants earned</a></td>
<td class="num">(2,342)<span></span>
</td>
<td class="num">(1,655)<span></span>
</td>
<td class="num">(5,869)<span></span>
</td>
<td class="num">(3,999)<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_ResearchAndDevelopmentNetOfGrantsEarned', window );">Net research, development and engineering</a></td>
<td class="nump">$ 1,308<span></span>
</td>
<td class="nump">$ 1,399<span></span>
</td>
<td class="nump">$ 3,894<span></span>
</td>
<td class="nump">$ 4,443<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_asys_ResearchAndDevelopmentNetOfGrantsEarned">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Research And Development, Net Of Grants</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">asys_ResearchAndDevelopmentNetOfGrantsEarned</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>asys_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ResearchAndDevelopmentArrangementWithFederalGovernmentCustomerFundingToOffsetCostsIncurred">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The amount of customer funding recorded as an offset to costs incurred for a fixed-price, best-efforts research and development cost-sharing arrangement with the Federal Government.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 912<br><br><br><br> -SubTopic 730<br><br><br><br> -Section 25<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6472174&amp;loc=d3e58812-109433<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ResearchAndDevelopmentArrangementWithFederalGovernmentCustomerFundingToOffsetCostsIncurred</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ResearchAndDevelopmentExpense">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The aggregate costs incurred (1) in a planned search or critical investigation aimed at discovery of new knowledge with the hope that such knowledge will be useful in developing a new product or service, a new process or technique, or in bringing about a significant improvement to an existing product or process; or (2) to translate research findings or other knowledge into a plan or design for a new product or process or for a significant improvement to an existing product or process whether intended for sale or the entity's use, during the reporting period charged to research and development projects, including the costs of developing computer software up to the point in time of achieving technological feasibility, and costs allocated in accounting for a business combination to in-process projects deemed to have no alternative future use.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 730<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6420194&amp;loc=d3e21568-108373<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 985<br><br><br><br> -SubTopic 20<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6501960&amp;loc=d3e128462-111756<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ResearchAndDevelopmentExpense</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>

</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>40
<FILENAME>R24.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.2.0.727</span><table class="report" border="0" cellspacing="2" id="idm140187068917792">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Acquisition Acquisition (Tables)<br></strong></div></th>
<th class="th" colspan="1">9 Months Ended</th>
</tr>
<tr><th class="th"><div>Jun. 30, 2015</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_BusinessCombinationsAbstract', window );"><strong>Business Combinations [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_BusinessAcquisitionProFormaInformationTextBlock', window );">Business Acquisition, Pro Forma Information</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;padding-top:13px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The following unaudited pro forma data has been prepared by adjusting the Company&#8217;s historical data to give effect to the Merger as if it had occurred on October&#160;1, 2013 and includes adjustments for depreciation expense, amortization of intangibles, and the effect of other purchase accounting adjustments:</font></div><div style="line-height:120%;padding-top:13px;text-align:center;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:99.0234375%;border-collapse:collapse;text-align:left;"><tr><td colspan="16" rowspan="1"></td></tr><tr><td width="44%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="11%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="11%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="2%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="11%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="11%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Quarter Ended</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Nine Months Ended</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">June 30, 2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">June 30, 2014</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">June 30, 2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">June 30, 2014</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="15" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;font-weight:bold;">(dollars in thousands, except per share data)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Revenue, net</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">40,016</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">25,625</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">92,988</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">75,791</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Net loss</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,669</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(4,507</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(11,028</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(19,641</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Earnings per share available to Amtech stockholders:</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Basic</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(0.13</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(0.35</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(0.84</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1.52</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Diluted</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(0.13</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(0.35</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(0.84</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1.52</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr></table></div></div></div><span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_BusinessCombinationScheduleOfConsiderationTransferredTableTextBlock', window );">Business Combination, Schedule Of Consideration Transferred</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;The Merger was an all-stock transaction. The following table summarizes the consideration transferred:</font></div><div style="line-height:120%;padding-top:13px;text-align:center;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:81.640625%;border-collapse:collapse;text-align:left;"><tr><td colspan="4" rowspan="1"></td></tr><tr><td width="76%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="22%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;">(In thousands, except per share amounts)</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#ccecff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">BTU common shares and restricted stock units exchanged</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#ccecff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9,681</font></div></td><td style="vertical-align:bottom;background-color:#ccecff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Exchange ratio</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">0.3291</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#ccecff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Amtech common stock issued for consideration</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#ccecff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">3,186</font></div></td><td style="vertical-align:bottom;background-color:#ccecff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Amtech common stock per share price on January 30, 2015</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8.20</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#ccecff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Consideration for BTU common shares and restricted stock units</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">26,125</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Vested BTU stock options exchanged for Amtech stock options</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">500</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#ccecff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Total fair value of consideration transferred</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">26,625</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr></table></div></div></div><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfRecognizedIdentifiedAssetsAcquiredAndLiabilitiesAssumedTableTextBlock', window );">Schedule of Recognized Identified Assets Acquired and Liabilities Assumed</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;padding-top:13px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The following table summarizes the allocation of the consideration for the assets acquired and liabilities assumed on </font><font style="font-family:inherit;font-size:10pt;">January&#160;30, 2015</font><font style="font-family:inherit;font-size:10pt;">:</font></div><div style="line-height:120%;padding-top:13px;text-align:center;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:81.640625%;border-collapse:collapse;text-align:left;"><tr><td colspan="4" rowspan="1"></td></tr><tr><td width="77%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="21%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;">(In thousands)</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Fair value of net tangible assets acquired</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">20,598</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Goodwill</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4,697</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Identifiable intangible assets</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,330</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Total consideration allocated</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">26,625</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr></table></div></div></div><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_asys_BusinessCombinationScheduleOfConsiderationTransferredTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Business Combination, Schedule Of Consideration Transferred [Table Text Block]</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">asys_BusinessCombinationScheduleOfConsiderationTransferredTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>asys_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_BusinessAcquisitionProFormaInformationTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of pro forma results of operations for a material business acquisition or series of individually immaterial business acquisitions that are material in the aggregate.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 805<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (h)(2)-(3)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=56956515&amp;loc=d3e1392-128463<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_BusinessAcquisitionProFormaInformationTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_BusinessCombinationsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_BusinessCombinationsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfRecognizedIdentifiedAssetsAcquiredAndLiabilitiesAssumedTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of the amounts recognized as of the acquisition date for each major class of assets acquired and liabilities assumed. May include but not limited to the following: (a) acquired receivables; (b) contingencies recognized at the acquisition date; and (c) the fair value of noncontrolling interests in the acquiree.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 805<br><br><br><br> -SubTopic 20<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=56956791&amp;loc=d3e4845-128472<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfRecognizedIdentifiedAssetsAcquiredAndLiabilitiesAssumedTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>

</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>41
<FILENAME>Show.js
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
/**
 * Rivet Software Inc.
 *
 * @copyright Copyright (c) 2006-2011 Rivet Software, Inc. All rights reserved.
 * Version 2.4.0.3
 *
 */

var Show = {};
Show.LastAR = null,

Show.hideAR = function(){
	Show.LastAR.style.display = 'none';
};

Show.showAR = function ( link, id, win ){
	if( Show.LastAR ){
		Show.hideAR();
	}

	var ref = link;
	do {
		ref = ref.nextSibling;
	} while (ref && ref.nodeName != 'TABLE');

	if (!ref || ref.nodeName != 'TABLE') {
		var tmp = win ?
			win.document.getElementById(id) :
			document.getElementById(id);

		if( tmp ){
			ref = tmp.cloneNode(true);
			ref.id = '';
			link.parentNode.appendChild(ref);
		}
	}

	if( ref ){
		ref.style.display = 'block';
		Show.LastAR = ref;
	}
};

Show.toggleNext = function( link ){
	var ref = link;

	do{
		ref = ref.nextSibling;
	}while( ref.nodeName != 'DIV' );

	if( ref.style &&
		ref.style.display &&
		ref.style.display == 'none' ){
		ref.style.display = 'block';

		if( link.textContent ){
			link.textContent = link.textContent.replace( '+', '-' );
		}else{
			link.innerText = link.innerText.replace( '+', '-' );
		}
	}else{
		ref.style.display = 'none';

		if( link.textContent ){
			link.textContent = link.textContent.replace( '-', '+' );
		}else{
			link.innerText = link.innerText.replace( '-', '+' );
		}
	}
};
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>42
<FILENAME>R7.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.2.0.727</span><table class="report" border="0" cellspacing="2" id="idm140187259126032">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Basis of Presentation<br></strong></div></th>
<th class="th" colspan="1">9 Months Ended</th>
</tr>
<tr><th class="th"><div>Jun. 30, 2015</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract', window );"><strong>Organization, Consolidation and Presentation of Financial Statements [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OrganizationConsolidationBasisOfPresentationBusinessDescriptionAndAccountingPoliciesTextBlock', window );">Basis of Presentation</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Basis of Presentation</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Nature of Operations and Basis of Presentation </font><font style="font-family:inherit;font-size:10pt;">-&#160;The Company serves niche markets in industries that are experiencing rapid technological advances and which historically have been very cyclical. Therefore, future profitability and growth depend on the Company&#8217;s ability to develop or acquire and market profitable new products and on its ability to adapt to cyclical trends.&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The accompanying unaudited condensed consolidated financial statements have been prepared pursuant to the rules and regulations of the Securities and Exchange Commission (the &#8220;SEC&#8221;), and consequently do not include all disclosures normally required by accounting principles generally accepted in the United States of America. In the opinion of management, the accompanying unaudited interim condensed consolidated financial statements contain all adjustments necessary, all of which are of a normal and recurring nature, to present fairly our financial position, results of operations and cash flows. Certain information and note disclosures normally included in financial statements have been condensed or omitted pursuant to the rules and regulations of the SEC. These condensed consolidated financial statements should be read in conjunction with the audited consolidated financial statements and notes thereto included in our Annual Report on Form 10-K for the fiscal year ended September&#160;30, 2014.</font></div><div style="line-height:120%;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The consolidated results of operations for the three and nine months ended June&#160;30, 2015, are not necessarily indicative of the results to be expected for the full fiscal year.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Principles of Consolidation &#8211;</font><font style="font-family:inherit;font-size:10pt;"> The consolidated financial statements include the accounts of the Company and its wholly-owned subsidiaries and subsidiaries in which it has a controlling interest. The Company reports noncontrolling interests in consolidated entities as a component of equity separate from the Company&#8217;s equity. All material intercompany accounts and transactions have been eliminated in consolidation.&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Use of Estimates</font><font style="font-family:inherit;font-size:10pt;"> - The preparation of consolidated financial statements in conformity with accounting principles generally accepted in the United States of America requires management to make estimates and assumptions that affect the reported amounts of assets and liabilities and disclosure of contingent assets and liabilities at the date of the consolidated financial statements and the reported amounts of revenue and expenses during the reporting period. Actual results could differ from those estimates.<br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Revenue Recognition</font><font style="font-family:inherit;font-size:10pt;"> - We review product and service sales contracts with multiple deliverables to determine if separate units of accounting are present. Where separate units of accounting exist, revenue allocated to delivered items is the lower of the relative selling price of the delivered items in the sales arrangement or the portion of the selling price that is not contingent upon performance of the service. </font></div><div style="line-height:120%;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">We recognize revenue when persuasive evidence of an arrangement exists; the product has been delivered and title has transferred, or services have been rendered; and the seller&#8217;s price to the buyer is fixed or determinable and collectability is reasonably assured. For us, this policy generally results in revenue recognition at the following points:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;" rowspan="1" colspan="1"></td><td rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:top" rowspan="1" colspan="1"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">1.</font></div></td><td style="vertical-align:top;" rowspan="1" colspan="1"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">For our equipment business, transactions where legal title passes to the customer upon shipment, we recognize revenue upon shipment for those products where the customer&#8217;s defined specifications have been met with at least two similarly configured systems and processes for a comparably situated customer. Our selling prices may include both equipment and services, i.e., installation and start-up services performed by our service technicians. The equipment and services are multiple deliverables. Certain equipment that has a positive track record of successful installation and customer acceptance are considered to be routine systems.  Our recognition of revenue upon delivery of such equipment that has been routinely installed and accepted is equal to the total selling price minus the relative selling price of the undelivered services.  </font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Where the installation and acceptance of more than two similarly configured equipment has not become routine, recognition of revenue upon delivery of equipment is limited to the lesser of (i) the total selling price minus the relative selling price of the undelivered services or (ii) the non-contingent amount. Since we defer only those costs directly related to installation, or other unit of accounting not yet delivered, and the portion of the contract price is often considerably greater than the relative selling price of those items, our policy at times will result in deferral of profit that is disproportionate in relation to the deferred revenue. When this is the case, the gross margin recognized in one period will be lower and the gross margin reported in a subsequent period will improve.</font></div><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;" rowspan="1" colspan="1"></td><td rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:top" rowspan="1" colspan="1"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">2.</font></div></td><td style="vertical-align:top;" rowspan="1" colspan="1"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">For products where the customer&#8217;s defined specifications have not been met with at least two similarly configured systems and processes, the revenue and directly related costs are deferred at the time of shipment and later recognized at the time of customer acceptance or when this criterion has been met. We have, on occasion, experienced longer than expected delays in receiving cash from certain customers pending final installation or system acceptance. If some of our customers refuse to pay the final payment, or otherwise delay final acceptance or installation, the deferred revenue would not be recognized, adversely affecting our future cash flows and operating results.</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;" rowspan="1" colspan="1"></td><td rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:top" rowspan="1" colspan="1"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">3.</font></div></td><td style="vertical-align:top;" rowspan="1" colspan="1"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Sales of certain equipment, spare parts and consumables are recognized upon shipment, as there are no post shipment obligations other than standard warranties.</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;" rowspan="1" colspan="1"></td><td rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:top" rowspan="1" colspan="1"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">4.</font></div></td><td style="vertical-align:top;" rowspan="1" colspan="1"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Service revenue is recognized upon performance of the services requested by the customer. Revenue related to service contracts is recognized ratably over the period of the contract or in accordance with the terms of the contract, which generally coincides with the performance of the services requested by the customer.</font></div></td></tr></table><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Deferred Profit</font><font style="font-family:inherit;font-size:10pt;"> &#8211; Revenue deferred pursuant to the Company&#8217;s revenue recognition policy, net of the related deferred costs, if any, is recorded as deferred profit in current liabilities. The components of deferred profit are as follows:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="8" rowspan="1"></td></tr><tr><td width="71%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="12%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="12%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">June&#160;30, <br clear="none"/>2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">September&#160;30, <br clear="none"/>2014</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Deferred revenues</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">7,536</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8,118</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Deferred costs</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,416</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,210</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Deferred profit</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5,120</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">6,908</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr></table></div><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Concentrations of Credit Risk &#8211;</font><font style="font-family:inherit;font-size:10pt;"> Financial instruments that potentially subject the Company to significant concentrations of credit risk consist principally of trade accounts receivable and cash. The Company&#8217;s customers, located throughout the world, consist of manufacturers of solar cells, semiconductors, semiconductor wafers, light-emitting diodes (LEDs) and micro-electro-mechanical systems (MEMS). Credit risk is managed by performing ongoing credit evaluations of the customers&#8217; financial condition, by requiring significant deposits where appropriate, and by actively monitoring collections. Letters of credit are required of certain customers depending on the size of the order, type of customer or its creditworthiness, and its country of domicile. Reserves for potentially uncollectible receivables are maintained based on an assessment of collectability.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The Company maintains its cash, cash equivalents and restricted cash in multiple financial institutions. Balances in the United States (approximately </font><font style="font-family:inherit;font-size:10pt;">60%</font><font style="font-family:inherit;font-size:10pt;"> of total cash balances) are primarily invested in U.S. Treasuries or are in financial institutions insured by the Federal Deposit Insurance Corporation (FDIC). The remainder of the Company&#8217;s cash is maintained in banks in The Netherlands, France, China, and other foreign jurisdictions that are uninsured.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">As of </font><font style="font-family:inherit;font-size:10pt;">June&#160;30, 2015</font><font style="font-family:inherit;font-size:10pt;">, </font><font style="font-family:inherit;font-size:10pt;">one</font><font style="font-family:inherit;font-size:10pt;"> customer accounted for </font><font style="font-family:inherit;font-size:10pt;">12%</font><font style="font-family:inherit;font-size:10pt;"> of accounts receivable.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Restricted Cash</font><font style="font-family:inherit;font-size:10pt;"> &#8211; Restricted cash is </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">$1.6 million</font><font style="font-family:inherit;font-size:10pt;"> and </font><font style="font-family:Times New Roman;font-size:10pt;color:#000000;font-style:normal;font-weight:normal;text-decoration:none;">$2.4 million</font><font style="font-family:inherit;font-size:10pt;"> as of </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">June&#160;30, 2015</font><font style="font-family:inherit;font-size:10pt;">, and </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">September&#160;30, 2014</font><font style="font-family:inherit;font-size:10pt;">, respectively. The balance includes collateral for bank guarantees required by certain customers from whom deposits have been received in advance of shipment and cash received from research and development grants related to our ion implant technology to be used for research and development projects.  </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"> </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Accounts Receivable - Unbilled and Other</font><font style="font-family:inherit;font-size:10pt;"> &#8211; Unbilled and other accounts receivable consist mainly of the contingent portion of the sales price that is not collectible until successful installation of the product. These amounts are generally billed upon final customer acceptance. For the majority of these amounts, a liability has been accrued in deferred profit. </font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Inventories</font><font style="font-family:inherit;font-size:10pt;"> &#8211; Inventories are stated at the lower of cost or net realizable value. Approximately </font><font style="font-family:inherit;font-size:10pt;">50%</font><font style="font-family:inherit;font-size:10pt;"> and </font><font style="font-family:inherit;font-size:10pt;">70%</font><font style="font-family:inherit;font-size:10pt;"> of inventory is valued on an average cost basis with the remainder determined on a first-in, first-out (FIFO) basis at June 30, 2015, and September 30, 2014, respectively. The components of inventories are as follows:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="8" rowspan="1"></td></tr><tr><td width="71%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="12%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="12%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">June&#160;30, <br clear="none"/>2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">September&#160;30, <br clear="none"/>2014</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Purchased parts and raw materials</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">13,129</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8,797</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Work-in-process</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">6,248</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4,809</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Finished goods</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">10,059</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">3,154</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">29,436</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">16,760</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr></table></div><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Property, Plant and Equipment</font><font style="font-family:inherit;font-size:10pt;"> &#8211; Property, plant and equipment are recorded at cost. Maintenance and repairs are charged to expense as incurred. The cost of property retired or sold and the related accumulated depreciation are removed from the applicable accounts when disposition occurs and any gain or loss is recognized. Depreciation is computed using the straight-line method. Useful lives for equipment, machinery and leasehold improvements range from three to seven years; for furniture and fixtures from five to ten years; and for buildings </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">20-25</font><font style="font-family:inherit;font-size:10pt;"> years.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The following is a summary of property, plant and equipment:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="8" rowspan="1"></td></tr><tr><td width="71%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="12%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="12%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">June&#160;30, <br clear="none"/>2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">September&#160;30, <br clear="none"/>2014</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Land, building and leasehold improvements</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">18,137</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">10,414</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Equipment and machinery</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">11,704</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8,189</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Furniture and fixtures</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5,418</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5,453</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">35,259</font></div></td><td style="vertical-align:bottom;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">24,056</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Accumulated depreciation</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(15,217</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(14,304</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">20,042</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9,752</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr></table></div><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Goodwill -</font><font style="font-family:inherit;font-size:10pt;"> Goodwill is not subject to amortization and is reviewed for impairment on an annual basis, typically at the end of the fiscal year, or more frequently if circumstances dictate.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The following is a summary of activity in goodwill:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:87.109375%;border-collapse:collapse;text-align:left;"><tr><td colspan="16" rowspan="1"></td></tr><tr><td width="44%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="11%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="11%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="11%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="12%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Solar</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Semiconductor</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Polishing</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Total</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="15" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;padding-left:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;&#160;&#160;Goodwill</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">12,315</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">728</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">13,043</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;padding-left:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;&#160;&#160;Accumulated impairment losses</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(4,720</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(4,720</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Carrying value at September 30, 2014</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">7,595</font></div></td><td style="vertical-align:bottom;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">728</font></div></td><td style="vertical-align:bottom;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8,323</font></div></td><td style="vertical-align:bottom;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Goodwill recognized due to acquisitions</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,324</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4,697</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">7,021</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Net exchange differences</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(301</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(301</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Carrying value at June 30, 2015</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9,618</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4,697</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">728</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">15,043</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;padding-left:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;&#160;&#160;Goodwill</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">14,155</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4,697</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">728</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">19,580</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;&#160;&#160;Accumulated impairment losses</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(4,537</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(4,537</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Carrying value at June 30, 2015</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9,618</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4,697</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">728</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">15,043</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr></table></div><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Intangibles</font><font style="font-family:inherit;font-size:10pt;"> &#8211; Intangible assets are capitalized and amortized over their useful life if the life is determinable. If the life is not determinable, amortization is not recorded.  On December 24, 2014, the Company acquired a </font><font style="font-family:inherit;font-size:10pt;">51%</font><font style="font-family:inherit;font-size:10pt;"> controlling interest in SoLayTec,</font><font style="font-family:inherit;font-size:10pt;"> </font><font style="font-family:inherit;font-size:10pt;">B.V. (&#8220;SoLayTec&#8221;). The intangible assets of SoLayTec total </font><font style="font-family:inherit;font-size:10pt;">$2.2</font><font style="font-family:inherit;font-size:10pt;"> million and are included in "Other" in the table below. The fair value of the intangible assets, the allocation and the amortization period are still being evaluated by the Company.  On January 30, 2015, the Company completed the merger with BTU International, Inc. ("BTU"). The intangible assets of BTU total </font><font style="font-family:inherit;font-size:10pt;">$1.3</font><font style="font-family:inherit;font-size:10pt;"> million, and are included in "Trade Names" in the table below.  See Note 10, &#8220;Acquisitions,&#8221; for more information regarding the acquisition of SoLayTec and the merger with BTU.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The following is a summary of intangibles:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:98.4375%;border-collapse:collapse;text-align:left;"><tr><td colspan="22" rowspan="1"></td></tr><tr><td width="20%" rowspan="1" colspan="1"></td><td width="13%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="8%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="9%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="8%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="4%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="8%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="9%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="8%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">Useful Life</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Gross Carrying Amount</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Accumulated Amortization</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Net Carrying Amount</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Gross Carrying Amount</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Accumulated Amortization</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Net Carrying Amount</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="9" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">June 30, 2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="9" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">September 30, 2014</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="19" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Non-compete agreements</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4-8 years</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,035</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,035</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,055</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(955</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">100</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Customer lists</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">10 years</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">714</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(595</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">119</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">817</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(592</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">225</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Technology</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5-10 years</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,116</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,805</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">311</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,319</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,682</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">637</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In-process research and development</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5 years</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,600</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(267</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,333</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,600</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(27</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,573</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Trade names</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">15 years</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,330</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(37</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,293</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Other</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2-12 years</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,484</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(353</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,131</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">321</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(178</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">143</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9,279</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(4,092</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5,187</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">6,112</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(3,434</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,678</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Long-lived assets -  </font><font style="font-family:inherit;font-size:10pt;">Long-lived assets are reviewed for impairment when events or changes in circumstances indicate that the carrying amount of an asset may not be recoverable.    </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Warranty &#8211;</font><font style="font-family:inherit;font-size:10pt;"> A limited warranty is provided free of charge, generally for periods of </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">12</font><font style="font-family:inherit;font-size:10pt;"> to </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">24</font><font style="font-family:inherit;font-size:10pt;"> months, for all purchases of the Company&#8217;s new products and systems. Accruals are recorded for estimated warranty costs at the time revenue is recognized. </font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The following is a summary of activity in accrued warranty expense:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="8" rowspan="1"></td></tr><tr><td width="67%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="14%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="14%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Nine Months Ended June 30,</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2014</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Beginning balance</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">628</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,454</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Warranty expenditures</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(530</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(663</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Warranty provisions/(adjustment)</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">925</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(25</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Ending balance</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,023</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">766</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr></table></div><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Stock-Based Compensation -</font><font style="font-family:inherit;font-size:10pt;"> The Company measures compensation costs relating to share-based payment transactions based upon the grant date fair value of the award. Those costs are recognized as expense over the requisite service period, which is generally the vesting period. The benefits of tax deductions in excess of recognized compensation cost are credited to additional paid-in capital and reported as cash flow from financing activities rather than as cash flow from operating activities. </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Stock-based compensation expense reduced the Company&#8217;s results of operations by the following amounts:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="16" rowspan="1"></td></tr><tr><td width="59%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="8%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="8%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="7%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="7%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Three Months Ended June 30,</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Nine Months Ended June 30,</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2014</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2014</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="15" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Effect on income before income taxes (1)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(296</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(230</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(864</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(603</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Effect on income taxes</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">40</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">36</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">134</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">196</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Effect on net income</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(256</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(194</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(730</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(407</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;" rowspan="1" colspan="1"></td><td rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:top" rowspan="1" colspan="1"><div style="line-height:120%;font-size:8pt;padding-left:24px;"><font style="font-family:inherit;font-size:8pt;">(1)</font></div></td><td style="vertical-align:top;" rowspan="1" colspan="1"><div style="line-height:120%;text-align:justify;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">Stock-based compensation expense is included in selling, general and administrative expenses.</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Stock options issued under the terms of the plans have, or will have, an exercise price equal to the fair market value of the common stock at the close of trading on the Nasdaq the day prior to the date of the option grant and expire no later than </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">10 years</font><font style="font-family:inherit;font-size:10pt;"> from the date of grant, with the most recent grant expiring in 2025. Options issued by the Company vest over </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">2</font><font style="font-family:inherit;font-size:10pt;"> to </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">4</font><font style="font-family:inherit;font-size:10pt;"> years.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Stock option transactions and the options outstanding are summarized as follows:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="16" rowspan="1"></td></tr><tr><td width="49%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="10%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="10%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="10%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="10%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="15" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Nine Months Ended June 30,</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2014</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Options</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Weighted</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Average</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Exercise</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Price</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Options</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Weighted</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Average</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Exercise</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Price</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Outstanding at beginning of period</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,063,324</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">7.37</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,059,417</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">6.71</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Granted</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">327,500</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9.74</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">272,906</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">7.01</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Assumed - merger</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">367,229</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">14.19</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Exercised</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(94,454</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5.51</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(263,358</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4.31</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Forfeited</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(26,571</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">29.48</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(4,546</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8.71</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Outstanding at end of period</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,637,028</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9.12</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,064,419</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">7.37</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Exercisable at end of period</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,005,690</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9.75</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">663,220</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8.14</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Weighted average fair value of options </font></div><div style="font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">granted during the period</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5.91</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4.38</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr></table></div><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The fair value of options was estimated at the grant date using the Black-Scholes option pricing model with the following assumptions:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="4" rowspan="1"></td></tr><tr><td width="67%" rowspan="1" colspan="1"></td><td width="16%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="16%" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Nine Months Ended June 30,</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2014</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Risk free interest rate</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Expected life</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">6 years</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">6 years</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Dividend rate</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">0%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">0%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Volatility</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">67%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">69%</font></div></td></tr></table></div><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">To estimate expected lives for this valuation, it was assumed that options will be exercised at varying schedules after becoming fully vested. Forfeitures have been estimated at the time of grant and will be revised, if necessary, in subsequent periods if actual forfeitures differ from those estimates. Forfeitures were estimated based upon historical experience. Fair value computations are highly sensitive to the volatility factor assumed; the greater the volatility, the higher the computed fair value of the options granted. The Company uses historical stock prices to determine the volatility factor.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The Company awards restricted shares under the existing share-based compensation plans. The Company's restricted share awards vest in equal annual installments over a two- to four-year period. The total value of these awards is expensed on a ratable basis over the service period of the employees receiving the grants. The &#8220;service period&#8221; is the time during which the employees receiving grants must remain employees for the shares granted to fully vest.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Restricted stock transactions and awards outstanding are summarized as follows:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="14" rowspan="1"></td></tr><tr><td width="49%" rowspan="1" colspan="1"></td><td width="11%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="10%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="11%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="10%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="13" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Nine Months Ended June 30,</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="6" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="6" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2014</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Awards</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Weighted</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Average</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Grant Date</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Fair Value</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Awards</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Weighted</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Average</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Grant Date</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Fair Value</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Beginning Outstanding</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">35,203</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">10.13</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">69,154</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">10.13</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Released</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(21,663</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">11.47</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(30,828</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">10.08</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Ending Outstanding</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">13,540</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">7.98</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">38,326</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">10.17</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr></table></div><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Fair Value of Financial Instruments </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;padding-top:6px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In accordance with the requirements of the Fair Value Measurements and Disclosures Topic of the Financial Accounting Standards Board ("FASB") Accounting Standards Codification ("ASC"), the Company groups its financial assets and liabilities measured at fair value on a recurring basis in three levels, based on the markets in which the assets and liabilities are traded and the reliability of the assumptions used to determine fair value. These levels are: </font></div><div style="line-height:120%;padding-top:6px;text-align:justify;text-indent:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Level 1 - Valuation is based upon quoted market price for identical instruments traded in active markets.</font></div><div style="line-height:120%;padding-top:6px;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Level 2 - Valuation is based on quoted market prices for similar instruments in active markets, quoted prices for identical or similar instruments in markets that are not active, and model-based valuation techniques for which all significant assumptions are observable in the market.</font></div><div style="line-height:120%;padding-top:6px;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Level 3 - Valuation is generated from model-based techniques that use significant assumptions not observable in the market. Valuation techniques include use of discounted cash flow models and similar techniques.</font></div><div style="line-height:120%;text-align:justify;font-size:4pt;"><font style="font-family:inherit;font-size:4pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In accordance with the requirements of the Fair Value Measurements and Disclosures Topic of the FASB ASC, it is the Company's policy to use observable inputs whenever reasonably practicable in order to minimize the use of unobservable inputs when developing fair value measurements. When available, the Company uses quoted market prices to measure fair value. If market prices are not available, the fair value measurement is based on models that use primarily market based parameters including interest rate yield curves, option volatilities and currency rates. In certain cases, where market rate assumptions are not available, the Company is required to make judgments about assumptions market participants would use to estimate the fair value of a financial instrument. Changes in the underlying assumptions used, including discount rates and estimates of future cash flows, could significantly affect the results of current or future values. </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;">Cash, Cash Equivalents and Restricted Cash -</font><font style="font-family:inherit;font-size:10pt;"> Included in Cash and Cash Equivalents in the Condensed Consolidated Balance Sheets is </font><font style="font-family:inherit;font-size:10pt;">$9.6 million</font><font style="font-family:inherit;font-size:10pt;"> and </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">$17.0 million</font><font style="font-family:inherit;font-size:10pt;"> as of </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">June&#160;30, 2015</font><font style="font-family:inherit;font-size:10pt;"> and </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">September&#160;30, 2014</font><font style="font-family:inherit;font-size:10pt;">, respectively, of money market funds invested in treasury bills, notes and other direct obligations of the U.S. Treasury.  The fair value of this cash equivalent is based on Level 1 inputs in the fair value hierarchy.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;">Receivables and Payables - </font><font style="font-family:inherit;font-size:10pt;">The recorded amounts of these financial instruments, including accounts receivable and accounts payable, approximate their fair value because of the short maturities of these instruments.  If measured at fair value in the financial statements, these financial instruments would be classified as Level 3 in the fair value hierarchy.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;">Debt - </font><font style="font-family:inherit;font-size:10pt;">The recorded amounts of these financial instruments, including long-term debt and current maturities of long-term debt, approximate fair value and are considered Level 2 in the fair value hierarchy.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Pensions </font><font style="font-family:inherit;font-size:10pt;">- The Company has retirement plans covering substantially all employees. The principal plans are the multiemployer defined benefit pension plans of the Company&#8217;s operations in The Netherlands and France and the plan for hourly union employees in Pennsylvania. The multiemployer plans in the United States and France are insignificant to the Company's results of operations and financial condition.  The Company's defined contribution plans cover substantially all of the employees in the United States. The Company matches employee funds on a discretionary basis.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Shipping expense</font><font style="font-family:inherit;font-size:10pt;"> &#8211; Shipping expenses of </font><font style="font-family:inherit;font-size:10pt;">$1.2 million</font><font style="font-family:inherit;font-size:10pt;"> and </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">$0.2 million</font><font style="font-family:inherit;font-size:10pt;"> for the three months ended </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">June&#160;30, 2015</font><font style="font-family:inherit;font-size:10pt;"> and </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">2014</font><font style="font-family:inherit;font-size:10pt;">, respectively, are included in selling, general and administrative expenses.  Shipping expenses of </font><font style="font-family:inherit;font-size:10pt;">$1.9</font><font style="font-family:inherit;font-size:10pt;"> million and </font><font style="font-family:inherit;font-size:10pt;">$0.7</font><font style="font-family:inherit;font-size:10pt;"> million for the nine months ended </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">June&#160;30, 2015</font><font style="font-family:inherit;font-size:10pt;"> and </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">2014</font><font style="font-family:inherit;font-size:10pt;">, respectively, are included in selling, general and administrative expenses.    </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Research, development and engineering expense</font><font style="font-family:inherit;font-size:10pt;"> &#8211; Research, development and engineering expenses consist of the cost of employees, consultants and contractors who design, engineer and develop new products and processes; materials and supplies used in those activities; and product prototyping. The Company receives reimbursements through governmental research and development grants which are netted against these expenses when certain conditions have been met. The table below shows gross research and development expenses and grants earned:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:99.0234375%;border-collapse:collapse;text-align:left;"><tr><td colspan="16" rowspan="1"></td></tr><tr><td width="41%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="12%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="12%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="12%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="12%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Three Months Ended</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Nine Months Ended</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">June&#160;30, <br clear="none"/>2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">June&#160;30, <br clear="none"/>2014</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">June&#160;30, <br clear="none"/>2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">June&#160;30, <br clear="none"/>2014</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">(dollars in thousands)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Research, development and engineering</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">3,650</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">3,054</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9,763</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8,442</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Grants earned</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(2,342</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,655</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(5,869</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(3,999</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Net research, development and engineering</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,308</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,399</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">3,894</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4,443</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr></table></div><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Segments -</font><font style="font-family:inherit;font-size:10pt;"> Effective for the second quarter of fiscal 2015, following the Company's merger with BTU, the Company changed the way it reports its segment information.  Previously reported information has been recast to reflect the current reportable segments. The Company now reports its financial results in three segments:  solar, semiconductor and polishing. See Note 5: "Business Segment Information" for additional information on the Company's reportable segments. See also Note 10: "Acquisitions" for additional information with respect to the Company's recent acquisitions.  </font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Impact of Recently Issued Accounting Pronouncements&#160;</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In July 2015, the FASB issued Accounting Standards Update ("ASU") No.&#160;2015-11, Simplifying the Measurement of Inventory. This ASU simplifies the measurement of inventory by requiring certain inventory to be measured at the lower of cost or net realizable value. The amendments in this ASU are effective for fiscal years beginning after December 15, 2016 and for interim periods therein. We do not expect adoption of this ASU to have a material impact on our consolidated financial position and results of operations.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In June 2015, the FASB issued ASU 2015-10, Technical Corrections&#160;and Improvements&#160;, which clarifies various topics in the FASB Accounting Standards Codification. ASU 2015-10 is effective for the interim and annual periods ending after December 15, 2015. Early adoption is permitted. We are currently assessing the impact of this ASU, but do not expect it to have a material impact on our consolidated financial position and results of operations.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In May&#160;2015, the FASB issued ASU 2015-08,&#160;Business Combinations (Topic 805):&#160;Pushdown&#160;Accounting - Amendments to SEC Paragraphs Pursuant to Staff Accounting Bulletin No.&#160;115, or ASU 2015-08.  The amendments in ASU 2015-08 amend various SEC paragraphs included in the FASB&#8217;s Accounting Standards Codification to reflect the issuance of Staff Accounting Bulletin No.&#160;115, or SAB 115. SAB 115 rescinds portions of the interpretive guidance included in the SEC&#8217;s Staff Accounting Bulletins series and brings existing guidance into conformity with ASU No.&#160;2014-17,&#160;Business Combinations (Topic 805):&#160;Pushdown&#160;Accounting, which provides an acquired entity with an option to apply&#160;pushdown&#160;accounting in its separate financial statements upon occurrence of an event in which an acquirer obtains control of the acquired entity. We have adopted the amendments in ASU 2015-08, effective May&#160;8, 2015, as the amendments in the update are effective upon issuance. The adoption did not have a material impact on our consolidated financial position and results of operation.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In April 2015, the FASB issued ASU No.&#160;&#160;2015-05,&#160;Intangibles-Goodwill and Other-Internal-Use Software (Subtopic 350-40). This ASU provides guidance that will help entities evaluate the accounting for fees paid by a customer in a cloud computing arrangement, including whether a cloud computing arrangement includes a software license. If a cloud computing arrangement includes a software license, then this ASU requires the customer to account for the software license consistent with the acquisition of other software licenses; otherwise, the customer should account for the arrangement as a service contract. The ASU is effective for fiscal years, and interim periods within those fiscal years, beginning after December&#160;15, 2015. Entities can elect to adopt the amendments either prospectively to all arrangements entered into after the effective date or retrospectively to all prior periods. We are currently assessing the impact of this ASU.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In April 2015, the FASB issued ASU No. 2015-3, Interest-Imputation of Interest (Subtopic 835-30).  This ASU requires debt issuance costs related to a recognized debt liability be presented in the balance sheet as a direct deduction from the carrying amount of the related debt liability instead of being presented as an asset.&#160;The ASU requires retrospective application and represents a change in accounting principle. The ASU is effective for fiscal years beginning after December&#160;15, 2015. Early adoption is permitted for financial statements that have not been previously issued. We are currently assessing the impact of this ASU.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In January 2015, the FASB issued ASU No. 2015-1, Income Statement - Extraordinary and Unusual Items (Subtopic 225-20).  The FASB is issuing this ASU as part of its initiative to reduce costs and complexity in accounting standards, known as its Simplification Initiative.  This ASU eliminates from generally accepted accounting principles in the United States (" GAAP") the concept of extraordinary items in an effort to save time and reduce costs, while alleviating uncertainty and maintaining accurate and fulsome disclosure.  The amendments in this ASU are effective for fiscal years, and interim periods within those fiscal years, beginning after December 15, 2015.  We are currently assessing the impact of this ASU but do not expect it to have a material impact on our consolidated financial position and results of operations.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In June 2014, the FASB issued ASU No. 2014-12 which provides guidance on how to account for share-based payment awards where the terms of the award provide that a performance target that affects vesting could be achieved after the requisite service period. This ASU requires that a performance target that affects vesting and that could be achieved after the requisite service period be treated as a performance condition. ASU 2014-12 is effective for annual periods, and interim periods within those annual periods, beginning after December 15, 2015, and early adoption is permitted. We are currently assessing the impact of this ASU but do not expect it to have a material impact on our consolidated financial position and results of operations.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In May 2014, the FASB issued ASU No. 2014-09, Revenue from Contracts with Customers, which supersedes most of the current revenue recognition requirements. The core principle of the new guidance is that an entity should recognize revenue to depict the transfer of promised goods or services to customers in an amount that reflects the consideration to which the entity expects to be entitled in exchange for these goods or services. New disclosures about the nature, amount, timing and uncertainty of revenue and cash flows arising from contracts with customers are also required. This guidance is effective for the Company in the first quarter of fiscal year 2018 and early application is not permitted. Entities must adopt the new guidance using one of two retrospective application methods. The Company is currently evaluating the standard and the impact on our financial position and results of operations.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In April 2014, the FASB issued ASU No. 2014-08 Presentation of Financial Statements (Topic 205) and Property, Plant and Equipment (Topic 360).  The amendments in this ASU change the requirements for reporting discontinued operations in Subtopic 205-20. A discontinued operation may include a component of an entity or a group of components of an entity, or a business or nonprofit activity.  Under current U.S. GAAP, many disposals, some of which may be routine in nature and not a change in an entity's strategy, are reported in discontinued operations.  The amendments in this ASU improve the definition of discontinued operations by limiting discontinued operations reporting to disposals of components of an entity that represent strategic shifts that have (or will have) a major effect on an entity's operations and financial results. The amendments in this ASU require expanded disclosures for discontinued operations. The FASB concluded that those disclosures should provide users of financial statements with more information about the assets, liabilities, revenues, and expenses of discontinued operations.  The amendments in this ASU also require an entity to disclose the pretax profit or loss of an individually significant component of an entity that does not qualify for discontinued operations reporting.   The amendments in this ASU are effective for fiscal years, and interim periods within those years, beginning after December 15, 2014. The Company will evaluate the impact of this ASU as future transactions occur.</font></div></div><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OrganizationConsolidationBasisOfPresentationBusinessDescriptionAndAccountingPoliciesTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for the general note to the financial statements for the reporting entity which may include, descriptions of the basis of presentation, business description, significant accounting policies, consolidations, reclassifications, new pronouncements not yet adopted and changes in accounting principles.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OrganizationConsolidationBasisOfPresentationBusinessDescriptionAndAccountingPoliciesTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>

</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>43
<FILENAME>R3.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.2.0.727</span><table class="report" border="0" cellspacing="2" id="idm140187066576624">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Condensed Consolidated Balance Sheets (Parenthetical) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th"><div>Jun. 30, 2015</div></th>
<th class="th"><div>Sep. 30, 2014</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AssetsCurrentAbstract', window );"><strong>Current Assets</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent', window );">Allowance for doubtful accounts</a></td>
<td class="nump">$ 3,440<span></span>
</td>
<td class="nump">$ 2,846<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract', window );"><strong>Stockholders' Equity</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CommonStockParOrStatedValuePerShare', window );">Common stock, par value</a></td>
<td class="nump">$ 0.01<span></span>
</td>
<td class="nump">$ 0.01<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CommonStockSharesAuthorized', window );">Common stock, shares authorized</a></td>
<td class="nump">100,000,000<span></span>
</td>
<td class="nump">100,000,000<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CommonStockSharesIssued', window );">Common stock, shares issued</a></td>
<td class="nump">13,150,222<span></span>
</td>
<td class="nump">9,848,253<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CommonStockSharesOutstanding', window );">Common stock, shares outstanding</a></td>
<td class="nump">13,150,222<span></span>
</td>
<td class="nump">9,848,253<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PreferredStockSharesAuthorized', window );">Preferred stock, shares authorized</a></td>
<td class="nump">100,000,000<span></span>
</td>
<td class="nump">100,000,000<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PreferredStockSharesIssued', window );">Preferred stock, shares issued</a></td>
<td class="nump">0<span></span>
</td>
<td class="nump">0<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>A valuation allowance for trade and other receivables due to an Entity within one year (or the normal operating cycle, whichever is longer) that are expected to be uncollectible.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.4)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 310<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 4<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=49124121&amp;loc=d3e5074-111524<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AssetsCurrentAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AssetsCurrentAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CommonStockParOrStatedValuePerShare">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Face amount or stated value per share of common stock.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.29)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 02<br><br><br><br> -Paragraph 30<br><br><br><br> -Article 5<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CommonStockParOrStatedValuePerShare</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CommonStockSharesAuthorized">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The maximum number of common shares permitted to be issued by an entity's charter and bylaws.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.29)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 02<br><br><br><br> -Paragraph 30<br><br><br><br> -Article 5<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CommonStockSharesAuthorized</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CommonStockSharesIssued">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Total number of common shares of an entity that have been sold or granted to shareholders (includes common shares that were issued, repurchased and remain in the treasury). These shares represent capital invested by the firm's shareholders and owners, and may be all or only a portion of the number of shares authorized. Shares issued include shares outstanding and shares held in the treasury.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.29)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 02<br><br><br><br> -Paragraph 30<br><br><br><br> -Article 5<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CommonStockSharesIssued</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CommonStockSharesOutstanding">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Number of shares of common stock outstanding. Common stock represent the ownership interest in a corporation.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 505<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 2<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6928386&amp;loc=d3e21463-112644<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.29)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 505<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.3-04)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=27012166&amp;loc=d3e187085-122770<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 02<br><br><br><br> -Paragraph 30<br><br><br><br> -Article 5<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CommonStockSharesOutstanding</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PreferredStockSharesAuthorized">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The maximum number of nonredeemable preferred shares (or preferred stock redeemable solely at the option of the issuer) permitted to be issued by an entity's charter and bylaws.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.28)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 02<br><br><br><br> -Paragraph 29<br><br><br><br> -Article 5<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PreferredStockSharesAuthorized</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PreferredStockSharesIssued">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Total number of nonredeemable preferred shares (or preferred stock redeemable solely at the option of the issuer) issued to shareholders (includes related preferred shares that were issued, repurchased, and remain in the treasury). May be all or portion of the number of preferred shares authorized. Excludes preferred shares that are classified as debt.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.28)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 02<br><br><br><br> -Paragraph 29<br><br><br><br> -Article 5<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PreferredStockSharesIssued</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>

</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>44
<FILENAME>R17.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.2.0.727</span><table class="report" border="0" cellspacing="2" id="idm140187259093056">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Subsequent Event (Notes)<br></strong></div></th>
<th class="th" colspan="1">9 Months Ended</th>
</tr>
<tr><th class="th"><div>Jun. 30, 2015</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SubsequentEventsAbstract', window );"><strong>Subsequent Events [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SubsequentEventsTextBlock', window );">Subsequent Event</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Subsequent Event</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In July 2015, subsequent to the third fiscal quarter, the Company's Board of Directors authorized a restructuring of the Company&#8217;s investment in Kingstone Technology Hong Kong Limited (&#8220;Kingstone Hong Kong&#8221;), a subsidiary of the Company in which the Company currently owns </font><font style="font-family:inherit;font-size:10pt;">55%</font><font style="font-family:inherit;font-size:10pt;"> of the capital stock. As part of the restructuring, the Kingstone Hong Kong and Suzhou Zhuo Jing Investment Center (LP) (&#8220;Suzhou&#8221;) entered into an Investment Agreement (the &#8220;Agreement&#8221;), pursuant to which the parties agreed upon a series of transactions which will result in Suzhou owning </font><font style="font-family:inherit;font-size:10pt;">31.25%</font><font style="font-family:inherit;font-size:10pt;"> of the capital stock of Shanghai Kingstone Semiconductor Company, Ltd. (&#8220;Shanghai Kingstone&#8221;), Kingstone Hong Kong&#8217;s wholly owned subsidiary. Closing of the transactions is expected to occur on or before August 31, 2015.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Following completion of the transactions, Kingstone Hong Kong will own </font><font style="font-family:inherit;font-size:10pt;">68.75%</font><font style="font-family:inherit;font-size:10pt;"> of the capital stock of Shanghai Kingstone and Suzhou will own </font><font style="font-family:inherit;font-size:10pt;">31.25%</font><font style="font-family:inherit;font-size:10pt;">. Upon closing of the transactions, the Company will receive approximately US</font><font style="font-family:inherit;font-size:10pt;">$4,000,000</font><font style="font-family:inherit;font-size:10pt;"> for a portion of its equity ownership in Kingstone Hong Kong, which will be decreased from </font><font style="font-family:inherit;font-size:10pt;">55%</font><font style="font-family:inherit;font-size:10pt;"> to </font><font style="font-family:inherit;font-size:10pt;">15%</font><font style="font-family:inherit;font-size:10pt;">. In addition, upon closing of the transactions, the Company will be repaid the outstanding principal amount of US</font><font style="font-family:inherit;font-size:10pt;">$4,000,000</font><font style="font-family:inherit;font-size:10pt;"> under the Solar Tool Loan Agreement dated December 9, 2011. Closing of the transactions is also subject to Shanghai Kingstone and Kingstone Hong Kong executing a Sales and Service Agreement that (i) reaffirms the Company&#8217;s exclusive right to sell and service the products of Shanghai Kingstone (subject to Shanghai Kingstone&#8217;s right to sell and service products of Shanghai Kingstone in China), (ii) provides that Shanghai Kingstone and/or Kingstone Hong Kong will purchase from the Company such exclusive right for US</font><font style="font-family:inherit;font-size:10pt;">$5,600,000</font><font style="font-family:inherit;font-size:10pt;"> by the earlier of (a) March 31, 2016 or (b) the commencement of any public offering process of Shanghai Kingstone, and (iii) confirms the Company&#8217;s non-exclusive sales and service right in connection with the products of Shanghai Kingstone after the purchase in item (ii) has been consummated. If any of the closing conditions set forth in the Agreement are not fulfilled or waived before August 31, 2015 (or any other date as agreed by the parties), then any party may terminate this Agreement without any further obligation to the other party. The transaction is subject to customary closing conditions and regulatory approvals in both Shanghai and Hong Kong.</font></div></div><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SubsequentEventsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SubsequentEventsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SubsequentEventsTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for significant events or transactions that occurred after the balance sheet date through the date the financial statements were issued or the date the financial statements were available to be issued. Examples include: the sale of a capital stock issue, purchase of a business, settlement of litigation, catastrophic loss, significant foreign exchange rate changes, loans to insiders or affiliates, and transactions not in the ordinary course of business.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SubsequentEventsTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>

</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>45
<FILENAME>R1.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.2.0.727</span><table class="report" border="0" cellspacing="2" id="idm140187053053840">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Document and Entity Information - shares<br></strong></div></th>
<th class="th" colspan="1">9 Months Ended</th>
<th class="th" colspan="1"></th>
</tr>
<tr>
<th class="th"><div>Jun. 30, 2015</div></th>
<th class="th"><div>Aug. 01, 2015</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_DocumentAndEntityInformationAbstract', window );"><strong>Document and Entity Information [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_EntityRegistrantName', window );">Entity Registrant Name</a></td>
<td class="text">AMTECH SYSTEMS INC<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_EntityCentralIndexKey', window );">Entity Central Index Key</a></td>
<td class="text">0000720500<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_CurrentFiscalYearEndDate', window );">Current Fiscal Year End Date</a></td>
<td class="text">--09-30<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_EntityFilerCategory', window );">Entity Filer Category</a></td>
<td class="text">Accelerated Filer<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_DocumentType', window );">Document Type</a></td>
<td class="text">10-Q<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_DocumentPeriodEndDate', window );">Document Period End Date</a></td>
<td class="text">Jun. 30,  2015<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_DocumentFiscalYearFocus', window );">Document Fiscal Year Focus</a></td>
<td class="text">2015<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_DocumentFiscalPeriodFocus', window );">Document Fiscal Period Focus</a></td>
<td class="text">Q3<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_AmendmentFlag', window );">Amendment Flag</a></td>
<td class="text">false<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_EntityCommonStockSharesOutstanding', window );">Entity Common Stock, Shares Outstanding</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">13,150,469<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_asys_DocumentAndEntityInformationAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Document and Entity Information [Abstract]</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">asys_DocumentAndEntityInformationAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>asys_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_AmendmentFlag">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>If the value is true, then the document is an amendment to previously-filed/accepted document.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_AmendmentFlag</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_CurrentFiscalYearEndDate">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>End date of current fiscal year in the format --MM-DD.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_CurrentFiscalYearEndDate</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:gMonthDayItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_DocumentFiscalPeriodFocus">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>This is focus fiscal period of the document report. For a first quarter 2006 quarterly report, which may also provide financial information from prior periods, the first fiscal quarter should be given as the fiscal period focus. Values: FY, Q1, Q2, Q3, Q4, H1, H2, M9, T1, T2, T3, M8, CY.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_DocumentFiscalPeriodFocus</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:fiscalPeriodItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_DocumentFiscalYearFocus">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>This is focus fiscal year of the document report in CCYY format. For a 2006 annual report, which may also provide financial information from prior periods, fiscal 2006 should be given as the fiscal year focus. Example: 2006.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_DocumentFiscalYearFocus</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:gYearItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_DocumentPeriodEndDate">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The end date of the period reflected on the cover page if a periodic report. For all other reports and registration statements containing historical data, it is the date up through which that historical data is presented.  If there is no historical data in the report, use the filing date. The format of the date is CCYY-MM-DD.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_DocumentPeriodEndDate</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:dateItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_DocumentType">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The type of document being provided (such as 10-K, 10-Q, 485BPOS, etc). The document type is limited to the same value as the supporting SEC submission type, or the word "Other".</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_DocumentType</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:submissionTypeItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityCentralIndexKey">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>A unique 10-digit SEC-issued value to identify entities that have filed disclosures with the SEC. It is commonly abbreviated as CIK.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation 12B<br><br><br><br> -Number 240<br><br><br><br> -Section 12b<br><br><br><br> -Subsection 1<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityCentralIndexKey</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:centralIndexKeyItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityCommonStockSharesOutstanding">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Indicate number of shares or other units outstanding of each of registrant's classes of capital or common stock or other ownership interests, if and as stated on cover of related periodic report. Where multiple classes or units exist define each class/interest by adding class of stock items such as Common Class A [Member], Common Class B [Member] or Partnership Interest [Member] onto the Instrument [Domain] of the Entity Listings, Instrument.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityCommonStockSharesOutstanding</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityFilerCategory">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Indicate whether the registrant is one of the following: (1) Large Accelerated Filer, (2) Accelerated Filer, (3) Non-accelerated Filer, (4) Smaller Reporting Company (Non-accelerated) or (5) Smaller Reporting Accelerated Filer. Definitions of these categories are stated in Rule 12b-2 of the Exchange Act. This information should be based on the registrant's current or most recent filing containing the related disclosure.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityFilerCategory</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:filerCategoryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityRegistrantName">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The exact name of the entity filing the report as specified in its charter, which is required by forms filed with the SEC.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation 12B<br><br><br><br> -Number 240<br><br><br><br> -Section 12b<br><br><br><br> -Subsection 1<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityRegistrantName</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:normalizedStringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>

</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>46
<FILENAME>R18.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.2.0.727</span><table class="report" border="0" cellspacing="2" id="idm140187066553248">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Basis of Presentation (Policies)<br></strong></div></th>
<th class="th" colspan="1">9 Months Ended</th>
</tr>
<tr><th class="th"><div>Jun. 30, 2015</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract', window );"><strong>Organization, Consolidation and Presentation of Financial Statements [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_BasisOfAccountingPolicyPolicyTextBlock', window );">Nature of Operations and Basis of Presentation</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Nature of Operations and Basis of Presentation </font><font style="font-family:inherit;font-size:10pt;">-&#160;The Company serves niche markets in industries that are experiencing rapid technological advances and which historically have been very cyclical. Therefore, future profitability and growth depend on the Company&#8217;s ability to develop or acquire and market profitable new products and on its ability to adapt to cyclical trends.&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The accompanying unaudited condensed consolidated financial statements have been prepared pursuant to the rules and regulations of the Securities and Exchange Commission (the &#8220;SEC&#8221;), and consequently do not include all disclosures normally required by accounting principles generally accepted in the United States of America. In the opinion of management, the accompanying unaudited interim condensed consolidated financial statements contain all adjustments necessary, all of which are of a normal and recurring nature, to present fairly our financial position, results of operations and cash flows. Certain information and note disclosures normally included in financial statements have been condensed or omitted pursuant to the rules and regulations of the SEC. These condensed consolidated financial statements should be read in conjunction with the audited consolidated financial statements and notes thereto included in our Annual Report on Form 10-K for the fiscal year ended September&#160;30, 2014.</font></div><div style="line-height:120%;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The consolidated results of operations for the three and nine months ended June&#160;30, 2015, are not necessarily indicative of the results to be expected for the full fiscal year.</font></div></div><span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConsolidationPolicyTextBlock', window );">Principles of Consolidation</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Principles of Consolidation &#8211;</font><font style="font-family:inherit;font-size:10pt;"> The consolidated financial statements include the accounts of the Company and its wholly-owned subsidiaries and subsidiaries in which it has a controlling interest. The Company reports noncontrolling interests in consolidated entities as a component of equity separate from the Company&#8217;s equity. All material intercompany accounts and transactions have been eliminated in consolidation.</font></div></div><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_UseOfEstimates', window );">Use of Estimates</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Use of Estimates</font><font style="font-family:inherit;font-size:10pt;"> - The preparation of consolidated financial statements in conformity with accounting principles generally accepted in the United States of America requires management to make estimates and assumptions that affect the reported amounts of assets and liabilities and disclosure of contingent assets and liabilities at the date of the consolidated financial statements and the reported amounts of revenue and expenses during the reporting period. Actual results could differ from those estimates.<br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;"></font></div></div><span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RevenueRecognitionPolicyTextBlock', window );">Revenue Recognition</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Revenue Recognition</font><font style="font-family:inherit;font-size:10pt;"> - We review product and service sales contracts with multiple deliverables to determine if separate units of accounting are present. Where separate units of accounting exist, revenue allocated to delivered items is the lower of the relative selling price of the delivered items in the sales arrangement or the portion of the selling price that is not contingent upon performance of the service. </font></div><div style="line-height:120%;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">We recognize revenue when persuasive evidence of an arrangement exists; the product has been delivered and title has transferred, or services have been rendered; and the seller&#8217;s price to the buyer is fixed or determinable and collectability is reasonably assured. For us, this policy generally results in revenue recognition at the following points:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;" rowspan="1" colspan="1"></td><td rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:top" rowspan="1" colspan="1"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">1.</font></div></td><td style="vertical-align:top;" rowspan="1" colspan="1"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">For our equipment business, transactions where legal title passes to the customer upon shipment, we recognize revenue upon shipment for those products where the customer&#8217;s defined specifications have been met with at least two similarly configured systems and processes for a comparably situated customer. Our selling prices may include both equipment and services, i.e., installation and start-up services performed by our service technicians. The equipment and services are multiple deliverables. Certain equipment that has a positive track record of successful installation and customer acceptance are considered to be routine systems.  Our recognition of revenue upon delivery of such equipment that has been routinely installed and accepted is equal to the total selling price minus the relative selling price of the undelivered services.  </font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Where the installation and acceptance of more than two similarly configured equipment has not become routine, recognition of revenue upon delivery of equipment is limited to the lesser of (i) the total selling price minus the relative selling price of the undelivered services or (ii) the non-contingent amount. Since we defer only those costs directly related to installation, or other unit of accounting not yet delivered, and the portion of the contract price is often considerably greater than the relative selling price of those items, our policy at times will result in deferral of profit that is disproportionate in relation to the deferred revenue. When this is the case, the gross margin recognized in one period will be lower and the gross margin reported in a subsequent period will improve.</font></div><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;" rowspan="1" colspan="1"></td><td rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:top" rowspan="1" colspan="1"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">2.</font></div></td><td style="vertical-align:top;" rowspan="1" colspan="1"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">For products where the customer&#8217;s defined specifications have not been met with at least two similarly configured systems and processes, the revenue and directly related costs are deferred at the time of shipment and later recognized at the time of customer acceptance or when this criterion has been met. We have, on occasion, experienced longer than expected delays in receiving cash from certain customers pending final installation or system acceptance. If some of our customers refuse to pay the final payment, or otherwise delay final acceptance or installation, the deferred revenue would not be recognized, adversely affecting our future cash flows and operating results.</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;" rowspan="1" colspan="1"></td><td rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:top" rowspan="1" colspan="1"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">3.</font></div></td><td style="vertical-align:top;" rowspan="1" colspan="1"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Sales of certain equipment, spare parts and consumables are recognized upon shipment, as there are no post shipment obligations other than standard warranties.</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;" rowspan="1" colspan="1"></td><td rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:top" rowspan="1" colspan="1"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">4.</font></div></td><td style="vertical-align:top;" rowspan="1" colspan="1"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Service revenue is recognized upon performance of the services requested by the customer. Revenue related to service contracts is recognized ratably over the period of the contract or in accordance with the terms of the contract, which generally coincides with the performance of the services requested by the customer.</font></div></td></tr></table><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></div><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RevenueRecognitionDeferredRevenue', window );">Deferred Profit</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Deferred Profit</font><font style="font-family:inherit;font-size:10pt;"> &#8211; Revenue deferred pursuant to the Company&#8217;s revenue recognition policy, net of the related deferred costs, if any, is recorded as deferred profit in current liabilities. </font></div></div><span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskCreditRisk', window );">Concentrations of Credit Risk</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Concentrations of Credit Risk &#8211;</font><font style="font-family:inherit;font-size:10pt;"> Financial instruments that potentially subject the Company to significant concentrations of credit risk consist principally of trade accounts receivable and cash. The Company&#8217;s customers, located throughout the world, consist of manufacturers of solar cells, semiconductors, semiconductor wafers, light-emitting diodes (LEDs) and micro-electro-mechanical systems (MEMS). Credit risk is managed by performing ongoing credit evaluations of the customers&#8217; financial condition, by requiring significant deposits where appropriate, and by actively monitoring collections. Letters of credit are required of certain customers depending on the size of the order, type of customer or its creditworthiness, and its country of domicile. Reserves for potentially uncollectible receivables are maintained based on an assessment of collectability.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The Company maintains its cash, cash equivalents and restricted cash in multiple financial institutions. Balances in the United States (approximately </font><font style="font-family:inherit;font-size:10pt;">60%</font><font style="font-family:inherit;font-size:10pt;"> of total cash balances) are primarily invested in U.S. Treasuries or are in financial institutions insured by the Federal Deposit Insurance Corporation (FDIC). The remainder of the Company&#8217;s cash is maintained in banks in The Netherlands, France, China, and other foreign jurisdictions that are uninsured.</font></div></div><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CashAndCashEquivalentsRestrictedCashAndCashEquivalentsPolicy', window );">Restricted Cash</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Restricted Cash</font><font style="font-family:inherit;font-size:10pt;"> &#8211; Restricted cash is </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">$1.6 million</font><font style="font-family:inherit;font-size:10pt;"> and </font><font style="font-family:Times New Roman;font-size:10pt;color:#000000;font-style:normal;font-weight:normal;text-decoration:none;">$2.4 million</font><font style="font-family:inherit;font-size:10pt;"> as of </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">June&#160;30, 2015</font><font style="font-family:inherit;font-size:10pt;">, and </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">September&#160;30, 2014</font><font style="font-family:inherit;font-size:10pt;">, respectively. The balance includes collateral for bank guarantees required by certain customers from whom deposits have been received in advance of shipment and cash received from research and development grants related to our ion implant technology to be used for research and development projects.</font></div></div><span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ReceivablesPolicyTextBlock', window );">Accounts Receivable - Unbilled and Other</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Accounts Receivable - Unbilled and Other</font><font style="font-family:inherit;font-size:10pt;"> &#8211; Unbilled and other accounts receivable consist mainly of the contingent portion of the sales price that is not collectible until successful installation of the product. These amounts are generally billed upon final customer acceptance. For the majority of these amounts, a liability has been accrued in deferred profit. </font></div></div><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InventoryPolicyTextBlock', window );">Inventories</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Inventories</font><font style="font-family:inherit;font-size:10pt;"> &#8211; Inventories are stated at the lower of cost or net realizable value. Approximately </font><font style="font-family:inherit;font-size:10pt;">50%</font><font style="font-family:inherit;font-size:10pt;"> and </font><font style="font-family:inherit;font-size:10pt;">70%</font><font style="font-family:inherit;font-size:10pt;"> of inventory is valued on an average cost basis with the remainder determined on a first-in, first-out (FIFO) basis at June 30, 2015, and September 30, 2014, respectively. </font></div></div><span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentPolicyTextBlock', window );">Property, Plant and Equipment</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Property, Plant and Equipment</font><font style="font-family:inherit;font-size:10pt;"> &#8211; Property, plant and equipment are recorded at cost. Maintenance and repairs are charged to expense as incurred. The cost of property retired or sold and the related accumulated depreciation are removed from the applicable accounts when disposition occurs and any gain or loss is recognized. Depreciation is computed using the straight-line method. Useful lives for equipment, machinery and leasehold improvements range from three to seven years; for furniture and fixtures from five to ten years; and for buildings </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">20-25</font><font style="font-family:inherit;font-size:10pt;"> years.</font></div></div><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillAndIntangibleAssetsGoodwillPolicy', window );">Goodwill</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Goodwill -</font><font style="font-family:inherit;font-size:10pt;"> Goodwill is not subject to amortization and is reviewed for impairment on an annual basis, typically at the end of the fiscal year, or more frequently if circumstances dictate.</font></div></div><span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillAndIntangibleAssetsIntangibleAssetsPolicy', window );">Intangibles</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Intangibles</font><font style="font-family:inherit;font-size:10pt;"> &#8211; Intangible assets are capitalized and amortized over their useful life if the life is determinable. If the life is not determinable, amortization is not recorded.</font></div></div><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ImpairmentOrDisposalOfLongLivedAssetsIncludingIntangibleAssetsPolicyPolicyTextBlock', window );">Long-lived assets</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Long-lived assets -  </font><font style="font-family:inherit;font-size:10pt;">Long-lived assets are reviewed for impairment when events or changes in circumstances indicate that the carrying amount of an asset may not be recoverable.  </font></div></div><span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StandardProductWarrantyPolicy', window );">Warranty</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Warranty &#8211;</font><font style="font-family:inherit;font-size:10pt;"> A limited warranty is provided free of charge, generally for periods of </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">12</font><font style="font-family:inherit;font-size:10pt;"> to </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">24</font><font style="font-family:inherit;font-size:10pt;"> months, for all purchases of the Company&#8217;s new products and systems. Accruals are recorded for estimated warranty costs at the time revenue is recognized.</font></div></div><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy', window );">Stock-Based Compensation</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Stock-Based Compensation -</font><font style="font-family:inherit;font-size:10pt;"> The Company measures compensation costs relating to share-based payment transactions based upon the grant date fair value of the award. Those costs are recognized as expense over the requisite service period, which is generally the vesting period. The benefits of tax deductions in excess of recognized compensation cost are credited to additional paid-in capital and reported as cash flow from financing activities rather than as cash flow from operating activities. </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Stock-based compensation expense reduced the Company&#8217;s results of operations by the following amounts:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="16" rowspan="1"></td></tr><tr><td width="59%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="8%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="8%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="7%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="7%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Three Months Ended June 30,</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Nine Months Ended June 30,</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2014</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2014</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="15" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Effect on income before income taxes (1)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(296</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(230</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(864</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(603</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Effect on income taxes</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">40</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">36</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">134</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">196</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Effect on net income</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(256</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(194</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(730</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(407</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;" rowspan="1" colspan="1"></td><td rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:top" rowspan="1" colspan="1"><div style="line-height:120%;font-size:8pt;padding-left:24px;"><font style="font-family:inherit;font-size:8pt;">(1)</font></div></td><td style="vertical-align:top;" rowspan="1" colspan="1"><div style="line-height:120%;text-align:justify;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">Stock-based compensation expense is included in selling, general and administrative expenses.</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Stock options issued under the terms of the plans have, or will have, an exercise price equal to the fair market value of the common stock at the close of trading on the Nasdaq the day prior to the date of the option grant and expire no later than </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">10 years</font><font style="font-family:inherit;font-size:10pt;"> from the date of grant, with the most recent grant expiring in 2025. Options issued by the Company vest over </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">2</font><font style="font-family:inherit;font-size:10pt;"> to </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">4</font><font style="font-family:inherit;font-size:10pt;"> years.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Stock option transactions and the options outstanding are summarized as follows:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="16" rowspan="1"></td></tr><tr><td width="49%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="10%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="10%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="10%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="10%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="15" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Nine Months Ended June 30,</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2014</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Options</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Weighted</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Average</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Exercise</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Price</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Options</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Weighted</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Average</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Exercise</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Price</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Outstanding at beginning of period</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,063,324</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">7.37</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,059,417</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">6.71</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Granted</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">327,500</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9.74</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">272,906</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">7.01</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Assumed - merger</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">367,229</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">14.19</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Exercised</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(94,454</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5.51</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(263,358</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4.31</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Forfeited</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(26,571</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">29.48</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(4,546</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8.71</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Outstanding at end of period</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,637,028</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9.12</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,064,419</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">7.37</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Exercisable at end of period</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,005,690</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9.75</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">663,220</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8.14</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Weighted average fair value of options </font></div><div style="font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">granted during the period</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5.91</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4.38</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr></table></div><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The fair value of options was estimated at the grant date using the Black-Scholes option pricing model with the following assumptions:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="4" rowspan="1"></td></tr><tr><td width="67%" rowspan="1" colspan="1"></td><td width="16%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="16%" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Nine Months Ended June 30,</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2014</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Risk free interest rate</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Expected life</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">6 years</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">6 years</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Dividend rate</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">0%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">0%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Volatility</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">67%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">69%</font></div></td></tr></table></div><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">To estimate expected lives for this valuation, it was assumed that options will be exercised at varying schedules after becoming fully vested. Forfeitures have been estimated at the time of grant and will be revised, if necessary, in subsequent periods if actual forfeitures differ from those estimates. Forfeitures were estimated based upon historical experience. Fair value computations are highly sensitive to the volatility factor assumed; the greater the volatility, the higher the computed fair value of the options granted. The Company uses historical stock prices to determine the volatility factor.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The Company awards restricted shares under the existing share-based compensation plans. The Company's restricted share awards vest in equal annual installments over a two- to four-year period. The total value of these awards is expensed on a ratable basis over the service period of the employees receiving the grants. The &#8220;service period&#8221; is the time during which the employees receiving grants must remain employees for the shares granted to fully vest.</font></div></div><span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FairValueOfFinancialInstrumentsPolicy', window );">Fair Value of Financial Instruments</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Fair Value of Financial Instruments </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;padding-top:6px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In accordance with the requirements of the Fair Value Measurements and Disclosures Topic of the Financial Accounting Standards Board ("FASB") Accounting Standards Codification ("ASC"), the Company groups its financial assets and liabilities measured at fair value on a recurring basis in three levels, based on the markets in which the assets and liabilities are traded and the reliability of the assumptions used to determine fair value. These levels are: </font></div><div style="line-height:120%;padding-top:6px;text-align:justify;text-indent:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Level 1 - Valuation is based upon quoted market price for identical instruments traded in active markets.</font></div><div style="line-height:120%;padding-top:6px;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Level 2 - Valuation is based on quoted market prices for similar instruments in active markets, quoted prices for identical or similar instruments in markets that are not active, and model-based valuation techniques for which all significant assumptions are observable in the market.</font></div><div style="line-height:120%;padding-top:6px;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Level 3 - Valuation is generated from model-based techniques that use significant assumptions not observable in the market. Valuation techniques include use of discounted cash flow models and similar techniques.</font></div><div style="line-height:120%;text-align:justify;font-size:4pt;"><font style="font-family:inherit;font-size:4pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In accordance with the requirements of the Fair Value Measurements and Disclosures Topic of the FASB ASC, it is the Company's policy to use observable inputs whenever reasonably practicable in order to minimize the use of unobservable inputs when developing fair value measurements. When available, the Company uses quoted market prices to measure fair value. If market prices are not available, the fair value measurement is based on models that use primarily market based parameters including interest rate yield curves, option volatilities and currency rates. In certain cases, where market rate assumptions are not available, the Company is required to make judgments about assumptions market participants would use to estimate the fair value of a financial instrument. Changes in the underlying assumptions used, including discount rates and estimates of future cash flows, could significantly affect the results of current or future values. </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;">Cash, Cash Equivalents and Restricted Cash -</font><font style="font-family:inherit;font-size:10pt;"> Included in Cash and Cash Equivalents in the Condensed Consolidated Balance Sheets is </font><font style="font-family:inherit;font-size:10pt;">$9.6 million</font><font style="font-family:inherit;font-size:10pt;"> and </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">$17.0 million</font><font style="font-family:inherit;font-size:10pt;"> as of </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">June&#160;30, 2015</font><font style="font-family:inherit;font-size:10pt;"> and </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">September&#160;30, 2014</font><font style="font-family:inherit;font-size:10pt;">, respectively, of money market funds invested in treasury bills, notes and other direct obligations of the U.S. Treasury.  The fair value of this cash equivalent is based on Level 1 inputs in the fair value hierarchy.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;">Receivables and Payables - </font><font style="font-family:inherit;font-size:10pt;">The recorded amounts of these financial instruments, including accounts receivable and accounts payable, approximate their fair value because of the short maturities of these instruments.  If measured at fair value in the financial statements, these financial instruments would be classified as Level 3 in the fair value hierarchy.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;">Debt - </font><font style="font-family:inherit;font-size:10pt;">The recorded amounts of these financial instruments, including long-term debt and current maturities of long-term debt, approximate fair value and are considered Level 2 in the fair value hierarchy.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></div><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PensionAndOtherPostretirementPlansPensionsPolicy', window );">Pensions</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Pensions </font><font style="font-family:inherit;font-size:10pt;">- The Company has retirement plans covering substantially all employees. The principal plans are the multiemployer defined benefit pension plans of the Company&#8217;s operations in The Netherlands and France and the plan for hourly union employees in Pennsylvania. The multiemployer plans in the United States and France are insignificant to the Company's results of operations and financial condition.  The Company's defined contribution plans cover substantially all of the employees in the United States. The Company matches employee funds on a discretionary basis.</font></div></div><span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShippingAndHandlingCostPolicyTextBlock', window );">Shipping expense</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Shipping expense</font><font style="font-family:inherit;font-size:10pt;"> &#8211; Shipping expenses of </font><font style="font-family:inherit;font-size:10pt;">$1.2 million</font><font style="font-family:inherit;font-size:10pt;"> and </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">$0.2 million</font><font style="font-family:inherit;font-size:10pt;"> for the three months ended </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">June&#160;30, 2015</font><font style="font-family:inherit;font-size:10pt;"> and </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">2014</font><font style="font-family:inherit;font-size:10pt;">, respectively, are included in selling, general and administrative expenses.  </font></div></div><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ResearchAndDevelopmentExpensePolicy', window );">Research and development expense</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Research, development and engineering expense</font><font style="font-family:inherit;font-size:10pt;"> &#8211; Research, development and engineering expenses consist of the cost of employees, consultants and contractors who design, engineer and develop new products and processes; materials and supplies used in those activities; and product prototyping. The Company receives reimbursements through governmental research and development grants which are netted against these expenses when certain conditions have been met. </font></div></div><span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock', window );">Impact of Recently Issued Accounting Pronouncements</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Impact of Recently Issued Accounting Pronouncements&#160;</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In July 2015, the FASB issued Accounting Standards Update ("ASU") No.&#160;2015-11, Simplifying the Measurement of Inventory. This ASU simplifies the measurement of inventory by requiring certain inventory to be measured at the lower of cost or net realizable value. The amendments in this ASU are effective for fiscal years beginning after December 15, 2016 and for interim periods therein. We do not expect adoption of this ASU to have a material impact on our consolidated financial position and results of operations.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In June 2015, the FASB issued ASU 2015-10, Technical Corrections&#160;and Improvements&#160;, which clarifies various topics in the FASB Accounting Standards Codification. ASU 2015-10 is effective for the interim and annual periods ending after December 15, 2015. Early adoption is permitted. We are currently assessing the impact of this ASU, but do not expect it to have a material impact on our consolidated financial position and results of operations.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In May&#160;2015, the FASB issued ASU 2015-08,&#160;Business Combinations (Topic 805):&#160;Pushdown&#160;Accounting - Amendments to SEC Paragraphs Pursuant to Staff Accounting Bulletin No.&#160;115, or ASU 2015-08.  The amendments in ASU 2015-08 amend various SEC paragraphs included in the FASB&#8217;s Accounting Standards Codification to reflect the issuance of Staff Accounting Bulletin No.&#160;115, or SAB 115. SAB 115 rescinds portions of the interpretive guidance included in the SEC&#8217;s Staff Accounting Bulletins series and brings existing guidance into conformity with ASU No.&#160;2014-17,&#160;Business Combinations (Topic 805):&#160;Pushdown&#160;Accounting, which provides an acquired entity with an option to apply&#160;pushdown&#160;accounting in its separate financial statements upon occurrence of an event in which an acquirer obtains control of the acquired entity. We have adopted the amendments in ASU 2015-08, effective May&#160;8, 2015, as the amendments in the update are effective upon issuance. The adoption did not have a material impact on our consolidated financial position and results of operation.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In April 2015, the FASB issued ASU No.&#160;&#160;2015-05,&#160;Intangibles-Goodwill and Other-Internal-Use Software (Subtopic 350-40). This ASU provides guidance that will help entities evaluate the accounting for fees paid by a customer in a cloud computing arrangement, including whether a cloud computing arrangement includes a software license. If a cloud computing arrangement includes a software license, then this ASU requires the customer to account for the software license consistent with the acquisition of other software licenses; otherwise, the customer should account for the arrangement as a service contract. The ASU is effective for fiscal years, and interim periods within those fiscal years, beginning after December&#160;15, 2015. Entities can elect to adopt the amendments either prospectively to all arrangements entered into after the effective date or retrospectively to all prior periods. We are currently assessing the impact of this ASU.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In April 2015, the FASB issued ASU No. 2015-3, Interest-Imputation of Interest (Subtopic 835-30).  This ASU requires debt issuance costs related to a recognized debt liability be presented in the balance sheet as a direct deduction from the carrying amount of the related debt liability instead of being presented as an asset.&#160;The ASU requires retrospective application and represents a change in accounting principle. The ASU is effective for fiscal years beginning after December&#160;15, 2015. Early adoption is permitted for financial statements that have not been previously issued. We are currently assessing the impact of this ASU.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In January 2015, the FASB issued ASU No. 2015-1, Income Statement - Extraordinary and Unusual Items (Subtopic 225-20).  The FASB is issuing this ASU as part of its initiative to reduce costs and complexity in accounting standards, known as its Simplification Initiative.  This ASU eliminates from generally accepted accounting principles in the United States (" GAAP") the concept of extraordinary items in an effort to save time and reduce costs, while alleviating uncertainty and maintaining accurate and fulsome disclosure.  The amendments in this ASU are effective for fiscal years, and interim periods within those fiscal years, beginning after December 15, 2015.  We are currently assessing the impact of this ASU but do not expect it to have a material impact on our consolidated financial position and results of operations.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In June 2014, the FASB issued ASU No. 2014-12 which provides guidance on how to account for share-based payment awards where the terms of the award provide that a performance target that affects vesting could be achieved after the requisite service period. This ASU requires that a performance target that affects vesting and that could be achieved after the requisite service period be treated as a performance condition. ASU 2014-12 is effective for annual periods, and interim periods within those annual periods, beginning after December 15, 2015, and early adoption is permitted. We are currently assessing the impact of this ASU but do not expect it to have a material impact on our consolidated financial position and results of operations.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In May 2014, the FASB issued ASU No. 2014-09, Revenue from Contracts with Customers, which supersedes most of the current revenue recognition requirements. The core principle of the new guidance is that an entity should recognize revenue to depict the transfer of promised goods or services to customers in an amount that reflects the consideration to which the entity expects to be entitled in exchange for these goods or services. New disclosures about the nature, amount, timing and uncertainty of revenue and cash flows arising from contracts with customers are also required. This guidance is effective for the Company in the first quarter of fiscal year 2018 and early application is not permitted. Entities must adopt the new guidance using one of two retrospective application methods. The Company is currently evaluating the standard and the impact on our financial position and results of operations.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In April 2014, the FASB issued ASU No. 2014-08 Presentation of Financial Statements (Topic 205) and Property, Plant and Equipment (Topic 360).  The amendments in this ASU change the requirements for reporting discontinued operations in Subtopic 205-20. A discontinued operation may include a component of an entity or a group of components of an entity, or a business or nonprofit activity.  Under current U.S. GAAP, many disposals, some of which may be routine in nature and not a change in an entity's strategy, are reported in discontinued operations.  The amendments in this ASU improve the definition of discontinued operations by limiting discontinued operations reporting to disposals of components of an entity that represent strategic shifts that have (or will have) a major effect on an entity's operations and financial results. The amendments in this ASU require expanded disclosures for discontinued operations. The FASB concluded that those disclosures should provide users of financial statements with more information about the assets, liabilities, revenues, and expenses of discontinued operations.  The amendments in this ASU also require an entity to disclose the pretax profit or loss of an individually significant component of an entity that does not qualify for discontinued operations reporting.   The amendments in this ASU are effective for fiscal years, and interim periods within those years, beginning after December 15, 2014. The Company will evaluate the impact of this ASU as future transactions occur.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></div><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_BasisOfAccountingPolicyPolicyTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for basis of accounting, or basis of presentation, used to prepare the financial statements (for example, US Generally Accepted Accounting Principles, Other Comprehensive Basis of Accounting, IFRS).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_BasisOfAccountingPolicyPolicyTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CashAndCashEquivalentsRestrictedCashAndCashEquivalentsPolicy">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Entity's cash and cash equivalents accounting policy with respect to restricted balances.  Restrictions may include legally restricted deposits held as compensating balances against short-term borrowing arrangements, contracts entered into with others, or company statements of intention with regard to particular deposits; however, time deposits and short-term certificates of deposit are not generally included in legally restricted deposits.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 235<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 3<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51655414&amp;loc=d3e18780-107790<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 942<br><br><br><br> -SubTopic 210<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.9-03.1(a))<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6876686&amp;loc=d3e534808-122878<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 305<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 05<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6375392&amp;loc=d3e26790-107797<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 230<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6367179&amp;loc=d3e4273-108586<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 02<br><br><br><br> -Paragraph 1<br><br><br><br> -Article 5<br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Financial Reporting Release (FRR)<br><br><br><br> -Number 203<br><br><br><br> -Paragraph 02-03<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CashAndCashEquivalentsRestrictedCashAndCashEquivalentsPolicy</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConcentrationRiskCreditRisk">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for credit risk.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 825<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 55<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6875567&amp;loc=d3e14489-108613<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 942<br><br><br><br> -SubTopic 825<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 2<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51676700&amp;loc=d3e61082-112788<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 944<br><br><br><br> -SubTopic 825<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=28088331&amp;loc=SL29635902-196195<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 825<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 21<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=49121117&amp;loc=d3e13537-108611<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 825<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 20<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=49121117&amp;loc=d3e13531-108611<br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 942<br><br><br><br> -SubTopic 825<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51676700&amp;loc=d3e61044-112788<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConcentrationRiskCreditRisk</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConsolidationPolicyTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy regarding (1) the principles it follows in consolidating or combining the separate financial statements, including the principles followed in determining the inclusion or exclusion of subsidiaries or other entities in the consolidated or combined financial statements and (2) its treatment of interests (for example, common stock, a partnership interest or other means of exerting influence) in other entities, for example consolidation or use of the equity or cost methods of accounting.  The accounting policy may also address the accounting treatment for intercompany accounts and transactions, noncontrolling interest, and the income statement treatment in consolidation for issuances of stock by a subsidiary.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 235<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 3<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51655414&amp;loc=d3e18780-107790<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 810<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=18733093&amp;loc=d3e5614-111684<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 810<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (SX 210.3A-02)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=27015204&amp;loc=d3e355033-122828<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 02<br><br><br><br> -Paragraph k<br><br><br><br> -Article 1<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 02, 03<br><br><br><br> -Article 3A<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConsolidationPolicyTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FairValueOfFinancialInstrumentsPolicy">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for determining the fair value of financial instruments.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 235<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 3<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51655414&amp;loc=d3e18780-107790<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 825<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=49121117&amp;loc=d3e13279-108611<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 820<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 60<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=7493716&amp;loc=d3e21868-110260<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FairValueOfFinancialInstrumentsPolicy</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_GoodwillAndIntangibleAssetsGoodwillPolicy">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for goodwill. This accounting policy also may address how an entity assesses and measures impairment of goodwill, how reporting units are determined, how goodwill is allocated to such units, and how the fair values of the reporting units are determined.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 235<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 3<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51655414&amp;loc=d3e18780-107790<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 350<br><br><br><br> -SubTopic 20<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=35741047&amp;loc=d3e13816-109267<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_GoodwillAndIntangibleAssetsGoodwillPolicy</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_GoodwillAndIntangibleAssetsIntangibleAssetsPolicy">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for intangible assets. This accounting policy may address both intangible assets subject to amortization and those that are not. The following also may be disclosed: (1) a description of intangible assets (2) the estimated useful lives of those assets (3) the amortization method used (4) how the entity assesses and measures impairment of such assets (5) how future cash flows are estimated (6) how the fair values of such asset are determined.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 350<br><br><br><br> -SubTopic 30<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=26713463&amp;loc=d3e16265-109275<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 235<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 3<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51655414&amp;loc=d3e18780-107790<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_GoodwillAndIntangibleAssetsIntangibleAssetsPolicy</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ImpairmentOrDisposalOfLongLivedAssetsIncludingIntangibleAssetsPolicyPolicyTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for the impairment and disposal of long-lived assets including goodwill and other intangible assets.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ImpairmentOrDisposalOfLongLivedAssetsIncludingIntangibleAssetsPolicyPolicyTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InventoryPolicyTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for major classes of inventories, bases of stating inventories (for example, lower of cost or market), methods by which amounts are added and removed from inventory classes (for example, FIFO, LIFO, or average cost), loss recognition on impairment of inventories, and situations in which inventories are stated above cost. If inventory is carried at cost, this disclosure includes the nature of the cost elements included in inventory.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 330<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=28360613&amp;loc=d3e4492-108314<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.6(b))<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 235<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 3<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51655414&amp;loc=d3e18780-107790<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 330<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 4<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=28360613&amp;loc=d3e4556-108314<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6361739&amp;loc=d3e7789-107766<br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Financial Reporting Release (FRR)<br><br><br><br> -Number 206<br><br><br><br> -Paragraph b<br><br><br><br> -Subparagraph i, ii<br><br><br><br> -Chapter 2<br><br><br><br>Reference 7: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 02<br><br><br><br> -Paragraph 6<br><br><br><br> -Subparagraph a<br><br><br><br> -Article 5<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InventoryPolicyTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy pertaining to new accounting pronouncements that may impact the entity's financial reporting. Includes, but is not limited to, quantification of the expected or actual impact.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PensionAndOtherPostretirementPlansPensionsPolicy">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for pension plans. This accounting policy may address (1) the types of plans sponsored by the entity (2) groups that participate in (or are covered by) each plan (3) how plan assets, liabilities and expenses are measured, including the use of any actuaries and (4) significant assumptions used by the entity to value plan assets and liabilities and how such assumptions are derived.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 715<br><br><br><br> -SubTopic 30<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6412939&amp;loc=d3e15145-114933<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 715<br><br><br><br> -SubTopic 20<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=58740216&amp;loc=d3e1928-114920<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 715<br><br><br><br> -SubTopic 80<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 2<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=49170332&amp;loc=d3e29149-114947<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 715<br><br><br><br> -SubTopic 70<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=49170846&amp;loc=d3e28014-114942<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 235<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 3<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51655414&amp;loc=d3e18780-107790<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PensionAndOtherPostretirementPlansPensionsPolicy</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentPolicyTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for long-lived, physical assets used in the normal conduct of business and not intended for resale. Includes, but is not limited to, basis of assets, depreciation and depletion methods used, including composite deprecation, estimated useful lives, capitalization policy, accounting treatment for costs incurred for repairs and maintenance, capitalized interest and the method it is calculated, disposals and impairments.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 360<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6391035&amp;loc=d3e2868-110229<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 235<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 3<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51655414&amp;loc=d3e18780-107790<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.13(a))<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentPolicyTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ReceivablesPolicyTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for trade and other accounts receivable, and finance, loan and lease receivables, including those classified as held for investment and held for sale. This disclosure may include (1) the basis at which such receivables are carried in the entity's statements of financial position (2) how the level of the valuation allowance for receivables is determined (3) when impairments, charge-offs or recoveries are recognized for such receivables (4) the treatment of origination fees and costs, including the amortization method for net deferred fees or costs (5) the treatment of any premiums or discounts or unearned income (6) the entity's income recognition policies for such receivables, including those that are impaired, past due or placed on nonaccrual status and (7) the treatment of foreclosures or repossessions (8) the nature and amount of any guarantees to repurchase receivables.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 235<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 3<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51655414&amp;loc=d3e18780-107790<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 310<br><br><br><br> -SubTopic 20<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6378556&amp;loc=d3e10133-111534<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 310<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (a)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=49124121&amp;loc=d3e4975-111524<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 02<br><br><br><br> -Paragraph 3-5<br><br><br><br> -Article 5<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ReceivablesPolicyTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ResearchAndDevelopmentExpensePolicy">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for costs it has incurred (1) in a planned search or critical investigation aimed at discovery of new knowledge with the hope that such knowledge will be useful in developing a new product or service, a new process or technique, or in bringing about a significant improvement to an existing product or process; or (2) to translate research findings or other knowledge into a plan or design for a new product or process or for a significant improvement to an existing product or process.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 730<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6420194&amp;loc=d3e21568-108373<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 235<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 3<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51655414&amp;loc=d3e18780-107790<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Glossary Research and Development<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6523717<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ResearchAndDevelopmentExpensePolicy</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RevenueRecognitionDeferredRevenue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for recognizing unearned income or deferred revenue related to transactions involving the sale of a product or performance of services.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 605<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SAB TOPIC 13.B.Q1)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=27012821&amp;loc=d3e214044-122780<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 235<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 3<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51655414&amp;loc=d3e18780-107790<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Staff Accounting Bulletin (SAB)<br><br><br><br> -Number Topic 13<br><br><br><br> -Section B<br><br><br><br> -Paragraph Question 1<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RevenueRecognitionDeferredRevenue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RevenueRecognitionPolicyTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for revenue recognition. If the entity has different policies for different types of revenue transactions, the policy for each material type of transaction is generally disclosed. If a sales transaction has multiple element arrangements (for example, delivery of multiple products, services or the rights to use assets) the disclosure may indicate the accounting policy for each unit of accounting as well as how units of accounting are determined and valued. The disclosure may encompass important judgment as to appropriateness of principles related to recognition of revenue. The disclosure also may indicate the entity's treatment of any unearned or deferred revenue that arises from the transaction.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 235<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 4<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51655414&amp;loc=d3e18823-107790<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 235<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 3<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51655414&amp;loc=d3e18780-107790<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 235<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51655414&amp;loc=d3e18726-107790<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 605<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SAB TOPIC 13.B.Q1)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=27012821&amp;loc=d3e214044-122780<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Staff Accounting Bulletin (SAB)<br><br><br><br> -Number Topic 13<br><br><br><br> -Section B<br><br><br><br> -Paragraph Question 1<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RevenueRecognitionPolicyTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for stock option and stock incentive plans. This disclosure may include (1) the types of stock option or incentive plans sponsored by the entity (2) the groups that participate in (or are covered by) each plan (3) significant plan provisions and (4) how stock compensation is measured, and the methodologies and significant assumptions used to determine that measurement.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 718<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5047-113901<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 235<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 3<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51655414&amp;loc=d3e18780-107790<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 718<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (b),(f)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShippingAndHandlingCostPolicyTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for the classification of shipping and handling costs, including whether the costs are included in cost of sales or included in other income statement accounts. If shipping and handling fees are significant and are not included in cost of sales, disclosure includes both the amounts of such costs and the line item on the income statement which includes such costs.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Glossary Shipping Costs<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51575562<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 605<br><br><br><br> -SubTopic 45<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6408413&amp;loc=d3e221937-122793<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 605<br><br><br><br> -SubTopic 45<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 20<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51671805&amp;loc=d3e60635-111653<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 605<br><br><br><br> -SubTopic 45<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 2<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51667946&amp;loc=d3e61069-111654<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Glossary Handling Costs<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51575068<br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 235<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 3<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51655414&amp;loc=d3e18780-107790<br><br><br><br>Reference 7: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 235<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51655414&amp;loc=d3e18726-107790<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShippingAndHandlingCostPolicyTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StandardProductWarrantyPolicy">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for standard warranties including the methodology for measuring the liability.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 460<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 8<br><br><br><br> -Subparagraph (b)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51674963&amp;loc=d3e12565-110249<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 235<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 3<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51655414&amp;loc=d3e18780-107790<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StandardProductWarrantyPolicy</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_UseOfEstimates">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for the use of estimates in the preparation of financial statements in conformity with generally accepted accounting principles.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 275<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 4<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51801978&amp;loc=d3e6061-108592<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 275<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 9<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51801978&amp;loc=d3e6143-108592<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 275<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 8<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51801978&amp;loc=d3e6132-108592<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_UseOfEstimates</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>

</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>47
<FILENAME>R4.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.2.0.727</span><table class="report" border="0" cellspacing="2" id="idm140187050912352">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Condensed Consolidated Statements of Operations (Unaudited) - USD ($)<br> shares in Thousands, $ in Thousands</strong></div></th>
<th class="th" colspan="2">3 Months Ended</th>
<th class="th" colspan="2">9 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Jun. 30, 2015</div></th>
<th class="th"><div>Jun. 30, 2014</div></th>
<th class="th"><div>Jun. 30, 2015</div></th>
<th class="th"><div>Jun. 30, 2014</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeStatementAbstract', window );"><strong>Income Statement [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SalesRevenueNet', window );">Revenues, net of returns and allowances</a></td>
<td class="nump">$ 40,016<span></span>
</td>
<td class="nump">$ 9,190<span></span>
</td>
<td class="nump">$ 76,685<span></span>
</td>
<td class="nump">$ 36,678<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CostOfGoodsAndServicesSold', window );">Cost of sales</a></td>
<td class="nump">29,888<span></span>
</td>
<td class="nump">7,559<span></span>
</td>
<td class="nump">56,240<span></span>
</td>
<td class="nump">27,615<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GrossProfit', window );">Gross profit</a></td>
<td class="nump">10,128<span></span>
</td>
<td class="nump">1,631<span></span>
</td>
<td class="nump">20,445<span></span>
</td>
<td class="nump">9,063<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SellingGeneralAndAdministrativeExpense', window );">Selling, general and administrative</a></td>
<td class="nump">10,054<span></span>
</td>
<td class="nump">4,103<span></span>
</td>
<td class="nump">24,513<span></span>
</td>
<td class="nump">13,504<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_ResearchAndDevelopmentNetOfGrantsEarned', window );">Research, development and engineering</a></td>
<td class="nump">1,308<span></span>
</td>
<td class="nump">1,399<span></span>
</td>
<td class="nump">3,894<span></span>
</td>
<td class="nump">4,443<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingIncomeLoss', window );">Operating loss</a></td>
<td class="num">(1,234)<span></span>
</td>
<td class="num">(3,871)<span></span>
</td>
<td class="num">(7,962)<span></span>
</td>
<td class="num">(8,884)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherNonoperatingIncomeExpense', window );">Interest expense and other income, net</a></td>
<td class="num">(15)<span></span>
</td>
<td class="nump">43<span></span>
</td>
<td class="num">(135)<span></span>
</td>
<td class="nump">130<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments', window );">Loss before income taxes</a></td>
<td class="num">(1,249)<span></span>
</td>
<td class="num">(3,828)<span></span>
</td>
<td class="num">(8,097)<span></span>
</td>
<td class="num">(8,754)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeTaxExpenseBenefit', window );">Income tax provision</a></td>
<td class="nump">290<span></span>
</td>
<td class="nump">1,325<span></span>
</td>
<td class="nump">640<span></span>
</td>
<td class="nump">1,885<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProfitLoss', window );">Net loss</a></td>
<td class="num">(1,539)<span></span>
</td>
<td class="num">(5,153)<span></span>
</td>
<td class="num">(8,737)<span></span>
</td>
<td class="num">(10,639)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NetIncomeLossAttributableToNoncontrollingInterest', window );">Add: net loss (income) attributable to noncontrolling interest</a></td>
<td class="num">(65)<span></span>
</td>
<td class="num">(104)<span></span>
</td>
<td class="num">(382)<span></span>
</td>
<td class="nump">837<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NetIncomeLoss', window );">Net loss attributable to Amtech Systems, Inc.</a></td>
<td class="num">$ (1,604)<span></span>
</td>
<td class="num">$ (5,257)<span></span>
</td>
<td class="num">$ (9,119)<span></span>
</td>
<td class="num">$ (9,802)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EarningsPerShareAbstract', window );"><strong>Loss Per Share:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EarningsPerShareBasic', window );">Basic loss per share attributable to Amtech shareholders (dollars per share)</a></td>
<td class="num">$ (0.12)<span></span>
</td>
<td class="num">$ (0.53)<span></span>
</td>
<td class="num">$ (0.78)<span></span>
</td>
<td class="num">$ (1.01)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_WeightedAverageNumberOfSharesOutstandingBasic', window );">Weighted average shares outstanding (in shares)</a></td>
<td class="nump">13,103<span></span>
</td>
<td class="nump">9,843<span></span>
</td>
<td class="nump">11,644<span></span>
</td>
<td class="nump">9,694<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EarningsPerShareDiluted', window );">Diluted loss per share attributable to Amtech shareholders (dollars per share)</a></td>
<td class="num">$ (0.12)<span></span>
</td>
<td class="num">$ (0.53)<span></span>
</td>
<td class="num">$ (0.78)<span></span>
</td>
<td class="num">$ (1.01)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding', window );">Weighted average shares outstanding (in shares)</a></td>
<td class="nump">13,103<span></span>
</td>
<td class="nump">9,843<span></span>
</td>
<td class="nump">11,644<span></span>
</td>
<td class="nump">9,694<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_asys_ResearchAndDevelopmentNetOfGrantsEarned">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Research And Development, Net Of Grants</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">asys_ResearchAndDevelopmentNetOfGrantsEarned</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>asys_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CostOfGoodsAndServicesSold">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The aggregate costs related to goods produced and sold and services rendered by an entity during the reporting period. This excludes costs incurred during the reporting period related to financial services rendered and other revenue generating activities.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 225<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (SX 210.5-03.2(a),(d))<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=26872669&amp;loc=d3e20235-122688<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CostOfGoodsAndServicesSold</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EarningsPerShareAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EarningsPerShareAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EarningsPerShareBasic">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The amount of net income (loss) for the period per each share of common stock or unit outstanding during the reporting period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 260<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6371337&amp;loc=d3e3550-109257<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 225<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (SX 210.5-03.21)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=26872669&amp;loc=d3e20235-122688<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 260<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 55<br><br><br><br> -Paragraph 52<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=32703322&amp;loc=d3e4984-109258<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 260<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 2<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=7655603&amp;loc=d3e1252-109256<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 944<br><br><br><br> -SubTopic 225<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.7-04.19)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6879464&amp;loc=d3e573970-122913<br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 942<br><br><br><br> -SubTopic 225<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.9-04.23)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6879574&amp;loc=d3e536633-122882<br><br><br><br>Reference 7: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 04<br><br><br><br> -Paragraph 18<br><br><br><br> -Article 7<br><br><br><br>Reference 8: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 03<br><br><br><br> -Paragraph 20<br><br><br><br> -Article 5<br><br><br><br>Reference 9: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 04<br><br><br><br> -Paragraph 21<br><br><br><br> -Article 9<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EarningsPerShareBasic</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EarningsPerShareDiluted">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The amount of net income (loss) for the period available to each share of common stock or common unit outstanding during the reporting period and to each share or unit that would have been outstanding assuming the issuance of common shares or units for all dilutive potential common shares or units outstanding during the reporting period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 225<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (SX 210.5-03.21)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=26872669&amp;loc=d3e20235-122688<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 260<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 2<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=7655603&amp;loc=d3e1252-109256<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 04<br><br><br><br> -Paragraph 18<br><br><br><br> -Article 7<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 03<br><br><br><br> -Paragraph 20<br><br><br><br> -Article 5<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 04<br><br><br><br> -Paragraph 21<br><br><br><br> -Article 9<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EarningsPerShareDiluted</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_GrossProfit">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Aggregate revenue less cost of goods and services sold or operating expenses directly attributable to the revenue generation activity.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 225<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (SX 210.5-03.1,2)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=26872669&amp;loc=d3e20235-122688<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_GrossProfit</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Sum of operating profit and nonoperating income or expense before Income or Loss from equity method investments, income taxes, extraordinary items, and noncontrolling interest.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 235<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.4-08.(h)(1)(i))<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=26873400&amp;loc=d3e23780-122690<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeStatementAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeStatementAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxExpenseBenefit">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of current income tax expense (benefit) and deferred income tax expense (benefit) pertaining to continuing operations.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 740<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 9<br><br><br><br> -Subparagraph (a),(b)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32639-109319<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 235<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.4-08.(h))<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=26873400&amp;loc=d3e23780-122690<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Glossary Income Tax Expense (or Benefit)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6515339<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxExpenseBenefit</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetIncomeLoss">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The portion of profit or loss for the period, net of income taxes, which is attributable to the parent.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Glossary Net Income<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51831255<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 230<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 28<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3602-108585<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 944<br><br><br><br> -SubTopic 225<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.7-04.19)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6879464&amp;loc=d3e573970-122913<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 260<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6371337&amp;loc=d3e3550-109257<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 225<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (SX 210.5-03.18)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=26872669&amp;loc=d3e20235-122688<br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 944<br><br><br><br> -SubTopic 225<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.7-04.22)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6879464&amp;loc=d3e573970-122913<br><br><br><br>Reference 7: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Glossary Other Comprehensive Income<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51831270<br><br><br><br>Reference 8: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 03<br><br><br><br> -Paragraph 19<br><br><br><br> -Article 5<br><br><br><br>Reference 9: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 04<br><br><br><br> -Paragraph 20<br><br><br><br> -Article 9<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NetIncomeLoss</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetIncomeLossAttributableToNoncontrollingInterest">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of Net Income (Loss) attributable to noncontrolling interest.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 810<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 55<br><br><br><br> -Paragraph 4J<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=35736750&amp;loc=SL4591551-111686<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 810<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1A<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=18733093&amp;loc=SL4573702-111684<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NetIncomeLossAttributableToNoncontrollingInterest</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingIncomeLoss">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The net result for the period of deducting operating expenses from operating revenues.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingIncomeLoss</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherNonoperatingIncomeExpense">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The net amount of other income and expense amounts, the components of which are not separately disclosed on the income statement, resulting from ancillary business-related activities (that is, excluding major activities considered part of the normal operations of the business) also known as other nonoperating income (expense) recognized for the period. Such amounts may include: (a) dividends, (b) interest on securities, (c) net gains or losses on securities, (d) unusual costs, (e) gains or losses on foreign exchange transactions, and (f) miscellaneous other income and expense items.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 225<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (SX 210.5-03.9)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=26872669&amp;loc=d3e20235-122688<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherNonoperatingIncomeExpense</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProfitLoss">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The consolidated profit or loss for the period, net of income taxes, including the portion attributable to the noncontrolling interest.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 810<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 19<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51664549&amp;loc=SL4569616-111683<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 810<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 55<br><br><br><br> -Paragraph 4K<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=35736750&amp;loc=SL4591552-111686<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 810<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1A<br><br><br><br> -Subparagraph (a),(c)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=18733093&amp;loc=SL4573702-111684<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 810<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 55<br><br><br><br> -Paragraph 4J<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=35736750&amp;loc=SL4591551-111686<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProfitLoss</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SalesRevenueNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Total revenue from sale of goods and services rendered during the reporting period, in the normal course of business, reduced by sales returns and allowances, and sales discounts.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 225<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (SX 210.5-03.1)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=26872669&amp;loc=d3e20235-122688<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SalesRevenueNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SellingGeneralAndAdministrativeExpense">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The aggregate total costs related to selling a firm's product and services, as well as all other general and administrative expenses. Direct selling expenses (for example, credit, warranty, and advertising) are expenses that can be directly linked to the sale of specific products. Indirect selling expenses are expenses that cannot be directly linked to the sale of specific products, for example telephone expenses, Internet, and postal charges. General and administrative expenses include salaries of non-sales personnel, rent, utilities, communication, etc.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 225<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (SX 210.5-03.4)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=26872669&amp;loc=d3e20235-122688<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 330<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 30<br><br><br><br> -Paragraph 8<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51677171&amp;loc=d3e3636-108311<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SellingGeneralAndAdministrativeExpense</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The average number of shares or units issued and outstanding that are used in calculating diluted EPS or earnings per unit (EPU), determined based on the timing of issuance of shares or units in the period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 260<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 16<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=7655603&amp;loc=d3e1505-109256<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 260<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (a)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6371337&amp;loc=d3e3550-109257<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_WeightedAverageNumberOfSharesOutstandingBasic">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Number of [basic] shares or units, after adjustment for contingently issuable shares or units and other shares or units not deemed outstanding, determined by relating the portion of time within a reporting period that common shares or units have been outstanding to the total time in that period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 260<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (a)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6371337&amp;loc=d3e3550-109257<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 260<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 10<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=7655603&amp;loc=d3e1448-109256<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Glossary Weighted-Average Number of Common Shares Outstanding<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6528421<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_WeightedAverageNumberOfSharesOutstandingBasic</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>

</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>48
<FILENAME>R12.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.2.0.727</span><table class="report" border="0" cellspacing="2" id="idm140187255983440">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Major Customers and Foreign Sales<br></strong></div></th>
<th class="th" colspan="1">9 Months Ended</th>
</tr>
<tr><th class="th"><div>Jun. 30, 2015</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_MajorCustomersAndForeignSalesAbstract', window );"><strong>Major Customers and Foreign Sales [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskDisclosureTextBlock', window );">Major Customers And Foreign Sales</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Major Customers and Foreign Sales</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">During the nine months ended </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">June&#160;30, 2015</font><font style="font-family:inherit;font-size:10pt;">, </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">two</font><font style="font-family:inherit;font-size:10pt;"> customers individually represented </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">18%</font><font style="font-family:inherit;font-size:10pt;"> and </font><font style="font-family:inherit;font-size:10pt;">12%</font><font style="font-family:inherit;font-size:10pt;"> of net revenues.  During the nine months ended </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">June&#160;30, 2014</font><font style="font-family:inherit;font-size:10pt;">, </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">two</font><font style="font-family:inherit;font-size:10pt;"> customers individually represented </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">15%</font><font style="font-family:inherit;font-size:10pt;"> and </font><font style="font-family:inherit;font-size:10pt;">13%</font><font style="font-family:inherit;font-size:10pt;"> of net revenues. </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Our net revenues were to customers in the following geographic regions:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:98.6328125%;border-collapse:collapse;text-align:left;"><tr><td colspan="6" rowspan="1"></td></tr><tr><td width="66%" rowspan="1" colspan="1"></td><td width="15%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="2%" rowspan="1" colspan="1"></td><td width="15%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="5" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Nine Months Ended June 30,</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2014</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;text-indent:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">United States</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">25</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">27</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;text-indent:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Other</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Total North America</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">27</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">27</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">%</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;height:12px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;height:12px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;height:12px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;height:12px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;text-indent:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">China</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">26</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">14</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;text-indent:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Taiwan</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">15</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">18</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;text-indent:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Other</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">18</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">14</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;padding-left:18px;text-indent:0px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Total Asia</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">59</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">46</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;text-indent:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Germany</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">5</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;text-indent:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Other</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">19</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;padding-left:18px;text-indent:0px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Total Europe</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">14</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">27</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">%</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">100</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">100</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">%</font></div></td></tr></table></div></div></div><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_asys_MajorCustomersAndForeignSalesAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Major Customers and Foreign Sales [Abstract]</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">asys_MajorCustomersAndForeignSalesAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>asys_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConcentrationRiskDisclosureTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for any concentrations existing at the date of the financial statements that make an entity vulnerable to a reasonably possible, near-term, severe impact. This disclosure informs financial statement users about the general nature of the risk associated with the concentration, and may indicate the percentage of concentration risk as of the balance sheet date.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 275<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 16<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51801978&amp;loc=d3e6327-108592<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 825<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 20<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=49121117&amp;loc=d3e13531-108611<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 275<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 20<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51801978&amp;loc=d3e6404-108592<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 275<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 21<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51801978&amp;loc=d3e6442-108592<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 275<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 18<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51801978&amp;loc=d3e6351-108592<br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 825<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 21<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=49121117&amp;loc=d3e13537-108611<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConcentrationRiskDisclosureTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>

</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>49
<FILENAME>R11.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.2.0.727</span><table class="report" border="0" cellspacing="2" id="idm140187068890560">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Business Segment Information<br></strong></div></th>
<th class="th" colspan="1">9 Months Ended</th>
</tr>
<tr><th class="th"><div>Jun. 30, 2015</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SegmentReportingAbstract', window );"><strong>Segment Reporting [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SegmentReportingDisclosureTextBlock', window );">Business Segment Information</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Business Segment Information</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Following the Company's acquisition of BTU, an evaluation was conducted of the Company's organizational structure.  Beginning with the second quarter of fiscal 2015, the Company made changes to its reportable segments. Prior period amounts have been revised to conform to the current period segment reporting structure. The Company&#8217;s </font><font style="font-family:inherit;font-size:10pt;">three</font><font style="font-family:inherit;font-size:10pt;"> reportable segments are as follows:</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;font-weight:bold;">Solar - </font><font style="font-family:inherit;font-size:10pt;">In the Company&#8217;s Solar segment, we are a leading supplier of thermal processing systems, including related automation, parts and services, to the solar/photovoltaic industry and also offer PECVD (plasma-enhanced chemical vapor deposition) equipment to the global solar market.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;font-weight:bold;">Semiconductor - </font><font style="font-family:inherit;font-size:10pt;">In the Company&#8217;s Semiconductor segment, we design, manufacture, sell and service thermal processing equipment and related controls for use by leading semiconductor manufacturers, and in electronics, automotive and other industries.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;font-weight:bold;">Polishing - </font><font style="font-family:inherit;font-size:10pt;">In the Company's Polishing segment, the Company produces consumables and machinery for lapping (fine abrading) and polishing of materials, such as sapphire substrates, optical components, silicon wafers, numerous types of crystal materials, ceramics and metal components.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">On December 24, 2014, the Company acquired a </font><font style="font-family:inherit;font-size:10pt;">51%</font><font style="font-family:inherit;font-size:10pt;"> controlling interest in SoLayTec, and on January 30, 2015, the Company completed its acquisition of BTU. Beginning in the second quarter of 2015, SoLayTec&#8217;s business is included in the results for the solar segment, and BTU&#8217;s business is included in the results for the semiconductor segment.  See Note 10, &#8220;Acquisitions&#8221;, for additional information with respect to the Company&#8217;s recent acquisitions.</font></div><div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Information concerning our business segments is as follows:</font></div><div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:center;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:99.4140625%;border-collapse:collapse;text-align:left;"><tr><td colspan="16" rowspan="1"></td></tr><tr><td width="55%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="8%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="8%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="9%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="9%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Three Months Ended</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Nine Months Ended</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">June 30, 2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">June&#160;30, 2014</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">June 30, 2015</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">June 30, 2014</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="15" style="vertical-align:middle;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Net Revenues:</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Solar *</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">24,392</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4,632</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">42,141</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">21,137</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Semiconductor</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">12,945</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,132</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">25,765</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8,478</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Polishing</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,679</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,426</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8,779</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">7,063</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">40,016</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9,190</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">76,685</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">36,678</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Operating income (loss):</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Solar *</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,232</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(3,425</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,987</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(7,751</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Semiconductor</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,113</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">179</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(483</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">927</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Polishing</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">574</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">654</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,917</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,622</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Non-segment related </font></div></td><td colspan="2" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,927</font></div></td><td style="vertical-align:middle;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,279</font></div></td><td style="vertical-align:middle;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(7,409</font></div></td><td style="vertical-align:middle;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(3,682</font></div></td><td style="vertical-align:middle;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,234</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(3,871</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(7,962</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(8,884</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr></table></div></div><div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:justify;text-indent:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">* The financial statement of business units included in the Solar segment include some sales of equipment and parts to the semiconductor, silicon wafer and MEMS industries, comprising less than </font><font style="font-family:inherit;font-size:10pt;">25%</font><font style="font-family:inherit;font-size:10pt;"> of the Solar segment revenue.</font></div><div style="line-height:120%;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="8" rowspan="1"></td></tr><tr><td width="73%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="11%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="11%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">June&#160;30, <br clear="none"/>2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">September&#160;30, <br clear="none"/>2014</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:middle;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Identifiable Assets:</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Solar</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">65,212</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">56,858</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Semiconductor</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">54,559</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5,593</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Polishing</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">6,078</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">6,253</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Non-segment related</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8,206</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">21,200</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">134,055</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">89,904</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr></table></div></div></div><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SegmentReportingAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SegmentReportingAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SegmentReportingDisclosureTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for reporting segments including data and tables. Reportable segments include those that meet any of the following quantitative thresholds a) it's reported revenue, including sales to external customers and intersegment sales or transfers is 10 percent or more of the combined revenue, internal and external, of all operating segments b) the absolute amount of its reported profit or loss is 10 percent or more of the greater, in absolute amount of 1) the combined reported profit of all operating segments that did not report a loss or 2) the combined reported loss of all operating segments that did report a loss c) its assets are 10 percent or more of the combined assets of all operating segments.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 280<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 34<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51669610&amp;loc=d3e8981-108599<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 280<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 41<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51669610&amp;loc=d3e9038-108599<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 280<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 33<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51669610&amp;loc=d3e8971-108599<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 280<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 12<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51669610&amp;loc=d3e8595-108599<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 280<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51669610&amp;loc=d3e8380-108599<br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 280<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 32<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51669610&amp;loc=d3e8933-108599<br><br><br><br>Reference 7: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 280<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 26<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51669610&amp;loc=d3e8844-108599<br><br><br><br>Reference 8: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 280<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 35<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51669610&amp;loc=d3e8984-108599<br><br><br><br>Reference 9: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 280<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 40<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51669610&amp;loc=d3e9031-108599<br><br><br><br>Reference 10: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 280<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 42<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51669610&amp;loc=d3e9054-108599<br><br><br><br>Reference 11: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 280<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 10<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51669610&amp;loc=d3e8538-108599<br><br><br><br>Reference 12: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 280<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 29<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51669610&amp;loc=d3e8864-108599<br><br><br><br>Reference 13: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 280<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 31<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51669610&amp;loc=d3e8924-108599<br><br><br><br>Reference 14: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 280<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 30<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51669610&amp;loc=d3e8906-108599<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SegmentReportingDisclosureTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>

</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>50
<FILENAME>R23.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.2.0.727</span><table class="report" border="0" cellspacing="2" id="idm140187259187808">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Other Accrued Liabilities (Tables)<br></strong></div></th>
<th class="th" colspan="1">9 Months Ended</th>
</tr>
<tr><th class="th"><div>Jun. 30, 2015</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherLiabilitiesDisclosureAbstract', window );"><strong>Other Liabilities Disclosure [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherLiabilitiesTableTextBlock', window );">Other accrued liabilities</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Other accrued liabilities consist of the following:</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:602px;border-collapse:collapse;text-align:left;"><tr><td colspan="8" rowspan="1"></td></tr><tr><td width="458px" rowspan="1" colspan="1"></td><td width="9px" rowspan="1" colspan="1"></td><td width="50px" rowspan="1" colspan="1"></td><td width="4px" rowspan="1" colspan="1"></td><td width="5px" rowspan="1" colspan="1"></td><td width="9px" rowspan="1" colspan="1"></td><td width="62px" rowspan="1" colspan="1"></td><td width="4px" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">June 30, 2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">September 30, 2014</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Unearned research and development grants</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">859</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">3,989</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Other</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4,606</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,357</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5,465</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5,346</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr></table></div></div></div><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherLiabilitiesDisclosureAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherLiabilitiesDisclosureAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherLiabilitiesTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of other liabilities.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherLiabilitiesTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>

</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>51
<FILENAME>R19.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.2.0.727</span><table class="report" border="0" cellspacing="2" id="idm140187056141504">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Basis of Presentation (Tables)<br></strong></div></th>
<th class="th" colspan="1">9 Months Ended</th>
</tr>
<tr><th class="th"><div>Jun. 30, 2015</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract', window );"><strong>Organization, Consolidation and Presentation of Financial Statements [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredRevenueByArrangementDisclosureTextBlock', window );">Deferred Revenue, by Arrangement, Disclosure</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The components of deferred profit are as follows:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="8" rowspan="1"></td></tr><tr><td width="71%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="12%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="12%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">June&#160;30, <br clear="none"/>2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">September&#160;30, <br clear="none"/>2014</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Deferred revenues</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">7,536</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8,118</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Deferred costs</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,416</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,210</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Deferred profit</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5,120</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">6,908</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr></table></div></div></div><span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfInventoryCurrentTableTextBlock', window );">Schedule of Inventory, Current</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The components of inventories are as follows:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="8" rowspan="1"></td></tr><tr><td width="71%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="12%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="12%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">June&#160;30, <br clear="none"/>2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">September&#160;30, <br clear="none"/>2014</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Purchased parts and raw materials</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">13,129</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8,797</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Work-in-process</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">6,248</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4,809</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Finished goods</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">10,059</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">3,154</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">29,436</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">16,760</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr></table></div></div></div><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentTextBlock', window );">Property, Plant and Equipment</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The following is a summary of property, plant and equipment:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="8" rowspan="1"></td></tr><tr><td width="71%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="12%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="12%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">June&#160;30, <br clear="none"/>2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">September&#160;30, <br clear="none"/>2014</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Land, building and leasehold improvements</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">18,137</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">10,414</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Equipment and machinery</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">11,704</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8,189</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Furniture and fixtures</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5,418</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5,453</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">35,259</font></div></td><td style="vertical-align:bottom;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">24,056</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Accumulated depreciation</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(15,217</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(14,304</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">20,042</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9,752</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr></table></div></div></div><span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfGoodwillTextBlock', window );">Schedule of Goodwill</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The following is a summary of activity in goodwill:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:87.109375%;border-collapse:collapse;text-align:left;"><tr><td colspan="16" rowspan="1"></td></tr><tr><td width="44%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="11%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="11%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="11%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="12%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Solar</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Semiconductor</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Polishing</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Total</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="15" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;padding-left:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;&#160;&#160;Goodwill</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">12,315</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">728</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">13,043</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;padding-left:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;&#160;&#160;Accumulated impairment losses</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(4,720</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(4,720</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Carrying value at September 30, 2014</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">7,595</font></div></td><td style="vertical-align:bottom;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">728</font></div></td><td style="vertical-align:bottom;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8,323</font></div></td><td style="vertical-align:bottom;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Goodwill recognized due to acquisitions</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,324</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4,697</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">7,021</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Net exchange differences</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(301</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(301</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Carrying value at June 30, 2015</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9,618</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4,697</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">728</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">15,043</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;padding-left:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;&#160;&#160;Goodwill</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">14,155</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4,697</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">728</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">19,580</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;&#160;&#160;Accumulated impairment losses</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(4,537</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(4,537</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Carrying value at June 30, 2015</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9,618</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4,697</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">728</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">15,043</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr></table></div></div></div><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTableTextBlock', window );">Schedule of Finite-Lived Intangible Assets</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The following is a summary of intangibles:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:98.4375%;border-collapse:collapse;text-align:left;"><tr><td colspan="22" rowspan="1"></td></tr><tr><td width="20%" rowspan="1" colspan="1"></td><td width="13%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="8%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="9%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="8%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="4%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="8%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="9%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="8%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">Useful Life</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Gross Carrying Amount</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Accumulated Amortization</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Net Carrying Amount</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Gross Carrying Amount</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Accumulated Amortization</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Net Carrying Amount</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="9" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">June 30, 2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="9" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">September 30, 2014</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="19" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Non-compete agreements</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4-8 years</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,035</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,035</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,055</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(955</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">100</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Customer lists</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">10 years</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">714</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(595</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">119</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">817</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(592</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">225</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Technology</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5-10 years</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,116</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,805</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">311</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,319</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,682</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">637</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In-process research and development</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5 years</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,600</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(267</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,333</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,600</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(27</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,573</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Trade names</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">15 years</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,330</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(37</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,293</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Other</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2-12 years</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,484</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(353</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,131</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">321</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(178</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">143</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9,279</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(4,092</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5,187</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">6,112</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(3,434</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,678</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></div><span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock', window );">Schedule of Product Warranty Liability</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The following is a summary of activity in accrued warranty expense:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="8" rowspan="1"></td></tr><tr><td width="67%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="14%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="14%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Nine Months Ended June 30,</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2014</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Beginning balance</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">628</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,454</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Warranty expenditures</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(530</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(663</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Warranty provisions/(adjustment)</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">925</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(25</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Ending balance</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,023</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">766</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr></table></div></div></div><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfCompensationCostForShareBasedPaymentArrangementsAllocationOfShareBasedCompensationCostsByPlanTableTextBlock', window );">Effects of share-based compensation expense</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Stock-based compensation expense reduced the Company&#8217;s results of operations by the following amounts:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="16" rowspan="1"></td></tr><tr><td width="59%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="8%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="8%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="7%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="7%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Three Months Ended June 30,</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Nine Months Ended June 30,</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2014</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2014</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="15" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Effect on income before income taxes (1)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(296</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(230</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(864</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(603</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Effect on income taxes</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">40</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">36</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">134</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">196</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Effect on net income</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(256</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(194</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(730</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(407</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;" rowspan="1" colspan="1"></td><td rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:top" rowspan="1" colspan="1"><div style="line-height:120%;font-size:8pt;padding-left:24px;"><font style="font-family:inherit;font-size:8pt;">(1)</font></div></td><td style="vertical-align:top;" rowspan="1" colspan="1"><div style="line-height:120%;text-align:justify;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">Stock-based compensation expense is included in selling, general and administrative expenses.</font></div></td></tr></table></div><span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock', window );">Schedule of Share-based Compensation, Stock Options, Activity</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Stock option transactions and the options outstanding are summarized as follows:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="16" rowspan="1"></td></tr><tr><td width="49%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="10%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="10%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="10%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="10%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="15" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Nine Months Ended June 30,</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2014</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Options</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Weighted</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Average</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Exercise</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Price</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Options</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Weighted</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Average</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Exercise</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Price</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Outstanding at beginning of period</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,063,324</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">7.37</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,059,417</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">6.71</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Granted</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">327,500</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9.74</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">272,906</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">7.01</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Assumed - merger</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">367,229</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">14.19</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Exercised</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(94,454</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5.51</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(263,358</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4.31</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Forfeited</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(26,571</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">29.48</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(4,546</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8.71</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Outstanding at end of period</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,637,028</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9.12</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,064,419</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">7.37</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Exercisable at end of period</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,005,690</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9.75</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">663,220</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8.14</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Weighted average fair value of options </font></div><div style="font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">granted during the period</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5.91</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4.38</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr></table></div></div></div><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock', window );">Schedule of Share-based Payment Award, Stock Options, Valuation Assumptions</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The fair value of options was estimated at the grant date using the Black-Scholes option pricing model with the following assumptions:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="4" rowspan="1"></td></tr><tr><td width="67%" rowspan="1" colspan="1"></td><td width="16%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="16%" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Nine Months Ended June 30,</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2014</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Risk free interest rate</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Expected life</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">6 years</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">6 years</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Dividend rate</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">0%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">0%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Volatility</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">67%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">69%</font></div></td></tr></table></div></div></div><span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock', window );">Schedule of Share-based Compensation, Restricted Stock Activity</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Restricted stock transactions and awards outstanding are summarized as follows:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="14" rowspan="1"></td></tr><tr><td width="49%" rowspan="1" colspan="1"></td><td width="11%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="10%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="11%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="10%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="13" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Nine Months Ended June 30,</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="6" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="6" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2014</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Awards</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Weighted</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Average</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Grant Date</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Fair Value</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Awards</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Weighted</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Average</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Grant Date</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Fair Value</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Beginning Outstanding</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">35,203</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">10.13</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">69,154</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">10.13</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Released</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(21,663</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">11.47</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(30,828</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">10.08</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Ending Outstanding</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">13,540</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">7.98</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">38,326</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">10.17</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr></table></div></div></div><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_ResearchAndDevelopmentExpenseTableTextBlock', window );">Research and Development Expense</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The table below shows gross research and development expenses and grants earned:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:99.0234375%;border-collapse:collapse;text-align:left;"><tr><td colspan="16" rowspan="1"></td></tr><tr><td width="41%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="12%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="12%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="12%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="12%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Three Months Ended</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Nine Months Ended</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">June&#160;30, <br clear="none"/>2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">June&#160;30, <br clear="none"/>2014</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">June&#160;30, <br clear="none"/>2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">June&#160;30, <br clear="none"/>2014</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">(dollars in thousands)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Research, development and engineering</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">3,650</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">3,054</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9,763</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8,442</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Grants earned</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(2,342</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,655</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(5,869</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(3,999</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Net research, development and engineering</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,308</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,399</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">3,894</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4,443</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr></table></div></div></div><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_asys_ResearchAndDevelopmentExpenseTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Research and Development Expense [Table Text Block]</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">asys_ResearchAndDevelopmentExpenseTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>asys_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredRevenueByArrangementDisclosureTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of the type of arrangements and the corresponding amounts that comprise the current and noncurrent balance of deferred revenue as of the balance sheet date.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 605<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SAB TOPIC 13.A.4(a).Q1)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=27012821&amp;loc=d3e214044-122780<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 8<br><br><br><br> -Subparagraph (b)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=28358313&amp;loc=d3e6935-107765<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Staff Accounting Bulletin (SAB)<br><br><br><br> -Number Topic 13<br><br><br><br> -Section A<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredRevenueByArrangementDisclosureTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of physical assets used in the normal conduct of business and not intended for resale. Includes, but is not limited to, balances by class of assets, depreciation and depletion expense and method used, including composite depreciation, and accumulated deprecation.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.13)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 360<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6391035&amp;loc=d3e2868-110229<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 02<br><br><br><br> -Paragraph 13<br><br><br><br> -Subparagraph b<br><br><br><br> -Article 5<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfCompensationCostForShareBasedPaymentArrangementsAllocationOfShareBasedCompensationCostsByPlanTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of the amount of total share-based compensation cost, including the amounts attributable to each share-based compensation plan and any related tax benefits.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 718<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (h)(1)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfCompensationCostForShareBasedPaymentArrangementsAllocationOfShareBasedCompensationCostsByPlanTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of assets, excluding financial assets and goodwill, lacking physical substance with a finite life, by either major class or business segment.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 350<br><br><br><br> -SubTopic 30<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (a)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=26713463&amp;loc=d3e16323-109275<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 350<br><br><br><br> -SubTopic 30<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (a)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=26713463&amp;loc=d3e16265-109275<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfGoodwillTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of goodwill by reportable segment and in total which includes a rollforward schedule.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 350<br><br><br><br> -SubTopic 20<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=35741047&amp;loc=d3e13816-109267<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 350<br><br><br><br> -SubTopic 20<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 2<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=35741047&amp;loc=d3e13854-109267<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfGoodwillTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfInventoryCurrentTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of the carrying amount as of the balance sheet date of merchandise, goods, commodities, or supplies held for future sale or to be used in manufacturing, servicing or production process.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6361739&amp;loc=d3e7789-107766<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 2<br><br><br><br> -Paragraph 6<br><br><br><br> -Subparagraph a,b,c<br><br><br><br> -Article 5<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfInventoryCurrentTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of the changes in the guarantor's aggregate product warranty liability, including the beginning balance of the aggregate product warranty liability, the aggregate reductions in that liability for payments made (in cash or in kind) under the warranty, the aggregate changes in the liability for accruals related to product warranties issued during the reporting period, the aggregate changes in the liability for accruals related to preexisting warranties (including adjustments related to changes in estimates), and the ending balance of the aggregate product warranty liability.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 460<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 8<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51674963&amp;loc=d3e12565-110249<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of the number and weighted-average exercise prices (or conversion ratios) for share options (or share units) that were outstanding at the beginning and end of the year, vested and expected to vest, exercisable or convertible at the end of the year, and the number of share options or share units that were granted, exercised or converted, forfeited, and expired during the year.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 718<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (c)(1)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of the significant assumptions used during the year to estimate the fair value of stock options, including, but not limited to: (a) expected term of share options and similar instruments, (b) expected volatility of the entity's shares, (c) expected dividends, (d) risk-free rate(s), and (e) discount for post-vesting restrictions.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 718<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (f)(2)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of the number and weighted-average grant date fair value for restricted stock and restricted stock units that were outstanding at the beginning and end of the year, and the number of restricted stock and restricted stock units that were granted, vested, or forfeited during the year.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>

</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>52
<FILENAME>R15.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.2.0.727</span><table class="report" border="0" cellspacing="2" id="idm140187068940480">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Commitments and Contingencies<br></strong></div></th>
<th class="th" colspan="1">9 Months Ended</th>
</tr>
<tr><th class="th"><div>Jun. 30, 2015</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CommitmentsAndContingenciesDisclosureAbstract', window );"><strong>Commitments and Contingencies Disclosure [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CommitmentsAndContingenciesDisclosureTextBlock', window );">Commitments and Contingencies</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Commitments and Contingencies</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Purchase Obligations</font><font style="font-family:inherit;font-size:10pt;"> &#8211; As of </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">June&#160;30, 2015</font><font style="font-family:inherit;font-size:10pt;"> the Company had purchase obligations in the amount of </font><font style="font-family:inherit;font-size:10pt;">$14.1 million</font><font style="font-family:inherit;font-size:10pt;"> compared to </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">$7.9 million</font><font style="font-family:inherit;font-size:10pt;"> as of </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">September&#160;30, 2014</font><font style="font-family:inherit;font-size:10pt;">. These purchase obligations consist of outstanding purchase orders for goods and services. While the amount represents purchase agreements, the actual amounts to be paid may be less if any agreements are renegotiated, canceled or terminated.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Development projects</font><font style="font-family:inherit;font-size:10pt;"> &#8211;  In fiscal 2014, Tempress Systems, Inc. ("Tempress") entered into an agreement with the Energy Research Centre of the Netherlands ("ECN"), a Netherlands government sponsored research institute, for a joint research and development project.  Under the terms of the agreement, Tempress sold an ion implanter ("Equipment") to ECN for </font><font style="font-family:inherit;font-size:10pt;">$1.4</font><font style="font-family:inherit;font-size:10pt;"> million.  Both Tempress and ECN are performing research and development projects utilizing the Equipment at the ECN facilities. Each party to the agreement will have </font><font style="font-family:inherit;font-size:10pt;">100%</font><font style="font-family:inherit;font-size:10pt;"> rights to the results of the projects developed separately by the individual parties.  Any results co-developed will be jointly owned.  Over the </font><font style="font-family:inherit;font-size:10pt;">four</font><font style="font-family:inherit;font-size:10pt;">-year period of the agreement, Tempress is required to contribute </font><font style="font-family:inherit;font-size:10pt;">$1.4 million</font><font style="font-family:inherit;font-size:10pt;"> to the project in the form of  installation of the Equipment, acceptance testing, project meeting attendance, training, parts, and service, including keeping the equipment in good condition and repair for the first </font><font style="font-family:inherit;font-size:10pt;">two</font><font style="font-family:inherit;font-size:10pt;"> years of the agreement.    </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In 2013, Shanghai Kingstone Semiconductor Company Ltd. ("Kingstone") entered into an agreement with certain government agencies in Shanghai, China for the purpose of developing ion implant technology for non-solar applications. Kingstone has substantially completed the first phase of this development project and received </font><font style="font-family:inherit;font-size:10pt;">$4.1 million</font><font style="font-family:inherit;font-size:10pt;"> of grant funds for the project.  Kingstone is investigating options for securing </font><font style="font-family:inherit;font-size:10pt;">$6.1 million</font><font style="font-family:inherit;font-size:10pt;"> of its commitment to the project.  Amtech owns </font><font style="font-family:inherit;font-size:10pt;">55%</font><font style="font-family:inherit;font-size:10pt;"> of Kingstone Technology Hong Kong Limited, which owns </font><font style="font-family:inherit;font-size:10pt;">100%</font><font style="font-family:inherit;font-size:10pt;"> of Kingstone.  Amtech has no obligation or plan to fund Kingstone's commitments under this agreement.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">EPA Accrual</font><font style="font-family:inherit;font-size:10pt;"> - As a result of the merger with BTU, the Company assumed BTU&#8217;s proportional responsibility for clean-up costs at a Superfund site.  As an equipment manufacturer, BTU generated and disposed of small quantities of solid waste that were considered hazardous under Environment Protection Agency (&#8220;EPA&#8221;) regulations. Because BTU historically used a waste disposal firm that disposed of the solid waste at a site that the EPA designated as a Superfund site, BTU was named by the EPA as one of the entities responsible for a portion of the expected clean-up costs. Based on the Company's proportional responsibility, as negotiated with and agreed to by the EPA, the Company's liability related to this matter is </font><font style="font-family:inherit;font-size:10pt;">$0.2</font><font style="font-family:inherit;font-size:10pt;"> million.  As of June 30, 2015, the remaining liability is </font><font style="font-family:inherit;font-size:10pt;">$0.1</font><font style="font-family:inherit;font-size:10pt;"> million, which is included in Other Accrued Liabilities on the Condensed Consolidated Balance Sheet as of June 30, 2015.  In 2009, in accordance with the agreement, the Company established a letter of credit for </font><font style="font-family:inherit;font-size:10pt;">$0.2</font><font style="font-family:inherit;font-size:10pt;"> million to the benefit of the EPA for potential cash payments as settlements for the Company&#8217;s proportional liability.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Litigation</font><font style="font-family:inherit;font-size:10pt;"> &#8211; The Company and its subsidiaries are defendants from time to time in actions for matters arising out of their business operations. On October 21, 2014, the Company entered into an Agreement and Plan of Merger (the "Merger Agreement") by and among the Company,  BTU Merger Sub, Inc., a Delaware corporation (the "Merger Sub"), and BTU.   Shortly after the Company entered into the Merger Agreement with BTU, two separate putative stockholder class action complaints were filed in the Court of Chancery of the State of Delaware (together, the "Stockholder Actions"). The first was filed on November 4, 2014 and the second on November 17, 2014, purportedly on behalf of BTU&#8217;s public stockholders, against BTU, the members of the BTU Board, Amtech and Merger Sub.  The Stockholder Actions were consolidated into one action on December 4, 2014.  The complaints generally alleged that, in connection with entering into the Merger Agreement, the BTU board of directors breached certain fiduciary duties owed to BTU's stockholders.  The complaints sought various forms of declaratory and injunctive relief, as well as compensatory damages. </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;padding-bottom:10px;text-align:justify;font-size:11pt;"><font style="font-family:inherit;font-size:10pt;">On January&#160;16, 2015, the Company and BTU, along with the other defendants named therein, entered into a memorandum of understanding (the &#8220;MOU&#8221;) to settle the Stockholder Actions. Pursuant to the MOU, the parties to the Stockholder Actions agreed to resolve the claims alleged and the Company and BTU agreed to make certain additional disclosures regarding the Merger.</font><font style="font-family:inherit;font-size:11pt;">  On June 22, 2015, the Company and BTU, along with the other defendants named therein, filed a Stipulation and Agreement of Compromise and Settlement (the &#8220;Stipulation of Settlement&#8221;) with the Court of Chancery in the State of Delaware to memorialize the MOU. The Stipulation of Settlement provides for a release of all claims against the Company and BTU, along with the other defendants named therein, subject to an exception for certain securities law claims. In addition, the Stipulation of Settlement provides that BTU will be responsible for the payment of certain amounts in plaintiffs&#8217; attorney fees and expenses in connection with the settlement. The Stipulation of Settlement is subject to court approval. The Company and BTU entered into the Stipulation of Settlement solely to avoid the costs, risks and uncertainties inherent in litigation and without admitting any liability or wrongdoing. There can be no assurance that the court will approve the Stipulation of Settlement. In such event, the proposed settlement as contemplated by the Stipulation of Settlement may be terminated.</font></div><div style="line-height:120%;padding-bottom:10px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The merger was consummated on January 30, 2015.  The plaintiffs&#8217; attorney fees and expenses were reflected as a liability on the opening balance sheet of BTU on the date of the merger.  See Note 10, "Acquisitions," for more information on the Merger Agreement.</font></div></div><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CommitmentsAndContingenciesDisclosureAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CommitmentsAndContingenciesDisclosureAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CommitmentsAndContingenciesDisclosureTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for commitments and contingencies.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 825<br><br><br><br> -SubTopic 20<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6449706&amp;loc=d3e16207-108621<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 460<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 8<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51674963&amp;loc=d3e12565-110249<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 450<br><br><br><br> -SubTopic 20<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 4<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=25496072&amp;loc=d3e14435-108349<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.25)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 440<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 2<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6394976&amp;loc=d3e25287-109308<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CommitmentsAndContingenciesDisclosureTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>

</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>53
<FILENAME>R13.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.2.0.727</span><table class="report" border="0" cellspacing="2" id="idm140187068890560">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Other Accrued Liabilities<br></strong></div></th>
<th class="th" colspan="1">9 Months Ended</th>
</tr>
<tr><th class="th"><div>Jun. 30, 2015</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherLiabilitiesDisclosureAbstract', window );"><strong>Other Liabilities Disclosure [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherLiabilitiesDisclosureTextBlock', window );">Other Accrued Liabilities</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Other Accrued Liabilities</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Other accrued liabilities consist of the following:</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:602px;border-collapse:collapse;text-align:left;"><tr><td colspan="8" rowspan="1"></td></tr><tr><td width="458px" rowspan="1" colspan="1"></td><td width="9px" rowspan="1" colspan="1"></td><td width="50px" rowspan="1" colspan="1"></td><td width="4px" rowspan="1" colspan="1"></td><td width="5px" rowspan="1" colspan="1"></td><td width="9px" rowspan="1" colspan="1"></td><td width="62px" rowspan="1" colspan="1"></td><td width="4px" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">June 30, 2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">September 30, 2014</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Unearned research and development grants</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">859</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">3,989</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Other</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4,606</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,357</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5,465</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5,346</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr></table></div></div></div><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherLiabilitiesDisclosureAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherLiabilitiesDisclosureAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherLiabilitiesDisclosureTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for other liabilities.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.20,24)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherLiabilitiesDisclosureTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>

</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>54
<FILENAME>R14.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.2.0.727</span><table class="report" border="0" cellspacing="2" id="idm140187068890560">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Long-term Debt<br></strong></div></th>
<th class="th" colspan="1">9 Months Ended</th>
</tr>
<tr><th class="th"><div>Jun. 30, 2015</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtDisclosureAbstract', window );"><strong>Debt Disclosure [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LongTermDebtTextBlock', window );">Long-term Debt</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Long-term Debt</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In January 2015, the Company acquired </font><font style="font-family:inherit;font-size:10pt;">$7.2</font><font style="font-family:inherit;font-size:10pt;"> million of long-term debt as part of the BTU merger.  The debt acquired is a mortgage note secured by its real property in Billerica, Massachusetts, and is stated at fair market value of </font><font style="font-family:inherit;font-size:10pt;">$7.0</font><font style="font-family:inherit;font-size:10pt;"> million as of June 30, 2015. The debt acquired has an interest rate of </font><font style="font-family:inherit;font-size:10pt;">4.4%</font><font style="font-family:inherit;font-size:10pt;"> through September 26, 2018, at which time the interest rate will be adjusted to a per annum fixed rate equal to the aggregate of the Federal Home Loan Board Five Year Classic Advance Rate plus two hundred forty basis points.  The maturity date of the debt acquired is September 26, 2023.  All outstanding principal and accrued and unpaid interest will be due and payable on the maturity date.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In December 2014, the Company acquired long-term debt of </font><font style="font-family:inherit;font-size:10pt;">$2.0</font><font style="font-family:inherit;font-size:10pt;"> million as part of the SoLayTec acquisition.  The debt is stated at fair market value of </font><font style="font-family:inherit;font-size:10pt;">$2.3</font><font style="font-family:inherit;font-size:10pt;"> million as of June 30, 2015.  The debt acquired has interest rates ranging from </font><font style="font-family:inherit;font-size:10pt;">5.95%</font><font style="font-family:inherit;font-size:10pt;"> to </font><font style="font-family:inherit;font-size:10pt;">10%</font><font style="font-family:inherit;font-size:10pt;"> and maturity dates ranging from fiscal 2017 to fiscal 2021.</font></div></div><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtDisclosureAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtDisclosureAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LongTermDebtTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for long-term debt.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.22)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LongTermDebtTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>

</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>55
<FILENAME>R16.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.2.0.727</span><table class="report" border="0" cellspacing="2" id="idm140187069418288">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Acquisition<br></strong></div></th>
<th class="th" colspan="1">9 Months Ended</th>
</tr>
<tr><th class="th"><div>Jun. 30, 2015</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_BusinessCombinationsAbstract', window );"><strong>Business Combinations [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_BusinessCombinationDisclosureTextBlock', window );">Acquisition</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Acquisitions</font></div><div style="line-height:120%;text-align:left;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;font-weight:bold;">Merger with BTU International</font></div><div style="line-height:120%;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">On </font><font style="font-family:inherit;font-size:10pt;">January&#160;30, 2015</font><font style="font-family:inherit;font-size:10pt;">, the Company completed its acquisition of BTU (the "Merger").  In connection with the Merger, each share of BTU common stock outstanding immediately prior to the effective time of the Merger, including BTU restricted stock units that vested immediately prior to the effective time of the Merger, was converted to </font><font style="font-family:inherit;font-size:10pt;">0.3291</font><font style="font-family:inherit;font-size:10pt;"> shares of common stock of the Company.  The Company issued </font><font style="font-family:inherit;font-size:10pt;">3,185,852</font><font style="font-family:inherit;font-size:10pt;"> shares of Company common stock on the Merger date.  Pursuant to the terms of the Merger Agreement, options to purchase BTU common stock held by BTU employees were assumed by the Company and converted into options to purchase shares of Company common stock on substantially the same terms and conditions as were applicable to such BTU stock options, with appropriate adjustments based upon the exchange ratio of </font><font style="font-family:inherit;font-size:10pt;">0.3291</font><font style="font-family:inherit;font-size:10pt;"> to the exercise price and the number of shares of Company common stock subject to such stock option. As a result of the Merger, the company owns 100% of the outstanding stock of BTU.</font></div><div style="line-height:120%;padding-top:13px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The following unaudited pro forma data has been prepared by adjusting the Company&#8217;s historical data to give effect to the Merger as if it had occurred on October&#160;1, 2013 and includes adjustments for depreciation expense, amortization of intangibles, and the effect of other purchase accounting adjustments:</font></div><div style="line-height:120%;padding-top:13px;text-align:center;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:99.0234375%;border-collapse:collapse;text-align:left;"><tr><td colspan="16" rowspan="1"></td></tr><tr><td width="44%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="11%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="11%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="2%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="11%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="11%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Quarter Ended</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Nine Months Ended</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">June 30, 2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">June 30, 2014</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">June 30, 2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">June 30, 2014</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="15" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;font-weight:bold;">(dollars in thousands, except per share data)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Revenue, net</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">40,016</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">25,625</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">92,988</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">75,791</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Net loss</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,669</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(4,507</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(11,028</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(19,641</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Earnings per share available to Amtech stockholders:</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Basic</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(0.13</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(0.35</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(0.84</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1.52</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Diluted</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(0.13</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(0.35</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(0.84</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1.52</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr></table></div><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;padding-top:13px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The unaudited pro forma financial data was prepared in accordance with the acquisition method of accounting under existing standards and is not necessarily indicative of the results of operations that would have occurred if the Merger had been completed on the date indicated, nor is it indicative of the future operating results of the Company.</font></div><div style="line-height:120%;padding-top:13px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The unaudited pro forma results do not reflect certain future events that either have occurred or may occur after the Merger, including, but not limited to, the anticipated realization of ongoing cost reductions from other operating synergies in subsequent periods. They also do not give effect to certain charges that the Company expects to incur in connection with the Merger, including, but not limited to, additional professional fees and other restructuring costs.</font></div><div style="line-height:120%;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;The Merger was an all-stock transaction. The following table summarizes the consideration transferred:</font></div><div style="line-height:120%;padding-top:13px;text-align:center;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:81.640625%;border-collapse:collapse;text-align:left;"><tr><td colspan="4" rowspan="1"></td></tr><tr><td width="76%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="22%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;">(In thousands, except per share amounts)</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#ccecff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">BTU common shares and restricted stock units exchanged</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#ccecff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9,681</font></div></td><td style="vertical-align:bottom;background-color:#ccecff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Exchange ratio</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">0.3291</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#ccecff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Amtech common stock issued for consideration</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#ccecff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">3,186</font></div></td><td style="vertical-align:bottom;background-color:#ccecff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Amtech common stock per share price on January 30, 2015</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8.20</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#ccecff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Consideration for BTU common shares and restricted stock units</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">26,125</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Vested BTU stock options exchanged for Amtech stock options</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">500</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#ccecff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Total fair value of consideration transferred</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">26,625</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr></table></div><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;padding-top:13px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;padding-top:13px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The following table summarizes the allocation of the consideration for the assets acquired and liabilities assumed on </font><font style="font-family:inherit;font-size:10pt;">January&#160;30, 2015</font><font style="font-family:inherit;font-size:10pt;">:</font></div><div style="line-height:120%;padding-top:13px;text-align:center;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:81.640625%;border-collapse:collapse;text-align:left;"><tr><td colspan="4" rowspan="1"></td></tr><tr><td width="77%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="21%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;">(In thousands)</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Fair value of net tangible assets acquired</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">20,598</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Goodwill</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4,697</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Identifiable intangible assets</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,330</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Total consideration allocated</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">26,625</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr></table></div><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;padding-top:13px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The primary acquired intangible asset is the trade name "BTU", which has a </font><font style="font-family:inherit;font-size:10pt;">15</font><font style="font-family:inherit;font-size:10pt;"> year useful life. Goodwill of </font><font style="font-family:inherit;font-size:10pt;">$4.7</font><font style="font-family:inherit;font-size:10pt;"> million was assigned to the semiconductor segment. Goodwill will not be amortized but instead tested for impairment at least annually (more frequently if certain indicators are present). Goodwill as of June 30, 2015, is not expected to be deductible for tax purposes.  As of&#160;June 30, 2015, the accounting for the BTU acquisition has not been finalized due to pending items on the valuation of acquired assets and liabilities. </font></div><div style="line-height:120%;padding-top:13px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Under the guidance on accounting for business combinations, merger and integration costs are not included as components of consideration transferred but are accounted for as expenses in the period in which the costs are incurred. Transaction-related expenses were not material for the three months ended June 30, 2015 and 2014.  Transaction-related expenses of </font><font style="font-family:inherit;font-size:10pt;"> </font><font style="font-family:inherit;font-size:10pt;">$1.8</font><font style="font-family:inherit;font-size:10pt;"> million and </font><font style="font-family:inherit;font-size:10pt;">$0.2</font><font style="font-family:inherit;font-size:10pt;"> million for the nine months ended June 30, 2015 and 2014, respectively, are included in the Selling, General and Administrative line in the Condensed Consolidated Statements of Operations. </font></div><div style="line-height:120%;text-align:left;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;font-weight:bold;">Acquisition of SoLayTec B.V.</font></div><div style="line-height:120%;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">On December 24, 2014, the Company expanded our participation in the solar market by acquiring a </font><font style="font-family:inherit;font-size:10pt;">51%</font><font style="font-family:inherit;font-size:10pt;"> controlling interest in SoLayTec, which provides ALD systems used in high efficiency solar cells, for a total purchase price consideration of </font><font style="font-family:inherit;font-size:10pt;">$1.9 million</font><font style="font-family:inherit;font-size:10pt;">.&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;</font></div><div style="line-height:120%;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The Company consolidated the results of operations for SoLayTec beginning on December 24, 2014, the effective date of the acquisition, which were not material to our consolidated statement of operations for the three and nine months ended June 30, 2015.  Additionally, the Company's historical results would not have been materially affected by the acquisition of SoLayTec and, accordingly, has not presented pro forma information as if the acquisition had been completed at the beginning of each period presented in our consolidated statements of operations.  As of&#160;June 30, 2015, the accounting for the SoLayTec acquisition has not been finalized due to pending items on the valuation of acquired assets and liabilities.</font></div></div><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_BusinessCombinationDisclosureTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for a business combination (or series of individually immaterial business combinations) completed during the period, including background, timing, and recognized assets and liabilities. The disclosure may include leverage buyout transactions (as applicable).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 805<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 5<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=56956515&amp;loc=d3e1497-128463<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 805<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 4<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=56956515&amp;loc=d3e1490-128463<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 805<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 2<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=56956515&amp;loc=d3e1392-128463<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 805<br><br><br><br> -SubTopic 30<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 4<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=35744584&amp;loc=d3e7008-128479<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 805<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 3<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=56956515&amp;loc=d3e1486-128463<br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 805<br><br><br><br> -SubTopic 30<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=35744584&amp;loc=d3e6927-128479<br><br><br><br>Reference 7: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 805<br><br><br><br> -SubTopic 20<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=56956791&amp;loc=d3e4845-128472<br><br><br><br>Reference 8: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 805<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 6<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=56956515&amp;loc=d3e1500-128463<br><br><br><br>Reference 9: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 805<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 7<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=56956515&amp;loc=d3e1524-128463<br><br><br><br>Reference 10: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 805<br><br><br><br> -SubTopic 30<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 3<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=35744584&amp;loc=d3e7000-128479<br><br><br><br>Reference 11: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 805<br><br><br><br> -SubTopic 20<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 2<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=56956791&amp;loc=d3e4922-128472<br><br><br><br>Reference 12: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 805<br><br><br><br> -SubTopic 20<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 4<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=56956791&amp;loc=d3e4934-128472<br><br><br><br>Reference 13: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 805<br><br><br><br> -SubTopic 20<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 3<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=56956791&amp;loc=d3e4926-128472<br><br><br><br>Reference 14: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 805<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=56956515&amp;loc=d3e1383-128463<br><br><br><br>Reference 15: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 805<br><br><br><br> -SubTopic 30<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 2<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=35744584&amp;loc=d3e6996-128479<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_BusinessCombinationDisclosureTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_BusinessCombinationsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_BusinessCombinationsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>

</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>56
<FILENAME>R34.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.2.0.727</span><table class="report" border="0" cellspacing="2" id="idm140187068712512">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Basis of Presentation - Cash Equivalents (Details) - USD ($)<br> $ in Millions</strong></div></th>
<th class="th"><div>Jun. 30, 2015</div></th>
<th class="th"><div>Sep. 30, 2014</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract', window );"><strong>Organization, Consolidation and Presentation of Financial Statements [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_MoneyMarketFundsAtCarryingValue', window );">Money market funds</a></td>
<td class="nump">$ 9.6<span></span>
</td>
<td class="nump">$ 17.0<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_MoneyMarketFundsAtCarryingValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Investment in short-term money-market instruments (such as commercial paper, banker's acceptances, repurchase agreements, government securities, certificates of deposit, and so forth) which are highly liquid (that is, readily convertible to known amounts of cash) and so near their maturity that they present an insignificant risk of changes in value because of changes in interest rates. Generally, only investments with original maturities of three months or less qualify as cash equivalents by definition. Original maturity means an original maturity to the entity holding the investment. For example, both a three-month US Treasury bill and a three-year Treasury note purchased three months from maturity qualify as cash equivalents. However, a Treasury note purchased three-years ago does not become a cash equivalent when its remaining maturity is three months.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Glossary Cash Equivalents<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6507016<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_MoneyMarketFundsAtCarryingValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>

</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>57
<FILENAME>R21.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.2.0.727</span><table class="report" border="0" cellspacing="2" id="idm140187056275296">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Business Segment Information (Tables)<br></strong></div></th>
<th class="th" colspan="1">9 Months Ended</th>
</tr>
<tr><th class="th"><div>Jun. 30, 2015</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SegmentReportingAbstract', window );"><strong>Segment Reporting [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTextBlock', window );">Schedule of Segment Reporting Information, by Segment</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Information concerning our business segments is as follows:</font></div><div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:center;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:99.4140625%;border-collapse:collapse;text-align:left;"><tr><td colspan="16" rowspan="1"></td></tr><tr><td width="55%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="8%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="8%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="9%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="9%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Three Months Ended</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Nine Months Ended</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">June 30, 2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">June&#160;30, 2014</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">June 30, 2015</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">June 30, 2014</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="15" style="vertical-align:middle;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Net Revenues:</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Solar *</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">24,392</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4,632</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">42,141</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">21,137</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Semiconductor</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">12,945</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,132</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">25,765</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8,478</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Polishing</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,679</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,426</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8,779</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">7,063</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">40,016</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9,190</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">76,685</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">36,678</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Operating income (loss):</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Solar *</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,232</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(3,425</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,987</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(7,751</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Semiconductor</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,113</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">179</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(483</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">927</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Polishing</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">574</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">654</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,917</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,622</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Non-segment related </font></div></td><td colspan="2" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,927</font></div></td><td style="vertical-align:middle;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,279</font></div></td><td style="vertical-align:middle;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(7,409</font></div></td><td style="vertical-align:middle;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(3,682</font></div></td><td style="vertical-align:middle;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,234</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(3,871</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(7,962</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(8,884</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr></table></div></div><div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:justify;text-indent:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">* The financial statement of business units included in the Solar segment include some sales of equipment and parts to the semiconductor, silicon wafer and MEMS industries, comprising less than </font><font style="font-family:inherit;font-size:10pt;">25%</font><font style="font-family:inherit;font-size:10pt;"> of the Solar segment revenue.</font></div><div style="line-height:120%;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="8" rowspan="1"></td></tr><tr><td width="73%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="11%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="11%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">June&#160;30, <br clear="none"/>2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">September&#160;30, <br clear="none"/>2014</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:middle;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Identifiable Assets:</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Solar</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">65,212</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">56,858</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Semiconductor</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">54,559</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5,593</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Polishing</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">6,078</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">6,253</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Non-segment related</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8,206</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">21,200</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">134,055</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">89,904</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr></table></div></div></div><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of the profit or loss and total assets for each reportable segment. An entity discloses certain information on each reportable segment if the amounts (a) are included in the measure of segment profit or loss reviewed by the chief operating decision maker or (b) are otherwise regularly provided to the chief operating decision maker, even if not included in that measure of segment profit or loss.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 280<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 30<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51669610&amp;loc=d3e8906-108599<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 280<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 25<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51669610&amp;loc=d3e8813-108599<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 280<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 21<br><br><br><br> -Subparagraph (b)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51669610&amp;loc=d3e8721-108599<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 350<br><br><br><br> -SubTopic 20<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=35741047&amp;loc=d3e13816-109267<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 280<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 22<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51669610&amp;loc=d3e8736-108599<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfSegmentReportingInformationBySegmentTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SegmentReportingAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SegmentReportingAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>

</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>58
<FILENAME>R26.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.2.0.727</span><table class="report" border="0" cellspacing="2" id="idm140187061291712">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Basis of Presentation - Concentrations of Credit Risk (Details) - 9 months ended Jun. 30, 2015 - Customers<br></strong></div></th>
<th class="th"><div>Total</div></th>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_AccountsReceivableMember', window );">Accounts Receivable [Member]</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskLineItems', window );"><strong>Concentration Risk [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_NumberOfCustomers', window );">Number of customers</a></td>
<td class="nump">1<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_AccountsReceivableMember', window );">Accounts Receivable [Member] | Customer One [Member]</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskLineItems', window );"><strong>Concentration Risk [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskPercentage1', window );">Concentration risk, percentage</a></td>
<td class="nump">12.00%<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StatementGeographicalAxis=country_US', window );">UNITED STATES | Cash and Cash Equivalents and Restricted Cash [Member]</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskLineItems', window );"><strong>Concentration Risk [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskPercentage1', window );">Concentration risk, percentage</a></td>
<td class="nump">60.00%<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_asys_NumberOfCustomers">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Number Of Customers</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">asys_NumberOfCustomers</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>asys_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:integerItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConcentrationRiskLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConcentrationRiskLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConcentrationRiskPercentage1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>For an entity that discloses a concentration risk in relation to quantitative amount, which serves as the "benchmark" (or denominator) in the equation, this concept represents the concentration percentage derived from the division.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 275<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 18<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51801978&amp;loc=d3e6351-108592<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 825<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 20<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=49121117&amp;loc=d3e13531-108611<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 275<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 20<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51801978&amp;loc=d3e6404-108592<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 825<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 21<br><br><br><br> -Subparagraph (a)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=49121117&amp;loc=d3e13537-108611<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConcentrationRiskPercentage1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_AccountsReceivableMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_AccountsReceivableMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConcentrationRiskByTypeAxis=asys_CustomerOneMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConcentrationRiskByTypeAxis=asys_CustomerOneMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StatementGeographicalAxis=country_US">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StatementGeographicalAxis=country_US</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConcentrationRiskByBenchmarkAxis=asys_CashAndCashEquivalentsAndRestrictedCashMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConcentrationRiskByBenchmarkAxis=asys_CashAndCashEquivalentsAndRestrictedCashMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>

</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>59
<FILENAME>R49.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.2.0.727</span><table class="report" border="0" cellspacing="2" id="idm140187061198928">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Subsequent Event (Details) - USD ($)<br> $ in Millions</strong></div></th>
<th class="th" colspan="1">1 Months Ended</th>
<th class="th" colspan="1"></th>
</tr>
<tr>
<th class="th"><div>Jul. 31, 2015</div></th>
<th class="th"><div>Jun. 30, 2015</div></th>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis=asys_KingstoneHongKongMember', window );">Kingstone Hong Kong</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SubsequentEventLineItems', window );"><strong>Subsequent Event [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EquityMethodInvestmentOwnershipPercentage', window );">Equity method investment, ownership percentage</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">55.00%<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RestructuringPlanAxis=asys_RestructuringOfInvestmentInvestmentAgreementMember', window );">Restructuring Of Investment, Investment Agreement | Subsequent Event</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SubsequentEventLineItems', window );"><strong>Subsequent Event [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EquityMethodInvestmentSoldCarryingAmount', window );">Amount to be received for a portion of its equity ownership</a></td>
<td class="nump">$ 4.0<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_ProceedsFromSaleOfExclusiveRightToSellAndServiceProducts', window );">Purchase from the Company of exclusive right to sell and service products</a></td>
<td class="nump">$ 5.6<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RestructuringPlanAxis=asys_RestructuringOfInvestmentInvestmentAgreementMember', window );">Restructuring Of Investment, Investment Agreement | Kingstone Hong Kong | Subsequent Event</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SubsequentEventLineItems', window );"><strong>Subsequent Event [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EquityMethodInvestmentOwnershipPercentage', window );">Equity method investment, ownership percentage</a></td>
<td class="nump">15.00%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RestructuringPlanAxis=asys_RestructuringOfInvestmentInvestmentAgreementMember', window );">Restructuring Of Investment, Investment Agreement | Kingstone Semiconductor Company Ltd | Subsequent Event</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SubsequentEventLineItems', window );"><strong>Subsequent Event [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EquityMethodInvestmentOwnershipPercentage', window );">Equity method investment, ownership percentage</a></td>
<td class="nump">31.25%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CounterpartyNameAxis=asys_KingstoneHongKongMember', window );">Kingstone Hong Kong | Restructuring Of Investment, Investment Agreement | Kingstone Semiconductor Company Ltd | Subsequent Event</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SubsequentEventLineItems', window );"><strong>Subsequent Event [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EquityMethodInvestmentOwnershipPercentage', window );">Equity method investment, ownership percentage</a></td>
<td class="nump">68.75%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CounterpartyNameAxis=asys_SuzhouZhuoJingInvestmentCenterMember', window );">Suzhou Zhuo Jing Investment Center | Restructuring Of Investment, Investment Agreement | Kingstone Semiconductor Company Ltd | Subsequent Event</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SubsequentEventLineItems', window );"><strong>Subsequent Event [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EquityMethodInvestmentOwnershipPercentage', window );">Equity method investment, ownership percentage</a></td>
<td class="nump">31.25%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentAxis=asys_SolarToolLoanAgreementMember', window );">Solar Tool Loan Agreement | Restructuring Of Investment, Investment Agreement | Subsequent Event</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SubsequentEventLineItems', window );"><strong>Subsequent Event [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProceedsFromCollectionOfNotesReceivable', window );">Repayment of outstanding principal</a></td>
<td class="nump">$ 4.0<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_asys_ProceedsFromSaleOfExclusiveRightToSellAndServiceProducts">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Proceeds From Sale Of Exclusive Right To Sell And Service Products</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">asys_ProceedsFromSaleOfExclusiveRightToSellAndServiceProducts</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>asys_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EquityMethodInvestmentOwnershipPercentage">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The percentage of ownership of common stock or equity participation in the investee accounted for under the equity method of accounting.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 323<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 3<br><br><br><br> -Subparagraph (a)(1)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6382943&amp;loc=d3e33918-111571<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EquityMethodInvestmentOwnershipPercentage</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EquityMethodInvestmentSoldCarryingAmount">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of the entity's equity method investment which has been sold.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EquityMethodInvestmentSoldCarryingAmount</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProceedsFromCollectionOfNotesReceivable">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The cash inflow associated with principal collections from a borrowing supported by a written promise to pay an obligation.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Glossary Investing Activities<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6516133<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 230<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 12<br><br><br><br> -Subparagraph (a)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3179-108585<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProceedsFromCollectionOfNotesReceivable</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SubsequentEventLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Detail information of subsequent event by type. User is expected to use existing line items from elsewhere in the taxonomy as the primary line items for this disclosure, which is further associated with dimension and member elements pertaining to a subsequent event.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SubsequentEventLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis=asys_KingstoneHongKongMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis=asys_KingstoneHongKongMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RestructuringPlanAxis=asys_RestructuringOfInvestmentInvestmentAgreementMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RestructuringPlanAxis=asys_RestructuringOfInvestmentInvestmentAgreementMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SubsequentEventTypeAxis=us-gaap_SubsequentEventMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SubsequentEventTypeAxis=us-gaap_SubsequentEventMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis=asys_KingstoneSemiconductorCompanyLtdMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis=asys_KingstoneSemiconductorCompanyLtdMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CounterpartyNameAxis=asys_KingstoneHongKongMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CounterpartyNameAxis=asys_KingstoneHongKongMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CounterpartyNameAxis=asys_SuzhouZhuoJingInvestmentCenterMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CounterpartyNameAxis=asys_SuzhouZhuoJingInvestmentCenterMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentAxis=asys_SolarToolLoanAgreementMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentAxis=asys_SolarToolLoanAgreementMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>

</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>60
<FILENAME>R41.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.2.0.727</span><table class="report" border="0" cellspacing="2" id="idm140187056071152">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Major Customers and Foreign Sales (Details) - Customer<br></strong></div></th>
<th class="th" colspan="2">9 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Jun. 30, 2015</div></th>
<th class="th"><div>Jun. 30, 2014</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EntityWideRevenueMajorCustomerLineItems', window );"><strong>Revenue, Major Customer [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_EntityWideRevenueMajorCustomerNumber', window );">Revenue, number of major customers</a></td>
<td class="nump">2<span></span>
</td>
<td class="nump">2<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_RevenuesPercentage', window );">Revenues, percentage</a></td>
<td class="nump">100.00%<span></span>
</td>
<td class="nump">100.00%<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StatementGeographicalAxis=country_US', window );">United States</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EntityWideRevenueMajorCustomerLineItems', window );"><strong>Revenue, Major Customer [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_RevenuesPercentage', window );">Revenues, percentage</a></td>
<td class="nump">25.00%<span></span>
</td>
<td class="nump">27.00%<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StatementGeographicalAxis=asys_OtherNorthAmericaMember', window );">Other</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EntityWideRevenueMajorCustomerLineItems', window );"><strong>Revenue, Major Customer [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_RevenuesPercentage', window );">Revenues, percentage</a></td>
<td class="nump">2.00%<span></span>
</td>
<td class="nump">0.00%<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StatementGeographicalAxis=us-gaap_NorthAmericaMember', window );">Total North America</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EntityWideRevenueMajorCustomerLineItems', window );"><strong>Revenue, Major Customer [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_RevenuesPercentage', window );">Revenues, percentage</a></td>
<td class="nump">27.00%<span></span>
</td>
<td class="nump">27.00%<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StatementGeographicalAxis=country_CN', window );">China</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EntityWideRevenueMajorCustomerLineItems', window );"><strong>Revenue, Major Customer [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_RevenuesPercentage', window );">Revenues, percentage</a></td>
<td class="nump">26.00%<span></span>
</td>
<td class="nump">14.00%<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StatementGeographicalAxis=country_TW', window );">Taiwan</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EntityWideRevenueMajorCustomerLineItems', window );"><strong>Revenue, Major Customer [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_RevenuesPercentage', window );">Revenues, percentage</a></td>
<td class="nump">15.00%<span></span>
</td>
<td class="nump">18.00%<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StatementGeographicalAxis=asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupOneMember', window );">Other</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EntityWideRevenueMajorCustomerLineItems', window );"><strong>Revenue, Major Customer [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_RevenuesPercentage', window );">Revenues, percentage</a></td>
<td class="nump">18.00%<span></span>
</td>
<td class="nump">14.00%<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StatementGeographicalAxis=us-gaap_AsiaMember', window );">Total Asia</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EntityWideRevenueMajorCustomerLineItems', window );"><strong>Revenue, Major Customer [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_RevenuesPercentage', window );">Revenues, percentage</a></td>
<td class="nump">59.00%<span></span>
</td>
<td class="nump">46.00%<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StatementGeographicalAxis=country_DE', window );">Germany</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EntityWideRevenueMajorCustomerLineItems', window );"><strong>Revenue, Major Customer [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_RevenuesPercentage', window );">Revenues, percentage</a></td>
<td class="nump">5.00%<span></span>
</td>
<td class="nump">8.00%<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StatementGeographicalAxis=asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupTwoMember', window );">Other</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EntityWideRevenueMajorCustomerLineItems', window );"><strong>Revenue, Major Customer [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_RevenuesPercentage', window );">Revenues, percentage</a></td>
<td class="nump">9.00%<span></span>
</td>
<td class="nump">19.00%<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StatementGeographicalAxis=us-gaap_EuropeMember', window );">Total Europe</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EntityWideRevenueMajorCustomerLineItems', window );"><strong>Revenue, Major Customer [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_RevenuesPercentage', window );">Revenues, percentage</a></td>
<td class="nump">14.00%<span></span>
</td>
<td class="nump">27.00%<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_SalesRevenueNetMember', window );">Net Revenues | Customer Concentration Risk | Customer Number One</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EntityWideRevenueMajorCustomerLineItems', window );"><strong>Revenue, Major Customer [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskPercentage1', window );">Concentration risk, percentage</a></td>
<td class="nump">18.00%<span></span>
</td>
<td class="nump">15.00%<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_SalesRevenueNetMember', window );">Net Revenues | Customer Concentration Risk | Customer Number Two</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EntityWideRevenueMajorCustomerLineItems', window );"><strong>Revenue, Major Customer [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskPercentage1', window );">Concentration risk, percentage</a></td>
<td class="nump">12.00%<span></span>
</td>
<td class="nump">13.00%<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_asys_EntityWideRevenueMajorCustomerNumber">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Entity-Wide Revenue, Major Customer, Number</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">asys_EntityWideRevenueMajorCustomerNumber</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>asys_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:integerItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_asys_RevenuesPercentage">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Revenues, Percentage</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">asys_RevenuesPercentage</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>asys_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConcentrationRiskPercentage1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>For an entity that discloses a concentration risk in relation to quantitative amount, which serves as the "benchmark" (or denominator) in the equation, this concept represents the concentration percentage derived from the division.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 275<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 18<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51801978&amp;loc=d3e6351-108592<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 825<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 20<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=49121117&amp;loc=d3e13531-108611<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 275<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 20<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51801978&amp;loc=d3e6404-108592<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 825<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 21<br><br><br><br> -Subparagraph (a)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=49121117&amp;loc=d3e13537-108611<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConcentrationRiskPercentage1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EntityWideRevenueMajorCustomerLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EntityWideRevenueMajorCustomerLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StatementGeographicalAxis=country_US">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StatementGeographicalAxis=country_US</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StatementGeographicalAxis=asys_OtherNorthAmericaMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StatementGeographicalAxis=asys_OtherNorthAmericaMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StatementGeographicalAxis=us-gaap_NorthAmericaMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StatementGeographicalAxis=us-gaap_NorthAmericaMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StatementGeographicalAxis=country_CN">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StatementGeographicalAxis=country_CN</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StatementGeographicalAxis=country_TW">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StatementGeographicalAxis=country_TW</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StatementGeographicalAxis=asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupOneMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StatementGeographicalAxis=asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupOneMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StatementGeographicalAxis=us-gaap_AsiaMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StatementGeographicalAxis=us-gaap_AsiaMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StatementGeographicalAxis=country_DE">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StatementGeographicalAxis=country_DE</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StatementGeographicalAxis=asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupTwoMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StatementGeographicalAxis=asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupTwoMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StatementGeographicalAxis=us-gaap_EuropeMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StatementGeographicalAxis=us-gaap_EuropeMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_SalesRevenueNetMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_SalesRevenueNetMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConcentrationRiskByTypeAxis=us-gaap_CustomerConcentrationRiskMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConcentrationRiskByTypeAxis=us-gaap_CustomerConcentrationRiskMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_MajorCustomersAxis=asys_CustomerNumberOneMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_MajorCustomersAxis=asys_CustomerNumberOneMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_MajorCustomersAxis=asys_CustomerNumberTwoMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_MajorCustomersAxis=asys_CustomerNumberTwoMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>

</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>61
<FILENAME>R5.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.2.0.727</span><table class="report" border="0" cellspacing="2" id="idm140187061469472">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Condensed Consolidated Statements Of Comprehensive Income (Loss) (Unaudited) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="2">3 Months Ended</th>
<th class="th" colspan="2">9 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Jun. 30, 2015</div></th>
<th class="th"><div>Jun. 30, 2014</div></th>
<th class="th"><div>Jun. 30, 2015</div></th>
<th class="th"><div>Jun. 30, 2014</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract', window );"><strong>Statement of Comprehensive Income [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProfitLoss', window );">Net loss</a></td>
<td class="num">$ (1,539)<span></span>
</td>
<td class="num">$ (5,153)<span></span>
</td>
<td class="num">$ (8,737)<span></span>
</td>
<td class="num">$ (10,639)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax', window );">Foreign currency translation adjustment</a></td>
<td class="nump">213<span></span>
</td>
<td class="num">(335)<span></span>
</td>
<td class="num">(3,168)<span></span>
</td>
<td class="nump">406<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ComprehensiveIncomeNetOfTaxIncludingPortionAttributableToNoncontrollingInterest', window );">Comprehensive loss</a></td>
<td class="num">(1,326)<span></span>
</td>
<td class="num">(5,488)<span></span>
</td>
<td class="num">(11,905)<span></span>
</td>
<td class="num">(10,233)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ComprehensiveIncomeNetOfTaxAttributableToNoncontrollingInterest', window );">Comprehensive (income) loss attributable to noncontrolling interest</a></td>
<td class="num">(18)<span></span>
</td>
<td class="num">(80)<span></span>
</td>
<td class="num">(157)<span></span>
</td>
<td class="nump">844<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ComprehensiveIncomeNetOfTax', window );">Comprehensive loss attributable to Amtech Systems, Inc.</a></td>
<td class="num">$ (1,344)<span></span>
</td>
<td class="num">$ (5,568)<span></span>
</td>
<td class="num">$ (12,062)<span></span>
</td>
<td class="num">$ (9,389)<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ComprehensiveIncomeNetOfTax">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount after tax of increase (decrease) in equity from transactions and other events and circumstances from net income and other comprehensive income, attributable to parent entity. Excludes changes in equity resulting from investments by owners and distributions to owners.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Glossary Other Comprehensive Income<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51831270<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Glossary Comprehensive Income<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51831223<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 220<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 5<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=36458714&amp;loc=d3e557-108580<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Glossary Net Income<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51831255<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ComprehensiveIncomeNetOfTax</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ComprehensiveIncomeNetOfTaxAttributableToNoncontrollingInterest">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount after tax of increase (decrease) in equity from transactions and other events and circumstances from net income (loss) and other comprehensive income (loss), attributable to noncontrolling interests. Excludes changes in equity resulting from investments by owners and distributions to owners.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 810<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 21<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51664549&amp;loc=SL4613674-111683<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 810<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 20<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51664549&amp;loc=SL4569643-111683<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 810<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 55<br><br><br><br> -Paragraph 4K<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=35736750&amp;loc=SL4591552-111686<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ComprehensiveIncomeNetOfTaxAttributableToNoncontrollingInterest</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ComprehensiveIncomeNetOfTaxIncludingPortionAttributableToNoncontrollingInterest">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount after tax of increase (decrease) in equity from transactions and other events and circumstances from net income and other comprehensive income. Excludes changes in equity resulting from investments by owners and distributions to owners.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 810<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 19<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51664549&amp;loc=SL4569616-111683<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 810<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 55<br><br><br><br> -Paragraph 4K<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=35736750&amp;loc=SL4591552-111686<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ComprehensiveIncomeNetOfTaxIncludingPortionAttributableToNoncontrollingInterest</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount after tax and reclassification adjustments of gain (loss) on foreign currency translation adjustments, foreign currency transactions designated and effective as economic hedges of a net investment in a foreign entity and intra-entity foreign currency transactions that are of a long-term-investment nature.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 830<br><br><br><br> -SubTopic 30<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 20<br><br><br><br> -Subparagraph (b,c)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6915805&amp;loc=d3e32211-110900<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 220<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 10A<br><br><br><br> -Subparagraph (a)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=36458714&amp;loc=SL7669646-108580<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProfitLoss">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The consolidated profit or loss for the period, net of income taxes, including the portion attributable to the noncontrolling interest.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 810<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 19<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51664549&amp;loc=SL4569616-111683<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 810<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 55<br><br><br><br> -Paragraph 4K<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=35736750&amp;loc=SL4591552-111686<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 810<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1A<br><br><br><br> -Subparagraph (a),(c)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=18733093&amp;loc=SL4573702-111684<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 810<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 55<br><br><br><br> -Paragraph 4J<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=35736750&amp;loc=SL4591551-111686<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProfitLoss</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>

</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>62
<FILENAME>R10.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.2.0.727</span><table class="report" border="0" cellspacing="2" id="idm140187066594656">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Stockholders' Equity<br></strong></div></th>
<th class="th" colspan="1">9 Months Ended</th>
</tr>
<tr><th class="th"><div>Jun. 30, 2015</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockholdersEquityNoteAbstract', window );"><strong>Stockholders' Equity Note [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockholdersEquityNoteDisclosureTextBlock', window );">Stockholders' Equity</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Stockholders' Equity</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;padding-bottom:10px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Shareholder Rights Plan</font><font style="font-family:inherit;font-size:10pt;">&#160;- On December 15, 2008, the Company and Computershare Trust Company, N.A., as Rights Agent (the &#8220;Rights Agent&#8221;), entered into an Amended and Restated Rights Agreement (the &#8220;Restated Rights Agreement&#8221;) which amended and restated the terms governing the previously authorized shareholder rights (each a &#8220;Right&#8221;) to purchase fractional shares of the Company&#8217;s Series A Participating Preferred Stock (&#8220;Series A Preferred&#8221;) currently attached to each of the Company&#8217;s outstanding Common Shares, par value </font><font style="font-family:inherit;font-size:10pt;">$0.01</font><font style="font-family:inherit;font-size:10pt;"> per share (&#8220;Common Shares&#8221;). As amended, each Right entitles the registered holder to purchase from the Company one one-thousandth of a share of Series A Preferred at an exercise price of </font><font style="font-family:inherit;font-size:10pt;">$51.60</font><font style="font-family:inherit;font-size:10pt;"> (the &#8220;Exercise Price&#8221;), subject to adjustment. The rights will expire </font><font style="font-family:inherit;font-size:10pt;">10</font><font style="font-family:inherit;font-size:10pt;"> years after issuance and will be exercisable if (a) a person or group becomes the beneficial owner of </font><font style="font-family:inherit;font-size:10pt;">15%</font><font style="font-family:inherit;font-size:10pt;"> or more of the Company&#8217;s common stock or (b) a person or group commences a tender or exchange offer that would result in the offeror beneficially owning 15% or more of the Company&#8217;s common stock.&#160; The Final Expiration Date (as defined in the Restated Rights Agreement) is December 14, 2018.</font></div></div><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockholdersEquityNoteAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockholdersEquityNoteAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockholdersEquityNoteDisclosureTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for shareholders' equity comprised of portions attributable to the parent entity and noncontrolling interest, including other comprehensive income. Includes, but is not limited to, balances of common stock, preferred stock, additional paid-in capital, other capital and retained earnings, accumulated balance for each classification of other comprehensive income and amount of comprehensive income.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 235<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.4-08.(d),(e))<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=26873400&amp;loc=d3e23780-122690<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 505<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 4<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6928386&amp;loc=d3e21484-112644<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 310<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (SAB TOPIC 4.E)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=27010918&amp;loc=d3e74512-122707<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 505<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 5<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6928386&amp;loc=d3e21488-112644<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.29-31)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 505<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 4<br><br><br><br> -Subparagraph (SAB TOPIC 4.C)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=27012166&amp;loc=d3e187143-122770<br><br><br><br>Reference 7: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 505<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 6<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6928386&amp;loc=d3e21506-112644<br><br><br><br>Reference 8: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 505<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.3-04)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=27012166&amp;loc=d3e187085-122770<br><br><br><br>Reference 9: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 505<br><br><br><br> -SubTopic 30<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 2<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6405834&amp;loc=d3e23285-112656<br><br><br><br>Reference 10: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 505<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 3<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6928386&amp;loc=d3e21475-112644<br><br><br><br>Reference 11: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Glossary Preferred Stock<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6521494<br><br><br><br>Reference 12: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 505<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 2<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6928386&amp;loc=d3e21463-112644<br><br><br><br>Reference 13: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 505<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 11<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6928386&amp;loc=d3e21564-112644<br><br><br><br>Reference 14: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Staff Accounting Bulletin (SAB)<br><br><br><br> -Number Topic 4<br><br><br><br> -Section E<br><br><br><br>Reference 15: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Staff Accounting Bulletin (SAB)<br><br><br><br> -Number Topic 4<br><br><br><br> -Section C<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockholdersEquityNoteDisclosureTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>

</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>63
<FILENAME>R27.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.2.0.727</span><table class="report" border="0" cellspacing="2" id="idm140187061293152">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Basis of Presentation - Restricted Cash (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th"><div>Jun. 30, 2015</div></th>
<th class="th"><div>Sep. 30, 2014</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract', window );"><strong>Organization, Consolidation and Presentation of Financial Statements [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue', window );">Restricted cash</a></td>
<td class="nump">$ 1,574<span></span>
</td>
<td class="nump">$ 2,380<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The carrying amounts of cash and cash equivalent items which are restricted as to withdrawal or usage. Restrictions may include legally restricted deposits held as compensating balances against short-term borrowing arrangements, contracts entered into with others, or entity statements of intention with regard to particular deposits; however, time deposits and short-term certificates of deposit are not generally included in legally restricted deposits. Excludes compensating balance arrangements that are not agreements which legally restrict the use of cash amounts shown on the balance sheet. For a classified balance sheet represents the current portion only (the noncurrent portion has a separate concept); there is a separate and distinct element for unclassified presentations.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.1)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>

</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>64
<FILENAME>FilingSummary.xml
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<XBRL>
<?xml version='1.0' encoding='UTF-8'?>
<FilingSummary>
  <Version>3.2.0.727</Version>
  <ProcessingTime/>
  <ReportFormat>html</ReportFormat>
  <ContextCount>154</ContextCount>
  <ElementCount>253</ElementCount>
  <EntityCount>1</EntityCount>
  <FootnotesReported>true</FootnotesReported>
  <SegmentCount>59</SegmentCount>
  <ScenarioCount>0</ScenarioCount>
  <TuplesReported>false</TuplesReported>
  <UnitCount>7</UnitCount>
  <MyReports>
    <Report>
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R1.htm</HtmlFileName>
      <LongName>0001000 - Document - Document and Entity Information</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/DocumentAndEntityInformation</Role>
      <ShortName>Document and Entity Information</ShortName>
      <MenuCategory>Cover</MenuCategory>
      <Position>1</Position>
    </Report>
    <Report>
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R2.htm</HtmlFileName>
      <LongName>1001000 - Statement - Condensed Consolidated Balance Sheets</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/CondensedConsolidatedBalanceSheets</Role>
      <ShortName>Condensed Consolidated Balance Sheets</ShortName>
      <MenuCategory>Statements</MenuCategory>
      <Position>2</Position>
    </Report>
    <Report>
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R3.htm</HtmlFileName>
      <LongName>1001501 - Statement - Condensed Consolidated Balance Sheets (Parenthetical)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/CondensedConsolidatedBalanceSheetsParenthetical</Role>
      <ShortName>Condensed Consolidated Balance Sheets (Parenthetical)</ShortName>
      <MenuCategory>Statements</MenuCategory>
      <Position>3</Position>
    </Report>
    <Report>
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R4.htm</HtmlFileName>
      <LongName>1002000 - Statement - Condensed Consolidated Statements of Operations (Unaudited)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/CondensedConsolidatedStatementsOfOperationsUnaudited</Role>
      <ShortName>Condensed Consolidated Statements of Operations (Unaudited)</ShortName>
      <MenuCategory>Statements</MenuCategory>
      <Position>4</Position>
    </Report>
    <Report>
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R5.htm</HtmlFileName>
      <LongName>1003000 - Statement - Condensed Consolidated Statements Of Comprehensive Income (Loss) (Unaudited)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/CondensedConsolidatedStatementsOfComprehensiveIncomeLossUnaudited</Role>
      <ShortName>Condensed Consolidated Statements Of Comprehensive Income (Loss) (Unaudited)</ShortName>
      <MenuCategory>Statements</MenuCategory>
      <Position>5</Position>
    </Report>
    <Report>
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R6.htm</HtmlFileName>
      <LongName>1004000 - Statement - Condensed Consolidated Statements Of Cash Flows (Unaudited)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/CondensedConsolidatedStatementsOfCashFlowsUnaudited</Role>
      <ShortName>Condensed Consolidated Statements Of Cash Flows (Unaudited)</ShortName>
      <MenuCategory>Statements</MenuCategory>
      <Position>6</Position>
    </Report>
    <Report>
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R7.htm</HtmlFileName>
      <LongName>2101100 - Disclosure - Basis of Presentation</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/BasisOfPresentation</Role>
      <ShortName>Basis of Presentation</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>7</Position>
    </Report>
    <Report>
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R8.htm</HtmlFileName>
      <LongName>2102100 - Disclosure - Income Taxes</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/IncomeTaxes</Role>
      <ShortName>Income Taxes</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>8</Position>
    </Report>
    <Report>
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R9.htm</HtmlFileName>
      <LongName>2103100 - Disclosure - Earnings Per Share</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/EarningsPerShare</Role>
      <ShortName>Earnings Per Share</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>9</Position>
    </Report>
    <Report>
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R10.htm</HtmlFileName>
      <LongName>2105100 - Disclosure - Stockholders' Equity</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/StockholdersEquity</Role>
      <ShortName>Stockholders' Equity</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>10</Position>
    </Report>
    <Report>
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R11.htm</HtmlFileName>
      <LongName>2107100 - Disclosure - Business Segment Information</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/BusinessSegmentInformation</Role>
      <ShortName>Business Segment Information</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>11</Position>
    </Report>
    <Report>
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R12.htm</HtmlFileName>
      <LongName>2108100 - Disclosure - Major Customers and Foreign Sales</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/MajorCustomersAndForeignSales</Role>
      <ShortName>Major Customers and Foreign Sales</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>12</Position>
    </Report>
    <Report>
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R13.htm</HtmlFileName>
      <LongName>2110100 - Disclosure - Other Accrued Liabilities</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/OtherAccruedLiabilities</Role>
      <ShortName>Other Accrued Liabilities</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>13</Position>
    </Report>
    <Report>
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R14.htm</HtmlFileName>
      <LongName>2111100 - Disclosure - Long-term Debt</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/LongTermDebt</Role>
      <ShortName>Long-term Debt</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>14</Position>
    </Report>
    <Report>
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R15.htm</HtmlFileName>
      <LongName>2112100 - Disclosure - Commitments and Contingencies</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/CommitmentsAndContingencies</Role>
      <ShortName>Commitments and Contingencies</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>15</Position>
    </Report>
    <Report>
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R16.htm</HtmlFileName>
      <LongName>2113100 - Disclosure - Acquisition</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/Acquisition</Role>
      <ShortName>Acquisition</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>16</Position>
    </Report>
    <Report>
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R17.htm</HtmlFileName>
      <LongName>2114100 - Disclosure - Subsequent Event (Notes)</LongName>
      <ReportType>Notes</ReportType>
      <Role>http://www.amtechsystems.com/role/SubsequentEventNotes</Role>
      <ShortName>Subsequent Event (Notes)</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>17</Position>
    </Report>
    <Report>
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R18.htm</HtmlFileName>
      <LongName>2201201 - Disclosure - Basis of Presentation (Policies)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/BasisOfPresentationPolicies</Role>
      <ShortName>Basis of Presentation (Policies)</ShortName>
      <MenuCategory>Policies</MenuCategory>
      <Position>18</Position>
    </Report>
    <Report>
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R19.htm</HtmlFileName>
      <LongName>2301302 - Disclosure - Basis of Presentation (Tables)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/BasisOfPresentationTables</Role>
      <ShortName>Basis of Presentation (Tables)</ShortName>
      <MenuCategory>Tables</MenuCategory>
      <ParentRole>http://www.amtechsystems.com/role/BasisOfPresentation</ParentRole>
      <Position>19</Position>
    </Report>
    <Report>
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R20.htm</HtmlFileName>
      <LongName>2303301 - Disclosure - Earnings Per Share (Tables)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/EarningsPerShareTables</Role>
      <ShortName>Earnings Per Share (Tables)</ShortName>
      <MenuCategory>Tables</MenuCategory>
      <ParentRole>http://www.amtechsystems.com/role/EarningsPerShare</ParentRole>
      <Position>20</Position>
    </Report>
    <Report>
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R21.htm</HtmlFileName>
      <LongName>2307301 - Disclosure - Business Segment Information (Tables)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/BusinessSegmentInformationTables</Role>
      <ShortName>Business Segment Information (Tables)</ShortName>
      <MenuCategory>Tables</MenuCategory>
      <ParentRole>http://www.amtechsystems.com/role/BusinessSegmentInformation</ParentRole>
      <Position>21</Position>
    </Report>
    <Report>
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R22.htm</HtmlFileName>
      <LongName>2308301 - Disclosure - Major Customers and Foreign Sales (Tables)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/MajorCustomersAndForeignSalesTables</Role>
      <ShortName>Major Customers and Foreign Sales (Tables)</ShortName>
      <MenuCategory>Tables</MenuCategory>
      <ParentRole>http://www.amtechsystems.com/role/MajorCustomersAndForeignSales</ParentRole>
      <Position>22</Position>
    </Report>
    <Report>
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R23.htm</HtmlFileName>
      <LongName>2310301 - Disclosure - Other Accrued Liabilities (Tables)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/OtherAccruedLiabilitiesTables</Role>
      <ShortName>Other Accrued Liabilities (Tables)</ShortName>
      <MenuCategory>Tables</MenuCategory>
      <ParentRole>http://www.amtechsystems.com/role/OtherAccruedLiabilities</ParentRole>
      <Position>23</Position>
    </Report>
    <Report>
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R24.htm</HtmlFileName>
      <LongName>2313301 - Disclosure - Acquisition Acquisition (Tables)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/AcquisitionAcquisitionTables</Role>
      <ShortName>Acquisition Acquisition (Tables)</ShortName>
      <MenuCategory>Tables</MenuCategory>
      <Position>24</Position>
    </Report>
    <Report>
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R25.htm</HtmlFileName>
      <LongName>2401403 - Disclosure - Basis of Presentation - Deferred Profit (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/BasisOfPresentationDeferredProfitDetails</Role>
      <ShortName>Basis of Presentation - Deferred Profit (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>25</Position>
    </Report>
    <Report>
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R26.htm</HtmlFileName>
      <LongName>2401404 - Disclosure - Basis of Presentation - Concentrations of Credit Risk (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/BasisOfPresentationConcentrationsOfCreditRiskDetails</Role>
      <ShortName>Basis of Presentation - Concentrations of Credit Risk (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>26</Position>
    </Report>
    <Report>
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R27.htm</HtmlFileName>
      <LongName>2401405 - Disclosure - Basis of Presentation - Restricted Cash (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/BasisOfPresentationRestrictedCashDetails</Role>
      <ShortName>Basis of Presentation - Restricted Cash (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>27</Position>
    </Report>
    <Report>
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R28.htm</HtmlFileName>
      <LongName>2401406 - Disclosure - Basis of Presentation - Inventories (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/BasisOfPresentationInventoriesDetails</Role>
      <ShortName>Basis of Presentation - Inventories (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>28</Position>
    </Report>
    <Report>
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R29.htm</HtmlFileName>
      <LongName>2401407 - Disclosure - Basis of Presentation - Property, Plant and Equipment (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/BasisOfPresentationPropertyPlantAndEquipmentDetails</Role>
      <ShortName>Basis of Presentation - Property, Plant and Equipment (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>29</Position>
    </Report>
    <Report>
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R30.htm</HtmlFileName>
      <LongName>2401408 - Disclosure - Basis of Presentation - Goodwill (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/BasisOfPresentationGoodwillDetails</Role>
      <ShortName>Basis of Presentation - Goodwill (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>30</Position>
    </Report>
    <Report>
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R31.htm</HtmlFileName>
      <LongName>2401409 - Disclosure - Basis of Presentation - Intangibles (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/BasisOfPresentationIntangiblesDetails</Role>
      <ShortName>Basis of Presentation - Intangibles (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>31</Position>
    </Report>
    <Report>
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R32.htm</HtmlFileName>
      <LongName>2401410 - Disclosure - Basis of Presentation - Warranty (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/BasisOfPresentationWarrantyDetails</Role>
      <ShortName>Basis of Presentation - Warranty (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>32</Position>
    </Report>
    <Report>
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R33.htm</HtmlFileName>
      <LongName>2401411 - Disclosure - Basis of Presentation - Stock-Based Compensation (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/BasisOfPresentationStockBasedCompensationDetails</Role>
      <ShortName>Basis of Presentation - Stock-Based Compensation (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>33</Position>
    </Report>
    <Report>
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R34.htm</HtmlFileName>
      <LongName>2401412 - Disclosure - Basis of Presentation - Cash Equivalents (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/BasisOfPresentationCashEquivalentsDetails</Role>
      <ShortName>Basis of Presentation - Cash Equivalents (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>34</Position>
    </Report>
    <Report>
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R35.htm</HtmlFileName>
      <LongName>2401413 - Disclosure - Basis of Presentation - Shipping Expense (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/BasisOfPresentationShippingExpenseDetails</Role>
      <ShortName>Basis of Presentation - Shipping Expense (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>35</Position>
    </Report>
    <Report>
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R36.htm</HtmlFileName>
      <LongName>2401414 - Disclosure - Basis of Presentation - Research and Development Expense (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/BasisOfPresentationResearchAndDevelopmentExpenseDetails</Role>
      <ShortName>Basis of Presentation - Research and Development Expense (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>36</Position>
    </Report>
    <Report>
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R37.htm</HtmlFileName>
      <LongName>2402401 - Disclosure - Income Taxes (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/IncomeTaxesDetails</Role>
      <ShortName>Income Taxes (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <ParentRole>http://www.amtechsystems.com/role/IncomeTaxes</ParentRole>
      <Position>37</Position>
    </Report>
    <Report>
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R38.htm</HtmlFileName>
      <LongName>2403402 - Disclosure - Earnings Per Share (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/EarningsPerShareDetails</Role>
      <ShortName>Earnings Per Share (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <ParentRole>http://www.amtechsystems.com/role/EarningsPerShareTables</ParentRole>
      <Position>38</Position>
    </Report>
    <Report>
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R39.htm</HtmlFileName>
      <LongName>2405401 - Disclosure - Stockholders' Equity (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/StockholdersEquityDetails</Role>
      <ShortName>Stockholders' Equity (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <ParentRole>http://www.amtechsystems.com/role/StockholdersEquity</ParentRole>
      <Position>39</Position>
    </Report>
    <Report>
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R40.htm</HtmlFileName>
      <LongName>2407402 - Disclosure - Business Segment Information (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/BusinessSegmentInformationDetails</Role>
      <ShortName>Business Segment Information (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <ParentRole>http://www.amtechsystems.com/role/BusinessSegmentInformationTables</ParentRole>
      <Position>40</Position>
    </Report>
    <Report>
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R41.htm</HtmlFileName>
      <LongName>2408402 - Disclosure - Major Customers and Foreign Sales (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/MajorCustomersAndForeignSalesDetails</Role>
      <ShortName>Major Customers and Foreign Sales (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <ParentRole>http://www.amtechsystems.com/role/MajorCustomersAndForeignSalesTables</ParentRole>
      <Position>41</Position>
    </Report>
    <Report>
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R42.htm</HtmlFileName>
      <LongName>2410402 - Disclosure - Other Accrued Liabilities (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/OtherAccruedLiabilitiesDetails</Role>
      <ShortName>Other Accrued Liabilities (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <ParentRole>http://www.amtechsystems.com/role/OtherAccruedLiabilitiesTables</ParentRole>
      <Position>42</Position>
    </Report>
    <Report>
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R43.htm</HtmlFileName>
      <LongName>2411401 - Disclosure - Long-term Debt (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/LongTermDebtDetails</Role>
      <ShortName>Long-term Debt (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <ParentRole>http://www.amtechsystems.com/role/LongTermDebt</ParentRole>
      <Position>43</Position>
    </Report>
    <Report>
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R44.htm</HtmlFileName>
      <LongName>2412401 - Disclosure - Commitments and Contingencies (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/CommitmentsAndContingenciesDetails</Role>
      <ShortName>Commitments and Contingencies (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <ParentRole>http://www.amtechsystems.com/role/CommitmentsAndContingencies</ParentRole>
      <Position>44</Position>
    </Report>
    <Report>
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R45.htm</HtmlFileName>
      <LongName>2413402 - Disclosure - Acquisition (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/AcquisitionDetails</Role>
      <ShortName>Acquisition (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <ParentRole>http://www.amtechsystems.com/role/AcquisitionAcquisitionTables</ParentRole>
      <Position>45</Position>
    </Report>
    <Report>
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R46.htm</HtmlFileName>
      <LongName>2413403 - Disclosure - Acquisition - Pro Forma (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/AcquisitionProFormaDetails</Role>
      <ShortName>Acquisition - Pro Forma (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>46</Position>
    </Report>
    <Report>
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R47.htm</HtmlFileName>
      <LongName>2413404 - Disclosure - Acquisition - Consideration Transferred (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/AcquisitionConsiderationTransferredDetails</Role>
      <ShortName>Acquisition - Consideration Transferred (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>47</Position>
    </Report>
    <Report>
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R48.htm</HtmlFileName>
      <LongName>2413405 - Disclosure - Acquisition - Assets Acquired and Liabilities Assumed (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/AcquisitionAssetsAcquiredAndLiabilitiesAssumedDetails</Role>
      <ShortName>Acquisition - Assets Acquired and Liabilities Assumed (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>48</Position>
    </Report>
    <Report>
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R49.htm</HtmlFileName>
      <LongName>2414401 - Disclosure - Subsequent Event (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/SubsequentEventDetails</Role>
      <ShortName>Subsequent Event (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <ParentRole>http://www.amtechsystems.com/role/SubsequentEventNotes</ParentRole>
      <Position>49</Position>
    </Report>
    <Report>
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <LongName>All Reports</LongName>
      <ReportType>Book</ReportType>
      <ShortName>All Reports</ShortName>
    </Report>
  </MyReports>
  <Logs>
    <Log type="Info">In ''Condensed Consolidated Balance Sheets'', column(s) 3, 4 are contained in other reports, so were removed by flow through suppression.</Log>
    <Log type="Info">In ''Condensed Consolidated Statements Of Cash Flows (Unaudited)'', column(s) 1, 2 are contained in other reports, so were removed by flow through suppression.</Log>
  </Logs>
  <InputFiles>
    <File>asys-20150630.xml</File>
    <File>asys-20150630_cal.xml</File>
    <File>asys-20150630_def.xml</File>
    <File>asys-20150630_lab.xml</File>
    <File>asys-20150630_pre.xml</File>
    <File>asys-20150630.xsd</File>
  </InputFiles>
  <SupplementalFiles/>
  <BaseTaxonomies/>
  <HasPresentationLinkbase>true</HasPresentationLinkbase>
  <HasCalculationLinkbase>true</HasCalculationLinkbase>
</FilingSummary>

</XBRL>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>65
<FILENAME>R38.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.2.0.727</span><table class="report" border="0" cellspacing="2" id="idm140187056103056">
<tr>
<th class="tl" colspan="2" rowspan="2"><div style="width: 200px;"><strong>Earnings Per Share (Details) - USD ($)<br> $ / shares in Units, $ in Thousands</strong></div></th>
<th class="th" colspan="2">3 Months Ended</th>
<th class="th" colspan="2">9 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Jun. 30, 2015</div></th>
<th class="th"><div>Jun. 30, 2014</div></th>
<th class="th"><div>Jun. 30, 2015</div></th>
<th class="th"><div>Jun. 30, 2014</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems', window );"><strong>Antidilutive Securities Excluded from Computation of Earnings Per Share [Line Items]</strong></a></td>
<td class="th" style="border-bottom: 0px;"><sup></sup></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NetIncomeLoss', window );">Net income (loss) attributable to Amtech Systems, Inc.</a></td>
<td class="th" style="border-bottom: 0px;"><sup></sup></td>
<td class="num">$ (1,604)<span></span>
</td>
<td class="num">$ (5,257)<span></span>
</td>
<td class="num">$ (9,119)<span></span>
</td>
<td class="num">$ (9,802)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_WeightedAverageNumberOfSharesOutstandingBasic', window );">Weighted average shares outstanding (in shares)</a></td>
<td class="th" style="border-bottom: 0px;"><sup></sup></td>
<td class="nump">13,103,000<span></span>
</td>
<td class="nump">9,843,000<span></span>
</td>
<td class="nump">11,644,000<span></span>
</td>
<td class="nump">9,694,000<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EarningsPerShareBasic', window );">Basic income (loss) per share attributable to Amtech shareholders (dollars per share)</a></td>
<td class="th" style="border-bottom: 0px;"><sup></sup></td>
<td class="num">$ (0.12)<span></span>
</td>
<td class="num">$ (0.53)<span></span>
</td>
<td class="num">$ (0.78)<span></span>
</td>
<td class="num">$ (1.01)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_WeightedAverageNumberDilutedSharesOutstandingAdjustment', window );">Common stock equivalents (in shares)</a></td>
<td class="th" style="border-bottom: 0px;"><sup>[1]</sup></td>
<td class="nump">0<span></span>
</td>
<td class="nump">0<span></span>
</td>
<td class="nump">0<span></span>
</td>
<td class="nump">0<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding', window );">Diluted shares (in shares)</a></td>
<td class="th" style="border-bottom: 0px;"><sup></sup></td>
<td class="nump">13,103,000<span></span>
</td>
<td class="nump">9,843,000<span></span>
</td>
<td class="nump">11,644,000<span></span>
</td>
<td class="nump">9,694,000<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EarningsPerShareDiluted', window );">Diluted income (loss) per share attributable to Amtech shareholders (dollars per share)</a></td>
<td class="th" style="border-bottom: 0px;"><sup></sup></td>
<td class="num">$ (0.12)<span></span>
</td>
<td class="num">$ (0.53)<span></span>
</td>
<td class="num">$ (0.78)<span></span>
</td>
<td class="num">$ (1.01)<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis=us-gaap_EmployeeStockOptionMember', window );">Stock Options</a></td>
<td class="th" style="border-bottom: 0px;"><sup></sup></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems', window );"><strong>Antidilutive Securities Excluded from Computation of Earnings Per Share [Line Items]</strong></a></td>
<td class="th" style="border-bottom: 0px;"><sup></sup></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount', window );">Antidilutive securities excluded from computation of earnings per share, amount</a></td>
<td class="th" style="border-bottom: 0px;"><sup></sup></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">1,640,000<span></span>
</td>
<td class="nump">1,016,000<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis=us-gaap_RestrictedStockMember', window );">Restricted Stock</a></td>
<td class="th" style="border-bottom: 0px;"><sup></sup></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems', window );"><strong>Antidilutive Securities Excluded from Computation of Earnings Per Share [Line Items]</strong></a></td>
<td class="th" style="border-bottom: 0px;"><sup></sup></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount', window );">Antidilutive securities excluded from computation of earnings per share, amount</a></td>
<td class="th" style="border-bottom: 0px;"><sup></sup></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">14,000<span></span>
</td>
<td class="nump">38,000<span></span>
</td>
</tr>
<tr><td colspan="5"></td></tr>
<tr><td colspan="5"><table class="outerFootnotes" width="100%"><tr class="outerFootnote">
<td style="vertical-align: top;" valign="top">[1]</td>
<td style="vertical-align: top;" valign="top">The number of common stock equivalents is calculated using the treasury stock method and the average market price during the period.</td>
</tr></table></td></tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Securities (including those issuable pursuant to contingent stock agreements) that could potentially dilute basic earnings per share (EPS) or earnings per unit (EPU) in the future that were not included in the computation of diluted EPS or EPU because to do so would increase EPS or EPU amounts or decrease loss per share or unit amounts for the period presented.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Glossary Antidilution<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6505113<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Glossary Diluted Earnings Per Share<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6510752<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Glossary Contingent Stock Agreement<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6508534<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 260<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (c)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6371337&amp;loc=d3e3550-109257<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EarningsPerShareBasic">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The amount of net income (loss) for the period per each share of common stock or unit outstanding during the reporting period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 260<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6371337&amp;loc=d3e3550-109257<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 225<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (SX 210.5-03.21)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=26872669&amp;loc=d3e20235-122688<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 260<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 55<br><br><br><br> -Paragraph 52<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=32703322&amp;loc=d3e4984-109258<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 260<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 2<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=7655603&amp;loc=d3e1252-109256<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 944<br><br><br><br> -SubTopic 225<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.7-04.19)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6879464&amp;loc=d3e573970-122913<br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 942<br><br><br><br> -SubTopic 225<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.9-04.23)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6879574&amp;loc=d3e536633-122882<br><br><br><br>Reference 7: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 04<br><br><br><br> -Paragraph 18<br><br><br><br> -Article 7<br><br><br><br>Reference 8: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 03<br><br><br><br> -Paragraph 20<br><br><br><br> -Article 5<br><br><br><br>Reference 9: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 04<br><br><br><br> -Paragraph 21<br><br><br><br> -Article 9<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EarningsPerShareBasic</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EarningsPerShareDiluted">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The amount of net income (loss) for the period available to each share of common stock or common unit outstanding during the reporting period and to each share or unit that would have been outstanding assuming the issuance of common shares or units for all dilutive potential common shares or units outstanding during the reporting period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 225<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (SX 210.5-03.21)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=26872669&amp;loc=d3e20235-122688<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 260<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 2<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=7655603&amp;loc=d3e1252-109256<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 04<br><br><br><br> -Paragraph 18<br><br><br><br> -Article 7<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 03<br><br><br><br> -Paragraph 20<br><br><br><br> -Article 5<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 04<br><br><br><br> -Paragraph 21<br><br><br><br> -Article 9<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EarningsPerShareDiluted</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetIncomeLoss">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The portion of profit or loss for the period, net of income taxes, which is attributable to the parent.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Glossary Net Income<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51831255<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 230<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 28<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3602-108585<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 944<br><br><br><br> -SubTopic 225<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.7-04.19)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6879464&amp;loc=d3e573970-122913<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 260<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6371337&amp;loc=d3e3550-109257<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 225<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (SX 210.5-03.18)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=26872669&amp;loc=d3e20235-122688<br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 944<br><br><br><br> -SubTopic 225<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.7-04.22)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6879464&amp;loc=d3e573970-122913<br><br><br><br>Reference 7: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Glossary Other Comprehensive Income<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=51831270<br><br><br><br>Reference 8: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 03<br><br><br><br> -Paragraph 19<br><br><br><br> -Article 5<br><br><br><br>Reference 9: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 04<br><br><br><br> -Paragraph 20<br><br><br><br> -Article 9<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NetIncomeLoss</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_WeightedAverageNumberDilutedSharesOutstandingAdjustment">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The sum of dilutive potential common shares or units used in the calculation of the diluted per-share or per-unit computation.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 260<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (a)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6371337&amp;loc=d3e3550-109257<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_WeightedAverageNumberDilutedSharesOutstandingAdjustment</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The average number of shares or units issued and outstanding that are used in calculating diluted EPS or earnings per unit (EPU), determined based on the timing of issuance of shares or units in the period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 260<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 16<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=7655603&amp;loc=d3e1505-109256<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 260<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (a)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6371337&amp;loc=d3e3550-109257<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_WeightedAverageNumberOfSharesOutstandingBasic">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Number of [basic] shares or units, after adjustment for contingently issuable shares or units and other shares or units not deemed outstanding, determined by relating the portion of time within a reporting period that common shares or units have been outstanding to the total time in that period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 260<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (a)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6371337&amp;loc=d3e3550-109257<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 260<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 10<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=7655603&amp;loc=d3e1448-109256<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Glossary Weighted-Average Number of Common Shares Outstanding<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6528421<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_WeightedAverageNumberOfSharesOutstandingBasic</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis=us-gaap_EmployeeStockOptionMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis=us-gaap_EmployeeStockOptionMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis=us-gaap_RestrictedStockMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis=us-gaap_RestrictedStockMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>

</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>66
<FILENAME>R20.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.2.0.727</span><table class="report" border="0" cellspacing="2" id="idm140187059415888">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Earnings Per Share (Tables)<br></strong></div></th>
<th class="th" colspan="1">9 Months Ended</th>
</tr>
<tr><th class="th"><div>Jun. 30, 2015</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EarningsPerShareAbstract', window );"><strong>Earnings Per Share [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock', window );">Schedule of Earnings Per Share, Basic and Diluted</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The following table outlines basic and diluted EPS:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="16" rowspan="1"></td></tr><tr><td width="45%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="11%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="11%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="11%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td><td width="11%" rowspan="1" colspan="1"></td><td width="1%" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Three Months Ended June 30,</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Nine Months Ended June 30,</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">2014</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">2014</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">(in thousands, except per share amounts)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">(in thousands, except per share amounts)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Basic Loss Per Share Computation</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Net loss attributable to Amtech Systems, Inc.</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,604</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(5,257</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(9,119</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(9,802</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Weighted Average Shares Outstanding:</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Common stock</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">13,103</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9,843</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">11,644</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9,694</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Basic loss per share attributable to Amtech shareholders</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(0.12</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(0.53</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(0.78</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1.01</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Diluted Loss Per Share Computation</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Net loss attributable to Amtech Systems, Inc.</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,604</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(5,257</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(9,119</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(9,802</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Weighted Average Shares Outstanding:</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Common stock</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">13,103</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9,843</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">11,644</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9,694</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Common stock equivalents (1)</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Diluted shares</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">13,103</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:3px double #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9,843</font></div></td><td style="vertical-align:bottom;border-top:1px solid #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">11,644</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:3px double #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9,694</font></div></td><td style="vertical-align:bottom;border-top:1px solid #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Diluted loss per share attributable to Amtech shareholders</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(0.12</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(0.53</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(0.78</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1.01</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;" rowspan="1" colspan="1"></td><td rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:top" rowspan="1" colspan="1"><div style="line-height:120%;font-size:8pt;padding-left:24px;"><font style="font-family:inherit;font-size:8pt;">(1)</font></div></td><td style="vertical-align:top;" rowspan="1" colspan="1"><div style="line-height:120%;text-align:justify;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">The number of common stock equivalents is calculated using the treasury stock method and the average market price during the period.</font></div></td></tr></table></div><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EarningsPerShareAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EarningsPerShareAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of an entity's basic and diluted earnings per share calculations, including a reconciliation of numerators and denominators of the basic and diluted per-share computations for income from continuing operations.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 260<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6371337&amp;loc=d3e3550-109257<br><br><br><br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>

</TEXT>
</DOCUMENT>
</SEC-DOCUMENT>
