# Filing Detail

Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0000720500-16-000081
Filing Date
2016-02-09
Accepted
2016-02-09 17:21:18
Documents
59
Period of Report
2015-12-31

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | 10-Q | asys123115-10q.htm | 10-Q | 705863
2 | EXHIBIT 31.1 | asys123115-ex311.htm | EX-31.1 | 14145
3 | EXHIBIT 31.2 | asys123115-ex312.htm | EX-31.2 | 14185
4 | EXHIBIT 32.1 | asys123115-ex321.htm | EX-32.1 | 7117
5 | EXHIBIT 32.2 | asys123115-ex322.htm | EX-32.2 | 7154
| Complete submission text file | 0000720500-16-000081.txt |  | 5021636

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
6 | XBRL INSTANCE DOCUMENT | asys-20151231.xml | EX-101.INS | 1017656
7 | XBRL TAXONOMY EXTENSION SCHEMA DOCUMENT | asys-20151231.xsd | EX-101.SCH | 35205
8 | XBRL TAXONOMY EXTENSION CALCULATION LINKBASE DOCUMENT | asys-20151231_cal.xml | EX-101.CAL | 73496
9 | XBRL TAXONOMY EXTENSION DEFINITION LINKBASE DOCUMENT | asys-20151231_def.xml | EX-101.DEF | 208573
10 | XBRL TAXONOMY EXTENSION LABEL LINKBASE DOCUMENT | asys-20151231_lab.xml | EX-101.LAB | 580803
11 | XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE DOCUMENT | asys-20151231_pre.xml | EX-101.PRE | 334418

Mailing Address 131 SOUTH CLARK DRIVE TEMPE AZ 85281
Business Address 131 S CLARK DR TEMPE AZ 85281 6029675146
AMTECH SYSTEMS INC (Filer) CIK: 0000720500 (see all company filings)

EIN.: 860411215 | State of Incorp.: AZ | Fiscal Year End: 0930
Type: 10-Q | Act: 34 | File No.: 000-11412 | Film No.: 161401092
SIC: 3559 Special Industry Machinery, NEC