<SEC-DOCUMENT>0000720500-16-000120-index.html : 20161202
<SEC-HEADER>0000720500-16-000120.hdr.sgml : 20161202
<ACCEPTANCE-DATETIME>20161201173258
ACCESSION NUMBER:		0000720500-16-000120
CONFORMED SUBMISSION TYPE:	10-K/A
PUBLIC DOCUMENT COUNT:		6
CONFORMED PERIOD OF REPORT:	20160930
FILED AS OF DATE:		20161202
DATE AS OF CHANGE:		20161201

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			AMTECH SYSTEMS INC
		CENTRAL INDEX KEY:			0000720500
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				860411215
		STATE OF INCORPORATION:			AZ
		FISCAL YEAR END:			0930

	FILING VALUES:
		FORM TYPE:		10-K/A
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-11412
		FILM NUMBER:		162029238

	BUSINESS ADDRESS:	
		STREET 1:		131 S CLARK DR
		CITY:			TEMPE
		STATE:			AZ
		ZIP:			85281
		BUSINESS PHONE:		6029675146

	MAIL ADDRESS:	
		STREET 1:		131 SOUTH CLARK DRIVE
		CITY:			TEMPE
		STATE:			AZ
		ZIP:			85281

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	QUARTZ ENGINEERING & MATERIALS INC
		DATE OF NAME CHANGE:	19870715
</SEC-HEADER>
<DOCUMENT>
<TYPE>10-K/A
<SEQUENCE>1
<FILENAME>asys-93016x10ka.htm
<DESCRIPTION>10-K/A
<TEXT>
Document 1 - file: asys-93016x10ka.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-23.1
<SEQUENCE>2
<FILENAME>asys-93016ex231x10ka.htm
<DESCRIPTION>EXHIBIT 23.1
<TEXT>
Document 2 - file: asys-93016ex231x10ka.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-31.1
<SEQUENCE>3
<FILENAME>asys-93016ex311x10ka.htm
<DESCRIPTION>EXHIBIT 31.1
<TEXT>
Document 3 - file: asys-93016ex311x10ka.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-31.2
<SEQUENCE>4
<FILENAME>asys-93016ex312x10ka.htm
<DESCRIPTION>EXHIBIT 31.2
<TEXT>
Document 4 - file: asys-93016ex312x10ka.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-32.1
<SEQUENCE>5
<FILENAME>asys-93016ex321x10ka.htm
<DESCRIPTION>EXHIBIT 32.1
<TEXT>
Document 5 - file: asys-93016ex321x10ka.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-32.2
<SEQUENCE>6
<FILENAME>asys-93016ex322x10ka.htm
<DESCRIPTION>EXHIBIT 32.2
<TEXT>
Document 6 - file: asys-93016ex322x10ka.htm

</DOCUMENT>
</SEC-DOCUMENT>