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Commitments and Contingencies (Details) - USD ($) $ in Thousands | 9 Months Ended |  |
--- | --- | --- | ---
Jun. 30, 2015 | Jun. 30, 2014 | Jan. 30, 2015 | Sep. 30, 2014
Schedule of Equity Method Investments [Line Items] |  |  |  |
Purchase obligation | $ 14,100 |  |  | $ 7,900
Price of an ion implanter | 511 | $ 214 |  |
Revenue from Grants | 4,100 |  |  |
Grant revenue commitment to the project | $ 6,100 |  |  |
Kingstone Holding Company |  |  |  |
Schedule of Equity Method Investments [Line Items] |  |  |  |
Equity method investment, ownership percentage | 55.00% |  |  |
Kingstone Semiconductor Company Ltd |  |  |  |
Schedule of Equity Method Investments [Line Items] |  |  |  |
Percentage of voting interest of acquiree owned subsidiary | 100.00% |  |  |
Tempress Systems and Energy Research Centre Agreement [Member] |  |  |  |
Schedule of Equity Method Investments [Line Items] |  |  |  |
Price of an ion implanter | $ 1,400 |  |  |
Ownership rights to results of projects developed separately by individual parties | 100.00% |  |  |
R&D Agreement term | 4 years |  |  |
Required contribution in form of labor and assets | $ 1,400 |  |  |
Number of years from agreement start for contribution for project support | 2 years |  |  |
Environmental Clean-up | BTU International, Inc (BTU) Merger |  |  |  |
Schedule of Equity Method Investments [Line Items] |  |  |  |
Loss contingency accrual | $ 100 |  | $ 200 |
Letter of credit | $ 200 |  |  |

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