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v3.3.1.900

Commitments and Contingencies (Details) | 3 Months Ended | 12 Months Ended |  |
--- | --- | --- | --- | ---
Dec. 31, 2015 USD ($) claims | Dec. 31, 2014 USD ($) | Sep. 30, 2014 USD ($) | Sep. 30, 2015 USD ($) | Jan. 30, 2015 USD ($)
Schedule of Equity Method Investments [Line Items] |  |  |  |  |
Purchase obligation | $ 7,200,000 |  |  | $ 9,800,000 |
Price of an ion implanter | $ 108,000 | $ 155,000 |  |  |
Kingstone Holding Company |  |  |  |  |
Schedule of Equity Method Investments [Line Items] |  |  |  |  |
Equity method investment, ownership percentage | 15.00% |  |  |  |
Tempress Systems and Energy Research Centre Agreement [Member] |  |  |  |  |
Schedule of Equity Method Investments [Line Items] |  |  |  |  |
Price of an ion implanter |  |  | $ 1,400,000 |  |
Ownership rights to results of projects developed separately by individual parties |  |  | 100.00% |  |
R&D Agreement term |  |  | 4 years |  |
Required contribution in form of labor and assets |  |  | $ 1,400,000 |  |
Amount contributed | $ 900,000 |  |  |  |
R&D, required contribution | 1,400,000 |  |  |  |
Number of years from agreement start for contribution for project support |  |  | 2 years |  |
Environmental Clean-up | BTU International, Inc (BTU) Merger |  |  |  |  |
Schedule of Equity Method Investments [Line Items] |  |  |  |  |
Loss contingency accrual |  |  |  |  | $ 100,000
Letter of credit | $ 200,000 |  |  |  |
Stockholder Actions (Putative Stockholder Class Action Complaints) | Settled Litigation |  |  |  |  |
Schedule of Equity Method Investments [Line Items] |  |  |  |  |
Number of settled claims | claims | 2 |  |  |  |
Estimate of possible loss | $ 325,000 |  |  |  |

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