# Filing Detail

Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0000720500-16-000101
Filing Date
2016-05-05
Accepted
2016-05-05 16:08:14
Documents
59
Period of Report
2016-03-31

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | 10-Q | asys33116-10q.htm | 10-Q | 881918
2 | EXHIBIT 10.1 | asys101andersonamendmentto.htm | EX-10.1 | 15529
3 | EXHIBIT 10.2 | asys102keytermsforrobertha.htm | EX-10.2 | 16152
4 | EXHIBIT 31.1 | asys33116-ex311.htm | EX-31.1 | 14186
5 | EXHIBIT 31.2 | asys33116-ex312.htm | EX-31.2 | 14498
6 | EXHIBIT 32.1 | asys33116-ex321.htm | EX-32.1 | 7155
7 | EXHIBIT 32.2 | asys33116-ex322.htm | EX-32.2 | 7480
| Complete submission text file | 0000720500-16-000101.txt |  | 5499536

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
8 | XBRL INSTANCE DOCUMENT | asys-20160331.xml | EX-101.INS | 1189364
9 | XBRL TAXONOMY EXTENSION SCHEMA DOCUMENT | asys-20160331.xsd | EX-101.SCH | 34170
10 | XBRL TAXONOMY EXTENSION CALCULATION LINKBASE DOCUMENT | asys-20160331_cal.xml | EX-101.CAL | 70665
11 | XBRL TAXONOMY EXTENSION DEFINITION LINKBASE DOCUMENT | asys-20160331_def.xml | EX-101.DEF | 200196
12 | XBRL TAXONOMY EXTENSION LABEL LINKBASE DOCUMENT | asys-20160331_lab.xml | EX-101.LAB | 575562
13 | XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE DOCUMENT | asys-20160331_pre.xml | EX-101.PRE | 327634

Mailing Address 131 SOUTH CLARK DRIVE TEMPE AZ 85281
Business Address 131 S CLARK DR TEMPE AZ 85281 6029675146
AMTECH SYSTEMS INC (Filer) CIK: 0000720500 (see all company filings)

EIN.: 860411215 | State of Incorp.: AZ | Fiscal Year End: 0930
Type: 10-Q | Act: 34 | File No.: 000-11412 | Film No.: 161623724
SIC: 3559 Special Industry Machinery, NEC