<SEC-DOCUMENT>0000893838-16-000083-index.html : 20160125
<SEC-HEADER>0000893838-16-000083.hdr.sgml : 20160125
<ACCEPTANCE-DATETIME>20160125165050
ACCESSION NUMBER:		0000893838-16-000083
CONFORMED SUBMISSION TYPE:	SC 13D
PUBLIC DOCUMENT COUNT:		1
FILED AS OF DATE:		20160125
DATE AS OF CHANGE:		20160125
GROUP MEMBERS:		M3C HOLDINGS LLC
GROUP MEMBERS:		OIH LLC
GROUP MEMBERS:		PITON CAPITAL PARTNERS LLC
GROUP MEMBERS:		ROBERT AVERICK

SUBJECT COMPANY:	

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			AMTECH SYSTEMS INC
		CENTRAL INDEX KEY:			0000720500
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				860411215
		STATE OF INCORPORATION:			AZ
		FISCAL YEAR END:			0930

	FILING VALUES:
		FORM TYPE:		SC 13D
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	005-39482
		FILM NUMBER:		161359217

	BUSINESS ADDRESS:	
		STREET 1:		131 S CLARK DR
		CITY:			TEMPE
		STATE:			AZ
		ZIP:			85281
		BUSINESS PHONE:		6029675146

	MAIL ADDRESS:	
		STREET 1:		131 SOUTH CLARK DRIVE
		CITY:			TEMPE
		STATE:			AZ
		ZIP:			85281

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	QUARTZ ENGINEERING & MATERIALS INC
		DATE OF NAME CHANGE:	19870715

FILED BY:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			Schreyer Leslie J
		CENTRAL INDEX KEY:			0001416442

	FILING VALUES:
		FORM TYPE:		SC 13D

	MAIL ADDRESS:	
		STREET 1:		C/O CHADBOURNE & PARKE LLP
		STREET 2:		30 ROCKEFELLER PLAZA
		CITY:			NEW YORK
		STATE:			NY
		ZIP:			10112
</SEC-HEADER>
<DOCUMENT>
<TYPE>SC 13D
<SEQUENCE>1
<FILENAME>sc13damtech.htm
<DESCRIPTION>SCHEDULE 13D
<TEXT>
Document 1 - file: sc13damtech.htm

</DOCUMENT>
</SEC-DOCUMENT>