<SEC-DOCUMENT>0000720500-15-000018-index.html : 20150410
<SEC-HEADER>0000720500-15-000018.hdr.sgml : 20150410
<ACCEPTANCE-DATETIME>20150410171141
ACCESSION NUMBER:		0000720500-15-000018
CONFORMED SUBMISSION TYPE:	8-K
PUBLIC DOCUMENT COUNT:		5
CONFORMED PERIOD OF REPORT:	20150409
ITEM INFORMATION:		Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers: Compensatory Arrangements of Certain Officers
ITEM INFORMATION:		Submission of Matters to a Vote of Security Holders
ITEM INFORMATION:		Financial Statements and Exhibits
FILED AS OF DATE:		20150410
DATE AS OF CHANGE:		20150410

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			AMTECH SYSTEMS INC
		CENTRAL INDEX KEY:			0000720500
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				860411215
		STATE OF INCORPORATION:			AZ
		FISCAL YEAR END:			0930

	FILING VALUES:
		FORM TYPE:		8-K
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-11412
		FILM NUMBER:		15765086

	BUSINESS ADDRESS:	
		STREET 1:		131 S CLARK DR
		CITY:			TEMPE
		STATE:			AZ
		ZIP:			85281
		BUSINESS PHONE:		6029675146

	MAIL ADDRESS:	
		STREET 1:		131 SOUTH CLARK DRIVE
		CITY:			TEMPE
		STATE:			AZ
		ZIP:			85281

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	QUARTZ ENGINEERING & MATERIALS INC
		DATE OF NAME CHANGE:	19870715
</SEC-HEADER>
<DOCUMENT>
<TYPE>8-K
<SEQUENCE>1
<FILENAME>amtech8k4-2015.htm
<DESCRIPTION>8-K
<TEXT>
Document 1 - file: amtech8k4-2015.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-10.1
<SEQUENCE>2
<FILENAME>a101jsagmt.htm
<DESCRIPTION>EXHIBIT 10.1
<TEXT>
Document 2 - file: a101jsagmt.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-10.2
<SEQUENCE>3
<FILENAME>a102fokkoagmt.htm
<DESCRIPTION>EXHIBIT 10.2
<TEXT>
Document 3 - file: a102fokkoagmt.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-10.3
<SEQUENCE>4
<FILENAME>a103.htm
<DESCRIPTION>EXHIBIT 10.3
<TEXT>
Document 4 - file: a103.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-10.4
<SEQUENCE>5
<FILENAME>a104.htm
<DESCRIPTION>EXHIBIT 10.4
<TEXT>
Document 5 - file: a104.htm

</DOCUMENT>
</SEC-DOCUMENT>