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Long-term Debt (Details) - USD ($) $ in Millions | 9 Months Ended |  |
--- | --- | --- | ---
Jun. 30, 2016 | Jan. 30, 2015 | Dec. 31, 2014
BTU International, Inc (BTU) Merger |  |  |
Debt Instrument [Line Items] |  |  |
Long-term debt acquired |  | $ 7.2 |
SoLayTec, B.V. |  |  |
Debt Instrument [Line Items] |  |  |
Long-term debt acquired |  |  | $ 2.0
Long-term debt | $ 3.7 |  |
Proceeds from issuance of debt | $ 1.1 |  |
SoLayTec, B.V. | Minimum |  |  |
Debt Instrument [Line Items] |  |  |
Interest rate | 5.95% |  |
SoLayTec, B.V. | Maximum |  |  |
Debt Instrument [Line Items] |  |  |
Interest rate | 10.00% |  |
Mortgage Note | BTU International, Inc (BTU) Merger |  |  |
Debt Instrument [Line Items] |  |  |
Long-term debt | $ 6.6 |  |
Interest rate |  | 4.40% |
Federal Home Loan Board Five Year Classic Advance Rate | Mortgage Note |  |  |
Debt Instrument [Line Items] |  |  |
Basis spread on variable rate | 240.00% |  |

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- Definition Amount of long-term debt due after one year or the normal operating cycle, if longer, assumed at the acquisition date. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 805 -SubTopic 20 -Section 50 -Paragraph 1 -Subparagraph (c) -URI http://asc.fasb.org/extlink&oid=56956791&loc=d3e4845-128472 + Details
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- Definition Carrying amount of long-term debt, net of unamortized discount or premium, including current and noncurrent amounts. Includes, but not limited to, notes payable, bonds payable, debentures, mortgage loans and commercial paper. Excludes capital lease obligations. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 942 -SubTopic 210 -Section S99 -Paragraph 1 -Subparagraph (SX 210.9-03.16) -URI http://asc.fasb.org/extlink&oid=6876686&loc=d3e534808-122878 Reference 2: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 210 -SubTopic 10 -Section S99 -Paragraph 1 -Subparagraph (SX 210.5-02.22) -URI http://asc.fasb.org/extlink&oid=6877327&loc=d3e13212-122682 Reference 3: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 944 -SubTopic 210 -Section S99 -Paragraph 1 -Subparagraph (SX 210.7-03.16) -URI http://asc.fasb.org/extlink&oid=6879938&loc=d3e572229-122910 Reference 4: http://www.xbrl.org/2003/role/presentationRef -Publisher SEC -Name Regulation S-X (SX) -Number 210 -Section 02 -Paragraph 20, 22 -Article 5 + Details
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